Laser trajectory display device and laser trajectory display program

Abstract

In the present invention, a command coordinate acquisition unit acquires command coordinates for laser light with respect to a workpiece on the basis of command information for a mirror drive device. An actual coordinate calculation unit calculates the actual coordinates of the laser light with respect to the workpiece on the basis of the state of a mirror and / or the mirror drive device. A display setting unit sets a portion of layers of a layered structure S as a display layer Ld. For the set display layer Ld, a path display unit 45 superimposes and displays a laser command path T1 as a path based on the history of acquired command coordinates and a laser actual path T2 as a path based on the history of calculated actual coordinates.

Description

[Technical field]

[0001] The present disclosure relates to a galvanometer scanner for forming a layered structure on a workpiece. [Background technology]

[0002] The galvanometer scanner includes, for example, a mirror and a mirror drive device. The mirror includes a first mirror and a second mirror. The mirror drive device includes a first rotation device that rotates the first mirror about a first axis and a second rotation device that rotates the second mirror about a second axis.

[0003] The laser light emitted from the laser light source is reflected in turn by the first mirror and the second mirror, and is irradiated onto the surface of the workpiece. The first rotating device rotates the first mirror to scan the coordinates of the laser light on the workpiece in a first direction. The second rotating device rotates the second mirror to scan the coordinates of the laser light on the workpiece in a second direction. The galvano scanner sinters metal powder or the like, which is the material of the workpiece, into layers by scanning with the laser light, to form a layered structure in the workpiece. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2020-194038 A Summary of the Invention [Problem to be solved by the invention]

[0005] When a layered structure is molded in the above manner, if a desired shape or strength is not obtained, it is necessary to investigate the cause. In this case, the present inventors have noticed that the actual laser trajectory as the actual scanning trajectory of the laser light may be disturbed by, for example, overshoot due to feedback control, and the disturbance may be a problem.

[0006] The present disclosure has been made in consideration of the above circumstances, and has an object to make it possible to efficiently investigate disturbances in the actual laser trajectory. [Means for solving the problem]

[0007] The first disclosure is: A laser trajectory display device that is installed with respect to a galvanometer scanner that has a mirror and a mirror drive device that drives the mirror and forms a layered structure on a workpiece by laser light reflected by the mirror, a command coordinate acquisition unit that acquires command coordinates of the laser light with respect to the workpiece based on command information for the mirror drive device; an actual coordinate calculation unit that calculates an actual coordinate of the laser light with respect to the workpiece based on a state of at least one of the mirror and the mirror drive device; a display setting unit that sets a part of the layers in the laminated structure as a display layer; a trajectory display unit that displays, in a superimposed manner, a laser command trajectory as a trajectory based on the history of the acquired command coordinates and an actual laser trajectory as a trajectory based on the history of the calculated actual coordinates for the set display layer; A laser trajectory display device having the above structure.

[0008] According to the first disclosure, some layers in a laminated structure are set as display layers, and the laser command trajectory and the actual laser trajectory are displayed in an overlapping manner for the display layers. Therefore, the laser command trajectory and the actual laser trajectory can be displayed in an overlapping manner for each of some layers in the laminated structure. Therefore, a user can easily visually recognize the deviation of the actual laser trajectory of the same layer from the laser command trajectory, and can recognize the disturbance of the actual laser trajectory based on the deviation. Therefore, a user can efficiently investigate the disturbance of the actual laser trajectory.

[0009] The second disclosure is: A computer is provided for a galvanometer scanner having a mirror and a mirror drive device that drives the mirror, and that forms a layered structure on a workpiece by laser light reflected by the mirror, a command coordinate acquisition unit that acquires command coordinates of the laser light with respect to the workpiece based on command information for the mirror drive device; an actual coordinate calculation unit that calculates an actual coordinate of the laser light with respect to the workpiece based on a state of at least one of the mirror and the mirror drive device; a display setting unit that sets a part of the layers in the laminated structure as a display layer; Functioning as a a laser command trajectory as a trajectory based on the history of the acquired command coordinates and an actual laser trajectory as a trajectory based on the history of the calculated actual coordinates are displayed in an overlapping manner on a display of the computer for the set display layer; This is a laser trajectory display program.

[0010] According to the second disclosure, a computer and its display can be made to function as the laser trajectory display device of the first disclosure, thereby achieving the same effects as those of the first disclosure. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a schematic diagram showing a galvanometer scanner according to a first embodiment. [Diagram 2] 4 is a schematic diagram showing the relationship between the angle of a mirror and the actual coordinates of a laser beam. FIG. [Diagram 3] FIG. 2 is a block diagram showing a laser trajectory display device. [Figure 4] FIG. 13 is a diagram showing an example of a screen displayed on a display. [Diagram 5] FIG. 2 shows the edges of layers in a laminate structure. [Figure 6] FIG. 13 is a diagram showing another example of the screen. [Figure 7] FIG. 13 is a block diagram showing a laser trajectory display program. [Figure 8] FIG. 11 is a block diagram showing a laser trajectory display device according to a second embodiment. [Figure 9] FIG. 13 is a diagram showing an example of a screen displayed on a display. [Figure 10]FIG. 13 is a diagram showing another example of the screen. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. However, the present disclosure is not limited to the following embodiments, and can be appropriately modified and implemented without departing from the spirit and scope of the present disclosure.

[0013] [First embodiment] 1, the galvanometer scanner 200 has a mirror 220, a mirror driving device 210, and a condenser lens 230. The mirror 220 includes a first mirror 221 and a second mirror 222. The mirror driving device 210 includes a first rotating device 211 that rotates the first mirror 221, and a second rotating device 212 that rotates the second mirror 222.

[0014] The first mirror 221 reflects the laser light LB from the laser light source LS. The second mirror 222 further reflects the laser light LB reflected by the first mirror 221. The focusing lens 230 focuses the laser light LB reflected by the second mirror 222 and emits it toward the workpiece W. Hereinafter, the coordinates of the laser light LB on the workpiece W will be simply referred to as the "actual coordinates of the laser light LB."

[0015] Both the first rotating device 211 and the second rotating device 212 are servo motors or the like. The first rotating device 211 rotates the first mirror 221 around the first rotation axis A1 to scan the actual coordinates of the laser light LB in the first direction Y. The second rotating device 212 rotates the second mirror 222 around the second rotation axis A2 to scan the actual coordinates of the laser light LB in the second direction X.

[0016] The galvano scanner 200 sinters metal powder or the like, which is layered in sequence as the material of the workpiece W, into layers by scanning with a laser beam LB, thereby forming a layered structure S of the workpiece W.

[0017] 2, the first direction Y and the second direction X are both horizontal directions. A condenser lens 230 is disposed directly below the second mirror 222, and a workpiece W is disposed directly below the condenser lens 230.

[0018] Hereinafter, the rotation angle of the first mirror 221 from the reference angle is referred to as "θ 1 The rotation angle of the second mirror 222 from the reference angle is called "θ 2 ". The inter-axial distance in the second direction X between the first mirror 221 and the second mirror 222 is referred to as "D1". The distance in the vertical direction Z between the incident position of the laser light LB on the first mirror 221 and the upper surface of the focusing lens 230 is referred to as "D2". The distance in the vertical direction Z between the incident position of the laser light on the first mirror 221 and the incident position of the laser light on the second mirror 222 is referred to as "D3". The thickness of the focusing lens 230 in the vertical direction Z is referred to as "d". The distance in the vertical direction Z from the lower surface of the focusing lens 230 to the upper surface of the workpiece W is referred to as "WD".

[0019] "X" as the coordinate in the second direction X and "Y" as the coordinate in the first direction Y in the actual coordinate system of the laser beam LB are expressed by, for example, the following formula 1.

[0020]

number

[0021] Hereinafter, the scanning trajectory of the actual coordinates of the laser beam LB will be referred to as the "actual laser trajectory T2." In addition, below, the coordinates of the laser beam LB on the workpiece W when the mirror drive device 210 drives the mirror 220 in an ideal state without error as instructed will be referred to as the "command coordinates of the laser beam LB," and the trajectory of the command coordinates of the laser beam LB will be referred to as the "command laser trajectory T1."

[0022] An error occurs in the actual laser trajectory T2 with respect to the command laser trajectory T1. Specifically, for example, an overshoot or the like occurs in the actual laser trajectory T2 due to feedback control for a response delay of the mirror drive device 210. The overshoot or the like causes the above-mentioned error. Due to the error, there is a risk that the desired shape or the desired strength may not be obtained for the laminated structure S. In order to investigate the error, a laser trajectory display device 101 described below is installed for the galvano scanner 200.

[0023] As shown in FIG. 3, the laser trajectory display device 101 is mainly composed of a computer Cp and a display Dp. The computer Cp includes, for example, a memory such as a read only memory (ROM) or a random access memory (RAM), a control processing unit (CPU), a communication control unit, and the like, which are connected to each other via a bus. The computer Cp executes a laser trajectory display program P, which will be described later, that is, the computer Cp and the display Dp function as a command coordinate acquisition unit 10, an actual coordinate calculation unit 20, a display setting unit 30, and a display unit 40 through cooperation between the computer Cp and the laser trajectory display program P. In other words, the laser trajectory display device 101 has a command coordinate acquisition unit 10, an actual coordinate calculation unit 20, a display setting unit 30, and a display unit 40.

[0024] First, there will be described the command coordinate acquisition unit 10 and the actual coordinate calculation unit 20. The command coordinate acquisition unit 10 and the actual coordinate calculation unit 20 are mainly constituted by a computer Cp.

[0025] The command coordinate acquisition unit 10 acquires "command information i1" as information indicating an operation command for the mirror drive device 210 from a control device of the galvano scanner 200 or the like. The command coordinate acquisition unit 10 transmits "command coordinate information i10" as information indicating the command coordinates of the laser light LB to the display setting unit 30 based on the command information i1.

[0026] The actual coordinate calculation unit 20 has a drive information acquisition unit 21, a machine information storage unit 24, and an actual coordinate calculation unit 27. The drive information acquisition unit 21 acquires “drive information i21” from the galvano scanner 200 as information indicating the drive state of the mirror 220 by the mirror drive device 210, and transmits the drive information i21 to the actual coordinate calculation unit 27.

[0027] The machine information storage unit 24 stores "machine information i24" indicating the relationship between the drive information i21 and the actual coordinates of the laser light LB for each model of the galvano scanner. The machine information storage unit 24 recognizes the model of the galvano scanner 200 connected to itself, for example, from wiring, and transmits the machine information i24 for the model to the actual coordinate calculation unit 27.

[0028] The actual coordinate calculation unit 27 calculates the actual coordinates of the laser light LB based on the received drive information i21 and the received machine information i24. The actual coordinate calculation unit 27 transmits “actual coordinate information i27” indicating the actual coordinates to the display setting unit 30.

[0029] Next, a description will be given of the display setting unit 30 and the display unit 40. The display setting unit 30 has a layer selection unit 31, a block selection unit 33, and a display control unit 35. The display unit 40 has a layer display unit 41, a block display unit 43, a trajectory display unit 45, and a deviation display unit 47.

[0030] The display control unit 35 is mainly composed of a computer Cp. The layer selection unit 31 and the block selection unit 33 are mainly composed of a display Dp and an operation tool. The operation tool is, for example, a mouse, a keyboard, a touch pad, a touch panel, etc. Each part of the display unit 40, that is, the layer display unit 41, the block display unit 43, the trajectory display unit 45, and the deviation display unit 47, are mainly composed of the display Dp.

[0031] The user can select an arbitrary layer L in the laminated structure S as the display layer Ld by the layer selection unit 31. “Selected layer information i31” indicating the selected layer L is transmitted to the display control unit .

[0032] The display layer Ld is conveniently divided into a plurality of blocks B. The user can select an arbitrary block B in the display layer Ld as a display block Bd by the block selection unit 33. “Selected block information i33” indicating the selected block B is transmitted to the display control unit 35.

[0033] Based on the received selected layer information i31, the display control unit 35 causes the layer display unit 41 to display information indicating which layer L in the stacked structure S the display layer Ld is. Furthermore, based on the received selected block information i33, the display control unit 35 causes the block display unit 43 to display information indicating which block B in the display layer Ld the display block Bd is.

[0034] Furthermore, the display control unit 35 causes the trajectory display unit 45 to display the laser command trajectory T1 for the display block Bd on the display layer Ld based on the received selected layer information i31, the received selected block information i33, and the history of the received command coordinate information i10.

[0035] In addition, the display control unit 35 causes the trajectory display unit 45 to display the actual laser trajectory T2 for the display block Bd on the display layer Ld based on the received selected layer information i31, the received selected block information i33, and the history of the received actual coordinate information i27.

[0036] Hereinafter, the deviation of the actual coordinates of the laser light LB from the command coordinates of the laser light LB is referred to as the "actual coordinate deviation." The display control unit 35 further calculates the actual coordinate deviation for the display block Bd in the display layer Ld based on the received selected layer information i31, the received selected block information i33, the history of the received command coordinate information i10, and the history of the received actual coordinate information i27. The larger the difference between the command coordinates of the laser light LB and the actual coordinates of the laser light LB overall within the display block Bd in the display layer Ld, the larger the actual coordinate deviation becomes. The display control unit 35 causes the deviation display unit 47 to display information indicating the calculated actual coordinate deviation.

[0037] As shown in the example of the screen of the display Dp in FIG. 4, a layer selection section 31, a layer display section 41, a block selection section 33, a block display section 43, a trajectory display section 45, and a deviation display section 47 are formed within the display Dp.

[0038] The user selects the display layer Ld, for example, by inputting the number of the layer L in the layer selection unit 31. When the display layer Ld is selected, the layer display unit 41 illustrates, for example, the position of the display layer Ld in the stacked structure S.

[0039] The user selects a display block Bd in the display layer Ld, for example, by inputting a row number and a column number into the block selection unit 33. When the display block Bd is selected, the block display unit 43 illustrates, for example, the position of the display block Bd in the display layer Ld.

[0040] The trajectory display unit 45 displays the laser command trajectory T1 and the laser actual trajectory T2 in different colors on top of each other for the display block Bd on the display layer Ld. In FIG. 4, the laser command trajectory T1 and the laser actual trajectory T2 are shown with different line types to indicate the difference in color, but the line types may be the same or different. For example, from FIG. 4, it can be seen that the deviation of the laser actual trajectory T2 from the laser command trajectory T1 is large at the part where the laser command trajectory T1 turns back. In other words, it can be seen that the laser actual trajectory T2 is disturbed at the turning back part. The cause of this is thought to be an overshoot caused by feedback control for the response delay of the mirror drive device 210, etc.

[0041] The deviation display unit 47 displays the actual coordinate deviation for the display block Bd on the display layer Ld, for example, by using numbers, a bar graph, a gauge, or the like.

[0042] 5 shows a part of the trajectory display unit 45 when a block B at an end of a layer L is selected as a display block Bd. The galvano scanner 200 models the edge of each layer L by vector operation based on vector-format information. On the other hand, the part inside the edge of each layer L is modeled by raster operation based on raster-format information.

[0043] The trajectory display unit 45 displays the laser command trajectory T1 and the actual laser trajectory T2 in different colors, and in addition, for the actual laser trajectory T2, displays the actual laser trajectory T2b ​​in vector operation and the actual laser trajectory T2r in raster operation in different colors.

[0044] Regarding the laser command trajectory T1, the laser command trajectory T1b in the vector operation and the laser command trajectory T1r in the raster operation may be displayed in the same color if they are not confusing. However, if they are confusing if they are displayed in the same color, it is preferable to display them in different colors.

[0045] 6, the layer selection unit 31 may be configured to be able to select a plurality of layers as the display layer Ld. In this manner, the display layer Ld may be selected by checking some of the plurality of cells corresponding to each layer L of the stacked structure S.

[0046] When a plurality of layers L are selected as the display layer Ld, the trajectory display unit 45 not only displays the laser command trajectory T1 and the actual laser trajectory T2 in different colors, but also displays the actual laser trajectories T2i, T2j of the different layers L in different colors. Note that the laser command trajectories T1, T1 of the different layers L may be displayed in the same color when they completely overlap each other as shown in Fig. 6 or when they are not confusing when displayed in the same color. However, when it is confusing to display them in the same color, it is preferable to display them in different colors.

[0047] When multiple layers L are selected as the display layers Ld, the deviation display unit 47 displays, for example, the actual coordinate deviation of the display layer Ld having the largest actual coordinate deviation for the display block Bd and the actual coordinate deviation of the display layer Ld having the smallest actual coordinate deviation among the multiple display layers Ld. However, instead of this, for example, the actual coordinate deviation may be displayed for the display blocks Bd in all the display layers Ld.

[0048] As shown in FIG. 7, the laser trajectory display program P includes a command coordinate acquisition program P1 that causes the computer Cp to function as a command coordinate acquisition unit 10, an actual coordinate calculation program P2 that causes the computer Cp to function as an actual coordinate calculation unit 20, and a display control program P3 that causes the computer Cp to function as a display control unit 35.

[0049] The effects of this embodiment are summarized below.

[0050] The display setting unit 30 sets a part of layers L in the laminate structure S as a display layer Ld. The trajectory display unit 45 displays the laser command trajectory T1 and the actual laser trajectory T2 in an overlapping manner for the set display layer Ld. Therefore, the laser command trajectory T1 and the actual laser trajectory T2 can be displayed in an overlapping manner for each part of layers in the laminate structure S. Therefore, the user can easily visually recognize the deviation of the actual laser trajectory T2 of the same layer L from the laser command trajectory T1, and can recognize the disturbance of the actual laser trajectory T2 based on the deviation. Therefore, the user can efficiently investigate the disturbance of the actual laser trajectory T2.

[0051] The trajectory display unit 45 displays the laser command trajectory T1 and the actual laser trajectory T2 in different colors, so that the user can more easily visually recognize the deviation of the actual laser trajectory T2 from the laser command trajectory T1.

[0052] The display control unit 35 sets, for example, only one layer in the laminated structure S as the display layer Ld. In this case, the laser command trajectories T1, T1 of the multiple layers L and the laser actual trajectories T2, T2 of the multiple layers L do not overlap with each other. Therefore, the user can more easily visually recognize the deviation of the laser actual trajectory T2 of the same layer from the laser command trajectory T1.

[0053] The display setting unit 30 has a layer selection unit 31 that allows the user to select a display layer Ld. Therefore, the user can select a desired layer L in the laminated structure S as the display layer Ld by the layer selection unit 31. Moreover, the user can sequentially check the multiple layers L by switching the display layer Ld. Therefore, the user can efficiently check the multiple layers L in order starting from the desired layer L.

[0054] The display layer Ld is divided into a plurality of blocks B. The display setting unit 30 sets a portion of the blocks B in the display layer Ld as display blocks Bd. The trajectory display unit 45 displays the laser command trajectory T1 and the actual laser trajectory T2 in an overlapping manner for the display blocks Bd in the display layer Ld. By narrowing the display range to a portion of the display layer Ld in this manner, the user can more easily visually recognize the disturbance of the actual laser trajectory T2 in the display blocks Bd.

[0055] The display setting unit 30 has a block selection unit 33 that allows the user to select a display block Bd. Therefore, the user can select a desired block B in the display layer Ld as the display block Bd by the block selection unit 33. Moreover, the user can sequentially check the multiple blocks B by switching the display block Bd. Therefore, the user can efficiently check the multiple blocks B in order starting from the desired block B.

[0056] The galvano scanner 200 forms the laminated structure S by vector operation based on information in vector format and raster operation based on information in raster format. The trajectory display unit 45 displays the actual laser trajectory T2b ​​in the vector operation and the actual laser trajectory T2r in the raster operation in different colors. Therefore, the user can easily distinguish between the actual laser trajectory T2b ​​in the vector operation and the actual laser trajectory T2r in the raster operation. Therefore, the user can efficiently investigate the disturbance of the actual laser trajectory T2b ​​in the vector operation and the disturbance of the actual laser trajectory T2r in the raster operation.

[0057] The drive information acquisition unit 21 acquires drive information i21 as information indicating the state of the mirror drive device 210. The machine information storage unit 24 stores machine information i24 indicating the relationship between the drive information i21 and the actual coordinates of the laser light LB for each model of galvano scanner. The actual coordinate calculation unit 27 calculates the actual coordinates of the laser light LB based on the acquired drive information i21 and the machine information i24 for the model of the galvano scanner 200 corresponding to the drive information i21. Therefore, the laser trajectory display device 101 can be compatible with multiple models of the galvano scanner 200.

[0058] The deviation display unit 47 displays information indicating an actual coordinate deviation, which is a deviation of the actual coordinates of the laser light LB from the command coordinates of the laser light LB, for the display layer Ld. Therefore, based on the information displayed on the deviation display unit 47, the user can get an idea of ​​whether or not the current disturbance of the actual laser trajectory T2 on the display layer Ld is large.

[0059] The layer display unit 41 displays information indicating which layer L in the laminate structure S the display layer Ld is. Therefore, the user can recognize which layer L in the laminate structure S the current display layer Ld is, based on the information displayed on the layer display unit 41.

[0060] The block display unit 43 displays information indicating which block B in the display layer Ld the display block Bd corresponds to. Therefore, the user can recognize which block B in the display layer Ld the current display block Bd corresponds to, based on the information displayed on the block display unit 43.

[0061] The laser trajectory display program P causes the computer Cp to function as the command coordinate acquisition unit 10, the actual coordinate calculation unit 20, and the display control unit 35, and displays the laser command trajectory T1 and the laser actual trajectory T2 in an overlapping manner on the display layer Ld set on the display Dp of the computer Cp. Therefore, the laser trajectory display device 101 can be realized by using the computer Cp and the display Dp without providing a dedicated laser trajectory display device 101.

[0062] [Second embodiment] Next, a second embodiment will be described. The second embodiment will be described based on the first embodiment, focusing on the differences, and descriptions of the same or similar aspects to the first embodiment will be omitted as appropriate.

[0063] As shown in Fig. 8, the display setting unit 30 of the laser trajectory display device 102 of this embodiment does not have a layer selection unit 31, but has a layer range selection unit 32 instead. The display unit 40 further has a layer range display unit 42. The layer range selection unit 32 is mainly composed of a display Dp and an operation tool. The layer range display unit 42 is mainly composed of the display Dp.

[0064] The user can select any layer range in the laminated structure S as the target range by the layer range selection unit 32. Layer range information i32 indicating the selected layer range is transmitted to the display control unit 35. However, the selection of the target range by the layer range selection unit 32 can also be turned OFF by setting. When the selection is turned OFF, all layers L in the laminated structure S become the target range.

[0065] The display control unit 35 causes the layer range display unit 42 to display information indicating which range in the stacked structure S the target range is, based on the layer range information i32. The display control unit 35 also calculates the actual coordinate deviation for the display block Bd for each layer L in the target range. The display control unit 35 selects the display layer Ld based on the deviation. Specifically, among the layers L in the target range, the layer L having the maximum actual coordinate deviation for the display block Bd is selected as the display layer Ld. The process thereafter is the same as in the first embodiment.

[0066] 9, the selection of the target range by the layer range selection unit 32 is turned off, and all layers L of the laminated structure S are the target range. In this case, the layer range selection unit 32 and the layer range display unit 42 are not formed in the display Dp. In other words, the layer display unit 41, the block selection unit 33, the block display unit 43, the trajectory display unit 45, and the deviation display unit 47 are formed in the display Dp.

[0067] In the example of Fig. 9, the user can switch ON / OFF of the selection of the display block Bd itself by using the block selection unit 33. Specifically, for example, when turning OFF the selection of the display block Bd, "One Section" is selected in the left part of the block selection unit 33 shown in Fig. 9. As a result, a predetermined section such as the center part of the layer L becomes the display block Bd. On the other hand, when turning ON the selection of the display block Bd, "All" is selected in the left part of the block selection unit 33 shown in Fig. 9, and then the row number and column number are input in the right part of the block selection unit 33 to select the desired block B as the display block Bd.

[0068] When the display block Bd is selected, the layer with the maximum actual coordinate deviation for the display block Bd among the layers L in the target range, that is, among all layers L of the laminated structure S here, is selected as the display layer Ld. The layer display unit 41 displays, for example, a number indicating the layer as information indicating the display layer Ld. As in the first embodiment, the trajectory display unit 45 displays the laser command trajectory T1 and the laser actual trajectory T2 for the display block Bd in the display layer Ld, superimposed with each other in different colors.

[0069] 10, the selection of the target range by the layer range selection section 32 is ON. In this case, the layer range selection section 32 and the layer range display section 42 are further formed within the display Dp.

[0070] The user selects the target range, for example, by inputting the upper limit number and the lower limit number of the layer L into the layer range selection unit 32. When the target range is selected, the layer range display unit 42 displays, for example, the position and range of the target range in the laminated structure S as information indicating the target range. Then, the layer having the largest actual coordinate deviation for the display block Bd in the target range is selected as the display layer Ld. The layer display unit 41 displays, for example, a number indicating the layer as information indicating the display layer Ld. In the trajectory display unit 45, the laser command trajectory T1 and the laser actual trajectory T2 are displayed in different colors in a superimposed manner for the display block Bd in the display layer Ld, as in the case of FIG. 9.

[0071] The configuration and effects of this embodiment are summarized below.

[0072] A layer L having a large actual coordinate deviation or a layer L having a larger actual coordinate deviation than the surrounding layers L is likely to have a problem with the disturbance of the laser actual trajectory T2. In this regard, the display setting unit 30 calculates the actual coordinate deviation for each layer L in the stacked structure S and selects the display layer Ld based on the actual coordinate deviation. Therefore, a layer L having a high possibility of having a problem with the disturbance of the laser actual trajectory T2 is automatically selected as the display layer Ld. Therefore, the user can efficiently investigate the layer L having a high possibility of having a problem.

[0073] Specifically, the layer L having the largest actual coordinate deviation is likely to have the laser actual trajectory T2 significantly disturbed. In this regard, the display setting unit 30 selects the layer L having the largest actual coordinate deviation as the display layer Ld among the layers L in the target range in the laminated structure S. Therefore, the layer L having the largest actual coordinate deviation is automatically selected as the display layer Ld.

[0074] The display setting unit 30 has a layer range selection unit 32 that allows the user to select a target range. Therefore, the user can select a desired layer range in the laminated structure S as the target range by the layer range selection unit 32. Moreover, the user can sequentially investigate multiple target ranges by switching the target range. Therefore, the user can efficiently investigate multiple target ranges in order, starting from the desired target range.

[0075] [Other embodiments] The above-described embodiment can be modified, for example, as follows. The actual coordinate calculation unit 20 may calculate the actual coordinates of the laser light LB based on the state of the mirror 220 itself, instead of or in addition to the state of the mirror drive device 210. Instead of making the computer Cp and the display Dp function as the laser trajectory display devices 101, 102 by the laser trajectory display program P, dedicated laser trajectory display devices 101, 102 may be provided. [Explanation of symbols]

[0076] 10 Command coordinate acquisition section 20 Actual coordinate calculation section 21 Driving information acquisition unit 24 Machine information storage unit 27 Real coordinate calculation section 30 Display setting section 31 Layer selection section 32 Layer range selection section 33 Block Selection Section 35 Display control section 40 Display section 41 layer display area 42 Layer range display section 43 Block display section 45 Trajectory display section 47 Deviation display section 101 Laser trajectory display device of the first embodiment 102 Laser trajectory display device of the second embodiment 200 Galvanometer Scanner 210 Mirror drive unit 220 Mirror T1 Laser command trajectory T1b Laser command trajectory in vector operation T1r Laser command trajectory in raster motion T2 Laser Actual Track T2b Actual laser trajectory in vector operation Actual laser trajectory in T2r raster operation LB laser light Double work

Claims

1. A laser trajectory display device that is installed with respect to a galvanometer scanner that has a mirror and a mirror drive device that drives the mirror and forms a layered structure on a workpiece by laser light reflected by the mirror, a command coordinate acquisition unit that acquires command coordinates of the laser light with respect to the workpiece based on command information for the mirror drive device; an actual coordinate calculation unit that calculates an actual coordinate of the laser light with respect to the workpiece based on a state of at least one of the mirror and the mirror drive device; a display setting unit that sets a part of the layers in the laminated structure as a display layer; a trajectory display unit that displays, in a superimposed manner, a laser command trajectory as a trajectory based on the history of the acquired command coordinates and an actual laser trajectory as a trajectory based on the history of the calculated actual coordinates for the display layer that has been set; A laser trajectory display device having a

2. The laser trajectory display device according to claim 1 , wherein the trajectory display unit displays the command laser trajectory and the actual laser trajectory in different colors.

3. The laser trajectory display device according to claim 1 , wherein the display setting section sets only one layer in the laminated structure as the display layer.

4. The laser trajectory display device according to claim 1 , wherein the display setting section has a layer selection section that enables a user to select the display layer.

5. The display layer is divided into a plurality of blocks, The display setting unit sets some of the blocks in the display layer as display blocks, the trajectory display unit displays the laser command trajectory and the laser actual trajectory in an overlapping manner for the display block in the display layer.

3. A laser trajectory display device according to claim 1 or 2.

6. The laser trajectory display device according to claim 5 , wherein the display setting section has a block selection section that allows a user to select the display block.

7. the display setting unit calculates a deviation of the actual coordinates from the command coordinates for each layer in the laminated structure, and selects the display layer based on the deviation.

3. A laser trajectory display device according to claim 1 or 2.

8. The display setting unit selects, as the display layer, a layer having a maximum deviation among layers in a target range in the laminated structure.

8. A laser trajectory display device according to claim 7.

9. The display setting unit has a layer range selection unit that allows a user to select the target range.

9. The laser trajectory display device according to claim 8.

10. The galvano scanner models the laminated structure by vector operation based on information in a vector format and raster operation based on information in a raster format; the trajectory display unit displays the actual laser trajectory in the vector operation and the actual laser trajectory in the raster operation in different colors.

3. A laser trajectory display device according to claim 1 or 2.

11. The actual coordinate calculation unit a drive information acquisition unit that acquires drive information as information indicating a state of the mirror drive device; a machine information storage unit that stores machine information indicating a relationship between the drive information and the actual coordinates for each model of the galvano scanner; an actual coordinate calculation unit that calculates the actual coordinates based on the acquired drive information and the machine information about the model of the galvano scanner corresponding to the drive information; having 3. A laser trajectory display device according to claim 1 or 2.

12. a deviation display unit that displays information indicating a deviation of the actual coordinates from the command coordinates on the display layer; 3. The laser trajectory display device according to claim 1 or 2, further comprising:

13. a layer display unit that displays information indicating which layer in the laminate structure the display layer is; 3. The laser trajectory display device according to claim 1 or 2, further comprising:

14. The display layer is divided into a plurality of blocks, The display setting unit sets some of the blocks in the display layer as display blocks, the trajectory display unit displays the laser command trajectory and the laser actual trajectory in an overlapping manner for the display block in the display layer; a block display unit that displays information indicating which block in the display layer the display block corresponds to; 3. The laser trajectory display device according to claim 1 or 2, further comprising:

15. A computer is provided for a galvanometer scanner having a mirror and a mirror drive device that drives the mirror, and that forms a layered structure on a workpiece by laser light reflected by the mirror, a command coordinate acquisition unit that acquires command coordinates of the laser light with respect to the workpiece based on command information for the mirror drive device; an actual coordinate calculation unit that calculates an actual coordinate of the laser light with respect to the workpiece based on a state of at least one of the mirror and the mirror drive device; a display setting unit that sets a part of the layers in the laminated structure as a display layer; Functioning as a a laser command trajectory as a trajectory based on the history of the acquired command coordinates and an actual laser trajectory as a trajectory based on the history of the calculated actual coordinates are displayed in an overlapping manner on a display of the computer for the set display layer; Laser trajectory display program.

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