Coating Equipment

Abstract

To provide an application device that can dry an applied film just after the film is applied with application liquid by an applicator, and further suppress film-thickness accuracy from deteriorating.SOLUTION: The application device is provided with a stage on which a substrate is placed, and an applicator that forms an applied film on the substrate by discharging of application liquid from a nozzle, while moving relatively with respect to the substrate placed on the stage. In the applicator, a drier which dries the applied film formed by discharging of the application liquid from the nozzle, by supplying air to the applied film is provided at the opposite side of a side at which application is progressed. Between the applicator and the drier is provided a vibration-proof member that can suppress vibrations from influencing the applicator.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a coating apparatus that applies a coating liquid onto a substrate, and more particularly to a coating apparatus that dries a coating liquid immediately after it is discharged. [Background technology]

[0002] In recent years, substrates W on which a uniform thin film has been formed (referred to as coated substrates) are used for various purposes. For example, when forming a coating film of uniform thickness on a substrate, the coating film is formed by a coating device having a slit-shaped nozzle. As shown in FIG. 6, this coating device has a stage 100 on which the substrate W is placed, and a coater 101 having a slit-shaped nozzle for discharging a coating liquid, and the substrate W and the coater 101 are moved relatively while discharging the coating liquid from the slit of the nozzle, so that a coating film C of a predetermined thickness is formed on the substrate W.

[0003] Then, the coated substrate W thus formed is carried out from the coating apparatus and then dried by a drying apparatus 102 separate from the coating apparatus (see, for example, Patent Document 1 below). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2010-034309 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, the above-mentioned coating device has a problem in that the functionality of the formed coating film C cannot be fully exhibited. That is, in recent years, some materials have the characteristics that they stably exhibit their functionality by being dried immediately after being applied as the coating film C, and such materials are used, for example, as materials for perovskite solar cells. In the above-mentioned coating device, after the coating film C is formed, it takes time to be transported to another drying device 102, and this time affects the crystalline state of the coating film C, and there has been a problem in that the functionality of the material is difficult to stably exhibit.

[0006] The present invention has been made in consideration of the above-mentioned problems, and aims to provide a coating device that can dry a coating film immediately after it is applied by an applicator and further suppress a decrease in film thickness accuracy. [Means for solving the problem]

[0007] In order to solve the above problems, the coating apparatus of the present invention is a coating apparatus comprising a stage on which a substrate is placed, and an applicator that moves relative to the substrate placed on the stage while ejecting a coating liquid from a nozzle to form a coating film on the substrate, and the applicator is provided with a dryer on the opposite side to the side where coating proceeds, which supplies air to the coating film formed by ejecting from the nozzle, and is characterized in that a vibration-damping member is provided between the applicator and the dryer to suppress the effects of vibration of the dryer.

[0008] According to the coating device, since the dryer is provided on the side opposite to the coating progress side, the coating film can be dried immediately after it is discharged from the nozzle and formed. That is, the drying of the formed coating film is promoted by supplying air from the dryer. When air is supplied from the dryer, the vibration is transmitted to the coater and further to the coating liquid (bead 103) connecting the nozzle and the substrate W, thereby affecting the accuracy of the thickness of the coating film. However, by providing a vibration-proof member between the coater and the dryer, it is possible to suppress the vibration generated from the dryer from being transmitted to the coater. As a result, the coating film can be dried immediately after it is applied by the coater, and further, it is possible to suppress a decrease in the thickness accuracy of the formed coating film.

[0009] The vibration-isolating member may have a flat plate shape and be formed with a dimension at least equal to or greater than the discharge width of the applicator through which the application liquid is discharged.

[0010] According to this configuration, the vibration-isolating member can suppress the effect of vibration on the applicator across the discharge width of the applicator.

[0011] The dryer has an air discharge portion from which air is discharged, and the vibration-proof member is to a position lower than The insulating film 21 may be configured to be elongated.

[0012] With this configuration, the vibration-proof member plays a role in blocking the air flow, thereby preventing the air discharged from the air discharge portion from directly hitting the bead. In other words, the vibration-proof member not only suppresses vibrations caused by the dryer, but also functions as a straightening plate, thereby preventing a decrease in the film thickness accuracy of the coating film caused by providing the dryer to the applicator.

[0013] The vibration isolating member may be formed to extend to a position closer to the substrate than the position of the nozzle.

[0014] According to this configuration, it is possible to more reliably prevent the air from the dryer from directly hitting the beads.

[0015] The air discharge portion may be configured so that the direction of the discharged air is adjusted so that the air directly hits the vibration-proof member.

[0016] According to this configuration, the air discharged from the air discharge portion hits the vibration-proof member once before being supplied to the coating film, so the force of the air can be reduced compared to when the air hits the coating film directly, and the coating film can be dried by indirectly supplying air. In other words, the coating film can be dried while preventing the air flow from affecting the coating film and causing coating unevenness.

[0017] The air supplied from the dryer may be heated by a heater.

[0018] According to this configuration, the drying of the coating film can be promoted by supplying heated air. Effect of the Invention

[0019] According to the coating device of the present invention, the coating film can be dried immediately after being coated by the coater, and deterioration in film thickness accuracy can be suppressed. [Brief description of the drawings]

[0020] [Figure 1] 1 is a perspective view showing a coating apparatus according to an embodiment of the present invention; [Diagram 2] FIG. 4 is a schematic view showing the vicinity of a leg of the application unit. [Diagram 3] FIG. 2 is a cross-sectional view of an applicator provided with a dryer. [Figure 4] FIG. 4 is a diagram showing a state in which a coating liquid is discharged from the applicator. [Diagram 5] 13 is a diagram showing a state in which application liquid is discharged from an applicator in another embodiment. FIG. [Figure 6] FIG. 1 is a diagram showing a conventional coating device and drying device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings.

[0022] FIG. 1 is a perspective view showing a schematic configuration of an application device according to one embodiment of the present invention, FIG. 2 is a view showing the area around the legs of an application unit, and FIG. 3 is a view showing an applicator equipped with a dryer.

[0023] As shown in Figures 1 to 3, the coating device forms a coating film of a liquid material such as a chemical solution or a resist liquid (hereinafter referred to as a coating liquid) on a substrate W, and is equipped with a base 2, a stage 21 for placing the substrate W on, and a coating unit 30 configured to be movable in a specific direction relative to the stage 21.

[0024] In the following explanation, the direction in which the coating unit 30 moves is defined as the X-axis direction, the direction perpendicular to this on the horizontal plane is defined as the Y-axis direction, and the direction perpendicular to both the X-axis and Y-axis directions is defined as the Z-axis direction.

[0025] A stage 21 is disposed in the center of the base 2. The stage 21 is used to place the loaded substrate W. The stage 21 is provided with a substrate mounting surface 21a on which the substrate W is placed, and a substrate holding means (not shown), which holds the substrate W. Specifically, a plurality of suction holes are formed in the substrate mounting surface 21a of the stage 21, and a suction force is generated in the suction holes, so that the substrate W can be attracted to and held on the substrate mounting surface 21a.

[0026] The stage 21 is also provided with a substrate lifting mechanism for raising and lowering the substrate W. Specifically, a plurality of pin holes are formed in the surface of the stage 21, and lift pins (not shown) capable of raising and lowering in the Z-axis direction are embedded in the pin holes. That is, when the substrate W is loaded with the lift pins protruding from the surface of the stage 21, the tip portions of the lift pins come into contact with the substrate W to hold the substrate W. Then, by lowering the lift pins from this state and storing them in the pin holes, the substrate W can be placed on the substrate placement surface 21a.

[0027] The coating unit 30 ejects a coating liquid onto the substrate W to form a coating film C. As shown in Figs. 1 and 2, the coating unit 30 has legs 31 connected to the base 2 and an applicator 34 extending in the Y-axis direction, and is attached to the base 2 so as to be movable in the X-axis direction while straddling the Y-axis direction. Specifically, rails 22 extending in the X-axis direction are provided at both ends of the base 2 in the Y-axis direction, and the legs 31 are attached to the rails 22 so as to be slidable. A linear motor is attached to the legs 31, and the coating unit 30 can be moved in the X-axis direction and stopped at any position by controlling the driving of the linear motor.

[0028] 2, an applicator 34 for applying a coating liquid is attached to the leg 31 of the coating unit 30. Specifically, the leg 31 is provided with a rail 37 extending in the Z-axis direction and a slider 35 that slides along the rail 37, and the slider 35 and the applicator 34 are connected. A ball screw mechanism driven by a servo motor is attached to the slider 35, and by controlling the drive of the servo motor, the slider 35 moves in the Z-axis direction and can be stopped at any position. That is, the applicator 34 is supported so as to be able to approach and separate from the substrate W held by the stage 21.

[0029] As shown in FIGS. 1 to 3, the applicator 34 discharges the coating liquid to form a coating film C on the substrate W. The applicator 34 is a columnar member having a shape extending in one direction, and is provided so as to be substantially perpendicular to the traveling direction of the coating unit 30. The applicator 34 has a side portion 34b extending in the vertical direction, and a substrate-facing surface 34d facing the substrate W via an inclined surface portion 34c formed in an inclined manner from the side portion 34b. A slit nozzle 34a is formed on the substrate-facing surface 34d, and the coating liquid is discharged from the slit nozzle 34a. That is, the slit nozzle 34a is formed on the substrate-facing surface 34d of the applicator 34 so as to extend in the longitudinal direction, and the coating liquid supplied to the applicator 34 is discharged uniformly from the slit nozzle 34a along the longitudinal direction. Therefore, by moving the coating unit 30 in the X-axis direction with the coating liquid being discharged from the slit nozzle 34a, a coating film C of a constant thickness is formed on the substrate W along the longitudinal direction of the slit nozzle 34a. In this embodiment, the direction in which the coating unit 30 moves with the coating liquid being discharged from the slit nozzle 34a to apply the coating liquid is referred to as the coating direction, and the coating direction side is referred to as the coating proceeding side.

[0030] The coater 34 is also provided with a dryer 40. The dryer 40 dries the coating film C formed on the substrate W. Here, drying does not only mean complete drying, but also includes drying to a semi-dry state and drying to a degree that promotes crystallization of the material compared to drying in the air.

[0031] In this embodiment, the dryer 40 is attached integrally to the coater 34 so as to be adjacent to the side opposite to the coating proceeding side. That is, when the coater 34 moves in the coating proceeding direction while discharging the coating liquid, the dryer 40 moves integrally with the coater 34, and immediately after the coating film C is formed on the substrate W, the coating film C is dried by the dryer 40.

[0032] The dryer 40 is provided along the longitudinal direction of the applicator 34, and has an air blower 41 that supplies air. In this embodiment, the air blower 41 is disposed adjacent to the applicator 34.

[0033] The air blower 41 supplies air to the coating film C formed on the substrate W. In this embodiment, the air blower 41 has an air blower main body 411 and an air discharger 42, and air stored in the air blower main body 411 is blown out through the air discharger 42.

[0034] The blower main body 411 has a box shape and is formed in a shape extending in the longitudinal direction along the side portion 34b of the applicator 34. In this embodiment, it is formed to have a dimension longer than the longitudinal dimension of the slit nozzle 34a. In addition, the blower main body 411 is provided with a cavity 41b for storing air to be supplied to the coating film C, and air supplied from an air supply source (not shown) can be temporarily stored in the cavity 41b. The cavity 41b is formed in a shape extending in the longitudinal direction, and is connected to the air discharge portion 42 by a communication flow path 43 formed narrower than the cavity 41b. Therefore, when air is supplied to the cavity 41b, it spreads throughout the cavity 41b and is temporarily stored, and by passing through the narrow communication flow path 43, air is uniformly supplied to the air discharge portion 42 in the longitudinal direction.

[0035] The air discharge section 42 is for guiding the air supplied to the blower main body 411 to the coating film C. The air discharge section 42 has an opening 34c from which the air is discharged, and in the example of FIG. 3, it is formed vertically downward. This opening 34c is connected in communication with the communication flow path 43, and when the air supply source is operated, the air in the cavity 41b is discharged from the opening 43c through the communication flow path 43. The height position of the opening 41c is formed to extend to the vicinity of the height position of the slit nozzle 34a. In the example of FIG. 3, it is formed to a position slightly higher than the height position of the slit nozzle 34a, that is, to a height position that does not abut against the coating film C formed on the substrate W. As a result, when the air supply source is operated, the air in the cavity 41b is discharged from the opening 41c through the communication flow path 43, and the air can be guided to the coating film C immediately after it is formed by discharging the coating liquid from the slit nozzle 34a.

[0036] The opening 41c of the air discharge part 42 is formed in a slit shape and is formed to extend in the longitudinal direction of the applicator 34. The longitudinal dimension of the opening 41c is formed to be approximately the same as the longitudinal dimension of the slit nozzle 34a of the applicator 34. Therefore, the air discharged from the air discharge part 42 is supplied approximately uniformly across the width direction of the formed coating film C.

[0037] In addition, a vibration-proof member 60 is provided between the dryer 40 and the applicator 34. This vibration-proof member 60 is intended to suppress the effects of vibration on the applicator 34. In other words, when air is discharged from the dryer 40, vibrations of the dryer 40 itself, vibrations caused by the air flowing in from the air supply source, and vibrations of the discharged air occur, so the vibration-proof member 60 can block the effects of these vibrations as much as possible and suppress the transmission of vibrations to the applicator 34.

[0038] The vibration-proof member 60 can be made of a versatile vibration-proof material such as a rubber material, a silicon material, or a urethane material, and is selected from those that have chemical resistance and heat resistance to withstand the coating environment. In this embodiment, the vibration-proof member 60 is formed in a flat plate shape of uniform thickness and is fixed adjacent to the dryer 40 and the applicator 34. The vibration-proof member 60 is formed to the same dimensions as the longitudinal dimensions of the applicator 34 and the dryer 40, and is provided so as to be interposed between the applicator 34 and the dryer 40 over the entire longitudinal direction of the applicator 34 and the dryer 40. That is, since the vibration-proof member 60 is formed to a dimension at least equal to or larger than the discharge width of the slit nozzle 34a from which the coating liquid is discharged, even if vibration occurs from the dryer 40, the vibration is absorbed in the longitudinal direction by the vibration-proof member 60, so that the vibration can be prevented from being transmitted to the applicator 34.

[0039] Further, the vibration-proof member 60 is provided so as to cover the entire side surface of the blower main body 411, and is formed to extend to a position lower in height than the air discharge portion 42. In the example of Fig. 3, the vibration-proof member 60 is formed to extend to a position lower in height than the slit nozzle 34a (a position closer to the substrate W side). This makes it possible to suppress the air discharged from the air discharge portion 42 from affecting the coating liquid (bead B) connecting the slit nozzle 34a and the substrate W.

[0040] Specifically, as shown in FIG. 4, the air discharged from the air discharge unit 42 is discharged in the direction in which the opening 41c opens, that is, vertically downward in the example of FIG. 3 and FIG. 4, and is blown out toward the coating film C formed on the substrate W. The blown out air hits the coating film C directly, but the wind pressure is adjusted to such an extent that the impact of the air does not cause coating unevenness on the coating film C. The air blown out from the air discharge unit 42 flows toward the coating film C and also flows with a certain spread, so that some of the air flows toward the bead B side, and some of the air hits the coating film C and flows toward the bead B side. However, since the vibration-proof member 60 extends to a position lower than the air discharge unit 42 (a position lower than the height position of the slit nozzle 34a in the example of FIG. 3 and FIG. 4), it is possible to block some of the air that tries to flow toward the bead B side, and it is possible to suppress the air that hits the bead directly. The amount by which the air flowing toward the bead B is suppressed can be adjusted by the gap dimension between the vibration-proof member 60 and the formed coating film C, and the effect on the bead B can be effectively suppressed by extending the vibration-proof member 60 to an extent that it does not come into contact with the coating film C. In this way, the vibration-proof member 60 can also function as a straightening plate for the air from the air discharge portion 42.

[0041] In this way, according to the coating device in the above embodiment, since the dryer 40 is provided on the side opposite to the coating progress side, the coating film C can be dried immediately after it is discharged from the slit nozzle 34a and formed. That is, the drying of the formed coating film C is promoted by supplying air from the dryer 40. When air is supplied from the dryer 40, the vibration is transmitted to the coater 34, and further transmitted to the coating liquid (bead B) connecting the slit nozzle 34a and the substrate W, thereby affecting the accuracy of the thickness of the coating film C. However, by providing the vibration-proof member 60 between the coater 34 and the dryer 40, the vibration generated from the dryer 40 can be suppressed from being transmitted to the coater 34. As a result, the coating film C can be dried immediately after it is applied by the coater 34, and further, a decrease in the thickness accuracy of the formed coating film C can be suppressed.

[0042] In the above embodiment, the air discharged from the air discharge portion 42 of the dryer 40 is discharged vertically downward toward the coating film C, but the air discharged from the air discharge portion 42 may be adjusted to directly hit the vibration-proof member 60. Specifically, as shown in FIG. 5, a spacer S is interposed between the dryer 40 and the vibration-proof member 60, and the opening 41c of the dryer 40 is attached in a position facing the vibration-proof member 60. As a result, the air discharged from the air discharge portion 42 hits the vibration-proof member 60 once and then flows to the coating film C, thereby preventing the discharged air from directly hitting the coating film C and allowing the air to be supplied indirectly. That is, since the force of the air can be suppressed compared to when the air hits the coating film C directly, the drying of the coating film C can be promoted in a state where coating unevenness is unlikely to be formed on the coating film C even if the amount of air supplied from the air discharge portion 42 is increased. Even in this embodiment, vibrations caused by the dryer 40 are transmitted via the spacer S, but the vibration-proof member 60 can prevent the vibrations from being transmitted to the applicator 34.

[0043] In addition, in the above embodiment, an example of a flat plate-shaped vibration-damping member 60 was described, but any shape may be used as long as it is interposed between the applicator 34 and the dryer 40, and it does not have to have a shape that extends uniformly in the longitudinal direction, and it may be arranged intermittently in the longitudinal direction.

[0044] Furthermore, in the above embodiment, an example was described in which the vibration-damping member 60 extends to a position lower than the height position of the air discharge portion 42. However, even if the vibration-damping member 60 is higher than the height position of the air discharge portion 42, as long as the vibration-damping member 60 is interposed between the applicator 34 and the dryer 40, vibrations caused by at least the dryer 40 can be suppressed.

[0045] In the above embodiment, an example has been described in which the air supplied from blower 41 has the temperature of the air supply source (the temperature of the space in which the coating device is installed), but a heater may be provided between the air supply source and blower 41, and air heated by the heater may be supplied. For example, by setting the temperature to about 35°C to 45°C, which is slightly higher than the temperature of the space in which the coating device is installed, the drying of the coating film C can be promoted compared to the case in which the air from the air supply source is used as is.

[0046] Further, in the above embodiment, an example was described in which the applicator 34 has a slit nozzle 34a, but the ejection method is not particularly limited as long as the applicator is an applicator (e.g., inkjet) that moves in one direction and requires drying immediately after forming the coating film C. [Explanation of symbols]

[0047] 21 Stage 30 Coating unit 34 Applicator 34a Slit nozzle 40 Dryer 41C opening B Bead P liquid landing point S Spacer W substrate

Claims

1. A stage on which a substrate is placed; A substrate is moved relative to the stage. a coater that ejects a coating liquid from a nozzle to form a coating film on a substrate; A coating apparatus comprising: The coating device is characterized in that the applicator is provided with a dryer on the side opposite to the side where the coating proceeds, which dries the coating film formed by ejecting from the nozzle by supplying air to the coating film, and a vibration-damping member is provided between the applicator and the dryer to suppress the effects of vibration of the dryer.

2. 2. The coating device according to claim 1, wherein the vibration-isolating member has a flat plate shape and is formed to have a dimension at least equal to or larger than a discharge width of the applicator through which the coating liquid is discharged.

3. 3. The coating apparatus according to claim 1, wherein the dryer has an air discharge portion for discharging air, and the vibration-proof member is formed so as to extend to a position lower than the air discharge portion.

4. 4. The coating apparatus according to claim 1, wherein the vibration isolating member is formed to extend to a position closer to the substrate than the position of the nozzle.

5. 4. The coating device according to claim 3, wherein a direction of the air discharged from the air discharge portion is adjusted so that the air directly hits the vibration-proof member.

6. 6. The coating apparatus according to claim 3, wherein the air supplied from the dryer is heated by a heater.

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