SUBSTRATE PROCESSING APPARATUS, CONTROL DEVICE FOR SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD FOR SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM CONTAINING PROGRAM

Abstract

To flexibly and quickly save processing liquid in a substrate processing device.SOLUTION: A substrate processing device is configured to switch a transfer timetable between a normal mode in which the throughput of the substrate processing device is maximized and a processing liquid saving mode in which the processing liquid is saved in at least one processing bath, determines whether the substrate processing device is in an off-season when demand for production is low, on the basis of the rate-limiting point that determines the processing speed of the entire substrate processing device, sets the transfer timetable to the processing liquid saving mode when it is determined that the substrate processing device is in the off season, and sets the transfer timetable to the normal mode when it is determined that the substrate processing device is not in the off season.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to a substrate processing apparatus, a control device for the substrate processing apparatus, a control method for the substrate processing apparatus, and a storage medium storing a program for causing a computer to execute the control method for the substrate processing apparatus. [Background technology]

[0002] There are various configurations of substrate processing apparatuses. For example, substrate processing apparatuses have multiple processing tanks that contain processing liquids (chemical liquids or pure water), and a substrate to be processed or a substrate holding mechanism that holds a substrate is transported between the multiple processing tanks by a transport mechanism for inter-tank movement, and multiple processes are performed on the substrate. In each processing tank, the processing object is lowered into the processing tank by a transport mechanism for inter-tank movement or another lifting transport mechanism and immersed in the processing liquid, and the processing object after a predetermined process is lifted up by a transport mechanism for inter-tank movement or a lifting transport mechanism, and transported to the next processing tank by the transport mechanism for inter-tank movement. The lowering and lifting operations at this time are performed at a preset speed.

[0003] When the substrate processing apparatus receives an instruction to process a newly loaded substrate, a module called a substrate transport scheduler (scheduling software) performs a scheduling calculation based on the processing conditions (plating time, current value, constraints on transport waiting time after processing, etc.) of the multiple given substrates, setting information on the operation time of the transport mechanism, etc., so as to maximize the number of substrates processed per unit time (throughput) for the entire apparatus (see, for example, JP 2011-146448 A (Patent Document 1)). Based on the timetable data created there, which includes information such as the type of operation and the start time of each operation, each transport control device performs a transport operation of the substrate or the substrate holding mechanism holding the substrate.

[0004] In addition, JP 2019-133998 A (Patent Document 2) discloses a technology in which the time required to lift a substrate from each processing tank is fixed, a transport timetable is created to achieve maximum throughput, and based on the waiting time after the substrate is accommodated in one processing tank and the waiting time in that processing tank after substrate processing, it is determined whether the substrate lifting time in the immediately preceding processing tank can be extended without reducing throughput, and if it is possible to extend the time without reducing throughput, the transport timetable is corrected to extend the substrate lifting time in the immediately preceding processing tank. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2011-146448 A [Patent Document 2] JP 2019-133998 A Summary of the Invention [Problem to be solved by the invention]

[0006] Generally, in the method of immersing and pulling out from a processing liquid tank, the processing liquid adheres to the substrate and / or substrate holder and is carried away, so it is necessary to replenish the substrate with an equivalent amount of new processing liquid. Since the processing liquid is expensive, it is desirable to reduce the amount of processing liquid carried away from the processing tank as much as possible.

[0007] On the other hand, in semiconductor manufacturing equipment, the parameters are adjusted to maximize throughput without affecting the process in order to process a larger number of substrates. In other words, the parameters are preset to achieve maximum production volume during peak production periods when demand is high. However, Otherwise, it may be desirable to prioritize conserving processing fluids over maximizing production yield.

[0008] In such cases, it is necessary to change the equipment parameters (change the parameters of the transport timetable). It would be best if the worker could determine how to change the parameters according to the operation, but if they are unable to do so, they contact the development team, confirm the relevant parameters and setting values, and set the parameters according to the development team's response before starting production. Since they have to wait for a response from the development team, it may not be possible to respond flexibly and quickly.

[0009] In addition, after changing parameters to reduce the amount of processing liquid during the off-season, when the busy season comes around again, the operator must remember to change the parameters back to the previous ones in order to maximize throughput.Currently, parameter change work is done manually, which can lead to human error, such as setting mistakes or forgetting to change the settings back.

[0010] An object of the present invention is to solve at least a part of the above-mentioned problems. One object of the present invention is to provide a technique for flexibly and quickly saving processing liquid in a substrate processing apparatus. One object of the present invention is to provide a technique for saving processing liquid while suppressing human error in a substrate processing apparatus. [Means for solving the problem]

[0011] According to one aspect of the present invention, there is provided a substrate processing apparatus comprising: a plurality of processing tanks for processing substrates; a transport machine for transporting the substrates; and a control device that creates a transport timetable for transporting the substrate between the plurality of processing tanks for processing, and controls the transport of the substrate by the transport machine and the substrate processing in the plurality of processing tanks based on the transport timetable, wherein the control device is configured to switch the transport timetable between a normal mode in which the throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which processing liquid is saved in at least one processing tank, and the control device determines whether the substrate processing apparatus is in an off-season when demand production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, sets the transport timetable to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, sets the transport timetable to the normal mode. [Brief description of the drawings]

[0012] [Figure 1] 1 is an overall layout diagram of a substrate processing apparatus according to an embodiment; [Diagram 2] FIG. 2 is an explanatory diagram illustrating a control configuration of the substrate processing apparatus. [Diagram 3] FIG. 2 is a schematic diagram showing a functional configuration of a transport scheduler according to an embodiment. [Figure 4] FIG. 13 is a schematic diagram showing a functional configuration of a transportation scheduler according to a comparative example. [Diagram 5] FIG. 2 is a schematic diagram for explaining main functions of a transportation scheduler. [Figure 6] FIG. 13 is a schematic diagram for explaining a specific example of input and output of a transportation scheduler. [Figure 7] 1 is a time chart illustrating the concepts of busy seasons and off-seasons for a substrate processing apparatus. [Figure 8] 5 is a time chart illustrating switching between a normal mode and a processing liquid saving mode. [Figure 9] 5 is a time chart illustrating switching to a processing liquid saving mode. [Figure 10A] 13 is a flowchart of transport scheduling. [Figure 10B] 13 is a flowchart of transport scheduling. [Figure 10C] 13 is a flowchart of transport scheduling. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following embodiments, the same or corresponding members are designated by the same reference numerals, and duplicated descriptions will be omitted. In addition, expressions such as "upper", "lower", "left", and "right" are used in this specification, but these are not intended to be used in the description. For the sake of clarity, the positions and directions are shown on the paper of the illustrative drawings, and may differ from the actual arrangement when the device is in use, etc.

[0014] 1 is an overall layout diagram of a substrate processing apparatus according to an embodiment of the present invention. In this example, the substrate processing apparatus 100 is an electrolytic plating apparatus. Here, a so-called dip-type electrolytic plating apparatus is taken as an example for explanation, but the present invention is applicable to any substrate processing apparatus including any plating apparatus (such as a cup-type / face-down-type plating apparatus, electroless plating apparatus, etc.) that can save processing liquid by adjusting the time for pulling up a substrate from a processing tank.

[0015] The substrate processing apparatus 100 is roughly divided into a load / unload station 101A for loading a substrate as an object to be processed onto a substrate holder (not shown) or unloading the substrate from the substrate holder, and a processing station 101B for processing the substrate. The substrate includes a circular substrate, a polygonal substrate such as a square substrate, and any other shape. The substrate also includes a semiconductor wafer, a glass substrate, a liquid crystal substrate, a printed circuit board, and other objects to be processed.

[0016] The load / unload station 101A has a plurality of cassette tables 102, an aligner 104, a substrate loading / unloading station 105, and a spin rinse dryer 106. The cassette table 102 is equipped with a cassette (such as a FOUP) that stores substrates. The aligner 104 aligns the position of the orientation flat, notch, etc. of the substrate to a predetermined direction. The substrate loading / unloading station 105 is equipped with one or more substrate loading / unloading devices 105a configured to load and unload the substrate to and from the substrate holder. The spin rinse dryer 106 cleans the substrate after plating and dries it by rotating it at high speed. A transfer robot 103 is disposed in the center of these units to transfer the substrate between these units.

[0017] The processing station 101B includes a stocker 107 for storing and temporarily placing substrate holders, a pre-wet module 108, a pre-soak module 109, a pre-soak clean module 110a, a blow module 111, a rinse module 110b, and a plating processing module 112. Note that the pre-wet module 108, the pre-soak module 109, the pre-soak clean module 110a, the rinse module 110b, and the plating processing module 112 may be collectively referred to as a processing module. Some or a plurality of the processing modules among the pre-wet module 108, the pre-soak module 109, the pre-wet module 108, the pre-soak module 109, the pre-soak clean module 110a, the rinse module 110b, and the plating processing module 112 include a processing tank that holds a predetermined processing liquid.

[0018] In the pre-wet module 108, the substrate is immersed in a processing liquid (e.g., pure water), and the air in the openings on the substrate surface is replaced with the pure water. In the pre-soak module 109, an oxide film on the surface of a conductive layer such as a seed layer formed on the substrate surface is etched away. In the pre-soak clean module 110a, the pre-soaked substrate and the substrate holder are cleaned with a cleaning liquid (e.g., pure water) as a processing liquid. In the blow module 111, the substrate after cleaning is drained. In the rinse module 110b, the plated substrate and the substrate holder are cleaned with a cleaning liquid as a processing liquid.

[0019] The plating module 112 has a plurality of cells (plating tanks 112a) equipped with an overflow tank. Each plating tank 112a accommodates one substrate therein, and the substrate is immersed in the plating solution held therein to perform plating such as copper plating on the substrate surface. The type of plating solution is not particularly limited, and various plating solutions are used depending on the application. When a single substrate is subjected to a plurality of different plating processes, the plating module 112 has a plurality of plating tanks 112a containing different types of plating solutions.

[0020] The substrate processing apparatus 100 includes a substrate holder transport device 113, which is located beside each of these devices and transports a substrate holder between these devices, and which employs, for example, a linear motor system. The substrate holder transport device 113 includes a transporter 114 and a transporter 115. The transporter 114 and the transporter 115 run on rails 116. The transporter 114 transports the substrate holder between the stocker 107, the substrate mounting / unmounting station 105, the pre-wet module 108, the pre-soak module 109, the pre-soak clean module 110a, and the blow module 111. The transporter 115 transports the substrate holder between the pre-soak clean module 110a, the blow module 111, the rinse module 110b, and the plating module 112. It is also possible to provide only one of the transport machines 114 and 115, and transport between the above-mentioned sections is performed by the single transport machine 114. Also, three or more transport machines may be provided. It is to be noted that the configuration of the substrate processing apparatus 100 is merely an example, and other configurations may be adopted.

[0021] In the substrate processing apparatus 100, the transfer robot 103 takes out an unprocessed substrate from a cassette placed on the cassette table 102, places it on the aligner 104, and the aligner 104 positions the substrate based on the orientation flat or notch. Next, the transfer robot 103 transfers the substrate to the substrate mounting / removal device 105a, where the substrate is attached to a substrate holder taken out from the stocker 107. Here, the substrates are attached to the substrate holders by the two substrate mounting / removal devices 105a, and the two substrate holders are transported as a set. The substrates attached to the substrate holders are transferred by the transport machine 114 to the pre-wet module 108, where they are pre-rinsed with water, then transferred to the pre-soak module 109, where they are pre-treated, and then transferred to the pre-soak clean module 110a, where they are rinsed with water.

[0022] The substrate rinsed in the pre-soak clean module 110a is transferred by the conveyor 115 to one of the plating tanks 112a of the plating module 112 and immersed in the plating solution. Here, plating is performed to form a metal film on the substrate. When multiple types of plating are performed, the substrate is sequentially conveyed to multiple plating tanks 112a and plated. After plating, the substrate is conveyed by the conveyor 115 to the rinse module 110b, rinsed with water, and then conveyed to the blow module 111 where it is roughly dried. Thereafter, the substrate is conveyed by the conveyor 114 to the substrate mounting / dismounting station 105, where it is removed from the substrate holder. The substrate removed from the substrate holder is conveyed by the conveyor robot 103 to the spin rinse dryer 106, where it is cleaned and dried, and then stored in a cassette on the cassette table 102.

[0023] FIG. 2 is an explanatory diagram for explaining a control configuration of the substrate processing apparatus.

[0024] The substrate processing apparatus 100 includes an apparatus computer 120 and an apparatus controller 121 as a controller 800 for controlling each part of the apparatus. The apparatus computer 120 is connected to the apparatus controller 121 via a wired or wireless network, cable, or the like. The apparatus controller 121 is connected to various operating devices 130 of the substrate processing apparatus 100 via a predetermined interface I / O. The apparatus computer 120 and the apparatus controller 121 cooperate to control the various operating devices 130 of the substrate processing apparatus 100. The various operating devices 130 are controlled via the apparatus controller 121 by sending a control signal from the apparatus computer 120 to the apparatus controller 121 via the network. The apparatus computer 120 is configured to be able to communicate with a host controller (host computer) (not shown) that controls the substrate processing apparatus 100 and other related apparatuses in a wired or wireless manner, and can exchange data with a database held by the host controller.

[0025] The device controller 121 is, for example, a PLC, a sequencer, etc. Based on control commands, setting parameters, a transfer time table, and the like from the computer 120, the computer 120 controls various operating devices of the substrate processing apparatus 100. Here, the various operating devices of the substrate processing apparatus 100 include a transfer robot 103, transfer machines (transporters) 114 and 115, and other devices.

[0026] The device computer 120 has a memory 120B that stores various setting data and various programs, and a CPU 120A that executes the programs in the memory 120B. Although not shown, the device computer 120 may have an input / output interface including an output device such as a display, and an input device including a keyboard, a mouse, etc. The storage medium constituting the memory 120B may include any volatile storage medium and / or any non-volatile storage medium. The storage medium may include one or more of any storage media such as a ROM, a RAM, a hard disk, a CD-ROM, a DVD-ROM, a flexible disk, etc.

[0027] The programs stored in the memory 120B include software constituting an operation screen application 120C and scheduling software constituting a module called a transfer scheduler 120D. The scheduling software is scheduling software that calculates a substrate transfer timetable, and the transfer scheduler 120D is constituted by the scheduling software being executed by the CPU 120A. The operation screen application 120C displays a timetable of a substrate transfer timetable, which will be described later, on a display. This operation screen application 120C can receive input from an operator. The transfer scheduler 120D functions as a substrate transfer control unit, and has a function (normal mode) of creating a transfer timetable for performing transfer control to maximize throughput based on the operation time of each transfer machine and the like given in advance, the processing conditions (process recipe) of the target substrate that has been instructed to be processed, the number of substrates to be processed, and the like, and a function (processing liquid saving mode) of creating a transfer timetable to save processing liquid in one or more processing tanks.

[0028] The programs stored in memory 120B further include, for example, a program for controlling the attachment and detachment of a substrate to a substrate holder in substrate attachment / detachment station 105, a program for controlling the processing of a substrate in each processing module / tank (including a program for controlling the plating process in plating processing module 112), etc.

[0029] Fig. 3 is a schematic diagram showing the functional configuration of a transfer scheduler 120D according to one embodiment, and Fig. 4 is a schematic diagram showing the functional configuration of a transfer scheduler 120D' according to a comparative example.

[0030] In these figures, the transfer schedulers 120D and 120D' have an event processing function consisting of a "new substrate input scheduling function", a "recipe cancellation processing function", and an "error recovery scheduling function", as functions of repeated processing executed from after the apparatus is started to after the apparatus is stopped, and an "update processing function for transfer schedule PLC". The transfer scheduler 120D according to this embodiment is characterized in that it has a "transport mode switching processing function" that switches between a normal mode and a processing liquid saving mode, as compared with the transfer scheduler 120D' according to the comparative example.

[0031] When a new substrate transfer job (hereinafter simply referred to as a job) is issued, the transfer scheduler 120D calculates a transfer timetable based on the configuration of the substrate processing apparatus 100, the recipe, the operation time of each unit (processing tank, transfer machine), time constraints, etc. The substrate transfer job is assigned to one or more substrates. The transfer machine transports the substrate according to the transfer timetable. When an event such as a recovery process due to an error or a job cancellation process occurs, the transfer scheduler 120D updates the transfer timetable and changes the transport of the subsequent substrates. (non-steady operation). Recovery due to an error is performed by an error recovery scheduling function. Job cancellation is performed by a recipe cancellation processing function. The transfer scheduler 120D can also analyze the generated transfer time table to determine the throughput (number of substrates processed per hour). The transfer scheduler 120D can also determine the rate-limiting points (points that limit the processing speed of the substrate processing apparatus 100) from the operating rate of each unit (processing tank, transfer machine).

[0032] Fig. 5 is a schematic diagram for explaining the main functions of the transport scheduler, and Fig. 6 is a schematic diagram for explaining specific examples of input and output of the transport scheduler.

[0033] As shown in FIG. 5, the transfer scheduler 120D receives input of recipes, parameters other than the recipes, and constraint conditions as input data, and creates a transfer time table with maximum throughput while satisfying the constraint conditions. Here, the constraint conditions include an upper limit of post-processing leaving time in each processing tank and a buffer area for avoiding collisions between transfer machines. The upper limit of post-processing leaving time is a time constraint set in each processing tank to prevent corrosion of the substrate, and is defined as the time from completion of processing in the processing tank until the substrate is unloaded from the processing tank. The buffer area is an area set in order to prevent collisions between the transfer machines 114 and 115, and is set to prohibit the transporter from moving into the buffer area and to prevent the transporters from approaching each other within a predetermined distance.

[0034] In FIG. 6, the recipe and parameters other than the recipe are collectively referred to as input parameters. As shown in FIG. 6, the recipe includes, for example, a processing order, a processing time, etc., which are set for each substrate or for each job assigned to one or more substrates. The parameters other than the recipe include, for example, "setting parameters of the apparatus," "setting parameters of the processing module / bath," and "setting parameters of the transfer machine." The setting parameters of the apparatus include, for example, parameters such as use / non-use of each bath, the number of baths, and the number of substrate holders. The setting parameters of the processing module / bath include, for example, the operation time of various mechanisms included in the processing module / bath, pre-processing time / post-processing time, and reset time. The pre-processing time is the time required from when the substrate is carried into the bath until the processing starts. The post-processing time is the time until the substrate can be carried out after the processing of the substrate in the bath. The reset time is the time until the substrate can be used again after the substrate is carried out of the bath. The setting parameters of the transfer machine include, for example, the movement time, the removal / storage time, etc. Note that the configuration of the input parameters is an example, and can be appropriately changed according to the configuration of the apparatus and the process.

[0035] 6, the transfer timetable generated by the transfer scheduler 120D includes the start time, the transfer machine to be operated, the type of operation (take-out / put-away), the unit processing module / bath from which the transfer is made, the processing module / bath to which the transfer is made, etc. The configuration of the transfer timetable in FIG. 6 is an example, and can be appropriately changed according to the configuration of the equipment and process.

[0036] FIG. 7 is a time chart for explaining the concept of busy seasons and off-seasons for the substrate processing apparatus.

[0037] In the figure, a job is a work unit to which one or more substrates are assigned. Here, an example is shown in which five substrates are assigned to one job, substrates 1 to 5 are assigned to job 1, substrates 6 to 10 are assigned to job 2, and substrates 11 to 15 are assigned to job 3. The lines drawn beside each substrate are a schematic representation of the transport timetable for each substrate. The start point of each line indicates the timing (time, hour) at which each substrate is removed by the transport robot 103 from the cassette for processing in the substrate processing apparatus 100. The end point of each line indicates the timing at which each substrate is stored in the cassette by the transport robot 103 after processing in the substrate processing apparatus 100. In the following explanation, the removal of each substrate by the transport robot 103 from the cassette for processing in the substrate processing apparatus 100 is referred to as supplying the substrate to the apparatus. Call it.

[0038] In the example shown in the figure, after the first substrate 1 of job 1 is supplied to the equipment, substrate 2, substrate 3, substrate 4, and substrate 5 are successively supplied to the equipment with short time intervals between them. After the last substrate 5 of job 1 is supplied to the equipment, the first substrate 6 of job 2 is supplied to the equipment with a short time interval (first time interval), and then substrate 7, substrate 8, substrate 9, and substrate 10 are successively supplied to the equipment with short time intervals between them. Meanwhile, substrate supply for job 3 begins with a longer time interval (second time interval) than the time interval (first time interval) between the substrate supplies for job 1 and job 2.

[0039] It can be seen that the throughput can be further improved if the supply of substrates 11 for job 3 to the equipment is started at a shorter time interval after the supply of job 2. In other words, during the supply period of job 3, the time interval after the supply of job 2 is long, so the throughput is at a plateau, and the throughput increases when the supply of substrates to the equipment increases (the interval between the supply of substrates to the equipment shortens). At this time, the rate-limiting point (bottleneck) that limits the processing speed of the substrate processing apparatus 100 is "substrate supply to the equipment." After the start of the supply of substrates for job 3 (the supply of substrates 11), "substrate supply to the equipment" is the rate-limiting point, and this is a period of low demand production, and such a period is defined as an "off-season." Increasing the supply of substrates to the equipment means shortening the interval between the supply of substrates to the equipment.

[0040] On the other hand, while substrates for jobs 1 and 2 are being supplied to the equipment, the substrates are being supplied to the equipment at sufficiently short time intervals, and the supply of substrates to the equipment cannot be increased further due to factors on the equipment side (or the throughput does not increase even if the supply of substrates to the equipment is increased), so the rate-limiting point of substrate processing apparatus 100 is not the supply of substrates to the equipment (the rate-limiting point is either the multiple transporters or the multiple processing tanks). During this period, the intervals between substrate supply to the equipment are sufficiently short and the demand production volume is high, and such a period is defined as a "busy season."

[0041] In this embodiment, the created transport timetable is analyzed, and if the throughput would increase if the substrate supply to the equipment was increased (if the substrate supply to the equipment is the rate-limiting point), it is determined that the substrate processing apparatus 100 is in the off-season, and if the substrate supply to the equipment cannot be increased due to factors on the equipment side, or if the throughput does not increase even if the substrate supply to the equipment is increased (if the substrate supply to the equipment is not the rate-limiting point), it is determined that the substrate processing apparatus 100 is in the busy season. Also, not being in the busy season means being in the off-season, and not being in the off-season means being in the busy season.

[0042] The rate-limiting point can be determined based on, for example, the operation rate (proportion of operation time during a given period of time) of each transfer machine (transporters 114, 115) and each processing tank. If the throughput can be increased by increasing the supply of substrates to the equipment and the operation rate, it is determined that the rate-limiting point is the supply of substrates to the equipment (off-season). On the other hand, if the supply of substrates to the equipment cannot be increased due to factors on the equipment side, or the throughput does not increase even if the supply of substrates to the equipment is increased, it is determined that the rate-limiting point is not the supply of substrates to the equipment (busy period).

[0043] For example, a threshold value for the operation rate may be set for each transporter and processing tank, and the operation rate in the current transport time table for each transporter and processing tank may be compared with the threshold value, and if the operation rate is equal to or greater than the threshold value, it may be determined that the operation rate of the transporter or processing tank cannot be further increased. As a result, if it is possible to increase the operation rate of some transporters or processing tanks and increase the supply of substrates to increase the throughput, it may be determined that the period is a low season, and otherwise it may be determined that the period is a busy season.

[0044] In addition, the number of substrates in the substrate processing apparatus and the number of subsequent jobs to be processed in the substrate processing apparatus are stored. A slow or busy period may be determined by taking into consideration the presence or absence or number of jobs in the substrate processing apparatus. Specifically, even if it is determined that the supply of substrates to the apparatus is the rate-limiting point, if the number of substrates in the substrate processing apparatus and the presence or number of subsequent jobs to be processed in the substrate processing apparatus satisfy a predetermined condition, the slow period may not be determined, i.e., the period may be determined to be a busy period. In other words, even if the supply of substrates to the apparatus is the rate-limiting point, if the number of substrates in the substrate processing apparatus exceeds a predetermined threshold and / or the number of subsequent jobs exceeds a threshold, the throughput may be prioritized and the slow period may not be determined.

[0045] In this embodiment, when it is determined that it is the off-season, in the processing liquid saving mode, the time for which the substrate is lifted from one or more processing tanks by the transporter or lifting mechanism is lengthened (the lifting speed of the substrate from the processing tank by the transporter or lifting mechanism is reduced, and / or the waiting time of the substrate after being lifted from the processing tank is extended). This increases the amount of processing liquid returned to the processing tank, reduces the amount of processing liquid carried out by the substrate (substrate and / or substrate holder), and saves processing liquid. Note that the waiting time of the substrate after being lifted from the processing tank is included in the operating time of the transporter.

[0046] In the off-season (treatment liquid saving mode), the longer the interval between job inputs, the longer the time to lift the substrate from one or more treatment tanks may be. Alternatively, the time to lift the substrate may be lengthened by a preset fixed time. In the off-season, the "substrate supply to the device" is the rate limiting factor, but if the lifting time of the transporter is lengthened, the rate will shift to the "transporter" rate limiting factor when the time exceeds a certain threshold. In this embodiment, whether the season is off-season or busy is determined based on whether the "substrate supply to the device" is the rate limiting factor by analyzing the transport time table created in the mode when the job is input. Therefore, in order to avoid mistaking the "transporter" rate limiting factor for the busy season, the substrate lifting time is lengthened within the range where the rate limiting factor is the "substrate supply to the device". In other words, by lengthening the time to lift the substrate from the treatment tank, the operating rate of the transporters 114 and 115 increases and the margin becomes smaller, but the substrate lifting time can be extended within the range where the rate limiting factor is the "substrate supply to the device". That is, the relationship of the following formula is maintained so that the conveyors 114 and 115 do not become speed limiting due to the increase in the lifting time. Throughput limited by "substrate supply to equipment" > Throughput limited by "transporter"

[0047] Generally, the frequency of changes between busy and slow periods is not high, so by creating and analyzing a transport timetable in the mode already set when a job is submitted to determine whether it is a slow period or not, the frequency of updating the transport timetable due to mode switching can be reduced. Also, by limiting the extension of the substrate lifting time to a range in which "substrate supply to the device" is rate-determining, the substrate lifting time in the processing tank can be extended and the processing liquid can be returned to the processing tank while suppressing an excessive decrease in throughput.

[0048] This embodiment is characterized in that, in the off-season (treatment liquid saving mode), as long as the rate-limiting point is "substrate supply to the equipment", the time for lifting the substrate from the treatment tank is extended to allow the creation of a transport timetable that results in a throughput that is less than the maximum throughput. This allows for effective savings in treatment liquid during the off-season when saving treatment liquid is preferred over throughput.

[0049] FIG. 8 is a time chart illustrating switching between the normal mode and the processing liquid saving mode.

[0050] In this embodiment, the transfer scheduler 120D is configured to set the transfer time table to the "normal mode" during the "busy season" and to set the transfer time table to the "treatment liquid saving mode" during the "off-season". A transfer timetable is created to maximize throughput. In the processing liquid saving mode, the transfer scheduler 120D extends the "pull-up time" allocated to lifting the substrate by slowing down the substrate pull-up speed and / or extending the waiting time in the processing tank after the substrate is pulled up. This increases the amount of processing liquid returned to the processing tank, reduces the amount of processing liquid carried out by the substrate (substrate and / or substrate holder), and saves processing liquid.

[0051] Each band in FIG. 8 shows a schematic transfer timetable, and the numbers attached to each band indicate jobs. For example, the band marked with (1) shows the transfer timetable of the first job. For convenience, the figure shows a case where the next job starts after the preceding job is completed, but the transfer timetables of each job may overlap as shown in FIG. 7. Also, in FIG. 8, "job input" indicates the timing when the transfer scheduler 120D receives an event for a new job, and after the transfer scheduler 120D creates a transfer timetable for the new job, the substrate for that job is supplied to the equipment. Each job includes one or more substrates.

[0052] In the example of FIG. 8, a normal mode transport timetable is created for the first job (substrate), and the substrate is transported in the substrate processing apparatus 100 according to the normal mode transport timetable to perform processing (band indicated by (1)). When a second job is input during the transport of the first job, a transport timetable is created in the normal mode set at the time of input, and analyzed. If it is determined as a result of the analysis that it is an off-season, the transport timetable is updated to a transport timetable for the processing liquid saving mode (switched to the processing liquid saving mode), and the untransported portion of the first job and the substrate of the second job are transported according to the transport timetable for the processing liquid saving mode to perform processing (band indicated by (2)). In FIG. 8, the transport timetable generated when the second job is input includes the transport timetable for the second job and the untransported portion of the first job. Similarly, for subsequent jobs, a determination is made as to whether it is a busy season or an off-season, and the substrate is transported according to the transport timetable for the normal mode or the processing liquid saving mode to perform processing. For example, when a fifth job is input while a fourth job is being transported, a transport timetable is created and analyzed in the processing liquid saving mode that was set at the time of input. If it is determined again as a result of the analysis that it is an off-season, the created transport timetable is used (maintaining the processing liquid saving mode), and the untransported portions of the preceding jobs (jobs 1 to 4) and the substrates of the fifth job are transported and processed according to the transport timetable in the processing liquid saving mode (band indicated by (5)). Here, an example is given in which the transport timetable for the untransported portions of the preceding jobs is updated when a new job is input, but for the untransported portions of the preceding jobs, the transport timetable that has already been created may be used without updating the transport timetable.

[0053] In this embodiment, a process of creating and analyzing a transport timetable in a mode already set when a job is submitted to determine whether it is an off-season or not is taken as an example, but a transport timetable in a normal mode may always be created and analyzed when a job is submitted to determine whether it is an off-season or not. In this case, since the transport timetable in the normal mode is always analyzed to determine whether it is an off-season or not, it is not necessary to limit the extension of the substrate lifting time in the transport timetable in the processing liquid saving mode to a range in which "substrate supply to the device" is the rate-limiting factor. However, if the extension of the substrate lifting time is limited to a range in which "substrate supply to the device" is the rate-limiting factor, the substrate lifting time in the processing tank can be extended and the processing liquid can be returned to the processing tank while suppressing an excessive decrease in throughput.

[0054] FIG. 9 is a time chart illustrating the switching to the processing liquid saving mode.

[0055] FIG. 9 shows jobs 1 to 3 similar to those in FIG. 7, but includes a thick line portion in the middle of the line segment of the transport time table assigned to each substrate. This thick line portion is a schematic representation of the time for removing the substrate from the processing bath. Only the thick line is shown, but this thick line portion is intended to representatively indicate the substrate removal time in one or more processing baths.

[0056] At the time of inputting job 1 and job 2, the substrate processing apparatus 100 is in a busy season, and a normal mode transport timetable is created for jobs 1 and 2, and transport and substrate processing are started for each substrate of job 1 and 2 in the substrate processing apparatus 100 according to the normal mode transport timetable. Thereafter, when it is determined that the substrate processing apparatus 100 is in an off-season at the time of inputting job 3, the transport timetable is switched to the processing liquid saving mode at that time, and a transport timetable for the processing liquid saving mode (transport timetable for jobs 1 to 3) is created so as to extend the substrate lift-up time in the processing tank corresponding to the processing that has not started. For each substrate of job 1, there is no processing tank corresponding to the processing that has not started, so the normal mode transport timetable is used as is. On the other hand, for each substrate of job 2, there is a processing tank corresponding to the processing that has not started, and the transport timetable is corrected and updated so as to extend the substrate lift-up time in the corresponding processing tank. However, for job 2, the portion of the transport timetable for the processing tank in which processing has already started cannot be changed. Furthermore, for job 3, a transport timetable in the processing liquid saving mode is created so as to extend the time for lifting the substrate from one or more processing baths.

[0057] As a result, the substrate lifting time in one or more processing tanks is extended for jobs 2 and 3, and the take-out of processing liquid is reduced. As can be seen by comparing the transport timetables for job 2 in FIG. 7 and FIG. 9, a longer time is allocated to the transport timetable for job 2 switched to the processing liquid saving mode (FIG. 9) compared with the transport timetable for job 2 (FIG. 7) set to maximize throughput. In other words, the transport timetable for job 2 in FIG. 9 requires a longer time for job 2 than the transport table for job 2 (maximum throughput) in FIG. 7. The same is true for the transport timetable for job 3. In this way, in the processing liquid saving mode, the saving of processing liquid is prioritized over the throughput, and the substrate lifting time is increased to save processing liquid. Note that since the supply of substrates is originally low during the off-season, if the substrate lifting time is extended within a range where the rate-limiting point is maintained as "the supply of substrates to the equipment", the processing liquid can be saved without excessively decreasing the throughput.

[0058] 10A to 10C are flowcharts of the transport scheduling process, which is executed by the transport scheduler 120D (controller 800).

[0059] In step S11, the transport scheduler 120D determines whether an event (a new job event, a transport mode switching event, or a transport completion event) has been received, and if an event has been received, determines the type of the event, and proceeds with the process (steps S12, S16) or ends the process (end) depending on the type of event. If an event has not been received (No in step S11), the process of step S11 is repeated.

[0060] If it is determined in step S11 that a new job event has been received, the process proceeds to step S12. In step S12, the transfer scheduler 120D creates a transfer timetable for the new job. Here, the mode in which the transfer timetable is created is the mode in which the new job was submitted. That is, depending on the mode / period (treatment liquid saving mode / off-season or normal mode / busy season) set when the job was submitted, the transfer timetable is created in the treatment liquid saving mode if it is the off-season, and in the normal mode if it is the busy season.

[0061] In step S13, the transfer scheduler 120D analyzes the created transfer time table, determines whether the substrate processing apparatus 100 is in a busy season or an off-season, and proceeds to step S14. Specifically, the transfer scheduler 120D analyzes the created transfer time table, calculates the operation rate of each transfer machine and each processing tank, and determines whether or not the supply of substrates to the equipment is a rate-limiting point of the throughput based on the operation rate of each transfer machine and each processing tank. If the supply of substrates is the rate-limiting point, it is determined that it is in the off-season. On the other hand, if the supply of substrates is not the rate-limiting point, it is determined that it is in the busy season. More specifically, the transfer scheduler 120D calculates the operation rate of each transfer machine and each processing tank, and if the throughput can be improved by increasing the supply of substrates to the equipment (and increasing the operation rate) based on the operation rate of each transfer machine and each processing tank, it determines that the supply of substrates to the equipment is the rate-limiting point and that it is in the off-season, and on the other hand, if the supply of substrates to the equipment cannot be increased (or the throughput does not further improve even if the supply of substrates to the equipment is increased), it determines that the supply of substrates to the equipment is not the rate-limiting point and that it is in the busy season.

[0062] In step S14, the transport scheduler 120D judges whether or not there has been a change to a busy season or an off-season. That is, it judges whether or not there has been a change from a busy season to an off-season, or from an off-season to a busy season. Specifically, the transport scheduler 120D judges whether or not there has been a change by comparing the busy season / off-season data set at the time of receiving a new job event with the analysis result (busy season / off-season) of step S13. It is assumed that the default (initial value) is set to "busy season" at the time of receiving the first job event. As a result, if there is no change, the process returns to step S11 and waits for the next event to be received. On the other hand, if there has been a change to a busy season or an off-season, a transport mode switching event is issued (step S15), the transport mode switching event is detected in step S11, and the process proceeds to step S16.

[0063] In step S16, it is determined whether or not there is a change to the off-season. If it is determined that there is a change to the off-season, the process proceeds to step S17. On the other hand, if it is determined in step S16 that there is not a change to the off-season (a change to the busy season), the process proceeds to step S18.

[0064] In step S17, the transfer scheduler 120D switches the transfer mode from the normal mode to the processing liquid saving mode, extends the lifting time for each substrate of each job from a processing tank in which processing has not started (a processing tank in which processing has not started in the preceding job and a processing tank included in the transfer timetable of the new job), and updates the transfer timetable. Then, the process returns to step S11 and waits for the next event to be received. The extension of the lifting time is performed by increasing the lifting speed of the substrate in the target processing tank and / or by extending the waiting time of the substrate after lifting.

[0065] At this time, the transfer scheduler 120D may calculate the operating rates of the processing tanks and the transfer machines 114, 115 that transport the substrates to the processing tanks, and set the extension range of the substrate lift-up time according to the operating rates. That is, the smaller the operating rate, the longer the substrate lift-up time from one or more processing tanks is set. The longer the substrate lift-up time, the less the amount of processing liquid dragged out (chemical liquid carried out), and the greater the amount of processing liquid saved.

[0066] In step S18, the transfer scheduler 120D switches the transfer mode from the processing liquid saving mode to the normal mode, returns the pull-up time of each substrate in each job to the default (the pull-up time before extension) in the processing tank in which processing has not started in the preceding job, and changes the transfer time table corresponding to the new job to the transfer time table in the normal mode, updating the transfer time table. Then, the process returns to step S11 and waits for the receipt of the next event.

[0067] As described above, the equipment controller 121 is switched between the normal mode and the processing liquid saving mode as needed, and transports the substrates of each job in sequence and processes them in each processing tank based on the updated transport time table. The transport and processing of the substrates are controlled by the transport scheduling (FIGS. 10A to 10C). In step S11, when a transfer completion event (transfer of all substrates is completed and there are no substrates in the equipment) is detected, the transfer scheduler 120D ends the process.

[0068] (Other embodiments) (1) In the above embodiment, whether or not it is a slow season (or a busy season) is determined by determining whether or not the rate-limiting point is the supply of substrates to the apparatus based on the operating rates of the transport machine and the processing tank. However, whether or not it is a slow season (or a busy season) may be determined based on the number of substrates in the substrate processing apparatus and the presence or absence or number of subsequent jobs to be processed in the substrate processing apparatus. In other words, whether or not it is a slow season (or a busy season) may be determined indirectly based on the number of substrates in the substrate processing apparatus and the presence or absence or number of subsequent jobs to be processed in the substrate processing apparatus. For example, a threshold value for the number of substrates in the substrate processing apparatus for determining the slow season and a threshold value for the number of subsequent jobs to be processed in the substrate processing apparatus (threshold value = 0 in the case of the presence or absence of jobs) may be set, and the slow season may be determined when one or both of the threshold values ​​are equal to or less than the threshold value. In this case, whether or not it is a slow season can be determined by a simple process. Also, in the transport time table in the processing liquid saving mode, it is not necessary to limit the extension of the substrate lifting time to a range in which "substrate supply to the apparatus" is the rate-limiting factor. However, by limiting the extension of the substrate lifting time to a range in which the "substrate supply to the apparatus" is rate-limiting, the substrate lifting time in the processing tank can be extended and the processing liquid can be returned to the processing tank while suppressing an excessive decrease in throughput.

[0069] At least the following technical ideas can be understood from the above embodiment.

[0070] [1] According to one embodiment, there is provided a substrate processing apparatus comprising: a plurality of processing tanks for processing substrates; a transport machine for transporting the substrates; and a control device that creates a transport timetable for transporting the substrate between the plurality of processing tanks for processing, and controls the transport of the substrate by the transport machine and the substrate processing in the plurality of processing tanks based on the transport timetable, wherein the control device is configured to switch the transport timetable between a normal mode in which the throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which processing liquid is saved in at least one processing tank, and the control device determines whether the substrate processing apparatus is in an off-season when demand production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, sets the transport timetable to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, sets the transport timetable to the normal mode. An "off-season" when demand production is low refers to a period in which the supply of substrates to the substrate processing apparatus (the interval between substrate supply) is a rate-limiting factor that limits the processing speed of the entire substrate processing apparatus. A "busy season" that is not an off-season refers to a period in which the supply of substrates to the substrate processing apparatus (the interval between substrate supply) is not a rate-limiting factor that limits the processing speed of the entire substrate processing apparatus. In the processing solution saving mode during the "off-season" period when there is no busy season, the transport timetable is created to extend the time for lifting the substrate from the processing tank and allow a throughput that is lower than the maximum throughput. This allows more of the substrate and / or plating solution adhering to the substrate to be returned to the processing tank. In addition, in order to prevent a decrease in throughput, the extension of the substrate lifting time may be limited to a range in which the "supply of substrates to the equipment" is rate-determining.

[0071] According to this embodiment, the control device of the substrate processing apparatus determines that it is an off-season based on the rate-limiting portion and automatically creates a transport time table for the processing liquid saving mode, so that it is not necessary for an operator to decide on parameter adjustment and / or to inquire of the development team, and the substrate processing apparatus can be set flexibly and quickly to a setting that saves processing liquid. In addition, since the substrate processing apparatus automatically switches between the normal mode and the processing liquid saving mode by changing related parameters, it is not necessary for an operator to change parameters, and there is no need to worry about the occurrence of setting errors or the like. It is also expected to have the effect of eliminating operator errors. In addition, by automatically detecting off-seasons when production volume is low, a lower throughput than the maximum throughput can be tolerated, enabling maximum savings in processing liquid.

[0072] [2] According to one embodiment, the control device analyzes the transport timetable to determine whether a rate-limiting point that limits the processing speed of the entire substrate processing apparatus is a supply point of the substrate to the substrate processing apparatus, and determines that the apparatus is in an off-season if the rate-limiting point is a supply point of the substrate to the substrate processing apparatus, and determines that the apparatus is not in an off-season if the rate-limiting point is not a supply point of the substrate to the substrate processing apparatus.

[0073] According to this embodiment, by analyzing the transport time table and determining whether the supply of substrates to the equipment is a rate-limiting point, it is possible to accurately determine whether it is an off-season or not, and by switching the transport mode (normal mode, processing liquid saving mode) at the appropriate time, it is possible to maximize throughput during busy periods while maximizing processing liquid savings during off-seasons.

[0074] [3] According to one embodiment, the control device analyzes the transport timetable to calculate the operating rates of the multiple processing tanks and the transport machine, and determines whether the rate-limiting point is the supply point of the substrate to the substrate processing device based on the operating rates of the multiple processing tanks and the transport machine.

[0075] According to this embodiment, by analyzing the transport timetable and determining whether or not the substrate supply is a rate-limiting point based on the operating rates of the processing tank and the transport machine, it is possible to accurately determine whether or not it is an off-season, and by switching the transport mode (normal mode, processing liquid saving mode) at the appropriate time, it is possible to maximize throughput during busy periods while maximizing processing liquid savings during off-seasons.

[0076] [4] According to one embodiment, in the processing liquid saving mode, the control device creates a transport timetable that reduces the speed at which the substrate is lifted in at least one processing tank and / or increases the waiting time after the substrate is lifted, compared to the transport timetable in the normal mode.

[0077] According to this aspect, by slowing down the speed at which the substrate is lifted from the processing tank and / or by increasing the waiting time after the substrate is lifted, more of the processing liquid adhering to the substrate and / or substrate holder can be returned to the processing tank, thereby conserving processing liquid. In addition, during off-peak periods, if the substrate lifting time is extended (the substrate lifting speed is reduced and / or the waiting time after the substrate is lifted is increased) within a range that satisfies the condition that the point at which the substrate is supplied to the substrate processing apparatus is the rate-limiting point, the substrate lifting time in the processing tank can be extended and the processing liquid can be returned to the processing tank while suppressing an excessive decrease in throughput.

[0078] [5] According to one embodiment, the control device adjusts the amount by which the speed at which the substrate is lifted in at least one of the processing tanks is reduced and / or the amount by which the waiting time after the substrate is lifted is increased depending on the operating rates of the multiple processing tanks and the transport machine.

[0079] According to this embodiment, the lower the operating rate of the processing tank and the transport machine, the longer the time for lifting the substrate from the processing tank can be (the slower the speed for lifting the substrate and / or the longer the waiting time after lifting the substrate), thereby increasing the amount of processing liquid saved.

[0080] [6] According to one aspect, the control device is configured to determine the number of the substrates in the substrate processing apparatus; Based on the presence or absence of subsequent jobs scheduled to be processed by the substrate processing apparatus or the number of subsequent jobs, it is determined whether the substrate processing apparatus is in an off-season.

[0081] According to this aspect, it is possible to determine whether or not it is an off-season in a simple manner based on the number of substrates in the substrate processing apparatus and the presence or absence of subsequent jobs to be processed in the substrate processing apparatus, or the number of such jobs. It is also possible to indirectly determine whether or not the supply of substrates to the apparatus is a rate-limiting point based on the number of substrates in the substrate processing apparatus and the presence or absence of subsequent jobs to be processed in the substrate processing apparatus, or the number of such jobs.

[0082] [7] According to one embodiment, the control device is configured to receive input from a user as to whether to enable or disable the setting of the processing liquid saving mode, and the control device is capable of disabling the setting of the processing liquid saving mode based on the input from the user.

[0083] According to this aspect, if the user does not want to switch automatically to the processing liquid saving mode, the user can disable the automatic switching to the processing liquid saving mode. Switching to the processing liquid saving mode can be enabled or disabled depending on whether the user desires to prioritize processing liquid saving or throughput.

[0084] [8] According to one embodiment, the control device is configured to accept input from a user to set the normal mode or the processing liquid saving mode, and the control device is capable of switching to the normal mode or the processing liquid saving mode based on the input from the user.

[0085] According to this aspect, when the user wishes to change the transport mode at his / her discretion, or when the transport mode has been unintentionally switched, the transport mode can be manually switched.

[0086] [9] According to one embodiment, there is provided a control device for controlling a substrate processing apparatus having a plurality of processing tanks for processing substrates and a transport machine for transporting the substrates, the control device being configured to create a transport timetable for transporting the substrate between the plurality of processing tanks for processing, and to control the transport of the substrate by the transport machine and the substrate processing in the plurality of processing tanks based on the transport timetable, the control device being configured to switch the transport timetable between a normal mode in which the throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which processing liquid is saved in at least one processing tank, the control device being configured to determine whether the substrate processing apparatus is in an off-season when demand production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, set the transport timetable to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, set the transport timetable to the normal mode.

[0087]

[10] According to one embodiment, there is provided a method for controlling a substrate processing apparatus having a plurality of processing tanks for processing substrates and a transport machine for transporting the substrates, the method comprising: creating a transport timetable for transporting the substrate between the plurality of processing tanks for processing, and controlling the transport of the substrate by the transport machine and the substrate processing in the plurality of processing tanks based on the transport timetable; switching the transport timetable between a normal mode in which the throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which processing liquid is saved in at least one processing tank; determining whether the substrate processing apparatus is in an off-season when demand production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, setting the transport timetable to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, setting the transport timetable to the normal mode.

[0088]

[11] According to one embodiment, there is provided a storage medium having stored therein a program for causing a computer to execute a method for controlling a substrate processing apparatus having a plurality of processing tanks for processing substrates and a transport machine for transporting substrates, the method comprising: creating a transport timetable for transporting the substrate between the plurality of processing tanks for processing, and controlling the transport of the substrate by the transport machine and the substrate processing in the plurality of processing tanks based on the transport timetable; switching the transport timetable between a normal mode in which the throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which processing liquid is saved in at least one processing tank; determining whether the substrate processing apparatus is in an off-season when demand production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, setting the transport timetable to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, setting the transport timetable to the normal mode.

[0089] Although the embodiments of the present invention have been described above based on several examples, the above-mentioned embodiments of the present invention are intended to facilitate understanding of the present invention and do not limit the present invention. The present invention may be modified or improved without departing from the spirit thereof, and the present invention naturally includes its equivalents. Furthermore, any combination or omission of each component described in the claims and specification is possible within the scope of solving at least a part of the above-mentioned problems or achieving at least a part of the effects. [Explanation of symbols]

[0090] 100...Substrate processing apparatus 101A…Load / unload section 101B... Processing section 102…Cassette table 103...Transport robot 104…Alaina 105... Substrate loading / unloading station 105a... Substrate mounting / removal device 106...Spin rinse dryer 107…Stocker 108…Pre-wet module 109…Presoak module 110a…Presoak Clean Module 111…Blow module 110b…Rinsejour 112...Plating module 112a... Plating tank (cell) 113...Substrate holder transport device 114...Transporter 115...Transporter 116…Rail 120...equipment computer 120A…CPU 120B…Memory 120C…Operation screen application 120D…Transportation scheduler 121...equipment controller 130...Operating equipment

Claims

1. A substrate processing apparatus, comprising: A plurality of processing tanks for performing processing on substrates; A transport device for transporting the substrate; a control device that creates a transfer time table for transferring and processing the substrate among the plurality of processing tanks, and controls transfer of the substrate by the transfer device and substrate processing in the plurality of processing tanks based on the transfer time table; the control device is configured to switch the transport time table between a normal mode in which a throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which a processing liquid is saved in at least one processing tank; the control device determines whether the substrate processing apparatus is in an off-season when demand for production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, sets the transport time table to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, sets the transport time table to the normal mode; the control device analyzes the transport time table to determine whether a rate-limiting point that limits the processing speed of the entire substrate processing apparatus is a supply point of the substrate to the substrate processing apparatus, and determines that the apparatus is in an off-season if the rate-limiting point is the supply point of the substrate to the substrate processing apparatus, and determines that the apparatus is not in an off-season if the rate-limiting point is not the supply point of the substrate to the substrate processing apparatus. Substrate processing equipment.

2. 2. The substrate processing apparatus according to claim 1, The control device analyzes the transport time table to calculate the operating rates of the multiple processing tanks and the transport machine, and determines whether the rate-limiting point is the supply point of the substrate to the substrate processing device based on the operating rates of the multiple processing tanks and the transport machine.

3. 3. The substrate processing apparatus according to claim 1, The control device, in the processing liquid saving mode, creates a transport timetable that reduces the speed at which the substrate is lifted in at least one processing tank and / or increases the waiting time after the substrate is lifted, compared to the transport timetable in the normal mode.

4. In the substrate processing apparatus according to claim 3, The control device adjusts the amount by which the speed at which the substrate is lifted in at least one of the processing tanks is reduced and / or the amount by which the waiting time after the substrate is lifted is increased in accordance with the operating rates of the multiple processing tanks and the transport machine.

5. A substrate processing apparatus, comprising: A plurality of processing tanks for performing processing on substrates; A transport device for transporting the substrate; a control device that creates a transfer time table for transferring and processing the substrate among the plurality of processing tanks, and controls transfer of the substrate by the transfer device and substrate processing in the plurality of processing tanks based on the transfer time table; the control device is configured to switch the transport time table between a normal mode in which a throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which a processing liquid is saved in at least one processing tank; the control device determines whether the substrate processing apparatus is in an off-season when demand for production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, sets the transport time table to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, sets the transport time table to the normal mode; The control device determines whether the substrate processing apparatus is in an off-season based on the number of substrates in the substrate processing apparatus and the presence or absence of subsequent jobs scheduled to be processed in the substrate processing apparatus or the number of subsequent jobs.

6. A substrate processing apparatus, comprising: A plurality of processing tanks for performing processing on substrates; A transport device for transporting the substrate; a control device that creates a transfer time table for transferring and processing the substrate among the plurality of processing tanks, and controls transfer of the substrate by the transfer device and substrate processing in the plurality of processing tanks based on the transfer time table; the control device is configured to switch the transport time table between a normal mode in which a throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which a processing liquid is saved in at least one processing tank; the control device determines whether the substrate processing apparatus is in an off-season when demand for production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, sets the transport time table to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, sets the transport time table to the normal mode; the control device is configured to receive an input from a user as to whether to enable or disable the setting of the processing liquid saving mode; The control device is capable of disabling the setting of the processing liquid saving mode based on an input from the user.

7. A substrate processing apparatus, comprising: A plurality of processing tanks for performing processing on substrates; A transport device for transporting the substrate; a control device that creates a transfer time table for transferring and processing the substrate among the plurality of processing tanks, and controls transfer of the substrate by the transfer device and substrate processing in the plurality of processing tanks based on the transfer time table; the control device is configured to switch the transport time table between a normal mode in which a throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which a processing liquid is saved in at least one processing tank; the control device determines whether the substrate processing apparatus is in an off-season when demand for production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, sets the transport time table to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, sets the transport time table to the normal mode; the control device is configured to receive an input of a setting for the normal mode or the processing liquid saving mode from a user, The control device is capable of switching between the normal mode and the processing liquid saving mode based on an input from the user.

8. A control device for controlling a substrate processing apparatus including a plurality of processing tanks for performing processing on substrates and a transport device for transporting the substrates, a transport time table is created for transporting and processing the substrate among the plurality of processing tanks, and transport of the substrate by the transport device and substrate processing in the plurality of processing tanks are controlled based on the transport time table; the transport time table is configured to switch between a normal mode in which a throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which a processing liquid is saved in at least one processing tank; the control device is configured to determine whether the substrate processing apparatus is in an off-season when demand for production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and when it is determined that the substrate processing apparatus is in an off-season, set the transport time table to the processing liquid saving mode, and when it is determined that the substrate processing apparatus is not in an off-season, set the transport time table to the normal mode; the control device analyzes the transport time table to determine whether a rate-limiting point that limits the processing speed of the entire substrate processing apparatus is a supply point of the substrate to the substrate processing apparatus, and determines that the apparatus is in an off-season if the rate-limiting point is the supply point of the substrate to the substrate processing apparatus, and determines that the apparatus is not in an off-season if the rate-limiting point is not the supply point of the substrate to the substrate processing apparatus. Control device.

9. 1. A method for controlling a substrate processing apparatus including a plurality of processing tanks for performing processing on substrates and a transport device for transporting the substrates, comprising: creating a transfer time table for transferring and processing the substrate among the plurality of processing tanks, and controlling the transfer of the substrate by the transfer machine and the substrate processing in the plurality of processing tanks based on the transfer time table; switching the transport time table between a normal mode in which the throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which processing liquid is saved in at least one processing tank, determining whether or not the substrate processing apparatus is in an off-season when demand production volume is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and setting the transport time table to the processing liquid saving mode when it is determined that the substrate processing apparatus is in an off-season, and setting the transport time table to the normal mode when it is determined that the substrate processing apparatus is not in an off-season; Contains The method of determining whether or not it is an off-season when demand production volume is low at the substrate processing apparatus based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus includes analyzing the transport timetable to determine whether or not the rate-limiting point that limits the processing speed of the entire substrate processing apparatus is a supply point of the substrate to the substrate processing apparatus, determining that it is in an off-season if the rate-limiting point is a supply point of the substrate to the substrate processing apparatus, and determining that it is not in an off-season if the rate-limiting point is not a supply point of the substrate to the substrate processing apparatus.

10. A storage medium storing a program for causing a computer to execute a method for controlling a substrate processing apparatus including a plurality of processing tanks for processing substrates and a transport device for transporting the substrates, creating a transfer time table for transferring and processing the substrate among the plurality of processing tanks, and controlling the transfer of the substrate by the transfer machine and the substrate processing in the plurality of processing tanks based on the transfer time table; switching the transport timetable between a normal mode in which the throughput of the substrate processing apparatus is maximized and a processing liquid saving mode in which processing liquid is saved in at least one processing tank, determining whether or not the substrate processing apparatus is in an off-season when demand production is low based on a rate-limiting point that limits the processing speed of the entire substrate processing apparatus, and setting the transport timetable to the processing liquid saving mode when it is determined that the substrate processing apparatus is in an off-season, and setting the transport timetable to the normal mode when it is determined that the substrate processing apparatus is not in an off-season, wherein determining whether or not the substrate processing apparatus is in an off-season when demand production is low based on the rate-limiting point that limits the processing speed of the entire substrate processing apparatus includes analyzing the transport timetable to determine whether or not the rate-limiting point that limits the processing speed of the entire substrate processing apparatus is a supply point of the substrate to the substrate processing apparatus, determining that the substrate processing apparatus is in an off-season when the rate-limiting point is a supply point of the substrate to the substrate processing apparatus, and determining that the substrate processing apparatus is not in an off-season when the rate-limiting point is not a supply point of the substrate to the substrate processing apparatus; A storage medium that stores a program for causing a computer to execute the above.

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