Fluoroscopic imaging device

The fluoroscopic image imaging device addresses the challenge of evaluating high-speed mechanical components by synchronizing imaging timing with component operation and using pulsed X-ray beams, achieving high spatial and temporal resolution evaluations.

JP7672868B2Active Publication Date: 2025-05-08HITACHI HIGH TECH CORP
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Patent Information

Application Number
JP2021068815
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-04-15
Publication Date
2025-05-08
Estimated Expiration
2041-04-15

AI Technical Summary

Technical Problem

Existing fluoroscopic image imaging devices struggle to properly evaluate the internal structure of specimens, particularly for high-speed mechanical components that require high spatial and temporal resolution.

Method used

A fluoroscopic image imaging device is developed, incorporating a timing control device that synchronizes irradiation and detection timing with the operation of high-speed mechanical components, and an electromagnetic wave generator that produces pulsed X-ray beams with adjustable periods and pulse widths to achieve high spatial and temporal resolution imaging.

Benefits of technology

The device enables accurate and non-destructive evaluation of the internal structure of high-speed mechanical components with high temporal resolution and high spatial resolution, effectively addressing the limitations of previous technologies.

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Abstract

To provide a fluoroscopic imaging device capable of properly evaluating the internal structure of a test piece.SOLUTION: A fluoroscopic imaging device 1 includes: a timing control unit 13 that outputs an irradiation timing signal S1 in synchronization with a driving timing signal S4 to drive a test piece 31 or a timing signal S5 that is a detection result of the operation of the test piece 31; an electromagnetic wave generator 22, 23 that irradiates the test piece 31 with a pulsed electromagnetic wave beam B1 that has a wavelength that passes through the test piece 31 in synchronization with the irradiation timing signal S1; and an electromagnetic wave detector 41 that receives the electromagnetic wave beam B1 transmitted through the test piece 31.SELECTED DRAWING: Figure 1
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Description

[Technical field]

[0001] The present invention relates to a fluoroscopic imaging apparatus. [Background technology]

[0002] For example, as shown in Patent Documents 1 and 2 below, there is known a technique for evaluating the internal structure of a test specimen by irradiating the test specimen with X-rays from an X-ray source and measuring the intensity of the X-rays that are attenuated by and transmitted through the internal structure of the test specimen. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2006-503631 [Patent Document 2] JP 2011-89798 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, according to the above-mentioned techniques, it is sometimes difficult to appropriately evaluate the internal structure of the specimen. The present invention has been made in consideration of the above-mentioned circumstances, and has an object to provide a fluoroscopic imaging device capable of appropriately evaluating the internal structure of a test piece. [Means for solving the problem]

[0005] In order to solve the above problems, the fluoroscopic imaging apparatus of the present invention includes a timing control device that outputs an irradiation timing signal in synchronization with a drive timing signal for driving a specimen or a timing signal that is a detection result of the operation of the specimen, an electromagnetic wave generating unit that irradiates the specimen with a pulsed electromagnetic wave beam having a wavelength that passes through the specimen in synchronization with the irradiation timing signal, and an electromagnetic wave detecting device that receives the electromagnetic wave beam that has passed through the specimen. The electromagnetic wave generating unit includes a plurality of pulse generating units that generate a plurality of voltage pulses each having a different period and pulse width, and an electromagnetic wave beam irradiating unit that generates the electromagnetic wave beam by any one of the plurality of voltage pulses. It is characterized by: Effect of the Invention

[0006] According to the present invention, the internal structure of a specimen can be appropriately evaluated. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a block diagram of a fluoroscopic imaging apparatus according to a first embodiment. [Diagram 2] FIG. 4 is a waveform diagram of a voltage pulse in each embodiment. [Diagram 3] FIG. 11 is a block diagram of a fluoroscopic imaging apparatus according to a second embodiment. [Figure 4] FIG. 11 is a block diagram of a fluoroscopic imaging apparatus according to a third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] [Outline of the embodiment] It is believed that the degradation of time resolution and image noise can be avoided by applying the technology of the above-mentioned Patent Document 1, by performing interlaced, i.e., complementary sampling photography using a sub-detector. However, this method does not function effectively in applications requiring high spatial resolution or when photographing high-speed mechanical parts in their operating state.

[0009] On the other hand, by applying the technology of the above-mentioned Patent Document 2, it is considered that the behavior of inclusions in the fluid under test can be quantitatively evaluated by irradiating radiation in a pulsed manner. However, this method only attempts to evaluate the overall behavior macroscopically in time intervals of several seconds or more. In other words, this method is not suitable for evaluating mechanical parts that require high spatial resolution in the submillimeter range, or for evaluating the state of mechanical parts operating at high speeds in the millisecond range.

[0010] Therefore, in the embodiment described below, even for mechanical parts that operate at high speed, a detection device and a timing control device suitable for high-speed imaging are used to synchronize and correlate the imaging timing with the mechanical parts, thereby realizing a fluoroscopic imaging device that can evaluate changes in the internal structure with high temporal and spatial resolution.

[0011] More specifically, the fluoroscopic imaging device of the embodiment described below uses a detection device capable of measuring pulsed X-rays of 5 microseconds or less and a timing control device to control the timing of capturing X-ray fluoroscopic images at high speed and with high accuracy. Then, a mechanical part as a test specimen is driven by a timing signal from the timing control device, and a pulsed X-ray irradiation timing signal and a transmitted X-ray detection signal synchronized with the drive are generated. Then, by measuring the amount of transmitted X-rays in a specified operating state of the test specimen, the internal operating condition of the target high-speed operating mechanical part can be quantitatively and nondestructively evaluated.

[0012] [First embodiment] Configuration of the First Embodiment FIG. 1 is a block diagram of a fluoroscopic imaging apparatus 1 according to the first embodiment. In FIG. 1, the fluoroscopic imaging device 1 includes an imaging control device 12, a timing control device 13, an X-ray source control power supply unit 21, an X-ray source pulse modulation circuit 22 (pulse generating unit, electromagnetic wave generating unit), an X-ray source irradiation unit 23 (electromagnetic wave beam irradiation unit, electromagnetic wave generating unit), an X-ray detection device 41 (electromagnetic wave detection device), an image processing device 42, and a sensor unit 70.

[0013] The X-ray source control power supply unit 21 applies a predetermined high power supply voltage to the X-ray source pulse modulation circuit 22. The X-ray source pulse modulation circuit 22 modulates the power supply voltage to supply a high voltage pulse S11 to the X-ray source irradiation unit 23. The X-ray source irradiation unit 23 is driven by the voltage pulse S11 and irradiates the specimen 31 with an X-ray beam B1 (electromagnetic wave beam). Note that "X-rays" are electromagnetic waves with a wavelength of, for example, 0.01 nm or more and less than 10 nm. However, in this embodiment, the X-rays generated by the X-ray source irradiation unit 23 are high-energy X-rays and have a white spectrum with a maximum energy of about 1 MeV to 9 MeV. Therefore, the specimen 31 is not irradiated with only X-rays of a specific wavelength.

[0014] The X-ray detection device 41 detects a portion of the X-ray beam B1 that has passed through the specimen 31. The imaging control device 12 supplies imaging plan data to the image processing device 42. The image processing device 42 generates a fluoroscopic image that evaluates the internal structure of the specimen 31 based on the imaging plan data and the detection result by the X-ray detection device 41.

[0015] FIG. 2 is a diagram showing an example of a waveform of a voltage pulse. 2, the voltage pulse S11 is a pulse having a period TP1 and a pulse width TQ1. The pulse width TQ1 is, for example, about 5 μs (microseconds), and the period TP1 is, for example, about 4 ms (milliseconds). In this case, it is preferable to use an X-ray detection device 41 that is suitable for measuring X-rays with a pulse width of 5 μs or less. The voltage pulse S12 shown in the figure is a high-voltage pulse that is applied to other embodiments described later, and the details thereof will be described later.

[0016] Returning to Fig. 1, the variable pulse modulation unit 11 supplies an irradiation timing signal S1 that specifies the on / off timing of a voltage pulse S11 to the X-ray source pulse modulation circuit 22. The irradiation timing signal S1 is a pulse signal that is generated, for example, at generation timing t0 (see Fig. 2) of the voltage pulse S11. The variable pulse modulation unit 11 also supplies, to the X-ray detection device 41, a detection timing signal S2 that specifies the timing for detecting the X-ray beam B1.

[0017] Furthermore, the timing control device 13 supplies the specimen 31 with a drive timing signal S4 synchronized with the irradiation timing signal S1. The drive timing signal S4 is a signal that specifies the timing for driving the specimen 31, and this allows the specimen 31 to be driven in synchronization with the irradiation timing signal S1. However, depending on the type of specimen 31, it may be impossible or difficult to control it with the drive timing signal S4 supplied from outside. For this reason, in this embodiment, a sensor unit 70 is provided.

[0018] The sensor unit 70 detects the operating state of the specimen 31 and outputs a timing signal S5 synchronized with the operation of the specimen 31. The imaging control device 12 instructs the timing control device 13 as to whether or not to synchronize the signals S1 and S2 with the timing signal S5. Here, when the imaging control device 12 instructs "synchronization with signal S5," the timing control device 13 outputs the signals S1 and S2 in synchronization with the signal S5. Therefore, even in this case, the timing control device 13 can output the irradiation timing signal S1 and the detection timing signal S2 synchronized with the operation of the specimen 31.

[0019] As an example, it is assumed that the specimen 31 is a solenoid valve that repeats an open state and a closed state in synchronization with the drive timing signal S4. In this case, the imaging control device 12 supplies the output timing of the signals S1 and S2 to the timing control device 13 so that the X-ray source irradiation unit 23 irradiates the X-ray beam B1 and the X-ray detection device 41 detects the X-ray beam B1 at the timing to be imaged in the periodic operation process of the specimen 31. As an example, it is assumed that the period TP1 shown in FIG. 2 is 4 ms and the pulse width TQ1 is 5 μs. Then, the specimen 31, which is a solenoid valve, repeats the opening and closing operation at a period of 4 ms, and the desired section of the opening and closing operation can be imaged with a high time resolution of 5 μs. This makes it possible to evaluate the reliability of mechanical parts that are important from an engineering perspective, such as repeatability.

[0020] [Second embodiment] 3 is a block diagram of a fluoroscopic imaging apparatus 2 according to the second embodiment. In the following description, the same reference numerals are used to designate parts corresponding to those in the first embodiment, and the description thereof may be omitted. 1, and further includes switches 27 and 28 and an X-ray source pulse modulation circuit 26 (pulse generating section, electromagnetic wave generating section). The timing control device 13 supplies an irradiation timing signal S1 to both of the X-ray source pulse modulation circuits 22 and 26.

[0021] X-ray source pulse modulation circuit 26 outputs a voltage pulse S12. Switch 27 selects one of X-ray source pulse modulation circuits 22, 26 and applies the power supply voltage output by X-ray source control power supply unit 21. Switch 28, in conjunction with switch 27, selects one of voltage pulses S11, S12 and supplies it to X-ray source irradiation unit 23. Hereinafter, X-ray source pulse modulation circuits 22, 26 and switches 27, 28 are collectively referred to as "variable pulse modulation unit 11."

[0022] Here, the voltage pulse S12 generated by the X-ray source pulse modulation circuit 26 is a pulse having a period TP2 and a pulse width TQ2 as shown in Fig. 2. The pulse width TQ2 is, for example, about 1.25 µs, and the period TP2 is, for example, about 1 ms.

[0023] Each of the X-ray source pulse modulation circuits 22 and 26 includes a plurality of capacitors and at least one coil (neither of which are shown), and these capacitors and coils form a network. By appropriately setting the capacitance of the capacitor, the number of capacitors, and the number of turns of the coil, it is possible to output a voltage pulse with a desired pulse width, i.e., the voltage pulses S11 and S12 shown in FIG. 2. In other words, to make the pulse width of the X-rays variable, it is preferable to prepare in advance a plurality of X-ray source pulse modulation circuits adjusted with appropriate capacitor capacitances, number of capacitors, and coils, as in the variable pulse modulation unit 11 of this embodiment, and to exclusively select and use them.

[0024] When the variable pulse modulation unit 11 outputs a voltage pulse S11 with a period TP1=4 ms and a pulse width TQ1=5 μs, for example, the amount of X-rays generated corresponding to one pulse can be increased, which is advantageous in that noise in the fluoroscopic image can be suppressed. On the other hand, when the variable pulse modulation unit 11 outputs a voltage pulse S12 with a period TP2=1 ms and a pulse width TQ2=1.25 μs, for example, the irradiation cycle of the X-ray beam B1 can be increased to 1000 times per second, and a fluoroscopic image with high resolution can be obtained.

[0025] Therefore, it is preferable to select the optimum one of the voltage pulses S11 and S12 depending on the noise ratio, resolution, and operation cycle of the specimen 31 required for the fluoroscopic image. The imaging control device 12 selects one of the voltage pulses S11 and S12 based on parameters such as the time resolution, noise ratio, and operation repetition frequency of the specimen 31 required for the fluoroscopic image to be acquired. This allows the optimum pulse width and pulse repetition frequency for the specimen 31 to be selected, making it possible to acquire an optimum fluoroscopic image.

[0026] 3, the variable pulse modulation unit 11 selects one of two types of voltage pulses S11, S12 and supplies it to the X-ray source irradiation unit 23, but it may be possible to select one of three or more types of voltage pulses to be supplied to the X-ray source irradiation unit 23. In any case, it is preferable that the pulse width (TQ1, TQ2, etc.) becomes shorter as the period (TP1, TP2, etc.) of the voltage pulse becomes shorter.

[0027] [Third embodiment] 4 is a block diagram of a fluoroscopic imaging apparatus 3 according to a third embodiment. In the following description, the same reference numerals are used to designate parts corresponding to those in the other embodiments described above, and the description thereof may be omitted. The fluoroscopic imaging device 3 has a configuration similar to that of the fluoroscopic imaging device 2 shown in FIG. 3, and further includes turntables 51, 52, an X-ray source irradiation unit 24 (electromagnetic wave beam irradiation unit, electromagnetic wave generation unit), an X-ray detection device 44 (electromagnetic wave detection device), an irradiation unit moving mechanism 60, and a sensor unit 72.

[0028] The turntables 51 and 52 can place the specimens 31 and 32 on their upper surfaces, respectively, and rotate the specimens 31 and 32. The timing control device 13 supplies pulse signals S6 and S16 synchronized with the irradiation timing signal S1 to the turntables 51 and 52, respectively. The turntables 51 and 52 rotate in synchronization with the pulse signals S6 and S16.

[0029] The X-ray source irradiation unit 24, the X-ray detection device 44, and the sensor unit 72 are configured similarly to the X-ray source irradiation unit 23, the X-ray detection device 41, and the sensor unit 70, respectively. That is, in the illustrated state, the X-ray source irradiation units 23, 24 irradiate the test pieces 31, 32 with X-ray beams B1, B2 (electromagnetic wave beams), respectively, and the X-ray detection devices 41, 44 detect the X-ray beams B1, B2 that have passed through the test pieces 31, 32, respectively. In addition, the timing control device 13 supplies a detection timing signal S2 to both of the X-ray detection devices 41, 44.

[0030] The sensor unit 72 detects the operating state of the specimen 32 and outputs a timing signal S15 synchronized with the operation of the specimen 32 to the timing control device 13. The timing control device 13 supplies a drive timing signal S14 to the specimen 32. The imaging control device 12 instructs the timing control device 13 as to whether or not to synchronize each of the signals S1 and S2 with the timing signal S5 or S15.

[0031] The turntable 51 may be a small turntable suitable for taking high-resolution images of, for example, a small specimen 31, and the turntable 52 may be a large turntable suitable for taking high-resolution images of, for example, a large specimen 32. In this case, it is preferable that the X-ray detection device 41 is a small device suitable for the small specimen 31, and the X-ray detection device 44 is a large device suitable for the large specimen 32.

[0032] The irradiation unit moving mechanism 60 can move the positions of the X-ray source irradiation units 23 and 24 as necessary. In other words, the positions of the X-ray source irradiation units 23 and 24 can be moved so that the X-ray source irradiation unit 23 irradiates the specimen 32 with the X-ray beam B1 and the X-ray source irradiation unit 24 irradiates the specimen 31 with the X-ray beam B2, in the opposite state to that shown in the figure.

[0033] According to the above configuration, both the small turntable 51 and the large turntable 52 can rotate in synchronization with the irradiation timing of the X-ray beams B1 and B2. This makes it possible to collect X-ray transmission data from all directions, and to reconstruct not only fluoroscopic images of the specimens 31 and 32 but also tomographic images by the image processing device 42. That is, by inputting time resolution, sampling interval, spatial resolution, etc. to the imaging control device 12 according to attributes such as the size of the specimens 31 and 32, the imaging control device 12 can select optimal periods TP1 and TP2, X-ray detection devices 41 and 44, and turntables 51 and 52.

[0034] In this embodiment, the turntables 51, 52 can be stopped, and the irradiation timing signal S1 can be supplied to the variable pulse modulation unit 11 in synchronization with the drive timing signals S4, S14, as in the first and second embodiments. Alternatively, the irradiation timing signal S1 can be output to the variable pulse modulation unit 11 in response to the timing signals S5, S15 detected from the specimens 31, 32. This makes it possible to configure an optimal fluoroscopic image and tomographic image imaging device for the specimens 31, 32.

[0035] [Effects of the embodiment] As described above, according to the above-mentioned embodiment, the fluoroscopic imaging devices 1, 2, 3 include a timing control device 13 that outputs an irradiation timing signal S1 in synchronization with a drive timing signal S4, S14 for driving the test specimens 31, 32 or a timing signal S5, S15 which is a detection result of the operation of the test specimens 31, 32, an electromagnetic wave generating unit (22, 26, 23, 24) that irradiates the test specimens 31, 32 with a pulsed electromagnetic wave beam (B1, B2) having a wavelength that passes through the test specimens 31, 32 in synchronization with the irradiation timing signal S1, and an electromagnetic wave detection device (41, 44) that receives the electromagnetic wave beam (B1, B2) that has passed through the test specimens 31, 32.

[0036] This allows appropriate evaluation of the internal structure of the specimens 31, 32. Specifically, the internal conditions of the specimens 31, 32 in an operating state can be visualized with the spatial and temporal resolution required for the specimens 31, 32, such as machine parts. Furthermore, by using an electromagnetic wave detection device (41, 44) suitable for high-speed photography and a timing control device 13, the operation of the specimens 31, 32 can be correlated with the photography timing, and the internal structure can be evaluated with high temporal and spatial resolution.

[0037] Also, like the fluoroscopic imaging devices 2 and 3, the electromagnetic wave generating unit (22, 26, 23, 24) preferably includes a plurality of pulse generating units (22, 26) that generate a plurality of voltage pulses (S11, S12) having different periods TP1, TP2 and pulse widths TQ1, TQ2, and an electromagnetic wave beam irradiating unit (23, 24) that generates an electromagnetic wave beam (B1, B2) by one of the plurality of voltage pulses (S11, S12). This makes it possible to select an optimal voltage pulse (S11, S12) depending on the specimen 31, 32.

[0038] Furthermore, it is more preferable that the multiple pulse generating sections (22, 26) are set so that the pulse widths TQ1, TQ2 become shorter as the periods TP1, TP2 become shorter. This makes it possible to generate electromagnetic wave beams (B1, B2) with energy according to the capabilities of the electromagnetic wave generating units (22, 26, 23, 24).

[0039] It is more preferable that the fluoroscopic imaging device 3 further includes turntables 51, 52 for rotating the mounted specimens 31, 32, and the timing control device 13 further includes a function for generating an irradiation timing signal S1 in synchronization with the rotation of the turntables 51, 52. This makes it possible to capture not only fluoroscopic images of the specimens 31, 32, but also tomographic images.

[0040] Moreover, it is more preferable that the fluoroscopic imaging device 3 is provided with a plurality of turntables 51, 52, and further includes an irradiation unit moving mechanism 60 for moving the electromagnetic beam irradiation units (23, 24) to the side of the plurality of turntables 51, 52 on which the specimens 31, 32 are mounted. This makes it possible to select and apply the optimal turntables 51, 52 and electromagnetic beam irradiation units (23, 24) for the specimens 31, 32.

[0041] [Variations] The present invention is not limited to the above-mentioned embodiment, and various modifications are possible. The above-mentioned embodiment is exemplified to explain the present invention in an easy-to-understand manner, and is not necessarily limited to those having all the configurations described. In addition, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. In addition, it is possible to delete a part of the configuration of each embodiment, or to add or replace other configurations. In addition, the control lines and information lines shown in the figure show those that are considered necessary for explanation, and do not necessarily show all the control lines and information lines necessary on the product. In reality, it may be considered that almost all the configurations are connected to each other. Possible modifications of the above-mentioned embodiment are, for example, as follows.

[0042] (1) In the fluoroscopic imaging devices 1, 2, and 3 of the above-described embodiments, the X-ray source irradiation units 23 and 24 irradiate the test specimens 31 and 32 with X-rays, for example, electromagnetic waves having a wavelength of 0.01 nm or more and less than 10 nm. However, instead of X-rays, the test specimens 31 and 32 may be irradiated with gamma rays having a wavelength of less than 0.01 nm, ultraviolet rays having a wavelength of 10 nm or more and less than 380 nm, or electromagnetic waves in other wavelength ranges may be irradiated as long as they are electromagnetic waves that can pass through the test specimens 31 and 32. [Explanation of symbols]

[0043] 1,2,3 Fluoroscopic imaging device 13 Timing control device 22, 26 X-ray source pulse modulation circuit (pulse generator, electromagnetic wave generator) 23, 24 X-ray source irradiation unit (electromagnetic wave beam irradiation unit, electromagnetic wave generation unit) 31,32 Specimen 41,44 X-ray detector (electromagnetic wave detector) 51,52 Turntable 60 Irradiation unit moving mechanism B1, B2 X-ray beam (electromagnetic wave beam) S1 Irradiation timing signal S4, S14 drive timing signal S5, S15 Timing signal S11, S12 Voltage pulse TP1,TP2 cycle TQ1, TQ2 pulse width

Claims

1. a timing control device that outputs an irradiation timing signal in synchronization with a drive timing signal for driving a specimen or a timing signal that is a result of detecting the movement of the specimen; an electromagnetic wave generating unit that irradiates the specimen with a pulsed electromagnetic wave beam having a wavelength that transmits the specimen in synchronization with the irradiation timing signal; an electromagnetic wave detection device that receives the electromagnetic wave beam transmitted through the test piece; The electromagnetic wave generating unit includes a plurality of pulse generating units that generate a plurality of voltage pulses each having a different period and pulse width, and an electromagnetic wave beam irradiating unit that generates the electromagnetic wave beam by any one of the plurality of voltage pulses.

1. A fluoroscopic imaging apparatus comprising:

2. The plurality of pulse generating units are set so that the pulse width becomes shorter as the period becomes shorter.

2. The fluoroscopic imaging apparatus according to claim 1.

3. Further comprising a turntable for rotating the mounted specimen; The timing control device further has a function of generating the irradiation timing signal in synchronization with the rotation of the turntable.

3. The fluoroscopic imaging apparatus according to claim 2.

4. A plurality of the turntables are provided, The apparatus further includes an irradiation unit moving mechanism for moving the electromagnetic beam irradiation unit to the side of the turntables to which the specimen is attached.

4. The fluoroscopic imaging apparatus according to claim 3.

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