Overhead storage and transport systems

Abstract

To provide a ceiling storage shelf that can accommodate multiple articles to be stored.SOLUTION: A ceiling storage shelf (1) suspended from the ceiling for storing an article to be stored (P) includes: a plurality of shelf tiers (12) that can be raised and lowered; and a lifting section (15) that raises and lowers the shelf tiers, being capable of approaching so as for the distance between vertically adjacent shelf tiers to be shorter than the height of the article to be stored.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an overhead storage shelf. [Background technology]

[0002] Conventionally, in factories that manufacture semiconductor products, for example, overhead transport vehicles have been used to transport items along rails installed on the ceiling. In factories, ceiling storage shelves are sometimes installed along the rails to temporarily store the items being transported by the overhead transport vehicle. Patent Document 1 discloses an overhead transport vehicle that can place items on two-tiered ceiling storage shelves. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2020 / 095570 Summary of the Invention [Problem to be solved by the invention]

[0004] However, there are cases where the storage capacity of a ceiling storage shelf is not sufficient with only two levels. Also, there are cases where space constraints mean that it is not possible to install multiple ceiling storage shelves along rails. For these reasons, there is a demand for ceiling storage shelves that can store more items in a limited floor area.

[0005] An object of one aspect of the present invention is to provide a ceiling storage shelf that can store a plurality of items. [Means for solving the problem]

[0006] In order to solve the above problems, one aspect of the present invention provides a ceiling storage shelf that is suspended from the ceiling for storing specified items, and is equipped with a plurality of shelves that can be raised and lowered, and a lifting unit that raises and lowers the shelves, and is configured so that the distance between adjacent shelves in the vertical direction can be narrower than the height of the stored items. [Effects of the Invention]

[0007] According to one aspect of the present invention, a ceiling storage shelf capable of storing multiple items can be realized. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a front view showing the configuration of a ceiling storage shelf according to a first embodiment and a transport system using the same. [Figure 2] FIG. 2 is a top view of the ceiling storage shelf according to the first embodiment when the shelves are raised and lowered. [Figure 3] FIG. 2 is a front view of the ceiling storage shelf according to the first embodiment when the shelves are raised and lowered. [Figure 4] 3 is a cross-sectional view taken along the line AA in FIG. 2 when the shelves of the ceiling storage shelf according to the first embodiment are raised and lowered. FIG. [Figure 5] FIG. 10 is a top view of the ceiling storage shelf according to the first embodiment when the shelf is engaged with an engaging portion. [Figure 6] 6 is a cross-sectional view taken along line BB in FIG. 5 when a shelf of the ceiling storage shelf according to the first embodiment is engaged with an engaging portion. FIG. [Figure 7] FIG. 2 is a block diagram showing the configuration of a main part of the transport system. [Figure 8] FIG. 10 is a front view showing the configuration of a ceiling storage shelf according to a second embodiment and a transport system using the same. DETAILED DESCRIPTION OF THE INVENTION

[0009] [Embodiment 1] Hereinafter, an embodiment according to one aspect of the present invention (hereinafter also referred to as "the present embodiment") will be described with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals, and description thereof will not be repeated.

[0010] (Overview of the transport system 100) 1 is a front view showing a ceiling storage shelf 1 according to embodiment 1 and the configuration of a transport system 100 using the same. The transport system 100 includes a transport rail 2 suspended from the ceiling, a transport vehicle 3 that runs on the transport rail 2, and the ceiling storage shelf 1 that is provided adjacent to the transport rail 2. There may be multiple transport vehicles 3.

[0011] The transport vehicle 3 includes a running section 31, a carriage section 32, and a transfer section 33. The running section 31 runs on the transport rail 2. The carriage section 32 is a carriage suspended from the running section 31 and stores the item P. The transfer section 33 is a mechanism that transfers the item P stored in the carriage section 32 to the side of the transport vehicle 3. The transfer section 33 includes a mechanism that slides the item P to the side of the transport vehicle 3, and a mechanism that places or removes the item P. Therefore, the transport system 100 can transfer the item P from the transport vehicle 3 to the ceiling storage shelf 1 by the transfer section 33. The item P may be a wafer container or a reticle container, for example.

[0012] (Overview of ceiling storage shelf 1) FIG. 2 is a top view of the ceiling storage shelf 1 according to the first embodiment when the shelf 12 is raised and lowered. FIG. 3 is a front view of the ceiling storage shelf 1 according to the first embodiment when the shelf 12 is raised and lowered. FIG. 4 is a cross-sectional view taken along line AA in FIG. 2 when the shelf 12 of the ceiling storage shelf 1 according to the first embodiment is raised and lowered. FIG. 5 is a top view of the ceiling storage shelf 1 according to the first embodiment when the shelf 12 is engaged with the engaging portion 17. FIG. 6 is a cross-sectional view taken along line BB in FIG. 5 when the shelf 12 of the ceiling storage shelf 1 according to the first embodiment is engaged with the engaging portion 17. The ceiling storage shelf 1 comprises a structural portion 11, a plurality of shelf portions 12, a single shelf portion 13, a linear guide 14, a lifting and lowering portion 15, a gripping portion 16, and an engaging portion 17.

[0013] The structural part 11 is a part that is responsible for the overall structure of the ceiling storage shelf 1 and is suspended from the ceiling. The shelf 12 is provided so as to be able to move up and down relative to the structural part 11. In contrast, the shelf 13 is fixed to the structural part 11.

[0014] In this embodiment, the ceiling storage shelf 1 has three shelves 12 that can be raised and lowered, and also has a fixed shelf 13 at the bottom. The shelves 12 are also referred to as shelf 12a, shelf 12b, and shelf 12c, from top to bottom. The distance from the ceiling to shelf 12a is D1, the distance from shelf 12a to shelf 12b is D2, the distance from shelf 12b to shelf 12c is D3, and the distance from shelf 12c to shelf 13 is D4. The height of the stored items P stored on shelf 12 or shelf 13 is H.

[0015] The shelf 12 comprises a shelf portion 121, a gripped portion 122, and a connecting portion 123. The shelf portion 121 is a shelf on which the stored item P is placed. The shelf portion 121 may have a shape that is appropriately matched to the stored item P. The gripped portion 122 is a portion that is separated from the shelf portion 121, and is gripped by a gripping portion 16, which will be described later. The connecting portion 123 is a portion that connects the shelf portion 121 and the gripped portion 122, and is bent in an L shape. Engaged portions 124 are formed on the bottom surfaces of both ends of the gripped portion 122. The engaged portions 124 are portions that abut and engage with engaging members 171, which will be described later.

[0016] The width W1 of the connecting portion 123 in the horizontal direction when viewed from the front is narrower than the shelf portion 121 and the gripped portion 122, and is narrower than the distance between two engaging portions 17 (described later). In other words, the connecting portion 123 is formed in a concave shape.

[0017] Shelf 121 is fixed to connecting portion 123 at an angle θ (θ≦90°). Angle θ is the angle formed between shelf 121 and connecting portion 123. By making angle θ smaller than 90°, it is possible to prevent stored items P placed on shelf 121 from falling. Furthermore, angle θ may be set in consideration of the fact that shelf 121 is a cantilever beam, and that shelf 121 may tilt due to structural play. In other words, angle θ may be set so that shelf 121 becomes horizontal when it bends or tilts due to play.

[0018] The linear guide 14 is a linear guide in which a fixed portion (linear guide rail) 141 of the linear guide is fixed to the structural portion 11, and the shelf 12 is supported by the fixed portion 141, so that the shelf 12 moves up and down in the vertical direction. Note that the linear guide 14 is not limited to a linear guide, and may be any linear support mechanism such as a linear bushing or a slide rail.

[0019] The lifting unit 15 is fixed to a movable part (linear guide block) 142 of the linear guide 14. The lifting unit 15 can move up and down (can move) relative to the structural unit 11, and can lift and lower the shelf 12 gripped by the gripping unit 16 (described later). A drive unit 151 is fixed to an end of the fixed part 141 of the linear guide 14. The drive unit 151 is a motor that winds up a belt, one end of which is fixed to the drive unit 151 and the other end of which is fixed to the lifting unit 15. Therefore, the drive unit 151 can lift and lower the lifting unit 15 by winding the belt onto a drum. Furthermore, the lifting unit 15 can lift and lower the shelf 12 gripped by the gripping unit 16 independently of the other shelf levels 12.

[0020] The gripping unit 16 is a gripping mechanism fixed to the lifting unit 15. In other words, the lifting unit 15 is a gripping mechanism that moves up and down. The gripping unit 16 is equipped with a lower gripping unit 163 that supports the shelf 12, and an upper gripping unit 164 that presses the shelf 12 against the lower gripping unit 163 to hold down the shelf 12, and the lower gripping unit 163 and the upper gripping unit 164 are collectively referred to as the gripping mechanism.

[0021] The lower gripping unit 163 and the upper gripping unit 164 are connected to the base 162. The upper gripping unit 164 is a mechanism that moves up and down relative to the base 162 to grip the gripped part 122, and is equipped with, for example, a cylinder. The gripping unit 16 has a movement mechanism 161 between the base 162 and the lifting unit 15. The movement mechanism 161 is a mechanism that can slide the gripping mechanism back and forth, and is, for example, a cylinder. In other words, by changing the length of the movement mechanism 161, the position of the gripping mechanism moves back and forth, and the position of the shelf 12 gripped by the gripping unit 16 also moves back and forth.

[0022] The lifting unit 15 may be configured with a lifting base 152 and a lifting rotation unit 153. The lifting rotation unit 153 is a mechanism that is rotationally driven relative to the lifting base 152, and the lifting rotation unit 153 is, for example, a rotary cylinder. In other words, the gripping unit 16 and the shelf 12 can be rotated by the lifting rotation unit 153. The rotation angle of the lifting rotation unit 153 is a predetermined angle.

[0023] The engaging portions 17 are a pair of concave members extending in the vertical direction provided on the structural portion 11. The concave portions of the pair of engaging portions 17 face each other. The gripping portion 16 is located between the engaging portions 17 in the horizontal plane. Furthermore, the spacing W2 between the engaging portions 17 is greater than the width W1 of the connecting portion 123. Therefore, the engaging portions 17 are structured not to interfere with the shelf levels 12. Furthermore, the gripped portion 122 is located in the concave portion of the engaging portions 17.

[0024] The engaging portion 17 has an engaging member 171 at a required height. The engaging member 171 has a structure that protrudes from the engaging portion 17, and the engaged portion 124 abuts on the engaging member 171, thereby engaging with the engaging portion 171. The engaging member 171 has a structure that can support the weight of the shelf 12 and the stored items P. The engaging member 171 may also be equipped with any mechanism that prevents the shelf 12 from tilting. Note that there may be multiple required heights at which the engaging member 171 in the engaging portion 17 is positioned. In other words, the shelf 12 gripped by the gripping portion 16 can be set to the required height of the engaging portion 17 by the gripping portion 16 and the engaging portion 17.

[0025] In addition, on the plane where the engaging member 171 is located, there is a gap 172 where the engaging portion 17 is not present. The size of the gap 172 is larger than the size of the engaged portion 124. Therefore, when the gripping portion 16 moves up and down, the engaged portion 124 passes through the gap 172, and the shelf 12 can move up and down without interfering with the engaging portion 17.

[0026] Here, shelf portion 121 has a portion 125 that protrudes beyond connection portion 123 toward engagement portion 17. As will be described below, this protruding portion 125 always abuts against engagement portion 17 during lifting / lowering and engagement.

[0027] (Shelf 12 lifting) 2 and 4, the case where the shelf 12 moves up and down will be described. First, the lifting and lowering section 153 rotates, tilting the shelf 12. Then, the moving mechanism 161 shortens, retracting the shelf 12.

[0028] By rotating the shelf 12, there are no components of the shelf 12 in the vertical direction where the engaging member 171 is present. In other words, the connecting portion 123 is cut out at a location that interferes with the engaging member 171 when the shelf 12 is raised or lowered. This allows the shelf 12 to be raised or lowered.

[0029] Similarly, the engaged portion 124 is located at the position of the gap 172 (see FIG. 5). Since there is no engaging portion 17 in the gap 172, the rising and falling of the shelf 12 is not hindered. In other words, when the engaged portion 124 is located in the gap 172, the shelf 12 can rise and fall.

[0030] (Engagement of shelf 12) 5 and 6, when the shelf 12 is engaged with the engaging portion 17, the engaged portion 124 is located at the position of the engaging member 171. Therefore, the shelf 12 can abut against and engage with the engaging portion 17. In other words, the shelf 12 is set to the required height.

[0031] At this time, first, the moving mechanism 161 becomes longer. Then, the lifting and rotating part 153 rotates the shelf 12 so that it is horizontal. At this time, the protruding part 125 abuts against the engaging part 17. As a result, the shelf 12 is provided with a force by the protruding part 125 to hold the load of the stored items P. Therefore, the stored items can be stored stably.

[0032] In order to transition from a state in which the shelf level 12 can be raised and lowered to a state in which the shelf level 12 is engaged, the gripping unit 16 uses the moving mechanism 161 to move the lower gripping unit 163 and the upper gripping unit 164 that are gripping the gripped portion 122 toward the engaging member 171, and then raises the upper gripping unit 164 to release the grip, thereby engaging the gripping unit.

[0033] Conversely, to transition from a state in which the shelf level 12 is engaged to a state in which the shelf level 12 can be raised or lowered, the gripping unit 16 moves the lower gripping unit 163 and the upper gripping unit 164 by the movement mechanism 161 to a position where it can grip the gripped portion 122. Thereafter, the gripping unit 16 lowers the upper gripping unit 164, so that the gripping unit 16 grips the gripped portion 122, and then moves back by the movement mechanism 161 until the position of the engaged portion 124 is in the position of the gap 172. This makes it possible to raise or lower the shelf level 12.

[0034] (Operation process) Next, we will explain the operation process of the ceiling storage shelf 1. We will start from a state where no stored items P are placed on the ceiling storage shelf 1.

[0035] 7 is a block diagram showing the configuration of the main parts of the transport system 100. The ceiling storage shelf 1 further includes a control unit 20. The control unit 20 comprehensively controls each part of the ceiling storage shelf 1. The control unit 20 controls the position of the shelf 12 of the ceiling storage shelf 1 based on commands from an external host device 30. That is, the control unit 20 receives instructions from the host device 30 regarding which shelf 12 or shelf 13 to place or remove the stored item P placed on the transport cart 3 from, and operates accordingly. The host device 30 also controls the transport cart 3.

[0036] When placing the contents P on shelf 12a, control unit 20 lowers shelves 12a, 12b, and 12c, particularly shelf 12a, to a required height at which the contents P can be placed. That is, control unit 20 moves shelves 12a, 12b, 12c, and 13 closer together until distances D2, D3, and D4 become narrower than height H of the contents. After the contents P is placed on shelf 12a by transfer unit 33, control unit 20 raises shelf 12a. Shelf 12a may be raised to a position at which the contents P can be placed on shelf 12b directly below (as long as distance D2 is greater than height H and does not interfere with transfer unit 33). For example, shelf 12a may be raised to a height at which the contents P will not hit the ceiling. That is, control unit 20 sets distance D1 to be slightly longer than height H of the contents P.

[0037] Next, when placing the contents P on shelf 12b, control unit 20 raises or lowers shelf 12b to a required height at which the contents P can be placed on shelf 12b. That is, control unit 20 moves shelves 12b, 12c, and 13 closer together until distances D3 and D4 become narrower than height H of the contents. After the contents P is placed on shelf 12b by transfer unit 33, control unit 20 raises shelf 12b. Shelf 12b only needs to be raised to a position at which the contents P can be placed on shelf 12c directly below (as long as distance D3 is higher than height H and does not interfere with transfer unit 33). For example, shelf 12b may be raised to the maximum height at which the contents P will not hit shelf 12a. That is, control unit 20 sets distance D2 to be slightly longer than height H of the contents P.

[0038] Next, when placing the contents P on shelf 12c, control unit 20 raises or lowers shelf 12c to a required height at which the contents P can be placed on shelf 12c. That is, control unit 20 brings shelf 12c and shelf 13 closer together until distance D4 is narrower than height H of the contents. After the contents P is placed on shelf 12c by transfer unit 33, control unit 20 raises shelf 12c. Shelf 12c may be raised to a position at which the contents can be placed on shelf 13 directly below (as long as distance D4 is higher than height H and does not interfere with transfer unit 33). For example, shelf 12c may be raised to the maximum height at which the contents P will not hit shelf 12b. That is, control unit 20 sets distance D3 to be slightly longer than height H of the contents P.

[0039] Next, when storing the stored items P on the shelf 13, the transfer unit 33 places the stored items P on the shelf 13. As a result, the stored items P are placed on all shelves 12 and 13 of the ceiling storage shelf 1.

[0040] Up to this point, we have explained the case where stored items P are stored in the ceiling storage shelf 1, but from here on, we will explain the case where stored items P are removed from the ceiling storage shelf 1. First, the control unit 20 raises shelf 12c to a position where shelf 12c and the transfer unit 33 do not interfere with each other. In other words, the control unit 20 increases the distance D4 so that the transfer unit 33 does not interfere with shelf 12c. The control unit 20 also raises shelves 12a and 12b to positions where they do not interfere with the stored items P on the shelf 12 immediately below shelf 12. The transfer unit 33 removes the stored items P from shelf 13.

[0041] Next, when the contents P placed on shelf 12c are to be removed, control unit 20 lowers shelf 12c to a required height at which the contents P can be removed. In other words, control unit 20 makes distance D4 narrower than height H of the contents P. After transfer unit 33 has transferred the contents P placed on shelf 12c, control unit 20 may further lower shelf 12c to a position where it does not interfere with shelf 13.

[0042] Next, when the contents P placed on shelf 12b are to be removed, control unit 20 lowers shelf 12b to a required height at which the contents P can be removed. In other words, control unit 20 makes distance D3 narrower than height H of the contents P. After the contents P placed on shelf 12b has been transferred by transfer unit 33, control unit 20 may further lower shelf 12b to a position where it does not interfere with shelf 12c.

[0043] Next, when the contents P placed on shelf 12a are to be removed, control unit 20 lowers shelf 12a to a required height at which the contents P can be removed. In other words, control unit 20 makes distance D2 narrower than height H of the contents P. After the contents P placed on shelf 12a has been transferred by transfer unit 33, control unit 20 may further lower shelf 12a to a position where it does not interfere with shelf 12b.

[0044] Therefore, the control unit 20 moves the vertically adjacent shelves 12 closer together until the distance between them is narrower than the height H of the contents. After the contents P are placed on the shelf 12, the control unit 20 raises and lowers the shelf 12 while the contents P are placed on the shelf 12, and engages it with the engaging member 171. In other words, after the contents P are placed on the shelf 12, the lifting unit 15 raises and lowers the shelf 12 while the contents P are placed on the shelf 12, and engages it with the engaging member 171. As a result, the shelf 12 can be engaged with the engaging member 171.

[0045] After the contents P are placed on a shelf 12, the control unit 20 raises or lowers the shelf 12 to a position where the contents can be placed on the shelf 12 immediately below the shelf 12. In other words, after the contents P are placed on the shelf 12, the lifting unit 15 raises or lowers the shelf 12 to a position where the contents P can be placed on the shelf immediately below the shelf 12. When the contents P placed on the shelf 12 is to be removed, the control unit 20 raises or lowers the shelf 12 to a required height where the contents P can be picked up. In other words, when the transport vehicle 3 removes the contents P placed on the shelf 12, the lifting unit 15 raises or lowers the shelf 12 to a required position where the transport vehicle 3 can pick up the contents P.

[0046] Each of the plurality of shelves can be raised and lowered independently. Furthermore, the control unit 20 raises the top shelf (shelf 12a) until the contents P placed on the shelf are near the ceiling.

[0047] The engaging members 171 are provided at a required height for placing or removing the stored items P from each shelf 12, and at a required height for storing the stored items P above the ceiling storage shelf 1 after storing the stored items P. This eliminates the need to constantly hold the multiple shelf levels 12 with the gripping parts 16, which saves energy. The required height for placing the stored items P and the required height for removing the stored items P may also be the same height.

[0048] (Action and effect) As described above, the ceiling storage shelf 1 can store multiple items P in a limited floor area. In addition, it utilizes the space up to the ceiling and does not occupy too much space below the conveyor rail 2. This ensures that there is sufficient space for equipment below the conveyor rail 2.

[0049] Furthermore, the space below the ceiling storage shelf 1 is generally occupied by equipment. Therefore, it is difficult to extend the ceiling storage shelf 1 downward. Since the distance between the transport rail 2 and the height of the equipment is limited, if the spacing between the shelves 12 cannot be narrower than the height of the stored items P, it will be impossible to have shelves 12 available to store a large number of stored items P.

[0050] In this embodiment, the shelves 12 can be raised and lowered independently, and the shelves 12 in a standby state can approach each other until the distance between them is narrower than the height of the stored items P. This allows more shelves 12 to be arranged between the ceiling and the height of the equipment. Therefore, more stored items P can be stored in a limited, small floor area.

[0051] Furthermore, since the top shelf (shelf 12a) can be raised up to the vicinity of the ceiling, the space beside the transport rail 2, which has not been used in the past, can be effectively utilized.

[0052] [Embodiment 2] Other embodiments of the present invention will be described below. For ease of explanation, the same reference numerals will be used to designate components having the same functions as those described in the above embodiment, and the description thereof will not be repeated.

[0053] (Overview of the transport system 101) 8 is a front view showing the configuration of a ceiling storage shelf 1 according to embodiment 2 and a transport system 101 using the same. The transport system 101 includes a first transport rail 2a and a second transport rail 2b suspended from the ceiling and installed at different heights, a first transport carriage 3a running on the first transport rail 2a, a second transport carriage 3b running on the second transport rail 2b, and a ceiling storage shelf 1 installed adjacent to the first transport rail 2a and the second transport rail 2b. The ceiling storage shelf 1 in embodiment 2 is the same as the ceiling storage shelf 1 in embodiment 1.

[0054] That is, in the second embodiment, the combination of the transport rail 2 and the transport cart 3 in the first embodiment is adjacent to the ceiling storage shelf 1 at different heights.

[0055] (Transfer of contents P in the height direction) Next, the operation process of the transport system 101 will be described. The description will start from a state where no stored items P are placed on the ceiling storage shelf 1. Here, the case where the stored items P are transferred from the first transport cart 3a traveling on the first transport rail 2a to the second transport cart 3b traveling on the second transport rail 2b using the top shelf 12a will be described, but this is not limiting. There is also no limit to the number of rails on the transport rail 2. In other words, it is sufficient that the stored items P are transferred between transport carts 3 traveling at different heights.

[0056] First, the first transport vehicle 3a stores the item P. The item P is transferred to the ceiling storage shelf 1 by the transfer unit 33. The control unit 20 raises and lowers the open shelf 12a from the first transport vehicle 3a to a position where the item P can be placed. The transfer unit 33 of the first transport vehicle 3a transfers the item P to the shelf 12a.

[0057] Thereafter, the control unit 20 raises or lowers the shelf 12a to a required height at which the second transporting carriage 3b can pick up the stored article P. Thereafter, the transfer unit 33 of the second transporting carriage 3b picks up the stored article P from the shelf 12a.

[0058] This allows the stored items P to be transferred between the first transport cart 3a and the second transport cart 3b, which travel at different heights. Therefore, the stored items can be transferred between the first transport rail 2a and the second transport rail 2b, which are at different heights, without using a dedicated elevator for the stored items P, which improves the design freedom of the entire factory and makes it more efficient.

[0059] [Modification] (Lifting section 15) In the first and second embodiments, the lifting unit 15 is raised and lowered by a mechanism that winds up a belt using a drum, but this is not limiting. For example, the lifting unit 15 may be raised and lowered by a feed screw such as a ball screw, or by a timing belt. Furthermore, the lifting unit 15 may be provided with a motor equipped with a pinion gear, and a rack may be provided instead of the linear guide 14. In this case, the lifting unit 15 is raised and lowered by meshing between the rack and pinion. Any other lifting method may also be employed. For example, a cylinder may be used.

[0060] (Gripping part 16) In the first and second embodiments, the gripping unit 16 has a mechanism for gripping the gripped part 122 between the lower gripping part 163 and the upper gripping part 164, but is not limited to this. For example, the gripping unit 16 may have a structure in which a fork is thrust under the shelf 12 to lift it up.

[0061] (Shelf 13) In the first and second embodiments, the shelves 13 are fixed to the structure 11, but this is not limiting, and the shelves 13 may also be movable up and down.

[0062] (Shelf 12) The number of shelves 12 is not particularly limited as long as it is plural. The greater the distance from the transport rail 2 to the ceiling, the more shelves can be provided.

[0063] (Multiple lifting units 15) The number of lifting / lowering units 15 is not limited to one, and may be one for each shelf 12, or the shelf 12 may be fixed to the lifting / lowering unit 15. In this case, the engaging member 171 may not be present.

[0064] (Engaging member 171 and engaged portion 124) The engaging member 171 may be formed in the shape of a pocket with an opening at the top and a cavity inside, and the engaged portion 124 may protrude downward from the gripped portion 122. In this case, the engaged portion 124 enters the pocket of the engaging member 171, and the shelf 12 engages with the engaging portion 17.

[0065] The engaged portion 124 may have a tapered shape. In this case, the tip of the engaged portion 124 is thin, so that it can be easily inserted into the engaging member 171, and the base of the engaged portion 124 is thick, so that the clearance with the engaging member 171 is narrow and there is little play, so that the shelf 12 is less likely to tilt. In this case, the protruding portion 125 may not be necessary.

[0066] 〔summary〕 In order to solve the above problems, the ceiling storage shelf of aspect 1 of the present invention is a ceiling storage shelf in a transport system equipped with transport rails and transport carts, and is a ceiling storage shelf suspended from the ceiling for storing specified items, and is equipped with a plurality of shelves that can be raised and lowered, and a lifting unit that raises and lowers the shelves, and is configured so that the distance between adjacent shelves in the vertical direction can be narrower than the height of the stored items.

[0067] According to the above configuration, it is possible to store items on multiple shelves, allowing a large number of items to be stored in a small floor area. Also, in the limited height between the transport carts that carry items in and out of the ceiling storage shelves and the equipment that uses the items, by making the spacing between shelves narrower than the height of the items, it is possible to arrange more empty shelves.

[0068] A ceiling storage shelf according to aspect 2 of the present invention is the same as that according to aspect 1 above, wherein the lifting section is a gripping section that lifts and lowers, and has a gripping section that grips the shelf level to set the shelf level to the required height.

[0069] According to the above configuration, there is no need to provide a lifting unit for each shelf level, and the shelf level can be temporarily gripped by the gripping unit that is raised and lowered by the lifting unit. Therefore, by setting the shelf level to the required height using the gripping unit, the lifting unit and the gripping unit can create a state in which no energy is consumed, thereby saving energy.

[0070] The ceiling storage shelf according to a third aspect of the present invention may be the same as the second aspect, further comprising an engaging member that can engage the shelf levels at a plurality of different heights.

[0071] According to the above configuration, the shelf can be engaged with the engaging member by the gripping portion, which eliminates the need to hold the shelf at a required height, thereby saving energy.

[0072] A ceiling storage shelf according to aspect 4 of the present invention may be such that, in aspect 3 above, the lifting section, after the stored items are placed on the shelf level, raises and lowers the shelf level while the stored items are placed on the shelf level, thereby engaging the engaging member.

[0073] According to the above configuration, by engaging the engaging member with an object placed thereon, the shelf does not need to be held by the lifting section, which saves energy.

[0074] In the ceiling storage shelf of aspect 5 of the present invention, in the above aspects 1 to 4, the lifting section may be raised and lowered to a position where the stored items can be placed on the shelf immediately below the shelf level after the stored items are placed on the shelf level.

[0075] According to the above configuration, the stored items can be efficiently and continuously placed on the shelves.

[0076] In the ceiling storage shelf according to aspect 6 of the present invention, in the above aspects 1 to 5, the lifting section may raise and lower the shelf level to a required position from which the transport cart can pick up the stored items when the transport cart removes the stored items placed on the shelf level.

[0077] According to the above configuration, stored items can be taken out from the ceiling storage shelf.

[0078] A ceiling storage shelf according to a seventh aspect of the present invention is any of the above first to sixth aspects, wherein the plurality of shelves can be raised and lowered independently of each other.

[0079] According to the above configuration, each shelf can be raised and lowered independently, allowing for efficient storage of items.

[0080] In the ceiling storage shelf according to aspect 8 of the present invention, in the above aspects 1 to 7, the uppermost shelf of the plurality of shelves may be able to rise until the stored items placed on that shelf are near the ceiling.

[0081] According to the above configuration, the top shelf can be raised up to near the ceiling, making it possible to make maximum use of the vertical space.

[0082] A ceiling storage shelf according to a ninth aspect of the present invention is configured such that, in the first to eighth aspects, the stored objects may be wafer containers or reticle containers.

[0083] According to the above configuration, by storing wafer containers or reticle containers on the ceiling storage shelves, it becomes possible to store and manage multiple workpieces near each device, enabling efficient semiconductor manufacturing.

[0084] A conveying system according to aspect 10 of the present invention is a conveying system equipped with a ceiling storage shelf according to aspects 1 to 9 above, and comprises a conveying rail arranged adjacent to the ceiling storage shelf, and a conveying cart that runs on the conveying rail and places the stored items on the ceiling storage shelf.

[0085] According to the above configuration, the ceiling storage shelf can be used as part of the transport system, facilitating management of stored items in the transport system.

[0086] A conveying system according to aspect 11 of the present invention is the same as that according to aspect 10 above, wherein the conveying rails include a first conveying rail and a second conveying rail at a different height than the first conveying rail, and the shelf levels may be used to transfer the contents between a first conveying cart running on the first conveying rail and a second conveying cart running on the second conveying rail.

[0087] According to the above configuration, it is possible to transfer stored items between the transport rails at two different heights via the ceiling storage shelf.

[0088] [Additional Notes] The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present invention. [Explanation of symbols]

[0089] 1 Ceiling storage shelf 2 Transport rails 2a First conveyor rail 2b Second transport rail 3 Transport cart 3a First transport cart 3b Second transport cart 11 Structure 12, 12a~12c, 13 shelves 14 Linear guide 15 Lifting section 16 Gripping part 17 Engagement part 20 Control Unit 30 Upper device 100, 101 Conveyor system 121 Shelf 122 Grasped part 123 Connection 124 Engaged part 151 Drive unit 152 Lifting base 153 Lifting and rotating part 161 Moving mechanism 162 Base 163 Lower grip part 164 Upper grip part 171 Engagement member 172 void P Contents

Claims

1. A ceiling storage shelf suspended from a ceiling for storing predetermined items in a transport system equipped with a transport rail and a transport cart, A plurality of shelves that can be raised and lowered; a lifting unit that raises and lowers the shelf, This ceiling storage shelf is configured so that the shelves adjacent to each other in the vertical direction can be moved closer together until the distance between them is narrower than the height of the stored items.

2. 2. The ceiling storage shelf according to claim 1, wherein the lifting section has a gripping section that moves up and down and grips the shelf to set the shelf to a required height.

3. The ceiling storage shelf according to claim 2, further comprising an engaging member that can engage the shelves at a plurality of different heights.

4. The ceiling storage shelf according to claim 3, wherein the lifting section, after the stored items are placed on the shelf level, raises and lowers the shelf level while the stored items are placed on the shelf level, thereby engaging the engaging member.

5. The ceiling storage shelf according to claim 1 , wherein the lifting section lifts and lowers to a position where the stored item can be placed on the shelf immediately below the shelf level after the stored item has been placed on the shelf level.

6. 2. The ceiling storage shelf according to claim 1, wherein the lifting section lifts and lowers the shelf to a required position from which the transport vehicle can pick up the stored items when the stored items placed on the shelf are to be removed by the transport vehicle.

7. The ceiling storage shelf according to claim 1 , wherein each of said plurality of shelves can be raised and lowered independently.

8. A transport system equipped with the ceiling storage shelf according to claim 1, A conveyor rail provided adjacent to the ceiling storage shelf; a transport cart that travels on the transport rail and places the stored items on the ceiling storage shelf.

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