Path switching system and laser ablation device using the same

Abstract

This prevents plasma instability or extinguishing on the analyzer side due to air entering from the cell when replacing the measurement object. [Solution] The present invention is a path switching system for a laser ablation device that has a cell (1) that can be freely inserted and removed and that directs a carrier gas containing an aerosol to an analytical device such as an ICP-MS or ICP-OES, and that includes a path opening / closing unit (14) that opens and closes the second path, which branches off from a first path that directs the carrier gas to the cell and directs the carrier gas to the analytical device side without passing through the cell, and a path switching unit (13) that switches the destination of the carrier gas derived from the cell to either the analytical device side or the exhaust side, and that opens the path opening / closing unit and switches the path switching unit to the exhaust side when the stage is inserted or removed to replace the measured object.

Description

[Technical Field]

[0001] The present invention relates to a path switching system that switches paths of, for example, carrier gas or air, and a laser ablation apparatus using the same. [Background technology]

[0002] In conventional elemental analysis using laser ablation (so-called LA-ICP-MS), the surface of the object to be measured is irradiated with a laser to turn the object into an aerosol (particles).The aerosol (particles) are then introduced into an analytical device such as an ICP-MS or ICP-OES for elemental analysis.

[0003] The inlet of an analytical instrument such as an ICP-MS or ICP-OES generates plasma in a gas atmosphere. Therefore, in order to irradiate the object to be measured with a laser and transport the aerosol (particles) directly to the analytical instrument, a cell is required to create a gas atmosphere on the irradiated surface. To transport the aerosol, gas flows from the inlet of the cell 200 through the outlet to the analytical instrument, as shown in FIG. 12(a).

[0004] When replacing the measurement object in the cell 200, it is necessary to remove the sample cup from the cell and place a new measurement object in the sample cup. When this new measurement object is taken out or placed in, air may enter the cell 200 and flow into the downstream analyzer such as ICP-MS or ICP-OES, as shown in Fig. 12(b), which may cause the plasma in the analyzer to become unstable or even go out.

[0005] Here, Patent Document 1 discloses a laser ablation mass spectrometer that includes a sample stage, a laser irradiation unit, an airflow transport system, an ion source, and an analysis unit. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-191134 Summary of the Invention [Problem to be solved by the invention]

[0007] However, Patent Document 1 does not disclose any technology for preventing the plasma from becoming unstable or going out on the analyzer side when the measurement object is replaced.

[0008] The present invention was made in consideration of these problems, and its purpose is to prevent plasma instability or extinguishing on the analytical device side due to air entering from the cell when the object to be measured is replaced. [Means for solving the problem]

[0009] In order to solve the above problems, a path switching system for a laser ablation apparatus according to a first aspect of the present invention is a path switching system for a laser ablation apparatus that includes a cell with a freely removable stage for placing a measurement object thereon and that directs a carrier gas containing an aerosol to an analyzer, the path switching system including a second path that branches off from a first path that directs the carrier gas to the cell and directs the carrier gas to the analyzer side without passing through the cell, of The apparatus is provided with a path opening / closing unit that opens and closes the path, and a path switching unit that switches the destination of the carrier gas that is led out of the cell to the analyzer side or the exhaust side, and when the stage is taken in or out to exchange the measurement object, the path opening / closing unit is opened and the path switching unit is switched to the exhaust side. Air that has been mixed into the cell due to the stage being moved in and out is exhausted.

[0010] A path switching system for a laser ablation apparatus according to a second aspect of the present invention is a path switching system for a laser ablation apparatus that has a cell with a stage for placing a measurement object that can be freely inserted and removed, and that outputs a carrier gas containing an aerosol to an analyzer, and that includes: a path opening / closing unit that is located in a second path that branches off from a first path that guides the carrier gas to the cell and guides the carrier gas to the analyzer side without passing through the cell, and that opens and closes the second path; a first path switching unit that is located in a third path that is different from the second path branched from the first path, and that switches the connection from the cell via the third path to the first path or the exhaust side; and a second path switching unit that switches the destination of the carrier gas derived from the cell to the analyzer side or the exhaust side, and when the stage is inserted or removed to replace the measurement object, the first and second path opening / closing units are opened, and the path switching unit is switched to the exhaust side.

[0012] The present invention 3 The laser ablation device according to the embodiment is a first or second The route switching system according to any one of the above aspects is used. [Effects of the Invention]

[0013] According to the present invention, it is possible to provide a technique for preventing plasma instability or extinguishing on the analyzer side due to air entering from the cell when replacing the measurement object. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a configuration diagram of a path switching system of a laser ablation apparatus according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a detailed configuration diagram of a cell of the laser ablation apparatus according to the first embodiment of the present invention. [Figure 3] 3(a) and 3(b) are conceptual diagrams illustrating the path switching process performed by the path switching system of the laser ablation apparatus according to the first embodiment of the present invention. [Figure 4]FIG. 4 is a configuration diagram of a path switching system of a laser ablation apparatus according to a second embodiment of the present invention. [Figure 5] FIG. 5 is a conceptual diagram illustrating a path switching process performed by a path switching system of a laser ablation apparatus according to a second embodiment of the present invention. [Figure 6] FIG. 6 is a configuration diagram of a path switching system of a laser ablation apparatus according to a third embodiment of the present invention. [Figure 7] FIG. 7 is a conceptual diagram illustrating a path switching process performed by a path switching system of a laser ablation apparatus according to a third embodiment of the present invention. [Figure 8] FIG. 8 is a functional block diagram of a control system of a laser ablation apparatus according to a fourth embodiment of the present invention. [Figure 9] FIG. 9 is a flowchart showing a processing procedure performed by a laser ablation apparatus according to the fourth embodiment of the present invention. [Figure 10] FIG. 10 is a flowchart showing another processing procedure performed by the laser ablation apparatus according to the fourth embodiment of the present invention. [Figure 11] 11(a) and 11(b) are diagrams illustrating the operation process of the laser ablation apparatus according to the fourth embodiment of the present invention. [Figure 12] 12(a) and 12(b) are conceptual diagrams showing flow paths for gases and the like in a laser ablation device according to the prior art. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0016] First Embodiment The path switching system of the laser ablation apparatus according to the first embodiment of the present invention has a three-port solenoid valve on the gas outlet side of the cell, and further branches the gas inlet side into the cell side and the analytical device side such as ICP-MS or ICP-OES, and a two-port solenoid valve is provided on the path bypassing the analytical device such as ICP-MS or ICP-OES to adjust the gas flow.

[0017] FIG. 1 shows a perspective view of the configuration of a path switching system of a laser ablation apparatus according to a first embodiment of the present invention, FIG. 2 shows a perspective view of the detailed configuration of a cell in the apparatus, and FIGS. 3(a) and 3(b) show conceptual diagrams of the gas paths in the apparatus, which will be explained.

[0018] 1 and 2, the path switching system of the laser ablation apparatus according to the first embodiment of the present invention comprises a three-port solenoid valve 13 as a path switching unit and a two-port solenoid valve 14 as a path opening / closing unit. A laser ablation cell 1 (hereinafter abbreviated as cell) may be added to these to form a path switching system.

[0019] The laser ablation cell 1 is configured such that a port block 3A serving as an inlet portion is attached to the carrier gas inlet side of the cell body 2, a port block 3B serving as an outlet portion is attached to the outlet side, and a detachable installation block 7 is further attached to the cell body 2. In this example, bolts 12 are used to attach the port blocks 3A and 3B to the cell body 2. The cell body 2 is hollow and has an opening on its top surface, with a window 4 installed in the opening by a cover member 5. In this example, bolts 11 are used to install the window 4 by the cover member 5.

[0020] Here, laser light from a laser light source (not shown) is irradiated onto the sample in the cell body 2 from the direction indicated by the symbol H in the figure.

[0021] As shown in FIG. 2, the mounting block 7 is attached to the cell body 2 by inserting it into the cell body 2 from the opening 2A in the depth direction. The mounting block flat surface 7A of the mounting block 7, which serves as a stage, is provided with locking members 6A and 6B, which are operated by a handle 6C. Operating the handle 6C opens and closes the locks of the locking members 3A-2 and 3B-2 provided on the port blocks 3A and 3B. Specifically, by inserting the mounting block 7 through the opening 2A of the cell body 2 and operating the handle 6C, the locking members 6A and 6B engage with the locking members 3A-2 and 3B-2, fixing the block in place. A mounting table 10 is attached to the recess 7C of the mounting block 7, and a sample to be measured is placed on the top flat surface of the mounting table 10.

[0022] A conveying tube 9A, through which a conveying gas is introduced from a gas generation source not shown, is connected to the inlet side of a T-shaped member 15A, and the outlet side of the T-shaped member 15A branches into two directions, one of which is connected to a conveying tube 9B and the other to a conveying tube 9F.

[0023] Transfer tube 9B is connected via valve 8A to port block 3A on the inlet side of cell 1. Transfer tube 9C is connected via valve 8B to port block 3B on the outlet side of cell 1. Transfer tube 9C is connected to the inlet side of three-port solenoid valve 13, and the outlet side of three-port solenoid valve 13 branches into transfer tube 9D, which leads gas to an analytical device such as ICP-MS or ICP-OES, and transfer tube 9E, which leads gas to an exhaust port.

[0024] The transfer tube 9F is connected to the inlet side of the two-port solenoid valve 14, and the transfer tube 9G is connected to the outlet side of the two-port solenoid valve 14, and the transfer tube 9G is connected to one end of the inlet side of the T-member 15B. The transfer tube 9D is connected to the other end of the inlet side of the T-member 15B, and the transfer tube 9H is connected to the outlet side of the T-member 15B, and the transfer gas is led to an analytical device such as an ICP-MS or ICP-OES.

[0025] The two-port solenoid valve 14 generates magnetic force using electricity, and drives a valve using the magnetic force to open and close the path. In this example, it controls on / off the discharge of gas introduced from the carrier tube 9F to the carrier tube 9G. On the other hand, the three-port solenoid valve 13 generates magnetic force using electricity, and drives a valve using the magnetic force to switch the path to which the carrier gas is discharged. In this example, it switches the discharge destination of the gas introduced from the carrier tube 9C to either the carrier tube 9D or the carrier tube 9E.

[0026] In this configuration, in the path switching system of this laser ablation apparatus, during normal operation after the measurement object is placed in cell 1, as shown in Figure 3(a), the two-port solenoid valve 14 is closed to close the path so that the carrier gas does not flow from carrier tube 9F to carrier tube 9G via the two-port solenoid valve 14. Then, the outlet of the three-port solenoid valve 13 is switched to carrier tube 9D, and the path is set so that the gas discharged from cell 1 is led to an analytical device such as an ICP-MS or ICP-OES via carrier tubes 9D and 9H.

[0027] On the other hand, when a sample is introduced into or removed from the cell, as shown in Figure 3(b), the two-port solenoid valve 14 is opened, and a path is set so that the carrier gas flows from the carrier tube 9F to the carrier tube 9G via the two-port solenoid valve 14. Then, the outlet of the three-port solenoid valve 13 is switched to the carrier tube 9E side, and a path is set so that the gas or air drawn out from the cell 1 is led to the discharge port via the carrier tube 9E.

[0028] As described above, according to the first embodiment of the present invention, in a path switching system for a laser ablation device that has a cell 1 that can be freely inserted and removed and that carries a carrier gas containing an aerosol to an analytical device such as an ICP-MS or ICP-OES, the path switching system is provided with a path opening / closing unit (two-port solenoid valve 14) that opens and closes the second path and is located in a second path (carrying tube 9F, 9G) that branches off from a first path (carrying tube 9A) that leads the carrier gas to the cell and leads the carrier gas to the analytical device side without passing through the cell, and a path switching unit (three-port solenoid valve 13) that switches the destination of the carrier gas derived from the cell to the analytical device side (carrying tube 9D) or the exhaust side (carrying tube 9E), and when the stage is inserted or removed to replace the measured object, the path opening / closing unit is opened and the path switching unit is switched to the exhaust side.

[0029] Therefore, according to the first embodiment of the present invention, when replacing the object to be measured, the air that has entered the cell is discharged through the exhaust port, and sufficient carrier gas is introduced to the analyzer side through the carrier tubes 9F, 9G, and 9H, thereby preventing the plasma on the analyzer side from becoming unstable or going out.

[0030] Second Embodiment The path switching system of the laser ablation apparatus according to the second embodiment of the present invention has three-port solenoid valves on both the gas inlet and outlet sides of the cell, and further branches the gas inlet side to the cell side and the side of an analytical device such as an ICP-MS or ICP-OES, and has a two-port solenoid valve on the path bypassing the analytical device such as an ICP-MS or ICP-OES to adjust the gas flow.

[0031] Fig. 4 shows a perspective view of the configuration of a path switching system of a laser ablation apparatus according to a second embodiment of the present invention, and Fig. 5 shows a conceptual diagram of the gas paths in the same apparatus, which will be explained. Here, the same reference numerals are used for components similar to those in the first embodiment, and duplicate explanations will be omitted, with differences being mainly explained.

[0032] 4, the path switching system of the laser ablation apparatus according to the second embodiment of the present invention includes three-port solenoid valves 13 and 16 as a path switching unit, and a two-port solenoid valve 14 as a path opening / closing unit. A cell 1 may be added to these components to form a path switching system.

[0033] A conveying tube 9A, through which a conveying gas is introduced from a gas generation source not shown, is connected to the inlet side of a T-member 15A, and the outlet side of the T-member 15A branches into two directions, one of which is connected to a conveying tube 9B-1 and the other to a conveying tube 9F.

[0034] The transfer tube 9B-1 is connected to the inlet side of a three-port solenoid valve 16, and the outlet side of the three-port solenoid valve 16 branches into a transfer tube 9B-2 that leads the carrier gas to the cell 1 and a transfer tube 9L that leads the air inside the cell 1 to the exhaust side. The transfer tube 9B-2 is connected to a port block 3A on the inlet side of the cell 1.

[0035] A transfer tube 9C is connected via a valve 8B to a port block 3B on the outlet side of the cell 1. The transfer tube 9C is connected to the inlet side of a three-port solenoid valve 13, and the outlet side of the three-port solenoid valve 13 branches into a transfer tube 9D that leads gas to an analytical device such as an ICP-MS or ICP-OES, and a transfer tube 9E that leads gas or air to an exhaust port.

[0036] The transfer tube 9F is connected to the inlet side of the two-port solenoid valve 14, and the transfer tube 9G is connected to the outlet side of the two-port solenoid valve 14, and the transfer tube 9G is connected to one end of the inlet side of the T-member 15B. The transfer tube 9D is connected to the other end of the inlet side of the T-member 15B, and the transfer tube 9H is connected to the outlet side of the T-member 15B, and the transfer gas is led to an analytical device such as an ICP-MS or ICP-OES.

[0037] The two-port solenoid valve 14 generates magnetic force using electricity, driving a valve through the action of the magnetic force to open and close a path. In this example, it controls on / off the discharge of gas introduced from the carrier tube 9F to the carrier tube 9G. On the other hand, the three-port solenoid valves 13 and 16 generate magnetic force using electricity, driving a valve through the action of the magnetic force to switch the discharge path of the carrier gas. In this example, the three-port solenoid valve 16 switches the discharge destination of the gas introduced from the carrier tube 9B-1 to either the carrier tube 9B-2 or the carrier tube 9L. The three-port solenoid valve 13 switches the discharge destination of the gas introduced from the carrier tube 9C to either the carrier tube 9D or the carrier tube 9E.

[0038] In this configuration, in the path switching system of this laser ablation apparatus, when a sample is introduced into or removed from the cell 1, as shown in Fig. 5, the two-port solenoid valve 14 is opened, and a path is set so that the carrier gas flows from the carrier tube 9F to the carrier tubes 9G and 9H via the two-port solenoid valve 14 (shown by the dashed line in Fig. 4). Then, the outlet of the three-port solenoid valve 16 is switched to the carrier tube 9L side, and the outlet of the three-port solenoid valve 13 is switched to the carrier tube 9E side, and a path is set so that air that has entered the cell 1 when the sample is introduced into or removed from the cell 1 is guided to the discharge port via the carrier tubes 9E and 9L and discharged (shown by the dashed line in Fig. 4).

[0039] As described above, according to the second embodiment of the present invention, in the path switching system for a laser ablation apparatus that includes a cell 1 that can be freely inserted and removed from a stage (mounting block 7) on which a measurement object is placed and that introduces a carrier gas containing an aerosol to an analyzer such as an ICP-MS or an ICP-OES, the path switching system includes a path opening / closing unit (two-port solenoid valve 14) that opens and closes the second path and a path opening / closing unit (two-port solenoid valve 14) that opens and closes the second path and a path opening / closing unit (two-port solenoid valve 14) that opens and closes the second path. A path switching system is provided which is provided with a first path switching unit (three-port solenoid valve 16) which is interposed in a third path (conveying tubes 9B-1, 9B-2) different from the second path and switches the connection from the cell via the third path to the first path or the exhaust side (conveying tube 9L), and a second path switching unit (three-port solenoid valve 13) which switches the destination of the carrier gas discharged from the cell to the analytical device side or the exhaust side (conveying tube 9E), and when the stage is moved in or out to replace the object to be measured, the first and second path opening / closing units are opened and the path switching unit is switched to the exhaust side.

[0040] Therefore, according to the second embodiment of the present invention, the air that has entered the cell 1 when the object to be measured is replaced is guided to the exhaust port and discharged by the action of the three-port solenoid valves 13 and 16, and sufficient carrier gas is introduced to the analyzer side via the carrier tubes 9F, 9G, and 9H by the action of the two-port solenoid valve 14, thereby preventing the plasma on the analyzer side from becoming unstable or going out.

[0041] Third Embodiment The path switching system of the laser ablation apparatus according to the third embodiment of the present invention branches the gas introduction side into the cell side and the side of an analytical device such as an ICP-MS or ICP-OES, provides a two-port solenoid valve on the path bypassing the analytical device such as an ICP-MS or ICP-OES, and further provides a mass flow controller on the path leading to an auxiliary carrier gas for the analytical device such as an ICP-MS or ICP-OES to adjust the gas flow.

[0042] Fig. 6 shows a perspective view of the configuration of a path switching system of a laser ablation apparatus according to a third embodiment of the present invention, and Fig. 7 shows a conceptual diagram of the gas paths in the same apparatus, which will be explained. Here, the same reference numerals are used for components similar to those in the first embodiment, and duplicate explanations will be omitted, with differences being mainly explained.

[0043] 6, the path switching system of the laser ablation apparatus according to the third embodiment of the present invention includes a two-port solenoid valve 14 as a path opening / closing unit and a mass flow controller 17 as a flow rate adjusting unit. A cell 1 may be added to these components to form a path switching system.

[0044] A conveying tube 9A, through which a conveying gas is introduced from a gas generation source not shown, is connected to the inlet side of a T-shaped member 15A, and the outlet side of the T-shaped member 15A branches into two directions, one of which is connected to a conveying tube 9B and the other to a conveying tube 9F.

[0045] Conveying tube 9B is connected via valve 8A to port block 3A on the inlet side surface of cell 1. Conveying tube 9C is connected via valve 8B to port block 3B on the outlet side surface of cell 1. Conveying tube 9C is then connected to the inlet side of T-piece 15B.

[0046] The transfer tube 9F is connected to the inlet side of the two-port solenoid valve 14, and the transfer tube 9G is connected to the outlet side of the two-port solenoid valve 14, and the transfer tube 9G is connected to one end of the inlet side of the T-piece 15C. The transfer tube 9I, which transfers additional auxiliary gas from a gas generation source (not shown), is connected to the inlet side of the mass flow controller 17, and the transfer tube 9J is connected to the inlet side of the mass flow controller 17. The transfer tube 9J is connected to the other end of the inlet side of the T-piece 15C, and the outlet side of the T-piece 15C is connected to the transfer tube 9K, and the transfer tube 9K is connected to the other end of the inlet side of the T-piece 15B. The outlet side of the T-piece 15B is connected to the transfer tube 9H, and the carrier gas is guided to an analytical device such as an ICP-MS or ICP-OES.

[0047] The two-port solenoid valve 14 generates magnetic force using electrical power, and the magnetic force drives the valve to open and close the path. In this example, it controls on / off the discharge of gas introduced from the carrier tube 9F to the carrier tube 9G. The mass flow controller 17 adjusts the flow rate of the additional auxiliary gas by controlling the opening and closing of the valve using electromagnetic action.

[0048] In this configuration, in the path switching system of this laser ablation apparatus, when a sample is introduced into or removed from a cell, as shown in Fig. 7, the two-port solenoid valve 14 is opened, and a path is set so that carrier gas flows from carrier tube 9F to carrier tube 9G via the two-port solenoid valve 14. Then, the mass flow controller 17 is turned on, and a path is set so that additional auxiliary gas flows. In this way, the carrier gas and additional auxiliary gas are guided to the analytical device such as ICP-MS or ICP-OES via the above-mentioned set path (shown by the dashed line in Fig. 6).

[0049] As described above, according to the third embodiment of the present invention, in a path switching system for a laser ablation device that has a cell 1 that can be freely inserted and removed and that carries a carrier gas containing an aerosol to an analytical device such as an ICP-MS or ICP-OES, the path switching system is provided with a path opening / closing unit (two-port solenoid valve 14) that opens and closes the second path (carrying tube 9F, 9G) that branches off from the first path (carrying tube 9A) that leads the carrier gas to the cell and leads the carrier gas to the analytical device side without passing through the cell, and a flow rate adjustment unit (mass flow controller 17) that adjusts the flow rate of the additional auxiliary gas that is located on the third path (carrying tube 9I, 9J) that leads the additional auxiliary gas to the analytical device, and when the stage is inserted or removed to replace the measured object, the path opening / closing unit is opened and the flow rate adjustment unit is adjusted to open.

[0050] Therefore, according to the third embodiment of the present invention, when replacing the object to be measured, the carrier gas and additional auxiliary gas are introduced directly into the analytical device such as ICP-MS or ICP-OES, thereby preventing the plasma on the analytical device from becoming unstable or going out.

[0051] <Fourth embodiment> The laser ablation device according to the fourth embodiment of the present invention automatically controls the path of the carrier gas by linking the laser ablation device according to the first to third embodiments described above with the opening and closing of an openable protective panel, etc.

[0052] FIG. 8 shows the configuration of a laser ablation apparatus according to a fourth embodiment of the present invention, focusing on the control system, and will be described below.

[0053] As shown in Figure 8, this laser ablation device has at least a computer 50 that controls each part, a light source 60, a three-port solenoid valve 61, a two-port solenoid valve 62, a flow rate adjustment unit 63, a cell 64, an openable protective panel 65, and a sensor 66.

[0054] The light source 60 comprises a laser light source and an optical system, and irradiates a laser beam onto a sample placed in a cell 64 as a measurement object. The three-port solenoid valve 61 functions as a path switching unit that branches the transport path of the carrier gas into two. The two-port solenoid valve 62 functions as a path opening / closing unit that opens and closes the transport path of the carrier gas. The flow rate adjusting unit 63 comprises a mass flow controller or the like, and adjusts the flow rate of the additional auxiliary gas by operating a valve or the like. The cell 64 has the configuration described above in the first to third embodiments. The openable protective panel 65 is an openable door installed in the housing, and is opened or closed manually or automatically to insert or remove the sample during the measurement process. The sensor 66 detects whether the openable protective panel 65 is open or closed.

[0055] In the computer 50, the communication unit 52 transmits and receives data to and from external devices via a communication network such as the Internet. The operation panel 53 is configured, for example, with a touch panel, displays various operation buttons, and accepts operation input by tapping the operation buttons, etc. The storage unit 54 stores the control program of the control unit 51 in advance and stores various data obtained by measurement.

[0056] The control unit 51 reads and executes the control programs stored in the storage unit 54, thereby functioning as a main control unit 51a, a light source control unit 51b, a solenoid valve control unit 51c, a flow rate adjustment unit control unit 51d, a stage drive control unit 51e, and the like.

[0057] In this configuration, the main control unit 51a controls the control units 51b and 51c in an integrated manner based on various operation modes selected by operating the operation panel 52. The light source control unit 51b controls the laser irradiation of the light source 60. The solenoid valve control unit 51c controls the path switching by the three-port solenoid valve 61 and the path opening and closing by the two-port solenoid valve 62. The flow rate adjustment unit control unit 51d controls the flow rate adjustment unit 63, such as a mass flow controller, to adjust the flow rate of the additional carrier gas. The stage drive control unit 51e controls the drive of the stage of the cell 64. During the above-mentioned operations, the main control unit 51a detects the opening and closing of the open / close type protective panel 65 based on the output of the sensor 66, and executes the next operation based on the operation mode at the timing of the opening and closing.

[0058] The path control processing procedure by the laser ablation apparatus according to the fourth embodiment of the present invention will be described in detail below with reference to the flowchart in Fig. 9. This operation corresponds to an automated version of the laser ablation apparatus according to the first and second embodiments described above, based on the operation mode.

[0059] When the operation panel 53 is operated to issue an instruction to replace the sample, and the main control unit 51a receives the instruction, control by each of the control units 51b to 51e is started (S1).

[0060] First, the solenoid valve control unit 51c controls the drive of the two-port solenoid valve 62 to open a bypass path (S2), and then the solenoid valve control unit 51c controls the drive of the three-port solenoid valve 61 to switch the path to the exhaust side (S3). As a result, a carrier gas is sent to an analyzer such as an ICP-MS or ICP-OES from a separate bypass path, and a path is constructed in which air mixed in the cell is exhausted from the exhaust side (see, for example, FIG. 3(b), FIG. 5, etc.).

[0061] Next, when the opening / closing type protective panel 65 is opened (manually or automatically), the sensor 66 detects the open / closed state and notifies the main controller 51a (S4). When the user replaces the measurement object (sample) placed in the cell (S5) and the opening / closing type protective panel 65 is closed (manually or automatically), the sensor 66 also detects the open / closed state and notifies the main controller 51a (S6).

[0062] Next, the solenoid valve control unit 51c controls the two-port solenoid valve 62 to close the bypass path (S7), and the solenoid valve control unit 51c controls the three-port solenoid valve 61 to switch the path to the intake side (S8), and measurement continues (S9). This switches to the normal path for introducing carrier gas into the cell. This completes the series of processes. Note that either of the processes in steps S2 and S3 described above can be performed first, and either of the processes in steps S7 and S8 can be performed first.

[0063] Another processing procedure for path control by the laser ablation apparatus according to the fourth embodiment of the present invention will be described in detail below with reference to the flowchart in Fig. 10. This operation corresponds to the laser ablation apparatus according to the third embodiment described above, which has been automated based on the operation mode.

[0064] When the operation panel 53 is operated to issue an instruction to replace the sample, and the main control unit 51a receives the instruction, control by each of the control units 51b to 51e is started (S11).

[0065] First, the solenoid valve control unit 51c controls the two-port solenoid valve 62 to open the bypass path (S12), and the flow rate adjustment unit control unit 51d controls the flow rate adjustment unit 63 to turn on the delivery of the additional auxiliary gas and adjust its flow rate (S13). As a result, a path is constructed to send the additional carrier gas to an analyzer such as an ICP-MS or ICP-OES in addition to the carrier gas from the bypassed separate path (see, for example, FIG. 7).

[0066] Next, when the opening / closing type protective panel 65 is opened (manually or automatically), the sensor 66 detects the open / closed state and notifies the main controller 51a (S14). When the user replaces the measurement object (sample) placed in the cell (S15) and the opening / closing type protective panel 65 is closed (manually or automatically), the sensor 66 also detects this open / closed state and notifies the main controller 51a (S16).

[0067] Next, the flow rate regulator control unit 51d drives and controls the flow rate regulator 63 to close the additional carrier gas introduction path (S17), and the solenoid valve control unit 51c drives and controls the two-port solenoid valve 62 to close the bypassed path (S18), and measurement continues (S19). This switches to the normal path for introducing carrier gas into the cell. This completes the series of processes. Note that either of the processes in steps S12 and S13 described above can be performed first, and either of the processes in steps S17 and S18 can be performed first.

[0068] Finally, Fig. 11 shows an external view of a laser ablation device and explains it. More specifically, Fig. 11(a) shows a device of the type in which an opening / closing protection panel 65A is opened and closed automatically, and Fig. 11(b) shows a device of the type in which an opening / closing protection panel 65B is opened and closed manually. In either case, the open / closed state is detected by a sensor and transmitted to the main control unit 51a.

[0069] As described above, according to the fourth embodiment of the present invention, automation based on the operation modes of the exhaust processing of the laser ablation apparatus according to the first to third embodiments is realized.

[0070] Therefore, according to the fourth embodiment of the present invention, processing by the laser ablation apparatus according to the first to third embodiments is automatically performed based on the operating mode, etc., and it is possible to effectively prevent the plasma from becoming unstable or turning off on the analysis device side.

[0071] Although the first to fourth embodiments of the present invention have been described above, the present invention is not limited to these, and various improvements and modifications can be made without departing from the spirit of the present invention.

[0072] For example, the opening and closing of the paths of the carrier gas and air and the path switching are not limited to the use of the electromagnetic valves described above, and it goes without saying that various mechanisms can be used. [Explanation of symbols]

[0073] 1...Laser ablation cell, 2...Cell body, 3A, 3B...Port block, 3A-1...Inlet path, 3A-2...Lock member, 3B-1...Outlet path, 3B-2...Lock member, 4...Window portion, 5...Cover member, 6...Handle portion, 6A, 6B, 6C...Lock member, 7...Installation block, 7A...Installation block flat portion, 7B...Installation block body, 7C...Recess, 8A, 8B...Valve, 9A to 9L...Transport tube, 10...Installation stand, 11, 12...Bolt, 13...3-port solenoid valve, 14... 2-port solenoid valve, 15A, 15B, 15C...T-member, 16...3-port solenoid valve, 17...mass flow controller, 50...computer, 51...control unit, 51a...main control unit, 51b...light source control unit, 51c...solenoid valve control unit, 51d...flow rate adjustment unit control unit, 51e...stage drive control unit, 52...communication unit, 53...operation panel, 54...memory unit, 60...light source, 61...3-port solenoid valve, 62...2-port solenoid valve, 63...flow rate control unit, 64...cell, 65...openable protective panel, 66...sensor.

Claims

1. A path switching system for a laser ablation apparatus that includes a cell with a removable stage for placing an object to be measured and delivers a carrier gas containing an aerosol to an analyzer, a path opening / closing unit that is interposed in a second path that branches off from a first path that guides the carrier gas to the cell and guides the carrier gas to the analyzer side without passing through the cell, and that opens and closes the second path; a path switching unit that switches the destination of the carrier gas discharged from the cell to the analyzer side or the exhaust side, When the stage is taken in or out to replace the measurement object, the path opening / closing unit is opened, the path switching unit is switched to the exhaust side, and air that has entered the cell due to the taking in or out of the stage is exhausted. Route switching system.

2. A path switching system for a laser ablation apparatus that includes a cell with a removable stage for placing an object to be measured and delivers a carrier gas containing an aerosol to an analyzer, a path opening / closing unit that is interposed in a second path that branches off from a first path that guides the carrier gas to the cell and guides the carrier gas to the analyzer side without passing through the cell, and that opens and closes the second path; a first path switching unit that is interposed in a third path that is different from the second path branched from the first path and that switches a connection from the cell via the third path to the first path or an exhaust side; a second path switching unit that switches the destination of the carrier gas discharged from the cell to the analyzer side or the exhaust side, When the stage is taken in or out to exchange the object to be measured, the first and second path opening / closing units are opened and the path switching unit is switched to the exhaust side. Route switching system.

3. A laser ablation device using the path switching system according to claim 1 or 2.

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