Processing equipment

Abstract

To provide a processing device capable of executing processing for registering an imaging target without exchanging the lens of an imaging unit even for a workpiece having the imaging target that does not fit in the field of view of the imaging unit.SOLUTION: A processing device 1 includes a holding table 10 that holds a workpiece 100, a processing unit 20 that processes the workpiece 100, an imaging unit 40 that images the workpiece 100, a display unit 50 that displays the captured image, and a control unit 60. The control unit 60 of the processing device 1 includes a wide area image display unit 61 that combines images of a plurality of adjacent areas imaged by the imaging unit 40 and displays the image on the display unit 50 as a wide area image showing an area wider than the field of view of the imaging unit 40, and a target registration unit 62 that registers an arbitrary pattern of a device 103 identified in the wide area image as a target 110 that detects a planned division line 102.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] In a processing device that processes a workpiece along a planned dividing line, after forming a groove, an operation called a kerf check is performed in which an image of the groove is taken and the condition and position of the groove are confirmed (for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6029271 Summary of the Invention [Problem to be solved by the invention]

[0004] When the machined groove is too wide to fit within the field of view of the imaging unit, both ends of the width of the machined groove are not displayed simultaneously during kerf check, which can lead to the operator being unaware that a cutting position error has occurred and correction is required. Therefore, when machining such workpieces, the imaging unit's lens is replaced with a low-magnification lens in advance so that both ends of the machined groove fit within the field of view. However, changing the imaging unit's lens to a low magnification to fit a single workpiece can also result in a problem of reduced kerf check accuracy for other types of workpieces when machining multiple types of workpieces.

[0005] Furthermore, processing devices that process workpieces along planned division lines use a distinctive pattern from among the device patterns formed on the workpiece's surface as a target. This involves a pre-registered operation called "teach" to determine the distance between this target and the planned division line. During actual processing, this operation is called "alignment," which automatically detects the position of the planned division line. If the planned division line is too wide to fit within the imaging unit's field of view, both ends of the planned division line are not simultaneously displayed during teach, potentially resulting in the operator being unable to recognize the position of the planned division line and incorrectly registering it. Furthermore, even if the target suitable for alignment does not fit within the imaging unit's field of view, registering a target within the imaging unit's field of view can result in misrecognition during alignment, potentially resulting in cutting the wrong position. Therefore, even in such cases, replacing the imaging unit's lens with a lower-magnification lens to fit within the field of view can result in a reduction in the accuracy of teach and alignment for other workpieces when processing a variety of workpieces.

[0006] The present invention has been made in consideration of such problems, and its purpose is to provide a processing device that makes it possible to perform registration processing of an imaging target without replacing the lens of the imaging unit, even for a workpiece having an imaging target that does not fit within the field of view of the imaging unit. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the processing apparatus of the present invention is a processing apparatus that processes a workpiece having a plurality of devices on its surface partitioned by a plurality of planned division lines along the planned division lines, and includes a holding table that holds the workpiece, a processing unit that processes the workpiece held on the holding table, an imaging unit that images the workpiece held on the holding table, a display unit that displays the captured images, and a control unit, wherein the control unit has a wide-area image display section that combines images of a plurality of adjacent areas captured by the imaging unit and displays them on the display unit as a wide-area image showing an area wider than the field of view of the imaging unit, and a target registration section that registers any pattern of the device identified in the wide-area image and larger than the field of view of the imaging unit as a target for detecting the planned division lines, a planned division line registration unit that registers, as a planned processing position, a position of the planned division line selected in the wide-area image formed including both ends in the width direction of the planned division line, the width of which is larger than the field of view of the imaging unit; and the wide-area image display unit adjusts the display area by accepting a setting input for the size of the display area of ​​the wide-area image to be displayed on the display unit or an input for moving the display area, and the wide-area image display unit displays both ends of the planned division line in the width direction on the display unit; the planned division line registration unit accepts an input for changing the range to be registered as the planned processing position in the display area of ​​the wide-area image; and by accepting a selection to register the range, the planned division line registration unit registers the coordinates of the center of the range in the display area of ​​the wide-area image as the planned processing position; The range of the image captured by the imaging unit before combination is smaller than the pattern. The width of the image captured by the imaging units before the combination is narrower than the width of the planned division line. It is characterized by:

[0008] The control unit may also adjust the display area by accepting input for setting the size of the display area of ​​the wide-area image to be displayed on the display unit by the wide-area image display unit, or input for moving the display area, and display the entire pattern on the display unit by the wide-area image display unit, and may accept input for changing the range to be registered as the target in the display area of ​​the wide-area image by the target registration unit, and register the range in the display area of ​​the wide-area image as the target by accepting a selection to register the range.

[0009] Applicable The control unit After processing When performing a kerf check to check the quality of the processed groove, the display unit The width of the processed groove is larger than the field of view of the imaging unit, and the processed groove is formed to include both ends in the width direction. Display the wide-area image The width of the image captured by the imaging unit before combination is narrower than the width of the processed groove. That's fine. In addition, the control unit may display the wide-area image formed including both ends of the processing groove in the width direction on the display unit using the wide-area image display unit in the same display area as when the planned processing position was registered by the planned division line registration unit. [Effects of the Invention]

[0010] The present invention makes it possible to execute registration processing of an imaging target without changing the lens of the imaging unit, even for a workpiece having an imaging target that does not fit within the field of view of the imaging unit. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a processing device according to the first embodiment. [Figure 2]FIG. 2 is a plan view showing a main part of a workpiece to be processed by the processing device according to the first embodiment. [Figure 3] FIG. 3 is a diagram for explaining an example of a screen displayed by the processing device according to the first embodiment when registering a target. [Figure 4] FIG. 4 is a diagram for explaining an example of an image and a wide-area image displayed by the processing device according to the first embodiment when registering a target. [Figure 5] FIG. 5 is a diagram for explaining an example of a screen displayed by the processing device according to the first embodiment when the planned division line is registered. [Figure 6] FIG. 6 is a diagram for explaining an example of an image and a wide-area image displayed by the processing device according to the first embodiment when the planned division lines are registered. [Figure 7] FIG. 7 is a diagram for explaining an example of a screen displaying a processed groove for which the processing device according to the first embodiment performs a kerf check. [Figure 8] FIG. 8 is a diagram for explaining an example of an image of a processed groove and a wide-area image displayed by the processing device according to the first embodiment. [Figure 9] FIG. 9 is a perspective view showing an example of the configuration of a processing device according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0013] [Embodiment 1] A processing apparatus 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an example of the configuration of the processing apparatus 1 according to the first embodiment. FIG. 2 is a plan view showing a main part of a workpiece 100 that is an object to be processed by the processing apparatus 1 according to the first embodiment. As shown in FIG. 1, the processing apparatus 1 includes a holding table 10, a processing unit 20, an X-axis moving unit 31, a Y-axis moving unit 32, a Z-axis moving unit 33, an imaging unit 40, a display unit 50, a notification unit 55, and a control unit 60.

[0014] In the first embodiment, the workpiece 100, which is the target to be processed by the processing apparatus 1 according to the first embodiment, is, for example, a disk-shaped semiconductor wafer or optical device wafer made of a base material such as silicon, sapphire, silicon carbide (SiC), gallium arsenide, or glass. As shown in FIG. 1 , the workpiece 100 has a flat surface 101, and chip-sized devices 103 are formed in areas defined by a plurality of dividing lines 102 formed along a first direction and a second direction intersecting the first direction. In the first embodiment, the workpiece 100 further has a plurality of dividing lines 102 formed in a grid pattern with the first direction and the second direction perpendicular to each other, but the present invention is not limited to this. In the first embodiment, the width of the dividing line 102 is greater than the width of the area within the field of view of the imaging unit 40. In the first embodiment, the workpiece 100 has an adhesive tape 105 attached to a back surface 104 behind the front surface 101, and an annular frame 106 attached to the outer edge of the adhesive tape 105, but the present invention is not limited to this. Also, in the present invention, the workpiece 100 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0015] In the first embodiment, a target 110 is formed on each device 103 of the workpiece 100, as shown in FIG. 2. The target 110 is an example of an arbitrary pattern of the device 103 according to the present invention, has a characteristic shape, and serves as a key pattern of planar shape and color that can be detected and identified in an image 201 (see FIG. 4) captured by the imaging unit 40. The targets 110 are formed at positions spaced a predetermined distance from each of the division lines 102 surrounding the device 103 on which the target 110 is formed, and serve as markers for detecting the division lines 102. In the example shown in FIG. 2, the targets 110 are formed at positions spaced a distance 111 in a second direction (vertical direction in FIG. 2) from a center line passing through the center of the width of the division lines 102 along a first direction (horizontal direction in FIG. 2). In the first embodiment, the target 110 is larger than the field of view of the imaging unit 40.

[0016] The holding table 10 includes a disk-shaped frame body with a recess formed therein and a disk-shaped suction portion fitted into the recess. The suction portion of the holding table 10 is formed of a porous ceramic or the like with numerous porous holes and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the holding table 10 is a holding surface 11 on which a workpiece 100 is placed and which suction-holds the placed workpiece 100. In the first embodiment, the workpiece 100 is placed with its front surface 101 facing upward, and the holding surface 11 suction-holds the placed workpiece 100 from its back surface 104 side via adhesive tape 105. The holding surface 11 and the upper surface of the frame body of the holding table 10 are arranged on the same plane and are formed along an XY plane parallel to the horizontal plane. The holding table 10 is rotatable around a Z axis parallel to the vertical direction and perpendicular to the XY plane by a rotary drive source (not shown).

[0017] In the first embodiment, the processing unit 20 is a cutting unit having a cutting blade 21 attached to the tip of a spindle, as shown in Fig. 1. The processing unit 20 cuts the workpiece 100 held on the holding surface 11 of the holding table 10 with the cutting blade 21, which is rotated by the spindle around an axis parallel to the horizontal direction and parallel to the Y-axis direction perpendicular to the X-axis direction.

[0018] The X-axis movement unit 31 moves the holding table 10 relative to the machining unit 20 along the X-axis direction. The Y-axis movement unit 32 moves the machining unit 20 relative to the holding table 10 along the Y-axis direction. The Z-axis movement unit 33 moves the machining unit 20 relative to the holding table 10 along the Z-axis direction. The X-axis movement unit 31 has an X-axis position detection unit (not shown) that detects the position of the holding table 10 in the X-axis direction, and outputs the X-axis position of the holding table 10 detected by the X-axis position detection unit to the control unit 60. The Y-axis movement unit 32 and the Z-axis movement unit 33 have Y-axis position detection unit and Z-axis position detection unit (not shown) that detect the positions of the machining unit 20 in the Y-axis direction and Z-axis direction, respectively, and output the Y-axis and Z-axis positions of the machining unit 20 detected by the Y-axis position detection unit and Z-axis position detection unit to the control unit 60.

[0019] The processing device 1 rotates the cutting blade 21 of the processing unit 20, and causes the rotating cutting blade 21 to cut into the workpiece 100 on the holding table 10 using the X-axis movement unit 31, Y-axis movement unit 32, and Z-axis movement unit 33, and moves the rotating cutting blade 21 relative to the workpiece 100 along a planned dividing line 102 that has been registered as a planned processing position by a planned dividing line registration unit 63, which will be described later, in an alignment performed before cutting, thereby cutting the workpiece 100 along the planned dividing line 102 with the rotating cutting blade 21, and forming a cutting groove (cutting groove) 120 along the planned dividing line 102. In the first embodiment, the width of the cutting groove 120 is greater than the width of the area within the field of view of the imaging unit 40.

[0020] The imaging unit 40 includes an imaging element that captures the planned dividing lines 102 of the workpiece 100 before machining, the surface 101 including the target 110, and the machining grooves 120 formed in the workpiece 100 after machining. The imaging element is, for example, a charge-coupled device (CCD) imaging element or a complementary metal oxide semiconductor (CMOS) imaging element. The imaging unit 40 captures an image of an area within a field of view of a predetermined area based on the imaging element and the optical system (not shown) at a predetermined magnification based on an optical system such as an objective lens (not shown), and acquires an image of the area. The imaging unit 40 is, for example, a microscope. In the first embodiment, the imaging unit 40 is fixed to the machining unit 20 so as to move integrally with the machining unit 20.

[0021] The imaging unit 40 captures an image of the workpiece 100 before machining held on the holding table 10, performs teaching to pre-register an image of the target 110 and a distance 111 from the target 110 to the planned dividing line 102, obtains images of the target 110 and the planned dividing line 102 for performing alignment to align the workpiece 100 with the cutting blade 21 of the machining unit 20, and outputs the obtained images to the control unit 60. The imaging unit 40 also captures an image of the workpiece 100 held on the holding table 10 during or after machining, obtains images for performing a kerf check to automatically check the quality of the machined groove 120, and outputs the obtained images to the control unit 60.

[0022] The display unit 50 is provided on a cover (not shown) of the processing apparatus 1 with its display surface facing outward. The display unit 50 displays, to the operator, screens for setting various conditions, such as cutting conditions for the processing apparatus 1, imaging conditions for the imaging unit 40, teach, alignment, and kerf check, images captured by the imaging unit 40 for performing teach, alignment, and kerf check, wide-area images generated by combining these images on the wide-area image display unit 61, screens containing images and wide-area images, and inspection results of the machined groove 120 by kerf check, all of which can be visually confirmed. The display unit 50 is configured with a liquid crystal display device or the like. The display unit 50 is provided with an input unit 51 that the operator uses to input information related to the various conditions of the processing apparatus 1, information related to the display of images, and the like. The input unit 51 provided on the display unit 50 is configured with at least one of a touch panel provided on the display unit 50 and a keyboard.

[0023] The notification unit 55 is provided above a cover (not shown) of the processing device 1. In the first embodiment, the notification unit 55 is a light-emitting unit made up of a light-emitting diode or the like, and notifies the operator of the inspection results of the machined groove 120 by the kerf check in a recognizable manner by lighting, blinking, changing the color of the light, etc. of the light-emitting unit. Note that the notification unit 55 is not limited to a light-emitting unit in the present invention, but may be an audio unit made up of a speaker or the like that emits sound, and the audio of the audio unit may notify the operator of the inspection results of the machined groove 120 by the kerf check in a recognizable manner.

[0024] When the processing apparatus 1 is connected by wire or wireless to an information device such as a smartphone, tablet, wearable device, or computer, the display unit of the information device may function as the display unit according to the present invention. That is, the processing apparatus 1 may display the above-mentioned various images, wide-area images, screens, inspection results, etc. on the display unit of the information device connected by wire or wireless so that the operator can see them.

[0025] The control unit 60 controls the operation of each component of the processing device 1, causing the processing device 1 to perform cutting processing of the workpiece 100. The control unit 60 processes any position on the surface 101 of the workpiece 100 held by the holding surface 11 of the holding table 10 using XY plane coordinates set on the holding surface 11 of the holding table 10. In the processing device 1, two types of channels, namely, channel 1 (CH1) and channel 2 (CH2), can be set. When channel 1 (CH1) is set, the workpiece 100 is held on the holding surface 11 of the holding table 10 so that the first direction and the second direction coincide with the X-axis direction and the Y-axis direction, respectively, and the coordinates of the first direction and the second direction on the surface 101 of the workpiece 100 are represented by the X-coordinate and the Y-coordinate, respectively, and processed. When channel 2 (CH2) is set, the workpiece 100 is held on the holding surface 11 of the holding table 10 so that the second direction and the first direction coincide with the X-axis direction and the Y-axis direction, respectively, and the coordinates of the second direction and the first direction on the surface 101 of the workpiece 100 are represented by the X-coordinate and the Y-coordinate, respectively, and processed.

[0026] When the imaging unit 40 images an area within an arbitrary field of view on the surface 101 of the workpiece 100 held on the holding surface 11 of the holding table 10, the control unit 60 acquires XY coordinate information indicating the center position of the area within the field of view imaged by the imaging unit 40, based on the X-axis position of the holding table 10 and the Y-axis position of the processing unit 20 detected by the X-axis position detector and the Y-axis position detector. When the control unit 60 cuts the workpiece 100 held on the holding surface 11 of the holding table 10 with the cutting blade 21 of the processing unit 20, the control unit 60 acquires XY coordinate information indicating the position to be cut by the cutting blade 21, based on the X-axis position of the holding table 10 and the Y-axis position of the processing unit 20 detected by the X-axis position detector and the Y-axis position detector. When the planned cutting position to be cut by the cutting blade 21 is registered as XY coordinates, the control unit 60 becomes able to cut the planned cutting position with the cutting blade 21 based on the registered XY coordinates.

[0027] The control unit 60 moves the imaging unit 40 relative to the unmachined workpiece 100 held on the holding table 10 using the X-axis moving unit 31 and the Y-axis moving unit 32, thereby causing the imaging unit 40 to scan a predetermined area on the surface 101 of the workpiece 100. The control unit 60 continuously captures images of multiple fields of view on the surface 101 of the workpiece 100 while scanning them with the imaging unit 40, thereby acquiring images of multiple adjacent areas. The control unit 60 associates each acquired image with XY coordinates that indicate the center position of the field of view of the imaging unit 40 at the time the image was acquired. Here, in the first embodiment, two adjacent areas refer to areas where one end of one area coincides with one end of the other area. However, the present invention is not limited to this, and a portion on one end of one area may overlap with a portion on one end of the other area.

[0028] 1, the control unit 60 has a wide-area image display unit 61, a target registration unit 62, and a planned division line registration unit 63. The wide-area image display unit 61 combines images of a plurality of adjacent areas captured by the imaging unit 40 to generate a wide-area image showing an area wider than the field of view of the imaging unit 40, and displays the generated wide-area image on the display unit 50.

[0029] The wide-area image display unit 61 extracts images whose areas are adjacent to each other based on the XY coordinates respectively associated with the multiple images, and joins and combines the extracted images to generate a wide-area image showing an area wider than the field of view of the imaging unit 40. The wide-area image display unit 61 displays the generated wide-area image on the display unit 50.

[0030] The target registration unit 62 registers the target 110 of the device 103 identified in the wide-area image 211 as the target 110 for detecting the planned division line 102. The planned division line registration unit 63 registers the position of the planned division line 102 selected in the wide-area image 212 as the planned processing position where cutting processing is to be performed by the cutting blade 21.

[0031] In the first embodiment, the control unit 60 includes a computer system. The computer system included in the control unit 60 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 60 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 60, and outputs control signals for controlling the machining device 1 to each component of the machining device 1 via the input / output interface device of the control unit 60.

[0032] In the first embodiment, the function of the wide-area image display unit 61 is realized by the arithmetic processing unit of the control unit 60 executing a computer program stored in a storage device. In the first embodiment, the functions of the target registration unit 62 and the planned division line registration unit 63 are realized by the storage device of the control unit 60.

[0033] As shown in FIG. 1 , the processing apparatus 1 further includes a cassette mounting table 81, a cleaning unit 82, a pair of rails 83, and a transport unit (not shown). The cassette mounting table 81 is a mounting table on which a cassette 85, which is a container for accommodating a plurality of workpieces 100, is mounted, and moves the mounted cassette 85 up and down in the Z-axis direction. The cleaning unit 82 cleans the workpiece 100 after cutting and removes foreign matter such as cutting chips adhering to the workpiece 100. The transport unit (not shown) transports the workpiece 100 between the holding table 10, the cleaning unit 82, the pair of rails 83, and the cassette 85.

[0034] Next, this specification describes examples of teach, alignment, and kerf check performed by the processing apparatus 1 according to the first embodiment. In teach, the processing apparatus 1 has the target registration unit 62 of the control unit 60 register an image of the target 110, the planned division line registration unit 63 of the control unit 60 register a distance 111 from the first target 110 to the planned division line 102 along the first direction that is closest to the first target 110, and the holding table 10 is then rotated 90 degrees, the target registration unit 62 registers a second target that is different from or the same as the target 110, and the planned division line registration unit 63 registers the distance from the second target to the planned division line 102 along the second direction that is closest to the second target. In alignment, the processing apparatus 1 has the control unit 60 appropriately refer to the information registered by the target registration unit 62 and the planned division line registration unit 63 in teach, and detects the position of the planned division line 102 to be cut by the cutting blade 21 as the planned processing position. Furthermore, the processing device 1 registers the frequency of kerf checks, takes an image of the processed groove 120 at the set timing, and automatically checks the quality of the processed groove 120.

[0035] (Example of target registration in teaching a processing device) An example of registration of the target 110 performed in teach by the processing device 1 according to the embodiment 1 will be described. Fig. 3 is a diagram for explaining an example of a screen displayed by the processing device 1 according to the embodiment 1 when registering the target 110. Fig. 4 is a diagram for explaining an example of an image and a wide-area image displayed by the processing device 1 according to the embodiment 1 when registering the target 110.

[0036] In order to register the target 110, the control unit 60 of the processing device 1 executes a process of adjusting the display area of ​​the display image so that the display image displayed in the image display area 310 (see FIG. 3) of the target registration screen 301 (see FIG. 3) that accepts various inputs related to the registration of the target 110 exactly displays the entire target 110. After the process of adjusting the display area, the control unit 60 of the processing device 1 executes a process of registering the image of the target 110 displayed in the display image of the image display area 310 on the screen 301.

[0037] In the first embodiment, the control unit 60 of the processing device 1 first displays an image of the display area set in the initial setting in the image display area 310. Note that in the first embodiment, the initial setting is one field of view of the imaging unit 40, and therefore the size of the target 110 does not fit within the field of view of the imaging unit 40, and the image in the image display area 310 shown in Fig. 3 displays only a portion of the target 110. In the first embodiment, the control unit 60 sets the initial setting display area 2011 on the target registration screen 301 to be the same as the field of view range of the imaging unit 40, but the present invention is not limited to this, and the initial setting display area on the screen 301 may be set wider or narrower than the field of view range of the imaging unit 40.

[0038] In the example shown in Figure 3, the target registration screen 301 has an image display area 310 that displays the display image, and displays a display area setting button 311 that enlarges or reduces the field of view of the display image, a display area movement button 312, a mode switching button 313, and a registration button 314.

[0039] The display area setting button 311 is a button that accepts input for setting the size of the display area of ​​the display image to be displayed in the image display area 310. In the first embodiment, the display area setting button 311 has an enlarge button that accepts input for enlarging the display area, and a reduce button that accepts input for reducing the display area, as shown in Fig. 3. In addition, immediately adjacent to (below) the display area setting button 311, the size of the display area is displayed in comparison with, for example, the field of view of the imaging unit 40.

[0040] The display area movement button 312 is a button that accepts input for moving the display area. In the first embodiment, as shown in FIG. 3, the display area movement button 312 has movement buttons for each direction that accept input for moving the display area up, down, left, and right, respectively. The mode switching button 313 is a button that switches between a display area adjustment mode that adjusts the display area and a registration range setting mode that sets the registration range of the target 110 on the display image. The registration button 314 is a button that accepts input for registering the target 110.

[0041] In the first embodiment, the size of the display area is changed by the operator selecting the enlarge button or reduce button of the display area setting buttons 311. Note that the change of the size of the display area is not limited to this in the present invention, and for example, the size of the display area may be enlarged by receiving input of a pinch-out operation on the display image displayed in the image display area 310, or may be reduced by receiving input of a pinch-in operation on the display image, or may be performed by receiving input of a numerical value of the size of the display area from the operator.

[0042] For example, as shown in FIG. 4, when the control unit 60 receives input indicating that the display area of ​​the display image to be displayed in the image display area 310 is to be expanded from the field of view of one imaging unit 40 (1x horizontal x 1x vertical) to the field of view of nine imaging units 40 (3x horizontal x 3x vertical), the control unit 60 captures an image of an area adjacent to the originally displayed field of view, combines the multiple images to generate a wide-area image 211 showing a new display area 2012, and displays the image in the image display area 310.

[0043] In the first embodiment, the display area of ​​the display image displayed in the image display area 310 is moved by the operator selecting a movement button in each direction of the display area movement buttons 312. The operator can move the display area to a desired area while viewing the display image displayed in the image display area 310. Note that the present invention is not limited to this, and the movement of the display area of ​​the display image displayed in the image display area 310 may be performed by, for example, receiving input of a swipe operation on the display image displayed in the image display area 310, or by receiving input from the operator of a numerical value or the like indicating the amount of movement of the display area.

[0044] The change of the display area is repeated until a display area 2013 that displays the entirety of one target 110 is obtained, as shown in the lower left of Fig. 4. Note that in the first embodiment, the wide area image display unit 61 of the control unit 60 captures an image 201 by capturing a new field of view in response to the change of the display area, and generates and displays the wide area image 211. However, the present invention is not limited to this. Before the display area is changed, a plurality of images 201 obtained by capturing an area sufficiently wider than the field of view of the imaging unit 40 may be merged to generate in advance a wide area image 211 having a range sufficiently wider than the field of view of the imaging unit 40, and the display area displayed in the image display area 310 may be changed in response to the change of the display area.

[0045] Furthermore, when the display area of ​​the wide-area image display section 61 of the control unit 60 is changed to an area that exceeds the area of ​​the multiple imaged field of view ranges, the image capturing unit 40 may capture a new image 201 of the exceeded area, and combine this newly captured image 201 to generate and display a new wide-area image 211, or the control unit 60 may generate and display a wide-area image 211 in which the exceeded area is displayed in black.

[0046] When the display area on screen 301 is set to display area 2013 and the display area is adjusted so that the display image displays exactly one entire target 110, mode switching button 313 is selected, thereby switching screen 301 from the display area adjustment mode to the registration range setting mode. In response to screen 301 being switched from the display area adjustment mode to the registration range setting mode, wide area image display section 61 of control unit 60 displays registration range frame 321 on the display image displayed in image display area 310, as shown in the lower right of Fig. 4. Note that screen 301 for target registration may not include mode switching button 313, and registration range frame 321 may always be displayed on the display image displayed in image display area 310, with registration button 314 always being displayed even in a scene where the display area is being adjusted.

[0047] In the example of the screen 301 shown in Fig. 3, the registration range frame 321 is a rectangular dashed frame as shown in the lower right of Fig. 4. The range within the registration range frame 321 is changed by receiving input of a drag operation on the frame line (side) of the registration range frame 321. When the wide area image display section 61 of the control unit 60 receives input to change the range within the registration range frame 321, it displays the new registration range frame 321 with the changed range on the display image displayed in the image display area 310. The control unit 60 repeats this process until it no longer receives input to change the range within the registration range frame 321.

[0048] The target registration section 62 of the control unit 60 will no longer accept input to change the range within the registration range frame 321, and when it accepts selection of the registration button 314, it registers the range within the frame specified by the registration range frame 321 in the display image displayed in the image display area 310 as an image of the target 110, and along with registering the image of the target 110, it also registers information such as the planar shape and color of the target 110 contained in the image of the target 110, and further registers the XY coordinates of the center of the registration range frame 321 as the position of the target 110.

[0049] (Example of registering a division line when teaching a processing device) An example of registration of the planned division line 102 executed in teach by the processing device 1 according to the embodiment 1 will be described. Fig. 5 is a diagram for explaining an example of a screen displayed by the processing device 1 according to the embodiment 1 when registering the planned division line 102. Fig. 6 is a diagram for explaining an example of an image and a wide-area image displayed by the processing device 1 according to the embodiment 1 when registering the planned division line 102.

[0050] As in the example of registering the target 110, in order to register the planned dividing line 102 along the first direction that is closest to the target 110 and the planned dividing line 102 along the second direction that is closest to the second target, the control unit 60 of the processing device 1 executes processing to adjust the display area of ​​the displayed image so that the display image displayed in the image display area 310 (see FIG. 5) of the screen 302 for registering the planned dividing line that accepts various inputs related to the registration of the planned dividing line 102 displays both ends in the width direction of the planned dividing line 102 and so that the center line of the displayed image coincides with the center line of the planned dividing line 102. As in the example of registering the target 110, after the processing to adjust the display area, the control unit 60 of the processing device 1 executes processing to register the image of the planned dividing line 102 displayed in the display image in the image display area 310 on the screen 302.

[0051] Note that, although this specification describes an example of registering a planned division line 102 along a first direction that is closest to the registered target 110, an example of registering a planned division line 102 along a second direction that is closest to the registered second target is similar except for the direction in which the planned division line 102 extends.

[0052] Registration of the planned division line 102 is the same as registration of the target 110, except that the object to be displayed on the display unit 50 is changed to an area including the planned division line 102. As shown in Fig. 5, the screen 302 for registering the planned division line is the screen 301 for registering the target, except that the displayed image is changed to an image including the planned division line 102 (image 202, wide-area image 212 (see Fig. 6)), and the display on the screen 302 is partially changed. Note that in the first embodiment, both ends of the planned division line 102 in the width direction do not fit within the field of view of the imaging unit 40, so in the initial setting, the image displayed in the image display area 310 shown in Fig. 5 is an image in which part of the planned division line 102 is displayed.

[0053] 6, when the display image on the screen 302 displays both ends of the planned division line 102 in the width direction and is adjusted so that the center line of the display image coincides with the center line of the planned division line 102, the mode switching button 313 is selected, and the screen 302 is switched from the display area adjustment mode to the registration range setting mode. The wide-area image display section 61 of the control unit 60 displays a registration area frame 322 and a center line 323 on the display image displayed in the image display area 310. Note that the screen 302 for registering the planned division line may not be provided with the mode switching button 313, and the registration area frame 322 and the center line 323 may always be displayed on the display image displayed in the image display area 310, and the registration button 314 may always be displayed even in a scene where the display area is being adjusted.

[0054] In the example of screen 302 shown in Fig. 5, registration range frame 322 is a pair of straight dashed lines, as shown in the lower right of Fig. 6. In the example of screen 302 shown in Fig. 5, center line 323 is displayed as a dashed line in the center of the pair of straight dashed lines of registration range frame 322. Wide area image display section 61 of control unit 60 displays center line 323 fixedly at the center of the display image displayed in image display area 310, and displays registration range frame 322 in the display image so that it is line-symmetrical with respect to center line 323. In the example of screen 302 shown in Fig. 5, the range between registration range frames 322 is changed by receiving input of a drag operation on one of the straight lines of registration range frame 322 in a direction that intersects with the straight line.

[0055] The division line registration section 63 of the control unit 60 will no longer accept input to change the range between the registered range frames 322, and when it accepts selection of the registration button 314, it will register the range specified by the registered range frame 322 in the display image displayed in the image display area 310 as an image of the division line 102, and will register the Y coordinate of the center line 323 (the coordinate perpendicular to the direction in which the division line 102 extends) as the position of this division line 102.

[0056] After the planned division line registration section 63 registers the position of the planned division line 102 in the first direction, the control unit 60 calculates a distance 111 in the second direction between the target 110 and the center line of the planned division line 102 along the first direction, based on the difference between the Y coordinate representing the position of the target 110 registered by the target registration section 62 and the Y coordinate representing the position of the planned division line 102 in the first direction registered by the planned division line registration section 63. The target registration section 62 of the control unit 60 registers this calculated distance 111 as one piece of information related to the target 110.

[0057] After registering an image of the target 110 and a distance 111 from the target 110 to the planned division line 102 in the first direction, the control unit 60 rotates the holding table 10 by 90 degrees and, using the same procedure, registers an image of the second target and a distance from the second target to the planned division line 102 in the second direction.

[0058] An example of registering the planned dividing line 102 executed by the processing apparatus 1 according to the first embodiment during alignment of the workpiece 100 will be described. The control unit 60 of the processing apparatus 1 first acquires an image corresponding to one field of view of the imaging unit 40, and performs, for example, predetermined pattern matching to detect whether the image captured during alignment is included in the wide-area image 211 representing the target 110 registered by the target registration unit 62 in the previously executed teach, and acquires the position of the target 110 of the new workpiece 100. After acquiring the position of the target 110 of the new workpiece 100, the control unit 60 calculates the position of the planned dividing line 102 in the first direction that is closest to the target 110 of the new workpiece 100 based on the position of the target 110 of the new workpiece 100 and the distance 111 registered by the target registration unit 62 in the previously executed teach, and the planned dividing line registration unit 63 registers this position as the planned processing position of the new workpiece 100. The control unit 60 also performs the same process on the planned dividing lines 102 in the second direction, and the planned dividing line registration unit 63 registers them as planned processing positions for the new workpiece 100. The control unit 60 cuts all of the planned dividing lines 102 while indexing and feeding the holding table 10 and the cutting blade 21 in the Y-axis direction by the registered index width based on the detected planned processing positions.

[0059] (Example of kerf check performed by processing equipment) An example of a kerf check performed by the processing device 1 according to embodiment 1 will be described. Fig. 7 is a diagram for explaining an example of a screen displaying the processed groove 120 on which the processing device 1 according to embodiment 1 performs the kerf check. Fig. 8 is a diagram for explaining an example of an image and a wide-area image of the processed groove 120 displayed by the processing device 1 according to embodiment 1.

[0060] The control unit 60 of the processing device 1 performs a kerf check at a predetermined timing during processing of the workpiece 100, and generates a wide-area image 213 including both ends of the width direction of the processing groove 120 in the same field of view as the wide-area image 212 used when registering the position of the planned division line 102, as shown in Figures 7 and 8, and displays a screen 303 on the display unit 50 showing the wide-area image 213 in the image display area 310.

[0061] Furthermore, the control unit 60 issues an error if the deviation between the machining groove 120 and the hairline, which is the intended cutting line recognized by the imaging unit 40, is greater than a threshold value. The operator performs a process to align the machining groove 120 with the hairline displayed superimposed on the image including the machining groove 120, and corrects the positional relationship between the imaging unit 40 and the cutting blade 21. At this time, as shown in Figure 8, the display image is displayed as a wide-area image 213 so as to include both ends of the machining groove 120 in the width direction, making it easy to align the hairline.

[0062] Furthermore, the control unit 60 detects each check item that does not require information on both ends of the groove 120, such as the chipping width and the maximum chipping width from the kerf end, based on the original image 203 that constitutes the wide-area image 213 including the registered groove 120. The control unit 60 then checks the quality of the groove 120 by determining whether these detected values ​​pass or fail. By performing the kerf check in this manner, the control unit 60 displays the wide-area image 213 when the operator corrects the cutting position deviation, and since both ends of the groove 120 fit within one screen, erroneous registration can be prevented, allowing accurate detection and determination, and the control unit 60 automatically makes the determination. Furthermore, for check items that do not require both ends of the groove 120 to fit within one screen, highly accurate detection and determination can be performed based on the original high-magnification image 203. In the present invention, even if the workpiece 100 has an imaging target that does not fit within the field of view of the imaging unit 40, a wide-area image is displayed in an operation that requires the operator's judgment, and the imaging target that does not fit within the field of view of the imaging unit 40 is displayed on one screen, so that the imaging target registration process can be performed without error. Therefore, it is possible to perform the imaging target registration process with high accuracy without changing the lens of the imaging unit 40.

[0063] The kerf width is the distance (spacing) between both ends of the machined groove 120 within the area checked by the kerf check. The maximum chipping width from the kerf end is the distance between the end of the largest chipping in the width direction within the area checked by the kerf check and the end of the machined groove 120. The pass / fail judgment is made such that if the detected value is within the range of the tolerance preset for each check item, it is passed, and if it is outside the range of the tolerance, it is failed (result error).

[0064] In the first embodiment, the operator aligns the hairline of the machining groove 120 by checking the kerf on the screen 303 while looking at the wide-area image 213, but the present invention is not limited to this, and the machining groove 120 may be set automatically if the hairline deviation is equal to or less than a predetermined threshold value.

[0065] In the processing apparatus 1 according to the first embodiment having the above-described configuration, the wide-area image display section 61 of the control unit 60 combines images 201, 202, and 203 of a plurality of adjacent areas captured by the imaging unit 40, displays them on the display unit 50 as wide-area images 211, 212, and 213 showing an area wider than the field of view of the imaging unit 40, and can register the imaging targets (the target 110, the planned dividing line 102, and the machining groove 120) identified in the wide-area images 211, 212, and 213. Therefore, the processing apparatus 1 according to the first embodiment has the advantageous effect of enabling the execution of the registration process of the imaging targets without replacing the lens of the imaging unit 40, even for the workpiece 100 having an imaging target that does not fit within the field of view of the imaging unit 40.

[0066] [Embodiment 2] A processing device 1-2 according to embodiment 2 of the present invention will be described with reference to the drawings. Fig. 9 is a perspective view showing an example of the configuration of the processing device 1-2 according to embodiment 2. In Fig. 9, the same parts as those in embodiment 1 are assigned the same reference numerals, and their description will be omitted.

[0067] As shown in Fig. 9, a processing apparatus 1-2 according to the second embodiment includes a processing unit 20-2 instead of the processing unit 20 in the processing apparatus 1 according to the first embodiment. In the second embodiment, the processing unit 20-2 is a laser processing unit having a laser irradiator, as shown in Fig. 9. The processing unit 20-2 performs laser processing (so-called ablation processing) on ​​the workpiece 100 held on the holding surface 11 of the holding table 10, using a laser irradiated by the laser irradiator and having a wavelength that is absorbable by the workpiece 100.

[0068] In the second embodiment, the Y-axis moving unit 32 moves the holding table 10 along the Y-axis direction relative to the processing unit 20-2, and outputs the position of the holding table 10 in the Y-axis direction detected by the Y-axis position detector to the control unit 60. In the second embodiment, the Z-axis moving unit 33 is omitted.

[0069] The processing apparatus 1-2 according to the second embodiment causes the laser irradiator of the processing unit 20-2 to irradiate a laser onto the workpiece 100 on the holding table 10, while using the X-axis moving unit 31 and the Y-axis moving unit 32 to move the laser irradiator, which is irradiating the laser, relative to the workpiece 100 along the planned division line 102 that was registered as the planned processing position by the planned division line registration unit 63 in the alignment performed before the laser processing. This causes the workpiece 100 to be laser-processed along the planned division line 102 with the laser being irradiated by the laser irradiator, thereby forming a processed groove (laser-processed groove) 120 along the planned division line 102. The processed groove (laser-processed groove) 120 formed by the processing apparatus 1-2 according to the second embodiment is the same as the processed groove (cut groove) 120 formed by the processing apparatus 1 according to the first embodiment.

[0070] The processing device 1-2 according to the second embodiment executes the same teach, alignment, and kerf check as the processing device 1 according to the first embodiment. The processes executed by the control unit 60 in the teach, alignment, and kerf check executed by the processing device 1-2 according to the second embodiment are the same as those in the first embodiment, and therefore detailed description thereof will be omitted.

[0071] In the processing device 1-2 of embodiment 2 having the above-described configuration, the control unit 60 performs the same processes as in embodiment 1 for teaching, alignment, and kerf checking, so that even when the processing unit 20-2 performs laser processing along the planned division line 102 to form the processing groove 120, the same effect as in embodiment 1 can be achieved.

[0072] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0073] 1,1-2 Processing equipment 10 Holding table 20,20-2 Processing unit 40 Imaging unit 50 display units 60 Control Unit 61 Wide-area image display unit 62 Target Registration Section 63 Division Plan Line Registration Section 100 Workpiece 101 Surface 102 Planned division line 103 devices 110 Target 120 Machining groove 201,202,203 images 211,212,213 Wide-area images

Claims

1. A processing apparatus for processing a workpiece having a plurality of devices partitioned on a surface thereof along a plurality of planned dividing lines, the processing apparatus comprising: a holding table for holding the workpiece; a processing unit that processes the workpiece held on the holding table; an imaging unit that images the workpiece held on the holding table; a display unit for displaying the captured image; a control unit; The control unit a wide-area image display unit that combines images of a plurality of adjacent areas captured by the imaging unit and displays the combined images on the display unit as a wide-area image showing an area wider than the field of view of the imaging unit; a target registration unit that registers a pattern of the device identified in the wide-area image, the pattern being larger than the field of view of the imaging unit, as a target for detecting the planned division line; a planned division line registration unit that registers, as a planned processing position, a position of the planned division line selected in the wide-area image formed including both ends in the width direction of the planned division line, the width of which is larger than the field of view of the imaging unit; and the wide-area image display unit adjusts the display area by receiving a setting input for the size of a display area of ​​the wide-area image to be displayed on the display unit or an input for moving the display area, and the wide-area image display unit displays both ends of the intended division line in the width direction on the display unit; the planned division line registration unit receives an input for changing the range to be registered as the planned processing position in the display area of ​​the wide-area image, and by receiving a selection to register the range, the planned division line registration unit registers the coordinates of the center of the range in the display area of ​​the wide-area image as the planned processing position; The range of the image captured by the imaging units before combination is smaller than the pattern, A processing device characterized in that the width of the image captured by the imaging units before combination is narrower than the width of the planned division line.

2. The control unit by receiving a setting input for the size of a display area of ​​the wide area image to be displayed on the display unit by the wide area image display unit or an input for moving the display area, the display area is adjusted, and the wide area image display unit displays the entire pattern on the display unit; the target registration unit accepts an input for changing the range to be registered as the target in the display area of ​​the wide area image, and accepts a selection to register the range, thereby registering the range in the display area of ​​the wide area image as the target; 2. The processing device according to claim 1.

3. The control unit When a kerf check is performed to check the quality of the processed groove after processing, the wide-area image formed including both ends of the processed groove in the width direction, the wide-area image being wider than the field of view of the imaging unit, is displayed on the display unit; 3. The processing device according to claim 1, wherein the width of the image captured by the imaging units before combination is narrower than the width of the processed groove.

4. The control unit The wide-area image display unit displays the wide-area image formed including both ends of the processing groove in the width direction in the same display area as when the planned processing position was registered by the planned division line registration unit.

4. The processing device according to claim 3.

Images