Measuring apparatus and measuring method for measuring magnetic permeability and dielectric constant

Abstract

Provided is a measurement device for measuring the magnetic permeability and the dielectric constant of an electromagnetic material as an object to be measured. This measurement device for measuring the magnetic permeability and the dielectric constant of an object to be measured that is an electromagnetic material comprises: a probe in which a signal transmission line is formed, it being possible to position an object to be measured near or in contact with the signal transmission line; a magnetic field application part for applying a magnetic field to the object to be measured; a signal measuring instrument for measuring a signal transmitted through the signal transmission line in each of the presence and absence of placement of the object to be measured in the signal transmission line and the presence and absence of application of a magnetic field by the magnetic field application part; a magnetic permeability processing means for determining the magnetic permeability of the object to be measured on the basis of a signal transmitted through the signal transmission line in each of the presence and absence of application of a magnetic field by the magnetic field application part; and a dielectric constant processing means for determining the dielectric constant of the object to be measured on the basis of a signal transmitted through the signal transmission line in each of the presence and absence of placement of the object to be measured in the signal transmission line.

Description

Technical Field

[0001] The present invention relates to a measuring device and a measuring method for measuring the magnetic permeability and dielectric constant of a measurement object which is an electromagnetic material.

Background Art

[0002] Many methods for measuring the high-frequency magnetic permeability (usually several 100 kHz to several GHz) of electromagnetic materials have been proposed since the 1950s, and all of them are reduced to methods using coils (or antennas) (for example, see Non-Patent Documents 1 to 3) or methods using transmission lines, waveguides, etc. (for example, see Non-Patent Document 4).

[0003] In recent years, the present inventor has already published a paper for obtaining the magnetic permeability from the impedance of a fine strip thin film having a width of about 100 μm (for example, see Non-Patent Document 5). Further, in Patent Document 1, a measuring method applicable to electromagnetic materials of any size, not limited to strips, is disclosed. Further, in Patent Document 2, a method for evaluating the magnetic permeability by arranging a meander-shaped probe close to an electromagnetic material is disclosed. In Patent Document 3, a technique for measuring the magnetic permeability by bringing the linear portion of a linear microstrip conductor composed of one linear portion close to an electromagnetic material with an insulator interposed therebetween is disclosed. Further, in Patent Document 4, a technique for measuring the magnetic permeability by closely arranging an electromagnetic material (electromagnetic material) to be measured on a probe in which a flexible dielectric is arranged between a microstrip conductor and a ground conductor is disclosed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Non-Patent Literature

[0005]

Non-Patent Literature 1

Non-Patent Literature 2

Non-Patent Literature 3

Non-Patent Literature 4

Non-Patent Literature 5

Summary of the Invention

Problems to be Solved by the Invention

[0006] In recent years, in the development of electromagnetic materials corresponding to high frequencies of, for example, several GHz to several tens of GHz, not only the high-frequency magnetic properties of electromagnetic materials but also the magnetic and electrical properties and other property analyses of electromagnetic materials that are both electromagnetic materials and have dielectric properties at the same time have been advanced. In particular, a technique for measuring both the magnetic permeability and the dielectric constant of electromagnetic materials such as so-called radio wave absorbers or shielding materials at high frequencies is required.

[0007] Therefore, an object of the present invention is to provide a measuring apparatus and a measuring method capable of measuring both the magnetic permeability and the dielectric constant of an electromagnetic material to be measured.

Means for Solving the Problems

[0008] The configuration of the measuring apparatus of the present invention for achieving the above object is a measuring apparatus for measuring the magnetic permeability and the dielectric constant of an object to be measured which is an electromagnetic material, comprising a signal transmission line being formed, a probe which can be disposed in proximity to or in contact with the object to be measured on the signal transmission line, a magnetic field applying unit for applying a magnetic field to the object to be measured, a signal measuring device for measuring a signal transmitted through the signal transmission line in each case of the presence or absence of the object to be measured disposed on the signal transmission line and the presence or absence of the magnetic field applied by the magnetic field applying unit, a magnetic permeability processing means for obtaining the magnetic permeability of the object to be measured based on the signal transmitted through the signal transmission line in each case of the presence or absence of the magnetic field applied by the magnetic field applying unit, and a dielectric constant processing means for obtaining the dielectric constant of the object to be measured based on the signal transmitted through the signal transmission line in each case of the presence or absence of the object to be measured disposed on the signal transmission line.

[0009] The measuring method of the present invention includes a probe in which a signal transmission line is formed and an object to be measured can be disposed in proximity to or in contact with the signal transmission line, a magnetic field applying unit for applying a magnetic field to the object to be measured, a signal measuring device for measuring a signal transmitted through the signal transmission line in each case of the presence or absence of the object to be measured disposed on the signal transmission line and the presence or absence of the magnetic field applied by the magnetic field applying unit, and an arithmetic processing unit for acquiring the signal measured by the signal measuring device. The method measures the permeability and permittivity of the object to be measured, which is an electromagnetic material, by the measuring device. The arithmetic processing unit includes a step of obtaining the permeability of the object to be measured based on the signal transmitted through the signal transmission line in each case of the presence or absence of the magnetic field applied by the magnetic field applying unit, and a step of obtaining the permittivity of the object to be measured based on the signal transmitted through the signal transmission line in each case of the presence or absence of the object to be measured disposed on the signal transmission line.

[0010] Each step of the above measuring method is performed by an arithmetic processing unit, which is a computer device, executing a computer program. In the present invention, a computer program for implementing the above measuring method is provided.

Advantages of the Invention

[0011] According to the present invention, both the permeability and permittivity of an electromagnetic material to be measured can be measured. The permeability and permittivity of the electromagnetic material can be measured simultaneously and can be obtained with higher accuracy.

Brief Description of the Drawings

[0012]

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Embodiments for Carrying Out the Invention

[0013] Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, such example embodiments do not limit the technical scope of the present invention.

[0014] FIG. 1 is a diagram showing a configuration example of a permeability measuring apparatus according to an embodiment of the present invention. The permeability measuring apparatus according to the embodiment of the present invention includes a probe 10, a network analyzer 20 (signal measuring device), and an arithmetic processing unit (for example, a computer device such as a personal computer) 30 that executes numerical analysis processing.

[0015] The probe 10 is arranged to contact or be close to the electromagnetic material 1 of the sample (object to be measured), and is connected to a network analyzer (for example, N5227A manufactured by Agilent Technologies) 20 via a signal cable (for example, a coaxial cable) 3. The network analyzer 20, which is a current supply source, supplies a current signal to measure the transmission coefficient (S 21 ) of the electromagnetic material 1 of the object to be measured, takes in the signal data into an arithmetic processing unit (computer device) 30, and obtains the permeability (complex permeability) and permittivity (complex permittivity) of the electromagnetic material 1, which is the object to be measured, by performing predetermined numerical analysis processing. Further, a magnet (magnetic field applying unit) 40 composed of a Helmholtz coil (electromagnetic coil) that is energization-controlled to apply a magnetic field to the electromagnetic material 1 is used.

[0016] The arithmetic processing unit 30 functions as a permeability processing means for obtaining the high-frequency permeability of the electromagnetic material 1 and a permittivity processing means for obtaining the high-frequency permittivity, and executes an arithmetic processing program for calculating the permeability and permittivity. The arithmetic processing program is a computer program that executes the calculation processing of the permeability and permittivity described later. Table data used for the execution of the arithmetic processing program is stored in the storage means of the arithmetic processing unit 30. This table data is three-dimensional electromagnetic field analysis numerical data. Specifically, it is data showing the relationship between the inductance L and permeability μ and the relationship between the capacitance C and permittivity ε of the electromagnetic material 1 to be evaluated by simulation calculation using a known electromagnetic field analysis program, and is prepared in advance.

[0017] FIG. 2 is a diagram showing a first configuration example of the probe 10. FIG. 2(a) shows the form of the probe 10 of the first configuration example, and FIG. 2(b) is a diagram showing a state in which a sample is placed on the probe 10 of the first configuration example. As shown in FIG. 2(a), the probe 10 includes a microstrip conductor 11, a flexible substrate 12 (for example, polyimide substrate RBF-5 manufactured by Shin-Etsu Chemical Co., Ltd., relative dielectric constant = 3.5, thickness = 0.025 mm), a fluororesin substrate 13 (for example, CGK-500 manufactured by Chuo Kasei Kogyo Co., Ltd., relative dielectric constant = 5, thickness = 0.5 mm), a ground conductor 14, and a pair of connectors 15 connected to both ends of the microstrip conductor 11. Here, the microstrip conductor 11 is processed into a linear microstrip line by etching. The microstrip conductor 11 and the flexible substrate 12 are integrally fixed by chemical treatment or heat treatment. The ground conductor 14 is formed of, for example, copper foil. The configuration in which the flexible substrate 12 and the fluororesin substrate 13, which are dielectrics, are sandwiched between the microstrip conductor 11 and the ground conductor 14 forms a microstrip line.

[0018] As shown in FIG. 2(b), the electromagnetic material 1 to be measured is prepared by adhering to a planar substrate 17 and is arranged by applying pressure (not shown) from above so as to be close to or in contact with the microstrip conductor 11. Since the microstrip conductor 11 can be flexibly deformed, the microstrip conductor 11 and the electromagnetic material 1 can be arranged in close contact corresponding to the warp of the substrate 17.

[0019] FIG. 3 is a diagram showing a second configuration example of the probe 10. FIG. 3(a) shows the form of the probe 10 of the second configuration example, and FIG. 3(b) is a diagram showing a state in which a sample is placed on the probe 10 of the second configuration example. As shown in FIG. 3(a), the probe 10 includes a microstrip conductor 11 (width = 0.4 mm), a flexible substrate (sheet) 12 (for example, ROGERS duroid 5880 relative dielectric constant = 2.2, thickness = 0.127 mm), a ground conductor 14, and a pair of connectors 15 connected to both ends of the microstrip conductor 11. The connector 15 is connected to the signal cable 3 (FIG. 1). The microstrip conductor 11 and the flexible substrate 12 are integrally fixed by chemical treatment or heat treatment. In the second configuration example, the fluororesin substrate 13 in the first configuration example of FIG. 2 is omitted, and the flexible substrate 12 is pressed against the ground conductor 14 having a planar structure and a curved surface structure. Although the inside of the ground conductor 14 is described transparently for the purpose of explanation, it is actually made of a metal material such as copper. The microstrip conductor 4 is processed by etching. The microstrip conductor 11 is composed of a central linear portion 11a and curved portions 11b on both sides thereof. The end of the microstrip conductor 11 is electrically connected to the connector 15. The microstrip conductor 11 has a characteristic impedance matched to 50 Ω both in the linear portion 11a and the curved portion 11b. Similar to the configuration of FIG. 2, the configuration in which the flexible substrate 12, which is a dielectric, is sandwiched between the microstrip conductor 11 and the ground conductor 14 forms a microstrip line.

[0020] As shown in FIG. 3(b), the electromagnetic material 1 to be measured is prepared by adhering to a planar substrate 17 and is arranged by applying pressure (not shown) from above so as to be close to or in contact with the microstrip conductor 11.

[0021] The microstrip conductor 11 extends into the ground conductor 14 through an opening 14a provided in the ground conductor 14 and is connected to the connector 15 on the opposite side. For example, when a large-diameter electromagnetic material 1 and the substrate 17 are arranged in close proximity, measurement can be performed without colliding with the connector 15 or the signal cable 3 (FIG. 1) connected thereto.

[0022] The microstrip conductor 11 and the electromagnetic material 1 are either brought into direct contact or an insulator such as a resist is applied with a thickness of several microns therebetween for measurement. Alternatively, a jig for forming a gap is provided around the probe 10 so as to have a predetermined amount of gap, and the microstrip conductor 11 is disposed close to the electromagnetic material 1 for measurement. When the electromagnetic material 1 is an insulating thin film, the measurement S / N ratio is improved by bringing the microstrip conductor 11 and the electromagnetic material 1 into direct contact.

[0023] A procedure for measuring the magnetic permeability and dielectric constant of an electromagnetic material to be evaluated by the measuring apparatus provided with the probe 10 described above will be described below.

[0024] FIGS. 4 and 5 are flowcharts showing procedures for a method of measuring magnetic permeability and dielectric constant in an embodiment of the present invention. FIG. 4 is a flowchart showing a procedure for measuring magnetic permeability, and FIG. 5 is a flowchart showing a procedure for measuring dielectric constant. The procedures of FIGS. 4 and 5 can be carried out successively in the same measuring system, and the magnetic permeability and dielectric constant of the electromagnetic material to be evaluated can be measured continuously at the same timing in a measuring operation. First, a procedure for measuring the magnetic permeability of the electromagnetic material of the object to be measured is shown in FIG. 4.

[0025] In FIG. 4, the microstrip conductor 11 of the probe 10 is brought into contact with the electromagnetic material 1 to be evaluated (S100). Then, it is placed in the Helmholtz coil (magnetic field application unit) 40, and a strong DC magnetic field (for example, about 20 kOe) is applied to magnetically saturate the electromagnetic material 1, and the network analyzer 20 is calibrated (S102). By doing so, the electrical length of the probe 10 and the coaxial cable 3, the DC impedance of the electromagnetic material, non-magnetic signals, etc. are removed. By this calibration, measurement based on a state in which a predetermined magnetic field is applied to the object to be measured becomes possible.

[0026] Thereafter, the DC magnetic field is released, and the transmission coefficient (S 21Measure it (S104). After calibration by applying a magnetic field sufficient to magnetically saturate, stop applying the magnetic field and measure the transmission coefficient (S 21 ) to measure the transmission coefficient (S 21 ) contributed only by the electromagnetic material 1.

[0027] Based on the measured transmission coefficient (S 21 ), the magnetic permeability is obtained by the following arithmetic processing (S106). The arithmetic processing for obtaining the magnetic permeability is, for example, as follows.

[0028] (a1) For the electromagnetic material to be evaluated, using the computer device 30, perform a known electromagnetic field analysis process (for example, finite element method analysis), and obtain, as table data, the relationship between the magnetic permeability and the inductance for the electromagnetic material.

[0029] FIG. 6 is a diagram showing an example of data obtained by the electromagnetic field analysis process. FIG. 6(a) shows an example of a screen of the computer device 30 representing the magnetic field analysis diagram of the electromagnetic material, and FIG. 6(b) is an example of table data showing the relationship between the magnetic permeability μ (relative magnetic permeability μ r ) and the inductance L. By the finite element method analysis process, the inductance L when the magnetic permeability μ is changed can be obtained by calculation using Maxwell's equations. The table data showing the relationship between the magnetic permeability and the inductance is stored in advance in the storage means of the computer device 30. Also, the illustrated example of the measurement results is data obtained by the measurement work of the inventors, and the electromagnetic material to be measured is a powder resin composite sheet.

[0030] (a2) Convert the transmission coefficient (S 21 ) measured in step S104 into impedance Z by the following equation (1).

[0031]

Equation

[0032] (a3) Convert the obtained impedance Z into inductance L according to the following formula (2).

[0033]

Equation

[0034] (a4) Obtain the permeability μ corresponding to the calculated inductance L from the table data showing the relationship between permeability and inductance obtained by electromagnetic field analysis.

[0035] Figure 7 is a graph showing the permeability μ obtained by the process of step S106. The permeability (complex permeability) μ of the electromagnetic material 1 is expressed by the following formula (3), where μ' is the real part of the permeability and μ'' is the imaginary part of the permeability.

[0036]

Equation

[0037] First, calibrate the network analyzer 20 (S200). At this time, the electromagnetic material 1 of the object to be measured is not brought into contact with or close to the probe 10, and calibration is performed in a state where the object to be measured 1 is not present. No magnetic field is applied either. This calibration enables measurement based on a state where the object to be measured is not in contact with or close to the probe.

[0038] After calibration, bring the electromagnetic material 1 of the object to be measured into contact with or close to the microstrip conductor 11 of the probe 10 (S202). Then, apply a magnetic field by the magnetic field application unit 40 composed of Helmholtz coils, and in a state where the magnetic field is applied, measure the transmission coefficient (S 21 ) with the network analyzer 20 (S204). At this time, change and apply the magnetic field by the magnetic field application unit 40, and measure the transmission coefficient (S 21Measure it. The applied magnetic field is set to be different in a plurality of stages (for example, 10 or more stages), including the case where no magnetic field is applied (H = 0).

[0039] Based on a plurality of transmission coefficients (S 21 ) corresponding to magnetic fields of different strengths measured in step S204, the dielectric constant ε of the electromagnetic material 1 is calculated by the computer device 30 (S206). The specific process for calculating the dielectric constant is as follows, for example.

[0040] (b1) For the electromagnetic material to be evaluated, using the computer device 30, perform a known electromagnetic field analysis process (for example, finite element method analysis), and obtain, as table data, the relationship between the dielectric constant ε and the capacitance C for the electromagnetic material.

[0041] FIG. 8 is a diagram showing an example of data obtained by an electromagnetic field analysis process. FIG. 8(a) shows an example of a screen of the computer device 30 representing an electric field analysis diagram of the electromagnetic material, and FIG. 8(b) is an example of table data showing the relationship between the dielectric constant ε (relative dielectric constant ε r ) and the capacitance C. By the finite element method analysis process, the capacitance C when the dielectric constant ε is changed can be obtained by calculation using Maxwell's equations. The table data showing the relationship between the dielectric constant ε and the capacitance is stored in advance in the storage means of the computer device 30. Also, the illustrated example of the measurement results is data obtained by the measurement work of the inventors, and the electromagnetic material to be measured is a powder resin composite sheet, similar to the example of FIG. 6.

[0042] (b2) Convert the transmission coefficient (S 21 ) measured in step S204 into admittance Y by the following equation (4).

[0043]

Equation

[0044] (b3) Convert the obtained admittance Y into capacitance C according to the following equation (5).

[0045]

Equation

[0046] (b4) Obtain the permittivity ε corresponding to the obtained capacitance C based on the table data.

[0047] Figure 9 shows an example of the measurement results of the obtained permittivity ε (real part). In the measurement results shown in Figure 9, the values of the permittivity ε for the cases of magnetic field strengths (magnetic flux densities) of 6 mT, 1 T, and 2 T are exemplified. However, in the actual measurement by the inventors, the permittivity ε in the measurement with the magnetic field varied at narrower intervals (0.5 T) was calculated, and it was found that the permittivity ε varied depending on the applied magnetic field. Also, the magnetic field strength (magnetic flux density) of 6 mT detected a slight leakage magnetic field around, and no magnetic field was applied by the magnetic field application unit 40, which corresponds to the measurement in a substantially magnetic field-free state.

[0048] In electromagnetics, since the magnetic field and the electric field are orthogonal, it is considered that the permittivity ε representing the response characteristics of the electric field to the change in the magnetic field does not change. However, when the electromagnetic material has the characteristics of both a magnetic material and a dielectric, in the actual measurement system, it was found that the permittivity ε changes due to the change in the magnetic field. The reason is considered to be that the measured transmission coefficient (S 21 ) contains a signal component (magnetic signal) due to the magnetic field application, and the following process is executed to obtain a more accurate permittivity ε by removing the influence of the magnetic signal component.

[0049] (b5) For the permittivity ε obtained for each different magnetic field, in order to calculate the accurate permittivity ε with the influence of the magnetic field removed, obtain the permittivity ε(H = ∞) when the magnetic field strength is infinite (H = ∞) by extrapolation processing.

[0050] FIG. 10 is a diagram for explaining the extrapolation process of the permittivity ε. In FIG. 10, since the horizontal axis of the graph represents the reciprocal of the magnetic field strength (magnetic flux density B) and the vertical axis represents the permittivity ε, for example, the permittivity ε (H = ∞) at the left end of the graph is obtained by arithmetic processing using linear extrapolation or curve approximation. As a result, a more accurate permittivity ε with the magnetic field component removed can be obtained.

[0051] FIG. 11 is a graph showing the permittivity ε obtained in step S206. The permittivity (complex permittivity) ε of the electromagnetic material 1 is expressed by the following equation (6), where ε' is the real part of the permittivity and ε'' is the imaginary part of the permittivity.

[0052]

Equation

[0053] FIG. 12 is a flowchart showing another procedure of the method for measuring the permeability and permittivity in the embodiment of the present invention.

[0054] First, the network analyzer 20 is calibrated (S300). At this time, the electromagnetic material 1 of the object to be measured is not brought into close contact or proximity with the probe 10, and calibration is performed in a state where the object to be measured 1 is not present. No magnetic field is applied either.

[0055] After calibration, the electromagnetic material 1 of the object to be measured is brought into contact or proximity with the microstrip conductor 11 of the probe 10 (S302). Then, a magnetic field is applied by the magnetic field application unit 40 composed of a Helmholtz coil, and in a state where the magnetic field is applied, the transmission coefficient (S 21 ) is measured by the network analyzer 20 (S304). At this time, the magnetic field applied by the magnetic field application unit 40 is changed and applied, and the transmission coefficient (S 21Measure it. The applied magnetic field is set to be different in a plurality of stages (for example, 10 or more stages), including the case where no magnetic field is applied (H = 0).

[0056] FIG. 13 is a diagram showing an example of the measurement results of the transmission coefficient (S 21 ) when magnetic fields of different strengths are applied. FIG. 13(a) shows an example of the measurement results of the real part of the transmission coefficient (S 21 ), and FIG. 13(b) shows an example of the measurement results of the imaginary part of the transmission coefficient (S 21 ). In the measurement results of FIG. 13, the measured values of the transmission coefficient (S 21 ) in the cases of magnetic field strengths of 75 Oe, 4000 Oe, 12000 Oe, and 20000 Oe are illustrated. However, in the actual measurement by the inventors, the measurement was performed while varying the magnetic field at narrower intervals (2000 Oe). Also, the magnetic field strength of 75 Oe is the one that detected a slight leakage magnetic field around, and no magnetic field was applied by the magnetic field application unit 40, corresponding to the measurement in a substantially magnetic field-free state.

[0057] Using a plurality of transmission coefficients (S 21 ) corresponding to magnetic fields of different strengths measured in step S304, the computer device 30 calculates the transmission coefficient (S 21 (H = ∞)) when the magnetic field strength is infinite (H = ∞) (S306). The transmission coefficient (S 21 (H = ∞)) when the magnetic field strength is infinite (H = ∞) can be obtained by extrapolating the measured values of the plurality of transmission coefficients (S 21 ) with finite magnetic field strengths. The extrapolation process is the same as the process of (b5) described above. For example, by using an extrapolation operation process such as linear extrapolation or curve approximation, the transmission coefficient (S 21 ) measured at the finite magnetic field strength by the magnetic field application unit is extended to obtain the transmission coefficient (S 21 (H = ∞)) when the magnetic field strength is infinite (H = ∞).

[0058] FIG. 14 is a diagram showing an example of the measurement results of the transmission coefficient (S 21 (H = ∞)) when the magnetic field strength is infinite (H = ∞). FIG. 14(a) shows the transmission coefficient (S 21(H = ∞)) real part measurement result example, Figure 14(b) shows the transmission coefficient (S 21 (H = ∞)) imaginary part measurement result example. Superimposed on the graph of Figure 13, the transmission coefficient (S 21 (H = ∞) is shown by a thick dotted line.

[0059] When the magnetic field strength is infinite, the transmission coefficient (S 21 (H = ∞)) is obtained, the influence of the magnetic component is completely removed from the permittivity ε, and a more accurate permittivity ε can be calculated. Furthermore, compared with the permeability (for example, the process in Figure 4) obtained by calibration with the application of a magnetic field of finite strength, a higher-precision permeability μ can be calculated. 21 ) can be calculated.

[0060] Using the transmission coefficient (S 21 (H = ∞)) obtained in step S306, the permeability μ and permittivity ε of the electromagnetic material are calculated (S308). The permeability μ can be calculated by performing the arithmetic operations of the above processes (a1) to (a4) using the above equations (1), (2), and (3), and the permittivity ε can be calculated by performing the arithmetic operations of the above processes (b1) to (b4) using the above equations (4), (5), and (6).

[0061] Figure 15 is a graph showing an example of the measurement result of the permeability μ obtained by the process of step S308, where μ' is the real part of the permeability and μ'' is the imaginary part of the permeability. Also, Figure 16 is a graph showing an example of the measurement result of the permittivity ε obtained by the process of step S308, where ε' is the real part of the permittivity and ε'' is the imaginary part of the permittivity.

[0062] The signal transmission line configured in the probe 10 is not limited to the microstrip line shown in the above configuration example, and may be a configuration using, for example, a coplanar line or a coaxial line.

[0063] The present invention is not limited to the above-described embodiments, and of course, the present invention includes design changes within the scope not departing from the gist including various modifications and corrections that can be conceived by those having ordinary knowledge in the field of the invention.

Explanation of Reference Numerals

[0064] 1: Electromagnetic material (object to be measured), 3: Coaxial cable, 10: Probe, 11: Microstrip conductor, 12: Flexible substrate, 13: Fluororesin substrate, 14: Ground conductor, 14a: Opening, 15: Connector, 17: Substrate, 20: Network analyzer (signal measuring device), 30: Arithmetic processing unit, 40: Magnetic field applying unit

Claims

1. In a measuring device for measuring the magnetic permeability and dielectric constant of a measurement object which is an electromagnetic material, a signal transmission line is formed, a probe capable of being disposed in proximity to or in contact with the measurement object on the signal transmission line, a magnetic field application unit for applying a magnetic field to the measurement object, a signal measuring device for measuring a signal transmitted through the signal transmission line in each case of whether the measurement object is disposed on the signal transmission line and whether a magnetic field is applied by the magnetic field application unit, a magnetic permeability processing means for obtaining the magnetic permeability of the measurement object based on the signal transmitted through the signal transmission line in each case of whether a magnetic field is applied by the magnetic field application unit, a dielectric constant processing means for obtaining the dielectric constant of the measurement object based on the signal transmitted through the signal transmission line in each case of whether the measurement object is disposed on the signal transmission line, characterized in that the measuring device comprises the same.

2. The magnetic permeability processing means is characterized in that, based on the signal in a state where no magnetic field is applied by the magnetic field application unit, with reference to a state where a predetermined magnetic field is applied by the magnetic field application unit, the magnetic permeability is obtained, in the measuring device according to Claim 1.

3. The dielectric constant processing means is characterized in that, based on the signal in each case when the measurement object is disposed on the signal transmission line and a magnetic field of different intensities is applied by the magnetic field application unit, with reference to a state where the measurement object is not disposed on the signal transmission line, the dielectric constant of the measurement object corresponding to each magnetic field of different intensities is obtained, in the measuring device according to Claim 1 or 2.

4. The dielectric constant processing means is characterized in that, by extrapolating the dielectric constant of the measurement object obtained for each magnetic field of different intensities, the dielectric constant when the magnetic field is infinite is obtained, in the measuring device according to Claim 3.

5. The magnetic permeability processing means is characterized in that, based on the signal in each case when a magnetic field of different intensities is applied by the magnetic field application unit, with reference to a state where the measurement object is not disposed on the signal transmission line, the signal when the magnetic field is infinite is obtained, and based on the signal when the magnetic field is infinite, the magnetic permeability of the measurement object is obtained, in the measuring device according to Claim 1.

6. The dielectric constant processing means obtains the signal when the magnetic field is infinite based on each of the signals when magnetic fields of different strengths are applied by the magnetic field applying unit with the state where the object to be measured is not arranged on the signal transmission line as a reference, and obtains the dielectric constant of the object to be measured based on the signal when the magnetic field is infinite. The measuring device according to claim 1 or 5, characterized in that.

7. The measuring device according to any one of claims 1 to 6, characterized in that the signal transmission line is a microstrip line.

8. In a method for measuring the permeability and dielectric constant of the object to be measured, which is an electromagnetic material, by a measuring device including a probe in which a signal transmission line is formed and the object to be measured can be arranged in proximity to or in contact with the signal transmission line, a magnetic field applying unit for applying a magnetic field to the object to be measured, a signal measuring device for measuring the signal transmitted through the signal transmission line in each case of the presence or absence of the object to be measured arranged on the signal transmission line and the presence or absence of magnetic field application by the magnetic field applying unit, and an arithmetic processing unit for acquiring the signal measured by the signal measuring device, The step of the arithmetic processing unit obtaining the permeability of the object to be measured based on the signal transmitted through the signal transmission line in each case of the presence or absence of magnetic field application by the magnetic field applying unit; The arithmetic processing unit A measuring method, characterized by comprising a step of obtaining the dielectric constant of the object to be measured based on the signal transmitted through the signal transmission line in each case of the presence or absence of the object to be measured arranged on the signal transmission line.

9. A computer program for executing a method for measuring the permeability and dielectric constant of an object to be measured, which is an electromagnetic material, by a measuring device including a probe in which a signal transmission line is formed and the object to be measured can be arranged in proximity to or in contact with the signal transmission line, a magnetic field applying unit for applying a magnetic field to the object to be measured, a signal measuring device for measuring the signal transmitted through the signal transmission line in each case of the presence or absence of the object to be measured arranged on the signal transmission line and the presence or absence of magnetic field application by the magnetic field applying unit, and an arithmetic processing unit for acquiring the signal measured by the signal measuring device, The step of obtaining the permeability of the object to be measured based on the signal transmitted through the signal transmission line in each case of the presence or absence of magnetic field application by the magnetic field applying unit; A computer program, characterized in that the arithmetic processing unit is caused to execute a step of obtaining the dielectric constant of the object to be measured based on a signal transmitted through the signal transmission line in each case of whether or not the object to be measured is disposed on the signal transmission line.

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