Liquefied gas filtration filters

Abstract

To inhibit temperature unevenness in a device and prevent alteration and re-liquefaction during filtration of a liquefied gas.SOLUTION: A filter 1 for filtration includes: a housing 200 having heat conductivity; a filter member 300; and a heat transmission member 400 having heat conductivity. The housing 200 includes: a gas inlet 201 provided at one end side in an axis direction A; a gas outlet 202 provided at the other end side; and a filtration chamber 203 extending between the gas inlet 201 and the gas outlet 203. The heat transmission member 400 is disposed within the housing 200 so as to divide the filtration chamber 203 into an upstream side passage 210 and a downstream side passage 220. The heat transmission member includes: a first member 401 fixed to the housing 200 at the side of the gas inlet 201; a second member 402 fixed to the housing 200 at the side of the gas outlet 202; and a cylindrical third member 403 which extends between these members in the axis direction A and has gas permeability; and a fourth member 404 which extends from the first member 401 and / or the second member 402 into an enclosed space 220A enclosed by the third member 403. The filter member 300 is fixed to the third member 403.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a filter for filtration of liquefied gas, which is used for filtering fine impurities contained in liquefied gas. [Background technology]

[0002] The following Patent Document 1 discloses a filter and a filter system for filtering liquefied gas. The filter includes a housing and a partition member that divides the inside of the housing into an upstream side and a downstream side. The housing includes a heat receiving part for receiving heat supply from the outside. The partition member includes a substantially cylindrical support body, a substantially cylindrical porous filter part that is disposed around the support body and defines a flow path into which the liquefied gas flows between the support body and the inner circumferential surface of the housing, and a heat conducting member that connects one end side of the support body to the housing and conducts heat from the heat receiving part to the support body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2020-18981 DISCLOSURE OF THEINVENTION [Problem to be solved by the invention]

[0004] In general, when removing impurities from liquefied gas that liquefies under normal temperature and pressure conditions, the temperature is raised (for example, about 200°C) and filtration is performed in a vaporized state. However, since liquefied gas has a property of deteriorating when it becomes hotter than a certain temperature t1 and re-liquefying when it becomes colder than a certain temperature t2, the temperature inside the filtration chamber needs to be maintained lower than temperature t1 and higher than temperature t2. In particular, when filtering liquefied gas in which the difference between temperatures t1 and t2 is significantly small, stricter temperature control inside the filtration chamber is required.

[0005] The present invention has been devised to solve the above-mentioned problems, and has as its main object to provide a filter for filtration of liquefied gas that can suppress temperature unevenness in the filtration chamber and, in turn, prevent deterioration and re-liquefaction of the liquefied gas during filtration. [Means for solving the problem]

[0006] The present invention provides a liquefied gas filtration filter for filtering liquefied gas, comprising a housing having thermal conductivity, a filter member, and a heat transfer member having thermal conductivity, the housing being cylindrical and defining an axial direction, and including a gas inlet provided at one end side in the axial direction, a gas outlet provided at the other end side in the axial direction, and a filtration chamber extending between the gas inlet and the gas outlet, the filter member being a cylindrical porous body and disposed within the housing, the heat transfer member connecting the filtration chamber to an upstream flow path extending from the gas inlet to the filter member, and a gas outlet provided at the upstream flow path extending from the gas inlet to the filter member, a downstream flow path from a first member fixed to the housing on the gas inlet side and a downstream flow path from the first member to the gas outlet, the heat transfer member including a first member fixed to the housing on the gas inlet side, a second member fixed to the housing on the gas outlet side, a gas permeable cylindrical third member in contact with the first member and the second member and extending between them in the axial direction, and a fourth member extending from the first member and / or the second member into an enclosed space surrounded by the third member, and the filter member is fixed to the third member.

[0007] In another aspect of the invention, the first member and the second member may be formed from the same material as the housing.

[0008] In another aspect of the present invention, the first member and the second member may be formed of a material different from the housing, and the thermal conductivity of the first member and the second member may be greater than the thermal conductivity of the housing.

[0009] In another aspect of the invention, the fourth member may have a thermal conductivity equal to or greater than that of the housing.

[0010] In another aspect of the invention, the enclosed space may be cylindrical, the fourth member may be cylindrical, and the fourth member may be arranged coaxially with the enclosed space to define a pipe-shaped flow path around the fourth member.

[0011] In another aspect of the present invention, a cross-sectional area of ​​the pipe-shaped flow path perpendicular to the axial direction may be equal to or larger than a cross-sectional area of ​​the gas outlet perpendicular to the axial direction.

[0012] In another aspect of the present invention, the downstream flow passage may further include a cylindrical flow passage between the pipe-shaped flow passage and the second member in the axial direction, and a surface area of ​​an outer circumferential surface of the cylindrical flow passage may be greater than or equal to the cross-sectional area of ​​the gas outlet.

[0013] In another aspect of the present invention, the filter member may be fixed to an outer circumferential surface side of the third member.

[0014] In another aspect of the present invention, the filter member may be a sintered body of metal fibers. Effect of the Invention

[0015] Since the liquefied gas filtration filter of the present invention employs the above-mentioned configuration, it is possible to make the temperature uniform within the filtration chamber, and thus to prevent deterioration and re-liquefaction of the liquefied gas during filtration. [Brief description of the drawings]

[0016] [Figure 1] FIG. 2 is a cross-sectional view of the filter for filtration of liquefied gas according to the present embodiment. [Diagram 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. [Diagram 3] FIG. 2 is a cross-sectional view taken along line III-III in FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Diagram 5] 1A is an enlarged view of the main part near the cylindrical flow path, and FIG. 1B is a perspective view of the main part. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. It should be understood that the drawings include representations different from the dimensional ratio of the actual structure in order to facilitate understanding of the present invention. In addition, when there are multiple embodiments, the same or common elements are given the same reference numerals throughout the specification, and duplicated explanations are omitted. Furthermore, the specific configurations shown in the embodiments and drawings are for understanding the contents of the present invention, and the present invention is not limited to the specific configurations shown in the drawings.

[0018] [filter] FIG. 1 is a cross-sectional view of a filter for filtration of liquefied gas (hereinafter, simply referred to as "filter") 1 according to one embodiment of the present invention. The filter 1 of this embodiment is for filtering fine impurities from liquefied gas G used, for example, in the manufacture of semiconductors. The liquefied gas G of this embodiment is, for example, liquid at room temperature and pressure, but vaporizes when heated to a high temperature. The type and use of the liquefied gas G are not limited to the above-mentioned aspects.

[0019] As shown in FIG. 1, the filter 1 includes a housing 200, a filter member 300, and a heat transfer member 400.

[0020] [housing] The housing 200 is an exterior material of the filter 1, and is formed in a tubular shape that defines an axial direction A. The axial direction A is a direction along the axis CL of the tube. The housing 200 of this embodiment is formed in a cylindrical shape. In another aspect, the housing 200 may be in a tubular shape with a polygonal cross section.

[0021] The housing 200 includes a gas inlet 201 provided at one end side in the axial direction A, a gas outlet 202 provided at the other end side in the axial direction A, and a filtration chamber 203 extending between the gas inlet 201 and the gas outlet 202.

[0022] The housing 200 of this embodiment includes a pair of small diameter portions 200A that define a gas inlet 201 having an inner diameter d1 and a gas outlet 202. The small diameter portions 200A are laid out so as to be located on a common axis CL.

[0023] The housing 200 of this embodiment includes a large diameter portion 200B between a pair of small diameter portions 200A, which defines a filtration chamber 203 with an inner diameter d2 (>d1). A radial wall 200C extending in a radial direction B (a direction perpendicular to the axial direction A, the same applies below) of the housing 200 is provided between the small diameter portion 200A and the large diameter portion 200B. The radial direction B exists 360 degrees around the axial direction A, and an example of the radial direction B is indicated by the symbol B in FIG. 1.

[0024] The housing 200 of the present embodiment is made of a material having thermal conductivity, that is, the housing 200 is made of a material that can transfer heat from a high temperature side to a low temperature side.

[0025] Further, in the present embodiment, a heat receiving section 205 is provided near the gas inlet 201 of the housing 200. The heat receiving section 205 receives heat from the outside by being connected to a heat source such as an electric heater H. This heat is transferred to the entire housing 200, causing the housing 200 to become hot. The hot housing 200 heats the liquefied gas G flowing through the filtration chamber 203 by radiation.

[0026] The housing 200 of this embodiment is formed of stainless steel, which is a material having the above-mentioned thermal conductivity. In a preferred embodiment, austenitic stainless steel is used for the housing 200, and SUS316L having high corrosion resistance is particularly suitable.

[0027] [Filter material] The filter member 300 is for removing impurities from the liquefied gas G. The filter member 300 of this embodiment is made of a porous body having a large number of continuous pores therein.

[0028] As the porous body, for example, a sintered body of metal fibers is preferable. As the metal fibers, for example, long fibers of stainless steel are preferable. As the stainless steel, for example, austenitic stainless steel is used, and in particular, SUS316L having high corrosion resistance is preferable. The average fiber diameter of the metal fibers (long fibers) is preferably, for example, about 1 to 100 μm. Such a filter member 300 can capture fine impurities (mist and dust) in the liquefied gas G with high accuracy.

[0029] The average porosity of the filter member 300 is not particularly limited, but is desirably 80% or more and 94% or less, for example. The filter member 300 may have a structure in which a plurality of layers having different average porosities are laminated.

[0030] [Heat transfer material] The heat transfer member 400 is disposed inside the housing 200 so as to divide the filtration chamber 203 of the housing 200 into an upstream flow path 210 and a downstream flow path 220. Similarly to the housing 200, the heat transfer member 400 has thermal conductivity.

[0031] The upstream flow path 210 refers to the flow path from the gas inlet 201 to the filter member 300. Therefore, the liquefied gas G flowing through this upstream flow path 210 is in an unfiltered state. In addition, in this embodiment, the downstream flow path 220 refers to the flow path from the filter member 300 to the gas outlet 202. Therefore, the liquefied gas G flowing through the downstream flow path 220 is in a filtered state. These details will be described later.

[0032] The heat transfer member 400 includes a first member 401, a second member 402, a third member 403, and a fourth member 404.

[0033] [First member] The first member 401 is fixed to the housing 200 on the gas inlet 201 side. Fig. 2 shows a cross-sectional view taken along line II-II in Fig. 1. As shown in Figs. 1 and 2, the first member 401 of this embodiment is, for example, a disk-shaped member extending in the radial direction B of the housing 200. The outer circumferential edge of the first member 401 of this embodiment is fixed to the inner circumferential surface of the large diameter portion 200B of the housing 200.

[0034] The first member 401 of the present embodiment is fixed to the housing 200 by, for example, welding. Such a first member 401 can be controlled to a high temperature by receiving heat from the housing 200.

[0035] 2, a plurality of ventilation holes 401A are formed on the outer peripheral edge side of the first member 401, penetrating the first member 401 in the axial direction A. Also, as shown in Fig. 1, a first attachment portion 401B for fixing a third member 403 is formed on the gas outlet 202 side of the first member 401.

[0036] The first member 401, except for the ventilation hole 401A, prevents the liquefied gas G flowing in from the gas inlet 201 from moving downstream. Therefore, the high-pressure liquefied gas G that has flowed into the housing 200 from the gas inlet 201 flows from the outer circumferential edge side of the first member 401 through the ventilation hole 401A to the downstream side of the first member 401.

[0037] As long as the first member 401 is fixed to the housing 200 on the side of the gas inlet 201, the specific shape thereof can be modified in various ways other than those described above. For example, the first member 401 may be a member separate from the housing 200, or may be formed integrally with the housing 200 in advance. Furthermore, the fixing position of the first member 401 may not be the large diameter portion 200B of the housing 200, but may be, for example, the radial wall 200C.

[0038] [Second member] The second member 402 is fixed to the housing 200 on the gas outlet 202 side of the first member 401. Fig. 3 shows a cross-sectional view taken along line III-III in Fig. 1. As shown in Figs. 1 and 3, the second member 402 of this embodiment is, for example, a tubular (cylindrical) member extending in the axial direction A inside the housing 200 from the radial wall 200C on the gas outlet 202 side. The second member 402 of this embodiment has an end on the gas outlet 202 side fixed to the inner surface of the radial wall 200C of the housing 200, and an opposite end terminates inside the housing 200.

[0039] The second member 402 of the present embodiment is fixed to the housing 200 by, for example, welding. Such a second member 402 can be controlled to a high temperature by receiving heat from the housing 200.

[0040] 3, the second member 402 divides the gas outlet 202 side of the filtration chamber 203 into an inner side and an outer side in the radial direction B of the housing 200. The inner flow passage partition surrounded by the second member 402 communicates with the gas outlet 202. In addition, as shown in FIG. 1, a second attachment portion 402B for fixing the third member 403 is formed at the end of the second member 402 on the gas inlet 201 side.

[0041] The specific shape of the second member 402 is not limited to the above-mentioned embodiment and may be modified in various ways as long as the second member 402 is fixed to the housing 200 on the side of the gas outlet 202. For example, the second member 402 may be configured as a member separate from the housing 200 as in this embodiment, or may be formed integrally with the housing 200 in advance.

[0042] [Third member] Fig. 4 is a cross-sectional view taken along line IV-IV in Fig. 1. As shown in Fig. 1 and Fig. 4, the third member 403 extends in the axial direction A between the first member 401 and the second member 402. The third member 403 in this embodiment is cylindrical, and is disposed coaxially with the axial center CL of the housing 200.

[0043] Moreover, one end of the third member 403 in the axial direction A contacts the first mounting portion 401B of the first member 401, and the other end of the third member 403 in the axial direction A contacts the second mounting portion 402B of the second member 402. Such a third member 403 can receive heat from both the first member 401 and the second member 402.

[0044] In addition, the third member 403 has gas permeability. The third member 403 of this embodiment has a plurality of through holes 403A (FIG. 4) through which the liquefied gas G can pass in the radial direction B. The third member 403 of this embodiment is made of a so-called punched metal in which a plurality of circular through holes 403A having a diameter of 1.0 to 1.5 mm are formed on the surface of a cylinder made of a metal material such as stainless steel. However, the configuration of the third member 403 is not limited to this embodiment.

[0045] [Fourth member] The downstream flow path 220 includes an enclosed space 220A surrounded by a third member 403. The enclosed space 220A is located radially inwardly away from the large diameter portion 200B of the housing 200, and therefore the gas temperature therein tends to be lower than in other parts. The fourth member 404 extends from the first member 401 and / or the second member 402 into the enclosed space 220A in order to effectively heat the enclosed space 220A.

[0046] The fourth member 404 in this embodiment is, for example, cylindrical, and its outer diameter is smaller than the radial dimension of the enclosed space 220A. The fourth member 404 is provided, for example, on the first member 401, and protrudes through the enclosed space 220A to the gas outlet 202 side. In another aspect, the fourth member 404 may be provided on the second member 402 side, or on both the first member 401 and the second member 402.

[0047] [Fixing filter parts] The above-mentioned filter member 300 is fixed to the third member 403. In this embodiment, the filter member 300 is disposed on the outer circumferential surface side of the third member 403. This allows the filter member 300 to ensure a wide contact area with the liquefied gas G on the upstream side thereof. In another aspect, the filter member 300 may be disposed on the inner circumferential surface side of the third member 403.

[0048] [Operation of this embodiment] 1, in the filter 1 of the present embodiment configured as above, the upstream flow passage 210 is defined as a flow passage extending from the gas inlet 201 through the ventilation hole 401A of the first member 401 to the outer circumferential surface of the filter member 300. The downstream side of the upstream flow passage 210 in the axial direction A is closed by a radial wall 200C on the gas outlet 202 side of the housing 200.

[0049] The downstream flow path 220 is defined as a flow path that extends from the filter member 300 through the through-hole 403A (FIG. 4) of the third member 403, between the third member 403 and the fourth member 404, and further through the inner circumferential side of the second member 402 to the gas outlet 202. The upstream side of the downstream flow path 220 in the axial direction A is closed by the surface of the first member 401 on the gas outlet 202 side.

[0050] When high-temperature, high-pressure liquefied gas G is supplied from the gas inlet 201, the liquefied gas G passes through the upstream flow path 210 and reaches the filter member 300. When the liquefied gas G passes through the filter member 300, impurities in the gas are removed. The liquefied gas G that has passed through the filter member 300 is purified, and is taken out from the gas outlet 202 via the downstream flow path 220.

[0051] In the above filtering process, it is desirable that the temperature of the housing 200 is controlled to a temperature at which the liquefied gas G does not change or liquefy. In this embodiment, heat is supplied to the heat receiving portion 205 of the housing 200 from an electric heater H, which is an external heat source. The heat applied to the heat receiving portion 205 is transferred to the entire housing 200, for example, the small diameter portion 200A, the large diameter portion 200B, and the radial wall 200C, and heats the housing 200 to a predetermined temperature. In addition, the heat transfer members 400 (the first member 401, the second member 402, the third member 403, and the fourth member 404) also receive heat from the housing 200 and are heated to a predetermined temperature.

[0052] Therefore, in the filtration chamber 203 of the present embodiment, the upstream flow path 210 is heated in a well-balanced manner by the first member 401, and the downstream flow path 220 is heated in a well-balanced manner by the second member 402. Therefore, in the filtration chamber 203, temperature unevenness in the axial direction A is suppressed, and the liquefied gas G can be filtered in a highly accurate temperature environment.

[0053] In addition, in this embodiment, since the third member 403 is in contact with the first member 401 and the second member 402, the third member 403 receives heat from both sides in the axial direction A. Such a third member 403 has a uniform temperature distribution in the axial direction A, and thus, in the filtration chamber 203, temperature unevenness in the axial direction A is reduced.

[0054] Furthermore, since the porous filter member 300 functions as a heat insulator in the filtration chamber 203, the liquefied gas G (i.e., the liquefied gas G in the enclosed space 220A) immediately after passing through the filter member 300 tends to be particularly low in temperature. However, in this embodiment, since the fourth member 404 extends into the enclosed space 220A, the liquefied gas G in the enclosed space 220A can be heated from the inside. Therefore, the filter 1 of this embodiment can suppress the temperature unevenness in the radial direction B in the enclosed space 220A as described above.

[0055] As described above, the filter 1 of this embodiment can suppress temperature unevenness in the axial direction A and radial direction B within the filtration chamber 203, and can thus prevent deterioration and re-liquefaction of the liquefied gas G during filtration.

[0056] [Preferred embodiment] In order to further enhance the above-mentioned effect, the length of the fourth member 404 in the axial direction A is preferably 50% or more, more preferably 60% or more, and even more preferably 70% or more of the length of the enclosed space 220A in the axial direction A. By making the length of the fourth member 404 in the axial direction A 50% or more of the length of the enclosed space 220A in the axial direction A, heat can be sufficiently distributed to the end of the filter member 300 on the gas outlet 202 side, and temperature unevenness due to temperature drop can be reliably prevented. Therefore, it is particularly preferable that the tip of the fourth member 404 extends to the end of the filter member 300 on the gas outlet 202 side.

[0057] Moreover, the fourth member 404 of this embodiment is disposed coaxially with the axis CL of the housing 200. This defines a pipe-shaped flow path 220B around the fourth member 404. Such a pipe-shaped flow path 220B helps to heat the liquefied gas G in the enclosed space 220A more uniformly.

[0058] It is desirable that the cross-sectional area a1 (shown in FIG. 4) perpendicular to the axial direction A of the pipe-shaped flow path 220B is equal to or larger than the cross-sectional area a2 (shown in FIG. 3) perpendicular to the axial direction A of the gas outlet 202. This can reduce the pressure loss in the filtration chamber 203.

[0059] The downstream flow passage 220 further includes a cylindrical flow passage 220C between the pipe-shaped flow passage 220B and the second member 402 in the axial direction A. This cylindrical flow passage 220C is formed downstream of the end of the fourth member 404 and is an upstream portion having a diameter larger than the inner diameter d1 of the gas outlet 202. This cylindrical flow passage 220C plays a role in smoothly flowing the liquefied gas G from the pipe-shaped flow passage 220B to the gas outlet 202. The surface area of ​​the outer circumferential surface of the cylindrical flow path 220C may be equal to or larger than the cross-sectional area of ​​the gas outlet 202.Fig. 5(A) shows an enlarged view of the main part near the cylindrical flow path 220C, and Fig. 5(B) shows a perspective view of the main part. In a preferred embodiment, as shown in Figs. 5(A) and (B), the surface area a3 (lightly colored in Fig. 5(B)) of the imaginary cylinder V connecting the edge 404e at the tip of the fourth member 404 and the upstream opening edge 202e of the gas outlet 202 is set to be equal to or larger than the cross-sectional area a2 of the gas outlet 202. This can further reduce pressure loss and improve the uniformity of the temperature inside the filtration chamber 203.

[0060] In this embodiment, the housing 200, the filter member 300, and the heat transfer member 400 are all formed of stainless steel (SUS316L). In other aspects, for example, when the liquefied gas G is corrosive, Hastelloy (registered trademark of Haynes Corporation, USA), pure nickel, nickel alloy, etc. may be used instead of the SUS316L.

[0061] Furthermore, in this embodiment, the first member 401, the second member 402, and the third member 403 are formed of the same material as the housing 200, and therefore have the same thermal conductivity as the housing 200. In another aspect, the first member 401 and the second member 402 may be formed of a material different from that of the housing 200. In this case, it is desirable that the first member 401 and the second member 402 have a higher thermal conductivity than the thermal conductivity of the housing 200. This allows heat to be transferred more efficiently into the filtration chamber 203 of the housing 200.

[0062] From a similar perspective, it is desirable for the fourth member 404 to have a thermal conductivity equal to or greater than that of the housing 200 .

[0063] The filter 1 of this embodiment can be combined with an electric heater H to form a filter system.

[0064] Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above specific disclosure, and can be implemented in various modified forms within the scope of the technical ideas described in the claims. [Explanation of symbols]

[0065] 1 Filter 200 Housing 201 Gas inlet 202 Gas outlet 203 Filtration chamber 210 Upstream flow path 220 Downstream flow path 220A Enclosed Space 220B Pipe-shaped flow channel 220C Cylindrical channel 300 Filter material 400 Heat transfer material 401 First Component 402 Second member 403 Third Component 404 Fourth Component A Axial direction G Liquefied gas

Claims

1. A liquefied gas filtration filter for filtering liquefied gas, The heat exchanger includes a housing having thermal conductivity, a filter member, and a heat transfer member having thermal conductivity, the housing is cylindrical and defines an axial direction, and includes a gas inlet provided at one end side in the axial direction, a gas outlet provided at the other end side in the axial direction, and a filtration chamber extending between the gas inlet and the gas outlet, The filter member is a cylindrical porous body and is disposed in the housing. the heat transfer member is disposed inside the housing so as to divide the filtration chamber into an upstream flow passage from the gas inlet to the filter member and a downstream flow passage from the filter member to the gas outlet, the heat transfer member includes a first member fixed to the housing on the gas inlet side, a second member fixed to the housing on the gas outlet side, a gas permeable cylindrical third member in contact with the first member and the second member and extending between them in the axial direction, and a fourth member extending from the first member and / or the second member into an enclosed space surrounded by the third member, The filter member is fixed to the third member. Liquefied gas filtration filters.

2. The filter for filtration of liquefied gas according to claim 1 , wherein the first member and the second member are formed from the same material as the housing.

3. 2. The filter for filtration of liquefied gas according to claim 1, wherein the first member and the second member are formed of a material different from that of the housing, and the thermal conductivity of the first member and the second member is greater than the thermal conductivity of the housing.

4. 4. The filter for filtration of liquefied gas according to claim 1, wherein the fourth member has a thermal conductivity equal to or greater than that of the housing.

5. 5. The filter for filtration of liquefied gas according to claim 1, wherein the enclosed space is cylindrical, the fourth member is cylindrical, and the fourth member is arranged coaxially with the enclosed space to define a pipe-shaped flow path around the fourth member.

6. The filter for filtration of liquefied gas according to claim 5 , wherein a cross-sectional area of ​​the pipe-shaped flow path perpendicular to the axial direction is equal to or larger than a cross-sectional area of ​​the gas outlet perpendicular to the axial direction.

7. 7. The filter for filtration of liquefied gas according to claim 6, wherein the downstream flow path further includes a cylindrical flow path between the pipe-shaped flow path and the second member in the axial direction, and a surface area of ​​an outer circumferential surface of the cylindrical flow path is equal to or greater than the cross-sectional area of ​​the gas outlet.

8. The filter for filtration of liquefied gas according to claim 1 , wherein the filter member is fixed to an outer circumferential surface side of the third member.

9. 9. The filter for filtration of liquefied gas according to claim 1, wherein the filter member is a sintered body of metal fibers.

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