Gas-liquid separation device

Abstract

To provide a gas-liquid separation device that can surely separate exhaust air exhausted from a processing device or the like into gas and liquid.SOLUTION: A gas-liquid separation device, which separates exhaust air into gas and liquid, includes: an outer container; a first cylindrical body that is stored in the outer container; a second cylindrical body that is stored in the outer container; a funnel-shaped first nozzle hanging down inside the second cylindrical body; a first lid body comprising a third cylindrical body that is inserted into the second cylindrical body; a plurality of funnel-shaped second nozzles hanging down from an outer periphery part of the first lid body; and a second lid body comprising a plurality of fourth cylindrical bodies connected to the plurality of second nozzles.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a gas-liquid separator that separates exhaust gas discharged from a processing device or the like into gas and liquid. [Background technology]

[0002] Various types of processing equipment, such as cutting equipment, grinding equipment, machining centers, and NC (Numerical Control) lathes, are used to process workpieces such as semiconductor wafers and resin package substrates. When processing a workpiece with processing equipment, a liquid (processing fluid) such as pure water or oil is supplied to the workpiece depending on the purpose of the processing. Therefore, when the workpiece is processed with processing equipment, mist-like processing fluid is dispersed within the processing chamber where the workpiece is processed.

[0003] If the mist of machining fluid is left adhering to the inside of the processing equipment, it may cause rust in the components constituting the processing equipment, malfunction of electronic devices, etc. Therefore, the mist of machining fluid generated in the processing chamber is discharged to the outside of the processing equipment via an exhaust duct or the like together with the gas in the processing chamber.

[0004] The exhaust gas discharged from the processing equipment is separated into gas and liquid by a gas-liquid separator and then discarded. For example, Patent Document 1 discloses a cyclone-type gas-liquid separator that separates oil mist generated when a workpiece is processed by a machine tool from gas using a swirling flow (cyclone). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] International Publication No. 2014 / 61201 Summary of the Invention [Problem to be solved by the invention]

[0006] The above-described cyclone-type gas-liquid separator separates exhaust gas emitted from processing equipment, etc., into gas and liquid by generating a swirling flow and applying centrifugal force to the liquid contained in the exhaust gas. However, the type and particle size of the liquid (mist) contained in the exhaust gas vary, and even if the exhaust gas is subjected to a swirling flow, sufficient centrifugal force may not be applied to the liquid to remove it from the exhaust gas. In this case, some of the mist-like liquid remains in the exhaust gas, resulting in insufficient separation of the gas and liquid.

[0007] The present invention has been made in view of the above problems, and has as its object to provide a gas-liquid separator that can reliably separate exhaust gas discharged from a processing device or the like into gas and liquid. [Means for solving the problem]

[0008] According to one aspect of the present invention, a gas-liquid separator for separating exhaust gas into gas and liquid includes an outer container having a supply port formed in a side wall for supplying the exhaust gas, a bottom wall at the bottom, and an opening that opens at the top; a first cylindrical body that forms a first gap and a second gap inside the outer container and is housed in the outer container so as not to contact the bottom wall; a second cylindrical body that forms a third gap inside the first cylindrical body and is housed in the outer container so as not to contact the bottom wall; a funnel-shaped first nozzle that hangs down inside the second cylindrical body; a communication passage that is provided above the first nozzle and communicates from the third gap to the inside of the second cylindrical body; a third cylindrical body having a nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening, the nozzle opening extending from the nozzle opening to the nozzle opening

[0009] Preferably, the flow path is formed so as to slope downward from the second gap toward the inside of the second cylinder, and three or more of the flow paths are arranged at predetermined intervals. Also, preferably, the suction unit is a fan.

[0010] Also, preferably, when the suction unit is operated, the exhaust air enters the first gap from the supply port and is separated into a first waste liquid and a first exhaust air, the first waste liquid reaches the bottom of the outer container and is discharged through the drain hose, the first exhaust air enters the first nozzle from the first gap through the connecting passage and is separated into a second waste liquid and a second exhaust air, the second waste liquid reaches the bottom of the outer container and is discharged through the drain hose, the second exhaust air enters the plurality of second nozzles from the third cylindrical body through the fifth gap and is separated into a third waste liquid and a third exhaust air, the third waste liquid passes through the flow path and the inside of the second cylindrical body to the bottom of the outer container and is discharged through the drain hose, and the third exhaust air enters the fourth cylindrical body and reaches the suction unit. [Effects of the Invention]

[0011] A gas-liquid separator according to one aspect of the present invention generates three types of swirling flows inside an outer container, and these swirling flows can perform gas-liquid separation of exhaust gas discharged from a processing device, etc. This makes it possible to remove various liquids of different types, particle sizes, etc. from the exhaust gas, ensuring separation of the exhaust gas into gas and liquid. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 2 is an exploded perspective view showing the gas-liquid separation device. [Figure 2] FIG. 2 is a cross-sectional view showing the outer container. [Figure 3] FIG. 3 is a cross-sectional view showing a swirl flow generating unit. [Figure 4] FIG. 2 is a perspective view showing a swirl flow generating unit, a first lid body, and a second lid body. [Figure 5] FIG. 5(A) is a perspective view showing the upper surface side of the first lid, and FIG. 5(B) is a perspective view showing the lower surface side of the first lid. [Figure 6] FIG. 6(A) is a perspective view showing the upper surface side of the second lid, and FIG. 6(B) is a perspective view showing the lower surface side of the second lid. [Figure 7] FIG. 2 is a perspective view showing a gas-liquid separator. [Figure 8] FIG. 2 is a cross-sectional view showing a gas-liquid separator. [Figure 9] FIG. 2 is a cross-sectional view showing a gas-liquid separator that separates gas and liquid by a first swirling flow. [Figure 10] FIG. 10 is a cross-sectional view showing a gas-liquid separator that separates gas and liquid by a second swirling flow. [Figure 11] FIG. 10 is a cross-sectional view showing a gas-liquid separator that performs gas-liquid separation by a third swirling flow. DETAILED DESCRIPTION OF THE INVENTION

[0013] An embodiment according to one aspect of the present invention will be described below with reference to the accompanying drawings. First, a configuration example of a gas-liquid separation device according to this embodiment will be described. Fig. 1 is an exploded perspective view showing a gas-liquid separation device 2. In Fig. 1, the X-axis direction (first horizontal direction) and the Y-axis direction (second horizontal direction) are directions perpendicular to each other. Furthermore, the Z-axis direction (vertical direction, up-down direction, height direction) is a direction perpendicular to the X-axis direction and the Y-axis direction.

[0014] The gas-liquid separator 2 includes an outer container 4 that houses the various components that make up the gas-liquid separator 2. The outer container 4 is made of resin, metal, or the like, and includes a bowl-shaped case 6 and a hollow, cylindrical cover 8. The outer container 4 is formed by fixing the lower end of the cover 8 to the upper end of the case 6. In addition, an exhaust path 10 is provided on the side of the case 6, through which exhaust gas discharged from a processing device or the like is supplied.

[0015] 2 is a cross-sectional view showing the outer container 4. The case 6 includes a cylindrical side wall 6a and a truncated conical bottom wall 6b connected to the lower end of the side wall 6a. A cylindrical drain (communication hole) 6c that communicates from the inside to the outside of the case 6 is provided in the center of the bottom wall 6b. The cover 8 also includes a cylindrical side wall 8a and an annular partition ring (protrusion, convex portion) 8b that protrudes from the lower end of the side wall 8a toward the center of the cover 8.

[0016] The case 6 and the cover 8 are integrated by joining the lower end of the cover 8 to the upper end of the side wall 6a of the case 6. The side wall 6a of the case 6 and the side wall 8a of the cover 8 form the side wall of the outer container 4. The internal space of the case 6 and the internal space of the cover 8 are connected to form the opening 4a of the outer container 4. The opening 4a opens at the top of the outer container 4.

[0017] The exhaust path 10 is connected to the side wall 6a of the case 6. The tip of the exhaust path 10 opens at the inner peripheral surface of the side wall 6a and forms a circular supply port 10a that supplies exhaust air into the interior of the outer container 4. The center line of the exhaust path 10 is inclined with respect to the radial direction of the case 6 in the horizontal plane (XY plane), and the supply port 10a opens toward the space between the center of the case 6 and the side wall 6a. When exhaust air discharged from a processing device or the like is supplied to the exhaust path 10, the exhaust air flows into the interior of the outer container 4 from the supply port 10a.

[0018] 1, a cylindrical swirl flow generating unit 12 is housed and fixed in the outer container 4. The swirl flow generating unit 12 is inserted into the outer container 4 so as to be arranged concentrically with the case 6 and the cover 8.

[0019] 3 is a cross-sectional view showing the swirl flow generating unit 12. The swirl flow generating unit 12 is made of resin, metal, or the like, and includes a first cylindrical body 14 and a second cylindrical body 16 provided inside the first cylindrical body 14. The first cylindrical body 14 is formed in a hollow cylindrical shape and includes an annular outer peripheral surface 14a and an annular inner peripheral surface 14b. The second cylindrical body 16 is formed in a hollow cylindrical shape with a smaller diameter than the first cylindrical body 14 and includes an annular outer peripheral surface 16a and an annular inner peripheral surface 16b. The lower end 14c of the first cylindrical body 14 and the lower end 16c of the second cylindrical body 16 each open downward.

[0020] The first cylindrical body 14 and the second cylindrical body 16 are concentrically arranged along the Z-axis direction. The height of the first cylindrical body 14 is lower than the height of the second cylindrical body 16, and the upper end of the first cylindrical body 14 and the upper end of the second cylindrical body 16 are connected via an annular connecting portion 12a. Therefore, the lower end 14c of the first cylindrical body 14 is positioned higher than the lower end 16c of the second cylindrical body 16.

[0021] A funnel-shaped first nozzle 18 is provided inside the second cylindrical body 16. The first nozzle 18 is formed in a hollow truncated cone shape and includes an annular outer peripheral surface 18a and an inner peripheral surface 18b. The upper end of the first nozzle 18 is connected to the inner peripheral surface 16b of the second cylindrical body 16, and the first nozzle 18 hangs down inside the second cylindrical body 16 so that its diameter decreases from the upper end to the lower end. The lower end 18c of the first nozzle 18 opens toward the lower end 16c of the second cylindrical body 16.

[0022] The space surrounded by the upper part of the second cylindrical body 16 and the first nozzle 18 constitutes the opening 12b of the swirl flow generating unit 12. The opening 12b opens at the upper part of the second cylindrical body 16.

[0023] A circular communication passage 20 is provided in the upper part of the second cylindrical body 16, extending from the outer peripheral surface 16a to the inner peripheral surface 16b. The communication passage 20 is formed above the first nozzle 18, and communicates from the outside to the inside of the second cylindrical body 16. The center line of the communication passage 20 is inclined relative to the radial direction of the second cylindrical body 16 in the horizontal plane (XY plane), and the communication passage 20 opens toward the space between the center of the second cylindrical body 16 and the inner peripheral surface 16b.

[0024] The swirl flow generating unit 12 also includes a plurality of flow paths (liquid paths) 22 that connect the outside of the first cylindrical body 14 and the inside of the second cylindrical body 16. The flow paths 22 are connected to the first cylindrical body 14 and the second cylindrical body 16 so as to cross the gap between the first cylindrical body 14 and the second cylindrical body 16. One end of the flow paths 22 opens at the outer peripheral surface 14a of the first cylindrical body 14, and the other end of the flow paths 22 opens at the inner peripheral surface 16b of the second cylindrical body 16.

[0025] For example, three or more flow paths 22 are arranged at predetermined intervals along the circumferential direction of the first cylindrical body 14 and the second cylindrical body 16. Each of the flow paths 22 is formed so as to slope downward from the outer circumferential surface 14a of the first cylindrical body 14 toward the inner circumferential surface 16b of the second cylindrical body 16.

[0026] 4 is a perspective view showing the swirl flow generating unit 12, the first lid body 24, and the second lid body 32. The first lid body 24 and the second lid body 32, which are made of resin, metal, or the like, are stacked in this order on the swirl flow generating unit 12.

[0027] Fig. 5(A) is a perspective view showing the upper surface side of the first lid body 24, and Fig. 5(B) is a perspective view showing the lower surface side of the first lid body 24. The first lid body 24 has a disk-shaped base 26 having a larger diameter than the first cylindrical body 14 (see Fig. 4). The base 26 includes an upper surface 26a and a lower surface 26b that are generally parallel to each other.

[0028] 5(A), a plurality of through holes 26c are provided in the outer periphery of the base 26. The plurality of through holes 26c are formed so as to reach from the upper surface 26a to the lower surface 26b, and penetrate the base 26 in the thickness direction. The plurality of through holes 26c are also arranged at approximately equal intervals along the circumferential direction of the base 26.

[0029] A substantially cylindrical recess 26d is provided on the upper surface 26a side of the center of the base 26. Furthermore, a plurality of slit-like grooves 26e are provided between the plurality of through holes 26c and the recess 26d, connecting the through holes 26c and the recess 26d. One end of the groove 26e is connected to the through hole 26c, and the other end of the groove 26e is connected to the recess 26d. The plurality of grooves 26e are formed so as to incline in the same direction relative to the radial direction of the base 26. Furthermore, a circular through hole 26f is provided in the center of the first lid 24, extending from the bottom of the recess 26d to the underside 26b of the base 26.

[0030] 5(B), a hollow, cylindrical third cylinder 28 is provided on the underside 26b of the central portion of the base 26. The third cylinder 28 is provided so as to protrude downward from the underside 26b of the base 26, and is connected to a through-hole 26f of the base 26. The diameter of the third cylinder 28 is smaller than the diameter of the inner circumferential surface 16b of the second cylinder 16 (see FIG. 3), and the third cylinder 28 can be inserted into the inside of the second cylinder 16.

[0031] Furthermore, a plurality of funnel-shaped second nozzles 30 are provided on the outer periphery of the first lid 24. The plurality of second nozzles 30 are formed in a hollow cone shape, and the number of the second nozzles 30 is the same as the number of the through-holes 26c (see FIG. 5(A)).

[0032] The upper end of second nozzle 30 is connected to through-hole 26c on lower surface 26b of base 26, and second nozzle 30 hangs down from base 26 so that its diameter decreases from the upper end to the lower end. The diameter of the upper end of second nozzle 30 is smaller than the diameter of the upper end of first nozzle 18 (see FIG. 3), and the diameter of the lower end of second nozzle 30 is smaller than the diameter of the lower end of first nozzle 18. The lower end 30a of second nozzle 30 opens downward.

[0033] Fig. 6(A) is a perspective view showing the upper surface side of the second lid body 32, and Fig. 6(B) is a perspective view showing the lower surface side of the second lid body 32. The second lid body 32 has a disk-shaped base 34 that is generally the same shape as the base 26 (see Figs. 5(A) and 5(B)) of the first lid body 24. The base 34 includes an upper surface 34a and a lower surface 34b that are generally parallel to each other.

[0034] As shown in Fig. 6(A), a plurality of through holes 34c are provided on the outer periphery of the base 34. The plurality of through holes 34c are formed so as to reach from the upper surface 34a to the lower surface 34b, and penetrate the base 34 in the thickness direction. The number of through holes 34c provided is the same as the number of through holes 26c (see Fig. 5(A)) in the first cover 24, and the plurality of through holes 34c are arranged along the outer periphery of the base 34 at approximately the same intervals as the through holes 26c.

[0035] Additionally, a plurality of hollow cylindrical fourth cylinders 36 are provided on the outer periphery of the second cover 32. The fourth cylinders 36 are formed to protrude downward from the lower surface 34b of the base 34 and are connected to the through holes 34c. The diameter of the fourth cylinders 36 is smaller than the diameter of the through holes 26c (see FIG. 5(A)) of the first cover 24, and the fourth cylinders 36 can be inserted into the through holes 26c.

[0036] 4, the first lid body 24 is placed on the swirl flow generating unit 12 so that the third cylinder 28 is inserted into the second cylinder (opening 12b). This causes the top of the swirl flow generating unit 12 to be covered by the first lid body 24. The second lid body 32 is stacked on the first lid body 24 so that the multiple fourth cylinders 36 are inserted into the multiple through-holes 26c, respectively.

[0037] 1, a cover 38 is disposed on the upper side of the second lid 32. For example, the cover 38 is a bowl-shaped member made of resin, metal, or the like, and is fixed to the upper end of the outer container 4 so as to cover the upper surface side of the second lid 32. A circular opening 38a that communicates from the outside to the inside of the cover 38 is provided in the center of the upper end side of the cover 38.

[0038] A suction unit 40 is disposed above the second lid 32. The suction unit 40 generates an airflow toward the suction unit 40 inside the outer container 4 by sucking in gas supplied from the exhaust path 10 to the inside of the outer container 4. For example, the suction unit 40 is configured by a fan and is fixed on the cover 38. However, there are no limitations on the type of suction unit 40 as long as it is possible to generate an airflow toward the suction unit 40 inside the outer container 4. For example, a suction source such as an ejector can be used as the suction unit 40.

[0039] As described above, the swirl flow generating unit 12 is housed in the outer container 4, and the first lid 24 and the second lid 32 are placed on the outer container 4 and the swirl flow generating unit 12. The first lid 24 and the second lid 32 are covered with a cover 38, and a suction unit 40 is attached to the cover 38. This completes the gas-liquid separator 2, which separates exhaust gas discharged from a processing device or the like into gas and liquid. FIG. 7 is a perspective view showing the gas-liquid separator 2.

[0040] The gas-liquid separator 2 is connected to a processing device such as a cutting device, a grinding device, a polishing device, a laser processing device, etc. The processing device may also be a machining center, an NC (Numerical Control) lathe, etc. Exhaust gas discharged from the processing device is supplied to the gas-liquid separator 2.

[0041] When processing a workpiece with a processing device, a liquid (processing liquid) such as pure water or oil is supplied to the workpiece depending on the purpose of the processing. Therefore, when the workpiece is processed with the processing device, mist-like liquid is dispersed in the processing chamber where the workpiece is processed, and exhaust gas containing the mist-like liquid is discharged from the processing device. Then, the gas-liquid separator 2 separates the exhaust gas discharged from the processing device into gas and liquid.

[0042] 8 is a cross-sectional view showing the gas-liquid separation device 2. When the swirl flow generating unit 12 is housed in the outer container 4, the first cylindrical body 14 forms a first gap 50a and a second gap 50b inside the outer container 4. The first gap 50a corresponds to the annular gap formed between the case 6 and the outer peripheral surface 14a of the first cylindrical body 14. The second gap 50b corresponds to the annular gap formed between the cover 8 and the outer peripheral surface 14a of the first cylindrical body 14.

[0043] The second cylindrical body 16 also forms a third gap 50c inside the first cylindrical body 14. The third gap 50c corresponds to an annular gap formed between the inner circumferential surface 14b of the first cylindrical body 14 and the outer circumferential surface 16a of the second cylindrical body 16.

[0044] For example, the swirl flow generating unit 12 is joined to and supported by the partition ring 8b of the cover 8. This integrates the outer container 4 and the swirl flow generating unit 12, and the first gap 50a and the second gap 50b are partitioned and separated by the partition ring 8b. Furthermore, multiple flow paths 22 are arranged so as to extend from the second gap 50b across the third gap 50c to the inside of the second cylindrical body 16. The flow paths 22 are inclined downward from the second gap 50b toward the inside of the second cylindrical body 16.

[0045] The first cylindrical body 14 and the second cylindrical body 16 are housed in the outer container 4 so as not to come into contact with the bottom wall 6b of the outer container 4. Therefore, the lower end 14c of the first cylindrical body 14 and the lower end 16c of the second cylindrical body 16 are exposed inside the outer container 4.

[0046] The first cover 24 is arranged to cover the upper part of the opening 12b of the swirl flow generating unit 12, the upper part of the first cylindrical body 14, and the upper part of the second cylindrical body 16. At this time, the third cylindrical body 28 is inserted into the second cylindrical body 16 (opening 12b). As a result, the third cylindrical body 28 forms a fourth gap 50d inside the second cylindrical body 16. The fourth gap 50d corresponds to an annular gap formed between the inner circumferential surface 16b of the second cylindrical body 16 and the third cylindrical body 28.

[0047] The communicating passage 20 communicates from the upper part of the third gap 50c to the inside of the second cylindrical body 16. The lower end of the third cylindrical body 28 is positioned lower than the lower end of the communicating passage 20. Therefore, the third cylindrical body 28 inserted into the second cylindrical body 16 faces the communicating passage 20.

[0048] The second nozzles 30 hanging down from the outer periphery of the first lid 24 are inserted into the second gaps 50b. The partition ring 8b is provided below the second nozzles 30, and the second nozzles 30 do not come into contact with the partition ring 8b. Therefore, the lower ends 30a of the second nozzles 30 are exposed in the second gaps 50b.

[0049] The second lid body 32 is stacked on the first lid body 24 so that the fourth cylindrical bodies 36 are inserted into the through holes 26c of the first lid body 24. This connects the fourth cylindrical bodies 36 to the second nozzles 30. The fourth cylindrical bodies 36 form a fifth gap 50e inside the first lid body 24. The fifth gap 50e corresponds to an annular gap formed between the inner wall of the through holes 26c and the side surface (outer peripheral surface) of the fourth cylindrical bodies 36.

[0050] A drain hose (tube) 42 is connected to the bottom of the outer container 4. One end (fixed end) of the drain hose 42 is connected to the drain 6c. The other end (free end) of the drain hose 42 is immersed in a liquid such as water stored in a liquid reservoir (container) and is sealed by the liquid (liquid seal). As will be described later, when the gas-liquid separator 2 separates the exhaust gas into gas and liquid, the liquid (waste liquid) separated from the exhaust gas accumulates at the bottom of the outer container 4. The waste liquid is then discharged to the outside of the outer container 4 via the drain 6c and the drain hose 42, and is captured and collected by the liquid stored in the liquid reservoir.

[0051] Next, a description will be given of the details of gas-liquid separation by the gas-liquid separator 2. For example, an exhaust duct (not shown) through which exhaust air from a processing device is discharged is connected to the exhaust path 10. The exhaust air discharged from the processing device is supplied to the inside of the outer container 4 through the exhaust path 10.

[0052] When performing gas-liquid separation, the suction unit 40 (see FIGS. 1 and 7) is operated to suck gas from inside the outer container 4 by the suction unit 40, generating an airflow from the exhaust path 10 toward the suction unit 40. As a result, a first swirling flow 60a (see FIG. 9), a second swirling flow 60b (see FIG. 10), and multiple third swirling flows 60c (see FIG. 11) are generated inside the outer container 4. Then, the centrifugal forces of the three types of swirling flows separate liquid (waste liquid) from the exhaust gas supplied inside the outer container 4.

[0053] 9 is a cross-sectional view showing a gas-liquid separator 2 that separates gas and liquid using a first swirling flow 60a. When the suction unit 40 (see FIGS. 1 and 7) is operated, the exhaust air in the exhaust path 10 is drawn into the outer container 4, and the exhaust air enters the first gap 50a from the supply port 10a. The exhaust air then becomes a first swirling flow 60a that flows spirally around the first cylindrical body 14, and flows toward the bottom wall 6b of the outer container 4.

[0054] When the first swirling flow 60a is generated, centrifugal force acts on the liquid contained in the exhaust gas, causing the liquid to separate from the exhaust gas. For example, mist-like liquid with particle diameters of approximately 10 μm separates from the exhaust gas. This causes gas-liquid separation of the exhaust gas supplied from the supply port 10a, separating the exhaust gas into a first waste liquid and a first exhaust gas. The first waste liquid then flows along the side wall 6a and bottom wall 6b of the case 6 to the bottom (drain 6c) of the outer container 4 and is discharged via the drain hose 42.

[0055] 10 is a cross-sectional view showing a gas-liquid separator 2 that performs gas-liquid separation using a second swirling flow 60b. The first exhaust gas generated by the first swirling flow 60a is carried from the first gap 50a to the upper part of the third gap 50c by an ascending air current generated in the third gap 50c. The first exhaust gas is then supplied from the third gap 50c through the communicating passage 20 into the interior of the second cylindrical body 16 and enters the first nozzle 18. At this time, the first exhaust gas becomes a second swirling flow 60b that flows spirally inside the second cylindrical body 16 and the first nozzle 18, and flows toward the lower end 18c of the first nozzle 18.

[0056] When the second swirling flow 60b is generated, centrifugal force acts on the liquid contained in the first exhaust gas, causing the liquid to separate from the first exhaust gas. For example, mist-like liquid with a particle diameter of approximately 5 μm separates from the first exhaust gas. This causes gas-liquid separation of the first exhaust gas, separating the first exhaust gas into a second waste liquid and the second exhaust gas. The second waste liquid then flows out from the lower end 18c of the first nozzle 18 and reaches the bottom (drain 6c) of the outer container 4, where it is discharged via the drain hose 42.

[0057] The diameter of the second swirling flow 60b is smaller than the diameter of the first swirling flow 60a (see FIG. 9). Therefore, the second swirling flow 60b exerts a stronger centrifugal force on the liquid in the exhaust than the first swirling flow 60a, and can separate finer liquid particles. As a result, the liquid that was not completely removed by the first swirling flow 60a is separated from the first exhaust by the second swirling flow 60b.

[0058] 11 is a cross-sectional view showing a gas-liquid separator 2 that performs gas-liquid separation using a third swirling flow 60c. The second exhaust gas generated by the second swirling flow 60b is carried to the third cylindrical body 28 by an ascending air current generated inside the second cylindrical body 16 and the first nozzle 18. The second exhaust gas then enters the plurality of second nozzles 30 from the third cylindrical body 28 through the fifth gap 50e.

[0059] Specifically, the second exhaust gas that enters the third cylindrical body 28 branches radially at the recess 26d, passes through the plurality of grooves 26e and the plurality of through-holes 26c (see FIG. 5(A)), and is supplied to the plurality of second nozzles 30. Then, the second exhaust gas becomes a third swirling flow 60c that flows spirally inside the second nozzle 30, and flows toward the lower end 30a of the second nozzle 30.

[0060] When the third swirling flow 60c is generated, centrifugal force acts on the liquid contained in the second exhaust gas, causing the liquid to separate from the second exhaust gas. For example, mist-like liquid with a particle diameter of approximately 2 μm separates from the second exhaust gas. This causes gas-liquid separation of the second exhaust gas, separating the second exhaust gas into a third waste liquid and the third exhaust gas. The third waste liquid then flows out from the lower end 30a of the second nozzle 30, passes through the multiple flow paths 22, and reaches the bottom of the outer container 4, where it is discharged from the bottom (drain 6c) of the outer container 4 via the drain hose 42.

[0061] The diameter of the third swirling flow 60c is smaller than the diameter of the second swirling flow 60b (see FIG. 10). Therefore, the third swirling flow 60c exerts a stronger centrifugal force on the liquid in the exhaust than the second swirling flow 60b, allowing finer liquid particles to separate. As a result, the liquid that was not completely removed by the second swirling flow 60b is separated from the second exhaust by the third swirling flow 60c.

[0062] The third exhaust gas generated by the third swirling flow 60c enters the fourth cylindrical body 36 due to an updraft generated inside the second nozzles 30. The third exhaust gas then travels from the fourth cylindrical body 36 through the opening 38a of the cover 38 to the suction unit 40 (see FIGS. 1 and 7) and is discharged.

[0063] As described above, the gas-liquid separation device 2 according to this embodiment generates three types of swirling flows (first swirling flow 60a, second swirling flow 60b, and third swirling flow 60c) inside the outer container 4, and these swirling flows can perform gas-liquid separation of exhaust gas discharged from a processing device or the like. This makes it possible to separate various liquids of different types, particle sizes, etc. from the exhaust gas, and the exhaust gas is reliably separated into gas and liquid.

[0064] Furthermore, in the gas-liquid separator 2, the drain 6c to which the drain hose 42 is connected is provided at the bottom of the outer container 4, so that waste liquid generated by gas-liquid separation can be constantly discharged to the outside of the gas-liquid separator 2. This prevents sediment from building up inside the gas-liquid separator 2, reducing the frequency with which the gas-liquid separator 2 needs to be disassembled and cleaned.

[0065] The structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0066] 2 Gas-liquid separator 4 Outer container 4a opening 6 cases 6a side wall 6b bottom wall 6c Drain (communicating hole) 8 Cover 8a side wall 8b Partition ring (protrusion, convex part) 10 Exhaust passage 10a Supply port 12 Swirl flow generation unit 12a Connecting part 12b opening 14 First Cylinder 14a Outer surface 14b Inner surface 14c bottom edge 16 Second Cylinder 16a Outer surface 16b Inner surface 16c bottom end 18 First Nozzle 18a Outer surface 18b Inner surface 18c bottom end 20 Communication path 22 Flow path (liquid path) 24 First lid 26 Foundation 26a Top side 26b Bottom surface 26c through hole 26d Recess 26e groove 26f through hole 28 Third Cylinder 30 Second Nozzle 30a bottom end 32 Second lid 34 Foundation 34a Top 34b Bottom side 34c through hole 36 Fourth Cylinder 38 Cover 38a opening 40 Suction Unit 42 Drain hose (tube) 50a First Gap 50b Second gap 50c Third Gap 50d Fourth Gap 50e The Fifth Gap 60a First swirl flow 60b Second swirl flow 60c Third Swirl

Claims

1. A gas-liquid separator that separates exhaust gas into gas and liquid, an outer container having a supply port formed in a side wall for supplying the exhaust gas, a bottom wall at a lower portion, and an opening that opens at an upper portion; a first cylindrical body that forms a first gap and a second gap inside the outer container and is housed in the outer container so as not to come into contact with the bottom wall; a second cylindrical body that forms a third gap inside the first cylindrical body and is housed in the outer container so as not to come into contact with the bottom wall; a funnel-shaped first nozzle depending from the inside of the second cylindrical body; a communication passage provided above the first nozzle and communicating from the third gap to the inside of the second cylindrical body; a third cylinder that forms a fourth gap inside the second cylinder and is inserted into the second cylinder so as to face the communication passage; a first cover that covers an upper portion of the opening, an upper portion of the first cylinder, and an upper portion of the second cylinder; a plurality of funnel-shaped second nozzles that hang down from the outer periphery of the first lid and are inserted into the second gap; a second lid body that forms a fifth gap inside the first lid body and includes a plurality of fourth cylindrical bodies that are connected to the plurality of second nozzles, and is stacked on the first lid body; an annular partition ring provided below the second nozzle and partitioning the first gap and the second gap; a flow path extending from the second gap across the third gap to the inside of the second cylindrical body; The gas-liquid separator is characterized in that a drain to which a drain hose is connected is provided at the bottom of the outer container, and a suction unit is disposed above the second lid.

2. 2. The gas-liquid separator according to claim 1, wherein the flow passages are formed so as to slope downward from the second gap toward the inside of the second cylindrical body, and three or more of the flow passages are arranged at predetermined intervals.

3. 3. The gas-liquid separator according to claim 1, wherein the suction unit is a fan.

4. When the suction unit is activated, the exhaust gas enters the first gap from the supply port and is separated into a first waste liquid and a first exhaust gas; The first waste liquid reaches the bottom of the outer container and is discharged through the drain hose, the first exhaust gas enters the first nozzle through the first gap and the communication passage, and is separated into a second waste liquid and a second exhaust gas; The second waste liquid reaches the bottom of the outer container and is discharged through the drain hose. the second exhaust gas enters the second nozzles from the third cylinder through the fifth gap and is separated into a third waste liquid and a third exhaust gas; the third waste liquid passes through the flow path and the inside of the second cylindrical body, reaches the bottom of the outer container, and is discharged through the drain hose; 4. The gas-liquid separator according to claim 1, wherein the third exhaust gas enters the fourth cylindrical body and reaches the suction unit.

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