Fluid supply mounting panel and system

Abstract

The apparatus includes a mounting panel including a top plate having a number of vias and a number of orifices. An inner surface of the top plate includes a first cutout area and a channel for flowing a process fluid. The first cutout area can be a reservoir for containing the process fluid therein. The number of vias is adapted to pass the process fluid through the top plate. The number of orifices is adapted to mount a plurality of process fluid control components to the mounting panel. The inner plate also has a number of additional vias. The apparatus includes a bottom plate, the inner plate being compressed between the top plate and the bottom plate to form a unitary metal body for containing and flowing the process fluid therein.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to fluid supply mounting panels and corresponding systems.

Background Art

[0002] Current process fluid panels, such as gas panels, are designed and constructed using individual lines, fluid control components, and monitoring sensors. These designs ultimately become extremely complex, take up considerable space, and are costly to implement. The different controlled paths through such panels can be difficult to troubleshoot because a very large number of different lines and components are routed in all different directions from a process fluid source and to a processing destination such as a processing chamber. The risk of leaks also increases as the number of couplers, brackets, elbows, etc. used in routing the fluid lines increases. Furthermore, it can be difficult and costly to bring such fluid lines to and maintain a certain temperature and / or pressure, for example, to prevent condensation and particle deposition in the fluid lines, often involving additional space-consuming and costly temperature control units.

Summary of the Invention

[0003] Some of the embodiments described in this specification cover an apparatus that includes a mounting panel having a plurality of vias and a plurality of orifices sized differently from the plurality of vias. The inner surface of the upper plate includes a first cutout region and a plurality of channels through which process fluid flows. The first cutout region can be a reservoir for containing process fluid therein. The plurality of vias are adapted to pass process fluid through the upper plate, and the plurality of orifices are adapted to attach a plurality of process fluid control components to the mounting panel. The apparatus further includes an inner plate having a plurality of additional vias. The apparatus further includes a bottom plate, and the inner plate is compressed between the upper plate and the bottom plate to form an integral metal body for containing and flowing process fluid therein.

[0004] In some embodiments, the system includes a mounting panel that includes a plurality of diffusion-bonded metal plates. The mounting panel forms the following: a reservoir for containing process fluid; a plurality of channels for flowing process fluid, wherein at least one pair of the plurality of channels is connected to the reservoir; and a plurality of vias for flowing process fluid between the process fluid control components attached to the mounting panel. The system further includes a temperature sensor attached to the upper part of the mounting panel, and the temperature sensor is in fluid communication with the reservoir through one of the plurality of vias. The system further includes a set of inlet ports attached to the mounting panel for receiving process fluid. The system further includes at least one outlet port attached to the mounting panel for outputting process fluid from the mounting panel.

[0005] In additional or related embodiments, a method of operating a process fluid supply system is provided, the system including a mounting panel that forms a reservoir for containing a process fluid, a number of channels for flowing the process fluid, and a plurality of vias between an upper portion of the mounting panel and the reservoir and between the upper portion of the mounting panel and the number of channels. The system further includes a pressure sensor mounted to the upper portion of the mounting panel and in fluid communication with the reservoir. The method of operating the system includes flowing a process fluid through a first channel of the number of channels from an inlet port. The method further includes flowing the process fluid from the first channel through a first valve into a second channel of the number of channels, the second channel being in fluid communication with the reservoir. The method further includes using the pressure sensor to determine a pressure of the process fluid within the reservoir. The method further includes flowing the process fluid from the reservoir into a third channel of the number of channels.

[0006] A number of other features are provided by these and other embodiments of the present disclosure. Other features and embodiments of the present disclosure will become more fully apparent from the following detailed description, the claims, and the accompanying drawings.

[0007] The present disclosure is shown by way of example and not limitation in the figures of the accompanying drawings in which like reference numerals indicate similar elements. Note that references to "an" or "one" embodiment in this disclosure are not necessarily references to the same embodiment, and such references mean at least one.

Brief Description of the Drawings

[0008]

Figure 1A

Figure 1B

Figure 1C

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DETAILED DESCRIPTION OF THE INVENTION

[0009] The embodiments described herein relate to an apparatus, system, and method for flowing a process fluid through a diffusion-bonded mounting panel and a corresponding process fluid supply system. In addition to the above drawbacks in the prior art, many fluid panels require an external reservoir for holding a liquid or gas, which is then supplied with a process fluid such as a gas to the fluid panel as needed to redirect it to an appropriate processing chamber. The addition of an external reservoir also adds complexity, takes up additional space within the process plant, and that space is becoming more needed and costly over time.

[0010] Aspects of the present disclosure address the above and other drawbacks by providing a mounting panel designed and manufactured from a plurality of metal plates with a plurality of control flow paths integrated therein. More specifically, each metal plate can be shaped, cast, forged, machined, or engraved to define different cutouts, vias, and orifices that form at least one reservoir along with a number of channels when combined with other metal plates. The number of channels can be formed between vias in such a manner that a process fluid flows through the vias between the mounting panel and different process fluid control components such as an inlet port, an outlet port, a valve, a filter, a regulator, a mass flow controller, etc. At least one pair of the number of channels can be formed on different sides of the reservoir for flowing the process fluid into and out of the reservoir.

[0011] In some embodiments, the use of a reservoir and precisely formed vias and / or a dosing valve at the outlet of the reservoir can replace the mass flow controller. Since the mass flow controller is much larger, requires electronics and electrical control, and is more expensive, this cost and space can be saved by employing the disclosed integrated features to form at least one reservoir within the mounting panel. Further, by attaching a temperature control plate (such as a heating or cooling plate) on the bottom of the mounting panel, the process fluid within the reservoir, within the numerous channels, and throughout the attached process fluid control components can be maintained at a constant temperature without the cost and space of a separate external heater or cooler. Other advantages will become apparent to those skilled in the art of the process fluid panel and related process fluid supply system described below.

[0012] FIG. 1A is an exploded perspective view of a diffusion bonded mounting panel 105 and a corresponding process fluid supply system 100 according to one embodiment of the present disclosure. FIG. 1B is a perspective view of the assembled diffusion bonded mounting panel 105 and the corresponding process fluid supply system 100 of FIG. 1A according to one embodiment of the present disclosure. FIG. 1C is a top plan view of the assembled diffusion bonded mounting panel 105 and the corresponding process fluid supply system 100 of FIG. 1A according to one embodiment of the present disclosure.

[0013] The mounting panel 105 can include an upper plate 102, a bottom plate 106, and one or more intermediate plates such as an inner plate 104. Thus, although not shown, the mounting panel can include a number of inner plates 104. Also, the references to "upper" and "bottom" are for ease of explanation, but generally can be interchanged or understood to be, respectively, the first outer plate and the second outer plate of the mounting panel 105. The upper plate 102, the bottom plate 106, and the one or more intermediate plates can be manufactured from metal. For example, the inner plate 104 is compressed between the upper plate 102 and the bottom plate 106 to form an integral metal body for containing and flowing a process fluid therein, thereby effectively replacing an existing process fluid panel such as a gas panel. In one embodiment, the upper plate 102, the bottom plate 106, and the one or more intermediate plates are diffusion bonded, for example, by a method of diffusion bonding of steel and alloy steel under high temperature and high vacuum pressure. An example of diffusion bonding that can be used is disclosed with respect to U.S. Patent No. 7,798,388, issued September 21, 2010, which is hereby incorporated by reference in its entirety.

[0014] In some embodiments, the mounting panel 105 further includes a temperature-controlled plate 160 attached to the bottom of the mounting panel 105, for example, the outer surface of the bottom plate 106. This temperature-controlled plate 160 can be extremely thin and thus does not take up much space. The temperature-controlled plate 160, which will be described in more detail hereinafter, can be a heating plate, a cooling plate, or a combination thereof, designed to apply one of heat or cooling to the mounting panel 105. In some embodiments, the temperature-controlled plate 160 is also diffusion bonded to the outer surface of the bottom plate 106.

[0015] Referring further to FIGS. 2 and 3, FIG. 2 is a bottom perspective view of the upper plate 102 of the mounting panel 105 according to one embodiment. FIG. 3 is a bottom perspective view of the inner plate 104 of the mounting panel 105 according to one embodiment. In some embodiments, the upper plate 102 includes a plurality of vias 103 and a plurality of orifices 101. The plurality of vias 103 can be adapted to pass process fluid through the upper plate 102, and in some embodiments, at least some of the plurality of vias 103 are of different sizes to result in different flow rates of the process fluid through different fluid control paths of the mounting panel 105. The plurality of orifices 101 can be adapted to attach some process fluid control components to the mounting panel 105. In some embodiments, the orifice 101 is inside either the plurality of vias 103 or the plurality of channels 209. In various embodiments, as will be described, since the vias 103 are designed (e.g., sized) to flow process fluid into and out of the mounting panel 105, each of the plurality of vias 103 can generally have a larger diameter than each of the plurality of orifices 101. In contrast, the plurality of orifices 101 can be designed (e.g., sized) to receive an attachment mechanism, such as a small screw or bolt, for attaching a process fluid control component to the upper plate 102.

[0016] In the disclosed embodiments, the upper plate 102 also includes a first cutout region 207 (FIG. 2) and a plurality of channels 209 for flowing process fluid into the mounting panel 105. In one embodiment, the first cutout region 207 is a reservoir. The channels among the plurality of channels 209 can be formed in different shapes, including circular, semi-circular, V-shaped, etc. The inner plate 104 also includes some of the plurality of vias 103 and can optionally include a second cutout region 107. In some embodiments, the first cutout region 207 and the second cutout region 107 correspond (after diffusion bonding) to form a reservoir (best seen in FIGS. 7 and 8).

[0017] In various embodiments, the reservoir (whether formed in a single plate or multiple plates) can be used to store a process fluid, such as a gas, or a liquid that is then converted to a gas before flowing the gas to other locations within the process fluid supply system 100. The conversion can be facilitated by heating the mounting panel, as will be described in more detail. The reservoir can also be used as a reference volume for calibrating flow rate parameters, troubleshooting, and adjusting process recipes. Further, the inner plate 104 can also include a number of channels 309 formed on the inner surface of the inner plate 104, as shown in FIG. 3. These channels 309 can communicate through vias 103 in the upper plate 102 and the inner plate 104. In some embodiments, the number of channels 309 is omitted and is thus optional. In other embodiments, additional inner plates among the number of inner plates also include channels.

[0018] Referring further to FIG. 2, the inner surface of the upper plate 102 can include, for example, a number of grooves 222 that define a separation between the channels and the process fluid path. The grooves 222 can be used as a leak test to determine the leak integrity of the diffusion bond and to prevent crosstalk between adjacent channels among the number of channels 209.

[0019] In some embodiments, the plurality of channels 209 includes a first channel 209A that communicates with the reservoir from a first side of the reservoir and a second channel 209B that exits from a second side of the reservoir. Further, the plurality of vias 103 can include at least one precisely sized via 103A that is located at the outlet of the second channel 209B and is designed to control the flow rate of the process fluid exiting the reservoir. Further, the plurality of vias 103 can include a larger or rectangular via 103B for inserting the flow sensor 130. In some embodiments, the plurality of channels 109 also includes at least one channel 211 with a reduced size. Other sizes are contemplated. In this way, the different sizes of the plurality of channels 109 can enable various flow rates that may be required by different processes and can be achieved by configuring a process fluid flow path that includes a mixture of different channel sizes.

[0020] In various embodiments, the process fluid supply system 100 includes several process fluid control components attached to the mounting panel 105 and, for example, attached to the upper part of the upper plate 102 using a plurality of orifices 101. These process fluid control components can include, but are not limited to, an inlet port 110A, a valve 114A coupled to the inlet port 110A, an outlet port 110B, a valve 114B coupled to the outlet port 110B, a filter 116, a pressure regulator 120, a mass flow controller 124, at least one flow sensor 130, at least one temperature sensor 134, and at least one pressure sensor 136. Although not shown, the process fluid control components can also include a sampling port and other measurement sensors, such as an infrared sensor for detecting the composition of the process fluid.

[0021] In some embodiments, the set of inlet ports 110A can be attached to the upper portion of the mounting panel 105, although the set of outlet ports 110B can also be attached to the upper portion of the mounting panel. The set of inlet ports 110A and the set of outlet ports 110B can be attached such that the port connectors extend beyond the mounting panel 105 for easy access. The set of inlet ports can receive process fluid from the mounting panel 105, while the set of outlet ports can output process fluid from the mounting panel 105.

[0022] In some embodiments, the first cutout region 207 includes a protrusion 201A for mounting the temperature sensor 134 and a protrusion 201B for mounting the pressure sensor 138. In these embodiments, the number of vias 103 includes a first via 203A that communicates with the first cutout region 207, a first via 203A adapted to be in fluid communication with the temperature sensor 134, a second via 203B that communicates with the first cutout region 207, and a second via 203B adapted to be in fluid communication with the pressure sensor 138. Being in fluid communication can generally refer to being in contact with the process fluid. In some implementations, the sensing portion of the temperature sensor is inserted through the first via 203A, and the partial sensing of the pressure sensor 138 is inserted through the second via 203B. In this way, the temperature sensor 134 and the pressure sensor 138 are in fluid communication with the process fluid contained in the reservoir and can detect the temperature and pressure of the process fluid within the reservoir.

[0023] In various embodiments, different vias among a number of vias 103 communicate with each respective channel of a number of channels 209, and each via is adapted to be in fluid communication with one of inlet ports 110A, flow sensor 130, pressure regulator 120, filter 116, one of valves 114A, 114B, or one of outlet ports 110B. In this way, process fluid can flow through one of a number of possible process fluid paths, for example, starting at inlet port 110A, flowing through a first channel, flowing from the first channel into valve 114A, flowing from valve 114A into a second channel, flowing from the second channel into pressure regulator 120 or filter 116, flowing from pressure regulator 120 or filter 116 into a third channel, and flowing from the third channel into a reservoir or mass flow controller 124. Reservoir or mass flow controller 124 can further control the process fluid as the process fluid further flows into a fourth channel, where the process fluid flows from the fourth channel into valve 114B, from valve 114B the process fluid flows into a fifth channel, and from the fifth channel the process fluid flows out through outlet port 110B. These are some of the possible flow paths when the process fluid flows from left to right in FIG. 1C, for example, from inlet port 110A to outlet port 110B, although different process fluid control components, or different configurations of the same process fluid control components, are envisioned for different paths.

[0024] FIG. 4 is a schematic process diagram of a process fluid supply system 400 according to an embodiment of the present disclosure. The process fluid supply system 400 includes some of the same or similar process fluid control components that can be connected through a number of vias 103 and a number of channels 209 and 309 as shown in FIGS. 1A-1C. For example, the process fluid supply system 400 includes a set of inlet ports 410A, at least one outlet port 410B, a number of valves 414A coupled to the inlet ports 410A, and a number of filters 416 coupled to the number of valves 414A. In some process fluid paths, a pressure regulator 420 is inserted between the valve 414A and the filter 416.

[0025] In one embodiment, an additional channel 450, which can be one of the number of channels 309, is connected between two of the number of channels 209 and includes one or more additional valves 414A in fluid communication with the additional channel 450. The additional channel 450 can enable selective cross-mixture of the process fluid between two of the number of channels 209. Further, for example, one of the number of channels 309 can be coupled between at least two of the valves 414B leading to the outlet port 110B to selectively cross-mix the process fluid and / or share the outlet port 110B for flowing the process fluid from the mounting panel 105.

[0026] Referring further to FIG. 4, each of the set of mass flow controllers 424 can be coupled to one of the filters 416. As previously explained, instead of the mass flow controller 424, a reservoir 421 can be formed in the mounting panel 105. Since the mass flow controller is much larger, requires electronics and electrical control, and is more expensive, by adopting an integrated feature for forming the reservoir 421 within the mounting panel 105, this cost can be saved, as well as the previous space required for the fluid control panel. In some embodiments, instead of the reservoir 421, one or more of the widths of one or more of the plurality of channels 209 or 309 can be increased and the length shortened. Such a modified channel or set of channels can still provide a location for containing the process fluid under specific temperatures and pressures while providing a higher supply pressure of the process fluid. For example, one or more valves can be employed at the inlet and / or outlet of the modified channel to control the flow into and out of the modified channel that would replace the reservoir.

[0027] In some embodiments, each of the set of valves 414B can be connected between any one of the reservoir 421, one of the mass flow controllers 424, or one of the flow rate sensors 430, and one of the outlet ports 410B. As can be seen in FIG. 4, a number of flow control paths can be configured within the process fluid supply system 400. For example, a number of orifices 101 can be employed to change the design and set of process fluid control components mounted to and integrated with the mounting panel 105 to generate different process fluid supply systems.

[0028] FIG. 5 is a cross-sectional view of a process fluid supply system 100 showing a process flow sensor 130 according to an embodiment of the present disclosure. As shown, the flow sensor 130 can be disposed within a larger or rectangular via 103B as shown in FIG. 1A. The protruding portion 530 of the flow sensor 130 can be the portion of the flow sensor 130 that actually passes inside the channel 109 to detect the flow rate of the process fluid within the channel 109.

[0029] In some embodiments, the process fluid supply system 100 further includes a first inlet port of a set of inlet ports 110A that is mounted to the upper portion of the mounting panel 105 and is in fluid communication with a first channel 105A of a plurality of channels 209 through a third via of the plurality of vias 103. A valve 114A can be mounted to the upper portion of the mounting panel 105, the valve being in fluid communication with a first channel 509A through a fourth via of the plurality of vias and also in fluid communication with a second channel 509B of the plurality of channels 209 through a fifth via of the plurality of vias 103.

[0030] Furthermore, a filter 116 can be mounted to the upper portion of the mounting panel 105, the filter being in fluid communication with the second channel 509B through a sixth via of the plurality of vias 103 and also in fluid communication with a third channel 509C that is also in fluid communication with the flow sensor 130. In these embodiments, the flow sensor 130 is mounted to the upper portion of the mounting panel 105, and the flow sensor 130 is in fluid communication with a third channel 509A of a plurality of channels 209 through a seventh via of the plurality of vias 103, for example, through a rectangular via 103B. The flow sensor 130 can sense the flow rate of the process fluid passing through the first channel 509A. Another valve 114B is mounted to the mounting panel 105 and is in fluid communication with the third channel 509C and can be in fluid communication with a channel 509D of a plurality of channels 309 that can convey the process fluid to another valve of the valves 114B.

[0031] FIG. 6 is a cross-sectional view of a set of valves 114B attached to mounting panel 105 showing interconnect channels according to one embodiment. As shown, each valve 114B is connected to one of a number of channels 109 formed in upper plate 102, although some of the valves 114B are also connected to one of a number of channels 309 formed in inner plate 104. These numerous channels 309 cross-connect some of the valves 114B for cross-mixing process fluids and / or for sharing outlet port 110B.

[0032] FIG. 7 is a cross-sectional view of a reservoir 721 and process fluid control components in the path to the reservoir 721 according to one embodiment of the present disclosure. As described with reference to FIGS. 1A-1C and FIG. 2, the first cutout 207 in upper plate 102 and the second cutout 107 in inner plate 106 can be combined within mounting panel 105 to correspond, thereby forming reservoir 721. Further, a temperature-controlled plate 760 can be attached to the bottom of mounting panel 105, for example, to the outer surface of bottom plate 106. This temperature-controlled plate 760 can be extremely thin and thus does not take up much space.

[0033] In various embodiments, the temperature-controlled plate 760 can be a heating plate, a cooling plate, or a combination thereof, designed to apply one of heat or cooling to the mounting panel 105. In some embodiments, the temperature-controlled plate 760 is also diffusion bonded to the outer surface of the bottom plate 106. In this way, since the mounting panel 105 is an integrated, diffusion-bonded set of metal plates, the process fluid flowing through the mounting panel 105 can be maintained at a consistent temperature and pressure without the cost and space of an external temperature unit such as an external heater unit and associated thermocouples. By keeping the process fluid at a consistent temperature and pressure, it can be ensured that the process fluid remains in a gaseous state for conveyance from the mounting panel 105 into one or more processing chambers or to other destinations. Through the use of the temperature sensor 134 and the pressure sensor 138, the control unit of the process fluid supply system 100 can track the temperature and pressure within the reservoir 721 and trigger adjustments in real time via the temperature-controlled plate 760 to maintain that consistent temperature and / or pressure, for example, despite environmental and / or component-related changes.

[0034] Referring further to FIG. 7, in one embodiment, a first inlet port of the set of inlet ports 110A is attached to the upper portion of the mounting panel 105 and is in fluid communication with a first channel 709A of the plurality of channels 209 through a second via of the plurality of vias 103. Further, a valve 114A can be attached to the upper portion of the mounting panel 105. The valve 114A is in fluid communication with the first channel 709A through a third via of the plurality of vias 103 and can be in fluid communication with a second channel 709B of the plurality of channels 209 through a fourth via of the plurality of vias 103. A pressure regulator 120 can be attached to the upper portion of the mounting panel 105. The pressure regulator 120 is in fluid communication with the second channel 709B through a fifth via of the plurality of vias 103 and is in fluid communication with a third channel 709C of the plurality of channels 209 through a sixth via of the plurality of vias 103. In this embodiment, the third channel 709C is one of a pair of the plurality of channels, for example, the first channel 209A (FIG. 2).

[0035] In one embodiment, a valve 114B can be attached to the upper portion of the mounting panel 105, and the valve is in fluid communication with a fourth channel 709D of the plurality of channels 209 through a sixth via of the plurality of vias 103 and is in fluid communication with a fifth channel 709E of the plurality of channels 209 through a seventh via of the plurality of vias 103. In one embodiment, the fourth channel 709D is one of a pair of the plurality of channels, for example, the second channel 209B (FIG. 2). In one embodiment, the fifth channel 709E is in one of the plurality of channels 309 in the inner plate 104. At least one outlet port 110B is attached to the upper portion of the mounting panel 105 and is in fluid communication with the fifth channel 709E. In related embodiments, the valve 114B is a dosing valve that can be variably controlled to regulate the flow rate of the process fluid through the valve 114B, or the third channel 709C is a different size than the second channel 709B or the first channel 709A.

[0036] FIG. 8 is a cross-sectional view of mounting panel 105 generally along an intermediate line of the mounting panel, according to one embodiment. This cross-sectional view has some features already shown and described within mounting panel 105, but in one embodiment, a second via 803B of a number of vias 103 can pass through upper plate 102 and inner plate 104 to channel 309 of inner plate 104 (FIG. 3), while a first via 803A of the number of vias 103 shows how it can pass through upper plate 102 to channel 209 of upper plate 102 (FIG. 2). In this way, various vias in upper plate 102 and inner plate 104 (or other intermediate plates) can communicate with one of a combination of a number of channels 209 and a number of channels 309. By building those functions into the mounting panel, it will be apparent to those skilled in the art that additional intermediate plates can include additional channels and vias to construct a more complex 3D mounting panel including additional reservoirs and channels to replace even more of the mass flow controller and other control valves.

[0037] FIG. 9 is a flowchart of a method 900 for operating a process fluid supply system including a diffusion-bonded mounting panel, according to various embodiments of the present disclosure. For example, process fluid supply system 100 may include a mounting panel that forms a reservoir for containing process fluid, a number of channels for flowing process fluid, and a number of vias between an upper portion of the mounting panel and the reservoir and between the upper portion of the mounting panel and the number of channels. The process fluid supply system can further include a pressure sensor mounted to an upper portion of the mounting panel and in fluid communication with the reservoir. Additionally, process fluid supply system 100 can include a temperature sensor mounted to an upper portion of the mounting panel and in fluid communication with the reservoir.

[0038] In operation 910, the system flows process fluid through a first channel of a number of channels from an inlet port.

[0039] In operation 920, the system flows process fluid from a first channel, through a first valve, into a second channel of a number of channels. In some embodiments, the system flows process fluid directly from the second channel into a reservoir. In other embodiments, the process fluid also optionally flows through a pressure regulator before flowing into the reservoir, which is operation 930.

[0040] In operation 930, the system flows process fluid from the second channel, through a pressure regulator, into a third channel of a number of channels, where the third channel is in fluid communication with the reservoir.

[0041] In operation 940, the system uses a pressure sensor to determine the pressure of the process fluid within the reservoir.

[0042] In operation 950, the system further uses a temperature sensor to determine the temperature of the process fluid within the reservoir.

[0043] In operation 960, the system flows process fluid from the reservoir into a fourth channel of a number of channels.

[0044] In operation 970, the system flows process fluid from the fourth channel, through a second valve, into a fifth channel of a number of channels.

[0045] In operation 980, the system adjusts the flow rate of the process fluid through the second valve based on the temperature and pressure of the process fluid within the reservoir.

[0046] In operation 990, the system discharges process fluid from the fifth channel through an outlet port. In various embodiments, operations 950 - 990 are optional.

[0047] The preceding description has set forth numerous specific details, such as examples of specific systems, components, methods, etc., to provide a thorough understanding of some embodiments of the present disclosure. However, it will become apparent to those skilled in the art that at least some embodiments of the present disclosure can be practiced without these specific details. In other instances, well-known components or methods are not described in detail or are presented in a simplified block diagram format to avoid unnecessarily obscuring the present disclosure. Accordingly, the specific details described are merely examples. Individual implementations may vary from these exemplary details and are still intended to be within the scope of the present disclosure.

[0048] References throughout this specification to "one embodiment" or "an embodiment" mean that a particular feature, structure, or characteristic described in connection with that embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the term "or" is intended to mean an inclusive "or" rather than an exclusive "or". When the terms "about" or "approximately" are used in this specification, this means that the stated nominal value is accurate within ±10%.

[0049] The operations of the methods illustrated and described herein in a particular order, but the order of the operations of each method can be changed so that some operations can be performed in a reverse order and some operations can be executed at least partially concurrently with other operations. In another embodiment, the instructions or sub-operations of the separate operations can be in an intermittent and / or alternating manner.

[0050] It should be understood that the above description is illustrative and not restrictive. Upon reading and understanding the above description, many other embodiments will be apparent to those skilled in the art. The scope of the present disclosure should, therefore, be determined with respect to the appended claims, along with the full scope of equivalents to which such claims are entitled.

Claims

1. An apparatus comprising: a mounting panel, wherein the mounting panel is an upper plate having a plurality of vias and a plurality of orifices, an inner surface of the upper plate including a first cutout region and a plurality of channels for flowing a process fluid, the first cutout region including a reservoir for containing the process fluid therein, the plurality of vias being adapted to pass the process fluid through the upper plate, and the plurality of orifices being adapted to attach a plurality of process fluid control components to the mounting panel, the upper plate; an inner plate having a similar plurality of additional vias; and a bottom plate, wherein the inner plate is compressed between the upper plate and the bottom plate to form an integral metal body for containing the process fluid therein and for flowing the process fluid, wherein the plurality of vias are a first via communicating with the first cutout region and adapted to be in fluid communication with a temperature sensor, or a second via communicating with the first cutout region and adapted to be in fluid communication with a pressure sensor including; the apparatus.

2. The apparatus according to claim 1, wherein an inner surface of the inner plate also includes a plurality of channels for flowing a process fluid, the inner plate also has a second cutout region, and the first cutout region and the second cutout region correspond to form the reservoir.

3. The apparatus according to claim 1, wherein the upper plate, the inner plate, and the bottom plate are diffusion-bonded metal plates, and the inner surface of the upper plate further includes one or more grooves for at least facilitating inspection of leak integrity of the diffusion-bonded metal plates.

4. The apparatus of claim 1, wherein the plurality of channels includes a first channel that communicates with the reservoir from a first side of the reservoir and a second channel that exits from a second side of the reservoir, and the plurality of vias includes at least one precisely sized via that is located at an exit of the second channel and is designed to control a flow rate of the process fluid exiting the reservoir.

5. The apparatus of claim 1, wherein the plurality of vias includes a via that communicates with one of the plurality of channels and is adapted to be in fluid communication with one of a flow rate sensor, a pressure regulator, a filter, or a valve.

6. The apparatus of claim 1, wherein at least some of the plurality of vias have different sizes to produce different flow rates of the process fluid through the mounting panel.

7. A mounting panel comprising a plurality of diffusion bonded metal plates, a reservoir for containing a process fluid, a plurality of channels for flowing the process fluid, at least one pair of the plurality of channels being connected to the reservoir, a plurality of vias for flowing the process fluid between the mounting panel and a process fluid control component attached to the mounting panel, and a mounting panel forming the same, a temperature sensor attached to an upper portion of the mounting panel and in fluid communication with the reservoir through one of the plurality of vias, a set of inlet ports attached to the mounting panel for receiving the process fluid, at least one outlet port attached to the mounting panel for outputting the process fluid from the mounting panel, The first inlet port of the set of inlet ports, which is attached to the upper part of the mounting panel and is in fluid communication with the first channel of the plurality of channels through the second via of the plurality of vias; A valve attached to the upper part of the mounting panel, Which is in fluid communication with the first channel through the third via of the plurality of vias and, With the second channel of the plurality of channels through the fourth via of the plurality of vias, A valve in fluid communication; A pressure regulator attached to the upper part of the mounting panel, Which is in fluid communication with the second channel through the fifth via of the plurality of vias and, With the third channel of the plurality of channels through the sixth via of the plurality of vias, Wherein the third channel is one of the pair of the plurality of channels, a pressure regulator; A system comprising. **Claim 8**: A mounting panel comprising a plurality of diffusion-bonded metal plates, A reservoir for containing a process fluid, A plurality of channels for flowing the process fluid, at least one pair of the plurality of channels being connected to the reservoir, a plurality of channels; A plurality of vias for flowing the process fluid between the mounting panel and a process fluid control component attached to the mounting panel; A mounting panel forming; A temperature sensor attached to the upper part of the mounting panel, which is in fluid communication with the reservoir through one of the plurality of vias, a temperature sensor; A set of inlet ports attached to the mounting panel for receiving the process fluid, a set of inlet ports; At least one outlet port attached to the mounting panel, the at least one outlet port for outputting the process fluid from the mounting panel. A valve attached to the upper portion of the mounting panel, Through a seventh via of the plurality of vias, a fifth channel of the plurality of channels, which is one of the pair of the plurality of channels, and, A fourth channel of the plurality of channels through a sixth via of the plurality of vias In fluid communication with, comprising a valve. A system in which the at least one outlet port is attached to the upper portion of the mounting panel and is in fluid communication with the fifth channel. Claim 9 The valve is a dosing valve that is variably controllable to adjust the flow rate of the process fluid through the valve, or The size of a third channel of the plurality of channels is different from the size of a first channel or a second channel of the plurality of channels At least one of which is the system according to claim 8. Claim 10 A mounting panel comprising a plurality of diffusion-bonded metal plates, A reservoir for containing a process fluid, A plurality of channels for flowing the process fluid, at least one pair of the plurality of channels being connected to the reservoir, A plurality of vias for flowing the process fluid between the mounting panel and a process fluid control component attached to the mounting panel Forming a mounting panel, A temperature sensor attached to the upper portion of the mounting panel, the temperature sensor being in fluid communication with the reservoir through one of the plurality of vias. A set of inlet ports attached to the mounting panel, for receiving the process fluid, the set of inlet ports; At least one outlet port attached to the mounting panel, for outputting the process fluid from the mounting panel, at least one outlet port; And a flow sensor attached to the upper part of the mounting panel. The flow sensor is in fluid communication with a third channel among the plurality of channels through a seventh via among the plurality of vias, and the flow sensor is for sensing the flow rate of the process fluid passing through the third channel; A first inlet port among the set of inlet ports, attached to the upper part of the mounting panel and in fluid communication with a first channel among the plurality of channels through a third via among the plurality of vias; A valve attached to the upper part of the mounting panel, Through a fourth via among the plurality of vias with the first channel, and Through a fifth via among the plurality of vias with a second channel among the plurality of channels In fluid communication, the valve; A filter attached to the upper part of the mounting panel, Through a sixth via among the plurality of vias with the second channel, and Also in fluid communication with the third channel that is in fluid communication with the flow sensor In fluid communication, the filter And further comprising a system.

11. The system according to claim 7, 8 or 10, further comprising a pressure sensor attached to the upper part of the mounting panel, and the pressure sensor is in fluid communication with the reservoir through a second via among the plurality of vias.

12. The mounting panel is sized and adapted to attach process fluid control components to the mounting panel, and further includes a plurality of orifices, the process fluid control components comprising at least the temperature sensor, the set of inlet ports, and the at least one outlet port, the system of claim 7, 8, or 10.

13. The plurality of diffusion-bonded metal plates An upper plate having the plurality of vias and the plurality of orifices, an inner surface of the upper plate including a first cutout region and the plurality of channels, the plurality of vias being sized and adapted to pass the process fluid, the upper plate, An inner plate having some of the plurality of vias and a second cutout region, the first cutout region and the second cutout region forming the reservoir, the inner plate, A bottom plate, and the inner plate is compressed between the upper plate and the inner plate to form an integral metal body for containing and flowing the process fluid therein, the system of claim 12.

14. Further comprising a temperature-controlled plate attached to the bottom of the mounting panel, the temperature-controlled plate being for applying one of heat or cooling to the mounting panel, the system of claim 7, 8, or 10.

15. A method of operating a process fluid supply system comprising a mounting panel, the mounting panel forming a reservoir for containing a process fluid, a plurality of channels for flowing the process fluid, and a plurality of vias between an upper portion of the mounting panel and the reservoir and between the upper portion of the mounting panel and the plurality of channels, the system further comprising a pressure sensor attached to an upper portion of the mounting panel and in fluid communication with the reservoir, Flowing the process fluid from the inlet port through a first channel among the plurality of channels; Flowing the process fluid from the first channel through a first valve into a second channel that is in fluid communication with the reservoir among the plurality of channels; Using the pressure sensor to determine the pressure of the process fluid in the reservoir; Flowing the process fluid from the reservoir into a third channel among the plurality of channels; Using a temperature sensor to determine the temperature of the process fluid in the reservoir; Flowing the process fluid from a fourth channel through a second valve into a fifth channel among the plurality of channels; Adjusting the flow rate of the process fluid passing through the second valve based on the temperature and the pressure of the process fluid in the reservoir A method of operating a process fluid supply system, comprising the above steps.

16. The method according to claim 15, wherein the temperature sensor is mounted on the upper part of the mounting panel of the process fluid supply system and is in fluid communication with the reservoir.

17. The method according to claim 15, further comprising flowing the process fluid from the second channel through a pressure regulator into a third channel among the plurality of channels, wherein the third channel is in fluid communication with the reservoir.

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