Cooling equipment, drying and cooling system, and cooling air humidity control method

Abstract

To make it possible to control moisture in cooling air flowing into a cooling device.SOLUTION: A cooling facility 101 comprises a cooling device 101f that cools a treating object 1, a heat exchanger 112 for cooling air, into which outdoor air flows, a heat pump 10, an outdoor air introduction channel 111, a cooling air introduction channel 114, a cooling water circulation channel 20, an air flowrate controller 117, an outdoor air inlet temperature detector 201, an outdoor air inlet moisture detector 202, a cooling heat exchanger outlet temperature detector 203, and a moisture controller 200 that controls the air flowrate controller 117 according to the outputs from the outdoor air inlet temperature detector 201, the outdoor air inlet moisture detector 202 and the cooling heat exchanger outlet temperature detector 203 so that the relative humidity of the outlet air becomes equal to a prescribed value.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a cooling facility, a drying and cooling system, and a cooling air humidity control method. [Background technology]

[0002] After a painting process, a treatment target such as a painted object including a vehicle is heated and dried in a drying furnace, and then cooled to room temperature in a cooling furnace, which is a cooling device.

[0003] In some cases, a heat pump is used as both a cooling source for cold water to cool the cooling air supplied to the cooling furnace and an auxiliary heating source for the heating air supplied to the drying furnace.

[0004] When using a heat pump, it is preferable to operate it under conditions that maximize its coefficient of performance (COP), since this minimizes the amount of energy consumed. Changing the operating conditions of the heat pump in response to fluctuations in the heating or cooling load is not preferable, as this results in deviation from the maximum COP. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 5116042 Summary of the Invention [Problem to be solved by the invention]

[0006] The cooling air supplied to the cooling furnace is the outside air that has flowed into the cold air heat exchanger and cooled by the cold water cooled by the heat pump. When the heat pump is operated at maximum COP, the condition of the cold water on the cooling side of the cold air heat exchanger is almost constant.

[0007] Therefore, the state of the cooling air depends heavily on the state of the outside air. In particular, when the relative humidity of the outside air is high, moisture, i.e., water droplets, may be generated from the cooling air supplied to the cooling furnace due to being cooled by the cold air heat exchanger. If water droplets flow into the cooling furnace together with the cooling air, it may have a negative effect on the quality of the objects.

[0008] SUMMARY OF THE PRESENT DISCLOSURE An object of the present invention is to make it possible to control the humidity of cooling air flowing into a cooling device. [Means for solving the problem]

[0009] In order to achieve the above object, the cooling equipment according to the present invention includes a cooling device for cooling an object to be treated, an air-cooling heat exchanger into which outside air flows, is cooled by cold water, and flows out as cooled air, a heat pump for cooling the cold water, an outside air introduction flow path section for introducing the outside air into the air-cooling heat exchanger, a cooled air introduction flow path section for introducing the cooled air from the air-cooling heat exchanger into the cooling device, a cooling water circulation flow path for circulating the cold water between the air-cooling heat exchanger and the heat pump, an air volume adjustment device provided in the outside air introduction flow path section or the cooled air introduction flow path section for adjusting a flow rate of the cooled air, an outside air inlet temperature detector and an outside air inlet humidity detector for measuring the temperature and relative humidity of the outside air at the inlet of the air-cooling heat exchanger, respectively, a cooling heat exchange outlet temperature detector for measuring the temperature of the cooled air at the outlet of the air-cooling heat exchanger, and the outside air inlet temperature detector. a dew point temperature determined based on the output of the outside air inlet temperature detector and the output of the outside air inlet humidity detector; and a humidity control device that controls the flow rate of the cooling air by instructing the air volume adjustment device based on the output of the cooling heat exchange outlet temperature detector so that the relative humidity of the cooling air becomes a predetermined value.

[0010] Furthermore, a cooling air humidity control method according to the present invention controls humidity of the cooling air in a cooling facility including a cooling device for cooling an object to be treated, an air-cooling heat exchanger in which outside air is cooled using a heat pump as a cooling source and flows out as cooled air, a cooling air introduction flow path section for introducing the cooled air from the air-cooling heat exchanger to the cooling device, an air volume adjustment device for adjusting a flow rate of the cooled air, an outside air inlet temperature detector and an outside air inlet humidity detector for measuring the temperature and relative humidity of the outside air at an inlet of the air-cooling heat exchanger, respectively, a cooling heat exchanger outlet temperature detector for measuring the temperature of the cooled air at an outlet of the air-cooling heat exchanger, and a humidity control device for controlling the flow rate of the cooled air by instructing the air volume adjustment device based on outputs of the outside air inlet temperature detector, the outside air inlet humidity detector, and the cooling heat exchanger outlet temperature detector so that the relative humidity of the cooled air becomes a predetermined value. And, a dew point temperature deriving unit of the humidity control device based on outputs of the outside air inlet temperature detector and the outside air inlet humidity detector Based on A step of deriving a dew point temperature of the introduced outside air using a psychrometric chart database stored in the humidity control device; and a heat exchange outlet temperature target value derivation unit of the humidity control device based on the dew point temperature. Based on The method is characterized by having a step of calculating a heat exchange outlet temperature target value using temperature target data stored in the humidity control device, and a step in which a humidity control calculation unit of the humidity control device calculates a command to the air volume adjustment device based on the output of the cooling heat exchange outlet temperature detector and the heat exchange outlet temperature target value so that the temperature of the cooling air at the outlet of the air cooling heat exchanger becomes the heat exchange outlet temperature target value. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a block diagram showing the configuration of a drying / cooling system according to a first embodiment. [Diagram 2] 1 is a block diagram showing a configuration of a humidity control device for a cooling facility according to a first embodiment. [Diagram 3] FIG. 2 is a conceptual psychrometric chart for explaining calculation of a dew point temperature. [Figure 4]FIG. 2 is a flowchart showing the procedure of a cooling air humidity control method according to the first embodiment. [Diagram 5] FIG. 11 is a block diagram showing the configuration of a drying / cooling system according to a second embodiment. [Figure 6] FIG. 11 is a block diagram showing the configuration of a humidity control device for a cooling facility according to a second embodiment. [Figure 7] FIG. 6 is a flowchart showing the procedure of a cooling air humidity control method according to a second embodiment. [Figure 8] FIG. 11 is a block diagram showing the configuration of a drying / cooling system according to a third embodiment. [Figure 9] FIG. 11 is a block diagram showing the configuration of a humidity control device for a cooling facility according to a third embodiment. [Figure 10] FIG. 11 is a flowchart showing the procedure of a cooling air humidity control method according to a third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, a cooling facility, a drying / cooling system, and a cooling air humidity control method according to an embodiment of the present invention will be described with reference to the drawings. Hereinafter, the same or similar parts will be denoted by the same reference numerals, and duplicated descriptions will be omitted.

[0013] [First embodiment] 1 is a block diagram showing the configuration of a drying / cooling system 100 according to the first embodiment. The drying / cooling system 100 includes a cooling facility 101, a drying facility 102, and a transport device 103 that moves an object to be treated 1 from the drying facility 102 to the cooling facility 101.

[0014] The cooling facility 101 includes a cooling furnace 101f which is a cooling device, a heat pump 10, a cooling water circulation passage 20, a cooling air supply device 110 which supplies air for cooling (cooling air) to the cooling furnace 101f, and a humidity control device 200.

[0015] The drying facility 102 includes a drying oven 102f, which is a drying device, and a heated air supplying device 120 that supplies air for heating to the drying oven 102f.

[0016] The treatment object 1 in the drying / cooling system 300 is first transported by the transport device 103 to the drying furnace 102f of the drying equipment 102 and subjected to a heating / drying treatment, and then transported to the cooling furnace 101f of the cooling equipment 101 and subjected to a cooling treatment.

[0017] The flow path portion constituting the air or gas flow path may be a pipe or a duct as appropriate. In the following, a pipe is shown as an example of this flow path portion, but is not limited to this and may be, for example, a duct. In the flow path portion, a damper, a valve, or the like may be used as an adjustment portion that stops or allows the flow of air or gas or controls the flow rate. In the following, a damper is shown as an example of this adjustment portion, but is not limited to this and may be, for example, a valve, or the like depending on the application.

[0018] First, the heat pump 10, the cooling water circulation flow path 20, the cooled air supply device 110, and the humidity control device 200 of the cooling equipment 101 will be described in order below.

[0019] The heat pump 10 is provided as a heating source for the heated air supply device 120 and a cooling source for the cooled air supply device 110. The heat pump 10 has an evaporator 11, a compressor 12, a condenser 13, an expansion valve 14, and a built-in fan 15. The evaporator 11 has a heat absorbing function and serves as a cooling source for the cooled air supply device 110. The condenser 13 has a heat generating function and serves as an auxiliary heat source for the heated air supply device 120.

[0020] Next, the cooling air supply device 110 will be described in detail.

[0021] The cooling air supply device 110 has an outside air inlet pipe 111 , an air cooling heat exchanger 112 , a cooling heat exchange bypass pipe 113 , a cooling air inlet pipe 114 , a cooling fan 117 , and a cooling air exhaust pipe 118 .

[0022] The outside air introduction pipe 111 introduces outside air into the air-cooling heat exchanger 112. The outside air introduction pipe 111 is provided with a cooling heat exchanger inlet damper 111a. The outside air introduction pipe 111 is also provided with an outside air inlet temperature detector 201 and an outside air inlet humidity detector 202 that detect the temperature and humidity of the outside air introduced into the air-cooling heat exchanger 112, respectively.

[0023] The air-cooling heat exchanger 112 cools the outside air introduced through the outside air introduction pipe 111. The cooling side of the air-cooling heat exchanger 112 is the cooling water of the cooling water circulation flow path 20. Here, the cooling water circulation flow path 20 has a low-temperature flow path section 20a which is a cooling water flow path cooled by the evaporator 11 of the heat pump 10, a high-temperature flow path section 20b which returns from the air-cooling heat exchanger 112 to the evaporator 11 side, and a cooling water pump 21 arranged in the low-temperature flow path section 20a.

[0024] Here, in order to maintain the COP of the heat pump 10 at a maximum, it is necessary to maintain the temperature of the coolant in each of the low-temperature flow passage portion 20a and the high-temperature flow passage portion 20b at a predetermined value. For this purpose, as shown in FIG. 1, a coolant heating heat exchanger 22 is provided in the high-temperature flow passage portion 20b, and is configured to be able to heat the coolant returning to the evaporator 11. In addition, a coolant temperature detection and adjustment portion 20t is provided in the high-temperature flow passage portion 20b, and even if the cooling load in the air cooling heat exchanger 112 is small, it is possible to maintain a predetermined temperature so that the temperature of the coolant in the high-temperature flow passage portion 20b returning to the evaporator 11 does not drop from the predetermined temperature. The heat source of the coolant heating heat exchanger 22 is a heated air supply device 120, as described later, and the details will be described later.

[0025] The cooling air inlet pipe 114 connects the outlet of the air-cooling heat exchanger 112 and the cooling furnace 101f. A cooling heat exchange outlet temperature detector 203 that detects the temperature of the air supplied to the cooling furnace 101f is provided on the outlet side of the air-cooling heat exchanger 112 of the cooling air inlet pipe 114.

[0026] The cooling heat exchange bypass piping 113 branches off from a portion downstream of the installation location of the outside air inlet temperature detector 201 and the outside air inlet humidity detector 202 of the outside air introduction piping 111 and upstream of the cooling heat exchanger inlet damper 111a so as to bypass the air-cooling heat exchanger 112, and merges with a portion upstream of the installation location of the cooling heat exchanger outlet temperature detector 203 of the cooling air introduction piping 114. The cooling heat exchange bypass piping 113 is provided with a cooling heat exchanger bypass damper 113a.

[0027] The cooling fan 117 is provided in the cooling air introduction pipe 114 in order to introduce the introduced outside air as cooling air into the cooling furnace 101f, and is driven by, for example, an electric motor connected to an inverter power supply as a driving device, and has a variable rotation speed. The cooling fan 117 also functions as an air volume adjustment device that operates based on a command signal from the humidity control device 200 and adjusts the volume of the cooling air. In the following, the cooling fan 117 driven by the electric motor is shown as an example of the air volume adjustment device, but the air volume adjustment device is not limited to this. In other words, as long as the volume of the cooling air can be adjusted, other driving methods may be used, or a blower including a blower may be used. Furthermore, in addition to a blowing means such as a fan or a blower, an adjustment unit such as a damper or a valve that can adjust the volume of the air may be provided. Hereinafter, these are collectively referred to as air volume adjustment devices.

[0028] The cooling air exhaust pipe 118 serves as a path for exhausting air from the cooling furnace 101f.

[0029] Next, the heated air supply device 120 of the drying equipment 102 will be described.

[0030] The heated air supply device 120 has a combustion device 121, a fuel supply pipe 121a, a drying gas inlet pipe 122, a circulation fan 123, a gas return pipe 124, a drying furnace exhaust pipe 125, an exhaust fan 126, a combustion air inlet pipe 127, an outside air supply fan 127a, a regenerative heat exchanger 128, and a dilution air inlet pipe 129.

[0031] The combustion device 121 generates combustion gas from fuel supplied via a fuel supply pipe 121a and combustion air supplied via a combustion air inlet pipe 127, and further receives dilution air supplied via a dilution air inlet pipe 129 and mixes it with the combustion gas to generate drying gas. The combustion device 121, together with the condenser 13 of the heat pump 10, is a heat source in the heated air supply device 120.

[0032] The drying gas generated in the combustion device 121 is driven by a circulation fan 123 provided in a drying gas inlet pipe 122 connecting the combustion device 121 and the drying furnace 102f, and is supplied to the drying furnace 102f via the drying gas inlet pipe 122. In addition, a gas return pipe 124 extends from the drying furnace 102f and is connected to a dilution air inlet pipe 129 for recirculation of the drying gas.

[0033] The dilution air introduction pipe 129 introduces outside air into the combustion device 121. The dilution air introduction pipe 129 is provided with a built-in fan 15 that drives the outside air. The dilution air introduction pipe 129 also passes through a heat exchanger with the condenser 13 of the heat pump 10. Therefore, the outside air is heated by heat generated by the condenser 13, driven by the built-in fan 15, flows through the dilution air introduction pipe 129, and is sent to the combustion device 121 as dilution air. The dilution air has a function of adjusting the temperature of the drying gas by being mixed with the combustion gas, and also functions as cooling air for the combustion device 121.

[0034] In addition to the gas that is recirculated to the combustion device 121 side through the gas return pipe 124, some gas is discharged from the drying furnace 102f to the outside. That is, a part of the gas is driven by the exhaust fan 126 and discharged from the drying furnace 102f to the outside through the drying furnace exhaust pipe 125. The cooling air exhaust pipe 118 described above is connected to the drying furnace exhaust pipe 125 at a portion upstream of the exhaust fan 126.

[0035] In order to replenish the gas discharged to the outside from the drying oven exhaust pipe 125, outside air is supplied to the combustion device 121 through the combustion air introduction pipe 127 at a flow rate equivalent to that of the gas discharged to the outside, as described above. The outside air is driven by an outside air supply fan 127a provided in the combustion air introduction pipe 127. In addition, a regenerative heat exchanger 128 is provided in the combustion air introduction pipe 127, and the outside air is heated by high-temperature exhaust gas discharged to the outside through the drying oven exhaust pipe 125, and then supplied to the combustion device 121 as combustion air. By supplying the heated combustion air to the combustion device 121, the combustion efficiency in the combustion device 121 is improved, and the consumption of the fuel supplied through the fuel supply pipe 121a can be reduced. In addition, a part of the heat of the high-temperature exhaust gas can be recovered.

[0036] An exhaust fan outlet pipe 131 is provided on the outlet side of the exhaust fan 126, and the end of the exhaust fan outlet pipe 131 is open to the outside air. A coolant heating heat exchange bypass pipe 132 branches off from the exhaust fan outlet pipe 131, passes through a coolant heating heat exchanger 22 provided in the coolant circulation flow path 20, and then merges with the exhaust fan outlet pipe 131 again. Between the branching point and the merging point of the exhaust fan outlet pipe 131 and the coolant heating heat exchange bypass pipe 132, an exhaust fan outlet damper 131a is provided in the exhaust fan outlet pipe 131, and a coolant heating heat exchange inlet damper 132a is provided in the coolant heating heat exchange bypass pipe 132.

[0037] The opening degree of the exhaust fan outlet damper 131a and the coolant heating heat exchanger inlet damper 132a is adjusted by a coolant temperature detection adjustment unit 20t provided in the high temperature flow path section 20b, and heating air is supplied to the coolant heating heat exchanger 22 so as to maintain the coolant temperature in the high temperature flow path section 20b where the coolant returns to the evaporator 11.

[0038] Next, the humidity control device 200 accepts as inputs the outputs of the outdoor air inlet temperature detector 201, the outdoor air inlet humidity detector 202, and the cooling heat exchanger outlet temperature detector 203, and outputs command signals to the cooling heat exchanger inlet damper 111a, the cooling heat exchanger bypass damper 113a, and the cooling fan 117.

[0039] FIG. 2 is a block diagram showing the configuration of a humidity control device 200 for a cooling facility according to the first embodiment.

[0040] The humidity control device 200 is, for example, a computer system, or may be a plurality of computing units, a plurality of memories, an input device, and an output device that are functionally coupled to each other.

[0041] The humidity control device 200 has a calculation section 210 , a memory section 230 , an input section 240 , and an output section 250 .

[0042] The input unit 240 receives external inputs. Specifically, the external inputs include the outputs of the outside air inlet temperature detector 201, the outside air inlet humidity detector 202, and the cooling heat exchange outlet temperature detector 203, which are always received as inputs, as well as characteristic data and the like required for calculations that are input from outside as necessary.

[0043] The output unit 250 converts the results of calculations performed by the calculation unit 210 into signals that can be used to directly command an airflow adjustment device such as the cooling fan 117, and outputs the signals to the airflow adjustment device. The output unit 250 also displays the processing details and processing results of the humidity control device 200 as necessary. The input unit 240 and the display portion of the output unit 250 may be integrated as an interface with an operator, etc.

[0044] The calculation unit 210 has a heat exchanger inlet temperature determination unit 211 , a dew point temperature derivation unit 212 , a heat exchanger outlet temperature target value derivation unit 213 , and a humidity control calculation unit 214 .

[0045] The storage unit 230 includes a determination reference value storage unit 231 , a psychrometric chart database 232 , and a target relative humidity storage unit 233 .

[0046] The heat exchanger inlet temperature determination unit 211 determines whether the outside air inlet temperature, which is the output of the outside air inlet temperature detector 201, is lower than a predetermined value, which is a reference value for determination. This predetermined value is received as an external input and stored in the reference value for determination storage unit 231.

[0047] When the output of the outside air inlet temperature detector 201 is higher than a predetermined value, the heat exchanger inlet temperature determination unit 211 outputs a command signal to the output unit 250 to open the cooling heat exchanger inlet damper 111a and close the cooling heat exchanger bypass damper 113a. When the output of the outside air inlet temperature detector 201 is lower than a predetermined value, the heat exchanger inlet temperature determination unit 211 outputs a command signal to the output unit 250 to close the cooling heat exchanger inlet damper 111a and open the cooling heat exchanger bypass damper 113a.

[0048] In this way, the predetermined value stored in the judgment standard value memory unit 231 is a condition for stopping the passage of the outside air through the air-cooling heat exchanger 112 and removing it from the cooling load of the heat pump 10 when the temperature of the outside air is too low to be cooled by the cooling water in the cooling water circulation flow path 20 and therefore cannot become a cooling load for the heat pump 10.

[0049] The dew-point temperature derivation unit 212 derives a dew-point temperature Td of the incoming outside air based on the outputs of the outside air inlet temperature detector 201 and the outside air inlet humidity detector 202 .

[0050] The heat exchange outlet temperature target value derivation unit 213 derives the target temperature Tr of the cooling air based on the target relative humidity xr of the air on the outlet side of the air-cooling heat exchanger 112, i.e., the cooling air. The target relative humidity xr is set mainly based on the following two viewpoints.

[0051] (1) Due to the presence of a low-temperature portion downstream of the air-cooling heat exchanger 112, the temperature of the cooling air falls below the condensation temperature, causing water droplets to form, and in order to prevent the cooling air containing water droplets from flowing into the cooling furnace 101f, the cooling air is maintained at an appropriate relative humidity or lower.

[0052] (2) In order to obtain a cooling effect on the treatment object 1, it is desirable that the temperature of the cooling air flowing into the cooling furnace 101f is as low as possible.

[0053] From the above viewpoints, it is preferable that the target relative humidity xr is 60% or more and 80% or less. If the target relative humidity xr is less than 60%, the temperature of the cooling air flowing into the cooling furnace 101f will increase, and the cooling efficiency of the treatment object 1 will decrease. On the other hand, if the target relative humidity xr exceeds 80%, there is a possibility that water droplets will be generated downstream. Furthermore, it is more preferable that the target relative humidity xr is 65% or more and 75% or less.

[0054] The target relative humidity xr is input from the outside and stored in the target relative humidity storage unit 233.

[0055] When the dew point temperature derivation unit 212 and the heat exchange outlet temperature target value derivation unit 213 perform calculations, the air characteristic data stored in the psychrometric chart database 232 is used.

[0056] FIG. 3 is a conceptual psychrometric chart for explaining the calculation of the dew point temperature. The psychrometric chart database 232 stores this characteristic in the form of, for example, a table or an approximation formula, and performs interpolation and extrapolation calculations as necessary. In the psychrometric chart shown in FIG. 3, the horizontal axis is the dry bulb temperature and the vertical axis is the absolute humidity. The curves are the contour lines of the relative humidity, and the curve shown by the thick line at the top of the chart indicates the case of 100% relative humidity. Although not shown, the psychrometric chart database 232 also stores the values ​​of the respective enthalpies and specific volumes.

[0057] The dew point temperature derivation unit 212 determines that the state of the taken-in outdoor air is at point A from the outdoor air inlet temperature T1 whose input unit receives the output of the outdoor air inlet temperature detector 201 and the outdoor air inlet humidity x1 whose input unit receives the output of the outdoor air inlet humidity detector 202. Next, the dew point temperature derivation unit 212 derives the intersection point B with the curve of 100% relative humidity, i.e., the dew point, under a condition of constant absolute humidity, i.e., a condition where the value of the vertical axis in Fig. 3 is constant. The dry bulb temperature at this time is the dew point temperature Td.

[0058] The heat exchanger outlet temperature target value derivation unit 213 derives the intersection C of the curve of the target relative humidity xr and the line segment AB. Here, the target relative humidity xr is a value stored in the target relative humidity storage unit 233. Furthermore, the psychrometric chart database 232 performs interpolation and extrapolation as necessary as shown in Fig. 3. Next, the heat exchanger outlet temperature target value derivation unit 213 derives the dry-bulb temperature at point C as the target temperature Tr.

[0059] The humidity control calculation unit 214 performs control calculation to control the flow rate of the cooling air so that the relative humidity of the cooling air at the outlet of the air-cooling heat exchanger 112 becomes a predetermined value. That is, the humidity control calculation unit 214 performs control calculation to make the cooling heat exchange outlet temperature To of the cooling air become the target temperature Tr of the cooling air derived by the heat exchange outlet temperature target value derivation unit 213 corresponding to the target relative humidity xr, and outputs the result as a request signal to an air volume adjustment device such as the cooling fan 117.

[0060] Here, the contents of the control calculation are generally proportional control, proportional-integral control, proportional-integral-differential control, etc., but other methods may be used as long as they are control calculations for controlling the flow rate of the cooling air so that the cooling heat exchange outlet temperature To of the cooling air at the outlet of the air-cooling heat exchanger 112 becomes the target temperature Tr corresponding to the target relative humidity xr. Also, the state (rotation speed, opening degree, etc.) of the air volume adjustment device that should realize the air volume so that the cooling heat exchange outlet temperature To of the cooling air becomes the target temperature Tr may be calculated and used as a precedence signal. Alternatively, a method may be used in which the output of the humidity control calculation unit 214 is set to a certain width, and a request signal for eliminating the temperature deviation is output according to the temperature deviation between the cooling heat exchange outlet temperature To and the target temperature Tr.

[0061] The following shows an example in which the humidity control calculation unit 214 has a part that calculates the temperature deviation by subtracting the cooling heat exchanger outlet temperature To from the cooling air target temperature Tr derived by the heat exchanger outlet temperature target value derivation unit 213, and a part that calculates and processes this temperature deviation.

[0062] Next, a cooling air humidity control method according to the first embodiment will be described. In the cooling air humidity control method, the humidity control device 200 and the operating equipment receiving the command perform control operations, but in this control state, unlike sequence control, a series of control operations are not completed by finishing them, but rather, a control state in which control operations for achieving a purpose are continuously repeated (control state). This control state ends, for example, when the input unit 240 receives a termination signal.

[0063] Fig. 4 is a flow diagram showing the procedure of the cooling air humidity control method according to the first embodiment. In the figure, solid lines indicate the flow between each step, and dotted lines indicate the exchange of signals or information. Also, two-dot chain lines indicate the flow of events such as a change in temperature caused by a change in the state of the cooling air supply device 110 due to the operation of the cooling fan 117. The same applies below.

[0064] Here, detection is performed by the outdoor air inlet temperature detector 201, the outdoor air inlet humidity detector 202, and the cooling heat exchange outlet temperature detector 203, and their outputs are accepted by the input unit 240 of the humidity control device 200 as the outdoor air inlet temperature T1, the outdoor air inlet humidity x1, and the cooling heat exchange outlet temperature To. Also, it is assumed that the heat pump 10 is operated under maximum COP conditions, and the cooling water temperatures in the low temperature flow path portion 20a and the high temperature flow path portion 20b are maintained at predetermined values.

[0065] First, the heat exchanger inlet temperature determination unit 211 determines whether the outside air inlet temperature T1 is equal to or higher than a predetermined temperature (step S11). Here, the predetermined temperature is read out from the determination reference value storage unit 231.

[0066] When it is not determined that the outside air inlet temperature T1 is equal to or higher than the predetermined temperature (step S11 NO), that is, when it is determined that the outside air inlet temperature T1 is lower than the predetermined temperature, the heat exchanger inlet temperature determination unit 211 outputs a command signal to close the cooling heat exchanger inlet damper 111a and open the cooling heat exchanger bypass damper 113a, that is, to set the air-cooling heat exchanger bypass mode (step S12). In this case, the outside air does not flow into the air-cooling heat exchanger 112, but passes through the cooling heat exchanger bypass piping 113 and is directly supplied to the cooling furnace 101f by the cooling fan 117.

[0067] If it is determined that the outside air inlet temperature T1 is equal to or higher than the predetermined temperature (step S11: YES), the heat exchanger inlet temperature determination unit 211 outputs a command signal to open the cooling heat exchanger inlet damper 111a and close the cooling heat exchanger bypass damper, i.e., to set the air-cooling heat exchanger passing mode (step S13). That is, the outside air flows into the air-cooling heat exchanger 112, is cooled, and is then supplied to the cooling furnace 101f by the cooling fan 117 as cooling air. The steps in this case are shown below.

[0068] The dew-point temperature derivation unit 212 derives the dew-point temperature Td of the incoming outside air based on the outside air inlet temperature T1 and the outside air inlet humidity x1 while using the data stored and contained in the psychrometric chart database 232 (step S14).

[0069] Next, the heat exchange outlet temperature target value derivation unit 213 derives a target temperature Tr of the cooling air at the outlet of the air-cooling heat exchanger 112 based on the target relative humidity xr stored in the target relative humidity storage unit 233 (step S15). As described above, this target temperature Tr is a temperature at which the humidity x of the cooling air becomes the target relative humidity xr.

[0070] Next, the humidity control calculation unit 214 performs a control calculation to control the flow rate of the cooling air so that the relative humidity of the cooling air at the outlet of the air-cooling heat exchanger 112 becomes a predetermined value. That is, the humidity control calculation unit 214 performs a control calculation to make the cooling heat exchange outlet temperature To of the cooling air become the target temperature Tr of the cooling air derived by the heat exchange outlet temperature target value derivation unit 213 corresponding to the target relative humidity xr, and outputs the calculation result.

[0071] As the control calculation, for example, first, the cooling heat exchange outlet temperature To is subtracted to calculate a temperature deviation (step S16), and this temperature deviation is then subjected to calculation processing (step S17). The humidity control calculation unit 214 outputs the calculation processing result as a request signal to the air volume adjustment device. The output unit 250 receives the request signal calculated by the humidity control calculation unit 214, converts it into a command signal for the air volume adjustment device, for example, the cooling fan 117 shown in FIG. 1, and outputs the command signal to the air volume adjustment device (step S18).

[0072] The flow from step S16 to step S18 is continuously performed, and finally, the cooling heat exchange outlet temperature To of the cooling air becomes the target temperature Tr of the cooling air, and as a result, the relative humidity x of the cooling air becomes the target relative humidity xr. Even when the outdoor air conditions, i.e., the outdoor air temperature and outdoor air humidity, change, the same control operation is performed, and the relative humidity x of the cooling air is maintained at the target relative humidity xr.

[0073] As a variation of this embodiment, a cooling heat exchanger outlet humidity detector for detecting the humidity of the cooling air may be further provided at the outlet of the air-cooling heat exchanger 112, and the cooling heat exchanger outlet humidity from this cooling heat exchanger outlet humidity detector received via the input section may be used as a direct feedback signal, and a control calculation may be performed to make this reach the target relative humidity xr, and this may be output as a request signal to an air flow control device that adjusts the flow rate of the cooling air.

[0074] As described above, the cooling equipment, the drying / cooling system, and the cooling air humidity control method according to this embodiment can provide the following effects.

[0075] By providing a cooling heat exchange bypass piping 113, which is a bypass flow path for the air-cooling heat exchanger 112, when the outside air inlet temperature is too low to serve as a cooling load for the heat pump 10, the air-cooling heat exchanger 112 can be bypassed and the supply of cooling air to the cooling furnace 101f can be continued.

[0076] Also, in response to changes in the outside air conditions, the cooling air at the outlet of the air-cooling heat exchanger 112 can be maintained at an appropriate relative humidity that does not cause condensation, and at the lowest possible temperature. Note that in order to control the volume of the cooling air, when the outside air temperature drops, the volume of the cooling air is increased, and the temperature of the air flowing into the cooling furnace 101f rises, but the increased volume of the cooling air increases the heat transfer coefficient between the cooling air and the object 1 to be treated, and this is expected to ensure the cooling effect.

[0077] [Second embodiment] FIG. 5 is a block diagram showing the configuration of a drying / cooling system 100a according to the second embodiment.

[0078] This embodiment is a modification of the first embodiment, and has the function of performing temperature adjustment when the temperature of the cooling air is too low and unacceptable.

[0079] The following describes the differences from the first embodiment. The parts not specifically described are the same as those in the first embodiment.

[0080] In the cooling air supply device 110a of this embodiment, a cooling air heating heat exchanger 115 is provided in a portion of the cooling air inlet pipe 114 between the air cooling heat exchanger 112 and the cooling fan 117. In addition, a heating heat exchange outlet temperature detector 204 is provided on the outlet side of the cooling air heating heat exchanger 115. The cooling air heating heat exchanger 115 may be provided downstream of the cooling fan 117.

[0081] In the heated air supply device 120a, a cooling air heating heat exchange bypass pipe 133 is provided in parallel with a cooling water heating heat exchange bypass pipe 132 branching off from an exhaust fan outlet pipe 131. The cooling air heating heat exchange bypass pipe 133 guides high-temperature exhaust air from the exhaust fan 126 to the cooling air heating heat exchanger 115 as heating air, and then merges with the exhaust fan outlet pipe 131. A cooling air heating heat exchanger inlet damper 133a is provided in the cooling air heating heat exchange bypass pipe 133, and the opening degree is adjusted by a humidity control device 200a.

[0082] 6 is a block diagram showing the configuration of a humidity control device 200a of a cooling facility 101a according to the second embodiment. Compared to the first embodiment, the calculation unit 210a further includes a high value selection unit 218 and a heating control calculation unit 219. The storage unit 230a further includes a cooling furnace inlet minimum temperature specified value storage unit 235 that stores the allowable minimum temperature of the cooling air supplied to the cooling furnace 101f as a cooling furnace inlet minimum temperature specified value TL.

[0083] The high value selection unit 218 reads out the cooling furnace inlet minimum temperature specified value TL from the cooling furnace inlet minimum temperature specified value memory unit 235, compares it with the heat exchanger outlet temperature target value Tr derived by the heat exchanger outlet temperature target value derivation unit 213, and selects the higher temperature Th.

[0084] The heating control calculation unit 219 sets the higher temperature Th selected by the high value selection unit 218 as a target value and outputs an opening command for the cooling air heating heat exchanger inlet damper 133a so that the heating heat exchanger outlet temperature THo read by the input unit 240 as the output of the heating heat exchanger outlet temperature detector 204 becomes this target value Th. Similar to the humidity control calculation unit 214b, the heating control calculation unit 219 has a calculation unit for calculating the deviation between the target value Th and the heating heat exchanger outlet temperature which is the output of the heating heat exchanger outlet temperature detector 204 as a feedback signal, and a calculation unit using, for example, proportional and integral elements.

[0085] FIG. 7 is a flowchart showing the procedure of a cooling air humidity control method according to the second embodiment.

[0086] Steps S11 to S15 are the same as in the first embodiment, but the following steps are performed in both cases where the result of the determination in step S11 is that the air-cooling heat exchanger bypass mode state is reached in step S12, and where the air-cooling heat exchanger passing mode state is reached in step S13.

[0087] First, the high value selection unit 218 reads out the cooling furnace inlet minimum temperature specified value TL from the cooling furnace inlet minimum temperature specified value memory unit 235, selects the higher of either this or the heat exchanger outlet temperature target value Tr derived by the heat exchanger outlet temperature target value derivation unit 213 in step S15, and outputs the high value Th (step S31).

[0088] Next, the heating control calculation unit 219 accepts the output Th of the high value selection unit 218 and the heating heat exchanger outlet temperature THo read by the input unit 240 as a feedback signal from the output of the heating heat exchanger outlet temperature detector 204, and subtracts the heating heat exchanger outlet temperature THo from the output Th of the high value selection unit 218 to calculate the temperature deviation (step S32).

[0089] Next, the heating control calculation unit 219 performs a temperature deviation calculation process (step S34) and outputs the calculation result as a request signal to the cooling air heating heat exchanger inlet damper 133a. The output unit 250 converts the command signal from the heating control calculation unit 219 into a signal to the drive unit of the cooling air heating heat exchanger inlet damper 133a and outputs it.

[0090] In the present embodiment as described above, if the heat exchange outlet temperature target value Tr derived in step S15 is selected as the high value Th in the high value selection in step S31, the cooling air is in a state higher than the specified minimum temperature value TL of the cooling furnace inlet. If control is performed by the operation of the humidity control calculation unit 214 and the cooling fan 117 in steps S15 to S19, the output of the heating heat exchange outlet temperature detector 204 coincides with the heat exchange outlet temperature target value Tr in the stable state.

[0091] Therefore, the temperature deviation input to the heating control calculation unit 219 is zero. Therefore, the opening command for the cooling air heating heat exchanger inlet damper 133a is zero, and high-temperature exhaust air for heating is not supplied to the cooling air heating heat exchanger 115. In other words, when the cooling air temperature To is higher than the cooling furnace inlet minimum temperature specified value TL, the cooling air is not heated.

[0092] As described above, according to this embodiment, in the air cooling heat exchanger bypass mode state, when the outside air inlet temperature is too low and falls below the cooling furnace inlet minimum temperature specified value TL, or in the air cooling heat exchanger passing mode state, when the temperature of the cooling air at the outlet of the air cooling heat exchanger 112 falls below the cooling furnace inlet minimum temperature specified value TL even if the humidity conditions are met, the temperature of the cooling air can be raised to the cooling furnace inlet minimum temperature specified value TL to ensure the minimum temperature.

[0093] [Third embodiment] FIG. 8 is a block diagram showing the configuration of a drying / cooling system 100b according to the third embodiment.

[0094] This embodiment is a modification of the second embodiment. The configuration of the cooling equipment 101b is similar to that of the second embodiment, but differs from the second embodiment shown in Fig. 5 in that a drain separator 116 is provided downstream of the junction of the cooling heat exchange bypass piping 113 and the cooling air introduction piping 114 and upstream of the cooling fan 117. The purpose, configuration, and operation of the humidity control device 200b are different from those of the second embodiment, as described below.

[0095] FIG. 9 is a block diagram showing the configuration of a humidity control device 200b of a cooling facility 101b according to the third embodiment.

[0096] The humidity control device 200b in this embodiment controls the relative humidity of the cooled air to an appropriate value in situations where the humidity of the taken-in outside air is too high and the cooled air easily drops below the dew point temperature by cooling the outside air using the cooled air heating heat exchanger 115, or where the relative humidity is higher than the target relative humidity xr and there is no room for a relative humidity of 100%.

[0097] That is, the cooling air is actively cooled to condense, the resulting drain is treated in drain separator 116, and the cooling air is reheated in cooling air heating heat exchanger 115. Here, the absolute humidity of the cooling air has decreased because its temperature has become lower than the previous dew point temperature, and the temperature of the cooling air has become the dew point temperature corresponding to the new absolute humidity. Therefore, the cooling air is reheated to prevent condensation due to a further temperature drop.

[0098] In the humidity control device 200b, the calculation unit 210b has a heat exchange outlet temperature target value derivation unit 213b and a heating control calculation unit 219b. The storage unit 230b has a low temperature side shift value storage unit 236 and a reheating temperature target value storage unit 237.

[0099] The low temperature side shift value memory unit 236, unlike the target relative humidity memory unit 233 in the first and second embodiments, stores a low temperature side shift value ΔTL that indicates how many degrees lower the temperature To of the cooling air at the outlet of the air-cooling heat exchanger 112 should be from the previous dew point temperature Td.

[0100] Here, from the viewpoint of the amount of moisture to be discharged, the low temperature shift value ΔTL may be set as a dew point temperature that is lower by a predetermined absolute humidity than the absolute humidity of the outside air calculated by the dew point temperature derivation unit 212 in the conceptual psychrometric chart shown in Fig. 3. Alternatively, from the viewpoint of the possibility of a temperature drop on the downstream side, the low temperature shift value ΔTL may be set as a temperature drop amount larger than the expected temperature drop amount.

[0101] The reheating temperature target value storage unit 237 stores a target temperature for reheating the cooling air whose temperature has been lowered below the dew point temperature Td by the air-cooling heat exchanger 112, that is, a reheating temperature target value THr. The reheating temperature target value THr may be set, for example, using the target relative humidity in the first and second embodiments. Alternatively, it may be set to the original value of the outside air inlet temperature.

[0102] Furthermore, unlike the heat exchanger outlet temperature target value derivation unit 213 in the second embodiment, the heat exchanger outlet temperature target value derivation unit 213b outputs as the target temperature Tr the temperature obtained by subtracting the low temperature side shift value ΔTL stored in the low temperature side shift value memory unit 236 from the outside air dew point temperature Td derived by the dew point temperature derivation unit 212.

[0103] FIG. 10 is a flowchart showing the procedure of a cooling air humidity control method according to the third embodiment.

[0104] If it is determined in step S11 that the outside air inlet temperature is lower than the predetermined temperature and the air-cooling heat exchanger bypass mode is selected in step S12, the following steps are not applied since there is no means for further lowering the temperature of the cooling air. In other words, if it is determined in step S11 that the outside air inlet temperature is equal to or higher than the predetermined temperature and the air-cooling heat exchanger passing mode is selected in step S13, the following steps are continued.

[0105] The process is the same as in the second embodiment until the dew-point temperature derivation unit 212 derives the dew-point temperature Td in step S14 following step S13.

[0106] Next, the heat exchange outlet temperature target value derivation unit 213b outputs a temperature obtained by subtracting the low temperature side shift value ΔTL stored in the low temperature side shift value storage unit 236 from the dew point temperature Td as the target temperature Tr.

[0107] Steps S16 to S18, in which the humidity control calculation unit 214 receives the target temperature Tr and controls the cooling fan 117 so that the cooling heat exchange outlet temperature To becomes the target temperature Tr, are the same as those in the first and second embodiments. As a result, the rotation speed of the cooling fan 117 decreases, and the temperature of the cooling air becomes equal to or lower than the dew point temperature. The resulting water droplets and drainage are collected in the drain separator 116 (FIG. 8) and processed.

[0108] Next, the heating control calculation unit 219b controls the cooling air temperature, which has been reduced in step S15, so that the cooling air temperature is returned to the original outside air inlet temperature by heating using the cooling air heating heat exchanger 115.

[0109] That is, first, the heating control calculation unit 219b reads out the reheating temperature target value THr stored in the reheating temperature target value memory unit 237 and the heating heat exchanger outlet temperature THo accepted by the input unit 240, and subtracts the heating heat exchanger outlet temperature THo from the reheating temperature target value THr to output the temperature deviation (step S32).

[0110] Next, the heating control calculation unit 219b performs, for example, proportional and integral calculation (step S33), and outputs the result from the output unit 250 to the cooling air heating heat exchanger inlet damper 133a (step S34). These steps are similar to steps S33 and S34 in the second embodiment.

[0111] As described above, according to this embodiment, when the humidity of the taken-in outside air is too high and condensation easily occurs during the process or there is a high possibility of condensation occurring, the temperature of the cooled air is lowered by the air-cooling heat exchanger 112 to actively cause condensation to remove moisture and lower the absolute humidity, and then the temperature of the cooled air is raised to the reheating temperature target value THr by heating by the cooled air heating heat exchanger 115 to restore the relative humidity to an appropriate range. This makes it possible to prevent moisture from occurring.

[0112] [Other embodiments] Although the embodiments of the present invention have been described above, the embodiments have been presented as examples and are not intended to limit the scope of the invention.

[0113] Also, the features of each embodiment may be combined. For example, the second embodiment and the third embodiment have many common parts, except for the presence or absence of a drain separator and some differences in the humidity control device. For this reason, a humidity control device may have the functions of both the second embodiment and the third embodiment, and a mode selection unit may be provided to select between a first mode when the outside air is dry but the relative humidity is low, and a second mode when the outside air temperature is high and the humidity is high, making it possible to switch between the two modes.

[0114] Here, the mode selection may be made by an operator or a manager via the input unit 240. Alternatively, the mode selection may be made automatically based on the signals of the outside air temperature and the relative humidity received from the outside air inlet temperature detector 201 and the outside air inlet humidity detector 202.

[0115] In addition, the embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. The embodiments and their modifications are included in the scope of the invention and its equivalents as described in the claims, as well as in the scope and spirit of the invention. [Explanation of symbols]

[0116] 1...object to be treated, 10...heat pump, 11...evaporator, 12...compressor, 13...condenser, 14...expansion valve, 15...built-in fan, 20...cooling water circulation flow path, 20a...low temperature flow path section, 20b...high temperature flow path section, 20t...cooling water temperature detection and adjustment section, 21...cooling water pump, 22...heat exchanger for heating cooling water, 100, 100a, 100b...drying and cooling system, 101, 101a, 101b...cooling equipment, 101f...cooling furnace (cooling device), 102, 102a...drying equipment, 102f...drying furnace (drying device), 103...conveying device, 110, 110a...cooled air supply device, 111...outside air introduction piping , 111a...cooling heat exchanger inlet damper, 112...air cooling heat exchanger, 113...cooling heat exchanger bypass piping, 113a...cooling heat exchanger bypass damper, 114...cooling air introduction piping, 115...cooling air heating heat exchanger, 116...drain separator, 117...cooling fan (air flow rate control device), 118...cooling air exhaust piping, 120, 120a...heated air supply device, 121...combustion device, 121a...fuel supply piping, 122...drying gas introduction piping, 123...circulation fan, 124...gas return piping, 125...drying furnace exhaust piping, 126...exhaust fan, 127...combustion air introduction piping, 127a...outdoor air supply fan, 128...regenerative heat exchanger, 129...dilution air introduction piping, 131...exhaust fan outlet piping, 131a...exhaust fan outlet damper, 132...cooling water heating heat exchange bypass piping, 132a...cooling water heating heat exchange inlet damper, 133...cooling air heating heat exchange bypass piping, 133a...cooling air heating heat exchange inlet damper, 200, 200a, 200b...humidity control device, 201...outdoor air inlet temperature detector, 202...outdoor air inlet humidity detector, 203...cooling heat exchange outlet temperature detector, 204...heating heat exchange outlet temperature detector, 210...calculation unit, 211...inlet temperature determination unit, 212...dew point temperature derivation section, 213, 213a...heat exchange outlet temperature target value derivation section, 214, 214a...humidity control calculation section, 215...cooling fan air volume calculation section, 216...cooling fan rotation speed derivation section, 217...subtraction section, 218...high value selection section, 219...heating control calculation section, 230...memory section, 231...judgment standard value memory section, 232...psychrometric chart database, 233...target relative humidity memory section, 234...cooling fan characteristic database, 235...cooling furnace inlet minimum temperature standard value memory section, 236...low temperature side shift value memory section, 237...reheating temperature target value memory section, 240...input section, 250...output section.

Claims

1. A cooling device for cooling the object to be processed; an air cooling heat exchanger into which outside air flows, is cooled by cold water, and flows out as cooled air; A heat pump that cools the cold water; an outside air introduction flow path portion that introduces the outside air into the air-cooling heat exchanger; a cooling air inlet flow passage that introduces the cooling air from the air-cooling heat exchanger to the cooling device; a cooling water circulation flow path that circulates the cold water between the air-cooling heat exchanger and the heat pump; an air flow rate adjusting device provided in the outside air introduction passage portion or the cooling air introduction passage portion and adjusting a flow rate of the cooling air; an outside air inlet temperature detector and an outside air inlet humidity detector for measuring the temperature and relative humidity of the outside air at the inlet of the air-cooling heat exchanger, respectively; a cooling heat exchange outlet temperature detector for measuring the temperature of the cooling air at the outlet of the air cooling heat exchanger; a humidity control device that controls the flow rate of the cooling air by instructing the air flow rate adjustment device based on the output of the outside air inlet temperature detector, a dew point temperature determined based on the output of the outside air inlet temperature detector and the output of the outside air inlet humidity detector, and the output of the cooling heat exchange outlet temperature detector so that the relative humidity of the cooling air becomes a predetermined value; A cooling system comprising:

2. A cooling heat exchange inlet adjustment portion provided in the outside air introduction flow path portion; a cooling heat exchange bypass flow passage portion having a cooling heat exchange bypass adjustment portion, the cooling heat exchange bypass flow passage portion branching off from the upstream side of the cooling heat exchange inlet adjustment portion so as to bypass the air-cooling heat exchanger and joining the cooling air introduction flow passage portion; Equipped with The moisture control device comprises: a heat exchanger inlet temperature determination unit that determines that the cooling heat exchanger inlet adjustment unit should be closed and the cooling heat exchanger bypass adjustment unit should be opened when the output of the outside air inlet temperature detector is lower than a specified value for determination; a determination specified value storage unit that stores the determination specified value used in the determination of the heat exchanger inlet temperature determination unit; 2. The cooling system according to claim 1, further comprising:

3. The moisture control device comprises: a psychrometric chart database for storing psychrometric chart data; a dew point temperature deriving unit that derives the dew point temperature of the outside air using the psychrometric chart database based on outputs of the outside air inlet temperature detector and the outside air inlet humidity detector; a target relative humidity storage unit that stores a target relative humidity; a heat exchange outlet temperature target value derivation unit that derives a heat exchange outlet temperature target value using the psychrometric chart database based on an output of the outside air inlet temperature detector, the dew point temperature, and the target relative humidity; a humidity control calculation unit that performs a control calculation based on the heat exchange outlet temperature target value and an output of the cooling heat exchange outlet temperature detector and outputs a command value to the air volume adjustment device; 3. The cooling system according to claim 1 or 2, further comprising:

4. A cooling system according to claim 1 or 2, A drying facility including a drying device for drying the object to be treated and a heated air supplying device for supplying a drying gas to the drying device; A drying and cooling system comprising: The heated air supply device includes: A combustion device; A combustion air introduction passage portion that introduces combustion air into the combustion device; A fuel introduction passage portion that introduces fuel into the combustion device; A dilution air introduction flow passage portion that introduces dilution air into the combustion device; a drying gas introduction flow passage section that introduces a mixed gas of the combustion gas generated in the combustion device and the dilution air as the drying gas into the drying device; a drying device exhaust flow path portion including an exhaust fan and configured to exhaust exhaust gas from the drying device; A drying and cooling system comprising:

5. A cooling system according to claim 3, A drying facility including a drying device for drying the object to be treated and a heated air supplying device for supplying a drying gas to the drying device; A drying and cooling system comprising: The heated air supply device includes: A combustion device; A combustion air introduction passage portion that introduces combustion air into the combustion device; A fuel introduction passage portion that introduces fuel into the combustion device; A dilution air introduction flow passage portion that introduces dilution air into the combustion device; a drying gas introduction flow passage section that introduces a mixed gas of the combustion gas generated in the combustion device and the dilution air as the drying gas into the drying device; a drying device exhaust flow path portion including an exhaust fan and configured to exhaust exhaust gas from the drying device; A drying and cooling system comprising:

6. The cooling air introduction passage further includes a heat exchanger for heating the cooling air, the heat exchanger being provided in the cooling air introduction passage and heating the cooling air; The drying and cooling system according to claim 4, characterized in that the heated air supply device has a heat exchanger inlet adjustment section for heating the cooling air, and further has a high-temperature exhaust gas introduction passage section branching off from the drying device exhaust passage section and introducing the exhaust gas into the heat exchanger for heating the cooling air.

7. The cooling air introduction passage further includes a heat exchanger for heating the cooling air, the heat exchanger being provided in the cooling air introduction passage and heating the cooling air; The drying / cooling system according to claim 5, characterized in that the heated air supply device has a heat exchanger inlet adjustment section for heating the cooling air, and further has a high-temperature exhaust gas introduction passage section branching off from the drying device exhaust passage section and introducing the exhaust gas into the heat exchanger for heating the cooling air.

8. Further comprising a cooling device inlet minimum temperature specified value memory unit for storing a cooling device inlet minimum temperature specified value that specifies the minimum temperature of the cooling air, The drying / cooling system according to claim 5 or 7, characterized in that the humidity control device uses the higher of the heat exchange outlet temperature target value and the cooling device inlet minimum temperature specified value instead of the heat exchange outlet temperature target value.

9. The moisture control device comprises: The cooling air heating device further includes a heating control device having a reheating temperature target value storage unit that stores a reheating temperature target value, which is a temperature target value of the cooling air at an outlet of the cooling air heating heat exchanger, A temperature lower than a condensation temperature is used as the heat exchange outlet temperature target value, The drying / cooling system according to claim 7, characterized in that the heating control device calculates a command to an adjustment unit for controlling the heating air of the cooling air heating heat exchanger so that the temperature of the cooling air at the outlet of the cooling air heating heat exchanger becomes the reheating temperature target value.

10. A cooling air humidity control method for controlling the humidity of the cooling air in a cooling facility comprising: a cooling device for cooling an object to be treated; an air-cooling heat exchanger in which outside air is cooled using a heat pump as a cooling source and flows out as cooled air; a cooling air inlet flow path section for introducing the cooled air from the air-cooling heat exchanger into the cooling device; an air volume adjustment device for adjusting the flow rate of the cooled air; an outside air inlet temperature detector and an outside air inlet humidity detector for measuring the temperature and relative humidity of the outside air at the inlet of the air-cooling heat exchanger, respectively; a cooling heat exchanger outlet temperature detector for measuring the temperature of the cooled air at the outlet of the air-cooling heat exchanger; and a humidity control device for controlling the flow rate of the cooled air by instructing the air volume adjustment device based on outputs of the outside air inlet temperature detector, the outside air inlet humidity detector and the cooling heat exchanger outlet temperature detector so that the relative humidity of the cooled air becomes a predetermined value, A dew point temperature deriving unit of the humidity control device derives a dew point temperature of the introduced outdoor air based on the outputs of the outdoor air inlet temperature detector and the outdoor air inlet humidity detector, using a psychrometric chart database stored in the humidity control device; A step in which a heat exchange outlet temperature target value derivation unit of the humidity control device calculates a heat exchange outlet temperature target value based on the dew point temperature using temperature target data stored in the humidity control device; A humidity control calculation unit of the humidity control device calculates a command to the air volume adjustment device based on the output of the cooling heat exchange outlet temperature detector and the heat exchange outlet temperature target value so that the temperature of the cooling air at the outlet of the air cooling heat exchanger becomes the heat exchange outlet temperature target value; 13. A cooling air humidity control method comprising:

11. When the cooling equipment further comprises a cooling heat exchanger inlet adjustment section provided on the inlet side of the air-cooling heat exchanger, and a cooling heat exchanger bypass flow path section having a cooling heat exchanger bypass adjustment section and branching off from the upstream side of the cooling heat exchanger inlet adjustment section so as to bypass the air-cooling heat exchanger and joining the cooling air introduction flow path section, Before the step of deriving the dew point temperature of the introduced outside air, The cooling air humidity control method according to claim 10, further comprising a step in which the heat exchanger inlet temperature judgment unit of the humidity control device judges that the cooling heat exchanger inlet adjustment unit should be closed and the cooling heat exchanger bypass adjustment unit should be opened when the output of the outside air inlet temperature detector is lower than a specified value for judgment.

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