Processing equipment

Abstract

To prevent an upper surface of a plate-like work-piece from getting soiled when carrying out the plate-like work-piece.SOLUTION: In carrying out a plate-like work-piece 8 from a holding surface 200 of a chuck table 2, an air jet port 420 in a first air jet portion 42 of a first suction part 4 flows air from a center side of an upper surface 80 of the plate-like work-piece 8 toward an outer periphery thereof. This can suppress processed waste liquid jetted from the holding surface 200 from adhering to the upper surface 80 of the plate-like work-piece 8, and can wash the upper surface 80 of the plate-like work-piece 8 by flowing air, so that when the plate-like work-piece 8 is carried out from the chuck table 2, the upper surface 80 of the plate-like work-piece 8 can be suppressed from getting soiled. This can eliminate the necessity of washing the upper surface 80 of the plate-like work-piece 8 after the plate-like work-piece 8 is carried out from the chuck table 2, which eliminates need for a mechanism for washing, so that a processing device can be downsized as a whole and can be reduced in cost.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] A processing device for processing a plate-shaped workpiece holds the lower surface of the plate-shaped workpiece by suction on the holding surface of a chuck table, and processes the upper surface of the plate-shaped workpiece while supplying processing fluid. The chuck table sucks processing waste fluid containing processing debris from the outer periphery of the plate-shaped workpiece during processing.

[0003] The processed plate-shaped workpiece is held by a carrying-out mechanism provided in the processing device, and is carried out by releasing the suction force of the holding surface of the chuck table. At this time, a fluid is sprayed from the holding surface to release the suction force of the holding surface. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 1995-211685 [Patent Document 2] Japanese Patent Application Laid-Open No. 2010-010267 Summary of the Invention [Problem to be solved by the invention]

[0005] When fluid is ejected from the holding surface, the holding surface ejects waste fluid containing machining debris that was absorbed during machining, and this waste fluid may adhere to the outer periphery and top surface of the plate-shaped workpiece held in the discharge mechanism before it is discharged from the holding surface. In other words, the waste fluid containing machining debris ejected from the holding surface may contaminate the top surface of the plate-shaped workpiece. For this reason, as disclosed in Patent Documents 1 and 2, the processing device is equipped with a cleaning mechanism that cleans the top surface of the plate-shaped workpiece. However, if the top surface of the plate-shaped workpiece is not contaminated, this cleaning mechanism is unnecessary.

[0006] Therefore, an object of the present invention is to prevent the top surface of a plate-shaped workpiece from becoming dirty when the plate-shaped workpiece is carried out from the chuck table. [Means for solving the problem]

[0007] Processing of the present invention Device (This processing device) is a processing device that includes a suction unit that suction-holds the upper surface of a plate-shaped workpiece that is suction-held by the holding surface of a chuck table, and a movement mechanism that moves a suspending unit that suspends the suction unit, and the suction unit suction-holds the plate-shaped workpiece and transports it from the chuck table, and the suction unit: a suction cup support column extending downward from the hanging portion; and a suction cup support column disposed at the tip of the suction cup support column. The apparatus is provided with a suction cup connected to a suction source, and an air injection unit having an air injection port for blowing air from the center of the upper surface of the plate-shaped workpiece held by the suction cup toward the outer periphery, the air injection section comprises: a first rotating plate having a first through hole through which the suction cup support post passes; a first air inlet formed on the inner wall of the first through hole; an air injection port arranged on the outer periphery of the first rotating plate and injecting air; a first rotating plate communication passage formed within the first rotating plate and communicating the first air inlet with the air injection port; a first rotation support part formed on the suction cup support post and rotatably supporting the first rotating plate; a first air delivery port formed on a side surface of the suction cup support post at a height corresponding to the first air inlet of the first rotating plate supported by the first rotation support part; a first air supply port arranged in the suction cup support post; and a first support post communication passage formed in the suction cup support post and communicating the first air supply port with the first air delivery port, Air is jetted from the air jet port, and the plate-like workpiece sucked and held by the suction cup is carried out from the chuck table without wetting the upper surface of the plate-like workpiece. Alternatively, this processing device teeth , a processing device comprising a suction unit that suction-holds the top surface of a plate-shaped workpiece that is suction-held by the holding surface of a chuck table, and a moving mechanism that moves a suspending unit that suspends the suction unit, wherein the suction unit suction-holds the plate-shaped workpiece and carries it out of the chuck table, the suction unit comprising a suction cup that is disposed below the suspending unit and communicates with a suction source, and an air injection unit having an air injection port that blows air from the center of the top surface of the plate-shaped workpiece that is suction-held by the suction cup toward the periphery, the air injection section includes a rotary support column extending downward from the hanging section, a second rotary plate having a second through hole through which the rotary support column passes, a second air inlet formed in an inner wall of the second through hole, the air injection port arranged on the outer periphery of the second rotary plate and injecting air, a second rotary plate communication passage formed in the second rotary plate and communicating the second air inlet and the air injection port, a second rotary support section formed on the rotary support column and rotatably supporting the second rotary plate, a second air delivery port formed on a side surface of the rotary support column at a height corresponding to the second air inlet of the second rotary plate supported by the second rotary support section, a second air supply port arranged on the rotary support column, and a second support column communication passage formed on the rotary support column and communicating the second air supply port and the second air delivery port. Air is sprayed from the air spray port, and the plate-shaped workpiece held by the suction cup is removed from the chuck table without wetting the top surface of the plate-shaped workpiece. . [Effects of the Invention]

[0008] In this processing device, when a plate-shaped workpiece is removed from the holding surface of the chuck table, the air jet ports of the suction unit direct air from the center of the top surface of the plate-shaped workpiece toward the periphery, thereby preventing machining waste fluid ejected from the holding surface from entering the top surface of the plate-shaped workpiece from the periphery. This prevents machining waste fluid from adhering to the top surface of the plate-shaped workpiece. Furthermore, the air can also be used to clean the top surface of the plate-shaped workpiece. Therefore, contamination of the top surface of the plate-shaped workpiece when the plate-shaped workpiece is removed from the chuck table can be prevented. Therefore, there is no need to clean the top surface of the plate-shaped workpiece after the plate-shaped workpiece is removed from the chuck table, eliminating the need for a cleaning mechanism and enabling the overall device to be made smaller and less expensive. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 2 is a cross-sectional view of a processing device equipped with a first transport mechanism. [Figure 2] FIG. 4 is a cross-sectional view of a second transport mechanism. [Figure 3] FIG. 4 is an exploded cross-sectional view of a second air ejection section. [Figure 4] FIG. 10 is a cross-sectional view of a third transport mechanism. [Figure 5] FIG. 4 is an exploded cross-sectional view of a third air injection section. DETAILED DESCRIPTION OF THE INVENTION

[0010] The processing device 1 shown in Figure 1 includes a chuck table 2 that suction-holds a plate-shaped workpiece 8, which is an example of a workpiece, using a holding surface 200, and a first conveying mechanism 11 that transports the plate-shaped workpiece 8 from the chuck table 2.

[0011] The chuck table 2 includes a porous member 20 made of a porous material, and a frame 21 that exposes the upper surface of the porous member 20 and houses the porous member 20. The upper surface of the porous member 20 is a holding surface 200 that holds the plate-shaped workpiece 8 by suction. The upper surface 210 of the frame 21 is formed flush with the holding surface 200. In this embodiment, the plate-shaped workpiece 8 is formed in a circular plate shape, and the holding surface 200 is also formed in a circular plate shape. The holding surface 200 may also be formed in a rectangular shape.

[0012] Below the chuck table 2, a rotation mechanism 26 for rotating the chuck table 2 is disposed.

[0013] The rotation mechanism 26 is a pulley mechanism. That is, the rotation mechanism 26 includes a motor 260, a drive shaft 262 rotatable about a rotation axis in the Z-axis direction by the motor 260, a drive pulley 263 connected to the upper end of the drive shaft 262, a transmission belt 264 wound around the drive pulley 263 and transmitting the driving force of the drive pulley 263 to a driven pulley 265, a driven pulley 265 wound around the transmission belt 264 together with the drive pulley 263, a driven shaft 266 connected to the driven pulley 265 and rotatable about a rotation axis 25 in the Z-axis direction, and a rotary joint 267 connected to the lower end of the driven shaft 266. The driven shaft 266 is connected to the chuck table 2.

[0014] In the rotation mechanism 26, when the drive shaft 262 is rotated using the motor 260, the drive pulley 263 rotates, and the rotational force of the drive pulley 263 is transmitted to the driven pulley 265 by the transmission belt 264, causing the driven pulley 265 to rotate. As a result, the driven shaft 266 connected to the driven pulley 265 rotates about the rotation shaft 25. Then, the chuck table 2 connected to the driven shaft 266 rotates about the rotation shaft 25 as well.

[0015] Furthermore, a suction source 240 and a fluid supply source 24 are connected to the chuck table 2 via a communication mechanism 23. The fluid supply source 24 includes an air supply source 241 and a water supply source 242.

[0016] The communication mechanism 23 is a mechanism for supplying air or water from a fluid supply source 24 to the porous member 20 of the chuck table 2. The communication mechanism 23 is also a mechanism for applying suction force from a suction source 240 to the porous member 20. In other words, the communication mechanism 23 is configured to switchably communicate the suction source 240 and the fluid supply source 24 with the porous member 20.

[0017] The communication mechanism 23 has a flow path 243 connected to the porous member 20 of the chuck table 2. The flow path 243 is formed to penetrate the frame 21 of the chuck table 2, the driven shaft 266, and the rotary joint 267. The flow path 243 protrudes from the side surface of the rotary joint 267 to the outside of the rotary joint 267 and branches into a suction path 290, an air flow path 291, and a water flow path 292.

[0018] The communication mechanism 23 includes a suction valve 270 and a throttle valve 280 disposed in a suction path 290 between the suction source 240 and the porous member 20. When the suction valve 270 is opened, the suction force of the suction source 240 is transmitted to the holding surface 200 of the porous member 20 through the flow path 243. When the suction valve 270 is opened while the plate-shaped workpiece 8 is placed on the holding surface 200, the plate-shaped workpiece 8 can be sucked and held by the holding surface 200. The throttle valve 280 is used to adjust the suction force transmitted to the holding surface 200.

[0019] The communication mechanism 23 includes an air valve 271 and a throttle valve 281 disposed in an air flow path 291 between the air supply source 241 and the porous member 20. When the air valve 271 is opened, air from the air supply source 241 is supplied to the porous member 20 through the flow path 243. This causes air to be ejected from a large number of pores formed in the holding surface 200 of the porous member 20 toward the space above the holding surface 200. The throttle valve 281 is used to adjust the flow rate of air supplied to the holding surface 200.

[0020] The communication mechanism 23 includes a water valve 272 and a throttle valve 282 disposed in a water flow path 292 between the water supply source 242 and the porous member 20. When the water valve 272 is opened, water from the water supply source 242 is supplied to the porous member 20 through the flow path 243. This causes water to spurt out from the numerous pores in the holding surface 200 of the porous member 20. The throttle valve 282 is used to adjust the flow rate of water supplied to the holding surface 200.

[0021] It is also possible to simultaneously open the air valve 271 and the water valve 272 to supply a mixed fluid of air and water to the porous member 20 and cause the mixed fluid to be ejected from the holding surface 200. In this way, by spraying air, water or a mixed fluid from the holding surface 200, it is possible to clean the porous member 20 and the holding surface 200, or to remove the suction force acting between the holding surface 200 and the underside 81 of the plate-shaped workpiece 8.

[0022] The first transport mechanism 11 is used to transport the plate-shaped workpiece 8 held on the holding surface 200 of the chuck table 2 out of the chuck table 2. The first conveying mechanism 11 includes a first suction section 4 as an example of a suction section that suction-holds the upper surface 80 of the plate-shaped workpiece 8 that is suction-held on the holding surface 200, and a moving mechanism 3 that moves a hanging section 36 that suspends the first suction section 4.

[0023] The movement mechanism 3 includes a column 39 erected in the Z-axis direction, a ball screw 30 having a rotation shaft 35 in the Z-axis direction provided on the column 39, a guide rail 31 disposed parallel to the ball screw 30, a motor 32 connected to the ball screw 30 and rotating the ball screw 30 about the rotation shaft 35, a nut 300 screwed onto the ball screw 30, and a movable plate 33 connected to the nut 300. An encoder 320 is connected to the motor 32 to measure the amount of rotation of the ball screw 30.

[0024] A suspending unit 36, which is an arm extending horizontally, is connected to the upper end of the movable plate 33 of the movement mechanism 3. The suspending unit 36 suspends a cylindrical connecting unit 37, and the plate 40 of the first suction unit 4 is connected to the lower end of the connecting unit 37. In other words, the suspending unit 36 suspends the disk-shaped plate 40 of the first suction unit 4 via the connecting unit 37.

[0025] In the movement mechanism 3, the motor 32 rotates the ball screw 30 around the rotation shaft 35, thereby moving the movable plate 33 up and down in the Z-axis direction along the guide rail 31. Then, in the movement mechanism 3, by moving the movable plate 33 up and down in the Z-axis direction in this manner, the suspender 36 connected to the movable plate 33 and the plate 40 suspended from the suspender 36 via the connecting part 37 are also moved up and down.

[0026] Furthermore, in the movement mechanism 3, the suspending unit 36 is configured to be able to pivot about a rotation axis 35 in the Z-axis direction that passes through the movable plate 33. In this embodiment, the suspending unit 36 can pivot together with the suspended plate 40 about the rotation axis 35 by a pivot motor (not shown).

[0027] In this way, in the movement mechanism 3, the plate 40 of the first suction part 4 can be moved by moving the hanging part 36 up and down and rotating, thereby adjusting the height position and horizontal position of the plate 40. The movement mechanism 3 may move the suspending part 36 in the horizontal direction.

[0028] In addition to the plate 40 described above, the first suction unit 4 includes a joint 46 connected to the upper surface of the hanging unit 36, a suction cup support column 43 extending downward from the lower surface 400 of the plate 40, and a suction cup 41 disposed at the tip of the suction cup support column 43. The suction cup 41 is disposed below the hanging unit 36 and can be connected to a suction source 72. It is also possible to dispose the plate 40 and the connecting portion 37 and to place the suction cup 41 on the hanging portion 36 via the suction cup support column 43 .

[0029] The first suction unit 4 further includes a flow path 44. The flow path 44 is provided so as to penetrate the joint 46, the hanging unit 36, the connecting unit 37, the plate 40, the suction cup support column 43, and the suction cup 41 in the Z-axis direction. The upper end side of the flow path 44 extends from a communication port 461 formed at the upper end of the joint 46 to the outside of the joint 46 and branches into an air flow path 711 and a suction flow path 721. An air supply source 71 is connected to the air flow path 711 via an air valve 710, and a suction source 72 is connected to the suction flow path 721 via a suction valve 720. On the other hand, the lower end side of the flow path 44 is connected to a suction port 411 formed in the lower surface 410 of the suction cup 41.

[0030] In the first suction unit 4, when the air valve 710 is opened, the suction cup 41 is connected to the air supply source 71 via the flow path 44 and the air flow path 711. When the suction valve 720 is opened, the suction cup 41 is connected to the suction source 72 via the flow path 44 and the suction flow path 721.

[0031] Therefore, in the first suction section 4, when the upper surface 80 of the plate-shaped workpiece 8 is in contact with the lower surface 410 of the suction cup 41, the suction valve 720 is opened, and the suction force from the suction source 72 is transmitted to the suction cup 41, allowing the lower surface 410 of the suction cup 41 to suction and hold the upper surface 80 of the plate-shaped workpiece 8. In addition, in the first suction section 4, when the suction cups 41 are holding the plate-shaped workpiece 8 by suction, the suction holding of the plate-shaped workpiece 8 by the suction cups 41 can be released by opening the air valve 710.

[0032] In this way, in the first transport mechanism 11, the top surface 80 of the plate-shaped workpiece 8 is suction-held by the first suction unit 4, and the first suction unit 4 can be moved by the moving mechanism 3. Therefore, the first transport mechanism 11 can transport the plate-shaped workpiece 8, which is suction-held by the holding surface 200 of the chuck table 2, out of the chuck table 2.

[0033] In addition, the first conveying mechanism 11 can also transport the plate-shaped workpiece 8 to the chuck table 2 by holding the top surface 80 of the plate-shaped workpiece 8 at any location by suction using the first suction section 4, and then moving the first suction section 4 toward the chuck table 2 using the moving mechanism 3.

[0034] The first suction unit 4 also includes a first air injection unit 42 as an example of an air injection unit. The first air injection unit 42 has an annular air injection port 420 disposed in the center of the lower surface 400 of the plate 40, and a communication passage 421. The communication passage 421 penetrates the plate 40, the connecting portion 37, the hanging portion 36, and the joint 46. The communication passage 421 is formed to surround the flow path 44, and the lower end side of the communication passage 421 is connected to the air injection port 420. Meanwhile, the upper end side of the communication passage 421 extends from a supply port 463 formed in the joint 46 to the outside of the joint 46 and is connected to the air supply source 73 via an air valve 730.

[0035] In the first air injection section 42, the air valve 730 is opened, thereby connecting the air supply source 73 and the air injection port 420 via the communication passage 421. As a result, air from the air supply source 73 is injected downward from the air injection port 420.

[0036] Therefore, in the first air injection section 42, when the suction cup 41 is holding the top surface 80 of the plate-shaped workpiece 8 by suction, the air injection port 420 injects air downward, allowing air to flow from the center of the top surface 80 of the plate-shaped workpiece 8 held by suction by the suction cup 41 toward the outer periphery. The upper surface of the suction cup 41 may be formed as a slope that decreases in height toward the outer periphery.

[0037] The processing device 1 also includes a control unit 9 that controls each component of the processing device 1 to perform processing on the plate-like workpiece 8.

[0038] In the machining device 1 having such a configuration, the plate-shaped workpiece 8 is machined by a machining tool (not shown) while being held on the holding surface 200 of the chuck table 2. During machining of the plate-shaped workpiece 8, machining fluid is supplied to the contact points between the plate-shaped workpiece 8 and the machining tool, etc., to cool the machining tool and the plate-shaped workpiece 8, remove machining chips, etc.

[0039] For example, the processing apparatus 1 can be configured as a grinding apparatus. In this case, the processing apparatus 1 further includes a grinding mechanism (not shown) equipped with a grinding wheel. The grinding mechanism grinds the plate-shaped workpiece 8 held on the holding surface 200 of the chuck table 2 with the grinding wheel while supplying a grinding fluid as a processing fluid to the contact point between the plate-shaped workpiece 8 and the grinding wheel.

[0040] In the processing device 1, some of the processing fluid and processing debris generated during processing of the plate-shaped workpiece 8 enter the porous member 20, and processing waste fluid containing the processing fluid and processing debris accumulates inside the porous member 20, and when air is ejected, processing waste fluid containing the processing debris may be ejected from the porous member 20 along with the air.

[0041] Therefore, in the processing device 1, the control unit 9 carries out the plate-shaped workpiece 8 that has been processed on the holding surface 200 of the chuck table 2 from the holding surface 200 of the chuck table 2 as follows.

[0042] First, the control unit 9 causes the movement mechanism 3 to pivotally move the suspending unit 36, thereby positioning the plate 40 of the first suction unit 4 above the plate-shaped workpiece 8 that is held by suction on the holding surface 200 of the chuck table 2. At this time, the control unit 9 adjusts the positional relationship between the suction cups 41 of the first suction unit 4 and the center of the upper surface 80 of the plate-shaped workpiece 8 so that their horizontal positions approximately coincide.

[0043] Next, the control unit 9 lowers the suspending unit 36 using the moving mechanism 3. As a result, the lower surface 410 of the suction cup 41 and the upper surface 80 of the plate-like workpiece 8 come into contact with each other.

[0044] Then, the control unit 9 opens the suction valve 720 in this state, thereby transmitting the suction force of the suction source 72 to the suction cups 41, and the suction cups 41 hold the upper surface 80 of the plate-like workpiece 8 by suction.

[0045] The control unit 9 also closes the suction valve 270 of the communication mechanism 23 to put the suction source 240 out of communication with the holding surface 200. Furthermore, the control unit 9 opens the air valve 271 of the communication mechanism 23 to put the air supply source 241 into communication with the holding surface 200 of the chuck table 2. As a result, the control unit 9 ejects air from the holding surface 200 to remove the suction force acting between the holding surface 200 and the underside 81 of the plate-like workpiece 8.

[0046] At this time, when air is ejected from the holding surface 200, the above-mentioned machining fluid and machining waste fluid containing machining chips that have entered the inside of the porous member 20 during machining of the plate-shaped workpiece 8 may be ejected above the holding surface 200 along with the air. In other words, before the moving mechanism 3 raises the hanging part 36, machining waste fluid containing machining fluid and machining chips is sprayed from the holding surface 200, and therefore the machining waste fluid containing machining fluid and machining chips sprayed from the outer periphery to the top surface of the plate-shaped workpiece 8 being sucked and held by the suction cup 41 may adhere to the workpiece.

[0047] Therefore, the control unit 9 opens the air valve 730 to connect the air supply source 73 to the air ejection port 420 of the first air ejection unit 42. As a result, the air ejection port 420 ejects air downward, causing the air to flow from the center of the upper surface 80 of the plate-shaped workpiece 8 toward the outer periphery.

[0048] In this state, the control unit 9 moves the plate 40 of the first suction unit 4 by causing the movement mechanism 3 to move the hanging unit 36 up and down and in a rotational or horizontal movement, thereby separating the plate-shaped workpiece 8 held by suction by the suction cup 41 from the holding surface 200 of the chuck table 2 and transporting it to a predetermined discharge location.

[0049] In this way, the control unit 9 ejects air from the air ejection port 420 in the first air ejection section 42 of the first suction section 4, thereby transporting the plate-shaped workpiece 8 held by suction by the suction cup 41 from the chuck table 2 so as not to wet the upper surface 80 of the plate-shaped workpiece 8 with the processing waste liquid ejected from the holding surface 200. In addition, when the underside of the plate-shaped workpiece 8 held by suction with the suction cup 41 is slightly floating above the holding surface 200, the plate-shaped workpiece 8 can be rotated or moved horizontally to reduce the amount of overlap between the underside of the plate-shaped workpiece 8 and the holding surface 200, thereby breaking the surface tension of the water and lifting the plate-shaped workpiece 8, thereby removing it from the holding surface 200.

[0050] As described above, in the processing apparatus 1 having the first transport mechanism 11, when the plate-shaped workpiece 8 is transported from the holding surface 200 of the chuck table 2, the air injection ports 420 of the first air injection section 42 of the first suction section 4 cause air to flow from the center side of the upper surface 80 of the plate-shaped workpiece 8 toward the outer periphery. This makes it possible to prevent the processing waste liquid ejected from the holding surface 200 from entering onto the upper surface 80 from the outer periphery side of the plate-shaped workpiece 8. This makes it possible to prevent the processing waste liquid from adhering to the upper surface 80 of the plate-shaped workpiece 8. Furthermore, the upper surface 80 of the plate-shaped workpiece 8 can also be cleaned with air.

[0051] Therefore, it is possible to prevent the upper surface 80 of the plate-shaped workpiece 8 from becoming dirty when the plate-shaped workpiece 8 is carried out from the chuck table 2. Therefore, it is not necessary to clean the upper surface 80 of the plate-shaped workpiece 8 after the plate-shaped workpiece 8 is carried out from the chuck table 2, and therefore a cleaning mechanism is not required, which allows the overall device to be made smaller and less expensive.

[0052] The processing apparatus 1 may include a second transport mechanism 12 as shown in FIGS. 2 and 3, instead of the first transport mechanism 11.

[0053] 2, the second transport mechanism 12 has the same configuration as the first transport mechanism 11 shown in Fig. 1, but includes a second suction unit 5 as an example of a suction unit instead of the first suction unit 4. That is, the second transport mechanism 12 includes the second suction unit 5 suspended from a suspension unit 36 via a connecting unit 37, and a movement mechanism 3 that moves the suspension unit 36. The configuration of the second suction unit 5 will be described below with reference to FIGS.

[0054] 2, the second suction unit 5 includes a disk-shaped plate 50 suspended from the suspension unit 36 via a connecting unit 37. Like the plate 40, the plate 50 is suspended from the suspension unit 36 via the connecting unit 37, and is moved up and down and horizontally by the movement mechanism 3.

[0055] Similarly to the first suction unit 4, the second suction unit 5 includes a suction cup support column 53 extending downward from the suspending unit 36, and a suction cup 51 disposed at the tip (lower end) of the suction cup support column 53. The suction cup 51 is disposed below the suspending unit 36 and can be connected to a suction source 72. In the second suction section 5, the suction cup support column 53 penetrates the hanging section 36, the connecting section 37, and the plate 50 in the Z-axis direction. The suction cup support column 53 has a joint 56 at its upper end. It is also possible to dispose the plate 50 and the connecting portion 37 and to place the suction cup 51 on the hanging portion 36 via the suction cup support column 53 .

[0056] The second suction unit 5 further includes a flow path 54. The flow path 54 is provided so as to penetrate the joint 56, the suction cup support column 53, and the suction cup 51 in the Z-axis direction. The upper end of flow path 54 extends from a communication port 561 formed at the upper end of joint 56 to the outside of joint 56, and branches into the above-mentioned air flow path 711 and suction flow path 721. An air supply source 71 and a suction source 72 are connected to air flow path 711 and suction flow path 721 via an air valve 710 and a suction valve 720, respectively. Meanwhile, the lower end of flow path 54 is connected to a suction port 511 formed in a lower surface 510 of suction cup 51.

[0057] In the second suction section 5, the air valve 710 is opened, The suction cup 51 is connected to the air supply source 71 via the flow path 54 and the air flow path 711. Furthermore, when the suction valve 720 is opened, the suction cup 51 is connected to the suction source 72 via the flow path 54 and the suction flow path 721.

[0058] Therefore, similar to the first suction section 4 described above, the second suction section 5 can suction-hold the upper surface 80 of the plate-shaped workpiece 8, which is held by suction by the holding surface 200 of the chuck table 2, by the lower surface 510 of the suction cup 51. In the second conveying mechanism 12, the upper surface 80 of the plate-shaped workpiece 8 is held by suction using the second suction section 5, and the second suction section 5 is moved by the moving mechanism 3, so that the plate-shaped workpiece 8, which is held by suction by the holding surface 200 of the chuck table 2, can be transported out of the chuck table 2.

[0059] In addition, the second conveying mechanism 12 can also transport the plate-shaped workpiece 8 to the chuck table 2 by holding the upper surface 80 of the plate-shaped workpiece 8 at any location by suction using the second suction section 5, and then moving the second suction section 5 toward the chuck table 2 using the moving mechanism 3.

[0060] The second suction unit 5 also includes a second air injection unit 52 as an example of an air injection unit, which has an air injection port 520 arranged in the center of the lower surface 500 of the plate 50.

[0061] 2 and 3, the second air spraying unit 52 includes an annular first rotating plate 57 having a first through-hole 572 through which the suction cup support column 53 passes. The first through-hole 572 is disposed in the center of the first rotating plate 57.

[0062] As shown in FIG. 3, the second air injection section 52 includes a first air intake port 570 formed on the inner wall of the first through-hole 572, and two air injection ports 520 arranged on the outer periphery of the first rotating plate 57 and for injecting air.

[0063] Two first air injection cylinders 573 are arranged facing each other on the outer periphery (outer wall) of the first rotating plate 57. Air injection ports 520 are arranged at the lower ends of these first air injection cylinders 573. Each first air injection cylinder 573 is arranged at an angle with respect to the Z-axis direction from the outer side of the first rotating plate 57, and each air injection port 520 is oriented in a direction slightly inclined horizontally (in the X-axis or Y-axis direction) with respect to the Z-axis direction.

[0064] The second air injection section 52 is formed inside the first rotary plate 57 and includes a first rotary plate communication passage 571 that communicates between the first air inlet 570 and the air injection port 520. The first rotary plate communication passage 571 extends from the inner wall of the first through-hole 572 toward the outer wall so as to penetrate the inside of the first rotary plate 57, and one end thereof is connected to the first air inlet 570.

[0065] Furthermore, first rotary plate communicating passage 571 protrudes from the outer wall of first rotary plate 57 and extends into first air injection cylinder 573. Furthermore, first rotary plate communicating passage 571 extends so as to penetrate through the interior of first air injection cylinder 573, and its other end is connected to air injection port 520. In other words, first rotary plate communicating passage 571 is formed inside first rotary plate 57 and first air injection cylinder 573 so as to communicate between first air inlet 570 and air injection port 520.

[0066] The second air jetting unit 52 also includes a ring-shaped first rotation support portion 58 formed on the lower side of the suction cup support column 53. The first rotation support portion 58 has an outer diameter larger than the first through-hole 572 formed in the first rotating plate 57, and rotatably supports the first rotating plate 57. That is, in the second air jetting unit 52, the first rotating plate 57 is placed on the upper surface of the first rotation support portion 58 with the suction cup support column 53 passing through the first through-hole 572, so that the first rotation support portion 58 can rotatably support the first rotating plate 57. The first support pillar communicating passage 531, which will be described later, may be extended so that air is ejected from the upper surface of the first rotation support portion 58. That is, a plurality of air ejection ports may be provided on the upper surface of the first rotation support portion 58, and the first rotary plate 57 may be rotatably supported via air ejected from the air ejection ports. Furthermore, a support portion similar to the first rotation support portion 58 may be provided on the first rotary plate 57 to prevent the first rotary plate 57 from floating up.

[0067] The second air injection unit 52 also has a first air delivery port 530 on the side surface of the suction cup support column 53. The first air delivery port 530 is an annular groove formed on the side surface of the suction cup support column 53. The first air delivery port 530 is formed at a height corresponding to the first air inlet 570 of the first rotating plate 57 supported by the first rotation support portion 58. That is, when the first rotating plate 57 is supported by the first rotation support portion 58, the first air delivery port 530 and the first air inlet 570 are at the same height, and the first air delivery port 530 and the first air inlet 570 are connected. Therefore, in this state, air can be delivered from the first air delivery port 530 to the first air inlet 570. The first air intake port 570 may be formed as an annular groove.

[0068] The second air injection unit 52 also includes a first air supply port 563 disposed on the suction cup support column 53. In this embodiment, the first air supply port 563 is disposed in a joint 56 provided at the upper end of the suction cup support column 53. As shown in FIG. 2, an air supply source 73 is connected to the first air supply port 563 via an air valve 730. When the air valve 730 is opened, the air supply source 73 and the first air supply port 563 are connected to each other, and air is supplied from the air supply source 73 to the first air supply port 563.

[0069] 2 and 3, the second air injection unit 52 includes a first support column communicating passage 531 formed in the suction cup support column 53. The first support column communicating passage 531 communicates between the first air supply port 563 and the first air delivery port 530. The first support column communicating passage 531 extends in the Z-axis direction so as to surround the flow path 54 formed inside the suction cup support column 53. The lower end of the first support column communicating passage 531 bends toward the side surface of the suction cup support column 53, and its end is connected to the first air delivery port 530. Meanwhile, the upper end of the first support column communicating passage 531 is connected to the first air supply port 563.

[0070] In this way, in the second air injection section 52, the first air supply port 563 and the first air delivery port 530 are connected by the first support pillar connecting passage 531, and the first air delivery port 530 and the first air receiving port 570 are connected on the inner wall of the first through hole 572, and further, the first air receiving port 570 and the air injection port 520 are connected by the first rotating plate connecting passage 571.

[0071] Therefore, in the second air injection section 52, the air valve 730 is opened and the air supply source 73 is connected to the first air supply port 563, so that air from the air supply source 73 is supplied to the air injection port 520 via the first air supply port 563, the first support pillar connecting passage 531, the first air delivery port 530, the first air receiving port 570 and the first rotating plate connecting passage 571, and the air injection port 520 injects air downward.

[0072] Here, the first air injection cylinder 573 having the air injection port 520 will be described in detail. Of the two first air injection cylinders 573 shown in Fig. 3, the first air injection cylinder 573 arranged on the -X direction side of the first rotating plate 57 is provided in a state in which it is slightly tilted in the depth direction of the page (the horizontal X axis or Y axis direction) with respect to the Z axis direction. Therefore, the injection direction of the air injected from the air injection port 520 formed at the lower end of this first air injection cylinder 573 is slightly tilted from the -Z direction to the depth direction of the page (the horizontal X axis or Y axis direction).

[0073] On the other hand, first air injection cylinder 573 arranged on the +X direction side of first rotating plate 57 is provided in a state in which it is slightly tilted toward the front of the paper (horizontal X axis or Y axis direction) with respect to the Z axis direction. Therefore, the injection direction of air injected from air injection port 520 formed at the lower end of this first air injection cylinder 573 is slightly tilted from the -Z direction toward the front of the paper (horizontal X axis or Y axis direction).

[0074] Therefore, when each air ejection port 520 ejects air, the first air ejection cylinder 573 on the -X direction side starts to move toward the front of the paper, and the first air ejection cylinder 573 on the +X direction side starts to move toward the back of the paper. This causes the first rotating plate 57, which is equipped with each first air ejection cylinder 573, to rotate about a rotation axis in the Z axis direction that passes through the center of the first through-hole 572. In other words, the two air ejection ports 520 eject air downward while rotating together with the first rotating plate 57.

[0075] In the second transport mechanism 12 having such a configuration, the control unit 9 carries out the machined plate-shaped workpiece 8 from the holding surface 200 of the chuck table 2 as follows.

[0076] First, the control unit 9 rotates and moves the hanging unit 36 using the moving mechanism 3 shown in Figure 2, thereby positioning the plate 50 of the second suction unit 5 above the plate-shaped workpiece 8 that is held by suction on the holding surface 200 of the chuck table 2, and aligning the center of the plate 60 with the center of the plate-shaped workpiece 8.

[0077] Next, the control unit 9 controls the movement mechanism 3 to lower the suspending unit 36 so that the lower surface 510 of the suction cup 51 comes into contact with the upper surface 80 of the plate-like workpiece 8, and opens the suction valve 720 to transmit the suction force of the suction source 72 to the suction cup 51. As a result, the upper surface 80 of the plate-like workpiece 8 is sucked and held by the suction cup 51.

[0078] 1, and opens the air valve 271. As a result, the control unit 9 causes air to be ejected from the holding surface 200, thereby removing the suction force acting between the holding surface 200 and the lower surface 81 of the plate-like workpiece 8.

[0079] 2, the control unit 9 connects the air supply source 73 to the air outlet 520. As a result, the air outlet 520 ejects air downward while rotating together with the first rotating plate 57, and the air flows from the center toward the outer periphery of the upper surface 80 of the plate-shaped workpiece 8.

[0080] In this state, the control unit 9 moves the plate 50 of the second suction unit 5 by using the moving mechanism 3 to raise and lower the hanging unit 36 and rotate or move it horizontally, thereby separating the plate-shaped workpiece 8 held by suction by the suction cup 51 from the holding surface 200 of the chuck table 2 and transporting it to a predetermined discharge location.

[0081] In this way, the control unit 9 ejects air from the air ejection port 520 in the second air ejection section 52 of the second suction section 5, thereby transporting the plate-shaped workpiece 8 held by suction by the suction cup 51 from the chuck table 2 so as not to wet the upper surface 80 of the plate-shaped workpiece 8 with the processing waste liquid ejected from the holding surface 200.

[0082] In this way, in the processing device 1 having the second transport mechanism 12, when the plate-shaped workpiece 8 is carried out from the chuck table 2, the air ejection nozzles 520 provided on the first rotating plate 57 eject air downward while rotating. Therefore, air can be efficiently made to flow from the center of the upper surface 80 of the plate-shaped workpiece 8 toward the periphery.

[0083] Moreover, the processing apparatus 1 may include a third transport mechanism 13 as shown in FIGS. 4 and 5, instead of the first transport mechanism 11 or the second transport mechanism 12 described above.

[0084] 4, the third transport mechanism 13 has the same configuration as the first transport mechanism 11 shown in FIG. 1, but includes a third suction unit 6 as an example of a suction unit instead of the first suction unit 4. That is, the third transport mechanism 13 includes the third suction unit 6 suspended from a suspension unit 36 via a connecting unit 37, and a moving mechanism 3 that moves the suspension unit 36. The configuration of the third suction unit 6 will be described below with reference to FIGS.

[0085] 4, the third suction unit 6 includes a disk-shaped plate 60 suspended from the suspension unit 36 via a connecting unit 37. Like the plate 40, the plate 60 is suspended from the suspension unit 36 via the connecting unit 37, and is moved up and down and horizontally by the movement mechanism 3.

[0086] As shown in Fig. 4, the third suction unit 6 includes four suction cup support columns 613 that are arranged at equal intervals on the same circumference on the outer periphery of the lower surface 600 of the plate 60. Two of the four suction cup support columns 613 are shown in Fig. 4. The third suction unit 6 includes suction cups 61 that are arranged on the plate 60 via the suction cup support columns 613 and can be connected to the suction source 72. Each suction cup 61 is arranged at the tip of each suction cup support column 613. The number of suction cup support columns 613 is not limited to four, but may be three, or may be five or more.

[0087] The third suction part 6 also includes a first joint 69 formed on the upper surface of the suspending part 36. The third suction part 6 also includes a flow path 64. The flow path 64 is provided so as to penetrate the first joint 69, the suspending part 36, the connecting part 37, the plate 60, the suction cup support column 613, and the suction cup 61.

[0088] The upper end side of flow path 64 extends from communication port 661 formed at the upper end of first joint 69 to the outside of first joint 69, and branches into the above-mentioned air flow path 711 and suction flow path 721. An air supply source 71 and a suction source 72 are connected to air flow path 711 and suction flow path 721 via air valve 710 and suction valve 720, respectively.

[0089] Meanwhile, the lower end side of the flow path 64 branches into four paths inside the plate 60 (two of which are shown in FIG. 4). Each of these four branch paths protrudes from the lower surface 600 of the plate 60 to the outside of the plate 60, penetrates the inside of each suction cup support column 613, and is connected to a suction port 611 formed on the lower surface 610 of each suction cup 61.

[0090] In the third suction unit 6, the air valve 710 is opened, whereby the suction cup 61 is connected to the air supply source 71 via the flow path 64 and the air flow path 711. In addition, the suction valve 720 is opened, whereby the suction cup 61 is connected to the suction source 72 via the flow path 64 and the suction flow path 721.

[0091] Therefore, similar to the first suction section 4 and the second suction section 5 described above, the third suction section 6 can suction-hold the upper surface 80 of the plate-shaped workpiece 8, which is held by suction by the holding surface 200 of the chuck table 2, by the lower surface 610 of the suction cup 61. In the third conveying mechanism 13, the upper surface 80 of the plate-shaped workpiece 8 is held by suction using the third suction section 6, and the third suction section 6 is moved by the moving mechanism 3, so that the plate-shaped workpiece 8, which is held by suction by the holding surface 200 of the chuck table 2, can be transported out of the chuck table 2.

[0092] In addition, the third conveying mechanism 13 can also transport the plate-shaped workpiece 8 to the chuck table 2 by holding the upper surface 80 of the plate-shaped workpiece 8 at any location by suction using the third suction section 6 and then moving the third suction section 6 toward the chuck table 2 using the moving mechanism 3.

[0093] The third suction unit 6 also includes a third air injection unit 62 as an example of an air injection unit, which has an air injection port 620 arranged in the center of the lower surface 600 of the plate 60.

[0094] The third air injection unit 62 includes a rotation support column 63 extending downward from the suspending unit 36. The rotation support column 63 is formed to penetrate the plate 60, the connecting portion 37, and the suspending unit 36 in the Z-axis direction. The rotation support column 63 also includes a second joint 66 at its upper end. Alternatively, the plate 60 and the connecting portion 37 may not be provided, and the suction cup 61 may be disposed on the hanging portion 36 via the rotation support column 63 of the third air jetting portion 62 and the suction cup support column 613 .

[0095] 4 and 5, the third air injection unit 62 includes an annular second rotary plate 67 having a second through-hole 672 through which the rotary support column 63 passes. The second through-hole 672 is disposed in the center of the second rotary plate 67.

[0096] As shown in FIG. 5, the third air injection section 62 includes a second air intake port 670 formed on the inner wall of the second through-hole 672, and two air injection ports 620 arranged on the outer periphery of the second rotating plate 67 for injecting air.

[0097] Two second air injection cylinders 673 are arranged facing each other on the outer periphery (outer wall) of the second rotating plate 67. Air injection ports 620 are arranged at the lower ends of these second air injection cylinders 673. Each second air injection cylinder 673 is arranged at an angle with respect to the Z-axis direction from the outer side of the second rotating plate 67, and each air injection port 620 is oriented in a direction slightly inclined horizontally (in the X-axis or Y-axis direction) with respect to the Z-axis direction.

[0098] The third air injection section 62 is provided with a second rotary plate communication passage 671 formed inside the second rotary plate 67 and connecting the second air inlet 670 and the air injection port 620. The second rotary plate communication passage 671 has a configuration similar to the first rotary plate communication passage 571 (see FIG. 3) of the second transfer mechanism 12. That is, as shown in FIG. 5, the second rotary plate communication passage 671 is formed inside the second rotary plate 67 and the second air injection cylinder 673 so as to connect the second air inlet 670 and the air injection port 620.

[0099] The third air injection unit 62 also includes a ring-shaped second rotation support portion 68 formed on the lower side of the rotation support pillar 63. The second rotation support portion 68 has an outer diameter larger than the second through-hole 672 formed in the second rotating plate 67, and rotatably supports the second rotating plate 67. That is, in the third air injection unit 62, the second rotating plate 67 is placed on the upper surface of the second rotation support portion 68 with the rotation support pillar 63 passing through the second through-hole 672, so that the second rotation support portion 68 can rotatably support the second rotating plate 67. As with the second air injection section 52, the third air injection section 62 may also be configured to extend the second support pillar connecting passage 631 described later and to inject air from the upper surface of the second rotation support section 68. That is, a plurality of air ejection ports may be provided on the upper surface of the second rotation support portion 68, and the second rotating plate 67 may be rotatably supported via air ejected from the air ejection ports. Furthermore, a support portion similar to the second rotation support portion 68 may be provided on the second rotary plate 67 to prevent the second rotary plate 67 from floating up.

[0100] The third air injection unit 62 also has a second air delivery port 630 on the side surface of the rotary support column 63. The second air delivery port 630 is an annular groove formed on the side surface of the rotary support column 63. The second air delivery port 630 is formed at a height corresponding to the second air inlet 670 of the second rotary plate 67 supported by the second rotary support portion 68. That is, when the second rotary plate 67 is supported by the second rotary support portion 68, the second air delivery port 630 and the second air inlet 670 are at the same height, and the second air delivery port 630 and the second air inlet 670 are connected. Therefore, in this state, air can be delivered from the second air delivery port 630 to the second air inlet 670. The second air intake port 670 may be formed as an annular groove.

[0101] The third air injection unit 62 also includes a second air supply port 663 disposed on the rotary support column 63. In this embodiment, the second air supply port 663 is disposed on a second joint 66 provided at the upper end of the rotary support column 63. As shown in FIG. 4 , an air supply source 73 is connected to the second air supply port 663 via an air valve 730. When the air valve 730 is opened, the air supply source 73 and the second air supply port 663 are connected to each other, and air is supplied from the air supply source 73 to the second air supply port 663.

[0102] 4 and 5, the third air injection unit 62 includes a second support column communicating passage 631 formed in the rotating support column 63. The second support column communicating passage 631 communicates between the second air supply port 663 and the second air delivery port 630. The second support column communicating passage 631 extends in the Z-axis direction inside the rotating support column 63. The lower end of the second support column communicating passage 631 branches into two passages toward the side surface of the rotating support column 63, and each end of the two branched passages is connected to the second air delivery port 630. The upper end of the second support column communicating passage 631 is connected to the second air supply port 663.

[0103] In this way, in the third air injection section 62, the second air supply port 663 and the second air delivery port 630 are connected by the second support pillar connecting passage 631, and the second air delivery port 630 and the second air receiving port 670 are connected on the inner wall of the second through hole 672, and further, the second air receiving port 670 and the air injection port 620 are connected by the second rotating plate connecting passage 671.

[0104] Therefore, in the third air injection section 62, the air valve 730 is opened and the air supply source 73 is connected to the second air supply port 663, so that air from the air supply source 73 is supplied to the air injection port 620 via the second air supply port 663, the second support pillar connecting passage 631, the second air delivery port 630, the second air receiving port 670 and the second rotating plate connecting passage 671, and the air injection port 620 injects air downward.

[0105] The second air injection cylinder 673 having the air injection port 620 is configured in the same manner as the first air injection cylinder 573 (see FIG. 3) provided in the second transfer mechanism 12 described above. That is, the second air injection cylinder 673 arranged on the −X side of the second rotating plate 67 shown in FIG. 5 is slightly tilted from the Z axis direction toward the depth of the page (the horizontal X axis or Y axis direction), and the direction of air injection from the air injection port 620 formed in this second air injection cylinder 673 is slightly tilted from the −Z direction toward the depth of the page. On the other hand, the second air injection cylinder 673 arranged on the +X side of the second rotating plate 67 is slightly tilted from the Z axis direction toward the front of the page (the horizontal X axis or Y axis direction), and the direction of air injection from the air injection port 620 formed at its lower end is slightly tilted from the −Z direction toward the front of the page.

[0106] Therefore, when each air ejection port 620 ejects air, the second air ejection cylinder 673 on the +X direction side and the second air ejection cylinder 673 on the -X direction side start to move towards the front and back of the paper, respectively. This causes the second rotating plate 67 equipped with each second air ejection cylinder 673 to rotate about an axis of rotation in the Z direction that passes through the center of the second through-hole 672, and the two air ejection ports 620 eject air downward while rotating together with the second rotating plate 67.

[0107] In the third transport mechanism 13 having such a configuration, the control unit 9 transports the machined plate-shaped workpiece 8 out of the holding surface 200 of the chuck table 2 as follows.

[0108] First, the control unit 9 rotates the hanging unit 36 using the moving mechanism 3 shown in Figure 2, thereby positioning the plate 60 of the third suction unit 6 above the plate-shaped workpiece 8 that is held by suction on the holding surface 200 of the chuck table 2, and aligning the center of the plate 60 with the center of the plate-shaped workpiece 8.

[0109] Next, the control unit 9 lowers the suspending unit 36 using the moving mechanism 3, thereby bringing the lower surfaces 610 of the four suction cups 61 arranged on the plate 60 into contact with four portions near the outer periphery of the upper surface 80 of the plate-like workpiece 8, and opens the suction valve 720 to transmit the suction force of the suction source 72 to the four suction cups 61. As a result, the upper surface 80 of the plate-like workpiece 8 is sucked and held by the four suction cups 61.

[0110] 1, and opens the air valve 271. As a result, the control unit 9 causes air to be ejected from the holding surface 200, thereby removing the suction force acting between the holding surface 200 and the lower surface 81 of the plate-like workpiece 8.

[0111] 4, the control unit 9 connects the air supply source 73 to the air outlet 620. As a result, the air outlet 620 ejects air downward while rotating together with the second rotating plate 67, and the air flows from the center toward the outer periphery of the upper surface 80 of the plate-shaped workpiece 8.

[0112] In this state, the control unit 9 moves the plate 60 of the third suction unit 6 by using the moving mechanism 3 to raise and lower the hanging unit 36 and rotate or move it horizontally, thereby separating the plate-shaped workpiece 8 held by suction by the suction cup 61 from the holding surface 200 of the chuck table 2 and transporting it to a predetermined discharge location.

[0113] In this way, the control unit 9 ejects air from the air ejection port 620 in the third air ejection section 62 of the third suction section 6, thereby transporting the plate-shaped workpiece 8 held by suction by the suction cup 61 from the chuck table 2 so as not to wet the upper surface 80 of the plate-shaped workpiece 8 with the processing waste liquid containing processing chips ejected from the holding surface 200.

[0114] In this way, in the processing device 1 having the third transport mechanism 13, when the plate-shaped workpiece 8 is carried out from the chuck table 2, the air ejection nozzles 620 provided on the second rotating plate 67 eject air downward while rotating. Therefore, air can be efficiently made to flow from the center of the upper surface 80 of the plate-shaped workpiece 8 toward the periphery.

[0115] The third transfer mechanism 13 may include a second rotating plate 67 attached to a suction cup support column 613 disposed on the lower surface 600 of the plate 60, and air may be sprayed from air ejection ports 620 disposed on the outer periphery of the second rotating plate 67. In this case, the second rotating plate 67 is disposed on the suction cup support column 613 so that the second through-holes 672 are penetrated by the suction cup support column 613.

[0116] In addition, in the processing device 1, instead of the disk-shaped plate-shaped workpiece 8, a rectangular plate-shaped workpiece (hereinafter referred to as a rectangular workpiece) not shown in the drawings may be processed on the holding surface 200 of the chuck table 2 and then removed from the holding surface 200.

[0117] When handling rectangular workpieces, the third transfer mechanism 13 may be provided with four suction cup support columns 613 and suction cups 61 at positions on the underside 600 of the plate 60 that correspond to the four corners of the upper surface of the rectangular workpiece, and each suction cup support column 613 may be provided with a second rotating plate 67. In this configuration, when the rectangular workpiece is suction-held and transported by holding the four corners of the upper surface, air is sprayed from the air spray nozzles 620 of the second rotating plate 67 provided on the suction cup support column 613, so that air can be effectively circulated even to the four corners that are far from the center of the rectangular workpiece. This effectively prevents the four corners of the rectangular workpiece from becoming dirty.

[0118] The plate 60 provided in the third transport mechanism 13 may have a rectangular shape. In this case, the third transport mechanism 13 may include four suction cup support columns 613 and suction cups 61 at the four corners of the rectangular plate 60, and each suction cup support column 613 may be provided with a second rotating plate 67.

[0119] Furthermore, when the plate-shaped workpiece 8 is carried out from the chuck table 2, in order to remove the suction force acting between the holding surface 200 and the underside 81 of the plate-shaped workpiece 8, the control unit 9 may cause water to be sprayed from the holding surface 200 by opening the water valve 272 instead of opening the air valve 271 of the communication mechanism 23. Alternatively, the control unit 9 may open the air valve 271 and the water valve 272 of the communication mechanism 23 to spray a mixed fluid of air and water from the holding surface 200.

[0120] Furthermore, a gap may be provided between the first rotating plate 57 and the first rotation support portion 58 in the second transport mechanism 12, and between the second rotating plate 67 and the second rotation support portion 68 in the third transport mechanism 13. This allows the first rotating plate 57 and the second rotating plate 67 to rotate smoothly. [Explanation of symbols]

[0121] 1: Processing device, 2: Chuck table, 3: Moving mechanism, 4: 1st suction part, 5: 2nd suction part, 6: 3rd suction part, 8: Plate-shaped workpiece, 9: Control unit, 11: first transport mechanism, 12: second transport mechanism, 13: third transport mechanism, 20: porous member, 21: frame, 23: communication mechanism, 24: fluid supply source, 25: Rotating shaft, 26: Rotating mechanism, 30: Ball screw, 31: Guide rail, 32: motor, 33: movable plate, 35: rotating shaft, 36: Hanging part, 37: Connecting part, 39: Column, 40: Plate, 41: Suction cup, 42: First air injection part, 43: Suction cup support column, 44: Flow path, 46: Joint, 50: Plate, 51: Suction cup, 52: Second air injection part, 53: Suction cup support column, 54: flow path, 56: joint, 57: first rotary plate, 58: first rotary support portion, 60: Plate, 61: Suction cup, 62: Third air injection part, 63: Rotation support column, 64: flow path, 66: second joint, 67: second rotary plate, 68: second rotary support portion, 69: first joint, 71: air supply source, 72: suction source, 73: air supply source, 80: Top surface, 81: Bottom surface, 200: Holding surface, 210: Top surface, 240: Suction source, 241: air supply source, 242: water supply source, 243: flow path, 260: motor, 262: drive shaft, 263: drive pulley, 264: transmission belt, 265: driven pulley, 266: driven shaft, 267: rotary joint, 270: suction valve, 271: air valve, 272: water valve, 280: throttle valve, 281: throttle valve, 282: throttle valve, 290: suction path, 291: air flow path, 292: water flow path, 300: nut, 320: encoder, 400: Bottom surface, 410: Bottom surface, 411: Suction port, 420: Air injection port, 421: Communication path, 461: Communication port, 463: Supply port, 500: Bottom surface, 510: bottom surface, 511: suction port, 520: air injection port, 530: first air delivery port, 531: first support pillar communication passage, 561: communication port, 563: first air supply port, 570: First air intake port, 571: First rotary plate communication passage, 572: First through hole, 573: 1st air injection tube, 600: Bottom surface, 610: Bottom surface, 611: Suction port, 613: suction cup support column, 620: air injection port, 630: second air delivery port, 631: second support column communication passage, 661: communication port, 663: second air supply port, 670: second air intake port, 671: second rotary plate communication passage, 672: second through hole, 673: second air injection tube, 710: air valve, 711: air flow path, 720: suction valve, 721: suction flow path, 730: air valve

Claims

1. A processing device comprising: a suction unit that suction-holds an upper surface of a plate-shaped workpiece that is suction-held by a holding surface of a chuck table; and a movement mechanism that moves a suspending unit that suspends the suction unit, wherein the suction unit suction-holds the plate-shaped workpiece and carries it out of the chuck table, The suction part is a suction cup support column extending downward from the hanging portion; a suction cup disposed at the tip of the suction cup support column and connected to a suction source; an air injection unit having an air injection port that blows air from the center of the upper surface of the plate-shaped workpiece sucked and held by the suction cup toward the outer periphery, The air injection unit is a first rotating plate having a first through hole through which the suction cup support post passes; a first air receiving port formed on an inner wall of the first through hole; an air injection port that is disposed on the outer periphery of the first rotary plate and injects air; a first rotary plate communication passage formed in the first rotary plate and communicating the first air inlet with the air ejection port; a first rotation support portion formed on the suction cup support column and configured to rotatably support the first rotating plate; a first air delivery port formed on a side surface of the suction cup support column at a height corresponding to the first air inlet of the first rotary plate supported by the first rotary support portion; a first air supply port disposed on the suction cup support column; a first support pillar communication passage formed in the suction cup support pillar and communicating the first air supply port with the first air delivery port; The processing device ejects air from the air ejection port, and carries out the plate-shaped workpiece sucked and held by the suction cups from the chuck table without wetting the top surface of the plate-shaped workpiece.

2. A processing device comprising a suction section that suction-holds the top surface of a plate-shaped workpiece that is suction-held by the holding surface of a chuck table, and a movement mechanism that moves a suspending section that suspends the suction section, wherein the suction section suction-holds the plate-shaped workpiece and transports it from the chuck table, The suction part is a suction cup disposed below the suspending portion and connected to a suction source; an air injection unit having an air injection port that blows air from the center of the upper surface of the plate-shaped workpiece sucked and held by the suction cup toward the outer periphery, The air injection unit is a rotation support column extending downward from the hanging portion; a second rotary plate having a second through hole through which the rotary support post passes; a second air receiving port formed on an inner wall of the second through hole; an air injection port that is disposed on the outer periphery of the second rotary plate and injects air; a second rotary plate communication passage formed in the second rotary plate and communicating the second air inlet with the air ejection port; a second rotation support portion formed on the rotation support column and configured to rotatably support the second rotary plate; a second air delivery port formed on a side surface of the rotary support column at a height corresponding to the second air inlet port of the second rotary plate supported by the second rotary support portion; a second air supply port disposed on the rotary support column; a second support column communication passage formed in the rotary support column and communicating the second air supply port with the second air delivery port; The processing device ejects air from the air ejection port, and carries out the plate-shaped workpiece sucked and held by the suction cups from the chuck table without wetting the top surface of the plate-shaped workpiece.

Images