Transmission path, processing device, and quantum computer

Abstract

To provide a transmission line, a processing device, and a quantum computer capable of improving characteristics.SOLUTION: According to one embodiment, a transmission line includes first and second structures and a first intermediate conductive layer. The first structure includes a first conductive layer, a first opposing conductive layer, and a first conductive line. The first conductive line is provided between the first conductive layer and the first opposing conductive layer. The first conductive line extends along a first direction. The first direction crosses a second direction from the first conductive layer to the first opposing conductive layer. The second structure includes a second conductive layer, a second opposing conductive layer, and a second conductive line. The first opposing conductive layer is disposed between the first conductive layer and the second opposing conductive layer. The second conductive layer is disposed between the first opposing conductive layer and the second opposing conductive layer. The second conductive line is provided between the second conductive layer and the second opposing conductive layer. The second conductive line extends along the first direction. The first intermediate conductive layer is provided between the first opposing conductive layer and the second conductive layer. The first intermediate conductive layer includes first and second lines extending along the first direction.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD Embodiments of the present invention relate to a transmission line, a processing device, and a quantum computer. [Background technology]

[0002] For example, in processing devices such as quantum computers, multiple circuits are connected by transmission lines. For example, poor isolation between multiple wirings can degrade performance. Therefore, improving the characteristics of the transmission lines is desirable. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-144208 Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments of the present invention provide a transmission line, a processing device, and a quantum computer that can improve characteristics. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a transmission path includes a first structure, a second structure, and a first intermediate conductive layer. The first structure includes a first conductive layer, a first opposing conductive layer, and a first conductive line. The first conductive line is provided between the first conductive layer and the first opposing conductive layer. The first conductive line extends along a first direction. The first direction intersects with a second direction from the first conductive layer to the first opposing conductive layer. The second structure includes a second conductive layer, a second opposing conductive layer, and a second conductive line. The first opposing conductive layer is provided between the first conductive layer and the second opposing conductive layer. The second conductive layer is provided between the first opposing conductive layer and the second opposing conductive layer. The second conductive line is provided between the second conductive layer and the second opposing conductive layer. The second conductive line extends along the first direction. The first intermediate conductive layer is provided between the first opposing conductive layer and the second conductive layer. The first intermediate conductive layer includes a first line extending along the first direction and a second line extending along the first direction, and a third direction from the first line to the second line intersects with a plane including the first direction and the second direction. [Brief explanation of the drawings]

[0006] [Figure 1] 1(a) to 1(g) are schematic plan views illustrating the transmission line according to the first embodiment. [Figure 2] 2(a) to 2(c) are schematic cross-sectional views illustrating the transmission line according to the first embodiment. [Figure 3] 3(a) to 3(g) are schematic plan views illustrating the transmission line according to the first embodiment. [Figure 4] 4(a) to 4(c) are schematic cross-sectional views illustrating the transmission line according to the first embodiment. [Figure 5] 5(a) to 5(g) are schematic plan views illustrating the transmission line according to the first embodiment. [Figure 6] 6(a) to 6(c) are schematic cross-sectional views illustrating the transmission line according to the first embodiment. [Figure 7] FIG. 7 is a graph illustrating the characteristics of a transmission line. [Figure 8]FIG. 8 is a schematic plan view illustrating a part of the transmission line according to the first embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating a part of the transmission line according to the first embodiment. [Figure 10] FIG. 10 is a schematic cross-sectional view illustrating the transmission line according to the first embodiment. [Figure 11] FIG. 11 is a schematic view illustrating the processing apparatus according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) 1(a) to 1(g) are schematic plan views illustrating the transmission line according to the first embodiment. 2(a) to 2(c) are schematic cross-sectional views illustrating the transmission line according to the first embodiment. Fig. 2(a) is a cross-sectional view taken along line Y1-Y2 in Fig. 1(a) to Fig. 1(g), Fig. 2(b) is a cross-sectional view taken along line Y3-Y4 in Fig. 1(a) to Fig. 1(g), and Fig. 2(c) is a cross-sectional view taken along line Y5-Y6 in Fig. 1(a) to Fig. 1(g).

[0009] 2(a) and 2(b), the transmission line 110 according to the embodiment includes a first structure 11S, a second structure 12S, and a first intermediate conductive layer 31. The first structure 11S includes a first conductive layer 11, a first opposing conductive layer 11A, and a first conductive line 21. The second structure 12S includes a second conductive layer 12, a second opposing conductive layer 12A, and a second conductive line 22.

[0010] FIG. 1(a) illustrates the second opposing conductive layer 12A. FIG. 1(b) illustrates the second conductive line 22. FIG. 1(c) illustrates the second conductive layer 12. FIG. 1(d) illustrates the first intermediate conductive layer 31. FIG. 1(e) illustrates the first opposing conductive layer 11A. FIG. 1(f) illustrates the first conductive line 21. FIG. 1(g) illustrates the first conductive layer 11.

[0011] 2(a) to 2(c), the first conductive wire 21 is provided between the first conductive layer 11 and the first opposing conductive layer 11A. The first conductive wire 21 extends along the first direction D1.

[0012] The first direction D1 intersects with the second direction D2 from the first conductive layer 11 to the first opposing conductive layer 11A. The second direction D2 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

[0013] The first opposing conductive layer 11A is located between the first conductive layer 11 and the second opposing conductive layer 12A. The second conductive layer 12 is located between the first opposing conductive layer 11A and the second opposing conductive layer 12A.

[0014] The second conductive line 22 is provided between the second conductive layer 12 and the second opposing conductive layer 12A. The second conductive line 22 extends along the first direction D1.

[0015] The first intermediate conductive layer 31 is provided between the first opposing conductive layer 11A and the second conductive layer 12. The first intermediate conductive layer 31 includes a first line 31a extending along the first direction D1 and a second line 31b extending along the first direction D1. A third direction D3 extending from the first line 31a to the second line 31b intersects with a plane including the first direction D1 and the second direction D2. The third direction D3 may be, for example, the Y-axis direction.

[0016] The first conductive line 21 passes signals. The first conductive layer 11 and the first opposing conductive layer 11A may function, for example, as an electromagnetic shield. The second conductive line 22 passes signals. The second conductive layer 12 and the second opposing conductive layer 12A may function, for example, as an electromagnetic shield.

[0017] In the embodiment, the first structure 11S functions as one transmission line. The second structure 12S functions as another transmission line. Multiple transmission lines are stacked. In such a configuration, the multiple transmission lines affect each other. For example, coupling may occur.

[0018] In the embodiment, a first intermediate conductive layer 31 is provided between the first structure 11S and the second structure 12S. This effectively separates the first structure 11S from the second structure 12S. High isolation characteristics are obtained. According to the embodiment, a transmission line capable of improving characteristics can be provided.

[0019] In the embodiment, the first intermediate conductive layer 31 includes a first line 31a and a second line 31b extending along the first direction D1. As shown in Fig. 2(a) , the position of the first conductive line 21 in the third direction D3 is between the position of the first line 31a in the third direction D3 and the position of the second line 31b in the third direction D3. The position of the second conductive line 22 in the third direction D3 is between the position of the first line 31a in the third direction D3 and the position of the second line 31b in the third direction D3.

[0020] For example, the first conductive wire 21 and the second conductive wire 22, through which a signal propagates, are located between the first wire 31a and the second wire 31b in the third direction D3. As a result, the first wire 31a and the second wire 31b effectively suppress electromagnetic induction between the first conductive wire 21 and the second conductive wire 22. Examples of the characteristics of the transmission path will be described later.

[0021] As shown in FIG. 1(d), the first intermediate conductive layer 31 may further include a connection conductive layer 31c. The connection conductive layer 31c connects a portion of the first line 31a to a portion of the second line 31b. The connection conductive layer 31c electrically connects the first line 31a and the second line 31b to each other. For example, if the symmetry of the structure is uneven due to manufacturing variations, a potential difference occurs between the first line 31a and the second line 31b. The provision of the connection conductive layer 31c reduces the potential difference, suppressing unwanted radiation and achieving higher isolation characteristics.

[0022] A plurality of connection conductive layers 31c may be provided. The plurality of connection conductive layers 31c are arranged along the first direction D1. For example, the plurality of connection conductive layers 31c may be provided at a single pitch.

[0023] As shown in FIGS. 1(b) and 1(f), the pattern shape of the second conductive wires 22 may be the same as the pattern shape of the first conductive wires 21.

[0024] 1(a), 1(c), 1(e), and 1(g), the pattern shapes of the first opposing conductive layer 11A, the second conductive layer 12, and the second opposing conductive layer 12A may be substantially the same as the pattern shape of the first conductive layer 11. These conductive layers act as grounds for the signal lines. These conductive layers may also function as electromagnetic shields that suppress radiation of electromagnetic fields from the signal lines.

[0025] As shown in FIG. 1(g), the first conductive layer 11 may include a first portion 11a and a first opposing portion 11b. The direction from the first portion 11a to the first opposing portion 11b is along the first direction D1. The first portion 11a may be one end portion. The first opposing portion 11b may be another end portion. The first conductive layer 11 may further include a first intermediate portion 11c. The first intermediate portion 11c is located between the first portion 11a and the first opposing portion 11b. The first intermediate portion 11c extends along the first direction D1.

[0026] As shown in FIG. 1(g), the length w11c (width) of the first intermediate portion 11c along the third direction D3 is shorter than the length L11c of the first intermediate portion 11c along the first direction D1. This shape suppresses heat conduction between the first portion 11a and the first opposing portion 11b. For example, high thermal insulation can be achieved. For example, when the transmission line 110 is applied to a quantum computer or the like, the influence of heat is suppressed, making it easier to achieve high performance.

[0027] In the embodiment, the temperature of the first portion 11a may be different from the temperature of the first opposing portion 11b. Even in such a case, the high thermal insulation property makes it easy to maintain the temperature difference between these portions at a desired state.

[0028] As shown in FIG. 1(f), the length (width) of the first conductive wire 21 along the third direction D3 is defined as length w21. In this embodiment, the length w11c (width) of the first intermediate portion 11c is preferably equal to or greater than the length w21 (width) of the first conductive wire 21. This provides higher isolation characteristics. For example, the length w11c may be equal to or greater than one time and equal to or less than three times the length w21. If the length w11c is excessively long, for example, thermal conduction may increase.

[0029] As shown in FIGS. 2(a) to 2(c), the transmission path 110 may include an insulating member 10i. At least a portion of the insulating member 10i is provided at least in a first position, a second position, a third position, or a fourth position. The first position is between the first conductive layer 11 and the first conductive line 21. The second position is between the first conductive line 21 and the first opposing conductive layer 11A. The third position is between the second conductive layer 12 and the second conductive line 22. The fourth position is between the second conductive line 22 and the second opposing conductive layer 12A.

[0030] The insulating member 10i may be, for example, a substrate. For example, gaps may be provided between multiple portions of the insulating member 10i. This makes it easier to achieve higher thermal insulation. The insulating member 10i may include at least one of an inorganic material and an organic material. The insulating member 10i may include at least one selected from the group consisting of polyimide, liquid crystal polymer, glass cloth, fluororesin, and ceramic. Polyimide or liquid crystal polymer is used, for example, in flexible substrates. Ceramics include, for example, alumina. The insulating member 10i may include a substrate containing the above materials.

[0031] In embodiments, the conductive layers and conductive lines may include a metal, such as at least one selected from the group consisting of gold and copper, and may include at least one selected from the group consisting of aluminum, an aluminum-containing alloy, a niobium-containing alloy, a niobium-titanium-containing alloy, tantalum, and a tantalum-containing alloy.

[0032] In the embodiment, the first intermediate conductive layer 31 may be electrically connected to the first conductive layer 11, the first opposing conductive layer 11A, the second conductive layer 12, and the second opposing conductive layer 12A. The potentials of these conductive layers are fixed. The potentials of these conductive layers may be set to the ground potential. Since no potential difference occurs, unnecessary radiation is suppressed and high isolation characteristics are obtained.

[0033] 3(a) to 3(g) are schematic plan views illustrating the transmission line according to the first embodiment. 4(a) to 4(c) are schematic cross-sectional views illustrating the transmission line according to the first embodiment. Fig. 4(a) is a cross-sectional view taken along line Y1-Y2 in Fig. 3(a) to Fig. 3(g), Fig. 4(b) is a cross-sectional view taken along line Y3-Y4 in Fig. 3(a) to Fig. 3(g), and Fig. 4(c) is a cross-sectional view taken along line Y5-Y6 in Fig. 3(a) to Fig. 3(g).

[0034] 4(a) to 4(c), a transmission line 111 according to the embodiment includes a first connection member 41. The transmission line 111 may further include a second connection member 42. Except for this, the configuration of the transmission line 111 may be similar to the configuration of the transmission line 110.

[0035] The first connection member 41 extends along the second direction D2. The first connection member 41 electrically connects the first opposing conductive layer 11A and the second conductive layer 12 to each other. The second connection member 42 extends along the second direction D2. The second connection member 42 electrically connects the first opposing conductive layer 11A and the second conductive layer 12 to each other. The first connection member 41 and the second connection member 42 may be electrically connected to the first conductive layer 11 and the second opposing conductive layer 12A. The first connection member 41 and the second connection member 42 may be electrically connected to the first intermediate conductive layer 31. These connection members are, for example, via conductors. These connection members electrically connect the stacked conductive layers to each other. A potential difference is less likely to occur between these conductive layers.

[0036] The direction from the first connecting members 41 to the second connecting members 42 is along, for example, the third direction D3. A plurality of first connecting members 41 and a plurality of second connecting members 42 may be provided. The direction from one of the plurality of first connecting members 41 to another of the plurality of first connecting members 41 is along the first direction D1. The direction from one of the plurality of second connecting members 42 to another of the plurality of second connecting members 42 is along the first direction D1.

[0037] 5(a) to 5(g) are schematic plan views illustrating the transmission line according to the first embodiment. 6(a) to 6(c) are schematic cross-sectional views illustrating the transmission line according to the first embodiment. Fig. 6(a) is a cross-sectional view taken along line Y1-Y2 in Fig. 5(a) to Fig. 5(g), Fig. 6(b) is a cross-sectional view taken along line Y3-Y4 in Fig. 5(a) to Fig. 5(g), and Fig. 6(c) is a cross-sectional view taken along line Y5-Y6 in Fig. 5(a) to Fig. 5(g).

[0038] 5(g), in the transmission line 112 according to the embodiment, the first conductive layer 11 includes a plurality of portions with different widths. Except for this, the configuration of the transmission line 112 may be the same as the configuration of the transmission line 111.

[0039] The first conductive layer 11 includes a plurality of first partial regions 11p and a plurality of first other partial regions 11q. One of the plurality of first partial regions 11p is located between one of the plurality of first other partial regions 11q and another of the plurality of first other partial regions 11q in the first direction D1. One of the plurality of first other partial regions 11q is located between one of the plurality of first partial regions 11p and another of the plurality of first partial regions 11p in the first direction D1. The length of one of the plurality of first partial regions 11p in the third direction D3 is defined as a first partial region length w11p. The length of one of the plurality of first other partial regions 11q in the third direction D3 is defined as a first other partial region length w11q. The first partial region length w11p is longer than the first other partial region length w11q.

[0040] The length (width) of the first conductive wire 21 along the third direction D3 is defined as length w21. In this embodiment, the first other portion region length w11q is preferably equal to or greater than the length w21 of the first conductive wire 21. This provides higher isolation characteristics. For example, the first other portion region length w11q may be equal to or greater than one time and equal to or less than three times the length w21. If the first other portion region length w11q is excessively long, for example, thermal conduction may increase.

[0041] For example, one of the plurality of wide first partial regions 11p is provided between the plurality of narrow first other partial regions 11q. In the plurality of wide first partial regions 11p, the first conductive layer 11 may be electrically connected to the other conductive layers.

[0042] As shown in Figures 5(a), 5(c), and 5(e), the pattern shapes of the second opposing conductive layer 12A, the second conductive layer 12, and the first opposing conductive layer 11A may be substantially the same as the pattern shape of the first conductive layer 11.

[0043] For example, as shown in FIG. 5(c), the second conductive layer 12 includes a plurality of second partial regions 12p and a plurality of second other partial regions 12q. One of the plurality of second partial regions 12p is located between one of the plurality of second other partial regions 12q and another of the plurality of second other partial regions 12q in the first direction D1. One of the plurality of second other partial regions 12q is located between one of the plurality of second partial regions 12p and another of the plurality of second partial regions 12p in the first direction D1. The length of one of the plurality of second partial regions 12p in the third direction D3 is defined as a second partial region length w12p. The length of one of the plurality of second other partial regions 12q in the third direction D3 is defined as a second other partial region length w12q. The second partial region length w12p is longer than the second other partial region length w12. The second other partial region length w12p may be substantially the same as the first other partial region length w11p, for example, the second other partial region length w12p may be 0.8 to 1.2 times the first other partial region length w11p.

[0044] 5(e), for example, the first opposing conductive layer 11A includes a plurality of first opposing partial regions 11pA and a plurality of first opposing other partial regions 11qA, wherein the length in the third direction D3 of one of the plurality of first opposing partial regions 11pA is longer than the length in the third direction D3 of one of the plurality of first opposing other partial regions 11qA.

[0045] 5(a), for example, the second opposing conductive layer 12A includes a plurality of second opposing partial regions 12pA and a plurality of second opposing other partial regions 12qA, wherein the length in the third direction D3 of one of the plurality of second opposing partial regions 12pA is longer than the length in the third direction D3 of one of the plurality of second opposing other partial regions 12qA.

[0046] In the wider portion, these conductive layers may be electrically connected to each other. For example, a first connection member 41 and a second connection member 42 are provided. These connection members extend along the second direction D2.

[0047] The first connection member 41 and the second connection member 42 are electrically connected to one of the plurality of first partial regions 11p and one of the plurality of second partial regions 12p. The first connection member 41 and the second connection member 42 are electrically connected to one of the plurality of first opposing partial regions 11pA and one of the plurality of second opposing partial regions 12pA.

[0048] As shown in FIG. 6(c), at least a portion of the first intermediate conductive layer 31 is electrically connected to the first connection member 41 and the second connection member .

[0049] 5(d), the first intermediate conductive layer 31 includes a plurality of connection conductive layers 31c. The plurality of connection conductive layers 31c are electrically connected to the first connection member 41 and the second connection member 42. The plurality of connection conductive layers 31c connect a portion of the first line 31a and a portion of the second line 31b.

[0050] One of the plurality of connection conductive layers 31c and another of the plurality of connection conductive layers 31c are electrically connected to the first connection member 41 (and the second connection member 42). The pitch between one of the plurality of connection conductive layers 31c and another of the plurality of connection conductive layers 31c may be substantially half the wavelength of interest. This improves isolation characteristics near the wavelength of interest. Signals can be transmitted and received with higher efficiency.

[0051] For example, the distance in the first direction D1 between the center position in the first direction D1 of one of the multiple connection conductive layers 31c and the center position in the first direction D1 of another of the multiple connection conductive layers 31c is defined as distance L31c (see FIG. 5(d)). The distance L31c is preferably 0.8 to 1.2 times half the wavelength of the signal passing through the first conductive line 21. This improves isolation characteristics near the target wavelength. Signals can be transmitted and received more efficiently.

[0052] 5(d), at least a portion of the first intermediate conductive layer 31 may be provided between the first connection member 41 and the second connection member 42. For example, the first connection member 41 and the second connection member 42 are electrically connected to the first opposing conductive layer 11A and the second opposing conductive layer 12. The first connection member 41 and the second connection member 42 are further electrically connected to the first conductive layer 11A and the second opposing conductive layer 12A.

[0053] In the embodiment, the first conductive wire 21 and the second conductive wire 22 are located between the first connecting member 41 and the second connecting member.

[0054] 5(g), the first conductive layer 11 includes a first portion 11a and a first opposing portion 11b. The direction from the first portion 11a to the first opposing portion 11b is along the first direction D1. The multiple first partial regions 11p and the multiple first other partial regions 11q are located between the first portion 11a and the first opposing portion 11b. The length w11a of the first portion 11a along the third direction D3 is longer than the first other partial region length w11q.

[0055] 5(g), for example, a plurality of wide first partial regions 11p may be arranged periodically in the first direction D1 in the first conductive layer 11. The pitch p11 of the plurality of first partial regions 11p in the first direction D1 is preferably equal to or less than ¼ of the wavelength of a signal passing through the first conductive line 21. This provides a high shielding effect.

[0056] FIG. 7 is a graph illustrating the characteristics of a transmission line. The horizontal axis of Figure 7 represents frequency f1. The vertical axis represents attenuation P1. Attenuation P1 corresponds to the amount by which a signal propagating through one of the multiple signal lines propagates to another of the multiple signal lines. Attenuation P1 represents the amount of isolation between the two lines. For example, when attenuation P1 is -30 dB, 1 / 1000 of the signal from one of the multiple signal lines propagates to the other of the multiple signal lines. If the level of attenuation P1 is high, the signal from the other of the multiple signal lines becomes noise for one of the multiple signal lines. If the level of attenuation P1 is high, the signal-to-noise ratio deteriorates, and the signal characteristics deteriorate. Figure 7 shows the characteristics of the above-mentioned transmission line 112 and the characteristics of a reference transmission line 119. The reference transmission line 119 does not have a first intermediate conductive layer 31.

[0057] 7, transmission line 112 achieves a large attenuation P1 over a wide band compared to the reference example. Transmission line 112 can improve isolation characteristics by 15 dB or more with respect to transmission line 119. For example, it can significantly reduce the influence of electromagnetic waves leaking from a transmission line (e.g., first conductive line 21) on other transmission lines (e.g., second conductive line 22).

[0058] FIG. 8 is a schematic plan view illustrating a part of the transmission line according to the first embodiment. Fig. 8 illustrates an example of the pattern of the first intermediate conductive layer 31. As shown in Fig. 8, in the transmission line 113 according to the embodiment, the first line 31a contacts the first connecting member 41. The second line 31b contacts the second connecting member 42. The remaining configuration of the transmission line 113 may be the same as the configuration of the various transmission lines described above.

[0059] In this example, the length of at least one of the plurality of connecting conductive layers 31c along the third direction D3 is substantially the same as the distance between the first line 31a and the second line 31b. The length of another of the plurality of connecting conductive layers 31c along the third direction D3 is longer than the distance between the first line 31a and the second line 31b. High isolation characteristics are also obtained in the transmission line 113.

[0060] In the embodiment, the pattern shape of the first intermediate conductive layer 31 is preferably symmetrical with respect to the first direction D1.

[0061] FIG. 9 is a schematic plan view illustrating a part of the transmission line according to the first embodiment. 9 illustrates an example of a pattern of the first intermediate conductive layer 31. As shown in FIG. 9, a plurality of first intermediate conductive layers 31 are provided in the transmission line 114 according to the embodiment. The plurality of first intermediate conductive layers 31 are arranged along the first direction D1. The remaining configuration of the transmission line 113 may be the same as the configuration of the various transmission lines described above. High isolation characteristics can also be obtained in the transmission line 114.

[0062] In the transmission path 114, one of the multiple first intermediate conductive layers 31 is annular. The distance along the first direction D1 between one of the multiple first intermediate conductive layers 31 and another of the multiple first intermediate conductive layers 31 is preferably equal to or less than ¼ of the wavelength of the signal passing through the first conductive lines 21. For example, the length along the first direction D1 of one of the multiple first intermediate conductive layers 31 (e.g., one of the multiple first lines 31a) is preferably equal to or less than ½ of the wavelength of the signal passing through the first conductive lines 21.

[0063] FIG. 10 is a schematic cross-sectional view illustrating the transmission line according to the first embodiment. 10, the transmission line 115 according to the embodiment includes a third structure 13S, a fourth structure 14S, and a second intermediate conductive layer 32. The remaining configuration of the transmission line 115 may be the same as the configuration of the various transmission lines described above.

[0064] A third structure 13S is provided between the second structure 12S and the fourth structure 14S. A second intermediate conductive layer 32 is provided between the third structure 13S and the fourth structure 14S. For example, the configuration of the third structure 13S may be the same as the configuration of the first structure 11S. For example, the configuration of the fourth structure 14S may be the same as the configuration of the second structure 12S. For example, the configuration of the second intermediate conductive layer 32 may be the same as the configuration of the first intermediate conductive layer 31. The second intermediate conductive layer 32 includes, for example, a third line 32c and a fourth line 32d. The third line 32c and the fourth line 32d extend along the first direction D1. High isolation characteristics are also obtained in the transmission line 115.

[0065] In this example, the first structure 11S includes a plurality of first conductive layers 11, a plurality of first opposing conductive layers 11A, a plurality of second conductive layers 12, a plurality of second opposing conductive layers 12A, a plurality of first conductive wires 21, a plurality of second conductive wires 22, and a plurality of first intermediate conductive layers 31.

[0066] The direction from one of the plurality of first conductive layers 11 to another of the plurality of first conductive layers 11 is along the third direction D3. The direction from one of the plurality of first opposing conductive layers 11A to another of the plurality of first opposing conductive layers 11A is along the third direction D3. The direction from one of the plurality of second conductive layers 12 to another of the plurality of second opposing conductive layers 12 is along the third direction D3. The direction from one of the plurality of second opposing conductive layers 12A to another of the plurality of second opposing conductive layers 12A is along the third direction D3. The direction from one of the plurality of first conductive wires 21 to another of the plurality of first conductive wires 21 is along the third direction D3. The direction from one of the plurality of second conductive wires 22 to another of the plurality of second conductive wires 22 is along the third direction D3. The direction from one of the plurality of first intermediate conductive layers 31 to another of the plurality of first intermediate conductive layers 31 is along the third direction D3.

[0067] In this example, the transmission line 115 includes an interlayer structure 18S. The interlayer structure 18S is provided between the second structure 12S and the third structure 13S. The interlayer structure 18S includes an interlayer conductive layer 38. The interlayer conductive layer 38 includes a first interlayer line 38a extending along the first direction D1 and a second interlayer line 38b extending along the first direction D1. Higher isolation characteristics are obtained. In this example, a plurality of first interlayer lines 38a and a plurality of second interlayer lines 38b are provided. The position of the first conductive line 21 in the third direction D3 is between the position of one of the plurality of first interlayer lines 38a in the third direction D3 and the position of one of the plurality of second interlayer lines 38b in the third direction D3.

[0068] The number of the plurality of conductive layers may be any number. The number of the plurality of conductive lines may be any number.

[0069] (Second embodiment) FIG. 11 is a schematic view illustrating the processing apparatus according to the second embodiment. 11, a processing device 210 according to the embodiment includes a transmission line according to the first embodiment (in this example, the transmission line 110), a first signal processing circuit 51, and a second signal processing circuit 52. For example, one end of the first conductive line 21 can be coupled to the first signal processing circuit 51. For example, the other end of the first conductive line 21 can be coupled to the second signal processing circuit 52. The signal processing circuits included in the processing device 210 can be coupled with low loss. The coupling between the conductive line and the signal processing circuit may include a connection.

[0070] The first temperature of the first signal processing circuit 51 is different from the second temperature of the second signal processing circuit 52. Due to the high thermal insulation of the transmission line 110, the temperatures of these signal processing circuits can be easily maintained at the desired state.

[0071] For example, the processing device 210 may be at least a part of a quantum computer. In the processing device 210, for example, efficient cooling is possible even when wiring for controlling a large number of quantum bits is provided. For example, a quantum computer capable of multi-bit operation compared to conventional systems can be provided. According to the embodiment, a processing device (e.g., a quantum computer) capable of improved characteristics can be provided.

[0072] In this example, the processing device 210 may include a cooling device 55. The second signal processing circuit 52 is provided in the cooling device 55. The first signal processing circuit 51 may be provided in the cooling device 55. For example, the cooling device 55 includes a cooling unit 56. The second signal processing circuit 52 is provided in the cooling unit 56. The first signal processing circuit 51 is provided outside the cooling unit 56. Due to the operation of the cooling unit 56, the second temperature of the second signal processing circuit 52 becomes lower than the first temperature of the first signal processing circuit 51.

[0073] In this example, the second signal processing circuit 52 includes a signal separator 52b, a processor 52a, and a signal multiplexer 52c. For example, the first signal processing circuit 51 and the signal separator 52b may be coupled by a first conductive line 21. The first signal processing circuit 51 and the signal multiplexer 52c may be coupled by a second conductive line 22.

[0074] In this example, a third signal processing circuit 53 and a fourth signal processing circuit 54 are further provided. For example, the third signal processing circuit 53 includes a signal multiplexing unit 53c. For example, the fourth signal processing circuit 54 includes a signal separating unit 54b. The third signal processing circuit 53 can be coupled to the first signal processing circuit 51. The fourth signal processing circuit 54 can be coupled to the first signal processing circuit 51.

[0075] The embodiment may include the following configurations (e.g., technical solutions). (Configuration 1) a first conductive layer; a first opposing conductive layer; a first conductive line provided between the first conductive layer and the first opposing conductive layer, the first conductive line extending along a first direction, the first direction intersecting a second direction from the first conductive layer to the first opposing conductive layer; a first structure including: A second structure, the second structure comprising: a second conductive layer; a second opposing conductive layer, the first opposing conductive layer being between the first conductive layer and the second opposing conductive layer, and the second conductive layer being between the first opposing conductive layer and the second opposing conductive layer; a second conductive line provided between the second conductive layer and the second opposing conductive layer, the second conductive line extending along the first direction; the second structure comprising: a first intermediate conductive layer provided between the first opposing conductive layer and the second conductive layer, the first intermediate conductive layer including a first line extending along the first direction and a second line extending along the first direction, and a third direction from the first line to the second line intersecting a plane including the first direction and the second direction; A transmission path equipped with:

[0076] (Configuration 2) a position of the first conductive line in the third direction is between a position of the first line in the third direction and a position of the second line in the third direction, The transmission line described in configuration 1, wherein the position of the second conductive line in the third direction is between the position of the first line in the third direction and the position of the second line in the third direction.

[0077] (Configuration 3) a first connecting member extending along the second direction; 3. The transmission line according to claim 2, wherein the first connection member electrically connects the first opposing conductive layer and the second conductive layer to each other.

[0078] (Configuration 4) further comprising a second connecting member extending along the second direction; the second connection member electrically connects the first opposing conductive layer and the second conductive layer to each other; 4. The transmission line of claim 3, wherein at least a portion of the first intermediate conductive layer is between the first connection member and the second connection member.

[0079] (Configuration 5) 5. The transmission line according to configuration 4, wherein the first connecting member and the second connecting member are electrically connected to the first conductive layer and the second opposing conductive layer.

[0080] (Configuration 6) 6. The transmission line according to any one of configurations 1 to 5, wherein the first intermediate conductive layer further includes a connecting conductive layer that connects a portion of the first line and a portion of the second line.

[0081] (Configuration 7) the first intermediate conductive layer includes a plurality of connecting conductive layers; the plurality of connection conductive layers connect a portion of the first line and a portion of the second line; one of the plurality of connection conductive layers and another of the plurality of connection conductive layers are electrically connected to the first connection member; A transmission line described in any one of configurations 3 to 5, wherein the distance in the first direction between the center position in the first direction of one of the plurality of connecting conductive layers and the center position in the first direction of another of the plurality of connecting conductive layers is between 0.8 and 1.2 times half the wavelength of the signal passing through the first conductive line.

[0082] (Configuration 8) the first conductive layer includes a plurality of first partial regions and a plurality of first other partial regions; one of the plurality of first partial regions is located between one of the plurality of first other partial regions and another of the plurality of first other partial regions in the first direction; the one of the plurality of first other partial regions is located between the one of the plurality of first partial regions and another one of the plurality of first partial regions in the first direction; The transmission path described in configuration 2, wherein the first partial area length of one of the plurality of first partial areas in the third direction is longer than the first other partial area length of one of the plurality of first other partial areas in the third direction.

[0083] (Configuration 9) the first conductive layer further includes a first portion and a first opposing portion; a direction from the first portion to the first opposing portion is along the first direction; the plurality of first partial regions and the plurality of first other partial regions are located between the first portion and the first opposing portion, 9. The transmission line according to configuration 8, wherein the length of the first portion along the third direction is longer than the length of the first other portion area.

[0084] (Configuration 10) 10. The transmission line according to claim 8, wherein the length of the first other region is between one and three times the length of the first conductive line along the third direction.

[0085] (Configuration 11) the second conductive layer includes a plurality of second partial regions and a plurality of second other partial regions; one of the plurality of second partial regions is located between one of the plurality of second other partial regions and another of the plurality of second other partial regions in the first direction; the one of the plurality of second other partial regions is located between the one of the plurality of second partial regions and another one of the plurality of second partial regions in the first direction; a second partial region length in the third direction of the one of the plurality of second partial regions is longer than a second other partial region length in the third direction of the one of the plurality of second other partial regions; 11. The transmission line according to any one of configurations 8 to 10, wherein the length of the second other partial area is 0.8 to 1.2 times the length of the first other partial area.

[0086] (Configuration 12) a first connecting member extending along the second direction; a second connection member extending along the second direction; Furthermore, the first connection member and the second connection member are electrically connected to the one of the plurality of first partial regions and the one of the plurality of second partial regions; 12. The transmission line according to claim 11, wherein at least a portion of the first intermediate conductive layer is electrically connected to the first connection member and the second connection member.

[0087] (Configuration 13) 13. The transmission line according to any one of configurations 8 to 12, wherein the plurality of first partial regions are arranged periodically in the first direction.

[0088] (Configuration 14) 14. The transmission line according to claim 13, wherein the pitch of the plurality of first partial regions in the first direction is equal to or less than 1 / 4 of the wavelength of a signal passing through the first conductive line.

[0089] (Configuration 15) a first connecting member extending along the second direction; a second connection member extending along the second direction; Furthermore, the first connection member and the second connection member are electrically connected to the first opposing conductive layer and the second opposing conductive layer, 2. The transmission line of claim 1, wherein at least a portion of the first intermediate conductive layer is between the first connection member and the second connection member.

[0090] (Configuration 16) a plurality of the first intermediate conductive layers are provided; 16. The transmission line according to any one of configurations 1 to 15, wherein the plurality of first intermediate conductive layers are aligned along the first direction.

[0091] (Configuration 17) The transmission path described in any one of configurations 1 to 16, wherein the first intermediate conductive layer is electrically connected to the first conductive layer, the first opposing conductive layer, the second conductive layer, and the second opposing conductive layer.

[0092] (Configuration 18) 10. The transmission line of claim 9, wherein the temperature of the first portion is different from the temperature of the first opposing portion.

[0093] (Configuration 19) The transmission line according to any one of configurations 1 to 18, a first signal processing circuit; a second signal processing circuit; Equipped with one end of the first conductive line is connectable to the first signal processing circuit; The other end of the first conductive line is couplable to the second signal processing circuit.

[0094] (Configuration 20) 20. The processing device of claim 19, wherein a first temperature of the first signal processing circuit is different from a second temperature of the second signal processing circuit.

[0095] (Configuration 21) The transmission line according to any one of configurations 1 to 18, a first signal processing circuit; a second signal processing circuit; Equipped with one end of the first conductive line is connectable to the first signal processing circuit; The other end of the first conductive line is connectable to the second signal processing circuit.

[0096] According to the embodiments, it is possible to provide a transmission line, a processing device, and a quantum computer that can improve characteristics.

[0097] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0098] The embodiments of the present invention have been described above with reference to examples. However, the present invention is not limited to these examples. For example, the specific configurations of the elements, such as the conductive layers and conductive lines, included in the transmission path are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0099] Any combination of two or more elements of each example within the scope of technical feasibility is also included within the scope of the present invention as long as it encompasses the gist of the present invention.

[0100] All transmission paths and processing devices that can be implemented by a person skilled in the art by appropriately modifying the design based on the transmission paths and processing devices described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0101] Within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and it is understood that these modifications and alterations also fall within the scope of the present invention.

[0102] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0103] 10i: insulating member, 11, 12: first and second conductive layers, 11A, 12A: first and second opposing conductive layers, 11S to 14S: first to fourth structures, 11a: first portion, 11b: first opposing portion, 11c: first intermediate portion, 11p, 12p: first and second partial regions, 11pA, 12pA: first and second opposing partial regions, 11q, 12q: first and second other partial regions, 11qA, 12qA: first and second opposing other partial regions, 18S: interlayer structure, 21, 22: first and second conductive lines, 31, 32: first and second intermediate conductive layers, 31a: first line, 31b: second line, 31c: connection conductive layer, 32c: third line, 32d: fourth line, 38a, 38b...first and second interlayer wires, 41, 42: first and second connection members, 51-54: first to fourth signal processing circuits, 52a: processor, 52b: signal separation unit, 52c: signal multiplexing unit, 53c: signal multiplexing unit, 54b: signal separation unit, 55: cooling device, 56: cooling unit, 110-115, 119: transmission path, 210: processing device, D1-D3: first to third directions, L31c: distance, P1: attenuation amount, f1: frequency, p11: pitch

Claims

1. a first conductive layer; a first opposing conductive layer; a first conductive line provided between the first conductive layer and the first opposing conductive layer, the first conductive line extending along a first direction, the first direction intersecting a second direction from the first conductive layer to the first opposing conductive layer; a first structure comprising: A second structure, the second structure comprising: a second conductive layer; and a second opposing conductive layer, the first opposing conductive layer being between the first conductive layer and the second opposing conductive layer, and the second conductive layer being between the first opposing conductive layer and the second opposing conductive layer; a second conductive line provided between the second conductive layer and the second opposing conductive layer, the second conductive line extending along the first direction; the second structure comprising: a first intermediate conductive layer provided between the first opposing conductive layer and the second conductive layer, the first intermediate conductive layer including a first line extending along the first direction and a second line extending along the first direction, and a third direction from the first line to the second line intersecting a plane including the first direction and the second direction; A transmission path equipped with:

2. a position of the first conductive line in the third direction is between a position of the first line in the third direction and a position of the second line in the third direction, 2. The transmission line according to claim 1, wherein the position of the second conductive line in the third direction is between the position of the first line in the third direction and the position of the second line in the third direction.

3. a first connecting member extending along the second direction; The transmission line according to claim 2 , wherein the first connection member electrically connects the first opposing conductive layer and the second conductive layer to each other.

4. a second connecting member extending along the second direction; the second connection member electrically connects the first opposing conductive layer and the second conductive layer to each other; The transmission line according to claim 3 , wherein at least a portion of the first intermediate conductive layer is located between the first connection member and the second connection member.

5. The transmission line according to claim 4 , wherein the first connecting member and the second connecting member are electrically connected to the first conductive layer and the second opposing conductive layer.

6. 6. The transmission line according to claim 1, wherein the first intermediate conductive layer further includes a connecting conductive layer that connects a portion of the first line and a portion of the second line.

7. the first intermediate conductive layer includes a plurality of connecting conductive layers; the plurality of connection conductive layers connect a portion of the first line and a portion of the second line; one of the plurality of connection conductive layers and another of the plurality of connection conductive layers are electrically connected to the first connection member; 4. The transmission line of claim 3, wherein a distance in the first direction between a center position in the first direction of one of the plurality of connecting conductive layers and a center position in the first direction of another of the plurality of connecting conductive layers is between 0.8 and 1.2 times half the wavelength of a signal passing through the first conductive line.

8. the first conductive layer includes a plurality of first partial regions and a plurality of first other partial regions; one of the plurality of first partial regions is located between one of the plurality of first other partial regions and another of the plurality of first other partial regions in the first direction; the one of the plurality of first other partial regions is located between the one of the plurality of first partial regions and another one of the plurality of first partial regions in the first direction; The transmission path according to claim 2 , wherein a first partial region length in the third direction of one of the plurality of first partial regions is longer than a first other partial region length in the third direction of one of the plurality of first other partial regions.

9. the first conductive layer further includes a first portion and a first opposing portion; a direction from the first portion to the first opposing portion is along the first direction; the plurality of first partial regions and the plurality of first other partial regions are located between the first portion and the first opposing portion, The transmission line according to claim 8 , wherein a length of the first portion along the third direction is longer than a length of the first other portion area.

10. 9. The transmission line according to claim 8, wherein the length of the first other region is equal to or greater than one time and equal to or less than three times the length of the first conductive line along the third direction.

11. the second conductive layer includes a plurality of second partial regions and a plurality of second other partial regions; one of the plurality of second partial regions is located between one of the plurality of second other partial regions and another of the plurality of second other partial regions in the first direction; the one of the plurality of second other partial regions is located between the one of the plurality of second partial regions and another of the plurality of second partial regions in the first direction; a second partial region length in the third direction of the one of the plurality of second partial regions is longer than a second other partial region length in the third direction of the one of the plurality of second other partial regions; 9. The transmission line according to claim 8, wherein the length of the second other partial area is 0.8 to 1.2 times the length of the first other partial area.

12. a first connecting member extending along the second direction; a second connection member extending along the second direction; Furthermore, the first connection member and the second connection member are electrically connected to the one of the plurality of first partial regions and the one of the plurality of second partial regions; The transmission line according to claim 11 , wherein at least a portion of the first intermediate conductive layer is electrically connected to the first connection member and the second connection member.

13. The transmission line according to claim 8 , wherein the plurality of first partial regions are arranged periodically in the first direction.

14. 14. The transmission line according to claim 13, wherein the pitch of the plurality of first partial regions in the first direction is equal to or less than 1 / 4 of the wavelength of a signal passing through the first conductive line.

15. a first connecting member extending along the second direction; a second connection member extending along the second direction; Furthermore, the first connection member and the second connection member are electrically connected to the first opposing conductive layer and the second opposing conductive layer, The transmission line according to claim 1 , wherein at least a portion of the first intermediate conductive layer is located between the first connection member and the second connection member.

16. a plurality of the first intermediate conductive layers are provided; The transmission line according to claim 1 , wherein the plurality of first intermediate conductive layers are aligned along the first direction.

17. The transmission line according to claim 1 , wherein the first intermediate conductive layer is electrically connected to the first conductive layer, the first opposing conductive layer, the second conductive layer, and the second opposing conductive layer.

18. The transmission line according to claim 9 , wherein the temperature of the first portion is different from the temperature of the first opposing portion.

19. The transmission path according to claim 1; a first signal processing circuit; a second signal processing circuit; Equipped with one end of the first conductive line is connectable to the first signal processing circuit; The other end of the first conductive line is couplable to the second signal processing circuit.

20. 20. The processing device of claim 19, wherein the first temperature of the first signal processing circuit is different from the second temperature of the second signal processing circuit.

21. The transmission path according to claim 1; a first signal processing circuit; a second signal processing circuit; Equipped with one end of the first conductive line is connectable to the first signal processing circuit; The other end of the first conductive line is connectable to the second signal processing circuit.

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