Liquid crystal display device and projection display device

The liquid crystal display device addresses spacer collapse and uneven gaps by using a pedestal structure in the non-display area with organic spacers, enhancing reliability and display quality.

JP7760514B2Active Publication Date: 2025-10-27SONY SEMICON SOLUTIONS CORP
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Patent Information

Application Number
JP2022551830
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2020-09-25
Filing Date
2021-09-03
Publication Date
2025-10-27
Estimated Expiration
2041-09-03

AI Technical Summary

Technical Problem

Existing liquid crystal display devices face issues with reliability due to spacer collapse and uneven cell gaps, leading to image quality deterioration and display defects, particularly in transmissive devices with thick cell gaps.

Method used

A liquid crystal display device design featuring a pedestal portion on the drive substrate with spacers provided in the non-display area, utilizing a tapered columnar structure and organic materials to maintain the cell gap, reducing spacer height and improving exposure sensitivity.

Benefits of technology

The design enhances reliability by preventing spacer collapse and resin residue, correcting substrate warpage, and ensuring uniform cell gaps, thereby improving display quality and reducing manufacturing complexity.

✦ Generated by Eureka AI based on patent content.

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Abstract

This liquid crystal display device is provided with: a first substrate which has a display region and a non-display region in the periphery of the display region; a second substrate which is arranged opposite of the first substrate; a liquid crystal layer which is arranged between the first substrate and the second substrate; stepped portions which, on one surface of the first substrate opposite of the second substrate, are provided in the non-display region, protruding towards the second substrate; and support members which are provided between the stepped portions and the second substrate and which hold the area between the first substrate and the second substrate.
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Description

[Technical Field]

[0001] The present disclosure relates to a liquid crystal display device used as, for example, a light valve of a projector, and a projection display device including the same. [Background technology]

[0002] For example, Patent Document 1 discloses a liquid crystal display device in which a cell gap between a first substrate and a second substrate is regulated by providing spacers made of a photosensitive resin in the non-display area. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-321580 Summary of the Invention

[0004] Incidentally, there is a demand for improved reliability in liquid crystal display devices.

[0005] It is desirable to provide a liquid crystal display device and a projection display device that can improve reliability.

[0006] A liquid crystal display device according to an embodiment of the present disclosure includes a first substrate having a display region and a non-display region around the display region, a second substrate disposed opposite the first substrate, a liquid crystal layer disposed between the first substrate and the second substrate, a step portion provided in the non-display region on one surface of the first substrate facing the second substrate and protruding toward the second substrate, and a support member provided between the step portion and the second substrate to hold the first substrate and the second substrate together, the display region having a rectangular shape, and the support member includes a plurality of first support members provided continuously at each of the four corners of the display region, and a plurality of first support members provided intermittently at approximately the center of each of two pairs of opposing sides of the display region. and has a tapered columnar structure that gradually becomes thinner from the first substrate side toward the second substrate side. The support structure includes one or more second support members, and adjacent first support members and adjacent second support members are close to the step portions of the second support members. At the bottom They are arranged at intervals equal to or greater than the diameter.

[0007] A projection display device according to an embodiment of the present disclosure includes a light source unit, a liquid crystal display device that modulates light emitted from the light source unit, and a projection optical system that projects the light from the liquid crystal display device. The liquid crystal display device installed in this projection display device has the same components as the liquid crystal display device according to the embodiment of the present disclosure.

[0008] In a liquid crystal display device and a projection display device according to one embodiment of the present disclosure, a base portion that protrudes toward the second substrate is provided in the non-display area of ​​one (first substrate) of a pair of substrates arranged opposite each other, thereby reducing the height of the support member that holds the first substrate and the second substrate together. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a cross-sectional view schematically illustrating a configuration of a liquid crystal display device according to an embodiment of the present disclosure. [Figure 2] 2 is a schematic diagram illustrating an example of a planar configuration of the drive substrate side of the liquid crystal display device shown in FIG. [Figure 3] FIG. 2 is a schematic diagram illustrating an example of a specific cross-sectional configuration of the drive substrate side of the liquid crystal display device shown in FIG. [Figure 4] 4 is a schematic plan view showing an example of a wiring pattern in each region of the wiring shown in FIG. 3. [Figure 5A] 4 is a cross-sectional view schematically illustrating an example of a manufacturing method for the drive substrate shown in FIG. 3. [Figure 5B] FIG. 5B is a schematic cross-sectional view showing a step subsequent to FIG. 5A. [Figure 5C] FIG. 5C is a schematic cross-sectional view showing a step subsequent to FIG. 5B. [Figure 5D] FIG. 5D is a schematic cross-sectional view showing a step subsequent to FIG. 5C. [Figure 6] FIG. 10 is a schematic diagram illustrating an example of a planar configuration on the drive substrate side of a liquid crystal display device according to a first modified example of the present disclosure. [Figure 7] FIG. 10 is a schematic diagram illustrating an example of a planar configuration on the drive substrate side of a liquid crystal display device according to a second modification of the present disclosure. [Figure 8A] 10A and 10B are cross-sectional views schematically illustrating an example of a method for manufacturing the drive substrate side of a liquid crystal display device according to Modification 3 of the present disclosure. [Figure 8B] FIG. 8B is a schematic cross-sectional view showing a step subsequent to FIG. 8A. [Figure 8C] FIG. 8C is a schematic cross-sectional view showing a step subsequent to FIG. 8B. [Figure 8D] FIG. 8D is a schematic cross-sectional view showing a step subsequent to FIG. 8C. [Figure 9] 1 is a functional block diagram illustrating an overall configuration of a projection display device according to the present disclosure. [Figure 10] 10 is a schematic diagram illustrating an example of the configuration of an optical system of the projection display device shown in FIG. [Figure 11] 10 is a schematic diagram illustrating another example of the configuration of the optical system of the projection display device shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The following description is one specific example of the present disclosure, and the present disclosure is not limited to the following aspects. Furthermore, the present disclosure is not limited to the arrangement, dimensions, dimensional ratios, etc. of each component shown in each drawing. The order of description is as follows. 1. Embodiment (Example of a liquid crystal display device in which a pedestal portion protruding toward the opposing substrate is provided on the drive substrate side, and a spacer is provided on this pedestal portion) 1-1.Configuration of liquid crystal display device 1-2. Manufacturing method of the base and spacer 1-3. Actions and Effects 2. Variations 2-1. Modification 1 (another example of a liquid crystal display device) 2-2. Modification 2 (another example of a liquid crystal display device) 2-3. Modification 3 (another example of the manufacturing method of the base part) 3. Application example (projection display device example)

[0011] <1. Embodiment> 1 is a schematic diagram illustrating an example of a cross-sectional configuration of a liquid crystal display device (liquid crystal display device 1) according to an embodiment of the present disclosure. Liquid crystal display device 1 is used, for example, as a light valve (e.g., liquid crystal panels 331R, 331G, 331B, see FIG. 10) of a projection-type display device such as a projector (projection-type display device 2, see FIG. 9), which will be described later. In the liquid crystal display device 1 of this embodiment, a drive substrate 10 and a counter substrate 20 are disposed opposite each other, and a pedestal portion 32 is provided on the drive substrate 10 side, protruding toward the counter substrate 20, and a spacer 33 is provided on this pedestal portion 32 to maintain a gap between the drive substrate 10 and the counter substrate 20.

[0012] (1-1. Configuration of Liquid Crystal Display Device) The liquid crystal display device 1 has a display area 100A in which a plurality of pixels are two-dimensionally arranged in a matrix, and a non-display area 100B surrounding the display area 100A. The liquid crystal display device 1 has a liquid crystal layer 30 between a drive substrate 10 and a counter substrate 20 arranged opposite each other. Further provided between the drive substrate 10 and the counter substrate 20 are a sealing member 31 that seals the liquid crystal layer 30, the pedestal portion 32, and a spacer 33.

[0013] The drive substrate 10 is, for example, a light-transmitting substrate, and includes a pixel circuit layer including transistors on the surface facing the liquid crystal layer 30. A pixel electrode 11 is provided on the drive substrate 10 for each pixel, and the pixel electrode 11 is electrically connected to a transistor provided in the pixel circuit layer. Around the periphery of the display area 100A, in other words, in the non-display area 100B near the display area 100A, steps 14 are individually provided for each spacer 33, surrounding the display area 100A. These steps 14 constitute the pedestal portion 32, which will be described later, and can be formed using, for example, an inorganic material. Examples of materials for the steps 14 include silicon oxide (SiO2), silicon nitride (SiN), a so-called low-k material with a low dielectric constant, or a laminated material thereof.

[0014] A protective layer 12 and an alignment film 13 are provided in this order on the pixel electrodes 11 and the steps 14. Although not shown, for example, a polarizing plate is attached to the surface of the substrate constituting the drive substrate 10 opposite to the surface facing the liquid crystal layer 30. Although not shown, peripheral circuits for driving each pixel are formed in the non-display region 100B of the drive substrate 10.

[0015] The counter substrate 20 is, for example, a light-transmitting substrate, and has a counter electrode 21 provided on the surface facing the liquid crystal layer 30, the counter electrode 21 being common to all pixels. An alignment film 22, for example, is provided on the counter electrode 21. Although not shown, for example, a polarizing plate is attached to the surface of the substrate constituting the counter substrate 20 opposite to the surface facing the liquid crystal layer 30. A color filter layer, a condenser lens layer, a black matrix layer, an overcoat layer, etc. may further be provided between the counter substrate 20 and the counter electrode 21.

[0016] Each of the substrates constituting the drive substrate 10 and the counter substrate 20 is made of a light-transmitting plate-like material such as quartz, glass, silicon, or a plastic film. The substrate constituting the drive substrate 10 does not necessarily have to be a transparent substrate, and may be made of silicon or the like, on which a pixel circuit and a reflector are provided.

[0017] A pixel electrode 11 is provided for each pixel. A counter electrode 21 is provided, for example, in common to all pixels and is held at a common potential. A video voltage is supplied to the liquid crystal layer 30 by the pixel electrode 11 and the counter electrode 21. The pixel electrode 11 and the counter electrode 21 are made of, for example, a light-transmitting conductive material. Examples of light-transmitting conductive materials include indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), and indium gallium zinc oxide (IGZO).

[0018] The protective layer 12 is intended to prevent corrosion of the plurality of pixel electrodes 11. The protective layer 12 is preferably made of an inorganic material that is more chemically stable than the constituent material of the alignment film 13. Examples of such materials include silicon oxide (SiO2) and silicon nitride (SiN). The thickness of the protective layer 12 is, for example, 30 nm to 100 nm. The protective layer 12 is preferably formed using a method that is more chemically stable than vapor deposition, and can be formed by, for example, CVD or sputtering. The protective layer 12 may be omitted.

[0019] The alignment films 13 and 22 control the alignment of the liquid crystal layer 30 and are made of an inorganic material such as silicon oxide (SiO2), diamond-like carbon, or aluminum oxide (Al2O3). The thickness of the alignment films 13 and 22 is, for example, about 50 nm to 500 nm. The alignment films 13 and 22 can be formed by, for example, a vapor deposition method.

[0020] The polarizers provided on the surface of the drive substrate 10 opposite to the surface facing the liquid crystal layer 30 and on the surface of the counter substrate 20 opposite to the surface facing the liquid crystal layer 30 are arranged, for example, in a crossed Nicol configuration so that only light (polarized light) with a predetermined vibration direction can pass through the polarizers. Each polarizer is made of, for example, polyvinyl alcohol (PVA) with iodine (I) compound molecules adsorbed and aligned.

[0021] The liquid crystal layer 30 is made of liquid crystals driven in, for example, VA (Vertical Alignment) mode, TN (Twisted Nematic) mode, ECB (Electrically Controlled Birefringence) mode, FFS (Fringe Field Switching) mode, or IPS (In Plane Switching) mode. The liquid crystal layer 30 is formed by bonding the drive substrate 10 side and the counter substrate 20 side together, injecting liquid crystal, and sealing the space between the drive substrate 10 and the counter substrate 20 with a sealing member 31, which will be described later. Alternatively, the liquid crystal layer 30 may be manufactured using, for example, an ODF (One Drop Fill) process.

[0022] The sealing member 31 is used to bond the drive substrate 10 side and the counter substrate 20 side together and to seal the liquid crystal layer 30. For the sealing member 31, for example, a thermosetting or UV-curable sealant that is commercially available for liquid crystal displays can be used.

[0023] The pedestal portions 32 define the gap between the drive substrate 10 and the counter substrate 20 and reduce the height of the spacers 33 that maintain the thickness of the liquid crystal layer 30, and correspond to a specific example of a "step portion" of the present disclosure. The pedestal portions 32 are configured to include the above-mentioned steps 14, and as shown in FIG. 2, for example, they are provided intermittently for each spacer 33 on the periphery of the display region 100A, in other words, in the vicinity of the display region 100A in the non-display region 100B, so as to surround the display region 100A. The height of the pedestal portions 32 is preferably 0.3 μm or more, for example.

[0024] As described above, the spacers 33 define the gap between the drive substrate 10 and the counter substrate 20 and maintain the thickness of the liquid crystal layer 30, and correspond to a specific example of a "support member" in the present disclosure. As shown in FIG. 2, for example, a plurality of spacers 33 are provided intermittently around the periphery of the display region 100A, in other words, in the vicinity of the display region 100A in the non-display region 100B, so as to surround the display region 100A. The spacers 33 have, for example, a tapered columnar structure that gradually becomes thinner from the drive substrate 10 side toward the counter substrate 20 side, and can be formed using an organic material such as a photosensitive resin.

[0025] The spacers 33 are preferably provided so as to surround the display area 100A, and may be provided in two or more layers on one of a pair of opposing long and short sides of the rectangular display area 100A, as shown in Fig. 2. The spacers 33 may also be partially constricted.

[0026] Fig. 3 is a schematic diagram showing an example of a specific cross-sectional configuration of the drive substrate 10 side of the liquid crystal display device 1 shown in Fig. 1. Note that the protective layer 12 and the alignment film 13 are omitted in Fig. 3. The drive substrate 10 has a wiring layer 120 having a single layer or multilayer structure that constitutes the pixel circuit layer described above, provided on a light-transmitting substrate (substrate 110). Fig. 4 is a schematic plan view showing an example of a wiring pattern in each region of the wiring layer 120 shown in Fig. 3.

[0027] In the liquid crystal display device 1, the wiring layer 120 formed in the display region 100A is provided in a grid pattern so as to also shield the driving elements, as shown in FIG. 4, and has an opening 120H for each pixel. In the non-display region 100B, a dummy pixel region 100B' is provided around the periphery of the display region 100A, and in the dummy pixel region 100B', the wiring layer 120 is provided in a grid pattern, as in the display region 100A, as shown in FIG. 4. In this embodiment, electrically floating dummy wirings 121 are formed in the openings 120H of the wiring layer 120 provided in the dummy pixel region 100B', and these dummy wirings 121 are used to form steps 14 on the surface of the driving substrate 10. That is, the protruding steps (steps 14) on the surface of the interlayer insulating layer 122 caused by these dummy wirings 121 are used as pedestals 32. This allows the dummy pixel region 100B' to be used effectively.

[0028] (1-2. Manufacturing Method of Base and Spacer) The liquid crystal display device 1 of this embodiment can be manufactured, for example, as follows: Figures 5A to 5D are schematic diagrams showing the cross-sectional configuration of the drive substrate 10 side in each step.

[0029] First, as shown in FIG. 5A, an interlayer insulating layer 122 including a wiring layer 120 and dummy wirings 121 that constitute a pixel circuit layer is formed on a substrate 110 by, for example, chemical vapor deposition (CVD).

[0030] Next, as shown in FIG. 5B, lithography and dry processing (or wet processing) are used to reverse the surface steps of the interlayer insulating layer 122 formed above the wiring layer 120 in areas other than the dummy pixel region 100B'. Next, as shown in FIG. 5C, the surface of the interlayer insulating layer 122 in areas other than the dummy pixel region 100B' is planarized by, for example, chemical mechanical polishing (CMP). As a result, a pedestal portion 32 (step 14) is formed in the dummy pixel region 100B' using the dummy wiring 121. Next, as shown in FIG. 5C, a through-hole 122H is formed in a predetermined part of the wiring layer 120, and a pixel electrode 11 and a contact electrode 15 are formed therein.

[0031] If the wiring layer 120 has a multi-layer structure, the area other than the dummy pixel region 100B' may be planarized for each wiring layer, thereby increasing the height of the step 14 that becomes the pedestal portion 32 in the dummy pixel region 100B'.

[0032] Next, a photosensitive resin is applied onto the interlayer insulating layer 122 including the pixel electrodes 11 and the contact electrodes 15, and then an exposure and development process is performed to form spacers 33 on the pedestal portions 32, as shown in Fig. 5D. As a result, the drive substrate 10 is completed, which has the pedestal portions 32 using the wiring layer 120 that constitutes the pixel circuit layer and the spacers 33 provided on the pedestal portions 32.

[0033] (1-3. Actions and Effects) In the liquid crystal display device 1 of this embodiment, a pedestal portion 32 that protrudes toward the counter substrate 20 is provided in the non-display region 100B of the drive substrate 10 that is disposed opposite the counter substrate 20 with the liquid crystal layer 30 therebetween, and a spacer 33 is provided on the pedestal portion 32. This makes it possible to reduce the height of the spacer 33. This will be explained below.

[0034] In typical liquid crystal display devices, a cell gap between a pair of opposing substrates is defined by providing spacers made of photosensitive resin in the display area. However, providing spacers in the display area can cause deterioration in image quality, such as contrast and unevenness. In particular, when providing spacers in the display area of ​​a transmissive liquid crystal display device, a light-shielding layer is generally provided to prevent the spacers from being visible, which reduces the transmittance (aperture ratio). This reduction in aperture ratio is particularly noticeable in pixels with narrow pitches.

[0035] In general liquid crystal display devices, there are examples in which the cell gap between the substrates is controlled by a sealing material provided on the outer edge of the liquid crystal display device without forming spacers, but in such cases, there is a risk that the cell gap in the display area will vary due to surface irregularities on the substrates on which the sealing material is provided, warping of one or both of the pair of substrates, etc. This variation in the cell gap in the display area will cause uneven brightness.

[0036] As a means for solving these problems, as mentioned above, liquid crystal display devices have been disclosed that provide spacers made of photosensitive resin in the non-display area. However, in transmissive liquid crystal display devices with a cell gap thickness of 2 μm or more, if the spacers are formed solely from photosensitive resin, problems such as spacer collapse due to deterioration in exposure sensitivity and resin residue after development processing may occur. Spacer collapse can cause deterioration in cell gap uniformity and display defects. Residual resin can cause display defects and poor compression bonding between substrates.

[0037] In contrast to this, in the present embodiment, a pedestal portion 32 that protrudes toward the counter substrate 20 is provided in the non-display area 100B of the drive substrate 10, and a spacer 33 is provided on this pedestal portion 32. This makes it possible to reduce the height of the spacer 33 and improve the exposure sensitivity of the spacer 33. This makes it possible to prevent the spacer from collapsing as described above and resin remaining after the development process.

[0038] As a result, the reliability of the liquid crystal display device 1 of this embodiment can be improved.

[0039] Furthermore, in this embodiment, since the base portion 32 and the spacer 33 are provided in the non-display area 100B on the periphery of the display area 100A, when assembling the liquid crystal display device 1 (when bonding the drive substrate 10 side and the counter substrate 20 side), they can be pressed together with a constant pressure via the spacer 33. This makes it possible to correct variations in warpage of the drive substrate 10 and the counter substrate 20, thereby improving the display quality.

[0040] Furthermore, in this embodiment, the spacers 33 are formed using an organic material such as a photosensitive resin, which reduces surface variations on the drive substrate 10 side on which the spacers 33 are provided, and further reduces variations in the gap between the drive substrate 10 and the counter substrate 20, i.e., the thickness of the liquid crystal layer 30. This makes it possible to further improve the display quality.

[0041] Furthermore, in this embodiment, a plurality of spacers 33 are provided in non-display area 100B on the periphery of display area 100A so as to surround display area 100A, which further reduces variations in the thickness of liquid crystal layer 30. Furthermore, in this embodiment, pedestal portion 32 is provided individually for each spacer 33, which makes it possible to avoid restrictions on the placement of pedestal portion 32 when providing contact electrodes 15, etc.

[0042] Furthermore, in this embodiment, the step that becomes the pedestal portion 32 is formed by utilizing the wiring layer 120 that constitutes the pixel circuit layer provided on the drive substrate 10, so that it is possible to form the desired step without adding any manufacturing steps.

[0043] Furthermore, in this embodiment, dummy wirings 121 are provided in openings 120H of a wiring layer 120 formed in a dummy pixel region 100B' provided on the periphery of the display region 100A in the same manner as in the display region 100A, and these are used as steps that become pedestal portions 32. This makes it possible to form pedestal portions 32 and spacers 33 in positions close to the display region 100A. It also makes it possible to easily control the height of pedestal portions 32. Furthermore, it is possible to form spacers 33 without restricting the layout of contact electrodes 15 and the like provided in the non-display region 100B.

[0044] Next, modifications 1 to 3 of the present disclosure will be described. Note that components similar to those of the liquid crystal display device 1 in the above embodiment are given the same reference numerals, and descriptions thereof will be omitted where appropriate.

[0045] <2. Modifications> (2-1. Variation 1) 6 shows an example of a planar configuration on the drive substrate 10 side of a liquid crystal display device (liquid crystal display device 1A) according to Modification 1 of the present disclosure. In the liquid crystal display device 1 of the above embodiment, the pedestal portions 32 are individually formed for each spacer 33 as shown in FIG. 2, but this is not limiting. For example, the pedestal portions 32 may be provided continuously along the periphery of the display region 100A as shown in FIG.

[0046] (2-2. Variation 2) 7 shows an example of a planar configuration on the drive substrate 10 side of a liquid crystal display device (liquid crystal display device 1B) according to Modification 2 of the present disclosure. In the liquid crystal display device 1 of the above embodiment, as shown in FIG. 2, an example has been given in which a plurality of spacers 33 having approximately the same diameter are arranged at approximately equal intervals around the periphery of the display area 100A, but the present invention is not limited to this. For example, the spacers 33 may be arranged continuously around part of the periphery of the display area 100A.

[0047] Specifically, the spacers 33 arranged along the long and short sides of the rectangular display area 100A may be continuous with each other, as shown in Fig. 7. This increases the strength of the spacers 33, further improving reliability.

[0048] When continuous spacers 33 are provided around the periphery of the display region 100A, it is preferable to provide openings 32H in some of the continuous spacers 33 (for example, approximately in the center of a pair of opposing long and short sides) as shown in Fig. 7. This ensures that liquid crystal can be easily injected into the display region 100A. When the diameter (D) of the bottom of each individually formed spacer 33 is 3 µm, it is preferable that the width (W) of the openings 32H is 3 µm or more.

[0049] (2-3. Variation 3) 8A to 8D are schematic diagrams showing cross-sectional configurations of the drive substrate 10 side in each step as another example of the method for manufacturing the pedestal and spacer. In the above embodiment, an example is shown in which dummy wiring 121 is provided in the opening 120H of the wiring layer 120 provided in the dummy pixel region 100B', and this dummy wiring 121 is used to provide the pedestal 32 in the dummy pixel region 100B', but by using the following method, the pedestal 32A can also be formed in a place where there is no wiring below.

[0050] First, as in the above embodiment, the wiring layer 120 and dummy wirings 121 constituting the pixel circuit layer and the interlayer insulating layer 122 are formed on the substrate 110 by, for example, CVD (FIG. 5A). Next, as in the above embodiment, all of the surface steps (steps 14) of the interlayer insulating layer 122 formed above the wiring layer 120 are inverted by lithography and DET, and then the surface of the interlayer insulating layer 122 is planarized by, for example, CMP.

[0051] Next, as shown in Fig. 8A, resist film 41 is formed at a desired position in non-display area 100B, and then interlayer insulating layer 122 is etched as shown in Fig. 8B. This allows pedestal portion 32A to be formed at a desired position where no wiring is formed underneath. Note that interlayer insulating layer 122 may have a multilayer structure including layers with different etching rates so as to act as an etching stopper film when pedestal portion 32A is formed.

[0052] Subsequently, as shown in FIG. 8C, in the same manner as in the above embodiment, a through hole 122H is formed on a predetermined wiring layer 120, and a pixel electrode 11 and a contact electrode 15 are formed.

[0053] 8D, in the same manner as in the above embodiment, a photosensitive resin is applied onto the interlayer insulating layer 122 including the pixel electrodes 11 and the contact electrodes 15, and then an exposure and development process is performed to form spacers 33 on the pedestals 32 and 32A. This completes the drive substrate 10, on which the pedestal 32A is provided in a desired position other than the dummy pixel region 100B'.

[0054] In this way, by using the above manufacturing method, the pedestal portion 32 and the spacer 33 can be formed at any position. That is, it is possible to reduce restrictions on the layout of the pedestal portion 32 and the spacer 33.

[0055] <3. Application Examples> 9 is a functional block diagram showing the overall configuration of a projection display device (projection display device 2) according to Application Example 1. This projection display device 2 is a display device that projects an image onto, for example, a screen 500 (projection surface). The projection display device 2 is connected via an I / F (interface) to an external image supply device, for example, a computer such as a PC (not shown) or an image player, and projects an image onto the screen 500 based on an image signal input to this interface.

[0056] The projection display device 2 includes, for example, a control unit 210, a light source driving unit 220, a light source device 200, a light modulation device 230, a projection optical system 400, an image processing unit 240, a frame memory 250, a panel driving unit 260, and a projection optical system driving unit 270.

[0057] The control unit 210 controls the light source driving unit 220 , the image processing unit 240 , the panel driving unit 260 , and the projection optical system driving unit 270 .

[0058] The light source driving unit 220 outputs a signal for controlling the light emission timing of the light source arranged in the light source device 200. The light source driving unit 220 includes, for example, a PWM setting unit, a PWM signal generating unit, and a limiter, which are not shown, and controls the light source driver of the light source device 200 based on the control of the control unit 210, and PWM controls the light source to turn the light source on and off or adjust the brightness.

[0059] Although not shown, the light source device 200 includes a light source driver that drives the light sources and a current value setting unit that sets the current values ​​when driving the light sources. The light source driver generates currents having current values ​​set by the current value setting unit based on power supplied from a power supply circuit (not shown) in synchronization with a signal input from the light source driving unit 220. The generated currents are supplied to the light sources.

[0060] The light modulation device 230 modulates the light (illumination light) output from the light source device 200 based on an image signal to generate image light. The light modulation device 230 includes, for example, three light valves (e.g., the above-mentioned liquid crystal display device 1 (or liquid crystal display devices 1A and 1B)) corresponding to the respective colors of RGB described below. For example, a liquid crystal display device (liquid crystal panel (B)) that modulates blue light (B), a liquid crystal display device (liquid crystal panel (R)) that modulates red light (R), and a liquid crystal display device (liquid crystal panel (G)) that modulates green light (G) can be used. The RGB color lights modulated by the light modulation device 230 are combined by a cross dichroic prism or the like (not shown) and guided to the projection optical system 400.

[0061] The projection optical system 400 includes a group of lenses and the like for projecting light modulated by the liquid crystal display device 1 (each liquid crystal panel R, G, B of the light modulation device 230) onto the screen 500 to form an image.

[0062] The image processing unit 240 acquires an image signal input from the outside and performs tasks such as determining the image size, the resolution, and whether the image is a still image or a moving image. If the image is a moving image, it also determines image data attributes such as the frame rate. If the resolution of the acquired image signal differs from the display resolution of each liquid crystal panel of the liquid crystal display device 1, it performs resolution conversion processing. The image processing unit 240 loads the images after each of these processes into the frame memory 250 for each frame, and outputs the image for each frame loaded in the frame memory 250 to the panel driving unit 260 as a display signal.

[0063] The panel driving section 260 drives the liquid crystal panels R, G, and B of the light modulation device 230. By driving the panel driving section 260, the light transmittance of each pixel arranged on each of the liquid crystal panels R, G, and B changes, and an image is formed.

[0064] The projection optical system driving unit 270 includes a motor that drives the lenses arranged in the projection optical system 400. Under the control of the control unit 210, the projection optical system driving unit 270 drives, for example, the projection optical system 400, and performs, for example, zoom adjustment, focus adjustment, and aperture adjustment.

[0065] (Configuration example 1 of a projection display device) 10 is a schematic diagram showing an example (projection display device 2A) of the overall configuration of an optical system that constitutes the projection display device 2. The projection display device 2A is a transmissive 3LCD projection display device that performs light modulation using a transmissive liquid crystal panel (LCD).

[0066] The projection display device 2A includes, for example, a light source device 200, an image generation system 300 having an illumination optical system 310 and an image generation section 330, and a projection optical system 400, in that order.

[0067] Illumination optical system 310 has, for example, integrator element 311, polarization conversion element 312, and condenser lens 313. Integrator element 311 includes first fly's eye lens 311A ​​having a plurality of microlenses arranged two-dimensionally, and second fly's eye lens 311B having a plurality of microlenses arranged so as to correspond one-by-one to each of the microlenses.

[0068] Light (parallel light) incident on integrator element 311 from light source device 200 is split into multiple beams by the microlenses of first fly-eye lens 311A, and each beam is imaged on a corresponding microlens in second fly-eye lens 311B. Each microlens of second fly-eye lens 311B functions as a secondary light source, and irradiates multiple parallel beams of light with uniform brightness onto polarization conversion element 312 as incident light.

[0069] The integrator element 311 as a whole has a function of adjusting the incident light irradiated from the light source device 200 onto the polarization conversion element 312 to have a uniform luminance distribution.

[0070] The polarization conversion element 312 has a function of aligning the polarization state of incident light that is incident via the integrator element 311 or the like. The polarization conversion element 312 emits output light that includes blue light Lb, green light Lg, and red light Lr via, for example, a lens or the like arranged on the output side of the light source device 200.

[0071] The illumination optical system 310 further includes dichroic mirrors 314 and 315, mirror 316, mirror 317 and 318, relay lenses 319 and 320, field lenses 321R, field lenses 321G and 321B, and liquid crystal panels 331R, 331G, and 331B as an image generation unit 330, and a dichroic prism 332.

[0072] The dichroic mirrors 314 and 315 have the property of selectively reflecting colored light in a predetermined wavelength range and transmitting light in other wavelength ranges. For example, the dichroic mirror 314 selectively reflects red light Lr. The dichroic mirror 315 selectively reflects green light Lg out of green light Lg and blue light Lb that have passed through the dichroic mirror 314. The remaining blue light Lb passes through the dichroic mirror 315. This separates the light emitted from the light source device 200 (for example, the white combined light Lw) into multiple colored lights of different colors.

[0073] The separated red light Lr is reflected by mirror 316, is collimated by passing through field lens 321R, and then enters liquid crystal panel 331R for modulating the red light. Green light Lg is collimated by passing through field lens 321G, and then enters liquid crystal panel 331G for modulating the green light. Blue light Lb passes through relay lens 319, is reflected by mirror 317, and then passes through relay lens 320 and is reflected by mirror 318. Blue light Lb reflected by mirror 318 is collimated by passing through field lens 321B, and then enters liquid crystal panel 331B for modulating the blue light Lb.

[0074] The liquid crystal panels 331R, 331G, and 331B are electrically connected to a signal source (e.g., a PC, etc.) (not shown) that supplies image signals containing image information. The liquid crystal panels 331R, 331G, and 331B modulate incident light for each pixel based on the supplied image signals for each color, thereby generating a red image, a green image, and a blue image, respectively. The modulated light for each color (formed images) enters the dichroic prism 332 and is combined. The dichroic prism 332 overlaps and combines the light for each color incident from three directions, and outputs the combined light toward the projection optical system 400.

[0075] The projection optical system 400 includes, for example, a plurality of lenses, etc. The projection optical system 400 magnifies the light emitted from the image generation system 300 and projects it onto the screen 500.

[0076] (Configuration example 2 of projection type display device) 11 is a schematic diagram showing another example (projection display device 2B) of the overall configuration of the optical system that constitutes the projection display device 2. The projection display device 2B is a reflective 3LCD projection display device that performs light modulation using a reflective liquid crystal display (LCD) panel.

[0077] The liquid crystal display device 1 etc. of the present disclosure can be used as the reflective liquid crystal panels 622A, 622B, 622C of the reflective projection display device 2B shown in Application Example 2 above, for example, by configuring the substrate or pixel electrodes that make up the drive substrate 10 using a light-reflective material.

[0078] As shown in FIG. 11, the projection display device 2B includes a light source device 200, an illumination optical system 610, an image forming section 620, and a projection optical system 400, arranged in this order.

[0079] The illumination optical system 610 includes, for example, from a position closest to the light source device 200, a fly-eye lens 611 (611A, 611B), a polarization conversion element 612, a lens 613, dichroic mirrors 614A, 614B, reflecting mirrors 615A, 615B, lenses 616A, 616B, a dichroic mirror 617, and polarizing plates 618A, 618B, 618C.

[0080] The fly-eye lenses 611 (611A, 611B) homogenize the illuminance distribution of the illumination light from the light source device 200. The polarization conversion element 612 functions to align the polarization axis of the incident light in a predetermined direction. For example, it converts randomly polarized light into P-polarized light. The lens 613 focuses the light from the polarization conversion element 612 toward the dichroic mirrors 614A, 614B. The dichroic mirrors 614A, 614B selectively reflect light in a predetermined wavelength range and selectively transmit light in other wavelength ranges. For example, the dichroic mirror 614A mainly reflects red light Lr and green light Lg toward the reflecting mirror 615A. The dichroic mirror 614B mainly reflects blue light Lb toward the reflecting mirror 615B. Reflecting mirror 615A reflects light (mainly red light Lr and green light Lg) from dichroic mirror 614A toward lens 616A, and reflecting mirror 615B reflects light (mainly blue light Lb) from dichroic mirror 614B toward lens 616B. Lens 616A transmits light (mainly red light Lr and green light Lg) from reflecting mirror 615A and focuses it onto dichroic mirror 617. Dichroic mirror 617 selectively reflects green light Lg toward polarizing plate 618C and selectively transmits light in other wavelength ranges. Polarizing plates 618A, 618B, and 618C include polarizers with polarization axes oriented in predetermined directions. For example, when light is converted to P-polarized light by polarization conversion element 612, polarizing plates 618A, 618B, and 618C transmit P-polarized light and reflect S-polarized light.

[0081] The image forming section 620 includes reflective polarizing plates 621A, 621B, and 621C, reflective liquid crystal panels 622A, 622B, and 622C, and a dichroic prism 623.

[0082] Reflective polarizers 621A, 621B, and 621C transmit light with the same polarization axis as the polarization axis of the polarized light from polarizers 618A, 618B, and 618C (e.g., P-polarized light) and reflect light with a different polarization axis (S-polarized light). Specifically, reflective polarizer 621A transmits P-polarized red light Lr from polarizer 618A toward reflective liquid crystal panel 622A. Reflective polarizer 621B transmits P-polarized blue light Lb from polarizer 618B toward reflective liquid crystal panel 622B. Reflective polarizer 621C transmits P-polarized green light Lg from polarizer 618C toward reflective liquid crystal panel 622C. Reflective polarizer 621A also reflects S-polarized red light Lr from reflective liquid crystal panel 622A and causes it to enter dichroic prism 623. Reflective polarizing plate 621B reflects S-polarized blue light Lb from reflective liquid crystal panel 622B and makes it incident on dichroic prism 623. Reflective polarizing plate 621C reflects S-polarized green light Lg from reflective liquid crystal panel 622C and makes it incident on dichroic prism 623.

[0083] The reflective liquid crystal panels 622A, 622B, and 622C perform spatial modulation of red light Lr, blue light Lb, and green light Lg, respectively.

[0084] The dichroic prism 623 combines the incident red light Lr, blue light Lb, and green light Lg, and emits the combined light toward the projection optical system 400.

[0085] The projection optical system 400 includes, for example, a plurality of lenses, etc. The projection optical system 400 magnifies the light emitted from the image forming unit 620 and projects it onto a screen 500 or the like.

[0086] Although the present disclosure has been described above with reference to the embodiment, modifications 1 to 3, and application examples, the present disclosure is not limited to the above-described embodiment, etc., and various modifications are possible. For example, the projection display device of the present disclosure is not limited to the configuration described in the above-described embodiment, and can be applied to various display devices that modulate light from a light source via a liquid crystal display device and display an image using a projection lens.

[0087] The effects described in this specification are merely examples and are not limited to those described, and other effects may also be obtained.

[0088] The present technology can also be configured as follows. According to the present technology configured as follows, a pedestal portion that protrudes toward the second substrate is provided in the non-display area of ​​one (first substrate) of a pair of substrates arranged opposite each other, thereby reducing the height of the support member that holds the first substrate and the second substrate together. This makes it possible to improve reliability. (1) a first substrate having a display area and a non-display area around the display area; a second substrate disposed opposite the first substrate; a liquid crystal layer disposed between the first substrate and the second substrate; a step portion provided in the non-display region of one surface of the first substrate facing the second substrate, the step portion protruding toward the second substrate; a support member provided between the step portion and the second substrate, for holding the first substrate and the second substrate, the display area has a rectangular shape; The support members include a plurality of first support members provided continuously at each of the four corners of the display area, and a plurality of first support members provided intermittently at approximately the center of each of two pairs of opposing sides of the display area. and has a tapered columnar structure that gradually becomes thinner from the first substrate side toward the second substrate side. one or more second support members; The adjacent first support member and the adjacent second support member, and the adjacent second support members are close to the step portion of the second support member. At the bottom are spaced at intervals equal to or greater than the diameter LCD display device. (2) the display area has a rectangular shape; The liquid crystal display device according to (1), wherein the plurality of support members are provided in two or more layers on at least one of two pairs of opposing sides of the display area. (3) The liquid crystal display device according to (1) or (2), wherein the step portion is provided continuously around the periphery of the display area. (4) The liquid crystal display device according to (1) or (2), wherein a plurality of the step portions are provided discontinuously around the periphery of the display area. (5) The liquid crystal display device according to any one of (1) to (4), wherein the step portion is provided in the vicinity of the display area. (6) the first substrate includes a wiring layer having a single-layer or multi-layer structure; The liquid crystal display device according to any one of (1) to (5), wherein the step portion is formed using a step of one or more wirings that constitute the wiring layer. (7) The liquid crystal display device according to (6), wherein the one or more wirings are dummy wirings provided in a dummy pixel region provided on the periphery of the display region. (8) The height of the step is 0.3 μm or more. (1) to (7) above 1. The liquid crystal display device according to claim 1, wherein the liquid crystal display device is a liquid crystal display device having a liquid crystal display element. (9) a light source unit; a liquid crystal display device that modulates the light emitted from the light source unit; a projection optical system that projects light from the liquid crystal display device, The liquid crystal display device comprises: a first substrate having a display area and a non-display area around the display area; a second substrate disposed opposite the first substrate; a liquid crystal layer disposed between the first substrate and the second substrate; a step portion provided in the non-display region of one surface of the first substrate facing the second substrate, the step portion protruding toward the second substrate; a support member provided between the step portion and the second substrate, for holding the first substrate and the second substrate together; the display area has a rectangular shape; The support members include a plurality of first support members provided continuously at each of the four corners of the display area, and a plurality of first support members provided intermittently at approximately the center of each of two pairs of opposing sides of the display area. and has a tapered columnar structure that gradually becomes thinner from the first substrate side toward the second substrate side. one or more second support members; The adjacent first support member and the adjacent second support member, and the adjacent second support members are close to the step portion of the second support member. At the bottom are spaced at intervals equal to or greater than the diameter throw Shooting type display device.

[0089] This application claims priority based on Japanese Patent Application No. 2020-161277, filed on September 25, 2020, in the Japan Patent Office, the entire contents of which are incorporated herein by reference.

[0090] Those skilled in the art will recognize that various modifications, combinations, subcombinations, and variations may occur depending on design requirements and other factors, and are intended to be within the scope of the appended claims and their equivalents.

Claims

1. a first substrate having a display area and a non-display area around the display area; a second substrate disposed opposite the first substrate; a liquid crystal layer disposed between the first substrate and the second substrate; a step portion provided in the non-display region of one surface of the first substrate facing the second substrate so as to protrude toward the second substrate; a support member provided between the step portion and the second substrate, for holding the first substrate and the second substrate together; the display area has a rectangular shape; the support members include a plurality of first support members provided continuously at each of the four corners of the display area, and one or more second support members provided discontinuously with respect to the plurality of first support members at approximately the center of each of two pairs of opposing sides of the display area, the second support members having a tapered columnar structure that gradually becomes thinner from the first substrate side toward the second substrate side; The adjacent first support members and the adjacent second support members, and the adjacent second support members, are disposed at intervals equal to or greater than the diameter of the lower portion of the second support member that is close to the step portion. LCD display device.

2. the display area has a rectangular shape; 2. The liquid crystal display device according to claim 1, wherein the plurality of support members are provided in two or more layers on at least one of two pairs of opposing sides of the display area.

3. The liquid crystal display device according to claim 1 , wherein the step portion is provided continuously around the periphery of the display area.

4. The liquid crystal display device according to claim 1 , wherein a plurality of the step portions are provided discontinuously around the periphery of the display area.

5. The liquid crystal display device according to claim 1 , wherein the step portion is provided in the vicinity of the display area.

6. the first substrate includes a wiring layer having a single-layer or multi-layer structure; 2. The liquid crystal display device according to claim 1, wherein the step portion is formed using a step of one or more wires that constitute the wiring layer.

7. 7. The liquid crystal display device according to claim 6, wherein the one or more wirings are dummy wirings provided in a dummy pixel region provided on the periphery of the display region.

8. 2. The liquid crystal display device according to claim 1, wherein the height of the step portion is 0.3 [mu]m or more.

9. a light source unit; a liquid crystal display device that modulates the light emitted from the light source unit; a projection optical system that projects light from the liquid crystal display device, The liquid crystal display device comprises: a first substrate having a display area and a non-display area around the display area; a second substrate disposed opposite the first substrate; a liquid crystal layer disposed between the first substrate and the second substrate; a step portion provided in the non-display region of one surface of the first substrate facing the second substrate so as to protrude toward the second substrate; a support member provided between the step portion and the second substrate, for holding the first substrate and the second substrate together; the display area has a rectangular shape; the support members include a plurality of first support members provided continuously at each of the four corners of the display area, and one or more second support members provided discontinuously with respect to the plurality of first support members at approximately the center of each of two pairs of opposing sides of the display area, the second support members having a tapered columnar structure that gradually becomes thinner from the first substrate side toward the second substrate side; The adjacent first support members and the adjacent second support members, and the adjacent second support members, are disposed at intervals equal to or greater than the diameter of the lower portion of the second support member that is close to the step portion. Projection type display device.

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