Pressure Sensors

Abstract

A pressure sensor comprising a first holder (1) and an electrode member (4), the first holder (1) being provided with a support section (11) for supporting the electrode member (4), and a plurality of adjustment members (51, 52) being sequentially laminated between two opposing surfaces of the electrode member (4) and the support section (11), the thermal expansion coefficients of the electrode member (4), the plurality of adjustment members (51, 52) and the first holder (1) increasing in the direction from the electrode member (4) to the support section (11). This pressure sensor can solve the problem of relative displacement between parts due to temperature changes.

Description

[Technical field]

[0001] The present invention relates to the field of semiconductor manufacturing, and more particularly to pressure sensors. [Background technology]

[0002] In the semiconductor field, when producing chips by methods such as etching, it is usually necessary to monitor the pressure of process gas with high precision and accurately control the gas pressure, flow rate, etc., in order to produce high-quality products.

[0003] A conventional pressure sensor includes an upper holder, an electrode member, a lower holder, and a moving membrane, which are stacked in order, and all three are made of metal conductor members and connected by welding or the like. Here, a top cover is provided at the top opening of the upper holder, and an upper space is formed between the top cover, the moving membrane, and the upper holder, and a lower space is formed between the moving membrane and the lower holder, and the pressure of the upper space is known and is generally in a high vacuum state, and its pressure value is Pr, and the lower space is connected to the measured space via a pipe, and its pressure value is Px. When Px becomes large, the moving membrane is subjected to an upward force and protrudes upward. The electrode member is an insulator, and its upper and lower surfaces are each covered with a metal layer. The two metal layers are electrically connected via the metal layer on the inner wall of the through hole provided in the electrode member. As a result, the metal layer on the upper surface of the moving membrane and the lower surface of the electrode member form a plate capacitance. The capacitance value C of this capacitance and the distance d between the upper surface of the moving membrane and the metal layer on the lower surface of the electrode member satisfy the following relationship:

[0004] C=εS / d Where, S is the area where the upper surface of the moving membrane and the metal layer on the lower surface of the electrode member face each other, and ε is the dielectric constant of the material between the upper surface of the moving membrane and the lower surface of the electrode member. When Px changes, the moving membrane changes, the distance d changes accordingly, and the capacitance C also changes accordingly. The metal layer on the upper surface of the electrode member is connected to the circuit board via a conductor, and the change in the capacitance C is detected to calculate the magnitude of Px.

[0005] The inner wall of the upper holder is usually provided with a step to support the electrode member, but since the electrode member is an insulator (e.g., ceramics) and the upper holder is a metal, the thermal expansion coefficient of the upper holder is larger than that of the insulator, and when the temperature changes, the degree of expansion of the two differs, which may cause a stick-slip phenomenon between the two and cause a certain relative displacement. After the temperature returns to its original value, the relative positions of the two almost return to their original state, but there are very slight differences, and these differences affect the relative positions of the electrode member and the moving membrane, which in turn affects the measurement accuracy of the final pressure. Summary of the Invention

[0006] The present invention aims to solve at least one of the technical problems existing in the prior art, and provides a pressure sensor capable of solving the problem of relative displacement between parts due to changes in temperature.

[0007] In order to achieve the object of the present invention, a first holder and an electrode member are provided, the first holder is provided with a support portion that supports the electrode member, and a plurality of adjustment members are sequentially stacked between two surfaces of the electrode member and the support portion that face each other, A pressure sensor is provided in which the thermal expansion coefficients of the electrode member, the plurality of adjustment members and the first holder increase in a direction from the electrode member to the support portion.

[0008] Optionally, the coefficient of thermal expansion of each of the tuning members satisfies the following formula:

[0009]

number

[0010] Among them, C Mis the thermal expansion coefficient of the Mth adjustment member, counting from the adjustment member closest to the electrode member, M=1, 2, ..., N, N is the number of adjustment members, N is 2 or more, dC=Cc-Ca, Ca is the thermal expansion coefficient of the electrode member, Cc is the thermal expansion coefficient of the first support, f is a number within a preset range, and the preset number is greater than or equal to N / (N+1) and less than or equal to (N+2) / (N+1).

[0011] Optionally, the amount of shear strain deformation of each adjustment member during thermal expansion is increased by increasing at least one of a specified pressure, a friction coefficient, and a total thickness, the specified pressure being a pressure applied to the electrode member in a direction from the electrode member to the support portion, the friction coefficients including a first friction coefficient between the adjustment member and the electrode member, a second friction coefficient between the adjustment member and the support portion, and a third friction coefficient between two adjacent adjustment members, and the total thickness being the sum of the thicknesses of all the adjustment members.

[0012] Optionally, the specified pressure is 250N or greater, the first coefficient of friction, the second coefficient of friction and the third coefficient of friction are all 0.1 or greater, and the total thickness is 0.4mm or greater.

[0013] Optionally, by reducing at least one of the contact area, the ratio, the shear modulus of the adjustment member, and the elastic modulus of the adjustment member, the amount of shear strain deformation of each of the adjustment members during thermal expansion is increased, the contact areas including a first contact area between the adjustment member and the electrode member, a second contact area between the adjustment member and the support portion, and a third contact area between two adjacent adjustment members; Each of the adjustment members is a ring, and the ratios include a first ratio between the first contact area and the radial width of the ring, a second ratio between the second contact area and the radial width of the ring, and a third ratio between the third contact area and the radial width of the ring, and the radial width is the difference between the outer radius and the inner radius of the adjustment member.

[0014] Optionally, the first contact area, the second contact area and the third contact area are all 150 mm 2 the first ratio, the second ratio and the third ratio are all 100 mm or less, the shear modulus of the adjustment member is 100 GPa or less, and the modulus of elasticity of the adjustment member is 250 GPa or less.

[0015] Optionally, at least one contact surface of the at least one adjustment member is textured.

[0016] Optionally, each of the adjustment members is annular, and the concave and convex regions of the uneven surface are provided relative to one another along a circumferential direction of the adjustment member.

[0017] Optionally, there are two adjustment members, a first adjustment member and a second adjustment member, which are sequentially arranged in a direction from the electrode member to the support portion, and at least one contact surface of the first adjustment member is the uneven surface, and both of the two contact surfaces of the second adjustment member are flat surfaces or at least one contact surface is the uneven surface.

[0018] Optionally, the electrode member, each of the adjustment members, and any adjacent ones of the support are independent of each other or connected to each other.

[0019] Optionally, the coefficient of thermal expansion of at least one said tuning member increases in a direction from said electrode member to said support.

[0020] The present invention has the following beneficial effects:

[0021] The pressure sensor provided by the present invention has a structure in which a plurality of adjustment members are sequentially stacked between the two surfaces of the electrode member and the support part of the first holder, and each adjustment member generates microscopic deformation and shear strain deformation when the temperature changes, thereby "absorbing" at least a part of the relative displacement between the electrode member and the support part. At the same time, the thermal expansion coefficients of the electrode member, the plurality of adjustment members and the first holder are increased in the direction from the electrode member to the support part, so that the effect of "absorbing" the relative displacement of the plurality of adjustment members is uniformed, and each adjustment member can exert its effect, thereby maximizing the overall utilization rate. This can effectively reduce or eliminate the relative displacement between the electrode member and the support part, and ensure that the measurement accuracy of the pressure sensor is not affected. The present invention also provides a pressure sensor in which a plurality of adjustment members are stacked between the electrode member and the support part, and no processing is required, the structure is simple, and the difficulty of processing the parts is reduced. [Brief description of the drawings]

[0022] [Figure 1] FIG. 1 is a diagram showing the external configuration of a pressure sensor provided according to an embodiment of the present invention. [Diagram 2] FIG. 2 is an exploded view of the internal structure of a pressure sensor provided according to an embodiment of the present invention. [Diagram 3] FIG. 3 is a cross-sectional view of the support portion, electrode member, and adjustment member of the first holder used in the embodiment of the present invention before a temperature change. [Figure 4] FIG. 4 is a cross-sectional view of the support portion, electrode member, and adjustment member of the first holder used in the embodiment of the present invention after a temperature change. [Diagram 5] FIG. 5 is a configuration diagram of a first adjustment member used in the embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] In order to make those skilled in the art better understand the technical solution of the present invention, the pressure sensor provided by the present invention will be described in detail below in combination with the drawings.

[0024] 1 and 2, the embodiment of the present invention provides a pressure sensor including a first holder 1, a second holder 2, a moving membrane 3, an electrode member 4, two adjustment members (51, 52), a top cover 6, a pipe 7, a lead wire 8, an elastic member 9, and a support ring 10. The first holder 1, the moving membrane 3, and the second holder 2 are arranged from top to bottom along the axis A of the pressure sensor in FIG. 1, and are all made of conductive metal materials and connected by welding or the like. In addition, a top cover 6 for sealing the top opening of the first holder 1 is provided on the top of the first holder 1, and the elastic member 9 and the support ring 10 are both located between the top cover 6 and the electrode member 4, and the support ring 10 is located below the elastic member 9 and is used to support the elastic member 9. The elastic member 9 is in a compressed state when the top cover 6 is attached to the first holder 1, and can apply pressure to the electrode member 4 in the top-to-bottom direction along the axis A in FIG. 1. The elastic member 9 may be, for example, a compression spring. An upper space is formed between the top cover 6, the moving membrane 3 and the first holder 1, and a lower space is formed between the moving membrane 3 and the second holder 2. The pressure in the upper space is known and is generally in a high vacuum state, and its pressure value is Pr. The lower space communicates with the space to be measured via a pipe 7, and its pressure value is Px. When Px increases, the moving membrane 3 receives an upward force and becomes larger, so that it protrudes upward.

[0025] The electrode member 4 is made of an insulating material (e.g., ceramics) having a first metal layer 42 coated on its lower surface and a second metal layer 43 coated on its upper surface. The first metal layer 42 and the second metal layer 43 are electrically conductive via a metal layer (not shown) on the inner wall of a through hole 44 provided in the electrode member 4. There is a predetermined distance between the moving membrane 3 and the first metal layer 42. As a result, the moving membrane 3 and the first metal layer 42 form a flat plate capacitance, and the capacitance value C of this capacitance has the following relationship with the distance d between the moving membrane 3 and the first metal layer 42.

[0026] C=εS / d Wherein, S is the area where the moving film 3 and the first metal layer 42 face each other, and ε is the dielectric constant of the material between the moving film 3 and the first metal layer 42. When Px changes, the moving film 3 changes accordingly (for example, protrudes upward), the distance d between the moving film 3 and the first metal layer 42 changes accordingly, and the capacitance value C also changes accordingly. The second metal layer 43 is connected to a circuit board (not shown) via a conductor 8 to detect the change in the capacitance value C and calculate the magnitude of Px.

[0027] In addition, the first holder 1 is provided with a support portion 11 for supporting the electrode member 4. Specifically, an annular boss 41 supported by the support portion 11 is provided on the edge portion (not including the first metal layer 42 and the second metal layer 43) of the electrode member 4. However, since the electrode member 4 is made of an insulating material (e.g., ceramics) while the first holder 1 is made of a metal material, the thermal expansion coefficient of the first holder 1 is larger than that of the electrode member 4. In this case, if the support portion 11 directly contacts the electrode member 4, the degree of expansion of the two is different when the temperature changes, so that a stick-slip phenomenon occurs between the two, and a certain relative displacement may occur. After the temperature returns to the original value, the relative positions of the two also return to almost the original state, but there are very slight differences, and these differences affect the relative positions of the electrode member 4 and the moving membrane 3, and affect the measurement accuracy of the final pressure.

[0028] In order to solve the above problem, in this embodiment, referring to Figure 3, two adjustment members (51, 52) are sequentially stacked between the two opposing surfaces of the annular boss 41 of the electrode member 4 and the support portion 11 (i.e., the lower surface 411 of the annular boss 41 and the upper surface 111 of the support portion 11), and the thermal expansion coefficients of the electrode member 4, the two adjustment members (51, 52) and the first holder 1 increase in the direction from the electrode member 4 to the support portion 11 (i.e., the top-to-bottom direction along the axis A in Figure 1), that is, the thermal expansion coefficient of the electrode member 4 < the thermal expansion coefficient of the first adjustment member 51 < the thermal expansion coefficient of the second adjustment member 52 < the thermal expansion coefficient of the first holder 1.

[0029] Of course, in actual applications, the number of adjustment members can be set to three, four, five or more according to specific needs, for example, to adjust the gap between the electrode member 4 and the moving membrane 3 and reduce or eliminate the relative displacement between the electrode member 4 and the support part 11, and the present invention is not limited thereto.

[0030] In some optional embodiments, the present invention is not particularly limited to the material of each adjustment member, as long as the thermal expansion coefficient satisfies the above condition.

[0031] In some optional embodiments, at least one adjustment member is annular, for example a circular ring.

[0032] Each adjustment member undergoes microscopic deformation and shear strain deformation when the temperature changes, and is thereby able to "absorb" at least a portion of the relative displacement between the electrode member 4 and the support part 11 of the first holder 1. "Absorbing" the relative displacement means that each adjustment member, through its own deformation, can offset at least a portion of the displacement of the electrode member 4 or support part 11 or other adjustment members with which it comes into contact, thereby achieving the purpose of reducing or eliminating the relative displacement between the electrode member 4 and the support part 11.

[0033] By increasing the thermal expansion coefficients of the electrode member 4, the multiple adjustment members, and the first holder 1 in the direction from the electrode member 4 to the support part 11 (i.e., from top to bottom along the axis A in FIG. 1), the difference in thermal expansion coefficient between the electrode member 4, the multiple adjustment members, and the support part 11 is reduced, and the multiple adjustment members are made uniform in their "absorbing" action of the relative displacement, allowing each adjustment member to exert its effect and maximizing the overall utilization rate. For example, assuming that there is a relative displacement of 30 units between the electrode member 4 and the support part 11, if these relative displacements are absorbed using three adjustment members, the most effective method is for each adjustment member to absorb a relative displacement of 10 units, which not only completely eliminates the relative displacement between the electrode member 4 and the support part 11, but also allows each adjustment member to exert the same "absorbing" action and maximize the overall utilization rate.

[0034] Thereby, the embodiment of the present invention provides a pressure sensor which effectively reduces or eliminates the relative displacement between the electrode member 4 and the support 11, ensuring that the measurement accuracy of the pressure sensor is not affected. In addition, multiple adjustment members are stacked between the electrode member 4 and the support 11, which does not require any processing, simplifies the structure, and reduces the processing difficulty of the parts.

[0035] In some optional embodiments, the thermal expansion coefficient of each tuning member may satisfy the following formula:

[0036]

number

[0037] Among them, C M is the thermal expansion coefficient of the Mth adjustment member, counting from the adjustment member closest to the electrode member 4, M=1, 2, ..., N, N is the number of adjustment members and N is 2 or more, Ca is the thermal expansion coefficient of the electrode member 4, dC=Cc-Ca, Cc is the thermal expansion coefficient of the first holder 1, and f is a number within a preset range, which is greater than or equal to N / (N+1) and less than or equal to (N+2) / (N+1).

[0038] According to the above formula, under the condition that the thermal expansion coefficients of the electrode member 4, the N adjustment members and the first holder 1 increase in the direction from the electrode member 4 to the support part 11 (i.e., the top-to-bottom direction along the axis A in Figure 1), the thermal expansion coefficient of each adjustment member can be freely adjusted within the above set range, that is, the f value corresponding to each adjustment member can be individually adjusted to meet specific needs, which not only increases the flexibility of adjustment but also expands the selection range of the thermal expansion coefficient.

[0039] Taking two adjustment members (51, 52) as an example, when the temperature changes, the electrode member 4 and the support 11 first generate static friction between the two adjustment members (51, 52), and at this time, the two adjustment members (51, 52) are microscopically deformed (i.e., microscopically deformed), and at the same time, the static friction generates a shear stress τ along the radial direction (i.e., the X direction in FIG. 4) in the two adjustment members (51, 52), and further, the two adjustment members (51, 52) have a shear strain γ. The relationship between the shear stress τ and the shear strain γ satisfies the following formula.

[0040] τ=Gγ Among these, G is the shear modulus of elasticity of the adjustment member.

[0041] As shown in Figure 3, when the electrode member 4 receives pressure from the electrode member 4 in the direction of the support part 11 (i.e., the top-to-bottom direction along the axis A in Figure 1), the two adjustment members (51, 52) are sandwiched between the electrode member 4 and the support part 11, and before the temperature change, the cross-sectional shape of the two adjustment members (51, 52) is rectangular. As shown in Fig. 4, when the temperature rises, the thermal expansion coefficient of the first holder 1 becomes the largest, and the support part 11 expands most radially outward (i.e., in the X direction in Fig. 4). At this time, there exists a static friction force at the contact surface between the second adjustment member 52 and the support part 11, the contact surface between the second adjustment member 52 and the first adjustment member 51, and the contact surface between the first adjustment member 51 and the electrode member 4, and both of the two adjustment members (51, 52) generate shear strain deformation, that is, the cross-sectional shape of the two adjustment members (51, 52) becomes a rhombus, and the relative position between the electrode member 4 and the support part 11 does not change. As can be seen from this, such shear strain deformation "absorbs" at least a part of the relative displacement in the X direction between the electrode member 4 and the support member 11, and the relative position between the electrode 4 and the support part 11 can be kept constant.

[0042] However, if the temperature change is too large, the microscopic deformation and shear strain deformation of the two adjustment members (51, 52) may not be sufficient to support the static friction force between the electrode member 4 and the support part 11, and in that case, a minute stick-slip phenomenon will occur between the electrode member 4 and the support part 11, and a certain relative displacement will occur.

[0043] In order to solve the above problem, if the adjustment member has a sufficiently large shear strain deformation, the static friction force between the electrode member 4 and the support part 11 is sufficiently supported, and therefore no relative displacement occurs between the electrode member 4 and the support part 11. There are various methods for increasing the shear strain deformation of the adjustment member. For example, the shear strain deformation of each adjustment member during thermal expansion can be increased by increasing at least one of the designated pressure, the friction coefficient, and the total thickness, among which the designated pressure is a pressure F applied to the electrode member 4 in the direction from the electrode member 4 to the support part 11 (i.e., the direction from top to bottom along the axis A in FIG. 1). As shown in FIG. 2, the elastic member 9 is in a compressed state when the top cover 6 is attached to the first holder 1, and the pressure applied by this elastic member 9 to the electrode member 4 is the pressure F. By increasing the pressure F, the above-mentioned friction coefficients including the first friction coefficient between the adjustment member and the electrode member 4, the second friction coefficient between the adjustment member and the support part 11, and the third friction coefficient between two adjacent adjustment members can be increased. By increasing these friction coefficients, the shear stress τ that the adjustment member receives can be increased, and as can be seen from the above formula for shear stress τ and shear strain γ, the larger the shear stress τ, the larger the shear strain γ, and the larger the shear strain deformation amount can be. Furthermore, by adjusting the surface roughness of at least one of the contact surfaces of the parts, these friction coefficients can also be directly increased.

[0044] The total thickness is the sum of the thicknesses of all the adjustment members (i.e., the size in the direction of axis A in FIG. 1). For example, when the adjustment member is a ring, the axial dimension of the ring is the thickness of the adjustment member, and the larger the axial dimension of the ring, the larger its shear strain deformation amount. Therefore, by increasing the total thickness, the shear strain deformation amount can be increased. The thickness of each adjustment member may be completely the same, or may be partially the same.

[0045] In some optional embodiments, to ensure that the adjustment member has a sufficient shear strain deformation, the specified pressure is 250 N or more, the first friction coefficient, the second friction coefficient and the third friction coefficient are all 0.1 or more, and the total thickness is 0.4 mm or more.

[0046] By adopting the above method to increase the shear strain deformation of the adjustment member, and then reducing at least one of the contact area, ratio, shear modulus of the adjustment member, and elastic coefficient of the adjustment member, the shear strain deformation of each adjustment member during thermal expansion can be increased.

[0047] Wherein, the contact area includes a first contact area between the adjustment member and the electrode member 4, a second contact area between the adjustment member and the support part 11, and a third contact area between two adjacent adjustment members. When each adjustment member is a ring, the ratio includes a first ratio between the first contact area and the radial width of the ring, a second ratio between the second contact area and the radial width of the ring, and a third ratio between the third contact area and the radial width of the ring. Wherein, the radial width refers to the difference between the outer radius and the inner radius of the adjustment member.

[0048] In some optional embodiments, the first contact area, the second contact area, and the third contact area are each less than 150 mm to ensure that the adjustment member has a sufficient shear strain deformation. 2 the first ratio, the second ratio and the third ratio are all 100 mm or less, the shear modulus of the adjustment member is 100 GPa or less, and the modulus of elasticity of the adjustment member is 250 GPa or less.

[0049] In some optional embodiments, the method for reducing the contact area may be that at least one contact surface of at least one adjustment member is an uneven surface. This contact surface is a surface facing the support part 11, the electrode member 4 or other adjustment member of the adjustment member, and since it is an uneven surface, only the convex area contacts the support part 11, the electrode member 4 or other adjustment member, so that this uneven surface not only reduces the contact area, but also has a gap between the concave area of ​​the uneven surface and other surfaces adjacent thereto, and when the space above the pressure sensor is evacuated, this gap helps the gas in the upper space to flow, so that the gas in the upper space can be more thoroughly discharged, and the degree of vacuum in the upper space can be further increased. Preferably, both of the two contact surfaces of the at least one adjustment member are uneven surfaces, which can further increase the flow of gas in the upper space. In actual use, the two uneven surfaces on the same adjustment member may be symmetrical or asymmetrical.

[0050] In one specific embodiment, each adjustment member is annular, and the concave and convex regions in the uneven surface are arranged relative to one another along the circumferential direction of the adjustment member. For example, as shown in Fig. 5, taking the first adjustment member 51 as an example, when the first adjustment member 51 is an annular member, at least one of the two contact surfaces of the annular member (i.e., the annular end surfaces facing upward and downward in Fig. 5) is the uneven surface, and the concave and convex regions in the uneven surface are arranged relative to one another along the circumferential direction of the annular member. For example, the upper end surface and the lower end surface of the first adjustment member 51 shown in Fig. 5 are both uneven surfaces, and taking the upper end surface 511 as an example, the upper end surface 51 includes three concave regions 511a and three convex regions 511b, and the concave regions 511a and the convex regions 511b are mutually arranged, that is, when any two concave regions 511a are not adjacent and any two convex regions 511b are not adjacent, only each convex region 511b can contact the support 11, the electrode member 4 or other adjustment members, and the concave region 511a does not contact, so that the contact area can be reduced. Of course, in practical applications, any other structure of uneven surface can be adopted as long as the contact area can be reduced.

[0051] In addition to the above embodiment, there are two adjustment members, the first adjustment member 51 and the second adjustment member 52, which are sequentially provided in the direction from the electrode member 4 to the support part 11, and at least one contact surface of the first adjustment member 51 is the uneven surface, and both of the two contact surfaces of the second adjustment member 52 are flat or at least one contact surface is the uneven surface. In this way, when the thickness of the adjustment members needs to be adjusted, only the first adjustment member 51 located at the top can be replaced, which simplifies the removal process and improves replacement efficiency.

[0052] In some optional embodiments, any two adjacent ones of the electrode member 4, each adjustment member, and the support portion 11 are independent of each other or connected to each other. The connection method is, for example, adhesion, welding, printing, etc. Being independent of each other means that any two adjacent ones of the electrode member 4, each adjustment member, and the support portion 11 overlap but are not restricted by each other.

[0053] In some optional embodiments, the thermal expansion coefficient of the at least one adjustment member at different positions is non-uniform. Preferably, the thermal expansion coefficient of the at least one adjustment member increases in the direction from the electrode member 4 to the support 11 (i.e., from top to bottom along the axis A in FIG. 1). This allows the thermal expansion coefficients of the same adjustment member at the axis A to be different, which in turn allows the effect of "absorbing" the relative displacement to be uniform. Such an adjustment member may be made, for example, from a composite material.

[0054] In some optional embodiments, the coefficient of thermal expansion of each tuning member is greater than or equal to 0.000005 / K and less than or equal to 0.000002 / K at a temperature of 20°C.

[0055] In some optional embodiments, the pressure sensor provided by the embodiments of the present invention can be applied to any product that needs to detect pressure, such as a vacuum gauge or pressure control device.

[0056] From the above, the embodiment of the present invention provides a pressure sensor in which a plurality of adjustment members are sequentially stacked between the two surfaces of the electrode member and the support part of the first holder, and each adjustment member can "absorb" at least a part of the relative displacement between the electrode member and the support part due to microscopic deformation and shear strain deformation when the temperature changes, and at the same time, the thermal expansion coefficients of the electrode member, the plurality of adjustment members, and the first holder are increased in the direction from the electrode member to the support part, thereby making the function of "absorbing" the relative displacement of the plurality of adjustment members uniform, thereby allowing all of the adjustment members to exert their functions and maximizing the overall utilization rate. This effectively reduces or eliminates the relative displacement between the electrode member and the support part, and ensures that the measurement accuracy of the pressure sensor is not affected. The present invention also provides a pressure sensor in which a plurality of adjustment members are stacked between the electrode member and the support part, does not require any processing, has a simple structure, and reduces the difficulty of processing parts.

[0057] It is understood that the above embodiment is merely an exemplary embodiment adopted to explain the principle of the present invention, and the present invention is not limited thereto. Those skilled in the art can make various modifications and improvements without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of the claims of the present invention. The invention as originally claimed in the present application is set forth below. [1] A method for manufacturing a semiconductor device comprising: the first holder is provided with a support portion that supports the electrode member, and a plurality of adjustment members are sequentially stacked between two surfaces of the electrode member and the support portion that face each other; The thermal expansion coefficients of the electrode member, the plurality of adjustment members, and the first holder increase in a direction from the electrode member to the support portion. Pressure sensor. [2] The thermal expansion coefficient of each of the adjustment members satisfies the following formula:

number

[10] The electrode member, each of the adjustment members, and any adjacent ones of the support portion are independent of each other or connected to each other. The pressure sensor according to [1] or [2].

[11] A thermal expansion coefficient of at least one of the adjustment members increases in a direction from the electrode member to the support. The pressure sensor according to [1] or [2].

Claims

1. A first holder and an electrode member are provided. the first holder is provided with a support portion that supports the electrode member, and a plurality of adjustment members are sequentially stacked between two surfaces of the electrode member and the support portion that face each other; the thermal expansion coefficients of the electrode member, the adjustment members, and the first holder increase in a direction from the electrode member to the support portion; The amount of shear strain deformation of each adjustment member during thermal expansion is increased by increasing at least one of a predetermined pressure, a friction coefficient, and a total thickness, the predetermined pressure being a pressure applied to the electrode member in a direction from the electrode member to the support portion, the friction coefficients being a first friction coefficient between an adjustment member and the electrode member, a second friction coefficient between another adjustment member and the support portion, and a third friction coefficient between two adjacent adjustment members, and the total thickness being a sum of thicknesses of all the adjustment members. Pressure sensor.

2. The thermal expansion coefficient of each of the adjustment members satisfies the following formula: [0010] CM is the thermal expansion coefficient of the Mth adjustment member counting from the adjustment member closest to the electrode member, M=1, 2, ..., N, N is the number of adjustment members, N is 2 or more, dC=Cc-Ca, Ca is the thermal expansion coefficient of the electrode member, Cc is the thermal expansion coefficient of the first holder, f is a value within a preset range, the preset range is N / (N+1) or more and (N+2) / (N+1) or less. The pressure sensor according to claim 1 .

3. The predetermined pressure is 250 N or more, the first friction coefficient, the second friction coefficient, and the third friction coefficient are all 0.1 or more, and the total thickness is 0.4 mm or more. The pressure sensor according to claim 1 .

4. At least one contact surface of the at least one adjustment member is an uneven surface. The pressure sensor according to claim 1 .

5. Each of the adjustment members is annular, and the concave and convex areas of the uneven surface are provided along a circumferential direction of the adjustment member. The pressure sensor according to claim 4.

6. The adjustment member is two in number, being a first adjustment member and a second adjustment member, which are sequentially provided in a direction from the electrode member to the support portion, and at least one contact surface of the first adjustment member is the uneven surface, and two contact surfaces of the second adjustment member are both flat surfaces, or at least one of the contact surfaces of the second adjustment member is the uneven surface.

6. The pressure sensor according to claim 4 or 5.

7. Any two of the electrode member, each of the adjustment members, and the support portion that are adjacent to each other are independent of each other or connected to each other.

3. The pressure sensor according to claim 1 or 2.

8. The thermal expansion coefficient of at least one of the adjustment members increases in a direction from the electrode member to the support. The pressure sensor according to claim 1 .

9. A first holder and an electrode member are provided. the first holder is provided with a support portion that supports the electrode member, and a plurality of adjustment members are sequentially stacked between two surfaces of the electrode member and the support portion that face each other; the thermal expansion coefficients of the electrode member, the adjustment members, and the first holder increase in a direction from the electrode member to the support portion; At least one of the contact area, the ratio, the shear modulus of elasticity of the adjustment member, and the elastic modulus of the adjustment member is reduced to increase the amount of shear strain deformation of each adjustment member during thermal expansion, the contact areas being a first contact area between an adjustment member and the electrode member, a second contact area between another adjustment member and the support portion, and a third contact area between two adjacent adjustment members; Each of the adjustment members is an annular ring, and the ratios are a first ratio between the first contact area and a radial width of the annular ring, a second ratio between the second contact area and a radial width of the annular ring, and a third ratio between the third contact area and a radial width of the annular ring, and the radial width is a difference between an outer radius and an inner radius of the adjustment member. Pressure sensor.

10. The thermal expansion coefficient of each of the adjustment members satisfies the following formula: [0025] CM is the thermal expansion coefficient of the Mth adjustment member counting from the adjustment member closest to the electrode member, M=1, 2, ..., N, N is the number of adjustment members, N is 2 or more, dC=Cc-Ca, Ca is the thermal expansion coefficient of the electrode member, Cc is the thermal expansion coefficient of the first holder, f is a value within a preset range, the preset range is N / (N+1) or more and (N+2) / (N+1) or less. The pressure sensor according to claim 9.

11. the first contact area, the second contact area, and the third contact area are all 150 mm2 or less, the first ratio, the second ratio, and the third ratio are all 100 mm2 or less, the shear modulus of the adjustment member is 100 GPa or less, and the elastic modulus of the adjustment member is 250 GPa or less. The pressure sensor according to claim 9.

12. At least one contact surface of the at least one adjustment member is an uneven surface. The pressure sensor according to claim 9.

13. Each of the adjustment members is annular, and the concave and convex areas of the uneven surface are provided along a circumferential direction of the adjustment member. The pressure sensor of claim 12.

14. The adjustment member is two in number, being a first adjustment member and a second adjustment member, which are sequentially provided in a direction from the electrode member to the support portion, and at least one contact surface of the first adjustment member is the uneven surface, and two contact surfaces of the second adjustment member are both flat surfaces, or at least one of the contact surfaces of the second adjustment member is the uneven surface.

14. A pressure sensor according to claim 12 or 13.

15. Any two of the electrode member, each of the adjustment members, and the support portion that are adjacent to each other are independent of each other or connected to each other. The pressure sensor according to claim 9 or 10.

16. The thermal expansion coefficient of at least one of the adjustment members increases in a direction from the electrode member to the support. The pressure sensor according to claim 9.

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