Apparatus and method for supporting the creation of teacher data

Abstract

To provide a teacher data creation support device and a teacher data creation support method capable of easily creating teacher data for performing inspection with high accuracy.SOLUTION: An abnormal data acquisition part 41 acquires abnormal data showing an image of an inspection object determined to have a defect in advance. A normal data acquisition part 42 acquires normal data showing an image of a normal inspection object so as to correspond to the abnormal data acquired by the abnormal data acquisition part 41. A difference data generation part 43 generates difference data showing a difference between the abnormal data acquired by the abnormal data acquisition part 41 and the normal data acquired by the normal data acquisition part 42 so as to correspond to the abnormal data. A presentation part 44 presents an image of a part of an inspection object on the basis of the difference data generated by the difference data generation part 43.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a teacher data creation support device and a teacher data creation support method for supporting the creation of teacher data. [Background technology]

[0002] For products or foods, inspections are appropriately performed at each step during production and before distribution to determine whether the product is of good quality. For example, Patent Document 1 describes a defect inspection device for inspecting various defects that occur in the manufacturing process of semiconductor wafers.

[0003] In this defect inspection device, multiple SEM (scanning electron microscope) images showing multiple wafers to be inspected are generated. From the multiple SEM images generated, an SEM image showing a non-defective wafer is designated by the user as a template. By calculating the difference between each of the multiple SEM images (inspection images) other than the template and the template, defects on the circuit pattern of the wafer shown by the inspection image are detected. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2011-119471 A Summary of the Invention [Problem to be solved by the invention]

[0005] In defect inspection devices, even if an object to be inspected does not have any defects, it may be judged to have a defect. In this case, even though there is no defect, the object to be inspected may be discarded due to an erroneous inspection result, resulting in a decrease in yield. Therefore, it is desirable to perform inspection with higher accuracy.

[0006] An object of the present invention is to provide a teacher data creation support device and a teacher data creation support method that can easily create teacher data for conducting inspections with high accuracy. [Means for solving the problem]

[0007] (1) A teacher data creation support device according to a first aspect of the present invention is a teacher data creation support device that supports the creation of teacher data used for reinspection of an inspection object, and includes an abnormal data acquisition unit that acquires abnormal data indicating an image of an inspection object previously determined to have a defect, a normal data acquisition unit that acquires normal data indicating an image of a normal inspection object corresponding to the abnormal data acquired by the abnormal data acquisition unit, a differential data generation unit that generates differential data indicating the difference between the abnormal data acquired by the abnormal data acquisition unit and the normal data acquired by the normal data acquisition unit corresponding to the abnormal data, and a presentation unit that presents an image of a portion of the inspection object based on the differential data generated by the differential data generation unit. a reception unit that receives a selection of the difference data presented by the presentation unit; and a registration unit that registers the difference data whose selection is received by the reception unit as teacher data. Equipped with.

[0008] In this teacher data creation support device, an image of a portion of an inspection object is presented based on difference data indicating the difference between abnormal data indicating an image of an inspection object previously determined to have a defect and normal data indicating an image of a normal inspection object. The portion of the inspection object in the image shown based on the difference data is likely to require reinspection. Therefore, by checking the presented image, a user can create teacher data for reinspecting that portion. This makes it possible to easily create teacher data for performing inspections with high accuracy.

[0009] Also The difference data selected by the user is registered as teacher data, which makes it easier to create teacher data.

[0010] ( 2) The receiving unit may further receive corrections to the difference data presented by the presenting unit, and the registering unit may register the corrected difference data as training data. In this case, it is possible to more appropriately correct the portion of the inspection object that requires re-inspection in the image based on the difference data. This makes it possible to create training data for performing inspections with higher accuracy.

[0011] ( 3 The normal data acquisition unit may acquire a plurality of normal data corresponding to the abnormal data, and the differential data generation unit may generate a plurality of differential data based on the abnormal data and the plurality of normal data corresponding to the abnormal data. In this case, a large number of differential data are generated from one abnormal data. This can improve the work efficiency of creating teacher data.

[0012] ( 4 ) The normal data acquisition unit may acquire multiple normal data corresponding to the abnormal data, and the differential data generation unit may generate differential data based on the abnormal data and an average of the multiple normal data corresponding to the abnormal data. With this configuration, even if a noise component unrelated to the defect accidentally gets mixed into any of the multiple normal data, the multiple normal data are averaged, so that the noise component has almost no effect on the pixel value of the normal data after averaging. Therefore, it is possible to create teacher data for performing inspection with higher accuracy.

[0013] ( 5 The normal data acquisition unit may acquire normal data corresponding to a plurality of abnormal data, and the differential data generation unit may generate differential data based on each abnormal data and the normal data corresponding to the abnormal data. In this case, teacher data can be created at high speed using the common normal data.

[0014] ( 6 The normal data acquired by the normal data acquisition unit may include image data showing an image of an inspection object that has not been determined to have a defect in advance. In this case, the normal data showing an image of a normal inspection object can be easily acquired.

[0015] ( 7 The normal data acquired by the normal data acquisition unit may include master data showing a design drawing of the inspection object. In this case, normal data showing an image of a normal inspection object can be easily acquired.

[0016] ( 8 The normal data acquisition unit may acquire master data that has been corrected based on the processing accuracy of the object to be inspected as the normal data. With this configuration, even if the area to be inspected is minute, normal data that shows an image of a normal object to be inspected can be easily acquired.

[0017] ( 9 ) A non-inspection target area may be set in the abnormal data acquired by the abnormal data acquisition unit and in the normal data acquired by the normal data acquisition unit, and the difference data generation unit may generate the difference data by excluding the set non-inspection target area. In this case, the image represented by the difference data is prevented from including areas outside the inspection target area. This makes it possible to create teacher data for performing inspections with higher accuracy.

[0018] ( 10 ) The abnormality data acquisition unit may further acquire defect information indicating a type of defect in the inspection object corresponding to the acquired abnormality data, and the differential data generation unit may add the defect information acquired by the abnormality data acquisition unit to the generated differential data. In this case, the user does not need to perform the task of adding the defect information to the teacher data. This reduces the burden on the user and improves the work efficiency of creating the teacher data. In addition, since there is no error associated with the user's work, more accurate teacher data can be created.

[0019] ( 11 The abnormal data acquisition unit may acquire binarized abnormal data, and the normal data acquisition unit may acquire binarized normal data. In this case, the amount of abnormal data and normal data is reduced, making it possible to create training data at high speed.

[0020] (12) A second aspect of the present invention provides a method for supporting the creation of teacher data for use in reinspection of an object to be inspected, comprising the steps of: The teacher data creation support device Obtain anomaly data showing images of inspection objects previously determined to have defects death , ,obtain ,normal ,data ,representing ,an ,image ,of ,a ,normal ,object ,to ,be ,obtained ,corresponding ,to ,the ,obtained ,normal ,data. death and generating differential data indicating a difference between the acquired abnormal data and normal data acquired so as to correspond to the abnormal data. death ,Based on the generated difference data, an image of the part of the inspection object is presented. death , and accept the proposed differential data selection. hair The differential data whose selection has been accepted is registered as training data. do .

[0021] According to this method for supporting the creation of training data, an image of a portion of an inspection object is presented based on differential data indicating the difference between abnormal data indicating an image of an inspection object previously determined to have a defect and normal data indicating an image of a normal inspection object. The portion of the inspection object in the image shown based on the differential data is likely to require reinspection. Therefore, by checking the presented image, a user can create training data for reinspecting that portion. This makes it possible to easily create training data for performing inspections with high accuracy. Furthermore, the difference data selected by the user is registered as teacher data, which makes it easier to create teacher data. Effect of the Invention

[0022] According to the present invention, it is possible to create accurate teacher data while reducing the burden on the user. [Brief description of the drawings]

[0023] [Figure 1] 1 is a diagram showing a configuration of a processing system including a support device according to a first embodiment of the present invention. [Diagram 2]FIG. 2 is a diagram illustrating a configuration of the support device in FIG. [Diagram 3] FIG. 2 is a diagram showing various data used to create teacher data. [Figure 4] FIG. 2 is a diagram showing an example of a display screen of a display device when creating teacher data. [Diagram 5] 3 is a flowchart showing a support process performed by the support device of FIG. 2. [Figure 6] FIG. 13 is a diagram showing various data used to create teacher data in the first modified example. [Figure 7] FIG. 13 is a diagram showing various data used to create teacher data in a second modified example. [Figure 8] FIG. 13 is a diagram showing various data used to create teacher data in the third modified example. [Figure 9] FIG. 11 is a diagram showing various data used to create teacher data in the second embodiment. [Figure 10] FIG. 13 is a diagram showing various data used to create teacher data in the third embodiment. [Figure 11] FIG. 13 is a diagram showing various data used to create teacher data in the fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] [1] First embodiment (1) Processing system Hereinafter, a teacher data creation support device and a teacher data creation support method according to an embodiment of the present invention will be described with reference to the drawings. In the following description, the teacher data creation support device will be abbreviated to support device. FIG. 1 is a diagram showing the configuration of a processing system including a support device according to a first embodiment of the present invention. As shown in FIG. 1, the processing system 100 includes a processing device 10, an inspection device 20, and a database storage device 30.

[0025] The processing device 10 is composed of a CPU (Central Processing Unit) 11, a RAM (Random Access Memory) 12, a ROM (Read Only Memory) 13, a storage device 14, an operation unit 15, a display device 16, and an input / output I / F (interface) 17. The CPU 11, the RAM 12, the ROM 13, the storage device 14, the operation unit 15, the display device 16, and the input / output I / F 17 are connected to a bus 18.

[0026] The RAM 12 is used as a working area for the CPU 11. The ROM 13 stores a system program. The storage device 14 includes a storage medium such as a hard disk or a semiconductor memory, and stores a teacher data creation support program (hereinafter abbreviated as the support program). The support program may be stored in the ROM 13 or another external storage device. The CPU 11, the RAM 12, and the ROM 13 constitute a support device 40 for executing a teacher data creation support process (hereinafter abbreviated as the support process). In the support process, the creation of teacher data is supported.

[0027] The operation unit 15 is an input device such as a keyboard, a mouse, or a touch panel. A user can give a predetermined instruction to the support device 40 by operating the operation unit 15. The display device 16 is a display device such as a liquid crystal display device, and displays a GUI (Graphical User Interface) or the like for receiving instructions from the user. The input / output I / F 17 is connected to the inspection device 20.

[0028] The inspection device 20 is, for example, an AOI (automated optical inspection) device, which sequentially captures images of the objects to be inspected to generate a plurality of image data respectively representing the images of the objects to be inspected, and stores each of the generated image data. Each of the stored image data is assigned a unique identification number.

[0029] Hereinafter, the inspection device 20 will be described taking a substrate as an example of an object to be inspected, but the object to be inspected is not limited to a substrate. Note that the substrate refers to a semiconductor substrate, a substrate for an FPD (Flat Panel Display) such as a liquid crystal display device or an organic EL (Electro Luminescence) display device, a substrate for an optical disk, a substrate for a magnetic disk, a substrate for a magneto-optical disk, a substrate for a photomask, a ceramic substrate, a substrate for a solar cell, or the like.

[0030] The inspection device 20 inspects the board corresponding to each image data by processing each stored image data based on a predetermined algorithm. The inspection device 20 may inspect the board corresponding to each image data based on deep learning. In the inspection, it is determined whether or not the board has a defect. Furthermore, for a board determined to have a defect, the type of the defect is determined.

[0031] In the inspection device 20, even if a substrate does not have a defect, it may be determined that the substrate is defective. If a substrate is discarded due to an erroneous determination even though the substrate does not have a defect, the yield will decrease. Therefore, a reinspection is performed on the substrate determined to have a defect using supervised learning. The support device 40 supports the creation of teacher data to be used in the reinspection. The database storage device 30 includes a large-capacity storage device such as a server. The created teacher data is registered in the database storage device 30. The support device 40 will be described in detail below.

[0032] (2) Support device FIG. 2 is a diagram showing the configuration of the support device 40 in FIG. 1. FIG. 3 is a diagram showing various data used in creating teacher data. FIG. 4 is a diagram showing an example of a display screen of the display device 16 in creating teacher data. As shown in FIG. 2, the support device 40 includes, as functional units, an abnormal data acquisition unit 41, a normal data acquisition unit 42, a differential data generation unit 43, a presentation unit 44, a reception unit 45, and a registration unit 46. The functional units of the support device 40 are realized by the CPU 11 in FIG. 1 executing a support program stored in the ROM 13 or the storage device 14, etc. Some or all of the functional units of the support device 40 may be realized by hardware such as electronic circuits.

[0033] The abnormality data acquisition unit 41 acquires image data (hereinafter referred to as abnormality data) showing an image of each board that has been determined in advance to have a defect by the inspection device 20 from the inspection device 20. The image data may show an image of the entire board, or may show a partial image of the board if it is the same area. A portion of the image of the board based on the abnormality data acquired by the abnormality data acquisition unit 41 is shown in the upper left part of Fig. 3.

[0034] The normal data acquiring unit 42 acquires image data showing an image of a normal board (hereinafter referred to as normal data) so as to correspond to each abnormal data acquired by the abnormal data acquiring unit 41. In this example, the normal data is predetermined image data showing an image of a board that has not been determined in advance to have a defect by the inspection device 20, and is acquired from the inspection device 20. A portion of the image of the board based on the normal data acquired by the normal data acquiring unit 42 is shown in the lower left part of FIG.

[0035] The abnormal data and the normal data correspond to each other. For example, when abnormal data is acquired by the abnormal data acquisition unit 41, image data having an identification number one before the identification number of the abnormal data and showing an image of a normal substrate may be acquired as normal data by the normal data acquisition unit 42. Alternatively, when abnormal data is acquired by the abnormal data acquisition unit 41, image data having an identification number one after the identification number of the abnormal data and showing an image of a normal substrate may be acquired as normal data by the normal data acquisition unit 42.

[0036] The differential data generating unit 43 generates new image data by calculating the difference between each pixel value between the abnormal data acquired by the abnormal data acquiring unit 41 and the normal data acquired by the normal data acquiring unit 42 so as to correspond to the abnormal data. The image data generated by the differential data generating unit 43 is called differential data. The right part of FIG. 3 shows an image of the board based on the differential data generated by the differential data generating unit 43. The differential data shows an image of a portion of the board that is likely to require reinspection. Therefore, the differential data can be a label that shows the portion of the board that requires reinspection.

[0037] The presentation unit 44 presents each differential data to the user by displaying on the display device 16 a GUI 50 ( FIG. 4 ) including an image based on each differential data generated by the differential data generation unit 43. As shown in FIG. 4 , the GUI 50 includes an image display area 51, a registration button 52, and a correction button 53. A plurality of images of the measurement object are displayed in the image display area 51. In this example, the image based on the differential data is displayed in the image display area 51 so as to be superimposed on the image based on the abnormality data, but only the image based on the differential data may be displayed in the image display area 51.

[0038] The receiving unit 45 receives an instruction to register the difference data. Specifically, the receiving unit 45 receives a selection of difference data to be registered as teacher data from the operation unit 15 in the GUI 50 displayed by the presentation unit 44. While visually checking the images displayed in the image display area 51, the user can select an arbitrary image using the operation unit 15 and operate the registration button 52 to give an instruction to the receiving unit 45 to select the difference data representing the image as teacher data. The registration unit 46 registers the difference data, the selection of which has been accepted by the receiving unit 45, in the database storage device 30 as teacher data.

[0039] Furthermore, the reception unit 45 can receive corrections to difference data. The user can use the operation unit 15 to select any image in the image display area 51 and operate the correction button 53 to instruct the reception unit 45 to correct the difference data corresponding to that image. The user can also use the operation unit 15 to specify, for example, filling in the parts of the selected image that require re-examination.

[0040] When the specification is accepted by the accepting unit 45, the differential data generating unit 43 assigns a label indicating the part for which the specification was accepted to the selected differential data. This corrects the differential data. When the register button 52 is operated after the differential data is corrected, the registering unit 46 registers the corrected differential data in the database storage device 30 as teacher data.

[0041] (3) Support processing Fig. 5 is a flowchart showing the support process by the support device 40 of Fig. 2. The support process of Fig. 5 is performed by the CPU 11 of Fig. 1 executing on the RAM 12 a support program stored in the ROM 13 or the storage device 14, etc. The support process will be described below with reference to the support device 40 of Fig. 2 and the flowchart of Fig. 5.

[0042] First, the abnormal data acquiring unit 41 acquires each abnormal data from the inspection device 20 (step S1). Next, the normal data acquiring unit 42 acquires normal data corresponding to each abnormal data acquired in step S1 from the inspection device 20 (step S2). Steps S1 and S2 may be executed simultaneously.

[0043] Next, the differential data generating unit 43 generates each differential data based on the corresponding abnormal data and normal data acquired in steps S1 and S2 (step S3). After that, the presenting unit 44 presents each differential data to the user by displaying an image based on each differential data generated in step S3 on the display device 16 (step S4).

[0044] Next, the accepting unit 45 determines whether or not a correction to any of the difference data presented in step S4 has been accepted (step S5). If a correction to any of the difference data has not been accepted, the accepting unit 45 proceeds to step S7. If a correction to any of the difference data has been accepted, the difference data generating unit 43 corrects the difference data by adding a label indicating the portion for which the correction designation has been accepted to the difference data (step S6), and proceeds to step S7.

[0045] In step S7, the reception unit 45 determines whether or not an instruction has been given to register any of the difference data presented in step S4 or the difference data corrected in step S6 (step S7). If an instruction to register any of the difference data has not been given, the reception unit 45 proceeds to step S9. If an instruction to register any of the difference data has been given, the registration unit 46 registers the instructed difference data in the database storage device 30 as teacher data (step S8), and proceeds to step S9.

[0046] In step S9, the registration unit 46 determines whether or not an instruction to end has been given (step S9). The user can instruct to end or continue by performing a predetermined operation using the operation unit 15. If an instruction to end has not been given, the registration unit 46 returns to step S5. If further difference data is to be registered, the user will instruct to continue without instructing to end. If an instruction to end has been given, the registration unit 46 ends the assistance process.

[0047] (4) Effects In the support device 40 according to this embodiment, abnormal data indicating an image of an inspection object previously determined to have a defect is acquired by the abnormal data acquisition unit 41. Normal data indicating an image of a normal inspection object is acquired by the normal data acquisition unit 42 so as to correspond to the abnormal data acquired by the abnormal data acquisition unit 41. Differential data indicating the difference between the abnormal data acquired by the abnormal data acquisition unit 41 and normal data acquired by the normal data acquisition unit 42 so as to correspond to the abnormal data is generated by the differential data generation unit 43. It is highly likely that the portion of the inspection object in the image displayed based on the differential data will require reinspection.

[0048] Therefore, based on the differential data generated by the differential data generation unit 43, an image of a portion of the object to be inspected is presented by the presentation unit 44. The selection of the differential data presented by the presentation unit 44 is accepted by the acceptance unit 45. The differential data whose selection is accepted by the acceptance unit 45 is registered as teacher data in the database storage device 30 by the registration unit 46. In this case, the user can select the differential data corresponding to the desired image while visually checking the presented images, thereby registering the selected differential data as teacher data. This makes it easier to create teacher data.

[0049] The receiving unit 45 further receives corrections to the difference data presented by the presenting unit 44. The registering unit 46 registers the corrected difference data as training data. In this case, the user can more appropriately correct the portion of the inspection object that requires re-inspection in the image based on the difference data. This makes it possible to create training data for performing inspections with higher accuracy.

[0050] (5) Variations 6 is a diagram showing various data used to create teacher data in the first modified example. In the first modified example, a user can pre-register a non-inspection area indicating an area outside the inspection area in the inspection device 20. When the non-inspection area is registered, the inspection device 20 sets the non-inspection area in the generated image data.

[0051] Therefore, as shown in the upper left of Fig. 6, a non-inspection region is set in the abnormal data acquired by the abnormal data acquisition unit 41. Similarly, as shown in the lower left of Fig. 6, a non-inspection region is set in the normal data acquired by the normal data acquisition unit 42. In this case, the difference data generation unit 43 generates difference data by calculating the difference in each pixel value between the abnormal data and the normal data corresponding to the abnormal data, with the set non-inspection region excluded, as shown in the right part of Fig. 6. The pixel values ​​of the non-inspection region in the difference data may be set to 0.

[0052] In this case, it is possible to prevent the label indicating the part requiring re-inspection from being attached to the part outside the inspection target area. This makes it possible to create training data for performing inspection with higher accuracy. In addition, since the part outside the inspection target area is not re-inspected, the created training data can be used to perform re-inspection of the board at high speed.

[0053] Fig. 7 is a diagram showing various data used to create teacher data in the second modified example. As shown in the upper left of Fig. 7, the abnormality data acquisition unit 41 acquires defect information indicating the type of defect of the substrate in the image indicated by the abnormality data together with the abnormality data. As shown in the right part of Fig. 7, the difference data generation unit 43 adds the defect information acquired by the abnormality data acquisition unit 41 to the generated difference data. In the image display area 51 of the GUI 50, the image based on the difference data may be displayed in a manner (e.g., color) indicating the type of defect.

[0054] In this case, the user does not need to add defect information to the teacher data. This reduces the burden on the user and improves the efficiency of the teacher data creation process. In addition, since there is no risk of user errors, more accurate teacher data can be created.

[0055] 8 is a diagram showing various data used to create teacher data in the third modified example. In the third modified example, the user can set in advance in the inspection device 20 that the image data is to be subjected to binarization processing. When the binarization processing is set to be performed, the inspection device 20 generates binarized image data.

[0056] Therefore, as shown in the upper left of Fig. 8, the abnormal data acquisition unit 41 acquires binarized abnormal data. Similarly, as shown in the lower left of Fig. 8, the normal data acquisition unit 42 acquires binarized normal data. As shown in the right part of Fig. 8, the differential data generation unit 43 generates differential data by calculating the difference in pixel values ​​between the binarized abnormal data and the binarized normal data corresponding to the abnormal data.

[0057] In this case, the amount of image data is reduced, so that the teacher data can be created at high speed. Also, by using the created teacher data, the board can be re-inspected at high speed.

[0058] [2] Second embodiment In the first embodiment, the normal data acquisition unit 42 acquires normal data so that one normal data corresponds to one abnormal data, but the embodiment is not limited to this. Hereinafter, the support processing in the second to fourth embodiments will be described with respect to the differences from the support processing in the first embodiment.

[0059] Fig. 9 is a diagram showing various data used to create teacher data in the second embodiment. In this embodiment, as shown in the lower left of Fig. 9, a plurality of normal data are acquired so that a plurality of normal data correspond to one abnormal data. The differential data generating unit 43 generates differential data by calculating the difference in each pixel value between one abnormal data and each normal data corresponding to the abnormal data. Therefore, as shown in the right part of Fig. 9, a plurality of differential data are generated corresponding to one abnormal data.

[0060] According to this configuration, a large number of difference data are generated from one abnormal data, which improves the work efficiency of creating teacher data.

[0061] [3] Third embodiment Fig. 10 is a diagram showing various data used to create teacher data in the third embodiment. In this embodiment, as shown in the lower left of Fig. 10, a plurality of normal data are acquired so that a plurality of normal data correspond to one abnormal data. The differential data generating unit 43 generates differential data by calculating the difference in each pixel value between one abnormal data and the average of the plurality of normal data corresponding to the abnormal data. Therefore, as shown in the right part of Fig. 10, one differential data is generated corresponding to one abnormal data.

[0062] According to this configuration, even if a noise component unrelated to a defect accidentally gets mixed into any of the multiple normal data, the multiple normal data are averaged, so that the noise component has almost no effect on the pixel value of the normal data after averaging. Therefore, by using the normal data after averaging, it is possible to create training data for performing inspections with higher accuracy.

[0063] [4] Fourth embodiment Fig. 11 is a diagram showing various data used to create teacher data in the fourth embodiment. In this embodiment, as shown in the upper left of Fig. 11, normal data is acquired so that one normal data corresponds to a plurality of abnormal data. The differential data generating unit 43 generates differential data based on each abnormal data and the normal data corresponding to the abnormal data. Therefore, as shown in the right part of Fig. 11, a plurality of differential data corresponding to each of the plurality of abnormal data are generated.

[0064] According to this configuration, since it is not necessary to acquire normal data every time abnormal data is acquired, teacher data can be created at high speed using common normal data. In this embodiment, image data indicating an image of a normal board prepared in advance may be acquired as normal data by the normal data acquisition unit 42. In this case, step S2 in the support process may be executed before step S1.

[0065] The image data prepared in advance may be any of the image data generated by the inspection device 20, or may be master data such as CAD data showing a design drawing of the board. Here, depending on the processing accuracy of the board by etching or the like, the pattern width of the board in the image or the radius of curvature of the corners of the pattern may differ between the image data generated by the inspection device 20 and the master data. Therefore, the master data may be modified based on the processing accuracy of the board so that the pattern width or the radius of curvature of the corners of the pattern in the image is changed.

[0066] Also, in the first to third embodiments, image data showing an image of a board that has not been determined in advance to have a defect by the inspection device 20 is acquired as normal data from the inspection device 20, but the embodiments are not limited to this. At least one of the normal data may be master data prepared in advance or master data that has been corrected.

[0067] [5] Other embodiments In the above embodiment, the support device 40 includes the reception unit 45 and the registration unit 46, but the embodiment is not limited to this. The support device 40 does not have to include the reception unit 45 and the registration unit 46. Even in this case, the user can create teacher data for re-inspecting the part by checking the image presented on the GUI 50. This makes it possible to easily create teacher data for performing inspections with high accuracy.

[0068] [6] Correspondence between each component of the claims and each part of the embodiment Below, examples of the correspondence between each component of the claims and each element of the embodiment will be described, but the present invention is not limited to the following examples. Various other elements having the configuration or function described in the claims can also be used as each component of the claims.

[0069] In the above embodiment, the support device 40 is an example of a teacher data creation support device, the abnormal data acquisition unit 41 is an example of an abnormal data acquisition unit, and the normal data acquisition unit 42 is an example of a normal data acquisition unit. The differential data generation unit 43 is an example of a differential data generation unit, the presentation unit 44 is an example of a presentation unit, the reception unit 45 is an example of a reception unit, and the registration unit 46 is an example of a registration unit. [7] Reference form (1) A teacher data creation support device in a first reference form is a teacher data creation support device that supports the creation of teacher data to be used for re-inspection of an inspection object, and includes an abnormal data acquisition unit that acquires abnormal data indicating an image of an inspection object that has been previously determined to have a defect, a normal data acquisition unit that acquires normal data indicating an image of a normal inspection object corresponding to the abnormal data acquired by the abnormal data acquisition unit, a differential data generation unit that generates differential data indicating the difference between the abnormal data acquired by the abnormal data acquisition unit and the normal data acquired by the normal data acquisition unit so as to correspond to the abnormal data, and a presentation unit that presents an image of a portion of the inspection object based on the differential data generated by the differential data generation unit. In this teacher data creation support device, an image of a portion of an inspection object is presented based on difference data indicating the difference between abnormal data indicating an image of an inspection object previously determined to have a defect and normal data indicating an image of a normal inspection object. The portion of the inspection object in the image shown based on the difference data is likely to require reinspection. Therefore, by checking the presented image, a user can create teacher data for reinspecting that portion. This makes it possible to easily create teacher data for performing inspections with high accuracy. (2) The teacher data creation support device may further include a reception unit that receives a selection of the difference data presented by the presentation unit, and a registration unit that registers the difference data selected by the reception unit as teacher data. In this case, the difference data selected by the user is registered as teacher data. This makes it easier to create teacher data. (3) The receiving unit may further receive corrections to the difference data presented by the presenting unit, and the registering unit may register the corrected difference data as training data. In this case, it is possible to more appropriately correct the portion of the inspection object that requires re-inspection in the image based on the difference data. This makes it possible to create training data for performing inspections with higher accuracy. (4) The normal data acquisition unit may acquire a plurality of normal data corresponding to the abnormal data, and the differential data generation unit may generate a plurality of differential data based on the abnormal data and the plurality of normal data corresponding to the abnormal data. In this case, a large number of differential data are generated from one abnormal data. This can improve the work efficiency of creating teacher data. (5) The normal data acquisition unit may acquire multiple normal data corresponding to the abnormal data, and the differential data generation unit may generate differential data based on the abnormal data and an average of the multiple normal data corresponding to the abnormal data. With this configuration, even if a noise component unrelated to a defect accidentally gets mixed into any of the multiple normal data, the multiple normal data are averaged, so that the noise component has almost no effect on the pixel value of the normal data after averaging. Therefore, it is possible to create teacher data for performing inspection with higher accuracy. (6) The normal data acquisition unit may acquire normal data corresponding to a plurality of abnormal data, and the differential data generation unit may generate differential data based on each abnormal data and the normal data corresponding to the abnormal data. In this case, teacher data can be created at high speed using the common normal data. (7) The normal data acquired by the normal data acquisition unit may include image data showing an image of an inspection object that has not been determined to have a defect in advance. In this case, the normal data showing an image of a normal inspection object can be easily acquired. (8) The normal data acquired by the normal data acquisition unit may include master data showing a design drawing of the inspection object. In this case, the normal data showing an image of a normal inspection object can be easily acquired. (9) The normal data acquisition unit may acquire master data that has been corrected based on the processing accuracy of the object to be inspected as the normal data. With this configuration, even if the area to be inspected is minute, normal data that shows an image of a normal object to be inspected can be easily acquired. (10) A non-inspection target area may be set in the abnormal data acquired by the abnormal data acquisition unit and in the normal data acquired by the normal data acquisition unit, and the difference data generation unit may generate the difference data by excluding the set non-inspection target area. In this case, the image represented by the difference data is prevented from including areas outside the inspection target area. This makes it possible to create teacher data for performing inspections with higher accuracy. (11) The abnormality data acquisition unit may further acquire defect information indicating a type of defect in the inspection object corresponding to the acquired abnormality data, and the differential data generation unit may add the defect information acquired by the abnormality data acquisition unit to the generated differential data. In this case, the user does not need to perform the task of adding the defect information to the teacher data. This reduces the burden on the user and improves the work efficiency of creating the teacher data. In addition, since there is no error associated with the user's work, more accurate teacher data can be created. (12) The abnormal data acquisition unit may acquire binarized abnormal data, and the normal data acquisition unit may acquire binarized normal data. In this case, the amount of abnormal data and normal data is reduced, so that training data can be created at high speed. (13) A second reference form of a teacher data creation support method is a teacher data creation support method that supports the creation of teacher data to be used for re-inspection of an inspection object, and includes the steps of acquiring abnormal data indicating an image of an inspection object that has been previously determined to have a defect, acquiring normal data indicating an image of a normal inspection object that corresponds to the acquired abnormal data, generating differential data indicating the difference between the acquired abnormal data and normal data acquired to correspond to the abnormal data, and presenting an image of a portion of the inspection object based on the generated differential data. According to this method for supporting the creation of training data, an image of a portion of an inspection object is presented based on differential data indicating the difference between abnormal data indicating an image of an inspection object previously determined to have a defect and normal data indicating an image of a normal inspection object. The portion of the inspection object in the image shown based on the differential data is likely to require reinspection. Therefore, by checking the presented image, a user can create training data for reinspecting that portion. This makes it possible to easily create training data for performing inspections with high accuracy. [Explanation of symbols]

[0070] 10... processing device, 11... CPU, 12... RAM, 13... ROM, 14... storage device, 15... operation unit, 16... display device, 17... input / output I / F, 18... bus, 20... inspection device, 30... database storage device, 40... support device, 41... abnormal data acquisition unit, 42... normal data acquisition unit, 43... differential data generation unit, 44... presentation unit, 45... reception unit, 46... registration unit, 50... GUI, 51... image display area, 52... registration button, 53... correction button, 100... processing system

Claims

1. A teacher data creation support device that supports the creation of teacher data used for re-inspection of an inspection object, an abnormality data acquisition unit that acquires abnormality data indicating an image of an inspection object that has been determined in advance to have a defect; a normal data acquisition unit that acquires normal data representing an image of a normal inspection object corresponding to the abnormal data acquired by the abnormal data acquisition unit; a differential data generating unit that generates differential data indicating a difference between the abnormal data acquired by the abnormal data acquiring unit and normal data acquired by the normal data acquiring unit so as to correspond to the abnormal data; a presentation unit that presents an image of a portion of an object to be inspected based on the difference data generated by the difference data generation unit; a reception unit that receives a selection of the difference data presented by the presentation unit; A teacher data creation support device comprising: a registration unit that registers the difference data selected and accepted by the acceptance unit as teacher data.

2. The accepting unit further accepts a correction to the difference data presented by the presenting unit; 2. The teacher data creation support device according to claim 1, wherein the registration unit registers the corrected difference data as teacher data.

3. the normal data acquisition unit acquires a plurality of normal data corresponding to the abnormal data; 3. The teacher data creation support device according to claim 1, wherein the difference data generating unit generates a plurality of difference data based on the abnormal data and a plurality of normal data corresponding to the abnormal data.

4. the normal data acquisition unit acquires a plurality of normal data corresponding to the abnormal data; 3. The teacher data creation support device according to claim 1, wherein the difference data generating unit generates the difference data based on the abnormal data and an average of a plurality of normal data corresponding to the abnormal data.

5. the normal data acquisition unit acquires normal data corresponding to a plurality of abnormal data; 3. The teacher data creation support device according to claim 1, wherein the differential data generating unit generates differential data based on each abnormal data and normal data corresponding to the abnormal data.

6. The teacher data creation support device according to any one of claims 1 to 5, wherein the normal data acquired by the normal data acquisition unit includes image data indicating an image of an inspection object that has not been previously determined to have a defect.

7. The teacher data creation support device according to any one of claims 1 to 6, wherein the normal data acquired by the normal data acquisition unit includes master data indicating a design drawing of an object to be inspected.

8. 8. The teaching data creation support device according to claim 7, wherein the normal data acquisition unit acquires, as the normal data, master data that has been corrected based on the machining accuracy of the object to be inspected.

9. a non-inspection target area is set in the abnormal data acquired by the abnormal data acquisition unit and in the normal data acquired by the normal data acquisition unit; The teacher data creation support device according to claim 1 , wherein the difference data generation unit generates difference data by excluding a set non-inspection target area.

10. the abnormality data acquisition unit further acquires defect information indicating a type of defect in the inspection object corresponding to the acquired abnormality data; The teacher data creation support device according to any one of claims 1 to 9, wherein the difference data generation unit adds defect information acquired by the abnormality data acquisition unit to the generated difference data.

11. The abnormal data acquisition unit acquires the binarized abnormal data, The teacher data creation support device according to claim 1 , wherein the normal data acquisition unit acquires normal data that has been binarized.

12. A method for supporting the creation of training data used for re-inspection of an inspection object, comprising: The teacher data creation support device: Obtaining abnormality data indicating images of inspection objects that have been previously determined to have defects; acquiring normal data representing an image of a normal inspection object corresponding to the acquired abnormal data; generating difference data indicating a difference between the acquired abnormal data and normal data acquired so as to correspond to the abnormal data; presenting an image of a portion of the object to be inspected based on the generated difference data; Accept the presented differential data selection, A method for supporting the creation of teacher data, in which differential data whose selection has been accepted is registered as teacher data.

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