Paddle chamber with anti-splash baffle

Abstract

An electroplating system according to an embodiment of the present technology may include a plating chamber configured to deposit a metallic material on a substrate disposed within the plating chamber. The plating chamber may include a rotor and a bath. The electroplating system may include at least one baffle disposed within the plating chamber. The at least one baffle may define a plurality of slots. The at least one baffle may be configured to limit or prevent fluid from splashing onto the rotor or the plating chamber during operation of the plating chamber.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of and priority to U.S. Patent Application No. 17 / 071,806, entitled "PADDLE CHAMBER WITH ANTI-SPLASHING BAFFLES," filed October 15, 2020, which is incorporated herein by reference in its entirety.

[0002] Technical Field The present technology relates to components and apparatus for semiconductor manufacturing. More particularly, the present technology relates to processing chamber components and other semiconductor processing equipment. [Background technology]

[0003] Integrated circuits are made possible by processes that form intricately patterned layers of materials on a substrate surface. After forming, etching, and other processing on the substrate, metal or other conductive materials are often deposited or formed to provide electrical connections between components. Because this metallization may be performed after many manufacturing operations, problems that arise during metallization can result in useless and expensive substrates or wafers.

[0004] Electroplating is performed in an electroplating chamber by immersing the device side of the wafer in an electrolyte bath and touching electrical contacts on a contact ring to a conductive layer on the wafer surface. An electric current is passed through the electrolyte and the conductive layer. Metal ions in the electrolyte plate the wafer, forming a metal layer on the wafer. Electroplating operations may involve several operations including liquid distribution that may cause plating fluid loss, dilution, or other effects of the plating fluid on the process being performed. Summary of the Invention [Problem to be solved by the invention]

[0005] Thus, a need exists for improved systems and methods that can be used to produce high quality devices and structures, while protecting both the substrate and the plating bath. These and other needs are addressed by the present technology. [Means for solving the problem]

[0006] An electroplating system according to embodiments of the present technology may include a plating chamber configured to deposit a metallic material on a substrate disposed within the plating chamber. The plating chamber may include a rotor and a bath. The electroplating system may include at least one baffle disposed within the plating chamber. The at least one baffle may define a plurality of slots. The at least one baffle may be configured to limit or prevent fluid from splashing onto the rotor or the plating chamber during operation of the plating chamber.

[0007] In some embodiments, the at least one baffle can be disposed on the top of the vessel at least partially above the fluid line of the fluid. The at least one baffle can include a mounting tab defining at least one mounting hole. The mounting tab can extend into at least one of the slots. The at least one mounting hole can be sized to receive a mounting screw. The at least one baffle can include a mounting tab defining at least one mounting hole. The mounting tab can be disposed outside of the slots. The at least one mounting hole sized to receive a mounting screw. The at least one baffle can be disposed horizontally adjacent to a weir thief electrode assembly and vertically adjacent to a rotor and a paddle. The paddle can be disposed on the weir thief electrode assembly and configured to move in at least one direction. The at least one baffle can prevent at least one directional movement of the fluid by impeding the movement of the fluid using the slots. The height of the at least one baffle may be greater than or about 15% of the length of the at least one baffle.A mesh may be disposed in each slot of the plurality of slots.

[0008] Some embodiments of the present technology can include baffles configured to prevent fluid from splashing onto the rotor or plating chamber during operation of the plating chamber. The baffles can include a plurality of slots. The baffles can include at least one mounting tab for mounting the baffle to the plating chamber. In some embodiments, the baffle can be at least one baffle. The at least one baffle can be disposed on top of a vessel at least partially above a fluid line for the fluid. The vessel can be contained within the plating chamber. Each slot of the plurality of slots can be characterized by a width less than or about 25% of a length of the at least one baffle. The mounting tab can define at least one mounting hole. The mounting tab can extend into at least one slot of the plurality of slots. The at least one mounting hole can be sized to receive a mounting screw. The mounting tab can define at least one mounting hole. The mounting tab can be disposed outside of the plurality of slots. The at least one mounting hole can be sized to receive a mounting screw. A height of the at least one baffle can be greater than or about 15% of a length of the at least one baffle. The attachment tab can be a flange disposed on the baffle to couple the baffle to the plating chamber. A mesh can be disposed in each slot of the plurality of slots.

[0009] Some embodiments of the present technology can include electroplating systems. The systems can include a tank assembly for holding an electrolyte. The systems can include a weir thief electrode assembly within the tank assembly. The weir thief electrode assembly can include a plenum inside a weir frame. The systems can include a plurality of spaced apart apertures extending through the weir frame into the plenum. The systems can include a weir ring attached to the weir frame. The systems can include at least one baffle disposed within the tank assembly. The at least one baffle can define a plurality of slots. The at least one baffle can be configured to prevent fluid from splashing onto a rotor or plating chamber during operation of the electroplating system.

[0010] In some embodiments, the at least one baffle can be disposed on top of the tank assembly, at least partially above the electrolyte fluid line. The at least one baffle can include a mounting tab defining at least one mounting hole. The mounting tab can extend into at least one of the slots. The at least one mounting hole can be configured to facilitate mounting the at least one baffle to a ware-thief electrode assembly. The at least one baffle can include a mounting tab defining at least one mounting hole. The mounting tab can be disposed outside of the slots. The at least one mounting hole can be sized to receive a mounting screw. The at least one baffle can have a height greater than or about 15% of a length of the at least one baffle. A mesh can be disposed in each of the slots.

[0011] Such technology can provide numerous benefits over conventional systems and techniques. For example, embodiments of the technology can reduce or eliminate splashing of plating fluids within a plating chamber. This can reduce downtime for cleaning and can help maintain additive levels in the fluid. These and other embodiments, along with their advantages and features, are described in more detail in connection with the following description and accompanying figures.

[0012] A further understanding of the nature and advantages of the disclosed embodiments may be realized by reference to the remaining portions of the specification and the drawings. [Brief description of the drawings]

[0013] [Figure 1] 1 is a schematic perspective view of an electroplating system in accordance with some embodiments of the present technique; [Diagram 2] 1 is a schematic perspective view of a tank assembly of an electroplating chamber in accordance with some embodiments of the present technique; FIG. [Diagram 3] 1 is a schematic top view of an electroplating chamber in accordance with some embodiments of the present technique; [Figure 4A] 1 is a schematic perspective view of a baffle in accordance with some embodiments of the present technology; [Figure 4B] 1 is a schematic perspective view of a baffle in accordance with some embodiments of the present technology; [Figure 5A] 1 is a schematic perspective view of a baffle in accordance with some embodiments of the present technology; [Figure 5B] 1 is a schematic perspective view of a baffle in accordance with some embodiments of the present technology; [Figure 6] 1 is a schematic partial top view of a bath of an electroplating chamber in accordance with some embodiments of the present technique; [Figure 7] 1 is a schematic partial perspective view of a bath of an electroplating chamber in accordance with some embodiments of the present technique; [Figure 8] 1A-1D illustrate operations of an exemplary semiconductor processing method, in accordance with some embodiments of the present technique. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Some of the above figures are included as schematic diagrams. It should be understood that the purpose of the figures is illustrative, and that the figures should not be considered to be at scale unless specifically stated to be at scale. Furthermore, as schematic diagrams, they are provided to aid in understanding, do not include all aspects or information compared to realistic representations, and may include exaggerated content for illustrative purposes.

[0015] In these figures, similar parts and / or features may have the same reference numeral label. Furthermore, various parts of the same type may be identified by tracing the reference labels with letters that identify the similar parts and / or features. When only a first reference numeral label is used herein, the description is applicable to any one of the similar parts and / or features having the same first reference numeral label, regardless of the suffix.

[0016] Microelectronic devices, such as semiconductor devices, can be fabricated on or within a wafer or workpiece. A typical wafer plating process may include depositing a metal seed layer on the surface of the wafer by vapor deposition. A photoresist is deposited and patterned to expose the seed layer. The wafer is then transferred into a bath or head of an electroplating system in which an electric current is passed through the wafer through an electrolyte to deposit a blanket or patterned layer of metallic or other conductive material on the seed layer. Examples of conductive materials include gold, silver, copper, cobalt, tin, nickel, and alloys of these metals. Subsequent processing steps form components, contacts, conductive lines, or combinations thereof on the wafer.

[0017] In some applications, it may be important that the plated metal film or layer has a uniform thickness across the wafer or workpiece. Some electroplating systems use a current thief. A current thief is an electrode that has the same polarity as the wafer. The current thief may be located on or within the ware thief electrode assembly and may operate by drawing current from the edge of the wafer. This may help to keep the plating thickness at the edge of the wafer more uniform with the plating thickness on other parts of the wafer. The current thief may be a physical electrode near the edge of the wafer. Alternatively, the current thief may be a virtual current thief, where the physical electrode is placed away from the wafer. In this design, the current from this remote physical electrode is passed through the electrolyte to a location near the wafer. Electroplating processes in wafer level packaging applications and other applications are diverse and subject to process and wafer pattern variations. Often, significant plating non-uniformity occurs along the edge of the wafer pattern. The non-uniformity can be caused by irregularities in the electric field due to pattern variations or by non-uniformities in mass transfer near the edge of the wafer.

[0018] Some electroplating processing equipment can use paddles or agitators to agitate the electrolyte or fluid in the electroplating system and increase the mass transfer of metal ions in the electrolyte onto the wafer. This increased mass transfer can further improve plating uniformity. However, agitation of the electrolyte or fluid can lead to splashing on parts of the electroplating system, such as the rotor or chamber of the electroplating system. The vibratory motion of the paddles can create waves or wave-like motion of the fluid, which can cause splashing when waves flowing in the opposite direction come into contact. This splashing can have undesirable effects, including additional cleaning operations and acid contact on some chamber parts, which can cause damage over time. To correct or otherwise prevent these problems, the present technology can include one or more baffles in the electroplating system. These baffles can prevent fluid splashing by impeding the movement of the electrolyte or fluid.

[0019] The remainder of this disclosure routinely identifies specific plating processes that utilize the disclosed technology, but it is readily understood that the systems and methods of the disclosure are equally applicable to other metals and chamber configurations. Thus, the technology should not be considered limited to use with only these specific plating processes or chambers. This technology discusses one possible system and chamber that can include components according to embodiments of the technology, followed by a description of additional modifications and adjustments to this system according to embodiments of the technology.

[0020] FIG. 1 is a schematic diagram of an electroplating system 20 according to some embodiments of the present technique. The electroplating system 20 may include a head 30 that may be positioned above a bath assembly 36, as shown, which may be a chamber, as discussed further below. The electroplating system 20 may be a stand-alone unit, or may be one of a set of plating systems arranged in an array within an enclosure, where one or more robots load and unload wafers or workpieces into and from processing equipment. The head 30 may be supported on a lift or lift / rotate unit 34. The lift / rotate unit 34 may be configured to lift and / or flip the head 30 for loading and unloading wafers into and from a rotor 32 within the head 30, and may be configured to lower the head 30 into engagement with the bath assembly 36 for processing. The rotor 32 may include a contact ring, which may be in electrical contact with a wafer held within the rotor 32 during processing. Electrical control and power cables 40 may be communicatively coupled to the lift / rotate unit 34 and internal head components, which extend from the system to a facility connection or to a connection in a multiprocessor automated system. A rinse assembly 28, which may have a tiered drain ring, may be positioned above the bath frame 50.

[0021] 2 is a schematic diagram of a bath assembly 36 of an electroplating chamber according to some embodiments of the present technology. A ware-thief electrode assembly 52 can be positioned near the bath frame 50 or the top of the bath, and a paddle 54 can be positioned in the bath assembly 36 at a position lower than the height of the segmented ware-thief electrode assembly 52. ​​The paddle 54 can be moved by a paddle actuator 56 that can be positioned on the bath mounting plate 38. A set of drain rings can be included in the rinse assembly and can be connected to drain and vacuum equipment by one or more drain fittings 42 and suction fittings 44. A number of latches that can be placed on the bottom cup or base plate of the anode assembly can engage with a latch ring 92 on the bath frame 50 or bath mounting plate 38, which can allow for quick installation and removal of the anode assembly.

[0022] The paddles 54 may be configured to oscillate back and forth laterally to facilitate deposition of a metal product on a substrate disposed within the electroplating system 20. This oscillating motion of the paddles 54 may cause the fluid contained in the bath assembly 36 to form waves or induce a wave-like motion. However, this motion may cause the waves to come into contact with each other, which may carry the plating fluid upward, which may cause the fluid to splash onto components of the electroplating system 20, such as the rotor 32 or the head 30. By incorporating baffles according to embodiments of the present technology in locations where splashing may occur, the baffles may limit or prevent fluid loss from the chamber.

[0023] 3 is a schematic partial top view of an electroplating chamber 300, e.g., with the rotor and head removed, according to some embodiments of the present technique. The chamber 300 may be a chamber similar to the tank assembly 36 of FIG. 1 or 2, may include any of the components, features or characteristics discussed above, and may illustrate additional features of an electroplating system according to embodiments of the present technique. As shown, the chamber may include a mounting plate 38 within which a tank 50 may be seated. As explained above, a head with a rotor may extend into the tank to perform an electroplating operation.

[0024] A wear-thief electrode assembly 52 may be coupled to the bath, and may include a number of lugs that may be spaced around the circumference of the assembly for connection to the bath frame. A paddle 54 may be positioned within the bath, and may be operated using a paddle actuator 56 that may reciprocate the paddle to create vibrations in the plating fluid during plating operations. As shown, the coupling of the wear-thief electrode assembly 52 to the bath frame 50 may form, at least in part, a sealed region around the periphery of the bath that may maintain the plating fluid within the plating chamber. However, as shown, the region around the two ends of the paddle actuator may expose the bath radially outward of the wear-thief electrode assembly. During operation, the plating fluid may flow in waves due to the vibration of the paddles, which may cause interactions with other waves. This may cause fluid to be ejected upward, which may flow out of the bath and splash onto any number of components, including the rotor, the bath, the paddle actuator, and other aspects of the bath assembly, located within the bath.

[0025] In response to this, some embodiments of the present technology may incorporate one or more baffles 302 in the vessel frame at a location radially outward of the wearthief electrode assembly, and one or more baffles 302 may be placed over the exposed ingress of the vessel. As shown, the chamber 300 includes three baffles 302A, 302B, and 302C, but it should be understood that any number of baffles may be incorporated into a system according to an embodiment of the present technology. As shown, the baffles 302 may not be symmetrical and may include a number of geometries or configurations that may accommodate different aspects of the vessel assembly. For example, the paddle actuator 56 may include a single coupling located at a first location around the vessel assembly, while including multiple couplings located at a second location around the vessel assembly, such as a second location opposite the first location. While one and two connection locations are shown, it should be understood that embodiments of the present technology may include any number of connections. As shown, there may be gaps between the connections at the second location of the vessel assembly, where the connections extend to the paddle near the lugs of the wearthief electrode assembly. Additionally, there may be gaps in the vessel assembly on either side of the first position connection. In some embodiments, baffles 302 may be included to accommodate each of these configurations.

[0026] In a first position, baffles 302, such as baffles 302A and 302B, can be positioned on either side of an actuator coupling, while in a second position, baffle 302C can be positioned between the two actuator couplings. Baffles 302A and 302B can each be coupled to a wear thief electrode assembly, such as at a lug position. Apertures through the lugs of the baffles can accommodate lug connectors for indirect coupling to a bath frame. Baffle 302C can be directly coupled to a bath frame between the two actuator couplings. In operation, chamber 300 can contain a fluid that facilitates processing within the electroplating system. Paddle 54 can oscillate back and forth within the fluid, which creates a wave or wavy motion within the fluid that can cause the fluid to splash out of the chamber in conventional systems. However, baffle 302 can impede this wave or wavy motion of the fluid, thereby preventing the fluid from splashing out of the bath. The baffle 302 can be positioned radially adjacent to the wear thief electrode assembly 52 and vertically adjacent to the rotor 32 and head 30, and the baffle 302 can be positioned vertically, with the fluid height being the same as or lower than the height of the baffle 302.

[0027] 4A-4B show schematic perspective views of a baffle 400 according to some embodiments of the present technique, and may show detailed views of the baffle 302C discussed above. As shown, the baffle 400 may show a baffle with a different number of slots 402 formed therein. Additional slots may be included to provide additional breaks for the electroplating fluid, but it is understood that any number of slots may be formed to create a barrier to fluid flow that is higher than the height of the baffle. The baffle 400 may be configured to prevent splashing within a bath of an electroplating system by impeding the movement of fluid within the bath during processing operations of the electroplating system. The baffle may be positioned within the bath at the same height as the height of the fluid within the bath, or at a height at least slightly higher or at least slightly lower than an established fixed or variable height of the plating fluid, e.g., an established fixed or variable height of the plating fluid during operation.

[0028] As shown, the baffle 400 can define a set of slots, which can be located at any distance along the baffle. For example, the slots can be formed at less than or about 5 cm, less than or about 4 cm, less than or about 3 cm, less than or about 2 cm, less than or about 2 cm, or less than or about 2 cm along the length of the baffle. The baffle shown in FIG. 4A includes 10 slots and the baffle in FIG. 4B includes 14 slots, but the baffles can have the same or similar overall size. As shown, the slots can be kept open, but in some instances, a mesh can be included in the set of slots to further reduce or eliminate splashing in the electroplating system. The baffles can be characterized by a height of more than or about 10% of the length of the baffle, a height of more than or about 15% of the length of the baffle, a height of more than or about 20% of the length, or more. The baffles may be constructed from materials suitable for use in electroplating systems, including polymeric or other materials that may be insulating and inert in the plating bath. For example, in some embodiments, the baffles may be or may include polytetrafluoroethylene, polyetheretherketone, or other ceramic or polymeric materials that may be stable in the plating bath.

[0029] As shown in FIG. 4, the baffle 400 can include one or more mounting tabs 404 disposed within the slots. The mounting tabs 404 can be sized to receive mounting screws, tabs, bolts, or other attachment items for attaching the baffle to a bath of an electroplating system. Additionally, the mounting tabs 404 can be press-fitted or connected to slots formed in a bath frame or other connection mechanism for joining the parts together. As shown, a first long side can be relatively straight, while an opposing side can feature an arcuate contour to accommodate the rounded contour of a wear thief electrode assembly in the system.

[0030] 5A-5B show schematic perspective views of a baffle 500 according to some embodiments of the present technology and may show detailed views of a baffle such as baffles 302A and 302B discussed above. Baffle 500 may include any features or characteristics of any baffle previously described. As shown, these baffles may also show baffles with different numbers of slots 502 formed therein. For example, these baffles may feature a shape that accommodates the contour of the radially outer vessel of the warethief electrode assembly described above. These baffles may include any number of slots, such as fewer slots 502A or more slots 502B. As shown, these slots may be kept open, but in some examples, a set of the slots may include a mesh to further reduce or eliminate splashing within the electroplating system. Additionally, the baffle 500 may include a mounting tab 504 disposed laterally outward from the slot as shown, and may define an aperture for receiving a bolt or other attachment mechanism for seating the baffle against the wearthief electrode assembly lug as previously described. Unlike the baffle 400, the baffle 500 may be disposed on either side of the actuator coupling as discussed above. Thus, the baffles may be limited to a single attachment location, which may be on the lug of the wearthief electrode assembly. Thus, in some embodiments, the baffle 500 may define a rim or flange 506 extending from an outer wall of the baffle, which may allow the end of the baffle opposite the mounting tab to be seated against the vessel assembly, thereby limiting or preventing movement during operation. For example, the flange 506 may extend from the radially inner and radially outer walls of the baffle as shown, and may extend along any length of the baffle.

[0031] 6 is a schematic partial top view of a bath of an electroplating chamber 600 according to some embodiments of the present technique. As shown, a baffle 400 can be installed on the bath of an electroplating chamber 300. The baffle 400 can be attached to the bath by at least one mounting tab 602 having at least one mounting screw, bolt, or other fastener. In some embodiments, the at least one mounting tab 602 can be configured to attach the baffle 400 to a bath of an electroplating system or to otherwise install the baffle 400 in a bath of an electroplating system. The baffle 400 can be installed in the bath as shown, for example, seated against a back wall at a height above a fluid height of the plating fluid when contained in the bath, below a fluid height of the plating fluid, or approximately equal to a fluid height of the plating fluid. In some embodiments, the baffle 400 can further be positioned radially outward of the wear thief electrode assembly 52, radially adjacent to the wear thief electrode assembly 52, and vertically adjacent to both the rotor and paddle of the electroplating system when in an operating position. For example, the baffle 400 may be located higher than the paddles, but lower than the rotor.

[0032] FIG. 7 is a schematic partial perspective view of a bath of an electroplating chamber 700 according to some embodiments of the present technique. As shown, a baffle 500 can be installed on the bath of the electroplating chamber 300. The baffle 500 can be attached to the bath using at least one mounting screw, bolt or other fastener by at least one mounting tab 702 that can receive a bolt used with a lug of the wearthief electrode assembly 52. ​​The baffle 500 can be installed in the bath as shown, for example, seated between the wearthief electrode assembly 52 and a drain defined in the bath frame. The baffle 500 can further be positioned at a height higher than the fluid height of the plating fluid when contained in the bath, lower than the fluid height of the plating fluid, or approximately coincident with the fluid height of the plating fluid. In some embodiments, the baffle 500 can further be positioned radially outward of the wearthief electrode assembly 52, radially adjacent to the wearthief electrode assembly 52, and vertically adjacent to both the rotor and paddle of the electroplating system when in an operating position.

[0033] For example, the baffle 400 can be positioned higher than the paddles while being lower than the rotor. Additionally, the flanges of the baffle described above can allow the baffle to seat on the rim of the wear thief electrode assembly 52 along the radially inner wall of the baffle. Additionally, the flanges can allow the baffle to seat on the rim of the vessel frame along the radially outer wall of the baffle. This can allow the baffle to be substantially maintained in place during operation if the system has a gap at the end of the baffle opposite the mounting tab. Without such a gap, mounting options within the system may be limited.

[0034] 8 illustrates a flow diagram of a semiconductor processing process 800 according to some embodiments of the present technique, which may illustrate a method of operation of a plating system including the baffles described above. The process may be performed in a variety of processing chambers, including any of the chambers previously described, which may include components according to embodiments of the present technique, such as any of the baffles, or other components previously discussed. Process 800 may include several optional operations that may or may not be specifically related to some embodiments of methods according to the present technique.

[0035] The electroplating chamber can be any of the chambers previously described and can include any number of baffles, including any of the baffle configurations described above. In optional operation 802, process 800 can include installing at least one baffle in the electroplating system. As previously described, during operation, a paddle of the electroplating system can oscillate back and forth in two or more directions within the bath of the electroplating chamber while a deposition process is being performed. To reduce or eliminate splashing, at least one baffle can be installed in a gap around the periphery of the system, which can provide a barrier against wave activity when waves or eddies extend upward into the slots of the baffle.

[0036] A substrate may be chucked to a head or rotor of an electroplating system and a processing operation may be performed in operation 804. The processing may include a plating operation in which the substrate may be plated with a metal, such as any of the metals previously described. The substrate may include any number of features. A paddle actuator may actuate the paddle to move the paddle back and forth to create flows or waves in the plating fluid disposed within the bath, which may improve the plating operation as described above. Waves or flows may form on the surface of the plating fluid, which may create vertical motion. When these waves come into contact with additional waves, the fluid may flow upward at the gaps in the system, which may cause splashing if the gaps are open. However, with baffles installed in the system, the waves may extend upward into slots formed in the baffles, which may form a barrier against wave formation. This may break up the formation of the waves, thereby limiting or preventing splashing within the system.

[0037] In some embodiments, if wave formation or splashing has been sufficiently limited or prevented, the method may be completed, while in some embodiments, adjustments may be made to the baffles. For example, the process may include inspecting the electroplating system for splashing, at optional operation 806, and determining whether splashing has been sufficiently eliminated, at optional operation 808. If plating fluid has been directed onto the rotor or other chamber parts, the method may include adjusting the baffles, at optional operation 810. For example, the adjustments may include adding a baffle or raising or lowering the baffle relative to the plating fluid for better contact with the fluid or for better interaction with the moving fluid in the bath.

[0038] This process can then be repeated for any number of substrates until fluid control is achieved. After splashing or fluid loss has been sufficiently reduced or eliminated, in optional operation 812, production can continue and any number of substrates can be processed. Improved control of fluid flow within the electroplating chamber can be achieved by utilizing baffles according to any embodiment of the present technique. These baffles can have a size or shape that can accommodate any number of chamber configurations and any number of gaps in the system where plating fluids may otherwise escape from the bath.

[0039] In the above description, for purposes of explanation, numerous details are set forth in order to provide an understanding of various embodiments of the present technology. However, it will be apparent to one skilled in the art that certain embodiments may be practiced without some of these details or with additional details.

[0040] Although several embodiments have been disclosed, those skilled in the art will recognize that various modifications, alternative structures and equivalents can be used without departing from the spirit of the embodiments. Moreover, some well-known processes and elements have not been described in order to avoid unnecessarily obscuring the technology. Thus, the above description should not be construed as limiting the scope of the technology.

[0041] Where a range of values ​​is given, unless otherwise clear from the context, each intermediate value between the upper and lower limits of that range is also understood to be specifically disclosed, down to the smallest fraction of the unit of the lower limit. Narrower ranges between a stated value or an unstated intermediate value in a stated range and any other value stated or intermediate value in that stated range are also included. The upper and lower limits of those narrower ranges may be independently included or excluded from the range, and each range in which either or both limits are included in the narrower range, or each range in which both limits are not included in the narrower range, is also included within the scope of the technology and is subject to the specifically excluded limits in the stated range. If a stated range includes one or both of the limits, then ranges excluding one or both of the included limits are also included.

[0042] As used in this specification and the appended claims, the singular forms "a," "an," and "the" include plural references unless the context clearly indicates otherwise. Thus, for example, reference to "an aperture" includes a plurality of such apertures, reference to "the baffle" includes a reference to one or more baffles and one or more equivalents thereof known to those skilled in the art, and so forth.

[0043] Furthermore, the words "comprise(s)", "comprising", "contain(s)", "containing", "including(s)" and "including", when used in this specification and the claims that follow, are intended to specify the presence of stated features, integers, parts or operations, but they do not exclude the presence or addition of one or more other features, integers, parts, operations, operations or groups.

Claims

1. a plating chamber configured to deposit a metallic material onto a substrate disposed within the plating chamber, the plating chamber comprising a rotor and a bath; a wear thief electrode disposed within the vessel; at least one baffle disposed within the plating chamber, the at least one baffle defining a plurality of slots, the at least one baffle configured to prevent fluid from splashing onto the rotor or the plating chamber during electroplating; Equipped with the slot of each of the at least one baffle is disposed radially outward of the wear thief electrode; The electroplating system, wherein each slot of the at least one baffle extends vertically at least through a thickness of the respective baffle.

2. 2. The electroplating system of claim 1, wherein said at least one baffle is disposed on top of said tank, at least partially above a fluid line for said fluid.

3. 2. The electroplating system of claim 1, wherein the at least one baffle further comprises a mounting tab defining at least one mounting hole, the mounting tab extending into at least one slot of the plurality of slots, and the at least one mounting hole sized to receive a mounting screw.

4. 2. The electroplating system of claim 1, wherein the at least one baffle further comprises a mounting tab defining at least one mounting hole, the mounting tab being disposed outside of the plurality of slots, and the at least one mounting hole being sized to receive a mounting screw.

5. 2. The electroplating system of claim 1, wherein the at least one baffle is disposed horizontally adjacent to a wear thief electrode and vertically adjacent to the rotor and paddle, the paddle is disposed on the wear thief electrode and configured to move in at least one direction, and the at least one baffle prevents movement of the fluid in at least one direction by impeding fluid movement using the plurality of slots.

6. 10. The electroplating system of claim 1, wherein a height of the at least one baffle is greater than or equal to 15% of a length of the at least one baffle.

7. The electroplating system of claim 1 , wherein a mesh is disposed in each slot of the plurality of slots.

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