Radiation detector and radiation detection device

Abstract

Provided are a radiation detector and radiation detection device capable of suppressing performance degradation.　This radiation detector, which comprises a radiation detection element, a circuit element, and a housing for accommodating the radiation detection element and the circuit element, also comprises an enclosed space. The housing includes an unclosed opening, the enclosed space is disposed inside the housing, the circuit element is disposed inside the enclosed space, and the enclosed space is either depressurized or sealed with an inert gas or dry gas therein.

Description

[Technical Field]

[0001] The present invention relates to a radiation detector and a radiation detection apparatus. [Background technology]

[0002] Some radiation detectors for detecting radiation such as X-rays include a radiation detection element using a semiconductor. The radiation detector also includes a circuit element, such as a preamplifier, that amplifies a signal output by the radiation detection element. The radiation detector includes a housing, and the radiation detection element and circuit element are disposed inside the housing. For example, a substrate is disposed inside the housing, with the radiation detection element disposed on the front surface of the substrate and the circuit element disposed on the back surface of the substrate. Typically, the housing includes a window having a window material formed of a material that transmits radiation. Radiation that passes through the window material is detected. Radiation that cannot pass through the window material due to low energy cannot be detected by the radiation detector. Therefore, radiation detectors that can detect low-energy radiation by eliminating the window material have been developed. Patent Document 1 discloses an example of a radiation detector that does not include a window material. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 117272 Summary of the Invention [Problem to be solved by the invention]

[0004] When a radiation detector without a window is used in an environment of normal pressure or low vacuum, gases such as water vapor will penetrate from the outside to the inside of the radiation detector. The gas may be adsorbed by the circuit elements inside the radiation detector, causing deterioration of the circuit elements and reducing the performance of the radiation detector.

[0005] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a radiation detector and a radiation detection apparatus that can suppress a decrease in performance. [Means for solving the problem]

[0006] The radiation detector according to the present invention comprises a radiation detection element, a circuit element, and a housing that accommodates the radiation detection element and the circuit element, and is characterized in that it comprises a closed space, the housing has an unblocked opening, the closed space is disposed inside the housing, the circuit element is disposed inside the closed space, and the closed space is either decompressed or filled with an inert gas or a dry gas.

[0007] In one embodiment of the present invention, the housing of the radiation detector has an unobstructed opening. The radiation detector has a closed space in which circuit elements such as an amplifier are disposed. Gases such as water vapor can enter the inside of the housing through the opening, but do not penetrate into the closed space. Therefore, radiation detection is possible. vessel Even when used in a normal pressure or low vacuum environment, gases entering from the outside will not be adsorbed onto the circuit elements. Furthermore, the inside of the closed space is either depressurized or filled with an inert gas or dry gas. It is unlikely that water or gases present inside the closed space will be adsorbed onto the circuit elements, and even if an inert gas is adsorbed onto the circuit elements, a reaction that would deteriorate the circuit elements is unlikely to occur. Therefore, deterioration of the circuit elements due to adsorption of water or gas is prevented.

[0008] In the radiation detector according to the present invention, the radiation detection element is disposed at a position facing the opening.

[0009] In one embodiment of the present invention, the radiation detection element faces the opening. Radiation incident on the radiation detection element passes through the opening and does not need to pass through the window material. This allows the radiation detector to detect radiation that has low energy and cannot pass through the window material.

[0010] The radiation detector according to the present invention comprises a radiation detection element having an incident surface onto which radiation is incident, and a circuit element, and further comprises a closed space arranged at a position where the incident surface does not face, the circuit element being arranged inside the closed space, and the closed space being reduced in pressure or filled with an inert gas or a dry gas.

[0011] In one aspect of the present invention, a radiation detector includes a closed space, and circuit elements such as an amplifier are disposed inside the closed space. The incident surface of the radiation detection element does not face the closed space. Gases such as water vapor do not infiltrate the closed space. Therefore, the gases do not adsorb to the circuit elements. Furthermore, the inside of the closed space is depressurized or filled with an inert gas or dry gas. Water or gas is unlikely to adsorb to the circuit elements, and deterioration of the circuit elements due to adsorption of water or gas is prevented.

[0012] In the radiation detector according to the present invention, the radiation detection element has an electrode connected to the circuit element, and the electrode faces the enclosed space.

[0013] In one embodiment of the present invention, the radiation detection element includes an electrode for connection to the circuit element, and the electrode faces the enclosed space. This makes it difficult for water or gas to be adsorbed onto the electrode. Even if an inert gas is adsorbed onto the electrode, a reaction that deteriorates the electrode is unlikely to occur. This prevents deterioration of the electrode and a decrease in the performance of the radiation detection element.

[0014] The radiation detector according to the present invention is characterized by further comprising a moisture getter that takes in moisture inside the closed space.

[0015] In one aspect of the present invention, the moisture getter captures moisture present inside the closed space, thereby more effectively preventing the water from being adsorbed onto the circuit elements.

[0016] The radiation detector according to the present invention is characterized by further comprising a gas getter that takes in gas inside the closed space.

[0017] In one embodiment of the present invention, the gas getter captures the gas present inside the closed space, thereby more effectively preventing the gas from being adsorbed onto the circuit elements.

[0018] The radiation detector of the present invention further comprises a substrate having a first surface and a second surface located on the back side of the first surface, and a plate-shaped member, wherein the substrate has a through hole penetrating between the first surface and the second surface, the radiation detection element is disposed on the first surface and blocks one end of the through hole, the plate-shaped member is disposed opposite the second surface and blocks the other end of the through hole, and the closed space is the space inside the through hole whose both ends are blocked by the radiation detection element and the plate-shaped member.

[0019] In one aspect of the present invention, a radiation detector includes a substrate having a through hole, a radiation detection element disposed so as to close one end of the through hole, and a plate-like member disposed so as to close the other end of the through hole. By closing both ends of the through hole with the radiation detection element and the plate-like member, the space inside the through hole becomes a closed space. A closed space that is gas-tight can be easily formed.

[0020] a radiation detector according to the present invention further comprising: a substrate having a first surface and a second surface located on the back side of the first surface; and a plate-shaped member having an internal cavity; the substrate having a through hole penetrating between the first surface and the second surface; the radiation detection element being disposed on the first surface and blocking one end of the through hole; the plate-shaped member being disposed opposite the second surface and blocking the other end of the through hole; the plate-shaped member having a connecting hole in a portion facing the second surface, the connecting hole having a diameter smaller than the through hole and connecting the internal space of the through hole to the cavity; the closed space including the internal space of the through hole, both ends of which are blocked by the radiation detection element and the plate-shaped member, and the cavity connected to the internal space via the connecting hole; and a moisture getter that takes in moisture from the internal space of the closed space or a gas getter that takes in gas from the internal space of the closed space is disposed at a position different from the connecting hole in the cavity.

[0021] In one aspect of the present invention, a radiation detector includes a substrate having a through hole, a radiation detection element disposed so as to close one end of the through hole, and a plate-like member disposed so as to close the other end of the through hole. The plate-like member has a cavity therein and a connecting hole that connects the space inside the through hole to the cavity. A closed space is formed including the space inside the through hole and the cavity connected to the space via the connecting hole. A moisture getter or gas getter is disposed within the cavity at a position different from the connecting hole. A portion of a shielding plate is present between the moisture getter or gas getter and the radiation detection element, and characteristic X-rays from the moisture getter or gas getter are blocked by the shielding plate. As a result, the occurrence of a system peak caused by the moisture getter or gas getter is reduced.

[0022] The radiation detector according to the present invention is characterized by further comprising a cooling unit for cooling the radiation detection element.

[0023] In one aspect of the present invention, a radiation detector includes a cooling unit such as a Peltier element for cooling the radiation detection element. By cooling the radiation detection element, noise is reduced and the accuracy of radiation detection is improved. Even if the radiation detection element is cooled, gases such as water vapor are prevented from being adsorbed to the circuit element.

[0024] In the radiation detector according to the present invention, the circuit element constitutes at least a part of an amplifier circuit that amplifies a signal output from the radiation detection element.

[0025] In one aspect of the present invention, the circuit element constitutes at least a part of an amplifier circuit, and since deterioration of the amplifier circuit is prevented, deterioration of the signal output from the radiation detector is prevented, and a decrease in the accuracy of radiation detection is suppressed.

[0026] A radiation detection apparatus according to the present invention is characterized by comprising the radiation detector according to the present invention and a spectrum generating section that generates a spectrum of radiation detected by the radiation detector.

[0027] The radiation detection device according to the present invention is characterized by comprising an irradiation unit that irradiates a sample with radiation, a radiation detector according to the present invention that detects radiation generated from the sample, a spectrum generation unit that generates a spectrum of the radiation detected by the radiation detector, and a display unit that displays the spectrum generated by the spectrum generation unit.

[0028] In one aspect of the present invention, deterioration of circuit elements included in a radiation detector due to gas adsorption to the circuit elements is prevented. As a result, deterioration in performance of the radiation detector is suppressed. In particular, deterioration in performance of the radiation detector is suppressed even when a windowless radiation detector is used in an ambient pressure or low vacuum environment. [Effects of the Invention]

[0029] According to the present invention, deterioration of the amplifier due to adsorption of water or gas is prevented, and therefore, excellent effects such as suppressing deterioration in the performance of the radiation detector are achieved. [Brief explanation of the drawings]

[0030] [Figure 1] 1 is a schematic perspective view showing an example of the appearance of a radiation detector according to Embodiment 1. FIG. [Figure 2] 1 is a schematic cross-sectional view showing an example of the configuration of a radiation detector according to Embodiment 1. FIG. [Figure 3] FIG. 2 is a block diagram illustrating an example of the functional configuration of the radiation detection apparatus. [Figure 4] FIG. 2 is a schematic cross-sectional view showing a radiation detection element and a collimator. [Figure 5] 2 is a schematic cross-sectional view showing an enlarged portion where the radiation detection element, the substrate, and the shielding plate according to the first embodiment are joined together. FIG. [Figure 6] FIG. 10 is a schematic cross-sectional view showing an example of the configuration of a radiation detector according to a second embodiment. [Figure 7] FIG. 10 is a schematic cross-sectional view showing an example of the configuration of a radiation detector according to a third embodiment. [Figure 8] FIG. 10 is a schematic cross-sectional view showing a first example of the configuration of a radiation detector according to embodiment 4. [Figure 9] FIG. 3 is a schematic perspective view showing a first shielding plate and a second shielding plate. [Figure 10] FIG. 3 is a schematic cross-sectional view showing a first shielding plate and a second shielding plate. [Figure 11] 10 is a schematic cross-sectional view showing a second example of the configuration of the radiation detector according to the fourth embodiment. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0031] The present invention will now be described in detail with reference to the drawings showing embodiments thereof. <Embodiment 1> FIG. 1 is a schematic perspective view showing an example of the appearance of a radiation detector 1 according to the first embodiment. FIG. 2 is a schematic cross-sectional view showing an example of the configuration of the radiation detector 1 according to the first embodiment. FIG. 3 is a block diagram showing an example of the functional configuration of a radiation detection apparatus 10. The radiation detection apparatus 10 is, for example, an X-ray fluorescence analysis apparatus. The radiation detection apparatus 10 includes an irradiation unit 4 that irradiates a sample 6 with radiation such as an electron beam or X-rays, a sample stage 5 on which the sample 6 is placed, and a radiation detector 1. Radiation is irradiated from the irradiation unit 4 to the sample 6, and radiation such as fluorescent X-rays is generated in the sample 6, and the radiation detector 1 detects the radiation generated from the sample 6. In the figure, the radiation is indicated by arrows. The radiation detector 1 outputs a signal proportional to the energy of the detected radiation. Note that the radiation detection apparatus 10 may be configured to hold the sample 6 by a method other than placing it on the sample stage 5.

[0032] The radiation detector 1 is connected to a signal processing unit 2 that processes the output signal and a voltage application unit 34 that applies a voltage required for radiation detection to the radiation detection element 11 included in the radiation detector 1. The signal processing unit 2 detects the wave height of the pulse signal output by the radiation detector 1, thereby detecting a signal value corresponding to the energy of the radiation detected by the radiation detector 1. An analysis unit 32 is connected to the signal processing unit 2. The analysis unit 32 is configured to include a calculation unit that performs calculations and a memory that stores data. The signal processing unit 2, analysis unit 32, voltage application unit 34, and irradiation unit 4 are connected to a control unit 31. The control unit 31 controls the operations of the signal processing unit 2, analysis unit 32, voltage application unit 34, and irradiation unit 4.

[0033] The signal processing unit 2 outputs data indicating the detected signal value to the analysis unit 32. The analysis unit 32 counts the signals of each value based on the data from the signal processing unit 2 and performs processing to generate the relationship between the radiation energy and the count number, i.e., the radiation spectrum. The signal processing unit 2 and the analysis unit 32 correspond to a spectrum generation unit. Furthermore, the analysis unit 32 performs qualitative or quantitative analysis of the elements contained in the sample 6 based on the spectrum. Note that the signal processing unit 2 may generate the radiation spectrum.

[0034] A display unit 33 such as a liquid crystal display is connected to the analysis unit 32. The display unit 33 displays the spectrum generated by the analysis unit 32 and the analysis results by the analysis unit 32. The control unit 31 may be configured to receive operations from a user and control each unit of the radiation detection device 10 in accordance with the received operations. The control unit 31 and the analysis unit 32 may also be configured as a single computer.

[0035] As shown in FIGS. 1 and 2, the radiation detector 1 has a plate-shaped bottom plate portion 18. A cap-shaped cover 13 is fitted on one side of the bottom plate portion 18. The cover 13 has a shape in which a truncated cone is connected to one end of a cylinder, and the other end of the cylinder is joined to the bottom plate portion 18. An opening 131 is formed in the truncated portion at the tip of the cover 13. No window having a window material is provided in the opening 131, and the opening 131 is not blocked by a window material. The cover 13 and the bottom plate portion 18 form a housing for the radiation detector 1. The cover 13 and the bottom plate portion 18 accommodate other parts of the radiation detector 1. Gas can be exchanged between the inside and outside of the cover 13 and the bottom plate portion 18.

[0036] The radiation detection element 11, the collimator 12, the substrate 14, the shielding plate 16, the Peltier element 17, and the cold finger 172 are arranged inside the cover 13. The substrate 14 has a first surface 141 facing the opening 131, and the radiation detection element 11 is arranged on the first surface 141. An intervening material such as an adhesive may be present between the substrate 14 and the radiation detection element 11. The substrate 14 is preferably formed from a material that generates as little radiation as possible when irradiated with radiation. The material of the substrate 14 is, for example, ceramic. For example, the radiation detection element 11 is a silicon drift radiation detection element, and the radiation detector 1 is an SDD (Silicon Drift Detector). For example, the radiation detection element 11 is plate-shaped. The radiation detection element 11 is arranged at a position facing the opening 131. The radiation detection element 11 has an incident surface 110 onto which radiation to be detected is incident, and is arranged so that the incident surface 110 faces the opening 131.

[0037] The collimator 12 is cylindrical with open ends and made of a radiation-shielding material. The collimator 12 is disposed between the radiation detection element 11 and the opening 131. One end of the collimator 12 faces the opening 131, and the other end faces the incident surface 110 of the radiation detection element 11. An adhesive layer 121 made of an insulating adhesive and coating is provided between the collimator 12 and the radiation detection element 11. The collimator 12 is adhered to the incident surface 110 of the radiation detection element 11 via the adhesive layer 121. Radiation mainly passes through the opening 131 and enters the inside of the cover 13, and the collimator 12 blocks a portion of the radiation, while the radiation detection element 11 detects the radiation that was not blocked by the collimator 12.

[0038] The substrate 14 has a second surface 142 located on the back side of the first surface 141. A shielding plate 16 is arranged at a position facing the second surface 142. The shielding plate 16 corresponds to a plate-shaped member. The shielding plate 16 blocks radiation that enters from outside the shielding plate 16 when viewed from the radiation detection element 11. The shielding plate 16 is in contact with the second surface 142. An intermediary material such as an adhesive may be interposed between the shielding plate 16 and the second surface 142.

[0039] The heat absorbing portion of the Peltier element 17 is in thermal contact with the back surface of the shielding plate 16, which is on the back side of the surface that contacts the substrate 14. The Peltier element 17 may be in direct contact with the shielding plate 16, or a thermally conductive material may be interposed between the Peltier element 17 and the shielding plate 16. A waterproof coating material 171 is applied around the area where the Peltier element 17 and the shielding plate 16 are in contact. The waterproof coating material 171 is made of, for example, a waterproof resin. The waterproof coating material 171 prevents water generated by cooling from entering between the Peltier element 17 and the shielding plate 16.

[0040] The heat dissipation portion of the Peltier element 17 is in thermal contact with the cold finger 172. The cold finger 172 includes a flat portion with which the heat dissipation portion of the Peltier element 17 is in thermal contact, and a bolt-shaped portion protruding from the flat portion. The bolt-shaped portion of the cold finger 172 penetrates the bottom plate portion 18 and protrudes from the outer surface of the bottom plate portion 18. The Peltier element 17 may be in direct contact with the cold finger 172, or a thermally conductive material may be interposed between the Peltier element 17 and the cold finger 172. The cold finger 172 is made of a material with high thermal conductivity. The bolt-shaped portion of the cold finger 172 is connected to a heat dissipation portion outside the radiation detector 1. The heat dissipation portion is, for example, a heat sink.

[0041] Heat from the radiation detection element 11 is conducted to the heat absorption portion of the Peltier element 17 through the substrate 14 and the shielding plate 16. The heat is dissipated from the heat dissipation portion of the Peltier element 17 to the outside of the radiation detector 1 through the cold finger 172. In this way, the heat from the radiation detection element 11 is dissipated to the outside of the radiation detector 1, and the radiation detection element 11 is cooled. The Peltier element 17 corresponds to a cooling unit. To efficiently conduct the heat from the radiation detection element 11 to the Peltier element 17, the shielding plate 16 is desirably made of a thermally conductive material with higher thermal conductivity than the substrate 14. For example, the material of the shielding plate 16 is alumina. Alumina has a relatively high thermal conductivity. Furthermore, aluminum contained in alumina has a low excitation efficiency by radiation, and the occurrence of a system peak caused by characteristic X-rays generated from aluminum entering the radiation detection element 11 is reduced. The radiation detector 1 may not have the cold finger 172 and may instead dissipate heat through the bottom plate portion 18.

[0042] As will be described later, an amplifier 151 is provided on the substrate 14. The amplifier 151 corresponds to a circuit element. The amplifier 151 is connected to the radiation detection element 11 via a bonding wire 152. A circuit is also provided on the substrate 14. The amplifier 151 is connected to the circuit. The circuit may include circuit elements other than the amplifier 151.

[0043] The radiation detector 1 further includes a plurality of lead pins 181. The lead pins 181 penetrate the bottom plate portion 18. One end of each lead pin 181 is connected to a circuit provided on the substrate 14 via a bonding wire. Power is supplied to and signals are input and output from the radiation detection element 11 through the lead pins 181.

[0044] The amplifier 151 constitutes at least a part of an amplifier circuit that amplifies a signal output by the radiation detection element 11. For example, other parts of the amplifier circuit are included in the signal processing unit 2. For example, the amplifier 151 is a preamplifier. The radiation detection element 11 outputs a signal proportional to the energy of the detected radiation, and the output signal is input to the amplifier 151 via a bonding wire 152. The amplifier 151 converts and amplifies the signal. The converted and amplified signal is output from the amplifier 151 and output to the outside of the radiation detector 1 via a lead pin 181. In this way, the radiation detector 1 outputs a signal proportional to the energy of the radiation detected by the radiation detection element 11. The output signal is input to the signal processing unit 2. It should be noted that the amplifier 151 may have a function other than that of a preamplifier.

[0045] 4 is a schematic cross-sectional view showing the radiation detection element 11 and the collimator 12. A part of the incident surface 110 of the radiation detection element 11 is covered with the collimator 12 and the adhesive layer 121. The part of the incident surface 110, including the central part thereof, that is not covered with the collimator 12 and the adhesive layer 121 is covered with a light-shielding film 111.

[0046] The radiation detection element 11 has a plate-shaped semiconductor portion 112. The semiconductor portion 112 is made of, for example, n-type Si (silicon). A first electrode 113 is provided on the incident surface 110 of the radiation detection element 11. The first electrode 113 is provided continuously in an area including the central portion of the incident surface 110. The first electrode 113 is provided up to the vicinity of the periphery of the incident surface 110, occupying most of the incident surface 110. The first electrode 113 is connected to the voltage application unit 34. A multiplexed loop-shaped second electrode 114 is provided on the back surface of the radiation detection element 11, which is opposite to the incident surface 110. Furthermore, a signal output electrode 115, which is an electrode that outputs a signal when radiation is detected, is provided at a position surrounded by the multiplexed second electrodes 114. The signal output electrode 115 is connected to the amplifier 151 via a bonding wire 152. Of the multiple second electrodes 114, the second electrode 114 closest to the signal output electrode 115 and the second electrode 114 farthest from the signal output electrode 115 are connected to the voltage application unit .

[0047] The voltage application unit 34 applies a voltage to the multiple second electrodes 114 so that the second electrode 114 closest to the signal output electrode 115 has the highest potential and the second electrode 114 farthest from the signal output electrode 115 has the lowest potential. The radiation detection element 11 is configured to generate a predetermined electrical resistance between adjacent second electrodes 114. For example, an electrical resistance channel connecting two second electrodes 114 is formed by adjusting the chemical composition of a portion of the semiconductor portion 112 located between adjacent second electrodes 114. That is, the multiple second electrodes 114 are connected in a daisy chain manner via electrical resistance. When a voltage is applied from the voltage application unit 34 to such multiple second electrodes 114, the potential of each second electrode 114 monotonically increases from the second electrode 114 farthest from the signal output electrode 115 to the second electrode 114 closest to the signal output electrode 115. The multiple second electrodes 114 may include a pair of adjacent second electrodes 114 with the same potential.

[0048] The potentials of the multiple second electrodes 114 generate an electric field within the semiconductor portion 112 such that the potential is higher the closer to the signal output electrode 115 and lower the farther from the signal output electrode 115. Furthermore, the voltage application unit 34 applies a voltage to the first electrode 113 so that the potential of the first electrode 113 is lower than that of the second electrode 114, which has the highest potential. In this way, a voltage is applied to the semiconductor portion 112 between the first electrode 113 and the second electrode 114, and an electric field is generated within the semiconductor portion 112 such that the potential is higher the closer to the signal output electrode 115.

[0049] The radiation detector 1 is disposed such that the opening 131 faces the mounting surface of the sample stage 5. Radiation from the sample 6 passes through the opening 131 and enters the radiation detection element 11. The radiation is absorbed by the semiconductor portion 112, generating an amount of charge corresponding to the energy of the absorbed radiation. The generated charges are electrons and holes. The generated charges move due to the electric field inside the semiconductor portion 112, and one type of charge flows into the signal output electrode 115. In this embodiment, when the signal output electrode 115 is n-type, electrons generated by the incidence of radiation move and flow into the signal output electrode 115. The charges that flow into the signal output electrode 115 are output as a current signal and input to the amplifier 151. As described above, the amplifier 151 converts and amplifies the signal, and the converted and amplified signal is output from the amplifier 151, allowing the radiation detector 1 to output a signal proportional to the energy of the radiation.

[0050] FIG. 5 is a schematic cross-sectional view enlarging a portion where the radiation detection element 11, the substrate 14, and the shielding plate 16 according to the first embodiment are joined. In FIG. 5, portions of the radiation detector 1 other than the radiation detection element 11, the substrate 14, and the shielding plate 16 are omitted, and the structure of the radiation detection element 11 is omitted except for the signal output electrode 115. A through-hole 144 is formed in the substrate 14, penetrating between the first surface 141 and the second surface 142. One end of the through-hole 144 opens to the first surface 141, and the other end of the through-hole 144 opens to the second surface 142. The shape of the through-hole 144 is significantly expanded midway from one end to the other end. The size of the other end of the through-hole 144 is larger than the size of the one end of the through-hole 144. The shape of the through-hole 144 is substantially constant from one end to the expanded portion, and is substantially constant from the expanded portion to the other end. The shapes of one end and the other end of the through-hole 144 may be circular or polygonal. The shapes of one end and the other end of the through-hole 144 may be the same or different.

[0051] A planar third surface 143 is formed on the inner surface of the through hole 144. The third surface 143 is approximately parallel to the first surface 141 and the second surface 142, is located on the back side of the first surface 141, and faces the shielding plate 16. The amplifier 151 is mounted on the third surface 143.

[0052] Both ends of the through hole 144 are blocked by the radiation detection element 11 and the shielding plate 16. The radiation detection element 11 is disposed in a position that blocks one end of the through hole 144. The radiation detection element 11 is also in close contact with the first surface 141 directly or via an intermediary, and seals one end of the through hole 144. The shielding plate 16 faces the second surface 142 and the third surface 143 of the substrate 14 and is disposed in a position that blocks the other end of the through hole 144. The shielding plate 16 is in close contact with the second surface 142 directly or via an intermediary, and seals the other end of the through hole 144.

[0053] The space inside the through-hole 144 with both ends blocked forms a sealed closed space 15. In conventional technology, the space inside the through-hole provided in the substrate is connected to an opening provided on the side of the substrate, and no closed space is formed. In this embodiment, the space inside the through-hole 144 with both ends blocked is not connected to the opening. There is no gas exchange between the inside and outside of the closed space 15. The closed space 15 is either depressurized or filled with an inert gas such as nitrogen gas or a dry gas such as dried carbon dioxide. The closed space 15 is not filled with a solid or liquid substance such as resin. For example, the closed space 15 is created by joining the radiation detection element 11 and the shielding plate 16 to the substrate 14 in a depressurized space or a space filled with an inert gas or dry gas. Because the radiation detection element 11, the substrate 14, and the shielding plate 16 are located inside the cover 13, the closed space 15 is also located inside the cover 13. The incident surface 110 of the radiation detection element 11 does not face the closed space 15, but a part of the back surface of the radiation detection element 11 faces the closed space 15.

[0054] The third surface 143 exists inside the closed space 15. Therefore, the amplifier 151 is disposed inside the closed space 15. Furthermore, the radiation detection element 11 is disposed at a position where the signal output electrode 115 faces one end of the through hole 144. Therefore, the signal output electrode 115 faces the closed space 15. The bonding wire 152 is disposed inside the closed space 15, and has one end connected to the signal output electrode 115 and the other end connected to the amplifier 151, thereby connecting the amplifier 151 to the radiation detection element 11.

[0055] The radiation detector 1 further includes a moisture getter 153 that captures moisture within the enclosed space 15. The moisture getter 153 is disposed in a position where it comes into contact with the gas within the enclosed space 15. The moisture getter 153 captures moisture contained in the gas within the enclosed space 15 by adsorbing water vapor or absorbing water. For example, the moisture getter 153 is a coating-type desiccant that is applied to the surface of the shielding plate 16 facing the enclosed space 15. The moisture getter 153 is applied to a portion of the surface of the shielding plate 16, and the shielding plate 16 is disposed in a position such that the portion of the shielding plate 16 to which the moisture getter 153 is applied faces the other end of the through-hole 144. The moisture getter 153 may be in a form other than a coating type. For example, the moisture getter 153 may be a solid substance disposed within the enclosed space 15.

[0056] Furthermore, the radiation detector 1 may include a gas getter 154 that captures gas inside the closed space 15, instead of or in addition to the moisture getter 153. The gas getter 154 is disposed in a position where it comes into contact with the gas inside the closed space 15. The gas getter 154 captures the gas inside the closed space 15 by gas adsorption. The gas getter 154 has the property of capturing gases other than water vapor. The gas captured by the gas getter 154 is, for example, carbon dioxide. The gas getter 154 may have the property of capturing multiple types of gases, or may also have the property of capturing water vapor. The gas getter 154 is applied to a portion of the surface of the shielding plate 16, and the shielding plate 16 is disposed in a position such that the portion of the shielding plate 16 to which the gas getter 154 is applied faces the other end of the through-hole 144. The gas getter 154 may be in a form other than a coating type. For example, the gas getter 154 may be a solid material disposed inside the enclosed space 15 .

[0057] As described above, the radiation detector 1 includes the closed space 15, and the amplifier 151 is disposed inside the closed space 15. When the radiation detector 1 is used in a normal pressure or low vacuum environment, gases such as water vapor can enter the inside of the cover 13 through the opening 131. However, although the closed space 15 exists inside the cover 13, it is sealed, and therefore gases cannot enter the closed space 15. Therefore, even when the radiation detector 1 is used in a normal pressure or low vacuum environment, gases that enter from outside the radiation detector 1 will not be adsorbed by the amplifier 151. Furthermore, the inside of the closed space 15 is depressurized or filled with an inert gas or dry gas. Therefore, water or gas present inside the closed space 15 is unlikely to be adsorbed by the amplifier 151. Even if an inert gas is adsorbed by the amplifier 151, a reaction that deteriorates the amplifier 151 is unlikely to occur. Therefore, deterioration of the amplifier 151 due to adsorption of water or gas is prevented, and a decrease in the performance of the radiation detector 1 is suppressed. Since deterioration of the amplifier 151 is prevented, deterioration of the signal output from the radiation detector 1 is prevented, and a decrease in the accuracy of radiation detection is suppressed.

[0058] Because the signal output electrode 115 faces the closed space 15, it is unlikely that water or gas will be adsorbed to the signal output electrode 115. Even if an inert gas is adsorbed to the signal output electrode 115, it is unlikely that a reaction that would deteriorate the signal output electrode 115 will occur. This prevents the signal output electrode 115 from deteriorating and causing a decrease in the performance of the radiation detection element 11, and suppresses a decrease in the performance of the radiation detector 1.

[0059] Conventionally, radiation detectors with openings that are not blocked by a window material have the problem of faster deterioration than radiation detectors with windows that have a window material. In the development of radiation detectors with unblocked openings, it was discovered that the main cause of deterioration is gas adhering to the amplifier and signal output electrode. In this embodiment, by forming the space around the amplifier 151 and the signal output electrode 115 as a closed space 15, water or gas is prevented as much as possible from adsorbing to the amplifier 151 and the signal output electrode 115. The occurrence of the main cause of deterioration of the radiation detector 1 is prevented, and a decrease in the performance of the radiation detector 1 is suppressed.

[0060] The closed space 15 is not filled with a solid or liquid substance such as resin. If the closed space 15 were filled with a solid or liquid substance, the capacitance of the radiation detection element 11 would increase, deteriorating the signal-to-noise ratio (SNR) of the signal output by the radiation detection element 11. In this embodiment, since the closed space 15 is not filled with a solid or liquid substance, the capacitance of the radiation detection element 11 is not increased by the substance filling the closed space 15, and the SNR is not deteriorated.

[0061] By disposing the moisture getter 153 inside the closed space 15, water present inside the closed space 15 is taken in by the moisture getter 153. This more effectively prevents the water from being adsorbed to the amplifier 151 and the signal output electrode 115. Also, by disposing the gas getter 154 inside the closed space 15, the gas present inside the closed space 15 is taken in by the gas getter 154. This more effectively prevents the gas present inside the closed space 15 from being adsorbed to the amplifier 151 and the signal output electrode 115. This more effectively prevents the deterioration of the amplifier 151 and the signal output electrode 115 due to adsorption of water or gas, and suppresses a decrease in the performance of the radiation detector 1.

[0062] In this embodiment, the radiation detector 1 includes a Peltier element 17, which cools the radiation detection element 11. Cooling the radiation detection element 11 reduces noise and improves the accuracy of radiation detection. Cooling the radiation detection element 11 makes it easier for gases such as water vapor to be adsorbed to the amplifier 151. However, in this embodiment, the amplifier 151 is disposed inside the closed space 15, which prevents gases from being adsorbed to the amplifier 151. This improves the accuracy of radiation detection while suppressing degradation in the performance of the radiation detector 1.

[0063] Furthermore, because the opening 131 is not blocked by a window material, radiation incident on the radiation detection element 11 does not need to pass through a window material. This allows the radiation detector 1 to detect radiation that is too low in energy to pass through a window material. For example, by detecting low-energy fluorescent X-rays, it becomes possible to detect elements that emit low-energy fluorescent X-rays. In this embodiment, while enabling the detection of low-energy radiation, degradation in the performance of the radiation detector 1 can be suppressed. Even when the radiation detector 1 is used in an ambient pressure or low-vacuum environment, degradation of the amplifier 151 due to adsorption of water or gas is prevented, and degradation in the performance of the radiation detector 1 is suppressed.

[0064] In this embodiment, the radiation detector 1 is provided with the Peltier element 17 as a cooling unit, but the radiation detector 1 may be provided with a cooling unit other than the Peltier element 17. Alternatively, the radiation detector 1 may be provided with no cooling unit.

[0065] <Embodiment 2> In the second embodiment, an example of a configuration in which the radiation detector 1 does not include a cooling unit is shown. FIG. 6 is a schematic cross-sectional view showing an example of the configuration of the radiation detector 1 according to the second embodiment. The configuration of the radiation detection device 10 other than the radiation detector 1 is the same as that of the first embodiment. The radiation detection element 11 can operate without being cooled by a cooling unit. The radiation detector 1 does not include a shielding plate 16, a Peltier element 17, or a cold finger 172.

[0066] The second surface 142 of the substrate 14 faces the bottom plate portion 18. Both ends of a through hole 144 provided in the substrate 14 are blocked by the radiation detection element 11 and the bottom plate portion 18. The radiation detection element 11 is in close contact with the first surface 141 directly or via an intermediary, and seals one end of the through hole 144. The bottom plate portion 18 blocks the other end of the through hole 144. The bottom plate portion 18 is in close contact with the second surface 142 directly or via an intermediary, and seals the other end of the through hole 144. In the second embodiment, the bottom plate portion 18 corresponds to a plate-like member. Heat from the radiation detection element 11 is conducted to the bottom plate portion 18 through the substrate 14 and is released from the bottom plate portion 18 to the outside of the radiation detector 1.

[0067] The space inside the through-hole 144 with both ends closed forms a sealed closed space 15. That is, the radiation detector 1 also has the closed space 15 in the second embodiment. The incident surface 110 of the radiation detection element 11 does not face the closed space 15. The inside of the closed space 15 is reduced in pressure or filled with an inert gas or a dry gas. The amplifier 151 is disposed inside the closed space 15, and the signal output electrode 115 faces the closed space 15. In addition, a moisture getter 153 and / or a gas getter 154 is disposed at a position where it comes into contact with the gas inside the closed space 15. The moisture getter 153 and / or the gas getter 154 is applied to a portion of the surface of the bottom plate portion 18, and the substrate 14 is disposed relative to the bottom plate portion 18 so that the portion of the bottom plate portion 18 to which the moisture getter 153 and / or the gas getter 154 is applied faces the other end of the through-hole 144. The moisture getter 153 and / or the gas getter 154 may be in a form other than the coating type.

[0068] In the second embodiment, similar to the first embodiment, even when the radiation detector 1 is used in an environment of normal pressure or low vacuum, water or gas is unlikely to be adsorbed to the amplifier 151 or the signal output electrode 115. Deterioration of the amplifier 151 or the signal output electrode 115 due to adsorption of water or gas is prevented, and a decrease in the performance of the radiation detector 1 is suppressed, thereby suppressing a decrease in the accuracy of radiation detection.

[0069] <Embodiment 3> 7 is a schematic cross-sectional view showing an example of the configuration of a radiation detector 1 according to embodiment 3. The configuration of the radiation detection device 10 other than the radiation detector 1 is the same as that of embodiment 1. In embodiment 3 as well, the radiation detector 1 does not include a cooling unit such as a Peltier element 17 or a cold finger 172. The radiation detection element 11 can operate without being cooled by a cooling unit.

[0070] The radiation detector 1 includes a shielding plate 16. A connector 182 is connected to a portion of the second surface 142 of the substrate 14. The connector 182 is disposed between the portion of the second surface 142 and the bottom plate portion 18, and is connected to the bottom plate portion 18. The connector 182 includes wiring, which connects a circuit provided on the substrate 14 to a circuit external to the radiation detector 1. Power is supplied to the radiation detection element 11 and signals are input and output through the connector 182.

[0071] The radiation detection element 11 is in close contact with the first surface 141 of the substrate 14 directly or via an intermediary, and seals one end of the through hole 144. The radiation detector 1 is provided with a closure plate 161 that closes the other end of the through hole 144. The closure plate 161 is disposed in a position facing a portion of the second surface 142 to which the connector 182 is not connected. The closure plate 161 is in close contact with the second surface 142 directly or via an intermediary, and seals the other end of the through hole 144. The closure plate 161 corresponds to a plate-shaped member. The radiation detector 1 is provided with a shielding plate 16. In the third embodiment, the shielding plate 16 does not correspond to a plate-shaped member. The shielding plate 16 is disposed in a position facing the closure plate 161. There is a gap between the closure plate 161 and the shielding plate 16. The shielding plate 16 blocks radiation that enters from outside the shielding plate 16 when viewed from the radiation detection element 11.

[0072] The space inside the through-hole 144 with both ends closed forms a sealed closed space 15. That is, the radiation detector 1 also includes the closed space 15 in the third embodiment. The incident surface 110 of the radiation detection element 11 does not face the closed space 15. The inside of the closed space 15 is depressurized or filled with an inert gas or a dry gas. The amplifier 151 is disposed inside the closed space 15, and the signal output electrode 115 faces the closed space 15. In addition, a moisture getter 153 and / or a gas getter 154 is disposed at a position where it comes into contact with the gas inside the closed space 15. The moisture getter 153 and / or the gas getter 154 is applied to a portion of the closing plate 161, and the closing plate 161 is disposed so that the portion of the closing plate 161 to which the moisture getter 153 and / or the gas getter 154 is applied faces the other end of the through-hole 144. The moisture getter 153 and / or the gas getter 154 may be in a form other than a coating type.

[0073] In the third embodiment, similar to the first embodiment, even when the radiation detector 1 is used in an environment of normal pressure or low vacuum, water or gas is unlikely to be adsorbed to the amplifier 151 or the signal output electrode 115. Deterioration of the amplifier 151 or the signal output electrode 115 due to adsorption of water or gas is prevented, and a decrease in the performance of the radiation detector 1 is suppressed, thereby suppressing a decrease in the accuracy of radiation detection.

[0074] <Embodiment 4> FIG. 8 is a schematic cross-sectional view showing a first example of the configuration of the radiation detector 1 according to embodiment 4. The configuration of the radiation detection device 10 other than the radiation detector 1 is the same as in embodiment 1. The configurations of the bottom plate portion 18 and the cover 13 are the same as in embodiment 1, and an opening 131 is formed in the truncated portion of the tip of the cover 13. The configurations of the radiation detection element 11 and the collimator 12 are the same as in embodiment 1. The radiation detection element 11 is arranged on a first surface 141 of the substrate 14, and a shielding plate 7 is arranged at a position facing the second surface 142. The shielding plate 7 corresponds to a plate-shaped member. An intervening material such as an adhesive may be interposed between the shielding plate 7 and the second surface 142.

[0075] The heat absorption portion of the Peltier element 17 is in thermal contact with the back surface of the shielding plate 7, which is on the back side of the surface that contacts the substrate 14. The configurations of the Peltier element 17, waterproof coating material 171, cold finger 172, and lead pin 181 are the same as those in embodiment 1. Heat from the radiation detection element 11 is conducted to the heat absorption portion of the Peltier element 17 through the substrate 14 and the shielding plate 7, and is then released from the heat release portion of the Peltier element 17 to the outside of the radiation detector 1 through the cold finger 172.

[0076] As in the first embodiment, a through hole 144 is formed in the substrate 14, and the substrate 14 has a first surface 141, a second surface 142, and a third surface 143. An amplifier 151 is mounted on the third surface 143. In addition, circuit elements other than the amplifier 151 are also mounted on the third surface 143. All of the circuit elements included in the circuit provided on the substrate 14 may be mounted on the third surface 143. The amplifier 151 is connected to a signal output electrode of the radiation detection element 11 via a bonding wire 152.

[0077] One end of the through-hole 144 is sealed by the radiation detection element 11, and the other end of the through-hole 144 is blocked by a shielding plate 7. The shielding plate 7 includes a first shielding plate 71, a second shielding plate 72, and a third shielding plate 73. The first shielding plate 71, the second shielding plate 72, and the third shielding plate 73 are plate-shaped. The first shielding plate 71 is disposed at a position facing the second surface 142 of the substrate 14, and the first shielding plate 71 is in contact with the second surface 142. An intervening material such as an adhesive may be interposed between the first shielding plate 71 and the second surface 142. The first shielding plate 71, the second shielding plate 72, and the third shielding plate 73 are joined together in an overlapping manner. . The heat absorbing portion of the Peltier element 17 is in thermal contact with the third shielding plate 73. The Peltier element 17 may be in direct contact with the third shielding plate 73, or a thermally conductive material may be interposed between the Peltier element 17 and the third shielding plate 73. The shielding plate 7 is made of a material with a relatively high thermal conductivity. For example, the first shielding plate 71 and the second shielding plate 72 are made of alumina, and the third shielding plate 73 is made of Kovar.

[0078] FIG. 9 is a schematic perspective view showing the first shielding plate 71 and the second shielding plate 72, and FIG. 10 is a schematic cross-sectional view showing the first shielding plate 71 and the second shielding plate 72. The first shielding plate 71 is shaped like a tray overall and has a top surface 713 corresponding to the upper surface of the edge of the tray, and a recessed surface 714 that is surrounded by the top surface 713 in a plan view and is recessed further than the top surface 713. The recessed surface 714 is wider than the top surface 713. The first shielding plate 71 has a bottom surface 712 on the back side of the top surface 713 and the recessed surface 714. The thickness from the bottom surface 712 to the recessed surface 714 is thinner than the thickness from the bottom surface 712 to the top surface 713. A connecting hole 711 that is a hole that penetrates from the bottom surface 712 to the recessed surface 714 is formed in the first shielding plate 71. 9 shows an example in which three connecting holes 711 are formed in the first shielding plate 71. The number of connecting holes 711 may be two or less, or may be four or more.

[0079] The second shielding plate 72 has the same shape as the first shielding plate 71. That is, the second shielding plate 72 has a connecting hole 721, a bottom surface 722, a top surface 723, and a recessed surface 724. By making the first shielding plate 71 and the second shielding plate 72 the same shape, the manufacture of the shielding plates 7 becomes efficient. Although FIG. 9 shows an example in which the first shielding plate 71 and the second shielding plate 72 are hexagonal in plan view, the first shielding plate 71 and the second shielding plate 72 may have other shapes. The first shielding plate 71 and the second shielding plate 72 are stacked such that the top surface 713 and the top surface 723 face each other. The top surface 713 and the top surface 723 are in close contact with each other and bonded together. An intermediary material such as an adhesive may be interposed between the first shielding plate 71 and the second shielding plate 72. The recessed surface 714 and the recessed surface 724 are not in contact with each other, and there is a space between the recessed surface 714 and the recessed surface 724. The space between the recessed surface 714 and the recessed surface 724 becomes the cavity 74.

[0080] The first shielding plate 71 and the second shielding plate 72 are overlapped so that the connecting hole 711 and the connecting hole 721 do not face each other. In other words, the first shielding plate 71 and the second shielding plate 72 are overlapped so that the connecting hole 711 and the connecting hole 721 do not overlap in a plan view, and the connecting hole 711 and the connecting hole 721 are located at different positions in a plan view.

[0081] The moisture getter 153 or gas getter 154 is injected into the cavity 74 through the connecting hole 721. When the moisture getter 153 or gas getter 154 is injected, an amount sufficient to fill the cavity 74 is not injected. Therefore, the moisture getter 153 or gas getter 154 does not reach the position of the connecting hole 711. In this way, the moisture getter 153 or gas getter 154 is disposed at a position different from the connecting hole 711 in the cavity 74. The third shielding plate 73 is overlapped and bonded to the second shielding plate 72 so as to be in close contact with the bottom surface 722. An intermediary material such as an adhesive may be interposed between the second shielding plate 72 and the third shielding plate 73. The third shielding plate 73 seals the connecting hole 721. In this manner, the shielding plate 7 is configured.

[0082] The shielding plate 7 is in close contact with the second surface 142 of the substrate 14. The diameter of the connecting hole 711 is smaller than the diameter of the through hole 144 on the second surface 142. The connecting hole 711 is arranged to face the other end of the through hole 144. A space 145 inside the through hole 144 is connected to a cavity 74 inside the shielding plate 7 via the connecting hole 711. The space 145 and the cavity 74 connected to the space 145 via the connecting hole 711 form a closed space 15. One end of the through hole 144 is sealed by the radiation detection element 11, and the connecting hole 721 is sealed by the third shielding plate 73, so that the closed space 15 is sealed. The closed space 15 is either decompressed or filled with an inert gas such as nitrogen gas or a dry gas such as dried carbon dioxide. Circuit elements such as an amplifier 151, as well as a moisture getter 153 or a gas getter 154, are also arranged within the closed space 15.

[0083] In the fourth embodiment, as in the first embodiment, the amplifier 151 is disposed in the closed space 15, and the signal output electrode 115 of the radiation detection element 11 faces the closed space 15. For this reason, even when the radiation detector 1 is used in an environment of normal pressure or low vacuum, it is unlikely that water or gas will be adsorbed to the amplifier 151 or the signal output electrode 115. Deterioration of the amplifier 151 or the signal output electrode 115 due to adsorption of water or gas is prevented, and deterioration in the performance of the radiation detector 1 is suppressed, thereby suppressing deterioration in the accuracy of radiation detection.

[0084] Furthermore, since the moisture getter 153 or the gas getter 154 is disposed at a position different from the connecting hole 711, a part of the shielding plate 7 is present between the moisture getter 153 or the gas getter 154 and the radiation detection element 11. Therefore, even if characteristic X-rays are generated from the moisture getter 153 or the gas getter 154, these characteristic X-rays are blocked by the shielding plate 7 and are unlikely to be incident on the radiation detection element 11. Therefore, the occurrence of a system peak caused by the characteristic X-rays generated from the moisture getter 153 or the gas getter 154 being incident on the radiation detection element 11 is reduced. This further suppresses a decrease in the accuracy of radiation detection.

[0085] FIG. 11 is a schematic cross-sectional view showing a second example of the configuration of the radiation detector 1 according to the fourth embodiment. As in the second embodiment, the radiation detection element 11 can operate without being cooled by a cooling unit. The radiation detector 1 does not include a cooling unit such as a Peltier element 17 or a cold finger 172. The third shielding plate 73 included in the shielding plate 7 is in close contact with the bottom plate portion 18 directly or via an intervening object. Heat from the radiation detection element 11 is conducted to the bottom plate portion 18 through the substrate 14 and the shielding plate 7 and is released from the bottom plate portion 18 to the outside of the radiation detector 1. Note that the shielding plate 7 may not include the third shielding plate 73, and the connecting hole 721 may be blocked by the bottom plate portion 18.

[0086] 11, even when the radiation detector 1 is used in an environment of normal pressure or low vacuum, it is difficult for water or gas to be adsorbed to the amplifier 151 or the signal output electrode 115. Deterioration of the amplifier 151 or the signal output electrode 115 due to adsorption of water or gas is prevented. Furthermore, it is difficult for characteristic X-rays generated from the moisture getter 153 or the gas getter 154 to be incident on the radiation detection element 11, and the occurrence of a system peak due to the moisture getter 153 or the gas getter 154 is reduced. Therefore, a decrease in the accuracy of radiation detection is suppressed.

[0087] In the first to fourth embodiments, the radiation detector 1 includes a housing, but the radiation detector 1 may also include no housing. For example, the radiation detector 1 may include no cover 13. The configuration of the radiation detector 1 other than the housing is the same as in the first to fourth embodiments. In this embodiment, the closed space 15 is also disposed at a position that does not face the incident surface 110 of the radiation detection element 11. In this embodiment, water or gas is unlikely to be adsorbed to the amplifier 151 or the signal output electrode 115, and deterioration of the amplifier 151 or the signal output electrode 115 due to adsorption of water or gas is prevented.

[0088] In the first to fourth embodiments, the radiation detector 1 is provided with the amplifier 151 inside the closed space 15. The radiation detector 1 may be provided with a circuit element other than the amplifier 151 inside the closed space 15 in addition to or instead of the amplifier 151.

[0089] In the first to fourth embodiments, the radiation detection element 11 is a silicon drift radiation detection element, but the radiation detection element 11 may be an element other than a silicon drift radiation detection element as long as it is a semiconductor element. Therefore, the radiation detector 1 may be a radiation detector other than an SDD. In the first to fourth embodiments, the sample 6 is irradiated with radiation and radiation generated from the sample 6 is detected, but the radiation detection device 10 may be configured to detect radiation that has passed through or been reflected by the sample 6. The radiation detection device 10 may be configured to scan the sample 6 with radiation by changing the direction of the radiation. The radiation detection device 10 may be configured not to include the irradiation unit 4, the sample stage 5, the analysis unit 32, or the display unit 33.

[0090] The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims. In other words, embodiments obtained by combining technical means modified appropriately within the scope of the claims are also included in the technical scope of the present invention. [Explanation of symbols]

[0091] 1. Radiation detector 10 Radiation detection equipment 11 Radiation detection element 110 Incidence plane 115 signal output electrode 12 Collimator 13 Cover (housing) 131 Opening 14 PCB 141 Page 1 142 2nd page 143 Page 3 144 Through Hole 15 Confined Spaces 151 Amplifier (circuit element) 153 Moisture Getter 154 Gas Getter 16, 7 Shielding plate (plate-shaped member) 161 Closure plate (plate-shaped member) 17 Peltier element (cooling part) 18 Bottom plate (housing) 2. Signal Processing Section (Spectrum generation section) 31 Control Unit 32 Analysis Department (Spectrum generation section) 33 Display section 4 Irradiation unit 5 Sample stage 6. Samples 711 Connection hole 74 Hollow

Claims

1. A radiation detector including a radiation detection element, a circuit element, and a housing that accommodates the radiation detection element and the circuit element, With enclosed space, the housing has an unobstructed opening; The closed space is disposed inside the housing, the circuit element is disposed inside the closed space; The closed space is decompressed or filled with an inert gas or dry gas. A radiation detector comprising:

2. The radiation detection element is disposed at a position facing the opening.

2. The radiation detector according to claim 1,

3. A radiation detector including a radiation detection element having an incident surface onto which radiation is incident, and a circuit element, a closed space arranged at a position where the incident surface does not face, the circuit element is disposed inside the closed space; The closed space is decompressed or filled with an inert gas or dry gas. A radiation detector comprising:

4. the radiation detection element has an electrode connected to the circuit element; The electrode faces the closed space.

4. The radiation detector according to claim 1, wherein:

5. Further comprising a moisture getter that captures moisture inside the closed space.

5. The radiation detector according to claim 1, wherein:

6. Further comprising a gas getter that captures gas inside the closed space.

6. The radiation detector according to claim 1, wherein:

7. a substrate having a first surface and a second surface located on the back side of the first surface; Further comprising a plate-shaped member, the substrate has a through hole penetrating between the first surface and the second surface, the radiation detection element is disposed on the first surface and closes one end of the through hole; the plate-like member is disposed opposite the second surface and closes the other end of the through hole, The closed space is the space inside the through-hole, both ends of which are closed by the radiation detection element and the plate-like member.

7. The radiation detector according to claim 1, wherein:

8. a substrate having a first surface and a second surface located on the back side of the first surface; Further comprising a plate-like member having a cavity therein, the substrate has a through hole penetrating between the first surface and the second surface, the radiation detection element is disposed on the first surface and closes one end of the through hole; the plate-like member is disposed opposite the second surface and closes the other end of the through hole, the plate-like member has, in a portion facing the second surface, a connecting hole having a diameter smaller than that of the through hole, connecting the internal space of the through hole and the cavity; the closed space includes an internal space of the through hole, both ends of which are closed by the radiation detection element and the plate-like member, and the cavity connected to the internal space via the connecting hole, A moisture getter that takes in moisture inside the closed space or a gas getter that takes in gas inside the closed space is disposed at a position different from the connecting hole inside the cavity.

5. The radiation detector according to claim 1, wherein:

9. Further comprising a cooling unit for cooling the radiation detection element.

9. The radiation detector according to claim 1, wherein:

10. The circuit element constitutes at least a part of an amplifier circuit that amplifies a signal output from the radiation detection element.

10. The radiation detector according to claim 1, wherein:

11. A radiation detector according to any one of claims 1 to 10; a spectrum generating unit that generates a spectrum of the radiation detected by the radiation detector; A radiation detection device comprising:

12. an irradiation unit that irradiates radiation onto the sample; a radiation detector according to any one of claims 1 to 10, which detects radiation generated from the sample; a spectrum generating unit that generates a spectrum of the radiation detected by the radiation detector; a display unit that displays the spectrum generated by the spectrum generation unit; A radiation detection device comprising:

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