Optical axis adjustment method for laser module and optical axis adjustment jig

Abstract

In a jig mounting step (step S1), a laser module having an optical axis adjustment mechanism is mounted on an optical axis adjustment jig in a state in which the laser module is detached from a Raman spectrometer. In an optical axis adjustment step (step S2), the optical axis of the laser module is adjusted using the optical axis adjustment mechanism of the laser module mounted on the optical axis adjustment jig. In a device attachment step (step S4), the laser module with the optical axis adjusted in the optical axis adjustment step is attached at the attachment position of the Raman spectrometer.

Description

[Technical Field]

[0001] The present invention relates to a method for adjusting the optical axis of a laser module and a jig for adjusting the optical axis. [Background technology]

[0002] A Raman spectrometer is equipped with a laser light source that emits laser light as excitation light (see, for example, Patent Document 1 below). The laser light emitted from the laser light source is irradiated onto a sample, and Raman scattered light is emitted from the sample excited by the laser light. This Raman scattered light is separated by a spectroscope, and the intensity of the Raman scattered light for each wavelength is detected by a detector. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 10-90064 Summary of the Invention [Problem to be solved by the invention]

[0004] In a Raman spectrometer, a plurality of optical components such as mirrors and lenses are arranged in the optical path of the laser light from the laser light source to the sample and in the optical path of the Raman scattered light from the sample to the detector. Therefore, if the optical axis of the laser light emitted from the laser light source is misaligned, it is necessary to adjust the optical axis of the laser light by adjusting the positions or angles of the plurality of optical components.

[0005] Since laser light sources have a limited lifespan, they may need to be removed from the Raman spectrometer and replaced. In this case, the optical axis of the laser light shifts when the laser light source is replaced, so the optical axis of the laser light needs to be adjusted. However, this requires on-site adjustment of the positions and angles of multiple optical components.

[0006] If the above-mentioned work is performed on-site where the Raman spectrometer is installed, it will take time, and the Raman spectrometer will not be usable during that time. In addition, there may be restrictions on on-site work, such as the need to adjust the optical axis of the laser light in a laser-controlled area.

[0007] The present invention has been made in view of the above-described circumstances, and has an object to provide a method for adjusting the optical axis of a laser module and an optical axis adjustment jig that do not require adjustment of the optical axis of laser light within a Raman spectrometer. [Means for solving the problem]

[0008] A first aspect of the present invention is a method for adjusting the optical axis of a laser module used in a Raman spectrometer, comprising a jig mounting step, an optical axis adjustment step, and an apparatus mounting step. In the jig mounting step, the laser module having an optical axis adjustment mechanism is mounted on an optical axis adjustment jig in a state where the laser module is removed from the Raman spectrometer. In the optical axis adjustment step, the optical axis of the laser module is adjusted using the optical axis adjustment mechanism of the laser module mounted on the optical axis adjustment jig. In the apparatus mounting step, the laser module whose optical axis has been adjusted in the optical axis adjustment step is mounted to an installation position of the Raman spectrometer.

[0009] A second aspect of the present invention is an optical axis adjustment jig used in the optical axis adjustment method for a laser module, comprising a mounting member on which the laser module is mounted, and an irradiation unit that irradiates laser light from the laser module mounted on the mounting member. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a method for adjusting the optical axis of a laser module and an optical axis adjustment jig that do not require adjustment of the optical axis of laser light in a Raman spectrometer. [Brief explanation of the drawings]

[0011] [Figure 1]FIG. 1 is a schematic diagram illustrating an example of the configuration of a Raman spectroscopic device. [Figure 2] 3 is a plan view schematically showing an example of the configuration of the periphery of a first laser light source and a second laser light source. FIG. [Figure 3A] FIG. 2 is a diagram showing a configuration example of a first laser module. [Figure 3B] FIG. 2 is a diagram showing a configuration example of a first laser module. [Figure 4A] FIG. 2 is a diagram showing an example of the configuration of a second laser module. [Figure 4B] FIG. 2 is a diagram showing an example of the configuration of a second laser module. [Figure 5A] FIG. 10 is a perspective view showing an example of the configuration of an optical axis adjustment jig. [Figure 5B] FIG. 10 is a perspective view showing an example of the configuration of an optical axis adjustment jig. [Figure 6] 10 is a flowchart illustrating a method for adjusting the optical axis of a laser module. DETAILED DESCRIPTION OF THE INVENTION

[0012] 1. Configuration of Raman spectrometer 1 is a schematic diagram showing an example of the configuration of a Raman spectroscopic device 1. The specific configuration of the Raman spectroscopic device 1 will be described below, but the configuration is not limited to this, and at least some of the components may be omitted, or other components may be provided.

[0013] The Raman spectroscopic device 1 includes, for example, a first laser light source 10, a second laser light source 12, a sample support portion 25a, a spectroscopic optical system 40, a photodetector 50, a signal processor 55, a plurality of mirrors 19, 21, 22, a long-pass filter 17, a beam splitter 20, an objective lens 24, a focusing lens 28, a slit 30, and the like.

[0014] The above-mentioned components provided in the Raman spectrometer 1 are components for irradiating a laser beam onto a sample 25 and for detecting Raman scattered light emitted from the sample 25 excited by the laser beam. Of these components, optical components such as the mirrors 19 and 22, the long-pass filter 17, and the condenser lens 28 are fixed within the Raman spectrometer 1, and do not necessarily have a mechanism for adjusting their positions or angles. On the other hand, the mirror 21, the long-pass filter 17, and the beam splitter 20 are switchable depending on whether the first laser light source 10 or the second laser light source 12 is used.

[0015] The first laser light source 10 emits a first laser light 11. The second laser light source 12 emits a second laser light 13 having a wavelength shorter than that of the first laser light 11. In this manner, in this embodiment, the sample 25 can be excited using two laser light sources 10 and 12 that emit laser light 11 and 13 having different wavelengths. However, the number of laser light sources provided in the Raman spectroscopic device 1 is not limited to two, and may be one, or three or more.

[0016] The laser light source can be configured with a laser oscillator such as a diode-laser-pumped solid-state laser, a helium-neon laser, a titanium sapphire laser, or an Nd:YAG laser. In addition, when the laser light from the laser oscillator is guided by a light guide such as an optical fiber, an emission tube provided at the tip of the optical fiber may constitute the laser light source.

[0017] The sample 25 is supported by a sample support 25a such as a sample stage. In this embodiment, either the first laser beam 11 or the second laser beam 13 can be irradiated onto the sample 25 depending on the sample 25. When the sample 25 is excited by being irradiated with the first laser beam 11, a first Raman scattered light 31 is emitted. On the other hand, when the sample 25 is excited by being irradiated with the second laser beam 13, a second Raman scattered light 33 is emitted.

[0018] Since the efficiency of Raman scattering increases as the excitation wavelength decreases, when the intensity of the Raman scattered light is to be increased, it is preferable to irradiate the sample 25 with the second laser beam 13 rather than the first laser beam 11. On the other hand, when the fluorescence emitted from the sample 25 is too strong when the sample 25 is irradiated with the second laser beam 13, it is preferable to irradiate the sample 25 with the first laser beam 11 rather than the second laser beam 13.

[0019] When the first laser light source 10 is used, the first laser light 11 emitted from the first laser light source 10 is reflected by mirrors 19 and 21 and enters the beam splitter 20. In this case, the beam splitter 20 reflects the first laser light 11 and transmits the first Raman scattered light 31. Therefore, the first laser light 11 that enters the beam splitter 20 is reflected by the beam splitter 20, passes through the objective lens 24, and is irradiated onto the sample 25.

[0020] When the second laser light source 12 is used, the mirror 21 and the beam splitter 20 are switched. The second laser light 13 emitted from the second laser light source 12 passes through the mirror 21 and enters the beam splitter 20. In this case, the beam splitter 20 reflects the second laser light 13 and transmits the second Raman scattered light 33. Therefore, the second laser light 13 that has entered the beam splitter 20 is reflected by the beam splitter 20, passes through the objective lens 24, and is irradiated onto the sample 25.

[0021] The first Raman scattered light 31 emitted from the sample 25 irradiated with the first laser light 11 has a longer wavelength than the first laser light 11. The first Raman scattered light 31 passes through the objective lens 24 and enters the beam splitter 20, passes through the beam splitter 20, is reflected by the mirror 22, and then enters the long-pass filter 17. When the first laser light source 10 is used, the first Raman scattered light 31 passes through the long-pass filter 17 and is collected by the collecting lens 28, passes through the slit 30, and enters the spectroscopic optical system 40.

[0022] The second Raman scattered light 33 emitted from the sample 25 irradiated with the second laser light 13 has a longer wavelength than the second laser light 13. The second Raman scattered light 33 also has a shorter wavelength than the first Raman scattered light 31. The second Raman scattered light 33 passes through the objective lens 24 and enters the beam splitter 20, passes through the beam splitter 20, is reflected by the mirror 22, and then enters the long-pass filter 17. When the second laser light source 12 is used, the second Raman scattered light 33 passes through the long-pass filter 17 and is collected by the collecting lens 28, passes through the slit 30, and enters the spectroscopic optical system 40.

[0023] The spectroscopic optical system 40 includes, for example, a collimator lens, a spectroscope, and a focusing optical element (none of which are shown). The spectroscope includes, for example, a spectroscopic optical element such as a grating or a prism. The first Raman scattered light 31 and the second Raman scattered light 33 incident on the spectroscopic optical system 40 are dispersed by different spectroscopic optical elements, and the first Raman scattered light 31 and the second Raman scattered light 33 separated by wavelength are focused by a focusing optical element and incident on the photodetector 50.

[0024] An example of the photodetector 50 is a CCD (Charge Coupled Device) detector. The photodetector 50 includes a plurality of photodetecting elements, and outputs a signal according to the intensity of the first Raman scattered light 31 or the second Raman scattered light 33 received by each photodetecting element. The electrical signal output from the photodetector 50 is processed by a signal processor 55 electrically connected to the photodetector 50. The signal processor 55 includes, for example, a CPU (Central Processing Unit), RAM (Random Access Memory), and ROM (Read Only Memory).

[0025] 2. Peripheral configuration of the laser light source 2 is a plan view schematically showing an example of the configuration of the first laser light source 10 and the second laser light source 12 and their surroundings. In this example, the first laser light source 10 is configured by a laser oscillator. On the other hand, the second laser light source 12 is configured by an emission tube provided at the tip of an optical fiber that guides laser light from a laser oscillator (not shown). In this way, the first laser light source 10 and the second laser light source 12 can be configured by any member that emits laser light. Note that some members are omitted in FIG. 2.

[0026] The first laser light source 10 is attached to a first base member 101. This forms a first laser module 100 including the first laser light source 10 and the first base member 101. The first laser module 100 also includes a mirror 102 (not shown in FIG. 1 ) attached to the first base member 101. The first laser light source 10 and the mirror 102 are examples of optical members included in the first laser module 100.

[0027] The first laser light 11 emitted from the first laser light source 10 is a beam-like laser light that travels in a straight line toward the mirror 102. The first laser light 11 that is incident on the mirror 102 is reflected by the mirror 102, and thereby the traveling direction is changed.

[0028] The second laser light source 12 is attached to a second base member 201. This constitutes a second laser module 200 including the second laser light source 12 and the second base member 201. The second laser light source 12 is an example of an optical member included in the second laser module 200. The second laser light 13 emitted from the second laser light source 12 is a beam-like laser light that travels in a straight line, and travels parallel to the first laser light 11 reflected by the mirror 102.

[0029] The first base member 101 and the second base member 201 are each made of a plate-shaped member. The second base member 201 is smaller than the first base member 101 and is fixed in a state of abutting on the first base member 101. This connects the first laser module 100 and the second laser module 200, and forms a laser unit 300 in which the relative positions of these laser modules 100, 200 are fixed.

[0030] The laser unit 300 is attached to an attachment position of the Raman spectroscopic device 1 with the first base member 101 and the second base member 201 integrally connected. A frame 500 (see FIG. 3A) is provided inside the Raman spectroscopic device 1, and the laser unit 300 is attached to an attachment position on the frame 500.

[0031] The first base member 101 is formed with positioning portions 110 for positioning the laser unit 300 on the frame 500. The positioning portions 110 are formed, for example, with holes or notches, and are positioned by engaging with engaging portions 111 such as pins formed on the frame 500. In this example, two positioning portions 110 are provided, but the number of positioning portions 110 may be one, or three or more. When the laser unit 300 is positioned on the frame 500, displacement of the laser unit 300 in the horizontal direction (front-back direction D0 and lateral direction D1) is restricted, thereby preventing deviation of the optical axes of the first laser beam 11 and the second laser beam 13 emitted from the laser unit 300.

[0032] 3. Configuration of the first laser module 3A and 3B are diagrams showing an example of the configuration of the first laser module 100. Fig. 3A shows a side view of the first laser module 100, and Fig. 3B shows a perspective view of the first laser module 100 seen from the front side. Note that some components are omitted in Figs. 3A and 3B.

[0033] As shown in FIG. 3A, the mirror 102 is rotatable in a first direction D3 about an axis 151 extending along the lateral direction D1.

[0034] By rotating mirror 102 around axis 151 as described above, the rotational position of mirror 102 in first direction D3 can be adjusted, and then mirror 102 can be fixed in first direction D3 by tightening one or more screws (not shown) serving as fixing devices.

[0035] 3B, the mirror 102 is rotatable in a second direction D4 about an axis 161 that extends parallel to the mirror 102 and perpendicular to the lateral direction D1. The axis 161 intersects (e.g., is perpendicular to) the axis 151.

[0036] By rotating mirror 102 around axis 161 as described above, the rotational position of mirror 102 in second direction D4 can be adjusted, and then mirror 102 can be fixed in second direction D4 by tightening one or more screws (not shown) serving as fixing devices.

[0037] In the first laser module 100, the two axes 151, 161, etc. constitute an optical axis adjustment mechanism for adjusting the optical axis of the first laser light 11 emitted from the first laser module 100. However, the mechanism is not limited to the two axes 151, 161, and may be configured to support the mirror 102 rotatably around three or more axes.

[0038] In this way, the position or angle of the optical axis of the first laser light 11 emitted from the first laser module 100 can be adjusted by the optical axis adjustment mechanism provided in the first laser module 100.

[0039] 4. Configuration of the second laser module 4A and 4B are diagrams showing an example of the configuration of the second laser module 200. Fig. 4A shows a side view of the second laser module 200, and Fig. 4B shows a front view of the second laser module 200. Note that some components are omitted in Fig. 4A and Fig. 4B.

[0040] As shown in FIG. 4A, the second laser light source 12 is rotatable in a first direction D5 around an axis 231 extending along the lateral direction D1.

[0041] By rotating the second laser light source 12 around the axis 231 as described above, the rotational position of the second laser light source 12 in the first direction D5 can be adjusted, and then the second laser light source 12 can be fixed in the first direction D5 by tightening one or more screws (not shown) serving as fixing devices.

[0042] 4B, the second laser light source 12 is rotatable in a second direction D6 around an axis 221 extending along the front-rear direction D0. The axis 221 intersects with (for example, is perpendicular to) an axis 231.

[0043] By rotating the second laser light source 12 around the axis 221 as described above, the rotational position of the second laser light source 12 in the second direction D6 can be adjusted, and then the second laser light source 12 can be fixed in the second direction D6 by tightening one or more screws (not shown) serving as fixing devices.

[0044] In the second laser module 200, the two axes 221, 231 etc. constitute an optical axis adjustment mechanism for adjusting the optical axis of the second laser light 13 emitted from the second laser module 200. However, the number of axes is not limited to two 221, 231, and the second laser light source 12 may be supported rotatably around three or more axes.

[0045] As shown in FIG. 2 , the second base member 201 is formed with a positioning portion 210 for positioning the second laser module 200 to the first laser module 100. The positioning portion 210 is formed, for example, with a hole or a notch, and is positioned by engaging with an engaging portion 120 such as a pin formed on the first base member 101 of the first laser module 100. In this example, two positioning portions 210 are provided, but the number of positioning portions 210 may be one or three or more. When the second laser module 200 is positioned to the first laser module 100, displacement of the second laser module 200 in the horizontal direction (front-back direction D0 and lateral direction D1) is restricted, thereby preventing relative misalignment between the optical axis of the first laser beam 11 emitted from the first laser module 100 and the optical axis of the second laser beam 13 emitted from the second laser module 200.

[0046] 5. Configuration of the optical axis adjustment jig 5A and 5B are perspective views showing an example of the configuration of the optical axis adjustment jig 400. Fig. 5A shows a state in which the first laser module 100 and the second laser module 200 are not attached to the optical axis adjustment jig 400, and Fig. 5B shows a state in which the first laser module 100 is attached to the optical axis adjustment jig 400. Note that in Fig. 5B, the second laser module 200 is omitted and some components of the first laser module 100 are also omitted.

[0047] In this embodiment, the first laser module 100 and the second laser module 200 are attached to an optical axis adjustment jig 400 (hereinafter simply referred to as "jig 400") in a state where the first laser module 100 and the second laser module 200 are removed from the Raman spectroscopic device 1, and the optical axes of the laser modules 100 and 200 can be adjusted. In other words, the optical axis adjustment of the laser modules 100 and 200 can be performed outside the Raman spectroscopic device 1.

[0048] 5A and 5B, the jig 400 includes a mounting member 401 and an irradiation unit 402. The mounting member 401 includes a mounting portion 411 to which the laser modules 100, 200 are attached, and an extension portion 412 that extends along the optical axis of the laser light from the laser modules 100, 200 attached to the mounting portion 411. The mounting portion 411 and the extension portion 412 are each a plate-like member, and are connected to each other to form an L-shape.

[0049] The first laser module 100 and the second laser module 200 can be separately mounted on the mounting portion 411. That is, the mounting portion 411 is formed with a first mounting area A1 to which the first laser module 100 is mounted and a second mounting area A2 to which the second laser module 200 is mounted.

[0050] The first mounting region A1 of the mounting portion 411 is provided with engaging portions 413 for engaging the positioning portions 110 formed on the first base member 101 of the first laser module 100. In this example, the engaging portions 413 are configured by two pins protruding from the mounting portion 411. These engaging portions 413 are the same as the engaging portions 111 formed on the frame 500 of the Raman spectroscopic device 1 for engaging the positioning portions 110 of the first base member 101. However, the shape and number of the engaging portions 413 are arbitrary as long as they are configured to be able to position the first laser module 100 without misalignment.

[0051] The second mounting region A2 of the mounting portion 411 is provided with engaging portions 414 for engaging the positioning portions 210 formed on the second base member 201 of the second laser module 200. In this example, the engaging portions 414 are configured by two pins protruding from the mounting portion 411. These engaging portions 414 are the same as the engaging portions 120 formed on the first base member 101 of the first laser module 100 for engaging the positioning portions 210 of the second base member 201. However, the shape and number of the engaging portions 414 are arbitrary as long as they are configured to be able to position the second laser module 200 without misalignment.

[0052] The first laser beam 11 emitted from the first laser module 100 attached to the mounting portion 411 travels parallel to the extension portion 412. At this time, the first laser beam 11 travels in a straight line above the first line L1 of the extension portion 412, and is irradiated onto the irradiation portion 402 provided on the first line L1.

[0053] Therefore, by adjusting the optical axis of the first laser beam 11 using the optical axis adjusting mechanism of the first laser module 100, it is possible to adjust the irradiation position of the first laser beam 11 to an appropriate position in the irradiation unit 402. The irradiation unit 402 may be provided with a mark indicating the appropriate irradiation position.

[0054] The irradiation unit 402 is detachable at a plurality of different positions on the extension 412. In FIGS. 5A and 5B, the irradiation unit 402 is attached on the optical path of the first laser beam 11 emitted from the first laser module 100, but the irradiation unit 402 may be attached on the optical path of the second laser beam 13 emitted from the second laser module 200. In this case, the second laser beam 13 emitted from the second laser module 200 attached to the attachment portion 411 travels in a straight line above the second line L2 of the extension 412 and is irradiated onto the irradiation unit 402 provided on the second line L2. The second line L2 is parallel to the first line L1.

[0055] Therefore, by adjusting the optical axis of second laser light 13 using the optical axis adjustment mechanism of second laser module 200, the irradiation position of second laser light 13 in irradiation unit 402 can be adjusted to an appropriate position.

[0056] Furthermore, in this embodiment, a plurality of attachment positions P1 for the irradiation unit 402 are provided on the first line L1 of the extension portion 412. That is, the irradiation unit 402 is detachable from a plurality of different attachment positions P1 in the optical axis direction of the first laser light 11 from the first laser module 100 attached to the attachment portion 411. By changing the attachment position P1 of the irradiation unit 402 on the first line L1, the optical path length of the first laser light 11 from the first laser module 100 to the irradiation unit 402 can be changed.

[0057] Similarly, a plurality of mounting positions P2 for the irradiation unit 402 are provided on the second line L2 of the extension 412. That is, the irradiation unit 402 is detachable from a plurality of different mounting positions P2 in the optical axis direction of the second laser light 13 from the second laser module 200 attached to the attachment portion 411. By changing the mounting position P2 of the irradiation unit 402 on the second line L2, the optical path length of the second laser light 13 from the second laser module 200 to the irradiation unit 402 can be changed.

[0058] However, the irradiation unit 402 is not limited to being detachably attached to the plurality of attachment positions P1, P2, and may be configured so that the irradiation unit 402 is slidable on the first line L1 or the second line L2. That is, the irradiation unit 402 may be configured so that it can be moved to a plurality of different positions in the optical axis direction of the laser beams 11, 13 by being detached or slid. Furthermore, the irradiation unit 402 may be provided on both the first line L1 and the second line L2.

[0059] 6.Optical axis adjustment method 6 is a flowchart for explaining a method for adjusting the optical axes of the laser modules 100 and 200. In this example, a method for adjusting the optical axes of two laser modules (first laser module 100 and second laser module 200) will be described.

[0060] When adjusting the optical axis, first, the first laser module 100 and the second laser module 200 are removed from the Raman spectroscopic device 1 and then attached to the jig 400 (step S1: jig attachment step). For example, when optical axis adjustment is required, such as during maintenance or replacement of the first laser light source 10 and the second laser light source 12 in the Raman spectroscopic device 1, or when assembling a new Raman spectroscopic device 1, the first laser module 100 and the second laser module 200 are attached to the jig 400.

[0061] Thereafter, optical axis adjustment of the first laser module 100 and the second laser module 200 is performed using jig 400 (step S2: optical axis adjustment step). That is, while first laser module 100 is emitting first laser light 11, the position and angle of the optical axis of first laser module 100 are adjusted using the optical axis adjustment mechanism of first laser module 100. Furthermore, while second laser module 200 is emitting second laser light 13, the position and angle of the optical axis of second laser module 200 are adjusted using the optical axis adjustment mechanism of second laser module 200.

[0062] In this manner, in this embodiment, two laser modules (first laser module 100 and second laser module 200) are mounted on the jig 400, and the optical axes of the laser beams 11 and 13 emitted from these laser modules 100 and 200 can be adjusted.

[0063] After the optical axes are adjusted, the first laser module 100 and the second laser module 200 are connected to each other to form an integrated laser unit 300 (step S3: connecting step). This fixes the relative positions of the first laser module 100 and the second laser module 200, preventing the optical axes of the first laser beam 11 and the second laser beam 13 from shifting relative to each other.

[0064] After the optical axis is adjusted, the laser unit 300 is attached to a predetermined position on the frame 500, which is the attachment position of the Raman spectroscopic device 1 (step S4: device attachment step). This allows the first laser module 100 and the second laser module 200 to be attached to the Raman spectroscopic device 1 as a single unit.

[0065] However, instead of two laser modules (first laser module 100 and second laser module 200), an optical axis adjustment method may be used in which the optical axes of one or three or more laser modules are adjusted and then attached to the Raman spectroscopic device 1. When there are three or more laser modules, it is preferable that all of the laser modules are connected after adjusting their optical axes to form an integrated laser unit. On the other hand, when there is only one laser module, step S3 in FIG. 6 may be omitted.

[0066] 7. Aspects It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0067] (Item 1) A method for adjusting an optical axis of a laser module according to one aspect includes: A method for adjusting an optical axis of a laser module used in a Raman spectrometer, comprising: a jig mounting step of mounting the laser module having an optical axis adjustment mechanism on an optical axis adjustment jig in a state where the laser module is removed from the Raman spectroscopic device; an optical axis adjustment step of adjusting the optical axis of the laser module using the optical axis adjustment mechanism of the laser module attached to the optical axis adjustment jig; The method may further include an apparatus mounting step of mounting the laser module after the optical axis has been adjusted in the optical axis adjusting step at a mounting position of the Raman spectrometer.

[0068] According to the optical axis adjustment method described in paragraph 1, the laser module is mounted on an optical axis adjustment jig outside the Raman spectrometer, and the optical axis is adjusted using the optical axis adjustment mechanism of the laser module, and then the laser module can be attached to the mounting position of the Raman spectrometer, thereby eliminating the need to adjust the optical axis of the laser light inside the Raman spectrometer.

[0069] (Item 2) In the method for adjusting the optical axis of the laser module described in item 1, a connecting step of connecting the plurality of laser modules after the optical axes have been adjusted by the optical axis adjusting step to form a laser unit in which the relative positions of the plurality of laser modules are fixed; In the device mounting step, the laser unit may be mounted at the mounting position of the Raman spectroscopic device.

[0070] According to the optical axis adjustment method described in paragraph 2, the optical axes of the multiple laser modules are adjusted outside the Raman spectroscopic device, and then these multiple laser modules are connected to form an integrated laser unit, and the laser unit can be attached to the attachment position of the Raman spectroscopic device, so that the optical axes of the laser light emitted from each laser module do not shift relative to each other.

[0071] (Item 3) In the method for adjusting the optical axis of the laser module described in item 2, In the jig mounting step, the plurality of laser modules are mounted on the optical axis adjustment jig; In the optical axis adjusting step, the optical axes of the laser modules may be adjusted using the optical axis adjusting mechanisms of the laser modules attached to the optical axis adjusting jig.

[0072] According to the optical axis adjustment method described in paragraph 3, a plurality of laser modules are mounted on an optical axis adjustment jig, and the optical axes of the laser beams emitted from the laser modules can be adjusted at the same time. Furthermore, since the optical axes of the plurality of laser modules are adjusted using the same optical axis adjustment jig, the optical axes of the laser beams emitted from the laser modules do not shift relative to each other due to individual differences in the optical axis adjustment jig.

[0073] (Item 4) An optical axis adjustment jig according to one aspect includes: An optical axis adjusting jig used in the optical axis adjusting method for a laser module according to any one of items 1 to 3, a mounting member on which the laser module is mounted; The laser module may further include an irradiation unit that irradiates laser light from the laser module attached to the mounting member.

[0074] According to the optical axis adjustment jig described in paragraph 4, the optical axis of the laser beam can be suitably adjusted by irradiating the irradiation portion with laser light from the laser module attached to the mounting member and adjusting the irradiation position of the laser beam on the irradiation portion to an appropriate position.

[0075] (Item 5) In the optical axis adjustment jig described in item 4, The irradiation unit may be movable to a plurality of different positions in the direction of an optical axis of laser light emitted from the laser module attached to the mounting member.

[0076] According to the optical axis adjustment jig described in paragraph 5, the optical path length of the laser light from the laser module to the irradiation unit can be changed by moving the position of the irradiation unit in the optical axis direction of the laser light. In this way, by adjusting the optical axis while changing the optical path length of the laser light, it is possible to suitably adjust the angular deviation of the laser light. [Explanation of symbols]

[0077] 1. Raman spectrometer 10 First laser light source 11 First laser beam 12 Second laser light source 13 Second laser beam 100 First laser module 101 first base member 102 Mirror 151,161,221,231 axes 200 Second Laser Module 201 second base member 300 Laser Unit 400 Optical axis adjustment jig 401 Mounting parts 402 Irradiation unit 411 Mounting part 412 Extension

Claims

1. A method for adjusting an optical axis of a laser module used in a Raman spectrometer, comprising: a jig mounting step of mounting the laser module having an optical axis adjustment mechanism on an optical axis adjustment jig in a state where the laser module is removed from the Raman spectroscopic device; an optical axis adjustment step of adjusting the optical axis of the laser module using the optical axis adjustment mechanism of the laser module attached to the optical axis adjustment jig; an apparatus mounting step of mounting the laser module after the optical axis has been adjusted in the optical axis adjusting step at a mounting position of the Raman spectrometer; a connecting step of connecting the plurality of laser modules after the optical axes have been adjusted in the optical axis adjusting step to form a laser unit in which the relative positions of the plurality of laser modules are fixed, In the device mounting step, the laser unit is mounted at the mounting position of the Raman spectroscopic device.

2. In the jig mounting step, the plurality of laser modules are mounted on the optical axis adjustment jig; 2. The optical axis adjustment method for a laser module according to claim 1, wherein in the optical axis adjustment step, the optical axes of the plurality of laser modules are adjusted using the optical axis adjustment mechanisms of the plurality of laser modules attached to the optical axis adjustment jig.

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