nebulizer

Abstract

Provided is a nebulizer having a multi-function applicable to liquid samples having various properties and flow volumes. The nebulizer (AA) has: a base part (10); and a tip part (50) bonded to a front surface (13) of the base part (10). The base part (10) has: a base part liquid flow path (20) through which a liquid inlet port (20i) and a liquid discharge port (20o) are communicated with each other; and a base part gas flow path (30) through which a gas inlet port (30i) and a gas discharge port (30o) are communicated with each other. The tip part (50) is composed of a plurality of flow path-forming plates (51A), (51B). The tip part (50) has: an injection hole (40) through which a mixed fluid composed of a gas and liquid droplets is injected; a tip part liquid flow path through which a liquid discharged from the liquid discharge port (20o) is guided to the injection hole (40); and a tip part gas flow path through which a gas discharged from the gas discharge port (30o) is guided to the injection hole (40).

Description

[Technical Field]

[0001] The present invention relates to nebulizers, and more particularly to nebulizers that atomize liquid samples for introduction into analytical devices. [Background technology]

[0002] Known atomic spectrometry methods include plasma emission spectrometry, atomic absorption spectrometry, and atomic fluorescence spectrometry. Known mass spectrometry methods include plasma mass spectrometry and liquid chromatography mass spectrometry. Liquid chromatography using a light scattering detector is also known. In the analytical instruments used for these analytical methods, a liquid sample is atomized using a nebulizer, and the resulting sample droplets are introduced into the excitation / ionization source of the analytical instrument.

[0003] There are various types of nebulizers. They can be broadly divided into pneumatic nebulizers and ultrasonic nebulizers. Of these, pneumatic nebulizers are small and simple to use, and are therefore often used in atomic spectrometers and mass spectrometers. Pneumatic nebulizers are further divided into concentric, cross-flow, entrained, Babington, and parallel-path (Burgener) nebulizers.

[0004] There are many types of pneumatic nebulizers, but all share the same nebulization principle: a high-velocity gas stream is collided with a liquid sample, and the shear force of the high-velocity gas breaks the liquid sample into fine droplets. The differences between types are primarily due to the configuration of the flow path through which the gas and liquid sample flow to the point where the high-velocity gas stream collides with the liquid sample and ejects the fine droplets.

[0005] A coaxial nebulizer has two tubes arranged coaxially, with a liquid sample flowing through the inner tube and a gas flowing between the outer and inner tubes. It is also possible to flow a gas through the inner tube and a liquid sample flowing between the outer and inner tubes. In a coaxial nebulizer, it is important to adjust the gap between the inner and outer tubes and the relative relationship between the tip positions of the inner and outer tubes. Regarding this point, Patent Document 1 discloses that the gap between the outer and inner tubes is adjusted by screwing in a nut surrounding the outer tube to compress the tip of the outer tube, and the relative relationship between the tip positions of the inner and outer tubes is adjusted by moving a screw member back and forth.

[0006] A cross-flow nebulizer has a liquid sample tube and a gas tube arranged at right angles to each other. A mixing nebulizer mixes the liquid sample and gas before the nozzle, and then ejects the mixture from the nozzle.

[0007] A Babington nebulizer spreads a liquid sample on a surface to form a liquid film, which is then passed over a gas outlet opened on the surface. Patent Document 2 discloses a nebulizer with a liquid flow path and a gas flow path inside a glass tube, and a V-shaped groove formed at the tip of the glass tube from the liquid outlet to the gas outlet. The liquid sample discharged from the liquid outlet flows down the V-shaped groove by gravity and is atomized at the gas outlet.

[0008] A parallel-path nebulizer has a liquid flow path and a gas flow path arranged in parallel, with the liquid outlet and the gas outlet adjacent to each other. Patent documents 3 and 4 disclose nebulizers in which a sample flow path and a gas flow path are formed in parallel inside a rod-shaped object, with the liquid outlet and the gas outlet adjacent to each other at the tip of the rod-shaped object. A parallel-path nebulizer does not require a flow path connecting the liquid outlet and the gas outlet.

[0009] Another nebulizer, disclosed in Patent Document 5, has a rod-shaped main body with parallel liquid and gas flow paths, and a mesh screen at the tip of the main body that spans the liquid and gas outlets. The liquid sample discharged from the liquid outlet travels through the mesh screen to the gas outlet, where it is atomized. This type of nebulizer is called a Hildebrand nebulizer. [Prior art documents] [Patent documents]

[0010] [Patent Document 1] Japanese Utility Model Application Publication No. 7-8948 [Patent Document 2] U.S. Patent No. 4,880,164 [Patent Document 3] U.S. Patent No. 5,411,208 [Patent Document 4] U.S. Patent No. 6,634,572 [Patent Document 5] U.S. Patent No. 4,941,618 Summary of the Invention [Problem to be solved by the invention]

[0011] Coaxial nebulizers use a long, thin capillary tube as the inner tube. This has several problems: (1) the inner tube is easily damaged; (2) the tip of the inner tube vibrates due to the high-speed gas flow, which can easily cause fluctuations in the rate at which fine droplets are generated; and (3) the nebulizer is susceptible to clogging with suspended solids or salt precipitates in the sample. Furthermore, the configuration disclosed in Patent Document 1 has problems such as the reproducibility of the gap between the outer and inner tubes and the relative position of the tips of the inner and outer tubes differing from product to product and easily varying over time.

[0012] Babington nebulizers do not suffer from the problems (1) to (3) above, but they do have the following problems: (4) the nebulizer's position is limited because the liquid sample flows downward by gravity; and (5) if a hydrophobic plastic material is used as the nebulizer material, the sample liquid film does not spread easily and may not pass over the gas outlet.

[0013] Parallel-path nebulizers do not suffer from the problems (1) to (5) above, but they do have the following problems: (6) they are ineffective at drawing up liquid samples, so a liquid delivery pump is required; and (7) the reproducibility of spray efficiency is somewhat lower than with coaxial nebulizers, and sample droplets can become larger, so sensitivity tends to be lower than with coaxial nebulizers.

[0014] Hildebrand nebulizers do not have the problems (1) to (5) above, but they do have the problem of (8) liquid sample tends to remain on the mesh screen, which requires time for cleaning, resulting in reduced analytical throughput.

[0015] Considering the various problems mentioned above, the fundamental cause of the problems with coaxial nebulizers appears to be the use of a long, thin capillary tube as the inner tube. In non-coaxial nebulizers, the flow path connecting the liquid outlet and gas outlet is an unrestricted space (V-shaped groove in the Babington type, the surface between the liquid and gas outlets in the parallel-path type, and a mesh screen in the Hildebrand type), which has the advantage of suppressing clogging with suspended matter. However, the unrestricted space flow path causes problems such as limited nebulizer positioning, the need for a liquid delivery pump due to its ineffectiveness in drawing up liquid samples, and reduced analytical throughput.

[0016] As described above, there is no nebulizer that is superior in all respects, and currently, each type is used depending on the characteristics of the liquid sample (salt concentration, amount of suspended matter, viscosity, etc.), taking into account the advantages and disadvantages of each type.

[0017] Furthermore, problems common to all types of nebulizers include: (9) each nebulizer is limited to a single function, so multiple types of nebulizers must be prepared to accommodate the characteristics and flow rate of liquid samples; and (10) if a nebulizer is damaged, the entire nebulizer must be replaced rather than replacing parts.

[0018] In view of the above circumstances, an object of the present invention is to provide a nebulizer having multiple functions that can accommodate liquid samples with various characteristics and flow rates. [Means for solving the problem]

[0019] No. 1 The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path connecting a liquid inlet opening on the rear surface with a liquid outlet opening on the front surface, and a base gas flow path connecting a gas inlet opening on the rear surface with a gas outlet opening on the front surface, the tip portion being made up of one or more flow path forming plates, the tip portion having ejection holes formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, for ejecting a mixed fluid of gas and liquid droplets, a tip liquid flow path that guides liquid discharged from the liquid outlet to the ejection holes, and a tip gas flow path that guides gas discharged from the gas outlet to the ejection holes, and one of the one or more flow path forming plates Protruding from the front Ta nozzle a through-hole that penetrates the center of the nozzle and forms the tip liquid flow path; The present invention is characterized by having the following. No. 2 The nebulizer of the embodiment comprises: No. 1 In an embodiment, Another one of the one or more flow path forming plates is accommodated The aforementioned The nozzle housing has a nozzle housing hole that forms the cylindrical tip gas flow passage between the nozzle and the nozzle housing hole. Third The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path connecting a liquid inlet opening at the rear surface with a liquid outlet opening at the front surface, and a base gas flow path connecting a gas inlet opening at the rear surface with a gas outlet opening at the front surface, the tip portion being made up of a plurality of flow path forming plates, the tip portion having ejection holes formed by stacking the plurality of flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip liquid flow path that guides liquid discharged from the liquid outlet to the ejection holes, and a tip gas flow path that guides gas discharged from the gas outlet to the ejection holes, The tip portion has a first through hole formed at a position corresponding to the liquid outlet, a second through hole formed at a position corresponding to the gas outlet, and a space extending from an opening of the first through hole to an opening of the second through hole on the front surface. In a straight line the tip portion liquid flow path is formed by combining the groove of the first type flow path forming plate with the rear surface of the second type flow path forming plate to form the tip portion liquid flow path. Fourth The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path connecting a liquid inlet opening at the rear surface with a liquid outlet opening at the front surface, and a base gas flow path connecting a gas inlet opening at the rear surface with a gas outlet opening at the front surface, the tip portion being made up of one or more flow path forming plates, the tip portion having ejection holes formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, for ejecting a mixed fluid of gas and liquid droplets, a tip liquid flow path that guides liquid discharged from the liquid outlet to the ejection holes, and a tip gas flow path that guides gas discharged from the gas outlet to the ejection holes, The tip portion extends from a position corresponding to the liquid outlet to a position corresponding to the gas outlet on the rear surface. In a straight linethe third-type flow path forming plate having a groove formed in the front surface of the base portion and the ejection hole formed at a position corresponding to the gas outlet, the third-type flow path forming plate being joined to the front surface of the base portion, and the groove of the third-type flow path forming plate being combined with the front surface of the base portion to form the tip-end liquid flow path. No. 5 The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path connecting a liquid inlet opening at the rear surface with a liquid outlet opening at the front surface, and a base gas flow path connecting a gas inlet opening at the rear surface with a gas outlet opening at the front surface, the tip portion being made up of a plurality of flow path forming plates, the tip portion having ejection holes formed by stacking the plurality of flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip liquid flow path that guides liquid discharged from the liquid outlet to the ejection holes, and a tip gas flow path that guides gas discharged from the gas outlet to the ejection holes, The tip portion comprises a fourth-type flow path forming plate having a groove formed on its rear surface from a position corresponding to the liquid outlet to a position near a position corresponding to the gas outlet, a first through hole formed in the vicinity of the position, and a second through hole formed in a position corresponding to the gas outlet, and having an opening of the first through hole adjacent to an opening of the second through hole on its front surface, and a second-type flow path forming plate having the ejection hole formed at a position corresponding to the gas outlet, the fourth-type flow path forming plate and the second-type flow path forming plate being joined to the front surface of the base portion in this order, and the groove of the fourth-type flow path forming plate combined with the front surface of the base portion forms the tip portion liquid flow path. No. 6 The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path connecting a liquid inlet opening at the rear surface with a liquid outlet opening at the front surface, and a base gas flow path connecting a gas inlet opening at the rear surface with a gas outlet opening at the front surface, the tip portion being made up of a plurality of flow path forming plates, the tip portion having ejection holes formed by stacking the plurality of flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip liquid flow path that guides liquid discharged from the liquid outlet to the ejection holes, and a tip gas flow path that guides gas discharged from the gas outlet to the ejection holes, the tip portion comprises a fifth-type flow path forming plate having a groove formed on its rear surface from a position corresponding to the liquid outlet to a position near a position corresponding to the gas outlet, a first through hole formed in the vicinity thereof, a second through hole formed in a position corresponding to the gas outlet, and a recess formed on its front surface in a circular region connected to the opening of the first through hole and centered on the opening of the second through hole; and a second-type flow path forming plate having the ejection holes formed at a position corresponding to the gas outlet, the fifth-type flow path forming plate and the second-type flow path forming plate being joined in this order to the front surface of the base portion, the groove of the fifth-type flow path forming plate combined with the front surface of the base portion forming the tip portion liquid flow path, and a peripheral portion of the recess of the fifth-type flow path forming plate being covered by the rear surface of the second-type flow path forming plate to form the tip portion liquid flow path. Seventh The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path connecting a liquid inlet opening at the rear surface with a liquid outlet opening at the front surface, and a base gas flow path connecting a gas inlet opening at the rear surface with a gas outlet opening at the front surface, the tip portion being made up of a plurality of flow path forming plates, the tip portion having ejection holes formed by stacking the plurality of flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip liquid flow path that guides liquid discharged from the liquid outlet to the ejection holes, and a tip gas flow path that guides gas discharged from the gas outlet to the ejection holes,The tip portion comprises a sixth type flow path forming plate having a nozzle protruding from the front surface at a position corresponding to the liquid outlet, a first through hole passing through the center of the nozzle, and a second through hole formed at a position corresponding to the gas outlet, and a seventh type flow path forming plate having a nozzle accommodating hole on the rear surface side and the ejection hole on the front surface side which constitute the through hole formed at the position corresponding to the liquid outlet, the sixth type flow path forming plate and the seventh type flow path forming plate being joined in this order to the front surface of the base portion, and the nozzle of the sixth type flow path forming plate is accommodated in the nozzle accommodating hole of the seventh type flow path forming plate to form the cylindrical tip portion gas flow path. No. 8 The nebulizer of the embodiment comprises: Seventh In one aspect, the tip portion is characterized by including a spacer plate sandwiched between the sixth type flow path forming plate and the seventh type flow path forming plate. No. 9 The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path communicating a liquid inlet opening on the rear surface with a liquid outlet opening on the front surface; a second base liquid flow channel communicating between a second liquid inlet opening on the rear surface and a second liquid outlet opening on the front surface; and a base gas flow path that communicates a gas inlet opening at the rear surface with a gas outlet opening at the front surface, the tip portion being made up of a plurality of flow path forming plates, the tip portion having ejection holes formed by stacking the plurality of flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip liquid flow path that guides liquid discharged from the liquid outlet to the ejection holes, and a tip gas flow path that guides gas discharged from the gas outlet to the ejection holes,the tip portion includes an eighth type flow path forming plate having a first through hole formed at a position corresponding to the liquid outlet, a second through hole formed at a position corresponding to the second liquid outlet, a first recess formed on a rear surface at a position corresponding to the gas outlet, a third through hole and a fourth through hole communicating with the first recess, a second recess formed on a front surface in a circular region connected to an opening of the first through hole and centered on the opening of the third through hole, and a third recess formed on the front surface in a circular region connected to the opening of the second through hole and centered on the opening of the fourth through hole; a first ejection hole formed at a position corresponding to the third through hole; and a ninth type flow passage forming plate having a first nozzle hole formed at a position corresponding to the first nozzle hole, and a second nozzle hole formed at a position corresponding to the first nozzle hole, wherein the eighth type flow passage forming plate and the ninth type flow passage forming plate are joined to the front surface of the base in this order, the first recess of the eighth type flow passage forming plate is combined with the front surface of the base to form the tip gas flow passage, the periphery of the second recess of the eighth type flow passage forming plate is covered with the rear surface of the ninth type flow passage forming plate to form a first tip liquid flow passage, and the periphery of the third recess of the eighth type flow passage forming plate is covered with the rear surface of the ninth type flow passage forming plate to form a second tip liquid flow passage. No. 10 The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface; and a tip portion joined to the front surface of the base portion, wherein the base portion has a base liquid flow path communicating a liquid inlet opening on the rear surface with a liquid outlet opening on the front surface; and a base gas flow path communicating a gas inlet opening on the rear surface with a gas outlet opening on the front surface; a second base gas flow passage communicating between the second gas inlet opening at the rear surface and the second gas outlet opening at the front surface; the tip portion is made up of a plurality of flow path forming plates, and the tip portion has an ejection hole formed by stacking the plurality of flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides gas discharged from the gas outlet to the ejection hole,the tip portion includes a tenth type flow path forming plate having a first nozzle protruding from the front surface at a position corresponding to the liquid outlet, a first through hole passing through the center of the first nozzle, a second through hole formed at a position corresponding to the gas outlet, and a third through hole formed at a position corresponding to the second gas outlet; an eleventh type flow path forming plate having a second nozzle protruding from the front surface at a position corresponding to the liquid outlet, a first nozzle accommodating hole on the rear surface side and the ejection hole on the front surface side constituting a through hole passing through the center of the second nozzle, and a fourth through hole formed at a position corresponding to the second gas outlet; and and a 12th type flow path forming plate having a second nozzle accommodating hole formed at a position corresponding to the 10th type flow path forming plate, wherein the 10th type flow path forming plate, the 11th type flow path forming plate, and the 12th type flow path forming plate are joined to the front surface of the base in this order, the first nozzle of the 10th type flow path forming plate is accommodated in the first nozzle accommodating hole of the 11th type flow path forming plate to form a cylindrical first tip gas flow path, and the second nozzle of the 11th type flow path forming plate is accommodated in the second nozzle accommodating hole of the 12th type flow path forming plate to form a cylindrical second tip gas flow path. No. 11 The nebulizer of the embodiment comprises: No. 10 In one aspect, the tip portion is characterized by comprising a first spacer plate sandwiched between the 10th type flow path forming plate and the 11th type flow path forming plate, and a second spacer plate sandwiched between the 11th type flow path forming plate and the 12th type flow path forming plate. 12th The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path communicating a liquid inlet opening at the rear surface with a liquid outlet opening at the front surface, and a base gas flow path communicating a gas inlet opening at the rear surface with a gas outlet opening at the front surface, The base portion has a plurality of base liquid flow channels formed on a circumference centered on the base gas flow channel, the tip portion is made up of one or a plurality of flow path forming plates, and the tip portion has an ejection hole formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides gas discharged from the gas outlet to the ejection hole,The tip portion comprises a third-type flow path forming plate having a groove formed on its rear surface in a radial direction from a position corresponding to the gas outlet, and the ejection hole formed at the position corresponding to the gas outlet, the third-type flow path forming plate being joined to the front surface of the base portion, the groove of the third-type flow path forming plate being connected to one of the plurality of base liquid flow paths to form the tip portion liquid flow path, and when the third-type flow path forming plate is rotated around the ejection hole, the base liquid flow path to which the groove is connected is switched. 13th The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path communicating a liquid inlet opening at the rear surface with a liquid outlet opening at the front surface, and a base gas flow path communicating a gas inlet opening at the rear surface with a gas outlet opening at the front surface, The base portion has a plurality of base liquid flow channels formed at equal angular intervals on a circumference centered on the base gas flow channel, the tip portion is made up of one or a plurality of flow path forming plates, and the tip portion has an ejection hole formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides gas discharged from the gas outlet to the ejection hole, The tip portion comprises a 13-type flow path forming plate having first and second grooves formed radially from a position corresponding to the gas outlet on the rear surface, and the ejection hole formed at the position corresponding to the gas outlet, the 13-type flow path forming plate being joined to the front surface of the base portion, the first groove of the 13-type flow path forming plate being connected to one of the plurality of base liquid flow paths to form a first tip liquid flow path, and the second groove being connected to another of the plurality of base liquid flow paths to form a second tip liquid flow path, and when the 13-type flow path forming plate is rotated around the ejection hole, the base liquid flow path to which the first groove and the second groove are connected is switched. No. 14 The nebulizer of the embodiment comprises: a base portion having a front surface and a rear surface, and a tip portion joined to the front surface of the base portion, the base portion having a base liquid flow path communicating a liquid inlet opening at the rear surface with a liquid outlet opening at the front surface, and a base gas flow path communicating a gas inlet opening at the rear surface with a gas outlet opening at the front surface, the base portion has a plurality of base portion liquid flow channels formed on a circumference centered on the base portion gas flow channel, the base portion having different inner diameters; the tip portion is made up of one or a plurality of flow path forming plates, and the tip portion has an ejection hole formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides gas discharged from the gas outlet to the ejection hole,The tip portion is provided with a 14th type flow path forming plate having a plurality of grooves of different widths formed radially from a position corresponding to the gas outlet on its rear surface and the ejection hole formed at the position corresponding to the gas outlet, the 14th type flow path forming plate is joined to the front surface of the base portion, one of the plurality of grooves of the 14th type flow path forming plate is connected to one of the plurality of base liquid flow paths having a corresponding inner diameter to form the tip portion liquid flow path, and when the 14th type flow path forming plate is rotated around the ejection hole, the base liquid flow path to which the groove is connected is switched. No. 15 The nebulizer of the embodiment is a first to No. 14 In any of the aspects, the device is characterized by comprising a cylindrical body at the tip of which the base portion and the tip portion are attached. [Effects of the Invention]

[0020] According to the first aspect, the configurations of the tip liquid flow path and tip gas flow path can be changed by changing the combination of flow path forming plates that make up the tip, resulting in a nebulizer with spray performance suitable for liquid samples with various characteristics and flow rates. In particular, by accommodating the nozzle in the nozzle accommodating hole, a coaxial flow path can be formed. Furthermore, even if the flow channels become clogged with suspended matter, the flow channel forming plate can be removed and easily cleaned. Furthermore, even if some parts are damaged, functionality can be restored by replacing them. No. 2 According to this aspect, a coaxial flow path can be formed by accommodating the nozzle in the nozzle accommodating hole. Third According to this aspect, the tip liquid flow channel is a confined space flow channel surrounded by a wall, so the nebulizer's position is not restricted and the liquid sample can be sucked up. Furthermore, even if the flow channel becomes clogged with suspended matter, the flow channel forming plate can be removed and easily cleaned. FourthAccording to this aspect, the tip liquid flow channel is a confined space flow channel surrounded by a wall, so the nebulizer position is not limited and the liquid sample can be sucked up. Furthermore, because it is a confined space flow channel, even if it becomes clogged with suspended matter, the flow channel forming plate can be removed and easily cleaned. No. 5 According to an embodiment, the liquid sample can be sheared by an adjacent gas stream to eject fine droplets. No. 6 According to this aspect, the liquid sample can be atomized by spreading the liquid sample in the circular recess to form a liquid film and passing it over the gas outlet. Seventh According to this embodiment, by combining the nozzle and the nozzle receiving hole, a nebulizer having the same function as a coaxial nebulizer is obtained. No. 8 According to this aspect, by changing the thickness or number of spacer plates, it is possible to adjust the gap between the nozzle and the nozzle accommodating hole, and the relative relationship between the tip positions of the nozzle and the nozzle accommodating hole. No. 9 According to this embodiment, two types of liquid samples can be sprayed simultaneously from separate nozzles, so that the two types of liquid samples can be sprayed without being mixed. No. 10 According to this aspect, a gas can be made to flow around the sample droplets ejected from the ejection holes, which makes it possible to further reduce the size of the sample droplets and control the spray direction. No. 11 According to this aspect, by changing the thickness or number of first spacer plates, it is possible to adjust the gap between the first nozzle and the first nozzle accommodating hole and the relative relationship between the tip positions of the first nozzle and the first nozzle accommodating hole, and by changing the thickness or number of second spacer plates, it is possible to adjust the gap between the second nozzle and the second nozzle accommodating hole and the relative relationship between the tip positions of the second nozzle and the second nozzle accommodating hole. 12thAccording to this aspect, one of the base liquid channels is selected and connected to the nozzle, so even if one base liquid channel becomes clogged or damaged, the nebulizer can be continued by switching to another base liquid channel. Furthermore, by using multiple base liquid channels depending on the type of liquid sample, the effort of cleaning the base liquid channel can be reduced. 13th According to this embodiment, two types of liquid samples can be mixed and sprayed immediately before the nozzle hole, so that even liquid samples that are difficult to spray when mixed or that cannot be mixed can be sprayed stably. No. 14 According to this embodiment, the width of the liquid flow path can be selected according to the flow rate of the liquid sample, so that a single nebulizer can accommodate a wide range of flow rates. No. 15 According to this embodiment, if the outer shape of the cylindrical body is adapted to an existing nebulizer, it can be used in place of the existing nebulizer. [Brief explanation of the drawings]

[0021] [Figure 1] 1 is a longitudinal cross-sectional view of a nebulizer according to a first embodiment. [Figure 2] Figure (A) is an end view taken along line IIa-IIa in Figure 1. Figure (B) is an end view taken along line IIb-IIb in Figure 1. Figure (C) is an end view taken along line IIc-IIc in Figure 1. [Figure 3] FIG. 1 is a longitudinal cross-sectional view of a nebulizer according to a second embodiment. [Figure 4] FIG. 4 is an end view taken along the line IV-IV in FIG. 3. [Figure 5] FIG. 10 is a longitudinal cross-sectional view of a nebulizer according to a third embodiment. [Figure 6] 6A is an end view taken along line VIa-VIa in FIG. 5. FIG. 6B is an end view taken along line VIb-VIb in FIG. [Figure 7] FIG. 10 is a longitudinal cross-sectional view of a nebulizer according to a fourth embodiment. [Figure 8]Fig. 7A is an end view taken along line VIIIa-VIIIa in Fig. 7. Fig. 7B is an end view taken along line VIIIb-VIIIb in Fig. 7. Fig. 7C is an end view taken along line VIIIc-VIIIc in Fig. 7. [Figure 9] FIG. 10 is a longitudinal cross-sectional view of a nebulizer according to a fifth embodiment. [Figure 10] FIG. 10 is an end view taken along the line XX in FIG. 9. [Figure 11] FIG. 10 is a longitudinal cross-sectional view of a nebulizer according to another embodiment. [Figure 12] FIG. 10 is a longitudinal cross-sectional view of a nebulizer according to a sixth embodiment. [Figure 13] Fig. 12A is an end view taken along line XIIIa-XIIIa in Fig. 12. Fig. 12B is an end view taken along line XIIIb-XIIIb in Fig. 12. Fig. 12C is an end view taken along line XIIIc-XIIIc in Fig. 12. [Figure 14] FIG. 10 is a longitudinal cross-sectional view of a nebulizer according to a seventh embodiment. [Figure 15] 14. FIG. 14(A) is an end view taken along line XVa-XVa in FIG. 14. FIG. 14(B) is an end view taken along line XVb-XVb in FIG. [Figure 16] FIG. 13 is a longitudinal cross-sectional view of a nebulizer according to an eighth embodiment. [Figure 17] 16. Fig. 16(A) is an end view taken along line XVIIa-XVIIa in Fig. 16. Fig. 16(B) is an end view taken along line XVIIb-XVIIb in Fig. 16. [Figure 18] FIG. 13 is a longitudinal cross-sectional view of a nebulizer according to a ninth embodiment. [Figure 19] 18. Fig. 18(A) is an end view taken along line XIXa-XIXa in Fig. 18. Fig. 18(B) is an end view taken along line XIXb-XIXb in Fig. 18. [Figure 20] FIG. 19 is a longitudinal cross-sectional view of a nebulizer according to a tenth embodiment. [Figure 21] 20. FIG. 20(A) is an end view taken along line XXIa-XXIa in FIG. 20. FIG. 20(B) is an end view taken along line XXXIb-XXXIb in FIG. [Figure 22]FIG. 20 is a longitudinal cross-sectional view of a nebulizer according to an eleventh embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0022] Next, an embodiment of the present invention will be described with reference to the drawings. [First embodiment] The nebulizer according to the first embodiment of the present invention is used to atomize a liquid sample to obtain sample droplets. The sample droplets are introduced into an excitation / ionization source or the like of an analytical instrument and subjected to analysis. For example, in an ICP analytical instrument, the excitation / ionization source is plasma, which is generated by a plasma torch. In liquid chromatography, the sample droplets are introduced into a light scattering detector. Such detectors are also included in the excitation / ionization source or the like.

[0023] As shown in FIG. 1, the nebulizer AA of this embodiment has a base portion 10 and a tip portion 50. The base portion 10 is a rod-shaped member with a circular cross section. One end face of the base portion 10 is a rear face 12, and the other end face is a front face 13. The rear face 12 and the front face 13 are planes perpendicular to the central axis of the base portion 10. Two flow paths are formed inside the base portion 10 along the axial direction: a base portion liquid flow path 20 and a base portion gas flow path 30.

[0024] The base liquid flow channel 20 has a liquid inlet 20i opening on the rear surface 12 and a liquid outlet 20o opening on the front surface 13. The base liquid flow channel 20 communicates between the liquid inlet 20i and the liquid outlet 20o. The base gas flow channel 30 has a gas inlet 30i opening on the rear surface 12 and a gas outlet 30o opening on the front surface 13. The base gas flow channel 30 communicates between the gas inlet 30i and the gas outlet 30o. The base liquid flow channel 20 and the base gas flow channel 30 are arranged in parallel and adjacent to each other. As shown in FIG. 2(A), the base gas flow channel 30 is arranged along the central axis of the base 10. Furthermore, the base liquid flow channel 20 is arranged eccentrically from the central axis of the base 10.

[0025] The inner diameters of the base liquid flow path 20 and the base gas flow path 30 can be set arbitrarily. For example, if the inner diameter of the base liquid flow path 20 is set to 0.3 mm to 1.0 mm, clogging by suspended matter and the like can be suppressed. The base gas flow path 30 may be narrower than the base liquid flow path 20. The inner diameter of the base gas flow path 30 is, for example, 0.1 mm to 1.0 mm. The inner diameters of the base liquid flow path 20 and the base gas flow path 30 may be the same. In this case, the uses of the two flow paths can be interchanged. That is, the central flow path may be used as the base liquid flow path, and the flow path at the eccentric position may be used as the base gas flow path.

[0026] The tip portion 50 is joined to the front surface 13 of the base portion 10. The tip portion 50 is made up of one or more channel-forming plates. In this embodiment, the tip portion 50 is made up of a first channel-forming plate 51A and a second channel-forming plate 51B. The first channel-forming plate 51A and the second channel-forming plate 51B are both disk-shaped members. The first channel-forming plate 51A and the second channel-forming plate 51B are joined to the front surface 13 of the base portion 10 in this order. That is, the first channel-forming plate 51A is arranged so that its rear surface 52A contacts the front surface 13 of the base portion 10. The second channel-forming plate 51B is arranged so that its rear surface 52B contacts the front surface 53A of the first channel-forming plate 51A. The second channel-forming plate 51B is arranged at the front of the nebulizer AA.

[0027] By stacking the first-type flow path forming plate 51A and the second-type flow path forming plate 51B, a tip liquid flow path, a tip gas flow path, and a jet hole are formed in the tip 50. Here, the jet hole is a hole that jets out a mixed fluid of gas and droplets of a liquid sample. The tip liquid flow path is a flow path that guides the liquid sample discharged from the liquid outlet 20o to the jet hole. The tip gas flow path is a flow path that guides the gas discharged from the gas outlet 30o to the jet hole.

[0028] As shown in FIGS. 1 and 2(B), the first flow path forming plate 51A has a first through hole 21 and a second through hole 31. The first through hole 21 and the second through hole 31 are both holes that communicate between a rear surface 52A and a front surface 53A of the first flow path forming plate 51A. The first through hole 21 is formed at a position corresponding to the liquid outlet 20o. The second through hole 31 is formed at a position corresponding to the gas outlet 30o. Furthermore, as shown in FIG. 2(C), a groove 23 is formed in the front surface 53A of the first flow path forming plate 51A, extending from the opening of the first through hole 21 to the opening of the second through hole 31.

[0029] The inner diameter of the first through-hole 21 may be the same as the inner diameter of the base liquid channel 20. The inner diameter of the second through-hole 31 may be the same as the inner diameter of the base gas channel 30, but is preferably smaller. The inner diameter of the second through-hole 31 is preferably 5 to 50 μm. This increases the gas shear force, allowing finer droplets to be generated. The inner diameter of the second through-hole 31 may be the same throughout, or may have a taper that narrows from the inlet to the outlet. The second through-hole 31 preferably has a taper such that the inner diameter of the inlet is the same as the inner diameter of the gas outlet 30o and the inner diameter of the outlet is 5 to 50 μm. This reduces the pressure loss at the connection between the base gas channel 30 and the second through-hole 31, while increasing the gas shear force.

[0030] The shape of groove 23 is not particularly limited, and various shapes such as V-shape, flat-bottom shape, round-bottom shape, etc. can be adopted. The depth of groove 23 can be set arbitrarily. For example, if the depth of groove 23 is set shallow, such as 0.02 mm to 0.5 mm, the liquid sample can be made into a thin liquid film, and the spray efficiency can be improved.

[0031] As shown in FIG. 1, the second flow path forming plate 51B has an ejection hole 40 formed at a position corresponding to the gas outlet 30o. The ejection hole 40 is a cone-shaped through-hole with a small diameter opening on the rear surface 52B and a large diameter opening on the front surface 53B. The cross-sectional shape of the ejection hole 40, particularly the shape of the opening on the rear surface 52B, is usually circular, but is not limited to this. For example, the cross-sectional shape of the ejection hole 40 may be rectangular.

[0032] When the first flow path forming plate 51A is joined to the front surface 13 of the base 10, the base liquid flow path 20 and the first through hole 21 are connected, and the base gas flow path 30 and the second through hole 31 are connected. When the second flow path forming plate 51B is joined to the front surface 53A of the first flow path forming plate 51A, the groove 23 combines with the rear surface 52B of the second flow path forming plate 51B to form a flow path. The first through hole 21 and the groove 23 form the tip liquid flow path, and the second through hole 31 form the tip gas flow path.

[0033] Flexible tubes for passing a liquid sample or gas can be inserted into the liquid inlet 20i and the gas inlet 30i, respectively. The liquid sample L introduced from the liquid inlet 20i passes through the base liquid flow path 20 and the tip liquid flow path (first through-hole 21 and groove 23) and is guided to the ejection hole 40. The gas G introduced from the gas inlet 30i passes through the base gas flow path 30 and the tip gas flow path (second through-hole 31) and is guided to the ejection hole 40. The liquid sample L that reaches the ejection hole 40 is broken into fine droplets D by the shear force of the gas G and is ejected from the ejection hole 40.

[0034] The nebulizer AA has a fixing part that fixes the tip part 50 to the base part 10. In this embodiment, the fixing part is a tubular member 61 into which the base part 10 is inserted. The front end edge of the tubular member 61 is connected to the outer periphery of the second-type flow path forming plate 51B. In other words, the tubular member 61 and the second-type flow path forming plate 51B form a single component. A female thread is formed on the inner periphery of the rear end of the tubular member 61. Furthermore, a male thread is formed on the outer periphery of the base part 10. By threading the tubular member 61 and the base part 10 together, the tip part 50 is fixed to the base part 10. Furthermore, the stacked state of the first-type flow path forming plate 51A and the second-type flow path forming plate 51B can be maintained.

[0035] Since the ejection hole 40 is disposed at the center of the second-type flow path forming plate 51B, the position of the ejection hole 40 will not shift even if the tubular member 61 and the second-type flow path forming plate 51B are rotated due to the screw connection. The fixing part is not limited to the tubular member 61 as long as it can fix the tip portion 50 to the base portion 10. Other examples of the fixing part will be described in the explanation of other embodiments. After being combined, the base portion 10 and the tip portion 50, and the flow path forming plates themselves, may be integrated by heat fusion, adhesive, or the like.

[0036] To prevent the liquid sample from leaking from the liquid flow path, it is preferable that the front surface 13 of the base 10 and the rear surface 52A of the first-type flow path-forming plate 51A, and the front surface 53A of the first-type flow path-forming plate 51A and the rear surface 52B of the second-type flow path-forming plate 51B are in liquid-tight contact with each other. Therefore, it is preferable that these surfaces are polished smooth surfaces. Alternatively, a flexible sheet may be sandwiched between these components. For example, a silicone sheet, a rubber sheet, or the like may be used as this sheet. Note that holes are formed in the sheet so as not to block the flow path.

[0037] The first through-hole 21 of the first flow path forming plate 51A is formed at an eccentric position. In order for the first through-hole 21 to connect to the base liquid flow path 20, it is necessary to fix the angle around the central axis of the first flow path forming plate 51A at an appropriate angle. Therefore, the nebulizer AA has a rotation stopper for the first flow path forming plate 51A. In this embodiment, the rotation stopper is a pin 71 inserted into holes formed in the base 10 and the first flow path forming plate 51A. In the example shown in FIG. 2(B), the pins 71 are inserted at three locations around the central axis, but this is not limited to this. The rotation stopper is not limited to the pin 71 as long as it can fix the angle around the central axis of the flow path forming plate at an appropriate angle. Other examples of the rotation stopper will be described in the explanation of other embodiments.

[0038] The materials for the various components that make up the nebulizer AA are preferably chemically stable enough to withstand acids, organic solvents, and the like, and have the mechanical strength to allow for micromachining. Examples include resin, glass, ceramics, carbon, and metal. Examples of resin include PEEK (polyether ether ketone), PPS (polyphenylene sulfide), PFA (perfluoroalkoxyalkane), PTFE (polytetrafluoroethylene), and polyimide. Examples of metal include acid-resistant metals such as gold, platinum, and iridium. Metals coated with resin, glass, ceramics, carbon, or the like may also be used.

[0039] The liquid flow path at the tip of the nebulizer AA (first through-hole 21 and groove 23) is a confined space flow path surrounded by walls. Unlike a Babington-type nebulizer, the liquid sample does not flow downward by gravity, so the position of the nebulizer AA is not restricted. Furthermore, because the liquid sample can be sucked up by the gas flow, the liquid sample can be atomized without a liquid delivery pump. Of course, a liquid delivery pump can also be used.

[0040] On the other hand, because the tip liquid flow path is a confined space flow path, there is a risk of clogging with suspended matter, etc. If suspended matter, etc. clogs the tip liquid flow path, the suspended matter, etc. can be easily removed by removing the flow path forming plates 51A and 51B and cleaning them. Furthermore, even if some parts are damaged, functionality can be restored by replacing the parts.

[0041] Nebulizer AA has tip liquid flow paths, tip gas flow paths, and ejection holes formed by combining flow path forming plates 51A and 51B. Flow path forming plates 51A and 51B have a simple structure in which through holes and grooves are formed in plate material. Therefore, flow path forming plates 51A and 51B can be easily manufactured with high dimensional accuracy.

[0042] The spray performance of a nebulizer is determined by the relative positional relationship between the outlet of the liquid flow path and the outlet of the gas flow path. Coaxial nebulizers require adjusting the positional relationship between the inner and outer tubes, which are several tens of millimeters long, making it difficult to achieve precise adjustments. In contrast, in this embodiment, the tip liquid flow path and tip gas flow path are formed by combining flow path forming plates 51A and 51B, which have high dimensional accuracy, making it easy to precisely adjust their positional relationship.

[0043] As the first-type flow path forming plate 51A, multiple types of flow path forming plates with different inner diameters of the first through-holes 21 and second through-holes 31 and different depths and widths of the grooves 23 may be prepared. In this way, by replacing the first-type flow path forming plate 51A, it is possible to accommodate liquid samples with various characteristics and flow rates.

[0044] The tip section 50 can change the configuration of the tip liquid flow channel and tip gas flow channel by changing the combination of flow channel forming plates. In other words, by combining flow channel forming plates, tip liquid flow channels and tip gas flow channels with desired configurations can be constructed. This results in a nebulizer with spray performance suitable for liquid samples with various characteristics and flow rates. Note that the tip section 50 can be constructed by combining multiple flow channel forming plates, or it can be composed of a single flow channel forming plate. Examples of other combinations of flow channel forming plates are described below.

[0045] Second Embodiment Next, a nebulizer BB according to a second embodiment will be described. As shown in Fig. 3, the nebulizer BB of this embodiment has a base portion 10 and a tip portion 50. The base portion 10 has the same shape as that of the first embodiment.

[0046] The tip portion 50 is made up of a third-type flow path forming plate 51C and a second-type flow path forming plate 51B. The third-type flow path forming plate 51C and the second-type flow path forming plate 51B are joined in this order to the front surface 13 of the base portion 10. The second-type flow path forming plate 51B has the same shape as that of the first embodiment. Note that the second-type flow path forming plate 51B may be omitted.

[0047] 3 and 4, a groove 23 is formed in a rear surface 52C of the third flow path forming plate 51C, extending from a position corresponding to the liquid outlet 20o to a position corresponding to the gas outlet 30o. In addition, the third flow path forming plate 51C has an ejection hole 40a formed in a position corresponding to the gas outlet 30o.

[0048] The depth of groove 23 may be constant, or may be shallower in the portion closer to nozzle hole 40a. By making the portion of groove 23 farther from nozzle hole 40a deeper, clogging of suspended matter and the like can be suppressed. At the same time, by making the portion of groove 23 closer to nozzle hole 40a shallower, the liquid sample can be made into a thin liquid film, thereby improving spray efficiency.

[0049] When the third-type flow path-forming plate 51C is joined to the front surface 13 of the base 10, the groove 23 is combined with the front surface 13 of the base 10 to form a tip liquid flow path that connects the liquid outlet 20o and the gas outlet 30o. Furthermore, when the second-type flow path-forming plate 51B is joined to the third-type flow path-forming plate 51C, the ejection hole 40a of the third-type flow path-forming plate 51C and the ejection hole 40b of the second-type flow path-forming plate 51B are connected to form a single ejection hole.

[0050] The liquid sample L introduced from the liquid inlet 20i passes through the base liquid flow path 20 and the tip liquid flow path (groove 23) and is guided to the ejection hole 40a. The gas G introduced from the gas inlet 30i passes through the base gas flow path 30 and is guided to the ejection hole 40a. The liquid sample L that reaches the ejection hole 40a is broken into fine droplets D by the shear force of the gas G and is ejected from the ejection hole 40a. The portion of the groove 23 that corresponds to the gas outlet 30o can be said to be the tip gas flow path.

[0051] A cylindrical member 61 is attached to the outer periphery of the second-type flow path forming plate 51B. The tip portion 50 is fixed to the base portion 10 by screwing the cylindrical member 61 to the base portion 10. The nebulizer BB has a rotation stopper for the third-type flow path forming plate 51C. In this embodiment, the rotation stopper consists of a recess 72 formed on the front surface 13 of the base portion 10 and a protrusion 73 formed on the rear surface 52C of the third-type flow path forming plate 51C. By fitting the protrusion 73 into the recess 72, the angle around the central axis of the third-type flow path forming plate 51C can be fixed.

[0052] Because the tip liquid flow path (groove 23) of the nebulizer BB is a confined space flow path, the position of the nebulizer BB is not limited. In addition, because the liquid sample can be sucked up by the gas flow, the liquid sample can be atomized without a liquid delivery pump. However, because the tip liquid flow path is a confined space flow path, there is a risk of clogging with suspended matter, etc. However, if suspended matter, etc., becomes clogged in the tip liquid flow path, the suspended matter, etc. can be easily removed by removing the flow path forming plates 51C and 51B and cleaning them.

[0053] Third Embodiment Next, a nebulizer CC according to a third embodiment will be described. As shown in Fig. 5, the nebulizer CC of this embodiment has a base portion 10 and a tip portion 50. The base portion 10 has the same shape as that of the first embodiment.

[0054] The tip portion 50 is made up of a fourth-type flow path forming plate 51D and a second-type flow path forming plate 51B. The fourth-type flow path forming plate 51D and the second-type flow path forming plate 51B are joined in this order to the front surface 13 of the base portion 10. The second-type flow path forming plate 51B has the same shape as that of the first embodiment.

[0055] As shown in FIGS. 5 and 6A, a groove 23 is formed on the rear surface 52D of the fourth flow path forming plate 51D, extending from a position corresponding to the liquid outlet 20o to a position near the position corresponding to the gas outlet 30o. The fourth flow path forming plate 51D also has a first through hole 21 formed at the end (nearby position) of the groove 23, and a second through hole 31 formed at a position corresponding to the gas outlet 30o. The second through hole 31 is aligned along the central axis. Meanwhile, the first through hole 21 is inclined with respect to the central axis, and the opening of the first through hole 21 on the front surface 53D side is close to the second through hole 31. Therefore, as shown in FIG. 6B, the opening of the first through hole 21 and the opening of the second through hole 31 are adjacent to each other on the front surface 53D. The opening of the ejection hole 40 of the second flow path forming plate 51B on the rear surface 52B side is large enough to encompass the opening of the first through hole 21 and the opening of the second through hole 31 on the front surface 53D side of the fourth flow path forming plate 51D.

[0056] When the fourth-type flow path forming plate 51D is joined to the front surface 13 of the base portion 10, the grooves 23 combine with the front surface 13 of the base portion 10 to form a flow path connected to the base portion liquid flow path 20. In addition, the base portion gas flow path 30 is connected to the second through-hole 31. The grooves 23 and the first through-hole 21 form the tip portion liquid flow path, and the second through-hole 31 forms the tip portion gas flow path.

[0057] The liquid sample L introduced from the liquid inlet 20i is guided to the ejection hole 40 through the base liquid flow path 20 and the tip liquid flow path (groove 23 and first through-hole 21). The gas G introduced from the gas inlet 30i is guided to the ejection hole 40 through the base gas flow path 30 and the tip liquid flow path (second through-hole 31). The liquid sample L that reaches the ejection hole 40 is sheared by the adjacent flow of gas G, and becomes fine droplets D, which are ejected from the ejection hole 40.

[0058] [Fourth embodiment] Next, a nebulizer DD according to a fourth embodiment will be described. As shown in Fig. 7, the nebulizer DD of this embodiment has a base portion 10 and a tip portion 50. The base portion 10 has the same shape as that of the first embodiment.

[0059] The tip portion 50 is made up of a fifth-type flow path forming plate 51E and a second-type flow path forming plate 51B. The fifth-type flow path forming plate 51E and the second-type flow path forming plate 51B are joined in this order to the front surface 13 of the base portion 10. The second-type flow path forming plate 51B has the same shape as that of the first embodiment.

[0060] As shown in FIGS. 7 and 8A, a groove 23 is formed on the rear surface 52E of the fifth-type flow path forming plate 51E, extending from a position corresponding to the liquid outlet 20o to a position near the position corresponding to the gas outlet 30o. Furthermore, as shown in FIG. 8B, a first through hole 21 is formed at the end (nearby position) of the groove 23 in the fifth-type flow path forming plate 51E, and a second through hole 31 is formed at a position corresponding to the gas outlet 30o. Furthermore, as shown in FIG. 8C, a recess 24 is formed on the front surface 53E of the fifth-type flow path forming plate 51E in a circular region centered on the opening of the second through hole 31. The diameter of the recess 24 is larger than the inner diameter of the second through hole 31. The recess 24 is also connected to the opening of the first through hole 21.

[0061] When the fifth-type flow path forming plate 51E is joined to the front surface 13 of the base 10, the grooves 23 combine with the front surface 13 of the base 10 to form a flow path connected to the base liquid flow path 20. In addition, the base gas flow path 30 is connected to the second through-hole 31. When the second-type flow path forming plate 51B is joined to the front surface 53E of the fifth-type flow path forming plate 51E, the peripheral portion of the recess 24 is covered by the rear surface 52B (annular region around the ejection hole 40) of the second-type flow path forming plate 51B, thereby forming a flow path. The grooves 23, the first through-holes 21, and the recesses 24 form the tip-end liquid flow path, and the second through-holes 31 form the tip-end gas flow path.

[0062] The liquid sample L introduced from the liquid inlet 20i passes through the base liquid flow path 20 and the tip liquid flow path (groove 23, first through-hole 21, and recess 24) and is guided to the ejection hole 40. The gas G introduced from the gas inlet 30i passes through the base gas flow path 30 and the tip gas flow path (second through-hole 31) and is guided to the ejection hole 40. The liquid sample L spreads in the circular recess 24 and becomes a liquid film. This liquid film passes over the gas outlet (the opening of the second through-hole 31), thereby atomizing the liquid sample L.

[0063] Fifth Embodiment Next, a nebulizer EE according to a fifth embodiment will be described. 9, the nebulizer EE of this embodiment has a base portion 10 and a tip portion 50. The base portion 10 has the same shape as that of the first embodiment, except that the central flow path is used as the base liquid flow path 20 and the eccentric flow path is used as the base gas flow path 30.

[0064] The tip portion 50 has a sixth-type flow path forming plate 51F, a spacer plate 54, and a seventh-type flow path forming plate 51G. The sixth-type flow path forming plate 51F, the spacer plate 54, and the seventh-type flow path forming plate 51G are joined in this order to the front surface 13 of the base portion 10. In other words, the spacer plate 54 is sandwiched between the sixth-type flow path forming plate 51F and the seventh-type flow path forming plate 51G.

[0065] The sixth flow path forming plate 51F has a first through hole 21 formed at a position corresponding to the liquid outlet 20o, and a second through hole 31 formed at a position corresponding to the gas outlet 30o. The sixth flow path forming plate 51F also has a cone-shaped nozzle 36 protruding from the front surface 53F. The nozzle 36 is disposed at a position corresponding to the liquid outlet 20o. As shown in FIG. 10 , the first through hole 21 passes through the center of the nozzle 36.

[0066] The spacer plate 54 is an annular member. The central opening of the spacer plate 54 is large enough to accommodate the nozzles 36 and the second through-holes 31 of the sixth flow path forming plate 51F. The spacer plate 54 is provided on the outer edge of the front surface 53F of the sixth flow path forming plate 51F. The material of the spacer plate 54 is not particularly limited, but it is preferable that the shape of the spacer plate 54 be maintained constant for a long period of time. A flexible plate such as a silicone plate or a rubber plate may also be used as the spacer plate 54. Using a flexible plate can prevent gas from leaking from the flow path. The sixth flow path forming plate 51F and the spacer plate 54 may be integrated into a single component.

[0067] A through-hole is formed in the seventh flow path forming plate 51G at a position corresponding to the liquid outlet 20o. This through-hole is composed of a cone-shaped nozzle accommodating hole 38 on the rear surface 52G side and an ejection hole 40 on the front surface 53G side.

[0068] When the sixth-type flow-path forming plate 51F is joined to the front surface 13 of the base 10, the base liquid flow path 20 and the first through-hole 21 are connected, and the base gas flow path 30 and the second through-hole 31 are connected. Furthermore, when the seventh-type flow-path forming plate 51G is joined to the sixth-type flow-path forming plate 51F with the spacer plate 54 sandwiched therebetween, an annular flow path is formed between the front surface 53F of the sixth-type flow-path forming plate 51F and the rear surface 52G of the seventh-type flow-path forming plate 51G. Furthermore, the nozzle 36 is accommodated in the nozzle accommodating hole 38 to form a cylindrical flow path. The first through-hole 21 forms the tip-end liquid flow path, and the annular flow path between the second through-hole 31, the front surface 53F, and the rear surface 52G, and the cylindrical flow path between the nozzle 36 and the nozzle accommodating hole 38 form the tip-end gas flow path. That is, by accommodating the nozzle 36 in the nozzle accommodating hole 38, a coaxial flow path can be formed, with a liquid flow path at the center and a cylindrical gas flow path disposed around it.

[0069] Liquid sample L introduced from liquid inlet 20i is guided to ejection hole 40 through base liquid flow path 20 and tip liquid flow path (first through-hole 21). Gas G introduced from gas inlet 30i is guided to ejection hole 40 through base gas flow path 30 and tip gas flow path (second through-hole 31, annular flow path 53F, cylindrical flow path 36). Liquid sample L that reaches ejection hole 40 is broken into fine droplets D by the shear force of gas G and ejected from ejection hole 40. A coaxial flow path is formed by combining nozzle 36 and nozzle receiving hole 38, so nebulizer EE of this embodiment has the same function as a coaxial nebulizer.

[0070] The nebulizer EE forms a coaxial flow path using a cone-shaped nozzle 36 and does not use a long, thin capillary tube. This eliminates the problems seen in coaxial nebulizers, such as the inner tube being easily damaged or the tip of the inner tube vibrating due to high-speed gas flow, which can easily cause fluctuations in the rate of fine droplet production. Furthermore, if suspended matter or the like becomes clogged in the tip liquid flow path, the suspended matter or the like can be easily removed by removing and cleaning the flow path forming plates 51F and 51G.

[0071] The nebulization efficiency of a coaxial nebulizer depends greatly on the gap between the inner and outer tubes and the relative position of the tips of the inner and outer tubes. In this regard, the nebulizer EE of this embodiment can adjust the gap between the nozzle 36 and the nozzle housing hole 38 and the relative position of the tips of the nozzle 36 and the nozzle housing hole 38 by changing the thickness or number of spacer plates 54.

[0072] The flow path forming plates 51F, 51G and the spacer plate 54 have a simple structure and can be manufactured with high dimensional accuracy. By combining the flow path forming plates 51F, 51G and the spacer plate 54 with high dimensional accuracy, the gap between the nozzle 36 and the nozzle accommodating hole 38 and the relative relationship between the tip positions of the nozzle 36 and the nozzle accommodating hole 38 can be adjusted with high precision.

[0073] As shown in Fig. 11, the nozzle 36 may be formed of a capillary. The capillary may be inserted into a hole formed in the center of the sixth flow path forming plate 51F and fixed. Possible fixing methods include fitting, heat fusion, and adhesion. Alternatively, a flange may be provided at the rear end of the capillary, and fitted into a recess formed in the rear surface 52F of the sixth flow path forming plate 51F.

[0074] The capillary can be a glass tube, a PFA tube, or the like. The capillary can be made much shorter than the capillary used as the inner tube of a conventional coaxial nebulizer. For example, the length of the capillary is 2 to 5 mm.

[0075] Capillaries can be manufactured with high precision using microfabrication techniques such as injection molding, machining, and MEMS. Using capillaries with high dimensional precision allows for high dimensional precision of the nozzle 36. This allows for high-precision adjustment of the gap between the nozzle 36 and the nozzle accommodating hole 38 and the relative relationship between the tip positions of the nozzle 36 and the nozzle accommodating hole 38. Furthermore, manufacturing costs can be reduced compared to when the nozzle 36 is formed by processing a plate.

[0076] Sixth Embodiment Next, a nebulizer FF according to a sixth embodiment will be described. As shown in FIG. 12, the nebulizer FF of this embodiment has a base portion 10 and a tip portion 50.

[0077] Three flow paths are formed along the axial direction inside the base portion 10. The flow path arranged along the central axis of the base portion 10 is the base gas flow path 30. Two flow paths arranged at two positions eccentric to the central axis of the base portion 10 are the first base liquid flow path 20A and the second base liquid flow path 20B. The opening on the rear surface 12 side of the first base liquid flow path 20A is the first liquid inlet 20Ai, and the opening on the front surface 13 side is the first liquid outlet 20Ao. The opening on the rear surface 12 side of the second base liquid flow path 20B is the second liquid inlet 20Bi, and the opening on the front surface 13 side is the second liquid outlet 20Bo.

[0078] The tip portion 50 is made up of an eighth-type flow path forming plate 51H and a ninth-type flow path forming plate 51J. The eighth-type flow path forming plate 51H and the ninth-type flow path forming plate 51J are joined to the front surface 13 of the base portion 10 in this order.

[0079] As shown in FIGS. 12 and 13A, the eighth-type flow path forming plate 51H has a first through hole 21 formed at a position corresponding to the first liquid outlet 20Ao, and a second through hole 22 formed at a position corresponding to the second liquid outlet 20Bo. A first recess 34 is formed in a circular region centered at a position corresponding to the gas outlet 30o on the rear surface 52H of the eighth-type flow path forming plate 51H. As shown in FIG. 13B, a third through hole 31 is formed at a position adjacent to the first through hole 21, and a fourth through hole 32 is formed at a position adjacent to the second through hole 22. The third through hole 31 and the fourth through hole 32 are each connected to the first recess 34. As shown in FIG. 13C, a second recess 24 is formed in a circular region centered at the opening of the third through hole 31 on the front surface 53H of the eighth-type flow path forming plate 51H. The diameter of the second recess 24 is larger than the inner diameter of the third through hole 31. The second recess 24 is also connected to the opening of the first through hole 21. In addition, a third recess 25 is formed in the front surface 53H in a circular region centered on the opening of the fourth through hole 32. The diameter of the third recess 25 is larger than the inner diameter of the fourth through hole 32. The third recess 25 is also connected to the opening of the second through hole 22.

[0080] 12, the ninth flow path forming plate 51J has first ejection holes 41 formed at positions corresponding to the third through holes 31. Also, second ejection holes 42 are formed at positions corresponding to the fourth through holes 32. Both the first ejection holes 41 and the second ejection holes 42 are cone-shaped through holes.

[0081] When the eighth-type flow path forming plate 51H is joined to the front surface 13 of the base 10, the first base liquid flow path 20A is connected to the first through-hole 21, and the second base liquid flow path 20B is connected to the second through-hole 22. Furthermore, the first recess 34 and the front surface 13 of the base 10 are combined to form a branch flow path connected to the base gas flow path 30. When the ninth-type flow path forming plate 51J is joined to the front surface 53H of the eighth-type flow path forming plate 51H, the peripheral portion of the second recess 24 is covered with the rear surface 52J of the ninth-type flow path forming plate 51J (annular region around the first ejection hole 41) to form a flow path. Furthermore, the peripheral portion of the third recess 25 is covered with the rear surface 52J of the ninth-type flow path forming plate 51J (annular region around the second ejection hole 42) to form a flow path. The first recess 34, the third through-hole 31, and the fourth through-hole 32 form a tip gas flow path that branches into two midway. The first through-hole 21 and the second recess 24 form a first tip liquid flow path, and the second through-hole 22 and the third recess 25 form a second tip liquid flow path.

[0082] The first liquid sample L1 introduced from the first liquid inlet 20Ai passes through the first base liquid flow channel 20A and the first tip liquid flow channel (the first through-hole 21 and the second recess 24) and is guided to the first nozzle hole 41. The gas G introduced from the gas inlet 30i passes through the base gas flow channel 30 and the tip gas flow channel (the first recess 34 and the third through-hole 31) and is guided to the first nozzle hole 41. The first liquid sample L1 spreads into the circular second recess 24 and becomes a liquid film. This liquid film passes over the gas outlet (the opening of the third through-hole 31), thereby atomizing the first liquid sample L1.

[0083] The second liquid sample L2 introduced from the second liquid inlet 20Bi passes through the second base liquid flow path 20B and the second tip liquid flow path (the second through-hole 22 and the third recess 25) and is guided to the second nozzle hole 42. The gas G introduced from the gas inlet 30i passes through the base gas flow path 30 and the tip gas flow path (the first recess 34 and the fourth through-hole 32) and is guided to the second nozzle hole 42. The second liquid sample L2 spreads into the circular third recess 25 and becomes a liquid film. This liquid film passes over the gas outlet (the opening of the fourth through-hole 32), thereby atomizing the second liquid sample L2.

[0084] Different types of liquid samples can be used as the first liquid sample L1 and the second liquid sample L2. Nebulizer FF can spray two types of liquid samples simultaneously from separate nozzles 41 and 42. This allows the two types of liquid samples to be sprayed without mixing. For example, it can stably spray immiscible combinations, such as an aqueous solution sample and an organic solvent sample. It can also stably spray liquid combinations that, when mixed, would undergo reactions such as neutralization reactions, oxidation-reduction reactions, and solization reactions, resulting in the generation of precipitates, bubbles, or significant changes in viscosity. Since fine droplets do not grow into larger droplets even when they collide with each other, the reaction can be suppressed even after spraying.

[0085] Seventh Embodiment Next, a nebulizer GG according to a seventh embodiment will be described. As shown in FIG. 14, the nebulizer GG of this embodiment has a base portion 10 and a tip portion 50.

[0086] As in the sixth embodiment, three flow paths are formed along the axial direction inside the base portion 10. However, the central flow path is used as the base portion liquid flow path 20, and the two flow paths at eccentric positions are used as the first base portion gas flow path 30A and the second base portion gas flow path 30B, respectively. The opening on the rear surface 12 side of the first base portion gas flow path 30A is referred to as the first gas inlet 30Ai, and the opening on the front surface 13 side is referred to as the first gas outlet 30Ao. The opening on the rear surface 12 side of the second base portion gas flow path 30B is referred to as the second gas inlet 30Bi, and the opening on the front surface 13 side is referred to as the second gas outlet 30Bo.

[0087] The tip portion 50 is made up of a tenth-type flow path forming plate 51K, a first spacer plate 55, an eleventh-type flow path forming plate 51L, a second spacer plate 56, and a twelfth-type flow path forming plate 51M. The tenth-type flow path forming plate 51K, the first spacer plate 55, the eleventh-type flow path forming plate 51L, the second spacer plate 56, and the twelfth-type flow path forming plate 51M are joined to the front surface 13 of the base portion 10 in this order.

[0088] The tenth type flow path forming plate 51K has a first through hole 21 formed at a position corresponding to the liquid outlet 20o. In addition, a second through hole 31 is formed at a position corresponding to the first gas outlet 30Ao, and a third through hole 32a is formed at a position corresponding to the second gas outlet 30Bo. The tenth type flow path forming plate 51K has a cone-shaped first nozzle 36 protruding from the front surface 53K. The first nozzle 36 is disposed at a position corresponding to the liquid outlet 20o. As shown in FIG. 15(A), the first through hole 21 penetrates through the center of the first nozzle 36.

[0089] The first spacer plate 55 is an annular member. An opening in the center of the first spacer plate 55 is large enough to accommodate the first nozzle 36 and the second through-hole 31 of the tenth flow path forming plate 51K. The first spacer plate 55 also has a through-hole formed in a position corresponding to the third through-hole 32a. The first spacer plate 55 is provided on the outer edge of the front surface 53K of the tenth flow path forming plate 51K. The tenth flow path forming plate 51K and the first spacer plate 55 may be integrated into a single component.

[0090] The 11th type flow path forming plate 51L has a cylindrical second nozzle 37 protruding from the front surface 53L. The second nozzle 37 is arranged at a position corresponding to the liquid outlet 20o. A through hole penetrating the center of the second nozzle 37 is formed in the 11th type flow path forming plate 51L. This through hole is composed of a cone-shaped first nozzle accommodating hole 38 on the rear surface 52L side and an ejection hole 40 on the front surface 53L side. In addition, the 11th type flow path forming plate 51L has a fourth through hole 32b formed at a position corresponding to the second gas outlet 30Bo.

[0091] The second spacer plate 56 is an annular member. The central opening of the second spacer plate 56 is large enough to accommodate the second nozzle 37 and the fourth through-hole 32b of the 11th type flow path forming plate 51L. The second spacer plate 56 is provided on the outer edge of the front surface 53L of the 11th type flow path forming plate 51L. The 11th type flow path forming plate 51L and the second spacer plate 56 may be integrated into one component.

[0092] The twelfth type flow path forming plate 51M has a through hole formed at a position corresponding to the liquid outlet 20o. This through hole is a second nozzle accommodating hole 39 that accommodates the second nozzle 37.

[0093] When the tenth-type flow path forming plate 51K is joined to the front surface 13 of the base 10, the base liquid flow path 20 and the first through-hole 21 are connected. The first base gas flow path 30A and the second through-hole 31 are connected, and the second base gas flow path 30B and the third through-hole 32a are connected. When the eleventh-type flow path forming plate 51L is joined to the tenth-type flow path forming plate 51K with the first spacer plate 55 sandwiched therebetween, an annular flow path is formed between the front surface 53K of the tenth-type flow path forming plate 51K and the rear surface 52L of the eleventh-type flow path forming plate 51L. As shown in FIG. 15B, the first nozzle 36 is accommodated in the first nozzle accommodating hole 38, forming a cylindrical flow path. The third through-hole 32a and the fourth through-hole 32b are connected.

[0094] When the 12th type flow path forming plate 51M is joined to the 11th type flow path forming plate 51L with the second spacer plate 56 sandwiched therebetween, an annular flow path is formed between the front surface 53L of the 11th type flow path forming plate 51L and the rear surface 52M of the 12th type flow path forming plate 51M. The second nozzle 37 is accommodated in the second nozzle accommodating hole 39 to form a cylindrical flow path. The first nozzle 36 and the second nozzle 37 are combined to form a triple-pipe flow path.

[0095] The first through-hole 21 forms a tip liquid flow path. The second through-hole 31, the annular flow path between the front surface 53K and the rear surface 52L, and the cylindrical flow path between the first nozzle 36 and the first nozzle accommodating hole 38 form a first tip gas flow path. The third through-hole 32a, the fourth through-hole 32b, the annular flow path between the front surface 53L and the rear surface 52M, and the cylindrical flow path between the second nozzle 37 and the second nozzle accommodating hole 39 form a second tip gas flow path.

[0096] The liquid sample L introduced from the liquid inlet 20i passes through the base liquid flow path 20 and the tip liquid flow path (first through-hole 21) and is guided to the ejection hole 40. The first gas G1 introduced from the first gas inlet 30Ai passes through the first base gas flow path 30A and the first tip gas flow path (second through-hole 31, annular flow path 53K, and cylindrical flow path 36) and is guided to the ejection hole 40. The liquid sample L that has reached the ejection hole 40 is turned into fine droplets D by the shear force of the first gas G1 and is ejected from the ejection hole 40.

[0097] The second gas G2 introduced from the second gas inlet 30Bi passes through the second base gas flow path 30B and the second tip gas flow path (the third through hole 32a, the fourth through hole 32b, the annular flow path 53L, and the cylindrical flow path 37) and is guided to the periphery of the ejection hole 40. Therefore, the second gas G2 forms a flow that surrounds the periphery of the droplet D ejected from the ejection hole 40.

[0098] By flowing a second gas G2 around the sample droplets D ejected from the ejection holes 40, the sample droplets D can be further refined and the spray direction can be controlled. Different types of gases with different purposes can be used as the first gas G1 and the second gas G2. For example, a carrier gas can be used as the first gas G1, and a sheath gas can be used as the second gas G2. Furthermore, by using a low-temperature or high-temperature gas as the second gas G2, the sample droplets D can be cooled or heated.

[0099] The nebulizer GG has a bolt 62 as a fixing part for fixing the tip part 50 to the base part 10. The bolt 62 has a male thread formed only at the tip part. The base part 10, the tenth type flow path forming plate 51K, the first spacer plate 55, the eleventh type flow path forming plate 51L, and the second spacer plate 56 have through holes formed therein for inserting the bolt 62. The twelfth type flow path forming plate 51M also has a female thread formed therein. The bolt 62 is inserted from the rear surface 12 of the base part 10 and is threadedly coupled to the twelfth type flow path forming plate 51M. This allows the tip part 50 to be fixed to the base part 10. It is preferable to fix the tip part 50 and the base part 10 with multiple bolts 62. The bolt 62 also functions as a stopper for preventing the flow path forming plate from rotating.

[0100] Eighth Embodiment Next, a nebulizer HH according to an eighth embodiment will be described. As shown in FIG. 16, the nebulizer HH of this embodiment has a base portion 10 and a tip portion.

[0101] As shown in Figure 17(A), a base gas channel 30 is formed inside the base 10 along the central axis. Furthermore, a plurality of base liquid channels 20 are formed inside the base 10 on a circumference centered on the base gas channel 30. The plurality of base liquid channels 20 are spaced the same distance from the base gas channel 30. Furthermore, the plurality of base liquid channels 20 are arranged at equal angular intervals around the base gas channel 30. In the example shown in Figure 17(A), four base liquid channels 20 are arranged at 90° intervals.

[0102] The tip portion is made of a third-type flow path forming plate 51C. The third-type flow path forming plate 51C is joined to the front surface 13 of the base portion 10. A groove 23 is formed on the rear surface 52C of the third-type flow path forming plate 51C, extending radially from a position corresponding to the gas outlet 30o. As shown in FIG. 17(B), the groove 23 has the same length as the distance between the base liquid flow path 20 and the base gas flow path 30. In addition, the third-type flow path forming plate 51C has an ejection hole 40 formed at a position corresponding to the gas outlet 30o.

[0103] When the third-type flow channel forming plate 51C is joined to the front surface 13 of the base 10, the groove 23 combines with the front surface 13 of the base 10 to form a tip liquid channel. Here, the tip liquid channel (groove 23) connects to one of the multiple base liquid channels 20. The remaining base liquid channels 20 are blocked by the rear surface 52C of the third-type flow channel forming plate 51C.

[0104] The liquid sample L introduced from the selected liquid inlet 20i is guided to the nozzle 40 through the base liquid flow path 20 and the tip liquid flow path (groove 23). The gas G introduced from the gas inlet 30i is guided to the nozzle 40 through the base gas flow path 30. The liquid sample L that reaches the nozzle 40 is broken into fine droplets D by the shear force of the gas G and is ejected from the nozzle 40.

[0105] When the third-type flow path forming plate 51C is removed from the base 10, rotated around the nozzle hole 40, and reattached to the base 10, the base liquid flow path 20 to which the groove 23 is connected is switched. In other words, the nebulizer HH can selectively switch the flow path through which the liquid sample L flows among the multiple base liquid flow paths 20.

[0106] The nebulizer HH selects one of the multiple base liquid flow paths 20 and connects it to the nozzle hole 40. Therefore, even if one base liquid flow path 20 becomes clogged with suspended matter or damaged by chemicals, the nebulizer HH can be used continuously by switching to another base liquid flow path 20. Furthermore, by using multiple base liquid flow paths 20 depending on the type of liquid sample L (aqueous solution, organic solvent, etc.), the effort of cleaning the base liquid flow paths 20 can be reduced.

[0107] The nebulizer HH has a bolt 62 and a nut 63 as fixing parts for fixing the tip part to the base part 10. A through hole into which the bolt 62 is inserted is formed in the base part 10 and the third-type flow path forming plate 51C. A recess into which the nut 63 fits is formed in the front surface 53C of the third-type flow path forming plate 51C. The bolt 62 is inserted from the rear surface 12 of the base part 10 and fastened to the nut 63. This allows the tip part to be fixed to the base part 10.

[0108] Ninth Embodiment Next, a nebulizer JJ according to a ninth embodiment will be described. As shown in Figure 18, the nebulizer JJ of this embodiment has a base portion 10 and a tip portion. As shown in Figure 19(A), the base portion 10 has the same shape as that of the eighth embodiment.

[0109] The tip portion is made of a 13-type flow path forming plate 51N. The 13-type flow path forming plate 51N is joined to the front surface 13 of the base portion 10. As shown in FIG. 19(B), two grooves, namely, a first groove 23A and a second groove 23B, are formed on the rear surface 52N of the 13-type flow path forming plate 51N radially from a position corresponding to the gas outlet 30o along the radial direction. The first groove 23A and the second groove 23B both have the same length as the distance between the base portion liquid flow path 20 and the base portion gas flow path 30. The angle between the first groove 23A and the second groove 23B is the same as the angular interval of the base portion liquid flow path 20 (90° in the example shown in FIG. 19(B)). The 13-type flow path forming plate 51N also has an ejection hole 40 formed at a position corresponding to the gas outlet 30o.

[0110] When the 13-type flow channel forming plate 51N is joined to the front surface 13 of the base portion 10, the first groove 23A is combined with the front surface 13 of the base portion 10 to form a first tip portion liquid channel. Here, the first tip portion liquid channel (first groove 23A) is connected to one of the multiple base portion liquid channels 20. Also, the second groove 23B is combined with the front surface 13 of the base portion 10 to form a second tip portion liquid channel. Here, the second tip portion liquid channel (second groove 23B) is connected to another one of the multiple base portion liquid channels 20. Note that the remaining base portion liquid channels 20 are blocked by the rear surface 52N of the 13-type flow channel forming plate 51N.

[0111] A first liquid sample L1 introduced from a selected liquid inlet 20i passes through the base liquid channel 20 and the first tip liquid channel (first groove 23A) and is guided to the ejection hole 40. A second liquid sample introduced from another selected liquid inlet 20i passes through the base liquid channel 20 and the second tip liquid channel (second groove 23B) and is guided to the ejection hole 40. The first liquid sample L1 and the second liquid sample are mixed just before the ejection hole 40. Gas G introduced from the gas inlet 30i passes through the base gas channel 30 and is guided to the ejection hole 40. The mixture of the first liquid sample L1 and the second liquid sample is formed into fine droplets D by the shear force of the gas G and is ejected from the ejection hole 40.

[0112] When the 13th type flow path forming plate 51N is removed from the base 10, rotated around the ejection hole 40, and reattached to the base 10, the base liquid flow path 20 to which the first groove 23A and the second groove 23B are connected is switched. In other words, the nebulizer HH can selectively switch between two of the multiple base liquid flow paths 20 through which the liquid sample L flows.

[0113] For example, when mixing a measurement sample and a reaction solution, mixing before entering the sample flow path or along the way can result in the generation of precipitates or bubbles, or a significant change in viscosity. Furthermore, a combination of an aqueous solution sample and an organic solvent can cause phase separation and prevent mixing. Therefore, conventional nebulizers cannot stably spray such a liquid combination. In contrast, the nebulizer JJ of this embodiment can mix and spray two types of liquid samples immediately before the nozzle 40. Therefore, it can stably spray liquid samples that are difficult to spray when mixed, or that cannot be mixed.

[0114] Tenth Embodiment Next, a nebulizer KK according to a tenth embodiment will be described. As shown in FIG. 20, the nebulizer KK of this embodiment has a base portion 10 and a tip portion.

[0115] As shown in FIG. 21(A), a base gas channel 30 is formed inside the base 10 along the central axis. A plurality of base liquid channels 20A, 20B with different inner diameters are also formed inside the base 10 on a circumference centered on the base gas channel 30. In the example shown in FIG. 21(A), two base liquid channels 20A, 20B are arranged at 180° intervals. The first base liquid channel 20A is a large-diameter channel, and the second base liquid channel 20B is a small-diameter channel. For example, the inner diameter of the first base liquid channel 20A is 300 μm, and the inner diameter of the second base liquid channel 20B is 75 μm.

[0116] The tip portion is made of a 14th-type flow channel forming plate 51P. The 15th-type flow channel forming plate 51P is joined to the front surface 13 of the base portion 10. As shown in FIG. 21(B), the rear surface 52P of the 15th-type flow channel forming plate 51P has multiple grooves 23A, 23B of different widths formed radially from a position corresponding to the gas outlet 30o along the radial direction. In the example shown in FIG. 21(B), a wide first groove 23A corresponding to the inner diameter of the first base portion liquid flow channel 20A and a narrow second groove 23B corresponding to the inner diameter of the second base portion liquid flow channel 20B are arranged. For example, the width and depth of the first groove 23A are 300 μm, and the width and depth of the second groove 23B are 75 μm. The angle between the first groove 23A and the second groove 23B is 90°. In addition, the 14th-type flow channel forming plate 51P has an ejection hole 40 formed at a position corresponding to the gas outlet 30o.

[0117] The 14th type flow path forming plate 51P is joined to the base 10 so that the first base liquid flow path 20A and the first groove 23A are connected. Then, the first groove 23A is combined with the front surface 13 of the base 10 to form the first tip liquid flow path. The second base liquid flow path 20B is closed by the rear surface 52P of the 14th type flow path forming plate 51P.

[0118] The liquid sample L introduced from the first liquid inlet 20Ai passes through the first base liquid flow path 20A and the first tip liquid flow path (first groove 23A) and is guided to the ejection hole 40. The gas G introduced from the gas inlet 30i passes through the base gas flow path 30 and is guided to the ejection hole 40. The liquid sample L that has reached the ejection hole 40 is broken into fine droplets D by the shear force of the gas G and is ejected from the ejection hole 40.

[0119] The 14th type flow channel forming plate 51P may be joined to the base 10 so that the second base liquid flow channel 20B and the second groove 23B are connected. In this case, the second groove 23B is combined with the front surface 13 of the base 10 to form the second tip liquid flow channel. The first base liquid flow channel 20A is closed by the rear surface 52P of the 14th type flow channel forming plate 51P.

[0120] The liquid sample L introduced from the second liquid inlet 20Bi passes through the second base liquid flow path 20B and the second tip liquid flow path (second groove 23B) and is guided to the ejection hole 40. The gas G introduced from the gas inlet 30i passes through the base gas flow path 30 and is guided to the ejection hole 40. The liquid sample L that has reached the ejection hole 40 is broken into fine droplets D by the shear force of the gas G and is ejected from the ejection hole 40.

[0121] In this way, when the 14th type flow path forming plate 51P is rotated around the ejection hole 40, the base liquid flow paths 20A, 20B to which the grooves 23A, 23B are connected are switched, thereby making it possible to change the width of the liquid flow path.

[0122] The flow rate of the liquid sample supplied to the nebulizer is typically about 0.5 to 1.0 mL / min, and the inner diameter of the liquid flow channel is sized to accommodate this flow rate. Introducing a liquid sample with a very small flow rate (e.g., 0.1 mL / min or less) into such a nebulizer can dilute the sample, or, when analyzing the eluate from a liquid chromatograph, can reduce the resolution, making analysis difficult. To analyze a liquid sample with a low flow rate, a nebulizer with a liquid flow channel of an appropriate size is required.

[0123] In this regard, the nebulizer KK of this embodiment can selectively change the inner diameter of the liquid flow path. In other words, the width of the liquid flow path can be selected according to the liquid sample flow rate. Therefore, a single nebulizer KK can handle a wide range of flow rates.

[0124] Eleventh Embodiment Next, a nebulizer LL according to an eleventh embodiment will be described. As shown in Fig. 22, the nebulizer LL of this embodiment has a cylindrical body 80. A base portion 10 and a tip portion 50 are attached to the tip of the cylindrical body 80. In the example shown in Fig. 22, the base portion 10 and tip portion 50 of the fifth embodiment are attached to the cylindrical body 80, but this is not limiting. The base portion 10 and tip portion 50 of other embodiments may also be attached to the cylindrical body 80.

[0125] A female thread is formed on the inner peripheral surface of the tip of the cylindrical body 80. A male thread is formed on the outer peripheral surface of the base part 10. By threading the cylindrical body 80 and the base part 10 together, the base part 10 and the tip part 50 are fixed to the cylindrical body 80. However, the fixing method is not limited to this.

[0126] The cylindrical body 80 has a liquid introduction part 81 for introducing a liquid sample and a gas introduction part 82 for introducing a gas. The liquid introduction part 81 and the liquid inlet 20i of the base part 10 are connected by a tube 83. The liquid sample is introduced into the liquid inlet 20i via the tube 83. On the other hand, the gas introduction part 82 and the gas inlet 30i are not connected by a tube or the like. The gas introduced into the gas introduction part 82 passes through the inside of the cylindrical body 80 and is supplied to the gas inlet 30i.

[0127] The external shape of the cylindrical body 80 can be adapted to an existing nebulizer. In this way, the nebulizer LL can be attached to an analyzer by replacing the existing nebulizer. Note that the base portion 10 and the tip portion 50 may be attached directly to the analyzer without using the cylindrical body 80. [Explanation of symbols]

[0128] AA, BB, CC, DD, EE, FF, GG, HH, JJ, KK, LL Nebulizer 10 Base 20. Basal fluid channel 21, 22 Through holes 23 Groove 24, 25 recess 30 Base gas flow path 31, 32 Through holes 34 Recess 36, 37 nozzles 38, 39 Nozzle receiving hole 40, 41, 42 vents 50 Tip 51A, 51B, 51C, 51D, 51E, 51F, 51G, 51H, 51J, 51K, 51L, 51M, 51N, 51P Flow path forming plate 54, 55, 56 Spacer plates

Claims

1. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, the tip portion is made up of one or more flow path forming plates, the tip portion has an ejection hole formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides the gas discharged from the gas outlet to the ejection hole, One of the one or more flow path forming plates has a nozzle protruding from the front surface and a through hole penetrating the center of the nozzle to form the tip liquid flow path. A nebulizer characterized by:

2. Another one of the one or more flow path forming plates has a nozzle accommodating hole that forms a cylindrical tip gas flow path between the accommodated nozzle and the nozzle.

2. The nebulizer according to claim 1.

3. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, the tip portion is made up of a plurality of flow path forming plates, the tip portion has an ejection hole formed by stacking a plurality of the flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip portion liquid flow path that guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path that guides the gas discharged from the gas outlet to the ejection hole, The tip portion is a first flow path forming plate having a first through hole formed at a position corresponding to the liquid outlet, a second through hole formed at a position corresponding to the gas outlet, and a groove formed linearly on a front surface from an opening of the first through hole to an opening of the second through hole; a second flow path forming plate having the ejection holes formed at positions corresponding to the gas outlets, the first flow path forming plate and the second flow path forming plate are joined in this order to the front surface of the base portion, The groove of the first flow channel forming plate is combined with the rear surface of the second flow channel forming plate to form the tip liquid flow channel. A nebulizer characterized by:

4. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, the tip portion is made up of one or more flow path forming plates, the tip portion has an ejection hole formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides the gas discharged from the gas outlet to the ejection hole, the tip portion includes a third flow path forming plate having a groove formed linearly on a rear surface thereof from a position corresponding to the liquid outlet to a position corresponding to the gas outlet, and the ejection hole formed at a position corresponding to the gas outlet, the third-type flow path forming plate is joined to the front surface of the base portion, The grooves of the third type channel forming plate combine with the front surface of the base to form the tip liquid channel. A nebulizer characterized by:

5. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, the tip portion is made up of a plurality of flow path forming plates, the tip portion has an ejection hole formed by stacking a plurality of the flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip portion liquid flow path that guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path that guides the gas discharged from the gas outlet to the ejection hole, The tip portion is a fourth flow path forming plate having a groove formed on its rear surface from a position corresponding to the liquid outlet to a position near a position corresponding to the gas outlet, a first through hole formed at the position near the liquid outlet, and a second through hole formed at a position corresponding to the gas outlet, wherein an opening of the first through hole and an opening of the second through hole are adjacent to each other on its front surface; a second flow path forming plate having the ejection holes formed at positions corresponding to the gas outlets, the fourth-type flow path forming plate and the second-type flow path forming plate are joined to the front surface of the base portion in this order, The grooves of the fourth type channel forming plate combine with the front surface of the base to form the tip liquid channel. A nebulizer characterized by:

6. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, the tip portion is made up of a plurality of flow path forming plates, the tip portion has an ejection hole formed by stacking a plurality of the flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip portion liquid flow path that guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path that guides the gas discharged from the gas outlet to the ejection hole, The tip portion is a fifth flow path forming plate having, on its rear surface, a groove formed from a position corresponding to the liquid outlet to a position near a position corresponding to the gas outlet, a first through hole formed at the near position, a second through hole formed at a position corresponding to the gas outlet, and a recess formed on its front surface in a circular region connected to an opening of the first through hole and centered on the opening of the second through hole; a second flow path forming plate having the ejection holes formed at positions corresponding to the gas outlets, the fifth-type flow path forming plate and the second-type flow path forming plate are joined to the front surface of the base portion in this order, the grooves of the fifth type channel-forming plate combine with the front surface of the base to form the tip liquid channel; The peripheral edge of the recess of the fifth-type flow path forming plate is covered with the rear surface of the second-type flow path forming plate to form the tip liquid flow path. A nebulizer characterized by:

7. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, the tip portion is made up of a plurality of flow path forming plates, the tip portion has an ejection hole formed by stacking a plurality of the flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip portion liquid flow path that guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path that guides the gas discharged from the gas outlet to the ejection hole, The tip portion is a sixth flow path forming plate having a nozzle protruding from a front surface at a position corresponding to the liquid outlet, a first through hole penetrating the center of the nozzle, and a second through hole formed at a position corresponding to the gas outlet; a seventh flow path forming plate having a nozzle accommodating hole on a rear surface side and the jet hole on a front surface side, which constitute a through hole formed at a position corresponding to the liquid outlet, the sixth type flow path forming plate and the seventh type flow path forming plate are joined in this order to the front surface of the base portion, The nozzle of the sixth type flow path forming plate is received in the nozzle receiving hole of the seventh type flow path forming plate to form the cylindrical tip gas flow path. A nebulizer characterized by:

8. The tip portion includes a spacer plate sandwiched between the sixth flow path forming plate and the seventh flow path forming plate.

8. The nebulizer according to claim 7.

9. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that communicates a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, a second base liquid flow path that communicates a second liquid inlet that opens on the rear surface with a second liquid outlet that opens on the front surface, and a base gas flow path that communicates a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, the tip portion is made up of a plurality of flow path forming plates, the tip portion has an ejection hole formed by stacking a plurality of the flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip portion liquid flow path that guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path that guides the gas discharged from the gas outlet to the ejection hole, The tip portion is an eighth type flow path forming plate having: a first through hole formed at a position corresponding to the liquid outlet, a second through hole formed at a position corresponding to the second liquid outlet, a first recess formed on a rear surface at a position corresponding to the gas outlet, a third through hole and a fourth through hole communicating with the first recess, a second recess formed on a front surface in a circular region connected to an opening of the first through hole and centered on the opening of the third through hole, and a third recess formed on the front surface in a circular region connected to the opening of the second through hole and centered on the opening of the fourth through hole; a ninth type flow path forming plate having first ejection holes formed at positions corresponding to the third through holes and second ejection holes formed at positions corresponding to the fourth through holes, the eighth type flow path forming plate and the ninth type flow path forming plate are joined to the front surface of the base portion in this order, the first recess of the eighth type flow channel forming plate is combined with the front surface of the base portion to form the tip gas flow channel; a peripheral portion of the second recess of the eighth type flow channel forming plate is covered by the rear surface of the ninth type flow channel forming plate to form a first tip portion liquid flow channel; The peripheral portion of the third recess of the eighth type flow path forming plate is covered by the rear surface of the ninth type flow path forming plate to form a second tip liquid flow path. A nebulizer characterized by:

10. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that communicates between a liquid inlet that opens on the rear surface and a liquid outlet that opens on the front surface, a base gas flow path that communicates between a gas inlet that opens on the rear surface and a gas outlet that opens on the front surface, and a second base gas flow path that communicates between a second gas inlet that opens on the rear surface and a second gas outlet that opens on the front surface, the tip portion is made up of a plurality of flow path forming plates, the tip portion has an ejection hole formed by stacking a plurality of the flow path forming plates and ejecting a mixed fluid of gas and liquid droplets, a tip portion liquid flow path that guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path that guides the gas discharged from the gas outlet to the ejection hole, The tip portion is a tenth type flow path forming plate having a first nozzle protruding from a front surface at a position corresponding to the liquid outlet, a first through hole penetrating a center of the first nozzle, a second through hole formed at a position corresponding to the gas outlet, and a third through hole formed at a position corresponding to the second gas outlet; an eleventh type flow path forming plate having a second nozzle protruding from a front surface at a position corresponding to the liquid outlet, a first nozzle accommodating hole on a rear surface side and the ejection hole on a front surface side constituting a through hole passing through the center of the second nozzle, and a fourth through hole formed at a position corresponding to the second gas outlet; a twelfth type flow path forming plate having a second nozzle accommodating hole formed at a position corresponding to the liquid outlet, the 10th type flow path forming plate, the 11th type flow path forming plate, and the 12th type flow path forming plate are joined to the front surface of the base portion in this order, the first nozzle of the tenth type flow path forming plate is accommodated in the first nozzle accommodating hole of the eleventh type flow path forming plate to form a cylindrical first tip gas flow path; The second nozzle of the eleventh type flow path forming plate is received in the second nozzle receiving hole of the twelfth type flow path forming plate to form a cylindrical second tip gas flow path. A nebulizer characterized by:

11. The tip portion is a first spacer plate sandwiched between the tenth type flow path forming plate and the eleventh type flow path forming plate; a second spacer plate sandwiched between the eleventh type flow path forming plate and the twelfth type flow path forming plate; 11. The nebulizer of claim 10.

12. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, The base portion has a plurality of base liquid flow channels formed on a circumference centered on the base gas flow channel, the tip portion is made up of one or more flow path forming plates, the tip portion has an ejection hole formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides the gas discharged from the gas outlet to the ejection hole, the tip portion includes a third flow path forming plate having a groove formed in a rear surface thereof in a radial direction from a position corresponding to the gas outlet, and the ejection hole formed at a position corresponding to the gas outlet, the third-type flow path forming plate is joined to the front surface of the base portion, the groove of the third type flow channel forming plate is connected to one of the plurality of base liquid channels to form the tip liquid channel; When the third flow path forming plate is rotated around the nozzle hole, the base liquid flow path to which the groove is connected is switched. A nebulizer characterized by:

13. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, The base portion has a plurality of base liquid flow channels formed at equal angular intervals on a circumference centered on the base gas flow channel, the tip portion is made up of one or more flow path forming plates, the tip portion has an ejection hole formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides the gas discharged from the gas outlet to the ejection hole, the tip portion includes a thirteenth-type flow path forming plate having first and second grooves formed radially from positions corresponding to the gas outlets on a rear surface thereof, and the ejection holes formed at positions corresponding to the gas outlets, the 13th type flow path forming plate is joined to the front surface of the base portion, the first groove of the 13th type flow channel forming plate is connected to one of the plurality of base liquid channels to form a first tip liquid channel, and the second groove is connected to another of the plurality of base liquid channels to form a second tip liquid channel; When the thirteenth type flow path forming plate is rotated around the ejection hole, the base liquid flow path to which the first groove and the second groove are connected is switched. A nebulizer characterized by:

14. A base having a front surface and a rear surface; a tip portion joined to the front surface of the base portion; the base portion has a base liquid flow path that connects a liquid inlet that opens on the rear surface with a liquid outlet that opens on the front surface, and a base gas flow path that connects a gas inlet that opens on the rear surface with a gas outlet that opens on the front surface, the base portion has a plurality of base portion liquid flow channels formed on a circumference centered on the base portion gas flow channel, the base portion having different inner diameters; the tip portion is made up of one or more flow path forming plates, the tip portion has an ejection hole formed in one of the flow path forming plates or formed by stacking a plurality of the flow path forming plates, which ejects a mixed fluid of gas and liquid droplets, a tip portion liquid flow path which guides the liquid discharged from the liquid outlet to the ejection hole, and a tip portion gas flow path which guides the gas discharged from the gas outlet to the ejection hole, the tip portion includes a 14th type flow path forming plate having a plurality of grooves of different widths formed radially from a position corresponding to the gas outlet on a rear surface thereof, and the ejection holes formed at the position corresponding to the gas outlet, the type 14 flow path forming plate is joined to the front surface of the base portion, one of the plurality of grooves of the type 14 flow channel forming plate is connected to one of the plurality of base liquid channels having a corresponding inner diameter to form the tip liquid channel; When the 14th type flow path forming plate is rotated around the nozzle hole, the base liquid flow path to which the groove is connected is switched. A nebulizer characterized by:

15. The base portion and the tip portion are attached to a cylindrical body at the tip. A nebulizer according to any one of claims 1 to 14.

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