Contaminant trap system for reactor systems

Abstract

To provide a contaminant trap system for a semiconductor processing or reactor system.SOLUTION: A contaminant trap system 100 of a reactor system may comprise a baffle plate stack 130 comprising: at least one baffle plate comprising an aperture through a baffle plate body 132 and comprising a solid body portion; and at least one complementary baffle plate 134 comprising a complementary aperture through a complementary baffle plate body of the complementary baffle plate and comprising a complementary solid body portion. The at least one baffle plate and the at least one complementary baffle plate may be disposed in baffle plate order between a first end and a second end of the baffle plate stack in which the baffle plates alternate with the complementary baffle plates, such that no two baffle plates are adjacent and no two complementary baffle plates are adjacent in the baffle plate order.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates generally to semiconductor processing or reactor systems and the components contained therein, and more particularly to reactor system components that prevent contamination of other components. [Background technology]

[0002] Reaction chambers may be used to deposit various layers of materials onto semiconductor substrates. The semiconductor may be placed on a susceptor within the reaction chamber. Both the substrate and the susceptor may be heated to a desired substrate temperature setpoint. In an exemplary substrate treatment process, one or more reactive gases may be passed over the heated substrate, causing the deposition of thin films of materials on the substrate surface. Through subsequent deposition, doping, lithography, etching, and other processes, these layers become integrated circuits.

[0003] For any given process, the reactant gases and / or any by-product gases may then be exhausted via vacuum and / or purged from the reaction chamber. The reactant gases and other gases or materials from the reaction chamber may pass through a filter or contaminant trap system, where the reactant gases or other materials (e.g., reaction products and / or by-products) are captured to prevent contamination of reactor system components downstream of the contaminant trap system. However, materials from the contaminant trap system may outgas under certain conditions, which may cause contamination of the reaction chamber or substrates disposed therein. Summary of the Invention [Means for solving the problem]

[0004] This Summary is provided to introduce a selection of concepts in a simplified form. These concepts are described in more detail below in the Detailed Description of Exemplary Embodiments of this Disclosure. This Summary is not necessarily intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0005] In some embodiments, a contaminant trap system for a reactor system is provided. The contaminant trap system disclosed herein allows for the collection of materials from the reaction chamber of the reactor system and can reduce or prevent contamination of reactor system components downstream of the contaminant trap system. The contaminant trap system disclosed herein can also reduce or prevent contaminants that could migrate to and contaminate the reaction chamber or substrates disposed therein.

[0006] In various embodiments, a baffle plate stack for a contaminant trap system may include a plurality of baffle plates, each comprising an opening and a solid body portion extending through a baffle plate body of each baffle plate of the plurality of baffle plates, and a plurality of complementary baffle plates, each comprising a complementary opening and a complementary solid body portion extending through a complementary baffle plate body of each complementary baffle plate of the plurality of complementary baffle plates. The plurality of baffle plates and the plurality of complementary baffle plates may be arranged in baffle plate order between a first end and a second end of the baffle plate stack, with the plurality of baffle plates alternating with the plurality of complementary baffle plates, such that no two of the plurality of baffle plates and no two of the plurality of complementary baffle plates are adjacent in the baffle plate order. The plurality of baffle plates and the plurality of complementary baffle plates may be arranged in a baffle plate orientation such that at least a portion of the openings of the plurality of baffle plates and at least a portion of the complementary solid body portions of the plurality of complementary baffle plates may be aligned along a first axis extending between a first end and a second end of the baffle plate stack, and at least a portion of the solid body portions of the plurality of baffle plates and at least a portion of the complementary openings of the plurality of complementary baffle plates may be aligned along a second axis extending between the first end and a second end of the baffle plate stack.

[0007] In various embodiments, the baffle plate stack may further include a connecting rod connected to each of the plurality of baffle plates and / or each of the plurality of complementary baffle plates, where the connecting rod may extend between a first end and a second end of the baffle plate stack, and the connecting rod may include a cross-section. Each of the plurality of baffle plates may include a connecting hole, and each of the plurality of complementary baffle plates may include a complementary connecting hole, and the connecting hole and complementary connecting hole may each include a shape complementary to the cross-section of the connecting rod. In various embodiments, the cross-section of the connecting rod may be non-circular, and the connecting hole of each of the plurality of baffle plates may be arranged in a first orientation, and the complementary connecting hole of each of the plurality of complementary baffle plates may be arranged in a second orientation. The first orientation and the second orientation may be achieved by arranging the plurality of baffle plates and the plurality of complementary baffle plates around the connecting rod to achieve the baffle plate orientation.

[0008] In various embodiments, the baffle plate stack may further comprise a plurality of spacers connected to the connecting rod, and at least one of the plurality of spacers may be disposed between each baffle plate and a complementary baffle plate of the plurality of baffle plates and the plurality of complementary baffle plates in the order of the baffle plates. In various embodiments, the baffle plate stack may further comprise an end plate disposed at at least one of the first end or the second end of the baffle plate stack, and wherein the end plate may include an end plate opening and an end plate solid body portion.

[0009] In various embodiments, there may be one more baffle plate than the plurality of complementary baffle plates, such that the baffle plate stack may include the same sequence of the plurality of baffle plates and the plurality of complementary baffle plates from both the first end and the second end of the baffle plate stack. In various embodiments, at least one of the plurality of baffle plates and the plurality of complementary baffle plates may include a textured surface.

[0010] In various embodiments, a contaminant trap system for a reactor system may include a trap housing including an outer housing wall, a first baffle plate disposed within the trap housing, the first baffle plate may include a first opening extending through the first baffle plate body between a first top baffle plate surface and a first bottom baffle plate surface of the first baffle plate and a first solid body portion, and a first complementary baffle plate disposed within the trap housing in series with the first baffle plate between a first end and a second end of the trap housing, the first complementary baffle plate may include a first complementary opening extending through the first complementary baffle plate body between a first top complementary baffle plate surface and a first bottom complementary baffle plate surface of the first complementary baffle plate and a first complementary solid body portion. The first baffle plate and the first complementary baffle plate may be included in a baffle plate stack. The first baffle plate and the first complementary baffle plate may be arranged in a baffle plate orientation within the trap housing, such that at least a portion of the first opening of the first baffle plate and at least a portion of the first complementary solid body portion of the first complementary baffle plate may be aligned along a first axis extending between the first and second ends of the trap housing, and at least a portion of the first solid body portion of the first baffle plate and at least a portion of the first complementary opening of the first complementary baffle plate may be aligned along a second axis extending between the first and second ends of the trap housing. In various embodiments, the first opening of the first baffle plate may be included in a radially inner portion of the first baffle plate, and / or the first complementary opening of the first complementary baffle plate may be included in a radially outer portion of the first complementary baffle plate. In various embodiments, the contaminant trap system may further include a heater jacket coupled to the trap housing.

[0011] In various embodiments, the contaminant trap system may further include a connecting rod disposed within the trap housing and extending between a first end and a second end of the trap housing. The first baffle plate may include a first connecting hole disposed through the first baffle plate body, and the connecting rod may be disposed through the first connecting hole. The first complementary baffle plate may include a first complementary connecting hole disposed through the first complementary baffle plate body, and the connecting rod may be disposed through the first complementary connecting hole. In various embodiments, the connecting rod may have a non-circular cross-section, and the first connecting hole of the first baffle plate and the first complementary connecting hole of the first complementary baffle plate may each include a shape complementary to the non-circular cross-section of the connecting rod. In various embodiments, the reference point of the first connecting hole may be disposed in a first orientation, and the complementary reference point of the first complementary connecting hole may be disposed in a first complementary orientation, and the first orientation and the first complementary orientation may be achieved by disposing the first baffle plate and the first complementary baffle plate around the connecting rod.

[0012] In various embodiments, the contaminant trap system may further include a spacer between the first baffle plate and the first complementary baffle plate to provide a space between the first baffle plate and the first complementary baffle plate.

[0013] In various embodiments, the contaminant trap system may further include a second baffle plate disposed within the trap housing, the second baffle plate including a second opening extending through the second baffle plate body between a second top baffle plate surface and a second bottom baffle plate surface of the second baffle plate, and a second solid body portion. The second baffle plate may be disposed within the trap housing such that a first complementary baffle plate is between the first baffle plate and the second baffle plate, and the baffle plate orientation may further include at least a portion of the second opening of the second baffle plate and at least a portion of the first complementary solid body portion of the first complementary baffle plate being aligned along a first axis, such that at least a portion of the second solid body portion of the second baffle plate and at least a portion of the first complementary opening of the first complementary baffle plate may be aligned along a second axis. In various embodiments, the first baffle plate and the second baffle plate may include the same design.

[0014] In various embodiments, the baffle plate stack may further include an end plate positioned such that the first baffle plate is between the end plate and a first complementary baffle plate, or such that the first complementary baffle plate is between the end plate and the first baffle plate. The end plate may include an end plate opening and an end plate solid body portion.

[0015] In various embodiments, the outer housing wall of the trap housing may include an inner wall surface, and an outer edge of at least one of the first baffle plate and the first complementary baffle plate may be disposed adjacent to the inner wall surface such that at least a partial seal may be formed between the outer edge of the first baffle plate and / or the first complementary baffle plate and the inner wall surface.

[0016] In various embodiments, the first top baffle plate surface, the first bottom baffle plate surface, the first top complementary baffle plate surface, the first bottom complementary baffle plate surface, the outer edge of at least one of the first baffle plate and the first complementary baffle plate, and / or the inner wall surface are textured.

[0017] In various embodiments, the method includes flowing a fluid from a reaction chamber into a trap housing of a contaminant trap system; flowing the fluid through a baffle plate stack disposed within the trap housing and including a plurality of baffle plates and a plurality of complementary baffle plates; flowing the fluid through an opening in a first baffle plate of the plurality of baffle plates; and in response to flowing the fluid through the opening in the first baffle plate, flowing the fluid into a complementary solid body portion of a first complementary baffle plate of the plurality of complementary baffle plates. The method may include depositing contaminants on the complementary solid body portion of the first complementary baffle plate in response to flowing a fluid through the complementary opening of the first complementary baffle plate, flowing a fluid through the complementary opening of the first complementary baffle plate in response to flowing a fluid into the complementary solid body portion of the first complementary baffle plate, flowing a fluid into the solid body portion of a second baffle plate of the plurality of baffle plates in response to flowing a fluid through the complementary opening of the first complementary baffle plate, and / or depositing contaminants on the solid body portion of the second baffle plate in response to flowing a fluid into the solid body portion of the second baffle plate. Each of the plurality of baffle plates may include a solid body portion and an opening extending through the baffle plate body of each baffle plate of the plurality of baffle plates. Each of the plurality of complementary baffle plates may include a complementary solid body portion and a complementary opening extending through the complementary baffle plate body of each complementary baffle plate of the plurality of complementary baffle plates. The plurality of baffle plates and the plurality of complementary baffle plates may be arranged in a baffle plate sequence between a first end and a second end of the baffle plate stack, where the plurality of baffle plates may alternate with the plurality of complementary baffle plates, such that no two of the plurality of baffle plates and no two of the plurality of complementary baffle plates are adjacent in the baffle plate sequence.The plurality of baffle plates and the plurality of complementary baffle plates may be arranged in a baffle plate orientation such that at least a portion of the openings of the plurality of baffle plates and at least a portion of the complementary solid body portions of the plurality of complementary baffle plates may be aligned along a first axis extending between a first end and a second end of the baffle plate stack, and at least a portion of the solid body portions of the plurality of baffle plates and at least a portion of the complementary openings of the plurality of complementary baffle plates may be aligned along a second axis extending between the first end and a second end of the baffle plate stack.

[0018] In various embodiments, the contaminant trap system of the reactor system may include a trap housing and a trap structure disposed within the trap housing. The trap structure may include a baffle plate, a base plate, and a plurality of rods extending between and connected to the baffle plate and the base plate. The rods may be disposed around flow holes disposed through the base plate.

[0019] In various embodiments, a contaminant trap system for a reactor system may include a trap housing having a housing bottom surface and a housing top surface, and a trap structure disposed within the trap housing. The trap structure may include a plurality of tubes arranged in an array having an outer shape complementary to the shape of the trap housing, supports disposed within the array of the plurality of tubes and projecting outward from ends of the plurality of tubes, the supports contacting the housing bottom surface and creating spaces between the ends of the plurality of tubes and the housing bottom surface, and a tensioning device coupled around the plurality of tubes configured to hold the plurality of tubes together. The plurality of tubes may be organized in a hexagonal shape, and each tube of the plurality of tubes may include a bore and extend at least partially between the housing bottom surface and the housing top surface.

[0020] In various embodiments, a contaminant trap for a reactor system may include a trap housing and a trap structure disposed within the trap housing. The trap structure may include a corrugated sheet connected to a non-corrugated sheet. The corrugated and non-corrugated sheets may be spiraled such that portions of the corrugated sheet are disposed between portions of the non-corrugated sheet and such that portions of the non-corrugated sheet are disposed between portions of the corrugated sheet.

[0021] For purposes of summarizing the present disclosure and the advantages achieved over the prior art, certain specific objects and advantages of the present disclosure have been described hereinabove. Of course, it should be understood that not necessarily all such objects or advantages may be achieved in accordance with any particular embodiment of the present disclosure. Thus, for example, those skilled in the art will recognize that the embodiments disclosed herein may be practiced in a manner that achieves or optimizes one advantage or group of advantages as taught or suggested herein, without necessarily achieving other objects or advantages as may be taught or suggested herein.

[0022] All of these embodiments are intended to be within the scope of the present disclosure. These and other embodiments will become readily apparent to those skilled in the art from the following detailed description of certain embodiments, taken in conjunction with the accompanying drawings, and the present disclosure is not limited to any particular embodiment discussed.

[0023] While this specification concludes with claims particularly pointing out and distinctly claiming what are regarded as embodiments of the present disclosure, the advantages of embodiments of the present disclosure may be more readily apparent from the following description of certain specific examples of embodiments of the present disclosure when read in conjunction with the accompanying drawings, in which like element numbering throughout the drawings indicates identical elements. [Brief explanation of the drawings]

[0024] [Figure 1] FIG. 1 shows a schematic diagram of an exemplary reactor system, according to various embodiments. [Figure 2] FIG. 2 illustrates an exploded view of an exemplary contaminant trapping system, according to various embodiments. [Figure 3] 3A and 3B show an exemplary baffle plate and a complementary baffle plate, respectively, according to various embodiments. [Figure 4A] FIG. 4A shows a perspective view of an exemplary filter baffle plate stack of a contaminant trap system, according to various embodiments. [Figure 4B] FIG. 4B illustrates a cross-sectional perspective view of an exemplary filter baffle plate stack of a contaminant trap system, according to various embodiments. [Figure 5] Figure 5A shows another exemplary baffle plate according to various embodiments, and Figure 5B shows another exemplary complementary baffle plate according to various embodiments. [Figure 6] Figure 6A shows yet another exemplary baffle plate according to various embodiments, and Figure 6B shows yet another exemplary complementary baffle plate according to various embodiments. [Figure 7] Figure 7A shows yet another exemplary baffle plate according to various embodiments, and Figure 7B shows yet another exemplary complementary baffle plate according to various embodiments. [Figure 8] FIG. 8 shows a perspective view of a heater jacket for a contaminant trapping system, according to various embodiments. [Figure 9] FIG. 9 illustrates a method for flowing a fluid through a contaminant trap system of a reactor system, according to various embodiments. [Figure 10A] FIG. 10A shows a cross-sectional view of an exemplary trap structure, according to various embodiments. [Figure 10B] FIG. 10B shows an exploded view of a cross section of the trapping structure of FIG. 10A, according to various embodiments. [Figure 11] FIG. 11 illustrates an exemplary trap structure, according to various embodiments. [Figure 12] FIG. 12 illustrates an exemplary trap structure, according to various embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0025] While certain specific embodiments and examples are disclosed below, it will be understood by those skilled in the art that the present disclosure extends beyond the specifically disclosed embodiments and / or applications of the present disclosure, and obvious modifications and equivalents thereof, and therefore it is not intended that the scope of the present disclosure should be limited by the specific embodiments described herein.

[0026] The figures shown herein are not meant to be actual drawings of any particular materials, apparatus, structures or devices, but merely representations used to describe embodiments of the present disclosure.

[0027] As used herein, the term "substrate" may refer to any underlying material or materials that may be used or upon which a device, circuit or film may be formed.

[0028] As used herein, the term "atomic layer deposition" (ALD) can refer to a vapor deposition process in which deposition cycles, preferably multiple consecutive deposition cycles, are performed in a process chamber. Typically, during each cycle, a precursor chemisorbs to a deposition surface (e.g., the surface of a substrate or a previously deposited underlying surface, such as a material deposited using a previous ALD cycle) to form a monolayer or submonolayer that does not readily react with additional precursors (i.e., a self-limiting reaction). If desired, a reactant (e.g., another precursor or reactant gas) can then be introduced into the process chamber for use in converting the chemisorbed precursor to the desired material on the deposition surface. Typically, this reactant can further react with the precursor. Additionally, a purge step can also be utilized during each cycle to remove excess precursor from the process chamber after conversion of the chemisorbed precursor and / or to remove excess reactants and / or reaction by-products from the process chamber. Additionally, the term "atomic layer deposition," as used herein, is also meant to include processes denoted by related terms, such as "chemical vapor deposition atomic layer deposition," "atomic layer epitaxy" (ALE), molecular beam epitaxy (MBE), gas source MBE, or metalorganic MBE, as well as chemical beam epitaxy when performed with alternating pulses of precursor compositions, reactive gases, and purge (e.g., inert carrier) gases.

[0029] As used herein, the term "chemical vapor deposition" (CVD) can refer to any process in which a substrate is exposed to one or more volatile precursors that react and / or decompose on the substrate surface to produce a desired deposit.

[0030] As used herein, the terms "film" and "thin film" can refer to any continuous or discontinuous structure and material deposited by the methods disclosed herein. "Films" and "thin films" can include, for example, 2D materials, nanorods, nanotubes, or nanoparticles, or planar partial or complete molecular layers, or partial or complete atomic layers, or clusters of atoms and / or molecules. "Films" and "thin films" can include materials or layers that have pinholes, yet are at least partially continuous.

[0031] As used herein, the term "contaminant" may refer to any undesirable material disposed within the reaction chamber or any undesirable material in any component of the reaction system that may affect the purity of the substrate disposed within the reaction chamber. The term "contaminant" may refer to, but is not limited to, undesirable deposits, metallic and non-metallic particles, impurities, and waste materials disposed within the reaction chamber or other components of the reactor system.

[0032] Reactor systems used for ALD, CVD, and / or the like can be used for a variety of applications, including the deposition and etching of materials on substrate surfaces. In various embodiments, a reactor system 50 can include a reaction chamber 4, a susceptor 6 for holding a substrate 30 during processing, a fluid distribution system 8 (e.g., a showerhead) for distributing one or more reactants to the surface of the substrate 30, and one or more reactant sources 10, 12 and / or a carrier and / or purge gas source 14 fluidly connected to the reaction chamber 4 via lines 16-20 and valves or controllers 22-26. Reactant gases or other materials from the reactant sources 10, 12 can be applied to the substrate 30 in the reaction chamber 4. A purge gas from the purge gas source 14 can flow into and through the reaction chamber 4 to remove any excess reactants or other undesired materials from the reaction chamber 4. System 50 may also include a vacuum source 28 fluidly connected to reaction chamber 4, which may be configured to draw reactants, purge gas, or other materials from reaction chamber 4. System 50 may include a contaminant trap system 40 disposed between reaction chamber 4 and vacuum source 28 to capture (i.e., accumulate) materials (e.g., contaminants) coming from reaction chamber 4, thereby reducing or preventing contamination of reactor system 50 components downstream of contaminant trap system 40.

[0033] Referring to FIG. 2, an exploded view of a contaminant trap system 100 is shown (as an example of the contaminant trap system 40 of FIG. 1) according to various embodiments. In various embodiments, the contaminant trap system 100 may include a trap housing 103, which may include multiple components (e.g., an upper housing 103A and a lower housing 103B). In various embodiments, the upper housing 103A and the lower housing 103B may be coupled to enclose other components of the contaminant trap system 100. The upper housing 103A may include a fluid inlet 101A through which the interior of the trap housing 103 may be fluidly coupled to a reaction chamber (e.g., reaction chamber 4). Gases and other materials may flow from the reaction chamber into the contaminant trap system 100 through the fluid inlet 101A and exit the contaminant trap system 100 through the fluid outlet 101B.

[0034] In various embodiments, the trap housing 103 may include an outer wall 105 having an inner wall surface. The inner wall surface may define an interior space enclosed by the trap housing 103 (e.g., when the upper housing 103A and the lower housing 103B are coupled). The interior space of the trap housing 103 may be in fluid communication with the fluid inlet 101A and the fluid outlet 101B.

[0035] In various embodiments, the contaminant trap system 100 may include a trap structure (e.g., housed within a trap housing) configured to capture contaminants traveling therethrough. Contaminants may accumulate on surfaces of the trap structure as fluid travels through the trap system. In various embodiments, the trap structure may include a baffle plate stack (e.g., baffle plate stack 130). The baffle plate stack 130 may include at least two plates that can cause the flow of fluid entering the interior space of the trap housing 103 to take a specific path (e.g., a path that increases or maximizes the flow of fluid through the interior space of the trap housing 103 and / or a path that allows for increased or maximized removal of contaminants from the fluid flow by the contaminant trap system and its components). The fluid flow path through the interior space of the trap housing 103 can increase the fluid path and increase contact with components of the contaminant trap system 100 (e.g., the surfaces of the baffle plates within the trap housing 103), thus providing more opportunity for contaminants to accumulate on these surfaces as the fluid flows through the contaminant trap system 100.

[0036] In various embodiments, the baffle plate stack 130 may include at least one baffle plate 132 and at least one complementary baffle plate 134. Each baffle plate 132 may have substantially the same design (e.g., including openings therethrough), and each complementary baffle plate 134 may have substantially the same design (e.g., including complementary openings therethrough). The baffle plate 132 and the complementary baffle plate 134 may be arranged in the baffle plate stack 130 in a baffle plate order between a first end of the x103 (adjacent to the x101A) and a second end of the trap housing 103 (adjacent to the fluid outlet 101B). The first end of the baffle plate stack 130 may be adjacent to the first end of the trap housing 103, and the second end of the baffle plate stack 130 may be adjacent to the second end of the trap housing 103. The baffle plate sequence may include baffle plates 132 alternating with complementary baffle plates 134 such that no two baffle plates 132 and no two complementary baffle plates 134 are adjacent in the baffle plate sequence.

[0037] The baffle plate stack 130 may include any suitable number of baffle plates in any design, order, and / or composition. For example, in various embodiments, the baffle plate stack 130 may include all of one type of baffle plate (e.g., all of the baffle plates 132 or all of the complementary baffle plates 134). In various embodiments, the baffle plate stack 130 may include any suitable mix of baffle plate designs. For example, the baffle plate stack 130 may include baffle plates including two or more designs. As a further example, the baffle plate stack 130 may include a first number of baffle plates 132 and a second number of complementary baffle plates 134. In various embodiments, the baffle plate stack 130 may include an equal number of baffle plates 132 and complementary baffle plates 134 (e.g., alternating the order of the baffle plates between the first and second ends of the baffle plate stack 130). In various embodiments, the baffle plate stack 130 may include one more baffle plate 132 than the complementary baffle plate 134, such that the baffle plate sequence begins and ends with baffle plate 132 (i.e., baffle plate 132 is the baffle plate closest to the first and second ends of the trap housing 103).

[0038] In various embodiments, the baffle plate stack may include at least one end plate coupled to each end of the baffle plate stack. For example, a first end plate 136A may be included in the baffle plate stack 130 as an end plate on a first end of the baffle plate stack 130, and a second end plate 136B may be included in the baffle plate stack 130 as an end plate on a second end of the baffle plate stack 130. The first end of the baffle plate stack 130 may be positioned in the interior space of the trap housing 103 adjacent to the first end of the trap housing 103, and the second end of the baffle plate stack 130 may be positioned in the interior space of the trap housing 103 adjacent to the second end of the trap housing 103. The end plate(s) included in the baffle plate stack may include any suitable design, including a design different from the baffle plates and / or complementary baffle plates included in the baffle plate stack.

[0039] The arrangement of the baffle plates in the baffle plate stack 130 may include any suitable arrangement, including any suitable spacing arrangement. Each baffle plate may be separated by a spacer 133. That is, a spacer 133 may be disposed between every two plates in the baffle plate stack. The plates in the baffle plate stack may be spaced apart any suitable distance to achieve a desired pressure drop for fluid flow through the trap housing 103, for example. To reduce the amount of pressure drop through the trap housing 103, there may be fewer baffle plates in the baffle plate stack and / or more space between the baffle plates. Conversely, to increase the amount of pressure drop through the trap housing 103, there may be more baffle plates in the baffle plate stack and / or less space between the baffle plates.

[0040] Each baffle plate (e.g., baffle plate 132 and complementary baffle plate 134 in baffle plate stack 130) may include a shape complementary to the interior space of trap housing 103 such that baffle plate stack 130 and the baffle plates included therein may be positioned within the interior space of trap housing 103. In various embodiments, the outer edges of one or more plates included in a baffle plate stack positioned within the interior space of trap housing 103 may be positioned adjacent to and / or in contact with the inner wall of trap housing 103. The outer edges of one or more plates may form at least a partial seal between the respective baffle plate and the inner wall of trap housing 103. Thus, a limited amount of fluid flow (or no fluid flow) may pass between the outer edges of the plates in the baffle plate stack and the inner wall of trap housing 103.

[0041] 3A, 3B, and 4A, in various embodiments, a baffle plate (e.g., baffle plate 300A, an example of baffle plate 132 in FIG. 2) may include a top surface 322, a bottom surface 324, a baffle plate body therebetween, and a baffle plate outer edge 326. The baffle plate may include at least one opening disposed through the baffle plate body between the top surface 322 and the bottom surface 324 and defined by an opening edge. For example, baffle plate 300A may include a first opening 331 and a second opening 333. The openings included in the baffle plate may be in any suitable opening arrangement, such as the opening arrangement of baffle plate 300A shown in FIG. 3A. As an example of an opening arrangement in a baffle plate, the openings may be equidistantly spaced from each other, such as openings around the center of the baffle plate shape (e.g., the center of a circle). In various embodiments, the openings in the baffle plate may be included in the opening portion of the baffle plate. For example, apertures 325 of baffle plate 300A may be located on a radially inner portion of the baffle plate, and a radially outer portion of baffle plate 300A may not include apertures. The portion of the baffle plate without apertures may be a solid body portion (e.g., solid body portion 335 of baffle plate 300A).

[0042] 3A, 3B, and 4A, in various embodiments, a complementary baffle plate (e.g., complementary baffle plate 300B, which is an example of complementary baffle plate 134 of FIG. 2) can include a complementary top surface 352, a complementary bottom surface 354, a complementary baffle plate body therebetween, and a complementary baffle plate outer edge 356. The complementary baffle plate can include at least one complementary opening disposed through the complementary baffle plate body between the complementary top surface 352 and the bottom surface 354 and defined by a complementary opening edge. For example, complementary baffle plate 300B can include a first complementary opening 361 and a second complementary opening 363. The complementary openings included in the complementary baffle plate can be any suitable complementary opening arrangement, such as the complementary opening arrangement of complementary baffle plate 300B shown in FIG. 3B. As an example of the arrangement of complementary openings in complementary baffle plates, complementary openings may be spaced equidistant from other complementary openings, such as complementary openings around the center of the complementary baffle plate shape (e.g., the center of a circle). In various embodiments, complementary openings in complementary baffle plates may be included in complementary opening portions of the complementary baffle plate. For example, opening portion 355 of complementary baffle plate 300B may be located on the radially outer portion of the complementary baffle plate, while the radially inner portion of complementary baffle plate 300B may not include complementary openings. The portion of the complementary baffle plate without a complementary opening may be a complementary solid body portion (e.g., complementary solid body portion 365 of complementary baffle plate 300B).

[0043] A complementary baffle plate (e.g., complementary baffle plate 300B) may be complementary to a baffle plate (e.g., baffle plate 30A) because the complementary baffle plate may include complementary openings in portions of the plate where the baffle plate does not include openings. As an example, as discussed above, complementary baffle plate 300B includes complementary openings 361 and 363 in its radially outer portion, while baffle plate 300A does not include openings in its radially outer portion.

[0044] In various embodiments, a baffle plate stack may include a connecting rod to which a baffle plate and / or a complementary baffle plate may be connected. For example, baffle plate stack 400B of FIG. 4B may include connecting rod 450. The connecting rod may include any suitable shape, length, and / or cross-sectional shape. In various embodiments, the connecting rod may be configured to extend between a first end and a second end of trap housing 103. The connecting rod may be configured to engage and / or connect with other components of the baffle plate stack, such as a baffle plate, a complementary baffle plate, an end plate, a spacer, and / or the like. In various embodiments, at least a portion of the connecting rod, such as one or more of the ends of connecting rod 450, may include threads to engage with fasteners for securing the baffle plate, the complementary baffle plate, the end plate, and / or the spacer together.

[0045] For purposes of space and clarity, reference numbers and leads for specific baffle plate components and complementary baffle plate components in Figures 4A and 4B are included in one or more exemplary baffle plates or complementary baffle plates illustrated therein, however, such labeled components may be applied to similarly labeled baffle plates or complementary baffle plates, respectively, as appropriate.

[0046] In various embodiments, each baffle plate may include a connecting hole configured to receive and / or engage a connecting rod. For example, baffle plate 300A may include connecting hole 347 having a shape complementary to the cross-sectional shape of connecting rod 450. Thus, connecting rod 450 may be inserted through connecting hole 347, and connecting hole 347 may engage with connecting rod 450.

[0047] In various embodiments, the connecting holes in the baffle plate may have a non-circular shape so that the connecting rods can engage with the connecting holes and maintain the baffle plate in a desired position (e.g., so that the baffle plate 300A does not rotate around the connecting rods 450 within the trap housing 103). In various embodiments, the connecting holes in the baffle plate may have a shape that is symmetrical about only a line passing through the connecting holes (e.g., through the center of the connecting holes). In that way, the connecting holes may only engage with the connecting rods in a manner that positions the baffle plate in a desired orientation (self-aligning mechanism). In various embodiments, to assist in positioning the baffle plate in a desired orientation around the connecting rods, the connecting holes may include a reference point that is positioned at a specific orientation, angle, and / or location relative to the opening(s) in the baffle plate. For example, the connecting hole 347 may include a reference point 348 that can be oriented at a specific angle (e.g., so that the reference point 348 is aligned with the first opening 331 and / or between the two second openings 333).

[0048] In various embodiments, each complementary baffle plate may include a complementary connecting hole configured to receive and / or engage a connecting rod. For example, complementary baffle plate 300B may include complementary connecting hole 367 having a complementary shape that is complementary to the cross-sectional shape of connecting rod 450. Thus, connecting rod 450 may be inserted through complementary connecting hole 367, and complementary connecting hole 367 may engage with connecting rod 450.

[0049] In various embodiments, the complementary connecting holes of the complementary baffle plates may have a non-circular shape so that the connecting rod can engage with the complementary connecting holes and maintain the complementary baffle plate in a desired position (e.g., so that the complementary baffle plate 300B does not rotate around the connecting rod 450 within the trap housing 103). In various embodiments, the complementary connecting holes of the complementary baffle plates may include complementary shapes that are symmetrical about only a line passing through the connecting holes (e.g., through the center of the complementary connecting holes). In that way, the complementary connecting holes may engage with the connecting rod only in a manner that positions the complementary baffle plate in a desired orientation (self-aligning mechanism). In various embodiments, to assist in positioning the complementary baffle plate in a desired orientation around the connecting rod, the complementary connecting holes may include complementary reference points that are oriented at specific complementary angles and / or in specific positions relative to the complementary opening(s) of the complementary baffle plate. For example, the complementary connecting hole 367 may have a complementary reference point 368 that can be oriented at a particular complementary angle (e.g., so that the complementary reference point 368 aligns with the complementary second opening 363 and / or so that the complementary reference point 368 aligns between two complementary first openings 361).

[0050] In various embodiments, the reference points of the connecting holes and the complementary reference points of the complementary connecting holes may be oriented to position the baffle plate and the complementary baffle plate such that the openings of the baffle plate may be aligned with the complementary solid body portions of the adjacent complementary baffle plate in the sequence of the baffle plates along an axis extending along the sequence of the baffle plates (or radially adjacent to the space between the complementary openings). In various embodiments, the reference points of the complementary connecting holes and the complementary reference points may be oriented to position the baffle plate and the complementary baffle plate such that the complementary openings of the complementary baffle plate may be aligned with the solid body portions of the adjacent baffle plate in the sequence of the baffle plates along an axis extending along the sequence of the baffle plates (or radially adjacent to the space between the openings). For example, connecting holes 347 and reference points 348 may position baffle plate 300A, and complementary connecting holes 367 and complementary reference points 368 may position complementary baffle plate 300B so that openings 333 are aligned along the axis with the spaces between complementary openings 363, and complementary openings 363 are aligned along the axis with the spaces between openings 333.

[0051] In various embodiments, a baffle plate and a complementary baffle plate may be arranged in a particular baffle plate orientation to achieve a desired fluid flow therethrough and contaminant deposition thereon during operation of the contaminant trap system 100. In various embodiments, the rotational positions of a baffle plate and a complementary baffle plate about a connecting rod within a baffle plate stack may be offset relative to one another (e.g., by the orientation of the connecting holes and datum points, and by the orientation of the complementary connecting holes and complementary datum points) such that the openings in a baffle plate are not in line with and / or aligned with the complementary openings in the complementary baffle plate along an axis extending through the baffle plate stack. Furthermore, the openings in a baffle plate may be in line with and / or aligned with at least a portion of the complementary solid body portions (or portions of the complementary baffle plate bodies, e.g., between the complementary openings) of adjacent complementary baffle plates within the baffle plate stack along an axis extending through the baffle plate stack. Additionally, the complementary openings of complementary baffle plates may be in line with and / or aligned with at least a portion of the solid body portion (or portion of the baffle plate body, e.g., between the openings) of an adjacent baffle plate in the baffle plate stack along an axis extending through the baffle plate stack. In other words, in various embodiments, the reference point of the connecting hole may be aligned with the opening of the baffle plate, and the complementary reference point of the complementary connecting hole may be aligned with the complementary solid body portion of the complementary baffle plate or with the space between the complementary openings, and / or the reference point of the connecting hole may be aligned with the solid body portion of the baffle plate or with the space between the openings, and the complementary reference point of the complementary connecting hole may be aligned with the complementary opening of the complementary opening of the complementary baffle plate. For example, reference point 348 may be aligned with the opening of baffle plate 300A, and complementary reference point 368 may be aligned with the complementary solid body portion 365 of complementary baffle plate 300B.Thus, openings 331 and 333 of baffle plate 300A may be in line and / or aligned with complementary solid body portion 365 of complementary baffle plate 300B and / or with the spaces between complementary openings 361 and / or 363, and complementary openings 361 and / or 363 of complementary baffle plate 300B may be in line and / or aligned with solid body portion 335 of baffle plate 300A and / or with the spaces between openings 331 and / or 333.

[0052] 5A and 5B depict a baffle plate 500A and a complementary baffle plate 500B according to an additional embodiment. Baffle plate 500A may include an opening 533 and a solid body portion 535. Baffle plate 500A may further include a connecting hole 547 having a reference point 548. Reference point 548 may be oriented toward opening 533. Openings 533 may be equidistant about the center of baffle plate 500A.

[0053] The complementary baffle plate 500B may include a complementary opening 563 and a complementary solid body portion 565. The complementary baffle plate 500B may further include a complementary connecting hole 567 having a complementary reference point 568. The complementary reference point 568 may be oriented toward the complementary solid body portion 565. The complementary solid body portion 565 may be equidistant around the center of the complementary baffle plate 500B.

[0054] The connecting rod, through which baffle plate 500A and complementary baffle plate 500B may connect, may include a cross-sectional shape complementary to connecting hole 547 and complementary connecting hole 567. That is, the connecting rod may include a body and a protrusion complementary to reference point 548 and complementary reference point 568. The shapes and orientations of connecting hole 547 and complementary connecting hole 567 and reference point 548 and complementary reference point 568, respectively, may offset the rotational positions of the baffle plate and complementary baffle plate about the connecting rod relative to one another within the baffle plate stack. Thus, the openings 533 of the baffle plate 500A may be in line and / or aligned with the complementary solid body portions 565 of the complementary baffle plate 500B and / or with the spaces between the complementary openings 563 along an axis extending through the baffle plate stack, and the complementary openings 563 of the complementary baffle plate 500B may be in line and / or aligned with the solid body portions 535 of the baffle plate 500A and / or with the spaces between the openings 533 along an axis extending through the baffle plate stack.

[0055] 6A and 6B depict a baffle plate 600A and a complementary baffle plate 600B according to a further embodiment. Baffle plate 600A may include openings 633 and solid body portions 635. Baffle plate 600A may further include connecting holes 647 having reference points 648. Reference points 648 may be oriented toward the solid body portions 635 and / or the spaces between openings 633. Openings 633 may be equidistant around the center of baffle plate 600A.

[0056] The complementary baffle plate 600B may include a complementary opening 663 and a complementary solid body portion 665. The complementary baffle plate 600B may further include a complementary connecting hole 667 having a complementary reference point 668. The complementary reference point 668 may be oriented toward the complementary opening 663. The complementary openings 663 may be equidistant around the center of the complementary baffle plate 600B.

[0057] The connecting rod, which may connect the baffle plate 600A and the complementary baffle plate 600B, may include a cross-sectional shape complementary to the connecting hole 647 and the complementary connecting hole 667. That is, the connecting rod may include a body and a protrusion complementary to the reference point 648 and the complementary reference point 668. The shapes and orientations of the connecting hole 647 and the complementary connecting hole 667 and the reference point 648 and the complementary reference point 668, respectively, may offset the rotational positions of the baffle plate and the complementary baffle plate about the connecting rod relative to each other within the baffle plate stack. The reference point 648 may be aligned with the solid body portion 635 of the baffle plate 600A and / or with the space between the openings 633, and the complementary reference point 668 may be aligned with the complementary opening 663 of the complementary baffle plate 600B. Thus, the openings 633 of the baffle plate 600A may be in line and / or aligned with the complementary solid body portions 665 of the complementary baffle plate 600B and / or with the spaces between the complementary openings 663 along an axis extending through the baffle plate stack, and the complementary openings 663 of the complementary baffle plate 600B may be in line and / or aligned with the solid body portions 635 of the baffle plate 600A and / or with the spaces between the openings 633 along an axis extending through the baffle plate stack.

[0058] 7A and 7B depict a baffle plate 700A and a complementary baffle plate 700B according to various embodiments. Baffle plate 700A may include an opening 733 and a solid body portion 735. Baffle plate 700A may further include a connecting hole 747 having a reference point 748. Reference point 748 may be oriented toward the solid body portion 735 and / or the space between openings 733. Openings 733 may be equidistant about the center of baffle plate 700A.

[0059] The complementary baffle plate 700B may include a complementary opening 763 and a complementary solid body portion 765. The complementary baffle plate 700B may further include a complementary connecting hole 767 having a complementary reference point 768. The complementary reference point 768 may be oriented toward the complementary opening 763. The complementary openings 763 may be equidistant about the center of the complementary baffle plate 700B.

[0060] The connecting rod, which may connect baffle plate 700A and complementary baffle plate 700B, may include a cross-sectional shape complementary to connecting hole 747 and complementary connecting hole 767. That is, the connecting rod may include a body and protrusion complementary to reference point 748 and complementary reference point 768. The shapes and orientations of connecting hole 747 and complementary connecting hole 767 and reference point 748 and complementary reference point 768, respectively, may offset the rotational positions of the baffle plate and complementary baffle plate about the connecting rod relative to one another within the baffle plate stack. Reference point 748 may align with solid body portion 735 of baffle plate 700A or the space between openings 733, and complementary reference point 768 may align with complementary opening 763 of complementary baffle plate 700B. Thus, the openings 733 of the baffle plate 700A may be in line and / or aligned with the complementary solid body portions 765 of the complementary baffle plate 700B and / or with the spaces between the complementary openings 763 along an axis extending through the baffle plate stack, and the complementary openings 763 of the complementary baffle plate 700B may be in line and / or aligned with the solid body portions 735 of the baffle plate 700A and / or with the spaces between the openings 733 along an axis extending through the baffle plate stack.

[0061] Any of the baffle plate and complementary baffle plate pairs (or individual plates) discussed herein may be incorporated into a baffle plate stack (e.g., to replace baffle plate 300A and complementary baffle plate 300B in baffle plate stack 400B).

[0062] In various embodiments, between each baffle plate and its complementary baffle plate in the baffle plate stack, there may be a spacer configured to separate adjacent baffle plates and complementary baffle plates. For example, referring to FIG. 4B , baffle plate 300A and complementary baffle plate 300B may be separated by spacer 303 (an example of spacer 133 in FIG. 2 ). Spacers may be disposed between all plates in the baffle stack to achieve any desired spacing between two plates (e.g., between a baffle plate and a complementary baffle plate, between an end plate and a baffle plate and / or a complementary baffle plate, etc.). Such spacing may achieve a desired pressure drop in the fluid stream flowing through trap housing 103 and the openings and complementary openings in the baffle plates and complementary baffle plates contained therein.

[0063] In various embodiments, the baffle plate stack may include at least one end plate disposed adjacent to the first and / or last baffle plate (or complementary baffle plate) in the baffle plate sequence. The end plate may have end plate connecting holes similar to the connecting holes in the baffle plate and the complementary connecting holes in the complementary baffle plate configured to engage with a connecting rod. The end plate may further include at least one end plate opening disposed through the end plate body between the first and second surfaces of the end plate. For example, as shown in FIG. 4A , end plate 410 may include end plate opening 412. The end plate openings may be disposed through the end plate in any suitable design or arrangement. In various embodiments, the portion of the end plate that does not include an opening may be an end plate solid body portion (e.g., end plate solid body portion 414).

[0064] In various embodiments, an end plate (e.g., end plate 410 in FIG. 4A ) can be configured to be positioned adjacent to the inner surface of the first or second end of the trap housing 103 such that the outer surface of the end plate can abut and / or contact the inner surface of the trap housing 103. Such a configuration can allow for greater thermal conductance into the baffle plate stack from an external heat source, such as, for example, a heater jacket (e.g., heater jacket 800 shown in FIG. 8 ) configured to be coupled around the contaminant trap system 100 and / or trap housing 103. In various embodiments, an end plate (e.g., end plate 420 in FIG. 4B ) can be configured to be spaced apart from the inner surface of the first or second end of the trap housing 103 such that a space exists between the outer surface of the end plate and the inner surface of the trap housing 103. The space between the inner surface of the trap housing 103 and the end plate can be achieved by the end plate including a flange (e.g., flange 424) or a spacer disposed between the inner surface of the trap housing 103 and the end plate. Such a configuration may achieve a desired pressure drop in the fluid flow through the trap housing 103 and / or provide a larger area for contaminant deposition within the trap housing 103 and baffle plate stack (e.g., baffle plate stack 400B).

[0065] In various embodiments, the end plates can include end plate openings and / or end plate opening arrangements that align the end plate openings in series with and / or with openings disposed through adjacent plates in the baffle plate stack (e.g., along an axis extending through the baffle plate stack). For example, end plate opening 422 of end plate 420 may be in series with and / or aligned with openings 331 and / or 333 of baffle plate 300A along an axis extending through the baffle plate stack. This allows fluid entering and passing through trap housing 103 and baffle plate stack 400B closer to fluid inlet 101A to deposit less contaminants on the plates, thereby reducing the risk of contaminant outgassing from contaminant trap system 100 to upstream components, such as a reaction chamber.

[0066] In various embodiments, the plates in the baffle stack, including the baffle plate, complementary baffle plate, and end plate, may be connected to a connecting rod and secured by fasteners. For example, fasteners 402 (e.g., screws, nails, clamps, etc.) may engage with connecting rod 450 (e.g., via threading, force, and / or the like) to secure baffle plate 300A, complementary baffle plate 300B, end plate 420, and / or spacer 303.

[0067] In various embodiments, fastener 402 may be disposed in and / or coupled to a sleeve 407, which may be disposed on the end of connecting rod 450. Sleeve 407 may be configured to provide a buffer between fastener 402 and adjacent surfaces of connecting rod 450 to prevent galling.

[0068] In various embodiments, one or more plates in a baffle plate stack may include an indicator to easily communicate to a user or assembler of the baffle plate stack which plate is placed in which baffle plate stack position. Thus, in various embodiments, for example, baffle plate 300A may include indicator 304 (e.g., a notch) to easily indicate that a notched or otherwise marked plate is baffle plate 300A. Thus, a user or assembler of the baffle plate stack can easily identify whether the correct order of the baffle plate and complementary baffle plate has been achieved. Any of the plates in the baffle plate stacks discussed herein may include an indicator.

[0069] In various embodiments, the baffle plate stack may be palindromic, such that the order of components is the same at either end of the baffle plate stack. As shown in FIG. 4B , the baffle plate stack 400B begins and ends with end plate 420, with an odd number of baffle plates 300A alternating with an even number of complementary baffle plates 300B, such that the baffle plate order begins with baffle plate 300A and ends with baffle plate 300A. Thus, a person assembling the contaminant trap system may insert the baffle plate stack 400B into the trap housing 103 without worrying about whether the baffle plate stack 400B is upside down or upside down.

[0070] In various embodiments, any surface of the baffle plate stack or other contaminant trap system component that interacts with the fluid flowing through the contaminant trap system may receive contaminant deposits (which is an objective of the methods and systems discussed herein to remove contaminants from the fluid to avoid contamination of downstream reactor system components). Therefore, to increase the available surface area of ​​the component, the surface may be textured (e.g., by bead blasting). For example, the surfaces of the baffle plate and complementary baffle plate (including their outer edges), the spacer, the inner wall of the trap housing, the edges of the openings and complementary openings, and / or any other surface may be textured.

[0071] In various embodiments, the components of the contaminant trap system 100 may be clamped and / or sealed together by a clamping ring 144. The clamping ring 144 may be disposed around the upper housing 103A and / or the lower housing 103B and may be configured to be tightened to hold the components of the contaminant trap system 100 together.

[0072] In various embodiments, the trap structure included within the contaminant trap system may include structures for trapping contaminants other than the baffle plate stack discussed above. For example, with reference to FIGS. 10A and 10B , the contaminant trap system may include a trap structure 1000 disposed within a trap housing (e.g., trap housing 103 shown in FIG. 2 ) that includes a plurality of rods 1055. The rods 1055 may be arranged in an array 1050 to direct fluid flowing between the rods 1055 along a desired path. The rods 1055 may extend between components within the trap structure 1000 that may provide stability for the rods 1055. For example, the rods 1055 may be coupled to and / or extend between the baffle plate 1010 and the base plate 1020. The rods 1055 may be substantially perpendicular to the baffle plate 1010 and / or base plate 1020 and / or may be substantially parallel to an axis extending between the fluid inlet 101A and the fluid outlet 101B of the trap housing 103 (shown in FIG. 2 ) (as used in this context, the term “substantially” means plus or minus 20 degrees from perpendicular or parallel, respectively). In various embodiments, the rods in the trap structure may be integral or monolithic with the baffle plate and / or base plate.

[0073] 10A and 10B , the baffle plate 1010 may include recesses 1014 disposed in an inner surface 1011 of the baffle plate 1010. The recesses 1014 may include a shape complementary to the cross-sectional shape of a respective rod 1055. A first end 1052 of each rod 1055 may be disposed within a respective recess 1014, thereby coupling the rod 1055 to the baffle plate 1010. Similarly, in various embodiments, the base plate 1020 may include recesses 1024 disposed within an inner surface 1021 of the base plate 1020 (the inner surface 1021 of the base plate 1020 may face the baffle plate 1010). The recesses 1024 may include a shape complementary to the cross-sectional shape of a respective rod 1055. A second end 1054 of each rod 1055 may be disposed within a respective recess 1024, thereby coupling the rod 1055 to the base plate 1020. The rods of the trap structure may be connected to the baffle plate and / or base plate by the rods lodging in respective recesses in the baffle plate and / or base plate, by a tight fit within respective recesses threaded into the base plate, the baffle plate, and the rod end, allowing the rods to be screwed into the base plate and / or baffle plate, etc.

[0074] In various embodiments, the rod may be coupled to the baffle plate and / or base plate in any suitable manner, such as, for example, via welding, clamping between the baffle plate and base plate, adhesive, etc., whether or not the baffle plate and / or base plate have a recess configured to receive the rod.

[0075] In various embodiments, the trap structure may include a central support (e.g., central support 1025), which may be configured to connect two or more components of the trap structure. For example, the central support 1025 of the trap structure 1000 may connect the baffle plate 1010 to the base plate 1020, with the rod 1055 disposed therebetween. The central support 1025 may be disposed through a support hole 1016 in the baffle plate 1010 configured to be received therethrough. The shape of the support hole 1016 may be complementary to the cross-sectional shape of the central support 1025. The central support 1025 may be coupled and / or secured to the baffle plate 1010 by fasteners (e.g., nuts 1002 and / or seals 1004) disposed around the central support 1025 and in contact with the baffle plate 1010. In various embodiments, the fasteners may include threads complementary to the threads on the central support such that the fasteners are threaded into the central support and then tightened against the base plate to press the baffle plate and base plate together. Thus, in various embodiments, the rods 1055 disposed between the baffle plate 1010 and the base plate 1020 may be held in place by force from the central support 1025 and the fasteners 1002 between the baffle plate 1010 and the base plate 1020. The central support may be a separate component or may be integral or monolithic with the baffle plate and / or base plate of the trap structure.

[0076] In various embodiments, the rods 1055 may be disposed around (i.e., around) a central region of the base plate (e.g., at or proximal to the central support 1025 of the base plate 1020). The central region may not include any rods. The central region may include one or more flow holes (e.g., flow hole 1027) disposed through the base plate through which fluid may flow through the contaminant trap system and trap structure. Thus, due to airflow through the trap housing (e.g., caused by vacuum pressure from the vacuum pump 28 shown in FIG. 1 ), fluid flowing through the trap housing (including the lower housing 103B) may be required to exit the trap structure 1000 through the flow hole 1027 and flow through the array 1050 of rods 1055 while contacting the rods 1055 before exiting the trap housing through the fluid outlet 101B of the trap housing. The flow holes may be aligned and / or offset from the fluid outlet 101B.

[0077] In various embodiments, the rods within the trapping structure may be arranged in any suitable arrangement. For example, the rods 1055 may be spaced apart (i.e., not touching each other) or may contact each other so that fluid can flow between the rods 1055. The spacing of the rods may provide a convoluted path for fluid flowing through the trapping structure, thereby contacting more surfaces and increasing the likelihood that contaminants in the fluid will be deposited on such surfaces within the trap. The rods may include any suitable shape or length. For example, the rods may have a circular cross-sectional shape (such as that shown in FIGS. 10A and 10B), or the rods may have, for example, a hexagonal, octagonal, triangular, or square cross-sectional shape, or any other suitable cross-sectional shape. As another example, the rods may have a cross-sectional length (e.g., a diameter of a circle) of approximately 2 millimeters (mm) (as used in this context, "approximately" means plus or minus 0.5 mm). As another example, the rod may have a length (e.g., the distance extending between the baffle plate and the base plate) of about 20 centimeters (cm) (as used in this context, "about" means plus or minus 5 cm). The rod may include a high surface area to volume ratio, for example, a surface area to volume ratio of at least 50:1, at least 100:1, at least 150:1, or at least 200:1. In various embodiments, the rod may include a textured outer surface threaded along the rod or any other structure configured to increase the outer surface area of ​​the rod for contaminant deposition thereon.

[0078] The rods of the trap structure may comprise any suitable material, such as steel, aluminum, or any other metal or alloy thereof, ceramic material, or the like.

[0079] In various embodiments, a base plate (e.g., base plate 1020) of the trap structure may be disposed within the trap housing and may support other components of the trap structure. In various embodiments, the outer side of base plate 1020 (opposite inner side 1021) may be disposed spaced apart from the bottom surface of the trap housing (housing bottom surface 102). To support the base plate spaced apart from the bottom surface of the trap housing, the trap housing may include supports (e.g., supports 1006) protruding from the trap housing to hold the base plate in place. For example, supports 1006 may protrude from the inner wall of the trap housing to support base plate 1020 in place, spaced apart from the bottom surface 102 of the trap housing. In various embodiments, supports may protrude from another surface of the trap housing, such as the bottom surface, to hold the base plate in place. In various embodiments, the outer surface of the base plate may be disposed against or adjacent to the bottom surface of the trap housing.

[0080] In various embodiments, a baffle plate (e.g., baffle plate 1010) of the trap structure can direct fluid flow entering the trap housing to take a specific path (e.g., a path that increases the flow of fluid around and in contact with the rod 1055 and / or increases the removal of contaminants from the fluid). The baffle plate 1010 can reduce or prevent the flow of fluid moving around the first end 1052 of the rod 1055. That is, the baffle plate 1010 can form at least a partial seal between the baffle plate 1010 and the first end 1052 of the rod 1055. In various embodiments, the shape of the baffle plate 1010 can be smaller than the cross-sectional shape of the trap housing so that the baffle plate edge 1012 does not contact the inner wall of the trap housing. Thus, there may be spaces between the baffle plate edge and the inner wall of the trap housing and / or between the rods 1055 and the inner wall of the trap housing (e.g., spaces 1075 between the inner wall of the lower housing 103B and the baffle plate edge 1012 and / or rods 1055). The baffle plate 1010 may be configured to direct at least a portion of the fluid flow within the trap housing around the baffle plate edge 1012, toward and through the array 1050 of rods 1055 (e.g., through spaces 1075), and toward the flow holes 1027.

[0081] In various embodiments, the base plate may form at least a partial seal with the inner wall of the trap housing. For example, the outer edge of the base plate 1020 may be positioned against or adjacent to the inner wall of the lower housing 103B such that little or no fluid passes therebetween. Thus, fluid flowing through the trap structure 1000 may be directed around the baffle plate 1010 (and / or through a baffle plate that includes holes disposed therethrough), through the array 1050 of rods 1055, and exit the trap structure 1000 through the flow holes 1027. Thus, contaminants in the fluid may accumulate on surfaces of the trap structure (e.g., the outer surface 1053 of the rods 1055, the baffle plate 1010, the base plate 1020, etc.) with little or no fluid flow between the base plate 1020 and the inner wall of the trap housing.

[0082] The arrangement of the components of the trapping structure 1000 may allow for greater thermal conductance therethrough. Heating the trapping structure may allow for increased contaminant film growth rates on the trapping system components and improved properties of the trapped contaminant film, such as increased density and reduced flaking. Thermal energy may easily transfer through the base plate, rods, and / or baffle plates, regardless of whether the thermal energy is provided externally and / or internally. In various embodiments, the trapping structure 1000 may be heated externally, for example, by a heater jacket (e.g., heater jacket 800 shown in FIG. 8 ) coupled around the contaminant trapping system and / or trap housing, including the trapping structure 1000. In various embodiments, the trapping structure 1000 may be heated internally (e.g., in the base plate 1020 and / or central support 1025 including the heater 1026), for example, by a heater (e.g., heater 1026 shown in FIG. 10B ) disposed within or coupled to components of the trapping structure 1000. Particularly in embodiments in which the rod 1055 comprises a metallic material such as steel or aluminum (or an alloy thereof), thermal energy is readily transferred between the base plate 1020 (which receives thermal energy from the heater 1026 and / or from the heater jacket through the trap housing), the rod 1055, and the baffle plate 1010.

[0083] In various embodiments, trap structures such as the trap structure 1000 comprising rods 1055 disposed between the baffle plate 1010 and the base plate 1020 may provide ample surface area on which contaminants may accumulate, as well as the benefits of being reusable and easy to maintain. Depending on the trap structure 1000 being used and / or saturated with contaminants, the components of the trap structure 1000 (e.g., the rods 1055, the baffle plate 1010, and the base plate 1020) may be disassembled (and / or removed from the trap housing), easily cleaned, and reassembled for subsequent use. The trap structure may be disassembled, for example, by separating the fasteners 1002 from the central support 1025. If one or more components are damaged or require replacement, such replacement can be easily completed. Other existing components for trap structures are single-use items and / or are difficult to clean.

[0084] In various embodiments, a trap structure included within a contaminant trap system may include multiple tubes through which fluid may flow. Each tube may include a bore (e.g., bore 1157) disposed through the entire length of the tube, allowing contaminants to deposit on the inner and outer surfaces of the tube. For example, with reference to FIG. 11 , a trap structure 1100 may include an array 1150 of tubes 1155. The trap structure 1100 may be positioned within a trap housing (e.g., the trap housing 103 shown in FIG. 2 ) such that the tubes 1155 extend at least partially between the trap housing top and bottom surfaces (e.g., along the direction of fluid flow through the trap housing and / or substantially parallel to an axis extending between the fluid inlet 101A and the fluid outlet 101B of the trap housing 103 (shown in FIG. 2 ) (the term “substantially,” as used in this context, means plus or minus 20 degrees from parallel). The tube array in the trap structure can be complementary to the shape of the trap housing such that tubes on the periphery of the tube array can abut or be positioned adjacent to the inner wall of the trap housing. For example, the array 1150 of tubes 1155 can be configured to be positioned in a hexagonal trap housing. In various embodiments, the tubes of a tube array for a trap structure can comprise a circular array configured to be positioned in a circular trap housing (e.g., in the lower trap housing 103B shown in FIG. 10A).

[0085] The tubes may be arranged relative to one another in any suitable manner. The tube arrangement may be configured to limit or minimize the space between the tubes. For example, as shown in FIG. 11 , according to various embodiments, the tubes 1155 may be grouped in a hexagon, such that each tube 1155 (excluding the outer tubes) is surrounded by six other tubes 1155. Thus, each tube 1155 (excluding the outer tubes) may abut or contact six other tubes 1155. This hexagonal packing allows for uniform packing of the tubes 1155, limits the space between them, and provides dense packing with circular tubes. Such dense packing prevents the tubes from shifting relative to one another. The hexagonal packing of the tubes also creates concave triangular spaces (e.g., space 1159) between the contacting tubes. These spaces between the tubes may provide additional space for fluid to pass through and additional surface area (outside of the tubes) on which contaminants may accumulate. The hexagonal packing of the tubes does not necessarily apply to the outer shape of the tube array, but may also be implemented with tube arrays having a circular outer shape.

[0086] The tubes of the trapping structure may include any suitable shape or size. In various embodiments, the tubes may include a circular cross-sectional outer shape (e.g., tube 1155) or any other suitable cross-sectional shape configured to allow for the desired arrangement of the tubes. In various embodiments, the bores of the tubes may include a circular cross-sectional shape (e.g., bore 1157) or any other suitable cross-sectional bore shape. In various embodiments, the tubes may have a cross-sectional length (e.g., outer diameter of tube 1155) of about 2 millimeters (mm). In various embodiments, the tubes may have an inner diameter (e.g., length across a bore, such as the diameter of bore 1157) of approximately 1 mm (as used in this context, "about" means plus or minus 0.5 mm). In various embodiments, the tubes may have a length of about 20 centimeters (cm) (as used in this context, "about" means plus or minus 5 cm). The tubes may comprise a high surface area to volume ratio, e.g., at least 50:1, at least 100:1, at least 150:1, or at least 200:1. For example, a hexagonal packing arrangement of tubes about 20 cm long having an outer diameter of about 2 mm and an inner diameter of 1 mm, filling a trap housing having a diameter of about 19 cm, provides a significant surface area for receiving contaminant deposits. The surface area of ​​the tube bores in this example provides a capture surface of about 6 square meters, and the interstices (e.g., spaces 1159) between the tubes provide a capture area of ​​just under 6 square meters, for a total surface area of ​​about 12 square meters. Assuming a typical deposition process in a reactor produces a contaminant deposit of 3 square micrometers in the trap, the surface area provided by a trap structure comprising tubes of the considered arrangement and dimensions would allow the trap structure to be used for many deposition cycles before requiring maintenance or replacement.

[0087] In various embodiments, the outer and / or inner surface of the tube may include a textured outer surface that threads along the outer and / or inner surface, or any other structure configured to increase the outer surface area of ​​the tube for depositing contaminants thereon.

[0088] In various embodiments, the tubes may be connected within the trap housing in any suitable manner, such as with adhesive, welding, and / or a tight fit. As shown in Figure 11, the tubes 1155 are connected together to maintain the arrangement 1150 by a tensioning device 1188, which may be a clamping ring (similar to clamping ring 114), a belt, an elastic band, or the like.

[0089] In various embodiments, the array 1150 of tubes 1155 can include at least one support 1125. The support 1125 can be a rod or other structure that projects outward from at least the bottom of the array 1150 (i.e., the support 1125 extends closer to the bottom surface of the trap housing than the tubes 1155). In various embodiments, the array of tubes can include multiple supports (e.g., three supports 1125 as shown in FIG. 11). The supports 1125 can be configured to support the array 1150 of tubes 1155 such that there is a space between the bottom of the tubes 1155 and the bottom surface of the trap housing (e.g., bottom surface 102 when the trap structure 1100 is disposed in the lower trap housing 103B, as shown in FIG. 10A). Similarly, there can be a space between the top of the tubes 1155 and the top surface of the trap housing when disposed within the trap housing. For example, the tube array 1150 may simply remain in a position within the trap housing that creates a space between the tops of the tubes 1155 and the top surface of the trap housing (e.g., due to the way the trap housing's upper and lower housings fit together). As another example, the supports 1125 may also protrude outward from the top of the array 1150 (i.e., the supports 1125 extend closer to the trap housing's top surface than the tubes 1155). Thus, when the trap housing's lid or upper housing is placed on the trap structure, the lid or upper housing will rest against the tips of the supports 125, thereby creating a space between the trap housing's top surface and the tops of the tubes 1155. This space allows fluid to flow and disperse within the trap housing (e.g., through the fluid inlet 101A shown in FIG. 2), utilizing more tubes 1155 to capture contaminants.

[0090] In various embodiments, structures such as baffle plates with holes, showerheads, or the like may be placed above the tube array of the trap housing in a desired manner to distribute the fluid flowing into the tube array of the trap housing and increase utilization of the surface area provided by the tubes.

[0091] The arrangement of the components of the trapping structure 1100 may allow for greater thermal conductance therethrough. Heating the trapping structure may allow for increased contaminant film growth rates on trapping system components and improved properties of the trapped contaminant film, such as increased density and reduced flaking. Thermal energy may easily travel through the trap housing, support 1125, and / or tubes, whether the thermal energy is provided externally and / or internally. In various embodiments, the trapping structure 1100 may be heated externally, for example, by a heater jacket (e.g., heater jacket 800 shown in FIG. 8 ) coupled around the contaminant trap system and / or trap housing, including the trapping structure 1100. In various embodiments, the trapping structure 1100 may be heated internally, for example, by a heater disposed in the array 1150 of tubes 1155. For example, a tube in the tube array (e.g., a tube at or near the center of the array) may be replaced with a heater, and / or the support 125 may be or include a heater. In particular in embodiments in which the tube 1155 comprises a metallic material such as steel or aluminum (or an alloy thereof), thermal energy readily travels through the tube 1155 and / or the support 1125 (e.g., when receiving thermal energy from a heater jacket through a trap housing or from an internal heater).

[0092] In various embodiments, trap structures such as trap structure 1100 with tube 1155 may have the benefits of being reusable and easy to maintain, in addition to providing abundant surface area on which contaminants may accumulate. Depending on the trap structure 1100 being used and / or saturated with contaminants, components of trap structure 1100 (e.g., tube 1155, support 1125, tensioning device 1188) may be easily removed from the trap housing and / or disassembled, cleaned, and reassembled for subsequent use. The trap structure may be disassembled, for example, by separating tensioning device 1188 from tube 1155. If one or more components are damaged or require replacement, such replacement can be easily completed.

[0093] In various embodiments, a trap structure included in a contaminant trap system may comprise a corrugated sheet through which fluid may flow and upon which contaminants may be deposited. Referring to FIG. 12 , according to various embodiments, a corrugated trap structure 1200 may include a corrugated sheet 1250 coupled to a non-corrugated sheet 1280. A space 1260 between the corrugated sheet 1250 and the non-corrugated sheet 1280 may allow fluid to flow therethrough and contaminants to be deposited on the surface area provided by the sheet in the space 1260. The corrugated trap structure 1200 may be disposed within a trap housing (e.g., trap housing 103 shown in FIG. 2 ) such that the space 1260 extends at least partially between the top and bottom surfaces of the trap housing (e.g., along the direction of fluid flow through the trap housing). The sheets 1250 and 1280 may be spiraled in any suitable shape (e.g., a circular shape as shown in FIG. 12 , or a square, triangular, rectangular, hexagonal, or octagonal shape). The outer shape of the spiraled sheet can be complementary to the shape of the trap housing in which the trap structure is disposed. For example, the corrugated trap structure 1200 can be configured to be disposed in a circular trap housing, such as the trap housing 103 shown in FIG. 2. Thus, the corrugated or non-corrugated sheet can abut or be disposed adjacent to the inner wall of the trap housing. The corrugated and non-corrugated sheets can be spiraled or arranged such that the central void 1205 is reduced or minimized so that fluid flowing through this central void 1205 flows through the space 1260 as opposed to other paths through the corrugated trap structure 1200.

[0094] In various embodiments, the corrugated trap structure 1200 may include at least one support (e.g., support 1125 in FIG. 11 ). The support may be a rod or other structure that projects outward from the bottom and / or top of the corrugated trap structure 1200. Such a support may be configured to support the corrugated trap structure 1200 such that there is space between the bottom and / or top of the corrugated trap structure 1200 and the bottom and / or top surface of the trap housing. Thus, space may be created between the bottom of the corrugated trap structure 1200 and the bottom surface of the trap housing, and / or between the top of the corrugated trap structure 1200 and the top surface of the trap housing. Such space allows fluid flowing into the trap housing (e.g., through the fluid inlet 101A shown in FIG. 2 ) to distribute and utilize (i.e., flow into) more of the space 1260 to capture contaminants.

[0095] In various embodiments, a structure such as a baffle plate with holes, a showerhead, or the like may be positioned above the corrugated trap structure of the trap housing in a desired manner to distribute fluids flowing into the corrugated trap structure of the trap housing and increase utilization of the surface area provided for contaminant deposition.

[0096] The arrangement of the components of the corrugated trapping structure 1200 may allow for greater thermal conductance therethrough. Heating the trapping structure may allow for increased contaminant film growth rates on the trapping system components and improved properties of the trapped contaminant film, such as increased density and reduced flaking. Thermal energy may easily travel through the corrugated trapping structure 1200, regardless of whether the thermal energy is provided externally and / or internally. In various embodiments, the corrugated trapping structure 1200 may be heated externally, for example, by a heater jacket (e.g., heater jacket 800 shown in FIG. 8 ) coupled around the contaminant trap system and / or trap housing, including the corrugated trapping structure 1200. In various embodiments, the corrugated trapping structure 1200 may be heated internally, for example, by a heater disposed through the void 1205 or a heater contained within a support disposed through the void 1205. In particular in embodiments in which the corrugated trap structure 1200 comprises a metallic material such as steel or aluminum (or an alloy thereof), thermal energy easily travels through the corrugated trap structure 1200 (e.g., when receiving thermal energy from a heater jacket through the trap housing or from an internal heater).

[0097] In various embodiments, the contaminant trap system, and the components included therein, may be completely free of adhesives or other connecting materials to connect any components. The absence of adhesives, epoxies, or other connecting materials reduces the risk of such connecting materials outgassing and migrating to the reaction chamber and acting as contaminants therein. Furthermore, without such connecting materials, the components of the systems discussed herein may be less susceptible to degradation at high temperatures, e.g., above 120°C. Thus, the contaminant trap system (e.g., contaminant trap system 100 of FIG. 2 ) and the trapping structures included therein may be moved closer to the reaction chamber of a reactor system (e.g., reaction chamber 4 of reactor system 50 of FIG. 1 ) compared to a contaminant trap system including connecting materials. Thus, reactor systems having contaminant trap systems according to the embodiments discussed herein may be more compact and / or have more feasible configurations and special arrangements.

[0098] The contaminant trap systems discussed herein may be configured to increase surface area, thereby allowing more opportunities for fluid to flow through and contact that surface area and deposit contaminants thereon. Thus, for example, as discussed herein, openings in a baffle plate may not be aligned and / or in-line with complementary openings in adjacent, complementary baffle plates in a baffle plate stack. As another example, rods (e.g., rods 1055) may be arranged such that there is a nonlinear path from the periphery of the rod array to a flow hole (e.g., flow hole 1027), allowing fluid to exit the trap structure. As yet another example, conduits (e.g., conduit 1155) and / or spaces (e.g., space 1260) through a corrugated trap structure (e.g., corrugated trap structure 1200) may allow contaminants within the fluid to deposit on surfaces within the conduit or path through the corrugated trap structure.

[0099] 9 illustrates a method 900 for flowing a fluid through a contaminant trap system of a reaction system, according to various embodiments. With additional reference to FIGS. 2 and 4B, a fluid may flow from a reaction chamber (e.g., reaction chamber 4 of FIG. 1) to a contaminant trap system (e.g., contaminant trap system 100 of FIG. 2) (step 902). Contaminant trap system 100 may include a fluid inlet 101A and a fluid outlet 101B of a trap housing 103. The fluid may flow through fluid inlet 101A and into contaminant trap system 100. The fluid may include materials that the contaminant trap system is configured to remove from the fluid (e.g., contaminants).

[0100] In various embodiments, the fluid may flow through a contamination trap structure included within the contaminant trap system (step 904). The trap structure may include any suitable structural arrangement for collecting contaminants from the fluid, such as the structural arrangements discussed herein. In various embodiments, the trap structure within the contamination trap may include a baffle plate stack 400B (e.g., the example baffle plate stack 130 of FIG. 2) in the contaminant trap system 100. Thus, the fluid may flow through a plurality of complementary baffle plates 300B and a plurality of baffle plates 300A that are in alternating positions in the baffle plate sequence. The fluid may also flow through at least one end plate (e.g., end plate 420) included in the baffle plate stack on either end of the baffle plate stack. In various embodiments, the fluid may flow through a trap structure including rods, tubes, and / or corrugated and non-corrugated sheets, as discussed herein.

[0101] To flow through the baffle plate stack 400B, fluid may flow through the first end plate 420 via end plate openings 422 and / or around the outer edge of end plate 420. As the fluid flows through the sequence of baffle plates in the baffle plate stack 400B, it may contact the top and bottom surfaces 322 and 324 of baffle plate 300A, the complementary top and bottom surfaces 352 and 354 of complementary baffle plate 300B, and pass through openings 331 and 333 in baffle plate 300A and complementary openings 361 and 363 in complementary baffle plate 300B. The openings 331 and 333 in baffle plate 300A may be disposed through baffle plate 300A and aligned with the complementary baffle plate 300B such that the openings 331 and 333 may be aligned with the complementary solid body portion 365 of the complementary baffle plate 300B. Thus, in response to flowing through the openings 331 and 333 of the baffle plate 300A, the fluid may contact the complementary solid body portion 365 of the subsequent complementary baffle plate 300B in the baffle plate stack 400B. In response to contacting the complementary solid body portion 365 of the next complementary baffle plate 300B, the fluid may flow toward the fluid outlet 101B and through the complementary openings 361 and 363 of such complementary baffle plate 300B. The complementary openings 361 and 363 of the complementary baffle plate 300B may be disposed through the complementary baffle plate 300B and may be aligned with the baffle plate 300A such that the complementary openings 361 and 363 may be aligned with the solid body portion 335 of the baffle plate 300A. Thus, in response to flowing through the complementary openings 361 and 363 of the complementary baffle plate 300B, the fluid may contact the solid body portion 335 of the subsequent baffle plate 300A in the baffle plate stack 400B. In response to contacting the solid body portion 335 of the next baffle plate 300A, the fluid may flow toward the fluid outlet 101B and through the openings 331 and 333 of such baffle plate 300A.

[0102] The flow of fluid follows this flow pattern through the baffle plate sequence of baffle plate 300A and complementary baffle plate 300B until the fluid passes through the last plate in the baffle plate sequence. Fluid may flow through end plate 420 on the second end of baffle plate stack 400B, contacting a surface of such end plate 420 and flowing through end plate openings 422. While flowing through baffle plate stack 400B, fluid may further flow between the outer edges of baffle plate 300A and complementary baffle plate 300B and the inner wall surface of outer wall 105, interacting with and contacting those surfaces.

[0103] In various embodiments, to flow through a trap structure having rods (e.g., trap structure 1000), the fluid may flow into flow space 1075 while contacting the periphery of baffle plate 1010. The fluid may then travel through array 1050 of rods 1055 and contact rods 1055 before exiting trap structure 1000 through flow holes 1027.

[0104] In various embodiments, to flow through a trapping structure having a tube (eg, trapping structure 1100 ), the fluid may flow through tube 1155 before exiting trapping structure 1100 .

[0105] In various embodiments, to flow through a corrugated trapping structure (eg, corrugated trapping structure 1200 ), fluid may flow through space 1260 before exiting corrugated trapping structure 1200 .

[0106] In response to the fluid contacting the above-mentioned surfaces (e.g., baffle plates, complementary baffle plates, end plates, inner wall surfaces of outer wall 105, rods 1055, tubes 1155, corrugated and non-corrugated sheets 1250 and 1280, etc.), contaminants contained in the fluid may be deposited or collected from the fluid onto the surfaces of the contaminant trapping system and the respective trapping structures disposed therein (step 906). The surfaces in the contaminant trapping system, and their positions relative to one another, provide an increased surface area upon which such contaminant deposition may occur. Some of the surfaces may include texturing to provide additional available surface area.

[0107] In various embodiments, the fluid may flow through fluid outlet 101B and exit the contaminant trapping system (step 908).

[0108] The components of the systems discussed herein may be made of any suitable material, such as a metal or metal alloy (e.g., steel, aluminum, aluminum alloy, etc.).

[0109] While exemplary embodiments of the present disclosure are described herein, it should be understood that the present disclosure is not limited thereto. For example, while the reactor and contaminant trap system are described with reference to various specific configurations, the present disclosure is not necessarily limited to these examples. Various changes, modifications, and improvements can be made to the systems and methods described herein without departing from the spirit and scope of the present disclosure.

[0110] The subject matter of the present disclosure includes all novel and non-obvious combinations and subcombinations of the various systems, components, and configurations, as well as other features, functions, operations, and / or properties disclosed herein, and any and all equivalents thereof. [Explanation of symbols]

[0111] 4. Reaction Chamber 6 Susceptor 8 Fluid Distribution System 10, 12 Reactant Source 14 Purge gas source 16~20 lines 22~26 Valve or controller 28 Vacuum source 30 Base material 40 Contaminant Trap System 50 Reactor System 100 Contaminant Trap System 101A Fluid inlet 101B Fluid outlet 103 Trap Housing 103A Upper Housing 103B Lower Housing 130 baffle plate stack 132 Baffle plate 133 Spacer 134 Complementary Baffle Plate 136A First End Plate 136B Second end plate 144 Clamping ring 300A Baffle Plate 300B Complementary Baffle Plate 303 Spacer 322 Top surface 324 Bottom surface 325 Opening part 326 Baffle plate outer edge 331 First opening 333 Second opening 335 Solid body part 347 Connection hole 348 Reference point 352 complementary top surfaces 354 Bottom surface 355 Opening part 356 Baffle plate outer edge 361 First Complementary Opening 363 Second Complementary Opening 365 Complementary Solid Body Parts 367 Complementary connecting holes 368 Complementary Reference Points 400B Baffle Plate Stack 402 Fasteners 407 Sleeve 410 End Plate 412 End Plate Opening 414 End Plate Solid Body Part 420 End Plate 422 End Plate Opening 424 flange 450 connecting rod 500A Baffle Plate 500B Complementary Baffle Plate 533 Opening 535 Solid body part 547 Connection hole 548 Reference point 563 Complementary Openings 565 Complementary Solid Body Parts 567 Complementary connecting holes 568 Complementary Reference Points 600A Baffle Plate 600B Complementary Baffle Plate 633 Opening 635 Solid body part 647 Connection hole 648 Reference point 663 Complementary Openings 665 Complementary Solid Body Parts 667 Complementary connecting hole 668 Complementary Reference Points 700A Baffle Plate 700B Complementary Baffle Plate 733 Opening 735 Solid body part 747 Connection hole 748 Reference point 763 Complementary Openings 765 Complementary Solid Body Parts 767 Complementary connecting holes 768 Complementary Reference Points 800 heater jacket 1000 Trap Structure 1002 Nut 1004 Seal 1010 Baffle Plate 1011 Inner surface of baffle plate 1014 recess 1016 Support hole 1020 base plate 1021 Inner surface of base plate 1024 recess 1025 Central support 1027 Flow hole 1050 array 1052 First end of rod 1055 Rod 1075 Flow Space 1100 Trap Structure 1125 Support 1150 array 1155 tube 1157 Boa 1188 Tensioning Device 1200 Waveform trap structure 1205 Center gap 1250 corrugated sheet 1260 Space 1280 Non-corrugated sheet

Claims

1. 1. A contaminant trap system for a reactor system, comprising: a trap housing having an outer housing wall; a first baffle plate disposed within the trap housing, a first opening extending through a first baffle plate body between a first top baffle plate surface and a first bottom baffle plate surface of the first baffle plate; a first baffle plate comprising a first solid body portion; a first complementary baffle plate disposed within the trap housing in series with the first baffle plate between the first and second ends of the trap housing, a first complementary opening through a first complementary baffle plate body between a first top complementary baffle plate surface and a first bottom complementary baffle plate surface of the first complementary baffle plate; a first complementary baffle plate comprising a first complementary solid body portion; the first baffle plate and the first complementary baffle plate are included in a baffle plate stack; a first baffle plate and a first complementary baffle plate disposed within the trap housing such that the first opening of the first baffle plate and the first complementary solid body portion of the first complementary baffle plate are aligned along a first axis extending between the first end and the second end of the trap housing and overlap in a plan view of the first baffle plate, the first solid body portion of the first baffle plate and the first complementary opening of the first complementary baffle plate are aligned along a second axis extending between the first end and the second end of the trap housing and overlap in a plan view of the first baffle plate, and the first opening and the first complementary opening do not overlap in a plan view of the first baffle plate.

2. a connecting rod disposed within the trap housing and extending between the first end and the second end of the trap housing; The first baffle plate includes a first connecting hole disposed through the first baffle plate body, and the connecting rod is disposed through the first connecting hole; and 2. The contaminant trap system of claim 1, wherein the first complementary baffle plate includes a first complementary connecting hole disposed through the first complementary baffle plate body, and the connecting rod is disposed through the first complementary connecting hole.

3. 3. The contaminant trap system of claim 2, wherein the connecting rod has a non-circular cross-section, and the first connecting hole in the first baffle plate and the first complementary connecting hole in the first complementary baffle plate each include a shape complementary to the non-circular cross-section of the connecting rod.

4. 4. The contaminant trap system of claim 3, wherein the reference point of the first connecting hole and the complementary reference point of the first complementary connecting hole are arranged around the first baffle plate and the first complementary baffle plate such that the first opening and the first complementary solid body portion, and the first solid body portion and the first complementary opening, overlap, respectively, in a plan view of the first baffle plate, and the first opening and the first complementary opening do not overlap, in a plan view of the first baffle plate.

5. 5. The contaminant trapping system of claim 4, further comprising a spacer between the first baffle plate and the first complementary baffle plate, the spacer providing a space between the first baffle plate and the first complementary baffle plate.

6. a second baffle plate disposed within the trap housing, the second baffle plate comprising: a second opening extending through the second baffle plate body between the second top baffle plate surface and the second bottom baffle plate surface of the second baffle plate; a second solid body portion; 2. The contaminant trap system of claim 1, wherein the second baffle plate is positioned within the trap housing such that the first complementary baffle plate is between the first baffle plate and the second baffle plate, and the second baffle plate is positioned such that the second opening of the second baffle plate and the first complementary solid body portion of the first complementary baffle plate are aligned along the first axis and overlap in a plan view of the second baffle plate, the second solid body portion of the second baffle plate and the first complementary opening of the first complementary baffle plate are aligned along the second axis and overlap in a plan view of the second baffle plate, and the second opening and the first complementary opening do not overlap in a plan view of the second baffle plate.

7. The contaminant trapping system of claim 6 , wherein the first baffle plate and the second baffle plate are of the same design.

8. the baffle plate stack the first baffle plate is between an end plate and the first complementary baffle plate; or the first complementary baffle plate is positioned at least one of: The contaminant trapping system of claim 7 , wherein the end plate comprises an end plate opening and an end plate solid body portion.

9. 2. The contaminant trap system of claim 1, wherein the outer housing wall of the trap housing includes an inner wall surface, and an outer edge of at least one of the first baffle plate and the first complementary baffle plate is disposed adjacent to the inner wall surface such that at least a partial seal is formed between the outer edge of at least one of the first baffle plate and the first complementary baffle plate and the inner wall surface.

10. 10. The contaminant trapping system of claim 9, wherein at least one of the first top baffle plate surface, the first bottom baffle plate surface, the first top complementary baffle plate surface, the first bottom complementary baffle plate surface, the outer edge of at least one of the first baffle plate and the first complementary baffle plate, and the inner wall surface is textured.

11. The contaminant trap system of claim 1 further comprising a heater jacket coupled to the trap housing.

12. 2. The contaminant trap system of claim 1, wherein the first opening of the first baffle plate is included in a radially inner portion of the first baffle plate, and the first complementary opening of the first complementary baffle plate is included in a radially outer portion of the first complementary baffle plate.

13. 1. A baffle plate stack for a contaminant trap system, comprising: A plurality of baffle plates, each baffle plate comprising: an opening extending through a baffle plate body of each of the plurality of baffle plates; a plurality of baffle plates comprising a solid body portion; and a plurality of complementary baffle plates, each complementary baffle plate comprising: a complementary opening through a complementary baffle plate body of each complementary baffle plate of the plurality of complementary baffle plates; a plurality of complementary baffle plates comprising complementary solid body portions; the plurality of baffle plates and the plurality of complementary baffle plates are arranged in a baffle plate sequence between a first end and a second end of the baffle plate stack such that the plurality of baffle plates alternate with the plurality of complementary baffle plates, such that no two of the plurality of baffle plates and no two of the plurality of complementary baffle plates are adjacent in the baffle plate sequence; 10. A baffle plate stack for a contaminant trap system, wherein the plurality of baffle plates and the plurality of complementary baffle plates are arranged such that the openings of the plurality of baffle plates and the complementary solid body portions of the plurality of complementary baffle plates are aligned along a first axis extending between the first end and the second end of the baffle plate stack and overlap in a planar view of the plurality of baffle plates, the solid body portions of the plurality of baffle plates and the complementary openings of the plurality of complementary baffle plates are aligned along a second axis extending between the first end and the second end of the baffle plate stack and overlap in a planar view of the plurality of baffle plates, and the openings and the complementary openings do not overlap in a planar view of the plurality of baffle plates.

14. a connecting rod connected to each of the plurality of baffle plates and each of the plurality of complementary baffle plates, the connecting rod extending between the first end and the second end of the baffle plate stack; the connecting rod includes a cross section; 14. The baffle plate stack of claim 13, wherein each of the plurality of baffle plates comprises a connecting hole and each of the plurality of complementary baffle plates comprises a complementary connecting hole, wherein the connecting hole and the complementary connecting hole each include a shape complementary to the cross-section of the connecting rod.

15. 15. The baffle plate stack of claim 14, wherein the cross section of the connecting rod is non-circular, and the connecting holes and the complementary connecting holes are arranged around the plurality of baffle plates and the plurality of complementary baffle plates such that the openings and the complementary solid body portions and the solid body portions and the complementary openings overlap, respectively, in a plan view of the plurality of baffle plates, and the openings and the complementary openings do not overlap, in a plan view of the plurality of baffle plates.

16. 16. The baffle plate stack of claim 15, further comprising a plurality of spacers connected to the connecting rod, at least one of the plurality of spacers being disposed between each baffle plate and a complementary baffle plate of the plurality of baffle plates in the order of the baffle plates.

17. 17. The baffle plate stack of claim 16, further comprising an end plate disposed at least one of the first end or the second end of the baffle plate stack, the end plate comprising an end plate opening and an end plate solid body portion.

18. 14. The baffle plate stack of claim 13, wherein the plurality of baffle plates is one more than the plurality of complementary baffle plates such that the plurality of baffle plates and the plurality of complementary baffle plates are alternately arranged from the first end to the second end of the baffle plate stack, and a baffle plate is disposed at both the first end and the second end of the baffle plate stack.

Images