Infrared Raman Microscope

Abstract

To provide an infrared Raman microscope with which it is easy to specify a measurement position when conducting infrared spectroscopic analysis and Raman spectroscopic analysis while switching analysis between these.SOLUTION: Provided is an infrared Raman microscope with which it is possible to conduct infrared spectroscopic analysis and Raman spectroscopic analysis on a sample S on a stage 14 while switching analysis between these, the microscope comprising an infrared light detection system 30, a Raman light detection system 22, a display unit 42, a display switching processing unit 120, and storage processing units 112, 116. The infrared light detection system 30 and the Raman light detection system 22 capture a visible image 52 with different magnifications. The display unit 42 causes the visible images 52 of the sample S to be displayed in a display region 50 in association with the coordinates on the stage 14. The display switching processing unit 120 switches between the visible images 52 to be displayed in the same image display region 50. When a measurement position 84 for infrared spectroscopic analysis or Raman spectroscopic analysis is specified in the display region 50, the storage processing units 112, 116 store the coordinate points on the stage 14 that correspond to the measurement position 84.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to an infrared Raman microscope that can switch between infrared spectroscopic analysis and Raman spectroscopic analysis of a sample placed on a stage. [Background technology]

[0002] Infrared spectroscopy and Raman spectroscopy are known as analytical methods that involve irradiating a sample with light to perform analysis (see, for example, Patent Document 1 below). In infrared spectroscopy, an infrared spectrum is obtained by irradiating a measurement position on the sample with infrared light and measuring the absorption of light at each wavelength (wave number). On the other hand, in Raman spectroscopy, a Raman spectrum is obtained by irradiating a measurement position on the sample with light of a specific wavelength and measuring the scattered light (Raman scattered light) emitted from the sample.

[0003] Both infrared and Raman spectra are vibrational spectra based on molecular vibrations. Molecular vibrations include vibrational modes that appear as peaks on the spectrum and vibrational modes that do not appear as peaks. The way peaks appear differs between infrared spectroscopy, which uses absorption, and Raman spectroscopy, which uses scattering. Therefore, analysis using both infrared and Raman spectra makes it possible to identify a wider variety of substances. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-13095 Summary of the Invention [Problem to be solved by the invention]

[0005] The operator must specify the measurement position of the sample when performing infrared spectroscopy and when performing Raman spectroscopy. By matching the measurement position of the sample in infrared spectroscopy and the measurement position of the sample in Raman spectroscopy, it is possible to analyze a specific measurement position in detail. However, when switching between infrared spectroscopy and Raman spectroscopy, the task of adjusting the measurement position to the same for each is cumbersome.

[0006] In particular, when the visible image of the sample captured by the infrared imaging element during infrared spectroscopic analysis and the visible image of the sample captured by the Raman imaging element during Raman spectroscopic analysis are at different magnifications, the magnifications of the captured visible images may need to be adjusted before specifying the measurement positions, which makes the task of specifying the measurement positions even more complicated.

[0007] The present invention has been made in view of the above circumstances, and has an object to provide an infrared Raman microscope that allows easy specification of a measurement position when switching between infrared spectroscopic analysis and Raman spectroscopic analysis. [Means for solving the problem]

[0008] A first aspect of the present invention is an infrared Raman microscope capable of switching between infrared spectroscopy and Raman spectroscopy on a sample on a stage, comprising an infrared light detection system, a Raman light detection system, a display unit, a display switching processor, and a memory processor. The infrared light detection system includes an infrared light source, an infrared spectrometer that receives reflected light from a sample irradiated with light from the infrared light source, and an infrared imaging element that captures a visible image of the sample on the stage. The Raman light detection system includes a laser light source, a Raman spectrometer that receives Raman scattered light from the sample irradiated with light from the laser light source, and a Raman imaging element that captures a visible image of the sample on the stage at a magnification different from that of the infrared imaging element. The display unit displays the visible image of the sample in a display area in association with coordinates on the stage. The display switching processor switches between displaying the visible image captured by the infrared imaging element and the visible image captured by the Raman imaging element in the same display area. When a measurement position for infrared spectroscopy or Raman spectroscopy is designated on the display area, the storage processing unit stores a coordinate point on the stage corresponding to the measurement position. [Effects of the Invention]

[0009] According to the present invention, it is easy to specify the measurement position when switching between infrared spectroscopy and Raman spectroscopy. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic diagram illustrating an example of the configuration of an infrared Raman microscope. [Figure 2] FIG. 1 is a schematic diagram illustrating an example of the configuration of an infrared Raman microscope. [Figure 3] FIG. 2 is a block diagram showing an example of the electrical configuration of an infrared Raman microscope. [Figure 4] FIG. 10 is a diagram for explaining a mode for displaying a visible image of a sample. [Figure 5] 10A and 10B are diagrams for explaining a manner in which a visible image of a sample is associated with stage coordinates. [Figure 6]FIG. 10 is a schematic diagram illustrating an example of a position designation screen. [Figure 7] FIG. 2 is a functional block diagram showing a specific example of the electrical configuration of the infrared Raman microscope. DETAILED DESCRIPTION OF THE INVENTION

[0011] 1. Schematic configuration of infrared Raman microscope 1 and 2 are schematic diagrams showing an example of the configuration of an infrared Raman microscope 10. The infrared Raman microscope 10 in this embodiment is a microscope that can switch between Raman spectroscopic analysis and infrared spectroscopic analysis of a sample S on a stage 14.

[0012] Also, FIG. 1 shows the state of the infrared Raman microscope 10 when performing Raman spectroscopic analysis (Raman analysis state), and FIG. 2 shows the state of the infrared Raman microscope 10 when performing infrared spectroscopic analysis (infrared analysis state).

[0013] The infrared Raman microscope 10 includes a plate 12, a stage 14, a drive unit 16, an objective optical element 18, an objective optical element 20, a Raman light detection system 22, and an infrared light detection system 30. The sample S is fixed to the plate 12 and placed on the stage 14.

[0014] The stage 14 can be displaced in the horizontal or vertical direction by being driven by a drive unit 16. The drive unit 16 can be electrically controlled, and the drive unit 16 and the stage 14 are mechanically connected. The drive unit 16 includes, for example, a motor and a gear.

[0015] The objective optical element 18 is used for Raman spectroscopy and is configured, for example, by combining a convex lens and a concave lens. When performing Raman spectroscopy, the objective optical element 5 faces the sample S on the plate 12, as shown in FIG. 1. In other words, the objective optical element 18 is positioned directly above the sample S on the plate 12.

[0016] The objective optical element 20 is used for infrared spectroscopic analysis and is, for example, a Cassegrain mirror that combines a concave mirror and a convex mirror. When infrared spectroscopic analysis is performed, the objective optical element 20 faces the sample S on the plate 12, as shown in Figure 2. In other words, the objective optical element 20 is positioned directly above the sample S on the plate 12.

[0017] The Raman light detection system 22 is used when performing Raman spectroscopy, and includes a light source 24, a Raman spectrometer 26, and an optical imaging element 28. The light emitted from the light source 24 is, for example, laser light having a wavelength in the visible or near-infrared range, and the wavelength is approximately several μm to several tens of μm. As shown in Fig. 1, when performing Raman spectroscopy, the light emitted from the light source 24 is guided to the objective optical element 18 by various optical elements (not shown).

[0018] Light incident on the objective optical element 18 is focused on the sample S fixed to the plate 12. That is, light from the light source 24 is collected by passing through the objective optical element 18 and is irradiated onto a focal position on or in the sample S. Raman scattered light is generated from the sample S irradiated with light from the light source 24, and this light is guided to the Raman light detection system 22 by various optical elements (not shown). A portion of the light guided from the objective optical element 18 to the Raman light detection system 22 is incident on an optical imaging element 28, and the remaining light is incident on a Raman spectrometer 26.

[0019] The Raman spectrometer 26 separates the Raman scattered light from the sample S and detects the intensity for each wavelength. A Raman spectrum can be obtained based on the detection signal from the Raman spectrometer 26. The Raman spectrum is expressed as intensity on the vertical axis and wavelength on the horizontal axis. In this way, the infrared Raman microscope 10 can obtain a Raman spectrum by receiving the Raman scattered light from the sample S with a detector (Raman spectrometer 26).

[0020] The optical imaging element 28 captures a visible image of the surface of the sample S where Raman scattered light is generated. The optical imaging element 28 includes, for example, a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor, and is configured to be able to capture still images or videos of the sample S. The optical imaging element 28 can capture all or at least one of a bright-field image, a dark-field image, a phase-contrast image, a fluorescent image, and a polarizing microscope image of the sample S.

[0021] The infrared light detection system 30 is used when performing infrared spectroscopic analysis and includes a light source 32, an infrared spectrometer 34, and an optical imaging element 36. The light emitted from the light source 32 is infrared light emitted, for example, from a ceramic heater, and has a wavelength of approximately 405 nm to 1064 nm, with light of a combination of wavelengths of 532 nm and 785 nm being used in many cases. As shown in Figure 2, when performing infrared spectroscopic analysis, the light emitted from the light source 32 is guided to the objective optical element 20 by various optical elements (not shown).

[0022] Light incident on the objective optical element 20 is focused on the sample S fixed to the plate 12. That is, light from the light source 32 is collected by passing through the objective optical element 20 and is irradiated onto a focal position on or in the sample S. Light reflected from the sample irradiated with light from the light source 32 is guided to the infrared light detection system 30 by various optical elements (not shown). A portion of the light guided from the objective optical element 20 to the infrared light detection system 30 is incident on an optical imaging element 36, and the remaining light is incident on an infrared spectrometer 34.

[0023] The infrared spectrometer 34 is, for example, a Fourier transform infrared spectrometer. The spectrometer provided in the infrared spectrometer 34 may be a Michelson interference spectrometer. The infrared spectrometer 34 detects the intensity for each wavelength by dispersing the infrared light reflected from the sample. An infrared spectrum can be obtained based on the detection signal from this infrared spectrometer 34. The infrared spectrum is represented by the intensity on the vertical axis and the wavelength on the horizontal axis. In this way, the infrared Raman microscope 10 can obtain an infrared spectrum by receiving the infrared light reflected from the sample S with a detector (infrared spectrometer 34).

[0024] The optical imaging element 36 captures a visible image of the surface of the sample S reflecting infrared light. The optical imaging element 36 may have a configuration similar to that of the optical imaging element 28. Like the optical imaging element 28, the optical imaging element 36 is capable of capturing still or moving images of the sample S, and can capture all or at least one of a bright-field image, a dark-field image, a phase-contrast image, a fluorescent image, and a polarizing microscope image of the sample S.

[0025] The objective optical element 18 and the objective optical element 20 have different magnifications, and therefore the magnification at which the visible image of the sample S is captured by the optical imaging element 28 is different from the magnification at which the visible image of the sample S is captured by the optical imaging element 36. In other words, the magnifications of the visible image of the sample S captured by the optical imaging element 28 and the visible image captured by the optical imaging element 36 are different.

[0026] As described above, the infrared Raman microscope 10 of this embodiment can be switched between a Raman analysis state and an infrared analysis state, and when switched from the infrared analysis state to the Raman analysis state, the positional relationship between the objective optical element 18 and the plate 12 is adjusted so that the focal position of the light collected by the objective optical element 18 is aligned with a predetermined measurement position on the sample S. On the other hand, when switched from the Raman analysis state to the infrared analysis state, the positional relationship between the objective optical element 20 and the plate 12 is adjusted so that the focal position of the light collected by the objective optical element 20 is aligned with a predetermined measurement position on the sample S.

[0027] 2. Electrical configuration of the infrared Raman microscope 3 is a block diagram showing an example of the electrical configuration of the infrared Raman microscope 10. In addition to a drive unit 16, a Raman light detection system 22, and an infrared light detection system 30, the infrared Raman microscope 10 also includes an operation unit 40, a display unit 42, a control unit 100, and the like.

[0028] In addition, the control unit 100, drive unit 16, light source 24, Raman spectrometer 26, optical imaging element 28, light source 32, infrared spectrometer 34, optical imaging element 36, operation unit 40, and display unit 42 are electrically connected to each other via a circuit 46 such as a bus.

[0029] The control unit 100 is responsible for overall control of the infrared Raman microscope 10. The control unit 100 includes a CPU (Central Processing Unit) 102. The control unit 100 also includes a RAM (Random Access Memory) 104 and a storage unit 106 that can be directly accessed by the CPU 102.

[0030] The RAM 104 is used as a work area and a buffer area for the CPU 102. The storage unit 106 is a non-volatile memory, and for example, a hard disk drive (HDD) or a solid state drive (SSD) is used as the storage unit 106.

[0031] The storage unit 106 stores a control program for controlling the infrared Raman microscope 10, data required for executing the control program (execution data), etc. The storage unit 106 may be configured to include the RAM 104.

[0032] The operation unit 40 includes hardware keys. The operation unit 40 may also include an input device. Examples of the input device include a keyboard and a mouse. The input device may also include a touch panel. In this case, the touch panel is provided on the display surface of the display unit 42. The touch panel and the display unit 42 may also be formed integrally. The display unit 42 is a general-purpose display.

[0033] 3. Displaying a visible image of the sample When infrared spectroscopy or Raman spectroscopy is performed, a visible image of the sample S is displayed on the display unit .

[0034] 4 is a diagram for explaining an aspect of displaying a visible image of the sample S. When infrared spectroscopic analysis or Raman spectroscopic analysis is performed, a display screen including an image display area 50 is displayed on the display unit 42. That is, the image display area 50 is displayed on the display unit 42.

[0035] At this time, a visible image 52 of the sample S, specifically a portion 52a thereof, is displayed in real time in the image display area 50 based on a signal from the optical imaging element 28 or the optical imaging element 36. However, the visible image 52 displayed in the image display area 50 may be a still image acquired at a predetermined timing.

[0036] In this embodiment, optical axis position information is stored in advance in the form of data in the storage unit 106. The optical axis position information is information indicating the amount of deviation of an optical axis position 56 from the center 54 of the visible image 52. The optical axis position 56 is the optical axis position of the light from the light source 24 or the light source 32. For example, the storage unit 106 stores optical axis position information corresponding to the objective optical element 18 and optical axis position information corresponding to the objective optical element 20.

[0037] In this embodiment, by using the optical axis position information, the visible image 52 is displayed in the image display area 50 so that the optical axis position 56 is at the center of the image display area 50 .

[0038] In this embodiment, the size of the visible image 52 is larger than the size of the image display area 50. Therefore, in the example shown in Fig. 4, a portion 52a of the visible image 52 is displayed in the image display area 50. That is, the portion 52a of the visible image 52 is cropped to the same size as the image display area 50 so that the optical axis position 56 is at the center, and is displayed in the image display area 50.

[0039] For example, when the infrared Raman microscope 10 is in a Raman analysis state, the visible image 52 captured by the optical imaging element 28 is displayed in the image display area 50 so that the optical axis position 56 of the light from the light source 24 is at its center. Also, when the infrared Raman microscope 10 is in an infrared analysis state, the visible image 52 captured by the optical imaging element 36 is displayed in the image display area 50 so that the optical axis position 56 of the light from the light source 32 is at its center.

[0040] The amount of deviation between the center 54 of the visible image 52 and the optical axis position 56 differs between the visible image 52 in the Raman analysis state captured by the optical imaging element 28 and the visible image 52 in the infrared analysis state captured by the optical imaging element 36. This is because the optical paths involved in the infrared spectroscopic analysis and the Raman spectroscopic analysis are different.

[0041] 4. Correspondence between the visible image of the sample and the coordinates on the stage When a visible image 52 of the sample S is displayed on the display unit 42 as infrared spectroscopy or Raman spectroscopy is performed, the visible image 52 is associated with coordinates on the stage 14 (stage coordinates).

[0042] In this embodiment, map information is stored in advance in a data format in the storage unit 106. The map information is information indicating stage coordinates. Note that the stage coordinates are two-dimensional coordinates.

[0043] 5 is a diagram for explaining a manner in which a visible image 52 of the sample S is associated with stage coordinates. In this embodiment, it is possible to identify the coordinate range of the location on the stage 14 that is imaged by the optical imaging element 28 or the optical imaging element 36, that is, the location to be imaged (imaged location) 64 on the stage 14.

[0044] The coordinate range of the photographed area 64 can be determined based on, for example, the movement distance and movement direction of the stage 14 from a reference position and the magnification of the objective optical element 18 or the objective optical element 20. In such a case, the reference position of the stage 14 is set for each of the Raman analysis state and the infrared analysis state, and the movement distance and movement direction of the stage 14 from the reference position are determined based on the operation of the drive unit 4.

[0045] The visible image 52 is an image of the photographed area 64 photographed through the objective optical element 18 or the objective optical element 20. In other words, the visible image 52 is an image of the photographed area 64 magnified in accordance with the magnification of the objective optical element 18 or the objective optical element 20.

[0046] In this embodiment, the scale of the stage coordinates 62 is adjusted so that the size of the photographed area 64 in the image display area 50 matches the size of the visible image 52, thereby enabling the visible image 52 to be associated with the stage coordinates 62. This makes it possible to match the visible image 52 (a part 52a of the visible image 52) with the photographed area 64 when the visible image 52 is displayed superimposed on the stage coordinates 62 in the image display area 50.

[0047] The scale of the stage coordinates 62 is adjusted so as to be enlarged in accordance with the magnification at which the visible image 52 was captured, i.e., the magnification of the visible image 52. In other words, the amount of adjustment of the scale of the stage coordinates 62 is determined by the magnification of the optical imaging element 28 or the optical imaging element 36.

[0048] In this embodiment, scale information is stored in advance in data format in the storage unit 106. The scale information is information that indicates the amount of adjustment of the scale of the stage coordinates 62. The amount of adjustment of the scale of the stage coordinates 62 varies depending on the magnification at which the visible image 52 is captured, i.e., the magnification of the visible image 52, and therefore multiple pieces of scale information are stored in the storage unit 106. For example, the storage unit 106 stores scale information corresponding to the objective optical element 18 and scale information corresponding to the objective optical element 20.

[0049] For example, when the infrared Raman microscope 10 is in a Raman analysis state, the visible image 52 captured by the optical imaging element 28 is associated with stage coordinates 62 whose scale has been adjusted according to the magnification of the visible image 52. Furthermore, when the infrared Raman microscope 10 is in an infrared analysis state, the visible image 52 captured by the optical imaging element 36 is associated with stage coordinates 62 whose scale has been adjusted according to the magnification of the visible image 52.

[0050] 4. Specify the measurement location The measurement position for infrared spectroscopy or Raman spectroscopy can be specified on the visible image 52 displayed on the display unit 42. The measurement position is any position selected within a horizontal plane.

[0051] 6 is a schematic diagram showing an example of a position specification screen 80. The position specification screen 80 is provided with an image display area 50 and a spectrum display area 82. In addition, a portion 52a of a visible image 52 is displayed in the image display area 50.

[0052] In this embodiment, the location 64 to be imaged on the stage 14 may be changed by moving the stage 14 in the horizontal direction. The location 64 to be imaged on the stage 14 is changed by operating the operation unit 40, but the method for doing so is arbitrary. For example, a software key (not shown) may be provided on the position specification screen 80, and operating the software key may move the stage 14 in the horizontal direction.

[0053] Furthermore, in this embodiment, the visible image 52 is displayed in association with the stage coordinates 62, and therefore when a measurement position 84 is specified on the visible image 52, a point on the coordinates corresponding to the measurement position 84 is specified. During infrared spectroscopic analysis or Raman spectroscopic analysis, the optical axis position 56 of the light from the light source 24 or the light source 32 is aligned with the point (measurement position) on the specified coordinates, and then measurement is performed.

[0054] The Raman spectrum or infrared spectrum acquired by performing the measurement at the measurement position 84 is displayed in the spectrum display area 82. These spectra may be displayed side by side or may be displayed overlapping each other.

[0055] In this embodiment, when a Raman spectrum or an infrared spectrum is acquired, spectral information and measurement position information are stored in the storage unit 106. The spectral information is information indicating the Raman spectrum or the infrared spectrum. The measurement position information is information indicating the measurement position 84 specified when the Raman spectrum or the infrared spectrum is acquired.

[0056] In this case, the spectrum information, the measurement position information, and the map information are associated with one another. That is, in this embodiment, the Raman spectrum or the infrared spectrum is associated with a point on the stage coordinates 62.

[0057] 5. Switching between Raman and infrared spectroscopy As described above, the infrared Raman microscope 10 can be switched between the infrared analysis state and the Raman analysis state. An example of the operation will be described below with reference to FIG.

[0058] For example, when the infrared Raman microscope 10 switches from the infrared analysis state to the Raman analysis state, the scale of the stage coordinates 62 is adjusted so that the visible image 52 captured by the optical imaging element 28 corresponds to the stage coordinates 62, and further, a portion 52a of the visible image 52 is displayed in the image display area 50 so that the optical axis position 56 of the light from the light source 24 is at the center.

[0059] Furthermore, when the infrared Raman microscope 10 is in a Raman analysis state, a measurement position 84 is designated and a Raman spectrum is acquired at the measurement position 84, and the Raman spectrum is associated with the point corresponding to the measurement position 84 on the stage coordinates 62. The Raman spectrum is also displayed in the spectrum display area 82.

[0060] After the Raman spectrum is acquired in this way, when the infrared Raman microscope 10 switches from the Raman analysis state to the infrared analysis state, the visible image 52 captured by the optical imaging element 36 is associated with the stage coordinates 62, and a portion 52a of the visible image 52 is displayed in the image display area 50 so that the optical axis position 56 of the light from the light source 32 is at the center. At this time, the scale of the stage coordinates 62 is adjusted according to the magnification of the visible image 52 captured by the optical imaging element 36, and the already specified measurement position 84 is displayed in the image display area 50 in an identifiable manner.

[0061] In this way, even when the infrared Raman microscope 10 is switched from the infrared analysis state to the Raman analysis state, the measurement position 84 is retained, and an infrared spectrum can be acquired by specifying the same measurement position 84. The same applies when the infrared Raman microscope 10 is switched from the Raman analysis state to the infrared analysis state.

[0062] 6. Specific example of the electrical configuration of an infrared Raman microscope 7 is a functional block diagram showing a specific example of the electrical configuration of the infrared Raman microscope 10. The control unit 100 functions as a Raman analysis processing unit 110, an infrared analysis processing unit 114, a display processing unit 118, etc., as a result of the CPU 102 (see FIG. 3) executing a program.

[0063] The Raman analysis processing unit 110 includes a storage processing unit 112, the infrared analysis processing unit 114 includes a storage processing unit 116, and the display processing unit 118 includes a display switching processing unit 120 and a measurement position display processing unit 122. Note that the RAM 104 and the like are not shown in FIG.

[0064] The Raman analysis processor 110 executes processing for performing Raman spectroscopic analysis on the sample S on the stage 14. The Raman analysis processor 110 acquires a visible image 52 using the optical imaging element 28. When a measurement position 84 is specified, the Raman analysis processor 110 performs Raman spectroscopic analysis on the measurement position 84 to generate Raman spectrum data 126. The Raman spectrum data 126 is data corresponding to spectral information indicating a Raman spectrum.

[0065] The storage processing unit 112 stores the Raman spectrum data 126 in the storage unit 106. When a measurement position 84 for Raman spectroscopy is specified on the image display area 50, the storage processing unit 112 generates measurement position data 128 and stores it in the storage unit 106. The measurement position data 128 is data corresponding to measurement position information in the Raman spectroscopy.

[0066] Furthermore, when storing the Raman spectrum data 126 and the measurement position data 128 in the storage unit 106, the storage processing unit 112 associates the Raman spectrum data 126, the measurement position data 128, and the map data 124 with one another. Note that the map data 124 is data corresponding to map information.

[0067] The infrared analysis processing unit 114 executes processing for performing infrared spectroscopic analysis on the sample S on the stage 14. The infrared analysis processing unit 114 acquires a visible image 52 using the optical imaging element 36. When a measurement position 84 is specified, the infrared analysis processing unit 114 performs infrared spectroscopic analysis on the measurement position 84 to generate infrared spectrum data 130. The infrared spectrum data 130 is data corresponding to spectral information indicating an infrared spectrum.

[0068] The storage processing unit 116 stores the infrared spectrum data 130 in the storage unit 106. When a measurement position 84 for infrared spectroscopic analysis is designated on the image display area 50, the storage processing unit 116 generates measurement position data 132 and stores the measurement position data 132 in the storage unit 106. The measurement position data 132 is data corresponding to measurement position information in infrared spectroscopic analysis.

[0069] Furthermore, when storing the infrared spectrum data 130 and the measurement position data 132 in the storage unit 106, the storage processing unit 116 associates the infrared spectrum data 130, the measurement position data 132, and the map data 124 with each other.

[0070] In the Raman analysis state, the display processing unit 118 uses the optical axis position data 134 to display the visible image 52 captured by the optical imaging element 28 in the image display region 50 so that the optical axis position 56 of the light source 24 is at the center, by using the optical axis position data 134. The optical axis position data 134 is data corresponding to the optical axis position information. In the infrared analysis state, the display processing unit 118 also uses the optical axis position data 134 to display the visible image 52 captured by the optical imaging element 36 in the image display region 50 so that the optical axis position 56 of the light source 32 is at the center, by using the optical axis position data 134.

[0071] Furthermore, in the Raman analysis state, the display processing unit 118 uses the map data 124 and the scale data 136 to display the visible image 52 captured by the optical imaging element 28 in the image display area 50 in association with the stage coordinates 62. The scale data 136 is data corresponding to scale information. Furthermore, in the infrared analysis state, the display processing unit 118 uses the map data 124 and the scale data 136 to display the visible image 52 captured by the optical imaging element 36 in the image display area 50 in association with the stage coordinates 62.

[0072] The display switching processing unit 120 switches between displaying the visible image 52 captured by the optical imaging element 28 and displaying the visible image 52 captured by the optical imaging element 36 in the image display area 50. That is, in the Raman analysis state, the visible image 52 captured by the optical imaging element 28 is displayed in the image display area 50, and in the infrared analysis state, the visible image 52 captured by the optical imaging element 36 is displayed in the image display area 50.

[0073] In addition, in the Raman analysis state, the display switching processing unit 120 displays the visible image 52 captured by the optical imaging element 28 in the image display area 50 so that the optical axis position 56 of the light irradiated from the light source 24 to the sample S is at the center of the image display area 50, and in the infrared analysis state, the display switching processing unit 120 displays the visible image 52 captured by the objective optical element 20 in the image display area 50 so that the optical axis position 56 of the light irradiated from the light source 32 to the sample S is at the center of the image display area 50.

[0074] When the display switching processing unit 120 switches and displays the visible image 52, the measurement position display processing unit 122 adjusts the scale of the stage coordinates 62 in accordance with the magnification of the visible image 52 captured by the optical imaging element 28 or the magnification of the visible image 52 captured by the optical imaging element 36, and displays the measurement position 84 in the image display area 50. That is, in the Raman analysis state, the scale of the stage coordinates 62 is adjusted in accordance with the magnification of the visible image 52 captured by the optical imaging element 28, and the measurement position 84 is displayed in the image display area 50, and in the infrared analysis state, the scale of the stage coordinates 62 is adjusted in accordance with the magnification of the visible image 52 captured by the optical imaging element 36, and the measurement position 84 is displayed in the image display area 50.

[0075] 7. Aspects It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0076] (Item 1) An infrared Raman microscope according to one aspect includes: An infrared Raman microscope capable of switching between infrared spectroscopic analysis and Raman spectroscopic analysis of a sample on a stage, an infrared light detection system including an infrared light source, an infrared spectrometer that receives reflected light from a sample irradiated with light from the infrared light source, and the infrared imaging element that captures a visible image of the sample on the stage; a Raman light detection system including a laser light source, a Raman spectrometer that receives Raman scattered light from a sample irradiated with light from the laser light source, and a Raman imaging element that captures a visible image of the sample on the stage at a magnification different from that of the infrared imaging element; a display unit that displays a visible image of the sample in a display area in association with coordinates on the stage; a display switching processing unit that switches and displays, in the same display area, a visible image captured by the infrared imaging element or a visible image captured by the Raman imaging element; The apparatus may further include a storage processing unit that, when a measurement position for infrared spectroscopy or Raman spectroscopy is designated on the display area, stores a coordinate point on the stage that corresponds to the measurement position.

[0077] According to the infrared Raman microscope described in paragraph 1, when infrared spectroscopic analysis or Raman spectroscopic analysis is performed, a visible image of the sample is displayed in the display area in correspondence with coordinates on the stage, and by specifying a measurement position in the display area, the coordinate point on the stage corresponding to the measurement position can be stored, making it easy to specify the measurement position when switching between infrared spectroscopic analysis and Raman spectroscopic analysis.

[0078] Furthermore, according to the infrared Raman microscope described in paragraph 1, the visible image of the sample is associated with coordinates on the stage, so that the measurement position when switching between infrared spectroscopic analysis and Raman spectroscopic analysis can be managed using common coordinates on the stage.

[0079] (Item 2) In the infrared Raman microscope according to item 1, The present invention may further include a measurement position display processing unit that, when the visible image is switched and displayed by the display switching processing unit, adjusts the scale of the coordinates on the stage according to the magnification of the visible image captured by the infrared imaging element or the magnification of the visible image captured by the Raman imaging element, and displays the measurement position in the display area.

[0080] According to the infrared Raman microscope described in paragraph 2, even when the visible image is switched between infrared spectroscopy and Raman spectroscopy, the scale of the coordinates on the stage is adjusted appropriately, so that the same measurement position can be displayed on the visible screen for both infrared spectroscopy and Raman spectroscopy.

[0081] (Item 3) In the infrared Raman microscope according to item 1 or 2, The display switching processing unit may display the visible image captured by the infrared imaging element in the display area so that the optical axis of light irradiated from the infrared light source to the sample is at the center of the display area, and may display the visible image captured by the Raman imaging element in the display area so that the optical axis of light irradiated from the laser light source to the sample is at the center of the display area.

[0082] According to the infrared Raman microscope described in paragraph 3, since the optical path for infrared spectroscopic analysis is different from the optical path for Raman spectroscopic analysis, even if the center of the visible image is misaligned with the optical axis of the light source, the visible image can be displayed so that the optical axis of the light source is at the center. [Explanation of symbols]

[0083] 10. Infrared Raman Microscope 14 Stages 22 Raman optical detection system 24 Light source 26 Raman spectrometer 28 Optical imaging element 30 Infrared light detection system 32 light source 34 Infrared Spectrometer 36 Optical imaging element 50 Image display area 52 Visible Images 56 Optical axis position 62 Stage Coordinates 84 Measurement position 112 Memory Processing Unit 116 Memory Processing Unit 120 Display switching processing unit 122 Measurement position display processing unit S sample

Claims

1. An infrared Raman microscope capable of switching between infrared spectroscopic analysis and Raman spectroscopic analysis of a sample on a stage, an infrared light detection system including an infrared light source, an infrared spectrometer that receives reflected light from a sample irradiated with light from the infrared light source, and the infrared imaging element that captures a visible image of the sample on the stage; a Raman light detection system including a laser light source, a Raman spectrometer that receives Raman scattered light from a sample irradiated with light from the laser light source, and a Raman imaging element that captures a visible image of the sample on the stage at a magnification different from that of the infrared imaging element; a display unit that displays a visible image of the sample in a display area in association with coordinates on the stage; a display switching processing unit that switches and displays, in the same display area, a visible image captured by the infrared imaging element or a visible image captured by the Raman imaging element; An infrared Raman microscope comprising: a memory processing unit that, when a measurement position for infrared spectroscopy or Raman spectroscopy is specified on the display area, stores a coordinate point on the stage corresponding to the measurement position.

2. 2. The infrared Raman microscope according to claim 1, further comprising a measurement position display processing unit that, when the visible image is switched and displayed by the display switching processing unit, adjusts the scale of the coordinates on the stage according to the magnification of the visible image captured by the infrared imaging element or the magnification of the visible image captured by the Raman imaging element, and displays the measurement position in the display area.

3. 3. The infrared Raman microscope according to claim 1, wherein the display switching processing unit displays the visible image captured by the infrared imaging element in the display area so that the optical axis of light irradiated from the infrared light source onto the sample is at the center of the display area, and displays the visible image captured by the Raman imaging element in the display area so that the optical axis of light irradiated from the laser light source onto the sample is at the center of the display area.

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