High voltage feedthroughs and connectors for charged particle devices.

Abstract

A connector for electrically connecting a feedthrough of a vacuum tool to a high-voltage power supply is disclosed. The connector includes a wire assembly configured to electrically connect to the high-voltage power supply and including a plug for receiving an end of a feedthrough pin, and a connector insulator including a channel extending therein and configured to receive the feedthrough pin so as to electrically connect the connector wire assembly to the feedthrough pin. The connector insulator is configured to engage with the feedthrough such that an interface of the connector insulator extends substantially bidirectionally in the direction of a longitudinal axis of the channel. The interface extends substantially within the connector insulator.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to European Patent Application No. 20196493.9, filed September 16, 2020, the entire contents of which are incorporated herein by reference.

[0002]

[0002] Embodiments provided herein generally relate to providing high voltage power to vacuum tools, such as charged particle devices. The embodiments provide a novel design for a high voltage power interface. Advantages of the embodiments may include a smaller area required on the exterior wall of the vacuum tool to accommodate the feedthrough than known high voltage power interfaces. [Background technology]

[0003]

[0003] When manufacturing semiconductor integrated circuit (IC) chips, undesired pattern defects inevitably occur on substrates (i.e., wafers) or masks during the fabrication process, for example, as a result of optical effects and accidental particles, thereby reducing yield. Therefore, monitoring the extent of undesired pattern defects is an important process in the manufacture of IC chips. More generally, inspection and / or measurement of the surface of a substrate or other object / material is an important process during and / or after its manufacture.

[0004]

[0004] Pattern inspection tools using charged particle beams have been used to inspect objects, for example, to detect pattern defects. These tools typically use electron microscopy techniques, such as scanning electron microscopes (SEMs). In an SEM, a primary electron beam of relatively high-energy electrons is targeted with a final deceleration step to land on a sample with a relatively low landing energy. The electron beam is focused as a probing spot on the sample. Interaction of the landing electrons from the electron beam with material structures at the probing spot causes electrons, such as secondary electrons, backscattered electrons, or Auger electrons, to be emitted from the surface. The generated secondary electrons can be emitted from the material structures of the sample. By scanning the primary electron beam as a probing spot across the sample surface, secondary electrons can be emitted across the surface of the sample. By collecting these emitted secondary electrons from the sample surface, the pattern inspection tool can obtain an image representative of the material structure characteristics of the surface of the sample.

[0005]

[0005] Dedicated flood columns can be used with SEMs to flood large areas of the surface of a substrate or other sample with charged particles in a relatively short time. Thus, flood columns are useful tools for pre-charging wafer surfaces and setting the charging conditions for subsequent inspection by the SEM. Dedicated flood columns can enhance voltage contrast defect signals, thereby increasing the defect detection sensitivity and / or throughput of the SEM. During charged particle flooding, the flood column is used to provide a relatively large amount of charged particles to rapidly charge a predetermined area. The primary electron source of the electron beam inspection system is then applied to scan an area within the pre-charged area to achieve imaging of that area.

[0006]

[0006] There is a general need to improve charged particle tools for lithography, such as SEMs, flood columns, and the like. Summary of the Invention

[0007] Advances in the specifications of charged particle devices require an increase in the number of components within the device. For example, the number of sources may be increased to increase the number of beams in a multi-beam of charged particles that can be provided. The number of lenses and other charged particle manipulators may also need to be increased to be able to properly manipulate the increased number of source beams. Therefore, charged particle devices need to include more components, which need to be integrated into the architecture of the charged particle device. In particular, flood columns may need to be integrated with SEMs.

[0008] A problem that arises from the above-identified advances is that there is a limited amount of space available inside a charged particle device for some or all of the components. A component that may be affected by these space constraints is the power interface of a high voltage power supply to the charged particle device. A high voltage power supply may be required, for example, by a flood column to provide the necessary current to flood and thereby charge the sample.

[0009]

[0009] Embodiments provide a novel design of a high-voltage power interface for a vacuum tool, such as a charged particle device. The power interface includes a feedthrough and a corresponding connector. The feedthrough may be located in or on an outer wall of the charged particle device and is arranged to receive the high-voltage connector. The feedthrough and connector are designed such that the distance across their respective interfaces exceeds a minimum creep length, in both directions parallel to the axis of the feedthrough pin. This reduces the required area of ​​the feedthrough within the outer wall of the charged particle device and also reduces the volume required within the charged particle device to accommodate the feedthrough.

[0010]

[0010] According to a first aspect of the present invention, there is provided a connector for electrically connecting a feedthrough of a vacuum tool to a high-voltage power supply, the connector comprising: a connector wire assembly configured to electrically connect to the high-voltage power supply; and a connector insulator including a channel extending therein and configured to receive a feedthrough pin so as to electrically connect the connector wire assembly to the feedthrough pin, the channel configured to receive the feedthrough pin, the connector insulator being configured to engage with the feedthrough such that an interface of the connector insulator extends substantially bidirectionally in the direction of a longitudinal axis of the channel. The wire assembly may include a plug for receiving an end of the feedthrough pin. The interface may extend substantially within the connector insulator.

[0011] According to a second aspect of the present invention, there is provided a feedthrough for supplying high voltage power to a device in a vacuum tool, the feedthrough comprising: a feedthrough insulator configured to engage a connector; and a feedthrough pin protruding from a concave surface of the feedthrough insulator, the feedthrough pin being configured to electrically connect to a connector wire assembly of the connector, the feedthrough insulator comprising an interface surface extending substantially bidirectionally in the direction of a longitudinal axis of the feedthrough pin. The feedthrough pin may protrude from the concave surface of the feedthrough insulator such that an end of the feedthrough pin protrudes from the feedthrough insulator.

[0012]

[0012] According to a third aspect of the present invention, there is provided a power interface for a vacuum tool having one or more high voltage devices, wherein the electrical connection comprises a connector according to the first aspect and a feedthrough according to the second aspect, the connector engaging with the feedthrough.

[0013] According to a fourth aspect of the present invention there is provided a vacuum tool comprising a power interface according to the third aspect.

[0014]

[0014] According to a fifth aspect of the present invention, there is provided a multi-pin connector for electrically connecting a feedthrough of a vacuum tool to a high voltage power supply, comprising: at least two connector wire assemblies configured to connect to the high voltage power supply; and a connector insulator having a respective channel for each connector wire assembly, each channel extending within the connector insulator and configured to receive an end of a feedthrough pin so as to electrically connect the connector wire assembly with the feedthrough pin, wherein the connector insulator is configured to engage with the feedthrough such that the interface of the connector insulator extends substantially bidirectionally in the direction of the longitudinal axis of one of the channels.

[0015]

[0015] According to a sixth aspect of the present invention, there is provided a multi-pin feedthrough for supplying high voltage power to a device in a vacuum tool, comprising a feedthrough insulator configured to engage with a connector and at least two feedthrough pins each protruding from at least two concave surfaces in the feedthrough insulator, each feedthrough pin configured to electrically connect to a connector wire assembly of the connector, and the feedthrough insulator having a boundary surface extending substantially in two directions in the direction of the longitudinal axis of the feedthrough pin.

[0016]

[0016] According to a seventh aspect of the present invention, there is provided a high-voltage connector for connecting a feedthrough of a vacuum device to a high-voltage power supply, comprising: a connector pin configured to electrically connect with a feedthrough pin of the feedthrough; and a connector body of insulating material configured to be insertably engageable with the feedthrough to electrically connect the connector pin and the feedthrough pin, wherein the connector body provides a two-way boundary surface extending in the direction of the connector pin.

[0017]

[0017] According to an eighth aspect of the present invention, there is provided a high-voltage connector for connecting a feedthrough of a vacuum device to a high-voltage power supply, the high-voltage connector comprising: two connector pins configured to be connected to the high-voltage power supply, the pins configured to electrically connect with corresponding feedthrough pins of the feedthrough; and a connector body of insulating material configured to be insertably engageable with the feedthrough to electrically connect between the connector pins and the corresponding feedthrough pins, wherein the connector body between the connector pins provides an interface extending in two directions in the direction of the connector pins.

[0018]

[0018] According to a ninth aspect of the present invention, there is provided a feedthrough for supplying high voltage to an electrical device inside a vacuum apparatus, the feedthrough comprising: a feedthrough pin configured to connect to a high voltage connector and configured to electrically connect with a connector pin of the feedthrough; and a feedthrough body of insulating material configured to be insertably engageable with the connector to electrically connect the connector pin and the feedthrough pin, wherein the feedthrough body provides a two-way boundary surface extending in the direction of the feedthrough pin.

[0019]

[0019] According to a tenth aspect of the present invention, there is provided a feedthrough for supplying high voltage to an electrical device inside a vacuum apparatus, the feedthrough comprising: two feedthrough pins configured to connect to a high voltage connector and configured to electrically connect with corresponding connector pins of the connector; and a feedthrough body of insulating material configured to be insertably engageable with the connector to electrically connect between the feedthrough pins and the corresponding connector pins, wherein the feedthrough body between the feedthrough pins provides an interface extending in two directions in the direction of the feedthrough pins.

[0020]

[0020] According to an 11th aspect of the present invention, there is provided an electrical connection for a vacuum tool having a high voltage device, the electrical connection comprising a connector described in any one of the 7th and 8th aspects of the present invention and a feedthrough described in any one of the 9th and 10th aspects of the present invention, the feedthrough and the connector being engaged to be connected.

[0021]

[0021] Other advantages of the present invention will become apparent from the following description, taken in conjunction with the accompanying drawings, in which are set forth, by way of illustration and example, certain embodiments of the invention.

[0022]

[0022] The above and other aspects of the present disclosure will become more apparent from the description of exemplary embodiments taken in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. 1 is a schematic diagram illustrating an exemplary charged particle beam inspection apparatus. [Figure 2]

[0024] 2 is a schematic diagram illustrating an example multi-beam device that is part of the example charged particle beam inspection system of FIG. 1. [Figure 3]

[0025] 2 is a schematic diagram of an exemplary multi-beam apparatus illustrating an exemplary configuration of a source conversion unit of the exemplary charged particle beam inspection apparatus of FIG. 1. [Figure 4]

[0026] 1 is a schematic diagram of a cross section through a power interface according to one embodiment. [Figure 5]

[0027] 1 is a schematic diagram of a cross section through a power interface according to one embodiment. [Figure 6]

[0028] 1 is a schematic diagram of a connector insulating structure for use with a feedthrough according to one embodiment. [Figure 7A]

[0029] FIG. 2 is a substantially end view of a feedthrough according to one embodiment. [Figure 7B]

[0030] FIG. 2 is a substantially side view of a feedthrough according to one embodiment. [Figure 7C]

[0031] FIG. 2 is an end view of a feedthrough according to one embodiment. [Figure 8]

[0032] 1 illustrates a connection between an end of a feedthrough pin and a plug according to one embodiment. [Figure 9A]

[0033] 1 is a schematic diagram of a cross section through a power interface according to one embodiment. [Figure 9B]

[0034] FIG. 2 is a schematic diagram of a cross section through a feedthrough according to one embodiment. [Figure 10]

[0035] 1 is a schematic diagram of a cross section through a power interface according to one embodiment. [Figure 11A]

[0036] 1 is a schematic diagram of a cross section through a connector according to one embodiment. [Figure 11B]

[0037] 1 is a schematic diagram of a cross section through a power interface according to one embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0024]

[0038] Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. The following description refers to the accompanying drawings, in which like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the following description of exemplary embodiments do not represent all implementations consistent with the present invention. Instead, the implementations are merely examples of apparatus and methods consistent with aspects related to the present invention, as set forth in the appended claims.

[0025]

[0039] The embodiments described throughout this document generally apply to vacuum tools. A preferred application of the embodiments is providing a power interface to charged particle devices. Although the techniques of the embodiments are generally described for charged particle devices, the embodiments may be applied to any type of vacuum tool.

[0026]

[0040] The reduction in physical size of devices and the increase in computing power of electronic devices can be achieved by significantly increasing the packing density of circuit components such as transistors, capacitors, and diodes on IC chips. This has been made possible by improvements in resolution, which allow for the creation of even smaller structures. For example, an IC chip in a smartphone the size of a thumbnail, available before 2019, can contain over 2 billion transistors, each less than 1 / 1000 the size of a human hair. It is therefore not surprising that semiconductor IC manufacturing is a complex and time-consuming process with hundreds of individual steps. An error in even a single step can dramatically affect the functionality of the final product. Just one "killer defect" can cause device failure. The goal of a manufacturing process is to improve the overall yield of the process. For example, to achieve a 75% yield for a 50-step process (where steps can refer to the number of layers formed on a wafer), each individual step must have a yield of greater than 99.4%. If each individual step has a yield of 95%, the overall process yield is as low as 7-8%.

[0027]

[0041] While high process yields are desirable in IC chip manufacturing facilities, maintaining high substrate (i.e., wafer) throughput, defined as the number of substrates processed per hour, is also essential. High process yields and high substrate throughput can be affected by the presence of defects. This is especially true when operator intervention is required to investigate the defects. Therefore, high-throughput detection and identification of microscale and nanoscale defects by inspection tools, such as scanning electron microscopes ("SEMs"), is essential to maintaining high yields and low costs.

[0028]

[0042] An SEM includes a scanning device and a detector. The scanning device includes an illumination device, which includes an electron source for generating primary electrons, and a projection device for scanning a sample, such as a substrate, with one or more focused beams of primary electrons. The primary electrons interact with the sample and generate interaction products, such as secondary electrons and / or backscattered electrons. The detector captures the secondary electrons and / or backscattered electrons from the sample as it is scanned so that the SEM can generate an image of the scanned area of ​​the sample. For high-throughput inspection, some inspection systems use multiple focused beams of primary electrons, or multibeams. The component beams of a multibeam are sometimes called subbeams or beamlets. A multibeam can simultaneously scan different portions of the sample. Therefore, a multibeam inspection system can inspect a sample much faster than a single-beam inspection system.

[0029]

[0043] In a multi-beam inspection apparatus, some paths of the primary electron beam are displaced away from the central axis of the scanning device, i.e., the midpoint of the primary electron optical axis (also referred to herein as the charged particle axis). To ensure that all electron beams reach the sample surface at substantially the same angle of incidence, sub-beam paths with a greater radial distance from the central axis need to be steered to move through a larger angle than sub-beam paths closer to the central axis. This stronger steering can cause aberrations that blur the resulting image and defocus the image. One example is spherical aberration, which causes the focal point of each sub-beam path to a different focal plane. Specifically, for sub-beam paths that are not on the central axis, the change in the focal plane of the sub-beam increases with radial displacement from the central axis. Such aberrations and defocusing effects can remain associated with secondary electrons from the target when they are detected, for example, affecting the shape and size of the spot formed by the sub-beam on the target. Therefore, such aberrations degrade the quality of the resulting image produced during inspection.

[0030]

[0044] Known implementations of multi-beam inspection devices are described below.

[0031]

[0045] The figures are schematic. Accordingly, in the drawings, the relative dimensions of components are exaggerated for clarity. In the following description of the drawings, the same or similar reference numbers refer to the same or similar components or entities, and only differences relative to individual embodiments are described. While the description and drawings are directed to electron-optical devices, it is understood that the embodiments are not used to limit the present disclosure to specific charged particles. Thus, throughout this document, references to electrons can be considered to be references to charged particles more generally, and charged particles are not necessarily electrons.

[0032]

[0046] 1, which is a schematic diagram illustrating an exemplary charged particle beam inspection system 100. The charged particle beam inspection system 100 of FIG. 1 includes a main chamber 10, a load lock chamber 20, an electron beam tool 40, a front end equipment module (EFEM) 30, and a controller 50.

[0033]

[0047] The EFEM 30 includes a first load port 30a and a second load port 30b. The EFEM 30 may include one or more additional load ports. The first load port 30a and the second load port 30b can, for example, receive substrate front opening unified pods (FOUPs) containing substrates (e.g., semiconductor substrates or substrates made of other materials) or samples to be inspected (hereinafter, substrates, wafers, and samples are collectively referred to as "samples"). One or more robotic arms (not shown) of the EFEM 30 transport the samples to the load lock chamber 20.

[0034]

[0048] The load lock chamber 20 is used to remove gas from around the sample. This creates a vacuum, which is a local gas pressure lower than the pressure of the surrounding environment. The load lock chamber 20 may be connected to a load lock vacuum pumping system (not shown), which removes gas particles within the load lock chamber 20. Operation of the load lock vacuum pumping system allows the load lock chamber to reach a first pressure below atmospheric pressure. After the first pressure is reached, one or more robotic arms (not shown) transport the sample from the load lock chamber 20 to the main chamber 10. The main chamber 10 is connected to the main chamber vacuum pumping system (not shown). The main chamber vacuum pumping system removes gas molecules within the main chamber 10 so that the pressure around the sample reaches a second pressure below the first pressure. After the second pressure is reached, the sample is transported to an electron beam tool, where it can be subjected to charged particle flooding and / or inspection by the electron beam tool. The electron beam tool 40 may include a single beam or multi-beam electron optics device.

[0035]

[0049] The controller 50 is electronically connected to the electron beam tool 40. The controller 50 may be a processor (e.g., a computer) configured to control the charged particle beam inspection apparatus 100. The controller 50 may also include processing circuitry configured to perform various signal and image processing functions. While FIG. 1 illustrates the controller 50 as external to the structure including the main chamber 10, the load lock chamber 20, and the EFEM 30, it is understood that the controller 50 may be part of the structure. The controller 50 may be located within one of the component elements of the charged particle beam inspection apparatus, or the controller 50 may be distributed among at least two of the component elements. While the present disclosure provides an example of a main chamber 10 housing an electron beam inspection tool, it should be noted that aspects of the present disclosure, in a broad sense, are not limited to chambers housing electron beam inspection tools. Rather, it is understood that the principles described above may also be applied to other tools and other arrangements of apparatus operating under a second pressure.

[0036]

[0050] Referring now to FIG. 2, FIG. 2 is a schematic diagram illustrating an exemplary electron beam tool 40, including a multi-beam inspection tool that is part of the exemplary charged particle beam inspection apparatus 100 of FIG. 1. The multi-beam electron beam tool 40 (also referred to herein as apparatus 40) includes an electron source 201, a gun aperture plate 271, a condenser lens 210, a source transformation unit 220, a primary projection apparatus 230, a motorized stage 209, and a sample holder 207. The electron source 201, the gun aperture plate 271, the condenser lens 210, and the source transformation unit 220 are components of an illumination apparatus encompassed by the multi-beam electron beam tool 40. The sample holder 207 is supported by the motorized stage 209 to hold a sample 208 (e.g., a substrate or mask) for inspection or charged particle flooding. The multi-beam electron beam tool 40 may further include a secondary projection apparatus 250 and an associated electron detection device 240. The primary projection apparatus 230 may include an objective lens 231. The electronic detection device 240 may include a plurality of detection elements 241, 242, and 243. The beam separator 233 and the deflection scanning unit 232 may be arranged in the primary projection arrangement 230.

[0037]

[0051] The components used to generate the primary beam may be aligned with the primary electron optical axis of apparatus 40. These components may include electron source 201, gun aperture plate 271, condenser lens 210, source conversion unit 220, beam separator 233, deflection scanning unit 232, and primary projection apparatus 230. Secondary projection apparatus 250 and its associated electron detection device 240 may be aligned with the secondary electron optical axis 251 of apparatus 40.

[0038]

[0052] The primary electron optical axis 204 is constituted by the electron optical axis of the portion of the electron beam tool 40 that is the illumination device. The secondary electron optical axis 251 is the electron optical axis of the portion of the electron beam tool 40 that is the detection device. The primary electron optical axis 204 is sometimes referred to herein (for ease of reference) as the main optical axis or the primary charged particle optical axis. The secondary electron optical axis 251 is sometimes referred to herein as the secondary optical axis or the secondary charged particle optical axis.

[0039]

[0053] The electron source 201 may include a cathode (not shown) and an extractor or anode (not shown). During operation, the electron source 201 is configured to emit electrons from the cathode as primary electrons. The primary electrons are extracted or accelerated by the extractor and / or anode to form a primary electron beam 202 that forms a primary beam crossover (virtual or real image) 203. The primary electron beam 202 can be visualized as it emerges from the primary beam crossover 203.

[0040]

[0054] The formed primary electron beam 202 may be a single beam, or multiple beams may be generated from this single beam. Thus, at different locations along the beam path, the primary electron beam 202 may be either a single beam or multiple beams. By the time it reaches the sample, preferably before it reaches the projection device, the primary electron beam 202 is multiple beams. Such multiple beams can be generated from the primary electron beam in many different ways. For example, multiple beams can be generated by a multibeam array located before the crossover 203, a multibeam array located in the source conversion unit 220, or a multibeam array located anywhere in between. The multibeam array may include multiple electron beam steering elements arranged in an array across the beam path. Each steering element can influence at least a portion of the primary electron beam to generate sub-beams. Thus, the multibeam array generates multiple beam paths by interacting with the incident primary beam path, down the multibeam array. The interaction of the multi-beam array with the primary beam may include one or more aperture arrays, individual deflectors (e.g., per sub-beam), lenses, astigmatism correctors and (aberration) correctors (again, e.g., per sub-beam).

[0041]

[0055] In operation, the gun aperture plate 271 is configured to block peripheral electrons of the primary electron beam 202 to reduce the Coulomb effect, which can increase the size of the probe spots 221, 222, and 223 of the primary sub-beams 211, 212, 213, respectively, and thus reduce the inspection resolution. The gun aperture plate 271 can also include multiple openings for generating primary sub-beams (not shown) even before the source conversion unit 220, and may also be referred to as a Coulomb aperture array.

[0042]

[0056] The condenser lens 210 is configured to focus (or collimate) the primary electron beam 202. In an embodiment, the condenser lens 210 can be designed to focus (or collimate) the primary electron beam 202 into a substantially parallel beam and substantially perpendicularly incident on the source conversion unit 220. The condenser lens 210 can be a movable condenser lens, which can be configured such that the position of its principal plane is movable. In an embodiment, the movable condenser lens can be configured to physically move, for example, along the optical axis 204. Alternatively, the movable condenser lens can be composed of two or more electro-optical elements, where the principal plane of the condenser lens moves in response to variations in the strength of the individual electro-optical elements (lenses). The (movable) condenser lens can be configured to be magnetic, electrostatic, or a combination of magnetic and electrostatic lenses. In a further embodiment, the condenser lens 210 can be an anti-rotation condenser lens. The anti-rotation focusing lens may be configured to keep the rotation angle constant when the focusing power (collimating power) of the focusing lens 210 changes and / or when the major plane of the focusing lens moves.

[0043]

[0057] In one embodiment of the source conversion unit 220, the source conversion unit 220 may include an image forming element array, an aberration compensator array, a beam-limiting aperture array, and a pre-bending micro-deflector array. The pre-bending micro-deflector array may, for example, be optional and may be present in embodiments in which the focusing lens does not ensure substantially normal incidence of the sub-beams originating from the Coulomb aperture array onto the beam-limiting aperture array, the image forming element array, and / or the aberration compensator array. The image forming element array may be configured to generate multiple sub-beams of the multi-beam path, i.e., primary sub-beams 211, 212, 213. The image forming element array may include, for example, multiple electron beam manipulators, such as micro-deflectors, micro-lenses (or a combination of both), for influencing multiple primary sub-beams 211, 212, 213 of the primary electron beam 202 and for forming multiple parallel images (virtual or real) of the primary beam crossover 203 (one for each of the primary sub-beams 211, 212, and 213). The aberration compensator array may include, for example, a field curvature compensator array (not shown) and an astigmatism compensator array (not shown). The field curvature compensator array may include, for example, multiple micro-lenses for compensating for field curvature aberration of the primary sub-beams 211, 212, and 213. The astigmatism compensator array may include multiple micro-astigmatism correctors for compensating for astigmatism of the primary sub-beams 211, 212, and 213. The beam-limiting aperture array may be configured to define the diameters of the individual primary sub-beams 211, 212, and 213. While Figure 2 shows three primary sub-beams 211, 212, and 213 by way of example, it will be understood that the source conversion unit 220 may be configured to form any number of primary sub-beams. The controller 50 may be connected to various parts of the charged particle beam inspection apparatus 100 of Figure 1, such as the source conversion unit 220, the electron detection device 240, the primary projection arrangement 230, or the motorized stage 209. As will be described in more detail below, the controller 50 may perform various image and signal processing functions.The controller 50 can also generate various control signals for controlling the operation of a charged particle beam inspection device, including a charged particle multi-beam device.

[0044]

[0058] The condenser lens 210 may further be configured to adjust the current of the primary sub-beams 211, 212, 213 in the down beam of the source conversion unit 220 by varying the focusing (collimating) power of the condenser lens 210. Alternatively or additionally, the current of the primary sub-beams 211, 212, 213 may be changed by varying the radial size of the beam-limiting apertures in the beam-limiting aperture array corresponding to the individual primary sub-beams.

[0045]

[0059] The objective lens 231 can be configured to focus the sub-beams 211, 212, and 213 onto the sample 208 for inspection, which in this embodiment can form three probe spots 221, 222, and 223 on the surface of the sample 208.

[0046]

[0060] The beam separator 233 may be, for example, a Wien filter including an electrostatic dipole field and a magnetic dipole field (not shown in FIG. 2 ). In operation, the beam separator 233 may be configured to exert an electrostatic force on individual electrons of the primary sub-beams 211, 212, and 213 by the electrostatic dipole field. In an embodiment, the electrostatic force is equal in magnitude but opposite in direction to the magnetic force exerted on individual primary electrons of the primary sub-beams 211, 212, and 213 by the magnetic dipole field of the beam separator 233. Thus, the primary sub-beams 211, 212, and 213 may pass at least substantially straight through the beam separator 233 with at least substantially zero deflection angle. The direction of the magnetic force depends on the direction of electron motion, and the direction of the electrostatic force is independent of the direction of electron motion. Therefore, because the secondary and backscattered electrons generally travel in the opposite direction compared to the primary electrons, the magnetic force on the secondary and backscattered electrons no longer cancels out the electrostatic force, and as a result, the secondary and backscattered electrons traveling through the beam separator 233 are deflected away from the optical axis 204.

[0047]

[0061] The deflection scanning unit 232 is configured, in operation, to deflect the primary sub-beams 211, 212, and 213 to scan the probe spots 221, 222, and 223 over respective scan areas of a section of the surface of the sample 208. In response to the incidence of the primary sub-beams 211, 212, and 213 or the probe spots 221, 222, and 223 on the sample 208, electrons, including secondary electrons and backscattered electrons, are generated from the sample 208. In this embodiment, the secondary electrons propagate in three secondary electron beams 261, 262, and 263. The secondary electron beams 261, 262, and 263 typically comprise secondary electrons (having electron energies of 50 eV or less) and may also comprise at least a portion of backscattered electrons (having electron energies between 50 eV and the landing energies of the primary sub-beams 211, 212, and 213). The beam separator 233 is positioned to deflect the paths of the secondary electron beams 261, 262, and 263 towards the secondary projection arrangement 250. The secondary projection arrangement 250 then focuses the paths of the secondary electron beams 261, 262, and 263 onto a plurality of detection areas 241, 242, and 243 of the electron detection device 240. The detection areas may be, for example, separate detection elements 241, 242, and 243 positioned to detect corresponding secondary electron beams 261, 262, and 263. The detection areas may generate corresponding signals that are sent to, for example, the controller 50 or a signal processing system (not shown), for example, to construct an image of the corresponding scanned area of ​​the sample 208.

[0048]

[0062] Detector elements 241, 242, and 243 can detect corresponding secondary electron beams 261, 262, and 263. Upon incidence of the secondary electron beams on detector elements 241, 242, and 243, the elements can generate corresponding intensity signal outputs (not shown). The outputs can be directed to an image processing system (e.g., controller 50). Each detector element 241, 242, and 243 can include one or more pixels. The intensity signal output of a detector element can be the sum of the signals generated by all pixels within the detector element.

[0049]

[0063] The controller 50 may include an image processing system including an image acquirer (not shown) and a storage device (not shown). For example, the controller may include a processor, a computer, a server, a mainframe host, a terminal, a personal computer, any type of mobile computing device, etc., or a combination thereof. The image acquirer may include at least a portion of the processing functionality of the controller. Thus, the image acquirer may include at least one or more processors. The image acquirer may be communicatively coupled to the electronic detection device 240 of the apparatus 40, enabling signal communication via electrical conductors, fiber optic cables, portable storage media, IR, Bluetooth, the Internet, a wireless network, a wireless radio, or combinations thereof, among others. The image acquirer may receive signals from the electronic detection device 240, process data contained in the signals, and construct an image therefrom. Thus, the image acquirer may acquire an image of the sample 208. The image acquirer may also perform various post-processing functions, such as generating contours and superimposing indicators on the acquired image. The image acquirer may be configured to adjust the brightness and contrast of the acquired image, etc. The storage may be a storage medium such as a hard disk, a flash drive, cloud storage, random access memory (RAM), or other types of computer-readable memory. The storage may be coupled to the image acquirer and may be used to store raw scanned image data as original images or post-processed images.

[0050]

[0064] The image acquirer can acquire one or more images of the sample based on the imaging signal received from the electronic detection device 240. The imaging signal can correspond to a scanning operation to perform charged particle imaging. The acquired image can be a single image including multiple imaging areas. The single image can be saved to storage. The single image can be an original image that can be divided into multiple regions. Each region can include one imaging area that includes a feature of the sample 208. The acquired image can include multiple images of a single imaging area of ​​the sample 208 sampled multiple times over a period of time. The multiple images can be saved to storage. The controller 50 can be configured to perform image processing steps using multiple images of the same location on the sample 208.

[0051]

[0065] The controller 50 may include measurement circuitry (e.g., an analog-to-digital converter) to obtain a distribution of detected secondary electrons. The electron distribution data collected during the detection time window, in combination with the corresponding scan path data of each of the primary sub-beams 211, 212, and 213 incident on the sample surface, may be used to reconstruct an image of the sample structure under inspection. The reconstructed image may be used to reveal various features of the internal or external structure of the sample 208. Thus, the reconstructed image may be used to reveal any defects that may be present in the sample.

[0052]

[0066] The controller 50 may, for example, further control the motorized stage 209 to move the sample 208 during, before, or after inspection of the sample 208. In an embodiment, the controller 50 may enable the motorized stage 209 to move the sample 208 in a direction, e.g., continuously, e.g., at a constant speed, at least during inspection of the sample. The controller 50 may, for example, control the movement of the motorized stage 209 such that the speed of movement of the sample 208 varies depending on various parameters. For example, the controller may control the stage velocity (including its direction) depending on the characteristics of the inspection step of the scanning process.

[0053]

[0067] 2 shows apparatus 40 using three primary electron sub-beams, it is understood that apparatus 40 may use two or more primary electron sub-beams, and the present disclosure does not limit the number of primary electron beams used in apparatus 40.

[0054]

[0068] Referring now to Figure 3, Figure 3 is a schematic diagram of an exemplary multi-beam apparatus illustrating an exemplary configuration of a source conversion unit of the exemplary charged particle beam inspection apparatus of Figure 1. Apparatus 300 may include an electron source 301, a pre-sub-beam forming aperture array 372 (also referred to as a Coulomb aperture array 372), a condenser lens 310 (similar to condenser lens 210 of Figure 2), a source conversion unit 320, an objective lens 331 (similar to objective lens 231 of Figure 2), and a sample 308 (similar to sample 208 of Figure 2). Electron source 301, Coulomb aperture array 372, and condenser lens 310 may be components of an illumination apparatus included by apparatus 300. Source conversion unit 320 and objective lens 331 may be components of a projection apparatus included by apparatus 300. The source conversion unit 320 may be similar to the source conversion unit 220 of FIG. 2 , except that the image forming element array of FIG. 2 is the image forming element array 322, the aberration compensator array of FIG. 2 is the aberration compensator array 324, the beam limiting aperture array of FIG. 2 is the beam limiting aperture array 321, and the pre-bent micro-deflector array of FIG. 2 is the pre-bent micro-deflector array 323. The electron source 301, the Coulomb aperture array 372, the condenser lens 310, the source conversion unit 320, and the objective lens 331 are aligned with the primary electron optical axis 304 of the apparatus. The electron source 301 generates a primary electron beam 302 generally along the primary electron optical axis 304 and with a (virtual or real) source crossover 301S. The Coulomb aperture array 372 filters out peripheral electrons from the primary electron beam 302 to reduce the resulting Coulomb effect. The primary electron beam 302 may be reduced into a specified number of sub-beams (such as three sub-beams 311, 312, and 313) by a pre-sub-beam forming mechanism Coulomb aperture array 372. Although three sub-beams and their paths are referred to above and in the following description, it is understood that the description is intended to apply to an apparatus, tool, or system using any number of sub-beams.

[0055]

[0069] The source conversion unit 320 may include a beamlet-limiting aperture array 321 with beam-limiting apertures configured to define the outer dimensions of the sub-beams 311, 312, and 313 of the primary electron beam 302. The source conversion unit 320 may also include an imaging element array 322 with image-forming micro-deflectors 322_1, 322_2, and 322_3. There is a respective micro-deflector associated with the path of each sub-beam. The micro-deflectors 322_1, 322_2, and 322_3 are configured to deflect the paths of the sub-beams 311, 312, and 313 toward the electron optical axis 304. The deflected sub-beams 311, 312, and 313 form a virtual image (not shown) of the source crossover 301S. In this embodiment, these virtual images are projected onto the sample 308 by the objective lens 331 and form probe spots on the sample, three probe spots 391, 392, and 393. Each probe spot corresponds to an incidence location of a sub-beam path on the sample surface. The source transformation unit 320 may further include an aberration compensator array 324 configured to compensate for aberrations that may be present in each sub-beam. The aberration compensator array 324 may include, for example, a field curvature compensator array (not shown) with microlenses. The field curvature compensators and microlenses may be configured to compensate the individual sub-beams for field curvature aberrations that are significant at the probe spots 391, 392, and 393. The aberration compensator array 324 may include an astigmatism compensator array (not shown) with micro-astigmatism correctors. The micro-astigmatizers may be controlled to act on the sub-beams, for example, to compensate for astigmatism that would otherwise be present in the probe spots 391, 392, and 393.

[0056]

[0070] The source conversion unit 320 may further include a pre-bent micro-deflector array 323 having pre-bent micro-deflectors 323_1, 323_2, and 323_3 for bending the sub-beams 311, 312, and 313, respectively. The pre-bent micro-deflectors 323_1, 323_2, and 323_3 can bend the paths of the sub-beams onto the beamlet-limiting aperture array 321. In an embodiment, the pre-bent micro-deflector array 323 can be configured to bend the sub-beam paths of the sub-beams toward a plane orthogonal to the plane on the beamlet-limiting aperture array 321. In an alternative embodiment, the focusing lens 310 can adjust the path directions of the sub-beams onto the beamlet-limiting aperture array 321. The collecting lens 310 may, for example, focus (collimate) the three sub-beams 311, 312, and 313 into substantially parallel beams along the primary electron optical axis 304, such that the three sub-beams 311, 312, and 313 are substantially perpendicularly incident on the source conversion unit 320, which may correspond to the beamlet-limiting aperture array 321. In such an alternative embodiment, the pre-bent micro-deflector array 323 may not be necessary.

[0057]

[0071] The image forming element array 322, the aberration compensator array 324, and the pre-bending micro-deflector array 323 may include multiple layers of sub-beam steering devices, some of which may be in the form of an array (e.g., micro-deflectors, micro-lenses, or micro-astigmatists).

[0058]

[0072] In this example of source conversion unit 320, sub-beams 311, 312, and 313 of primary electron beam 302 are deflected by micro-deflectors 322_1, 322_2, and 322_3, respectively, of imaging element array 322 toward primary electron optical axis 304. It is to be understood that the path of sub-beam 311 does not have to be deflected by micro-deflector 322_1, as the path of sub-beam 311 may already coincide with electron optical axis 304 before reaching micro-deflector 322_1.

[0059]

[0073] The objective lens 331 focuses the sub-beams onto the surface of the sample 308, i.e., the objective lens 331 projects three virtual images onto the sample surface. The three images formed on the sample surface by the three sub-beams 311-313 form three probe spots 391, 392, and 393 on the sample surface. In one embodiment, the deflection angles of the sub-beams 311-313 are adjusted to pass through or approach the front focus of the objective lens 331 to reduce or limit off-axis aberrations of the three probe spots 391-393.

[0060]

[0074] In the embodiment of multi-beam inspection tool 300 as shown in Figure 3, the secondary electron beam path, beam separator (similar to Wien filter 233), secondary projection optics (similar to secondary projection optics 250 in Figure 2), and electron detection device (similar to electron detection device 240) have been omitted for clarity. However, it should be apparent that similar beam separators, secondary projection optics, and electron detection devices may be present in this embodiment of Figure 3 to register and generate an image of the sample surface using secondary electrons or backscattered electrons.

[0061]

[0075] At least some of the above components of Figures 2 and 3 may be referred to individually or in combination with one another as manipulator arrays or manipulators because they manipulate one or more charged particle beams or sub-beams.

[0062]

[0076] The above-described embodiments of the multi-beam inspection tool include a multi-beam charged particle device (sometimes referred to as a multi-beam charged particle optical device) with a single charged particle source. The multi-beam charged particle device includes an illumination device and a projection device. The illumination device can generate multiple charged particle beams from an electron beam of the source. The projection device projects the multiple charged particle beams toward a sample. At least a portion of the surface of the sample can be scanned with the multiple charged particle beams.

[0063]

[0077] The multi-beam charged particle device comprises one or more electron-optical devices for manipulating sub-beams of the charged particle multi-beam. The applied manipulation may for example be a deflection of the path of the sub-beams and / or a focusing action applied to the sub-beams. The one or more electron-optical devices may comprise MEMS.

[0064]

[0078] The charged particle device may include a beam path manipulator located in the up-beam of the electron-optical device, and optionally within the electron-optical device. The beam path may be linearly manipulated in a direction perpendicular to the charged particle axis, i.e., the optical axis, by, for example, two sets of electrostatic deflectors operating across the entire beam. The two sets of electrostatic deflectors may be configured to deflect the beam path in orthogonal directions. Each set of electrostatic deflectors may include two electrostatic deflectors arranged consecutively along the beam path. The first electrostatic deflector of each set provides a corrective deflection, and the second electrostatic deflector restores the beam to the correct angle of incidence on the electron-optical device. The corrective deflection provided by the first electrostatic deflector may be overcorrective, so that the second electrostatic deflector can provide a deflection to ensure the desired angle of incidence on the MEMS. The locations of the sets of electrostatic deflectors may be several locations in the up-beam of the electron-optical device. The beam path may be rotationally manipulated. The rotational correction may be provided by a magnetic lens. Additionally or alternatively, rotation correction may be achieved by existing magnetic lenses, such as focusing lens arrangements.

[0065]

[0079] Embodiments of the charged particle device may include alternative and / or additional components in the charged particle path, such as additional lenses and other components, from those shown in and described above with reference to FIGS. 1-3. Specifically, embodiments also include a charged particle projection device that splits a charged particle beam from a source into multiple sub-beams. Multiple respective objective lenses may project the sub-beams onto a sample. In some embodiments, multiple condenser lenses are provided from the objective lens to the up-beam. The condenser lenses focus each sub-beam to an intermediate focus at the up-beam of the objective lens. In some embodiments, a collimator is provided from the objective lens to the up-beam. Correctors may be provided to reduce focus errors and / or aberrations. In some embodiments, such correctors are integrated into the objective lens or positioned directly adjacent to the objective lens. If a collecting lens is provided, such a corrector may additionally or alternatively be integrated into the collecting lens or positioned directly adjacent to the collecting lens and / or positioned at or positioned directly adjacent to the intermediate focus. A detector is provided to detect charged particles emitted by the sample. The detector may be integrated into the objective lens. The detector may be located on the bottom surface of the objective lens facing the sample in use. The collecting lens, objective lens, and / or detector may be formed as MEMS or CMOS devices.

[0066]

[0080] An embodiment of the charged particle device may be implemented using a flood column. The flood column may be used to pre-charge the surface of the sample 208 and set the charging conditions. For example, the flood column may pre-charge the surface of the sample 208 prior to inspection by the charged particle inspection device. This can increase the voltage contrast defect signal to increase the defect detection sensitivity and / or throughput of the charged particle inspection device. The flood column may have a large beam current, which is required to quickly flood or charge the sample. The flood column may be used to provide a relatively large amount of charged particles to charge a predetermined area. The charged particle inspection device can then scan the pre-charged area of ​​the sample 208 to achieve imaging of that area.

[0067]

[0081] The motorized stage 209 can move the sample 208 from a position for charged particle flooding by the flood column to a position for inspection by the charged particle inspection device. In other words, the motorized stage 209 can be used to move the sample 208 to a position for charged particle flooding. The flood column can then flood the sample 208 with charged particles. The motorized stage 209 can then be used to move the sample 208 to a position for inspection. The charged particle inspection device can then be used to inspect the sample 208. Alternatively, the flood column can be part of the charged particle device. The position for charged particle flooding by the flood column can coincide with the position for inspection by the charged particle inspection device 200. Thus, the sample 208 and the motorized stage 209 can remain in a substantially predetermined position after charged particle flooding and before inspection.

[0068]

[0082] The flood column may be integral with the charged particle inspection apparatus or may be mechanically coupled to the charged particle inspection apparatus. There may be an interface between the flood column and the primary column of the charged particle inspection apparatus.

[0069]

[0083] Advances in charged particle device design include increasing the number of components within the device. For example, the number of sources may be increased to increase the number of beams in a multi-beam of charged particles that can be provided. The number of lenses and other charged particle manipulators may also need to be increased to be able to properly manipulate the increased number of source beams. Therefore, the charged particle device must include more components, which need to be integrated into the architecture of the charged particle device. In particular, the flood column may need to be integrated with the SEM.

[0070]

[0084] A problem that arises with the above-identified advances is that there is a limited amount of space available inside a charged particle device for some or all of the components. A component that may be affected by these space constraints is the power interface of a high-voltage power supply to the charged particle device. The high-voltage power supply may be required by one or more sources inside, for example, a flood column, an SEM, and / or other types of charged particle device. The power interface may comprise a connector and a feedthrough. The connector may alternatively be referred to as a power connector. The connector may comprise one or more pins that connect to the high-voltage power supply. The feedthrough may alternatively be referred to as a feedthrough connector. The feedthrough may be located in or on an outer wall of the charged particle device. The feedthrough may be attachable to the connector such that the charged particle device comprises a high-voltage power supply. The feedthrough may also be detachable from the connector.

[0071]

[0085] When a feedthrough and a connector are attached to each other to provide a power interface, an interface is defined between the mating surfaces of the feedthrough and the connector. One end of the interface may be on a conductive surface of the power supply. The other end of the interface may be on another conductive surface of the power supply, such as on a different power pin, or on the grounded outer housing of the charged particle device. The distance between these ends along the interface defines the creep length. The creep length must be greater than the distance along the interface between two conductors at which electrical breakdown and / or flashover can occur between the conductors, i.e., the minimum creep length. Electrical breakdown and / or flashover can be dangerous and can damage the charged particle device and / or the power supply. The stability of the charged particle device can also be adversely affected. The minimum distance over which the creep length must be large between two conductors depends on the potential difference between the conductors, the surface properties of the materials, and the design of the interface. Therefore, the minimum distance depends on the application of the power interface.

[0072]

[0086] When the feedthrough and connector are detached from each other, the creep length requirement should still be met by the connector. The creep length distance between the exposed conductive surface of the power source and another conductive surface must be greater than the minimum creep length distance necessary to avoid electrical breakdown. Another condition that must be met is that electrical flashover should not occur between the conductive surface of the connector and any object that may be in the vicinity of the conductive surface. For example, flashover should not occur to a user's hand or other object that rests on the end of the connector.

[0073]

[0087] In known designs of high voltage connectors, an adequate minimum distance for creep length along each interface is ensured by providing substantial lateral spacing between each conductive surface of the power source and neighboring conductive surfaces. The requirement to provide substantial lateral spacing conflicts with the limited area available at the outer wall of the charged particle device for the feedthrough, or the available volume in the charged particle device.

[0074]

[0088] Embodiments provide a new design for a power interface for a charged particle device. The feedthrough and connector are designed so that the interface, i.e., creep length distance, is bidirectional in a direction parallel to each power wire / pin. Preferably, the connector interface extends substantially within the body of the connector. This reduces the minimum required lateral spacing between each power wire / pin and the nearby ground plane, as well as between adjacent wires / pins. The area required for the feedthrough on the outer wall of the charged particle device is reduced. The volume required within the charged particle device to accommodate the feedthrough can also be reduced.

[0075]

[0089] Figure 4 shows a schematic diagram of a cross section through a power interface according to one embodiment. The power interface includes a connector 401, which is a high voltage power connector 401 according to one embodiment. The power interface also includes a feedthrough 411, which is a high voltage feedthrough connector 411 according to one embodiment. In Figure 4, connector 401 is shown connected to feedthrough 411.

[0076]

[0090] The connector 401 has a metal outer housing 403. Inside the housing is a connector insulating structure 402, sometimes referred to as a connector insulator 402. The connector insulating structure 402 may be a single solid body. The connector insulating structure 402 may be an electrical insulator such as polytetrafluoroethylene (PTFE). The connector insulating structure 402 may include a base 412 and one or more elongated tubular structures 407, each extending from the base 412. The tubular structures 407 may be cylindrical hollow structures, conical hollow structures, or may have any other outer shape, so long as each can have a flush surface with a corresponding opening in the feedthrough insulating structure 409 (as described below). Each tubular structure 407 is hollow to the extent that it includes a channel for receiving a feedthrough pin 408. Each channel in the tubular structure 407 may be straight. Each channel of the tubular structure 407 may include an open end for receiving a feedthrough pin 408 and a closed end that provides a recess in the connector insulating structure 402. Each channel may extend into the base of the connector insulating structure 402 such that the length of the channel is longer than the length of the tubular structure that defines a portion of the channel. The tubular structure 407 may be incorporated into the design of the connector insulating structure 402. In one embodiment, the channels may be defined in the connector insulating structure 402. In one embodiment, the channels may be features of the connector insulating structure 402.

[0077]

[0091] The connector 401 includes one or more connector wire assemblies, sometimes referred to as connector pins, optionally taking the form of connector pins. In one embodiment, the connector wire assemblies include wires 405 and plugs 406 disposed at the ends of the wires 405. The plugs 406 may be at the closed ends of the channels, thereby providing a recess in the connector insulating structure 402. The plugs 406 may provide a recess in the closed ends of the channels. The wires 405 may be connected to a high-voltage power source. The wires 405 may be, for example, commercially available wires stripped of their outer jackets and braiding. A potting material may be provided between the wires 405 and the connector insulating structure 402. The housing 403 is electrically insulated from each wire 405 by at least the connector insulating structure 402.

[0078]

[0092] The feedthrough 411 includes a feedthrough insulating structure 409. The feedthrough insulating structure 409, sometimes referred to as a feedthrough insulator 409, may be a single solid body. The feedthrough insulating structure 409 may be an electrical insulator such as Al2O3. An advantage of using Al2O3 is that it can be securely fastened, for example, brazed, to a flange on the housing of the charged particle device in a leak-tight manner. This is preferable to using plastic, which cannot be brazed. While the plastic feedthrough insulating structure 409 can be glued to the charged particle device, the adhesive is likely to fail over time. Plastic can also outgas when directly exposed to a vacuum, potentially reducing the quality of the vacuum. Unlike Al2O3, plastic can also degrade or melt during a bakeout process to improve the vacuum. Note that the connector 401 may be detached from the feedthrough 411 during such a bakeout process, allowing for the use of PTFE in the connector insulating structure 402. Additionally, as described in more detail below, the feedthrough insulating structure 409 and the connector insulating structure 402 engage with each other. The engagement between the soft PTFE and the hard Al2O3 material can be stronger than the engagement between two hard materials, which may damage each other.

[0079]

[0093] The feedthrough insulation structure 409 has an outermost end surface 409a with one or more openings 409b that may be defined in the outermost end surface 409a. The openings 409b may define recesses that may be cylindrical in shape that extend from the outermost end surface 409a into the feedthrough insulation structure 409. The openings 409b may define feedthrough channels within the feedthrough insulation structure.

[0080]

[0094] The feedthrough 411 includes one or more feedthrough pins 408. The feedthrough pins 408 may be disposed within one of the feedthrough channels in the feedthrough insulating structure 409. Each feedthrough pin 408 may be linear, e.g., linear / cylindrical. The cross section of the feedthrough pin 408 may be shaped similarly to the cross section of the channel of the tubular structure 407 of the connector 401. The ends of the feedthrough pins 408 may be positioned to be received by a corresponding plug 406 of the connector 401 with a press fit. The feedthrough pins 408 may extend, i.e., protrude, from the corresponding feedthrough channel. The ends of each feedthrough pin 408 may protrude from the feedthrough insulating structure 409. This allows the feedthrough pins 408 to engage with the corresponding plug without volume collision interference with the feedthrough insulating structure 409. That is, the feedthrough pins engage with the corresponding plug inside the insulating structure 409. One or more feedthrough pins 408 may thereby be electrically connected to a respective one or more wires 405 to provide high voltage power to the charged particle device.

[0081]

[0095] The connector 401 may have a flange 404. The flange 404 can be used to secure the connector 401 to an outer wall of the charged particle device with bolts or the like. The flange 404 is sealed when secured to the outer wall. The flange 404 may have an end face 404a that may be substantially composed of an end face of the connector insulating structure 402. The part of the charged particle device to which the flange 404 of the connector 401 is secured may be part of a housing of a feedthrough 411, such as a corresponding feedthrough flange 410. The end face 404a of the connector 401 faces and can contact a corresponding end face 410a of the feedthrough flange 410. The housing of the feedthrough 411 may be electrically insulated from each feedthrough pin 408 by at least a feedthrough insulating structure 409.

[0082]

[0096] The feedthrough insulating structure 409 is insertably engageable with the connector insulating structure 402. Each opening 409b of the feedthrough insulating structure 409 is positioned, i.e., shaped, to receive a tubular structure 407 of the connector insulating structure 402. The feedthrough channel may be cylindrical, conical, or have any other shape so as to be able to receive the tubular structure 407 of the connector insulating structure 402. The feedthrough channel may have a cross-section that may be shaped to be circular or any other shape.

[0083]

[0097] The connector insulating structure 402 is also insertably engagable with the feedthrough insulating structure 409. Each feedthrough pin 408 is received by an opening in a corresponding tubular structure 407, which is a channel for the feedthrough pin 408. The cross-sections of the channel and the corresponding pin may be substantially the same. The end of each feedthrough pin 408 may be received by a plug 406 such that the feedthrough pin 408 is electrically connected to a corresponding wire 405.

[0084]

[0098] When the connector 401 and the feedthrough 411 are connected, an interference fit may exist between the feedthrough insulating structure 409 and the connector insulating structure 402. That is, there may be a substantial interference fit, i.e., substantially no gap or peripheral gap, between the feedthrough insulating structure 409 and the connector insulating structure 402. There may also be a substantial interference fit, i.e., substantially no gap or peripheral gap, between each feedthrough pin 408 and the tubular structure 407 that receives it. Thus, engagement between the connector 401 and the feedthrough 411 may exclude substantially all air from inside the connecting power interface.

[0085]

[0099] 5 illustrates the interface 501 of the connector 401 at the interface between the feedthrough isolation structure 409 and the connector isolation structure 402 according to the embodiment shown in FIG. 4. The interface 501 is a creep length distance that must exceed the design minimum creep length in the range of operating potential differences. A first end 501a of the interface 501 is the conductive surface of the feedthrough pin 408. A second end 501b of the interface is the ground of the charged particle device 410. The connector interface extends substantially to the connector isolation structure 409.

[0086]

[0100] The interface 501 extends substantially bidirectionally, at least with respect to the connector, in a direction parallel to the longitudinal axis of the feedthrough pin 408. A first portion 501c of the interface 501 parallel to the longitudinal axis of the feedthrough pin 408 is along the outer surface of the tubular structure 407 into which the feedthrough pin 408 is inserted. A second portion 501d of the interface 501 substantially parallel to the longitudinal axis of the feedthrough pin 408 is along the opposing surface of the connector insulating structure 402. The first end 501a and second end 501b of the interface 501 are laterally spaced apart from one another, with the interface 501 extending from the conductive surface of the feedthrough pin 408 toward the periphery of the end face of the connector insulating structure 402. The substantial length of the interface is the first portion 501c and the second portion 501d in both directions.

[0087]

[0101] The feedthrough 411 has a corresponding interface that abuts the interface 501 of the connector 401. Thus, the interface between the feedthrough insulating structure 409 and the connector insulating structure 402 has the same characteristics described above for the bidirectional portion of the feedthrough pin 408 that is parallel to the longitudinal axis.

[0088]

[0102] The above-described arrangement of the two-way portions 501c, 501d of the interface 501 advantageously allows the lateral spacing between the interface ends 501a, 501b to be smaller than that required for known feedthroughs having creep length distances greater than the same minimum creep length.

[0089]

[0103] Also, in the embodiment, it should be noted that the length of the distance over which the interface 501 of the connector 401 is recessed into the connector insulating structure 402, e.g., the length of the first portions 501c and 501d in both directions, is smaller than the distance over which the plug is recessed into the connector insulating structure 402 relative to the end face 404a of the connector 401. The plug 406 may be recessed further into the connector insulating structure 402 than the interface 501, as shown in FIG. 5 . That is, the length of the channel in the connector insulating structure 402, e.g., the length between the end face 404a of the connector 401 and the closed end of the channel, may be longer than the length of the interface to the connector insulating structure 402, which may, for example, substantially correspond to the length of the first portion 501c of the interface 501 or the second portion 501d of the interface 501. The interface of the connector extends into the connector insulating structure 402. The interface end face 404 has an outer periphery that may be the furthest extent of the flange 401 from the channel in the insulating structure of the connector. The interface may be interposed between the outer periphery of the end face and a channel defined in the end face. Thus, the interface of the connector may extend into the insulating structure at the connector end face around the channel, e.g., tubular structure, as shown in Figures 5 and 6.

[0090]

[0104] As will be described in detail later, when the connector 401 and the feedthrough 411 are disconnected from each other, the distance along the channel between each plug 406 and the end face 410a may be greater than the distance at which flashover could occur between the plug 406 and a conductive object at the end face 404a of the connector 401. That is, the distance along the channel between each plug 406 and the end face 410a of the feedthrough flange may be greater than the distance between the plug 406 and a conductive object at the end face 404a of the connector 401. This reduces the risk of such flashover occurring if high-voltage power is supplied to the connector 401 when the connector is disconnected from the feedthrough 411. Also, the creep length along the surface of the connector insulating structure 402 may be greater than the distance at which electrical breakdown could occur to a conductive object at the end face 404a, i.e., the minimum creep length. Therefore, by providing a recess for the plug 406 in the connector insulating structure 402, preferably on the surface of the closed end of the channel, the safety of the connector 401 is improved.

[0091]

[0105] Provided below are further details that implementation of components of a power interface according to embodiments may include.

[0092]

[0106] Embodiments include a power interface with a single wire / pin. The feedthrough 411 may include only a single feedthrough pin 408. The corresponding connector 401 may include only a single connector wire assembly, i.e., a single wire with a plug on its end.

[0093]

[0107] Embodiments also include power interfaces having multiple wires / pins. The feedthrough 411 may include multiple feedthrough pins 408. The connector 401 may include multiple respective connector wire assemblies. For example, the number of feedthrough pins 408 or wires 405 may be between 1 and 10. In preferred embodiments, the number of feedthrough pins 408 or wires 405 may be 2 or 5.

[0094]

[0108] If the feedthrough 411 includes multiple feedthrough pins 408 and connector wire assemblies, an additional condition must be satisfied by each interface: the creep length distance. The creep length distance between any two conductive surfaces of different feedthrough pins 408 and / or connector wire assemblies must be longer than the distance at which electrical breakdown occurs, i.e., the minimum creep length. This condition is satisfied by the interface between any two feedthrough pins 408 and / or connector wire assemblies being substantially bidirectional in a direction parallel to the longitudinal axis of each feedthrough pin 408. This allows for smaller lateral spacing between adjacent feedthrough pins 408 and connector wire assemblies than in known feedthroughs. The potential difference between different feedthrough pins 408 may be smaller than the potential difference between the feedthrough pin and ground. Therefore, the required minimum creep length distance, i.e., the minimum creep length, may be smaller between different feedthrough pins 408 and connector wire assemblies.

[0095]

[0109] FIG. 6 shows a schematic diagram of a connector insulating structure 402 for use with a feedthrough 411 having five feedthrough pins 408. Five tubular structures 407 protrude from a base 412 of the connector insulating structure 402. Each tubular structure 407 has a circular cross-section, with a central opening of the circular cross-section being a linear channel positioned to receive a feedthrough pin 408. The tubular structures 407 have end portions 407a that may be flush with the flange end face 404a. Embodiments also include variations in which the end portions 407a are recessed into or protrude from the flange end face 404a. Each channel has an open end that receives the feedthrough pin 408 and a closed end that is recessed within the connector insulating structure 402. As shown in FIGS. 4 and 5, the closed end of each channel carries a plug 406 of a connector wire assembly. Each plug 406 thereby provides a recess within the connector insulating structure 402, preferably within the surface of the closed end of the channel.

[0096]

[0110] The distance along the channel between each plug 406 and the end face 404a of the connector 401 may be greater than the flashover distance between the plug 406 and the conductive object at the end face 404a. That is, the distance along the channel between each plug 406 and the end face 404a of the connector 401 may be greater than the distance between the plug 406 and the conductive object at the end face 404a. This reduces the risk of such flashover occurring if high-voltage power is supplied to the connector 401 when the connector 401 is disconnected from the feedthrough 411. Additionally, the creep length along the surface of the connector insulating structure 402 may be greater than the distance at which electrical breakdown can occur with respect to the conductive object at the end face 404a, i.e., the minimum creep length.

[0097]

[0111] 7A, 7B, and 7C show different schematic views of a feedthrough 411 having five feedthrough pins 408. FIG. 7A is a substantially end view along the longitudinal axis of one of the feedthrough pins 408. The illustrated end of the feedthrough 411 is the end that is received by the connector 401. FIG. 7B is a substantially side view of the feedthrough 411. FIG. 7C is another view of the end of the feedthrough 411 that is received by the connector 401.

[0098]

[0112] For each of the feedthrough pins 408, the feedthrough insulating structure 409 has a respective opening extending from an end face of the feedthrough insulating structure 409 into the feedthrough insulating structure 409. Each opening may be cylindrical, conical, or any other shape as long as it corresponds to the outer shape of the tubular structure 407 of the connector 401 that it is arranged to receive. Each feedthrough pin 408 is arranged within one of the openings in the feedthrough insulating structure 409. An end of each feedthrough pin 408 may protrude from the feedthrough insulating structure 409. In a plane perpendicular to the longitudinal axis of one of the feedthrough pins 408, the feedthrough insulating structure 409 may be surrounded by a portion 410 of the charged particle device to which the flange 404 of the connector 401 is fixed. The portion 410 of the charged particle device to which the flange 404 of the connector 401 is fixed may be a flange of the feedthrough 411. The flange 404 of the connector 401 may be bolted to the charged particle device.

[0099]

[0113] FIG. 8 illustrates the connection between the end of the feedthrough pin 408 and the plug 406. The end of the feedthrough pin 408 may be press-fit into the plug 406. The plug 406 may be secured to the end of the wire 405 by a crimp 802 or other attachment mechanism. That is, the feedthrough pin engages with a corresponding plug in the insulating structure 409. The plug 406 may be recessed further into the connector insulating structure than the interface 501, as shown in FIG. 8. The closed end of the channel in the connector insulating structure may be farther from the end face of the connector than the length of the interface to the insulating structure. The interface of the connector extends substantially into the insulating structure 402.

[0100]

[0114] When the power connector 401 is manufactured, each wire may be provided within a channel 801 of the connector insulating structure 402 to receive the wire 405. The channel 801 may then be filled with a potting material so that there are no gaps between the wires and the connector insulating structure 402.

[0101]

[0115] Figure 9A shows a schematic cross-section of a power interface according to one embodiment, illustrating the components of high voltage connector 401 and high voltage feedthrough 411 as they connect together. Figure 9B shows a schematic cross-section of just feedthrough 411 in the embodiment shown in Figure 9A. In the embodiments shown in Figures 9A and 9B, feedthrough 411 is a multi-pin feedthrough, although in other embodiments the feedthrough may have only a single pin.

[0102]

[0116] The connector 401 shown in Figure 9A and the feedthrough 411 shown in Figures 9A and 9B may include components corresponding to those described above with reference to Figures 4 to 8. Although not shown in Figures 9A and 9B, the connector 401 may include additional features such as those shown in Figures 4 to 8.

[0103]

[0117] 9A and 9B, the flange 404 of the connector 401 may be secured to the feedthrough 411 and / or the charged particle device by bolts 901. Although not shown in FIG. 9A, the flange 404 of the connector 401 may include one or more alignment pins for insertion into respective alignment openings of the feedthrough 411 and / or the charged particle device. Similarly, the flange 404 of the connector 401 may include one or more alignment openings for receiving respective alignment pins of the feedthrough 411 and / or the charged particle device.

[0104]

[0118] As shown in FIGS. 9A and 9B , the feedthrough isolation structure 409 includes a sleeve 902. The sleeve may be an integral part of the feedthrough isolation structure 409. In a plane perpendicular to the longitudinal axis of the feedthrough pin 408, the sleeve 902 may surround all of the feedthrough pin 408. The sleeve 902 may extend as a tubular portion further from the base of the feedthrough isolation structure 409 than other portions of the feedthrough isolation structure 409, such as the top surface 903. The connector isolation structure 402 may include a corresponding opening for receiving the sleeve 902 and the top surface 903 such that an interference fit exists between the connector isolation structure 402 and the feedthrough isolation structure 409. The sleeve may increase the creep length distance over the interface between the conductive surface of each feedthrough pin 408 and a ground plane, which may be part of the charged particle device 410 or the connector housing. The potential difference between the feedthrough pin 408 and such a ground plane may be greater than the potential difference between adjacent feedthrough pins. Therefore, a longer distance along the interface may be required that is the creep length distance from the conductive surface of each feedthrough pin 408 to such ground plane.

[0105]

[0119] Figure 10 shows a schematic cross-sectional view of a high-voltage power interface according to one embodiment. The power interface includes a high-voltage connector 401 that connects to a high-voltage feedthrough 411. In the embodiment shown in Figure 10, the feedthrough has only a single pin surrounded by a sleeve 902. The connector 401 includes a single wire 405, a plug 406, and a single tubular structure 407 having a conical profile. Although not shown in Figure 10, the connector 401 may include additional features, such as those shown in Figures 4-9B.

[0106]

[0120] Feedthrough 411 includes a single feedthrough pin 408 and a feedthrough insulating structure 409 shaped to receive tubular structure 407 of connector 401. Although not shown in Figure 10, feedthrough 411 may include additional features such as those shown in Figures 4-9.

[0107]

[0121] As shown in FIG. 10, the connector may be secured to the feedthrough by a bolt 901 .

[0108]

[0122] In the embodiment shown in FIG. 10, by providing a two-way interface between the feedthrough and the connector 401, the volume of the feedthrough 411 on the charged particle device may again be smaller than in the prior art.

[0109]

[0123] Figure 11A shows a cross section through a high voltage connector of a high voltage power interface according to another embodiment, and Figure 11B shows a cross section through the high voltage power interface when connecting the connector shown in Figure 11A to a feedthrough of the power interface according to this embodiment.

[0110]

[0124] 11A, in this embodiment, the connector includes a connector insulator 1102. For each connector wire assembly, there is a channel 1103 extending from an end face of the connector insulator 1102 into the connector insulator 1102, and the connector wire assembly is recessed within the channel 1103.

[0111]

[0125] For each connector wire assembly, the connector insulator 1102 may include a connector tubular structure 1101. Each connector tubular structure 1101 is an insulator. Each connector tubular structure 1101 surrounds at least a portion of a wire 405. The inner surface of each connector tubular structure 1101 may be in close contact with the wire 405 it surrounds, such that there is an interference fit between the connector tubular structure 1101 and the wire 405, i.e., there is no substantial gap. The end of the wire 405 includes a plug 406. The plug 406 may not be surrounded by the connector tubular structure 1101. Each connector tubular structure 1101 is positioned to protrude from the closed end 1103a of the corresponding channel 1103. In a plane perpendicular to the longitudinal axis of each channel 1103, there may be a substantially annular gap between the connector tubular structure 1101 and the channel 1103.

[0112]

[0126] Thus, in this embodiment, the connector insulator 1102 may be a multi-part structure comprising a main body and one or more further connector tubular structures 1101. The main body may be PTFE, and each connector tubular structure 1101 may be, for example, ceramic. As shown in FIG. 11A, each connector tubular structure may extend completely through the connector insulator 1102 to the base of the connector.

[0113]

[0127] As shown in FIG. 11B , the feedthrough of this embodiment differs from the previous embodiments in that it includes a feedthrough isolation structure 1202 for each of the feedthrough pins 1201. Thus, in the case of a multi-pin feedthrough, the feedthrough includes multiple feedthrough isolation structures 1202. The feedthrough may include additional parts and components that form what is shown in FIG. 11B . For example, FIG. 11B shows only the ends of the feedthrough pins 1201. However, the feedthrough may include feedthrough pins 1201 that extend into the charged particle device. There may be an interference fit between all components of the feedthrough. For example, there may be no gaps within each feedthrough isolation structure 1202, such as between the pins 1201 and the feedthrough isolation structures 1202.

[0114]

[0128] In this embodiment, each feedthrough isolation structure 1202 is a tubular structure that surrounds the feedthrough pin 1201 in a plane perpendicular to the longitudinal axis of the feedthrough pin 1201. The inner surface of each feedthrough isolation structure 1202 may be in intimate contact with the feedthrough pin that it surrounds, such that there is no substantial gap between the feedthrough isolation structure 1202 and the feedthrough pin 1201.

[0115]

[0129] Each feedthrough insulating structure 1202 protrudes from a feedthrough base 1203 of the feedthrough. The feedthrough base 1203 may be metallic or ceramic. In particular, the feedthrough base 1203 may be metallic and electrically grounded. Each feedthrough insulating structure 1202 may be ceramic and may be fixed to an opening for the feedthrough through the feedthrough base 1203, for example, by a brazing process. Each feedthrough insulating structure 1202 protrudes further from the feedthrough base 1203 than the feedthrough pin 1201 that it surrounds. The end of the feedthrough pin is therefore recessed within the feedthrough insulating structure 1202.

[0116]

[0130] Each channel 1103 of the connector insulating structure 1102 is positioned to receive a corresponding feedthrough insulating structure 1202 of the feedthrough. The outer wall of the feedthrough insulating structure 1202 may be in substantial contact with the inner wall of the channel 1103 such that there is substantially no gap between the outer wall of the feedthrough insulating structure 1202 and the inner wall of the channel 1103.

[0117]

[0131] The end of each feedthrough insulating structure 1202 that protrudes further from the feedthrough base 1203 than the feedthrough pin 1201 is received in the substantially annular gap between the connector tubular structure 1101 and the channel 1103 .

[0118]

[0132] An end of each feedthrough insulating structure 1202 is arranged to receive a plug 406 and at least a portion of the connector tubular structure 1101 included in the connector. The feedthrough pins 1201 are arranged to electrically connect with the plugs 406. The plugs 406 may receive the feedthrough pins 1201 by press-fitting.

[0119]

[0133] There may be an interference fit between the connector and the feedthrough so that there is minimal, and preferably substantially no, gap in the power interface.

[0120]

[0134] The connector may be secured to the feedthrough, for example by bolts, as described in the previous embodiments. When the connector is secured to the feedthrough, there may be substantially no air within the connection.

[0121]

[0135] In this embodiment, when the connector and feedthrough are connected to each other, a two-way interface exists between each plug 406 and a ground plane, which is a creeping length distance. The ground plane may be, for example, a surface of the feedthrough base 1203, or another surface of the charged particle device or the connector housing. The interface is bidirectional in a direction parallel to the power wires or feedthrough pins 1201. The connector interface includes a first portion 1101a extending from the plug 406 along the outer surface of the connector tubular structure 1101 and abutting the inner surface of the feedthrough insulating structure 1202. The interface also includes a second portion 1102b extending along the inner surface of the channel 1103 of the connector insulator 1102 and abutting the outer surface of the feedthrough insulating structure 1202. Thus, the majority of the interface is parallel to the wires 405 and / or the feedthrough pins 1201.

[0122]

[0136] The feedthrough of this embodiment may have a single feedthrough pin 1201 or multiple feedthrough pins 1201. In feedthrough embodiments with multiple feedthrough pins 1201, there is at least a similar two-way interface between any two of the plugs 406 that is a creeping length distance with major portions 1101 a, 1102 b parallel to the wire 405 and / or feedthrough pin 1201.

[0123]

[0137] The plug 406 is recessed with the connector. The distance along the channel 1103 between the plug 406 and the end face 1102a of the connector insulating structure 1102 may be greater than the flashover distance between the plug 406 and a conductive object at the end face 1102a. This reduces the risk of such flashover occurring if a high-voltage power source is applied to the connector when the connector is disconnected from the feedthrough. Additionally, the creep length along the surface of the connector insulating structure 1102 may be greater than the distance at which electrical breakdown can occur with respect to a conductive object at the end face 1102a of the connector insulating structure 1102, i.e., the minimum creep length.

[0124]

[0138] This embodiment therefore offers similar advantages to the previously described embodiment: the orientation of the interface allows the creep length requirements for high voltage operation to be met in a manner that allows the feedthrough to be housed within a smaller area of ​​the outer housing of the charged particle device than known techniques, and also reduces the volume required within the charged particle device to house the feedthrough.

[0125]

[0139] In an embodiment, the feedthrough pins 408 may be made from, for example, copper, stainless steel, or tungsten.

[0126]

[0140] In an embodiment, the wire 405 may be made from, for example, tinned copper, as is widely available commercially. The wire 405 may be coated with polyethylene.

[0127]

[0141] In an embodiment, the plug 406 may be made from, for example, beryllium copper (becu), stainless steel, or titanium.

[0128]

[0142] The connector insulating structure may be made from, for example, PTFE, PEEK, or silicone rubber.

[0129]

[0143] The feedthrough insulating structure may be made from, for example, Al2O3 and / or ceramic.

[0130]

[0144] The housing of connector 401 may be made from a metal such as stainless steel.

[0131]

[0145] The housing of the charged particle device may be made from a metal such as iron.

[0132]

[0146] The potential difference between one or more of the feedthrough pins 408 and the local ground potential may be, for example, about 20 kV to 50 kV, preferably about 25 kV to 35 kV.

[0133]

[0147] The potential difference between any two of the feedthrough pins 408 may be, for example, about 3 kV to 20 kV, preferably about 5 kV to 15 kV.

[0134]

[0148] In an embodiment, a gasket may be provided between connector 401 and feedthrough 411 so that the connection is watertight. The gasket may be, for example, an O-ring on connector 401 and / or feedthrough 411.

[0135]

[0149] In an embodiment, the minimum distance between each plug 406 and the end face of the connector 401 may be at least 50 mm.

[0136]

[0150] In an embodiment, the diameter of each feedthrough pin 408 may be, for example, approximately 3 mm to 5 mm.

[0137]

[0151] In an embodiment, the diameter of each wire 405 may be, for example, about 3 mm to 5 mm.

[0138]

[0152] In an embodiment, the length from end to end of connector 401 may be, for example, approximately 100 mm to 300 mm, and is preferably 150 mm.

[0139]

[0153] As shown in at least FIG. 7B , the feedthrough 411 may be a double-sided structure. One side of the feedthrough 411 has a feedthrough insulating structure 409 arranged to be received by the connector insulating structure 402. The feedthrough may have an outermost end 411a, which may be the outermost end surface 409a of the feedthrough insulating structure 409. The other side of the feedthrough 411 is inside the charged particle device and is connected to a power supply line. The power supply line may be connected to one or more components inside the charged particle device, such as the source of a flood column. The feedthrough 411 may have an innermost end 411b inside the charged particle device. The innermost end may be a surface of the feedthrough insulating structure 409. The distance between the innermost end 411b or outermost end 411a of the feedthrough insulating structure 409 and a flange 410, which may be at least connected to the wall of the charged particle device, may range from 40 mm to 60 mm, and is preferably 50 mm. Therefore, the length from end to end of feedthrough 411 may be in the range of 80 mm to 120 mm, and is preferably 100 mm.

[0140]

[0154] In a multi-pin implementation according to an embodiment, the minimum lateral spacing between adjacent feedthrough pins 408 may be, for example, in the range of about 10 mm to 15 mm, preferably about 12 mm.

[0141]

[0155] In an embodiment, the minimum diameter of the feedthrough 411 may depend on the number of feedthrough pins 408. For five feedthrough pins 408, the minimum diameter of the feedthrough 411 may range from about 40 mm to 50 mm, and is preferably about 46 mm.

[0142]

[0156] The embodiments include numerous modifications and variations to the above techniques.

[0143]

[0157] The charged particle device in which the feedthrough is installed may be any kind of vacuum tool and / or vacuum device, for example the charged particle device may be an SEM, a flood column or a lithography device.

[0144]

[0158] The charged particle device 401 may in particular be a multi-beam charged particle device, which may include any of the components of the devices described above with reference to Figures 1, 2 and 3.

[0145]

[0159] The multi-beam charged particle device may be a component of an inspection (or metro inspection) tool or part of an electron beam lithography tool. Multi-beam charged particle devices can be used in many different applications, including not only SEM but also electron microscopy in general, and lithography.

[0146]

[0160] A multi-beam charged particle device may include two or more charged particle sources.

[0147]

[0161] Embodiments include the following numbered clauses:

[0148]

[0162] Clause 1: A connector for electrically connecting a feedthrough of a vacuum tool to a high voltage power supply, comprising: a connector wire assembly configured to electrically connect with the high voltage power supply; and a connector insulator having a channel extending within the connector insulator and configured to receive a feedthrough pin so as to electrically connect the connector wire assembly with the feedthrough pin, wherein the connector insulator is configured to engage with the feedthrough so that an interface surface of the connector insulator extends substantially in two directions in the direction of a longitudinal axis of the channel, and optionally the wire assembly comprises a plug for receiving an end of the feedthrough pin.

[0149]

[0163] Clause 2: The connector of clause 1, wherein the interface extends substantially within the connector insulator.

[0150]

[0164] Clause 3: The connector of clause 1 or 2, wherein the connector wire assembly has an end face that provides a recess within the connector insulator.

[0151]

[0165] Clause 4: The connector according to any one of clauses 1 to 3, wherein the plug is recessed further in the connector insulating structure than the interface.

[0152]

[0166] Clause 5: A connector according to any one of the preceding clauses, wherein the plug provides a recess at the closed end of the channel.

[0153]

[0167] Clause 6: A connector as described in any one of clauses 1 to 5, wherein the connector comprises two or more connector wire assemblies configured to electrically connect to respective feedthrough pins, and wherein either there is a substantially bidirectional interface between two conductive surfaces of the feedthrough pins and / or connector wire assemblies, or the interface is substantially bidirectional between two conductive surfaces of the feedthrough pins and / or connector wire assemblies.

[0154]

[0168] Clause 7: A connector as described in any one of clauses 1 to 6, wherein there is either a substantially bidirectional interface extending from the conductive surface of the feedthrough pin and / or connector wire assembly to the conductive surface of the feedthrough, connector, and / or vacuum tool comprising the feedthrough, or the interface is substantially bidirectional.

[0155]

[0169] Clause 8: A connector according to any one of the preceding clauses, wherein the connector wire assembly has an end face that provides a recess within the connector insulator.

[0156]

[0170] Clause 9: A connector according to any one of the preceding clauses, wherein the connector further comprises a housing configured to provide an outer surface that is electrically insulated from the power source.

[0157]

[0171] Clause 10: A connector described in any one of clauses 1 to 9, wherein the connector further comprises a connector housing arranged to provide an outer surface of the connector that is electrically insulated from the power source, optionally a connector insulator is inside the housing and comprises insulating material, optionally the connector insulator is configured to engage with at least a portion of a feedthrough insulator of an insulating material of the feedthrough, optionally a channel extends from an end face of the connector insulator into the connector insulator and is preferably linear, the end face of the connector insulator is an end face of the connector, the channel has an open end at the end face and a closed end that provides a recess inside the connector insulator, optionally a connector wire assembly is inside the channel, and optionally when the connector is connected to the feedthrough a substantially two-directional boundary surface extends from a conductive surface of the feedthrough pin and / or connector wire assembly towards the periphery of the end face.

[0158]

[0172] Clause 11: A connector as described in Clause 10, when subject to Clause 6 (i.e., when the connector comprises two or more connector wire assemblies configured to electrically connect to respective feedthrough pins and the interface is substantially bidirectional between two conductive surfaces of the feedthrough pins and / or connector wire assemblies), wherein the connector comprises two or more linear channels in the connector insulator for each of the two or more connector wire assemblies, each linear channel being positioned to receive a feedthrough pin of the feedthrough, and each connector wire assembly being within one of the plurality of linear channels.

[0159]

[0173] Clause 12: A connector as described in clause 10 or 11, wherein the minimum distance between each connector wire assembly and the end face is greater than the distance at which flashover could occur between the connector wire assembly and an object on the end face when a high voltage is applied to the connector wire assembly.

[0160]

[0174] Clause 13: A connector described in any one of clauses 10 to 12, wherein each connector wire assembly comprises a wire and a plug attached to an end of the wire, and optionally the plug is for receiving an end of a feedthrough pin.

[0161]

[0175] Clause 14: A connector according to any one of clauses 10 to 13, wherein each connector wire assembly is at a closed end of a channel.

[0162]

[0176] Clause 15: A connector as described in clauses 10 to 14, wherein the connector insulator comprises a base and one or more elongated tubular structures, each tubular structure fixed to the base at an end opposite the end face of the channel, and each connector wire assembly extending through at least a portion of the base.

[0163]

[0177] Clause 16: A connector as described in Clause 15, wherein the surface providing a substantially bidirectional boundary surface extending from the conductive surface of the feedthrough pin and / or connector wire assembly toward the periphery of the end face at least partially follows the outer surface of at least one of the one or more tubular structures.

[0164]

[0178] Clause 17: A connector as described in clause 15 or 16, wherein each channel extends within the base.

[0165]

[0179] Clause 18: A connector described in any one of clauses 15 to 16, wherein in a plane perpendicular to the longitudinal axis of each channel, each channel of the connector insulator is a central hole of the circular cross section of one of the tubular structures.

[0166]

[0180] Clause 19: A connector described in any one of clauses 11 to 18, wherein the surface providing a substantially bidirectional boundary surface extending from the conductive surface of the feedthrough pin and / or connector wire assembly toward the periphery of the end face at least partially follows the outer surface of at least one of the one or more tubular structures.

[0167]

[0181] Clause 20: A connector as described in any one of clauses 10 to 19, wherein each channel extends within the base.

[0168]

[0182] Clause 21: A connector described in any one of clauses 10 to 20, wherein a potting material is provided between each connector wire assembly and preferably the base so that there is substantially no void between each connector wire assembly and the base.

[0169]

[0183] Clause 22: The connector according to any one of clauses 1 to 21, wherein the connector insulator is a solid body.

[0170]

[0184] Clause 23: A connector as described in Clause 22, wherein the connector insulator has a connector tubular structure inside each channel, each connector tubular structure arranged to protrude from the closed end of the corresponding channel so that in a plane perpendicular to the longitudinal axis of each channel there is a substantially annular gap between the connector tubular structure and the channel, each connector tubular structure being an insulator and configured to surround at least a portion of the connector wire assembly, each channel arranged to receive a corresponding feedthrough tubular structure of the feedthrough, the feedthrough tubular structure being received within the gap.

[0171]

[0185] Clause 24: The connector of clause 23, wherein each connector tubular structure is ceramic.

[0172]

[0186] Clause 25: A connector as described in any one of clauses 1 to 24, wherein the shortest distance along each bidirectional boundary surface is greater than the electrical breakdown distance when the connector is operated at high voltage.

[0173]

[0187] Clause 26: A connector as described in Clause 6 or any one dependent thereon, wherein the minimum distance along the interface extending between any two conductive surfaces of the feedthrough pin and / or connector wire assembly is greater than the electrical breakdown distance when the connector is operated at high voltage.

[0174]

[0188] Clause 27: The connector according to any one of clauses 9 to 26, wherein the housing is metal.

[0175]

[0189] Clause 28: The connector of any one of clauses 1 to 27, wherein the connector insulator comprises PTFE, PEEK, and / or silicone rubber.

[0176]

[0190] Clause 29: A connector described in any one of clauses 1 to 28, wherein the number of connector wire assemblies is 1 to 10.

[0177]

[0191] Clause 30: A connector as described in any one of clauses 1 to 29, wherein the potential difference between one or more of the connector wire assemblies and the local ground potential is between about 20 kV and 50 kV.

[0178]

[0192] Clause 31: A connector according to any one of clauses 9 to 30, wherein the housing comprises a connector flange for securing the connector to a vacuum tool.

[0179]

[0193] Clause 32: A connector as described in Clause 31, wherein the connector flange comprises one or more alignment pins for insertion into respective alignment openings of the feedthrough, and / or the connector flange comprises one or more alignment openings for receiving respective alignment pins of the feedthrough.

[0180]

[0194] Clause 33: A feedthrough for supplying high voltage power to a device in a vacuum tool, comprising: a feedthrough insulator configured to engage with a connector; and a feedthrough pin protruding from a concave surface of the feedthrough insulator, the feedthrough pin configured to electrically connect to a connector wire assembly of the connector, and the feedthrough insulator having a boundary surface extending substantially in two directions in the direction of a longitudinal axis of the feedthrough pin.

[0181]

[0195] Clause 34: A feedthrough for supplying high voltage power to a device in a vacuum tool, comprising: a feedthrough insulator configured to engage with a connector; and a feedthrough pin protruding from a concave surface of the feedthrough insulator such that an end of the feedthrough pin protrudes from the feedthrough insulator, the feedthrough pin being configured to electrically connect to a connector wire assembly of the connector, and the feedthrough insulator having a boundary surface extending substantially in two directions in the direction of a longitudinal axis of the feedthrough pin.

[0182]

[0196] Clause 35: Optionally, the feedthrough pin is configured to be received by a channel of the connector, and optionally, the feedthrough insulator comprises an insulating material and is configured to engage with a connector insulator of the insulating material of the connector, and optionally, the substantially bidirectional interface extends from the conductive surface of the feedthrough pin and / or connector wire assembly toward the periphery of the end face.

[0183]

[0197] Clause 36: The feedthrough of any one of clauses 33 to 35, wherein the feedthrough comprises two or more feedthrough pins, each of the feedthrough pins protruding from the feedthrough insulator through a concave surface in the feedthrough insulator.

[0184]

[0198] Clause 37: The feedthrough according to any one of clauses 33 to 36, wherein the number of feedthrough pins is 1 to 10, preferably 2 or 5.

[0185]

[0199] Clause 38: A feedthrough described in any one of clauses 33 to 37, wherein the feedthrough insulator has one or more openings extending from an end face of the feedthrough insulator into the feedthrough insulator, and each feedthrough pin is positioned in one of the openings so that in a plane perpendicular to the longitudinal axis of the feedthrough pin there is a substantially annular opening between the feedthrough pin and the feedthrough insulator.

[0186]

[0200] Clause 39: A feedthrough described in any one of clauses 33 to 38, wherein the feedthrough insulator has a complementary shape to the connector insulator so that when the feedthrough insulator engages with the connector, there is substantially no gap between each feedthrough pin and the inner wall of the corresponding channel in the tubular structure of the connector insulator, and there is substantially no gap between the outer wall of the tubular structure and the receiving portion of the feedthrough insulator.

[0187]

[0201] Clause 40: A feedthrough as described in any one of clauses 34 to 39, wherein the feedthrough insulator comprises a sleeve surrounding all of the feedthrough pin in a plane perpendicular to the longitudinal axis of the feedthrough pin, the sleeve extending further from the base of the feedthrough insulator than other portions of the feedthrough insulator.

[0188]

[0202] Clause 41: The feedthrough of any one of clauses 34 to 40, wherein the feedthrough insulator is a solid body.

[0189]

[0203] Clause 42: The feedthrough of any one of clauses 34 to 40, wherein the feedthrough insulator comprises Al2O3 and / or ceramic.

[0190]

[0204] Clause 43: A feedthrough described in any one of clauses 34 to 40, wherein the feedthrough comprises a feedthrough insulator corresponding to each of the feedthrough pins, each feedthrough insulator protruding from a feedthrough base of the feedthrough, and each feedthrough insulator being a tubular structure surrounding the feedthrough pin in a plane perpendicular to the longitudinal axis of the feedthrough pin.

[0191]

[0205] Clause 44: The feedthrough of clause 43, wherein each feedthrough insulator protrudes further from the feedthrough base than the feedthrough pin that it surrounds.

[0192]

[0206] Clause 45: A feedthrough as described in clause 43 or 44, wherein an end of each feedthrough insulator is arranged to receive a corresponding connector tubular structure provided by the connector.

[0193]

[0207] Clause 46: The feedthrough of any one of clauses 43 to 45, wherein each feedthrough insulator is ceramic.

[0194]

[0208] Clause 47: The feedthrough of any one of clauses 43 to 46, wherein each feedthrough insulator is brazed to the feedthrough base.

[0195]

[0209] Clause 48: A feedthrough as claimed in any one of clauses 33 to 47, wherein when the feedthrough is connected to a connector, the fit therebetween substantially excludes air.

[0196]

[0210] Clause 49: A feedthrough as described in any one of clauses 33 to 48, wherein an end of each feedthrough pin is arranged to be press-fit into a corresponding plug of the connector wire assembly.

[0197]

[0211] Clause 50: A feedthrough according to any one of clauses 33 to 49, wherein the periphery of an opening in a wall of the vacuum tool in which the feedthrough is located provides a local ground potential.

[0198]

[0212] Clause 51: A feedthrough according to any one of clauses 33 to 50, further comprising a feedthrough flange for fastening to the connector flange, the feedthrough flange being provided by a vacuum tool.

[0199]

[0213] Clause 52: A feedthrough as described in Clause 51, wherein the feedthrough flange comprises one or more alignment pins for insertion into respective alignment openings in the connector flange, and / or the feedthrough flange comprises one or more alignment openings for receiving respective alignment pins in the connector flange.

[0200]

[0214] Clause 53: A feedthrough described in any one of clauses 33 to 52, wherein when the feedthrough is connected to a connector, there is a substantially bidirectional interface between two conductive surfaces of the feedthrough pin and / or connector wire assembly.

[0201]

[0215] Clause 54: A feedthrough described in any one of clauses 33 to 53, wherein when the feedthrough is connected to a connector, there is a substantially bidirectional interface extending from the conductive surface of the feedthrough pin and / or connector wire assembly to the conductive surface of the feedthrough, connector, and / or vacuum tool comprising the feedthrough.

[0202]

[0216] Clause 55: A power interface for a vacuum tool having one or more high voltage devices, the electrical connection comprising a connector as described in any one of clauses 1 to 26 and a feedthrough as described in any one of clauses 33 to 54, the connector engaging with the feedthrough.

[0203]

[0217] Clause 56: The power interface of clause 55, wherein there are substantially no voids within the power interface.

[0204]

[0218] Clause 57: The power interface of clause 55 or 56, wherein the topography of the connector insulator is shaped to correspond to the feedthrough insulator.

[0205]

[0219] Clause 58: An electrical power interface according to any one of clauses 55 to 57, wherein the connector and / or the feedthrough comprises a gasket arranged so that the connection between the feedthrough and the connector is airtight.

[0206]

[0220] Clause 59: A vacuum tool comprising the power interface according to any one of clauses 55 to 58.

[0207]

[0221] Clause 60: The vacuum tool of clause 59, wherein the vacuum tool is a flood column.

[0208]

[0222] Clause 61: A vacuum tool according to clause 59 or 60, wherein the connector is isolated from the vacuum conditions within the vacuum tool such that the vacuum conditions are maintained when the connector is removed from the feedthrough.

[0209]

[0223] Clause 62: A multi-pin connector for electrically connecting a feedthrough of a vacuum tool to a high voltage power supply, comprising: at least two connector wire assemblies configured to connect to the high voltage power supply; and a connector insulator having a respective channel for each connector wire assembly, each channel extending into the connector insulator and configured to receive an end of a feedthrough pin so as to electrically connect the connector wire assembly with the feedthrough pin, wherein the connector insulator is configured to engage with the feedthrough so that an interface surface of the connector insulator extends substantially in two directions in the direction of a longitudinal axis of one of the channels.

[0210]

[0224] Clause 63: A multi-pin feedthrough for supplying high voltage power to a device in a vacuum tool, comprising: a feedthrough insulator configured to engage a connector; and at least two feedthrough pins each protruding from at least two concave surfaces in the feedthrough insulator, each feedthrough pin configured to electrically connect to a connector wire assembly of the connector, the feedthrough insulator having a boundary surface extending substantially in two directions in the direction of a longitudinal axis of the feedthrough pin.

[0211]

[0225] Clause 64: A high voltage connector for connecting a feedthrough of a vacuum device to a high voltage power supply, comprising: a connector pin configured to electrically connect with a feedthrough pin of the feedthrough; and a connector body of insulating material configured to be insertably engageable with the feedthrough to electrically connect the connector pin and the feedthrough pin, the connector body providing a two-way interface extending in the direction of the connector pin.

[0212]

[0226] Clause 65: A high voltage connector for connecting a feedthrough of a vacuum device to a high voltage power supply, the high voltage connector comprising: two connector pins configured to be connected to the high voltage power supply, the pins configured to electrically connect with corresponding feedthrough pins of the feedthrough; and a connector body of insulating material configured to be insertably engageable with the feedthrough to provide electrical connection between the connector pins and the corresponding feedthrough pins, the connector body between the connector pins providing an interface extending in two directions in the direction of the connector pins.

[0213]

[0227] Clause 66: A high voltage connector as described in clause 64 or 65, wherein the or each connector pin has an end portion recessed within the connector body.

[0214]

[0228] Clause 67: A high voltage connector as described in any one of clauses 64 to 66, further comprising a housing configured to provide an outer surface that is electrically insulated from the power source.

[0215]

[0229] Clause 68: A feedthrough for supplying high voltage to an electrical device within a vacuum apparatus, the feedthrough comprising: a feedthrough pin configured to connect to a high voltage connector and configured to electrically connect with a connector pin of the feedthrough; and a feedthrough body of insulating material configured to be insertably engageable with the connector to electrically connect the connector pin and the feedthrough pin, the feedthrough body providing a two-way boundary surface extending in the direction of the feedthrough pin.

[0216]

[0230] Clause 69: A feedthrough for supplying high voltage to an electrical device inside a vacuum apparatus, the feedthrough comprising: two feedthrough pins configured to connect to a high voltage connector and configured to electrically connect with corresponding connector pins of the connector; and a feedthrough body of insulating material configured to be insertably engageable with the connector to make electrical connection between the feedthrough pins and the corresponding connector pins, the feedthrough body between the feedthrough pins providing an interface extending in two directions in the direction of the feedthrough pins.

[0217]

[0231] Clause 70: A feedthrough according to clause 68 or 69, wherein the pin protrudes from the feedthrough body from the concave surface.

[0218]

[0232] Clause 71: A feedthrough as described in any one of clauses 68 to 70, further comprising a housing configured to provide an outer surface for receiving the feedthrough and that is electrically insulated from the feedthrough pins.

[0219]

[0233] Clause 72: An electrical connection for a vacuum tool equipped with a high voltage device, the electrical connection comprising a connector described in any one of clauses 64 to 67 and a feedthrough described in any one of clauses 68 to 71, the feedthrough and connector being engaged to be connected.

[0220]

[0234] While the invention has been described in connection with various embodiments, other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.

[0221]

[0235] The above description is intended to be illustrative rather than limiting. Thus, it will be apparent to one skilled in the art that modifications may be made as described without departing from the scope of the claims set out below.

Claims

1. 1. A connector for electrically connecting a feedthrough of a vacuum tool to a high voltage power supply, comprising: a connector wire assembly configured to electrically connect to a high voltage power supply, the connector wire assembly having a wire and a plug for receiving an end of the feedthrough pin; a connector insulator including a channel of tubular structure, the channel extending within the connector insulator to electrically connect the connector wire assembly with the feedthrough pin, the channel configured to receive the feedthrough pin; the connector insulator is configured to engage with the feedthrough insulator such that an interface of the connector insulator extends bidirectionally in the direction of a longitudinal axis of the channel; the interface extends into the connector insulator; the plug has an end face that defines a recess within the connector insulator; A connector, wherein the recess of the plug is provided deeper within the connector insulator than the boundary surface.

2. The connector of claim 1 , wherein the recess of the plug receives the end of the feedthrough pin.

3. 3. The connector of claim 1, wherein the connector comprises two or more connector wire assemblies configured to electrically connect to respective feedthrough pins.

4. 4. The connector of claim 1, wherein the interface extends from a conductive surface of the feedthrough pin toward the periphery of an end face of the connector insulator.

5. A connector according to any one of claims 1 to 4, further comprising a housing of the connector arranged to provide an outer surface of the connector that is electrically insulated from the high voltage power source.

6. the connector insulator is within the housing and comprises an insulating material; the channel extends from an end face of the connector insulator into the connector insulator and is linear, the end face of the connector insulator being an end face of the connector, the channel having an open end at the end face and a closed end within the connector insulator; and the connector wire assembly is within the channel; and The connector of claim 5 , wherein the interface extends from a conductive surface of the feedthrough pin toward a periphery of the end face when the connector is connected to the feedthrough.

7. the connector comprising two or more connector wire assemblies configured to electrically connect to respective feedthrough pins; the channel being two or more linear channels in the connector insulator, respectively, for the two or more connector wire assemblies; each linear channel is positioned to receive a feedthrough pin of said feedthrough; 7. The connector of claim 5 or 6, wherein each connector wire assembly is within one of the two or more linear channels.

8. 8. The connector of claim 7, wherein each connector wire assembly comprises the wire and the plug attached to an end of the wire.

9. the connector insulator comprises a base and one or more elongated tubular structures; each tubular structure is secured to the base at an end opposite the end face of the channel; A connector according to any one of claims 5 to 8, wherein each connector wire assembly extends through at least a portion of the base.

10. The connector according to any one of claims 1 to 9, wherein the connector insulator is a solid body.

11. A connector described in any one of claims 1 to 10, wherein the distance along the channel between the plug and the end face of the flange of the feedthrough is greater than the distance between the plug and the conductive object at the end face of the connector.

12. 1. A power interface for a vacuum tool comprising one or more high voltage devices, comprising: The electrical connection comprises a connector according to any one of claims 1 to 11 and a feedthrough, The feedthrough is a feedthrough insulator configured to engage a connector insulator having a tubular structure of the connector; a feedthrough pin, the end of which projects from the feedthrough insulator; the feedthrough pin is configured to electrically connect to a connector wire assembly of the connector, the connector wire assembly having a wire and a plug for receiving an end of the feedthrough pin; the feedthrough insulator is configured to engage the connector insulator such that an interface of the feedthrough insulator extends bidirectionally in the direction of a longitudinal axis of the feedthrough pin; The connector engages the feedthrough, forming a power interface.

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