Liquid ejection device and imprint device

Abstract

To provide a liquid ejection device that is able to prevent liquid ejection failure without increasing the size of the device.SOLUTION: A liquid ejection device comprises: a first storage unit that stores a first liquid; an ejection element that ejects the first liquid stored in the first storage unit; a second storage unit that is adjacent to the first storage unit and stores a second liquid for controlling pressure of the first liquid stored in the first storage unit; a partition made of a gas-permeable material to separate the first storage unit and the second storage unit; and gas removal means that removes gas in the second liquid stored in the second storage unit.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a liquid ejection device. [Background technology]

[0002] As demand for miniaturization of semiconductor devices and MEMS (Micro Electro Mechanical Systems) continues to grow, attention is being drawn to a microfabrication technology that uses a mold to shape uncured resin on a substrate and form a resin pattern on the substrate, in addition to conventional photolithography technology. This technology, called imprint technology, is capable of forming fine structures on the order of a few nanometers on a substrate.

[0003] For example, one imprinting technique is the photocuring method. In an imprinting device that uses this photocuring method, ultraviolet-curable resin is ejected as droplets and applied to the imprint area on a substrate. This resin is then shaped by pressing a mold with an engraved pattern onto it. The resin is then hardened by irradiating it with ultraviolet light, and the mold is then removed, leaving the resin pattern on the substrate.

[0004] In particular, when semiconductor devices are produced using an imprinting apparatus, the mold pattern is so fine that defective discharge from the liquid discharger can cause uneven thickness in the applied resin, reducing the resin's ability to fill the mold and potentially causing defects in the resin pattern. Therefore, it is necessary to suppress defective discharge.

[0005] One example of this ejection defect is non-ejection. One of the causes of non-ejection is the inclusion of air bubbles in the pressure chamber that controls the ejection. When air bubbles are included in the liquid inside the pressure chamber, the bubbles function as an air damper, attenuating the pressure fluctuations for ejection, preventing the liquid from being ejected from the ejection port and resulting in non-ejection. Air bubbles are generated when gas dissolved in the liquid turns into bubbles due to pressure fluctuations in the print head, etc. Furthermore, the meniscus vibrates significantly when the imprint material is ejected, which can also entrain air bubbles.

[0006] Patent Document 1 proposes a method of arranging a degassing unit in a circulation flow path for ejection liquid as a measure against the generation of bubbles in a pressure chamber. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-147365 Summary of the Invention [Problem to be solved by the invention]

[0008] However, the technique described in Patent Document 1 requires the placement of a space-consuming degassing unit in the circulation flow path, which poses a problem of increasing the size of the liquid ejection device.

[0009] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a liquid ejection apparatus that can suppress non-ejection of liquid without increasing the size of the apparatus. [Means for solving the problem]

[0010] A liquid ejection device according to the present invention includes a first storage section that stores a first liquid, an ejection element for ejecting the first liquid stored in the first storage section, a second storage section that is adjacent to the first storage section and stores a second liquid for controlling the pressure of the first liquid stored in the first storage section, a partition wall made of a gas-permeable material that separates the first storage section from the second storage section, and a degassing means for degassing gas in the second liquid stored in the second storage section. The degassing means has a pressure reducing mechanism connected to the second storage unit via a gas-permeable membrane and reducing the pressure inside the second storage unit, and further includes a flow path for supplying the second liquid to the second storage unit, and a permeation part made of a gas-permeable material is formed in at least a part of the flow path, and the pressure reducing mechanism has a cover that covers the permeation part, and degasses the gas in the second liquid through the permeation part by reducing the pressure inside the cover. It is characterized by: [Effects of the Invention]

[0011] According to the present invention, it is possible to suppress non-ejection of liquid without increasing the size of the apparatus. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a diagram showing the arrangement of an imprint apparatus according to a first embodiment. [Figure 2] FIG. 2 is a diagram showing the configuration of a liquid ejection system according to the first embodiment. [Figure 3] FIG. 2 is a diagram showing the configuration of a discharge unit according to the first embodiment. [Figure 4] FIG. 3 is a diagram showing a degassing configuration of a filling liquid container of the liquid ejection device according to the first embodiment. [Figure 5] FIG. 3 is a diagram showing a degassing configuration of a filling liquid flow path of the liquid ejection device according to the first embodiment. [Figure 6] FIG. 3 is a diagram showing a degassing configuration in which a separation membrane is arranged horizontally in the liquid ejection device of the first embodiment. [Figure 7] FIG. 2 is a diagram showing a degassing configuration of a filling liquid circulation type of the liquid ejection device according to the first embodiment. [Figure 8] 5A to 5C are diagrams illustrating a method for cleaning the ejection ports of the liquid ejection device according to the first embodiment. [Figure 9] FIG. 10 is a diagram showing a degassing configuration of a liquid ejection device according to a second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0014] First Embodiment FIG. 1 is a diagram showing the configuration of an imprinting apparatus according to a first embodiment of the present invention. In this embodiment, an example of an apparatus will be described in which an ultraviolet-curable resin is used as the imprinting material and the ultraviolet-curable resin is cured by irradiating it with ultraviolet rays. However, the material of the imprinting material and the curing method are not limited to this. For example, a light irradiation device may be used to irradiate light with a wavelength other than ultraviolet light to cure a photocurable resin, or a thermosetting resin may be used to cure it with heat.

[0015] In Figure 1, the imprinting apparatus 100 is configured to include a liquid ejection system 101, a stage 6 supported by a base frame 5, a mold 1, a mold driving mechanism 2 held by a structure 3, and an ultraviolet irradiation device 7.

[0016] The liquid ejection system 101 has a liquid ejection device 10 and a pressure control unit 13, and the liquid ejection device 10 has a ejection unit 11 that ejects the imprint material and a storage unit 12 that stores the imprint material.

[0017] As shown in FIG. 1(b), a substrate 4 is placed on a stage 6, and an imprint material 8 is discharged onto the substrate 4 from a discharge unit 11. As shown in FIG. 1(c), a mold 1 having a fine uneven pattern or the like is brought into contact with the imprint material 8 discharged onto the substrate 4, and the imprint material 8 is filled so as to fill the unevenness of the mold 1. In this state, ultraviolet light 9 is irradiated onto the imprint material 8 from an ultraviolet irradiation device 7, and the imprint material 8 is hardened. When the mold 1 is moved upward (released), the imprint material 8 is in a molded state with the pattern of the mold 1 transferred thereto. In this way, a pattern is formed in the imprint material 8.

[0018] The liquid ejection device 10 is detachable, and when the imprint material 8 inside is completely consumed, the liquid ejection device 10 can be replaced with a new one, allowing the imprint device 100 to be used immediately.

[0019] The stage 6 is movable on the base frame 5 while holding the substrate 4. A mold driving mechanism 2 that drives the mold 1 up and down is held by the structure 3, and can bring the mold 1 into contact with the imprint material 8 dispensed onto the substrate 4.

[0020] An ultraviolet irradiation device 7 is disposed above the mold 1, and irradiates the imprint material 8 with ultraviolet rays 9 through the mold 1. The ultraviolet rays 9 may be emitted from a light source such as a halogen lamp that emits i-rays or g-rays. The ultraviolet irradiation device 7 may also have a function of focusing and shaping the light emitted by the light source.

[0021] Next, the imprint operation using the imprint apparatus 100 will be described in detail.

[0022] First, the substrate 4 is mounted on the stage 6. The substrate 4 is moved by the stage 6 to a position below the discharge unit 11 of the liquid discharge device 10. Then, the imprint material 8 is discharged onto the substrate 4 from the discharge unit 11 while the stage 6 is being moved.

[0023] Next, the stage 6 moves the portion of the substrate 4 onto which the imprint material 8 has been dispensed to below the mold 1. Furthermore, the mold 1 is lowered by the mold driving mechanism 2, so that the mold 1 and the substrate 4 are in close proximity to each other. In this state, the mold is observed using an alignment scope or the like. The alignment mark on the field 1 and the alignment mark on the substrate 4 are aligned, and the relative positions of the two are adjusted.

[0024] After adjusting the relative position, the mold 1 is further lowered toward the substrate 4 by the mold driving mechanism 2, and the mold 1 is brought into contact with the imprint material 8. This state is maintained, and the imprint material 8 is filled into the uneven portions of the mold 1. Thereafter, ultraviolet light 9 is irradiated from the ultraviolet irradiation device 7, and the ultraviolet light 9 that has passed through the mold 1 is irradiated onto the imprint material 8. As a result, a photo-curing reaction occurs in the imprint material 8, and the imprint material 8 hardens.

[0025] Finally, the mold 1 is raised by the mold driving mechanism 2 and peeled off from the hardened imprint material 8 .

[0026] Through the above steps, it is possible to form a patterned imprint material 8 on the substrate 4. An imprint device used in semiconductor manufacturing may form a pattern in the entire area on the substrate 4, in which case a series of imprint operations is repeated while changing the area on the substrate 4.

[0027] Next, a description will be given of the liquid ejection device 10. FIG.

[0028] The liquid ejection device 10 is mainly composed of an ejection section 11 and a storage member 12. A separation membrane (partition) 14 is provided inside the storage member 12 to separate the imprint material 8 from a filling liquid 17 (described later) inside the storage member 12. Of the spaces formed by the separation membrane 14, an imprint material storage section 15, which is the space on the side communicating with the ejection section 11, is filled with the imprint material 8.

[0029] An enlarged view of the discharge unit 11 is shown in Fig. 3. The discharge unit 11 has an energy generating element (discharge element) 29 that generates energy for discharging the imprint material 8. The discharge unit 11 also has a discharge port 32 for discharging the imprint material, and a pressure chamber 34. An example of the energy generating element 29 is a piezoelectric element.

[0030] The energy generating element 29 is controlled by a controller to generate a pressure fluctuation in the pressure chamber 34 , whereby the imprint material in the pressure chamber 34 is discharged from the discharge port 32 onto the substrate 4 .

[0031] One type of ejection defect that can occur when using such an ejection unit 11 is non-ejection. One cause of non-ejection is the inclusion of air bubbles in the pressure chamber 34. When air bubbles are in the liquid in the pressure chamber 34, the air bubbles function as an air damper, attenuating the pressure fluctuations in the pressure chamber 34 generated by the energy generating element 29, preventing the liquid from being ejected from the ejection port 32 and resulting in non-ejection. Air bubbles are generated when gas dissolved in the liquid in the pressure chamber 34 turns into bubbles due to pressure fluctuations in the liquid ejection device 10, etc. Furthermore, the meniscus vibrates significantly when the imprint material 8 is ejected, which can sometimes entrain air bubbles.

[0032] Returning to the explanation of Figure 2, the storage member 12 is composed of an imprinting material storage section 15 in which the imprinting material 8 is stored, and an adjacent filling liquid storage section 16 in which a filling liquid 17 is stored. The filling liquid storage section 16 is located in a space on the opposite side of the imprinting material storage section 15 across the separation membrane 14, and is a space that does not communicate with the discharge section 11.

[0033] The filling liquid storage section 16 is filled with filling liquid 17 and is in communication with the pressure control section 13 via a filling liquid flow path 18. When attaching or detaching the liquid ejection device 10, it can be connected or disconnected using a joint 30. The pressure control section 13 is composed of a filling liquid tank, piping, a pressure sensor, a pump, a valve, etc. The pressure sensor, pump, and valve control the pressure of the filling liquid 17 in the filling liquid storage section 16. By controlling the pressure of the filling liquid 17 with the pressure control section 13, it is possible to control the pressure of the imprinting material 8 in the imprinting material storage section 15 via the separation membrane 14. This stabilizes the shape of the gas-liquid interface (meniscus) in the ejection section 11, allowing for ejection of the imprinting material with good reproducibility.

[0034] When the imprint material 8 is repeatedly discharged from the discharge unit 11, the imprint material 8 inside the imprint material storage unit 15 is consumed and reduced, deforming the separation membrane 14. As the separation membrane 14 deforms, the pressure control unit 13 replenishes the filling liquid storage unit 16 with filling liquid 17 from the filling liquid tank through the filling liquid flow path 18.

[0035] In the field of inkjet recording devices, efforts have been made to maintain a certain range of negative pressure inside the discharge member in order to stabilize the meniscus shape at the discharge port of the discharge member. For example, a method is known in which a porous body is formed inside the storage section to hold the liquid and negative pressure is created by utilizing the capillary force inside the porous body. Other methods include creating negative pressure inside the storage section by combining a mechanical element such as a spring with a balloon-shaped membrane, and controlling negative pressure using a control valve and air pressure. In this embodiment, the negative pressure in the imprint material storage section 15 may also be controlled by these methods.

[0036] In this embodiment, the filling liquid is degassed or a degassed filling liquid is used, so that dissolved gas in the imprint material 8 is degassed through the separation film 14.

[0037] The liquid ejection device 10 of this embodiment will be further described with reference to Figure 4. The interior of the storage member 12 of the liquid ejection device 10 is separated into an imprint material storage section 15 and a filling liquid storage section 16 by a separation membrane 14. The imprint material storage section 15 stores an imprint material 8, and the filling liquid storage section 16 stores a filling liquid 17.

[0038] An opening 19 is formed in the filling liquid storage section 16, and a pipe 54 is connected to the opening 19. A joint 52 is disposed in the pipe 54, and a gas-permeable membrane 20 is provided inside the pipe 54.

[0039] These are the components included in the liquid ejection device 10. After installing the liquid ejection device 10 in the imprinting apparatus 100, an exhaust duct 53 from the pressure reducing mechanism is connected to a joint 52 to reduce the pressure inside the piping 54 to approximately -90 kPa. The gas-permeable membrane 20 allows only gas to pass through, not liquid. The separation membrane 14 is also made of a gas-permeable material, and allows only gas in the liquid to pass through, while blocking the imprinting material 8 and filling liquid 17. When the pressure inside the piping 54 is reduced, the gas dissolved in the filling liquid 17 is discharged through the gas-permeable membrane 20. At the same time, the gas dissolved in the imprinting material 8 is discharged into the filling liquid 17 through the gas-permeable separation membrane 14, thereby reducing the concentration of the gas dissolved in the imprinting material 8.

[0040] A valve 51 is installed in the pipe 54, and by closing the valve 51, the reduced pressure state inside the pipe 54 can be maintained. Materials for the separation membrane 14 and the gas-permeable membrane 20 include perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), polymethylpentene (PMP), and silicone. However, the material is not limited to these, and any material that is highly resistant to the imprint material and filling liquid and has high gas permeability can be used.

[0041] As already explained, in conjunction with the degassing of the filling liquid storage section 16, the dissolved gas in the imprinting material 8 moves through the separation membrane 14 toward the filling liquid 17, reducing the concentration of the dissolved gas in the imprinting material 8. By degassing the filling liquid 17 to be supplied, the imprinting material 8 can be degassed. Therefore, there is no need to mount a degassing device on the liquid ejection device 10, and the liquid ejection device 10 can be prevented from becoming larger when degassing.

[0042] Here, let us consider the case of a cartridge-type liquid ejection device in which the entire liquid ejection device is replaced when the imprint material 8 in the tank of the liquid ejection device 10 is consumed.

[0043] In the degassing method described in Patent Document 1, the piping that makes up the degassing system must be reconnected every time the cartridge is replaced. Reconnecting the piping can cause friction between the joints and piping, generating particles that can contaminate the liquid and potentially damage the imprint mask. In this embodiment, the piping used for degassing is connected to the filling liquid storage unit 16. Therefore, when reconnecting the piping, impurities in the piping and exhaust duct may enter the filling liquid storage unit 16, but they can be prevented from being mixed into the imprint material 8, which is the discharge liquid.

[0044] The method of degassing the filler liquid 17 is not limited to the above, and any method may be used as long as the filler liquid 17 can be degassed while maintaining a pressure that can control the meniscus at the discharge port. For example, as shown in Figure 5, without providing opening 19, at least a part of filler liquid flow path 18 that supplies filler liquid 17 to filler liquid storage section 16 may be made of a gas-permeable membrane (permeation section), the outside of which may be covered with cover 55, and exhaust duct 53 may be connected to cover 55.

[0045] In the configuration of Figure 5, by reducing the pressure inside the cover 55, it is possible to remove dissolved gas from the filling liquid 17 in the filling liquid flow path 18 through the gas-permeable membrane. As in Figure 4, it is possible to reduce the concentration of dissolved gas in the imprinting material 8 in conjunction with this. The pressure inside the filling liquid flow path 18 and the filling liquid storage section 16 is controlled by the pressure control section 13, so it is possible to maintain the meniscus at the discharge port.

[0046] Furthermore, in the configuration of Fig. 5, the contact area between the gas-permeable membrane that releases dissolved gas and the filling liquid can be increased, and therefore a greater degassing effect can be expected compared to the configuration of Fig. 4. To further enhance the degassing effect, not only filling liquid flow path 18 but also filling liquid flow path 18 and a filling liquid tank configured in pressure control unit 13 may be configured with a gas-permeable membrane, the periphery of which may be covered with cover 55, and the pressure inside cover 55 may be reduced, thereby increasing the surface area that can be degassed.

[0047] Furthermore, if it is difficult to maintain the meniscus at the discharge port when a lower pressure state is set to enhance the degassing capability, degassing may be performed at a timing other than when the imprint material 8 is being discharged. The timing of degassing may be when the substrate 4 is replaced or when a lot is replaced. Degassing may also be performed when a discharge abnormality occurs and is detected. Degassing may also be performed when the imprint apparatus 100 is not operating. A timer function may also be provided in the imprint apparatus 100 or the liquid discharge apparatus 10, and degassing may be performed after a certain period of time has elapsed. Degassing may also be performed in response to a programmed command from the imprint apparatus 100 or the liquid discharge apparatus 10.

[0048] As described above, by separating the imprint material storage section 15 and the filling liquid storage section 16 with the separation membrane 14, which is a gas-permeable membrane, and degassing the filling liquid 17, it is possible to prevent the liquid ejection device 10 from becoming large, while reducing ejection defects caused by air bubbles getting into the imprint material 8. Furthermore, it is possible to prevent foreign matter from getting into the imprint material 8.

[0049] In this embodiment, the separation membrane 14 is disposed in a vertical direction relative to the liquid discharger 10, but as shown in Fig. 6, it may be disposed in a horizontal direction so that the generated bubbles rise toward the separation membrane 14. This can improve the degassing efficiency.

[0050] 7, a supply pipe and a recovery pipe may be provided between the filling liquid storage section 16 and the pressure control section 13 to form a filling liquid flow path 18. In addition, a pipe made of a gas-permeable material may be provided on the supply pipe side, so that the filling liquid 17 can be degassed while being circulated.

[0051] As the liquid ejection device 10 continues to be used, foreign matter such as residue of the imprint material, which is the ejection member, adheres to the ejection surface, causing a decline in ejection performance. Furthermore, foreign matter may become mixed into the imprint material 8, be ejected together with the imprint material 8, and cause damage to the imprint mask. Therefore, the device must be cleaned periodically.

[0052] In such cases, as shown in Figure 8, one method is to place a dish 40 under the ejection surface so that the ejection surface is immersed in imprint material 8, and drive the energy generating elements 29 while the dish is immersed in imprint material 8, thereby cleaning the ejection surface and nozzles. In such cases, with conventional devices, the dissolved gas in the imprint material 8 can inhibit cleaning, making it impossible to perform sufficient cleaning. Even in such cases, by degassing the dissolved gas in the imprint material 8 with a configuration such as this embodiment shown in Figure 8, it is possible to improve the cleaning effect and shorten the cleaning time.

[0053] In this embodiment, the separation membrane 14 is composed of one degassing film, but the present invention can also be applied to a configuration in which two degassing films are used to minimize contamination of the imprint material by the filling liquid when the film is damaged and to detect damage. Even in a configuration in which the atmosphere in the space between the two films is evacuated and vacuum suction is used to detect liquid leakage, the two films are closely overlapped and allow only gas to pass through, making it possible to degas the dissolved gas in the imprint material.

[0054] <Second embodiment> Next, a second embodiment that further enhances the degassing effect will be described with reference to Fig. 9. Fig. 9 shows a configuration in which a heating device 21 is added to the liquid ejection device 10 of the first embodiment.

[0055] Generally, the solubility of gas in a liquid decreases as the liquid temperature increases, so when the liquid temperature of the imprint material 8 is high, the dissolved gas generates bubbles. By maintaining the liquid temperature of the imprint material 8 high using the heating device 21, the gas dissolved in the imprint material 8 is more likely to be released into the filling liquid storage section 16 through the separation membrane 14. Furthermore, it is possible to suppress the dissolution of additional gas into the imprint material 8.

[0056] 9, the imprint material storage section 15 is configured to be heated by a heating device 21 to raise the liquid temperature, but it is also possible to heat the parts that store the filling liquid, such as the filling liquid storage section 16, the filling liquid flow path 18, and the pressure control section 13. In either case, it is preferable that the heating device 21 is configured so as not to come into direct contact with the imprint material 8 and the filling liquid 17, so as to prevent contamination from the heating device 21.

[0057] In the second embodiment, the temperature of the filling liquid 17 also rises and the solubility of gas decreases, so it is desirable to use it in combination with degassing the filling liquid 17 using an exhaust duct, as in the first embodiment, rather than using only a heating device.

[0058] From the viewpoint of degassing effect, it is preferable to maintain a temperature at least 5°C higher than the normal temperature, but since the imprint material 8 may undergo a polymerization reaction due to heat, it is desirable to raise the temperature within a range that does not cause a reaction depending on the material being used.

[0059] Furthermore, if the liquid temperature of the imprint material 8 is high, changes in the physical properties may occur, which may affect the discharge accuracy. It is desirable to configure the program so that the correlation between temperature and discharge accuracy is confirmed in advance, the liquid temperature of the imprint material 8 is monitored, and the discharge parameters can be corrected according to the liquid temperature.

[0060] As described above, by providing the heating device 21 in the liquid ejection device 10, the liquid temperature of the imprint material 8 can be kept high, the concentration of gas that can be dissolved in the liquid can be reduced, and the degassing effect can be further improved.

[0061] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0062] 1: mold, 8: imprint material, 10: liquid discharge device, 11: discharge section, 14: separation membrane, 15: imprint material storage section, 16: filling liquid storage section, 17: filling liquid, 18: filling liquid flow path, 19: opening, 20: gas-permeable membrane, 100: imprint device, 101: liquid discharge system

Claims

1. a first container that contains a first liquid; an ejection element for ejecting the first liquid contained in the first container; a second storage section adjacent to the first storage section and containing a second liquid for controlling the pressure of the first liquid contained in the first storage section; a partition wall made of a gas-permeable material that separates the first storage section and the second storage section; a degassing means for degassing the second liquid contained in the second container; Equipped with the degassing means has a decompression mechanism connected to the second storage section via a gas-permeable membrane and configured to decompress the interior of the second storage section, A liquid ejection device further comprising a flow path for supplying the second liquid to the second storage portion, wherein a transparent portion made of a gas-permeable material is formed in at least a portion of the flow path, and wherein the pressure reduction mechanism comprises a cover for covering the transparent portion, and by reducing the pressure inside the cover, the gas in the second liquid is degassed through the transparent portion.

2. 2. The liquid ejection apparatus according to claim 1, wherein the degassing means has a valve for maintaining the second liquid in a reduced pressure state.

3. 3. The liquid ejection device according to claim 1, wherein the partition walls are arranged to extend in a vertical direction.

4. 3. The liquid ejection device according to claim 1, wherein the partition walls are arranged to extend in a horizontal direction.

5. 5. The liquid ejection device according to claim 1, wherein the partition wall is made up of two gas-permeable films, and the space between the two gas-permeable films is evacuated to a vacuum.

6. 2. The liquid ejection device according to claim 1, further comprising a heating device disposed in at least one of the first storage section, the second storage section, and the flow path.

7. 7. The liquid ejection device according to claim 1, further comprising a pressure control unit connected to the flow path and controlling the pressure inside the second container.

8. 8. The liquid ejection device according to claim 7, wherein the flow path constitutes a circulation flow path for circulating the second liquid between the second container and the pressure control means.

9. 9. The liquid ejection apparatus according to claim 1, wherein the first liquid is an imprint material.

10. The liquid ejection device according to any one of claims 1 to 9; a molding means for pressing a mold having a pattern onto the imprint material applied onto the substrate by the liquid discharge device to form the imprint material, hardening the imprint material, and then releasing the mold; An imprint apparatus comprising:

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