Laser turning device and laser processing device

Abstract

To provide a laser turning device which can cool a prism efficiently in a structure which holds and rotates the prism with a hollow motor.SOLUTION: A laser turning device (40) includes: a prism (41) which causes an incident laser beam (LB) to refract relative to an optical axis (OA); and a rotary electric machine (43) which rotatably holds the prism (41) in a hollow portion. The rotary electric machine (43) includes: a rotor (44) which holds the prism (41); an electromagnetic coil (47) which is provided around the rotor (44) and applies magnetic fields to the rotor (44); a stator (46) which is provided around the rotor (44) and has a storage area for the electromagnetic coil (47); and first cooling medium passages (51, 54) which are provided between the electromagnetic coil (47) and the prism (41) and continuous in an axial direction (AD) and a circumferential direction (CD) of the rotor (44).SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a laser processing apparatus. [Background technology]

[0002] A laser processing device is a device that irradiates a workpiece with a laser beam to perform various processes on the workpiece, such as cutting and drilling. In a laser processing device, the optical system that constitutes the laser irradiation head, such as a prism, generates heat during processing. If this heat causes thermal deformation in the optical system, deviations in the trajectory of the laser beam occur. Therefore, as an example, a cooling mechanism is provided in the laser irradiation head, as described in Patent Document 1. Patent Document 1 discloses providing a cooling mechanism around the prism. In Patent Document 1, the prism is rotated by a spindle rotated by a hollow motor, causing the laser beam to rotate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-161902 Summary of the Invention [Problem to be solved by the invention]

[0004] When a hollow motor is used as a rotating electric machine, there is also a configuration in which a rotor holds and rotates a prism, but Patent Document 1 does not disclose any cooling mechanism for this configuration. In view of the above, an object of the present disclosure is to provide a laser turning device that can efficiently cool a prism in a configuration in which a prism is held and rotated by a hollow motor. [Means for solving the problem]

[0005] The laser turning device of the present disclosure includes a prism that refracts incident laser light relative to an optical axis, and a rotating electric machine that rotatably holds the prism in a hollow portion. The rotating electric machine includes a holder that holds a prism, a rotor that holds the holder, an electromagnetic coil that is arranged around the rotor and applies a magnetic field to the rotor, a stator that is arranged around the rotor and has an accommodation area that accommodates the electromagnetic coil, and a first cooling medium flow path that is arranged between the holder and the rotor and continues in the axial and circumferential directions of the rotor.

[0006] The laser processing device according to the present disclosure includes a laser oscillator that outputs laser light, and an irradiation head that rotates the laser light and irradiates it toward an object to be processed. The irradiation head includes a laser turning unit that turns the laser light relative to the workpiece, and a focusing optical system that focuses the laser light turned by the laser turning unit. The laser turning unit includes a prism that refracts incident laser light about an optical axis, and a rotating electric machine that rotatably holds the prism in the hollow portion. The rotating electric machine includes a holder that holds a prism, a rotor that holds the holder, an electromagnetic coil that is arranged around the rotor and applies a magnetic field to the rotor, a stator that is arranged around the rotor and has an accommodation area that accommodates the electromagnetic coil, and a first cooling medium flow path that is arranged between the holder and the rotor and continues in the axial and circumferential directions of the rotor. [Effects of the Invention]

[0007] According to the present disclosure, the first coolant flow path is provided between the electromagnetic coil and the prism 41. Therefore, according to the present disclosure, even if the electromagnetic coil generates heat, the first coolant flow path can insulate the prism 41 from the heat. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a diagram showing a schematic configuration of a laser processing apparatus according to an embodiment; [Figure 2] FIG. 2 is a vertical cross-sectional view showing a laser turning unit according to the first embodiment. [Figure 3] FIG. 3 is a cross-sectional view taken along the line III-III in FIG. 2. [Figure 4] FIG. 10 is a vertical cross-sectional view showing a laser turning unit according to a second embodiment. [Figure 5] FIG. 5 is a cross-sectional view taken along the line VV in FIG. 4. [Figure 6] FIG. 10 is a vertical cross-sectional view showing a laser turning unit according to a third embodiment. [Figure 7] FIG. 7 is a cross-sectional view taken along the line VII-VII in FIG. 6. [Figure 8] FIG. 10 is a vertical cross-sectional view showing a laser turning unit according to a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, a laser processing device 1 according to an embodiment will be described with reference to the accompanying drawings. The laser processing apparatus 1 is provided with a cooling medium flow path (cooling mechanism) for cooling a prism 41 used in a laser turning unit 40 that turns the laser light LB. The cooling medium flow path in this embodiment includes a plurality of forms, but the basic configuration of the laser processing apparatus 1 excluding the cooling medium flow path is common. After describing the basic configuration of the laser processing apparatus 1, examples of a plurality of cooling medium flow paths will be described in order.

[0010] [Basic configuration of laser processing device 1: See Figure 1] 1, the laser processing device 1 includes a laser oscillator 10 that outputs laser light LB, and an irradiation head 20 that rotates the laser light LB output from the laser oscillator 10 and irradiates the laser light LB toward an object to be processed. The operations of the laser oscillator 10 and the irradiation head 20 are controlled by a controller (not shown). An optical fiber is provided between the laser oscillator 10 and the irradiation head 20 as a guide optical system 15 that guides the laser output from the laser oscillator 10 to the irradiation head 20. One end of this guide optical system 15 is connected to the laser emission port of the laser oscillator 10, and the other end is connected to the laser entrance end of the irradiation head 20.

[0011] [Laser oscillator 10: see Figure 1] The laser oscillator 10 is a device that outputs laser light LB, and may be, for example, a fiber laser output device that outputs laser light LB using an optical fiber as a medium, or a short pulse laser output device that outputs short pulse laser light LB. The fiber laser output device may be, for example, a Fabry-Perot fiber laser output device or a ring-type fiber laser output device, and these output devices are excited to oscillate laser light LB. The fiber of the fiber laser output device may be made of silica glass doped with a rare earth metal element such as erbium (Er), neodymium (Nd), or ytterbium (Yb). The short pulse laser output device can use, for example, a titanium sapphire laser as an oscillation source of the laser light LB, which can oscillate pulses with a pulse width of 100 picoseconds or less. Laser light LB that oscillates in nanosecond order pulses, such as a YAG laser (Yttrium Aluminum Garnet) or a YVO4 laser, can also be used.

[0012] [Irradiation head 20: See Figure 1] The irradiation head 20 includes a collimating optical system 30, a laser turning unit 40, and a focusing optical system 60. These elements of the irradiation head 20 are arranged in this order from the laser transmitter 10 side: the collimating optical system 30, the laser turning unit 40, and the focusing optical system 60. The irradiation head 20 irradiates the laser light LB output from the guiding optical system 15 toward a workpiece not shown in FIG.

[0013] [Collimating optical system 30: see Figure 1] The collimating optical system 30 is disposed opposite the end face of the guide optical system 15 from which the laser beam LB is emitted. In other words, the collimating optical system 30 is disposed between the guide optical system 15 and the laser turning unit 40. The collimating optical system 30 includes multiple collimating lenses, and collimates the laser beam LB output from the guide optical system 15, and emits it toward the laser turning unit 40 via a reflecting mirror 35. Collimated beam refers to a light beam in which all light rays are parallel to all other light rays. For example, the reflecting mirror 35 is a metal mirror with excellent thermal conductivity, such as copper (Cu) or aluminum (Al). The reflecting surface of the metal mirror can be coated with gold (Au) or a dielectric multilayer film.

[0014] [Laser turning unit 40: see Figures 1, 2, and 3] The laser turning unit 40 turns the laser beam LB around the optical axis OA, which is the center of the laser beam LB, to turn the irradiation laser, that is, the irradiation position of the laser beam LB, on the workpiece. The laser turning unit 40 has a prism 41 and a rotation mechanism 42 that rotates the prism 41 around the optical axis OA. The rotation mechanism 42 has a cooling function, which will be described later.

[0015] [Prism 41] A Dove prism is exemplified as the prism 41. A Dove prism has the shape of a rectangular prism with both ends cut diagonally, and its longitudinal cross section is an isosceles trapezoid, with the inclined surfaces at both ends symmetrical with respect to a plane perpendicular to the optical axis OA of the incident light. Since the laser light LB passing through this prism 41 is inverted before being emitted, when the incident light is rotated by a certain angle around the optical axis OA, the emitted light has the property of rotating around the optical axis OA by twice the rotation angle. Prism 41 has an incident surface 41A onto which laser light LB is incident and an exit surface 41B from which laser light LB is emitted. When laser light LB is incident on incident surface 41A of prism 41 at a specific angle, laser light LB can trace two concentric circles of the same diameter, i.e., rotation radius R, while prism 41 makes one rotation. The Dove prism is an example of a laser turning unit of the present disclosure, and other polygonal prisms can be used instead of the Dove prism. Also, in the present disclosure, the number of prisms is arbitrary, and multiple prisms of the same type can be provided, or different types of prisms can be provided. Examples of different types of prisms include a combination of a wedge prism and a Dove prism.

[0016] [Rotation mechanism 42: see Figures 2 and 3] The rotation mechanism 42 holds the prism 41 and rotates it about the optical axis OA. A hollow motor 43 is applied to the rotation mechanism 42, and elements constituting the hollow motor 43 are provided with a cooling medium flow path.

[0017] The hollow motor 43 comprises a cylindrical rotor 44 that holds and rotates the prism 41, an electromagnetic coil 47 that is arranged around the rotor 44 and applies a magnetic field to the rotor 44, and a stator 46 that is arranged around the rotor 44 and has an area to accommodate the electromagnetic coil 47.

[0018] The rotor 44 includes, for example, a permanent magnet as a component, and is rotated by receiving a magnetic field generated by an electromagnetic coil 47 . A holder 45 is fixed to the inside of the rotor 44, and a prism 41 is fixed to the inside of the holder 45. Therefore, the prism 41 rotates while being held by the holder 45 as the rotor 44 rotates. A first coolant flow field 51, which will be described later, is provided between the rotor 44 and the holder 45, and therefore the rotor 44 and the holder 45 are fixed to each other at multiple locations in the circumferential direction with intervals between them. This point will be specifically mentioned when describing the first coolant flow field 51.

[0019] An electromagnetic coil 47 is provided in the housing area inside the stator 46. The electromagnetic coil 47 is connected to a power supply (not shown). When power is supplied from the power supply to the electromagnetic coil 47, a magnetic field is generated from the electromagnetic coil 47, causing the rotor 44 to rotate. The electromagnetic coil 47 has a cylindrical shape, and inside the stator 46, gaps are provided on the outer and inner sides in the radial direction RD and on both sides in the axial direction AD. These gaps form a second coolant flow field 52 in the second embodiment.

[0020] The stator 46 is disposed around the rotor 44, and, for example, two bearings 49 are disposed at an interval in the direction of the optical axis OA between the stator 46 and the rotor 44. Since the rotation of the stator 46 around the optical axis OA is restricted, the rotor 44 is rotatable inside the stator 46.

[0021] [First embodiment: first coolant flow path 51] The first coolant flow field 51 is provided between the rotor 44 and the holder 45. The outer circumferential side of the holder 45, i.e., the surface facing the rotor 44, has large diameter portions 45A and small diameter portions 45B, as shown in FIG. 3. The large diameter portions 45A are provided at four positions at equal intervals in the circumferential direction CD, for example. The large diameter portions 45A are also provided at three positions, at both ends and near the center, in the direction of the optical axis OA, for example.

[0022] The large diameter portion 45A is configured so that its diameter matches the diameter of the inner peripheral surface 44I of the rotor 44, and the tip of the large diameter portion 45A contacts the inner peripheral surface 44I of the rotor 44. The holder 45 and the rotor 44 are fixed by appropriate means at the portion where the large diameter portion 45A and the rotor 44 contact each other. The small diameter portion 45B has a smaller diameter than the diameter of the inner circumferential surface 44I of the rotor 44, and a gap is formed between the small diameter portion 45B and the rotor 44, and this gap defines a first coolant flow field 51. The first coolant flow field 51 penetrates in the circumferential direction CD except for the portion where the large diameter portion 45A is provided, and penetrates through the rotor 44 and holder 45 in the axial direction AD along the optical axis OA, but is closed in the radial direction RD by the inner circumferential surface 44I of the rotor 44 and the small diameter portion 45B. In other words, the first coolant flow field 51 is continuous in the axial direction AD and the circumferential direction CD.

[0023] The first coolant flow path 51 is provided with a first supply port 51A through which the coolant CM is supplied and a first discharge port 51B through which the coolant CM is discharged. When the coolant CM is supplied from a supply source (not shown) to the first supply port 51A, it passes through the first coolant flow path 51 and is discharged to the outside from the first discharge port 51B. The coolant CM supplied to the first coolant flow path 51 is selected from a gas and a liquid.

[0024] [Light collecting optical system 60: Figure 1] The focusing optical system 60 has a plurality of lenses that focus the laser light LB irradiated from the laser turning unit 40 to form laser light LB with a predetermined focal length and focal depth. The focusing optical system 60 irradiates the workpiece with laser light LB having a predetermined spot diameter.

[0025] [Advantages of the first embodiment] In the laser turning unit 40 according to the first embodiment, a first coolant flow path 51 is provided between the prism 41 and an electromagnetic coil 47, which is one element of the hollow motor 43. When power is supplied to the electromagnetic coil 47 to rotate the rotor 44 in order to rotate the prism 41, the electromagnetic coil 47 generates heat. However, by flowing a cooling medium CM through the first coolant flow path 51, the electromagnetic coil 47 can be cooled and the heat from the electromagnetic coil 47 can be blocked from being transmitted to the prism 41, i.e., the heat can be shielded. Therefore, the laser processing apparatus 1 equipped with the laser turning unit 40 can prevent or reduce misalignment of the laser beam LB due to thermal deformation of the prism 41.

[0026] Moreover, the first coolant flow field 51 is continuous with the holder 45 that holds the prism 41 in the axial direction AD and the circumferential direction CD, except for the joint between the large diameter portion 45A and the inner circumferential surface 44I. Therefore, by continuously supplying the coolant CM to the first coolant flow field 51, the cooling performance of the first coolant flow field 51 can be maintained, and heat can be insulated over a wide area surrounding the prism 41 in the axial direction AD and the circumferential direction CD.

[0027] [Second embodiment: see Figs. 4 and 5] Next, a second embodiment will be described. In the second embodiment, in addition to the first coolant flow path 51 of the first embodiment, a second coolant flow path 52 is provided in the laser turning unit 40. The second coolant flow path 52 will be described below with reference to Figures 4 and 5, but the same components as those in the first embodiment will be assigned the same reference numerals as in Figures 2 and 3 and their description may be omitted.

[0028] The second coolant flow field 52 is intended to directly cool the electromagnetic coil 47, and is formed by gaps inside the stator 46. The second coolant flow field 52 has three types of flow fields: an outer flow field 52O, an inner flow field 52I, and side flow fields 52S1 and 52S2. The outer flow field 52O is a cylindrical gap that occupies a portion outside the electromagnetic coil 47 in the radial direction RD. The inner flow field 52I is a cylindrical gap that occupies a portion inside the electromagnetic coil 47 in the radial direction RD. The side flow fields 52S1 and 52S2 are gaps on both sides of the electromagnetic coil 47 in the axial direction AD, excluding the outer flow field 52O and the inner flow field 52I. The outer flow field 52O, the inner flow field 52I, and the side flow fields 52S1 and 52S2 are connected in the axial direction AD, the radial direction RD, and the circumferential direction CD to form the second coolant flow field 52. In other words, the second coolant flow field 52 surrounds the electromagnetic coil 47.

[0029] The second coolant flow path 52 is provided with a second supply port 52A through which the coolant CM is supplied and a second discharge port 52B through which the coolant CM is discharged. The second supply port 52A penetrates one side wall 46S1 of the stator 46 to connect the second coolant flow path 52 to the outside. The second discharge port 52B penetrates the other side wall 46S2 of the stator 46 to connect the second coolant flow path 52 to the outside. When the coolant CM is supplied from a supply source (not shown) to the second supply port 52A, it passes through the outer flow path 52O, the inner flow path 52I, and the side flow paths 52S1 and 52S2 and is discharged to the outside from the second discharge port 52B. The coolant CM supplied to the second coolant flow path 52 is preferably a gas because it passes around the electromagnetic coil 47 and inside the hollow motor 43. However, liquid coolant CM can also be used if the area around the second coolant flow path 52, including the electromagnetic coil 47, is waterproof.

[0030] [Effects of the second embodiment] The laser turning unit 40 according to the second embodiment includes, in addition to the first coolant flow path 51, a second coolant flow path 52 that directly cools the electromagnetic coil 47, which is a heat source, thereby suppressing heat generation from the electromagnetic coil 47. Therefore, combined with the heat-shielding effect of the first coolant flow path 51, it is possible to further reduce the positional deviation of the laser beam LB due to thermal deformation of the prism 41.

[0031] The second coolant flow field 52 is configured to surround the electromagnetic coil 47 inside the stator 46. Therefore, by continuously supplying the coolant CM to the second coolant flow field 52, the cooling performance of the second coolant flow field 52 can be maintained and the electromagnetic coil 47 can be cooled over a wide area surrounding the periphery.

[0032] [Third embodiment: see Figs. 6 and 7] Next, a third embodiment will be described. The third embodiment includes a third coolant flow field 53 in addition to the first coolant flow field 51 and the second coolant flow field 52 of the second embodiment. The third coolant flow field 53 will be described below with reference to Figures 6 and 7. Components that are the same as those in the second embodiment are denoted by the same reference numerals as in Figures 4 and 5, and descriptions thereof may be omitted.

[0033] The third coolant flow field 53 is intended to indirectly cool the electromagnetic coil 47, and a gap formed in the outer peripheral wall 46O of the stator 46 constitutes the third coolant flow field 53. This gap is formed to be continuous in the circumferential direction CD of the outer peripheral wall 46O, and is formed over most of the outer peripheral wall 46O in the axial direction AD except for both ends. In other words, the third coolant flow field 53 surrounds the electromagnetic coil 47 and the second coolant flow field 52.

[0034] The third coolant flow field 53 is provided with a third supply port 53A through which the coolant CM is supplied and a third discharge port 53B through which the coolant CM is discharged. The third supply port 53A penetrates the outer peripheral wall 46O on one side of the stator 46 to connect the third coolant flow field 53 to the outside. The third discharge port 53B penetrates the outer peripheral wall 46O on the other side of the stator 46 to connect the third coolant flow field 53 to the outside. When the coolant CM from a supply source (not shown) is supplied to the third supply port 53A, it passes through the third coolant flow field 53 in the circumferential direction CD and is discharged to the outside from the third discharge port 53B. As with the first coolant flow field 51, the coolant CM supplied to the third coolant flow field 53 is selected from gas and liquid.

[0035] [Effects of the third embodiment] The laser turning unit 40 according to the third embodiment includes, in addition to the first coolant flow path 51 and the second coolant flow path 52, a third coolant flow path 53 that indirectly cools the electromagnetic coil 47, which is a heat source, thereby making it possible to suppress heat generation from the electromagnetic coil 47. Therefore, combined with the heat-shielding effect of the first coolant flow path 51 and the direct cooling of the electromagnetic coil 47 by the second coolant flow path 52, it is possible to further reduce the positional deviation of the laser beam LB due to thermal deformation of the prism 41.

[0036] The third coolant flow field 53 is configured to surround the electromagnetic coil 47 and the second coolant flow field 52 inside the stator 46. Therefore, by continuously supplying the coolant CM to the third coolant flow field 53, the cooling performance of the third coolant flow field 53 can be maintained and the electromagnetic coil 47 can be cooled over a wide area surrounding the periphery.

[0037] [Fourth embodiment: see FIG. 8] Next, a fourth embodiment will be described. The fourth embodiment includes, as an example, two prisms 41, 41, and a fourth coolant flow field 54 that can directly cool each of the two prisms 41, 41. The fourth coolant flow field 54 will be described below with reference to Fig. 8, but the same components as those in the first embodiment are denoted by the same reference numerals as in Fig. 2 and their description may be omitted.

[0038] The fourth coolant flow field 54 is formed in the gap between the holder 45 and the prisms 41, 41, and includes an upstream flow field 54C, a first communication flow field 54D, a midstream flow field 54E, a second communication flow field 54F, and a downstream flow field 54G. The supplied coolant CM flows through the upstream flow field 54C, the first communication flow field 54D, the midstream flow field 54E, the second communication flow field 54F, and the downstream flow field 54G in this order. In the fourth coolant flow field 54, upstream (U) and downstream (L) are defined based on the flow direction of the coolant CM. The prisms 41, 41 are held by the holder 45 except for the portions where the upstream flow field 54C to downstream flow fields 54G are formed.

[0039] The upstream flow path 54C is formed of a roughly cylindrical gap that contacts the end face 41A1 on the upstream (U) side of the prism 41, and the cooling medium CM supplied from the fourth supply port 54A directly cools the end face 41A1 of the prism 41. After cooling the end face 41A1, the cooling medium CM flows downstream (L) and reaches the first connection flow path 54D.

[0040] The first communication flow path 54D is formed of an arc-shaped gap that contacts, for example, approximately the upper half in the figure, of the outer peripheral surface 41A2 of the prism 41, and the cooling medium CM flowing from the upstream flow path 54C directly cools the outer peripheral surface 41A2 of the prism 41. The prism 41 is held by the holder 45 except for the portion where the first communication flow path 54D is formed.

[0041] The midstream flow path 54E consists of an approximately cylindrical gap that contacts the downstream (L) end face 41A3 of the prism 41 and the upstream (U) end face 411 of the prism 41, and the cooling medium CM flowing from the first communication flow path 54D directly cools the end face 41A3 of the prism 41 and the end face 411 of the prism 41.

[0042] The second communication flow path 54F is formed of an arc-shaped gap that contacts, for example, approximately the lower half in the figure, of the outer peripheral surface 412 of the prism 41, and the cooling medium CM flowing from the midstream flow path 54E directly cools the outer peripheral surface 412 of the prism 41. The prism 41 is held by the holder 45 except for the portion where the second communication flow path 54F is formed.

[0043] The downstream flow path 54G consists of an approximately cylindrical gap that contacts the downstream (L) end face 413 of the prism 41 and the upstream (U) end face 411 of the prism 41, and the cooling medium CM flowing from the second communication flow path 54F directly cools the end face 413 of the prism 41.

[0044] The fourth coolant flow field 54 is provided with a fourth supply port 54A through which the coolant CM is supplied and a fourth discharge port 54B through which the coolant CM is discharged. The fourth supply port 54A penetrates the side wall on the downstream (L) side of the rotor 44 to connect the fourth coolant flow field 54 to the outside. The fourth discharge port 54B penetrates the side wall on the upstream (U) side of the rotor 44 to connect the fourth coolant flow field 54 to the outside. When the coolant CM is supplied from a supply source (not shown) to the fourth supply port 54A, it flows through the fourth coolant flow field 54 in the radial direction RD, the circumferential direction CD, and the axial direction AD and is discharged to the outside from the fourth discharge port 54B. As with the first coolant flow field 51, the coolant CM supplied to the fourth coolant flow field 54 is selected from gas and liquid.

[0045] [Effects of the fourth embodiment] The laser turning unit 40 of the fourth embodiment is provided with a fourth cooling medium flow path 54 that faces the prisms 41, 41 and can directly cool the prisms 41, 41, thereby providing a higher heat-shielding effect than the first embodiment and further reducing the positional deviation of the laser light LB due to thermal deformation of the prism 41.

[0046] The fourth coolant flow field 54 is common to the first coolant flow field 51 in that it is provided between the electromagnetic coil 47 and the prisms 41, 41. Therefore, one or both of the second coolant flow field 52 and the third coolant flow field 53, which can be provided together with the first coolant flow field 51, can also be combined with the fourth coolant flow field 54.

[0047] Although the fourth coolant flow path 54 is shown as cooling two prisms 41, 41, the flow path may be formed so as to directly cool one prism, or so as to cool three or more prisms. The first to third coolant flow paths 51 to 53 are also not limited to cooling one prism 41, and each of the flow paths may be formed so as to cool multiple prisms 41.

[0048] [Note] <Appendix 1> The laser turning device (40) includes a prism (41) that refracts the incident laser beam (LB) with respect to an optical axis (OA), and a rotating electric machine (43) that rotatably holds the prism (41) in a hollow portion. The rotating electric machine (43) includes a holder (45) that holds the prism (41), a rotor (44) that holds the holder (45), an electromagnetic coil (47) that is arranged around the rotor (44) and applies a magnetic field to the rotor (44), a stator (46) that is arranged around the rotor (44) and has an accommodation area for the electromagnetic coil (47), and first cooling medium flow paths (51, 54) that are arranged between the holder (45) and the rotor (44) and are continuous in the axial direction (AD) and circumferential direction (CD) of the rotor (44).

[0049] <Appendix 2> In Supplementary Note 1, preferably, the prism (41) is held on the rotor (44) via a holder (45), and the first coolant flow field (51) is provided in the holder (45).

[0050] <Appendix 3> In Appendix 1, preferably, the prism (41) is held on the rotor (44) via a holder (45), and at least a portion of the first cooling medium flow path (54) is provided between the holder (45) and the prism (41), so that the first cooling medium flow path (54) directly faces the prism (41).

[0051] <Appendix 4> In Supplementary Notes 1 to 3, preferably, the cooling fan includes a second coolant flow field (52) surrounding the electromagnetic coil (47) in the housing area of ​​the stator (46) and continuing in the axial direction (AD) and the circumferential direction (CD).

[0052] <Appendix 5> In Supplementary Note 1, preferably, the stator (46) includes an outer peripheral wall (46O) extending in the circumferential direction (CD), and a third coolant flow path (53) extending in the axial direction (AD) and the circumferential direction (CD) in a thick portion of the outer peripheral wall (46O).

[0053] <Appendix 6> The laser processing device (1) includes a laser oscillator (10) that outputs a laser beam (LB), and an irradiation head (20) that rotates the laser beam (LB) and irradiates the laser beam (LB) toward an object to be processed. The irradiation head (20) includes a laser rotation unit (40) that rotates the laser light (LB) relative to the workpiece, and a focusing optical system (60) that focuses the laser light (LB) rotated by the laser rotation unit (40). The laser turning unit (40) includes a prism (41) that refracts an incident laser beam (LB) with respect to an optical axis (OA), and a rotating electric machine (43) that rotatably holds the prism (41) in a hollow portion. The rotating electric machine (43) includes a holder (45) that holds the prism (41), a rotor (44) that holds the holder (45), an electromagnetic coil (47) that is provided around the rotor (44) and applies a magnetic field to the rotor (44), a stator (46) that is provided around the rotor (44) and has an area for accommodating the electromagnetic coil (47), and first coolant flow paths (51, 54) that are provided between the holder (45) and the rotor (44) and are continuous in an axial direction (AD) and a circumferential direction (CD) of the rotor (44). [Explanation of symbols]

[0054] 1. Laser processing equipment 10 Laser oscillator 15 Guide optical system 20 irradiation heads 30 Collimating optical system 35 Reflective mirror 40 Laser turning unit 40 Laser Rotation Device 41 Prism 41A Entrance plane 41A1 End face 41A2 Outer surface 41A3 End face 41B Output surface 41B Prism 41B1 End face 41B2 Outer surface 41B3 End face 42 Rotation mechanism 43 Rotating Electric Machine 43 Hollow Motor 44 rotor 44I Inner surface 45 Holder 45A large diameter part 45B Small diameter section 46 Stator 46O outer wall 46S1 side wall 46S2 side wall 47 Electromagnetic coil 49 Bearing 51 First cooling medium flow path 51A First supply port 51B First discharge port 52 Second cooling medium flow path 52A Second supply port 52B Second discharge port 52I Inner flow path 52O Outer flow path 52S1 Lateral flow path 52S2 Lateral flow path 53 Third cooling medium flow path 53A Third supply port 53B Third discharge port 54 Fourth cooling medium flow path 54 First cooling medium flow path 54A Fourth supply port 54B Fourth discharge port ​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​

Claims

1. a prism that refracts incident laser light with respect to an optical axis; a rotating electric machine that rotatably holds the prism in the hollow portion, The rotating electric machine includes: a holder for holding the prism; a rotor that holds the holder; an electromagnetic coil disposed around the rotor and applying a magnetic field to the rotor; a stator provided around the rotor and having an area for accommodating the electromagnetic coil; a first coolant flow path provided between the holder and the rotor and continuing in the axial and circumferential directions of the rotor; A laser turning device comprising:

2. the prism is held by the rotor via the holder; the first coolant flow field is provided in the holder; The laser turning device of claim 1 .

3. the prism is held by the rotor via the holder; At least a portion of the first coolant flow field is provided between the holder and the prism, and thus directly faces the prism. The laser turning device of claim 1 .

4. The stator surrounds the electromagnetic coil in the receiving area; a second coolant flow path extending in the axial direction and the circumferential direction; The laser turning device according to any one of claims 1 to 3.

5. The stator includes an outer peripheral wall that is continuous in the circumferential direction, a third coolant flow field extending in the axial direction and the circumferential direction from a thick portion of the outer peripheral wall; The laser turning device according to any one of claims 1 to 3.

6. a laser oscillator that outputs laser light; an irradiation head that rotates the laser light and irradiates it toward the object to be processed, The irradiation head includes: a laser turning unit that turns the laser light relative to the object to be processed; a focusing optical system that focuses the laser light swiveled by the laser swiveling unit, The laser turning unit is a prism that refracts the incident laser light relative to an optical axis; a rotating electric machine that rotatably holds the prism in the hollow portion, The rotating electric machine includes: a holder for holding the prism; a rotor that holds the holder; an electromagnetic coil disposed around the rotor and applying a magnetic field to the rotor; a stator provided around the rotor and having an area for accommodating the electromagnetic coil; a first coolant flow path provided between the holder and the rotor and continuing in the axial and circumferential directions of the rotor; A laser processing device comprising:

Images