Pump and air supply device

Abstract

A pump 1 has a pump part 80 that sucks in and discharges air by electromagnetic driving of a vibration actuator 10. The vibration actuator 10 includes: a stationary body 20 to which the pump part 80 is attached, the stationary body 20 including one of a coil core part 62 with a coil 50 wound around a core part 60, and a magnet 70 disposed to face an end of the core part 60; a movable body 30 including the other of the coil core part 62 and the magnet 70, and elastically held by a magnetic attractive force of the magnet 70; and a shaft part 40 supporting the movable body 30 so as to be reciprocally rotatable. The pump part 80 includes a movable wall 822 that is moved by a rotational movement of the movable body 30, and a sealed chamber 82 having a capacity that is changed by a displacement of the movable wall 822. The movable body 30 comes into contact with a movable wall 322, at a pressing part 35 that moves in an arc around the shaft part 40 with a reciprocal rotational motion of the movable body 30, presses the movable wall 322, and discharges air in the sealed chamber 82 through a discharge part 86.

Description

Cross - reference to related applications

[0001] This application claims priority based on Japanese Patent Application No. 2020 - 064594 filed on March 31, 2020 (invention name: "Pump and air supply device"), and further, the content of this Japanese patent application is incorporated herein by reference in its entirety.

Technical field

[0002] The present invention relates to a pump and an air supply device using a vibration actuator.

Background art

[0003] Conventionally, as pumps used in sphygmomanometers and the like, there are known a small pump using a rotary motor as shown in Patent Document 1, a pump using resonance of a motor as shown in Patent Document 2, or a pump using a piezoelectric element.

[0004] In the small pump of Patent Document 1, a plurality of diaphragms forming a pump chamber are provided in a case. An intake valve is provided in the pump chamber, and a cylindrical exhaust valve body is formed at the central portion of the pump chamber. The plurality of diaphragms are connected to a swing body that swings by an eccentric rotating shaft, and move up and down by the swing of the swing body. The eccentric rotating shaft is fixed in an eccentric state to a disk portion fixed to the rotating shaft of a DC motor disposed below it. In this pump, the rotation of a DC motor that performs normal rotation about an axis is converted into a rubbing motion using the eccentric rotating shaft and the swing body, and the diaphragm is moved up and down.

[0005] Also, the pump of Patent Document 2 is a reciprocating motion motor having a cylindrical shape, and both the fixed part and the movable part have magnets, and is driven using a resonance phenomenon to perform air intake and exhaust. In a pump using a piezoelectric element, the diaphragm is reciprocated by the piezoelectric element, and air intake and exhaust can be repeated through a valve that switches between inhalation and exhalation.

Prior art documents

Patent documents

[0006]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0007] By the way, there is a need to apply the above-described pump to a device that is used daily, such as a sphygmomanometer. Therefore, a higher-performance pump that is thinner and can increase the flow rate and pressure is desired.

[0008] However, the rotary motor used in the pump of Patent Document 1 has a problem that although it is easy to increase the output power, when trying to make it thinner, the magnetic efficiency deteriorates structurally and the characteristics are greatly degraded. In addition, the pump of Patent Document 2 has a problem that it is difficult to make it thinner because of its cylindrical shape.

[0009] Also, a pump using a piezoelectric element is easy to miniaturize, but there is a problem that the vibration displacement amount of the piezoelectric element is small, and furthermore, the pressure characteristics or flow rate characteristics of the pump are limited, and it is very difficult to achieve both a desired pressure and a flow rate.

[0010] The present invention has been made in view of such points, and an object thereof is to provide a high-performance pump and an air supply device that can be made thinner and ensure a high discharge pressure and a large transport flow rate.

Means for Solving the Problems

[0011] Such an object is achieved by the following present invention (1) to (13). (1) An electromagnetic drive vibration actuator, and a pump section that sucks and discharges fluid by electromagnetic driving of the vibration actuator, and the vibration actuator is It includes one of a coil and a coil core part having a core part around which the coil is wound, and a fixed body provided with the pump part, which is arranged opposite to an end part of the core part; It includes the other of the coil core part and the magnet, and a movable body elastically held by the magnetic attraction force of the magnet; It has a shaft part that rotatably supports the movable body back and forth; and has; The pump part has; a movable wall movable by the rotational movement of the movable body; a sealed chamber that communicates with a fluid discharge port and a fluid suction port and whose volume is changed by the displacement of the movable wall; and has; The movable body has a pressing part that moves in an arc shape around the shaft part as the movable body reciprocally rotates, and abuts against and presses the movable wall. and an arm portion provided to extend in a direction orthogonal to the axial direction of the shaft portion from a portion pivotally supported by the shaft portion so as to be reciprocally rotatable; and has; The arm portion has a round hole penetrating the arm portion in the axial direction of the shaft portion, and a long hole penetrating the arm portion in the axial direction of the shaft portion and further elongated in the direction orthogonal to the axial direction of the shaft portion; The pressing portion has a shaft protrusion axially attached to the round hole of the arm portion and a guide protrusion loosely fitted to the long hole of the arm portion; The pressing portion linearly presses the movable wall as the movable body reciprocally rotates; The movable wall is arranged in the moving direction of the pressing part, and when pressed by the pressing part, it is displaced to discharge the fluid in the sealed chamber through the discharge port. The pump is characterized by this. Linearly

[0012] (2 ) Before Two sealed chambers are provided. The two sealed chambers are arranged opposite to each other at positions where the arm part is sandwiched in the reciprocating rotation direction by the arm part. The pressing part has a pair of pressing elements corresponding to the pair of movable walls. Each of the movable walls of the sealed chamber is pressed by the pressing element when the arm part reciprocally rotates. The pump according to (1) above. Linearly

[0013] (3) The movable body is The portion pivotally supported by the shaft portion so as to be reciprocally rotatable from the The axial direction of the shaft part The in a direction perpendicular to the axial direction, a pair of The ​​having an arm portion, at each tip of the arm portion, the other of the coil core portion and the magnet is provided, The the other is provided, on the fixed body, the one of the coil core portion and the magnet is provided facing the other of the coil core portion and the magnet, a pair of the sealed chambers is provided, the pair of sealed chambers is arranged in parallel along the extending direction of the pair of arm portions, the pressing portion has a pair of pressing elements corresponding to the pair of movable walls, each of the movable walls of the sealed chamber is pressed by the pressing portion when the arm portion reciprocates and rotates, Linearly the pump according to (1) above.

[0014] (4) In the pump according to (3) above, the discharge ports of the pair of sealed chambers are connected to each other.

[0015] (5) The pressing element is connected to the movable wall, and the pump according to any one of (2) to (4) above.

[0016] (6) The magnet is provided on one of the movable body and the fixed body, and forms a magnetic spring with the core portion of the coil core portion provided on the other of the movable body and the fixed body, and the pump according to any one of (1) to (5) above.

[0017] (7) The magnet is magnetized to three poles, the core portion of the coil core portion has one coil wound around it and has two magnetic poles facing the magnet in the magnetization direction of the magnet, and the pump according to any one of (1) to (6) above.

[0018] (8) The magnet is magnetized to four poles, The core part of the coil core part has three magnetic poles around which one of the coils is wound and which face the magnet in the magnetization direction of the magnet, and is the pump according to any one of (1) to (6) above.

[0019] (9) The magnet is magnetized to have four poles. The core part of the coil core part has three magnetic poles around which three of the coils are respectively wound and which face the magnet in the magnetization direction of the magnet, and is the pump according to any one of the above (1) to (6).

[0020] (10) The movable body is pivotally supported at one end by the shaft portion so as to be reciprocally rotatable, and has the other one of the coil core part and the magnet on the other end side. The fixed body has one of the coil core part and the magnet that faces the other one in a direction orthogonal to the rotation axis of the movable body. The magnet is magnetized to have two poles, and is the pump according to any one of (1) to (6) above.

[0021] (11) The core part has three magnetic poles around which one of the coils is wound, and is the pump according to (10) above.

[0022] (12) The movable body is pivotally supported at one end by the shaft portion so as to be reciprocally rotatable, and further includes the coil core part. The fixed body includes the magnet that faces the coil core part in a direction orthogonal to the rotation axis of the movable body, and is the pump according to (1) or (2) above.

[0023] (13) An air supply device characterized by including the pump according to any one of (1) to (12) above.

Advantages of the Invention

[0024] According to the present invention, it is possible to provide a pump that can ensure a thinner shape, a high discharge pressure, and a large conveyance flow rate.

Brief Description of the Drawings

[0025] [[Figure 1]] Figure 1 is an external perspective view of a pump according to the first embodiment of the present invention. [[Figure 2]] Figure 2 is a plan view showing the main part configuration of a pump according to the first embodiment of the present invention. [[Figure 3]] Figure 3 is an exploded perspective view of a pump according to the first embodiment of the present invention. [[Figure 4]] Figure 4 is a perspective view of a coil core portion in a pump according to the first embodiment of the present invention. [[Figure 5]] Figure 5 is a perspective view of a movable body in a pump according to the first embodiment of the present invention. [[Figure 6]] Figure 6 is a cross-sectional plan view showing the internal configuration of a pump according to the first embodiment of the present invention. [[Figure 7]] Figure 7 is an exploded perspective view of a pump portion in a pump according to the first embodiment of the present invention. [[Figure 8]] Figure 8 is a view showing an air flow path of a pump portion of a pump according to the first embodiment of the present invention. [[Figure 9]] Figures 9A and 9B are views showing the discharge and suction operations of air in a pump according to the first embodiment of the present invention. [[Figure 10]] Figure 10 is a view showing a magnetic spring of a pump according to the first embodiment of the present invention. [[Figure 11]] Figure 11 is a view showing a magnetic circuit configuration of a pump according to the first embodiment of the present invention. [[Figure 12]] Figures 12A and 12B are schematic diagrams for explaining the operation of a pump portion in a pump according to the first embodiment of the present invention. [[Figure 13]] Figures 13A and 13B are schematic diagrams for explaining the operation when there is one pump portion. [[Figure 14]] Figure 14 is an external perspective view of a pump according to the second embodiment of the present invention. [[Figure 15]] Figure 15 is a plan view showing the main part configuration of a pump according to the second embodiment of the present invention. [[Figure 16]]Figure 16 is an exploded perspective view of the pump according to the second embodiment of the present invention. [[Figure 17]] Figure 17 is a perspective view of the coil core portion in the pump according to the second embodiment of the present invention. [[Figure 18]] Figure 18 is a perspective view of the movable body in the pump according to the second embodiment of the present invention. [[Figure 19]] Figure 19 is a plan sectional view showing the internal configuration of the pump according to the second embodiment of the present invention. [[Figure 20]] Figure 20 is a diagram showing the magnetic circuit configuration of the pump according to the second embodiment of the present invention. [[Figure 21]] Figure 21 is an external perspective view of the pump according to the third embodiment of the present invention. [[Figure 22]] Figure 22 is a plan sectional view showing the internal configuration of the pump according to the third embodiment of the present invention. [[Figure 23]] Figure 23 is an exploded perspective view of the pump according to the third embodiment of the present invention. [[Figure 24]] Figure 24 is a perspective view of the coil core portion in the pump according to the third embodiment of the present invention. [[Figure 25]] Figure 25 is a perspective view of the movable body in the pump according to the third embodiment of the present invention. [[Figure 26]] Figure 26 is a diagram showing the magnetic circuit configuration of the pump according to the third embodiment of the present invention. [[Figure 27]] Figure 27 is an external perspective view of the pump according to the fourth embodiment of the present invention. [[Figure 28]] Figure 28 is a perspective view showing the internal configuration of the pump according to the fourth embodiment of the present invention. [[Figure 29]] Figure 29 is a plan sectional view showing the internal configuration of the pump according to the fourth embodiment of the present invention. [[Figure 30]] Figure 30 is an exploded perspective view of the pump according to the fourth embodiment of the present invention. [[Figure 31]] Figure 31 is a perspective view of the coil core portion in the pump according to the fourth embodiment of the present invention. [[Figure 32]]FIG. 32 is a perspective view of a movable body in the pump according to the fourth embodiment of the present invention. [[Figure 33]] FIG. 33 is a diagram showing the magnetic circuit configuration of the pump according to the fourth embodiment of the present invention. [[Figure 34]] FIG. 34 is an external perspective view of the pump according to the fifth embodiment of the present invention. [[Figure 35]] FIG. 35 is an exploded perspective view of the pump according to the fifth embodiment of the present invention. [[Figure 36]] FIG. 36 is a plan sectional view showing the internal configuration of the pump according to the fifth embodiment of the present invention. [[Figure 37]] FIG. 37 is an exploded perspective view of the pump section in the pump according to the fifth embodiment of the present invention. [[Figure 38]] FIG. 38 is a diagram showing the air flow path of the pump section in the pump according to the fifth embodiment of the present invention. [[Figure 39]] FIG. 39 is a schematic diagram for explaining the reciprocating rotational movement of the movable body in the pump according to the fifth embodiment of the present invention. [[Figure 40]] FIG. 40 is a diagram schematically showing the air supply device according to the sixth embodiment of the present invention.

Embodiments for Carrying Out the Invention

[0026] Hereinafter, each embodiment of the present invention will be described in detail with reference to the drawings.

[0027] (First Embodiment) FIG. 1 is an external perspective view of the pump according to the first embodiment of the present invention. FIG. 2 is a plan view showing the main part configuration of the pump according to the first embodiment of the present invention. FIG. 3 is an exploded perspective view of the pump according to the first embodiment of the present invention. FIG. 4 is a perspective view of the coil core part in the pump according to the first embodiment of the present invention. FIG. 5 is a perspective view of the movable body in the pump according to the first embodiment of the present invention. FIG. 6 is a plan sectional view showing the internal configuration of the pump according to the first embodiment of the present invention. FIG. 7 is an exploded perspective view of the pump section in the pump according to the first embodiment of the present invention.

[0028] In addition to FIGS. 1 to 7, in FIGS. 8 to 39, when explaining the pumps of the respective embodiments, the vibration direction of the movable body that reciprocally rotates in the vibration actuator of the pump is set to the direction shown in FIG. 2. With respect to this direction, the two directions orthogonal thereto are respectively described as the lateral direction (left - right direction) and the height direction (up - down direction, also referred to as the thickness direction). In this embodiment, the expressions indicating directions such as left - right (lateral), height (up - down), etc. used to explain the configuration and operation of each part of the pump are not absolute but relative. They are appropriate when each part of the pump is in the posture shown in the figure, but when the posture changes, they should be interpreted according to the change in the posture.

[0029] <Overall configuration of pump 1> The pump 1 shown in FIGS. 1 and 2 is a pump that discharges air by the action of a vibration actuator 10 driven by electricity. In this embodiment and each embodiment, although the pump is described as discharging and inhaling air, what is discharged and inhaled by the pump is not limited to air, but may be any fluid, and it is particularly preferably a gas.

[0030] As shown in FIG. 1, the pump 1 has a flat - plate shape in which the height (the length in the up - down direction on the drawing, corresponding to the thickness) is shorter than both the lateral (the left - right direction on the drawing) and the longitudinal (the depth direction on the drawing, which can also be said to be the vibration direction). Also, the longitudinal is shorter than the lateral. Note that FIG. 1 is a perspective view of the pump 1 seen from the back side.

[0031] The pump 1 of this embodiment includes a vibration actuator 10 in which a movable body 30 is provided so as to be reciprocally rotatable via a shaft portion 40 with respect to a fixed body 20, and a pump portion 80 (80a, 80b) that discharges and inhales air by driving the vibration actuator 10.

[0032] In this embodiment, the movable body 30 is provided in the case 21 of the fixed body 20 so as to be reciprocally rotatable via the shaft portion 40.

[0033] Due to the cooperation between the core portions 60 (60a, 60b) around which the coils 50a and 50b are wound and the magnets 70 (70a, 70b), the movable body 30 reciprocates, that is, vibrates, along the axial direction of the shaft portion 40 with respect to the fixed body 20. By utilizing the vibration of the movable body 30, the pump 1 can discharge and inhale air from the discharge portion 86.

[0034] In the pump 1 of the present embodiment, within a case 21 having a rectangular shape in plan view, the movable body 30 is provided so as to be reciprocally rotatable about a shaft portion 40 disposed at its center.

[0035] The magnets 70a and 70b are provided on the inner surfaces of both end wall portions spaced apart in the longitudinal direction of the movable body 30. The coil core portion 62a including the coil 50a and the core portion 60a is provided on the inner surface of the end wall portion of the case 21 on the side facing the magnet 70a, and the coil core portion 62b including the coil 50b and the core portion 60b is provided on the inner surface of the end wall portion of the case 21 on the side facing the magnet 70b. The magnets 70a and 70b are preferably permanent magnets, for example. Also, the magnets 70A, 70B, 70C, and 70D described later are preferably permanent magnets.

[0036] <Vibration actuator 10> The vibration actuator 10 includes a fixed body 20, a shaft portion 40, and a movable body 30 that is reciprocally rotatably supported with respect to the fixed body 20 via the shaft portion 40. Regarding the configuration of the vibration actuator 10, a magnet 70 (70a, 70b) is provided on one of the fixed body 20 and the movable body 30, and a coil core portion 62 (62a, 62b) is provided on the other of the fixed body 20 and the movable body 30 such that the magnetization surface of the core faces the magnet 70a and 70b. In the present embodiment, the magnet 70 (70a, 70b) is provided on the movable body 30, and the coil core portion 62 (62a, 62b) is provided on the fixed body 20 side. In other words, in the present embodiment, the movable body 30 includes the magnets 70a and 70b, and the fixed body 20 includes the coil core portions 62a and 62b.

[0037] <Fixed body 20> The fixed body 20 includes a case 21, a cover 22, and coil core portions 62a and 62b. The fixed body 20 is also provided with pump portions 80 (80a, 80b).

[0038] The case 21 functions as the housing of the pump 1 and has a rectangular box shape that is open on one side. A shaft portion 40 is erected inside the case 21 to rotatably support a movable body 30 disposed inside the case 21.

[0039] Also, on the inner surfaces of both end wall portions spaced apart in the longitudinal direction of the case 21, the coil core portions 62a and 62b are arranged so as to face the magnets 70a and 70b of the movable body 30, respectively.

[0040] In this embodiment, the opening portion of the case 21, which is open upward, is covered with a cover 22. Thereby, the case 21 and the cover 22 function as a hollow electromagnetic shield, and the pump 1 has a flat plate shape.

[0041] The shaft portion 40 is provided on the bottom surface of the case 21, at the center in the lateral direction and the depth direction of the case 21, so as to extend in the height direction of the case 21. The shaft portion 40 is fitted and fixed by press-fitting into the shaft hole 23 of the cover 22 or by adhesion after insertion, etc., in a state of being inserted into the bearing portion 34 of the movable body 30. Thereby, the shaft portion 40 is supported in a state of being inserted into the bearing portion 34 of the movable body 30 and being bridged between the bottom surface of the case 21 and the cover 22.

[0042] The coil core portions 62a and 62b are arranged opposite to each other on the inner surfaces of both end wall portions spaced apart in the longitudinal direction of the case 21. Also, the coil core portions 62a and 62b are arranged so as to sandwich the movable body 30 in the longitudinal direction of the case 21.

[0043] The coil core portions 62a and 62b are similarly configured in this embodiment and are provided at symmetric positions centered on the axis of the shaft portion 40 in a plan view.

[0044] The core parts 60a and 60b are magnetic materials magnetized by energizing the coils 50a and 50b. The core parts 60a and 60b may be made of, for example, electromagnetic stainless steel, sintered material, MIM (Metal Injection Mold) material, laminated steel plate, electrolytic zinc-plated steel sheet (SECC), etc. In this embodiment, the core parts 60a and 60b are constituted by a laminated core made of a laminated steel plate.

[0045] The core parts 60a and 60b have cores 601a and 601b around which the coils 50a and 50b are wound, and magnetic poles (hereinafter referred to as "core magnetic poles" for convenience) 602a, 603a, 602b, and 603b formed continuously at both ends of the cores 601a and 601b.

[0046] In this embodiment, each of the core magnetic poles 602a, 603a, 602b, and 603b has a curved magnetic pole surface in an arc shape in plan view according to the magnetization surface shape of the reciprocally rotating magnets 70a and 70b.

[0047] The core magnetic poles 602a and 603a of the core part 60a face the magnet 70a, and the core magnetic poles 602b and 603b of the core part 60b face the magnet 70b. The core magnetic poles 602a, 603a, 602b, and 603b are arranged side by side in the rotation direction of the reciprocating rotation of the movable body 30.

[0048] The core magnetic poles 602a, 603a, 602b, and 603b are preferably arranged on the circumference of a circle centered on the shaft part 40. This circumference is a circumference along the movement orbits of the magnets 70a and 70b.

[0049] In the coil core parts 62a and 62b, the core magnetic poles 602a, 603a, 602b, and 603b of the core parts 60a and 60b around which the coils 50a and 50b are wound are arranged so as to face the magnetization directions of the magnets 70a and 70b.

[0050] Coils 50a and 50b are respectively connected to a power supply unit (not shown) in each of the core portions 60a and 60b, and are energized from the power supply unit to excite the core poles 602a, 603a, 602b, and 603b. In each of the core portions 60a and 60b, the core poles 602a and 602b, and the core poles 603a and 603b are excited with different polarities.

[0051] <Movable body 30> As shown in FIGS. 2, 3, 5, and 6, the movable body 30 is arranged to extend in a direction (the longitudinal direction of the case 21) orthogonal to the shaft portion 40 (the rotation axis of the movable body 30) within the case 21 of the fixed body 20.

[0052] The movable body 30 is supported in the case 21 so as to be reciprocally rotatable about the shaft portion 40. The movable body 30 includes a movable body main body 32, a bearing portion 34, a pair of magnets 70a and 70b in which a plurality of magnetic poles (three poles in this embodiment) are alternately arranged in the rotation direction (depth direction), and a pressing portion 35.

[0053] The bearing portion 34 is fixed to the movable body main body 32, and the shaft portion 40 is inserted through the bearing portion 34. A pair of magnets 70a and 70b are fixed to the movable body main body 32 so as to sandwich the shaft portion 40 inserted through the bearing portion 34.

[0054] The movable body main body 32 may or may not be a magnetic body (ferromagnetic body), and is a yoke in this embodiment, and functions as the weight of the movable body 30. The movable body main body 32 is formed by laminating, for example, yoke cores. The constituent material of the movable body main body 32 is not limited to a metal material, and a resin material or the like may be used.

[0055] The movable body main body 32 has a central opening 322 in which a bearing portion 34 is fixed at the central portion, and arm portions 324a and 324b extending in opposite directions from this central portion. The arm portions 324a and 324b have an elongated flat plate shape, and the tip portions thereof are formed to protrude in a direction intersecting the extending direction. Further, magnet fixing portions 326a and 326b are formed on the tip surfaces of the arm portions 324a and 324b.

[0056] The tip surfaces of the magnet fixing portions 326a and 326b are formed to be curved in an arc shape, and magnets 70a and 70b are fixed to these tip surfaces. Further, pressing portions 35 are provided on the arm portions 324a and 324b.

[0057] <Magnets 70a, 70b> The magnets 70a and 70b, together with coil core portions 62a and 62b arranged opposite to each other, constitute a magnetic circuit for driving the vibration actuator 10.

[0058] The magnets 70a and 70b have magnetic pole surfaces 72 that function as a plurality of magnetic poles, and the magnetic pole surface 72 of the magnet 70a and the magnetic pole surface 72 of the magnet 70b are arranged so as to sandwich the shaft portion 40 and face opposite sides to each other. In the present embodiment, the magnets 70a and 70b are provided at both end portions spaced apart in the extending direction of the movable body main body 32 through which the shaft portion 40 is inserted at the central portion, that is, at the tip portions of both arm portions 324a and 324b, such that the magnetic pole surfaces 72 face outward.

[0059] The magnetic pole surface 72 includes three different magnetic poles 721, 722, and 723 arranged alternately as shown in FIGS. 2, 3, 5, 6, and 10. Note that the magnets 70a and 70b may be configured by alternately arranging different magnets (magnet pieces) of a plurality of magnetic poles, or may be magnetized so as to be arranged in the rotational direction and have different magnetic properties alternately. The same applies to the magnets in each of the embodiments described later. The magnets 70a and 70b are constituted by, for example, Nd sintered magnets or the like.

[0060] The magnetic poles 721, 722, and 723 of the magnets 70a and 70b are arranged adjacent to each other in the depth direction perpendicular to the axis of the shaft portion 40, that is, in the rotational direction, with the shaft portion 40 interposed therebetween.

[0061] The magnets 70a and 70b are arranged such that the magnetic pole surfaces 72 are located on the circumferences of circles centered on the shaft portion 40 at both ends of the movable body 30. When the magnets 70a and 70b are in their normal state, that is, in a non-energized state where no current is supplied to the coils 50a and 50b, the center position of the length in the rotational direction of the central magnetic pole 722 of each magnetic pole surface 72 is provided so as to be located at the center position between the core magnetic poles 602a and 603a.

[0062] In the present embodiment, the magnets 70a and 70b are provided on the movable body 30 at positions farthest from each other via the arm portions 324a and 324b from the shaft portion 40, and are arranged opposite to the coil core portions 62a and 62b provided on the inner surfaces of both end wall portions of the housing (case 21), respectively.

[0063] <Pressing portion 35> When the movable body 30 rotates and moves, the pressing portion 35 presses the movable walls 822 of the pair of sealed chambers 82 of the pump portion 80. Specifically, the pressing portion 35 has a pair of pressing members 351 that press the movable walls 822 of the pair of sealed chambers 82 when the arm portions 324a and 324b reciprocally rotate.

[0064] The pair of pressing members 351 of the pressing portion 35 are provided on the arm portions 324a and 324b so as to protrude in the width direction, that is, the rotation direction. The pressing portion 35 may be formed, for example, to linearly press the movable wall 822 in the facing direction even when the movable body 30 rotates. In the present embodiment, each pressing member 351 of the pressing portion 35 moves in an arc around the shaft portion 40 and abuts against the movable wall 822 to press the movable wall 822. The pressing portion 35 may be configured in any manner as long as it is displaced toward the movable wall side as the movable body 30 rotates and presses the movable wall 822 to move the movable wall 822. It is desirable that the movable wall 822 be arranged so as to intersect the movement path of the pressing portion 35 and the moving pressing portion 35 be arranged so as to be in surface contact with the movable wall 822.

[0065] For example, as shown in FIG. 9, the pressing portion 35 is fixed to each of the arm portions 324a and 324b via a shaft protrusion 353 rotatably shafted in a round hole 328 and a guide protrusion 352 guided in a long hole 329.

[0066] Thereby, the pressing member 351 swings in an arc as the movable body 30 reciprocally rotates. For example, the guide protrusion 352 may be loosely fitted in the long hole 329 and the pressing portion 35 may be made swingable with respect to the arm portions 324a and 324b by the guide protrusion 352, so that the tip of the pressing member 351 can swing. In this case, as the movable body 30 rotates, although the pressing portion 35 moves in an arc, it is possible to linearly move and press the pressing member 351 against the movable wall 822.

[0067] In this embodiment, the pressing portion 35 is connected to the movable wall 822 of the pump portion 80 via a pusher 351. When the movable body 30 rotates, the pusher 351 is inserted into the insertion portion 822a of the movable wall 822, which is a diaphragm, and presses and displaces the movable wall 822 in the rotational direction. When the movable body 30 rotates, the pressing portion 35 presses the movable wall 822 when it moves toward the movable wall 822 side. On the other hand, when the movable body 30 rotates in the reverse direction and the pressing portion 35 moves to the side opposite to the movable wall 822 side, the pressing force on the movable wall 822 is gradually reduced, and the movable wall 822 is displaced in the direction opposite to the pressing direction.

[0068] The bearing portion 34 is formed of, for example, a sintered sleeve bearing. The bearing portion 34 is fitted into the central opening 322 of the movable body main body 32 so that the shaft portion 40 is positioned on the central axis of the movable body main body 32.

[0069] When the coils 50a and 50b are not energized, the movable body main body 32 is biased by the function of the magnetic springs formed by the core portions 60a, 60 and the magnets 70a, 70b so as to be positioned at the center in the longitudinal direction within the case 21 (fixed body 20).

[0070] <Pump portion 80> Each of the pump portions 80 (80a, 80b) has a movable wall 822, a sealed chamber 82 defined by the movable wall 822, a suction portion 83, a valve 84, a discharge portion 86, and a discharge flow path portion 88.

[0071] <Movable wall 822> The movable wall 822 forms a partition wall that separates the chamber forming portion 824 and the discharge flow path portion 88, and is provided so as to be displaceable. By displacing, the movable wall 822 changes the volume inside the sealed chamber 82. The movable wall 822 and the chamber forming portion 824 together constitute the sealed chamber 82.

[0072] The movable wall 822 is formed of, for example, an elastically deformable material and is provided so as to close the chamber forming portion 824. The movable wall 822 is, for example, a diaphragm.

[0073] The movable wall 822 has an insertion portion 822a into which the pusher 351 of the pressing portion 35 is inserted, and is connected to the pressing portion 35 via the insertion portion 822a. The movable wall 822 is displaced by being pressed by the pressing portion 35 that moves as the movable body 30 rotates.

[0074] The movable wall 822 is elastically deformed by being pressed toward the chamber forming portion 824 side by the pressing portion 35 via the insertion portion 822a, and is deformed so that the volume of the chamber forming portion 824 becomes smaller. The movable wall 822 is displaced toward the chamber forming portion 824 side and protrudes into the chamber forming portion 824, whereby the volume in the sealed chamber 82 can be made variable.

[0075] By the forward rotational movement (oscillation to one side in the rotational direction) of the reciprocating rotation of the movable body 30, the movable wall 822 is inserted into the chamber forming portion 824, presses the inside of the chamber forming portion 824, reduces the volume in the sealed chamber 82, and discharges air. On the other hand, when the movable body 30 makes a reverse rotational movement (movement to the other side in the rotational direction), the movable wall 822 increases the volume in the sealed chamber 82 and allows air to flow in.

[0076] <Sealed chamber 82> The sealed chamber 82 is a sealed space to which the suction portion 83 and the discharge portion 86 are connected and whose volume is changed by the displacement of the movable wall 822. The discharge portion 86 has a discharge port communicating with the outside, and discharges air from the pump 1 to the outside through the discharge port. For example, the discharge port is an opening communicating with the discharge portion 86 connected to the bottom surface of the sealed chamber 82.

[0077] In the pump portion 80, when the movable wall 822 is pressed by the pressing portion 35, the movable wall 822 elastically deforms toward the inside of the sealed chamber 82 and presses the air in the sealed chamber 82. The air in the pressed sealed chamber 82 is discharged to the outside through the discharge portion 86. When the movable wall 822 moves so as to return to its original position, that is, when the pressing state by the pressing portion 35 is released and the volume in the sealed chamber 82 increases from the pressed state, air is inhaled into the sealed chamber 82 from the outside through the suction portion 83. The suction portion 83 has a suction port, and inhales air into the sealed chamber 82 through the suction port. For example, the suction port is an opening communicating with the suction portion 83 in the chamber forming portion 824.

[0078] The pump units 80 (80a, 80b) are respectively arranged in the case 21 along the side wall portion extending in the extending direction of the movable body 30, that is, the longitudinal direction of the case 21. Further, the pump units 80 (80a, 80b) are arranged in the depth direction of the case 21 so as to sandwich the movable body main body 32 of the movable body 30.

[0079] The pump unit 80 has, for example, a base 801, a diaphragm portion 802, a cylinder portion 803, a valve portion 804, a valve cover portion 805, a partition portion 806, and a flow path forming portion 807. The base 801, the diaphragm portion 802, the cylinder portion 803, the valve portion 804, the valve cover portion 805, the partition portion 806, and the flow path forming portion 807 each have an elongated plate shape extending in the longitudinal direction of the case 21, and constitute the pump unit 80 having an internally sealed space formed by being laminated.

[0080] The base 801 has an opening, and the insertion portion 822a of the diaphragm portion 802 is inserted into the opening from the back side, and is arranged in a state where the insertion portion 822a protrudes to the front side. The base 801, together with the flow path forming portion 807, constitutes the housing of the strip-shaped pump unit 80.

[0081] The diaphragm portion 802 is formed of an elastic material such as rubber. The diaphragm portion 802 has an insertion portion 822a and a movable wall 822. On the back side of the flexible and elastically deformable movable wall 822, a chamber forming portion 824 of the cylinder portion 803 is arranged. The diaphragm portion 802 and the cylinder portion 803 are attached to each other so that a sealed chamber 82, which is a sealed space, is formed by the movable wall 822 of the diaphragm portion 802 and the chamber forming portion 824 of the cylinder portion 803.

[0082] The cylinder section 803 has a chamber forming section 824. In the sealed chamber 824, two communication holes that communicate with the discharge section 86 and the suction section 83 respectively are formed on the surface facing the movable wall 822. The two communication holes are connected to the discharge channel section 88 of the valve cover section 805 and the flow path forming section 807 and the suction section 83 respectively through the valves 84 of the valve section 804 that are attached so as to overlap the two communication holes respectively from the back side of the cylinder section 803.

[0083] The valve section 804 is attached to the valve cover section 805. The valve 84 connected to the discharge section 86 is configured to communicate with the discharge section 86 of the flow path forming section 807 when the volume in the sealed chamber 82 decreases. On the other hand, the valve 84 connected to the discharge section 86 is configured to close when the volume in the sealed chamber 82 increases.

[0084] The valve section 804 is attached to the valve cover section 805. The valve 84 connected to the suction section 83 is configured to close when the volume in the sealed chamber 82 decreases. On the other hand, the valve 84 connected to the suction section 83 is configured to communicate with the suction section 83 of the flow path forming section 807 when the volume of the sealed chamber 82 increases.

[0085] In the present embodiment, each of the pump sections 80 (80a, 80b) has a pair of sealed chambers 82 composed of the movable wall 822 and the chamber forming section 824. Each of the pump sections 80 (80a, 80b) is arranged such that its pair of sealed chambers 82 face the respective side surfaces of the arm sections 324a, 324b that extend in opposite directions with the shaft section 40 interposed therebetween. That is, the pump sections 80 (80a, 80b) are arranged facing each other at a position where the pair of sealed chambers 82 of the pump sections 80 (80a, 80b) sandwich the arm sections 324a, 324b in the direction in which the arm sections 324a, 324b reciprocate and rotate.

[0086] Figures 9A and 9B are diagrams showing the discharge and suction operations of air in the pump according to the first embodiment of the present invention.

[0087] As shown in Fig. 9A, when the pressing portion 35 moves toward the movable wall 822, the pressing element 351 abuts against and presses the movable wall 822 via the insertion portion 822a. As a result, the movable wall 822 is displaced toward the chamber forming portion 824 side, and the air in the sealed chamber 82 is pressed and compressed. The compressed air flows toward the only communicating discharge portion 86 side through the open valve 84 (see the white arrow in Fig. 9A).

[0088] On the other hand, as shown in Fig. 9B, when the pressing portion 35 makes a return rotational movement, that is, retreats from the pump portion 80 side, the movable wall 822 elastically restores following the pressing portion 35, and the volume in the sealed chamber 82 restores, that is, increases. At this time, the valve 84 connected to the discharge portion 86 is tightened to block the discharge path, while the valve 84 connected to the suction portion 83 is in an open state, and air is inhaled into the sealed chamber 82 through the suction portion 83 (see the white arrow in Fig. 9B).

[0089] <Magnetic Circuit Configuration> In the present embodiment, as shown in Figs. 2 and 6, in the case 21, core portions 60a and 60b, which are magnetic bodies, are arranged so as to be spaced apart in the longitudinal direction and face each other respectively at both end portions of the movable body 30 facing each other with the shaft portion 40 interposed therebetween. The core portions 60a and 60b are respectively arranged on the inner surfaces of both end wall portions in the longitudinal direction of the case 21 so as to be spaced apart in the longitudinal direction and face each other.

[0090] Magnetic attractive forces are generated respectively between the core portion 60a and the magnet 70a, and between the core portion 60b and the magnet 70b. The two magnetic attractive forces generated in the longitudinal direction (the extending direction of the arm portions 324a and 324b) sandwich the shaft portion 40, are on the same straight line with each other, and are generated in opposite directions, so they cancel each other out.

[0091] FIG. 10 is a diagram showing a magnetic spring of the pump unit according to the first embodiment of the present invention. In the pump 1, the magnetic circuit provided by the coil core portion 62a and the magnet 70a and the magnetic circuit provided by the coil core portion 62b and the magnet 70b are configured to be point-symmetrical about the shaft portion 40. Therefore, in FIG. 10, only the magnetic circuit provided by the coil core portion 62a and the magnet 70a will be described, and the description of the magnetic circuit provided by the coil core portion 62b and the magnet 70b will be omitted.

[0092] In FIG. 10, the magnet 70a has a configuration in which the magnetic poles 721, 722, and 723 are N pole, S pole, and N pole, respectively, on the magnetic pole surface 72 facing the core portion 60a. Each of the magnetic poles 721 to 723 on the magnetic pole surface 72 of the magnet 70a attracts the nearby core magnetic poles 602a and 603a.

[0093] The central magnetic pole 722 of the magnet 70a attracts both the core magnetic poles 602a and 603a. The magnetic pole 721 of the magnet 70a attracts the core magnetic pole 602a, and the magnetic pole 723 of the magnet 70a attracts the core magnetic pole 603a. As a result, the central magnetic pole 722 of the magnet 70a is located at the center of the coil core portion 62a, that is, between the core magnetic poles 602a and 603a.

[0094] In the pump 1, when a current flows through the coil 50a of the coil core portion 62a, the core magnetic poles 602a and 603a of the core portion 60a are excited with different polarities. As a result, a thrust with respect to the movable body 30 is generated according to the relationship with the magnet 70a arranged opposite to the coil core portion 62a. The same applies to the magnetic circuit provided by the coil core portion 62b and the magnet 70b. Therefore, by periodically changing the direction of the current supplied to the coils 50a and 50b, the movable body 30 provided with the magnets 70a and 70b rotates in a reciprocating motion about the shaft portion 40.

[0095] <Operation of Pump 1> An example of the operation of pump 1 will be described with reference to FIG. 11. FIG. 11 is a diagram showing the magnetic circuit configuration of the pump according to the first embodiment of the present invention. In the description of an example of the operation of pump 1 with reference to FIG. 11, as in the description with reference to FIG. 10, only the magnetic circuit provided by coil core portion 62a and magnet 70a will be described, and the description of the magnetic circuit provided by coil core portion 62b and magnet 70b will be omitted.

[0096] Magnet 70a shall have three-polarity magnets arranged alternately in the rotational direction on magnetic pole surface 72. In magnet 70a shown in FIG. 11, on magnetic pole surface 72 facing core portion 60a, the central magnet 722 is an S pole, and magnets 721 and 723 sandwiching central magnet 722 are N poles respectively.

[0097] Then, as shown in FIG. 11, when current is supplied to coil 50a of coil core portion 62a to excite core portion 60a, core magnet 602a of core portion 60a magnetizes to be an S pole and core magnet 603a magnetizes to be an N pole.

[0098] As shown in FIG. 11, since magnetic pole 723 of magnet 70a facing core magnet 603a that becomes an N pole is an N pole, it repels core magnet 603a that becomes an N pole. Also, since magnetic pole 722 of magnet 70a is an S pole, a magnetic attraction force is generated between core magnet 603a that becomes an N pole, while it repels core magnet 602a that becomes an S pole. Further, since magnetic pole 721 of magnet 70a is an N pole, a magnetic attraction force is generated between core magnet 602a that becomes an S pole.

[0099] Thereby, a thrust in the F1 direction is generated between magnet 70a and coil core portion 62a, and movable body 30 is driven in the F1 direction.

[0100] When coil 50a is not energized, movable body 30 is positioned at the rotational reference position and the neutral position during reciprocating motion by the magnetic attraction force of the magnetic spring.

[0101] Also, a current is supplied to the coil 50a in the reverse direction to reverse the polarity of the core portion 60a, that is, the magnetic pole 603a of the core portion 60a facing the magnet 70a is set as the S pole, and the magnetic pole 602a is set as the N pole. Thereby, the magnet 70a facing the core portion 60a rotates and moves in the direction opposite to the F1 direction (-F1 direction). The movable body 30 is driven in the -F1 direction, which is exactly opposite to the F1 direction.

[0102] In the movable body 30, the relationship between the magnet 70b arranged on the opposite side of the magnet 70a across the shaft portion 40 and the coil core portion 62b is point-symmetrical about the shaft portion 40 with respect to the relationship between the magnet 70a and the coil core portion 62a. Therefore, between the magnet 70b and the coil core portion 62b, a thrust force in the F1 direction or -F1 direction is similarly generated, just like between the magnet 70a and the coil core portion 62a. Thereby, due to the magnetic attractive force and repulsive force effectively generated in the magnetic circuits at both ends of the movable body 30, the movable body 30 preferably rotates and reciprocates about the shaft portion 40.

[0103] The driving principle is shown below. The driving principle of the vibration actuator 10 of the present embodiment is realized in all the vibration actuators of the following embodiments.

[0104] In the vibration actuator 10 of the present embodiment, when the moment of inertia of the movable body 30 is J [kg·m 2 and the spring constant in the rotational direction is K sp , the movable body 30 vibrates with respect to the fixed body 20 at a resonance frequency f r [Hz] calculated by the following formula (1).

[0105]

Equation

[0106] The pump 1 of the present embodiment supplies the resonance frequency f of the movable body 30 to the coils 50a and 50b rAn alternating current having a frequency approximately equal thereto is supplied to excite the core portions 60a and 60b (specifically, the core poles 602a, 603a, 602b, and 603b) via the coils 50a and 50b. Thereby, the movable body 30 can be efficiently driven.

[0107] The movable body 30 in the vibration actuator 10 of the present embodiment is supported in a state of a spring-mass system structure configured by a magnetic spring provided by coil-core portions 62a and 62b and magnets 70a and 70b each having coils 50a and 50b and core portions 60a and 60b. Therefore, when an alternating current having a frequency equal to the resonance frequency f of the movable body 30 is supplied to the coils 50a and 50b, r the movable body 30 is driven in a resonance state.

[0108] The equations of motion and circuit equations showing the driving principle of the vibration actuator 10 are shown below. The vibration actuator 10 is driven based on the equation of motion shown in the following formula (2) and the circuit equation shown in the following formula (3).

[0109]

Equation

[0110]

Equation

[0111] That is, the moment of inertia J [kg·m 2 of the movable body 30 in the vibration actuator 10 of the pump 1, the displacement angle (rotation angle) θ(t) [rad], the thrust constant (torque constant) K f [Nm / A], the current i(t) [A], the spring constant K sp [Nm / rad], the damping coefficient D [Nm / (rad / s)], etc. can be appropriately changed within the range that satisfies Equation (2). Also, the voltage e(t) [V], the resistance R [Ω], the inductance L [H], the back electromotive force constant K e [V / (m / s)] can be appropriately changed within the range that satisfies Equation (3).

[0112] Thus, in the vibration actuator 10 of the pump 1, when energizing the coils 50a and 50b with an alternating current corresponding to the resonance frequency f determined by the moment of inertia J of the movable body 30 and the spring constant K of the magnetic spring, a large vibration output can be efficiently obtained. sp determined by r In addition, in the pump 1, when the movable body 30 reciprocates and rotates, the volume in the sealed chamber 82 changes due to the displacement of the movable wall 822 of the pump section 80 (specifically, the deformation of the diaphragm), and the pump functions. Hereinafter, the function as this pump is that the flow rate is set by the following formula (4) and the pressure is set by the following formula (5).

[0113] That is, the flow rate Q [L / min], piston area A [m

[0114]

Number

[0115]

Number

[0116] , piston displacement x [m], driving frequency f [Hz], etc. can be appropriately changed within the range that satisfies formula (4). Also, the increased pressure P [kPa], atmospheric pressure P0 [kPa], sealed chamber volume V [m 2 , variable volume ΔV [m 3 =piston area [m 3 A * piston displacement [m] can be appropriately changed within the range that satisfies formula (5). 2

[0117] As described above, the pump 1 of the present embodiment includes a vibration actuator 10 driven electromagnetically and a pump section 80 (80a, 80b) that inhales and discharges air by electromagnetic driving of the vibration actuator 10.

[0118] In the vibration actuator 10, the fixed body 20 includes one of a coil core portion 62a having a coil 50a and a core 60a around which the coil 50a is wound, and a magnet 70a disposed opposite to an end portion of the core 60a. Further, a pump portion 80 is provided in the fixed body 20. The movable body 30 includes the other of the coil core portion 62a and the magnet 70a, and is elastically held by the magnetic attractive force of the magnet 70a. The shaft portion 40 supports the movable body 30 so as to be reciprocally rotatable. The pump portion 80a has a movable wall 822 that moves by the rotational movement of the movable body 30, and a sealed chamber 82 that communicates with an air discharge port 86 and an air suction port 83 and whose volume is changed by the displacement of the movable wall 822. The movable body 30 has a pressing portion 35 that moves in an arc shape about the shaft portion 40 as the movable body 30 reciprocally rotates, and contacts and presses the movable wall 822. The movable wall 822 is disposed in the moving direction of the pressing portion 35, and is displaced when pressed by the pressing portion 35 to discharge the air in the sealed chamber 82 through the discharge port 86.

[0119] <Effect> The movable body 30 elastically supported by the magnetic springs provided by the magnets 70a, 70b and the coil core portions 62a, 62b vibrates with high efficiency due to resonance.

[0120] That is, compared with the case where a rotary motor is used as the driving portion of the pump, the pump can be made thinner. Also, unlike a conventional pump using a piezoelectric element, which is a pump specialized in either pressure or flow rate performance, both the desired pressure and flow rate when discharging air can be set.

[0121] Further, the sealed chambers 82 of the pump parts 80a and 80b are arranged to face each other in a direction orthogonal to the extending direction of the movable body 30 so as to sandwich the pressing part 35 of the movable body 30 from both sides in the reciprocating rotation direction in the normal state. With this configuration, even when the pressing part 35 is pressed in a direction away from the sealed chamber 82 by the air remaining in the sealed chambers 82 of the pump parts 80a and 80b when the movable body 30 is in the normal state, that is, when the movable body 30 is located at the reference position, the pressing forces applied to the pressing part 35 from the air remaining in the sealed chambers of the pump parts 80a and 80b cancel each other out. Therefore, the movable body 30 can be suitably positioned at the reference position when reciprocally rotated.

[0122] In the pump part of a conventional pump, there is a risk that the reference position, that is, the stationary position of the movable body may change due to the pressing force (load) on the movable body generated when the pressure in the pump part increases. When the movable body is reciprocally rotated from a position deviated from this reference position, the movable body moves within a range different from the moving range when reciprocally rotated from the reference position. In the pump part of a conventional pump, due to this movement, the displacement position of the movable wall by the pressing part set by the distance from the reference position is shifted, and the air in the sealed chamber cannot be sufficiently compressed, so that the desired air discharge pressure and air flow rate cannot be ensured. In this case, since it is necessary to increase the distance of the reciprocating rotational movement of the movable body, that is, the amplitude, and secure a clearance for the movement in the case, the pump cannot be miniaturized.

[0123] On the other hand, according to the present embodiment, since the pressing forces (loads) applied to the pressing part 35 from the air remaining in the sealed chambers of the pump parts 80a and 80b cancel each other out, the movable body 30 can be suitably positioned at the reference position and can be oscillated from that reference position. Therefore, it is possible to realize the pump 1 that is small-sized and can provide a higher pressure.

[0124] FIGS. 12A and 12B are schematic diagrams for explaining the operation of the pump part in the pump according to the first embodiment of the present invention, and FIGS. 13A and 13B are schematic diagrams for explaining the operation in the case where there is one pump part.

[0125] In this embodiment, the sealed chambers 82 (corresponding to the "air chambers" in FIGS. 12 and 13) in the pump sections 80 (80a, 80b) sandwich the movable body 30 in the reciprocating rotation direction of the movable body 30, that is, in the amplitude directions of the arm portions 324a and 324b located at the reference positions, and are arranged to face each other in a direction orthogonal to the extending direction of the movable body 30.

[0126] In this embodiment, four sealed chambers 82 that sandwich the shaft portion 40 and sandwich the arm portions 324a and 324b of the movable body 30 in the depth direction are arranged. That is, in this embodiment, the movable body 30 is provided to extend in a direction orthogonal to the axial direction of the shaft portion 40 from the portion pivotally supported by the shaft portion 40 so as to be reciprocally rotatable, and has arm portions 324a and 324b at the tip portions (magnet fixing portions 326a and 326b), where the other of the coil core portions 62a and 62b and the magnets 70a and 70b is provided.

[0127] The sealed chambers 82 are provided in pairs so as to sandwich the arm portions 324a and 324b of the movable body 30. A pair of sealed chambers 82 (shown as "air chambers" in FIG. 12) are arranged to face each other at positions that sandwich the arm portions 324a and 324b in the reciprocating rotation direction (depth direction of the case 21) of the arm portions 324a and 324b. The pressing portion 35 has a pair of pressing members 351, 351 corresponding to the pair of movable walls 822, respectively. Each of the movable walls 822 of the pair of sealed chambers 82 is pressed by the corresponding pressing member 351 when the arm portions 324a and 324b reciprocally rotate.

[0128] As shown in FIG. 12A, in this embodiment, the pressing portion 35 of the movable body 30 is connected to the reciprocating rotational movements respectively on the movable walls 822 that define a pair of sealed chambers 82 ("air chambers") on the forward rotation direction side and the reverse rotation direction side of the reciprocating rotational movement of the movable body 30.

[0129] Thus, in the configuration in which the movable body 30 is elastically supported by the magnetic spring, when the pressure in the sealed chamber 82 increases, the movable wall 822 is displaced by the load generated, and the movable body 30 is pressed via the pressing portion 35.

[0130] At this time, in the present embodiment, as shown in FIG. 12B, since the pressing forces (loads) applied to the movable body 30 from the pressing portions 35 of the pair of sealed chambers 82 cancel each other out, the movable body 30 is stably held at the reference position.

[0131] On the other hand, as shown in FIG. 13, assume a case where the sealed chamber 82 (the "air chamber") is arranged only on one side in the reciprocating rotation direction of the movable body 30. In this case, when the movable wall 822 of one sealed chamber 82 is displaced toward the movable body 30, the movable body 30 is pressed via the pressing portion 35, and the stationary position of the movable body 30 is offset from the reference position. In this configuration, unlike the present embodiment, it becomes necessary to increase the amplitude of the movable body 30 or increase the movable region of the movable body 30 due to the pressure increase in the sealed chamber 82.

[0132] On the other hand, in the present embodiment, since the movable region of the movable body 30 can be reduced, the size of the pump 1 can be reduced.

[0133] Also, in the present embodiment, the movable body 30 is pivotally supported by the shaft portion 40 so as to be reciprocally rotatable at the central portion of the case 21, and has a pair of arm portions 324a and 324b that extend in opposite directions to each other in a direction orthogonal to the axial direction of the shaft portion 40 from the central portion of the case 21.

[0134] At the tip portions of these arm portions 324a and 324b, that is, at the magnet fixing portions 326a and 326b, the other of the coil core portions 62a and 62b and the magnets 70a and 70b (the magnets 70a and 70b in the present embodiment) are provided.

[0135] On the other hand, the fixed body 20 is provided with one of the coil core portions 62a and 62b and the magnets 70a and 70b (the coil core portions 62a and 62b in the present embodiment) that faces the other of the coil core portions 62a and 62b and the magnets 70a and 70b.

[0136] Each of the pump units 80 (80a, 80b) includes a pair of sealed chambers 82, and the pair of sealed chambers 82 of each of the pump units 80 (80a, 80b) are arranged in parallel along the extending direction of the pair of arm portions 324a, 324b. Further, the pressing portion 35 has a pair of pressing members 351 respectively corresponding to the movable walls 822 of the sealed chamber 82 of the pump unit 80a and the sealed chamber 82 of the pump unit 80b, and each of the movable walls 822 of the sealed chamber 82 is pressed by the corresponding pressing portion 35 when the arm portions 324a, 324b reciprocally rotate.

[0137] Thus, each of the pump units 80 (80a, 80b) of the present embodiment includes a plurality of sealed chambers 82 arranged in the longitudinal direction, and the discharge flow paths and discharge ports 86 of each sealed chamber 82 are connected in parallel. For this reason, as the movable body 30, that is, the arm portions 324a, 324b reciprocally rotate about the shaft portion 40, the pressing members 351 of the pressing portion 35 alternately press the movable walls 822 of the pair of sealed chambers 82 arranged in parallel in the longitudinal direction. Thereby, the pump 1 with a high flow rate can be realized.

[0138] Further, since the pump 1 of the present embodiment has a configuration in which the magnets 70a, 70b necessary for applying the magnetic spring are provided on one of the movable body 30 or the fixed body 20, compared with the configuration in which the magnets 70a, 70b are provided on both the movable body 30 and the fixed body 20, the number of parts of the pump 1 can be further reduced.

[0139] Thus, since the number of parts of the pump 1 can be reduced, the cost of the pump 1 can be reduced, and further, the number of assembly steps of the pump 1 can be reduced.

[0140] Further, the magnetic spring of the magnetic circuit provided by the magnets 70a, 70b and the core portions 60a, 60b elastically supports the movable body 30, and further, due to the reciprocal rotation of the movable body 30 due to resonance, the movable wall 822 is displaced to drive the pump unit 80 (80a, 80b). Thereby, while the pump 1 is further thinned, the desired pressure and flow rate of the pump 1 can be ensured, and the high output of the pump 1 can be achieved.

[0141] Further, in the present embodiment, in the coil core portion 62a corresponding to the magnet 70a on one side of the movable body 30, since a magnetic circuit can be configured by one coil, the cost of the pump 1 can be reduced.

[0142] (Second Embodiment) FIG. 14 is an external perspective view of a pump according to a second embodiment of the present invention. FIG. 15 is a plan view showing a main part configuration of the pump according to the second embodiment of the present invention, and is a view showing a state where the lid is omitted for convenience in the pump. FIG. 16 is an exploded perspective view of the pump according to the second embodiment of the present invention. FIG. 17 is a perspective view of a coil core portion in the pump according to the second embodiment of the present invention. FIG. 18 is a perspective view of a movable body in the pump according to the second embodiment of the present invention. FIG. 19 is a cross-sectional plan view showing an internal configuration of the pump according to the second embodiment of the present invention.

[0143] <Overall Configuration of Pump 1A> The pump 1A has a basic configuration similar to that of the pump 1 corresponding to the first embodiment shown in FIG. 1, and only differs in the magnetic circuit configuration. Therefore, hereinafter, the same reference numerals are given to the same components, and the description of the same components is omitted.

[0144] As shown in FIGS. 14 to 16, the pump 1A of the present embodiment has a basic configuration similar to that of the pump 1 of the first embodiment, except that the number of poles of the magnet 70A and the number of poles of the coil core portion 62A are different.

[0145] In the pump 1A, a movable body 30A is provided in a rectangular case 21A in a plan view of a fixed body 20A so as to be reciprocally rotatable about a shaft portion 40A disposed at the center of the case 21A. Four-pole magnets 70A-1 and 70A-2 are respectively provided at both ends of the movable body 30A spaced apart in the longitudinal direction of the movable body 30A orthogonal to the axial direction of the shaft portion 40A.

[0146] On one side, inside the case 21A, along the end wall portions spaced apart in the longitudinal direction of the case 21A, coil core portions 62A-1 and 62A-2 each having three core magnets are provided at positions facing each other with an air gap interposed therebetween.

[0147] Also, inside the case 21A, pump portions 80a and 80b are provided along the extending direction of the movable body 30A so as to sandwich the movable body 30A in the depth direction of the case 21A. The movable walls 822 of the pump portions 80a and 80b are respectively connected to the pressing portions 35 of the movable body 30A configured in the same manner as the pressing portion 35 of the pump 1.

[0148] Since the coil core portion 62A-1 has the same configuration as that of the coil core portion 62A-2, the configuration of the coil core portion 62A-1 will be described, and the description of the configuration of the coil core portion 62A-2 will be omitted.

[0149] As shown in FIG. 17, the coil core portion 62A-1 has a coil 50A and an E-shaped core portion 60A. The coil 50A is wound around the central protrusion of the core portion 60A that becomes the core magnet 601A via a bobbin 65A. By energizing the coil 50A, the tip of the central protrusion of the core portion 60A becomes the core magnet 601A, and the core magnets 602A and 603A connected to the base end portion of the core magnet 601A are magnetized with a different magnet from the core magnet 601A. The periphery of the tip of the core magnet 601A is covered with the flange of the bobbin 65A, and the core magnet 601A partially protrudes from the bobbin 65A.

[0150] The core magnets 601A, 602A, and 603A of the coil core portion 62A-1 are each arranged in an arc shape so as to face the magnet 70A-1. The coil core portion 62A-2 configured in the same manner as the coil core portion 62A-1 is spaced apart from the coil core portion 62A-1 in the longitudinal direction of the case 21A, and further, the core magnets 601A, 602A, and 603A of the coil core portion 62A-2 are arranged so as to face the magnet 70A-2.

[0151] As shown in Fig. 18, the magnets 70A-1 and 70A-2 are respectively fixed to the magnet fixing portions 326a and 326b at both ends of the movable body main body 32 provided with the bearing portion 34 at the central portion.

[0152] The magnetic pole surfaces 72 of the magnets 70A-1 and 70A-2 are spaced apart from each other in the longitudinal direction perpendicular to the axis of the shaft portion 40A, and are arranged in an arc shape convex outward. Further, the core magnets 601A to 603A of the core portion 60A of the coil core portions 62A-1 and 62A-2 face the magnetic pole surfaces 72 of the magnets 70A-1 and 70A-2.

[0153] The magnetic pole surfaces 72 of the magnets 70A-1 and 70A-2 each have different magnetic poles 721A to 724A arranged alternately in the rotational direction.

[0154] A magnetic attractive force is generated between the magnet 70A-1 and the core portion 60A of the coil core portion 62A-1, and between the magnet 70A-2 and the core portion 60A of the coil core portion 62A-2, and functions as a magnetic spring. That is, at each of both ends of the movable body 30A spaced apart in the longitudinal direction, a magnetic spring due to the magnetic attractive force is generated.

[0155] Due to such a magnetic spring by the magnetic attractive force, when the pump 1A is in a non-energized state, that is, in a normal state, the rotation of the movable body 30A around the shaft portion 40A is suppressed. Specifically, due to the magnetic attractive force, at the position where the central core magnet 601A of the core portions 60A-1 and 60A-2 faces the central portions of the two poles 722A and 723A of the magnets 70A-1 and 70A-2 attached to the movable body 30A, the core portions 60A-1 and 60A-2 and the magnets 70A-1 and 70A-2 are attracted to each other.

[0156] A magnetic attractive force is generated between these core portions 60A-1 and 60A-2 and the magnets 70A-1 and 70A-2 respectively. The two magnetic attractive forces generated in the longitudinal direction of the movable body 30 sandwich the shaft portion 40A, are on the same straight line with each other, and are generated in opposite directions, so they cancel each other out.

[0157] As shown in Fig. 19, in pump 1A, for each of the magnetic poles 721A, 722A, 723A, and 724A of magnets 70A-1 and 70A-2, the position of the interface (switching position) between adjacent poles among them is located at the center of the length in the rotational direction of each of the core magnetic poles 601A to 603A of the coil core part 62A. In the normal state, the position of the movable body 30A when realizing such a positional relationship serves as the rotational reference position. Specifically, the position of the interface between magnetic poles 721A and 722A (switching position) faces the center of the length in the rotational direction of core magnetic pole 602A. Similarly, the position of the interface between magnetic poles 722A and 723A (switching position) faces the center of the length in the rotational direction of core magnetic pole 601A, and the position of the interface between magnetic poles 723A and 724A (switching position) faces the center of the length in the rotational direction of core magnetic pole 603A.

[0158] Fig. 20 is a diagram showing the magnetic circuit configuration of the pump according to the second embodiment of the present invention. Note that, with reference to Fig. 20, only the magnetic circuit provided by the coil core part 62A-1 and the magnet 70A-1 will be described, and the description of the magnetic circuit provided by the coil core part 62A-2 and the magnet 70A-2 will be omitted.

[0159] <Magnet 70A> Magnet 70A-1 shall have four different polarities arranged alternately in the rotational direction on the magnetic pole surface 72 facing the core part 62A-1.

[0160] In the magnet 70A-1 shown in Fig. 20 (which may also be denoted by "70A"), the two central magnetic poles 722A and 723A are S pole and N pole respectively, and the magnetic poles 721A and 724A sandwiching these central magnetic poles 722A and 723A are N pole and S pole respectively. The magnetic poles 721A, 722A, 723A, and 724A of the magnet 70A-1 face the core magnetic poles 601A, 602A, and 603A of the coil core part 62A-1 (which may also be denoted by "62A").

[0161] A current is supplied to the coil 50A of the coil core portion 62A to excite the core portion 60A. The core pole 601A, which is the protrusion at the center of the core portion 60A, is magnetized to the N pole, and the core poles 602A and 603A of the core portion 60A are magnetized to the S pole.

[0162] As shown in FIG. 20, the poles 722A and 723A of the magnet 70A facing the core pole 601A that becomes the N pole are the S pole and the N pole. With respect to the core pole 601A that becomes the N pole, the pole 722A that is the S pole is attracted by the magnetic attractive force, and the pole 723A that is the N pole repels.

[0163] Also, since the pole 721A of the magnet 70A is the N pole, a magnetic attractive force is generated between it and the core pole 602A that becomes the S pole. On the other hand, the pole 724A of the magnet 70A that is the S pole repels the core pole 603A that becomes the S pole.

[0164] Due to these actions, a thrust in the F1 direction is generated between the magnet 70A and the coil core portion 62A, and the movable body 30A is driven in the F1 direction.

[0165] When the coil 50A is not energized, the movable body 30A is positioned at the rotational reference position and the neutral position during reciprocating motion due to the magnetic attractive force of the magnetic spring.

[0166] Also, when a current is supplied to the coil 50A in the reverse direction to reverse the polarity of the core portion 60A, that is, the core pole 601A at the center of the core portion 60A facing the magnet 70A is made the S pole, and the core poles 602A and 603A are made the N pole. As a result, the magnet 70A facing the core portion 60A rotates and moves in the direction opposite to the F1 direction (-F1 direction). The movable body 30A is driven in the -F1 direction, which is exactly opposite to the F1 direction.

[0167] In the movable body 30A, the relationship between the magnet 70A-2 disposed on the opposite side of the magnet 70A-1 across the shaft portion 40A and the coil core portion 62A-2 is point-symmetrical about the shaft portion 40A with respect to the relationship between the magnet 70A-1 and the coil core portion 62A-1. Therefore, between the magnet 70A-2 and the coil core portion 62A-2 as well, a thrust force in the F1 direction or the -F1 direction is similarly generated by the magnet 70A-2 and the coil core portion 62A-2.

[0168] As a result, due to the magnetic attractive force and repulsive force that are effectively generated in the magnetic circuits at both ends of the movable body 30, the movable body 30A preferably rotates and reciprocates about the shaft portion 40A.

[0169] Note that the driving principle of this pump 1A and the operating principle of the pump performance are the same as those of the pump 1 in the first embodiment realized by the above formulas (1), (2), (3), (4), and (5).

[0170] In the vibration actuator 10 of the pump 1A, similar to the first embodiment, by changing the direction of the current supplied to the coil 50A, the movable body 30A provided with the magnets 70A-1 and 70A-B can be reciprocated (reciprocally vibrated) in the vibration direction.

[0171] According to this configuration, the magnetic springs of the magnetic circuits provided by the magnet 70A-1 and the core portion 60A-1, and the magnetic springs of the magnetic circuits provided by the magnet 70A-2 and the core portion 60A-2 elastically support the movable body 30A. Due to the reciprocating rotation of the movable body 30A due to resonance, the movable wall 822 is displaced, the pump portion 80a is driven, and air is discharged from the sealed chambers 82 of the pump portions 80a and 80b, or air is inhaled into the sealed chambers 82. Note that the pump portions 80a and 80b of this embodiment are configured in the same manner as the pump portions 80a and 80b of the first embodiment and the like. Thereby, while further thinning the pump 1A, a desired pressure and flow rate of the pump 1A can be ensured, and a higher output of the pump 1A can be achieved.

[0172] In addition, in the magnetic circuits respectively arranged at both ends of the pump 1A, each core portion 60A uses one coil 50A to form three magnetic poles 601A, 602A, and 603A, resulting in a low-cost structure and enabling cost reduction of the pump 1A. Further, since the core portion 60A has three magnetic poles, an increase in drive output can be achieved compared to a configuration in which the core portion 60A has two magnetic poles.

[0173] (Third Embodiment) FIG. 21 is an external perspective view of a pump according to the third embodiment of the present invention. FIG. 22 is a plan sectional view showing the internal configuration of the pump according to the third embodiment of the present invention. FIG. 23 is an exploded perspective view of the pump according to the third embodiment of the present invention. FIG. 24 is a perspective view of a coil core portion in the pump according to the third embodiment of the present invention. FIG. 25 is a perspective view of a movable body in the pump according to the third embodiment of the present invention. FIG. 26 is a diagram showing the magnetic circuit configuration of the pump according to the third embodiment of the present invention.

[0174] The pump 1B of the present embodiment has the same configuration as the pump 1 corresponding to the first embodiment shown in FIG. 1, except for the configuration of the magnetic circuit. Therefore, hereinafter, the same reference numerals are given to the same components, and the description of the same components is omitted.

[0175] As shown in FIGS. 21 to 26, the pump 1B has the same basic configuration as the basic configuration of the pump 1 of the first embodiment, except that the number of poles of the magnet 70B and the number of poles of the coil core portion 62B are different.

[0176] In the pump 1B, a movable body 30B is provided in a rectangular case 21B in a plan view of a fixed body 20B so as to be reciprocally rotatable about a shaft portion 40B disposed at the center of the case 21B. Four-pole magnets 70B-1 and 70B-2 are respectively provided at both ends of the movable body 30B that are arranged orthogonal to the axial direction of the shaft portion 40B and spaced apart in the longitudinal direction.

[0177] On one side, inside the case 21B, along the end wall portions spaced apart in the longitudinal direction of the case 21B, coil core portions 62B-1 and 62B-2 having three core poles are respectively provided at positions facing each other with an air gap via magnets 70B-1 and 70B-2.

[0178] Also, inside the case 21B, pump portions 80a and 80b are provided along the extending direction of the movable body 30B so as to sandwich the movable body 30B in the depth direction of the case 21B. The movable walls 822 of the pump portions 80a and 80b are connected to the pressing portion 35 of the movable body 30B configured in the same manner as the pressing portion 35 of the pump 1 or pump 1A.

[0179] <Coil core portion 62B> Since the coil core portion 62B-1 has the same configuration as that of the coil core portion 62B-2, the configuration of the coil core portion 62B-1 (sometimes referred to as "62B") will be described, and the description of the configuration of the coil core portion 62B-2 will be omitted.

[0180] As shown in FIG. 24, the coil core portion 62B-1 has three coils 50B and an E-shaped core portion 60B. The coil core portion 62B-1 is configured to have the same number of coils 50B as the core poles of the core portion 60B.

[0181] That is, coils 50B are wound around the outer circumferences of the three protrusions of the E-shaped core portion 60B via bobbins 65B. These three protrusions of the core portion 60B each become a core pole.

[0182] By energizing the coils 50B of the coil core portion 62B, the tip portions of the three protrusions of the core portion 60B become core poles 601B to 603B, and the core poles 601B to 603B are magnetized so as to have alternately different polarities in the rotation direction of the movable body 30B. The peripheries of the tips of the three protrusions of the core portion 60B that become the core poles 601B to 603B are respectively covered by the flanges of the bobbins 65B.

[0183] The core poles 601B, 602B, and 603B of the coil core portion 62B-1 are arranged in an arc shape so as to face the magnet 70B-1.

[0184] Further, the coil core portion 62B-2 having the same configuration as the coil core portion 62B-1 is arranged so as to be separated from the coil core portion 62B-1 in the longitudinal direction of the case 21B and to be point-symmetrical about the shaft portion 40B. Also, the coil core portion 62B-2 is arranged such that the core poles 601B, 602B, and 603B of the coil core portion 62B-2 face the magnet 70B-2.

[0185] <Magnet 70B> The magnets 70B-1 and 70B-2 are respectively fixed to the magnet fixing portions 326a and 326b at both ends of the movable body main body 32 provided with the bearing portion 34 at the center as shown in FIG. 25.

[0186] The magnetic pole surfaces 72 of the magnets 70B-1 and 70B-2 are arranged so as to be separated from each other in the longitudinal direction orthogonal to the axis of the shaft portion 40B and to be in an arc shape convex outward. Further, the core poles 601B to 603B of the core portion 60B of the coil core portion 62B-1 and the coil core portion 62B-2 face the magnets 70B-1 and 70B-2. The magnetic pole surfaces 72 of the magnets 70B-1 and 70B-2 respectively have different magnetic poles 721B to 724B arranged alternately in the rotational direction.

[0187] A magnetic attractive force is generated between the magnet 70B-1 and the core portion 60B of the coil core portion 62B-1, and between the magnet 70B-2 and the core portion 60B of the coil core portion 62B-2, and functions as a magnetic spring. That is, at each of both ends of the movable body 30B separated in the longitudinal direction, a magnetic spring due to the magnetic attractive force is generated.

[0188] Due to such a magnetic spring with magnetic attraction force, when the pump 1B is in a non-energized state, that is, in its normal state, the rotation of the movable body 30B around the shaft portion 40B is suppressed. Specifically, due to the magnetic attraction force, at the position where the core magnetic pole 601B at the center of the core portion 60B of the coil core portions 62B-1 and 62B-2 faces the central portions of the two poles 722B and 723B at the center of the magnets 70B-1 and 70B-2, the core portions 60B-1 and 60B-2 and the magnets 70B-1 and 70B-2 are attracted to each other.

[0189] Magnetic attraction forces are respectively generated between these core portions 60B-1, 60B-2 and magnets 70B-1, 70B-2. The two magnetic attraction forces generated in the longitudinal direction of the movable body 30B sandwich the shaft portion 40B, are on the same straight line with each other, and are generated in opposite directions, so they cancel each other out.

[0190] As shown in FIG. 22, in the pump 1B, among the magnetic poles 721B, 722B, 723B, and 724B of the magnets 70B-1 and 70B-2, the position of the interface (switching position) between adjacent poles is located at the center of the rotational length in the rotational direction of each of the core magnetic poles 601B to 603B of the coil core portion 62B. In the normal state, the position of the movable body 30B when realizing such a positional relationship serves as the rotational reference position. Specifically, the position of the interface between the magnetic poles 721B and 722 (switching position) faces the center of the rotational length of the core magnetic pole 602B in the rotational direction. Similarly, the position of the interface between the magnetic poles 722B and 723 (switching position) faces the center of the rotational length of the core magnetic pole 601B in the rotational direction, and the position of the interface between the magnetic poles 723B and 724 (switching position) faces the center of the rotational length of the core magnetic pole 603B in the rotational direction.

[0191] FIG. 26 is a diagram showing the magnetic circuit configuration of the pump according to the third embodiment of the present invention. Here, only the magnetic circuit provided by the coil core portion 62B-1 and the magnet 70B-1 on one side will be described, and the description of the magnetic circuit provided by the coil core portion 62B-2 and the magnet 70B-2 will be omitted.

[0192] Magnet 70B-1 shall have four different polarities that are arranged alternately in the rotational direction on the magnetic pole surface 72 facing the coil core portion 62B-1.

[0193] In the magnet 70B-1 (which may also be denoted by "70B") shown in FIG. 26, the two central magnetic poles 722B and 723B are S pole and N pole respectively, and the magnetic poles 721B and 723B sandwiching these central magnetic poles 722B and 723B are N pole and S pole respectively. The magnetic poles 721B, 722B, 723B, and 724B of the magnet 70B-1 face the core magnetic poles 601B, 602B, and 603B of the coil core portion 62B-1 (which may also be denoted by "62B").

[0194] Current is supplied to each coil 50B of the coil core portion 62B to excite the core portion 60B. In the core portion 60B, the winding direction of the coil 50B, the direction of the current flowing through the coil 50B, etc. are set so that the polarity of the magnetic pole of the core magnetic pole 601B, which is the central protrusion of the core portion 60B, is different from the polarities of the core magnetic poles 602B and 603B on both sides of the core magnetic pole 601B. For example, in the coil core portion 62B shown in FIG. 26, the core magnetic pole 601B, which is the central protrusion of the core portion 60B, is magnetized to the N pole, and the core magnetic poles 602B and 603B of the core portion 60B are magnetized to the S pole. At this time, since the core magnetic poles 601B, 602B, and 603B are excited by the corresponding coils 50B respectively, high-output driving can be ensured.

[0195] As shown in FIG. 26, the magnetic poles 722B and 723B of the magnet 70B facing the core magnetic pole 601B that becomes the N pole are the S pole and the N pole. With respect to the core magnetic pole 601B that becomes the N pole, the magnetic pole 722B that is the S pole is attracted by the magnetic attraction force, and the magnetic pole 723B that is the N pole repels. Also, since the magnetic pole 721B of the magnet 70B is the N pole, a magnetic attraction force is generated between it and the core magnetic pole 602B that becomes the S pole. Also, the magnetic pole 724B of the magnet 70B that is the S pole repels the core magnetic pole 603B that becomes the S pole.

[0196] Due to these actions, a thrust force in the F1 direction is generated between the magnet 70B and the coil core portion 62B, and the movable body 30B is driven in the F1 direction. When the coil 50B is not energized, the movable body 30B is positioned at the rotational reference position and the neutral position during reciprocating motion due to the magnetic attractive force of the magnetic spring.

[0197] Also, by supplying current to the coil 50B in the reverse direction to reverse the polarity of the core portion 60B, that is, making the core magnetic pole 601B at the center of the core portion 60B facing the magnet 70B the S pole and the magnetic poles 602B and 603B the N poles. As a result, the magnet 70B facing the core portion 60B rotates and moves in the direction opposite to the F1 direction (-F1 direction). The movable body 30B is driven in the -F1 direction, which is exactly opposite to the F1 direction.

[0198] In the movable body 30B, the relationship between the magnet 70B-2 and the coil core portion 62B-2 is point-symmetrical about the shaft portion 40B with respect to the relationship between the magnet 70B-1 and the coil core portion 62B-1. Therefore, the relationship between the magnet 70B-2 and the coil core portion 62B-2 is the same as the relationship between the magnet 70B-1 and the coil core portion 62B-1. Thus, a thrust force in the F1 direction or -F1 direction can be generated between the magnet 70B-2 and the coil core portion 62B-2 in the same manner as the thrust force between the magnet 70B-1 and the coil core portion 62B-1. As a result, due to the magnetic attractive force and repulsive force effectively generated in the magnetic circuit at both ends of the movable body 30B, the movable body 30B rotates and reciprocates preferably about the shaft portion 40B.

[0199] In this way, in the pump 1B, similar to the first embodiment, by changing the direction of the current supplied to the coil 50B, the movable body 30B provided with the magnet 70B can be reciprocally moved (reciprocally vibrated) in the vibration direction. The driving principle of this pump 1B is the same operating principle as that of the pump 1 of the first embodiment realized by the above formulas (1), (2), (3), (4), and (5).

[0200] The magnetic springs provided by the magnet 70B-1 and the core portion 60B-1, and the magnetic springs provided by the magnet 70B-2 and the core portion 60B-2 elastically support the movable body 30B. Due to the reciprocating rotation of the movable body 30B caused by resonance, the movable wall 822 is displaced to drive the pump section 80. Therefore, along with further thinning of the pump 1B, the desired pressure and flow rate of the pump 1B can be ensured, and the high output of the pump 1B can be achieved.

[0201] Also, since the coil core portion 62B has three coils 50B in the magnetic circuit on one side of the pump 1B, the arrangement space of the coils can be dispersed compared to the case where there is one coil 50B, the degree of freedom in coil design can be increased, and an increase in driving output and thinning can be achieved.

[0202] (Fourth Embodiment) FIG. 27 is an external perspective view of the pump according to the fourth embodiment of the present invention. FIG. 28 is a perspective view showing the internal configuration of the pump according to the fourth embodiment of the present invention. FIG. 29 is a plan sectional view showing the internal configuration of the pump according to the fourth embodiment of the present invention. FIG. 30 is an exploded perspective view of the pump according to the fourth embodiment of the present invention. FIG. 31 is a perspective view of the coil core portion in the pump according to the fourth embodiment of the present invention. FIG. 32 is a perspective view of the movable body in the pump according to the fourth embodiment of the present invention.

[0203] The pump 1C has a basic configuration similar to that of the pump 1 shown in the first embodiment in FIG. 1, except that the configuration of the magnetic circuit is different. Therefore, hereinafter, the same reference numerals are given to the same components, and the description of the same components is omitted.

[0204] The pump 1C shown in FIGS. 27 to 32 has a basic configuration similar to that of the pump 1 of the first embodiment, except that the number of magnetic circuits provided by the magnet 70C and the coil core portion 62C is one, and the number of poles of the magnet 70C and the number of poles of the coil core portion 62C are different.

[0205] <Overall Configuration of Pump 1C> As shown in FIGS. 27 and 28, in a case 21C having a rectangular shape in plan view, a movable body 30C is provided so as to be reciprocally rotatable (reciprocally swingable) about a shaft portion 40C disposed at the center of the case 21C. The case 21C, together with a cover 22C that closes the opening of the case 21C, constitutes the housing of the pump 1C.

[0206] Inside the case 21C, the shaft portion 40C is provided on one side of both end portions in the longitudinal direction of the case 21C. The movable body 30C extends in a direction orthogonal to the axial direction of the shaft portion 40C and is provided inside the case 21C so as to be rotatable about the shaft portion 40C. A bearing portion 34 through which the shaft portion 40C is inserted is provided at one end portion of the movable body 30C, and a two-pole magnet 70C is provided at the other end portion of the movable body 30C.

[0207] On the other hand, inside the case 21C, a coil core portion 62C is provided along the end wall portion on the other side in the longitudinal direction of the case 21C. The coil core portion 62C is disposed at a position facing the magnet 70C with an air gap therebetween and has three core magnets 601C, 602C, and 603C.

[0208] Also, inside the case 21C, along the extending direction of the movable body 30C, a pair of pump portions 80C having the same basic configuration as the pump portions 80a and 80b are provided. The pair of pump portions 80C are provided so as to sandwich the movable body 30C in the depth direction of the case 21C. Note that the movable wall 822 of each pump portion 80C is connected to the pusher 351 of the pressing portion 35 of the movable body 30C configured in the same manner as the pusher 351 of the pressing portion 35 in the pump 1, pump 1A, or pump 1B, and is displaced by the reciprocating rotation (rotation) of the movable body 30C. Due to the displacement of the movable wall 822, air can be discharged from the discharge portion 86C.

[0209] <Coil core portion 62C> As shown in Fig. 31, the coil core portion 62C has a coil 50C and an E-shaped core portion 60C. The core portion 60C has a back surface portion 608 having a predetermined height, here substantially the same height as the heights of the case 21C and the movable body 30C, and core magnetic poles 601C to 603C protruding in parallel in the same direction from the back surface portion 608. In the present embodiment, the thickness (length in the height direction) of the core magnetic poles 601C to 603C is thinner than the thickness of the back surface portion 608, and they protrude in the same direction from the central portion in the height direction of the back surface portion 608 respectively. As a result, the tip surfaces of the core magnetic poles 601C to 603C are formed long in the rotation direction of the movable body 30C and are arc-shaped surfaces that are concave on the tip side. In the coil core portion 62C, the number of coils 50C is one, and the coil 50C is wound around the core magnetic pole 601C, which is the central protrusion of the core portion 60C, via a bobbin 65C.

[0210] That is, in the coil core portion 62C, when an electric current is applied to the coil 50C, the tip of the core magnetic pole 601C located inside the coil 50C is magnetized. At this time, the polarity of the core magnetic pole 601C is different from the polarities of the core magnetic poles 602C and 603C sandwiching the core magnetic pole 601C from both sides. As a result, the core magnetic poles 601C to 603C, which are the protrusions of the core portion 60C, are magnetized so as to have alternately different polarities in the rotation direction of the movable body 30C. Note that the periphery of the tip of the core magnetic pole 601C is covered by the flange of the bobbin 65C.

[0211] The core magnetic poles 601C, 602C, and 603C of the coil core portion 62C are arranged in an arc shape so as to face the magnet 70C respectively.

[0212] <Magnet 70C> As shown in Fig. 32, the magnet 70C is fixed via a magnet fixing portion 326C formed on the other end portion of the movable body main body 32C. Note that a bearing portion 34 for inserting the shaft portion 40C is provided at one end portion of the movable portion main body 32C.

[0213] The magnetic pole surface 72C of the magnet 70C is arranged in an arc shape protruding on the other end of the movable body main body 32C and faces the core magnetic poles 601C to 603C of the core part 60C. The magnetic pole surface 72C of the magnet 70C has magnetic poles 721C and 722C of different polarities arranged in the rotation direction of the movable body 30C.

[0214] For the magnet 70C, the position (switching position) of the boundary surface between the magnetic poles 721C and 722C of the magnet 70C is located on the axis in the extending direction (longitudinal direction) of the magnet 70C, and further, the position (switching position) of the boundary surface between the magnetic poles 721C and 722C of the magnet 70C is arranged at a position overlapping with the center in the rotation direction of the core magnetic pole 601C at the center of the coil core part 62C.

[0215] A magnetic attraction force is generated between the magnet 70C and the core part 60C of the coil core part 62C, which functions as a magnetic spring. That is, at the other end in the longitudinal direction of the movable body 30C, a magnetic spring due to the magnetic attraction force is generated.

[0216] When the pump 1C is in a non-energized state, that is, in a normal state, the rotation of the movable body 30C around the shaft part 40C is suppressed by the magnetic spring provided by the magnet 70C and the core part 60 of the coil core part 62C. Specifically, due to the magnetic attraction force, the core part 60C and the magnet 70C are attracted to each other at a position where the central core magnetic pole 601C of the core part 60C faces the central part of the two poles 721C and 722C at the center of the magnet 70C.

[0217] Due to the magnetic attraction force attracting the magnet 70C and the core part 60C to each other, the movable body 30C is maintained in a horizontal state at the reference position as the center position of the swing range when reciprocally rotating (pivoting), that is, the center of the swing range of the swinging motion centered on the shaft part 40C (rotation reference position).

[0218] As shown in FIG. 29, the magnet 70C and the coil core portion 62C are arranged in the case 21C such that the position (switching position) of the boundary surface between the magnetic poles 721C and 722C of the magnet 70C overlaps with the center of the length in the rotational direction of the core magnetic pole 601C at the center of the coil core portion 62C in the longitudinal direction. In the normal state, the position of the movable body 30C when realizing such a positional relationship is the rotational reference position. The movable body 30C can reciprocally rotate (reciprocally pivot) by the same distance in the depth direction of the case 21C, that is, in the direction orthogonal to both the longitudinal direction and the axial direction of the case 21C from this position.

[0219] FIG. 33 is a diagram showing the magnetic circuit configuration of the pump according to the fourth embodiment of the present invention.

[0220] The magnet 70C has different polarities 721C and 722C arranged in the rotational direction on the magnetic pole surface 72C facing the coil core portion 62C. In the magnet 70C shown in FIG. 33, the two magnetic poles 721C and 722C are the S pole and the N pole, and are facing the magnetic poles of the coil core portion 62C.

[0221] A current is supplied to the coil 50C of the coil core portion 62C to excite the core portion 60C. At this time, the winding direction of the coil 50C, the direction of the current flowing through the coil 50C, etc. are set such that the polarity of the core magnetic pole 601C which is the central protrusion in the core portion 60C is different from the polarities of the core magnetic poles 602C and 603C on both sides of the core magnetic pole 601C.

[0222] For example, in the coil core portion 62C shown in FIG. 33, the core magnetic pole 601C at the center of the core portion 60C is magnetized to the N pole, and the core magnetic poles 602C and 603C of the core portion 60C are magnetized to the S pole. At this time, the core magnetic pole 601C is excited by the coil 50C.

[0223] As shown in FIG. 33, the magnetic poles 721C and 722C of the magnet 70C facing the core magnetic pole 601C that becomes the N pole are the S pole and the N pole. With respect to the core magnetic pole 601C that becomes the N pole, the magnetic pole 721C that is the S pole is attracted by the magnetic attraction force, and the magnetic pole 722C that is the N pole repels the core magnetic pole 601C that becomes the N pole.

[0224] Due to these actions, a thrust force in the F1 direction is generated between the magnet 70C and the coil core portion 62C, and the movable body 30C is driven in the F1 direction.

[0225] In a state where no current is supplied to the coil 50C, as described above, the movable body 30C is positioned at the rotational reference position and the neutral position during reciprocating motion by the magnetic spring provided by the magnet 70C and the coil core portion 62C.

[0226] Also, when a current is supplied to the coil 50C in the reverse direction to reverse the polarity of the core portion 60C, that is, the magnetic pole 601C at the center of the core portion 60C facing the magnet 70C is the S pole, and the core magnetic poles 602C and 603C are the N poles. As a result, the magnet 70C facing these rotates and moves in the direction opposite to the F1 direction (-F1 direction). The movable body 30C is driven in the -F1 direction, which is exactly opposite to the F1 direction.

[0227] As a result, the movable body 30C suitably rotates and reciprocates (rotates) about the shaft portion 40C due to the magnetic attraction force and repulsive force that are effectively generated in the magnetic circuit provided by the magnet 70C and the coil core portion 62C at the other end of the movable body 30C.

[0228] In this way, in the pump 1C, similar to the first embodiment, by changing the direction of the current supplied to the coil 50C, the movable body 30C provided with the magnet 70C can be reciprocally moved (reciprocally vibrated) in the vibration direction. The driving principle of this pump 1C is the same operating principle as that of the pump 1 of the first embodiment realized by the above formulas (1), (2), (3), (4), and (5).

[0229] In the magnetic circuit of pump 1C, the core portion 60C forms three core poles 601C, 602C, and 603C using coil 50C. In this way, pump 1C has a configuration in which the magnetic spring of the magnetic circuit between magnet 70C and core portion 60C elastically supports a movable body 30C that reciprocally rotates (pivots) due to resonance. Therefore, further miniaturization of pump 1C is possible, the number of parts of pump 1C can be reduced, the manufacturing cost of pump 1C can be reduced, and the drive output of pump 1C can be improved.

[0230] <Fifth Embodiment> FIG. 34 is an external perspective view of a pump according to the fifth embodiment of the present invention. FIG. 35 is an exploded perspective view of the pump according to the fifth embodiment of the present invention. FIG. 36 is a plan sectional view showing the internal configuration of the pump according to the fifth embodiment of the present invention. FIG. 37 is an exploded perspective view of the pump section in the pump according to the fifth embodiment of the present invention. FIG. 38 is a diagram showing the air flow path of the pump section in the pump according to the fifth embodiment of the present invention. FIG. 39 is a schematic diagram for explaining the reciprocating rotational movement of the movable body in the pump according to the fifth embodiment of the present invention.

[0231] Pump 1D of the present embodiment has a basic configuration similar to that of pump 1 shown in FIG. 1, except that the fixed body includes a magnet and the movable body includes a coil core portion. Therefore, hereinafter, the same reference numerals are given to the same components, and the description of the same components is omitted.

[0232] <Overall Configuration of Pump 1D> Pump 1D shown in FIGS. 34 to 39 has a basic configuration similar to that of pump 1 of the first embodiment, except that the fixed body 20D includes magnets 70D (70D-1, 70D-2) and the movable body 30D includes a coil core portion 62D.

[0233] As shown in FIGS. 34 to 36, in the pump 1D of the present embodiment, the fixed body 20D includes a case 21D having a rectangular shape in plan view, a cover 22D covering an opening portion that opens upward of the case 21D, a pair of yokes 73 respectively provided on the inner surfaces of both end wall portions spaced apart in the longitudinal direction of the case 21D, and a pair of magnets 70D-1 and 70D-2 respectively provided on the pair of yokes 73. Further, a pair of pump portions 80D are respectively provided on the inner surfaces of both end wall portions spaced apart in the depth direction of the case 21D. Therefore, the pair of pump portions 80D are arranged to face each other at positions sandwiching the movable body 30D in the depth direction of the case 21D, that is, in the reciprocating rotation (rotation) direction of the movable body 30D.

[0234] In the case 21D, the shaft portion 40D is provided on the bottom surface of the case 21D so as to extend in the height direction of the case 21 from a portion on one side of both longitudinal ends. By inserting the shaft portion 40D through the bearing portion 34 of the movable body 30D, the movable body 30D is supported in the case 21D so as to be reciprocally rotatable (rotatable) about the shaft portion 40D.

[0235] The pair of yokes 73 are respectively provided on the inner surfaces of both end wall portions spaced apart in the longitudinal direction of the case 21D. Each of the pair of yokes 73 is made of a magnetic material and has a substantially rectangular parallelepiped shape including a flat surface facing the end wall portion of the case 21 and an arcuate surface on the opposite side of the flat surface. Each yoke 73 is fixed on the inner surface of the end wall portion of the case 21 so that the flat surface faces the inner surface of the end wall portion of the case 21 and the arcuate surface faces the inside of the case 21. Therefore, as shown in FIG. 36, the arcuate surfaces of the pair of yokes 73 respectively provided on the inner surfaces of both end wall portions spaced apart in the longitudinal direction of the case 21D face each other via the magnets 70D-1, 70D-2, and the movable body 30D.

[0236] <Magnet 70D> As shown in FIG. 36, each of the magnets 70D-1 and 70D-2 has an arc shape that conforms to the arc-shaped surfaces of the pair of yokes 73. The magnets 70D-1 and 70D-2 are respectively provided on the arc-shaped surfaces of the pair of yokes 73. Each of the magnets 70D-1 and 70D-2 has two magnetic poles 721D and 722D on the magnetic pole surface 72D facing the movable body 30D. The two magnetic poles 721D and 722D are arranged along the rotation (pivoting) direction of the movable body 30D and have different magnetic poles from each other. As shown in FIGS. 39A and 39B, for example, the magnetic pole 721D is an S pole and the magnetic pole 722D is an N pole. Thus, in the pump 1D of the present embodiment, unlike the pumps 1, 1A to 1C of the first to fourth embodiments, the fixed body 20D includes the magnets 70D-1 and 70D-2.

[0237] <movable body 30D> In the pump 1D of the present embodiment, the movable body 30D is made of a magnetic material (ferromagnetic material) and also functions as a coil core portion 62D. As shown in FIGS. 35 and 36, the movable body 30D includes a movable body main body 32D having an arm portion 324a, a pressing portion 35 provided on the arm portion 324a, a bobbin 65D provided at the tip of the arm portion 324a, and a coil 50D wound around the bobbin 65D and powered from a power supply unit. Note that the pressing portion 35 of the present embodiment has the same configuration as the respective pressing portions 35 of the pumps 1, 1A to 1C of the first to fifth embodiments described above.

[0238] By inserting the shaft portion 40D into the bearing portion 34, the movable body 30D is supported so as to be reciprocally rotatable (pivotable) within the case 21D. The movable body main body 32D has a central opening 322 (see FIG. 3) into which the bearing portion 34 is fitted, and an arm portion 324a provided so as to extend in a direction orthogonal to the axial direction of the shaft portion 40D from the movable body main body 32D. Both the movable body main body 32D and the arm portion 324a are made of a magnetic material (ferromagnetic material) and are further integrated. Therefore, by energizing the coil 50D provided so as to surround the tip of the arm portion 324a via the bobbin 65D, both ends of the movable body 30D are magnetized with different magnetic poles from each other. Thus, in the pump 1D of the present embodiment, the arm portion 324a of the movable body 30D functions as a core portion 60D around which the coil 50D is wound, and further, the movable body 30D functions as a coil core portion 62D. Furthermore, by energizing the coil 50D, both ends of the movable body 30D are excited and function as core magnetic poles of the coil core portion 62D. Therefore, in the pump 1D of the present embodiment, the movable body 30D can be regarded as including the coil core portion 62D. Also, it can be regarded that the coil core portion 62D is provided at the tip of the arm portion 324a.

[0239] The movable body 30D is disposed in the case 21 such that one end thereof faces the magnet 70D-1 with an air gap therebetween in a direction orthogonal to the axial direction (rotation axis) of the shaft portion 40D, and the other end thereof faces the magnet 70D-2 with an air gap therebetween in a direction orthogonal to the axial direction (rotation axis) of the shaft portion 40D. Further, since both the movable body main body 32D and the arm portion 324a are made of a magnetic material (ferromagnetic material), a magnetic circuit is formed between one end of the movable body 30D and the magnet 70D-1, and between the other end of the movable body 30D and the magnet 70D-2. FIG. 39A shows a state in which the coil 50D is energized, one end of the movable body 30D facing the magnet 70D-1 is magnetized with an S pole, and the other end of the movable body 30D facing the magnet 70D-2 is magnetized with an N pole. Further, FIG. 39B shows a state in which a current is passed through the coil 50 in the reverse direction to reverse the polarities of both ends of the movable body 30D, that is, one end of the movable body 30D facing the magnet 70D-1 is magnetized with an N pole, and the other end of the movable body 30D facing the magnet 70D-2 is magnetized with an S pole. As shown in FIGS. 39A and 39B, a magnetic circuit is provided by one end of the movable body 30D functioning as a core pole of the coil core portion 62D and the magnet 70D-1. Similarly, a magnetic circuit is provided by the other end of the movable body 30D functioning as a core pole of the coil core portion 62D and the magnet 70D-2.

[0240] <Pump unit 80D> As shown in FIG. 37, each of the pair of pump units 80D includes a base 801, a diaphragm portion 802, a cylinder portion 803, valves 84a, 84b, a valve cover portion 805, and a flow path forming portion 807. The base 801 has one opening, and the insertion portion 822a of the diaphragm portion 802 is inserted into this opening from the back side and is disposed in a state where the insertion portion 822a protrudes to the front side.

[0241] The diaphragm portion 802 has one insertion portion 822a and one movable wall 822. On the back side of the flexible and elastically deformable movable wall 822, a chamber forming portion 824 of the cylinder portion 803 is disposed. The diaphragm portion 802 and the cylinder portion 803 are attached to each other such that a sealed chamber 82, which is a sealed space, is formed by the movable wall 822 of the diaphragm portion 802 and the chamber forming portion 824 of the cylinder portion 803.

[0242] As shown in FIG. 38, the valve 84a is provided to block a flow path that communicates the sealed chamber 82 defined by the movable wall 822 and the chamber forming portion 824 with the suction portion 83D. When the pressure in the sealed chamber 82 drops to a predetermined threshold value, the valve 84a opens, and air is inhaled into the sealed chamber 82 through the suction portion 83D. When the pressure in the sealed chamber 82 exceeds the predetermined threshold value, the valve 84a closes, and the inhalation of air into the sealed chamber 82 through the suction portion 83D stops. The valve 84b is provided to block a flow path that communicates the sealed chamber 82 defined by the movable wall 822 and the chamber forming portion 824 with the discharge portion 86D. When the pressure in the sealed chamber 82 exceeds the predetermined threshold value, the valve 84b opens, and the air in the sealed chamber 82 is discharged to the outside through the discharge portion 86D. When the pressure in the sealed chamber 82 drops to the predetermined threshold value, the valve 84b closes, and the discharge of air from the sealed chamber 82 to the outside through the discharge portion 86D stops.

[0243] Returning to FIG. 37, the valve cover portion 805 is attached to the cylinder portion 803 from the back side of the cylinder portion 803. Further, the flow path forming portion 807 is attached to the valve cover portion 805 from the back side of the valve cover portion 805. The flow path forming portion 807 is formed with a suction portion 83D for inhaling air into the sealed chamber 82 and a discharge portion 86D for discharging air from the sealed chamber 82. The suction portion 83D and the discharge portion 86D are formed to protrude outward from the back side of the flow path forming portion 807. As shown in FIG. 34, the suction portion 83D and the discharge portion 86D protrude outward from the wall portion in the short side direction of the case 21D of the pump 1D.

[0244] FIG. 38 shows a flow path for sucking air into the sealed chamber 82 through the suction part 83D and a flow path for discharging the air in the sealed chamber 82 through the discharge part 86D. The arrows in FIG. 38 indicate the air flow. When the valve 84a is opened, air is sucked into the sealed chamber 82 through the suction part 83D. On the other hand, when the valve 84b is opened, the air in the sealed chamber 82 is discharged to the outside through the discharge part 86D. Similar to the pumps 1, 1A to 1C of the first to fourth embodiments described above, the pusher 351 of the pressing part 35 is connected to the insertion part 822a of the sealed chamber 82. Therefore, when the movable body 30D reciprocates (rotates), the pressure in the sealed chamber 82 changes with the reciprocating rotational motion (rotational motion) of the movable body 30D, and the suction of air into the sealed chamber 82 and the discharge of air from the sealed chamber 82 to the outside are executed.

[0245] Next, with reference to FIGS. 39A and 39B, the reciprocating rotational motion of the movable body 30D in the pump 1D will be described. FIG. 39A shows a state in which the coil 50D is energized, one end of the movable body 30D facing the magnet 70D-1 is magnetized with an S pole, and the other end of the movable body 30D facing the magnet 70D-2 is magnetized with an N pole. As shown in FIG. 39A, one end of the movable body 30D that becomes the S pole repels the magnetic pole 721D of the magnet 70D-1 which is the S pole, while attracting the magnetic pole 722D of the magnet 70D-1 which is the N pole. As a result, a thrust force for rotating (rotating) the movable body 30D in the F1 direction is generated at one end of the movable body 30D. On the other hand, the other end of the movable body 30D that becomes the N pole attracts the magnetic pole 721D of the magnet 70D-2 which is the S pole, while repelling the magnetic pole 722D of the magnet 70D-2 which is the N pole. As a result, a thrust force for rotating (rotating) the movable body 30D in the F1 direction is generated at the other end of the movable body 30D.

[0246] Also, FIG. 39B shows a state where a current is passed through the coil 50 in the reverse direction to reverse the polarities of both ends of the movable body 30D. That is, one end of the movable body 30D facing the magnet 70D-1 is magnetized with an N pole, and the other end of the movable body 30D facing the magnet 70D-2 is magnetized with an S pole. As shown in FIG. 39B, one end of the movable body 30D that becomes the N pole is attracted to the magnetic pole 721D of the magnet 70D-1 which is an S pole, while it repels the magnetic pole 722D of the magnet 70D-1 which is an N pole. As a result, a thrust force that rotates (pivots) the movable body 30D in the -F1 direction is generated at one end of the movable body 30D. On the other hand, the other end of the movable body 30D that becomes the S pole repels the magnetic pole 721D of the magnet 70D-2 which is an S pole, while it is attracted to the magnetic pole 722D of the magnet 70D-2 which is an N pole. As a result, a thrust force that rotates (pivots) the movable body 30D in the -F1 direction is generated at the other end of the movable body 30D. With such a configuration, by supplying an alternating current of an appropriate frequency to the coil 50D, the movable body 30D rotates (pivots) back and forth preferably about the shaft portion 40D within the case 21D.

[0247] Thus, in the pump 1D, similar to the first embodiment, by changing the direction of the current supplied to the coil 50D, the movable body 30D including the coil core portion 62D can be reciprocated (reciprocally vibrated) in the vibration direction. The driving principle of this pump 1D is the same operating principle as that of the pump 1 of the first embodiment realized by the above formulas (1), (2), (3), (4), and (5). In this embodiment, since the coil 50D is provided on the arm portion 324a of the reciprocally rotating (pivoting) movable body 30D, the vibration actuator 10 of this embodiment is a moving coil type actuator. On the other hand, in the above-described first to fourth embodiments, since the magnets 70, 70A, 70B, or 70C are provided on the reciprocally rotating (pivoting) movable bodies 30, 30A, 30B, or 30C, each of the vibration actuators 10 of the first to fourth embodiments is a moving magnet type actuator.

[0248] The pumps of each of the embodiments described in detail so far may be mounted on, for example, a wearable device to measure blood pressure and the like. Further, the pump device may be a sphygmomanometer in which the pump is integrally provided in the cuff. Further, it can be used as an air pump installed in an aquarium. The drive source of the pump device can be driven by a battery such as a dry battery. In this case, of course, the configuration is such that the current of the dry battery is converted into a current for driving the pump, that is, the direct current is converted into an alternating current.

[0249] <Sixth Embodiment> FIG. 40 is a diagram schematically showing an air supply device according to the fifth embodiment of the present invention. The pump device shown in FIG. 40 is, for example, a blood pressure device 10E as an air supply device.

[0250] The blood pressure device 10E includes a cuff 102, a pipe portion 5 that sends air to the cuff 102, and a drive unit 104.

[0251] The drive unit 104 includes a drive control unit 106 and a resonance pump 1E which is any one of the pumps 1A to 1D of the present embodiment. A drive signal converted to drive the resonance pump 1E is input from the drive control unit 106.

[0252] The drive control unit 106 is connected to the resonance pump 1E, and a circuit for driving the vibration actuator 10 is mounted. The drive control unit 106 supplies a drive signal to the resonance pump 1E.

[0253] The resonance pump 1E is driven according to the drive signal from the drive control unit 106. Specifically, in a state where the pipe portion 5 is connected to the discharge portion 86 of the resonance pump 1E, the movable body 30 vibrates and drives the pump portion 80, so that air can be suitably supplied to a cuff such as a blood pressure meter tester.

[0254] With this configuration, it is possible to secure a desired pressure and flow rate while being thin. Above, embodiments of the present invention have been described. Note that the above description is an illustration of a preferred embodiment of the present invention, and the scope of the present invention is not limited thereto. That is, the description of the configuration of the above device and the shape of each part is an example, and it is obvious that various changes and additions to these examples are possible within the scope of the present invention.

Industrial Applicability

[0255] The pump and air supply device according to the present invention can achieve a thinner design and has the effect of securing a high discharge pressure and a large conveyance flow rate. For example, it is useful as a wearable device where thinner and higher output are desired. Therefore, the present invention has industrial applicability.

Claims

1. An electromagnetic drive vibration actuator, and a pump unit that sucks and discharges fluid by electromagnetic drive of the vibration actuator, and has the vibration actuator includes one of a coil core unit having a coil and a core unit around which the coil is wound, and a magnet disposed opposite to an end of the core unit, and a fixed body provided with the pump unit; includes the other of the coil core unit and the magnet, and a movable body elastically held by magnetic attraction of the magnet; a shaft portion that supports the movable body so as to be reciprocally rotatable; and has the pump unit a movable wall that moves by rotational movement of the movable body; a sealed chamber that communicates with a fluid discharge port and a fluid suction port and whose volume is changed by displacement of the movable wall; and has the movable body has a pressing portion that moves in an arc shape around the shaft portion as the movable body reciprocally rotates and abuts against and presses the movable wall, and an arm portion that extends in a direction orthogonal to the axial direction of the shaft portion from a portion pivotally supported by the shaft portion so as to be reciprocally rotatable; the arm portion has a round hole that penetrates the arm portion in the axial direction of the shaft portion, and a long hole that penetrates the arm portion in the axial direction of the shaft portion and is long in the direction orthogonal to the axial direction of the shaft portion; the pressing portion has a shaft protrusion axially attached to the round hole of the arm portion and a guide protrusion loosely fitted in the long hole of the arm portion; the pressing portion linearly presses the movable wall as the movable body reciprocally rotates; the movable wall is disposed in the moving direction of the pressing portion and is displaced when linearly pressed by the pressing portion to discharge the fluid in the sealed chamber through the discharge port. A pump characterized by this.

2. A pair of the sealed chambers are provided, the pair of sealed chambers are disposed opposite to each other at positions where the arm portion is sandwiched in the reciprocating rotation direction; the pressing portion has a pair of pressing elements corresponding to the pair of movable walls; each of the movable walls of the sealed chamber is linearly pressed by the pressing element when the arm portion reciprocally rotates. The pump according to claim 1.

3. the movable body has a pair of the arm portions that extend in opposite directions to each other in the direction orthogonal to the axial direction of the shaft portion from the portion pivotally supported by the shaft portion so as to be reciprocally rotatable; the other of the coil core unit and the magnet is provided at each tip of the arm portions. The fixing member is provided with one of the coil core portion and the magnet facing the other of the coil core portion and the magnet. A pair of the sealed chambers are provided. The pair of sealed chambers are arranged in parallel along the extending direction of the pair of arm portions. The pressing portion has a pair of pressing members corresponding to the pair of movable walls. Each of the movable walls of the sealed chamber is linearly pressed by the pressing portion when the arm portion reciprocally rotates. The pump according to claim 1.

4. The pair of sealed chambers have their respective discharge ports connected to each other. The pump according to claim 3.

5. The pressing member is connected to the movable wall. The pump according to any one of claims 2 to 4.

6. The magnet is provided on one of the movable body and the fixing member, and constitutes a magnetic spring with the core portion of the coil core portion provided on the other of the movable body and the fixing member. The pump according to any one of claims 1 to 5.

7. The magnet is magnetized to three poles. The core portion of the coil core portion has one coil wound thereon and has two magnetic poles facing the magnet in the magnetization direction of the magnet. The pump according to any one of claims 1 to 6.

8. The magnet is magnetized to four poles. The core portion of the coil core portion has one coil wound thereon and has three magnetic poles facing the magnet in the magnetization direction of the magnet. The pump according to any one of claims 1 to 6.

9. The magnet is magnetized to four poles. The core portion of the coil core portion has three coils wound thereon respectively and has three magnetic poles facing the magnet in the magnetization direction of the magnet. The pump according to any one of claims 1 to 6.

10. The movable body is pivotally supported at one end by the shaft portion so as to be reciprocally rotatable, and has the other of the coil core portion and the magnet on the other end side. The fixing member has one of the coil core portion and the magnet facing the other in a direction orthogonal to the rotation axis of the movable body with respect to the other. The magnet is magnetized to two poles. The pump according to any one of claims 1 to 6.

11. The core portion has three magnetic poles with one coil wound thereon. The pump according to claim 10.

12. The movable body is pivotally supported at one end by the shaft portion so as to be reciprocally rotatable, and further includes the coil core portion. The fixed body includes the magnet that faces the coil core portion in a direction orthogonal to the rotation axis of the movable body, and the pump according to claim 1 or 2.

13. An air supply device characterized by including the pump according to any one of claims 1 to 12.

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