Power transmitting device and power receiving device

Abstract

To reduce the size of a power receiving unit that wirelessly receives AC power.SOLUTION: A power transmitting unit 100 has: a clock generation circuit 105 that generates a clock signal; a switch circuit 102 that switches AC power at a timing based on the clock signal; a power transmitting antenna 101 that wirelessly transmits the switched AC power; and a transmitting antenna 103 that wirelessly transmits the clock signal. The power receiving unit 200 has a power receiving antenna 201 that receives the AC power wirelessly transmitted from the power transmitting antenna, a receiving antenna 203 that receives the clock signal wirelessly transmitted from the transmitting antenna, and a rectification circuit 202 that switches the AC power received by the power receiving antenna at a timing based on the received clock signal. A first correction circuit 106 corrects the phase of the clock signal to reduce the phase shift between the phase of the AC power input to the rectification circuit and the phase of the clock signal input to the rectification circuit.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure provides: Power transmitting device, power receiving device, control method for power transmitting device, and control method for power receiving device Regarding. [Background technology]

[0002] There are systems that supply power to motors to drive them. For example, in a semiconductor exposure apparatus, a coarse movement stage that moves the wafer to the exposure position is mounted on a fine movement stage that moves the wafer by small amounts to form a pattern on the wafer, and a motor that drives this fine movement stage is mounted on the coarse movement stage. A power supply cable that supplies power to drive this motor is connected to the motor mounted on the coarse movement stage. Because this cable moves in conjunction with the movement of the coarse movement stage, the tension in the cable affects the positioning accuracy of the stage. Therefore, wireless power transmission for driving the motor is being considered.

[0003] An AC voltage must be applied to the motor that moves the stage. For example, a positive voltage must be applied to move the stage in the positive direction on one axis, and a negative voltage must be applied to move it in the negative direction. To move the fine movement stage, an AC voltage must be applied to the motor mounted on the coarse movement stage.

[0004] The AC voltage applied to a motor is generally generated by a circuit called a motor driver. The AC voltage applied to the motor is generated by providing the motor driver with a DC voltage and a control signal. Patent Document 1 describes the configuration of a wireless motor drive system in which a motor driver is placed on a coarse movement stage and an AC voltage is applied to a motor mounted on the coarse movement stage using wireless power transmission. The coarse movement stage is the power receiving side of the wireless power transmission, and a power receiving unit for wireless power transmission is placed on the coarse movement stage. A DC voltage is wirelessly transmitted to the power receiving unit on the coarse movement stage and the DC voltage is provided to the motor driver on the coarse movement stage, generating the AC voltage to be applied to the motor mounted on the coarse movement stage and driving the motor. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2018-54847 Summary of the Invention [Problem to be solved by the invention]

[0006] However, because space is required to place the motor driver on the power receiving side of the wireless power transmission, the coarse movement stage becomes larger, which requires a large-scale coarse movement stage control system.

[0007] The purpose of this disclosure is to Device Wirelessly transmit power to Power transmission equipment And, Corrects the phase of the clock signal The goal is to make it possible. [Means for solving the problem]

[0008] The power transmitting device wirelessly transmits the power to the power receiving device, which is movable relative to the power transmitting device. Transmitting electricity The aforementioned Sending An electrical device a clock generation circuit for generating a clock signal; a correction circuit for correcting the phase of the generated clock signal; The power supply includes a switch circuit that switches power at a timing based on a clock signal, a power transmitting antenna that wirelessly transmits the switched power, and a transmitting antenna that wirelessly transmits the clock signal, and the correction circuit is The amount of correction of the phase of the generated clock signal is made different between when the positional relationship between the power transmitting device and the power receiving device is a first positional relationship and when the positional relationship is a second positional relationship different from the first positional relationship. . [Effects of the Invention]

[0009] According to the present disclosure, Device Wirelessly transmit power to Power transmission equipment And, Corrects the phase of the clock signal It is possible. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a block diagram illustrating an example of the configuration of a control system. [Figure 2] FIG. 1 is a diagram illustrating an example of the appearance of a control system. [Figure 3] FIG. 2 is a diagram illustrating a power transmitting antenna. [Figure 4] FIG. 10 is a diagram showing a measured waveform of a clock signal. [Figure 5] FIG. 1 is a block diagram illustrating an example of the configuration of a control system. [Figure 6] FIG. 1 is a block diagram illustrating an example of the configuration of a control system. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, the embodiments will be described in detail with reference to the drawings. Note that the following embodiments do not limit the scope of the claims. Although multiple features are described in the embodiments, not all of these multiple features are necessarily required, and multiple features may be combined arbitrarily. Furthermore, in the drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0012] (First embodiment) [System Configuration] FIG. 1 is a block diagram showing an example configuration of a control system 300 according to the first embodiment. The control system 300 includes a power transmitting unit 100, a power receiving unit 200, an AC power supply 401, and a motor 402. There is no physical connection between the power transmitting unit 100 and the power receiving unit 200. Power is transmitted contactlessly from the power transmitting antenna 101 to the power receiving antenna 201, and a clock signal is transmitted contactlessly from the transmitting antenna 103 to the receiving antenna 203. The power transmitting antenna 101 and the power receiving antenna 201 are coupled by magnetic field coupling. Meanwhile, the transmitting antenna 103 and the receiving antenna 203 are coupled by electric field coupling. A control method for the control system 300 will be described below.

[0013] The power transmitting unit 100 includes a power transmitting antenna 101 and a switch circuit 102. The switch circuit 102 switches the AC voltage supplied from the AC power source 401 at a frequency higher than the frequency of the AC voltage supplied from the AC power source 401, and transmits the switched AC voltage to the power transmitting antenna 101. The power transmitting antenna 101 transmits power to the power receiving antenna 201 wirelessly.

[0014] The switch circuit 102 has a bidirectional switch formed by connecting the sources and gates of two FETs together, for example, to switch the supplied AC voltage. Whether a positive voltage or a negative voltage is applied between the drains of the two FETs, the body diodes of the two FETs do not turn on, so the switch circuit 102 can switch the AC voltage. By applying a voltage between the gates and sources of the FETs, the drains of the two FETs are switched on or off.

[0015] The power transmitting unit 100 also has a transmitting antenna 103, a clock transmitting circuit 104, a clock generating circuit 105, and a correction circuit 106. The clock generating circuit 105 generates a clock signal and sends the clock signal to the transmitting antenna 103 via the clock transmitting circuit 104. The clock generating circuit 105 also sends the clock signal to the correction circuit 106. The correction circuit 106 corrects the phase of the clock signal and sends the corrected clock signal to the switch circuit 102 to control the switch timing of the switch circuit 102. The transmitting antenna 103 wirelessly transmits the clock signal to the receiving antenna 203.

[0016] The power receiving unit 200 has a power receiving antenna 201 and a rectifier circuit 202. The power receiving antenna 201 receives power radiated from the power transmitting antenna 101 and supplies the received power to the rectifier circuit 202. The rectifier circuit 202 restores the AC voltage waveform supplied from the power transmitting antenna 101 to the original AC voltage waveform of the AC power source 401, and supplies the restored AC voltage to a motor 402. The motor 402 is driven based on the AC voltage. The switch circuit 102, the power transmitting antenna 101, the power receiving antenna 201, and the rectifier circuit 202 form a resonant circuit for efficient wireless power transmission.

[0017] The rectifier circuit 202 has a bidirectional switch similar to the switch circuit 102 in order to output an AC voltage. The desired AC voltage to be applied to the motor 402 can be wirelessly transmitted by the switch circuit 102 using the bidirectional switch and the rectifier circuit 202.

[0018] The power receiving unit 200 also has a receiving antenna 203 and a clock receiving circuit 204. The receiving antenna 203 receives the clock signal radiated from the transmitting antenna 103 and supplies the received clock signal to the clock receiving circuit 204. The clock receiving circuit 204 shapes the waveform of the clock signal received by the receiving antenna 203, sends the waveform-shaped clock signal to the rectifying circuit 202, and controls the switch timing of the rectifying circuit 202.

[0019] 2 is a diagram showing an example of the external appearance of the control system 300 according to the first embodiment. The power receiving antenna 201 and the rectifier circuit 202 are mounted on a stage 502 that slides on one axis using a linear motor 501. The power transmitting antenna 101 is longer than the power receiving antenna 201. In response to the movement of the stage 502, the power receiving antenna 201 moves relatively in the longitudinal direction with respect to the power transmitting antenna 101. The power transmitting antenna 101 and the power receiving antenna 201 are configured to face each other without contacting each other at any position. This allows the power receiving antenna 201 to receive power wirelessly from the power transmitting antenna 101 regardless of the position of the stage 502.

[0020] Similarly, the receiving antenna 203 and clock receiving circuit 204 are mounted on the stage 502. The transmitting antenna 103 is longer than the receiving antenna 203. In response to the movement of the stage 502, the receiving antenna 203 moves relatively in the longitudinal direction with respect to the transmitting antenna 103. The transmitting antenna 103 and the receiving antenna 203 face each other without contacting each other at any position. This allows the receiving antenna 201 to receive a clock signal wirelessly from the transmitting antenna 103 regardless of the position of the stage 502.

[0021] The correction circuit 106 changes the phase of the clock signal sent from the clock generation circuit 105, and then sends the clock signal to the switch circuit 102. The amount of phase change is an amount that cancels out the phase difference between the received power of the power receiving antenna 201, whose timing is controlled by the clock signal sent to the switch circuit 102, and the clock signal sent to the rectifier circuit 202.

[0022] For example, a positive voltage needs to be applied to the motor 402 when moving the stage in a positive direction, and a negative voltage needs to be applied to the motor 402 when moving the stage in a negative direction. In other words, the rectifier circuit 202 can control the moving direction of the stage by applying an AC voltage to the motor 402.

[0023] In Patent Document 1, an AC voltage for controlling the movement direction of a motor 402 is generated by a power receiving unit 200, and a DC voltage is applied to a power transmitting unit 100 by a DC power supply. The DC voltage is supplied to the power receiving unit 200 via wireless power transmission, and the DC voltage is supplied to a motor driver in the power receiving unit 200. The motor driver then generates an AC voltage to apply to the motor, thereby controlling the movement direction of the stage. To ensure high precision of the AC voltage applied to the motor, the DC voltage is controlled to be kept constant.

[0024] On the other hand, the control system 300 of this embodiment differs from the configuration of Patent Document 1 in that the power receiving unit 200 does not have a motor driver and is small in size. An AC power supply 401 in the power transmitting unit 100 corresponds to the motor driver of Patent Document 1. An AC voltage generated by the AC power supply 401 is applied to the power transmitting unit 100 to control the moving direction of the stage. The AC voltage of the AC power supply 401 is then supplied to the power receiving unit 200 by wireless power transmission via a switch circuit 102. A rectifier circuit 202 restores the AC voltage waveform of the power receiving antenna 201 to the original AC voltage waveform of the AC power supply 401 and applies the restored AC voltage to a motor 402.

[0025] [Role of the compensation circuit] In order for the rectifier circuit 202 to restore the original AC voltage waveform with high accuracy, it is necessary to precisely match the switching timing of the rectifier circuit 202 with the switching timing of the switch circuit 102. More specifically, it is necessary to precisely match the zero-cross timing of the waveform received by the rectifier circuit 202, which is determined by the switching timing of the switch circuit 102, with the switching timing of the rectifier circuit 202. Naturally, if the timing is off, the rectified waveform of the rectifier circuit 202 will be distorted, and the amplitude of the AC voltage waveform applied to the motor 402 will deviate from the desired value. If the amplitude is off, the operation of the motor 402 will also change, causing the stage position to deviate.

[0026] Therefore, in order to match the above-mentioned switching timing with high precision, the correction circuit 106 corrects the phase of the clock signal that determines the switching timing of the switch circuit 102. Phase correction will now be explained. The switch circuit 102 always switches at a constant timing based on the clock signal generated by the clock generation circuit 105. However, the phase of the clock signal sent to the rectifier circuit 202 via the transmitting antenna 103 and the receiving antenna 203 may change due to movement of the stage 502.

[0027] 3(a) to 3(c) are diagrams illustrating a case where the phase of a clock signal changes due to movement of the stage 502. FIG. 3(a) is a diagram illustrating an example of wiring for the power transmitting antenna 101. The power transmitting antenna 101 has an elongated shape with an extended spiral coil so that the power transmitting antenna 101 and the power receiving antenna 201 face each other without contacting each other at any position in accordance with the movement of the stage 502. In this example of the power transmitting antenna 101, the output nodes of the switch circuit 102 are connected to the two ends on the left side of FIG. 3(a), and power is supplied to the power transmitting antenna 101 from the two ends on the left side.

[0028] 3(b) is a diagram showing an example of wiring for the transmitting antenna 103. The transmitting antenna 103 has an elongated antenna pattern so that the transmitting antenna 103 and the receiving antenna 203 face each other without contacting each other at any position in accordance with the movement of the stage 502. In this example of the transmitting antenna 103, the output nodes of the clock transmitting circuit 104 are connected to the two ends on the left side of FIG. 3(b), and power is supplied to the transmitting antenna 103 from the two ends on the left side.

[0029] 3(c) shows the delay time of the power supplied to the power transmitting antenna 101 and the clock signal supplied to the transmitting antenna 103 with respect to the longitudinal positions of the power transmitting antenna 101 and the transmitting antenna 103. The solid line shows the delay time of the clock signal supplied to the transmitting antenna 103 with respect to the longitudinal position of the transmitting antenna 103. The dashed line shows the delay time of the power supplied to the power transmitting antenna 101 with respect to the longitudinal position of the power transmitting antenna 101.

[0030] Because the current supplied to the power transmitting antenna 101, which is a spiral coil, alternates between left and right in Figure 3(a), the delay time does not monotonically increase with position. Therefore, the phase of the power received by the power receiving antenna 201 is determined by the phase of the clock signal of the power transmitting unit 100, which controls the switching timing of the switch circuit 102, and does not change significantly with position. Therefore, the power delay time of the power receiving antenna 201 is almost constant with position, as shown by the dashed line in Figure 3(c).

[0031] In contrast, the current supplied to the transmitting antenna 103 propagates in one direction, either left or right in Figure 3(b), and therefore a delay time due to the propagation occurs at the right end of the transmitting antenna 103. Therefore, the phase of the clock signal received by the receiving antenna 203 becomes increasingly out of phase with respect to the clock signal received at the left end of the receiving antenna 203, i.e., the phase of the clock signal of the power transmitting unit 100, as the position moves to the right. Therefore, the delay time of the clock signal of the transmitting antenna 103 becomes longer as the position of the transmitting antenna 103 moves to the right, as shown by the solid line in Figure 3(c).

[0032] 4(a) and (b) are diagrams showing the measured waveforms of a clock signal. Fig. 4(a) shows the measured waveform of a clock signal when the receiving antenna 203 is located at the left end of the transmitting antenna 103. Fig. 4(b) shows the measured waveform of a clock signal when the receiving antenna 203 is located 400 mm to the right of the left end of the transmitting antenna 103.

[0033] The length of the transmitting antenna 103 is 500 mm, and the length of the receiving antenna 203 is 100 mm. In both Figures 4(a) and 4(b), the upper waveform is the transmitting clock signal input to the transmitting antenna 103, and the lower waveform is the receiving clock signal whose waveform has been shaped by the clock receiving circuit 204.

[0034] In Figure 4(a), the reception clock signal is delayed by 244 ns relative to the transmission clock signal. In contrast, in Figure 4(b), the reception clock signal is delayed by 246 ns relative to the transmission clock signal. In other words, the delay time increases by 2 ns because the position of receiving antenna 203 is moved 400 mm from the left end. Therefore, when receiving antenna 203 is moved 400 mm, the phase of the power received by receiving antenna 201 and the clock signal received by receiving antenna 203 shifts by 2 ns.

[0035] As described above, a phase shift occurs between the power received by the power receiving antenna 201 and the clock signal received by the receiving antenna 203 depending on the positions of the stage 502 on which the power receiving antenna 201 and the receiving antenna 203 are mounted. By correcting this phase shift, the correction circuit 106 reduces the difference between the zero-cross timing of the waveform of the power input to the rectifier circuit 202 and the timing of the clock signal switched by the rectifier circuit 202. This allows the rectifier circuit 202 to restore the original AC voltage waveform with high accuracy.

[0036] The amount of phase correction in the correction circuit 106 is an amount that cancels out the phase shift. Specifically, the correction circuit 106 shifts the phase by the same amount as the amount of shift in the clock signal input to the rectifier circuit 202. In other words, the correction circuit 106 generates a clock signal that is the same as the phase-shifted clock signal input to the rectifier circuit 202, and outputs the clock signal to the switch circuit 102.

[0037] The method for determining the correction amount of the correction circuit 106 will now be described. The phase shift amount may be estimated based on the specified operation sequence of the stage 502 to determine the phase correction amount. Alternatively, the phase shift amount due to the specified operation sequence may be measured in advance, and a phase correction amount that cancels it out may be determined from the measured value. Alternatively, the correction circuit 106 may prepare table data in advance of the position, phase shift amount, and phase correction amount of the stage 502, and obtain position information of the operation of the stage 502 in real time to determine the phase correction amount from the table data. Alternatively, the control system 300 may observe the phase shift amount in real time, and transmit the result to the correction circuit 106 to determine the phase correction amount.

[0038] As described above, the power transmitting unit 100 transmits AC power wirelessly. The power receiving unit 200 is movable relative to the power transmitting unit 100, and receives the AC power transmitted wirelessly from the power transmitting unit 100.

[0039] The clock generation circuit 105 generates a clock signal. The correction circuit 106 corrects the phase of the clock signal generated by the clock generation circuit 105 and outputs the corrected clock signal to the switch circuit 102. The switch circuit 102 switches AC power at a timing based on the clock signal. The power transmitting antenna 101 transmits the switched AC power wirelessly. The clock transmission circuit 104 wirelessly transmits the clock signal generated by the clock generation circuit 105 via the transmission antenna 103. The transmission antenna 103 transmits the clock signal wirelessly.

[0040] The receiving antenna 201 receives AC power transmitted wirelessly from the transmitting antenna 101. The receiving antenna 203 receives the clock signal transmitted wirelessly from the transmitting antenna 103. The clock receiving circuit 204 receives the clock signal wirelessly via the receiving antenna 203. The rectifying circuit 202 switches the AC power received by the receiving antenna 201 at a timing based on the received clock signal.

[0041] The correction circuit 106 corrects the phase of the clock signal so as to reduce the phase shift between the phase of the AC power input to the rectifier circuit 202 and the phase of the clock signal input to the rectifier circuit 202 .

[0042] For example, the amount of correction by the correction circuit 106 is determined in advance based on the specified operation sequence of the control system 300. The amount of correction by the correction circuit 106 is also determined based on the position of the power receiving unit 200. The amount of correction by the correction circuit 106 is also determined based on the amount of phase change of the clock signal received by the receiving antenna 203.

[0043] The switch circuit 102 and the rectifier circuit 202 each use a bidirectional switch for switching. One of the power transmitting unit 100 and the power receiving unit 200 is longer than the other. The power receiving unit 200 can receive AC power and a clock signal even if its position relative to the power transmitting unit 100 changes.

[0044] According to this embodiment, the control system 300 is a control system that applies an AC voltage to a motor on a coarse movement stage using wireless power transmission, and the power receiving unit 200 can be made smaller.

[0045] (Second embodiment) Fig. 5 is a diagram showing an example of the configuration of a control system 300 according to the second embodiment. In Fig. 5, the correction circuit 106 is deleted and a correction circuit 206 is added, compared to Fig. 1. Below, the differences between the second embodiment and the first embodiment will be described.

[0046] The clock generation circuit 105 generates a clock signal, sends the clock signal to the switch circuit 102 , and controls the switch timing of the switch circuit 102 .

[0047] The power receiving unit 200 has a receiving antenna 203, a clock receiving circuit 204, and a correction circuit 206. The clock receiving circuit 204 shapes the waveform of the clock signal received by the receiving antenna 203, and outputs the waveform-shaped clock signal to the correction circuit 206. The correction circuit 206 corrects the phase of the clock signal input from the clock receiving circuit 204, outputs the corrected clock signal to the rectifying circuit 202, and controls the switch timing of the rectifying circuit 202.

[0048] Correction circuit 206 corrects the phase shift between the power input to rectifier circuit 202 and the clock signal received by receiving antenna 203. This reduces the shift between the zero-cross timing of the waveform received by rectifier circuit 202 and the timing of the clock signal switched by rectifier circuit 202, allowing rectifier circuit 202 to restore the original AC voltage waveform with high accuracy.

[0049] The phase correction amount in the correction circuit 206 is an amount that cancels out the phase shift. Specifically, the correction circuit 206 cancels out the phase shift by shifting the phase of the clock signal in the opposite direction by the amount of shift that occurred when the clock signal passed through the transmitting antenna 103 and the receiving antenna 203 due to the factors described in the first embodiment. In other words, the correction circuit 206 generates a clock signal that is the same as the clock signal sent from the clock generation circuit 105 to the switch circuit 102 and has no phase shift, and outputs the clock signal to the rectifier circuit 202. The method of calculating the correction amount is the same as in the first embodiment.

[0050] Furthermore, since correction circuit 206 is located within power receiving unit 200, it may detect the phase from the waveform of power received by power receiving antenna 201 and correct the phase of the clock signal. Correction circuit 206 detects the phase of the AC power input to rectifier circuit 202. Then, correction circuit 206 corrects the phase of the clock signal input from clock receiving circuit 204 so as to reduce the phase shift between the phase of the AC power input to rectifier circuit 202 and the phase of the clock signal input to rectifier circuit 202. In this way, correction circuit 206 can more accurately align the zero-cross timing of the waveform of the power input to rectifier circuit 202, which is determined by the switching timing of switch circuit 102, with the timing of the clock signal switched by rectifier circuit 202.

[0051] When the correction circuit 206 detects the phase from the received power waveform, the power receiving antenna 201 must receive a sufficient amount of power to be detected. However, there may be periods when the power received is so small that it cannot be detected. For example, there may be periods when the AC voltage supplied from the AC power supply 401 to the switch circuit 102 becomes a very small voltage when it transitions from a positive voltage to a negative voltage, or when a very small voltage is applied to the motor 402. During these periods, the power received by the power receiving antenna 201 becomes very small, and the detection sensitivity may become insufficient. In such cases, the correction circuit 206 may set a threshold value for the detected power and not perform phase correction of the clock signal based on power phase detection if the power does not meet the threshold value. This prevents the correction circuit 206 from detecting an incorrect phase and performing incorrect phase correction when the detection sensitivity is insufficient.

[0052] (Third embodiment) Fig. 6 is a diagram showing an example of the configuration of a control system 300 according to the third embodiment. Fig. 6 is obtained by adding a correction circuit 206 to Fig. 1. Below, differences between the third embodiment and the first and second embodiments will be described.

[0053] The power transmitting unit 100 has a correction circuit 106. The power receiving unit 200 has a correction circuit 206. The clock receiving circuit 204 shapes the waveform of a clock signal received by the receiving antenna 203, and outputs the waveform-shaped clock signal to the correction circuit 206. The correction circuit 206 corrects the phase of the clock signal input from the clock receiving circuit 204, outputs the corrected clock signal to the rectifying circuit 202, and controls the switch timing of the rectifying circuit 202. The roles of the correction circuits 106 and 206 in the third embodiment will be described.

[0054] As in the second embodiment, the correction circuit 206 corrects the phase of the clock signal by the amount of shift that occurs when the clock signal passes through the transmitting antenna 103 and the receiving antenna 203. Furthermore, as in the second embodiment, the correction circuit 206 may detect the phase from the waveform of the power received by the power receiving antenna 201 and correct the phase of the clock signal.

[0055] Correction circuit 106 corrects the phase difference between the clock signal sent from clock generation circuit 105 to switch circuit 102 and the clock signal sent from clock generation circuit 105 to transmitting antenna 103. The phase of the clock signal sent from clock generation circuit 105 to transmitting antenna 103 may be shifted from the phase of the clock signal sent from clock generation circuit 105 to switch circuit 102 due to delays occurring in clock transmission circuit 104, etc. By correcting this phase difference, correction circuit 106 further reduces the difference between the zero-cross timing of the waveform of power input to rectifier circuit 202 and the timing of the clock signal switched by rectifier circuit 202. This allows rectifier circuit 202 to restore the original AC voltage waveform with high accuracy.

[0056] The frequency of the clock signal in the switch circuit 102 and the rectifier circuit 202 may be changed from the frequency of the clock signal generated by the clock generation circuit 105 using a PLL (Phase Locked Loop) circuit or the like. In this case, the correction circuits 106 and 206 may correct the phase change caused by the operation of the stage 502 for the clock signal before it is input to the PLL circuit.

[0057] Furthermore, the first to third embodiments have been described as cases in which the power receiving unit 200 slides on one axis, but the same applies to cases in which it slides on a two-axis plane, moves in any three-dimensional direction in which the opposing distance between the power transmitting unit 100 and the power receiving unit 200 also changes, or rotates.

[0058] The power supply voltage for operating the clock receiving circuit 204 and the correction circuit 206 may be generated using a step-up / step-down circuit or the like from the voltage applied to the motor 402. In addition, a power transmitting antenna and a power receiving antenna may be provided separately to generate the power supply voltage for operating the clock receiving circuit 204 and the correction circuit 206.

[0059] The power transmitting antenna 101 and the power receiving antenna 201 may be formed by wiring on a printed circuit board, or a magnetic sheet may be attached to the printed circuit board to reduce loss during electromagnetic field coupling and electromagnetic noise radiation. Alternatively, the power transmitting antenna 101 and the power receiving antenna 201 may be a wound transformer using a magnetic material such as ferrite and a winding such as a litz wire.

[0060] Furthermore, the power transmitting antenna 101 and the power receiving antenna 201 may be coupled by electric field coupling, optical coupling, acoustic wave coupling, or the like, in which the phase does not change significantly depending on the position of the stage 502 .

[0061] The present disclosure is not limited to the above-described embodiments, and various modifications and variations are possible. [Explanation of symbols]

[0062] 100 power transmitting unit, 101 power transmitting antenna, 102 switch circuit, 103 transmitting antenna, 104 clock transmitting circuit, 105 clock generating circuit, 106 correction circuit, 200 power receiving unit, 201 power receiving antenna, 202 rectifier circuit, 203 receiving antenna, 204 clock receiving circuit, 206 correction circuit, 300 control system, 401 AC power supply, 402 motor

Claims

1. A power transmitting device that wirelessly transmits power to a power receiving device that is movable relative to the power transmitting device, a clock generation circuit for generating a clock signal; a correction circuit for correcting the phase of the generated clock signal; a switch circuit that switches power at a timing based on the corrected clock signal; a power transmitting antenna that wirelessly transmits the switched power; a transmitting antenna for wirelessly transmitting the clock signal; The power transmitting device is characterized in that the correction circuit changes the amount of correction for the phase of the generated clock signal depending on whether the positional relationship between the power transmitting device and the power receiving device is a first positional relationship or a second positional relationship that is different from the first positional relationship.

2. The power transmitting device according to claim 1 , further comprising a clock transmitting circuit that wirelessly transmits the clock signal generated by the clock generating circuit via the transmitting antenna.

3. 3. The power transmitting device according to claim 1, wherein the correction amount of the correction circuit is determined in advance based on a specified operation sequence of a control system including the power transmitting device and the power receiving device.

4. 3. The power transmitting device according to claim 1, wherein the correction amount of the correction circuit is determined based on the position of the power receiving device.

5. 5. The power transmitting device according to claim 1, wherein the switch circuit performs switching using a bidirectional switch.

6. One of the power transmitting device and the power receiving device is longer than the other, The power transmitting device according to any one of claims 1 to 5, characterized in that the power receiving device is capable of receiving the power and the clock signal even if its relative position with respect to the power transmitting device changes.

7. A power receiving device that is capable of moving relative to a power transmitting device and receives power wirelessly from the power transmitting device, a power receiving antenna that receives the power wirelessly transmitted from the power transmitting device; a receiving antenna for receiving the wirelessly transmitted clock signal; a correction circuit for correcting the phase of the received clock signal; a rectifier circuit that switches the power received by the power receiving antenna at a timing based on the corrected clock signal; the correction circuit changes a correction amount of the phase of the received clock signal between a case where a positional relationship between the power transmitting device and the power receiving device is a first positional relationship and a case where the positional relationship is a second positional relationship different from the first positional relationship; The power receiving device, wherein the correction amount of the correction circuit is determined in advance based on a specified operation sequence of a control system including the power transmitting device and the power receiving device.

8. A power receiving device that wirelessly receives power from a power transmitting device that is movable relative to the power receiving device, a power receiving antenna that receives the power wirelessly transmitted from the power transmitting device; a receiving antenna for receiving the wirelessly transmitted clock signal; a correction circuit for correcting the phase of the received clock signal; a rectifier circuit that switches the power received by the power receiving antenna at a timing based on the corrected clock signal; the correction circuit changes a correction amount of the phase of the received clock signal between a case where a positional relationship between the power transmitting device and the power receiving device is a first positional relationship and a case where the positional relationship is a second positional relationship different from the first positional relationship; The power receiving device, wherein the correction amount of the correction circuit is determined based on the position of the power receiving device.

9. 9. The power receiving device according to claim 7, further comprising a clock receiving circuit for receiving the clock signal wirelessly via the receiving antenna.

10. 10. The power receiving device according to claim 7, wherein the rectifier circuit performs switching using a bidirectional switch.

11. One of the power transmitting device and the power receiving device is longer than the other, The power receiving device according to any one of claims 7 to 10, characterized in that the power receiving device is capable of receiving the power and the clock signal even if its relative position with respect to the power transmitting device changes.

12. A control method for a power transmitting device that wirelessly transmits power to a power receiving device that is movable relative to the power transmitting device, comprising: a clock generation step of generating a clock signal; a correction step of correcting the phase of the generated clock signal; a switching step of switching power at a timing based on the corrected clock signal; a power transmitting step of wirelessly transmitting the switched power; a transmitting step of wirelessly transmitting the clock signal, A control method characterized in that, in the correction step, the amount of correction of the phase of the generated clock signal is made different when the positional relationship between the power transmitting device and the power receiving device is a first positional relationship and when the positional relationship is a second positional relationship different from the first positional relationship.

13. A control method for a power receiving device that wirelessly receives power from a power transmitting device that is movable relative to the power receiving device, comprising: a power receiving step of receiving the power wirelessly transmitted from the power transmitting device; a receiving step of receiving a wirelessly transmitted clock signal; a correcting step of correcting the phase of the received clock signal; a rectification step of switching the power received by the power receiving antenna at a timing based on the corrected clock signal, In the correction step, a correction amount of the phase of the received clock signal is made different between a case where a positional relationship between the power transmitting device and the power receiving device is a first positional relationship and a case where the positional relationship is a second positional relationship different from the first positional relationship; A control method, characterized in that a correction amount of the correction step is determined in advance based on a specified operation sequence of a control system including the power transmitting device and the power receiving device.

14. A method for controlling a power receiving device that is capable of moving relative to a power transmitting device and receives power wirelessly from the power transmitting device, comprising: a power receiving step of receiving the power wirelessly transmitted from the power transmitting device; a receiving step of receiving a wirelessly transmitted clock signal; a correcting step of correcting the phase of the received clock signal; a rectification step of switching the power received by the power receiving antenna at a timing based on the corrected clock signal, In the correction step, a correction amount of the phase of the received clock signal is made different between a case where a positional relationship between the power transmitting device and the power receiving device is a first positional relationship and a case where the positional relationship is a second positional relationship different from the first positional relationship; A control method, characterized in that a correction amount of the correction step is determined based on a position of the power receiving device.

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