Photoresist container cover device

Abstract

To provide a cover device for a photoresist storage container which enables a gas to be discharged when the cover device is partially separated by pressure.SOLUTION: A cover device includes: a guide module 100 which is coupled to an upper end portion of a storage container 10, has an inclined protruding unit 110 that protrudes having an upward inclination at a preset angle, and is formed with a communication port through which the inside and the outside of a storage space 12 communicate; a discharge module which is disposed inside the storage container 10, penetrating through the communication port and in which the other side is exposed to the outside to form a discharge port 232; and a fixing module 300 which is formed so that the discharge module 110 is compressed toward the guide module 100. The discharge module is in contact with an inner surface of the communication port along a longitudinal direction. The communication port is formed so as to have an inner diameter that decreases toward the inside of the storage container 10 in at least a partial region and is fixed by pressing.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a cover device for a photoresist container, which is connected to a container that injects gas to discharge an aqueous photoresist solution therein and prevents the cover device from being unintentionally separated due to pressure. [Background technology]

[0002] Generally, a photolithography process includes a process of coating a wafer, which has been subjected to a series of semiconductor manufacturing processes, with a photoresist by placing the wafer on a spin chuck of a coating device. Here, the photoresist includes a resin, an inhibitor as a sensitizer that is activated by light, and a liquid state solvent. The photoresist is contained in a container made of a glass bottle and supplied to a photoresist supply line through a photoresist supply pipe (Teflon tube) connected to the container cap. The photoresist supplied to the photoresist supply line is supplied to a coating device via multiple valves and an intermediate tank. Here, a container for supplying an aqueous photoresist solution and a cover device coupled thereto are used, and high-pressure gas is supplied into the container to exhaust the aqueous photoresist solution therein and to be delivered to a supply pipe. At this time, the container is equipped with a cover device for discharging the photoresist aqueous solution and supplying high-pressure gas therein. However, since the inside of the container is maintained under high pressure, a problem occurs in which part of the cover device is unintentionally separated. In particular, if a part of the cover device is unintentionally separated, a user may be hit by the separated part, or the photoresist solution inside may be partially splashed onto the user's body, resulting in a safety accident. Therefore, technological development is needed to solve these problems. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Korean Patent Publication No. 10-2004-17479 Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention has been devised to solve the above-mentioned problems of the prior art, and relates to a cover device for a photoresist container that is connected to a container that injects gas at high pressure to discharge an aqueous photoresist solution therein, and that can discharge gas when the cover device is partially separated due to pressure. The objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned herein will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0005] In order to achieve the above object, the present invention relates to a cover device which is coupled to an open portion of an accommodation container containing an aqueous photoresist solution to seal the inside of the container and discharge the aqueous photoresist solution to the outside, the cover device including: a guide module which is coupled to an upper end of the accommodation container and has an inclined protruding unit which is protruded with a preset angle upward to form a communication port through which the inside and outside of the accommodation space are communicated; a discharge module which is formed in a long pipe shape and has one side along a longitudinal direction thereof penetrating the communication port and disposed inside the accommodation container and the other side thereof exposed to the outside to form a discharge port, the discharge module including an expansion fixing unit which is expanded in a middle portion along a longitudinal direction thereof and has at least a part of its periphery in contact with an inner surface of the communication port and is inserted and fixed; and a fixing module which is formed such that a part of the other side of the discharge module is penetrated and fixed to the inclined protruding unit so that the discharge module is pressurized toward the guide module, and the communication port is formed such that an inner diameter of at least a part of the communication port decreases toward the inside of the accommodation container, and is fixed by compression. In addition, the exhaust module may further include a flow path unit having an elongated shape and a portion thereof disposed inside the container, the flow path unit having an exhaust flow path formed therein, and a connection unit having an exhaust port formed therein and extended from the expansion fixing unit and exposed to the outside, the connection unit having an exhaust port extended to the exhaust flow path. In addition, the inclined protruding unit may further include a protruding compression portion formed along at least a portion of the inner surface of the communication hole, protruding toward the center and contacting the expansion fixing unit. In addition, the protruding compression portion may have a first inclined surface protruding at a certain angle along the longitudinal direction. The inclined protrusion unit may be characterized in that a second inclined surface is formed inside the communication opening, the second inclined surface being continuous with the first inclined surface and inclined in an opposite direction, and having a relatively larger inclination angle than the first inclined surface. In addition, the inclined protrusion unit may be formed at least partially along the periphery, and may further include a pressure reducing section that exhausts gas inside the storage container to the outside when the expansion fixing unit protrudes from inside the communication hole by more than a predetermined length and slides toward the connection unit. Also, the pressure reducing portion may be formed in the form of a hole that communicates between the inside and the outside at least partially around the communication opening, and may be formed to be opened when the expansion fixing unit moves backward. Also, the pressure reducing portion may be formed in a slit shape at an upper end of the inclined protruding unit, and may be formed to be opened when the expansion fixing unit moves backward. In addition, the fixing module may include a coupling unit through which the connection unit is passed and which wraps around and fixes the inclined protrusion while in contact with the expansion-fixing unit, and which has a ring-shaped notch formed at an upper end of an outer surface, and an adjustment unit which is rotatably coupled to an outer circumferential surface of the coupling unit, has a plurality of elastic pieces corresponding to the notches formed thereon, and rotates the coupling unit within a preset level, and adjusts the expansion-fixing unit so that it is pressurized toward the receiving container. The discharge module further includes a coupling unit that encloses at least a portion of the inclined protrusion unit while being in contact with the expansion and fixing unit through a portion of the other side of the discharge module, and an adjustment unit that has a middle portion with a certain length and is fixed to the coupling unit, and one side along the longitudinal direction selectively contacts the inclined protrusion unit to adjust whether or not to couple with the coupling unit; and by operating the adjustment unit, the expansion and fixing unit can be pressurized in the direction of the storage container to prevent it from being detached in the opposite direction. In addition, the inclined protrusion unit includes a locking protrusion portion having a sawtooth shape on at least a portion of an outer surface, and a plurality of such units are formed continuously along the protruding longitudinal direction, and the adjustment unit can be selectively fixed by having one side end engage with at least a portion of the locking protrusion portion. Effect of the Invention

[0006] The photoresist container cover device of the present invention for solving the above problems has the following advantages. The cover device according to the present invention includes a guide module having a protruding communication port, a discharge module that discharges the photoresist aqueous solution to the outside through the communication port, and a fixing module that maintains the connection between the discharge module and the guide module. The discharge module is inserted and fixed inside the container, and the inner diameter of the communication port is configured to decrease along the longitudinal direction, thereby enabling the expansion fixing unit to be stably fixed and sealed as it is pressurized toward the communication port. The effects of the present invention are not limited to those mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims. [Brief description of the drawings]

[0007] [Figure 1] FIG. 2 is a perspective view of a cover device for a photoresist container according to the present invention; [Diagram 2] FIG. 2 is an exploded perspective view showing a detailed configuration of a cover device for a photoresist container according to the present invention. [Diagram 3] FIG. 2 is a cross-sectional view showing an internal structure of a cover device for a photoresist container according to the present invention. [Figure 4] 2 is a plan view showing a configuration of a fixing module in the cover device for the photoresist container shown in FIG. 1. [Diagram 5] 2 is a diagram showing a detailed configuration of a communication port in the cover device for the photoresist container in FIG. 1; [Figure 6] 2 is a diagram showing a configuration of a pressure reducing unit in the cover device for the photoresist container in FIG. 1. [Figure 7] 2 is a view showing a modified form of a pressure reducing unit in the cover device for the photoresist container of FIG. 1; BEST MODE FOR CARRYING OUT THEINVENTION

[0008] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, in which the same components are designated by the same names and reference numerals, and additional description thereof will be omitted. In addition, in describing the embodiments of the present invention, the same names and the same reference numerals are used for components having the same functions, but it is made clear in advance that the embodiments are not substantially completely the same as those of the prior art. In addition, the terms used in the embodiments of the present invention are merely used to describe specific embodiments and are not intended to limit the present invention. A singular expression includes a plural expression unless otherwise clearly indicated in the context. Furthermore, in the embodiments of the present invention, terms such as "include" or "have" are intended to specify the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the presence or additional possibility of one or more other features, numbers, steps, operations, components, parts, or combinations thereof. FIG. 1 is a view showing the external configuration of a cosmetic case according to the present invention. First, the covering device for a photoresist container 10 according to the present invention will be briefly described with reference to FIGS. 1 to 4. As shown in FIG. FIG. 1 is a perspective view of a cover device for a photoresist container 10 according to the present invention, and FIG. 2 is an exploded perspective view showing a detailed configuration of the cover device for a photoresist container 10 according to the present invention. 3 is a cross-sectional view showing the internal structure of the cover device for the photoresist container 10 of the present invention, and FIG. 4 is a plan view showing the configuration of a fixing module 300 in the cover device for the photoresist container 10 of FIG. The cover device of the photoresist container 10 according to the present invention is coupled to the top of the container 10 in which the photoresist aqueous solution is contained to seal it, and at the same time, a high-pressure gas is separately introduced from the outside, and at the same time, the photoresist aqueous solution is supplied to the outside by the pressure.

[0009] Referring to the illustrated drawings, the cover device according to the present invention mainly includes a guide module 100, a discharge module 200 and a fixing module 300. The guide module 100 is coupled to an open portion of the receiving container 10 to seal the inside of the receiving space 12, and at the same time, allows the photoresist aqueous solution to be discharged to the outside through a separate communication port 112. Here, the receiving container 10 is formed with at least a portion extended upward and protruding with a preset angle and is coupled to the fixing module 300 which will be described later. Specifically, the guide module 100 includes an inclined protrusion unit 110 disposed at the open upper end of the receiving container 10 and protruding with an upward incline, and a cover unit 120 fixedly coupled to the receiving container 10 while being connected to the inclined protrusion unit 110. The inclined protrusion unit 110 is made of synthetic resin and formed in a piping shape, and has a protruding shape of a certain length to form a communication port 112 inside the inclined protrusion unit 110 that communicates with the receiving container 10. At this time, the inclined protrusion unit 110 includes a locking protrusion 113 having a sawtooth shape on at least a part of an outer surface, and a plurality of such locking protrusions are formed continuously along the protruding length, to which a fixing module 300 described later is coupled. The inclined protrusion unit 110 has a lower end configured to be in sealing contact with the opening of the receiving container 10 in accordance with the shape of the opening, and at least a portion of the lower end is formed to be coupled with the cover unit 120 . In this embodiment, the inclined protrusion unit 110 has a T-shape, an expanded portion 114 is formed at the lower end, and the inclined protrusion unit 110 is elongated in the upward direction. At this time, the communication hole 112 is elongated in the vertical direction and communicates with the inside of the receiving container 10.

[0010] The cover unit 120 is configured to maintain the combined state without separating the inclined protrusion unit 110 and the storage container 10 while in contact with each other, and is fixedly combined with the opening of the storage container 10 while being connected to the expansion portion 114. Specifically, the cover unit 120 is formed in a ring shape, the inclined protrusion unit 110 passes through it, and at least a portion of the cover unit 120 encloses the extension portion 114 to be coupled to the receiving container 10. At this time, a separate screw thread is formed on the receiving container 10, and the cover unit 120 is fixed by enclosing the receiving container 10 at its lower side and engaging with the screw thread. Here, the cover unit 120 has a ring-shaped hole formed in the center, through which a portion of the inclined protrusion unit 110 passes, and the hole is formed relatively smaller than the extension portion 114, so that when the cover unit 120 is coupled to the storage container 10, the inclined protrusion unit 110 does not come off and the coupled state can be maintained. In this embodiment, the cover unit 120 is formed of two members stacked in the vertical direction, and the extension portion 114 is disposed between them so that the cover unit 120 and the inclined protrusion unit 110 can maintain a combined state. As such, the guide module 100 includes the inclined protrusion unit 110 and the cover unit 120, and is fixedly coupled to the opening of the receiving container 10 so that the inclined protrusion unit 110 is positioned in a protruding upward state at a preset angle. Furthermore, the inclined protrusion unit 110 according to the present invention has a separate protruding compression part 130 formed along the inner surface of the communication port 112, and a part of the discharge module 200 is inserted into the inside of the communication port 112 and compressed by the protruding compression part 130. The detailed configuration of the protruding compression portion 130 will be described later with reference to FIG. Meanwhile, the exhaust module 200 is formed in a long pipe shape, one side of which is inserted into the receiving space 12 of the receiving container 10 through the communication port 112 and the other side of which is exposed to the outside to form an exhaust port 232 .

[0011] Specifically, the discharge module 200 is connected and fixed in a state in which it penetrates the guide module 100, one side of which is disposed inside the receiving space 12 and the other side of which is disposed outside the receiving container 10, and discharges the contained photoresist aqueous solution to the outside. At this time, the discharge module 200 is inserted and fixed closely when it is combined with the guide module 100, so that a discharge flow path and an air flow path are formed, and the discharge flow path is configured to contact the bottom surface of the inside of the receiving space 12 to discharge the photoresist solution to the outside. And, the remaining air flow path is connected to the upper part of the receiving space 12 to supply high pressure gas, so that the photoresist solution is discharged to the outside by pressure. In the present invention, the discharge module 200 has a portion along the longitudinal direction that corresponds to the periphery of the communication port 112, and is arranged in a form that is inserted into the inner surface of the communication port 112. The discharge module 200 mainly includes a flow path unit 210, an expansion fixing unit 220, and a connection unit 230. The flow passage unit 210 is formed long, a part of which is disposed inside the receiving container 10, and has a discharge flow passage formed therein so that the photoresist aqueous solution can be discharged to the other side.

[0012] Specifically, the flow passage unit 210 is formed long in a general piping shape, and one side is disposed to contact the bottom surface of the receiving container 10. At this time, as shown in the figure, the flow passage unit 210 is disposed in a state inclined at a certain angle by the guide module 100, and one side is seated to contact an end portion of the bottom surface of the receiving space 12, so that the remaining photoresist aqueous solution can be completely discharged. In this embodiment, the passage unit 210 is formed long and narrower than the opening of the receiving container 10, and the discharge passage is formed therein. Meanwhile, the expansion fixing unit 220 is extended to the other side of the flow passage unit 210 and is inserted and fixed inside the communication port 112, and is formed in a form in which a portion of the area along the longitudinal direction of the flow passage unit 210 is expanded, and the discharge flow passage is extended therein. Specifically, it is preferable that the expansion fixing unit 220 has a circumference and length corresponding to that of the communication port 112, and is configured to be inserted through the communication port 112 together with the passage unit 210 when the passage unit 210 is inserted, thereby sealing the communication port 112. At this time, the expansion fixing unit 220 has an air passage formed therein in addition to the exhaust passage, and is connected to the connection unit 230 (to be described later) so that high pressure air can be supplied into the receiving space 12 . In this embodiment, the expansion fixing unit 220 is formed in a cylindrical shape corresponding to the shape of the communication port 112, and is provided with at least one seal around its periphery to prevent unintended fluid flow when it comes into contact with the communication port 112. Here, the expansion fixing unit 220 is configured so that the protruding compression portion 130 described later comes into contact with the side surface along the periphery and is pressurized in a forced fitting form when inserted into the communication opening 112, thereby maintaining a stable connection state. Meanwhile, the connection unit 230 is provided on the other side of the passage unit 210 with the expansion fixing unit 220 at the center, and is formed to independently connect the air passage and the exhaust passage.

[0013] Specifically, the connection unit 230 is extended and protruded from the expansion fixing unit 220, and is exposed to the outside, and has an outlet 232 connected to the exhaust passage and a supply part 234 connected to the air passage. At this time, the outlet 232 is connected to an equipment through which the photoresist solution is supplied, and the supply part 234 is connected to a means for supplying high-pressure air to be supplied into the receiving space 12, and in this embodiment, the high-pressure air is supplied as nitrogen gas. In this embodiment, the connection unit 230 is configured to be exposed to the outside through the fixing module 300 (to be described later) as shown in the drawings, and is provided with the outlet 232 and the supply part 234 independently. As described above, the discharge module 200 includes the passage unit 210 , the expansion and fixing unit 220 and the connection unit 230 , and the expansion and fixing unit 220 is coupled to the communication port 112 with one side passing through the guide module 100 . Meanwhile, the fixing module 300 is fixedly coupled to the inclined protruding unit 110 with a portion of the other side of the discharge module 200 penetrating therethrough, so that the discharge module 200 is pressed toward the guide module 100 . In detail, the fixing module 300 encloses a part of the other side of the discharge module 200 and is fixedly coupled to the inclined protruding unit 110 at the same time to press the expanding fixing unit 220 . At this time, the fixing module 300 is formed in a ring shape with a hole at the center of the upper end that is relatively smaller than the circumference of the expansion fixing unit 220, and is configured so that the connection unit 230 passes through, and is formed in a shape that wraps around the outer surface of the inclined protrusion unit 110.

[0014] The inclined protrusion unit 110 includes a locking protrusion portion 113 having a sawtooth shape on at least a portion of its outer surface, and a plurality of such locking protrusion portions are formed continuously along the protruding longitudinal direction, and the fixing module 300 is configured to enclose the inclined protrusion unit 110 and have at least a portion selectively contact the locking protrusion portion 113 to be fixed. As a result, the fixing module 300 moves toward the storage container 10 along the longitudinal direction of the inclined protrusion unit 110, and as it moves, it is fixed to the locking protrusion portion 113, thereby preventing the fixing module 300 from being unintentionally detached, and the expansion fixing unit 220 is pressurized inside the communication port 112 to maintain the coupled state. Here, the inclined protrusion unit 110 according to the present invention is formed such that an inner diameter of at least a portion of the communication opening 112 decreases in a direction toward the receiving container 10. The expansion fixing unit 220 is pressurized into the communication opening 112 by the fixing module 300, so that the communication opening 112 is pressurized in a direction in which the inner diameter of the communication opening 112 decreases, and the communication opening 112 can be stably sealed. In this embodiment, the fixing module 300 mainly includes a coupling unit 310 and an adjustment unit 320 . The coupling unit 310 is configured to enclose the outer surface of the inclined protrusion unit 110 and press the expansion fixing unit 220 . Specifically, the coupling unit 310 is fixed to the oblique protrusion unit 110 by the adjusting unit 320 while being wrapped around the oblique protrusion unit 110 in a state where the connecting unit 230 is inserted through the coupling unit 310 and is in contact with the expanding fixing unit 220 . Here, as shown in FIG. 4, the coupling unit 310 has a cylindrical shape with a certain thickness, and the upper part is formed to have a relatively small inner diameter, and encloses the expansion fixing unit 220 at the upper part with the flow passage unit 210 penetrating therethrough to prevent it from coming off.

[0015] The inclined protrusion unit 110 is coupled to the upper end of the inclined protrusion unit 110 in a manner to enclose the upper end of the inclined protrusion unit 110, and its position can be adjusted toward the receiving container 10. That is, the coupling unit 310 is coupled to the inclined protrusion unit 110 in a manner that wraps the expansion fixing unit 220 from above while the discharge module 200 is inserted through the inclined protrusion unit 110, thereby preventing the discharge module 200 from coming off and at the same time, adjusting the insertion depth. At this time, the coupling unit 310 is configured to be coupled with the adjustment unit 320 (to be described later) and to be selectively fixed to or separated from the inclined protrusion unit 110 by adjusting the adjustment unit 320 . In this embodiment, the coupling unit 310 has a cylindrical shape as shown in the figure, and a coupling groove 312 is formed along the circumference and penetrates a portion of the side to expose a portion of the outer surface of the inclined protrusion unit 110, and the adjustment unit 320 is coupled to the coupling groove 312 and selectively contacts and is fixed to the outer surface of the inclined protrusion unit 110. Meanwhile, the adjustment unit 320 is provided in the coupling unit 310 and is configured to selectively adjust the movement of the coupling unit 310. The middle part of the adjustment unit 320 has a certain length and is fixed to the coupling unit 310. One side along the longitudinal direction selectively contacts the inclined protrusion unit 110 to adjust whether or not to be coupled to the coupling unit 310. At this time, the adjustment unit 320 prevents the expansion fixing unit 220 from being pressurized toward the receiving container 10 and from being unintentionally separated in the opposite direction, and allows the coupling unit 310 to be selectively separated by a user's operation. Specifically, at least one adjusting unit 320 is provided around the coupling unit 310, and is disposed vertically while being seated in the coupling groove 312, and a middle portion along the longitudinal direction is rotatably coupled to the coupling unit 310. One end portion along the longitudinal direction is formed to correspond to the shape of the locking protrusion 113 and selectively contacts it. Here, one end portion along the longitudinal direction of the adjusting unit 320 has at least one sawtooth and is engaged with at least a portion of the region of the locking protrusion 113 exposed through the coupling groove 312, thereby fixing the coupling unit 310.

[0016] As a result, when one side along the longitudinal direction of the adjustment unit 320 contacts the locking protrusion 113, the coupling unit 310 can move toward the receiving container 10 without detaching from the inclined protrusion unit 110 or maintain the coupled state. On the contrary, as shown in FIG. 4, when the other side of the adjustment unit 320 is pressed so that one side is separated from the locking protrusion 113, the coupling unit 310 can be in a separable state from the inclined protrusion unit 110. In this embodiment, the adjustment unit 320 is composed of a plurality of pieces and is arranged at a certain distance around the coupling unit 310, and when a user simultaneously presses and operates the other side of the adjustment unit 320, one side can be selectively separated or maintained in contact with the locking protrusion 113. At this time, the adjusting unit 320 is configured so that a middle part along a longitudinal direction rotates around a rotation axis in the coupling unit 310, and a restoring force acts on one side of the adjusting unit 320 by pressing the one side toward the inclined protrusion unit 110. That is, the adjusting unit 320 is coupled to the coupling unit 310 so as to be rotatable, and receives a restoring force through a separate elastic member (not shown), so that one side can maintain a contact state with the locking protrusion 113 when the user does not press the other side. As described above, the fixing module 300 according to the present invention includes the connection unit 310 and the adjustment unit 320, and the user can connect the connection unit 310 to the inclined protrusion unit 110 and pressurize it toward the storage container 10 to move the expansion fixing unit 220 and the flow path unit 210 together toward the storage container 10, thereby positioning the lower end of the flow path unit 210 close to the bottom surface of the storage container 10.

[0017] That is, the fixing module 300 is pressurized and fixed by the coupling unit 310 with the discharge module 200 penetrating the communication port 112, and when the coupling unit 310 presses the discharge module 200 toward the storage container 10, the locking protrusion 113 comes into contact with one side of the adjustment unit 320 to adjust the insertion depth in stages, thereby preventing the discharge module 200 from being inserted into the storage container 10 above a certain level. As described above, the cover device according to the present invention includes the guide module 100, the discharge module 200 and the fixing module 300, and the discharge module 200 is inserted and fixed inside the storage container 10, and the inner diameter of the communication port 112 is configured to decrease along the longitudinal direction, thereby enabling the expansion fixing unit 220 to be stably fixed and sealed as it is pressurized toward the communication port 112. Next, the detailed structure of the oblique protrusion unit 110 according to the present invention will be described with reference to FIGS. FIG. 5 is a view showing a detailed configuration of the communication port 112 in the cover device for the photoresist container 10 of FIG. 1, FIG. 6 is a view showing the configuration of the pressure reducing unit 140 in the cover device for the photoresist container 10 of FIG. 1, and FIG. 7 is a view showing a modified form of the pressure reducing unit 140 in the cover device for the photoresist container 10 of FIG. 1. First, looking closely at the illustrated drawings, the inclined protrusion unit 110 has the communication port 112 in the form of a pipe formed at the center, and further includes a protruding compression part 130 that is formed to protrude toward the center along the inner surface of the communication port 112 and contacts the expansion fixing unit 220, and a pressure reducing part 140 that exhausts air inside the accommodating space 12 to the outside in an emergency.

[0018] The protruding compression part 130 is formed in a general protrusion shape or a ring shape, and configured to have an inner diameter that decreases along the longitudinal direction of the communication hole 112. Here, the protruding compression part 130 is configured to compress the side surface to prevent the expansion fixing unit 220 from coming off when the expansion fixing unit 220 is inserted, and the more the expansion fixing unit 220 is pressed and inserted, the greater the compression strength of the side surface. As a result, when the fixing module 300 presses the expansion fixing unit 220 toward the communication opening 112, the protruding compression portion 130 also presses the side of the expansion fixing unit 220, thereby minimizing detachment. In this embodiment, the protruding compression portion 130 is formed in a ring shape as shown in the figure and is formed on at least a portion of the inner surface of the communication hole 112, has a certain angle of inclination along the longitudinal direction, and includes a protruding first inclined surface 132 and a second inclined surface 134 that is continuous with the first inclined surface 132 and has an inclination in the opposite direction. The first slope 132 is formed in a shape in which the inner surface of the communication opening 112 gradually decreases in the longitudinal direction at a preset angle, and the second slope 134 is configured to have an inclination in the opposite direction to the second slope 134. At this time, the second slope 134 is configured to have a relatively larger inclination angle than the first slope 132, and is configured to press the side of the expansion fixing unit 220 when the expansion fixing unit 220 is inserted into the communication opening 112. As a result, when the expansion fixing unit 220 is inserted into the communication opening 112, it is pressed by the first inclined surface 132, increasing the pressure on the side, and at the same time, the second inclined surface 134 prevents the expansion fixing unit 220 from sliding in the opposite direction. In this manner, the inclined protrusion unit 110 according to the present invention includes the protruding compression portion 130 on the inner surface of the communication opening 112, making it possible to completely seal the expansion fixing unit 220 when it is inserted, while at the same time preventing it from coming off in the opposite direction. Next, the oblique protrusion unit 110 includes a separate pressure reducing portion 140 as shown in FIG.

[0019] The pressure reducing portion 140 is formed at least partially around the inclined protrusion unit 110, and when the expansion fixing unit 220 protrudes from inside the communication opening 112 by more than a predetermined length and slides toward the connection unit 230, the pressure reducing portion 140 discharges the gas inside the storage container 10 to the outside. Specifically, the pressure reducing portion 140 is at least one, and is formed in the shape of a hole or a slit on the inner surface of the communication opening 112 to communicate the inside and the outside, and is selectively exposed to the outside depending on the insertion position of the expansion fixing unit 220. At this time, as shown in FIG. 6, the pressure reducing portion 140 is formed in a hole shape that communicates the inside and outside at least partially around the communication opening 112, and is formed to be opened when the expansion fixing unit 220 moves backward. In the case of (a) of Figure 6, when the expansion fixing unit 220 is fully inserted and fixed inside the communication opening 112, the outer surface of the expansion fixing unit 220 is in close contact with the inner surface of the communication opening 112, thereby blocking the communication opening 112 by the expansion fixing unit 220. However, as shown in FIG. 6(b), if a portion of the expansion fixing unit 220 is unintentionally discharged outside the communication port 112 beyond the preset length, the pressure reducing portion 140 is exposed to the outside and the high pressure gas inside the storage container 10 is discharged to the outside. At this time, in the case of the storage container 10, high pressure is maintained because high pressure gas is supplied through the air flow path, and when the expansion fixing unit 220 slides out of the communication port 112 by more than a certain length, the high pressure gas is discharged and the pressure inside the storage container 10 decreases.

[0020] If the pressure reducing unit 140 were not present, the high pressure inside the receiving vessel 10 could cause the discharge module 200 to be unintentionally ejected. Of course, when the fixing module 300 is connected to the inclined protrusion unit 110 and the locking protrusion portion 113 is fastened to one side end of the adjustment unit 320, the discharge module 200 is supported so as not to be ejected, but even if the adjustment unit 320 is unintentionally damaged or the coupled state is released, the pressure reducing portion 140 can prevent the discharge module 200 from being ejected. In other words, if the gas pressure inside the storage container 10 is too high or if the fixing module 300 is damaged and the expansion fixing unit 220 partially protrudes outside the communication opening 112, the gas is discharged to the outside by the pressure reducing section 140 so that the exhaust module 200 is not unintentionally ejected, thereby preventing a safety accident from occurring to the user. Furthermore, the pressure reducing portion 140 according to the present invention may be formed in a slit shape as shown in FIG. As shown in the drawings, the pressure reducing portion 140 is formed in a slit shape at the upper end of the inclined protruding unit 110, and is formed so that a portion of it is exposed and opened when the expansion fixing unit 220 slides backward. At this time, the pressure reducing portion 140 is different in shape and position from that shown in FIG. 6, but is designed to have substantially similar purposes and effects. The length of the slit of the pressure reducing portion 140 can adjust the protruding length of the expansion fixing unit 220 until the high-pressure gas is discharged to the outside.

[0021] In addition, the inclined protrusion unit 110 may be formed to include both the hole-shaped pressure reducing portion 140 shown in FIG. 6 and the slit-shaped pressure reducing portion 140 shown in FIG. As described above, the inclined protrusion unit 110 according to the present invention preemptively exhausts the gas inside the storage container 10 through the pressure reducing section 140 when the expansion fixing unit 220 protrudes from the communication opening 112 by more than a certain length, thereby preventing the exhaust module 200 from being unintentionally detached due to high pressure inside the storage container 10 and suppressing safety accidents. As described above, it will be apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit and scope of the present invention, other than the above-described embodiments, by examining the preferred embodiments of the present invention. Therefore, the above-described embodiments should be considered as illustrative and not restrictive, and the present invention is not limited to the above description, but may be modified within the scope of the appended claims and their equivalents. [Explanation of symbols]

[0022] 10: Containment Container 12: Containment space 100: Guide module 110: Inclined protruding unit 120: Cover unit 130: Protruding compression part 140: Pressure reduction section 200: Emission module 210: Flow path unit 220: Extended fixed unit 230: Connecting unit 300: Fixed module 310: Bonding unit 320: Adjustment unit

Claims

1. 1. A cover device for sealing an inside of a container for containing an aqueous photoresist solution, the cover device being coupled to an open portion of the container for sealing the inside of the container and discharging the aqueous photoresist solution to the outside, a guide module having an inclined protruding unit coupled to an upper end of the receiving container and protruding with an upward inclination at a preset angle, the guide module having a communication port through which the inside and outside of the receiving space are communicated; a discharge module including an expansion fixing unit formed in a long pipe shape, one side along the longitudinal direction of which is disposed inside the container through the communication port and the other side of which is exposed to the outside to form a discharge port, and which is expanded at a middle part along the longitudinal direction of which at least a part of the periphery is inserted and fixed in contact with an inner surface of the communication port; a fixing module that is fixedly coupled to the inclined protrusion unit while a portion of the other side of the discharge module penetrates through the fixing module, so that the discharge module is pressed toward the guide module; The communication port is formed so that an inner diameter of the communication port decreases toward the inside of the container in at least a portion of the region and is fixed by compression, The discharge module includes: a flow passage unit that is elongated and a portion of the flow passage is disposed inside the container, and a discharge flow passage is formed therein; and a connection unit that is extended and protruded from the expansion fixing unit and exposed to the outside, and has a discharge port that is extended to the discharge flow passage, The fixing module includes: a coupling unit through which a portion of the other side of the discharge module is inserted and which is in contact with the expansion fixing unit and which encloses at least a portion of the inclined protrusion unit; and an adjustment unit having a certain length, a middle portion of which is fixed to the coupling unit, and a longitudinal side of which is selectively brought into contact with the inclined protrusion unit to adjust whether or not the coupling unit is coupled to the coupling unit; A cover device that operates the adjustment unit to pressurize the expansion and fixing unit toward the container and prevent the expansion and fixing unit from being released in the opposite direction.

2. The inclined protruding unit is The cover device according to claim 1 , further comprising a protruding compression portion formed at least partially along an inner surface of the communication opening, protruding toward the center and contacting the expansion fixing unit.

3. The protruding compression portion is 3. The cover device according to claim 2, further comprising a first inclined surface that is protruded and formed with a constant angle of inclination along the longitudinal direction.

4. The inclined protruding unit is 4. The cover device according to claim 3, wherein a second inclined surface is formed inside the communication opening, the second inclined surface being continuous with the first inclined surface and inclined in an opposite direction, and the second inclined surface has an inclination angle relatively larger than that of the first inclined surface.

5. The cover device according to claim 1, further comprising a pressure reducing section that exhausts gas inside the container to the outside when the inclined protrusion unit is formed at least partially along the periphery and the expansion fixing unit protrudes from the inside of the communication port by more than a predetermined length and slides toward the connection unit.

6. The pressure reducing section is The cover device according to claim 5 , wherein the communication opening is formed in the form of a hole that communicates between the inside and the outside at least in a portion around the periphery thereof and is opened when the expansion fixing unit moves rearward.

7. The pressure reducing section is The cover device according to claim 5 , wherein a slit is formed in an upper end of the inclined protruding unit so as to be opened when the expansion fixing unit moves rearward.

8. The inclined protrusion unit includes a locking protrusion having a sawtooth shape on at least a part of an outer surface, and a plurality of the inclined protrusion units are continuously formed along a protruding longitudinal direction, The cover device according to claim 1 , wherein one side end of the adjustment unit is selectively fixed by being engaged with at least a part of the locking protrusion.

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