LIQUID SUPPLY APPARATUS AND LIQUID SUPPLY METHOD

Abstract

To couple a plug side liquid flow pass and a socket side liquid flow pass reliably regardless of the orientation of the plug fixed to an opening of a liquid storage container.SOLUTION: A liquid supply device comprises a plug 10 having a plug side liquid flow pass 11, a socket 20 having a socket side liquid flow pass 21, a hand part 31 arranging the socket 20 at a three-dimensional position within an operation range while gripping the socket 20, and a shooting part recognizing the orientation of a plug axis Zp1 of the plug 10. The hand part 31 grips the socket 20 so that the orientation of the plug axis Zp1 recognized by the shooting part and the orientation of a socket axis Zs1 are matched, and the socket side liquid flow pass 21 and the plug side liquid flow pass are coupled by inserting the socket 20 gripped by the hand part 31 into the plug 10.SELECTED DRAWING: Figure 11

Description

[Technical field]

[0001] The present invention relates to a liquid supplying apparatus and a liquid supplying method. [Background technology]

[0002] Conventionally, there is known a liquid supplying device that supplies liquid stored in a liquid storage container to a plurality of supply destination devices (see, for example, Patent Document 1). The liquid supplying device disclosed in Patent Document 1 connects a liquid flow path formed in the plug to a liquid flow path formed in the socket by fixing a plug to an opening of the liquid storage container and attaching a socket to the plug. When attaching the socket to the plug, an operator engages a male thread formed in a mounting nut of the socket with a female thread formed in the plug. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-20793 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the liquid supply device disclosed in Patent Document 1, when connecting the liquid flow path formed in the plug and the liquid flow path formed in the socket, an operator must grasp the socket and attach it to the plug, which increases the operator's workload and may expose the operator to danger when handling highly hazardous liquids.

[0005] In order to prevent the worker's workload from increasing and to prevent the worker from being exposed to danger, it is conceivable to automate the task of attaching a socket to a plug by using a robot hand that holds the socket. For example, it is conceivable to store the position of the plug disclosed in Patent Document 1 in advance and move the socket to the stored position by the robot hand.

[0006] However, since the position and orientation of the opening differs for each individual liquid storage container, the position and orientation of the plug installed in the opening also differs for each individual liquid storage container. Furthermore, when the internal pressure of the liquid storage container changes due to the state of the liquid contained in the liquid storage container or the environmental temperature, the orientation of the opening to which the plug is fixed changes accordingly.

[0007] In these cases, even if the socket is accurately moved to a predetermined position in three-dimensional space, it may not be possible to attach the socket depending on the position or orientation of the plug. Also, if an attempt is made to connect the socket and plug when their orientations do not match, loads will be placed on the socket and plug, and this load may accumulate and lead to failure.

[0008] The present invention has been made in consideration of the above circumstances, and aims to provide a liquid supplying device and a liquid supplying method that can reliably connect a plug-side liquid flow path and a socket-side liquid flow path regardless of the orientation of the plug fixed to the opening of the liquid storage container. [Means for solving the problem]

[0009] In order to solve the above problems, the present invention employs the following means. A liquid supplying device according to one aspect of the present invention includes a first plug fixed to a first opening provided on an upper surface of a liquid storage container and having a plug-side liquid flow path extending along a first plug axis; a first socket removably attached to the first plug and having a socket-side liquid flow path extending along a first socket axis; a gripping mechanism that grips the first socket and positions the first socket in a predetermined orientation at a three-dimensional position within an operating range; and a recognition unit that recognizes an orientation of the first plug axis of the first plug, wherein the gripping mechanism grips the first socket so that the orientation of the first plug axis recognized by the recognition unit coincides with the orientation of the first socket axis, and the first socket gripped by the gripping mechanism is inserted into the first plug to connect the socket-side liquid flow path and the plug-side liquid flow path.

[0010] According to a liquid supplying device according to one aspect of the present invention, a recognition unit recognizes the orientation of a first plug axis of a first plug, and a gripping mechanism grips the first socket so that the orientation of the first plug axis coincides with the orientation of the first socket axis. The first socket gripped by the gripping mechanism is inserted into the first plug, thereby connecting the socket-side liquid flow path and the plug-side liquid flow path. Because the first socket is gripped by the gripping mechanism in an appropriate orientation for the orientation of the first plug, it is possible to reliably connect the plug-side liquid flow path and the socket-side liquid flow path regardless of the orientation of the first plug fixed to the first opening of the liquid storage container.

[0011] In a liquid supplying device according to one aspect of the present invention, it is preferable that a first groove portion extending in a circular shape about the first plug axis and having a plug side fixed portion is formed at a tip of the first plug, and a first protrusion portion extending in a circular shape about the first socket axis and having a socket side fixed portion is formed at a tip of the first socket, the gripping mechanism inserts the first protrusion portion into the first groove portion so that the socket side fixed portion is positioned at a position a first predetermined distance away from the plug side fixed portion on the first plug axis recognized by the recognition unit, and the first socket has an adjustment unit that adjusts a position of the socket side fixed portion on the first socket axis relative to a gripping position gripped by the gripping mechanism to bring the socket side fixed portion into a fixed state in which it is fixed to the plug side fixed portion.

[0012] According to the liquid supply device configured as above, the first protrusion portion of the first socket can be inserted into the first groove portion of the first plug by the gripping mechanism, and the socket side fixing portion can be fixed to the plug side fixing portion by the adjustment portion of the socket.

[0013] In the liquid supplying device configured as described above, it is preferable that the adjustment section releases the fixed state by adjusting a position of the socket side fixing section on the first socket axis relative to the gripping position. According to the liquid supply device of this embodiment, the position of the socket side fixing part can be adjusted by the adjustment part used to fix the socket side fixing part to the plug side fixing part, and the fixed state in which the socket side fixing part is fixed to the plug side fixing part can be released.

[0014] In the liquid supplying device of the above aspect, it is preferable that the gripping mechanism grips the first socket removed from the first plug and moves the first socket to a cleaning container that stores cleaning liquid for cleaning the first socket. According to the liquid supplying device of the above aspect, the first socket detached from the first plug can be moved to the cleaning container and the first socket can be cleaned with the cleaning liquid.

[0015] In one aspect of the liquid supplying device of the present invention, the liquid supplying device includes a first cap part that seals the plug-side liquid flow path and has a first insertion part that is inserted into the first groove part, and a rotation mechanism that has a holding part that holds the first cap part and rotates the holding part about a first cap axis, wherein the first insertion part of the first cap part has a first threaded part formed therein and the first groove part of the first plug has a second threaded part that engages with the first threaded part, the gripping mechanism grips the rotation mechanism so that the orientation of the first plug axis recognized by the recognition part coincides with the orientation of the first cap axis, and the rotation mechanism removes the first cap part from the first plug by rotating the holding part in a predetermined direction while the holding part holds the first cap part.

[0016] According to the liquid supplying device configured as above, the recognition unit recognizes the orientation of the first plug axis of the first plug, and the gripping mechanism grips the rotation mechanism so that the orientation of the first plug axis coincides with the orientation of the first socket axis. The first cap part held by the gripping mechanism is removed from the first plug by rotating the holding unit of the rotation mechanism held by the gripping mechanism in a predetermined direction. Because the rotation mechanism is gripped by the gripping mechanism in an appropriate orientation for the orientation of the first plug, the first cap part can be reliably removed from the first plug regardless of the orientation of the plug fixed to the opening of the liquid storage container.

[0017] In the liquid supplying device having the above configuration, it is preferable that the rotation mechanism is configured to attach the first cap part to the first plug by rotating the holding part in a direction opposite to the specified direction while the first cap part is held by the holding part.

[0018] According to the liquid supplying device of this aspect, the first cap part can be attached to the first plug by rotating the holding part in a direction opposite to the predetermined direction using the rotation mechanism used to remove the first cap part from the first plug.

[0019] In one aspect of the liquid supplying device of the present invention, the liquid supplying device includes a second plug fixed to a second opening provided on an upper surface of the liquid storage container and having a plug-side gas flow path extending along a second plug axis, and a second socket detachably attached to the second plug and having a socket-side gas flow path extending along a second socket axis, wherein the recognition unit recognizes an orientation of the second plug axis of the second plug, the holding mechanism holds the second socket so that the orientation of the second plug axis recognized by the recognition unit coincides with the orientation of the second socket axis, and the second socket held by the holding mechanism is inserted into the second plug to connect the socket-side gas flow path and the plug-side gas flow path.

[0020] In the liquid supply device having this configuration, the recognition unit recognizes the orientation of the second plug axis of the second plug, and the gripping mechanism grips the second socket so that the orientation of the second plug axis coincides with the orientation of the second socket axis. The second socket gripped by the gripping mechanism is inserted into the second plug, thereby connecting the socket-side gas flow path and the plug-side gas flow path. Because the second socket is gripped by the gripping mechanism in an appropriate orientation for the orientation of the second plug, the plug-side gas flow path and the socket-side gas flow path can be reliably connected regardless of the orientation of the second plug fixed to the second opening of the liquid storage container.

[0021] A liquid supplying method according to one aspect of the present invention is a method of supplying liquid using a liquid supplying device, the liquid supplying device comprising: a first plug fixed to a first opening provided on an upper surface of a liquid storage container and having a plug-side liquid flow path extending along a first plug axis; a first socket detachably attached to the first plug and having a socket-side liquid flow path extending along a first socket axis; and a gripping mechanism that grips the first socket and arranges the first socket in a predetermined attitude at a three-dimensional position within an operating range, the method comprising: a recognition step of recognizing an orientation of the first plug axis of the first plug; a gripping step of gripping the first socket with the gripping mechanism so that the orientation of the first plug axis recognized by the recognition step is aligned with the orientation of the first socket axis; and a connection step of connecting the socket-side liquid flow path and the plug-side liquid flow path by inserting the first socket gripped by the gripping step into the first plug.

[0022] According to a liquid supplying method according to one aspect of the present invention, the orientation of a first plug axis of a first plug is recognized in a recognition step, and the first socket is gripped by a gripping mechanism so that the orientation of the first plug axis and the orientation of the first socket axis coincide in a gripping step. The first socket gripped in the gripping step is inserted into the first plug, thereby connecting the socket-side liquid flow path and the plug-side liquid flow path. Because the first socket is gripped by the gripping mechanism in an appropriate orientation with respect to the orientation of the first plug, it is possible to reliably connect the plug-side liquid flow path and the socket-side liquid flow path regardless of the orientation of the first plug fixed to the first opening of the liquid storage container. Effect of the Invention

[0023] According to the present invention, it is possible to provide a liquid supplying device and a liquid supplying method that can reliably connect a plug-side liquid flow path and a socket-side liquid flow path regardless of the orientation of the plug fixed to the opening of a liquid storage container. [Brief description of the drawings]

[0024] [Figure 1]FIG. 1 is a side view showing the liquid supplying device according to the first embodiment of the present invention, illustrating a state in which a robot holds and transports a socket. [Diagram 2] FIG. 1 is a side view showing the liquid supplying device according to the first embodiment of the present invention, illustrating a state in which a robot has placed a socket near a plug. [Diagram 3] 2 is a plan view of the liquid supplying device shown in FIG. 1 as viewed from above, illustrating a state in which a robot holds and transports a socket. [Figure 4] 5 is a flowchart showing a control method of the liquid supplying device of the present embodiment, illustrating a process of attaching a socket to a plug. [Diagram 5] 13 is a diagram showing an image of the top surface of the plug captured by an imaging unit. FIG. [Figure 6] FIG. 11 is a partial cross-sectional view showing a state in which the capping jig has been moved to the vicinity of the plug. [Figure 7] FIG. 4 is a partial cross-sectional view showing a state in which the cap is held by the capping jig. [Figure 8] 11 is a partial cross-sectional view showing the state in which the cap has been removed from the plug by the capping jig. FIG. [Figure 9] FIG. 11 is a partial cross-sectional view showing a state in which the socket has been moved close to the plug. [Figure 10] FIG. 4 is a partial cross-sectional view showing a state in which the socket is inserted into the plug. [Figure 11] FIG. 4 is a partial cross-sectional view showing a state in which the socket is fixed to the plug. [Figure 12] 5 is a flowchart showing a control method of the liquid supplying device of the present embodiment, illustrating a process of detaching a socket from a plug. [Figure 13] 4 is a partial cross-sectional view showing a state before the cap is attached to the plug by the capping jig. FIG. [Figure 14] FIG. 11 is a side view showing a liquid supplying device according to a second embodiment of the present invention, illustrating a state in which a robot has placed a socket near a plug. [Figure 15] FIG. 13 is a side view showing a liquid supplying device according to a third embodiment of the present invention, illustrating a state in which the robot has placed a socket near a plug. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] [First embodiment] A liquid supplying apparatus 100 according to a first embodiment of the present invention will now be described with reference to the drawings. Figs. 1 and 2 are side views showing the liquid supplying apparatus 100 of this embodiment. Fig. 1 shows a state in which the robot 30 holds and transports the socket 20. Fig. 2 shows a state in which the robot 30 has placed the socket 20 in the vicinity of the plug 10. Fig. 3 is a plan view seen from above of the liquid supplying apparatus 100 shown in Fig. 1, showing a state in which the robot 30 holds and transports the socket 20.

[0026] 1 is a device that supplies liquid contained in a liquid storage container 200 to a plurality of destination devices (not shown). Here, the liquid in this embodiment is, for example, pure water or various chemical liquids used in the semiconductor manufacturing process of a semiconductor manufacturing device.

[0027] 1 to 3, liquid supplying device 100 includes a plug (first plug) 10, a sealing stopper 15, a socket (first socket) 20, a robot (gripping mechanism) 30, an imaging section (recognition section) 40, a cap section (first cap section) 50, a capping jig (rotation mechanism) 60, and a control section 70. Even when the internal space of liquid storage container 200 is pressurized and deformed, causing a change in the orientation of plug 10 fixed to first opening 210, liquid supplying device 100 of the present embodiment appropriately fixes socket 20 to plug 10 regardless of the orientation of plug 10.

[0028] 1, liquid storage container 200 is a container formed into a cylindrical shape about axis Z1 extending vertically, and has a top surface (top plate) provided with first opening 210 and second opening 220. Female threads are formed on the inner circumferential surfaces of first opening 210 and second opening 220.

[0029] Since the position and orientation of the first opening 210 differs for each individual liquid storage container 200, the position and orientation of the plug 10 installed in the first opening 210 also differs for each individual liquid storage container 200. Furthermore, when the internal pressure of the liquid storage container changes due to the state of the liquid contained in the liquid storage container 200, the environmental temperature, etc., the orientation of the first opening 210 to which the plug 10 is fixed changes accordingly. The liquid supply device 100 of this embodiment reliably connects the plug 10 and the socket 20 even when the orientation of the first opening 210 changes due to differences in the shape of each individual liquid storage container 200, differences in the environmental temperature, etc.

[0030] The plug 10 has a plug-side liquid flow path 11 that is fixed to the first opening 210 and extends along the plug axis (first plug axis) Zp1. The plug-side liquid flow path 11 extends to the vicinity of the bottom 230 of the liquid storage container 200. A male thread is formed on the outer circumferential surface of the upper end of the plug 10. The plug 10 is fixed to the first opening 210 by engaging the male thread of the plug 10 with the female thread of the first opening 210.

[0031] Fig. 6 is a partial cross-sectional view showing a state in which the capping jig 60 has been moved close to the plug 10. As shown in Fig. 6, a groove portion (first groove portion) 12 extending in an annular shape around the plug axis Zp1 is formed at the tip (upper end) of the plug 10. The groove portion 12 has a fixing groove (plug side fixing portion) 12a for fixing the lock ball 22a of the socket 20. The fixing groove 12a is formed in an annular shape around the plug axis Zp1. The groove portion 12 of the plug 10 has a male thread (second thread portion) 12b formed therein, which engages with the female thread 51a of the cap portion 50.

[0032] The sealing plug 15 is a member that is fixed to the second opening 220 and seals the second opening 220. A male thread is formed on the outer circumferential surface of the sealing plug 15. The sealing plug 15 is fixed to the second opening 220 by engaging the male thread of the sealing plug 15 with the female thread of the second opening 220.

[0033] The socket 20 is detachably attached to the plug 10 and has a socket-side liquid flow path 21 extending along a socket axis (first socket axis) Zs1. The socket 20 is connected to a liquid pipe LL1 for supplying liquid to a destination device and a gas pipe GL1 for supplying gas (gas) to the liquid storage container 200. The socket 20 is held by a hand unit 31 of the robot 30.

[0034] Fig. 9 is a partial cross-sectional view showing a state in which the socket 20 has been moved close to the plug 10. As shown in Fig. 9, a protrusion (first protrusion) 22 extending in an annular shape around the socket axis Zs1 is formed at the tip (lower end) of the socket 20. The protrusion 22 has a plurality of lock balls (socket side fixed portion) 22a that are fixed to the fixing groove 12a of the plug 10. The lock balls 22a are arranged at a plurality of locations at intervals around the socket axis Zs1.

[0035] The robot 30 is a mechanism that holds the socket 20 and the capping jig 60 and places the socket 20 and the capping jig 60 in a predetermined posture at a three-dimensional position defined by axis X, axis Y, and axis Z within a range of motion. The robot 30 is, for example, a six-axis articulated robot. The robot 30 has a hand unit 31, a wrist unit 32, a first arm unit 33, a second arm unit 34, a base unit 35, and a rotating body 36.

[0036] The rotating body 36 is supported rotatably about a vertical axis Zr1 relative to the base portion 35. The first arm portion 33 is supported rotatably about a horizontal axis Zr2 relative to the rotating body 36. The second arm portion 34 is supported rotatably about a horizontal axis Zr3 relative to the first arm portion 33. One end of the wrist portion 32 is attached to the second arm portion 34, and the hand portion 31 is attached to the other end.

[0037] The wrist unit 32 can be positioned at any three-dimensional position within the operating range by combining the rotational movement of the rotating body 36 relative to the base unit 35, the rotational movement of the first arm unit 33 relative to the rotating body 36, and the rotational movement of the second arm unit 34 relative to the first arm unit 33. The wrist unit 32 can also rotate on three axes, and the hand unit 31 can be displaced on the three axes to assume any posture.

[0038] The imaging unit 40 is a device that captures an image of the upper surface of the plug 10 and recognizes the position of the plug 10 in three-dimensional space and the orientation of the plug axis Zp1 of the plug 10. The imaging unit 40 transmits the recognition results of the position of the plug 10 in three-dimensional space and the orientation of the plug axis Zp1 of the plug 10 to the control unit 70.

[0039] As shown in Fig. 6, the cap part (first cap part) 50 is a member that seals the plug-side liquid flow path 11. The cap part 50 has an insertion part 51 that is inserted into the groove part 12 of the plug 10. The insertion part 51 is formed so as to extend cylindrically around the cap axis Zc1. A female thread (first thread part) 51a is formed on the inner circumferential surface of the insertion part 51.

[0040] As shown in FIG. 6, the capping jig 60 is a rotation mechanism having a holding portion 61 that holds the cap portion 50 and rotates the holding portion 61 around the cap axis line (first cap axis line) Zc1. The capping jig 60 has a transmission portion 64 that transmits the rotational power of a rotation shaft 63 that rotates around the cap axis line Zc1 to the holding portion 61. The capping jig 60 transmits the rotational power of the rotation shaft 63 to the holding portion 61, and rotates the cap portion 50 around the cap axis line Zc1. The holding portion 61 is connected to a capping jig main body 65 via a shaft portion 66. A spring 62 built in the capping jig main body 65 applies a biasing force to the shaft portion 66 in a direction away from the capping jig main body 65.

[0041] The control unit 70 controls the robot 30 so that the socket 20 or cap jig 60 held by the hand unit 31 is positioned at the desired position and in the desired posture based on the recognition results of the position of the plug 10 in three-dimensional space and the direction of the plug axis Zp1 of the plug 10 transmitted from the imaging unit 40.

[0042] Next, a control method for liquid supplying apparatus 100 of the present embodiment will be described with reference to Fig. 4. Fig. 4 is a flow chart showing a control method for liquid supplying apparatus 100 of the present embodiment, and shows a process for attaching socket 20 to plug 10. Each process shown in Fig. 4 is performed by control unit 70 executing a control program.

[0043] In step S101, the control unit 70 carries the liquid storage container 200, in which liquid is stored, from a storage location (not shown) to a predetermined position within the operating range of the robot 30. The control unit 70 carries the liquid storage container 200 to the predetermined position, for example, by moving an unmanned transport vehicle (not shown) carrying the liquid storage container 200. Note that the liquid storage container 200 may be carried in by an operator using a transport vehicle (not shown).

[0044] A cap portion 50 is attached to the first opening 210 of the liquid storage container 200 carried in at step S101. Also, a sealing plug 15 is attached to the second opening 220.

[0045] In step S102 (recognition step), the control unit 70 controls the imaging unit 40 to recognize the position of the plug 10 and the orientation of the plug axis Zp1. Here, an example of a process in which the imaging unit 40 recognizes the position of the plug 10 and the orientation of the plug axis Zp1 will be described.

[0046] Fig. 5 is a diagram showing an image of the top surface of the plug 10 captured by the imaging unit 40. As shown in Fig. 5, circular or approximately circular patterns C1, C2, C3, C4, C5, and C6 are formed on the top surface of the plug 10. The patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6 shown by dotted lines in Fig. 5 indicate images obtained when the imaging unit 40 captures an image of the top surface of the plug 10 when the plug axis Zp1 coincides with the axis Z1 extending in the vertical direction.

[0047] The central positions of the patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6 on the XY plane are Pr1, Pr2, Pr3, Pr4, Pr5, and Pr6, respectively. The imaging unit 40 detects the coordinates of Pr1, Pr2, Pr3, Pr4, Pr5, and Pr6 from the images of the patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6, and stores them in advance in a storage unit (not shown) in association with the coordinates Pr (PrX, PrY, PrZ) in the three-dimensional space of a predetermined portion of the plug 10.

[0048] The imaging unit 40 detects P1, P2, P3, P4, P5, and P6, which are coordinates of the center positions on the XY plane of the patterns C1, C2, C3, C4, C5, and C6, from the image captured in step S102. Then, Pr1 and P1, Pr2 and P2, Pr3 and P3, Pr4 and P4, Pr5 and P5, and Pr6 and P6 are respectively compared to recognize coordinates P (PX, PY, PZ) obtained by correcting the coordinates Pr in the three-dimensional space stored in the storage unit. The coordinates P indicate the position in the three-dimensional space of a predetermined part of the plug 10 captured by the imaging unit 40. The imaging unit 40 compares Pr1 and P1, Pr2 and P2, Pr3 and P3, Pr4 and P4, Pr5 and P5, and Pr6 and P6, respectively, to recognize the orientation of the plug axis Zp1.

[0049] In step S103, the control unit 70 controls the robot 30 to grip the capping jig 60 placed on the installation stand TB1. The control unit 70 stores in advance the position of the capping jig 60 placed on the installation stand TB1, and moves the hand unit 31 to a position near the capping jig 60 and grips the capping jig 60.

[0050] In step S104, the control unit 70 controls the robot 30 so that, with the hand unit 31 gripping the capping jig 60, the capping jig 60 moves to the vicinity of the plug 10. The control unit 70 controls the robot 30 so that the holding unit 61 is positioned at a certain distance along the plug axis Zp1 from the coordinate P of the plug 10 recognized in step S102.

[0051] When the robot 30 places the capping jig 60 near the plug 10, it grasps the capping jig 60 so that the orientation of the plug axis Zp1 recognized by the imaging unit 40 coincides with the orientation of the cap axis Zc1. The reason why the orientation of the cap axis Zc1 is aligned with the orientation of the plug axis Zp1 is because the orientation of the plug axis Zp1 does not coincide with the orientation of the axis Z1 extending in the vertical direction.

[0052] 6, in the XZ plane, the plug axis Zp1 is inclined at an angle θ1 with respect to the axis Z1 extending in the vertical direction. By aligning the cap axis Zc1 with the plug axis Zp1, the holding portion 61 of the capping jig 60 can be moved along the plug axis Zp1 toward the cap portion 50.

[0053] In addition, the orientation in which the plug axis Zp1 and the cap axis Zc1 coincide does not necessarily mean that the plug axis Zp1 and the cap axis Zc1 are the same. For example, even if the plug axis Zp1 and the cap axis Zc1 differ from each other by an angle that is sufficiently small compared to the angle θ1 shown in FIG. 6, the plug axis Zp1 and the cap axis Zc1 can be considered to be in an orientation in which the plug axis Zp1 and the cap axis Zc1 coincide. The same applies to the following description.

[0054] In step S105, the control unit 70 controls the robot 30 to grip the capping jig 60 so that the capping jig 60 holds the capping portion 50. The robot 30 moves the capping jig 60 along the plug axis Zp1 toward the capping portion 50. As shown in FIG. 6, the capping jig 60 has a holding portion 61 that holds the capping portion 50.

[0055] As shown in Fig. 6, the holding portion 61 is provided with a lock ball 61a that generates a biasing force toward the cap axis Zc1. Also, an accommodation groove 52 capable of accommodating the holding portion 61 is formed in the upper surface of the cap portion 50. As shown in Figs. 5 and 6, the accommodation groove 52 is formed with a plurality of fixing grooves 52a in which the plurality of lock balls 61a are fixed.

[0056] The capping jig 60 moves toward the capping part 50 so that the holding part 61 is accommodated in the accommodation groove 52 and the locking ball 61a is fixed in the fixing groove 52a. When the capping jig 60 is moved further downward with the locking ball 61a in contact with the central part 53 of the capping part 50, the spring 62 contracts and the biasing force of the spring 62 gradually increases.

[0057] When the biasing force of the spring 62 increases and the lock ball 61a moves in a direction away from the plug axis Zp1, the lock ball 61a moves to the position of the fixing groove 52a and is fixed to the fixing groove 52a. As a result, the cap portion 50 is held by the holding portion 61 of the capping jig 60.

[0058] Thereafter, the robot 30 moves the capping jig 60 upward along the plug axis Zp1 so that the contracted spring 62 assumes its natural length, resulting in the state shown in Fig. 7. The central portion 53 of the cap portion 50 held by the holding portion 61 has a substantially rectangular shape when viewed along the plug axis Zp1, as shown in Fig. 5. The holding portion 61 also has a recess that is substantially rectangular in shape when viewed along the plug axis Zp1 so as to accommodate the substantially rectangular portion of the cap portion 50. The holding portion 61 holds the cap portion 50 without allowing it to spin freely by accommodating the central portion 53 in the recess.

[0059] In step S106, the control unit 70 rotates the holding unit 61 counterclockwise (a predetermined direction) while holding the cap unit 50, thereby removing the cap unit 50 from the plug 10. When the cap unit 50 is rotated counterclockwise, the male thread 12b of the plug 10 and the female thread 51a of the cap unit 50 are disengaged from each other, resulting in the state shown in FIG. 8, and the cap unit 50 is removed from the plug 10. When the male thread 12b of the plug 10 and the female thread 51a of the cap unit 50 are disengaged from each other, the holding unit 61 approaches the capping jig main body 65, the spring 62 contracts, and the shaft unit 66 is accommodated inside the capping jig main body 65.

[0060] In step S106, the control unit 70 controls the robot 30 to move the capping jig 60 to a cap standby position (position 50 in FIG. 3) in a state in which the capping part 50 is held by the holding part 61. At the cap standby position, a fixing part (not shown) having a male thread that engages with the female thread 51a of the capping part 50 is provided.

[0061] The capping jig 60 transmits the rotational power of the rotating shaft 63 rotating clockwise around the cap axis Zc1 to the holding part 61, engages the cap part 50 with the female thread of the fixing part, and fixes the cap part 50 to the fixing part. Thereafter, the control part 70 controls the robot 30 to move the capping jig 60 not holding the cap part 50 to the capping jig standby position (position of reference symbol 60 in FIG. 3). The cap part 50 is removed from the plug 10 by the above steps S102 to S107.

[0062] In step S108, the control unit 70 controls the imaging unit 40 to recognize the position of the plug 10 and the orientation of the plug axis Zp1. The process in step S108 is similar to the process in step S102. The reason why the position of the plug 10 and the orientation of the plug axis Zp1 are recognized again in step S108 is because there is a possibility that the position of the plug 10 and the orientation of the plug axis Zp1 will change when the cap unit 50 is removed.

[0063] In step S109, the control unit 70 controls the robot 30 to grip the socket 20 placed on the placement stand TB2. The control unit 70 stores in advance the position of the socket 20 placed on the placement stand TB2, and moves the hand unit 31 to a position near the socket 20 and grips the socket 20.

[0064] In step S110 (gripping process), the control unit 70 controls the robot 30 so that, with the hand unit 31 gripping the socket 20, the socket 20 moves to the vicinity of the plug 10. The control unit 70 controls the robot 30 so that the protrusion 22 is located at a position a certain distance along the plug axis Zp1 from the coordinate P of the plug 10 recognized in step S108.

[0065] When placing the socket 20 near the plug 10, the robot 30 grasps the socket 20 so that the orientation of the plug axis Zp1 recognized by the imaging unit 40 coincides with the orientation of the socket axis Zs1. The reason why the orientation of the socket axis Zs1 is aligned with the orientation of the plug axis Zp1 is because the orientation of the plug axis Zp1 does not coincide with the orientation of the axis Z1 extending in the vertical direction.

[0066] 9, in the XZ plane, the plug axis Zp1 is inclined at an angle θ2 with respect to the axis Z1 extending in the vertical direction. By aligning the socket axis Zs1 with the plug axis Zp1, the protrusion 22 of the socket 20 can be moved along the plug axis Zp1 toward the plug 10.

[0067] In step S111, the control unit 70 controls the robot 30 to insert the socket 20 into the plug 10. The robot 30 moves the hand unit 31 along the plug axis Zp1 so as to insert the protrusion 22 toward the groove 12 of the plug 10. As shown in Fig. 10, the robot 30 inserts the protrusion 22 into the groove 12 so that the lock ball 22a is positioned at a position a predetermined distance (first predetermined distance) L1 away from the fixing groove 12a on the plug axis Zp1. When the protrusion 22 of the socket 20 is inserted into the groove 12 of the plug 10, the state shown in Fig. 10 is reached.

[0068] In step S112 (coupling step), the control unit 70 controls the socket 20 to fix the socket 20 to the plug 10. The socket 20 has an adjustment unit 23 that moves the protrusion 22 toward the bottom of the groove 12 of the plug 10. The adjustment unit 23 adjusts the position of the lock ball 22a on the socket axis Zs1 relative to the gripping position gripped by the hand unit 31 of the robot 30, so that the lock ball 22a is positioned in the fixing groove 12a.

[0069] When the lock ball 22a is placed in the fixing groove 12a, the lock ball 22a is fixed to the fixing groove 12a by the biasing force of the spring 24. Therefore, the state in which the socket 20 is fixed to the plug 10 is maintained unless an upward force that overcomes the biasing force of the spring 24 is applied.

[0070] 10, when the lock ball 22a is not positioned in the fixing groove 12a, the valve 25 comes into contact with the main body 26, and the lower end of the socket-side liquid flow path 21 is sealed. On the other hand, when the lock ball 22a is positioned in the fixing groove 12a, the main body 26 comes into contact with the tip of the plug 10, and the valve 25 moves away from the main body 26 accordingly. This unseals the socket-side liquid flow path 21, and the socket-side liquid flow path 21 and the plug-side liquid flow path 11 are connected.

[0071] In step S113, the control unit 70 controls the robot 30 so that the hand unit 31 releases the state in which it has gripped the socket 20, and moves the hand unit 31 to a predetermined standby position.

[0072] In step S114, the control unit 70 operates a pump (not shown) connected to the liquid pipe LL1 to start supplying the liquid stored in the liquid storage container 200 to the supply destination device. The control unit 70 controls a gas supply source (not shown) connected to the gas pipe GL1 to supply gas (e.g., air or nitrogen) to the liquid storage container 200 in an amount equivalent to the volume of the liquid removed from the liquid storage container 200.

[0073] The gas supplied from the gas pipe GL1 to the socket 20 flows inside the socket 20 and is supplied to the space above the liquid storage container 200 via the plug-side gas flow path 13. The liquid that reaches the upper end of the plug-side liquid flow path 11 is guided to the liquid pipe LL1 via the socket-side liquid flow path 21. The liquid guided to the liquid pipe LL1 is supplied to the supply destination device. In this way, the liquid supply device 100 starts supplying the liquid to the supply destination device.

[0074] The supply of liquid by liquid supplying device 100 to the supply destination device continues as long as liquid remains in liquid storage container 200, but when the liquid in liquid storage container 200 runs out or falls below a predetermined amount, it is necessary to replace it with a new liquid storage container 200. Next, the process of removing socket 20 from plug 10 in order to replace liquid storage container 200 will be described with reference to Figure 12.

[0075] In step S201, the control unit 70 controls the operation of the pump connected to the liquid pipe LL1 and the supply of gas from the gas supply source connected to the gas pipe GL1 to the socket 20 to stop. When the operation of the pump is stopped, the supply of liquid from the liquid storage container 200 to the liquid pipe LL1 is stopped.

[0076] In step S202, the control unit 70 controls the robot 30 to move the hand unit 31 from a predetermined standby position to a position where the hand unit 31 can grip the socket 20, and grip the socket 20 with the hand unit 31. When the hand unit 31 grips the socket 20, the state shown in FIG.

[0077] In step S203, the control unit 70 controls the socket 20 to release the fixed state in which the socket 20 is fixed to the plug 10. The adjustment unit 23 adjusts the position of the lock ball 22a on the socket axis Zs1 relative to the gripping position gripped by the hand unit 31 of the robot 30 so that the lock ball 22a is not positioned in the fixing groove 12a.

[0078] The adjustment unit 23 applies an upward force that overcomes the biasing force of the spring 24, causing the spring 24 to contract. When the spring 24 contracts, the lock ball 22a is released from the fixed groove 12a, and the lock ball 22a moves to a position away from the fixed groove 12a, resulting in the state shown in FIG. 10. Thereafter, the control unit 70 controls the robot 30 to pull the socket 20 out of the plug 10. The robot 30 moves the hand unit 31 along the plug axis Zp1 so as to pull the protrusion 22 out of the groove 12 of the plug 10.

[0079] In step S204, the control unit 70 controls the robot 30 to move the hand unit 31, while the hand unit 31 is gripping the socket 20, to the cleaning container WC installed on the installation table TB2. A cleaning liquid (e.g., pure water) for cleaning the liquid adhering to the socket 20 is stored in the cleaning container WC.

[0080] By immersing the socket 20 in the cleaning liquid, when the liquid adhering to the socket 20 is a chemical liquid such as a slurry that solidifies when exposed to the air, it is possible to prevent the chemical liquid from drying and solidifying while remaining on the socket 20. It is preferable to keep the socket 20 in a state where new cleaning liquid is constantly supplied to the cleaning container WC and to keep the socket 20 from being contaminated.

[0081] In step S205, the control unit 70 controls the robot 30 so that the hand unit 31 releases the socket 20 and releases the socket 20. Thereafter, the control unit 70 controls the robot 30 so that the hand unit 31 moves to a predetermined standby position. This completes the operation of removing the socket 20 from the plug 10.

[0082] In step S206, the control unit 70 controls the imaging unit 40 to recognize the position of the plug 10 and the direction of the plug axis Zp1. The process of step S206 is similar to the process of step S102.

[0083] In step S207, the control unit 70 controls the robot 30 to grip the cap jig 60 placed on the installation stand TB1. The control unit 70 prestores the cap jig standby position (position of reference symbol 60 in FIG. 4) of the cap jig 60 placed on the installation stand TB1, and controls the robot 30 to move the hand unit 31 to the cap jig standby position and grip the cap jig 60. Thereafter, the control unit 70 controls the robot 30 to move the cap jig 60 to the cap standby position (position of reference symbol 50 in FIG. 3) and hold the cap unit 50 in the holder 61.

[0084] In step S208, the control unit 70 controls the robot 30 so that, with the hand unit 31 gripping the capping jig 60, the capping jig 60 moves to the vicinity of the plug 10. The control unit 70 controls the robot 30 so that the holding unit 61 is positioned at a certain distance along the plug axis Zp1 from the coordinate P of the plug 10 recognized in step S206, resulting in the state shown in FIG.

[0085] When the robot 30 places the capping jig 60 near the plug 10, it grasps the capping jig 60 so that the orientation of the plug axis Zp1 recognized by the imaging unit 40 coincides with the orientation of the cap axis Zc1. The reason why the orientation of the cap axis Zc1 is aligned with the orientation of the plug axis Zp1 is because the orientation of the plug axis Zp1 does not coincide with the orientation of the axis Z1 extending in the vertical direction.

[0086] As shown in Fig. 13, in the XZ plane, the plug axis Zp1 is inclined at an angle θ3 with respect to the axis Z1 extending in the vertical direction. By aligning the cap axis Zc1 with the plug axis Zp1, the cap portion 50 held by the holding portion 61 of the capping jig 60 can be moved along the plug axis Zp1 toward the plug 10. After the state shown in Fig. 13 is reached, the control unit 70 controls the robot 30 to move the cap portion 50 along the plug axis Zp1 toward the plug 10, resulting in the state shown in Fig. 8.

[0087] In step S209, the control unit 70 controls the robot 30 to grip the capping jig 60 so as to attach the cap portion 50 to the plug 10. The robot 30 moves the capping jig 60 along the plug axis Zp1 toward the cap portion 50, to the state shown in FIG. 8. With the cap portion 50 held by the holding portion 61, the control unit 70 rotates the holding portion 61 in a clockwise direction (the direction opposite to the predetermined direction) by the transmission unit 64. As a result, the male thread 12b of the plug 10 and the female thread 51a of the cap portion 50 engage with each other, and the cap portion 50 is attached to the plug 10.

[0088] The capping jig 60 transmits the clockwise rotational power of the rotating shaft 63 to the holding part 61 by the transmission part 64, causing the cap part 50 to rotate clockwise. When the cap part 50 is rotated clockwise, the male thread 12b of the plug 10 and the female thread 51a of the cap part 50 engage with each other to reach the state shown in FIG. 7, and the cap part 50 is attached to the plug 10.

[0089] In step S210, the control unit 70 controls the capping jig 60 so that the holding unit 61 moves upward along the cap axis Zc1, resulting in the state shown in Fig. 6 in which the cap unit 50 is removed from the holding unit 61. Thereafter, the control unit 70 controls the robot 30 so as to move the capping jig 60 to a capping jig standby position while the hand unit 31 is holding the capping jig 60.

[0090] In step S211, the control unit 70 transports the used liquid storage container 200 to a disposal location (not shown). The control unit 70 transports the liquid storage container 200 to the disposal location, for example, by moving an unmanned transport vehicle (not shown) carrying the used liquid storage container 200. Note that an operator may transport the liquid storage container 200 using the transport vehicle (not shown).

[0091] The actions and effects achieved by the liquid supplying apparatus 100 of the present embodiment described above will be described. According to the liquid supplying device 100 of this embodiment, the imaging unit 40 recognizes the orientation of the plug axis Zp1 of the plug 10, and the robot 30 grasps the socket 20 so that the orientation of the plug axis Zp1 and the orientation of the socket axis Zs1 coincide with each other. The socket 20 grasped by the robot 30 is inserted into the plug 10, thereby connecting the socket side liquid flow path 21 and the plug side liquid flow path 11. Since the socket 20 is grasped by the hand unit 31 of the robot 30 in an appropriate orientation with respect to the orientation of the plug 10, the plug side liquid flow path 11 and the socket side liquid flow path 21 can be reliably connected to each other regardless of the orientation of the plug 10 fixed to the first opening 210 of the liquid storage container 200.

[0092] Furthermore, according to the liquid supplying device 100 of the present embodiment, the robot 30 can insert the protrusion 22 of the socket 20 into the groove 12 of the plug 10, and the adjustment unit 23 of the socket 20 can bring about a fixed state in which the lock ball 22a is fixed to the fixing groove 12a. The adjustment unit 23 can also adjust the position of the lock ball 22a, thereby releasing the fixed state in which the lock ball 22a is fixed to the fixing groove 12a.

[0093] Furthermore, according to the liquid supplying device 100 of this embodiment, the imaging unit 40 recognizes the orientation of the plug axis Zp1 of the plug 10, and the robot 30 grasps the capping jig 60 so that the orientation of the plug axis Zp1 coincides with the orientation of the socket axis Zs1. By rotating the holding portion 61 of the capping jig 60 grasped by the hand unit 31 in a counterclockwise direction, the cap portion 50 held by the holding portion 61 is detached from the plug 10.

[0094] Since the capping jig 60 is held by the hand unit 31 in an appropriate posture relative to the orientation of the plug 10, the cap unit 50 can be reliably removed from the plug 10 regardless of the orientation of the plug 10 fixed to the first opening 210 of the liquid storage container 200. In addition, the capping jig 60 can rotate the holding unit 61 in a clockwise direction to attach the cap unit 50 to the plug 10.

[0095] Second Embodiment Next, a liquid supplying apparatus 100A according to a second embodiment of the present invention will be described. This embodiment is a modified example of the first embodiment, and is the same as the first embodiment except where specifically described below, and therefore the description below will be omitted.

[0096] The liquid supplying device 100 of the first embodiment has a socket 20 attached to a plug 10 fixed to a first opening 210 of a liquid storage container 200, and supplies gas to the liquid storage container 200 via the socket 20 to supply liquid to a destination device. In contrast, the liquid supplying device 100A of the present embodiment has a socket 20 attached to a plug 10 fixed to both the first opening 210 and the second opening 220, as shown in Fig. 14.

[0097] 14, the liquid supplying apparatus 100A of the present embodiment includes a plug 10 fixed to both the first opening 210 and the second opening 220, and a socket 20 to which the plug 10 is attached. The structures and functions of the plug 10 and the socket 20 are similar to those of the first embodiment.

[0098] The socket 20 attached to the plug 10 fixed to the first opening 210 is connected to a liquid pipe LL1 that supplies liquid to the destination device. The socket 20 attached to the plug 10 fixed to the second opening 220 is connected to a liquid pipe LL2 that returns the liquid circulating from the destination device to the liquid storage container 200. In this embodiment, the liquid supplied to the destination device via the liquid pipe LL1 is returned to the liquid storage container 200 via the liquid pipe LL2, thereby circulating the liquid.

[0099] The cap portion 50 is attached in advance to both the plug 10 fixed to the first opening 210 and the plug 10 fixed to the second opening 220. In this embodiment, first, the liquid storage container 200 with the cap portion 50 attached to both the first opening 210 and the second opening 220 is carried into a predetermined position within the operating range of the robot 30.

[0100] Thereafter, the control unit 70 executes steps S102 to S113 in Fig. 4 for the first opening 210. Through this operation, the socket 20 is attached to the plug 10 in the first opening 210. Thereafter, the control unit 70 executes steps S102 to S113 in Fig. 4 for the second opening 220. Through this operation, the socket 20 is attached to the plug 10 in the second opening 220.

[0101] After the sockets 20 are attached to both the plug 10 of the first opening 210 and the plug 10 of the second opening 220, the control unit 70 operates a pump (not shown) connected to the liquid pipe LL1. When the pump starts to operate, liquid is supplied from the liquid storage container 200 to the supply destination device via the liquid pipe LL1, and the liquid is returned from the supply destination device to the liquid storage container 200 via the liquid pipe LL2. Gas for replacing the volume of the liquid supplied from the liquid storage container 200 to the outside is supplied to the liquid storage container 200 from both the gas pipe GL1 and the gas pipe GL2. Note that only one of the gas pipe GL1 and the gas pipe GL2 shown in FIG. 14 may be connected to the socket 20, and gas may be supplied to the liquid storage container 200 from a single gas pipe.

[0102] According to the liquid supplying device 100A of the present embodiment, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected to each other regardless of the orientation of the plug 10 fixed to the first opening 210 of the liquid storage container 200. Also, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected to each other regardless of the orientation of the plug 10 fixed to the second opening 220 of the liquid storage container 200.

[0103] Third Embodiment Next, a liquid supplying apparatus 100B according to a third embodiment of the present invention will be described. This embodiment is a modified example of the first embodiment, and is the same as the first embodiment except where specifically described below, and therefore the description below will be omitted.

[0104] In the liquid supplying device 100 of the first embodiment, a socket 20 is attached to a plug 10 fixed to a first opening 210 of a liquid storage container 200, and gas is supplied to the liquid storage container 200 via the socket 20, thereby supplying liquid to a destination device. In contrast, in the liquid supplying device 100B of the present embodiment, as shown in Fig. 15, a plug 80 is fixed to a second opening 220, and a socket 90 is attached.

[0105] The plug (second plug) 80 is fixed to the second opening 220 and has a plug-side gas flow passage 81 extending along the plug axis (second plug axis) Zp2. The plug-side gas flow passage 81 communicates with the space above the liquid storage container 200. A male thread is formed on the outer circumferential surface of the upper end of the plug 80. The plug 80 is fixed to the second opening 220 by engaging the male thread of the plug 80 with the female thread of the second opening 220.

[0106] The socket 90 is detachably attached to the plug 80 and has a socket-side gas flow passage 91 extending along a socket axis (second socket axis) Zs2. The socket 90 is connected to a gas pipe GL3 for supplying gas to the liquid storage container 200. The socket 90 is held by a hand unit 31 of the robot 30.

[0107] The cap portion 50 is attached in advance to both the plug 10 fixed to the first opening 210 and the plug 80 fixed to the second opening 220. In this embodiment, first, the liquid storage container 200 with the cap portion 50 attached to both the first opening 210 and the second opening 220 is carried into a predetermined position within the operating range of the robot 30.

[0108] Thereafter, the control unit 70 executes steps S102 to S113 in Fig. 4 for the first opening 210. Through this operation, the socket 20 is attached to the plug 10 in the first opening 210. Thereafter, the control unit 70 executes steps S102 to S113 in Fig. 4 for the second opening 220. Through this operation, the socket 90 is inserted into the plug 10 in the second opening 220, and the plug-side gas flow path 81 and the socket-side gas flow path 91 are connected to each other.

[0109] The control unit 70 operates a pump (not shown) connected to the liquid pipe LL1 after the socket 20 is attached to the plug 10 of the first opening 210 and the socket 90 is attached to the plug 10 of the second opening 220. When the pump starts to operate, liquid is supplied from the liquid storage container 200 to the supply destination device via the liquid pipe LL1. Gas for replacing the volume of the liquid supplied from the liquid storage container 200 to the outside is supplied from the gas pipe GL3 to the liquid storage container 200 via the socket 90.

[0110] According to the liquid supplying device 100B of the present embodiment, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected regardless of the orientation of the plug 10 fixed to the first opening 210 of the liquid storage container 200. Also, the plug-side gas flow path 81 and the socket-side gas flow path 91 can be reliably connected regardless of the orientation of the plug 80 fixed to the second opening 220 of the liquid storage container 200.

[0111] In this embodiment, the shape of the portion of the plug 10 into which the socket 20 is inserted is different from the shape of the portion of the plug 80 into which the socket 90 is inserted. In addition, the shape of the portion of the socket 20 that is inserted into the plug 10 is different from the shape of the portion of the socket 90 that is inserted into the plug 80. Therefore, even if an attempt is made to connect the socket 90 to the plug 10, the connection cannot be made, and even if an attempt is made to connect the socket 20 to the plug 80, the connection cannot be made. This makes it possible to prevent erroneous connection of the socket 90 to the plug 10 and erroneous connection of the socket 20 to the plug 80.

[0112] In this embodiment, gas is supplied from the gas pipe GL3 to the liquid storage container 200 via the socket 90 in order to replace the volume of liquid supplied from the liquid storage container 200 to the outside, but other aspects are also possible. For example, gas may be supplied from the gas pipe GL3 to the liquid storage container 200 via the socket 90 in order to pressurize the space above the liquid storage container 200. In this case, the liquid stored in the liquid storage container 200 is supplied from the liquid storage container 200 to a supply destination device via the liquid pipe LL1 by the pressure of the gas supplied from the gas pipe GL3. [Explanation of symbols]

[0113] 10 Plug (1st Plug) 11 Plug side liquid flow path 12 Groove 12a Fixing groove (plug side fixing part) 12b Male thread 13 Plug side gas flow passage 15 Sealing plug 20 Sockets 21 Socket side liquid flow path 22 Protrusion 22a Lock ball (socket side fixing part) 23 Adjustment part 30 Robot (grasping mechanism) 31 Hand section 40 Imaging unit (recognition unit) 50 Cap section 51 Insertion section 51a Female thread 52 Storage Groove 52a Fixed groove 60 Cap jig (rotating mechanism) 61 Holding part 61a Rock Ball 62 Spring 63 Rotational Axis 64 Transmission section 65 Cap jig body 66 Shaft section 70 Control section 80 Plug (2nd Plug) 81 Plug side gas flow passage 90 Sockets 91 Socket side gas flow passage 100,100A,100B Liquid supply device 200 Liquid storage container 210 First Opening 220 Second Opening GL1, GL2, GL3 gas piping LL1, LL2 Liquid piping TB1,TB2 installation stand WC cleaning container Zc1 Cap axis Zp1 Plug axis Zs1 Socket axis

Claims

1. a first plug fixed to a first opening provided in an upper surface of the liquid storage container and having a plug-side liquid flow path extending along a first plug axis; a first socket removably attached to the first plug and having a socket-side liquid flow passage extending along a first socket axis; a gripping mechanism that grips the first socket and disposes the first socket in a three-dimensional position within a motion range in a predetermined attitude; a recognition unit that recognizes an orientation of the first plug axis of the first plug, the gripping mechanism grips the first socket so that the first socket is in a position in which the orientation of the first plug axis recognized by the recognition unit coincides with the orientation of the first socket axis, the first socket held by the holding mechanism is inserted into the first plug to connect the socket side liquid flow path and the plug side liquid flow path; a first groove portion extending in an annular shape around the first plug axis and having a plug side fixing portion is formed at a tip end of the first plug, a first protrusion portion is formed at a tip end of the first socket, the first protrusion portion extending in an annular shape around the first socket axis and having a socket side fixing portion; the gripping mechanism inserts the first protrusion into the first groove so that the socket-side fixed portion is disposed at a position a first predetermined distance away from the plug-side fixed portion on the first plug axis recognized by the recognition portion, The first socket has an adjustment section that adjusts the position of the socket side fixing section on the first socket axis relative to the gripping position gripped by the gripping mechanism to bring the socket side fixing section into a fixed state in which it is fixed to the plug side fixing section.

2. The liquid supplying device according to claim 1 , wherein the adjustment section releases the fixed state by adjusting a position of the socket side fixed section on the first socket axis relative to the gripping position.

3. The liquid supply device according to claim 2 , wherein the gripping mechanism grips the first socket detached from the first plug and moves the first socket to a cleaning container that stores a cleaning liquid for cleaning the first socket.

4. a first cap portion that seals the plug-side liquid flow channel and has a first insertion portion that is inserted into the first groove portion; a rotation mechanism having a holding portion that holds the first cap portion and rotates the holding portion about a first cap axis line, The first insertion portion of the first cap portion has a first screw portion formed therein, a second threaded portion that engages with the first threaded portion is formed in the first groove portion of the first plug, the gripping mechanism grips the rotation mechanism so that the orientation of the first plug axis recognized by the recognition unit coincides with the orientation of the first cap axis, A liquid supplying device according to any one of claims 1 to 3, wherein the rotation mechanism removes the first cap part from the first plug by rotating the holding part in a predetermined direction while the holding part holds the first cap part.

5. The liquid supplying apparatus according to claim 4 , wherein the rotation mechanism attaches the first cap part to the first plug by rotating the holding part in a direction opposite to the predetermined direction while the first cap part is held by the holding part.

6. a second plug fixed to a second opening provided in an upper surface of the liquid storage container and having a plug-side gas flow passage extending along a second plug axis; a second socket removably attached to the second plug and having a socket-side gas flow passage extending along a second socket axis; the recognition unit recognizes an orientation of the second plug axis of the second plug, the gripping mechanism grips the second socket so that the second socket is in a position in which the orientation of the second plug axis recognized by the recognition unit coincides with the orientation of the second socket axis, 6. A liquid supplying device according to claim 1, wherein the socket-side gas flow path and the plug-side gas flow path are connected by inserting the second socket held by the holding mechanism into the second plug.

7. A liquid supplying method for supplying liquid by a liquid supplying device, comprising the steps of: The liquid supply device includes: a first plug fixed to a first opening provided in an upper surface of the liquid storage container and having a plug-side liquid flow path extending along a first plug axis; a first socket removably attached to the first plug and having a socket-side liquid flow passage extending along a first socket axis; a gripping mechanism that grips the first socket and places the first socket in a three-dimensional position within a range of motion in a predetermined attitude; a first groove portion extending in an annular shape around the first plug axis and having a plug side fixing portion is formed at a tip end of the first plug, a first protrusion portion is formed at a tip end of the first socket, the first protrusion portion extending in an annular shape around the first socket axis and having a socket side fixing portion; a recognition step of recognizing an orientation of the first plug axis of the first plug; a gripping step of gripping the first socket by the gripping mechanism so that the first socket is in a position in which the orientation of the first plug axis recognized in the recognition step coincides with the orientation of the first socket axis; a connecting step of connecting the socket side liquid flow path and the plug side liquid flow path by inserting the first socket gripped in the gripping step into the first plug, The connecting step includes inserting the first protrusion into the first groove so that the socket side fixed part is positioned at a position a first predetermined distance away from the plug side fixed part on the first plug axis recognized in the recognition step, and adjusting the position of the socket side fixed part on the first socket axis relative to a gripping position at which it is gripped by the gripping mechanism to achieve a fixed state in which the socket side fixed part is fixed to the plug side fixed part.

Images