Surface inspection device, surface inspection method, and surface inspection program

Abstract

To provide a surface inspection device, a surface inspection method and a surface inspection program which improve the productivity.SOLUTION: A surface inspection device 10 according to the present disclosure inspects the state of a surface of an inspection object. The surface inspection device comprises: an irradiation unit 11 which emits illumination light with mutually different wavelength regions to the surface of the inspection object and alternately emits white light and the illumination light; an imaging unit 12 which detects reflection light reflected on the surface and images the surface; and a processing unit 13 which generates a synthetic image on the basis of the photographed image and inspects the state of the surface of the inspection object. The surface inspection device captures two or more line images with the illumination light and the line image with the white light by using the imaging unit while alternately emitting the illumination light and the white light to the surface, generates the synthetic image from the two or more line images with the illumination light by the processing unit, and inspects the state of the surface on the basis of the synthetic image and the line image with the white light.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a surface inspection apparatus, a surface inspection method, and a surface inspection program.

Background Art

[0002] In an automobile factory production line, inspections are performed on defective parts consisting of fine irregularities on the coating surface of an automobile body and on coating color defects. For example, Patent Document 1 discloses a surface inspection apparatus for inspecting defective parts consisting of fine irregularities. A plurality of illumination lights having different wavelength ranges are irradiated onto an inspection surface, the reflected light reflected from the inspection surface is imaged, and image data for each wavelength range is acquired. Image processing is performed to extract an inspection target from the acquired image data for each wavelength range, and unevenness defects are inspected by line analysis of the specular reflection amount and the diffuse reflection amount for each wavelength of the reflected light.

[0003] Patent Document 2 discloses a surface inspection apparatus for inspecting coating color defects. Illumination means composed of LEDs is used to prevent baking of the coating surface, and inspection unevenness due to color differences on the coating surface of a vehicle is eliminated to improve the inspection rate. checked.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the surface inspection device disclosed in Patent Document 1 described above, although defects consisting of fine irregularities are inspected, coating color defects cannot be inspected. On the other hand, in the surface inspection device disclosed in Patent Document 2 described above, although coating color defects are inspected, defects consisting of fine irregularities cannot be inspected. That is, there has been a problem that it is impossible to simultaneously inspect defects consisting of fine irregularities on the coating film surface of an automobile body and coating color defects, resulting in a lack of productivity.

[0006] The present disclosure has been made in view of such circumstances, and provides a surface inspection device, a surface inspection method, and a surface inspection program for improving productivity.

Means for Solving the Problems

[0007] The surface inspection device according to the present disclosure is a surface inspection device for inspecting the state of the surface of an inspection object, and irradiates the surface with illumination light having different wavelength ranges, and alternately irradiates the surface with white light and the illumination light. An irradiation unit, an imaging unit that detects reflected light reflected from the surface and images the surface, and a processing unit that generates a composite image based on the captured image and inspects the state of the surface. Using the irradiation unit, while alternately irradiating the illumination light and white light, using the imaging unit, two or more line images by the illumination light and a line image by the white light are imaged, and the processing unit generates a composite image from the two or more line images by the illumination light, and based on the composite image and the line image by the white light, the state of the surface is inspected.

[0008] The surface inspection device according to the present disclosure can simultaneously perform inspection of defects consisting of fine irregularities on the painted surface and inspection of coating color defects, so that productivity can be improved.

[0009] The illumination light may be light having a red wavelength range, a blue wavelength range, and a green wavelength range. With such a configuration, the detection accuracy of defects consisting of fine irregularities can be enhanced.

[0010] The imaging unit includes a first detection unit that detects the illumination light and a second detection unit that detects the white light. With such a configuration, the illumination light and the white light can be detected separately, and the inspection of the defective portions composed of fine unevenness and the inspection of the painting color defect can be performed simultaneously.

[0011] The surface inspection method according to the present disclosure is a surface inspection method for inspecting the state of the surface of an inspection object, irradiates illumination lights having different wavelength ranges, and alternately irradiates white light and the illumination light while imaging two or more line images formed by the illumination light and a line image formed by the white light, generating a composite image from the two or more line images formed by the illumination light, and inspecting the state of the surface based on the composite image and the line image formed by the white light.

[0012] Since the surface inspection method according to the present disclosure can simultaneously perform the inspection of defective portions composed of fine unevenness on the painted surface and the inspection of painting color defects, the productivity can be improved.

[0013] The surface inspection program according to the present disclosure is a surface inspection program for inspecting the state of the surface of an inspection object, causes a computer to execute a process of irradiating illumination lights having different wavelength ranges, alternately irradiating white light and the illumination light while imaging two or more line images formed by the illumination light and a line image formed by the white light, a process of generating a composite image from the two or more line images formed by the illumination light, and a process of inspecting the state of the surface based on the composite image and the line image formed by the white light.

[0014] Since the surface inspection program according to the present disclosure can simultaneously perform the inspection of defective portions composed of fine unevenness on the painted surface and the inspection of painting color defects, the productivity can be improved.

Effects of the Invention

[0015] According to the present disclosure, it is possible to provide a surface inspection apparatus, a surface inspection method, and a surface inspection program capable of improving productivity.

Brief Description of the Drawings

[0016]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Mode for Carrying Out the Invention

[0017] Hereinafter, the present invention will be described through embodiments of the invention, but the invention according to the claims is not limited to the following embodiments. Also, not all of the configurations described in the embodiments are essential as means for solving the problems. For the sake of clarity of explanation, the following description and drawings have been appropriately omitted and simplified. In each drawing, the same elements are denoted by the same reference numerals, and duplicate explanations are omitted as necessary. Of course, the right-handed xyz orthogonal coordinates shown in the drawings are for convenience in explaining the positional relationship of the components. Usually, the positive direction of the z-axis is vertically upward, and the xy plane is a horizontal plane.

[0018] (Embodiment 1) <Surface defect> After painting the surface (body) of an automobile, surface defects due to painting are inspected. The surface defects include unevenness defects and color defects. An uneven defect refers to a defect where there are dust and pinholes between the painted surface and the surface of the automobile. In addition, the uneven defect also includes a defect where sagging occurs at the end of the painted surface. A color defect refers to a defect where a color other than the painted color is mixed in the painted surface.

[0019] <Surface inspection device> First, with reference to FIGS. 1, 2, and 3, the configuration of the surface inspection device according to Embodiment 1 will be described. FIG. 1 is a block diagram illustrating the surface inspection device according to Embodiment 1. FIG. 2 is a schematic diagram of a method for inspecting the body surface of an automobile by the surface inspection device according to Embodiment 1. In FIG. 2, imaging is performed with the positive x-axis direction as the moving direction F. FIG. 3 is a diagram schematically showing the irradiation unit and the imaging unit in the surface inspection device according to Embodiment 1. In FIG. 3, imaging is performed with the positive x-axis direction as the moving direction F. As shown in FIG. 1, the surface inspection device 10 includes an irradiation unit 11, an imaging unit 12, and a processing unit 13.

[0020] With reference to FIG. 2, the irradiation unit 11 in the surface inspection device 10 according to Embodiment 1 will be described. The irradiation unit 11 irradiates the body surface S1 of the automobile with illumination lights having different wavelength ranges, and alternately irradiates white light and illumination light. Here, the body surface S1 of the automobile indicates the surface obtained by painting the surface of the automobile. The switching of the lighting of the illumination light and the white light in the irradiation unit 11 is performed in 70 microseconds. However, without being limited thereto, the switching of the lighting of three illumination lights having different wavelength ranges and the white light in the irradiation unit 11 may be performed around 70 microseconds. Hereinafter, when it is not necessary to distinguish between the illumination light and the white light irradiated by the irradiation unit 11, they are collectively referred to as irradiation light.

[0021] A first period of irradiating irradiation light including light in a plurality of wavelength ranges and a second period of irradiating white light are alternately repeated. The first period is 70 microseconds, and the second period is 70 microseconds. In the example shown in FIG. 2, first, the irradiation unit 11 irradiates three illumination lights having different wavelength ranges to generate a line image A. Next, after imaging the line image A, the irradiation unit 11 irradiates three illumination lights having different wavelength ranges to generate a line image B. Subsequently, after imaging the line image B, the irradiation unit 11 irradiates white light to generate a line image C. The line images A and B are imaged during the first period of 70 microseconds. The line image C is imaged during the second period of 70 microseconds. Although the first period and the second period are the same time, they may be different times.

[0022] To alternately irradiate the illumination light and the white light, a control unit (not shown) for switching on and off the illumination light and the white light may be provided in the irradiation unit 11. Further, the control unit for switching on and off the illumination light and the white light is not limited to being provided in the irradiation unit 11, and may be provided outside by wired or wireless connection.

[0023] As shown in FIG. 2, the irradiation light irradiated by the irradiation unit 11 is reflected by the vehicle body surface S1 of the automobile and received by the imaging unit 12 through the optical system lens unit 12L.

[0024] Referring to FIG. 3, the irradiation unit 11 in the surface inspection apparatus 10 according to Embodiment 1 will be described in more detail. The irradiation unit 11 includes a light source 11a, a light source 11b, a light source 11c, and a light source 11d. The light sources 11a, 11b, and 11c output a plurality of irradiation lights with different wavelength ranges. In the irradiation unit 11, the light source 11a is red, the light source 11b is blue, and the light source 11c is green, and it outputs illumination light of RGB (R: red, G: green, B: blue), which are the three primary colors of light. The light source 11d outputs white light. The white light from the light source 11d includes light with RGB wavelengths and light with wavelengths other than RGB. The red light R has a wavelength of about 640 nm, the blue light B has a wavelength of about 470 nm, and the green light G has a wavelength of about 530 nm. The irradiation unit 11 simultaneously irradiates the surface with the RGB illumination light. That is, the illumination light including RGB light is irradiated onto the vehicle body surface S1 of the automobile.

[0025] As shown in FIG. 3, the light sources 11a, 11b, and 11c are arranged such that the wavelength ranges of the adjacent illumination lights are in an order with a large difference. When the wavelength ranges of the adjacent light sources are arranged to be close (when the light sources 11a (red), 11c (green), and 11b (blue) are in this order from the front to the rear in the moving direction F), there is a concern that the detection output may decrease due to the influence of the adjacent irradiation light when splitting the light.

[0026] Also, although not particularly shown in FIG. 3, the light sources 11a, 11b, 11c, and 11d are configured to extend linearly over a predetermined length along the y-axis direction perpendicular to the moving direction F, and line illumination using LEDs of each color may be used. The irradiation unit 11 performs line irradiation in the y-axis direction, and the imaging unit 12 detects the reflected light from the region irradiated by the line illumination. The imaging unit 12 includes a plurality of pixels arranged side by side in the y direction. While moving the irradiation unit 11 and the imaging unit 12 in the x-axis direction, the imaging unit 12 images the surface S1 of the vehicle body. By doing so, the entire vehicle body can be inspected.

[0027] Next, referring to FIG. 2, the imaging unit 12 in the surface inspection apparatus 10 according to Embodiment 1 will be described. As shown in FIG. 2, the imaging unit 12 captures a digital image (picture) of the vehicle body surface S1 of an automobile. The imaging unit 12 receives the irradiation light irradiated by the irradiation unit 11 and reflected by the vehicle body surface S1 of the automobile through the optical system lens unit 12L.

[0028] Referring to FIG. 3, the imaging unit 12 in the surface inspection apparatus 10 according to Embodiment 1 will be described in more detail. As shown in FIG. 2, the imaging unit 12 includes CCDs 12a, 12b, 12c, and 12d. CCD 12a receives red light among the three illumination lights with different wavelength ranges irradiated by the irradiation unit 11. CCD 12b receives blue light among the three illumination lights with different wavelength ranges irradiated by the irradiation unit 11. CCD 12c receives green light among the three illumination lights with different wavelength ranges irradiated by the irradiation unit 11. CCD 12d receives white light irradiated by the irradiation unit 11.

[0029] In other words, CCD 12a in the imaging unit 12 corresponds to the light source 11a in the irradiation unit 11 and receives red light. CCD 12b in the imaging unit 12 corresponds to the light source 11b in the irradiation unit 11 and receives blue light. CCD 12c in the imaging unit 12 corresponds to the light source 11c in the irradiation unit 11 and receives green light. CCD 12d in the imaging unit 12 corresponds to the light source 11d in the irradiation unit 11 and receives white light.

[0030] Furthermore, the angular positions of CCDs 12a, 12b, 12c, and 12d are set so as to receive the irradiation light irradiated by the irradiation unit 11 and reflected by the vehicle body surface S1 of the automobile, respectively.

[0031] Here, in the example shown in FIG. 3, the imaging unit 12 includes CCDs 12a, 12b, 12c, and 12d. However, it is not limited thereto, and the imaging unit 12 may include a first detection unit corresponding to RGB illumination light and a second detection unit corresponding to white light. The first detection unit and the second detection unit do not need to be arranged adjacent to each other. For example, they may be located at positions 90 degrees apart around a point on the surface S1 of the automobile. In this case, the reflected light reflected from the surface S1 of the automobile is filtered so that the RGB illumination light is incident on the first detection unit and the white light is incident on the second detection unit.

[0032] As shown in FIG. 2, the imaging unit 12 has an optical system lens unit 12L. The optical system lens unit 12L magnifies or reduces the image of the body surface S1 of the automobile and splits the irradiation light irradiated by the irradiation unit 11 and reflected by the body surface S1 of the automobile.

[0033] With reference to FIG. 3, the optical system lens unit 12L in the surface inspection apparatus 10 according to Embodiment 1 will be described in more detail. As shown in FIG. 3, the optical system lens unit 12L has a lens 24 and a spectroscopic means 25.

[0034] The lens 24 adjusts the focus of the imaging unit 12 with respect to the body surface S1 of the automobile. Thereby, the image of the body surface S1 of the automobile can be magnified or reduced. The spectroscopic means 25 includes optical elements such as a prism, a grating, and a wavelength filter. The spectroscopic means 25 splits the irradiation light reflected from the body surface S1 of the automobile in different directions. The spectroscopic means 25 causes the red light to be received by the CCD 12a, the blue light to be received by the CCD 12b, the green light to be received by the green CCD 12c, and the white light to be received by the CCD 12d. The irradiation light reflected from the body surface S1 of the automobile is referred to as reflected light.

[0035] Referring to FIG. 2, the image acquired by the imaging unit 12 will be described. As shown in FIG. 2, the irradiation unit 11 alternately irradiates white light and illumination light every 70 microseconds. In accordance with the switching of the lighting of the illumination light and white light by the irradiation unit 11, the imaging unit 12 captures an image of the vehicle body surface S1 of the automobile. Also, the irradiation unit 11 and the imaging unit 12 move in the moving direction F shown in FIG. 2 as time passes.

[0036] In the example shown in FIG. 2, first, the imaging unit 12 captures a line image A generated by three illumination lights with different wavelength ranges irradiated by the irradiation unit 11. Next, after the imaging unit 12 captures the line image A, the imaging unit 12 captures a line image B generated by three illumination lights with different wavelength ranges irradiated by the irradiation unit 11. Subsequently, after the imaging unit 12 captures the line image B, the imaging unit 12 captures a line image C generated by the white light irradiated by the irradiation unit 11. In this way, the imaging unit 12 continuously captures the line images A, B, and C in this order, and continuously scans the entire surface S1 of the automobile. Thereby, the entire vehicle body can be inspected.

[0037] Subsequently, the processing unit 13 in the surface inspection apparatus 10 according to Embodiment 1 will be described. The processing unit 13 generates a composite image based on the image captured by the imaging unit 12, and inspects the vehicle body surface S1 of the automobile. More specifically, the processing unit 13 generates a composite image from at least two or more line images by illumination light. The processing unit 13 inspects the vehicle body surface S1 of the automobile based on the generated composite image and the line image by white light. The method of image synthesis by the processing unit 13 and the method of detecting unevenness defects and color defects based on the synthesized image will be described later.

[0038] As shown in FIG. 2, the processing unit 13 and the imaging unit 12 are connected by wire or wirelessly. The method of transmission and reception between the processing unit 13 and the imaging unit 12 may be wired or a wireless network. The wireless network includes, for example, a wireless communication network using a communication line standard such as LTE. The wireless network may include a wireless communication network such as a wireless LAN (Local Area Network) or a fifth-generation mobile communication device.

[0039] Here, the irradiation unit 11, the imaging unit 12, and the processing unit 13 shown in FIG. 1 are not limited to a physically single device. That is, the irradiation unit 11, the imaging unit 12, and the processing unit 13 may be distributed and arranged in a plurality of devices. For example, the irradiation unit 11 and the imaging unit 12 may be physically configured as a single device, and the processing unit 13 may be configured as a tablet terminal.

[0040] <Image synthesis method> Subsequently, with reference to FIG. 4, an image synthesis method by the processing unit 13 in the surface inspection apparatus 10 according to Embodiment 1 will be described. FIG. 4 is a schematic diagram showing an image synthesis method by the processing unit 13 in the surface inspection apparatus 10 according to Embodiment 1. FIG. 4 is an example showing a line image by illumination light and a line image by white light.

[0041] First, as shown in FIG. 4, based on the line image A, the line image B, and the line image C captured using the imaging unit 12, the processing unit 13 synthesizes the images. One of the images by illumination light is the line image A, and the other is the line image B. The line images A and B are images captured by the CCDs 12a, 12b, and 12c shown in FIG. 3. The image by white light is the line image C. The image obtained by synthesizing the line image A and the line image B is defined as the synthesized image AB. The line image C is an image captured by the CCD 12d shown in FIG. 3. The number of pixels of the line image A, the line image B, and the line image C is determined by the imaging unit 12, but in FIG. 4, it is assumed to be an image of 2048 pixels. In the example shown in FIG. 4, one pixel in the line image A, the line image B, and the line image C indicates brightness.

[0042] In the example shown in FIG. 4, the pixels from 1 to m - 1 (1 ≤ m ≤ 2048) in the line image A are an image in which there is at least a difference in brightness between at least one of adjacent pixels, and the pixels from m to 2048 in the line image A are an image in which there is no difference in brightness between adjacent pixels. On the one hand, in the example shown in FIG. 4, the pixels from 1 to m - 1 in the line image B are an image with no difference in brightness between adjacent pixels, and the pixels from m to 2048 in the line image B are an image with a difference in brightness from at least one of the adjacent pixels.

[0043] The composite line image AB is an image obtained by selecting the line image in which there is a difference in brightness from at least one of the adjacent pixels among the line image A and the line image B. In the example shown in FIG. 4, the pixels from 1 to n (1 ≤ n ≤ m ≤ 2048) in the line image A are an image with a difference in brightness from at least one of the adjacent pixels, and the pixels from 1 to n (1 ≤ n ≤ m ≤ 2048) in the line image B are an image with no difference in brightness between adjacent pixels. Therefore, the pixels from 1 to n in the composite image AB are the image obtained by selecting the line image A. Also, in the example shown in FIG. 4, the pixels from m to 2048 in the line image A are an image with no difference in brightness between adjacent pixels, and the pixels from m to 2048 in the line image B are an image with a difference in brightness from at least one of the adjacent pixels. Therefore, the composite line image AB for the pixels from m to 2048 is the image obtained by selecting the line image B.

[0044] In the same procedure, the composite line image AB for the pixels from n + 1 to m - 1 is determined based on the line image A or the line image B. Here, the composite line image AB for the pixels from n + 1 to m - 1 is the line image A.

[0045] In other words, in the example shown in FIG. 4, the composite line image AB is the image in which the line image A is selected for the pixels from 1 to m - 1, and the line image B is selected for the pixels from m to 2048.

[0046] On the other hand, the processing unit 13 directly acquires and utilizes the line image C captured by the imaging unit 12.

[0047] In this way, the processing unit 13 generates a composite image from the line images A and B captured by the imaging unit 12. Also, the processing unit 13 directly utilizes the line image C. The processing unit 13 performs the same processing on a plurality of line images A, line images B, and line images C obtained by the continuous scanning of the imaging unit 12. For example, if the number of each of the line images A, line images B, and line images C obtained by the continuous scanning of the imaging unit 12 is 100, the processing unit 13 generates 100 composite image line images and directly utilizes 100 line images C. At this time, the processing unit 13 inspects the body surface S1 of the automobile based on the 100 composite image line images and the 100 line images C.

[0048] <Method for Detecting Concavo-Convex Defects and Color Defects> Subsequently, a method for the processing unit 13 to inspect the body surface S1 of the automobile based on the generated composite image and the line image by white light will be described.

[0049] First, a method for inspecting concavo-convex defects on the body surface S1 of the automobile based on the composite image generated by the processing unit 13 will be described. The processing unit 13 inspects the body surface S1 of the automobile based on a plurality of generated composite images. More specifically, the processing unit 13 combines a plurality of generated composite images into one composite image. The concavo-convex defect part is specified from the one composite image.

[0050] Next, a method for the processing unit 13 to inspect color defects on the body surface S1 of the automobile based on the line image by white light will be described. The processing unit 13 inspects the body surface S1 of the automobile based on a plurality of line images by white light. More specifically, the processing unit 13 combines a plurality of line images by white light into one composite image. FIG. 5 is a diagram showing one composite image M1 obtained by combining a plurality of line images by the processing unit 13 according to Embodiment 1. In the example shown in FIG. 5, the composite image M1 is a two-dimensional image obtained by combining 12 line images C. Also, in the example shown in FIG. 5, the pixels constituting the composite image M1 are white.

[0051] As shown in FIG. 5, the composite image M1 is white except for the black color in the color defect portion d1. That is, when there is a color different from the color of the pixels constituting the composite image M1, it can be specified as a color defect. In the example shown in FIG. 5, there is only one color defect portion d1, but there may be a plurality of them. Also, in the example shown in FIG. 5, the pixels constituting the composite image M1 are described as white, but without being limited thereto, the color of the pixels constituting the composite image M1 is the color of the surface of the automobile to be inspected.

[0052] <Surface inspection method> Subsequently, the surface inspection method according to Embodiment 1 will be described. FIG. 6 is a flowchart illustrating the surface inspection method according to Embodiment 1.

[0053] First, illumination lights having different wavelength ranges are irradiated, and while irradiating white light and illumination light alternately, two or more line images by the illumination light and a line image by the white light are imaged. (Step ST1). Next, a composite image is generated from two or more line images by the illumination light (Step ST2). Next, the state of the surface S1 of the automobile is inspected based on the composite image and the line image by the white light (Step ST3).

[0054] Part or all of the processing in the above-described processing unit 13 can be realized as a computer program. Such a program can be stored using various types of non-transitory computer-readable media and supplied to a computer. Non-transitory computer-readable media include various types of tangible recording media. Examples of non-transitory computer-readable media include magnetic recording media (e.g., flexible disks, magnetic tapes, hard disk drives), magneto-optical recording media (e.g., magneto-optical disks), CD-ROM (ReadOnly Memory), CD-R, CD-R / W, and semiconductor memories (e.g., mask ROM, PROM (Programmable ROM), EPROM (Erasable PROM), flash ROM, RAM (Random Access Memory)). Also, the program may be supplied to a computer by various types of transitory computer-readable media. Examples of transitory computer-readable media include electrical signals, optical signals, and electromagnetic waves. The transitory computer-readable media can supply the program to a computer via wired communication paths such as electric wires and optical fibers, or wireless communication paths.

[0055] In this way, the surface inspection device 10 according to Embodiment 1 alternately irradiates illumination light and white light at a predetermined interval, and captures two or more line images formed by the illumination light reflected from the surface S1 of the automobile and a line image formed by the white light reflected from the surface S1 of the automobile. The surface inspection device 10 according to Embodiment 1 generates a composite image from two or more line images formed by the illumination light. Then, the surface inspection device 10 according to Embodiment 1 can simultaneously inspect for defect portions composed of fine unevenness on the coating film surface of the automobile body and for painting color defects based on the composite image and the line image formed by the white light. In this manner, the surface inspection device 10 according to Embodiment 1 can improve productivity.

[0056] In the above embodiment, the surface of an automobile has been described as an example of the inspection target of the surface inspection apparatus 10. However, the present invention is not limited to this, and the inspection target of the surface inspection apparatus 10 can be applied to the surface of a painted object. For example, the surface inspection apparatus 10 can be applied to the outer wall, inner wall, and floor of a building.

[0057] Note that the present disclosure is not limited to the above embodiment, and can be appropriately changed without departing from the gist thereof.

Explanation of Reference Numerals

[0058] 10 Surface inspection apparatus 11 Irradiation unit 11a, 11b, 11c, 11d Light source 12 Imaging unit 12a, 12b, 12c, 12d CCD 12L Optical system lens unit 13 Processing unit F Moving direction 24 Lens 25 Spectroscopic means d1 Color defect M1 Composite image S1 Surface of the automobile

Claims

1. A surface inspection apparatus for inspecting the state of the surface of an object to be inspected, comprising: an irradiation unit that irradiates the surface with illumination light having mutually different wavelength ranges and alternately irradiates the surface with white light and the illumination light; an imaging unit that detects reflected light reflected from the surface and images the surface; a processing unit that generates a composite image based on the captured image and inspects the state of the surface; using the irradiation unit, while alternately irradiating the illumination light and white light, using the imaging unit to image two or more line images by the illumination light and a line image by the white light; the processing unit determines the difference in brightness between adjacent pixels for each corresponding pixel of two or more line images by the illumination light, selects and synthesizes the pixels in the line image with the larger brightness difference to generate a synthesized image; identifying uneven defect portions based on the synthesized image and identifying color defects based on the line image by the white light; a surface inspection apparatus.

2. The illumination light includes light having a red wavelength range, a blue wavelength range, and a green wavelength range. The surface inspection apparatus according to claim 1.

3. The imaging unit includes a first detection unit that detects the illumination light and a second detection unit that detects the white light. The surface inspection apparatus according to claim 1 or 2.

4. A surface inspection method for inspecting the state of the surface of an object to be inspected, comprising: irradiating illumination light having mutually different wavelength ranges and alternately irradiating white light and the illumination light, and imaging two or more line images by the illumination light and a line image by the white light; for each corresponding pixel of two or more line images by the illumination light, determining the difference in brightness between adjacent pixels, selecting and synthesizing the pixels in the line image with the larger brightness difference to generate a synthesized image; identifying uneven defect portions based on the synthesized image and identifying color defects based on the line image by the white light; a surface inspection method.

5. A surface inspection program for inspecting the state of the surface of an object to be inspected, comprising: a process of irradiating illumination light having mutually different wavelength ranges and alternately irradiating white light and the illumination light, and imaging two or more line images by the illumination light and a line image by the white light; For each pair of corresponding pixels of two or more line images by the illumination light, determine the difference in brightness between adjacent pixels, and select and synthesize pixels in the line image with the larger brightness difference to generate a synthesized image; Based on the synthesized image, identify uneven defective parts, and based on the line image by the white light, identify color defects, and cause a computer to execute the processes; Surface inspection program.

Images