Carrier tape taping device

Abstract

To inspect the thermocompression bonding state between a carrier tape and a cover tape with high accuracy. A carrier tape taping device (10) includes a thermocompression bonding device (13) that thermocompresses a carrier tape (90) and a cover tape (95) together, and an inspection unit (16). A carrier tape guide mechanism (20) that curves the carrier tape (90) and the cover tape (95) upward is provided below the inspection unit (16), and the carrier tape guide mechanism (20) has a curved surface (22) that is convex upward.

Description

[Technical Field]

[0001] The present disclosure relates to a carrier tape taping device. [Background technology]

[0002] Conventionally, there has been known a workpiece taping system in which a processed workpiece that has undergone various processes is transferred into a cavity of a carrier tape. After the workpiece is transferred into the cavity in this manner, a cover tape is placed on the carrier tape and the cover tape is thermocompression bonded to the carrier tape. The thermocompression bond between the carrier tape and the cover tape is then inspected. However, no technology has been developed to accurately inspect the thermocompression bond between the carrier tape and the cover tape. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-40475 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure has been made in consideration of these points, and aims to provide a carrier tape taping device that can accurately inspect the thermocompression bonding state between the carrier tape and the cover tape. [Means for solving the problem]

[0005] A first embodiment of the present disclosure is a carrier tape taping device comprising: a conveying mechanism that conveys a carrier tape including a plurality of cavities in which workpieces are stored; a cover tape supplying device that supplies cover tape onto the carrier tape conveyed by the conveying mechanism; a thermocompression bonding device that thermocompresses the carrier tape and cover tape conveyed by the conveying mechanism; an inspection unit that is provided above the downstream side of the thermocompression bonding device in the conveying direction and inspects at least the thermocompression bonding state of the carrier tape and the cover tape; and a carrier tape guide mechanism that is provided below the inspection unit and curves the carrier tape and the cover tape upward, wherein the carrier tape guide mechanism includes a carrier tape guide having a curved surface that is convex upward when viewed from the side perpendicular to the conveying direction.

[0006] A second embodiment of the present disclosure is a carrier tape taping device in which, in the first embodiment, the curved surface of the carrier tape guide includes an arc-shaped portion at its apex when viewed from the side perpendicular to the conveying direction.

[0007] A third embodiment of the present disclosure is a carrier tape taping device in which, in the second embodiment, the height H between the upper end and the lower end of the arc-shaped portion is 10 mm≦H≦15 mm.

[0008] A fourth embodiment of the present disclosure is a carrier tape taping device in which, in the first embodiment, a pair of carrier tape pressing guides are provided at the upstream and downstream ends of the curved surface of the carrier tape guide in the conveying direction, for pressing the carrier tape and the cover tape against the curved surface.

[0009] A fifth embodiment of the present disclosure is a carrier tape taping device in which, in the first embodiment, an imaging unit that images a workpiece in the carrier tape is provided on the upstream side of the thermocompression bonding device in the transport direction.

[0010] A sixth embodiment of the present disclosure is a carrier tape taping device in which, in the first embodiment, a sprocket for driving the carrier tape and the cover tape is provided within the carrier tape guide mechanism adjacent to the carrier tape guide. [Effects of the Invention]

[0011] As described above, according to the present disclosure, the thermocompression bonding state between the carrier tape and the cover tape can be inspected with high accuracy. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a side view showing a carrier tape taping device according to the present embodiment. [Figure 2] FIG. 2 is an enlarged view showing a carrier tape guide mechanism of the carrier tape taping device according to the present embodiment. [Figure 3] FIG. 3 is a perspective view showing a carrier tape guide mechanism to which a cover is attached of the carrier tape taping device according to the present embodiment. [Figure 4] 4 is a perspective view of the carrier tape guide mechanism of the carrier tape taping device according to the present embodiment with the cover removed, seen from a different direction than that of FIG. 3. FIG. [Figure 5] FIG. 5 is a perspective view showing a carrier tape guide mechanism and a sprocket with the cover and carrier tape guide of the carrier tape taping device according to the present embodiment removed. [Figure 6] FIG. 6 is a diagram showing captured images of the carrier tape and the cover tape in the present embodiment. [Figure 7] FIG. 7 is a diagram showing captured images of a carrier tape and a cover tape as a comparative example. [Figure 8] FIG. 8 is a side view showing the carrier tape and the cover tape that are curved by the carrier tape guide mechanism. [Figure 9] FIG. 9 is a flowchart showing the operation of this embodiment. [Figure 10]Figure 10 is a list of values ​​showing the relationship between the height of the upper and lower ends of the arc-shaped portion, the radius of curvature, and the length of the upstream end and downstream end. [Figure 11] FIG. 11 is a diagram showing an arc-shaped portion. [Figure 12] FIG. 12 is a side view showing the overall configuration of the workpiece transport device. [Figure 13] FIG. 13 is a plan view showing the overall configuration of the workpiece transport device. [Figure 14] FIG. 14 is an enlarged side view showing the workpiece transport device. [Figure 15] FIG. 15 is an enlarged plan view showing the workpiece transport device. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, a carrier tape taping device according to the present disclosure will be described with reference to the drawings.

[0014] 1 to 11 are diagrams showing an embodiment of a carrier tape taping device according to the present disclosure.

[0015] First, to better understand the carrier tape taping device according to the present disclosure, the entire conveying device for electronic components (hereinafter also referred to as work) arranged upstream of the carrier tape taping device will be described with reference to Figures 12 to 15. Here, the work conveying device 1 conveys electronic components (hereinafter also referred to as work) W such as semiconductor elements while subjecting the work W to visual inspection, electrical property inspection, optical property inspection, marking processing, etc.

[0016] FIG. 12 shows the overall configuration of the workpiece transportation device 1. The workpiece transportation device 1 has a transport path 5 for the workpieces W, aligns and transports the workpieces W along the transport path 5, and sequentially performs various process steps on the workpieces W along the transport path 5, such as visual inspection, electrical property inspection, and marking. A workpiece supply unit 1A is provided at the beginning of the transport path 5. A workpiece discharge unit 3 for discharging the workpieces W is provided at the end of the transport path 5. Various processing units U1, U2, U3, U4, etc. are installed along the transport path 5 between the workpieces W and the transport path 5, performing various processes on the workpieces W. Examples of such processing units U1, U2, U3, U4, etc. include a visual inspection unit, an electrical property inspection unit, an additional inspection unit, and a marking processing unit. The workpiece discharge unit 3 for discharging the workpieces W is provided at the end of the transport path 5, and a carrier tape 90 including multiple cavities 91 for storing the workpieces W, as described below, is fed to the workpiece discharge unit 3. The workpieces W that have been processed sequentially through the transport path 5 are then placed into the cavities 91 of the carrier tape 90 at the workpiece discharge section 3 (see FIGS. 6A to 8).

[0017] Examples of the electronic component (also referred to as workpiece) W include semiconductor elements, and non-semiconductor elements such as resistor chips and capacitors. Examples of the semiconductor element include discrete semiconductors such as inductors, transistors, diodes, LEDs, capacitors, and thyristors, and integrated circuits such as ICs and LSIs. As described above, as long as it is an electronic component, it is included in the scope of the embodiments of the present disclosure.

[0018] 12 to 15, the transport path 5 is formed on the outer periphery of the transport table 4, which rotates intermittently by a predetermined angle. Suction nozzles 50, which are means for holding the workpiece W, are supported on the outer periphery of the transport table 4. By intermittently rotating the transport table 4 while holding the workpiece W with the suction nozzles 50, the workpiece W moves along the outer periphery of the transport table 4 (see FIGS. 12 and 13).

[0019] In reality, the conveying table 4 has a shape such as a disk or a star that spreads out radially from a single center, as shown in Fig. 15. The conveying table 4 has its center 4a supported by a rotation shaft of a conveying table driving mechanism 4A. A plurality of suction nozzles 50 are provided on the outer periphery of the conveying table 4 at equal intervals along the circumferential direction and at equal distances from the center 4a of the conveying table 4 along the radial direction.

[0020] Each suction nozzle 50 is hollow and has an open end (bottom end). The interior of each suction nozzle 50 is connected to an air pressure circuit of a negative pressure generating device such as a vacuum pump or an ejector. Each suction nozzle 50 generates negative pressure in the air pressure circuit, thereby suctioning the workpiece W at the open end, and then releasing the workpiece W by breaking the vacuum in the air pressure circuit or releasing it to the atmosphere.

[0021] In this embodiment, the suction nozzle 50 is attached to the conveying table 4 via a suction nozzle holding mechanism 51. The suction nozzle 50 held by the suction nozzle holding mechanism 51 is driven in the vertical direction relative to the conveying table 4.

[0022] The conveying table driving mechanism 4A of the conveying table 4 is controlled by the control unit 60 so as to rotate intermittently by one pitch at a time. The rotation pitch of the conveying table 4 is equal to the arrangement interval of the suction nozzles 50, and the suction nozzles 50 move along the conveying path 5 and then stop.

[0023] As shown in Figure 12, various processing units, such as an appearance inspection unit, an electrical property inspection unit, an additional inspection unit, and a marking processing unit, are arranged on the transport path 5 formed on the outer periphery of the transport table 4, and of these, the appearance inspection unit performs an appearance inspection on the work W.

[0024] The electrical property inspection unit inspects the workpiece W for its resistance value and other electrical properties, and the additional inspection unit performs other additional inspections, such as optical property inspections, on the workpiece W. The marking processing unit performs marking processing on the workpiece W.

[0025] As shown in Figure 12, upstream of each processing unit U1, U2, U3, U4, etc. on the conveying path 5, a workpiece front / back inspection device 70 that detects the front / back orientation of the workpiece W adsorbed by the suction nozzle 50 of the conveying table 4, and a workpiece inversion device 80 that inverts the front / back orientation of the workpiece W are sequentially arranged.

[0026] In this embodiment, the workpiece W has its front and back orientation detected by the workpiece front and back inspection device 70. The workpiece W has its front and back orientation detected by the workpiece front and back inspection device 70 is sent to the control unit 60, and if the control unit 60 determines that the workpiece W should be reversed, the workpiece W can be reversed by the workpiece inverting device 80 in response to a signal from the control unit 60. In this embodiment, after the workpiece W has its front and back orientation detected by the workpiece front and back inspection device 70, the workpiece W is reversed as needed by the workpiece inverting device 80. However, if all of the workpieces W are to be reversed, the workpiece front and back inspection device 70 does not necessarily need to be installed, and all of the workpieces W may be reversed by the workpiece inverting device 80.

[0027] Next, a carrier tape taping device 10 according to the present disclosure will be described with reference to FIGS. 1 to 10. FIG.

[0028] As described above, the workpiece W that has been subjected to various processes by the workpiece transport device 1 is placed into the cavity 91 of the carrier tape 90 from the workpiece discharge portion 3 of the workpiece transport device 1.

[0029] The carrier tape 90 with the workpiece W placed in the cavity 91 is transported to the carrier tape taping device 10 according to the present disclosure.

[0030] As shown in Figures 1 to 5, such a carrier tape taping device 10 includes a conveying mechanism 11 that conveys a carrier tape 90 including a plurality of cavities 91 in which workpieces are stored, and a cover tape supplying device 12 that supplies a cover tape 95 onto the carrier tape 90 conveyed by the conveying mechanism 11 (see Figures 6A to 8).

[0031] As described above, the workpiece W that has been subjected to various processes by the workpiece transport device 1 is stored in the cavity 91 of the carrier tape 90, and the cavity 91 storing the workpiece W is covered with a cover tape 95 supplied from the cover tape supply device 12. The carrier tape 90 and the cover tape 95 on the carrier tape 90 are then thermocompressed by a thermocompression device 13 provided downstream of the cover tape supply device 12 in the transport direction L, and the inside of the cavity 91 is sealed with the cover tape 95.

[0032] As shown in FIG. 1, the carrier tape 90 and cover tape 95 thermocompression bonded by the thermocompression bonding device 13 are fed to the carrier tape guide mechanism 20 via conveying pulleys 31, 32, and 33 provided downstream of the thermocompression bonding device 13 in the conveying direction L.

[0033] In this embodiment, an imaging unit 15 for imaging the workpiece W in the cavity 91 of the carrier tape 90 is provided above the conveying mechanism 11 on the upstream side of the cover tape supply device 12, and an inspection unit 16 for inspecting the thermocompression bonding state between the carrier tape 90 and the cover tape 95 is provided above the carrier tape guide mechanism 20.

[0034] In this embodiment, "above," "below," "top," and "bottom" refer to "above," "below," "top," and "bottom" when the carrier tape taping device 10 is installed as shown in Figure 1.

[0035] In this embodiment, the imaging unit 15 is composed of a camera that captures an image of the workpiece W housed in the cavity 91 of the carrier tape 90 .

[0036] The thermocompression bonding device 13 thermocompresses the carrier tape 90 and the cover tape 95 together, and the inspection unit 16 is made up of a camera that captures and inspects the thermocompression bonded state between the carrier tape 90 and the cover tape 95. The inspection unit 16 can also simultaneously capture and detect the workpiece W stored in the cavity 91 through the cover tape 95.

[0037] In this embodiment, the carrier tape 90 is made of a thermoplastic resin, and the cover tape 95 is also made of a thermoplastic resin. The cover tape 95 is heated and pressed against the carrier tape 90 by the thermocompression bonding device 13, whereby the carrier tape 90 and the cover tape 95 are thermally compressed.

[0038] Further, on the downstream side of the carrier tape guide mechanism 20 in the transport direction L, a reel 40 for winding up the thermocompression-bonded carrier tape 90 and cover tape 95 is provided.

[0039] Next, the carrier tape guide mechanism 20 will be described in detail. The carrier tape guide mechanism 20 curves upward the conveyed carrier tape 90 and the cover tape 95 thermocompression bonded to the carrier tape 90. The carrier tape 90 and the cover tape 95 curved upward by the carrier tape guide mechanism 20 are then imaged by the inspection unit 16 in their upwardly curved state.

[0040] The carrier tape guide mechanism 20 includes a carrier tape guide 21 having a curved surface 22 that is convex upward when viewed from a side perpendicular to the conveying direction L (see FIG. 2). That is, as shown in FIG. 2, the carrier tape guide 21 of the carrier tape guide mechanism 20 has a curved surface 22 that is convex upward when viewed from a side perpendicular to the conveying direction L, and at least the apex of this curved surface 22 consists of an arc-shaped portion 23 when viewed from a side perpendicular to the conveying direction.

[0041] It is preferable that when viewed from the side perpendicular to the conveying direction, the curved surface 22 of the carrier tape guide 21 has at least an arc-shaped portion 23 at the top, but this is not limited to this, and the top of the curved surface 22 may have an elliptical portion, or the top of the curved surface 22 may be formed by a curve represented by various functions.

[0042] As described above, when viewed from the side perpendicular to the conveying direction L, the curved surface 22 of the carrier tape guide 21 has at least the top portion formed of the arc-shaped portion 23. In this case, as shown in Figure 11, the arc-shaped portion 23 of the curved surface 22 has an upstream end 23a and a downstream end 23b along the conveying direction L. The upstream end 23a and the downstream end 23b form the lower end of the arc-shaped portion 23.

[0043] In this embodiment, the height H between the upper end and the lower end of the arc-shaped portion 23 is, in both the case of the carrier tape 90 having a carrier tape width of 8 mm and the case of the carrier tape 90 having a carrier tape width of 12 mm, It is preferable that 10 mm≦H≦15 mm.

[0044] If H is less than 10 mm, it becomes difficult to sufficiently curve the carrier tape 90 and the cover tape 95 on the curved surface 22, as will be described later.

[0045] On the other hand, if H exceeds 15 mm, the carrier tape 90 and the cover tape 95 will be outside the range of the depth of field of the camera of the inspection unit 16, making it difficult for the inspection unit 16 to obtain an image with good accuracy. If H exceeds 15 mm, the following problems may occur: (1) Increased lighting reflection and halation (i) As the curvature increases, the angle of the surface of the cover tape 95 changes, and the reflected light from the light source becomes stronger. (ii) This causes overexposure and unevenness, making it difficult to perform appropriate image processing. (iii) Defects may be difficult to see, especially with a glossy cover tape 95 . (2) Deterioration of the transport stability of the carrier tape 90 (i) If the curvature is large, the contact area of ​​the carrier tape 90 decreases, making transportation unstable. (ii) As a result, the carrier tape may meander or become misaligned, increasing the risk of the inspection position being misaligned. (iii) To perform stable inspection, the curvature must be kept below an appropriate level. (3) Damage caused by localized excessive tension (i) When the curvature becomes large, excessive tension is applied to a portion of the carrier tape 90. (ii) This causes the carrier tape 90 to stretch or deform, which in the long term leads to deterioration or breakage. (iii) It is important to control the tension within an appropriate curvature range, especially for a thin carrier tape 90. In contrast, according to the present disclosure, H is kept to 15 mm or less, thereby achieving the following advantageous effects. (i) Appropriate optical conditions are ensured, enabling stable image inspection. (ii) The transport of the carrier tape 90 is stabilized, and positional deviation and meandering are suppressed. (iii) Excessive load is not applied to the carrier tape 90, and quality can be maintained.

[0046] Therefore, in this embodiment, the height H between the upper end and the lower end of the arc-shaped portion 23 is The limit is 10mm≦H≦15mm.

[0047] The height H between the upper and lower ends of the arc-shaped portion 23 of the curved surface 22 is determined by the distance L1 between the upstream end 23a and the downstream end 23b of the arc-shaped portion 23, as shown in Figure 11, and the radius of curvature R from the center 30 of the arc-shaped portion 23 to the periphery.

[0048] 10, the height H between the upper and lower ends of the arc-shaped portion 23 can be determined by appropriately changing the distance L1 between the upstream end 23a and the downstream end 23b of the arc-shaped portion 23 and the radius of curvature R of the arc-shaped portion 23. Of these, H is preferably 10 mm or more and 15 mm or less, among the values ​​shown in the table of FIG.

[0049] 1 to 5, the carrier tape guide mechanism 20 has a pair of rod-shaped carrier tape pressing guides 25, 26 provided near the curved surface 22 of the carrier tape guide 21. The pair of rod-shaped carrier tape pressing guides 25, 26 are provided at the upstream end 23a and downstream end 23b of the arc-shaped portion 23 along the conveying direction L, and press the carrier tape 90 and the cover tape 95 against the curved surface 22.

[0050] As described above, carrier tape guide 21 of carrier tape guide mechanism 20 has curved surface 22 that is convex upward. In addition, sprocket 35 is disposed adjacent to carrier tape guide 21 on the rear side of carrier tape guide 21 and parallel to carrier tape guide 21. In addition, protrusion 36 is formed on the outer periphery of sprocket 35 (see FIGS. 4 and 5).

[0051] The carrier tape guide 21 and the sprocket 35 provided adjacent to the carrier tape guide 21 are surrounded by a cover 21A disposed in front of the sprocket 35 and the carrier tape guide 21 (see FIG. 3).

[0052] The sprocket 35 is rotated by a drive unit including a stepping motor (not shown), causing the protrusions 36 to engage with the feed holes 92 of the carrier tape 90. This allows the sprocket 35 to feed the carrier tape 90 intermittently using the stepping motor.

[0053] 2 to 4, the center of the arcuate portion 23 of the curved surface 22 is indicated by reference numeral 30, and the optical axis L2 of the camera of the inspection unit 16 passing through the opening 18a of the window 18 is also indicated.

[0054] Next, the operation of this embodiment configured as described above will be described with reference to the flowchart of FIG.

[0055] First, the workpiece W that has been subjected to various processes by the workpiece transport device 1 is placed into the cavity 91 of the carrier tape 90 from the workpiece discharge section 3 .

[0056] The carrier tape 90 with the workpiece W placed in the cavity 91 is transported by the transport mechanism 11 of the carrier tape taping device 10. Next, the workpiece W stored in the cavity 91 of the carrier tape 90 is imaged by the imaging unit 15, and the image imaged by the imaging unit 15 is sent to the control unit 60. In the control unit 60, an ID corresponding to the cavity 91 is assigned to the image. In this case, the imaging unit 15 images the cavity 91 before it is covered with the cover tape 95, and the presence or absence of the workpiece W in the cavity 91 is detected. Next, the cover tape 95 is supplied from the cover tape supply device 12 onto the carrier tape 90 transported by the transport mechanism 11.

[0057] Next, the carrier tape 90 and the cover tape 95 on the carrier tape 90 are transported to the thermocompression bonding device 13, and are thermocompression bonded by this thermocompression bonding device 13.

[0058] Thereafter, the carrier tape 90 thermocompressed by the thermocompression bonding device 13 and the cover tape 95 on the carrier tape 90 are sequentially passed through conveying pulleys 31, 32, and 33 provided downstream of the thermocompression bonding device 13 in the conveying direction L, and are sent to the carrier tape guide mechanism 20.

[0059] During this time, the conveying operation of the carrier tape 90 is controlled by the control unit 60 based on the IDs provided corresponding to the cavities 91.

[0060] That is, the drive unit of the sprocket 35 that transports the carrier tape 90 includes a stepping motor, and the stepping motor is controlled so that a cavity 91 having a specific ID in the image captured by the imaging unit 15 reaches the carrier tape guide mechanism 20.

[0061] Thereafter, the stepping motor stops feeding the carrier tape 90, and the inspection unit 16 inspects the thermocompression bonding state of the carrier tape 90 and the cover tape 95.

[0062] In this case, the carrier tape 90 and the cover tape 95 are pressed from above by a pair of carrier tape pressing guides 25, 26 against the curved surface 22 of the carrier tape guide 21, and are simultaneously bent upward into a convex shape by the curved surface 22 (see FIG. 8).

[0063] This stretches the cover tape 95 on the carrier tape 90, removing any waviness or unevenness that tends to occur on the cover tape 95, particularly on the side edges, and allowing the camera of the inspection unit 16 to accurately and precisely capture the thermocompression bonded state of the carrier tape 90 and the cover tape 95.

[0064] 6 and 7, the effect of curving the carrier tape 90 and the cover tape 95 upwardly convexly by the carrier tape guide 21 having the curved surface 22 of the carrier tape guide mechanism 20 will be described.

[0065] FIG. 7 shows, as a comparative example, an image captured when carrier tape 90 and cover tape 95 thermocompression bonded onto carrier tape 90 are transported on transport mechanism 11 extending in the horizontal direction.

[0066] 7, waving and / or unevenness may occur particularly on the side edges of the cover tape 95. For this reason, when the carrier tape 90 and the cover tape 95 are photographed with a camera, a cloudy area 96 appears in the photographed image due to reflection from the waving and / or unevenness on the side edges of the cover tape 95. In this case, it becomes difficult to inspect the thermocompression bonding state between the carrier tape 90 and the cover tape 95.

[0067] In contrast, according to this embodiment, when the carrier tape 90 and the cover tape 95 reach the carrier tape guide 21 of the carrier tape guide mechanism 20, which has a curved surface 22 that is convex upward, the carrier tape 90 and the cover tape 95 are curved upward in a convex shape by the curved surface 22, particularly the curved surface 22 that has an arc-shaped portion 23 at its apex, as shown in Fig. 6. Here, Fig. 6 shows a captured image illustrating this embodiment.

[0068] As shown in Fig. 6, the cover tape 95 on the carrier tape 90 is stretched, and waving and / or unevenness that tend to occur particularly on the side edges of the cover tape 95 are removed. Therefore, when the carrier tape 90 and the cover tape 95 are imaged with the camera of the inspection unit 16, no cloudy areas due to waving and / or unevenness appear in the captured image. Therefore, when the carrier tape 90 and the cover tape 95 are imaged with the camera of the inspection unit 16, no cloudy areas appear in the captured image, making it possible to accurately inspect the thermocompression bond state of the carrier tape 90 and the cover tape 95, for example, whether they are securely compressed (see Fig. 6).

[0069] In addition, by using the camera of the inspection unit 16 to capture images of the carrier tape 90 and cover tape 95, which are curved convexly upward by the carrier tape guide mechanism 20, not only can the thermocompression bonded state between the carrier tape 90 and the cover tape 95 be confirmed, but the workpiece W stored in the cavity 91 of the carrier tape 90 can also be confirmed through the cover tape 95.

[0070] The carrier tape 90 and cover tape 95 are imaged by the inspection unit 16 in this manner while being curved upwardly convexly by the carrier tape guide mechanism 20, and are then wound up onto the reel 40.

[0071] As described above, according to this embodiment, when the carrier tape 90 and the cover tape 95 reach the curved surface 22 of the carrier tape guide mechanism 20, the carrier tape 90 and the cover tape 95 are curved upward in a convex shape by the curved surface 22, particularly the curved surface 22 having the arc-shaped portion 23 at its apex. This stretches the cover tape 95 on the carrier tape 90, eliminating any waviness or irregularities that tend to occur on the cover tape 95, particularly on its side edges. Therefore, when the carrier tape 90 and the cover tape 95 are imaged by the camera of the inspection unit 16, no cloudy areas due to waviness or irregularities appear in the captured image, and the thermocompression bonding state of the carrier tape 90 and the cover tape 95 can be reliably inspected. At the same time, the workpiece W stored in the cavity 91 of the carrier tape 90 can also be confirmed through the cover tape 95.

[0072] Furthermore, since the curved surface 22 of the carrier tape guide mechanism 20 has an arc-shaped portion 23 at the top, this arc-shaped portion 23 can reliably curve the carrier tape 90 and the cover tape 95 in an upwardly convex shape.

[0073] In addition, the height H between the upper end and the lower end of the arc-shaped portion 23 that constitutes the curved surface 22 of the carrier tape guide mechanism 20 is The limit is 10mm≦H≦15mm.

[0074] This allows the carrier tape 90 and the cover tape 95 to be sufficiently and reliably curved on the curved surface 22. Furthermore, since the carrier tape 90 and the cover tape 95 do not fall outside the depth of field of the camera of the inspection unit 16, images of the carrier tape 90 and the cover tape 95 can be obtained accurately and reliably by the camera of the inspection unit 16.

[0075] The carrier tape guide mechanism 20 is also provided with a pair of carrier tape pressing guides 25, 26 that press the carrier tape 90 and the cover tape 95 against the curved surface 22. Therefore, the pair of carrier tape pressing guides 25, 26 can press the carrier tape 90 and the cover tape 95 against the curved surface 22, thereby more reliably curving the carrier tape 90 and the cover tape 95 into an upwardly convex shape.

[0076] Furthermore, a sprocket 35 for driving the carrier tape 90 and cover tape 95 is provided adjacent to the carrier tape guide 21 of the carrier tape guide mechanism 20, and the inspection unit 16 is provided vertically above the carrier tape guide 21. Therefore, the carrier tape 90 and cover tape 95 can be transported reliably and accurately to the inspection position directly below the inspection unit 16, and the thermocompression bonded state of the carrier tape 90 and cover tape 95 can be inspected by the inspection unit 16 at the inspection position directly below the inspection unit 16. At the same time, the cavity 91 of the carrier tape 90 can be brought to the inspection position directly below the inspection unit 16, and the workpiece W in the cavity 91 can be reliably inspected.

[0077] Furthermore, the optical axis L2 of the camera of the inspection unit 16 passes through the upper end of the arc-shaped portion 23 that constitutes the curved surface 22 of the carrier tape guide mechanism 20 and the center 30 of the arc-shaped portion 23 (see FIG. 11).

[0078] This allows the carrier tape 90 and cover tape 95 to be precisely folded to the maximum extent at the upper end of the arc-shaped portion 23, and this maximally folded carrier tape 90 and cover tape 95 can be inspected by the camera of the inspection unit 16. [Explanation of symbols]

[0079] 1 Work transport device 3 Work discharge section 4 Transport table 5. Transport Route 6 Supply route 10 Carrier tape taping device 11. Transport mechanism 12 Cover tape supply device 13 Thermocompression bonding equipment 15 Imaging unit 16 Inspection Department 18 Windows 18a opening 20 Carrier tape guide mechanism 21 Carrier tape guide 21A Cover 22 Curved Surface 23 Arc-shaped part 23a Upstream end 23b Downstream end 25 Carrier tape holding guide 26 Carrier tape holding guide 30 center 35 sprocket 36 Protrusion 50 suction nozzle 51 Suction nozzle holding mechanism 60 Control Unit 70 Workpiece front and back inspection device 80 Work inversion device 90 Carrier Tape 91 Cavity 92 sprocket holes 95 Cover Tape U1, U2, U3, U4 processing units double work L Conveying direction L1: Distance between the upstream and downstream ends of the arc-shaped portion L2 optical axis R: Radius of curvature of the arc-shaped part

Claims

1. a transport mechanism that transports a carrier tape including a plurality of cavities in which the workpieces are stored; a cover tape supplying device that supplies a cover tape onto the carrier tape transported by the transport mechanism; a thermocompression bonding device that thermocompresses the carrier tape and the cover tape transported by the transport mechanism; an inspection unit provided above the downstream side of the thermocompression bonding device in a conveyance direction, the inspection unit inspecting at least a thermocompression bonded state of the carrier tape and the cover tape when the carrier tape is stopped; a carrier tape guide mechanism provided below the inspection unit and configured to curve the carrier tape and the cover tape upward; the carrier tape guide mechanism includes a carrier tape guide having a curved surface that is convex upward when viewed from the side perpendicular to the transport direction, the curved surface of the carrier tape guide includes an arc-shaped portion at its apex when viewed from a side perpendicular to the conveying direction, the inspection unit includes a camera having an optical axis, and the arc-shaped portion has a center and a predetermined radius of curvature; A carrier tape taping device, wherein the optical axis of the camera passes through the upper end of the arc-shaped portion and the center of the arc-shaped portion.

2. 2. The carrier tape taping device according to claim 1, wherein a height H between the upper end and the lower end of said arc-shaped portion is in the range of 10 mm≦H≦15 mm.

3. 2. A carrier tape taping device as described in claim 1, wherein a pair of carrier tape pressing guides for pressing the carrier tape and the cover tape against the curved surface are provided at the upstream and downstream ends of the curved surface of the carrier tape guide in the conveying direction.

4. 2. The carrier tape taping device according to claim 1, further comprising an imaging unit for imaging the workpiece in the carrier tape, the imaging unit being disposed upstream of the thermocompression bonding device in the transport direction.

5. 2. The carrier tape taping device according to claim 1, wherein a sprocket for driving the carrier tape and the cover tape is provided adjacent to the carrier tape guide in the carrier tape guide mechanism.

Images