Optical equipment protection device and laser processing device

Abstract

To provide an optical instrument protection device which can effectively protect an optical instrument of a laser processing device, and to provide the laser processing device.SOLUTION: One embodiment of the invention relates to an optical instrument protection device which protects an optical instrument of a laser processing device. The optical instrument protection device includes: a housing which encloses a space formed between the optical instrument and an object to be processed by a laser beam; and an introduction port which is provided at the housing and introduces a gas into the housing. The optical instrument protection device is configured to send the gas, introduced from the introduction port into the housing, from the inner side of the housing in a direction of the object.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an optical lens of a laser processing apparatus, an optical device protection apparatus for protecting an optical lens and a protective glass portion from dust and the like, and a laser processing apparatus using the same.

Background Art

[0002] A laser processing apparatus is an apparatus that irradiates a processing object with laser light to perform cutting, welding, drilling, scribing, and surface modification processing. When performing processing with a laser processing apparatus, the object melts due to the energy of the laser light, generating smoke and dust, and also generating flying objects such as spatter and fume.

[0003] In Patent Document 1, an air wall is created by air ejected from air ejection means provided around the outer periphery of a processing machine, and the fan of a dust collection part provided above the processing machine is rotated to make the dust generated during the processing of a workpiece rise upward and collect the dust, and a dust collection method of a workpiece processing apparatus is disclosed.

[0004] In Patent Document 2, a dust collection pipe provided with a plurality of nozzles for ejecting a spiral liquid jet is provided below a work table directly below a processing head in order to process spatter and the like generated during thermal cutting processing, and a dust collection processing apparatus of a thermal cutting processing machine provided with a dust collection processing apparatus for processing waste liquid is disclosed.

[0005] In Patent Document 3, when performing laser processing, in a direction intersecting the ejection direction of assist gas, air is supplied in the vicinity of a processing part, and a dust collection method in a laser processing apparatus for collecting dust generated during processing to a dust collection part is disclosed.

[0006] Patent Document 4 discloses a dust collector for a laser processing machine, comprising a housing positioned with a gap between it and the surface of a workpiece to cover the processing position of the workpiece, a laser beam transmission hole and a processing gas supply nozzle for supplying processing gas toward the processing position on its upper surface, an opening on the side where the processing gas supply nozzle is installed, a suction nozzle for sucking up fumes and dust generated during processing on the side opposite to this open side, and a rectifier plate provided on the side of the housing closer to the suction nozzle than the processing position, with a length extending between the two sides in a direction perpendicular to the direction of processing gas supply by the processing gas supply nozzle when viewed from above.

[0007] Patent Document 5 discloses a laser processing dust collection device comprising a laser oscillator, a galvanometer scanner that irradiates a scanning area on a workpiece with laser light output from the laser oscillator, a booth duct that covers the processing area space formed between the galvanometer scanner and the workpiece, the booth duct having a movable area that opens and closes the processing area space, allowing the workpiece to enter and exit the processing area space, an assist gas nozzle that blows inert gas toward the workpiece, and an air blow nozzle that forcibly flows the gas in the processing area space toward the exhaust port. [Prior art documents] [Patent Documents]

[0008] [Patent Document 1] Japanese Patent Publication No. 2000-288782 [Patent Document 2] Japanese Patent Application Publication No. 05-337676 [Patent Document 3] Japanese Patent Application Publication No. 11-314190 [Patent Document 4] Utility Model Registration No. 3143457 Gazette [Patent Document 5] Japanese Patent Publication No. 2015-182116 [Overview of the project] [Problems that the invention aims to solve]

[0009] In laser processing equipment, it is crucial to protect the optical components from flying debris such as smoke, dust, spatter, and fumes generated when laser light is irradiated onto a workpiece for processing. In particular, in remote-type laser processing equipment that scans the laser beam with a galvanometer mirror, a space is provided between the optical component, which uses a lens to focus the laser beam, and the workpiece. If dust or flying debris floats in this space, it can have adverse effects such as scattering of the laser beam. In addition, spatter and fumes adhere to the optical lenses and protective glass, so regular maintenance is necessary.

[0010] The present invention aims to provide an optical equipment protection device and a laser processing device that can effectively protect the optical portion of a laser processing device. [Means for solving the problem]

[0011] One aspect of the present invention is an optical equipment protection device for protecting optical parts such as lenses and protective glass of a laser processing apparatus, comprising a housing that surrounds the space between the optical parts and the object to be laser processed, and an introduction port provided in the housing for introducing gas into the inside of the housing, wherein the optical equipment protection device is configured to send the gas introduced into the inside of the housing from the introduction port toward the object.

[0012] With this configuration, the gas inside the housing surrounding the space between the optical part of the laser processing device and the object being processed is sent towards the object, thus preventing dust and spatter that are stirred up during laser processing from being directed towards the optical part.

[0013] In the above optical equipment protection device, it is preferable that the gas introduced into the housing from the introduction port swirls inside the housing, covering the entire surface of the optical lens and protective glass, and is sent towards the object. By swirling the gas inside the housing, the introduced gas can suppress turbulence in the airflow within the housing and effectively suppress pressure unevenness until it is sent towards the object.

[0014] In the optical instrument protection device described above, it is preferable that the housing has a guide channel that causes the gas introduced from the introduction port to swirl inside the housing. This allows the air pressure inside the guide channel to be maintained at a positive pressure by efficiently swirling the gas along the guide channel.

[0015] In the optical equipment protection device described above, it is preferable that the introduction port introduces purified gas into the inside of the housing. This allows purified gas to be introduced into the inside of the housing, covering the entire surface of the optical lens and protective glass while maintaining a clean state under positive pressure inside the housing.

[0016] The optical equipment protection device described above may further include a dust collection nozzle positioned between the housing and the object, configured to suck up gas sent from inside the housing toward the object. This allows the gas sent from inside the housing toward the object, along with fumes and scattered materials generated during laser processing, to be effectively sucked up by the dust collection nozzle and discharged to the outside.

[0017] One aspect of the present invention is a laser processing apparatus comprising a laser light source, an optical component including a lens that focuses the laser light emitted from the laser light source toward an object, and the above-mentioned optical equipment protection device disposed between the optical component and the object. This allows dust and spatter that are stirred up during laser processing to be separated from the optical components in a clean space, and the optical equipment of the laser light source can be protected from dust and spatter by clean air blown out from the lower opening. [Effects of the Invention]

[0018] According to the present invention, it is possible to provide an optical equipment protection device and a laser processing device that can effectively protect the optical portion of a laser processing device. [Brief explanation of the drawing]

[0019] [Figure 1] This is a schematic diagram illustrating the configuration of a laser processing apparatus according to this embodiment. [Figure 2] (a) and (b) are schematic diagrams illustrating the swirling of a gas. [Figure 3] It is a perspective view illustrating a housing provided with a guide flow path. [Figure 4] (a) and (b) are schematic diagrams illustrating the gas flow in a housing provided with a guide flow path. [Figure 5] It is a schematic cross-sectional view illustrating an optical device protection apparatus provided with a dust collection nozzle.

Embodiments for Carrying out the Invention

[0020] Hereinafter, embodiments of the present invention will be described based on the drawings. In the following description, the same members are denoted by the same reference numerals, and the description of the members once described will be omitted as appropriate.

[0021] (Laser Processing Apparatus) FIG. 1 is a schematic diagram illustrating the configuration of a laser processing apparatus according to the present embodiment. The laser processing apparatus 100 according to the present embodiment is an apparatus that irradiates a target object W with a laser beam L to perform processing such as welding and cutting. The laser processing apparatus 100 includes a laser light source 110, a drive unit 120, an optical device 130, and a stage 140. Further, the laser processing apparatus 100 includes an optical device protection apparatus 1 according to the present embodiment described later.

[0022] The laser light source 110 is a part that generates the laser beam L, and has, for example, an oscillator of a CO2 laser, a YAG laser, a semiconductor laser, or a fiber laser. The drive unit 120 is a part that controls the optical path of the laser beam L generated by the laser light source 110. The drive unit 120 has, for example, a galvanometer mirror and scans the laser beam L to a predetermined position of the target object W.

[0023] The optical instrument 130 has a lens 131 that focuses the laser beam L toward the object W and a window 132 that covers the lens 131. When a CO2 laser is used, for example, a ZnSe lens is used for the lens 131. For the window 132, for example, a disc-shaped quartz glass or ZnSe crystal is used and an anti-reflective coating is applied to the surface. The optical instrument 130 may not have a window 132, but it is desirable to have one for the protection of the lens 131. In this embodiment, the case in which a window 132 is provided is given as an example.

[0024] Stage 140 is the part where the object W is placed. Stage 140 may be equipped with a drive mechanism that can move the position of the object W. Also, if the object W to be processed is large, Stage 140 may be fixed and the drive unit 120 may be made to move on its own to perform processing over a wide area. In this case, by integrating the optical instrument protection device 1 with the drive unit 120 and making their movements the same, the optical instrument 130 can be protected over the entire processing area.

[0025] (Optical equipment protection device) The optical equipment protection device 1 according to this embodiment is a device that protects the optical equipment 130 of the laser processing apparatus 100. The optical equipment protection device 1 is placed between the optical equipment 130 of the laser processing apparatus 100 and the object W (stage 140). The optical equipment protection device 1 comprises a housing 10 that surrounds the space between the optical equipment 130 and the object W, and an introduction port 20 for introducing gas G into the inside of the housing 10.

[0026] The housing 10 is, for example, cylindrical and is configured to surround the area outside the scanning range of the laser beam L so as not to obstruct it. The introduction port 20 is provided on the side wall of the housing 10. A nozzle 21 is connected to the introduction port 20, and gas G is sent from the nozzle 21 to the inside of the housing 10 through the introduction port 20. The gas G includes an inert gas such as air or nitrogen.

[0027] The optical instrument protection device 1 is configured to send gas G, which is introduced into the housing 10 from the introduction port 20, from the inside of the housing 10 toward the object W. For example, when gas G is introduced into the housing 10 from the introduction port 20, the pressure inside the housing 10 becomes higher than the pressure on the outside of the housing 10 toward the object W.

[0028] Furthermore, since the housing 10 is positioned close to the optical device 130, the side of the housing 10 facing the object W (also referred to as "bottom," "lower side," or "downward" for convenience of explanation) is more open than the side facing the optical device 130 (also referred to as "top," "upper side," or "upper" for convenience of explanation). The upper side of the housing 10 may be in close contact with the optical device 130. As a result, the gas G introduced into the inside of the housing 10 from the introduction port 20 is sent to the side facing the object W, i.e., the side opposite the optical device 130 (downflow). Therefore, dust and spatter that are stirred up during laser processing can be blocked from the optical device 130 by positive-pressure clean air.

[0029] Alternatively, a blower 50 may be provided diagonally below the housing 10. By blowing air A horizontally from the blower 50, smoke and dust that have been stirred up above the object W can be blown away horizontally.

[0030] In laser processing, large amounts of smoke, dust, and spatter are scattered. Normally, these scattered materials are blown away during laser processing using a blower 50 installed near the upper lens. However, even after blowing with the blower 50, the material still diffuses into the processing room, so the room air is exhausted with a ventilation fan. However, dust is constantly generated during processing, and the amount of smoke and dust that is stirred up cannot be handled by the exhaust capacity of the blower 50 or ventilation fan, and if it fills the optical path of the laser beam L, it will have adverse effects due to attenuation and scattering of the laser beam L. In addition, if the air containing dust floating in the room comes into contact with the window 132, the laser beam passing through it may cause the dust to burn onto the window 132 or lens 131. For this reason, the window 132 needs to be maintained regularly.

[0031] By using the optical equipment protection device 1 according to this embodiment, gas G is sent from inside the housing 10 towards the object W, thereby preventing airborne particles such as smoke, dust, and spatter that are stirred up during laser processing from entering the inside of the housing 10.

[0032] It is preferable that the gas G introduced into the inside of the housing 10 from the introduction port 20 is purified gas G that has passed through the filter 30. This ensures that purified gas G is introduced into the inside of the housing 10, maintaining a clean environment inside the housing 10.

[0033] Figures 2(a) and 2(b) are schematic diagrams illustrating gas swirling. Figure 2(a) shows a side cross-sectional view of the housing 10, and Figure 2(b) shows a plan cross-sectional view of the housing 10. The gas G introduced into the housing 10 from the introduction port 20 is sent out towards the object W while swirling inside the cylindrical housing 10.

[0034] To actively induce swirling of the gas G, the nozzle 21 connected to the introduction port 20 is positioned to extend tangentially to the inner wall 10a of the housing 10. As a result, the gas G introduced into the housing 10 from the nozzle 21 via the introduction port 20 swirls in one direction along the inner wall 10a of the housing 10. This causes the gas G to swirl inside the housing 10, covering the entire surface of the window 132 as it is sent downward towards the opening of the housing 10. The swirling of the gas G creates a vortex, which effectively suppresses lateral diffusion and turbulence during the introduction of the gas G from the introduction port 20 into the housing 10 and its dispatch towards the target object W.

[0035] Figure 3 is a perspective view illustrating a housing equipped with a guide channel. The housing 10 shown in Figure 3 has a guide channel 15 that causes the gas G introduced from the introduction port 20 to swirl inside the housing 10. The guide channel 15 is formed between an inner cylinder 13 and the inner wall 10a, which are provided inside the housing 10. For example, the inner cylinder 13 is provided inside the housing 10 concentrically with the housing 10. The gas G introduced from the introduction port 20 is sent into the guide channel 15, which is the gap between the inner wall 10a and the inner cylinder 13 of the housing 10. The lower part of the guide channel 15 is closed by a bottom plate 151, and the upper part is open.

[0036] Figures 4(a) and 4(b) are schematic diagrams illustrating the gas flow in a housing equipped with guide channels. Figure 4(a) shows a side cross-sectional view of the housing 10, and Figure 4(b) shows a plan cross-sectional view of the housing 10. The gas G introduced from the introduction port 20 is sent into the guide channel 15 and swirls along the guide channel 15. Since the lower part of the guide channel 15 is blocked by the bottom plate 151, the gas G, while swirling, passes over the inner cylinder 13 from the open part above and is sent inside the inner cylinder 13, forming a vortex while swirling, and is sent down to the bottom of the housing 10, covering the entire surface of the upper optical instrument 130. By providing such a guide channel 15, the gas G can be swirled efficiently and the inside of the housing 10 can be maintained at positive pressure.

[0037] It is preferable that the upper side of the housing 10 be in close contact with, for example, the window 132 of the optical instrument 130. In this case, a gap is provided between the upper side of the inner cylinder 13 and the window 132. As a result, the gas G introduced into the guide channel 15 swirls and passes over the inner cylinder 13 through the gap between the upper side of the inner cylinder 13 and the window 132, enters the inside of the inner cylinder 13, and is sent downward in a vortex shape.

[0038] The gas G introduced from the introduction port 20 is sent upward while swirling in the guide channel 15, and then discharged downward from the top of the housing 10, thereby creating an active downflow with swirling gas G throughout the inside of the housing 10.

[0039] Figure 5 is a schematic cross-sectional view illustrating an optical instrument protection device equipped with a dust collection nozzle. The dust collection nozzle 80 is positioned between the housing 10 and the object W. The dust collection nozzle 80 is connected to the underside of the housing 10. The dust collection nozzle 80 has a frustoconical or cylindrical dust collection duct 81 and an exhaust pipe 82 provided in the dust collection duct 81 (see, for example, Japanese Patent No. 5729739). The exhaust pipe 82 is connected to an exhaust pump (not shown).

[0040] In the optical equipment protection device 1, which has a dust collection nozzle 80 on the lower side of the housing 10, gas G introduced into the inside of the housing 10 from the introduction port 20 is sent downward while swirling inside the housing 10. This gas G is also discharged to the outside from the exhaust pipe 82 while swirling in the dust collection duct 81 of the dust collection nozzle 80. By providing the dust collection nozzle 80, the gas G introduced into the inside of the housing 10 is actively sent downward by the negative pressure created by the dust collection nozzle 80 and discharged to the outside from the exhaust pipe 82.

[0041] Furthermore, when the dust collection duct 81 is positioned above the object W in close proximity to the object W, the dust collection nozzle 80 can effectively suck up smoke and dust generated during laser processing, and the gas G (downflow) sent from the housing 10 side prevents smoke, dust, and relatively heavy fumes from reaching the optical equipment 130.

[0042] As described above, the optical equipment protection device 1 and laser processing apparatus 100 according to this embodiment make it possible to effectively protect the optical equipment 130 of the laser processing apparatus 100.

[0043] Although the embodiments and specific examples have been described above, the present invention is not limited to these examples. For example, any additions, deletions, or design modifications of components to the above-described embodiments or specific examples, or any combination of features of the embodiments, as appropriate by those skilled in the art, are also included within the scope of the present invention, as long as they retain the essence of the present invention. [Industrial applicability]

[0044] The optical equipment protection device 1 according to this embodiment is applicable not only to laser processing equipment 100 using a galvanometer scanner, but also to laser processing equipment 1 using a fixed optical processing head. [Explanation of Symbols]

[0045] 1…Optical equipment protection device 10…Cabinet 10a…Inner wall 13…Inner cylinder 15… Guide channel 20…Input Port 21…Nozzle 30…Filter 50... Blower 80... Dust collection nozzle 81... Dust collection duct 82... Exhaust pipe 100…Laser processing equipment 110… Laser light source 120... Drive unit 130…Optical equipment 131... Lens 132...Window 140… Stage 151...Bottom plate A...Air G...gas L... Laser light W...Object

Claims

1. An optical equipment protection device for protecting an optical equipment of a laser processing device, a housing enclosing a space between the optical device and an object to be laser processed; an introduction port provided in the housing for introducing a gas into the inside of the housing; Equipped with An optical equipment protection device configured to direct the gas introduced into the inside of the housing from the introduction port from the inside of the housing toward the target.

2. 2. The optical instrument protection device according to claim 1, wherein the gas introduced into the housing from the introduction port swirls inside the housing and is sent toward the object.

3. 3. The optical instrument protection device according to claim 2, wherein the housing has a guide flow path that causes the gas introduced through the introduction port to swirl inside the housing.

4. 4. The optical instrument protection device according to claim 1, wherein the inlet port introduces the purified gas into the inside of the housing.

5. a dust collection nozzle disposed between the housing and the object; The optical device protection device according to claim 1 , wherein the gas sent from inside the housing toward the target is sucked in by the dust collection nozzle.

6. a laser light source; an optical device including a lens that focuses the laser light emitted from the laser light source toward an object; The optical device protection device according to any one of claims 1 to 5, which is disposed between the optical device and the object; A laser processing device equipped with:

Images