Complex Dielectric Constant Measuring Apparatus and Complex Dielectric Constant Measuring Method

Abstract

To provide a complex dielectric constant measurement device that can measure a highly-accurate complex dielectric constant at a plurality of frequencies, and to provide a complex dielectric constant measurement method that can measure the highly-accurate complex dielectric constant at the plurality of frequencies.SOLUTION: A complex dielectric constant measurement device has a two-divided metal-made double structure type resonator. The double structure type resonator is composed of: an outer cylinder part; a core part located inside the outer cylinder part via a cavity part; and a connection part connecting the outer cylinder part and the core part. Further, the double structure type resonator has a tight-hold part tightly holding a dielectric sample between a pair of divided planes flush with a plane of the two-divided double structure type resonator. For a complex dielectric constant measurement method, the complex dielectric constant measurement device is used. The complex dielectric constant measurement method includes the step of: measuring a resonance frequency; obtaining a diameter of an inner wall of the outer cylinder part, a diameter of an outer wall of the core part, and a dimension of an internal length of the outer cylinder part; obtaining a conductivity σ of the metal constituting the double structure type resonator; and obtaining a relative dielectric constant εr and a dielectric loss tangent tanδ of the dielectric sample.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a complex permittivity measurement apparatus and a complex permittivity measurement method.

Background Art

[0002] In recent years, mobile communications such as mobile phones have been advancing in expanding the frequency band used and increasing the frequency in order to secure communication capacity and speed up. Communication devices such as mobile phones use electronic circuit boards and electronic components. It is necessary to obtain the dielectric properties of such electronic circuit boards and electronic components with high accuracy.

[0003] The applicant of the present application has previously disclosed a method capable of obtaining dielectric properties with high accuracy even in a high frequency band exceeding 1 GHz (see Patent Document 1). However, according to the conventional method, basically, for one resonator, only one measurable frequency is available.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] An object of the present disclosure is to obtain a complex permittivity measurement apparatus and a complex permittivity measurement method capable of measuring complex permittivity with high accuracy at a plurality of frequencies.

Means for Solving the Problems

[0006] The complex permittivity measurement apparatus according to one aspect of the present disclosure has a two-divided metal double-structured resonator. The double-structured resonator is composed of an outer cylinder part, a core part positioned inside the outer cylinder part via a cavity part, and a connecting part connecting the outer cylinder part and the core part. Further, there is a clamping part for clamping a dielectric sample between a pair of split surfaces that are surface-aligned with the split double-structured resonator. The connection part partially connects the inner wall of the outer cylinder part and the outer wall of the core part at one location, and the length of the connection part matches the longitudinal lengths of the outer cylinder part and the core part.

[0007] Also, the method for measuring complex permittivity according to another aspect of the present disclosure is measured using the following complex permittivity measuring device and has the following steps. The complex permittivity measuring device has a split metal double-structured resonator. The double-structured resonator is composed of an outer cylinder part, a core part positioned inside the outer cylinder part via a cavity part, and a connecting part connecting the outer cylinder part and the core part. Further, there is a clamping part for clamping a dielectric sample between a pair of split surfaces that are surface-aligned with the split double-structured resonator. The connection part partially connects the inner wall of the outer cylinder part and the outer wall of the core part at one location, and the length of the connection part matches the longitudinal lengths of the outer cylinder part and the core part. Without installing the dielectric sample, measuring the resonance frequencies f0s in the TE nml mode (n = 0, 1, 2, 3 ···, m = 0, 1, 2, 3 ···, l = 0, 1, 2, 3 ···. However, when "nml" includes 0, 0 is any one of nml.) for a plurality of modes with different n, m, and l. Based on the measurement results of the resonance frequencies f0s and electromagnetic field analysis, obtaining the dimensions of the inner wall diameter D1 of the outer cylinder part, the outer wall diameter D2 of the core part, and the internal length T of the outer cylinder part. Without installing the dielectric sample, the TE of the double-structured resonator n01 (n = 1, 2, 3 ···) mode unloaded Q; Qus is measured, and based on the measurement results of the unloaded Q; Qus and electromagnetic field analysis, obtaining the conductivity σ of the metal constituting the double-structured resonator. Clamping a dielectric sample with a known thickness on the clamping part of the double-structured resonator, and TE n 01Measure the resonance frequency f0x and the no-load Q; Qux in the (n = 0, 1, 2 ···) mode, and based on the measurement results of the resonance frequency f0x and the no-load Q; Qux and electromagnetic field analysis, the TE n01 Step of obtaining the relative permittivity εr and the dielectric loss tangent tanδ of the dielectric sample in each mode of (n = 0, 1, 2 ···).

Effect of the Invention

[0008] According to the complex permittivity measurement device according to an embodiment of the present disclosure, it is possible to measure the complex permittivity with high accuracy at a plurality of frequencies. Further, according to the complex permittivity measurement method according to an embodiment of the present disclosure, it is possible to measure the complex permittivity with high accuracy at a plurality of frequencies using a small-sized device.

Brief Description of the Drawings

[0009]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5A

Figure 5B

Figure 5C

Figure 5D

Figure 6

Figure 7

Figure 8

Figure 9A

Figure 9B

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Embodiments for Carrying Out the Invention

[0010] Hereinafter, embodiments for implementing a complex permittivity measurement apparatus and a complex permittivity measurement method according to the present disclosure (hereinafter referred to as "embodiments") will be described in detail with reference to the drawings. Note that the complex permittivity measurement apparatus and the complex permittivity measurement method according to the present disclosure are not limited by this embodiment. Also, each embodiment can be appropriately combined within a range that does not cause a contradiction in the processing content.

[0011] In addition, in the embodiments shown below, expressions such as "constant" and "orthogonal" may be used, but these expressions do not necessarily require strict "constant" and "orthogonal". That is, each of the above expressions is assumed to allow deviations such as manufacturing accuracy and installation accuracy.

[0012] Also, each figure referred to below is schematic for convenience of explanation. Therefore, details may be omitted in each figure, and the dimensions of the members in each figure do not faithfully represent the dimensions and dimensional ratios of actual component members.

[0013] [Configuration of Complex Permittivity Measurement Apparatus According to First Embodiment] FIG. 1 shows a perspective view of an example of a dual-structured resonator 1A included in a complex permittivity measurement apparatus according to the first embodiment. The dual-structured resonator 1A is a main component of the complex permittivity measurement apparatus. FIG. 2 is a cross-sectional view of the dual-structured resonator 1A shown in FIG. 1 cut along the XY plane II. FIG. 3 is a cross-sectional view taken along line III-III of FIG. 2, and FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 2. In FIGS. 2 to 4, together with the dual-structured resonator 1A, a dielectric sample U sandwiched between the dual-structured resonators 1A is shown by a dashed line. The dielectric sample U is, for example, in a flat plate shape. FIGS. 5A to 5C are cross-sectional views of modified examples of the dual-structured resonator included in the complex permittivity measurement apparatus according to the first embodiment.

[0014] Hereinafter, the directions of the respective parts of the double-layered resonator 1A will be described in an XYZ orthogonal coordinate system with the longitudinal direction (axial direction) of the double-layered resonator 1A being the Z direction. Hereinafter, the direction facing the +Z direction of the double-layered resonator 1A and each layer constituting the double-layered resonator 1A will also be referred to as "up", and the direction facing the -Z direction will also be referred to as "down".

[0015] When measuring the complex permittivity, a dielectric sample to be measured for the complex permittivity is sandwiched between the clamping portions of the double-layered resonator 1A to form a resonator, and an electromagnetic wave is input to the resonator to excite it. Next, the resonance frequency and the unloaded Q are measured from the electromagnetic wave output from the excited resonator using a network analyzer, and the complex permittivity of the dielectric sample is obtained as the relative permittivity εr and the dielectric loss tangent tanδ.

[0016] The double-layered resonator 1A is composed of an outer cylinder portion 12, a core portion 11 located inside the outer cylinder portion 12 with a cavity C therebetween, and a connecting portion 13 connecting the outer cylinder portion 12 and the core portion 11. At the middle position in the longitudinal direction (axial direction; Z direction) of the outer cylinder portion 12, it is divided into a first member 1a and a second member 1b by a plane (XY plane) S orthogonal to the Z direction. The first member 1a and the second member 1b have a structure that is substantially plane-symmetrical with respect to the above-mentioned plane (XY plane). Note that the reason for using "substantially" is that the first member 1a has two insertion holes 21 and 22 for inserting two coaxial cables for input and output of electromagnetic waves, while the second member 1b does not have those insertion holes, due to the difference between the two members.

[0017] Here, the two-part double-structured resonator 1A is not limited to a structure obtained by cutting a structure in which the first member 1a and the second member 1b are originally integrated in the above-mentioned plane (XY plane). It also includes a form in which the first member 1a and the second member 1b are separately manufactured and arranged as shown in FIG. 1 when measuring the complex dielectric constant. The two-part double-structured resonator 1A mentioned here is a double-structured resonator 1A that appears to be divided into two parts. Also, hereinafter, regarding the part where the expression "the divided cross-section is the dividing surface" is used, it is not limited to the cross-section formed by dividing the double-structured resonator 1A, but also includes the case where the end surfaces of the first member 1a and the second member 1b are the end surfaces of the first member 1a and the second member 1b respectively when they are separately manufactured.

[0018] That is, the double-structured resonator of the present disclosure has a first member and a second member. The first member and the second member each have an outer cylindrical portion, a core portion located inside the outer cylindrical portion via a cavity portion, and a connecting portion connecting the outer cylindrical portion and the core portion. The first member and the second member are a facing combination. The facing direction is the longitudinal direction of each of the first member and the second member. Here, the longitudinal direction is the direction along the side surface of the first member and the second member. The first member and the second member each have a bottom surface (or end surface) intersecting the side surface. The side surfaces of the first member and the second member are in the direction in which the cavity portions provided inside the outer cylindrical portion communicate. The bottom surfaces (or end surfaces) of the first member and the second member are in a direction intersecting (including perpendicular) to the direction in which the cavity portions communicate. The first member and the second member are arranged such that the bottom surfaces (or end surfaces) they each have face each other.

[0019] The outer cylindrical portion 12, the core portion 11, and the connecting portion 13 constituting the double-structured resonator 1A are preferably made of metal, and in particular, it is preferable that they are made of the same metal. Examples of the type of metal include highly conductive metals such as silver and copper, and alloys thereof.

[0020] The first member 1a and the second member 1b each have an outer cylinder portion 12a, 12b, a core portion 11a, 11b located inside the outer cylinder portions 12a, 12b, and connection portions 13a, 13b connecting the outer cylinder portions 12a, 12b and the core portions 11a, 11b. In the double-structured resonator 1A, the outer cylinder portion 12 includes the outer cylinder portion 12a and the outer cylinder portion 12b. The core portion 11 includes the core portion 11a and the core portion 11b. The connection portion 13 includes the connection portion 13a and the connection portion 13b.

[0021] The first member 1a has a divided cross-section with a dividing surface Sa, and the second member 1b has a divided cross-section with a dividing surface Sb. In this case, the dividing surface Sa and the dividing surface Sb are preferably in surface coincidence. The first member 1a and the second member 1b are preferably arranged such that the dividing surface Sa and the dividing surface Sb face each other. At this time, the first member 1a and the second member 1b are preferably arranged such that the cavity portions C formed in the first member 1a and the second member 1b communicate with each other so as to have the same cross-sectional shape in the first member 1a and the second member 1b. The double-structured resonator 1A has a sandwiching portion 14 that sandwiches a flat dielectric sample U between the dividing surface Sa and the dividing surface Sb.

[0022] Next, the double-structured resonator 1A shown in FIGS. 1 to 4 will be described centering on the first member 1a. The second member 1b has the same configuration as the first member 1a except that it does not have the insertion holes 21 and 22, and the description of the first member 1a excluding the insertion holes 21 and 22 can be directly applied to the second member 1b.

[0023] Regarding the dual-structured resonator 1A shown in FIGS. 1 to 4, the outer cylindrical portion 12a and the core portion 11a of the first member 1a are represented as cylindrical bodies. In this case, the outer cylindrical portion 12a and the core portion 11a are connected in the normal direction between a part of the inner wall 12aa of the outer cylindrical portion 12a and a part of the outer wall 11aa of the core portion 11a. The connected portion is the connection portion 13a. The connection portion 13a is a portion that is connected in the normal direction between a part of the inner wall 12aa of the outer cylindrical portion 12a and a part of the outer wall 11aa of the core portion 11a. The outer cylindrical portion 12a, the core portion 11a, and the connection portion 13a may be integrally formed. The connection portion 13a may have a length corresponding to the longitudinal length of the first member 1a and the second member 1b. In FIG. 1, the longitudinal direction is the Z direction. That is, the longitudinal direction is, for example, in the first member 1a, when the circular portion is taken as the bottom surface (or end surface) and the portion of the outer wall intersecting the bottom surface (or end surface) is taken as the side surface, it is the direction between the two bottom surfaces (end surfaces) constituting the first member 1a. That is, it is the direction along the side surface.

[0024] An elongated region (reference numeral 12ab) extending in the Z direction of the inner wall of the outer cylindrical portion 12a and a region (reference numeral 11ab) of the outer wall of the core portion 11a facing this region are connected by the connection portion 13a. As shown in FIG. 2, the inner diameter of the outer cylindrical portion 12a is represented by D1, and the outer diameter of the core portion 11a is represented by D2. In a cross-sectional view taken with the XY plane shown in FIG. 2 as the cross-section, for example, the centers of the outer periphery and the inner periphery of the outer cylindrical portion 12a and the centers of the outer periphery and the inner periphery of the core portion 11a coincide. Thereby, in the cross-sectional view, the thickness of the outer cylindrical portion 12a and the thickness of the core portion 11a are constant in the circumferential direction.

[0025] The length of the first member 1a in the longitudinal direction (Z direction) is represented by h. The length of the second member 1b in the longitudinal direction is also represented using the same reference symbol h as the length of the first member 1a in the longitudinal direction. The length of the dual-structured resonator 1A in the longitudinal direction is represented by H. H = 2h. In this case, the length of the connection portion 13a in the longitudinal direction (Z direction) corresponds to, for example, the length h of the first member 1a in the longitudinal direction. In the cross-section (hereinafter, also referred to as the "XY cross-section") by the XY plane of the cross-sectional view shown in FIG. 2, the length L of the connection portion 13a corresponds to the distance between the inner wall of the outer cylindrical portion 12a and the outer wall of the core portion 11a.

[0026] Since the outer cylinder part 12a, the core part 11a, and the connecting part 13a have the above-described shapes, the first member 1a has a cavity C in a C-shaped cylindrical form in a cross-sectional view, surrounded by the inner wall 12aa of the outer cylinder part 12a, the outer wall 11aa of the core part 11a, and the side wall 13aa of the connecting part 13a. In the double-structured resonator 1A, a cavity C in a C-shaped cylindrical form in a cross-sectional view as described above is formed, whereby the size of the double-structured resonator 1A can be suppressed to be small. Further, thereby, the size of the dielectric sample U can be suppressed to be small.

[0027] Here, in the double-structured resonator 1A, the outer cylinder part 12a and the core part 11a in the first member 1a are connected at an end portion (upper end portion: reference numeral 12au) located on the side opposite to the split surface Sa side. Similarly, the outer cylinder part 12b and the core part 11b in the second member 1b are connected at an end portion (lower end portion: reference numeral 12bu) located on the side opposite to the split surface Sb side. That is, in the first member 1a and the second member 1b, the cavity C in a C-shaped cylindrical form in a cross-sectional view is open at the split surfaces Sa and Sb, but is not open at the upper end portion 12au and the lower end portion 12bu, respectively.

[0028] The inner diameters D1 of the outer cylinder parts 12a and 12b, the outer diameters D2 of the core parts 11a and 11b, and the internal lengths t of the outer cylinder parts 12a and 12b are requirements for determining the size of the cavity C. The inner diameters D1 of the outer cylinder parts 12a and 12b, the outer diameters D2 of the core parts 11a and 11b, and the internal lengths t of the outer cylinder parts 12a and 12b correspond to the outer diameter, the inner diameter, and the length in each cavity C. In FIG. 3, the internal lengths t of the outer cylinder part 12a of the first member 1a and the outer cylinder part 12b of the second member 1b are represented by the same reference numeral. The internal length of the outer cylinder 12 formed by combining the outer cylinder part 12a and the outer cylinder part 12b is represented by T. T = 2t. The inner diameters D1 of the outer cylinder parts 12a and 12b, the outer diameters D2 of the core parts 11a and 11b, and the internal lengths t of the outer cylinder parts 12a and 12b are appropriately set according to the frequency at the time of measuring the complex dielectric constant of the dielectric sample U so that the double-structured resonator 1A resonates at that frequency.

[0029] In the design of the dual-structured resonator 1A, by sufficiently shortening the difference between the inner diameters D1 of the outer cylinder parts 12a and 12b and the outer diameters D2 of the core parts 11a and 11b; D1 - D2, and the internal length t of the outer cylinder parts 12a and 12b, it is possible to selectively excite only the target resonance mode. The internal length t of the outer cylinder parts 12a and 12b can be appropriately adjusted, for example, by adjusting the lengths h of the first member 1a and the second member 1b.

[0030] Also, when measuring the complex permittivity of, for example, a flat dielectric sample U using the complex permittivity measuring device of the embodiment including the dual-structured resonator 1A, since a dielectric different from the dielectric sample U to be measured is not loaded into the cavity parts C provided in the first member 12a and the second member 12b constituting the dual-structured resonator 1A respectively, it is possible to concentrate the electric field energy on the dielectric sample U to be measured. As a result, it is possible to measure the complex permittivity with high accuracy. Thereby, in particular, in the measurement of the complex permittivity in the frequency band of 1 to 10 GHz, it is possible to achieve both miniaturization of the device and highly accurate measurement of the complex permittivity. The dual-structured resonator 1A is divided into two parts symmetrically up and down, and by sandwiching the dielectric sample U to be measured with the two divided first member 1a and second member 1b, it becomes difficult for the electromagnetic field to radiate outside the resonator and is easily confined within the resonator.

[0031] In the examples shown in FIGS. 1 to 4, the outer cylinder part 12 and the core part 11 of the dual-structured resonator 1A are in the shape of a cylinder. If the outer cylinder part 12 and the core part 11 of the dual-structured resonator 1A are in the shape of a cylinder, the structure is symmetric up and down and left and right, and it is possible to reduce the radiation of electromagnetic waves from the dual-structured resonator 1A during measurement. Also, by providing the connection part 13, it becomes possible to measure from a low frequency, and furthermore, the number of measurable frequencies can be increased. When the dual-structured resonator 1A uses the first member 1a and the second member 1b which are divided into two parts up and down, with the split surfaces of both members joined together for measurement, the connection part 13a and the connection part 13b are preferably in the longitudinal direction of the dual-structured resonator 1A and their joining positions coincide. When the joining positions of the connection part 13a and the connection part 13b coincide, more accurate measurement becomes possible.

[0032] Here, in the case of the TE 101 mode, since the electric field vector mainly points strongly in the X direction of the XY plane with respect to the Z direction in which the electromagnetic wave propagates, the dielectric characteristics in the X direction can be obtained, and it can also be used to evaluate the anisotropy of the characteristics in the plane of the dielectric sample U on the flat plate. Note that the TE 101 mode is the mode where n = 1, m = 0, and l = 1 in the TE nml mode (see FIGS. 9A and 9B).

[0033] Also, as shown in FIG. 1, in the double-structured resonator 1A, the first member 1a has two insertion holes 21 and 22 penetrating from the outer wall surface to the inner wall surface in the outer cylindrical portion 12a. The two insertion holes 21 and 22 are used to insert two loop antennas for inputting electromagnetic waves into the double-structured resonator 1A and outputting electromagnetic waves from the double-structured resonator 1A. When the insertion hole 21 is used for input, the insertion hole 22 is used for output. When the insertion hole 21 is used for output, the insertion hole 22 is used for input. As shown in FIG. 2, the insertion hole 21 and the insertion hole 22 can be provided on both sides so as to sandwich the connecting portion 13a.

[0034] Note that, for example, when exciting the electromagnetic field of the TE n01 (n = 1, 2, 3...) mode, a loop antenna formed by forming a loop at the tip of a semi-rigid coaxial cable is used.

[0035] As described above, the first embodiment has been described with reference to the examples shown in FIGS. 1 to 4, but this is an example and various modifications are possible. For example, in the complex dielectric constant measuring device of this embodiment, instead of the double-structured resonator 1A shown in FIGS. 1 to 4, a double-structured resonator 1A with a different shape of the outer cylindrical portion 12 or the core portion 11 can also be used. The outer cylindrical portion 12 may be a rectangular cylinder instead of a circular cylinder. The core portion 11 may be a rectangular cylinder, a circular cylinder, or a rectangular prism instead of a circular cylinder.

[0036] By making the outer cylinder part 12 and the core part 11 have these shapes, in the double - structure resonator 1A, a vertically and horizontally symmetric structure can be formed, and the radiation of electromagnetic waves from the double - structure resonator 1A during measurement can be prevented. In this case, even when various shapes are used for the outer cylinder part 12 and the core part 11 as described above, the shape of the cavity part C between the outer cylinder part 12 and the core part 11 is preferably a C - shaped when the double - structure resonator 1A is viewed in cross - section.

[0037] In addition, as the combination of the outer cylinder part 12 and the core part 11 in the double - structure resonator 1A, for example, in the order of the outer cylinder part 12 and the core part 11, a combination of a cylindrical body and a cylindrical body or a columnar body, a rectangular - cylindrical body and a rectangular - cylindrical body or a rectangular - prism body may be used. Typically, a combination of two cylindrical bodies (the examples shown in FIGS. 1 to 4 above) or two rectangular - cylindrical bodies is preferable. Also, the present disclosure is not limited to the above structure, and the outer - peripheral shape of the cross - section of the outer cylinder part may be rectangular, and the cavity part around the core part may have a curved shape (a C - shaped in cross - section).

[0038] Figs. 5A to 5D are cross - sectional views of the divided first member 1a in a modified example of the double - structure resonator 1A cut in the XY plane orthogonal to the longitudinal direction (Z direction). In other words, Figs. 5A to 5D are cross - sectional views corresponding to Fig. 2 in the double - structure resonator 1A shown in Figs. 1 to 4.

[0039] In Figs. 5A to 5D, only the cross - section of the first member 1a in a modified example of the double - structure resonator 1A is shown. In each modified example, the second member 1b has a vertically symmetric configuration except that the second member 1b does not have the insertion holes 21 and 22 on the surface divided from the first member 1a.

[0040] In FIG. 5A, in a modified example of the dual-structured resonator 1A, it is shown that the outer cylindrical portion 12a and the core portion 11a in the first member 1a are square cylinders. In this example (hereinafter also referred to as "modified example 5A"), as the specific shapes of the outer cylindrical portion 12a and the core portion 11a in the XY cross-section, the outer and inner perimeters of the outer cylindrical portion 12a and the outer and inner perimeters of the core portion 11a are squares. In modified example 5A, the inner diameter D1 of the outer cylindrical portion 12a corresponds to the length of one side of the square forming the inner perimeter of the outer cylindrical portion 12a, and the outer diameter D2 of the core portion 11a corresponds to the length of one side of the square forming the outer perimeter of the core portion 11a. Also, in the XY cross-section shown in FIG. 5A, the centers of the outer and inner perimeters of the outer cylindrical portion 12a and the centers of the outer and inner perimeters of the core portion 11a coincide. Thereby, in the XY cross-section, the thicknesses of the outer cylindrical portion 12a and the core portion 11a are constant in the circumferential direction.

[0041] Regarding modified example 5A, although the configuration in the longitudinal direction (Z direction) of the dual-structured resonator 1A is not illustrated, the longitudinal configuration in modified example 5A can be the same as that shown in FIGS. 3 and 4. In the first member 1a of modified example 5A, there is a connecting portion 13a that extends in the Z direction and has a length that coincides with the longitudinal length h of the first member 1a, similar to the connecting portion 13a of the first member 1a in the examples shown in FIGS. 1 to 4, and the outer cylindrical portion 12a and the core portion 11a are connected. Also, in the first member 1a of modified example 5A, the insertion holes 21 and 22 used for inserting the coaxial cable are located at the same positions as the insertion holes 21 and 22 of the first member 1a in the examples shown in FIGS. 1 to 4.

[0042] In modified example 5A, since the outer cylindrical portion 12a, the core portion 11a, and the connecting portion 13a have the above-described shapes, the first member 1a has a hollow portion C in the shape of a square cylinder with a notch, surrounded by the inner wall of the outer cylindrical portion 12a, the outer wall of the core portion 11a, and the side walls of the connecting portion 13a. Although the shape of this hollow portion C is different from that in the examples shown in FIGS. 1 to 4, it functions in the same manner as the hollow portion C in that example.

[0043] Also in Modification 5A, similar to the above, the inner diameter D1 of the outer cylinder part 12a, the outer diameter D2 of the core part 11a, and the length t inside the outer cylinder part 12a are appropriately set according to the frequency when measuring the complex dielectric constant of the dielectric sample U so that the dual-structured resonator 1A resonates at that frequency. Further, the length h of the first member 1a is appropriately adjusted according to the length t inside the outer cylinder part 12a.

[0044] In FIG. 5B, in a modification of the dual-structured resonator 1A, it is shown that the outer cylinder part 12a in the first member 1a is a cylindrical body and the core part 11a is a columnar body. In this example (hereinafter also referred to as "Modification 5B"), the configuration can be the same as that in the examples shown in FIGS. 1 to 4 except that the cylindrical body of the core part 11a is changed to a columnar body. Note that the outer diameter D2 of the columnar body of the core part 11a in Modification 5B can be the same as the outer diameter D2 of the cylindrical body of the core part 11a in the examples shown in FIGS. 1 to 4. That is, in Modification 5B, the first member 1a has a cylindrical hollow part C having the same notch as the first member 1a in the examples shown in FIGS. 1 to 4, and the hollow part C has the same function as that in the examples shown in FIGS. 1 to 4.

[0045] In FIG. 5C, in a modification of the dual-structured resonator 1A, it is shown that the outer cylinder part 12a in the first member 1a is a rectangular prism body and the core part 11a is a prismatic body. In this example (hereinafter also referred to as "Modification 5C"), the configuration can be the same as that in Modification 5A except that the rectangular prism body of the core part 11a is changed to a prismatic body. Note that the outer diameter D2 of the prismatic body of the core part 11a in Modification 5C can be the same as the outer diameter D2 of the rectangular prism body of the core part 11a in Modification 5A. That is, in Modification 5C, the first member 1a has a rectangular prism-shaped hollow part C having the same notch as the first member 1a in Modification 5A, and the hollow part C has the same function as that in Modification 5A.

[0046] In FIG. 5D, in a modified example of the dual-structured resonator 1A, the outer cylinder portion 12a of the first member 1a is a cylinder whose outer periphery is rectangular and inner periphery is circular in a cross section in the XY plane, and the core portion 11a is shown to be a cylinder. In this example (hereinafter also referred to as "modified example 5D"), the configuration can be the same as that in the examples shown in FIGS. 1 to 4 except that the cylindrical outer cylinder portion 12a in the examples shown in FIGS. 1 to 4 is changed to the cylinder having the above cross-sectional shape. Note that the inner diameter D1 of the cylinder of the outer cylinder portion 12a in the modified example 5D can be the same as the inner diameter D1 of the cylindrical outer cylinder portion 12a in the examples shown in FIGS. 1 to 4. That is, in the modified example 5D, the first member 1a has a cylindrical cavity portion C having the same notch as the first member 1a in the examples shown in FIGS. 1 to 4, and the cavity portion C has the same function as that in the examples shown in FIGS. 1 to 4.

[0047] 〔Configuration of Complex Dielectric Constant Measuring Apparatus According to Second Embodiment〕 FIG. 6 is a cross-sectional view taken in a plane (XY plane) orthogonal to the longitudinal direction (Z direction) of an example of the dual-structured resonator 1B included in the complex dielectric constant measuring apparatus according to the second embodiment. The dual-structured resonator 1B is a main component of the complex dielectric constant measuring apparatus. Also in this case, similar to the above-described dual-structured resonator 1A, it is divided into a first member 1a and a second member 1b in a plane (XY plane) orthogonal to the longitudinal direction (Z direction). FIG. 6 is a cross-sectional view of the first member 1a taken in the XY plane and is a view seen from the lower side (the -Z direction in FIG. 1) of the cross section. FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 6, and FIG. 8 is a cross-sectional view taken along line IV-IV of FIG. 6. In FIGS. 6 to 8, a flat dielectric sample U sandwiched between the dual-structured resonators 1B is shown by a broken line together with the dual-structured resonator 1B. The dual-structured resonator 1B is obtained by adding a sandwiching portion 14 to the dual-structured resonator 1A. That is, the sandwiching portion 14 is disposed between the dividing surface Sa and the dividing surface Sb.

[0048] The clamping portion 14 has spacers 151, 152, 153, 154 (the symbols a and b are omitted) arranged on the respective split surfaces Sa and Sb so as to be spaced apart from each other. Further, these spacers 151, 152, 153, 154 are arranged to face each other between the first member 12a and the second member 12b.

[0049] In the case of the dual-structured resonator 1A, since the dielectric sample U is clamped between the split surface Sa and the split surface Sb, there is no space between the first member 1a and the dielectric sample U and between the dielectric sample U and the second member 1b. In the dual-structured resonator 1B, since the dielectric sample U is clamped between the spacers 151 to 154, spaces are formed between the first member 1a and the dielectric sample U and between the dielectric sample U and the second member 1b.

[0050] When the dual-structured resonator 1A is used, in the case of a hard dielectric sample such as ceramics or a dielectric sample with large irregularities, a slight gap may occur between the dielectric sample U and the dual-structured resonator 1A. And this slight gap may affect the measurement accuracy. In the dual-structured resonator 1B, in order to further improve the measurement accuracy, a configuration is adopted in which a space portion where the dielectric sample and the dual-structured resonator do not contact is formed in advance by the spacers.

[0051] Here, the spacers will be described.

[0052] The spacer 151 is configured as a pair of a spacer 151a arranged on the split surface Sa and a spacer 151b arranged at a position facing the spacer 151a on the split surface Sb. The spacer 152 is configured as a pair of a spacer 152a arranged on the split surface Sa and a spacer 152b arranged at a position facing the spacer 152a on the split surface Sb. The spacer 153 is configured as a pair of a spacer 153a arranged on the split surface Sa and a spacer 153b arranged at a position facing the spacer 153a on the split surface Sb. The spacer 154 is configured as a pair of a spacer 154a arranged on the split surface Sa and a spacer 154b arranged at a position facing the spacer 154a on the split surface Sb.

[0053] The spacers 151a to 154a are each constituted by four equally spaced members of the same size and shape obtained, for example, by cutting out a cylindrical body with a sufficiently small thickness. In this case, as the cylindrical body before being cut out, its outer circumference is larger than the outer circumference of the outer cylinder portion 12a, and its inner circumference is smaller than the outer circumference of the outer cylinder portion 12a and larger than the inner circumference of the outer cylinder portion 12a. Further, the spacers 151a to 154a are symmetric with respect to the XY plane and are detachably arranged on the split surface Sa.

[0054] The spacers 151b to 154b are also symmetric with respect to the XY plane and are detachably arranged on the split surface Sb, similar to the spacers 151a to 154a. Examples of the constituent material of the spacers 151 to 154 include a metal material or a resin material. The spacers 151a, 152a, 153a, 154a and the spacers 151b, 152b, 153b, 154b are preferably arranged in pairs so as to face each other.

[0055] The second embodiment has been described above with reference to the examples shown in FIGS. 6 to 8, but this is merely an example and various modifications are possible. For members other than the spacers, the same modifications as those of the double-structured resonator 1A are possible. Also, for the spacers, the number, shape, size, and position can be appropriately changed. Further, the spacers may be configured to sandwich the dielectric sample U with only one pair. In that case, for example, each spacer may be a single continuous member such as the cylindrical body before being cut out described above.

[0056] Furthermore, the specific details such as the configuration, structure, positional relationship, and shape shown in the above embodiments can be appropriately changed without departing from the spirit of the present disclosure. Also, within the scope not departing from the spirit of the present disclosure, the configurations, structures, positional relationships, and shapes shown in the above embodiments can be appropriately combined.

[0057] 〔Configuration of the complex dielectric constant measurement method according to the embodiment〕 The complex permittivity measurement method of the embodiment can be performed, for example, using the complex permittivity measurement device of the first or second embodiment.

[0058] (Measurement of the complex permittivity of the dielectric sample according to the third embodiment using the complex permittivity measurement device of the first embodiment) Hereinafter, with reference to FIGS. 9A, 9B, and 10, the complex permittivity measurement method will be described. The following is represented as the third embodiment. The third embodiment is a case where the complex permittivity measurement device of the first embodiment is used. The complex permittivity measurement method represented as the third embodiment has the following first to fourth steps as basic steps.

[0059] In the third embodiment, for example, a network analyzer is used to measure the resonance frequency f0 and the unloaded Q of the double-structured resonator 1A and the resonator 10A shown below. The measurement environment can be, for example, a measurement temperature of 25 ± 1°C and a humidity of about 40 ± 20%.

[0060] (First step) The first step is a step of measuring the resonance frequencies f0s in the TE nml mode (n = 0, 1, 2, 3 ···, m = 0, 1, 2, 3 ···, l = 0, 1, 2, 3 ···. However, when "nml" includes 0, 0 is any one of nml) for a plurality of modes with different n, m, and l.

[0061] FIGS. 9A and 9B are the TE of the double-structured resonator 1A nmlThis is a diagram for explaining the subscript "nml" in the mode. n, m, and l are numbers indicating the number of peaks in the change of the electric field amplitude in the circumferential direction, radial direction, and longitudinal direction (axial direction), respectively. Fig. 9A is a cross-sectional view of the first member 1a of the double-structured resonator 1A shown in Figs. 1 to 4 taken along the XY plane, and the circumferential direction and radial direction are shown in Fig. 9A. Fig. 9B is a cross-sectional view of the double-structured resonator 1A cut in the longitudinal direction, and the longitudinal direction is shown in Fig. 9B. In Figs. 9A and 9B, the double-structured resonator 1A shows a stacked state in which the first member 1a and the second member 1b are joined so that the dividing surfaces Sa and Sb are in contact with each other without sandwiching the flat dielectric sample U.

[0062] (Second step) The second step is a step of determining the dimensions of the diameter D1 of the inner wall of the outer cylinder portion 12, the diameter D2 of the outer wall of the core portion 11, and the length T inside the outer cylinder portion 12 based on the measurement result of the resonance frequency f0s obtained in the first step and electromagnetic field analysis. The diameter D1 of the inner wall of the outer cylinder portion 12 of the double-structured resonator 1A is the same as the diameter D1 of the inner wall of the outer cylinder portion 12a of the first member 1a as shown in Figs. 9A and 9B. The diameter D2 of the outer wall of the core portion 11 of the double-structured resonator 1A is the same as the diameter D2 of the outer wall of the core portion 11a of the first member 1a as shown in Figs. 9A and 9B. The length T inside the outer cylinder portion 12 of the double-structured resonator 1A is the sum of the length t inside the outer cylinder portion 12a of the first member 1a and the length t inside the outer cylinder portion 12a of the second member 1b as shown in Fig. 9B.

[0063] In the second step, specifically, the dimensions of the diameter D1 of the inner wall of the outer cylinder portion 12, the diameter D2 of the outer wall of the core portion 11, and the length T inside the outer cylinder portion 12 are obtained so that the calculation result of the resonance frequency f0s by electromagnetic field analysis matches the measurement result of the resonance frequency f0s obtained in the first step.

[0064] (Third step) The third step is to set the TE of the double-structured resonator 1A without installing the dielectric sample U. n01The step of measuring the no-load Q; Qus in the mode of (n = 1, 2, 3 ···) and obtaining the conductivity σ of the metal constituting the double-structured resonator 1A based on the measurement result of the no-load Q; Qus and electromagnetic field analysis. Specifically, in the third step, the conductivity σ of the metal constituting the double-structured resonator 1A is obtained such that the measured no-load Q; Qus matches the calculated result of the no-load Q; Qus by electromagnetic field analysis. Note that the conductivity σ of the metal constituting the double-structured resonator 1A is obtained for each mode of the TE n01 mode.

[0065] (Fourth step) In the fourth step, a resonator 10A in which a flat dielectric sample U is sandwiched between the sandwiching portions 14 of the double-structured resonator 1A, the cross-sectional view of which is shown in FIG. 10, is used. In the fourth step, first, the resonant frequency f0x and the no-load Q; Qux in the TE n01 (n = 0, 1, 2 ···) mode are measured. Here, the thickness of the flat dielectric sample U is measured in advance before being sandwiched between the sandwiching portions 14 of the double-structured resonator 1A.

[0066] Then, based on the measurement result of the resonant frequency f0x and electromagnetic field analysis, the relative permittivity εr of the dielectric sample U in each mode of the TE n01 (n = 0, 1, 2 ···) is obtained. Further, using the relative permittivity εr obtained above, based on the measurement result of the no-load Q; Qux and electromagnetic field analysis, the dielectric loss tangent tanδ of the dielectric sample U in each mode of the TE n01 (n = 0, 1, 2 ···) is obtained.

[0067] The thickness of the dielectric sample U is measured in, for example, micrometers. In the fourth step, the relative permittivity εr of the dielectric sample U in each mode is determined so that the resonance frequency f0x measured in the resonator 10A matches the calculation result of the resonance frequency f0x by electromagnetic field analysis. Note that for the calculation of the resonance frequency f0x by electromagnetic field analysis, the dimensions of each factor obtained in the first to third steps, namely, the diameter D1 of the inner wall of the outer cylinder portion 12 of the double-structured resonator 1A, the diameter D2 of the outer wall of the core portion 11, and the length T inside the outer cylinder portion 12, as well as the conductivity σ of the metal constituting the double-structured resonator 1A, and further, the thickness of the flat dielectric sample U are used.

[0068] Next, the obtained relative permittivity εr is reflected in the electromagnetic field simulation, and the dielectric loss tangent tanδ of the dielectric sample U in each mode is determined so that the measurement result of the unloaded Q; Qux matches the calculation result of the unloaded Q; Qux by electromagnetic field analysis.

[0069] (Measurement of the complex permittivity of a dielectric sample according to the fourth embodiment using the complex permittivity measurement device of the second embodiment) Next, the method for measuring the complex permittivity according to the fourth embodiment will be described. This is an example when using the double-structured resonator 1B shown in FIGS. 6 to 8. It is the case of using the complex permittivity measurement device of the second embodiment. The method for measuring the complex permittivity represented as the fourth embodiment has the following first to fourth steps as basic steps.

[0070] The first to third steps in the fourth embodiment can be performed in the same manner as the first to third steps of the third embodiment described above. That is, in the first to third steps, the spacers 151 to 154 are removed from the double-structured resonator 1B, and further, the dielectric sample U is not sandwiched, and the steps are performed in the same state as shown in FIGS. 9A and 9B.

[0071] In the fourth step, as shown in the cross-sectional view of FIG. 11, a resonator 10B is used in which a flat dielectric sample U is sandwiched between spacers 151 to 154 of the sandwiching portion 14 of the double-structured resonator 1B. This is the same as the case of the third embodiment using the complex permittivity measuring apparatus of the first embodiment, except that the resonator 10B is used instead of the resonator 10A.

[0072] In the fourth embodiment, the thickness of the flat dielectric sample U and the thicknesses of the spacers 151 to 154 are measured in advance with a micrometer, for example. The thickness of the spacer 151 is the total thickness of the spacers 151a and 151b, respectively. The same applies to the spacers 152 to 154. Next, electromagnetic field analysis is performed. In this case, for the calculation of the resonance frequency f0x, each factor obtained in the first to third steps, the thickness of the flat dielectric sample U, and the thicknesses of the spacers 151 to 154 are used. The thicknesses of the spacers 151 to 154 are used. In this case, it is preferable to use the average thickness of each thickness as the thicknesses of the spacers 151 to 154.

[0073] As described above, the third and fourth embodiments have been described, but these are examples and various modifications are possible. For example, the double-structured resonator used for measurement can be modified in the same manner as described in the first and second embodiments.

Examples

[0074] Hereinafter, the embodiments will be specifically described with reference to examples, but the present embodiment is not limited thereto.

[0075] [Examples 1 to 4; Complex Permittivity Measuring Apparatus] The double-structured resonator 1A shown in FIGS. 1 to 4 and the double-structured resonator 1A having a shape corresponding to the modified example 5A were made of copper and fabricated in the sizes shown in Table 1, and used as the double-structured resonator 1A according to the measuring apparatuses of Examples 1 to 4. The double-structured resonator 1A according to Example 1 corresponds to the modified example 5A, and the double-structured resonators 1A according to Examples 2 to 4 correspond to the double-structured resonators 1A shown in FIGS. 1 to 4.

[0076]

Table 1

[0077] The results of the electromagnetic field analysis using the values in Table 1 are shown in the graph of Fig. 12. In the graph of Fig. 12, the horizontal axis represents the frequency [GHz], and the vertical axis represents the insertion loss [dB]. Fig. 12 is a graph showing the resonance characteristics of the dual-structured resonator 1A according to the measuring devices of Examples 1 to 4.

[0078] In the graph of Fig. 12, the solid line shows the resonance characteristics of the dual-structured resonator 1A according to Example 2. In the dual-structured resonator 1A, peaks showing resonance in a predetermined mode appear at three different frequencies. In Fig. 12, the TE mode of each peak is described at the apex of the peak showing resonance. For Example 2, specifically, from Fig. 12, resonance in the TE 101 mode at a frequency of 2.53 GHz and resonance in the TE 201 mode at a frequency of 3.88 GHz can be seen to appear as peaks respectively. Also, it can be seen that these peaks are all sharp and have little distortion, indicating that highly accurate measurement can be performed at the corresponding frequencies.

[0079] In the graph of Fig. 12, the dashed-dotted line shows the resonance characteristics of the dual-structured resonator 1A according to Example 1, the dashed line shows the resonance characteristics of the dual-structured resonator 1A according to Example 3, and the dotted line shows the resonance characteristics of the dual-structured resonator 1A according to Example 4. From Fig. 12, it can be seen that in Example 1, peaks showing resonance in a predetermined mode appear at five different frequencies, in Example 3, peaks showing resonance in a predetermined mode appear at five different frequencies, and in Example 4, peaks showing resonance in a predetermined mode appear at three different frequencies.

[0080] From the above results, it can be seen that in the double-structured resonator 1A, by adjusting various dimensions as shown in Table 1, it is possible to control the measurement frequency. Also, since the target mode may not be measurable when higher-order unwanted modes are excited nearby, it was suggested to design to avoid such a situation. Furthermore, by shortening the interval of the difference (D1 - D2) between the outer diameter D2 of the core part and the inner diameter D1 of the outer cylinder part and shortening the internal length T (T = 2t) of the outer cylinder part, it was found that there is a tendency to be able to selectively excite only the target resonance mode.

[0081] [Example 5; Measurement of Complex Dielectric Constant] Spacers 151 to 154 similar to those shown in FIGS. 6 to 8 were attached to the double-structured resonator 1A according to Example 2 to form a double-structured resonator 1B similar to that shown in FIGS. 6 to 8. For a dielectric sample U which is a flat PTFE (polytetrafluoroethylene), the complex dielectric constant was measured at a resonance frequency of 2.5 GHz in the TE 101 mode.

[0082] Spacers 151 to 154 were made of resin, and the average thicknesses of spacers 151a to 154a in the first member 1a and the average thicknesses of spacers 151b to 154b in the second member 1b were both 0.2 mm.

[0083] The results of the first step are as shown by the solid line in FIG. 12. As the second step, so that the measured resonance frequency of 2.53 GHz (TE 101 mode) coincides with the calculation result of the resonance frequency f0s (2.53 GHz) by electromagnetic field analysis, the dimensions of the inner wall diameter D1 of the outer cylinder part 12, the outer wall diameter D2 of the core part 11, and the internal length T of the outer cylinder part 12 in the TE 101 mode were obtained. In the TE 101 mode, the inner wall diameter D1 of the outer cylinder part 12 was 39.996 mm, the outer wall diameter D2 of the core part 11 was 39.508 mm, and the internal length T of the outer cylinder part 12 was 19.998 mm.

[0084] Next, as the third step, using the double-structured resonator 1A according to Example 2, in the TE101 The no-load Q; Qus of the mode was measured, and based on the measurement result of the obtained no-load Q; Qus and electromagnetic field analysis, the conductivity σ of the copper constituting the dual-structure resonator 1A was determined. The conductivity σ was 65.5 [%] when pure copper was 100% in the TE 101 mode.

[0085] The dielectric sample U used in the fourth step was a PTFE sample (PTFE sample numbers 1 to 6) cut out from six types of PTFE sheets with different thicknesses to a diameter of 50 mm. The dielectric sample U was sandwiched between the spacers of the dual-structure resonator 1B to form a resonator, and its TE 101 mode resonance frequency f0x and no-load Q; Qux were measured. The measurement was performed five times, and the results are shown in Table 2 as their average values.

[0086] Furthermore, based on the measurement result of the resonance frequency f0x and electromagnetic field analysis, the relative permittivity εr of the dielectric sample U in the TE 101 mode was determined. Also, using the relative permittivity εr, based on the measurement result of the no-load Q; Qux and electromagnetic field analysis, the loss tangent tanδ of the dielectric sample U in the TE 101 mode was determined. The results are shown in Table 2 as their average values together with the standard deviation.

[0087]

Table 2

[0088] [Comparative Example; Measurement of Complex Permittivity by SPDR Method] PTFE samples (PTFE sample numbers 11 to 16) cut out from the six types of PTFE sheets with different thicknesses from which the PTFE sample numbers 1 to 6 were cut out above to a size of 70 mm square were set in a measuring instrument by the SPDR method, and their TE 01δ mode resonance frequency f0x and no-load Q; Qux were measured. The measurement was performed once.

[0089] Based on the measurement result of the resonance frequency f0x and electromagnetic field analysis, the TE 01δThe relative permittivity εr of the dielectric sample U in the mode was determined. Also, using the relative permittivity εr, the measurement result of the unloaded Q; Qux and, by electromagnetic field analysis, TE 01δ The dielectric loss tangent tanδ of the dielectric sample U in the mode was determined. The results are shown in Table 3.

[0090]

Table 3

[0091] The results obtained in Example 5 and the comparative example above were shown graphically in FIGS. 13 and 14. FIG. 13 is a graph showing the relationship between the relative permittivity by the measurement method of the complex permittivity of Example 5 and the relative permittivity by the measurement method of the complex permittivity of the comparative example, and the thickness of the dielectric sample. FIG. 14 is a graph showing the relationship between the dielectric loss tangent by the measurement method of the complex permittivity of Example 5 and the dielectric loss tangent by the measurement method of the complex permittivity of the comparative example, and the thickness of the dielectric sample.

[0092] When measuring the complex permittivity of PTFE samples with different thicknesses, in the SPDR method in which a dielectric other than the measurement sample is loaded inside, as the thickness of the PTFE sample became thinner, both the relative permittivity and the dielectric loss tangent had a large deviation. On the other hand, as described above, in the measurement method of the present embodiment, since no dielectric other than the measurement sample is loaded inside and the electric field energy is concentrated on the PTFE sample which is the measurement sample, regardless of the thickness of the PTFE sample, constant measurement results were obtained for both the relative permittivity and the dielectric loss tangent. Furthermore, as the minimum sample size required for measurement, compared to about 70 mmφ of the SPDR method, it was about 50 mmφ in the measurement method of the present embodiment, which was also effective in reducing the sample size.

[0093] FIG. 15 shows the measurement results of the dielectric properties (εr) for various materials. FIG. 16 shows the measurement results of the dielectric properties (tanδ) for various materials. In the graph shown in FIG. 15, the values within the broken-line frame are the values (εr) obtained by the measurement method of the complex dielectric constant of the present disclosure. In the graph shown in FIG. 16, the values within the broken-line frame are the values (tanδ) obtained by the measurement method of the complex dielectric constant of the present disclosure. Among the values existing in the range where the frequency is 3 GHz or more and 13 GHz or less, the plot at the highest frequency position is the value obtained by the cylindrical cavity resonator. The plots of the other three points in the graph (located in the range where the frequency is 3 GHz or more, excluding the plot at the highest frequency position) are the values obtained by the rectangular cavity resonator method. The εr and tanδ near 2.5 GHz obtained by the double-structured resonator of the present disclosure showed good continuity with the values obtained by the cylindrical cavity resonator and the rectangular cavity resonator, respectively.

Description of Reference Numerals

[0094] 1A, 1B Double-structured resonator 1a First member 1b Second member 11, 11a, 11b Core part 12, 12a, 12b Outer cylinder part 13, 13a, 13b Connection part 14 Clamping part 151 to 152 Spacer 10A, 10B Resonator C Cavity part U Dielectric sample Sa, Sb Division surface

Claims

1. It has a two-part metal double-structured resonator, The double-structured resonator is composed of an outer cylinder part, a core part located inside the outer cylinder part via a cavity part, and a connecting part connecting the outer cylinder part and the core part, It has a clamping part for clamping a dielectric sample between a pair of split surfaces that are surface-matched of the two-part double-structured resonator, The connecting part partially connects the inner wall of the outer cylinder part and the outer wall of the core part at one location, and the length of the connecting part matches the lengths of the outer cylinder part and the core part in the longitudinal direction, A complex permittivity measuring device.

2. The clamping part has a plurality of pairs of spacers that are spaced apart and opposed to each other on each of the split surfaces, The dielectric sample is clamped between the plurality of pairs of spacers The complex permittivity measuring device according to Claim 1.

3. The complex permittivity measuring device according to Claim 1 or Claim 2, wherein the outer cylinder part is a cylindrical body or a rectangular prism body.

4. The complex permittivity measuring device according to any one of Claims 1 to 3, wherein the core part is any one of a cylindrical body, a rectangular prism body, a circular column body, and a rectangular prism column body.

5. The complex permittivity measuring device according to Claim 4, wherein the outer cylinder part and the core part are both cylindrical bodies or both rectangular prism bodies.

6. Using a complex permittivity measuring device having a two-part metal double-structured resonator, the double-structured resonator is composed of an outer cylinder part, a core part located inside the outer cylinder part via a cavity part, and a connecting part connecting the outer cylinder part and the core part, and has a clamping part for clamping a dielectric sample between a pair of split surfaces that are surface-matched of the two-part double-structured resonator, the connecting part partially connects the inner wall of the outer cylinder part and the outer wall of the core part at one location, and the length of the connecting part matches the lengths of the outer cylinder part and the core part in the longitudinal direction, Without installing the dielectric sample, the TE of the double-structured resonator ｎｍｌ mode (n = 0, 1, 2, 3 ···, m = 0, 1, 2, 3 ···, l = 0, 1, 2, 3 ···. However, when "nml" includes 0, 0 is any one of nml.) The step of measuring the resonance frequency f0s in a plurality of modes where n, m, and l are different; Based on the measurement result of the resonance frequency f0s and electromagnetic field analysis, the step of obtaining the dimensions of the inner wall diameter D1 of the outer cylinder part, the outer wall diameter D2 of the core part, and the internal length T of the outer cylinder part; Without installing the dielectric sample, the TE of the double-structured resonator ｎ０１ The unloaded Q; Qus of the (n = 1, 2, 3 ···) mode is measured, and based on the measurement result of the unloaded Q; Qus and electromagnetic field analysis, the conductivity σ of the metal constituting the double-structured resonator is obtained; A dielectric sample with a known thickness is sandwiched between the sandwiching parts of the double-structured resonator, and TE ｎ ０１ The resonance frequency f0x and unloaded Q; Qux of the (n = 0, 1, 2 ···) mode are measured, and based on the measurement results of the resonance frequency f0x and unloaded Q; Qux and electromagnetic field analysis, the relative permittivity εr and dielectric loss tangent tanδ of the dielectric sample in each mode of the TE ｎ０１ (n = 0, 1, 2 ···) are obtained; A method for measuring complex permittivity having the above.

7. The method for measuring complex permittivity according to claim 6, wherein as the sandwiching part, a plurality of pairs of spacers that are spaced apart and face each other are provided on each of the split surfaces.

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