X-ray measuring device and program

Abstract

To suppress measurement from being taken in a misaligned positional relationship with a target.SOLUTION: Provided is an X-ray measurement device 1 that includes a measurement device 10 for irradiating a coil spring 20 with an X-ray and measuring the diffracted X-ray. The X-ray measurement device 1 comprises: a shape sensor 16 for detecting the surface position of the coil spring 20; an acquisition unit 30 for acquiring the amount of positional deviation from the surface position and a reference position; a correction unit 32 for correcting the measurement position or measurement speed of the measurement device 10 on the basis of the amount of positional deviation; and a control unit 36 for rotating the coil spring 20 and moving the measurement device 10 in a rotation axis direction A while causing measurement to be conducted, with the measurement device 10 being moved on the basis of the result of correction made by the correction unit 32 during movement.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an X-ray measurement device and a program. [Background technology]

[0002] Conventionally, X-ray measurement devices that measure a measurement object using X-rays have been known. For example, Patent Document 1 listed below describes a technique in an X-ray measurement device in which a measurement unit is moved while rotating along a linear measurement object to measure the entire circumference of the measurement object. Furthermore, Patent Document 2 listed below describes a technique in an X-ray measurement device in which the measurement object and the measurement unit are rotated relative to each other to measure the amount of displacement in the thickness direction of the measurement object. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-154627 [Patent Document 2] Japanese Patent Application Laid-Open No. 2006-317465 Summary of the Invention [Problem to be solved by the invention]

[0004] In the techniques described in the above patent documents, for example, when the object to be measured is an elastic body such as a coil spring, the relative distance between the object to be measured and the measuring unit may fluctuate due to the influence of elastic force, vibration, etc., and the measurement may be performed at a position that is displaced from the target.

[0005] Therefore, an object of the present invention is to provide an X-ray measurement device and a program that can prevent measurement from being performed in a positional relationship that is displaced from the target. [Means for solving the problem]

[0006] An X-ray measurement device according to a first aspect of the present invention is an X-ray measurement device having a measurement unit that irradiates X-rays toward a measurement object and measures the X-rays diffracted by the measurement object, and includes a detection unit that detects the surface position of the measurement object, an acquisition unit that acquires the amount of positional deviation between the surface position and a predetermined reference position, a correction unit that corrects the measurement position or measurement speed of the measurement unit based on the amount of positional deviation, and a control unit that rotates the measurement object and moves the measurement unit in a direction along the rotation axis about which the measurement object rotates, and moves the measurement unit during the movement based on the correction result obtained by the correction unit.

[0007] In the X-ray measurement device according to a second aspect of the present invention, the detection unit detects a plurality of surface positions at a plurality of rotation angles circumferentially around the rotation axis while rotating the object to be measured, the acquisition unit acquires a plurality of positional deviation amounts associated with the rotation angles for the surface positions detected by the detection unit, and the correction unit corrects the measurement position or the measurement speed at the rotation angles based on the plurality of positional deviation amounts associated with the rotation angles.

[0008] In the X-ray measurement device according to a third aspect of the present invention, the acquisition unit acquires the amount of positional deviation in the direction intersecting the rotation axis by calculating the difference between the surface position in the direction intersecting the rotation axis and the reference position, the correction unit corrects the measurement position based on the amount of positional deviation in the direction intersecting the rotation axis, and the control unit controls the movement of the measurement unit so that the measurement position becomes the measurement position corrected by the correction unit.

[0009] In the X-ray measurement device according to a fourth aspect of the present invention, the acquisition unit acquires the amount of positional deviation in the direction along the rotation axis by calculating the difference between the surface position in the direction along the rotation axis and the reference position, the correction unit corrects the measurement speed based on the amount of positional deviation in the direction along the rotation axis, and the control unit controls the movement of the measurement unit so as to achieve the measurement speed corrected by the correction unit.

[0010] In the X-ray measurement apparatus according to a fifth aspect of the present invention, the measurement object is an elastic body.

[0011] A program according to a sixth aspect of the present invention causes a computer capable of communicating with a measurement unit that irradiates an X-ray toward a measurement object and measures the X-ray diffracted by the measurement object to function as: a detection means that detects the surface position of the measurement object; an acquisition means that acquires the amount of positional deviation between the surface position and a predetermined reference position; a correction means that corrects the measurement position or measurement speed of the measurement unit based on the amount of positional deviation; and a control means that rotates the measurement object and moves the measurement unit in a direction along the rotation axis about which the measurement object rotates, while performing measurements, and that moves the measurement unit during the movement based on the correction result obtained by the correction means. [Effects of the Invention]

[0012] According to the present invention, it is possible to prevent measurements from being deviated from the positional relationship of the target. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a diagram showing an example of the overall configuration of an X-ray measurement apparatus according to a first embodiment. [Figure 2] FIG. 2 is a block diagram illustrating an example of a functional configuration of a computer. [Figure 3] 10A and 10B are diagrams conceptually illustrating the movement of the detection point of the surface position detected by the detection unit in the direction of the rotation axis as the coil spring rotates. [Figure 4] FIG. 10 is a diagram illustrating an example of a data table related to detection points stored in a storage unit. [Figure 5] 10A and 10B are diagrams conceptually illustrating positional deviation of a detection point from a reference position. [Figure 6] 10 is a flowchart showing an example of a flow of control by a computer. DETAILED DESCRIPTION OF THE INVENTION

[0014] First Embodiment A first embodiment of the present invention will now be described with reference to the accompanying drawings. To facilitate understanding of the description, identical elements or elements having identical functions are designated by the same reference numerals in the drawings wherever possible, and redundant description will be omitted.

[0015] <Overall structure> Fig. 1 is a diagram showing an example of the overall configuration of an X-ray measurement apparatus according to the first embodiment. As shown in Fig. 1, the X-ray measurement apparatus 1 includes, for example, a measurement device 10 as a measurement unit, a robot 12, a rotation mechanism 14, a shape sensor 16, and a computer 18.

[0016] The measuring device 10 irradiates X-rays toward a coil spring 20 serving as a measurement object, and measures the X-rays diffracted by the measurement object. The coil spring 20 is a helical elastic body, for example, a linear compression coil spring wound N times. The measuring device 10 acquires diffraction ring images, for example, with an arbitrary exposure time (several milliseconds to approximately 100 milliseconds) per image.

[0017] The robot 12 is, for example, a six-axis vertical articulated robot, and is a movement mechanism that moves the measuring device 10. The robot 12 adjusts the relative distance between the detection sensor of the measuring device 10 and the object to be measured. The robot 12 also adjusts the position in a plane along the measurement surface of the object to be measured. The robot 12 also adjusts the irradiation angle of X-rays with respect to the measurement surface of the object to be measured, etc.

[0018] The rotation mechanism 14 has a pair of holding members 22 that can hold both ends of the coil spring 20 in the rotation axis direction A, and a rotary motor 24 that is fixed to the holding members 22 and rotates the coil spring 20 via the holding members 22. The rotary motor 24 has an encoder 26 that detects the rotation angle of the rotary motor 24 and transmits it to the computer 18 as an encoder value.

[0019] The shape sensor 16 is a sensor that measures the surface shape and detects the surface position of the measurement object, the coil spring 20. The shape sensor 16 detects, for example, the position of a detection point on the surface of the coil spring 20 that is the shortest distance from the shape sensor 16 as the surface position of the coil spring 20.

[0020] The shape sensor 16, for example, irradiates the coil spring 20 with laser light 17, measures the reflected light from the coil spring 20, and measures the distance from the shape sensor 16 to the coil spring 20. The shape sensor 16 detects the surface position based on the measured distance. The shape sensor 16 can be moved in the rotation axis direction A by a movement mechanism (not shown) or the like, so that the detection range can be expanded beyond the irradiation range of the laser light 17. Note that, for example, if the irradiation range of the laser light 17 includes the entire coil spring 20, the shape sensor 16 does not need to be movable in the rotation axis direction A.

[0021] The computer 18 is communicatively connected to each of the measuring device 10, the robot 12, the rotation mechanism 14, and the shape sensor 16. The computer 18 is configured as a general-purpose computer equipped with a CPU (Central Processing Unit), a memory, etc. Each function of the computer 18, which will be described later, is realized by executing a program stored in the memory under the control of the CPU and operating each component of the X-ray measuring device 1.

[0022] Fig. 2 is a block diagram showing an example of the functional configuration of the computer 18. As shown in Fig. 2, the computer 18 functionally includes a detection unit 30, an acquisition unit 32, a correction unit 34, a control unit 36, a stress calculation unit 38, and a storage unit 40.

[0023] The detection unit 30 controls the operation of the shape sensor 16 and the rotation mechanism 14. As a result, the detection unit 30 detects multiple surface positions at multiple rotation angles in the circumferential direction of the rotation axis while rotating the coil spring 20. FIG. 3 is a diagram conceptually illustrating how a detection point 42 of the surface position detected by the detection unit 30 moves in the rotation axis direction A as the coil spring 20 rotates. As shown in FIG. 3, the detection point 42 moves in the rotation axis direction A as the coil spring 20 rotates. The detection unit 30 detects the surface position from one end of the coil spring 20 until the detection point 42 reaches the other end.

[0024] The detection unit 30 acquires, as the surface position, for example, a position on the coordinate axis of the height direction Z (hereinafter simply referred to as the "height position"). The height direction Z is a direction perpendicular to the rotation axis. Note that the height direction Z does not necessarily have to be perpendicular to the rotation axis, and includes a direction intersecting the rotation axis. The detection unit 30 also acquires an encoder value from the encoder 26, associates it with the acquired height position, and stores it in a data table 50 (see FIG. 4) stored in the storage unit 40.

[0025] Here, due to the elastic force, vibration, etc. of the coil spring 20, the height position of the detection point 42 may deviate from the height position of the standard coil spring 20. The height position of the standard coil spring 20 is the height position that the standard coil spring 20 is expected to take, and is set in advance based on the design value of the width of the coil spring 20, etc. FIG. 5 is a diagram conceptually explaining the positional deviation of the detection point 42 from the reference position. As shown in FIG. 5, the height position of the standard coil spring 20 is set to the reference position Z s When the height position of the detection point 42 (Z0, Z1, . . . , Z n ) is the reference position Z s The height position of the detection point 42 (Z0, Z1, . . ., Z n ) indicates the height position of the detection point 42 at each rotation angle that is the same as each rotation angle of the xth imaging (x=0, 1, . . . , n) after the start of X-ray measurement.

[0026] The acquisition unit 32 acquires the plurality of height positions (Z0, Z1, . . . , Z nThe acquiring unit 32 acquires a plurality of positional deviation amounts associated with the rotation angles for the encoder values ​​(e0, e1, . . . , e n ) for each height position (Z0, Z1, . . ., Z n ) and reference position Z s By calculating the difference between the s -Z0,Z s -Z1,...,Z s -Z n The acquiring unit 32 associates the acquired positional deviation amount with the corresponding encoder value and stores it in the data table 50.

[0027] The correction unit 34 corrects the measurement position of the measuring device 10 based on the amount of positional deviation in the height direction Z acquired by the acquisition unit 32. The measurement position of the measuring device 10 is, for example, the relative position of the measuring device 10 with respect to the coil spring 20. The correction unit 34 corrects the measurement position at a rotation angle based on a plurality of positional deviation amounts associated with the rotation angle.

[0028] The control unit 36 ​​controls the operations of the measuring device 10, the robot 12, and the rotation mechanism 14 during X-ray measurement. As a result, the control unit 36 ​​rotates the coil spring 20 and measures X-rays while moving the measuring device 10 along the rotation axis direction A. As the coil spring 20 rotates, the control unit 36 ​​causes the measuring device 10 to measure X-rays at multiple measurement positions at multiple rotation angles in the circumferential direction of the rotation axis.

[0029] Furthermore, when moving the measuring device 10 along the rotation axis direction A during X-ray measurement, the control unit 36 ​​moves the measuring device 10 based on the correction results obtained by the correction unit 34. For example, the control unit 36 ​​controls the robot 12 so that each measurement position of the measuring device 10 becomes the measurement position corrected by the correction unit 34. The control unit 36 ​​stores the diffraction ring image obtained as a result of the X-ray measurement in, for example, the storage unit 40.

[0030] The stress calculation unit 38 calculates the residual stress value of the coil spring 20 using, for example, the cosα method, based on each diffraction ring image stored in the storage unit 40. The stress calculation unit 38 may store the calculated residual stress value in the storage unit 40, or may output the calculated residual stress value to an output unit (not shown) included in the computer 18.

[0031] The storage unit 40 stores information acquired by the above-mentioned functional units and preset information. Fig. 4 is a diagram showing an example of a data table 50 related to the detection points 42 stored in the storage unit 40. As shown in Fig. 4, the data table 50 stores the height position, reference position, and positional deviation amount of the detection points 42, linked to the encoder value indicating the rotation angle of the rotary motor 24.

[0032] <Control flow by computer 18> Next, a control flow by computer 18 will be described with reference to Fig. 6. Fig. 6 is a flowchart showing an example of the flow of control by computer 18. The order of the following steps can be changed as appropriate. The following processing starts after both ends of coil spring 20 are attached to rotation mechanism 14 and the position of one end of coil spring 20 facing the shape sensor 16 is adjusted as an initial position.

[0033] (Step SP10) The detection unit 30 detects the surface position of the coil spring 20 while rotating the coil spring 20. Then, the process proceeds to step SP12.

[0034] (Step SP12) The detection unit 30 determines whether the detection point 42 of the surface position has reached the other end of the coil spring 20. If the determination is negative, the process continues with step SP10. If the determination is positive, the process proceeds to step SP14.

[0035] (Step SP14) The detection unit 30 acquires the height position as the surface position. The detection unit 30 also acquires the encoder value at the time when the height position is detected. The detection unit 30 associates the acquired information with each other and stores them in the data table 50. Then, the process proceeds to step SP16.

[0036] (Step SP16) The acquisition unit 32 refers to the data table 50 stored in the process of step SP14, and obtains the height position and the reference position Z associated with each encoder value. s The difference between these values ​​is calculated to calculate the amount of positional deviation in the height direction Z. Then, the process proceeds to step SP18.

[0037] (Step SP18) Based on the positional deviation amount calculated in the process of step SP16, the correction unit 34 corrects the measurement position at the rotation angle indicated by the encoder value linked to the positional deviation amount. Next, the correction unit 34 creates a position correction program that sets each measurement position to the corrected position. Then, the process proceeds to the process of step SP20.

[0038] (Step SP20) The control unit 36 ​​starts X-ray measurement by the measuring device 10. As a result, the measuring device 10 starts irradiating the coil spring 20 with X-rays. The X-ray irradiation is started after adjusting the position of the coil spring 20 such that one end of the coil spring 20 faces the measuring device 10 as an initial position. Then, the process proceeds to step SP22.

[0039] (Step SP22) The control unit 36 ​​rotates the coil spring 20 in the same setting as the rotation in step SP10 and measures X-rays while moving the measuring device 10 in the rotation axis direction A. During this X-ray measurement, the control unit 36 ​​operates the robot 12 in accordance with the position correction program created in step SP18. Then, the process proceeds to step SP24.

[0040] (Step SP24) The control unit 36 ​​determines whether the measuring device 10 has reached a predetermined position as the measuring device 10 moves in the rotation axis direction A. Specifically, the control unit 36 ​​determines whether the measurement point of the X-rays emitted by the measuring device 10 has reached the other end of the coil spring 20. If the determination is negative, the control unit 36 ​​continues the processing of step SP22. If the determination is positive, the control unit 36 ​​ends the X-ray measurement and proceeds to the processing of step SP26.

[0041] (Step SP26) Based on the results of the measurement in the process of step SP24, the stress calculation unit 38 obtains the residual stress and the like of the coil spring 20. Then, the series of processes shown in FIG.

[0042] <Effects> The X-ray measuring apparatus 1 according to the above embodiment is an X-ray measuring apparatus 1 that includes a measuring apparatus 10 that irradiates X-rays toward a coil spring 20 as a measurement object and measures the X-rays diffracted by the coil spring 20, and includes a detection unit 30 that detects the height position as the surface position of the coil spring 20, an acquisition unit 32 that acquires the amount of positional deviation between the height position and a predetermined reference position, a correction unit 34 that corrects the measurement position of the measuring apparatus 10 based on the amount of positional deviation, and a control unit 36 ​​that rotates the coil spring 20 and moves the measuring apparatus 10 in the rotation axis direction A while measuring, and moves the measuring apparatus 10 based on the correction result corrected by the correction unit 34 during movement. According to this configuration, when the height position of coil spring 20 deviates from the reference position due to the elastic force or vibration of coil spring 20, the measurement position of measuring device 10 can be corrected in a direction to eliminate the positional deviation based on the amount of positional deviation. As a result, even if the height position of coil spring 20 deviates from the reference position, measuring device 10 can be moved so that the relative distance between coil spring 20 and measuring device 10 does not change. Therefore, it is possible to prevent measurements from deviating from the initial target positional relationship.

[0043] Furthermore, in the X-ray measuring device 1 according to the above embodiment, the detection unit 30 detects a plurality of height positions at a plurality of rotation angles around the rotation axis while rotating the coil spring 20, the acquisition unit 32 acquires a plurality of positional deviation amounts linked to the rotation angles for the plurality of height positions detected by the detection unit 30, and the correction unit 34 corrects the measurement position at the rotation angle based on the plurality of positional deviation amounts linked to the rotation angle. According to this configuration, it is possible to detect multiple height positions at multiple rotation angles by rotating the coil spring 20. Even if the multiple height positions are deviated from the reference position, it is possible to correct the measurement position of the measuring device 10 in a direction that eliminates the amount of positional deviation based on the amount of positional deviation.

[0044] Furthermore, in the X-ray measurement device 1 according to the above embodiment, the acquisition unit 32 acquires the amount of positional deviation in the height direction Z by calculating the difference between the height position and the reference position, the correction unit 34 corrects the measurement position based on the amount of positional deviation in the height direction Z, and the control unit 36 ​​controls the movement of the measurement device 10 so that the measurement position is the measurement position corrected by the correction unit 34. According to this configuration, when there is a positional deviation in the height direction Z, the above-mentioned effect is preferably exhibited.

[0045] In the X-ray measurement device 1 according to the above embodiment, the measurement object is an elastic body. According to this configuration, since the surface position of the measurement object is likely to shift due to the influence of elastic force, vibration, etc., correction of the measurement position based on the amount of positional shift becomes more effective.

[0046] Second Embodiment Next, an X-ray measurement apparatus according to a second embodiment will be described. The X-ray measurement apparatus according to the second embodiment has the same components as the X-ray measurement apparatus 1 according to the first embodiment, but differs from the first embodiment in that the amount of positional deviation is the amount of positional deviation in the rotation axis direction A rather than the height direction Z. The differences will be described below.

[0047] In the second embodiment, the detection unit 30 acquires a position on the coordinate axis in the rotation axis direction A as the surface position detected by the shape sensor 16. The detection unit 30 also associates the acquired position on the coordinate axis in the rotation axis direction A with the encoder value, and stores the associated data in a data table stored in the storage unit 40.

[0048] The acquisition unit 32 refers to the data table stored in the storage unit 40, and calculates the difference between the position on the coordinate axis in the rotation axis direction A and the reference position, thereby acquiring the amount of positional deviation in the rotation axis direction A. The reference position here is the reference position in the rotation axis direction A.

[0049] The correction unit 34 corrects the measurement speed of the measuring device 10 based on the positional deviation amount in the rotation axis direction A acquired by the acquisition unit 32. The measurement speed of the measuring device 10 is, for example, the movement speed of the measuring device 10 in the rotation axis direction A.

[0050] When moving the measuring device 10 along the rotation axis direction A during X-ray measurement, the control unit 36 ​​controls the robot 12 so that the measurement speed of the measuring device 10 becomes the measurement speed corrected by the correction unit 34.

[0051] <Effects> As described above, in the X-ray measurement device according to the second embodiment, the acquisition unit 32 acquires the amount of positional deviation in the rotational axis direction A by calculating the difference between the surface position in the rotational axis direction A and the reference position, the correction unit 34 corrects the measurement speed based on the amount of positional deviation in the rotational axis direction A, and the control unit 36 ​​controls the movement of the measurement device 10 so that the measurement speed becomes the one corrected by the correction unit 34. According to this configuration, if there is a positional deviation of detection point 42 in the direction of rotation axis A, for example, due to variations in the winding strength of coil spring 20, the measurement speed of measuring device 10 can be corrected based on the amount of positional deviation so as to eliminate the amount of positional deviation. This makes it possible to perform measurements in a positional relationship that corresponds to the actual surface position of coil spring 20 in the direction of rotation axis A. Therefore, the second embodiment also achieves the same effects as the first embodiment.

[0052] <Modification> The present invention is not limited to the above-described embodiments. In other words, variations on the above-described embodiments, which are appropriately modified by a person skilled in the art, are also included within the scope of the present invention as long as they incorporate the features of the present invention. Furthermore, the elements of the above-described embodiments and the modifications described below can be combined to the extent technically possible, and such combinations are also included within the scope of the present invention as long as they incorporate the features of the present invention.

[0053] For example, the detection of the surface position of the coil spring 20, the correction of the measurement position and measurement speed of the measuring device 10, and the X-ray measurement process may be performed at the same time. Furthermore, the measurement object may be, for example, a cylindrical object or a non-elastic body. Furthermore, the surface position may be detected without rotating the measurement object. Furthermore, the measurement position of the measuring device 10 may be corrected based on a single positional deviation amount instead of multiple positional deviation amounts.

[0054] Furthermore, the computer 18 does not need to include the memory unit 40 or the stress calculation unit 38. For example, the information stored in the memory unit 40 may be stored in an external storage means, or the measurement results may be output to an external information processing device or the like, and the residual stress value of the object to be measured may be calculated in the external information processing device or the like.

[0055] The present invention may also be a program for causing an information processing device such as computer 18 or a server to function as a detection unit 30 as detection means, an acquisition unit 32 as acquisition means, a correction unit 34 as correction means, and a control unit 36 ​​as control means. This program also achieves the same effects as the above-described embodiment. The program may be stored in storage means disposed within computer 18, or may be stored in storage means connected to the measuring device 10 and robot 12 via a network. The program may be provided by being recorded on a computer-readable recording medium, or may be provided in a format that allows it to be installed via a network such as the Internet. [Explanation of symbols]

[0056] 1: X-ray measuring device, 10: measuring device (measuring unit), 20: coil spring (measurement object), 30: detecting unit, 32: acquiring unit, 34: correcting unit, 36: control unit

Claims

1. An X-ray measurement device including a measurement unit that irradiates an X-ray toward a measurement object and measures the X-ray diffracted by the measurement object, a detection unit that detects a surface position of the measurement object; an acquisition unit that acquires a positional deviation amount between the surface position and a predetermined reference position; a correction unit that corrects the measurement speed of the measurement unit based on the positional deviation amount; a control unit that rotates the measurement object and moves the measurement unit in a direction along the rotation axis about which the measurement object rotates, and moves the measurement unit based on a correction result corrected by the correction unit during the movement, X-ray measuring device.

2. An X-ray measurement device including a measurement unit that irradiates an X-ray toward a measurement object and measures the X-ray diffracted by the measurement object, a detection unit that detects a surface position of the measurement object; an acquisition unit that acquires a positional deviation amount between the surface position and a predetermined reference position; a correction unit that corrects the measurement position or measurement speed of the measurement unit based on the positional deviation amount; a control unit that rotates the measurement object and moves the measurement unit in a direction along the rotation axis about which the measurement object rotates, and moves the measurement unit based on a correction result corrected by the correction unit during the movement, the detection unit detects a plurality of surface positions at a plurality of rotation angles in a circumferential direction of the rotation axis while rotating the measurement object, the acquisition unit acquires a plurality of the positional deviation amounts associated with the rotation angles for the plurality of the surface positions detected by the detection unit; the correction unit corrects the measurement position or the measurement speed at the rotation angle based on the plurality of positional deviation amounts associated with the rotation angle. X-ray measuring device.

3. An X-ray measurement device including a measurement unit that irradiates an X-ray toward a measurement object and measures the X-ray diffracted by the measurement object, a detection unit that detects a surface position of the measurement object; an acquisition unit that acquires a positional deviation amount between the surface position and a predetermined reference position; a correction unit that corrects the measurement position or measurement speed of the measurement unit based on the positional deviation amount; a control unit that rotates the measurement object and moves the measurement unit in a direction along the rotation axis about which the measurement object rotates, and moves the measurement unit based on a correction result corrected by the correction unit during the movement, the acquisition unit acquires the positional deviation amount in the direction along the rotation axis by calculating a difference between the surface position in the direction along the rotation axis and the reference position; the correction unit corrects the measurement speed based on the amount of positional deviation in a direction along the rotation axis; the control unit controls the movement of the measurement unit so as to achieve the measurement speed corrected by the correction unit. X-ray measuring device.

4. a computer that can communicate with a measurement unit that irradiates an X-ray toward a measurement object and measures the X-ray diffracted by the measurement object; a detection means for detecting the surface position of the measurement object; an acquisition means for acquiring a positional deviation amount between the surface position and a predetermined reference position; a correction means for correcting the measurement speed of the measurement unit based on the amount of positional deviation; a control means for rotating the measurement object and moving the measurement unit in a direction along the rotation axis about which the measurement object rotates, and for measuring the measurement while moving the measurement unit based on the correction result corrected by the correction means during the movement; A program to function as a

5. a computer that can communicate with a measurement unit that irradiates an X-ray toward a measurement object and measures the X-ray diffracted by the measurement object; a detection means for detecting the surface position of the measurement object; an acquisition means for acquiring a positional deviation amount between the surface position and a predetermined reference position; a correction means for correcting the measurement position or measurement speed of the measurement unit based on the amount of positional deviation; a control means for rotating the measurement object and moving the measurement unit in a direction along the rotation axis about which the measurement object rotates, and for measuring the measurement while moving the measurement unit based on the correction result corrected by the correction means during the movement; It functions as the detecting means detects a plurality of surface positions at a plurality of rotation angles in a circumferential direction of the rotation axis while rotating the measurement object, the acquiring means acquires a plurality of the positional deviation amounts associated with the rotation angles for the plurality of the surface positions detected by the detecting means, the correction means corrects the measurement position or the measurement speed at the rotation angle based on the plurality of positional deviation amounts associated with the rotation angle. program.

6. a computer that can communicate with a measurement unit that irradiates an X-ray toward a measurement object and measures the X-ray diffracted by the measurement object; a detection means for detecting the surface position of the measurement object; an acquisition means for acquiring a positional deviation amount between the surface position and a predetermined reference position; a correction means for correcting the measurement position or measurement speed of the measurement unit based on the amount of positional deviation; a control means for rotating the measurement object and moving the measurement unit in a direction along the rotation axis about which the measurement object rotates, and for measuring the measurement while moving the measurement unit based on the correction result corrected by the correction means during the movement; It functions as the acquiring means acquires the positional deviation amount in the direction along the rotation axis by calculating a difference between the surface position in the direction along the rotation axis and the reference position, the correction means corrects the measurement speed based on the amount of positional deviation in a direction along the rotation axis; the control means controls the movement of the measurement unit so as to achieve the measurement speed corrected by the correction means. program.

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