Optical Scanning Device

Abstract

To provide an optical scanning device which allows for accurately adjusting the orientation of a mirror during manufacture.SOLUTION: An optical scanning device 10 comprises an upright plate portion 13b provided with a sloped groove 30 and a through-hole 31 located above a VCSEL 17 and a MEMS optical deflector 20, and fixed to a substrate 15. A plate-like mirror 23 and a rotary mirror 25 are supported by the sloped groove 30 and the through-hole 31, respectively, at one end thereof in a Y-axis direction. The through-hole has a shape of a rotary body having a center axis coinciding with an axis thereof in the Y-axis direction.SELECTED DRAWING: Figure 1B

Description

[Technical Field]

[0001] The present invention relates to an optical scanning device in which a laser light source and a MEMS (Micro Electro Mechanical Systems) optical deflector are arranged on one substrate. [Background technology]

[0002] In an optical scanning device, it is preferable to mount the laser light source and the MEMS optical deflector on the same substrate for the sake of miniaturization. However, the direction of light emitted from the laser light source and the rotating mirror of the MEMS optical deflector both point upward, perpendicular to the substrate, making it difficult to direct the light from the laser element to the rotating mirror of the MEMS optical deflector.

[0003] For this reason, in conventional optical scanning devices, the laser light source and the MEMS optical deflector are mounted on separate substrates arranged opposite each other, or the light emitted from the laser light source is guided to the MEMS optical deflector via an optical fiber (e.g., Patent Document 1).

[0004] Meanwhile, Patent Document 2 discloses an optical scanning device that displays text information in a camera viewfinder. In this optical scanning device, a VCSEL (Vertical Cavity Surface Emitting Laser) and a micromirror are arranged on the same substrate, and mirrors that change the direction of travel by 90 degrees are provided directly above the VCSEL and the micromirror, respectively. Light emitted from the VCSEL upward, perpendicular to the substrate, is reflected by the mirror and made to enter the micromirror on the same substrate. The mirror directly above the micromirror is a half mirror, and the light emitted from the micromirror travels straight ahead without being reflected by the half mirror and is emitted to the outside. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-244869 [Patent Document 2] Japanese Patent Application Laid-Open No. 2010-175677 Summary of the Invention [Problem to be solved by the invention]

[0006] The diameter of the rotating mirror of a MEMS optical deflector is small. Therefore, in an optical scanning device such as that described in Patent Document 2, the orientation of the mirror disposed on the substrate needs to be accurately adjusted during manufacturing so that the light emitted from the laser light source is accurately incident on the rotating mirror of the MEMS optical deflector. However, Patent Document 2 does not mention such a configuration at all.

[0007] Object of the invention is The light source and MEMS optical deflector are mounted. Hey, Mira When the light emitted from the laser light source is reflected by the mirror and made incident on the rotating mirror of the MEMS optical deflector, by An object of the present invention is to provide an optical scanning device having a structure that enables the direction of reflected light to be accurately adjusted. [Means for solving the problem]

[0008] The optical scanning device of the present invention comprises: A substrate; a MEMS optical deflector mounted on the substrate with a rotating mirror facing upward relative to the substrate; A laser element that irradiates the rotating mirror with emitted light and, an adjusting mirror that reflects the emitted light from the laser element to the rotating mirror on an optical path of the emitted light to the rotating mirror; at least one support member fixed to the substrate and supporting the adjustment mirror; and The support member is a through hole into which one end is inserted and supported; The through hole is The adjusting mirror is formed in a shape that allows the reflection position of the emitted light to be adjusted. The method for manufacturing an optical scanning device of the present invention includes the steps of: providing a substrate, a laser device, and a MEMS optical deflector mounted on the substrate with a pivoting mirror facing upward relative to the substrate; a step of placing an adjustment mirror formed in a shape that allows an adjustment of a reflection position of the emitted light, the adjustment mirror reflecting the emitted light on an optical path from the laser element to the rotating mirror; a step of reflecting the emitted light from the laser element by the adjusting mirror and the rotating mirror in a stationary state to form a spot on a screen; , adjusting the adjusting mirror so that the spot is at a predetermined position on the screen; It has. [Effects of the Invention]

[0009] According to the present invention, The mirror is formed in a shape that allows adjustment of the reflection position of the light emitted from the laser light source. therefore, The mirror is set to reflect the light emitted from the laser light source and make it incident on the rotating mirror of the MEMS optical deflector. can be precisely adjusted. [Brief explanation of the drawings]

[0010] [Figure 1A] FIG. 2 is a plan view of the optical scanning device. [Figure 1B] FIG. 1B is a view taken along the arrow 1B in FIG. 1A. [Figure 1C] FIG. 1C is a view taken along the arrow 1C in FIG. 1A. [Figure 1D] FIG. 1B is a view taken along arrow 1D in FIG. 1A. [Figure 2] FIG. [Figure 3A] FIG. 10 is a side view showing a state in which the position of the plate mirror is being adjusted using an angle adjustment jig. [Figure 3B] 3B is a perspective view of the jig in FIG. 3A. FIG. [Figure 3C] 3B is a diagram showing the optical scanning device in FIG. 3A as viewed from above. FIG. [Figure 3D] FIG. 3D is a perspective view of the jig in FIG. 3C. [Figure 4A] FIG. 10 is a side view showing a state in which the position of the rotary mirror is being adjusted using a jig. [Figure 4B] 4B is a perspective view of the jig in FIG. 4A. FIG. [Figure 5] FIG. 10 is a diagram showing a configuration in which a correction prism is attached to the inner surface side of a transparent portion. [Figure 6] 1 is a diagram showing an eyeglass-type image display device as an application example of an optical scanning device. DETAILED DESCRIPTION OF THE INVENTION

[0011] Preferred embodiments of the present invention will be described in detail with reference to the drawings. It goes without saying that the present invention is not limited to the following embodiments. The present invention encompasses various configurations within the scope of the technical concept of the present invention in addition to the following embodiments.

[0012] (composition) Fig. 1A is a plan view of the optical scanning device 10, Fig. 1B is a view seen from the arrow 1B in Fig. 1A, Fig. 1C is a view seen from the arrow 1C in Fig. 1A, and Fig. 1D is a view seen from the arrow 1D in Fig. 1A. Note that Figs. 1A to 1D show the optical scanning device 10 with the cover 33 (shown by the dashed dotted line in Fig. 1B) removed.

[0013] The optical scanning device 10 includes a support frame 12. The support frame 12 has an L-shaped cross-sectional profile and includes a vertically joined bottom plate portion 13a and an upright plate portion 13b. The substrate 15 is rectangular and is placed and fixed on the upper surface of the bottom plate portion 13a.

[0014] For ease of explanation, a three-axis Cartesian coordinate system is defined. The X-axis and Y-axis are defined as axes parallel to the longitudinal direction (direction parallel to the long sides) and lateral direction (direction parallel to the short sides) of the substrate 15, respectively. The Z-axis is defined as an axis parallel to the direction in which the upright plate portion 13b rises from the substrate 15.

[0015] 1B, i.e., from the negative end of the optical scanning device 10 in the X-axis direction, the negative and positive sides in the X-axis direction will be referred to as the front and rear, respectively, of the optical scanning device 10. Furthermore, the positive and negative sides in the Z-axis direction of the substrate 15 are the upper and lower surfaces, respectively, and the positive and negative sides in the Z-axis direction will be defined as the upper and lower sides of the optical scanning device 10, respectively, as appropriate.

[0016] The VCSEL 17 and MEMS optical deflector 20 are mounted on the upper surface of the substrate 15, aligned in the X-axis direction. The VCSEL 17 has an emission part 18 on its upper surface, and emits laser light upward parallel to the Z-axis direction from the emission part 18. The MEMS optical deflector 20 has the mirror surface of the rotating mirror 21 facing upward in the Z-axis direction.

[0017] In this embodiment, the MEMS optical deflector 20 is a two-dimensional scanning MEMS optical deflector, but may also be a one-dimensional scanning MEMS optical deflector. Various configurations of MEMS optical deflectors are known, and for example, the MEMS optical deflectors described in Japanese Patent Laid-Open No. 2017-207630 (two-dimensional scanning MEMS optical deflector) or Japanese Patent Laid-Open No. 2014-056020 (one-dimensional scanning MEMS optical deflector) may be selected.

[0018] Fig. 2 is a side view of the support frame 12. The support frame 12, the plate mirror 23, and the rotary mirror 25 will be described with reference to Figs. 1A to 1D and 2.

[0019] The standing plate portion 13b of the support frame 12 has an inclined groove 30 and a through hole 31. The inclined groove 30 has a rectangular cross section and opens obliquely upward and rearward on the side profile of the standing plate portion 13b. The bottom surface of the inclined groove 30 is formed as an inclined surface that is inclined at 45° with respect to the substrate 15. The through hole 31 is formed as a cylindrical hole that penetrates the standing plate portion 13b in the Y-axis direction.

[0020] In the X-axis direction, the center of the width (length in side view in FIG. 1B) of the inclined surface (bottom surface) of the inclined groove 30 is located at the same position as the emission section 18 of the VCSEL 17. In the X-axis direction, the center line C of the cylindrical hole of the through-hole 31 is located between the VCSEL 17 and the rotating mirror 21 of the MEMS optical deflector 20 in the X-axis direction. In the Z-axis direction, the center of the length of the inclined surface of the inclined groove 30 and the center line of the cylindrical hole of the through-hole 31 are located at the same position, i.e., at the same height from the substrate 15.

[0021] The plate mirror 23 is made of a rectangular plate-like member, and with the lower plate surface serving as the mirror surface, one end is cantilevered and adhered to the slope of the inclined groove 30 with an adhesive such as resin. The plate thickness of the plate mirror 23 is set to be approximately equal to the depth of the inclined groove 30.

[0022] The plate width of the plate mirror 23 (the length in the side view in FIG. 1B) is slightly shorter than the width of the inclined groove 30 (the length in the side view in FIG. 1B). Therefore, before one end of the plate mirror 23 is bonded to the inclined groove 30, i.e., before the one end is fixed, the plate mirror 23 can be slightly displaced in the direction of the slope of the bottom surface within the inclined groove 30, and the angle of rotation about an axis parallel to the Y axis can be changed. This change makes it possible to adjust the orientation of the mirror surface of the plate mirror 23 during the manufacture of the optical scanning device 10.

[0023] The rotary mirror 25 has a flat mirror portion 26 and a cylindrical fitting end portion 27 that is connected to one end of the mirror portion 26 and fits into the through-hole 31. The diameter of the fitting end portion 27 is slightly smaller than the diameter of the through-hole 31. Therefore, before the fitting end portion 27 is bonded to the through-hole 31, i.e., before it is fixed, the rotary mirror 25 is rotatable around the center line of the through-hole 31 while the fitting end portion 27 is fitted into the through-hole 31, and is tiltable within a predetermined tilt angle range from a state in which the center line of the rotary mirror 25 is aligned with the center line of the through-hole 31. Therefore, the rotary mirror 25 can be rotated over a larger angular range than the plate mirror 23. This rotatable and tiltable configuration allows the orientation of the mirror surface of the mirror portion 26 to be adjusted during the manufacture of the optical scanning device 10. After adjustment, the fitting end portion 27 is adhered and fixed with an adhesive such as resin.

[0024] The rotating mirror 21 of the MEMS optical deflector 20 is not located directly below the rotating mirror 25, but is located in front of it, i.e., on the negative side of the rotating mirror 25 in the X-axis direction. As will be described later, this configuration contributes to causing the emission direction of light Lp from the optical scanning device 10 to be emitted obliquely forward rather than perpendicular to the substrate 15. This configuration also ensures that when the optical scanning device 10 is attached to the temples of eyeglasses as an image scanning device for smart glasses, the emitted light from the optical scanning device 10 reaches the inner surface of the lens of the eyeglasses without being interfered with by the slight gap between the image scanning device and the user's face (FIG. 6).

[0025] FIG. 6 is a diagram showing an eyeglass-type image display device 155 as an application example of the optical scanning device 10. The eyeglass-type image display device 155 will be briefly described. The eyeglass-type image display device 155 includes an eyeglass body 160 and an image generating device 110 detachably attached to the eyeglass body 160 with a clip 170. The eyeglass body 160 includes left and right temples 161a, 161b and a front frame 163 that connects to the front ends of the left and right temples 161a, 161b at both left and right ends. The front frame 163 further includes left and right lens frame portions 164a, 164b and a bridge 165 that connects the left and right lens frame portions 164a, 164b.

[0026] The optical scanning device 10 is housed in the image generating device 110 in a line arrangement along the extension direction of the temples 161b of the eyeglass body 160 together with other elements (e.g., a buffer amplifier for the MEMS sensor and an LDD (laser driver)). In this line arrangement, the optical scanning device 10 is arranged at the forefront, i.e., closest to the lens 167. In this way, light Lp (FIG. 2B) emitted from the optical scanning device 10 irradiates the inner surface of the lens 167 to generate an image in the scanning area 172.

[0027] The cover 33 (FIG. 1B) extends along the contour of the upright plate portion 13b above the substrate 15, fits over the upright plate portion 13b, and has the peripheral edge of its lower end fixed to the peripheral edge of the bottom plate portion 13a. The cover 33 has a transparent portion 34 at least in the portion where the light Lp described below exits the optical scanning device 10 as scanning light.

[0028] (correction prism) 5 shows a configuration in which a correction prism 54 is attached to the inner surface side of the transparent portion 34. Reference numeral 56 denotes a scanning area generated at the irradiation destination by light Lp emitted as scanning light from the transparent portion 34 of the optical scanning device 10 when the correction prism 54 is not present. Reference numeral 58 denotes a scanning area generated at the irradiation destination by light Lp emitted as scanning light from the transparent portion 34 of the optical scanning device 10 when the correction prism 54 is present.

[0029] The rotating mirror 21 of the MEMS optical deflector 20 rotates resonantly and non-resonantly around the X-axis and the Y-axis, respectively. As a result, the light Lp emitted from the rotating mirror 21 becomes a scanning light for two-dimensional scanning. The resonant frequency and non-resonant frequency are, for example, 14 kHz or more and 60 Hz, respectively. The reciprocating rotation angle of the rotating mirror 21 around the X-axis is greater than the reciprocating rotation angle of the rotating mirror 21 around the Y-axis.

[0030] Due to the reciprocating rotation of the rotating mirror 21 about the X axis in the optical scanning device 10, the light Lp scans back and forth in the Sx axis direction in the pre-correction scanning area 56 or the post-correction scanning area 58. Due to the reciprocating rotation of the rotating mirror 21 about the Y axis in the optical scanning device 10, the light Lp scans back and forth in the Sy axis direction in the pre-correction scanning area 56 or the post-correction scanning area 58.

[0031] When the correction prism 54 is not installed, the light Lp generates a pre-correction scanning area 56 at the scanning destination. The pre-correction scanning area 56 has a distorted shape relative to a rectangle. In contrast, when the pre-correction scanning area 56 is installed, the light Lp generates a post-correction scanning area 58, which is a rectangle with the distortion corrected. The post-correction scanning area 58 corresponds to an inscribed rectangle of the pre-correction scanning area 56.

[0032] (action) 1B, the dashed line through which the light Lp is extracted indicates the optical path of the light Lp. Note that the light Lp emitted from the emission unit 18 of the VCSEL 17 is laser light that has been weakened sufficiently to not harm the human eyes.

[0033] The light Lp is emitted from the emission portion 18 of the VCSEL 17 upward (positive direction along the Z axis) perpendicular to the substrate 15. When the light Lp is incident on the plate-like mirror 23, it is reflected by the plate-like mirror 23 and its direction is changed to parallel to the X axis, which is the direction in which the VCSEL 17 and the emission portion 18 are arranged on the upper surface of the substrate 15, and to the negative side of the X axis. Then, after traveling forward parallel to the X axis (negative side of the X axis), the light Lp is incident on the obliquely downward mirror surface of the mirror portion 26 of the rotary mirror 25.

[0034] The inclination angle of the mirror portion 26 with respect to the substrate 15 is smaller than 45°. Therefore, the light Lp reflected by the mirror portion 26 does not descend parallel to the Z-axis direction, i.e., in a direction perpendicular to the substrate 15, but descends diagonally forward and is incident on the center of the rotating mirror 21 of the MEMS optical deflector 20.

[0035] The rotating mirror 21 rotates two-dimensionally. Therefore, the light Lp incident on the rotating mirror 21 becomes scanning light for two-dimensional scanning, and travels from the rotating mirror 21 obliquely upward and forward.

[0036] (Mirror installation method during manufacturing) A method for attaching the plate mirror 23 and the rotary mirror 25 during the manufacture of the optical scanning device 10 will be described with reference to FIGS. 3A to 3D and 4A to 4B.

[0037] 3A to 3D are explanatory diagrams illustrating attachment of one end of the plate mirror 23 to the bottom surface of the inclined groove 30 as the inclined surface portion. Fig. 3A is a side view illustrating the position of the plate mirror 23 being adjusted using a jig 40 for adjusting the angle of the plate mirror 23, Fig. 3B is a see-through view of the jig 40 in Fig. 3A, Fig. 3C is a view of the optical scanning device 10 as viewed from above in Fig. 3A, and Fig. 3D is a see-through view of the jig 40 in Fig. 3C.

[0038] The plate mirror 23 is attached to the inclined groove 30 by an operator while observing the position of the light spot Sp on the screen 44 so that the angles of the plate mirror 23 in the three axial directions (X-axis, Y-axis, and Z-axis) are correct, i.e., so that the orientation of the plate mirror 23 is correct.

[0039] The optical scanning device 10 is mounted on a predetermined mounting apparatus before the plate mirror 23 is attached. In the mounted state, the support frame 12 and the substrate 15 are fixed to the mounting apparatus.

[0040] Next, one end of the plate mirror 23 is inserted into the inclined groove 30, and the jig 40 is inserted from the other end side of the plate mirror 23 onto the underside of the other end of the plate mirror 23, i.e., onto the mirror surface side.

[0041] The jig 40 has an inclined surface 41 and an upper surface 42. The inclined surface 41 of the jig 40 is brought into contact with the other end of the mirror surface of the plate-shaped mirror 23, and the other end of the jig 40 is rotated about an axis parallel to the Y axis and displaced in the X axis direction (the front-to-rear direction of the optical scanning device 10) and the Z axis direction (the height direction of the optical scanning device 10).

[0042] The VCSEL 17 is in an on state while the position of the plate mirror 23 is being adjusted by the jig 40. Therefore, a light spot Sp is generated on the screen 44, and the position of the light spot Sp on the screen 44 moves two-dimensionally as the jig 40 moves.

[0043] While observing the position of the light spot Sp on the screen 44, the worker operates the jig 40 to move one end of the plate mirror 23 within the inclined groove 30. Then, when the light spot Sp reaches the set position on the screen 44, the worker operates the jig 40 to hold the plate mirror 23 in the orientation (posture and position) at that time.

[0044] Next, while holding the plate mirror 23 in the orientation at that time, the worker applies drops of adhesive to multiple locations across the area between one end of the plate mirror 23 and the inclined groove 30. This fixes the plate mirror 23 to the inclined surface of the bottom wall of the inclined groove 30 in the orientation that will be achieved when the light spot Sp is at the set position on the screen 44. At this time, the mirror surface of the plate mirror 23 reflects the light Lp emitted from the emission portion 18 of the VCSEL 17 toward the rotary mirror 25, parallel to the X-axis.

[0045] That is, the plate-shaped mirror 23 is held stationary in any orientation while one end thereof is placed against the inclined surface of the bottom wall of the inclined groove 30, and droplets of adhesive are applied to multiple locations across the space between one end of the plate-shaped mirror 23 and the inclined groove 30, and after the adhesive dries, the plate-shaped mirror 23 is fixed in the desired orientation.

[0046] 4A and 4B are explanatory diagrams illustrating the attachment of one end of the rotatable mirror 25 to the through-hole 31. Fig. 4A is a side view illustrating the position of the rotatable mirror 25 being adjusted using a jig 47 for adjusting the orientation of the rotatable mirror 25, and Fig. 4B is a perspective view of the jig 47 in Fig. 4A.

[0047] The jig 47 grips the other end of the mirror portion 26 and moves to the positive side in the Y-axis direction to fit the fitting end 27 into the through-hole 31.

[0048] Next, the VCSEL 17 is turned on again. No drive voltage is supplied to the actuator of the MEMS optical deflector 20, the rotating mirror 21 is stationary, and the normal to the reflective surface of the rotating mirror 21 is parallel to the Z axis. The screen 51 is located diagonally in front of the optical scanning device 10 and above the MEMS optical deflector 20 in the Z axis direction. The light Lp emitted from the rotating mirror 25 hits the screen 51 to generate a light spot Sp.

[0049] Jig 47 rotates rotary mirror 25 around the center line of through-hole 31 and adjusts the rotation angle of rotary mirror 25 around the center line so that light spot Sp comes to a set position on screen 51. When light spot Sp comes to the set position, rotation of rotary mirror 25 by jig 47 stops.

[0050] When the light spot Sp reaches the set position on the screen 51, the worker stops moving the rotary mirror 25 and applies multiple drops of adhesive across the gap between the through-hole 31 and the mating end 27, just as when adhering one end of the plate mirror 23 to the inclined surface at the bottom of the inclined groove 30. This adjusts the orientation of the rotary mirror 25 to a direction that ensures that the light Lp emitted from the rotating mirror 21 of the MEMS optical deflector 20 is emitted in the appropriate direction.

[0051] (Effects of the embodiment) The through-hole 31 of the standing plate portion 13b serving as the second support portion for the fitting end portion 27 serving as one end portion of the rotary mirror 25 has a cylindrical hole as a rotating body whose center line is the center line of the through-hole 31. As a result, when the optical scanning device 10 is manufactured, the rotational position of the rotary mirror 25 around the center of the through-hole 31, which is one of the positions of the rotary mirror 25, can be accurately set.

[0052] The through hole 31 is cylindrical in shape. Furthermore, the fitting end 27, which is one end of the rotary mirror 25, is fixed to the through hole 31 by adhesive. The adhesive can be applied at an adhesive portion by adjusting the position where the adhesive is applied and by changing the distribution of the amount of adhesive applied. Therefore, during manufacturing, the mirror portion 26 of the rotary mirror 25 can be adjusted not only in its rotational position around the axis of the through hole 31 but also in various other positions, thereby optimizing the orientation of the rotary mirror 25 and fixing it to the upright plate portion 13b.

[0053] When the through hole 31 is a truncated cone tapering toward the end in the insertion direction of the fitting end 27 into the through hole 31, positioning of the through hole 31 toward the center during manufacturing can be simplified.

[0054] In the optical scanning device 10, one end of the plate mirror 23, which reflects the light Lp emitted from the VCSEL 17 perpendicular to the substrate 15, in a direction parallel to the arrangement direction of the VCSEL 17 and the MEMS optical deflector 20 on the substrate 15, is bonded to the inclined surface that is the bottom of the inclined groove 30. By adjusting the attachment position and the attachment amount (protrusion amount) at the attachment position, the bonding not only changes the inclination angle of the inclined surface but also makes it easy to change the orientation of the plate mirror 23 to various directions, although only within a small range. This allows the orientation of the plate mirror 23 to be accurately adjusted to a desired direction.

[0055] The rotating mirror 21 of the MEMS optical deflector 20 is not disposed directly below the rotary mirror 25 but is disposed away from the rotary mirror 25 in the X-axis direction, so that the light Lp as scanning light can be emitted obliquely rather than perpendicularly to the substrate 15. This emission direction is advantageous because when the optical scanning device 10 is attached to the temples of eyeglasses to be used as smart glasses, the scanning area of ​​the scanning light can be formed on the inner surface of the eyeglass lenses through a narrow gap between the user's face and the temples of the eyeglasses.

[0056] (Variation) The optical scanning device 10 includes a VCSEL 17. The VCSEL 17 is an example of a surface-emitting laser element. The present invention can employ a laser light source other than a vertical cavity surface-emitting laser (VCSEL) as long as it is a surface-emitting laser element.

[0057] The upright plate portion 13b of the support frame 12 is an example of a plate-like support member fixed to the substrate 15. The upright plate portion 13b is fixed to the substrate 15 via the bottom plate portion 13a, but the plate-like support member of the present invention can also be fixed directly to the substrate.

[0058] In the optical scanning device 10, the plate mirror 23 and the rotary mirror 25 serving as the first and second mirrors are supported at one end by the upright plate portion 13b in the Y-axis direction serving as the second axis, but the other end is a free end and is fixed in a cantilevered state. The first and second mirrors of the present invention may be supported at both ends when the optical scanning device 10 is completed.

[0059] In the optical scanning device 10, only the through hole 31 serving as the second support portion has the shape of a rotating body. In the present invention, the inclined groove 30 having a bottom surface serving as the first support portion may also be a through hole having the shape of a rotating body. Conversely, it is also possible for the first support portion to be a through hole having the shape of a rotating body, and the second support portion to be an inclined surface portion.

[0060] In the drawings, the X-axis, Y-axis, and Z-axis are defined as corresponding to the first axis, second axis, and third axis of the present invention, respectively, but this is only done so for the convenience of explaining the optical scanning device 10 of the embodiment.

[0061] The optical scanning device 10 can be applied as an image generating device in smart glasses, and can also be applied as an image generating device in a micro projector or an interactive projector.

[0062] The optical scanning device 10 can generate an image in the scanning area by controlling the intensity of the light Lp emitted from the VCSEL 17. However, since the optical scanning device 10 of the embodiment is equipped with only one VCSEL 17, it can only generate monochrome images. To generate color images, the optical scanning device 10 needs to be equipped with a total of three VCSELs 17 that output light corresponding to the three primary colors. The three color-specific VCSELs 17 are mounted on the substrate 15 so as to be aligned in a row in the X-axis direction together with the MEMS optical deflector 20, and three plate mirrors 23 are arranged in a row in the X-axis direction directly above the three VCSELs 17 at the same height. Of the three plate mirrors 23, the first and second plate mirrors 23 closest to the rotary mirror 25 function as half mirrors, allowing the light Lp incident from the second and third plate mirrors 23 to travel straight toward the rotary mirror 25.

[0063] In the above embodiment, the rotating mirror 21 and the plate mirror 23 are each supported in a cantilevered manner by one standing plate portion 13b, but this is not limited to this. The rotating mirror 21 and the plate mirror 23 may be supported at both ends by two opposing standing plate portions 13b, or the rotating mirror 21 and the plate mirror 23 may each be supported by the opposing standing plate portion 13b. Furthermore, the standing plate portion 13b may not be an independent plate portion, but may be a wall surface of the housing of the optical scanning device 10. [Explanation of symbols]

[0064] 10... Optical scanning device, 13b... Standing plate portion (plate-shaped support member), 15... Substrate, 17... VCSEL (vertical cavity surface-emitting laser element), 20... MEMS optical deflector, 21... Rotating mirror, 23... Plate-shaped mirror, 25... Rotating mirror, 26... Mirror portion, 27... Engaging end portion (one end portion), 30... Inclined groove (slope), 31... Through hole.

Claims

1. A substrate; a MEMS optical deflector mounted on the substrate with a rotating mirror facing upward relative to the substrate; a laser element that irradiates the rotating mirror with emitted light; an adjusting mirror that reflects the emitted light from the laser element to the rotating mirror on an optical path of the emitted light to the rotating mirror; at least one support member fixed to the substrate and supporting the adjustment mirror; and the support member has a through hole into which one end of the adjustment mirror is inserted and supported; The through hole has a diameter larger than that of the one end, and is formed in a shape that allows adjustment of the reflection position of the emitted light on the adjustment mirror.

2. 2. The optical scanning device according to claim 1, wherein the adjusting mirror has an inclination angle of less than 45 degrees with respect to the substrate.

3. a step of preparing a substrate, a laser element, a MEMS optical deflector mounted on the substrate with a rotating mirror facing upward relative to the substrate, and a support member provided with an inclined groove or a through hole; a step of installing an adjustment mirror in the inclined groove or the through hole, the adjustment mirror having one end formed in a shape that has a plate width shorter than the inclined groove or a diameter smaller than the through hole and that is shaped so that the reflection position of the emitted light can be adjusted, the adjustment mirror reflecting the emitted light on the optical path of the emitted light from the laser element to the rotating mirror; a step of reflecting the emitted light from the laser element by the adjusting mirror and the rotating mirror in a stationary state to form a spot on a screen; adjusting the adjusting mirror so that the spot is at a predetermined position on the screen; A method for manufacturing an optical scanning device having the above structure.

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