X-ray fluorescence analyzer, information storage medium, and program

Abstract

Measurement can be performed with the sample chamber filled with air, preventing damage to the partition film and components arranged in the irradiation chamber. A fluorescence X-ray analyzer, comprising: a sample chamber in which a sample is arranged; an irradiation chamber, which is partitioned from the sample chamber by a partition wall partially including a partition film that transmits X-rays, and in which an X-ray source for emitting X-rays to the sample through the partition film is arranged; and an information processing device. The information processing device includes: an irradiation time acquisition unit that acquires an irradiation time during which the partition film is irradiated with X-rays; and a control unit that performs protection control to protect the partition film from X-ray irradiation based on the irradiation time acquired by the irradiation time acquisition unit.

Description

Technical Field

[0001] The present invention relates to a fluorescent X-ray analyzer, an information storage medium, and a program.

Background Art

[0002] As an apparatus for analyzing elements contained in a sample, a fluorescent X-ray analyzer is known. The fluorescent X-ray analyzer irradiates a sample with primary X-rays and performs analysis based on the intensity and energy of the fluorescent X-rays emitted from the sample. There is also known a simple fluorescent X-ray analyzer having a structure in which a sample chamber and an irradiation chamber are separated by a partition film so that the sample can be easily exchanged while maintaining the irradiation chamber in a helium atmosphere (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When performing measurement simply, it is desirable that the sample chamber be at atmospheric pressure. The gas filled in the sample chamber is generally helium or air. Helium has a small X-ray absorption, so that fluorescent X-rays with low energy emitted from light elements can be measured with high sensitivity, but the distribution cost is high. On the other hand, since air contains oxygen, ozone is generated in the sample chamber by X-rays during measurement. Ozone deteriorates the partition film, and thus the partition film may be damaged. If the partition film is damaged, the inside of the apparatus may be contaminated with the sample or the like.

[0005] The present disclosure has been made in view of the above problems, and an object thereof is to provide a fluorescent X-ray analyzer capable of preventing damage to a partition film and damage or contamination of components disposed in an irradiation chamber.

Means for Solving the Problems

[0006] (1) A fluorescence X-ray analyzer according to an aspect of the present disclosure includes a sample chamber in which a sample is placed, an irradiation chamber partitioned from the sample chamber by a partition wall that partially includes a partition film through which X-rays pass, and an X-ray source that emits X-rays to the sample through the partition film, and an information processing device. The information processing device includes an irradiation time acquisition unit that acquires an irradiation time during which the partition film is irradiated with X-rays, and a control unit that performs protection control to protect the partition film from X-ray irradiation based on the irradiation time acquired by the irradiation time acquisition unit.

[0007] (2) In a fluorescence X-ray analyzer according to another aspect of the present disclosure, the information processing device includes an exchange information acquisition unit that acquires exchange information indicating that the partition film has been exchanged. The irradiation time acquisition unit measures a cumulative irradiation time, which is the cumulative time during which the partition film has been irradiated with X-rays since the exchange information was acquired. The control unit performs the protection control when the cumulative irradiation time exceeds a first set value.

[0008] (3) In a fluorescence X-ray analyzer according to another aspect of the present disclosure, the irradiation time acquisition unit measures a continuous irradiation time, which is the time during which the partition film is continuously irradiated since the start of X-ray irradiation to the partition film. The control unit performs the protection control when the continuous irradiation time exceeds a second set value.

[0009] (4) In a fluorescence X-ray analyzer according to another aspect of the present disclosure, the information processing device includes a measurement condition acquisition unit that acquires measurement conditions including a measurement time. The irradiation time acquisition unit calculates a predicted continuous irradiation time, which is predicted to be the time during which the partition film is irradiated with X-rays by measurement performed according to the measurement conditions, based on the measurement time included in the acquired measurement conditions. The control unit performs the protection control based on the predicted continuous irradiation time.

[0010] (5) In the X-ray fluorescence analyzer according to another aspect of the present disclosure, the information processing apparatus further includes an exchange information acquisition unit that acquires exchange information indicating that the partition film has been exchanged, and a storage unit that stores a cumulative irradiation time, which is the cumulative time during which the partition film has been irradiated with X-rays since the exchange information was acquired. The irradiation time acquisition unit calculates the predicted cumulative irradiation time by adding the predicted continuous irradiation time to the cumulative irradiation time stored in the storage unit. The control unit performs the protection control when the predicted cumulative irradiation time exceeds a first set value. This is a feature of the present disclosure.

[0011] (6) In the X-ray fluorescence analyzer according to another aspect of the present disclosure, the control unit performs the protection control when the predicted continuous irradiation time exceeds a second set value. This is a feature of the present disclosure.

[0012] (7) In the X-ray fluorescence analyzer according to another aspect of the present disclosure, the protection control is a control that does not start measurement. This is a feature of the present disclosure.

[0013] (8) In the X-ray fluorescence analyzer according to another aspect of the present disclosure, further, in a closed state, there is a shutter that separates the sample chamber and the irradiation chamber and shields X-rays. The irradiation time acquisition unit measures the time during which the X-ray source emits X-rays and the shutter is open as the irradiation time. This is a feature of the present disclosure.

[0014] (9) In the X-ray fluorescence analyzer according to another aspect of the present disclosure, the protection control is a control that closes the shutter. This is a feature of the present disclosure.

[0015] (10) In the X-ray fluorescence analyzer according to another aspect of the present disclosure, the protection control is a control that stops the emission of X-rays from the X-ray source. This is a feature of the present disclosure.

[0016] (11) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the information processing apparatus includes a display unit that performs display based on the control of the control unit, and the protection control is control for causing the display unit to display that there is a risk of damage to the partition film.

[0017] (12) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the replacement information includes information representing the material and / or thickness of the replaced partition film, and the first set value and / or the second set value are set based on the information representing the material and / or thickness.

[0018] (13) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the display unit further displays the cumulative irradiation time and / or the continuous irradiation time.

[0019] (14) An information storage medium according to another aspect of the present disclosure is a non-temporary computer-readable information storage medium that stores a program executed by a computer used in a fluorescent X-ray analyzer. The fluorescent X-ray analyzer includes a sample chamber in which a sample is placed, an irradiation chamber that is partitioned from the sample chamber by a partition including a partition film that transmits X-rays, and an X-ray source that emits X-rays to the sample through the partition film, and the computer. The program causes the computer to execute an irradiation time acquisition step of acquiring an irradiation time during which the partition film is irradiated with X-rays, and a protection control step of performing protection control for protecting the partition film from X-ray irradiation based on the irradiation time acquired in the irradiation time acquisition step.

[0020] (15) A program according to another aspect of the present disclosure is a program executed by a computer used in a fluorescent X-ray analyzer. The fluorescent X-ray analyzer includes a sample chamber where a sample is placed, an irradiation chamber partitioned from the sample chamber by a partition wall that partially includes a partition film through which X-rays can pass, and an X-ray source that emits X-rays to the sample through the partition film is disposed in the irradiation chamber, and the computer. The computer is caused to execute an irradiation time acquisition step of acquiring an irradiation time during which the partition film is irradiated with X-rays, and a protection control step of performing protection control to protect the partition film from X-ray irradiation based on the irradiation time acquired in the irradiation time acquisition step.

Advantages of the Invention

[0021] According to the present disclosure, it is possible to prevent damage to the partition film, and damage and contamination of components disposed in the irradiation chamber.

Brief Description of the Drawings

[0022]

Figure 1

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Figure 12

Embodiments for Carrying Out the Invention

[0023] Hereinafter, preferred embodiments for carrying out the present invention (hereinafter referred to as embodiments) will be described with reference to the drawings. FIG. 1 is a diagram showing an outline of a fluorescent X-ray analyzer 100. As shown in FIG. 1, the fluorescent X-ray analyzer 100 includes a sample chamber 102, an irradiation chamber 104, a partition wall 106, a shutter 108, a counter 110, and an information processing device 112. The sample chamber 102 and the irradiation chamber 104 are partitioned by a partition wall including the partition wall 106 so that gas does not move between them. An opening for passing X-rays from the irradiation chamber 104 to the sample chamber 102 is provided in the partition wall 106.

[0024] The irradiation chamber 104 is partitioned from the sample chamber 102 by a partition wall that partially includes a partition film 114 that transmits X-rays. Specifically, for example, the irradiation chamber 104 is in a vacuum environment, and an X-ray source 116, a spectroscopic element 118, and a detector 120 are arranged. The X-ray source 116 emits X-rays to the sample through the partition film 114. Fluorescent X-rays are emitted from the sample irradiated with the X-rays. The spectroscopic element 118 spectroscopes the fluorescent X-rays of a predetermined wavelength emitted from the sample. The detector 120 is arranged at a position where the fluorescent X-rays spectroscoped by the spectroscopic element 118 are incident. The detector 120 detects the fluorescent X-rays and outputs a pulse signal. The detector 120 is, for example, a proportional counter tube. The counter 110 counts the pulse signal output from the detector 120 and acquires it as the intensity of the fluorescent X-rays. Data representing the intensity of the fluorescent X-rays counted by the counter 110 is transmitted to the information processing device 112.

[0025] Note that the spectroscopic element 118 and the detector 120 may be provided for each element to be analyzed, or a configuration may be adopted in which a set of the spectroscopic element 118 and the detector 120 rotates and moves. When rotating and moving a set of the spectroscopic element 118 and the detector 120, a mechanism (goniometer) for rotating and moving the spectroscopic element 118 and the detector 120 is arranged in the irradiation chamber 104. Further, although the X-ray fluorescence analyzer 100 shown in FIG. 1 is a wavelength dispersive type, it may be an energy dispersive type. Note that it is desirable that the inside of the irradiation chamber 104 is in a vacuum so that the X-rays emitted from the X-ray source 116 are not absorbed. However, the inside of the irradiation chamber 104 may be an air or helium atmosphere according to the element to be analyzed.

[0026] In the sample chamber 102, a sample cell 122 is arranged. Specifically, a sample stage 124 is provided in the sample chamber 102, and the sample cell 122 is arranged on the sample stage 124. The inside of the sample chamber 102 is filled with air or helium. The sample may be liquid or solid (including powder), but hereinafter, the case where the sample is liquid will be described. The liquid sample is arranged in the sample cell 122. The sample cell 122 is cylindrical, and a sample holding film is stretched so as to close the bottom surface. The liquid sample is arranged on the sample holding film. Further, the upper surface of the sample cell 122 may be sealed with another film so that the sample does not spill. The inside of the sample chamber 102 may be air, and helium may be flowed between the sample holding film and the partition film 114. Further, when the sample is solid, the inside of the sample chamber 102 may be in a vacuum state.

[0027] As an example, the sample stage 124 includes a window frame holding member, a window frame member 126, a film support member 128, and a lid member 130. The window frame holding member has an opening for allowing X-rays to pass from the irradiation chamber 104 to the sample chamber 102, and is arranged in the sample chamber 102 to support the outer edge of the film support member 128 and the outer edge of the window frame member 126 from below. Specifically, the window frame holding member has a lower holding member 132 and an upper holding member 134. The lower holding member 132 and the upper holding member 134 have an opening for allowing X-rays to pass from the irradiation chamber 104 to the sample chamber 102.

[0028] The lower holding member 132 is a member disposed in contact with the partition wall 106. The lower holding member 132 has a substantially circular outer edge when viewed from the top and bottom surfaces, and has a circular opening at a position corresponding to the opening provided in the partition wall 106. The lower holding member 132 has a step corresponding to the outer edge of the film support member 128. The film support member 128 is disposed such that its outer edge is located at the step of the lower holding member 132. Thereby, the lower holding member 132 supports the outer edge portion of the film support member 128. Further, the lower holding member 132 supports the window frame member 126 disposed above the film support member 128.

[0029] The upper holding member 134 is a member disposed in contact with the lower holding member 132. The upper holding member 134 has a substantially circular outer edge when viewed from the top and bottom surfaces, and has a circular opening with the same center position as the opening provided in the lower holding member 132 and a larger diameter. The upper holding member 134 has an O-ring at the position where it contacts the lower holding member 132. The upper holding member 134 supports the window frame member 126 together with the lower holding member 132.

[0030] The window frame member 126 holds the partition film 114 that forms part of the partition wall and is formed of a material that transmits X-rays, and is disposed within the opening provided in the partition wall 106. Specifically, the window frame member 126 holds the partition film 114 that forms part of the partition wall and is formed of a material that transmits X-rays, and is disposed within the opening of the window frame holding member. The window frame member 126 has an annular inner film holding member and outer film holding member, respectively. The window frame member 126 is disposed within the opening of the window frame holding member with the partition film 114 sandwiched between the inner film holding member and the outer film holding member. The partition film 114 in the said opening forms part of the partition wall.

[0031] The film support member 128 has an opening through which X-rays pass, and is disposed adjacent to the irradiation chamber 104 side of the partition film 114 to support the partition film 114 from the irradiation chamber 104 side.

[0032] The lid member 130 seals the space where the sample cell 122 is disposed. Specifically, as shown in FIG. 1, the lid member 130 has a shape that covers the space where the sample cell 122 is disposed, and is disposed in contact with the upper holding member 134 of the window frame holding member. The lid member 130 has an O-ring at the position where it contacts the upper holding member 134. The lid member 130 is opened and closed under the control of the control unit 508 (see FIG. 5) or by the user when the sample cell 122 is carried in and out.

[0033] When in the closed state, the shutter 108 isolates the sample chamber 102 and the irradiation chamber 104 and shields X-rays. Specifically, the shutter 108 is formed of a material that does not transmit X-rays and is disposed so as to close the opening provided in the partition wall 106. The shutter 108 is disposed on the irradiation chamber 104 side of the partition film 114. The shutter 108 is opened and closed by the control unit 508 controlling the operation of the motor. The closed shutter 108 isolates the sample chamber 102 and the irradiation chamber 104. Even when the shutter 108 is open, the sample chamber 102 and the irradiation chamber 104 are isolated by the partition film 114.

[0034] The information processing device 112 acquires the intensity of the fluorescent X-ray from the counter 110 and analyzes the sample based on the intensity of the fluorescent X-ray. Further, the information processing device 112 controls the operation of each component in the irradiation chamber 104. Specifically, for example, FIG. 2 is a diagram showing the hardware configuration of the information processing device 112. The information processing device 112 is a computer and includes an arithmetic unit 202, a storage unit 204, a display unit 206, an input / output unit 208, and an internal bus 210.

[0035] The arithmetic unit 202 is a CPU (Central Processing Unit) which is a processor and performs various arithmetic operations. For example, the arithmetic unit 202 executes various arithmetic operations related to the analysis of the sample and measurement programs based on the acquired intensity of the fluorescent X-ray.

[0036] The storage unit 204 is a non-transitory computer-readable information storage medium that stores programs executed by a computer used in the fluorescent X-ray analyzer 100. Specifically, for example, the storage unit 204 is a RAM (Random Access Memory) which is a memory, and a device such as an HDD (Hard Disk Drive) or an SSD (Solid State Drive) that can statically record information. The storage unit 204 stores a program that executes each step for performing protection control to protect the partition wall. The program causes the computer to execute an irradiation time acquisition step of acquiring the irradiation time during which the partition film 114 is irradiated with X-rays, and a control step of performing protection control to protect the partition film 114 from the X-ray irradiation based on the irradiation time acquired by the irradiation time acquisition unit 504. Details of these steps will be described later. Further, the storage unit 204 stores the cumulative irradiation time, which is the cumulative time during which the partition film 114 has been irradiated with X-rays since the exchange information (described later) was acquired.

[0037] The display unit 206 is a so-called flat panel display such as a liquid crystal monitor, and displays images. For example, the display unit 206 displays the state of the apparatus based on the control of the control unit 508. Specifically, the display unit 206 displays information representing the state of the fluorescent X-ray analyzer 100 as shown in FIG. 3. The information includes information representing the states of the X-ray source 116, the shutter 108, the irradiation chamber 104 and the sample chamber 102, and the partition film 114. The state of the X-ray source 116 is a state in which the X-ray source 116 emits X-rays (hereinafter, the ON state), or a state in which the X-ray source 116 does not emit X-rays (hereinafter, the OFF state). The state of the shutter 108 is an open state or a closed state. The atmospheres of the irradiation chamber 104 and the sample chamber 102 are the internal pressures of the irradiation chamber 104 and the sample chamber 102, respectively. The state of the partition film 114 is the material and thickness of the held partition film 114, and the irradiation time.

[0038] In addition, the display unit 206 displays an error image or a warning image. Specifically, the error image is an image displayed when the cumulative irradiation time exceeds a first set value (described later), and it is an image indicating that it is necessary for the user to replace the partition film 114. Specifically, for example, the display unit 206 displays an error image as shown in FIG. 4. The error image in FIG. 4 has a notation "The cumulative X-ray irradiation time on the partition is approaching the upper limit value. Please replace the partition film." displayed under the toolbar of the application window displayed when the measurement program is executed. Further, the error image includes a button labeled "Partition replacement", and when the user clicks the button, a partition film replacement image described later is displayed. The warning image is an image displayed when the continuous irradiation time exceeds a second set value (described later), and it is an image indicating that it is necessary to temporarily stop the measurement.

[0039] The input / output unit 208 is one or more interfaces for the computer to exchange information with external devices, and is, for example, one or more devices for the user to input information, such as a keyboard, a mouse, a touch panel, etc. Further, the input / output unit 208 may include various ports for wired connection and a controller for wireless connection. The input / output unit 208 acquires the intensity of the fluorescent X-ray incident on the detector 120 from the counting unit.

[0040] The internal bus 210 mutually connects the arithmetic unit 202, the storage unit 204, the display unit 206, and the input / output unit 208.

[0041] FIG. 5 is a diagram showing a functional block of the information processing apparatus 112. As shown in FIG. 5, the information processing apparatus 112 functionally includes an exchange information acquisition unit 502, an irradiation time acquisition unit 504, a control unit 508, and an analysis unit 510.

[0042] The exchange information acquisition unit 502 acquires exchange information indicating that the partition film 114 has been exchanged. Specifically, for example, when the partition film 114 is exchanged, the exchange information acquisition unit 502 acquires exchange information including information representing the material and / or thickness of the exchanged partition film 114.

[0043] FIG. 6 is an example showing an image (hereinafter referred to as a partition film exchange image) displayed by the display unit 206 when the partition film 114 is exchanged. The partition film exchange image includes information on the partition film 114 held by the window frame member 126 before the exchange (information on the current partition film 114) and a list of candidates for the partition film 114 newly held by the exchange (information on the partition film 114 after the exchange). The information on the current partition film 114 is the information on the partition film 114 after the exchange selected at the previous partition film 114 exchange. The information on the partition film 114 includes information representing the material and thickness of the partition film 114.

[0044] As shown in FIG. 6, the information on the current partition film 114 indicates that the material is polyester and the thickness is 3.0 μm. The list of candidates for the information on the partition film 114 after the exchange includes a candidate where the material is polyester and the thickness is 3.0 μm, a candidate where the material is polyester and the thickness is 2.5 μm, a candidate where the material is polyester and the thickness is 2.0 μm, and a candidate where the material is polyimide and the thickness is 5.0 μm.

[0045] After the user exchanges the partition film 114 held by the window frame member 126, the user operates the input / output unit 208 such as a mouse and selects the information on the partition film 114 after the exchange corresponding to the partition film 114 after the exchange from among the candidates. Further, when the OK button in the partition film exchange image is clicked, the exchange information acquisition unit 502 acquires exchange information including the selected information on the partition film 114.

[0046] The irradiation time acquisition unit 504 acquires the irradiation time during which the partition film 114 is irradiated with X-rays. Specifically, for example, the irradiation time acquisition unit 504 measures, as the irradiation time, the time during which the X-ray source 116 emits X-rays and the shutter 108 is open. Whether the X-ray source 116 is emitting X-rays or has stopped operating is controlled by the control unit 508. Also, the opening and closing of the shutter 108 are controlled by the control unit 508. Therefore, the irradiation time acquisition unit 504 can measure the time during which the X-ray source 116 emits X-rays and the shutter 108 is open. When controlling the irradiation time during which the partition film 114 is irradiated with X-rays only by ON / OFF control of the X-ray source 116 without having the shutter 108, the irradiation time acquisition unit 504 measures the time during which the X-ray source 116 is in the ON state and emitting X-rays. The irradiation time is measured, for example, in units of 0.1 hour. Hereinafter, in the embodiments, an irradiation time of 10 hours and 30 minutes is denoted as 10.5H or the like.

[0047] In the present disclosure, the irradiation time includes two types of irradiation times: cumulative irradiation time and continuous irradiation time. Specifically, the cumulative irradiation time is the cumulative time during which the partition film 114 has been irradiated with X-rays since the exchange information was acquired. The cumulative irradiation time is set to an initial value (for example, 0.0 hour) when the exchange information is acquired. The cumulative irradiation time is stored in the storage unit 204 at the end of the measurement. Each time a measurement is performed, the time during which the X-rays are irradiated in that measurement is added to the stored value of the cumulative irradiation time. That is, the cumulative irradiation time is the total time of the irradiation times in all the measurements performed after the initial value is set.

[0048] The continuous irradiation time is the time during which X-rays are continuously irradiated after the irradiation of the partition film 114 is started. Specifically, the continuous irradiation time is the time during which the partition film 114 is irradiated with X-rays in one measurement. For example, the X-ray source 116 starts emitting X-rays with the shutter 108 closed. Then, after the intensity of the X-rays emitted by the X-ray source 116 stabilizes, the shutter 108 is opened and the sample is irradiated with X-rays. After that, after a predetermined measurement time has elapsed, the shutter 108 is closed. The continuous irradiation time is the time from when the shutter 108 is opened to when it is closed. When there is air around the partition film 114, for example, if the continuous irradiation time becomes long with the lid member 130 closed, the ozone concentration increases and the deterioration of the partition film 114 is accelerated.

[0049] Also, the irradiation time acquisition unit 504 calculates the continuous irradiation time predicted as the time during which the partition film 114 is irradiated with X-rays by a measurement performed according to the acquired measurement conditions (described later) based on the measurement time included in the acquired measurement conditions. Specifically, for example, the irradiation time acquisition unit 504 acquires the measurement time included in the acquired measurement conditions as the predicted continuous irradiation time. Also, for example, the irradiation time acquisition unit 504 adds the measurement time included in the acquired measurement conditions to the cumulative irradiation time stored in the storage unit 204 to acquire the predicted cumulative irradiation time.

[0050] That is, the irradiation time includes two types of irradiation times: the actual irradiation time measured during actual measurement and the predicted irradiation time obtained by calculation. The actual irradiation time is the value obtained by measuring the time during which X-rays are emitted and the shutter 108 is open, and the predicted irradiation time is the value calculated based on the measurement time included in the measurement conditions. Therefore, the cumulative irradiation time includes the actual cumulative irradiation time and the predicted cumulative irradiation time. Also, the continuous irradiation time includes the actual continuous irradiation time and the predicted continuous irradiation time.

[0051] The measurement condition acquisition unit 506 acquires measurement conditions including the measurement time. Specifically, for example, when a program for sample analysis is executed, the display unit 206 displays a screen (not shown) for accepting input of measurement conditions. The measurement conditions include a cell identification number for identifying the arrangement position of the sample cell 122 in the preparation room (not shown), and conditions such as the voltage of the X-ray source 116 and the measurement time associated with the cell identification number. The measurement conditions may include other conditions related to the measurement. The user inputs the measurement conditions using a keyboard or the like, and the measurement condition acquisition unit 506 acquires the measurement conditions. Each measurement condition is assigned a measurement identification number (hereinafter referred to as a measurement ID) for distinguishing it from other measurement conditions, and is stored in the storage unit 204. Also, when performing continuous analysis based on a plurality of measurement conditions, the plurality of measurement conditions may be stored in association with each other. The plurality of associated measurement conditions are also referred to as a measurement recipe or the like.

[0052] Based on the irradiation time acquired by the irradiation time acquisition unit 504, the control unit 508 performs protection control to protect the partition film 114 from X-ray irradiation. Specifically, the control unit 508 performs protection control when the cumulative irradiation time exceeds a first set value. The first set value is set based on information representing the material and / or thickness of the partition film 114. The first set value is a value representing time. For example, a value of 24H is set as the first set value corresponding to the partition film 114 having a material of polypropylene and a thickness of 3.0 μm. The first set value is set to a larger value as the material of the partition film 114 has higher durability against X-rays and ozone. Also, the first set value is set to a larger value as the thickness of the partition film 114 is thicker. The relationship between the first set value and the information representing the material and / or thickness of the partition film 114 is stored in the storage unit 204 in advance.

[0053] Further, the control unit 508 performs protection control based on the continuous irradiation time (the actual continuous irradiation time or the predicted continuous irradiation time). Specifically, for example, when the continuous irradiation time (the actual continuous irradiation time or the predicted continuous irradiation time) exceeds a second set value, the control unit 508 performs protection control. The second set value is a value representing one preset time. For example, a value of 1H is set as the second set value. Note that the second set value may be set to different values for each piece of information based on the material and / or thickness of the partition film 114, similar to the first set value.

[0054] The control unit 508 performs protection control to protect the partition film 114 from X-ray irradiation. For example, the protection control is control that does not start measurement. Specifically, based on the predicted irradiation time, the control unit 508 avoids measurement that may damage the partition film 114 by not performing measurement on some or all of the measurement conditions included in the measurement recipe. For example, the control unit 508 controls the measurement condition acquisition unit 506 not to accept input of measurement conditions or an instruction to start measurement. Thereby, the measurement ID cannot be registered, or the measurement start button cannot be pressed, making it impossible to perform measurement.

[0055] Also, for example, the protection control is control to close the shutter 108. Specifically, when the cumulative irradiation time exceeds the first set value and / or when the continuous irradiation time exceeds the second set value, the control unit 508 performs control to close the shutter 108. Also, for example, the protection control is control to stop the emission of X-rays to the X-ray source 116. Specifically, when the cumulative irradiation time exceeds the first set value and / or when the continuous irradiation time exceeds the second set value, the control unit 508 performs control to stop the emission of X-rays to the X-ray source 116. Also, for example, the protection control is control to cause the display unit 206 to display that there is a risk of damage to the partition film 114. Specifically, the control unit 508 causes the display unit 206 to display an error image or a warning image.

[0056] Note that the control unit 508 may control the operations of each component of the fluorescent X-ray analyzer 100. For example, the control unit 508 may control the switching between the ON state and the OFF state of the X-ray source 116, the opening and closing of the lid member 130, the conveyance of the sample cell 122, the operation of the pump for evacuating the irradiation chamber 104, the orientation of the spectroscopic element 118, and the like.

[0057] The analysis unit 510 analyzes the sample. Specifically, the analysis unit 510 analyzes the elements contained in the sample based on the intensity of the fluorescent X-ray acquired by the input / output unit 208.

[0058] Subsequently, the protection control performed by the control unit 508 will be described with reference to the flowcharts shown in FIGS. 7 to 12. It is assumed that the user has previously placed the sample cell 122 in which the sample is placed in a preparation room (not shown).

[0059] First, the measurement condition acquisition unit 506 acquires measurement conditions (S701). Specifically, for example, the control unit 508 executes a program for sample analysis to cause the display unit 206 to display a screen (not shown) for receiving measurement conditions and a measurement instruction. By the user inputting measurement conditions such as the measurement time using a keyboard or the like, the measurement condition acquisition unit 506 acquires the measurement conditions. Also, when the user gives an instruction to start the measurement using a mouse or the like, the control unit 508 acquires the measurement instruction. Note that each of the following steps is executed by the above program. Here, it is assumed that the measurement condition acquisition unit 506 has acquired a measurement recipe including M measurement conditions with measurement IDs from 1 to M.

[0060] Next, the control unit 508 determines whether executable measurement conditions are included (S702). Specifically, FIG. 8 is a flowchart for determining whether executable measurement conditions are included in the measurement recipe. At the start of the flowchart in FIG. 8, variables i and k are 1, and it is assumed that the continuous irradiation time is set to the initial value (zero value). Also, the initial value of the predicted cumulative irradiation time is the cumulative irradiation time stored in the storage unit 204. First, based on the i-th (the first in the initial state) measurement condition, the irradiation time is calculated (S802). The calculated irradiation time may be, for example, the measurement time included in the measurement condition, or a value obtained by multiplying the measurement time included in the measurement condition by a predetermined coefficient or adding a predetermined value.

[0061] Next, the irradiation time acquisition unit 504 adds the calculated irradiation time to the cumulative irradiation time to obtain the predicted cumulative irradiation time (S804). For example, when i is 1, the irradiation time acquisition unit 504 adds the measurement time included in the first measurement condition to the cumulative irradiation time stored in the storage unit 204, and acquires the calculated value as the predicted cumulative irradiation time.

[0062] Next, it is determined whether the predicted cumulative irradiation time exceeds the first set value (S806). For example, when the first set value is 24H, it is determined that the predicted cumulative irradiation time exceeds the first set value when the predicted cumulative irradiation time exceeds 24H. If the predicted cumulative irradiation time exceeds the first set value, the execution of the flowchart in FIG. 8 is terminated.

[0063] Next, the irradiation time acquisition unit 504 adds the calculated irradiation time to the continuous irradiation time to obtain the predicted continuous irradiation time (S808). For example, when i is 1, the irradiation time acquisition unit 504 adds the measurement time included in the first measurement condition to the continuous irradiation time which is the initial value (zero value), and acquires the calculated value as the predicted continuous irradiation time.

[0064] Next, it is determined whether the predicted continuous irradiation time exceeds a second set value (S810). For example, when the second set value is 1H, it is determined that the predicted continuous irradiation time exceeds the second set value when the predicted continuous irradiation time exceeds 1H. If the predicted continuous irradiation time exceeds the second set value, the execution of the flowchart in FIG. 8 is terminated.

[0065] Next, after the measurement based on the i-th measurement condition is performed, if the sample cell 122 is carried out (Yes in S812), the continuous irradiation time is set to the initial value (zero value) (S814), and the process proceeds to S816. On the other hand, after the measurement based on the i-th measurement condition is performed, if the sample cell 122 is not carried out (No in S812), the process proceeds to S816. Whether to carry out the sample cell 122 is determined based on whether the samples to be continuously measured are the same or different. Specifically, for example, when the cell identification number included in the i-th measurement condition is different from the cell identification number included in the (i + 1)-th measurement condition, it is determined in S812 that the sample cell 122 is carried out. On the other hand, when the cell identification number included in the i-th measurement condition is the same as the cell identification number included in the (i + 1)-th measurement condition, it is determined in S812 that the sample cell 122 is not carried out.

[0066] While the X-ray is irradiated on the partition film 114, the ozone concentration in the space inside the lid member 130 increases. Since the lid member 130 is opened when the sample cell 122 is carried out, every time the sample cell 122 is carried out, the ozone concentration in the space inside the lid member 130 becomes equal to the concentration in the atmosphere. Therefore, by setting the continuous irradiation time to the initial value (zero value) when it is determined to carry out the sample cell 122, the continuous irradiation time in line with the actual situation can be predicted.

[0067] In S816, it is determined whether i is equal to M, that is, whether the calculation of the irradiation time has been performed for all the measurement conditions included in the measurement recipe (S816). If i is smaller than M, 1 is added to i, and the process returns to S802, and the steps from S802 to S814 are executed for the next measurement condition. The cumulative irradiation time in S804 is added each time the process is repeatedly executed. The continuous irradiation time in S808 is repeatedly added unless the initial value is set in S814. On the other hand, if it is determined that i is equal to M, it is determined that all the measurement conditions included in the measurement recipe are executable, and the flowchart in FIG. 8 ends.

[0068] If it is determined Yes in S806 or S810, it is determined that some or all of the measurement conditions included in the measurement recipe are not executable. Specifically, it is determined that the measurement conditions from the i-th to the M-th are not executable. That is, it is determined that the measurement conditions from the 1st to the (i - 1)-th are executable. Assuming that the number of measurement recipes determined to be executable (i - 1) is N at the end of the flowchart in FIG. 8.

[0069] In S702, if it is determined that there are no executable measurement conditions (that is, N is 0), the measurement is not performed and the flowchart in FIG. 7 ends. On the other hand, in S702, if it is determined that there are executable measurement conditions, the control unit 508 controls the X-ray source 116 to be in the ON state (S704). By this control, the X-ray source 116 emits X-rays. After the X-ray source 116 starts emitting X-rays, the next step is executed after a certain time has elapsed until the intensity of the emitted X-rays stabilizes.

[0070] Next, based on the k-th measurement condition, the sample cell 122 is carried in (S706). Specifically, the control unit 508 controls to open the lid member 130, and causes a transport device (not shown) such as a robot arm to transport the sample cell 122 placed in the preparation room by the user to the measurement position. At this time, the sample cell 122 arranged at the position represented by the cell identification number included in the k-th measurement condition is transported. The measurement position is the position where the sample is irradiated with X-rays as shown in FIG. 1. After the sample cell 122 is arranged at the measurement position, the control unit 508 controls to close the lid member 130.

[0071] Next, the control unit 508 controls to open the shutter 108 and starts detecting fluorescent X-rays (S708). Specifically, the control unit 508 controls a motor to open the shutter 108. In a state where the shutter 108 is open and the X-ray source 116 is emitting X-rays, the X-rays are irradiated onto the sample through the partition film 114. Fluorescent X-rays are emitted from the irradiated sample, and a part of the fluorescent X-rays is spectroscopically analyzed by the spectroscopic element 118. The spectroscopically analyzed fluorescent X-rays are detected by the detector 120, and the intensity of the fluorescent X-rays is counted by the counter 110. The counter 110 starts transmitting information on the intensity of the fluorescent X-rays to the information processing device 112. The detection of the fluorescent X-rays is executed until the measurement time elapses or the protection control is executed.

[0072] The irradiation time acquisition unit 504 starts measuring the irradiation time when the control unit 508 opens the shutter 108. FIG. 9 is a flowchart for measuring the irradiation time. The flowchart shown in FIG. 9 is executed in parallel with the flowchart shown in FIG. 7 while the fluorescent X-rays are being detected.

[0073] First, the continuous irradiation time is set to the initial value (S902). Specifically, the continuous irradiation time is set to 0.0H. Note that this step may be executed when the control unit 508 controls to close the lid member 130. Further, the control unit acquires the cumulative irradiation time stored in the storage unit 204.

[0074] Next, the irradiation time acquisition unit 504 measures the continuous irradiation time and the cumulative irradiation time (S904). Specifically, for example, the irradiation time acquisition unit 504 measures the difference between the current time and the time when the shutter 108 is opened as the continuous irradiation time. Further, the irradiation time acquisition unit 504 adds the difference between the current time and the time when the shutter 108 is opened to the cumulative irradiation time acquired from the storage unit 204, and measures it as the cumulative irradiation time.

[0075] The step of S904 is continuously executed as long as the shutter 108 is open (Yes in S906). When the shutter 108 is closed (No in S906), the irradiation time acquisition unit 504 ends the measurement of the continuous irradiation time and the cumulative irradiation time (S908). Further, the irradiation time acquisition unit 504 stores the cumulative irradiation time in the storage unit 204 (S910).

[0076] While the fluorescent X-ray is being detected, the display unit 206 displays information indicating the state of the fluorescent X-ray analyzer 100 as shown in FIG. 3. Thereby, the user can confirm the cumulative irradiation time. The continuous irradiation time may be displayed in FIG. 3. Further, when the cumulative irradiation time reaches a predetermined ratio (for example, 80%) of the first set value while the steps of S710, S714, and S710 are repeatedly executed, it may be displayed that the irradiation time is approaching the upper limit value.

[0077] While the fluorescent X-ray is being detected, the determinations of S710, S714, and S718 are made. In S710, it is determined whether the cumulative irradiation time exceeds the first set value. For example, when the first set value is 24H, when the cumulative irradiation time exceeds 24H, it is determined that the cumulative irradiation time exceeds the first set value. When it is determined that the cumulative irradiation time exceeds the first set value, the first protection control (S712) is executed (described later).

[0078] In S714, it is determined whether the continuous irradiation time exceeds a second set value. For example, when the second set value is 1H, if the continuous irradiation time exceeds 1H, it is determined that the continuous irradiation time exceeds the second set value. When it is determined that the continuous irradiation time exceeds the second set value, the second protection control (S716) is executed (described later).

[0079] When the cumulative irradiation time does not exceed the first set value and the continuous irradiation time does not exceed the second set value, and when the specified measurement time has elapsed (Yes in S718), the control unit 508 performs control to close the shutter 108 and ends the detection of fluorescent X-rays (S720). Specifically, the control unit 508 closes the shutter 108 by controlling the motor. Also, the counter 110 stops transmitting the information on the intensity of the fluorescent X-rays to the information processing device 112. The analysis unit 510 analyzes the elements contained in the sample based on the intensity of the fluorescent X-rays.

[0080] Next, the sample cell 122 is carried out, and the continuous irradiation time is set to the initial value (S722). Specifically, the control unit 508 performs control to open the lid member 130, and causes a transport device (not shown) such as a robot arm to transport the sample cell 122 from the measurement position to the preparation room. After the sample cell 122 is placed in the preparation room, the control unit 508 performs control to close the lid member 130. Note that the step of S722 is executed only when the cell identification number included in the k-th measurement condition is different from the cell identification number included in the (k + 1)-th measurement condition. When the cell identification number included in the k-th measurement condition is the same as the cell identification number included in the (k + 1)-th measurement condition, since the measurement based on the (k + 1)-th measurement condition is continuously executed, the step of S722 is omitted.

[0081] In S723, it is determined whether k is equal to N, that is, whether the measurement has been completed for all executable measurement conditions. When k is smaller than N, 1 is added to k (S724), and the process returns to S706, and the steps of S706 to S722 are executed for the next measurement condition. Note that when S724 is omitted, when the steps of S706 to S722 are executed again, S706 is omitted.

[0082] When it is determined that k is equal to N, the control unit 508 controls the X-ray source 116 to be in the OFF state (S725). By this control, the X-ray source 116 stops emitting X-rays.

[0083] S725 is a step executed when the measurement is completed without executing the protection control based on the irradiation time which is the actual value. When it is determined in S710 that the cumulative irradiation time exceeds the first set value, the control unit 508 executes the first protection control (S712).

[0084] FIG. 10 is a flowchart showing the first protection control. First, the display unit 206 displays an error image (S1002). The error image indicates to the user that it is necessary to replace the partition film 114.

[0085] Next, the detection of the fluorescent X-ray is stopped (S1004). Specifically, the counter 110 stops transmitting the information on the intensity of the fluorescent X-ray to the information processing device 112.

[0086] Next, the control unit 508 closes the shutter 108 (S1006), removes the sample cell 122 (S1008), and turns the X-ray source 116 off (S1010). These operations can be performed in any order.

[0087] According to the present disclosure, based on the predicted irradiation time, by not performing measurement on some or all of the measurement conditions included in the measurement recipe, it is possible to avoid in advance a measurement in which the partition film 114 may be damaged. Further, by the control unit 508 closing the shutter 108, it is possible to prevent the partition film 114 that may be damaged from being irradiated with X-rays. Also, by setting the X-ray source 116 to the OFF state, it is possible to prevent the partition film 114 that may be damaged from being irradiated with X-rays. Further, by displaying an error image in S1002, it is possible to prompt the user to replace the partition film 114. The present disclosure is particularly suitable when the irradiation chamber 104 is filled with air and the inside of the irradiation chamber 104 is in a vacuum. In this case, if the partition film 114 is damaged, the air inside the irradiation chamber 104 rapidly flows into the inside of the irradiation chamber 104. At this time, a large pressure is temporarily applied to each component (for example, the detector 120) arranged in the irradiation chamber 104, and it is possible to prevent damage.

[0088] FIG. 11 is a flowchart executed when replacing the partition film 114. The user replaces the partition film 114 when an error image is displayed.

[0089] First, the display unit 206 displays a partition film replacement image (S1102). Specifically, the display unit 206 displays a partition film replacement image as shown in FIG. 6. After the user replaces the partition film 114 held by the window frame member 126, the user operates the input / output unit 208 such as a mouse and selects the information of the replaced partition film 114 corresponding to the replaced partition film 114 from among the candidates. Further, when the OK button of the partition film replacement image is clicked, the replacement information acquisition unit 502 acquires replacement information including the information of the selected partition film 114.

[0090] Next, when the exchange information acquisition unit 502 acquires the exchange information (Yes in S1104), a first set value is set based on the information of the partition film 114 included in the exchange information (S1106). For example, when the information of the partition film 114 indicates that the material is polypropylene and the thickness is 3.0 μm, a first set value of 24H is set. Note that when the information of the partition film 114 includes information regarding a second set value, the second set value may be set.

[0091] Also, the cumulative irradiation time is set to the initial value (S1108). Specifically, the control unit 508 sets the cumulative irradiation time stored in the storage unit 204 to the initial value (0H). The cumulative irradiation time is added according to the time during which X-rays are irradiated, but the initial value is not set for each measurement. Therefore, the cumulative irradiation time continues to be added unless the partition film 114 is replaced. According to the present disclosure, since the initial value of the cumulative irradiation time is set in this step, it is possible to manage the cumulative time during which X-rays are irradiated to one partition film 114. That is, by measuring the cumulative irradiation time, the degree of deterioration of the partition film 114 can be grasped.

[0092] Note that even when the partition film replacement image is displayed, if the partition film 114 is not replaced, the exchange information is not acquired in S1104. In this case, the first set value and the cumulative irradiation time are not updated.

[0093] FIG. 12 is a flowchart showing the second protection control. When it is determined in S714 that the continuous irradiation time exceeds the second set value, the control unit 508 executes the second protection control (S716). First, the display unit 206 displays a warning image (S1202). The warning image indicates that it is necessary to temporarily stop the measurement.

[0094] Next, the detection of the fluorescent X-rays is stopped (S1204). Specifically, the counter 110 stops transmitting the information on the intensity of the fluorescent X-rays to the information processing device 112.

[0095] Then, the control unit 508 closes the shutter 108 (S1206) and unloads the sample cell 122 (S1208). When unloading the sample cell 122, the lid member 130 is opened.

[0096] Since air exists inside the lid member 130, while the X-ray irradiates the sample, a part of the oxygen contained in the air changes to ozone. Therefore, when the continuous irradiation time is long, the ozone concentration inside the lid member 130 increases. If the measurement continues in a state where the ozone concentration inside the lid member 130 is high, even if the cumulative irradiation time does not exceed the first set value, the partition film 114 is likely to be damaged.

[0097] By unloading the sample cell 122 to the preparation room once when the continuous irradiation time exceeds the second set value, the ozone concentration inside the lid member 130 can be reduced. Therefore, it is possible to prevent the partition film 114 from being damaged in a shorter time than the first set value. Also, according to the second protection control, the X-ray source 116 is not turned off. Therefore, remeasurement can be immediately continued.

[0098] The present disclosure is not limited to the above embodiments, and various modifications are possible. The configuration of the fluorescence X-ray analyzer 100 described above is an example and is not limited thereto. It may be replaced with a configuration that is substantially the same as the configuration shown in the above embodiments, a configuration that exhibits the same operational effects, or a configuration that achieves the same purpose.

[0099] For example, in the flowchart shown in FIG. 7, the determinations in S710 and S714 are made during the measurement. Therefore, if it is determined Yes in S710 and S714 while performing the measurement based on one measurement condition, the measurement is interrupted. However, the determinations in S710 and S714 may be made after the measurement based on each measurement condition is completed. That is, the steps of S718 and S720 may be performed between S708 and S710.

[0100] FIG. 7 is an example of a flowchart illustrated for performing protection control while performing measurement based on a plurality of measurement conditions, and is not limited thereto as long as protection control can be executed based on the irradiation time. For example, if the irradiation time during which the sample is irradiated with X-rays can be measured, the timing for turning the X-ray source 116 on or off, the timing for opening and closing the shutter, and the timing for loading or unloading the sample cell are design matters that may be appropriately changed.

Description of Reference Numerals

[0101] 100 Fluorescent X-ray analyzer, 102 Sample chamber, 104 Irradiation chamber, 106 Partition wall, 108 Shutter, 110 Counter, 112 Information processing device, 114 Partition film, 116 X-ray source, 118 Spectroscopic element, 120 Detector, 122 Sample cell, 124 Sample stage, 126 Window frame member, 128 Film support member, 130 Lid member, 132 Lower holding member, 134 Upper holding member, 202 Arithmetic unit, 204 Storage unit, 206 Display unit, 208 Input / output unit, 210 Internal bus, 502 Exchange information acquisition unit, 504 Irradiation time acquisition unit, 506 Measurement condition acquisition unit, 508 Control unit, 510 Analysis unit.

Claims

1. A sample chamber in which a sample is placed, An irradiation chamber partitioned from the sample chamber by a partition wall that partly includes a partition film through which X-rays can pass, and in which an X-ray source that emits X-rays to the sample through the partition film is arranged, An information processing device, A fluorescent X-ray analyzer having: The information processing device includes: A measurement condition acquisition unit that acquires measurement conditions including a measurement time; Based on the measurement time included in the acquired measurement conditions, a continuous irradiation time predicted as the time during which the partition film is irradiated with X-rays by the measurement performed according to the measurement conditions is calculated, and an irradiation time acquisition unit that acquires the irradiation time during which the partition film is irradiated with X-rays; A control unit that performs protection control to protect the partition film from X-ray irradiation based on the irradiation time acquired by the irradiation time acquisition unit and the predicted continuous irradiation time; A fluorescent X-ray analyzer characterized by having the above.

2. The information processing device has an exchange information acquisition unit that acquires exchange information indicating that the partition film has been exchanged, The irradiation time acquisition unit measures a cumulative irradiation time that is the cumulative time during which the partition film has been irradiated with X-rays since the exchange information was acquired, The control unit performs the protection control when the cumulative irradiation time exceeds a first set value. The fluorescent X-ray analyzer according to claim 1, characterized by the above.

3. The irradiation time acquisition unit measures a continuous irradiation time that is the time during which the partition film is continuously irradiated since the irradiation of the partition film with X-rays is started, The control unit performs the protection control when the continuous irradiation time exceeds a second set value. The fluorescent X-ray analyzer according to claim 2, characterized by the above.

4. (Deleted)

5. The information processing device further includes: An exchange information acquisition unit that acquires exchange information indicating that the partition film has been exchanged, A storage unit that stores a cumulative irradiation time that is the cumulative time during which the partition film has been irradiated with X-rays since the exchange information was acquired, Having: The irradiation time acquisition unit adds the predicted continuous irradiation time to the cumulative irradiation time stored in the storage unit to calculate a predicted cumulative irradiation time, The control unit performs the protection control when the predicted cumulative irradiation time exceeds a first set value. The fluorescent X-ray analyzer according to claim 1, characterized by the above.

6. The control unit performs the protection control when the predicted continuous irradiation time exceeds a second set value. The fluorescent X-ray analyzer according to claim 5, characterized in that.

7. The protection control is control that does not start measurement. The fluorescent X-ray analyzer according to any one of claims 1, 5, and 6, characterized in that.

8. Furthermore, in a closed state, it has a shutter that isolates the sample chamber and the irradiation chamber and shields X-rays. The irradiation time acquisition unit measures, as the irradiation time, the time during which the X-ray source emits X-rays and the shutter is open. The fluorescent X-ray analyzer according to any one of claims 1 to 3, characterized in that.

9. The protection control is control for closing the shutter. The fluorescent X-ray analyzer according to claim 8, characterized in that.

10. The protection control is control for stopping the emission of X-rays to the X-ray source. The fluorescent X-ray analyzer according to any one of claims 1 to 3, characterized in that.

11. The information processing device has a display unit that performs display based on the control of the control unit. The protection control is control for causing the display unit to display that the partition film may be damaged. The fluorescent X-ray analyzer according to any one of claims 1 to 3, 5, and 6, characterized in that.

12. The replacement information includes information representing the material and / or thickness of the replaced partition film. The first set value and / or the second set value are set based on the information representing the material and / or thickness. The fluorescent X-ray analyzer according to claim 3 or 6, characterized in that.

13. The information processing device has a display unit that performs display based on the control of the control unit. The protection control is control for causing the display unit to display that the partition film may be damaged. The display unit displays the cumulative irradiation time and / or the continuous irradiation time. The fluorescent X-ray analyzer according to any one of claims 2, 3, 5, and 6, characterized in that.

14. A non-temporary computer-readable information storage medium storing a program executed by a computer used in a fluorescent X-ray analyzer, The fluorescent X-ray analyzer is A sample chamber in which a sample is placed, Partitioned from the sample chamber by a partition including a partition film that transmits X-rays, and an irradiation chamber in which an X-ray source that emits X-rays to the sample through the partition film is arranged. the computer, having, the program includes a measurement condition acquisition step of acquiring measurement conditions including a measurement time; a step of calculating a continuous irradiation time predicted as the time during which the partition film is irradiated with X-rays by measurement performed according to the measurement conditions based on the measurement time included in the acquired measurement conditions; an irradiation time acquisition step of acquiring an irradiation time during which the partition film is irradiated with X-rays; a protection control step of performing protection control to protect the partition film from X-ray irradiation based on the irradiation time acquired in the irradiation time acquisition step and the predicted continuous irradiation time; An information storage medium, characterized in that the computer is caused to execute the above.

15. A program executed by a computer used in a fluorescent X-ray analyzer, the fluorescent X-ray analyzer includes a sample chamber in which a sample is placed; an irradiation chamber partitioned from the sample chamber by a partition partially including a partition film that transmits X-rays, and in which an X-ray source that emits X-rays to the sample through the partition film is arranged; the computer, having, the computer is caused to execute a measurement condition acquisition step of acquiring measurement conditions including a measurement time; a step of calculating a continuous irradiation time predicted as the time during which the partition film is irradiated with X-rays by measurement performed according to the measurement conditions based on the measurement time included in the acquired measurement conditions; an irradiation time acquisition step of acquiring an irradiation time during which the partition film is irradiated with X-rays; a protection control step of performing protection control to protect the partition film from X-ray irradiation based on the irradiation time acquired in the irradiation time acquisition step and the predicted continuous irradiation time; A program, characterized in that the above is executed.

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