Dual-arm vacuum robot

Abstract

A two-armed robot for use in a vacuum transports a substrate within a vacuum space. The two-armed robot for use in a vacuum comprises a base arm, a first arm, a second arm, a first hand, and a second hand. The base arm is capable of ascending / descending and also is capable of rotating. The first arm is capable of rotating relative to the base arm. The second arm is capable of rotating relative to the base arm. The first hand is rotatably provided to the first arm, the first hand holding and transporting the substrate. The second hand is rotatably provided to the second arm, the second hand holding and transporting the substrate. The first arm and the second arm are rotatably attached to the distal end of the base arm via a joint shaft formed so as to be hollow. The angle of the first hand relative to the first arm and the angle of the second hand relative to the second arm are changed independently from each other.

Description

[Technical Field]

[0001] The present invention relates to a dual-arm robot that transports wafers in a vacuum space. [Background technology]

[0002] Conventionally, there has been known a dual-arm robot for wafer transfer that retrieves and transfers wafers from a wafer storage device, a processing device, etc. Patent Document 1 discloses this type of dual-arm substrate transfer device.

[0003] The dual-arm substrate transport device of Patent Document 1 includes a drive unit, an upper arm unit, a first forearm, and a second forearm. One end of the upper arm unit is rotatably connected to the drive unit. The first and second forearms are rotatably connected to the upper arm unit. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] U.S. Patent No. 7,578,649 Summary of the Invention [Problem to be solved by the invention]

[0005] In the configuration of Patent Document 1, a second support shaft to which a second forearm is fixed is provided inside a first hollow support shaft to which a first forearm is fixed. Therefore, if sensors or the like are equipped to the end effectors attached to the first and second forearms, it is difficult to arrange harnesses or the like for outputting / inputting electrical signals inside this dual-arm substrate transport device.

[0006] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a double-arm vacuum robot that can effectively utilize the internal space. [Means for solving the problem]

[0007] The problem to be solved by the present invention is as described above. Next, the means for solving this problem and the effects thereof will be explained.

[0008] According to a first aspect of the present invention, there is provided a vacuum double-arm robot having the following configuration. That is, this vacuum double-arm robot is used to transport substrates in a sealed vacuum space. The vacuum double-arm robot includes a base arm, a first arm, a second arm, a first hand, and a second hand. The base arm is movable up and down and rotatable. The first arm is rotatable relative to the base arm. The second arm is rotatable relative to the base arm. The first hand is rotatably provided relative to the first arm and holds and transports the substrate. The second hand is rotatably provided relative to the second arm and holds and transports the substrate. The first arm and the second arm are rotatably attached to the tip of the base arm via a joint shaft formed in a hollow space. The angle of the first hand relative to the first arm and the angle of the second hand relative to the second arm can be changed independently of each other. Harnesses to the first hand and the second hand pass through the inside of the joint shaft.

[0009] This allows for efficient use of the internal space of the joint shaft, thereby enabling the vacuum dual-arm robot to be made smaller. Furthermore, the independent drive of the two hands allows the vacuum dual-arm robot to perform a variety of different movements. For example, when the first hand and the second hand are equipped with electrical components such as sensors, it is possible to easily ensure space for arranging harnesses for the electrical components.

[0010] According to a second aspect of the present invention, there is provided a vacuum double-arm robot having the following configuration. That is, this vacuum double-arm robot is used to transport substrates in a sealed vacuum space. The vacuum double-arm robot includes a base arm, a first arm, a second arm, a first hand, and a second hand. The base arm is movable up and down and rotatable. The first arm is rotatable relative to the base arm. The second arm is rotatable relative to the base arm. The first hand is rotatably provided relative to the first arm and holds and transports the substrate. The second hand is rotatably provided relative to the second arm and holds and transports the substrate. The first arm and the second arm are rotatably attached to the tip of the base arm via a joint shaft formed in a hollow space. The length of the base arm is greater than the length of the first arm and the length of the second arm. Harnesses to the first hand and the second hand pass through the inside of the joint shaft.

[0011] This allows for efficient use of the internal space of the joint shaft, thereby enabling the miniaturization of the vacuum double-arm robot. Furthermore, the increased access distance of the robot allows for flexible adaptation to the layout of surrounding chambers. For example, when the first hand and the second hand are equipped with electrical components such as sensors, it is possible to easily ensure space for arranging harnesses for the electrical components. [Effects of the Invention]

[0012] According to the present invention, it is possible to provide a vacuum double-arm robot that can effectively utilize the internal space. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a plan view showing a semiconductor processing facility including a vacuum double-arm robot according to an embodiment of the present invention; [Figure 2] FIG. 1 is a perspective view showing the configuration of a vacuum double-arm robot. [Figure 3] FIG. 2 is a partial cross-sectional view showing the internal configuration of a vacuum double-arm robot. [Figure 4] FIG. 10 is a plan view showing the operation of the vacuum double-arm robot. [Figure 5]FIG. 10 is a plan view showing the operation of the vacuum double-arm robot. [Figure 6] FIG. 10 is a plan view showing the operation of the vacuum double-arm robot. [Figure 7] FIG. 10 is a plan view showing the operation of the vacuum double-arm robot. DETAILED DESCRIPTION OF THE INVENTION

[0014] Next, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a plan view showing a schematic configuration of a semiconductor processing system 100 including a vacuum double-arm robot 1 according to an embodiment of the present invention. Fig. 2 is a perspective view showing the configuration of the vacuum double-arm robot 1. Fig. 3 is a partial cross-sectional view showing the configuration of the vacuum double-arm robot 1.

[0015] 1 performs various predetermined processes on wafers 10, which are substrates to be processed. The wafers 10 may be raw wafers, semi-finished products being processed, or finished products that have already been processed. In this embodiment, the wafers 10 are disk-shaped, but are not limited to this.

[0016] The processing performed on the wafer 10 may include various processes such as cleaning, film formation, resist coating, exposure, development, etching, impurity injection, impurity activation, and resist stripping.

[0017] The semiconductor processing system 100 mainly includes a storage unit 101, a processing unit 102, and a control unit (robot control unit) 103.

[0018] The storage unit 101 comprises a vacuum double-arm robot 1, multiple load ports 2, and multiple storage devices 3. In this embodiment, the storage unit 101 comprises six load ports 2 and storage devices 3. However, this is an example, and the number of load ports 2 and storage devices 3 can be increased or decreased as needed. In the following description, the vacuum double-arm robot 1 provided in the storage unit 101 may be referred to as the storage robot 1a.

[0019] In the storage unit 101, a space sealed from the external environment is formed. The interior of this space is filled with a predetermined gas. This gas may be, for example, nitrogen gas. Because the amount of this gas filled is considerably small, the interior of the storage unit 101 is essentially in a vacuum state.

[0020] The storage robot 1a is configured as, for example, a horizontal articulated robot. The storage robot 1a is used to transfer wafers 10. This transfer includes carrying the wafers 10 into the storage device 3 and carrying the wafers 10 out of the storage device 3. The storage robot 1a is placed in a storage preparation chamber 30 formed in the storage unit 101. The specific configuration of this vacuum dual-arm robot 1 (storage robot 1a) will be described later.

[0021] The load ports 2 are provided outside the walls that make up the storage preparation room 30. In this embodiment, the six load ports 2 are arranged to surround the storage preparation room 30 on three sides. Each load port 2 has an opening / closing door 2a that can be opened and closed relative to the storage preparation room 30. A storage device 3 is set in each load port 2.

[0022] The storage device 3 can store a plurality of wafers 10 stacked vertically. The storage device 3 is configured as, for example, a FOUP. FOUP is an abbreviation for Front Opening Unified Pod. The storage device 3 has an openable and closable lid (not shown).

[0023] The opening and closing of the lid of the storage apparatus 3 is linked to the opening and closing of the opening and closing door 2a of the load port 2. When the lid of the storage apparatus 3 and the opening and closing door 2a of the load port 2 are opened, the internal space of the storage apparatus 3 and the internal space of the storage preparation chamber 30 are connected to each other. In this state, the vacuum double-arm robot 1 can hold the wafer 10 and carry it in and out of the storage apparatus 3. The opening and closing of the lid of the storage apparatus 3 and the opening and closing door 2a of the load port 2 is controlled by, for example, the control unit 103.

[0024] In the processing unit 102, a space sealed from the external environment is formed. This space is filled with a small amount of a predetermined gas, similar to the storage unit 101. Therefore, the inside of the processing unit 102 is substantially in a vacuum state.

[0025] The processing unit 102 includes a vacuum double-arm robot 1 and a plurality of processing devices 4. In the following description, the vacuum double-arm robot 1 included in the processing unit 102 may be referred to as a processing robot 1b.

[0026] The processing robot 1b has the same configuration as the storage robot 1a and is provided approximately in the center of a processing preparation chamber 40 formed in the processing unit 102.

[0027] The processing device 4 performs at least one of the above-mentioned processes on the wafer 10. This process is performed in a vacuum state.

[0028] A plurality of PASS chambers 5 are provided between the storage unit 101 and the processing unit 102. The PASS chambers 5 function as stages for transferring wafers 10. In this embodiment, the number of PASS chambers 5 is two. However, this is not limited to this, and the number of PASS chambers 5 can be increased or decreased as needed.

[0029] Each PASS room 5 includes a first door 51 and a second door 52. The first door 51 can be opened and closed relative to the storage preparation room 30. When the first door 51 is opened, the PASS room 5 and the storage preparation room 30 are connected to each other. The second door 52 can be opened and closed relative to the processing preparation room 40. When the second door 52 is opened, the PASS room 5 and the processing preparation room 40 are connected to each other. The opening and closing operations of the first door 51 and the second door 52 are controlled by the control unit 103.

[0030] In a state in which the storage preparation chamber 30 and the PASS chamber 5 are spatially connected, the storage-side robot 1a can transport wafers 10 between the PASS chamber 5 and the storage preparation chamber 30. In a state in which the processing preparation chamber 40 and the PASS chamber 5 are spatially connected, the processing-side robot 1b can transport wafers 10 between the PASS chamber 5 and the processing preparation chamber 40.

[0031] The control unit 103 is configured, for example, by a known computer. This computer includes a calculation unit such as a CPU, and a storage unit including a HDD, ROM, RAM, etc. The storage unit stores, for example, programs for controlling the vacuum double-arm robot 1, various control information, etc. The calculation unit executes the programs stored in the storage unit to control the opening and closing operations of the door 2a of the load port 2, the lid of the storage device 3, and the first door 51 and second door 52 of the PASS chamber 5. Furthermore, the calculation unit of the control unit 103 controls the operation of the vacuum double-arm robot 1. A control unit that controls the vacuum double-arm robot 1 may be provided separately from the control unit 103.

[0032] Next, the configuration of the vacuum double-arm robot 1 will be described in detail with reference to Figures 2 and 3. Figure 2 is a perspective view showing an example of the configuration of the vacuum double-arm robot 1. Figure 3 is a cross-sectional view illustrating the internal structure of the vacuum double-arm robot 1.

[0033] As shown in FIG. 2, the vacuum double-arm robot 1 mainly includes a base 11, a base arm 12, a first arm 13, a second arm 14, a first hand 15, and a second hand 16.

[0034] The base 11 functions as a base member that supports the multiple arms and hands of the vacuum dual-arm robot 1. The base 11 is fixed to, for example, a wall or bottom plate that constitutes the storage preparation chamber 30 (processing preparation chamber 40). The base 11 is provided with an elevation shaft 17.

[0035] The lifting shaft 17 is provided so as to be able to move up and down along its axis. The lifting shaft 17 is raised and lowered by, for example, an unillustrated lifting drive source provided inside the base 11. The base arm 12 is connected to the upper end of the lifting shaft 17.

[0036] In the following description, when the base arm 12, the first arm 13, and the second arm 14 are extended in a straight line, the end of each arm closer to the lifting shaft 17 may be referred to as the "base end," and the end of each arm farther from the lifting shaft 17 may be referred to as the "tip."

[0037] The base arm 12 is configured as a long, slender member that extends horizontally and linearly. One longitudinal end (base end) of the base arm 12 is fixed to the upper end of the lift shaft 17. The base arm 12 and the lift shaft 17 are supported so as to be rotatable about the axis (vertical axis) of the lift shaft 17. A first arm 13 and a second arm 14 are attached to the other longitudinal end (tip end) of the base arm 12.

[0038] The rotation of the base arm 12 is performed by, for example, a base arm driver 12a provided at the lower end of the lift shaft 17. The base arm driver 12a is composed of, for example, an electric motor and a gear box. Power from the base arm driver 12a is transmitted to the base arm 12 via the lift shaft 17.

[0039] The configuration in which the base arm 12 is movable up and down and rotatable relative to the base 11 is not limited to the above configuration. For example, the base arm 12 may be supported so as to be rotatable relative to the lifting shaft 17, and the lifting shaft 17 may only move up and down relative to the base 11.

[0040] In FIG. 1, the lengths of the base arms 12 of the processing robot 1b and the storage robot 1a are depicted as being equal. However, in reality, the base arm 12 of the processing robot 1b is longer than the base arm 12 of the storage robot 1a. This allows the access distance achieved by the base arm 12, first arm 13, and second arm 14 of the processing robot 1b to be longer than that of the storage robot 1a. FIG. 3 shows an example in which the length L1 of the base arm 12 is longer than the length L2 of the first arm 13 and second arm 14 (L1>L2). If the accessible distance is longer, the wafer 10 can be transported between locations that are farther apart from each other without providing a special configuration such as a mechanism for horizontally moving the base 11.

[0041] The left side of Figure 1 shows an example in which six load ports 2 are arranged around the storage robot 1a. Four of the six load ports 2 are arranged in two pairs facing each other. The distance between the opposing load ports 2 in each pair is equal.

[0042] The right side of Fig. 1 shows an example in which ten processing devices 4 are arranged around the processing robot 1b. Eight of the ten processing devices 4 are arranged in four groups facing each other. The processing devices 4 in each group are spaced the same distance apart.

[0043] 1, in a plan view, the load ports 2 or processing devices 4 are arranged side by side to form three sides of a rectangle, with the robot 1 located approximately in the center of the rectangle. This layout has the advantage of making more efficient use of factory space than a layout in which the load ports 2 or processing devices 4 are arranged side by side in a circle.

[0044] In particular, in the processing robot 1b, the length L1 of the base arm 12 is greater than the length L2 of the first arm 13 and the second arm 14. Therefore, the access distance can be increased.

[0045] In this way, the processing robot 1b can appropriately handle cases where a relatively large number of transfer origin / transfer destination locations are arranged.

[0046] As shown in Fig. 3, the base arm 12 is hollow. The base arm 12 of this embodiment is formed so that its vertical dimension (thickness) is smaller than that of a first arm 13 and a second arm 14, which will be described later. A highly rigid metal (not shown) is provided on the inner wall of the base arm 12. This increases the mechanical strength of the base arm 12.

[0047] This configuration allows the vacuum double-arm robot 1 to be made compact in the height direction. Therefore, the semiconductor processing system 100 can be made compact overall. Furthermore, because the thickness of the base arm 12 is small, the reference height at which the first arm 13 and the second arm 14 are attached (in other words, the height of the upper surface of the base arm 12) can be lowered. As a result, the access height of the first hand 15 and the second hand 16 (described below) attached to the first arm 13 and the second arm 14 can be lowered.

[0048] The first arm 13 is configured as a long, slender member that extends horizontally and linearly. One longitudinal end (base end) of the first arm 13 is attached to the tip of the base arm 12. The first arm 13 is supported so as to be rotatable about an axis (vertical axis) that is parallel to the lift shaft 17. The first hand 15 is attached to the other longitudinal end (tip) of the first arm 13.

[0049] As shown in Fig. 3, the first arm 13 has a predetermined thickness and is hollow. A first arm gear box 13a is provided inside the first arm 13. The first arm gear box 13a houses an electric motor and a reduction gear (not shown). The first arm gear box 13a can rotate the first arm 13 relative to the base arm 12 by the driving force of the electric motor.

[0050] A first hand gearbox 15a is provided inside the first arm 13. The first hand gearbox 15a houses an electric motor and a reduction gear (not shown). The first hand gearbox 15a can rotate the first hand 15 relative to the first arm 13 by the driving force of the electric motor.

[0051] Like the first arm 13, the second arm 14 is configured as an elongated member that extends horizontally in a straight line. The second arm 14 is provided above the first arm 13. One longitudinal end (base end) of the second arm 14 is attached to the base end of the first arm 13 (the tip of the base arm 12). The second arm 14 is supported so as to be rotatable about an axis (vertical axis) parallel to the lift shaft 17. The second hand 16 is attached to the other longitudinal end (tip) of the second arm 14.

[0052] As shown in Fig. 3, the second arm 14 has a predetermined thickness and is hollow. A second arm gear box 14a is provided inside the second arm 14. The second arm gear box 14a has the same configuration as the first arm gear box 13a. The second arm gear box 14a can rotate the second arm 14 relative to the base arm 12 by the driving force of an electric motor.

[0053] A second hand gearbox 16a is provided inside the second arm 14. The configuration of the second hand gearbox 16a is similar to that of the first hand gearbox 15a. The second hand gearbox 16a can rotate the second hand 16 relative to the second arm 14 by the driving force of an electric motor.

[0054] 2 and 3, the first arm 13 and the second arm 14 are connected to the base arm 12 via an elbow shaft (joint shaft) 18. The elbow shaft 18 is provided parallel to the lift shaft 17. The elbow shaft 18 is formed in a hollow cylindrical shape.

[0055] As shown in Figure 3, a magnetic fluid seal 6 is provided at a predetermined location on the outer periphery of the elbow shaft 18. This predetermined location is, for example, the connection point between the elbow shaft 18 and each of the base arm 12, first arm 13, and second arm 14. This makes it possible to seal the internal space of the vacuum double-arm robot 1. This prevents air inside the vacuum double-arm robot 1 from leaking to the outside (storage preparation chamber 30 or processing preparation chamber 40).

[0056] As shown in FIG. 3, a first gear 13b and a second gear 14b serving as transmission members are attached to the outer periphery of the elbow shaft 18. The first gear 13b is used to transmit driving force from an electric motor (not shown) provided in the first arm gearbox 13a to the first arm 13. The second gear 14b is used to transmit driving force from an electric motor (not shown) provided in the second arm gearbox 14a to the second arm 14. In other words, the first gear 13b and the second gear 14b constitute a drive transmission mechanism that transmits driving force from the electric motor to the first arm 13 and the second arm 14. The drive transmission mechanism is not limited to one that uses gears; for example, a belt could also be used. In this case, a pulley serving as a transmission member is attached to the outer periphery of the elbow shaft 18.

[0057] Specifically, the first gear 13b is fixed to the outer periphery of the elbow shaft 18. The first gear 13b meshes with an output gear (not shown) provided in the first arm gearbox 13a. Because the first arm gearbox 13a is fixed to the first arm 13, the first arm 13 rotates relative to the first gear 13b (elbow shaft 18) when driven by the electric motor of the first arm gearbox 13a.

[0058] The second gear 14b is fixed to the outer periphery of the elbow shaft 18. The second gear 14b meshes with an output gear (not shown) provided in the second arm gearbox 14a. Because the second arm gearbox 14a is fixed to the second arm 14, the second arm 14 rotates relative to the second gear 14b (elbow shaft 18) when driven by the electric motor of the second arm gearbox 14a.

[0059] As shown in Fig. 2 and other figures, the first hand 15 is formed to branch into two branches. Each branch of the first hand 15 can hold a wafer 10 at its tip. Therefore, the first hand 15 can hold two wafers 10 at the same time. The first hand 15 can transfer wafers 10 to two storage devices 3 or two PASS chambers 5 located adjacent to each other.

[0060] The first hand 15 can hold the wafer 10 and release the hold of the wafer 10. There are various methods for holding the wafer 10 by the first hand 15, and for example, the wafer 10 can be placed on the first hand 15, or the wafer 10 can be sandwiched between the first hand 15, etc.

[0061] The second hand 16 is configured similarly to the first hand 15 and can hold two wafers 10 at the same time.

[0062] The first hand 15 is rotatably attached to the tip of the first arm 13. The first hand 15 is disposed above the first arm 13 and adjacent to the first arm 13.

[0063] A gear (not shown) is fixed to the first hand 15. This gear meshes with an output gear (not shown) provided in the first hand gearbox 15a. Because the first hand gearbox 15a is fixed to the first arm 13, the first hand 15 rotates relative to the first arm 13 when driven by the electric motor of the first hand gearbox 15a.

[0064] The second hand 16 is rotatably attached to the tip of the second arm 14. The second hand 16 is disposed below the second arm 14 and adjacent to the second arm 14.

[0065] The second hand 16 is driven by a second hand gearbox 16a and rotates relative to the second arm 14. This configuration is substantially similar to the configuration in which the first hand 15 is driven by the first hand gearbox 15a, and therefore a description thereof will be omitted.

[0066] As described above, in the vacuum double-arm robot 1 of this embodiment, the second arm 14, the second hand 16, the first hand 15, and the first arm 13 are arranged in order from top to bottom. This configuration allows the first hand 15 and the second hand 16 to be arranged close to each other in the height direction. Therefore, for example, when two wafers 10 positioned adjacent to each other in the vertical direction are picked up and transported by switching the two hands, the lifting distance of the lifting shaft 17 can be extremely short. This allows the operating efficiency of the vacuum double-arm robot 1 to be improved.

[0067] In the vacuum double-arm robot 1 of this embodiment, electric motors are provided to drive the lifting shaft 17, base arm 12, first arm 13, second arm 14, first hand 15, and second hand 16. The driving of each electric motor is independently controlled by a control unit 103. That is, under the control of the control unit 103, the lifting shaft 17, base arm 12, first arm 13, second arm 14, first hand 15, and second hand 16 are independently driven.

[0068] This improves the degree of freedom of movement of the first hand 15 and the second hand 16. For example, the vacuum double-arm robot 1 can flexibly accommodate both the six-chamber layout shown on the left side of Fig. 1 and the ten-chamber layout shown on the right side.

[0069] 1, ten processing devices 4 are arranged in a 4, 2, 4 arrangement along three sides of a long, narrow rectangle in plan view. The processing devices 4 located at the corners of the rectangle are located relatively far from the base 11.

[0070] In the processing robot 1b disposed in this processing unit 102, the length L1 of the base arm 12 is configured to be greater than the length L2 of the first arm 13 and the second arm 14. In addition, in the processing robot 1b, the base arm 12, the first arm 13, the second arm 14, the first hand 15, and the second hand 16 are driven independently of each other.

[0071] With the above configuration, even in the above-described ten-chamber layout, only one processing robot 1b can transfer wafers 10 to each processing device 4 without the need for a mechanism such as a travel axis for translating the base 11 of the processing robot 1b. As a result, the equipment costs related to the processing robot 1b can be significantly reduced. Furthermore, the processing robot 1b can replace wafers 10 as workpieces without performing a swap operation, which will be described later. Therefore, wafers 10 can be replaced at high speed, improving processing throughput.

[0072] Each of the first hand 15 and the second hand 16 is provided with electrical components (not shown), such as a mapping sensor and a camera. The vacuum double-arm robot 1 is provided with a wire harness 9 to realize electrical connections to these components. The wire harness 9 is composed of a power cable that supplies power to the electrical components, a signal cable that transmits input or output signals, and the like.

[0073] As shown in Figure 3, this wire harness 9 is arranged to pass through the lifting shaft 17, base arm 12, elbow shaft 18, and the inside of the first arm 13 or second arm 14, and reach the first hand 15 or second hand 16.

[0074] In the vacuum double-arm robot 1, air flows through the internal space through which the wire harness 9 passes. For example, when the processing device 4 performs processing at high temperatures, the processing robot 1b that transports the wafer 10 may also become hot. However, by circulating air inside the vacuum double-arm robot 1, it is possible to prevent the temperature of the vacuum double-arm robot 1 from becoming excessively high. As a result, the wire harness 9, which is relatively susceptible to heat, can be passed through the internal space of the vacuum double-arm robot 1.

[0075] Here, a layout for independently driving the first arm 13 and the second arm 14 will be described.

[0076] If the first arm gearbox 13a and the second arm gearbox 14a were arranged on the base arm 12, it would be necessary to arrange a drive transmission path (typically, a transmission shaft) on the elbow shaft 18 to transmit the output of each gearbox to the first arm 13 and the second arm 14. Moreover, in order to drive each of the two arms independently, it would be necessary to use a double-structure transmission shaft, for example.

[0077] In this regard, in the vacuum double-arm robot 1 of this embodiment, the first arm gearbox 13a and the second arm gearbox 14a are provided inside the first arm 13 and the second arm 14. Therefore, the transmission of force for driving the first arm 13 and the second arm 14 is completed simply by the meshing of each gearbox with the first gear 13b and the second gear 14b fixed to the outer periphery of the elbow shaft 18. Therefore, in this embodiment, there is no need to place a transmission shaft inside the elbow shaft 18.

[0078] This ensures a large internal space for the elbow shaft 18. This extra space allows the wire harness 9 to be arranged with a certain amount of slack within the elbow shaft 18. This slack makes it possible to easily absorb twisting of the wire harness 9 even when the first arm 13 and the second arm 14 rotate. As a result, the durability of the wire harness 9 can be improved.

[0079] Next, the operation of the storage robot 1a when it accesses the PASS chamber 5 will be briefly described with reference to Figures 4 to 7. Figures 4 to 7 are plan views showing the operation of the vacuum double-arm robot 1.

[0080] In the plan view of FIG. 4, the first hand 15 is not shown because the second hand 16 is directly below and overlaps the first hand 15 .

[0081] 4 shows a state immediately before the second hand 16 starts the operation of advancing into the PASS chamber 5. As shown in FIG. 4, the second hand 16 is positioned so as to face the PASS chamber 5 directly.

[0082] 4, the first hand 15 is in the same position as the second hand 16, and the first arm 13 is in the same position as the second arm 14. Therefore, although not shown in FIG. 4, the first arm 13 and the first hand 15 are located directly below the second arm 14 and the second hand 16.

[0083] Consider the case where the second hand 16 is moved linearly from the state shown in Fig. 4 to advance into the PASS chamber 5. In this case, the control unit 103 rotates the first arm 13 and the first hand 15 in conjunction with the rotation of the base arm 12, the second arm 14, and the second hand 16 to achieve such an operation, as shown in Figs.

[0084] Specifically, the base arm 12 rotates clockwise as shown in FIG. 4. The second arm 14 rotates in conjunction with the rotation of the base arm 12 so that its tip approaches the PASS chamber 5 along a linear path. The second hand 16 rotates so that the second hand 16 remains facing straight toward the PASS chamber 5 even if the orientation of the second arm 14 changes. As a result, the second hand 16 can move linearly while maintaining its orientation. When the tip of the second hand 16 reaches the PASS chamber 5, the advancement operation is completed.

[0085] During the above-described advancement process of the second hand 16, the position of the tip of the base arm 12 changes along an arc. The first arm 13 and the first hand 15, which are not performing the advancement operation, rotate appropriately in conjunction with the rotation of the base arm 12, as shown in Figures 5 to 7.

[0086] 5 to 7, as the base arm 12 rotates, the angle between the base arm 12 and the first arm 13 gradually increases. Also, as the base arm 12 rotates, the angle between the first arm 13 and the first hand 15 gradually decreases.

[0087] This operation allows the first arm 13 and the first hand 15 to be folded compactly, and their range of operation can be contained within the range of the chain-line circles shown in Figures 4 to 7. As a result, even in the storage preparation room 30, which is a relatively narrow space, the vacuum dual-arm robot 1 can be installed and access the storage device 3 and PASS room 5 installed around it.

[0088] The folded state is, for example, a state in which the angle formed between the first arm 13 and the first hand 15 is 90° or less, but is not limited to this.

[0089] 4 to 7, the first hand 15 is bent significantly relative to the first arm 13. Therefore, at least a portion of the first hand 15 overlaps with the base arm 12 in a plan view (in other words, when viewed along the axis of the elbow axis 18).

[0090] As described above, the control unit 103 independently drives the base arm 12, the first arm 13, the second arm 14, the first hand 15, and the second hand 16. This makes it possible to realize the above-described complex movements.

[0091] 7 shows a state in which the second hand 16 has completed its advance operation and is ready to transfer the wafer 10 to the PASS chamber 5. After transferring the wafer 10, the second hand 16 performs a retreat operation. In this retreat operation, the base arm 12, the first arm 13, the second arm 14, the first hand 15, and the second hand 16 operate in exactly the opposite manner to the advance operation described above. This allows the state to be returned to that shown in FIG. 4.

[0092] The above is an example of advancing / retracting the second hand 16 relative to the PASS chamber 5, but from the state shown in Figure 4, the first hand 15, instead of the second hand 16, can also be advanced / retracted relative to the PASS chamber 5. In this case, the operations of the first hand 15 and the second hand 16 are swapped in the above description.

[0093] To summarize the above, the state in Figure 4 is a state in which the first hand 15 can advance / retract relative to the PASS chamber 5, and at the same time, a state in which the second hand 16 can advance / retract relative to the PASS chamber 5. Therefore, the state in Figure 4 can be said to be a basic state common to the first hand 15 and the second hand 16.

[0094] From the state shown in Fig. 4, either the first hand 15 or the second hand 16 can be advanced into the PASS chamber 5. When one of the first hand 15 and the second hand 16 advances, the control unit 103 controls each part so that the other rotates in a folded state (non-advanced state). When the advanced hand completes retraction and returns to its original state (Fig. 4), the control unit 103 controls each part so that the other folded hand also rotates in the opposite direction and returns to its original state (Fig. 4).

[0095] In this way, the storage side robot 1a can access the PASS chamber 5 sequentially with the first hand 15 and the second hand 16 without performing a special operation (swap operation) to switch the hand that is accessing. Therefore, the access operation with each hand can be performed consecutively, and the operation efficiency of the vacuum dual-arm robot 1 can be improved.

[0096] When the storage robot 1a accesses the storage preparation rooms 30 (storage device 3) on the upper, left, and lower sides of Figure 4, it can operate in substantially the same way as when accessing the PASS room 5 described above.

[0097] As described above, in the vacuum double-arm robot 1 of this embodiment, no transmission shaft for the first arm 13 and the second arm 14 is provided within the elbow shaft 18. Therefore, the elbow shaft 18 can be made thin. As a result, even if the first hand 15 is bent sharply relative to the first arm 13, as shown in FIG. 7, for example, interference between the elbow shaft 18 and the first hand 15 can be prevented. Similarly, even if the second hand 16 is bent sharply relative to the second arm 14, interference between the elbow shaft 18 and the second hand 16 can be prevented. Therefore, the operating range can be made compact.

[0098] As described above, the vacuum double-arm robot 1 of this embodiment is used to transport wafers 10 in a sealed vacuum space (storage preparation chamber 30 or processing preparation chamber 40). This vacuum double-arm robot 1 includes a base arm 12, a first arm 13, a second arm 14, a first hand 15, and a second hand 16. The base arm 12 is movable up and down and rotatable. The first arm 13 is rotatable relative to the base arm 12. The second arm 14 is rotatable relative to the base arm 12. The first hand 15 is rotatable relative to the first arm 13 and holds and transports the wafer 10. The second hand 16 is rotatable relative to the second arm 14 and holds and transports the wafer 10. The first arm 13 and the second arm 14 are rotatably attached to the tip of the base arm 12 via a hollow elbow shaft 18. The angle of the first hand 15 relative to the first arm 13 and the angle of the second hand 16 relative to the second arm 14 are changed independently of each other.

[0099] This allows for efficient use of the internal space of the elbow shaft 18. This contributes to the miniaturization of the vacuum double-arm robot 1. Furthermore, by independently driving the first hand 15 and the second hand 16, the vacuum double-arm robot 1 can perform a variety of movements.

[0100] In the vacuum double-arm robot 1 of this embodiment, the length L1 of the base arm 12 is greater than the length L2 of the first arm 13 and the length L2 of the second arm .

[0101] This allows the vacuum double-arm robot 1 to have a large access distance.

[0102] In the vacuum double-arm robot 1 of this embodiment, the base arm 12, the first arm 13, the second arm 14, the first hand 15, and the second hand 16 are each driven independently.

[0103] This allows for complex operations to be performed by independently driving each part, thereby reducing the operation time, etc.

[0104] In the vacuum double-arm robot 1 of this embodiment, a first gear 13b and a second gear 14b are provided on the outer periphery of the elbow shaft 18. The first gear 13b and the second gear 14b constitute a drive transmission mechanism for transmitting a driving force that drives the first arm 13 and the second arm 14.

[0105] This eliminates the need to provide the transmission shafts of the first arm 13 and the second arm 14 inside the elbow shaft 18, and allows the elbow shaft 18 to have a large internal space.

[0106] In the vacuum double-arm robot 1 of this embodiment, the wire harness 9 to the first hand 15 and the second hand 16 passes through the inside of the elbow shaft 18.

[0107] This makes it possible to easily ensure a space for arranging the wire harness 9 for the electrical components when the first hand 15 and the second hand 16 are equipped with electrical components such as sensors.

[0108] In the vacuum double-arm robot 1 of this embodiment, the base arm 12, the first arm 13, and the second arm 14 are formed to be hollow. The internal spaces of the base arm 12, the first arm 13, and the second arm 14 are sealed from the storage preparation chamber 30 or the processing preparation chamber 40. Air flows through the internal spaces.

[0109] This allows the vacuum double-arm robot 1 to be cooled by the flowing air.

[0110] In the vacuum double-arm robot 1 of this embodiment, the first arm 13 incorporates a first arm 13 gearbox that drives the first arm 13 and a first hand 15 gearbox that drives the first hand 15. The second arm 14 incorporates a second arm 14 gearbox that drives the second arm 14 and a second hand 16 gearbox that drives the second hand 16.

[0111] This eliminates the need to provide a gear box inside the base arm 12. Therefore, the base arm 12 can be made thin, and the minimum access height of each hand can be reduced.

[0112] The vacuum double-arm robot 1 of this embodiment also includes a control unit 103. The control unit 103 controls the operation of the base arm 12, the first arm 13, the second arm 14, the first hand 15, and the second hand 16. From the state shown in FIG. 4, the control unit 103 controls one of the first hand 15 and the second hand 16 (for example, the second hand 16) to advance toward the PASS chamber 5, and in conjunction with this, controls the other arm and hand (for example, the first arm 13 and the first hand 15 in FIG. 7) to rotate in a folded state. In the state shown in FIG. 4, the first arm 13 and the second arm 14 are in the same posture, and the first hand 15 and the second hand 16 are in the same posture.

[0113] As a result, when one of the first hand 15 and the second hand 16 is advanced, the other arm and hand rotate without being extended, so that the vacuum dual-arm robot 1 can operate even in a narrow storage preparation room 30 or processing preparation room 40.

[0114] In addition, in the vacuum double-arm robot 1 of this embodiment, when the control unit 103 retracts one of the first hand 15 and the second hand 16 that has advanced into the PASS chamber 5 (for example, the second hand 16 in Figure 7) and returns it to the state shown in Figure 4, it controls the other arm and hand (for example, the first arm 13 and the first hand 15 in Figure 7) to rotate in a folded state and return it to the state shown in Figure 4 in conjunction with this.

[0115] This allows the first hand 15 and the second hand 16 to perform access operations continuously without having to perform any special hand swap operation, thereby improving the operation efficiency of the vacuum double-arm robot 1.

[0116] The preferred embodiment of the present invention has been described above, but the above configuration can be modified, for example, as follows.

[0117] A control unit that controls each part of the vacuum double-arm robot 1 may be provided inside the base 11.

[0118] The first hand 15 may be provided adjacent to the lower side of the first arm 13. The second hand 16 may be provided adjacent to the upper side of the second arm .

[0119] When either the first hand 15 or the second hand 16 advances / retreats in a linear manner, the other hand and arm may be rotated in conjunction with the rotation of the base arm 12 while maintaining its posture.

[0120] The layout of the load ports 2 around the storage robot 1a and the layout of the processing devices 4 around the processing robot 1b are not limited to those shown in Fig. 1. For example, ten load ports 2 may be arranged around the storage robot 1a in substantially the same arrangement as the processing devices 4.

[0121] The present invention can also be applied to a robot for transporting substrates other than wafers 10 (for example, glass plates). [Explanation of symbols]

[0122] 1. Dual-arm vacuum robot 12 Base Arm 13 First Arm 14 Second Arm 15 First Hand 16 Second Hand 18 Elbow axis (joint axis) 30 Storage preparation room (vacuum space) 40 Processing preparation room (vacuum space)

Claims

1. A vacuum double-arm robot for transporting substrates in a sealed vacuum space, A base arm that can be raised and lowered and rotated; a first arm rotatable relative to the base arm; a second arm rotatable relative to the base arm; a first hand that is rotatably provided with respect to the first arm and that holds and transports the substrate; a second hand that is rotatably provided with respect to the second arm and that holds and transports the substrate; Equipped with the first arm and the second arm are rotatably attached to a tip of the base arm via a joint shaft formed in a hollow space, an angle of the first hand relative to the first arm and an angle of the second hand relative to the second arm are changed independently of each other; A vacuum double-arm robot, wherein harnesses to the first hand and the second hand pass through the inside of the joint shaft.

2. A vacuum double-arm robot for transporting substrates in a sealed vacuum space, A base arm that can be raised and lowered and rotated; a first arm rotatable relative to the base arm; a second arm rotatable relative to the base arm; a first hand that is rotatably provided with respect to the first arm and that holds and transports the substrate; a second hand that is rotatably provided with respect to the second arm and that holds and transports the substrate; Equipped with the first arm and the second arm are rotatably attached to a tip of the base arm via a joint shaft formed in a hollow space, the length of the base arm is greater than the length of the first arm and the length of the second arm; A vacuum double-arm robot, wherein harnesses to the first hand and the second hand pass through the inside of the joint shaft.

3. A vacuum dual-arm robot for transporting substrates in a sealed vacuum space, comprising: A base arm that can be raised and lowered and rotated; a first arm rotatable relative to the base arm; a second arm rotatable relative to the base arm; a first hand that is rotatably provided with respect to the first arm and that holds and transports the substrate; a second hand that is rotatably provided with respect to the second arm and that holds and transports the substrate; Equipped with the first arm and the second arm are rotatably attached to a tip of the base arm via a joint shaft formed in a hollow space, an angle of the first hand relative to the first arm and an angle of the second hand relative to the second arm are changed independently of each other; The first arm includes a first arm gearbox that drives the first arm and a first hand gearbox that drives the first hand, a second arm gearbox that drives the second arm and a second hand gearbox that drives the second hand,

4. A vacuum dual-arm robot for transporting substrates in a sealed vacuum space, comprising: A base arm that can be raised and lowered and rotated; a first arm rotatable relative to the base arm; a second arm rotatable relative to the base arm; a first hand that is rotatably provided with respect to the first arm and that holds and transports the substrate; a second hand that is rotatably provided with respect to the second arm and that holds and transports the substrate; Equipped with the first arm and the second arm are rotatably attached to a tip of the base arm via a joint shaft formed in a hollow space, the length of the base arm is greater than the length of the first arm and the length of the second arm; The first arm includes a first arm gearbox that drives the first arm and a first hand gearbox that drives the first hand, a second arm gearbox that drives the second arm and a second hand gearbox that drives the second hand,

5. A vacuum dual-arm robot for transporting substrates in a sealed vacuum space, comprising: A base arm that can be raised and lowered and rotated; a first arm rotatable relative to the base arm; a second arm rotatable relative to the base arm; a first hand that is rotatably provided with respect to the first arm and that holds and transports the substrate; a second hand that is rotatably provided with respect to the second arm and that holds and transports the substrate; Equipped with the first arm and the second arm are rotatably attached to a tip of the base arm via a joint shaft formed in a hollow space, an angle of the first hand relative to the first arm and an angle of the second hand relative to the second arm are changed independently of each other; a robot control unit that controls the operation of the base arm, the first arm, the second arm, the first hand, and the second hand, the robot control unit controls one of the first hand and the second hand to advance from a basic state in which the first arm and the second arm are in the same posture and the first hand and the second hand are in the same posture, and in conjunction with this, to rotate the other arm and hand in a folded state.

6. A vacuum dual-arm robot for transporting substrates in a sealed vacuum space, comprising: A base arm that can be raised and lowered and rotated; a first arm rotatable relative to the base arm; a second arm rotatable relative to the base arm; a first hand that is rotatably provided with respect to the first arm and that holds and transports the substrate; a second hand that is rotatably provided with respect to the second arm and that holds and transports the substrate; Equipped with the first arm and the second arm are rotatably attached to a tip of the base arm via a joint shaft formed in a hollow space, the length of the base arm is greater than the length of the first arm and the length of the second arm; a robot control unit that controls the operation of the base arm, the first arm, the second arm, the first hand, and the second hand, the robot control unit controls one of the first hand and the second hand to advance from a basic state in which the first arm and the second arm are in the same posture and the first hand and the second hand are in the same posture, and in conjunction with this, to rotate the other arm and hand in a folded state.

7. A vacuum dual-arm robot according to claim 5 or 6, when one of the first hand and the second hand that is extended is retracted to return to the basic state, the robot control unit controls the other arm and hand to rotate in a folded state in conjunction with the retraction to return to the basic state.

8. The vacuum double-arm robot according to any one of claims 1 to 7, a base arm, a first arm, a second arm, a first hand, and a second hand, each of which is independently driven;

9. The vacuum double-arm robot according to any one of claims 1 to 8, a transmission member that constitutes a drive transmission mechanism that transmits a driving force that drives the first arm and the second arm, provided on an outer periphery of the joint shaft;

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