Entrance group three-dimensional

Abstract

An inlet assembly, an abatement apparatus and a method are disclosed. The inlet assembly is for an abatement apparatus that processes an exhaust stream from a semiconductor processing tool, the inlet assembly comprising an inlet nozzle configured to deliver the exhaust stream into a combustion chamber of the abatement apparatus and a reactant nozzle configured to deliver a reactant into the combustion chamber of the abatement apparatus, the reactant nozzle being arranged coaxially with the inlet nozzle, and the reactant nozzle being configured to deliver different amounts of reactant at different positions around the circumference. In this way, the amount of reactant provided to the combustion chamber to aid in abatement of the exhaust stream can be varied at different positions or locations around the exhaust stream. This allows the flow rate of the reactant to be matched to the flow rate of the exhaust stream discharged from the inlet nozzle into the combustion chamber, which provides the correct amount of reactant to match the flow rate of the exhaust stream at different positions, which improves the destruction rate efficiency of the abatement apparatus without causing an overfeed of reactant.

Description

[Technical Field]

[0001] The field of the invention relates to inlet assemblies, abatement devices and methods. [Background technology]

[0002] Abatement devices, such as radiant burners or other types of abatement devices, are known and are typically used to treat exhaust gas streams from manufacturing process tools used, for example, in the semiconductor or flat panel display manufacturing industries. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the exhaust gas streams pumped from the process tools. PFCs are difficult to remove from the exhaust gases, and their release into the environment is undesirable because they are known to have a relatively high greenhouse effect.

[0003] Known radiant burners, such as those described in European Patent Publication No. 0,694,735, use combustion to remove PFCs and other compounds from an exhaust gas stream. Typically, the exhaust gas stream is a nitrogen stream containing PFCs and other compounds. The exhaust gas stream is conveyed to a combustion chamber laterally surrounded by the exit face of a perforated gas burner. In some cases, a treatment material, such as a fuel gas, can be mixed with the exhaust gas stream before entering the combustion chamber. The fuel gas and air are simultaneously supplied to the perforated burner to affect combustion at the exit face. Combustion products from the perforated burner react with the exhaust stream mixture to combust the compounds in the exhaust stream. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] European Publication No. 0,694,735 Summary of the Invention [Problem to be solved by the invention]

[0005] Although abatement designs exist, each has its own drawbacks. It would therefore be desirable to provide an improved design for an abatement device. [Means for solving the problem]

[0006] According to a first aspect, an inlet assembly for an abatement apparatus for treating an exhaust stream from a semiconductor processing tool is provided, the inlet assembly comprising: an inlet nozzle configured to deliver the exhaust stream into a combustion chamber of the abatement apparatus; and a reactant nozzle configured to deliver a reactant into the combustion chamber of the abatement apparatus, the reactant nozzle being positioned coaxially with respect to the inlet nozzle, and the reactant nozzle being configured to deliver different amounts of reactant at different positions around its circumference.

[0007] The first aspect recognizes that a problem with existing abatement systems is that abatement performance may not be optimal under certain operating conditions. In particular, destruction rate efficiency under some conditions may not be as high as desired and / or an oversupply of reactants may be required to achieve a particular destruction rate efficiency.

[0008] Accordingly, an inlet assembly is provided. The inlet assembly may be for an abatement apparatus. The abatement apparatus may be for treating an exhaust stream from a semiconductor processing tool. The inlet assembly may include an inlet nozzle. The inlet nozzle may be configured to deliver the exhaust stream into a combustion chamber of the abatement apparatus. The inlet assembly may include a reactant nozzle. The reactant nozzle may be configured to deliver a reactant into the combustion chamber of the abatement apparatus. The reactant nozzle may be coaxially positioned relative to the inlet nozzle or may be positioned to surround the inlet nozzle. The reactant nozzle may be configured or positioned to deliver reactants in different portions, amounts, or flow rates at different locations around the circumference. In this manner, the amount of reactant supplied to the combustion chamber to aid in abatement of the exhaust stream may be varied at different locations or locations around the exhaust stream. This allows the flow rate of the reactant to be matched to the flow rate of the exhaust stream discharged from the inlet nozzle into the combustion chamber, which provides the correct amount of reactant to match the flow rate of the exhaust stream at different locations, which improves the destruction rate efficiency of the abatement apparatus without causing an oversupply of reactant.

[0009] The inlet nozzle and reactant nozzle may be positioned or configured to deliver or convey the reactants into the combustion chamber coaxially with respect to the exhaust stream, in other words, the reactants may be delivered into the combustion chamber adjacent to the exhaust stream.

[0010] The inlet assembly may include an upstream gallery, which may be constructed or arranged to deliver or supply reactants to the periphery of the reactant nozzle.

[0011] The inlet nozzle and the reactant nozzle may be configured to deliver or convey the reactants into the combustion chamber. The reactants may be delivered or conveyed to surround the exhaust stream that is delivered or conveyed to the combustion chamber.

[0012] The reactant nozzle can be configured or arranged to deliver more reactant near a first region, portion, or section of the exhaust stream than near a second region, portion, or section of the exhaust stream. In other words, the reactant can be delivered at a greater flow rate near the first region than near the second region. This provides more reactant in the first region compared to the reactant in the second region.

[0013] The reactant nozzle can be configured or arranged to deliver or carry more reactant in a first portion of the reactant nozzle than in a second portion of the reactant nozzle, in other words, the reactant nozzle can deliver a greater flow rate of reactant in the first portion than in the second portion.

[0014] The inlet nozzle can have an oval cross-section. The reactant nozzle can have an annular oval cross-section. The reactant nozzle can be configured to deliver more reactant near the circular portion of the annular oval cross-section than within the straight portion of the annular oval cross-section. In other words, the reactant nozzle can be configured to deliver reactant at a greater flow rate in the circular portion than within the straight portion.

[0015] The inner surface of the reactant nozzle can be spaced apart from the outer surface of the inlet nozzle. The gap distance between the inner surface of the reactant nozzle and the outer surface of the inlet nozzle can vary around the circumference to deliver different amounts of reactant at different locations around the circumference. In other words, the distance between the reactant nozzle and the inlet nozzle can be varied to deliver different flow rates of reactant at different locations within the reactant nozzle.

[0016] The gap distance can be larger at locations requiring more reactant delivery than at locations requiring less reactant delivery, or in other words, the gap distance can be varied to change the flow rate of reactant delivered at different locations within the reactant nozzle.

[0017] The gap distance may be greater in or adjacent to the circular portion of the annular oval cross section than in the straight portion of the annular oval cross section.

[0018] The reactants can be supplied to the reactant nozzle through openings positioned around the periphery that are configured to deliver different amounts of reactants at different locations around the periphery. By configuring the openings around the reactant nozzle, different locations within the inlet nozzle can be delivered with different flow rates of reactants.

[0019] The openings may extend radially.

[0020] The size and / or density of the openings may vary at different locations around the circumference.

[0021] The size and / or density of the openings can be larger in locations requiring more reactant delivery than in locations requiring less reactant delivery, or in other words, by configuring the size and / or density of the openings, a larger flow rate of reactant can be delivered at some locations and a smaller flow rate of reactant can be delivered at other locations within the reactant nozzle.

[0022] The size and / or density of the openings may be greater within or adjacent to the circular portion of the annular oval cross-section than within the linear portion of the annular oval cross-section.

[0023] The reactants can be supplied to the reactant nozzles through perforated material positioned around the periphery. The perforated material can have different porosities to deliver different amounts of reactants at different locations around the periphery. In other words, by varying the porosity, the flow rate of the reactants can be different at different locations around the periphery.

[0024] According to a second aspect, there is provided an abatement apparatus comprising the inlet assembly of the first aspect.

[0025] The abatement device may include the features of the inlet assembly described above.

[0026] According to a third aspect, a method is provided that includes the steps of delivering an exhaust stream into a combustion chamber of an abatement device using an inlet nozzle, positioning a reactant nozzle coaxially with the inlet nozzle, and configuring the reactant nozzle to deliver different amounts of reactant at different positions around its circumference.

[0027] The method may include configuring an inlet nozzle and a reactant nozzle to deliver reactants into the combustion chamber coaxially with respect to the exhaust flow.

[0028] The method can include supplying a reactant from an upstream gallery to a periphery of the reactant nozzle.

[0029] The method may include configuring an inlet nozzle and a reactant nozzle to deliver reactants into the combustion chamber while surrounding the exhaust flow.

[0030] The method can include configuring the reactant nozzle to deliver more reactant near a first region of the exhaust flow than near a second region of the exhaust flow.

[0031] The method can include configuring to deliver more reactant in a first portion of the reactant nozzle than in a second portion of the reactant nozzle.

[0032] The inlet nozzle can include an oval cross-section and the reactant nozzle can include an annular oval cross-section, and the method can include configuring the reactant nozzle to deliver more reactant within a vicinity of a circular portion of the annular oval cross-section than within a straight portion of the annular oval cross-section.

[0033] The method can include spacing an inner surface of the reactant nozzle from an outer surface of the inlet nozzle and configuring a gap distance between the inner surface of the reactant nozzle and the outer surface of the inlet nozzle to vary around the periphery to deliver different amounts of reactant at different locations around the periphery.

[0034] The method can include configuring the gap distance to be larger at locations requiring more reactant delivery than at locations requiring less reactant delivery.

[0035] The method may include configuring the gap distance to be greater within a vicinity of a circular portion of the annular oval cross-section than within a straight portion of the annular oval cross-section.

[0036] The method can include supplying reactants to reactant nozzles through openings positioned around a periphery configured to deliver different amounts of reactants at different locations around the periphery.

[0037] The method may include disposing the openings to extend radially.

[0038] The method may include configuring at least one of the size and / or density of the openings to be different at different locations around the perimeter.

[0039] The method can include configuring at least one of a size and density of the openings to be larger in locations requiring more reactant delivery than in locations requiring less reactant delivery.

[0040] The method may include configuring at least one of the size and / or density of the openings to be greater within a vicinity of a circular portion of the annular oval cross-section than within a linear portion of the annular oval cross-section.

[0041] The method can include supplying the reactant to the reactant nozzle through a perforated material positioned around the periphery, the perforated material being configured to have different porosities to deliver different amounts of reactant at different locations around the periphery.

[0042] Further particular and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate and in combinations other than those explicitly set out in the claims.

[0043] It should be understood that when features of an apparatus are described as being operable to provide a certain function, this includes features of an apparatus that provide that function or that are adapted or configured to provide that function.

[0044] Embodiments of the present invention will now be further described with reference to the accompanying drawings. [Brief explanation of the drawings]

[0045] [Figure 1] 1 is a cross section through an inlet assembly for an abatement device according to one embodiment. [Figure 2] 1 shows the inlet assembly with the exhaust inlet removed. [Figure 3] FIG. 10 is a cross-sectional view showing the gap between the exhaust inlet and the reactant nozzle in more detail. [Figure 4A] 1 illustrates a top cross-sectional view of an inlet assembly of an abatement apparatus according to one embodiment. [Figure 4B] 1 illustrates a side cross-sectional view of an inlet assembly of an abatement apparatus according to one embodiment. [Figure 5] 1 shows the configuration of the abatement inlet assembly with the exhaust inlet removed. [Figure 6] 1 shows the configuration of the abatement inlet assembly with the exhaust inlet removed. DETAILED DESCRIPTION OF THE INVENTION

[0046] Before describing the embodiments in more detail, a brief overview is provided. Some embodiments provide a specific configuration in which an exhaust stream nozzle delivering an exhaust stream into a combustion chamber of an abatement device is equipped with a co-located reactant nozzle delivering a reactant to the combustion chamber to assist in abatement of the exhaust stream. The reactant nozzle is configured to enable non-uniform delivery of reactants throughout the reactant nozzle. Specifically, some portions, sections, locations, or regions of the reactant nozzle are configured to deliver more reactants than other portions. This allows the flow rates or amounts of reactants delivered to different locations within the combustion chamber to be selected to match the flow rates or amounts of the exhaust stream at those locations within the combustion chamber. For example, some inlet nozzles deliver the exhaust stream into the combustion chamber at non-uniform flow rates or amounts. Specifically, the flow rate of the exhaust stream delivered by the inlet nozzle at some locations within the combustion chamber can be greater than at other locations. Thus, the reactant nozzle can be configured to deliver a higher flow rate of reactants adjacent to higher flow rate regions of the exhaust stream compared to the flow rate of reactants provided adjacent to lower flow rate regions of the exhaust stream. This allows the amount of reactant used to be optimized, since otherwise a uniform flow rate of the reactant may be required to match the maximum flow rate of the exhaust stream, which would lead to an over-feed of reactant to achieve the required abatement performance. By using this method, abatement performance can be maintained with a reduced feed rate of the reactant.

[0047] Inlet Assembly (First Configuration) FIG. 1 is a cross-section through an inlet assembly for an abatement apparatus 10 according to one embodiment. A mount 50 is provided, attached at its downstream surface 55 to a housing 40 of a combustion chamber module 30. The combustion chamber module 30 includes a perforated sleeve 90 housed within the housing 40. The perforated sleeve 90 within the housing 40 defines a combustion chamber 120. The mount 50 has a wall 800 defining an inlet opening for receiving a discharge inlet 60. In this embodiment, the discharge inlet 60 has an oval cross-section. However, it should be understood that other shapes of discharge inlet 60 are possible, such as those having a circular or other cross-section. A gallery 810 is formed between a radially outer surface 65 of the discharge inlet 60 and a radially inner surface 805 of the wall 800. The housing 40 defines an opening in its upstream surface for receiving a reactant nozzle 830. As will be explained in more detail below, the radially inner surface 835 of the reactant nozzle 830 is spaced from the radially outer surface 65 of the exhaust inlet 60 .

[0048] Figure 2 shows the inlet assembly with the exhaust inlet 60 removed. As can be seen in Figure 2, a reactant inlet 850 is provided, which supplies reactants into the gallery 810. While this embodiment provides a single reactant inlet 850, it should be understood that more than one reactant inlet and different shapes of reactant inlet 850 are contemplated.

[0049] 1 , a radially extending flange 820 toward the upstream end of exhaust inlet 60 cooperates with mount 50 to fluidly seal the upstream end of gallery 810. Thus, reactants supplied through reactant inlet 50 enter gallery 810 and travel toward reactant nozzle 830. The reactants travel between the radially inner surface 835 of reactant nozzle 830 and the radially outer surface 65 of exhaust inlet 60, surrounding the exhaust flow exiting exhaust inlet 60 and being discharged into combustion chamber 120.

[0050] FIG. 3 is a cross-sectional view showing the gap between the exhaust inlet 60 and the reactant nozzle 830 in more detail. As can be seen from FIG. 3 , the gap between the radially inner surface 835 of the reactant nozzle 830 and the radially outer surface 65 of the exhaust inlet 60 varies at different locations around the reactant nozzle 830. Specifically, the distance between the radially inner surface 835 and the radially outer surface 65 along the straight circumferential region 845 of the reactant nozzle 830 is shorter than the distance along the curved circumferential region 860. As a result, more reactants are delivered to the curved circumferential region 860 than to the straight circumferential region 845. This means that there are more reactants near the curved circumferential region 860 than near the straight circumferential region 850, which meets the requirements of the exhaust flow, which generally tends to split into two streams exiting the exhaust inlet 60 near each curved circumferential region 860 toward either end. Because there is less exhaust flow toward the center of the straight region of the exhaust inlet 60, less reactants are delivered there.

[0051] Inlet Assembly (Second Configuration) FIG. 4A shows a top cross-sectional view of an inlet assembly of an abatement apparatus 10A according to one embodiment, and FIG. 4B shows a side cross-sectional view of the inlet assembly of an abatement apparatus 10A according to one embodiment. This configuration is similar to that described above, but includes a gallery 810A fed by a reactant inlet 850A. A wall 800A extends from the floor 870 to surround the exhaust inlet 60. As best seen in FIG. 4A, the available volume of the reactant nozzle 830A is greater near the curved portion of the exhaust inlet 60 compared to the straight portion of the exhaust inlet 60. This helps to provide a greater amount of reactant to the curved portion near the two main streams of the exhaust stream as it exits the exhaust inlet 60 and enters the combustion chamber 120A.

[0052] This configuration is particularly suited to the exhaust of semiconductor manufacturing processes involving high hydrogen flow rates. Examples include epitaxial and polycrystalline silicon growth using either silane or dichlorosilane as the silicon source. The hydrogen flow rate can be approximately 50 to 200 liters per minute per inlet. To aid in the combustion of this hydrogen, additional air is supplied by reactant nozzles 830A around the exhaust inlet 60. Due to the geometry of the exhaust inlet 60 and its effect on the exhaust flow rate, the reactant nozzles 830A are shaped to create a passageway with uneven reactant flow distribution, providing more flow at both ends and less flow in the center. This matches the flow pattern of the exhaust flow emerging from the distal end of the exhaust inlet 60.

[0053] Inlet Assembly (Third Configuration) 5 and 6 show the inlet assembly configuration of the abatement apparatus 10B with the exhaust inlet 60 removed. Radially extending openings 880 are provided in communication with a gallery 810B that supplies reactants. From the gallery 810B, the reactants pass through the openings 880 and surround the exhaust inlet 60 (not shown). The size, location, and density of the openings 880 can be varied to vary the amount of reactant delivered at different locations around the exhaust inlet 60.

[0054] A similar effect can be achieved by providing a material of varying porosity in fluid communication with the reactant supply through which the reactant enters the reactant nozzle.

[0055] A slot nozzle design for an abatement system can include an inner nozzle and an outer nozzle with a gap therebetween that can be used to supply reactant gases such as fuel, oxygen, etc., or an inert purge gas.

[0056] It can thus be seen that gas is supplied through ports into the interior space between the two oblong nozzles. Flow distribution means are provided to distribute the flow. In one embodiment, the gas flows into a gallery around the top of the outer nozzle. Notches can be cut into the top of the outer nozzle through which the gas passes. The separate flows from the notches combine and converge to provide a uniform flow at the distal end of the interior space between the nozzles.

[0057] In one embodiment, gas is supplied through a port in the sidewall of the outer nozzle. A bulkhead below this port forms a gallery. An opening cut into the bulkhead allows the inner nozzle to pass through. The difference in the geometry of the opening and the geometry of the inner nozzle creates a passageway through which the gas can flow. This passageway can be uniform or non-uniform. A non-uniform passageway can be advantageous because it can shape the flow distribution to better suit the release of process gas from the inner nozzle, for example, providing more flow toward the axis and less flow in the center.

[0058] It should be understood that other opening shapes are possible, such as, for example, a concentric dogbone shape, an eccentric dogbone shape, an infinity shape, etc.

[0059] Although exemplary embodiments of the present invention have been disclosed in detail herein with reference to the accompanying drawings, it is understood that the present invention is not limited to the precise embodiments, and that various changes and modifications can be made by those skilled in the art without departing from the scope of the present invention as defined by the appended claims and their equivalents. [Explanation of symbols]

[0060] 10;10A;10B Abatement device 30 Combustion chamber module 40 Housing 50 Mounting stand 55 Downstream surface 60 Discharge inlet 65 Exterior 90 Perforated Sleeve 120 Combustion chamber 800;800A wall 805;835 Interior 810;810A Gallery 820 flange 830 Reactant Nozzle 845 Linear peripheral area 850 Reactant inlet 860 curved outer periphery 870 Floor 880 aperture

Claims

1. 1. An inlet assembly for an abatement system for treating an exhaust stream from a semiconductor processing tool, comprising: an inlet nozzle configured to deliver the exhaust stream into a combustion chamber of the abatement device; a reactant nozzle configured to deliver a reactant into the combustion chamber of the abatement apparatus, the reactant nozzle being coaxially positioned relative to the inlet nozzle, the reactant nozzle being configured to deliver different amounts of the reactant at different locations around its circumference; Equipped with the inlet nozzle has an oval cross-section, the reactant nozzle has an annular oval cross-section, the reactant nozzle configured to deliver more of the reactant near a circular portion of the annular oval cross-section than within a linear portion of the annular oval cross-section; an inner surface of the reactant nozzle spaced from an outer surface of the inlet nozzle, and a gap distance between the inner surface of the reactant nozzle and the outer surface of the inlet nozzle varies around the circumference to deliver different amounts of the reactant at different locations around the circumference.

2. The inlet assembly of claim 1 , wherein the inlet nozzle and the reactant nozzle are configured to deliver the reactants into the combustion chamber coaxially with respect to the exhaust flow.

3. The inlet assembly of claim 1 , comprising an upstream gallery configured to supply the reactant to the outer periphery of the reactant nozzle.

4. The inlet assembly of claim 1 , wherein the inlet nozzle and the reactant nozzle are configured to deliver the reactants into the combustion chamber while surrounding the exhaust flow.

5. The reactant nozzle comprises: configured to deliver more of the reactant near a first region of the exhaust stream than near a second region of the exhaust stream; and configured to deliver more of the reactant in a first portion of the reactant nozzle than in a second portion of the reactant nozzle; The inlet assembly of claim 1 , wherein the inlet assembly is at least one of:

6. The gap distance is is greater at locations requiring delivery of more of the reactant than at locations requiring delivery of less of the reactant; or 2. The inlet assembly of claim 1, wherein the inlet is greater within the vicinity of a circular portion of the annular oval cross section than within a linear portion of the annular oval cross section.

7. 10. The inlet assembly of claim 1, wherein the reactants are supplied to the reactant nozzles through openings positioned around the periphery configured to deliver different amounts of the reactants at different locations around the periphery.

8. The inlet assembly of claim 7 , wherein the openings extend radially.

9. The inlet assembly of claim 7 , wherein at least one of the size and density of the openings varies at different locations around the circumference.

10. At least one of the size and density of the openings is is greater at locations requiring more of the reactant than at locations requiring less of the reactant, or greater within the vicinity of the circular portion of the annular oval cross section than within the straight portion of the annular oval cross section; The inlet assembly of claim 7.

11. 2. The inlet assembly of claim 1, wherein the reactants are supplied to the reactant nozzles through perforated material positioned around the periphery, the perforated material having different porosities to deliver different amounts of the reactants at different locations around the periphery.

12. An abatement system comprising the inlet assembly of claim 1.

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