Cutting device

Abstract

To provide a cutting device which can easily remove foreign matters such as scraps and so on adhered to a detection unit.SOLUTION: A cutting device for cutting a work-piece comprises: a cutting unit comprising a spindle, and a blade mount attached to a tip of the spindle, and cuts a work-piece by a cutting blade attached to the blade mount; and a cutting liquid supply unit which supplies a cutting liquid to the cutting blade; and a detection unit which detects a tip of the cutting blade. The detection unit includes: a light projection part; a light reception part which receives light from the light projection part; and a blade insertion part which is provided between the light projection part and the light reception part, and in which the cutting blade is inserted. The blade mount comprises a truncated-conical base part of which one end side is fixed to the tip of the spindle. The base part has a guide part which is provided on an outer peripheral surface side of the base part along a circumferential direction of the base part, and guides the cutting liquid, which has been supplied from the cutting liquid supply unit to the rotating cutting blade, to the light projection part or the light reception part.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a cutting device for cutting a workpiece. [Background technology]

[0002] Device chips each including a device are manufactured by dividing a semiconductor wafer on which multiple devices are formed. Furthermore, a package substrate is obtained by mounting multiple device chips on a predetermined substrate and covering the mounted device chips with a resin sealing material (mold resin). Package devices each including multiple packaged device chips are manufactured by dividing and dividing this package substrate. Device chips and package devices are incorporated into various electronic devices such as mobile phones and personal computers.

[0003] Cutting machines are used to divide workpieces such as semiconductor wafers and package substrates. The cutting machine includes a chuck table that holds the workpiece and a cutting unit that performs cutting on the workpiece. The cutting unit includes a spindle and a truncated cone-shaped blade mount fixed to the tip of the spindle, and an annular cutting blade is attached to the blade mount. The workpiece is held on the chuck table and the cutting blade is rotated to cut into the workpiece, thereby cutting and dividing the workpiece.

[0004] When cutting a workpiece with a cutting blade, a load is applied to the tip of the cutting blade that comes into contact with the workpiece, which can cause wear or chipping at the tip of the cutting blade. Continuing to cut the workpiece when the cutting blade is excessively worn or chipped can result in poor processing of the workpiece or damage to the cutting blade. Therefore, it is necessary to quickly detect wear or chipping in the cutting blade.

[0005] Therefore, cutting machines are sometimes equipped with a detection unit that detects the tip of the cutting blade while cutting a workpiece and monitors the condition of the cutting blade. For example, Patent Document 1 discloses a detection unit (optical detection means) that includes a light-emitting unit and a light-receiving unit that are arranged to sandwich the tip of the cutting blade. This type of detection unit is arranged so that light traveling from the light-emitting unit to the light-receiving unit is blocked by the cutting blade. When wear or chipping occurs at the tip of the cutting blade, the light emitted from the light-emitting unit reaches the light-receiving unit through the worn area or chipping of the cutting blade, and the amount of light received by the light-receiving unit increases. Therefore, by monitoring the amount of light received by the light-receiving unit, wear or chipping at the tip of the cutting blade can be detected. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-370140 Summary of the Invention [Problem to be solved by the invention]

[0007] When a workpiece is cut with a cutting blade, foreign matter such as chips (cutting chips) generated by cutting the workpiece scatters and adheres to the workpiece and the detection unit. Foreign matter adhering to the workpiece can cause contamination of the workpiece. In addition, if foreign matter adheres to the light-emitting or light-receiving parts of the detection unit, the amount of light received by the light-receiving part may fluctuate, which may hinder proper detection of the cutting blade.

[0008] Therefore, while the workpiece is being cut, a liquid (cutting fluid) such as pure water is supplied to the workpiece and the cutting blade. The cutting fluid washes away any foreign matter adhering to the workpiece. The cutting fluid supplied to the cutting blade is also caught up in the rotation of the cutting blade and splashes onto the detection unit side. This causes cutting fluid to be supplied to the detection unit as well, removing any foreign matter adhering to the detection unit.

[0009] However, when the detection unit is configured as an optical sensor equipped with a light-emitting unit and a light-receiving unit, the light-emitting unit and the light-receiving unit are positioned to sandwich the tip of the cutting blade. One of the light-emitting unit and the light-receiving unit is positioned so that it does not overlap the cutting blade but overlaps the truncated cone-shaped blade mount that supports the cutting blade. In this state, when cutting fluid is supplied while the blade mount and cutting blade are rotated, the cutting fluid is repelled by the outer peripheral surface (inclined surface) of the blade mount and splashes in a direction different from the light-emitting unit or the light-receiving unit. As a result, there is a problem that sufficient cutting fluid is not supplied to the light-emitting unit or the light-receiving unit, making it difficult to remove foreign matter adhering to the light-emitting unit or the light-receiving unit.

[0010] In addition, to reliably remove foreign matter adhering to the detection unit, it is also possible to equip the cutting unit with a new nozzle that supplies cleaning liquid toward the light-emitting and light-receiving parts. However, using a dedicated nozzle to clean the detection unit increases the size of the cutting unit equipped with the nozzle, and it is time-consuming and costly to prepare, install, and operate the nozzle.

[0011] The present invention has been made in view of the above problems, and has an object to provide a cutting device that can easily remove foreign matter such as cutting chips that have adhered to a detection unit. [Means for solving the problem]

[0012] According to one aspect of the present invention, there is provided a cutting device for cutting a workpiece, the cutting device comprising: a spindle; a blade mount attached to a tip of the spindle; a cutting unit for cutting the workpiece with a cutting blade attached to the blade mount; a cutting fluid supply unit for supplying cutting fluid to the cutting blade; and a detection unit for detecting the tip of the cutting blade, the detection unit comprising a light-emitting unit, a light-receiving unit for receiving light from the light-emitting unit, and a blade insertion unit for inserting the cutting blade therein. a blade mount including a truncated cone-shaped base portion having one end fixed to the tip of the spindle, a flange portion connected to the other end of the base portion and supporting the cutting blade, and a boss portion protruding from the flange portion and inserted into a through hole provided in the center of the cutting blade, the base portion being provided on the outer peripheral surface side of the base portion along the circumferential direction of the base portion and having a first guide portion that guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light-emitting portion or the light-receiving portion.

[0013] Preferably, the first guide portion is a notch or a protrusion provided at a position facing the light projecting portion or the light receiving portion.

[0014] Also, preferably, the cutting blade comprises an annular hub base having the through hole in its center, and the cutting unit further comprises a fixing nut that is screwed onto the boss portion and clamps and fixes the cutting blade together with the flange portion, the hub base has a second guide portion provided on the outer surface of the hub base along the circumferential direction of the hub base, and the fixing nut has a third guide portion provided on the outer surface of the fixing nut along the circumferential direction of the fixing nut, and the second guide portion and the third guide portion guide the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light-emitting portion or the light-receiving portion.

[0015] Preferably, the second guiding portion or the third guiding portion is a notch or a protrusion provided at a position facing the light projecting portion or the light receiving portion.

[0016] Preferably, the cutting unit further includes a front flange that supports the cutting blade together with the flange portion, and a fixing nut that is screwed onto the boss portion and clamps and fixes the cutting blade and front flange together with the flange portion, and the front flange or the fixing nut has a fourth guide portion provided on the outer surface side of the front flange or the fixing nut along the circumferential direction of the front flange or the fixing nut, and the fourth guide portion guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light-emitting portion or the light-receiving portion.

[0017] Preferably, the fourth guide portion is a notch or a protrusion provided at a position facing the light projecting portion or the light receiving portion. [Effects of the Invention]

[0018] In one aspect of the cutting device of the present invention, a guide portion is provided on the outer peripheral surface of a base portion of the blade mount to guide cutting fluid to the light-emitting portion or the light-receiving portion of the detection unit. This allows cutting fluid supplied to the cutting blade during cutting of the workpiece to be efficiently supplied to the light-emitting portion or the light-receiving portion. As a result, foreign matter adhering to the light-emitting portion or the light-receiving portion can be easily removed, preventing foreign matter from interfering with the detection of the cutting blade by the detection unit.

[0019] Furthermore, by providing a guide section on the base of the blade mount, cutting fluid can be efficiently supplied to the light-emitting section or the light-receiving section without the need to install a new nozzle on the cutting unit to supply cleaning fluid to the detection unit. This avoids an increase in the size of the cutting unit due to the installation of a nozzle, and reduces the effort and cost required to prepare, install, and operate the nozzle. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. [Figure 2] FIG. 2 is an exploded perspective view showing a cutting unit to which a hub-type cutting blade is attached. [Figure 3]FIG. 2 is a perspective view showing a cutting unit to which a cutting fluid supply unit is attached. [Figure 4] FIG. 2 is a cross-sectional view showing a detection unit. [Figure 5] FIG. 2 is a partial cross-sectional front view showing a cutting unit and a detection unit to which a hub-type cutting blade is attached. [Figure 6] Figure 6(A) is a front view showing the guiding portion (cutout), Figure 6(B) is a front view showing a modified example of the guiding portion (cutout), and Figure 6(C) is a front view showing another modified example of the guiding portion (cutout). [Figure 7] FIG. 7(A) is a front view showing a guide portion (protrusion), FIG. 7(B) is a front view showing a modified example of the guide portion (protrusion), and FIG. 7(C) is a front view showing another modified example of the guide portion (protrusion). [Figure 8] FIG. 2 is an exploded perspective view showing a cutting unit to which a washer-type cutting blade is attached. [Figure 9] FIG. 10 is a partial cross-sectional front view showing a cutting unit and a detection unit to which a washer-type cutting blade is attached. DETAILED DESCRIPTION OF THE INVENTION

[0021] An embodiment according to one aspect of the present invention will be described below with reference to the accompanying drawings. First, a configuration example of a cutting device according to this embodiment will be described. FIG. 1 is a perspective view showing a cutting device 2. In FIG. 1, the X-axis direction (processing feed direction, first horizontal direction, front-rear direction) and the Y-axis direction (indexing feed direction, second horizontal direction, left-right direction) are directions perpendicular to each other. Furthermore, the Z-axis direction (vertical direction, up-down direction, height direction) is a direction perpendicular to the X-axis direction and the Y-axis direction.

[0022] The cutting device 2 includes a base 4 that supports or houses each of the components that make up the cutting device 2. A rectangular opening 4a is provided at the front corner of the base 4, and a cassette support base (cassette elevator) 6 is provided inside the opening 4a. An elevation mechanism (not shown) that raises and lowers the cassette support base 6 along the Z-axis direction is connected to the cassette support base 6.

[0023] A cassette 8 capable of accommodating a plurality of workpieces 11 to be machined by the cutting device 2 is set on the cassette support table 6. Note that in Fig. 1, only the outline of the cassette 8 is shown by a two-dot chain line.

[0024] The workpiece 11 is a disk-shaped wafer made of a semiconductor material such as silicon, and has a front surface and a back surface that are generally parallel to each other. The workpiece 11 is divided into a plurality of rectangular regions by a plurality of streets (planned division lines) arranged in a grid pattern so as to intersect with each other. Furthermore, devices such as ICs (Integrated Circuits), LSIs (Large Scale Integration), LEDs (Light Emitting Diodes), and MEMS (Micro Electro Mechanical Systems) are formed in each of the plurality of regions divided by the streets on the front surface of the workpiece 11.

[0025] A circular tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached to the back side of the workpiece 11. For example, the tape 13 includes a film-like substrate and an adhesive (glue layer) on the substrate. The substrate is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate. The adhesive is made of an epoxy-based, acrylic-based, or rubber-based adhesive. The adhesive may be an ultraviolet-curable resin that hardens when exposed to ultraviolet light.

[0026] The workpiece 11 is supported by a frame 15. For example, the frame 15 is an annular member made of a metal such as SUS (stainless steel). A circular opening is provided in the center of the frame 15, penetrating the frame 15 in the thickness direction. The diameter of the opening is larger than the diameter of the workpiece 11.

[0027] With the workpiece 11 placed inside the opening of the frame 15, the central portion of the tape 13 is attached to the back surface 11b of the workpiece 11, and the outer periphery of the tape 13 is attached to the frame 15. In this way, the workpiece 11 is supported by the frame 15 via the tape 13.

[0028] 1 while being supported by a frame 15, and is processed by a cutting device 2. For example, the cutting device 2 cuts and divides the workpiece 11 along the streets to produce a plurality of device chips, each containing a device.

[0029] However, there are no limitations on the type, material, shape, structure, size, etc. of workpiece 11. For example, workpiece 11 may be a substrate (wafer) made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass, sapphire, ceramics, resin, metal, etc. Furthermore, there are no limitations on the type, number, shape, structure, size, arrangement, etc. of devices formed on workpiece 11, and workpiece 11 does not necessarily have to have any devices formed thereon.

[0030] Furthermore, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate. For example, a package substrate is formed by sealing a plurality of device chips mounted on a base substrate with a resin layer (mold resin). By dividing the package substrate into individual pieces, a plurality of packaged devices each including a plurality of packaged device chips are manufactured.

[0031] A rectangular opening 4b is provided on the side of the opening 4a, with its longitudinal direction aligned with the X-axis direction. A chuck table (holding table) 10 for holding a workpiece 11 is provided inside the opening 4b. The upper surface of the chuck table 10 is a flat surface that is roughly parallel to the horizontal plane (XY plane), and forms a holding surface 10a for holding the workpiece 11. The holding surface 10a is connected to a suction source (not shown), such as an ejector, via a suction passage (not shown), a valve (not shown), and the like, formed inside the chuck table 10.

[0032] A moving unit 12 is connected to the chuck table 10. For example, the moving unit 12 is a ball screw type moving mechanism and includes an X-axis ball screw (not shown) arranged along the X-axis direction and an X-axis pulse motor (not shown) that rotates the X-axis ball screw. The moving unit 12 also includes a table cover 14 that surrounds the chuck table 10. Bellows-shaped dust-proof and drip-proof covers 16 that are extendable and contractible along the X-axis direction are provided in front and behind the table cover 14. The table cover 14 and the dust-proof and drip-proof covers 16 are attached so as to cover the components of the moving unit 12 (X-axis ball screw, X-axis pulse motor, etc.) installed inside the opening 4b.

[0033] The moving unit 12 moves the chuck table 10 along the X-axis direction together with the table cover 14. A rotation drive source (not shown), such as a motor, is connected to the chuck table 10 to rotate the chuck table 10 around a rotation axis that is generally parallel to the Z-axis direction. Furthermore, a plurality of clamps 18 are provided around the periphery of the chuck table 10 to grip and fix a frame 15 that supports the workpiece 11.

[0034] A support structure 20 is provided in an area adjacent to the opening 4b of the base 4. The upper part of the support structure 20 is arranged along the Y-axis direction so as to overlap with the opening 4b. A moving unit 22 is provided on the surface side of the upper part of the support structure 20. For example, the moving unit 22 is a ball screw type moving mechanism.

[0035] Specifically, the moving unit 22 includes a pair of Y-axis guide rails 24 fixed to the front surface side of the support structure 20. The pair of Y-axis guide rails 24 are arranged generally parallel to each other along the Y-axis direction. A flat Y-axis moving plate 26 is mounted on the pair of Y-axis guide rails 24 so as to be slidable along the Y-axis guide rails 24.

[0036] A nut portion (not shown) is provided on the back side of the Y-axis moving plate 26. A Y-axis ball screw 28, which is disposed along the Y-axis direction between a pair of Y-axis guide rails 24, is threadedly engaged with this nut portion. A Y-axis pulse motor (not shown) that rotates the Y-axis ball screw 28 is connected to an end of the Y-axis ball screw 28. When the Y-axis pulse motor rotates the Y-axis ball screw 28, the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rails 24.

[0037] A pair of Z-axis guide rails 30 are fixed to the front surface side of the Y-axis moving plate 26. The pair of Z-axis guide rails 30 are arranged roughly parallel to each other along the Z-axis direction. A flat Z-axis moving plate 32 is attached to the pair of Z-axis guide rails 30 so as to be slidable along the Z-axis guide rails 30.

[0038] A nut portion (not shown) is provided on the back side of the Z-axis moving plate 32. A Z-axis ball screw 34, which is disposed along the Z-axis direction between a pair of Z-axis guide rails 30, is threadedly engaged with this nut portion. A Z-axis pulse motor 36 that rotates the Z-axis ball screw 34 is connected to an end of the Z-axis ball screw 34. When the Z-axis pulse motor 36 rotates the Z-axis ball screw 34, the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide rails 30.

[0039] A cutting unit 38 that performs cutting on the workpiece 11 is fixed to the lower part of the Z-axis moving plate 32. An annular cutting blade 40 that cuts the workpiece 11 is attached to the cutting unit 38. The cutting unit 38 cuts the workpiece 11 by rotating the cutting blade 40 and causing it to cut into the workpiece 11 held by the chuck table 10. The configuration and function of the cutting unit 38 will be described in detail later (see FIG. 2, etc.).

[0040] An imaging unit 50 is provided adjacent to the cutting unit 38 to capture an image of the workpiece 11 held by the chuck table 10. For example, the imaging unit 50 is a camera (visible light camera, infrared camera, etc.) equipped with an optical microscope and an imaging element such as a CCD (Charged-Coupled Devices) sensor or a CMOS (Complementary Metal-Oxide-Semiconductor) sensor. The image of the workpiece 11 held by the chuck table 10 is captured by the imaging unit 50. The captured image is used for aligning the workpiece 11 and the cutting blade 40, etc.

[0041] An opening 4c that defines a cylindrical cleaning space (cleaning chamber) is provided on the side of opening 4b. A cleaning unit 52 that cleans workpiece 11 is provided inside opening 4c. Cleaning unit 52 includes a spinner table 54 that holds and rotates workpiece 11, and a nozzle 56 that supplies a cleaning fluid (cleaning fluid) to workpiece 11 held by spinner table 54.

[0042] The upper surface of the spinner table 54 is a flat surface that is roughly parallel to the horizontal plane (XY plane) and constitutes a holding surface 54a that holds the workpiece 11. The holding surface 54a is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), and the like that are provided inside the spinner table 54. In addition, the spinner table 54 is connected to a rotation drive source (not shown) such as a motor that rotates the spinner table 54 around a rotation axis that is roughly parallel to the Z-axis direction.

[0043] The nozzle 56 supplies a cleaning fluid toward the holding surface 54a of the spinner table 54. The cleaning fluid may be a liquid such as pure water, or a mixed fluid containing a liquid (such as pure water) and a gas (such as air). The nozzle 56 may also spray a gas (such as air) toward the workpiece 11 to dry the workpiece 11.

[0044] The workpiece 11 machined by the cutting unit 38 is transported from the chuck table 10 to the cleaning unit 52 and placed on the holding surface 54a of the spinner table 54 via the tape 13. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 54a, the workpiece 11 is sucked and held by the spinner table 54 via the tape 13. Thereafter, while the spinner table 54 is being rotated, a cleaning fluid is supplied from the nozzle 56 toward the workpiece 11. As a result, the cleaning fluid flows along the upper surface side of the rotating workpiece 11, cleaning the workpiece 11.

[0045] The cutting device 2 also includes a control unit (control section, control device) 58 that controls each component (such as the cassette support base 6, chuck table 10, moving unit 12, clamp 18, moving unit 22, cutting unit 38, imaging unit 50, and cleaning unit 52) ​​that make up the cutting device 2. The control unit 58 generates control signals and outputs them to each component of the cutting device 2, thereby controlling the operation of the cutting device 2.

[0046] For example, the control unit 58 is configured by a computer and includes a calculation section that performs calculations necessary for the operation of the cutting device 2, and a storage section that stores various information (data, programs, etc.) used for the operation of the cutting device 2. The calculation section includes a processor such as a CPU (Central Processing Unit). The storage section includes memories such as a ROM (Read Only Memory) and a RAM (Random Access Memory).

[0047] When the workpiece 11 is machined by the cutting device 2, first, the workpiece 11 stored in the cassette 8 is transported to the chuck table 10 by a transport mechanism (not shown). Then, the workpiece 11 is placed on the holding surface 10a of the chuck table 10 via the tape 13. In addition, the frame 15 is fixed by a plurality of clamps 18. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 10a, the workpiece 11 is sucked and held by the chuck table 10 via the tape 13.

[0048] Next, the workpiece 11 is machined by the cutting unit 38. The cutting unit 38 cuts the workpiece 11 by rotating the cutting blade 40 and causing it to cut into the workpiece 11. For example, the cutting blade 40 cuts into the workpiece 11 to a cutting depth that exceeds the thickness of the workpiece 11, and cuts the workpiece 11 along the streets. This divides the workpiece 11 into a plurality of device chips.

[0049] The workpiece 11 machined by the cutting unit 38 is transported to the cleaning unit 52 by a transport mechanism (not shown) and cleaned by the cleaning unit 52. Thereafter, the workpiece 11 is transported to the cassette 8 by the transport mechanism (not shown) and stored in the cassette 8 again.

[0050] Next, a description will be given of an example configuration of the cutting unit 38. For example, a hub-type cutting blade 40 (hub blade) is attached to the cutting unit 38. Fig. 2 is an exploded perspective view showing the cutting unit 38 to which the hub-type cutting blade 40 is attached.

[0051] The cutting blade 40 includes an annular hub base 42 made of a metal such as an aluminum alloy, and an annular cutting edge 44 formed along the outer periphery of the hub base 42. A cylindrical through-hole 42a is provided in the center of the hub base 42, penetrating the hub base 42 in the thickness direction.

[0052] The cutting blades 44 are formed to protrude radially outward from the outer periphery of the hub base 42. For example, the cutting blades 44 include abrasive grains made of diamond, cubic boron nitride (cBN), or the like, and a binder such as a nickel plating layer that secures the abrasive grains. However, there are no limitations on the material of the abrasive grains, the particle size of the abrasive grains, the material of the binder, etc., and these can be selected appropriately depending on the material of the workpiece 11, etc.

[0053] The cutting unit 38 includes a columnar housing 60 connected to the moving unit 22 (see FIG. 1). The housing 60 accommodates a cylindrical spindle 62 arranged along the Y-axis direction. The tip end (one end) of the spindle 62 is exposed from the housing 60. A rotation drive source (not shown), such as a motor, is connected to the base end (the other end) of the spindle 62.

[0054] A blade mount 64 is attached to the tip of the spindle 62. The blade mount 64 includes a truncated cone-shaped base portion 66, a disk-shaped flange portion 68 that is connected to the base portion 66 and supports the cutting blade 40, and a cylindrical boss portion (support shaft) 70 that protrudes from the flange portion 68. The cutting blade 40 is detachably attached to the blade mount 64.

[0055] The base portion 66 has circular top and bottom surfaces and an annular outer circumferential surface (inclined surface) 66a connected to the top and bottom surfaces. One end (top side) of the base portion 66 is fixed to the tip of the spindle 62. As a result, the radial direction of the base portion 66 is approximately perpendicular to the rotation axis of the spindle 62, and the diameter of the base portion 66 increases as it moves away from the housing 60 (the base end of the spindle 62). In other words, the outer circumferential surface 66a of the base portion 66 is inclined with respect to the rotation axis of the spindle 62 (see FIG. 5).

[0056] A flange portion 68 is connected to the other end (bottom surface side) of the base portion 66. The diameter of the flange portion 68 is larger than the diameter of the bottom surface of the base portion 66, and the base portion 66 and the flange portion 68 are arranged concentrically. Therefore, the outer periphery of the flange portion 68 protrudes radially outward from the outer periphery of the bottom surface of the base portion 66.

[0057] The flange portion 68 has a surface 68a located on the opposite side to the base portion 66, and an annular protrusion 68b protruding from the surface 68a. The protrusion 68b is formed in an annular shape along the outer periphery of the flange portion 68. The tip surface of the protrusion 68b is a flat surface that is generally parallel to the surface 68a, and forms a support surface 68c that supports the cutting blade 40.

[0058] The boss portion 70 is formed to protrude from the center of the surface 68a of the flange portion 68 to the side opposite the base portion 66. In addition, a screw groove (male thread portion) 70a is formed on the outer circumferential surface of the boss portion 70, into which a fixing nut 74 (described later) is screwed.

[0059] A through-hole 64a is provided in the center of the blade mount 64, penetrating the base portion 66, the flange portion 68, and the boss portion 70. The blade mount 64 is fixed to the tip of the spindle 62 by inserting a fixing bolt 72 into the tip of the spindle 62 through the through-hole 64a and tightening it.

[0060] The cutting unit 38 also includes an annular fixing nut 74 that fixes the cutting blade 40 to the blade mount 64. A through-hole that penetrates the fixing nut 74 in the thickness direction is provided in the center of the fixing nut 74. A thread groove (internal thread portion) that screws into the thread groove 70a of the boss portion 70 is formed on a side surface (inner peripheral surface) 74a of the fixing nut 74 that is exposed at the through-hole.

[0061] When the cutting blade 40 is positioned so that the boss portion 70 is inserted into the through-hole 42a, the cutting blade 40 is supported by the blade mount 64. In this state, when the fixing nut 74 is screwed into the thread groove 70a of the boss portion 70 and tightened, the fixing nut 74, together with the support surface 68c of the flange portion 68, clamps and fixes the cutting blade 40. This attaches the cutting blade 40 to the tip of the spindle 62. Then, the cutting blade 40 rotates around a rotation axis that is roughly parallel to the Y-axis direction by power transmitted from the rotation drive source via the spindle 62 and the blade mount 64.

[0062] 3 is a perspective view showing the cutting unit 38 equipped with a cutting fluid supply unit (blade cover) 76. The cutting fluid supply unit 76 is attached to the tip of the housing 60, and supplies a liquid (cutting fluid) such as pure water to the cutting blade 40. When the cutting blade 40 is attached to the cutting unit 38, the cutting blade 40 is covered with the cutting fluid supply unit 76.

[0063] A pair of first connectors 78 are provided at one end of the cutting fluid supply unit 76. A second connector 82 and a third connector 86 are provided at the other end of the cutting fluid supply unit 76. Pipes such as tubes (not shown) that supply cutting fluid are connected to the first connectors 78, the second connector 82, and the third connector 86, respectively, and cutting fluid is supplied.

[0064] A pair of nozzles (cooler nozzles) 80 are connected to the pair of first connecting parts 78. The pair of nozzles 80 are arranged so as to sandwich the lower end of the cutting blade 40 (see FIG. 5). Each of the pair of nozzles 80 is provided with a supply port (not shown) that opens toward the cutting blade 40. When cutting fluid is supplied to the pair of first connecting parts 78, the cutting fluid flows into the pair of nozzles 80, and is supplied from the supply ports of the nozzles 80 toward the front and back surfaces of the cutting blade 40.

[0065] A nozzle (shower nozzle) 84 provided inside the cutting fluid supply unit 76 is connected to the second connection part 82. The tip of the nozzle 84 opens toward the side end of the cutting blade 40. When cutting fluid is supplied to the second connection part 82, the cutting fluid flows into the nozzle 84 and is supplied from the tip of the nozzle 84 toward the outer periphery of the cutting blade 40.

[0066] A pair of nozzles (spray nozzles) 88 that open downward are connected to the third connecting portion 86. When cutting fluid is supplied to the third connecting portion 86, the cutting fluid flows into the nozzles 88 and is supplied from the tip of the nozzles 88 toward the workpiece 11 held by the chuck table 10 (see FIG. 1).

[0067] The cutting blade 40 is rotated and cut into the workpiece 11 held by the chuck table 10, thereby cutting the workpiece 11. During the processing of the workpiece 11, cutting fluid is supplied from the nozzles 80, 84, and 88 to the workpiece 11 and the cutting blade 40. This cools the workpiece 11 and the cutting blade 40, and washes away foreign matter such as chips (cutting chips) generated by cutting the workpiece 11.

[0068] A detection unit 100 is provided above the cutting fluid supply unit 76 to detect the tip of the cutting blade 40 attached to the cutting unit 38. The detection unit 100 detects the tip (cutting edge 44) of the cutting blade 40 while the cutting blade 40 is cutting the workpiece 11. This allows the condition of the tip of the cutting blade 40 to be monitored.

[0069] 4 is a cross-sectional view showing the detection unit 100. The detection unit 100 includes a rectangular parallelepiped frame 102. A storage section 102a that opens on the lower surface side of the frame 102 is provided inside the frame 102. A detection section 104 that detects the tip of the cutting blade 40 is stored in the storage section 102a.

[0070] The detection unit 104 is configured with an optical sensor. Specifically, the detection unit 104 includes a rectangular parallelepiped base 104a, and a light-projecting unit 104b and a light-receiving unit 104c that protrude downward from the base 104a. The light-projecting unit 104b and the light-receiving unit 104c are disposed apart from each other in the Y-axis direction and face each other. The space between the light-projecting unit 104b and the light-receiving unit 104c corresponds to a blade insertion portion (recess) 104d into which the tip of the cutting blade 40 is inserted.

[0071] A light source 106 is connected to the light projecting unit 104b. An LED or the like can be used as the light source 106. Light emitted from the light source 106 is guided to the light projecting unit 104b via an optical fiber or the like, and is irradiated from the light projecting unit 104b toward the light receiving unit 104c. The light irradiated from the light projecting unit 104b reaches the light receiving surface of the light receiving unit 104c and is received by the light receiving unit 104c.

[0072] The photoelectric conversion unit 108 is connected to the light receiving unit 104c. The photoelectric conversion unit 108 includes a photoelectric conversion element and converts the light received by the light receiving unit 104c into an electric signal (voltage). For example, the light received by the light receiving unit 104c is guided to the photoelectric conversion unit 108 via an optical fiber or the like. The photoelectric conversion unit 108 then generates an electric signal corresponding to the amount of light that has reached the photoelectric conversion unit 108 and outputs the electric signal to the control unit 58.

[0073] The detection unit 104 also includes a nut portion (not shown), and a ball screw 110 disposed along the Z-axis direction is screwed onto the nut portion. A pulse motor 112 that rotates the ball screw 110 is connected to the upper end of the ball screw 110. When the ball screw 110 is rotated by the pulse motor 112, the detection unit 104 moves (lifts and lowers) along the Z-axis direction. This adjusts the height position (position in the Z-axis direction) of the detection unit 104.

[0074] 5 is a partial cross-sectional front view showing the cutting unit 38 to which a hub-type cutting blade 40 is attached, and the detection unit 100. When the cutting blade 40 is attached to the cutting unit 38, the height position of the detection unit 104 is adjusted, and the tip (upper end) of the cutting blade 40 is inserted into the blade insertion portion 104d. As a result, the light-emitting unit 104b and the light-receiving unit 104c are positioned so that they sandwich the tip of the cutting blade 40. The detection unit 104 is positioned so that at least a portion of the light irradiated from the light-emitting unit 104b toward the light-receiving unit 104c is blocked by the cutting blade 40.

[0075] Furthermore, the light-emitting unit 104b is arranged to overlap the base portion 66 of the blade mount 64 in the Z-axis direction, and the light-receiving unit 104c is arranged to overlap the hub base 42 of the cutting blade 40 or the fixing nut 74 in the Z-axis direction. The positions of the light-emitting unit 104b and the light-receiving unit 104c may be reversed. In this case, the light-receiving unit 104c is arranged to overlap the base portion 66 of the blade mount 64, and the light-emitting unit 104b is arranged to overlap the hub base 42 of the cutting blade 40 or the fixing nut 74.

[0076] When the workpiece 11 (see FIG. 1) is machined with the cutting unit 38, the spindle 62 is rotated with the cutting blade 40 attached to the blade mount 64. This causes the cutting blade 40, blade mount 64, and fixing nut 74 to rotate around the rotation axis of the spindle 62, which is set in a direction parallel to the Y-axis direction. In this state, the cutting blade 40 is caused to cut into the workpiece 11 held by the chuck table 10 (see FIG. 1), thereby cutting the workpiece 11.

[0077] During machining of the workpiece 11, the detection unit 104 monitors the state of the tip (cutting edge 44) of the cutting blade 40. Specifically, light is emitted from the light-emitting unit 104b toward the light-receiving unit 104c, and the light is received by the light-receiving unit 104c. The amount of light received by the light-receiving unit 104c is then measured by the photoelectric conversion unit 108 (see FIG. 4) and converted into an electrical signal.

[0078] When there is no wear or chipping at the tip of the cutting blade 40, the amount of light received by the light-receiving unit 104c is small because the light emitted from the light-emitting unit 104b is blocked by the tip of the cutting blade 40. On the other hand, when there is wear or chipping at the tip of the cutting blade 40, the light emitted from the light-emitting unit 104b reaches the light-receiving unit 104c through the worn area or chipping of the cutting blade 40, and the amount of light received by the light-receiving unit 104c increases.

[0079] Therefore, the state of the tip of the cutting blade 40 can be determined by measuring the amount of light received by the light receiving unit 104c using the photoelectric conversion unit 108. For example, a signal corresponding to the amount of light received by the light receiving unit 104c is output from the photoelectric conversion unit 108 to the control unit 58. Then, the control unit 58 compares the amount of light received indicated by the signal input from the photoelectric conversion unit 108 with a preset reference value (threshold value) to determine whether the amount of light received is a normal value or an abnormal value.

[0080] When the workpiece 11 is cut with the cutting blade 40, foreign matter such as cutting chips may fly off and adhere to the detection unit 100. However, if cutting fluid is supplied from the nozzles 80, 84, and 88 (see FIG. 3) while the workpiece 11 is being cut, the cutting fluid is caught up in the rotation of the cutting blade 40 and splashes onto the detection unit 100 side. As a result, cutting fluid is also supplied to the detection unit 100, and foreign matter adhering to the detection unit 100 is washed away.

[0081] However, the base portion 66 of the blade mount 64 is formed in a truncated cone shape, and the outer peripheral surface 66a of the base portion 66 is inclined toward the spindle 62. Therefore, cutting fluid supplied to the blade mount 64 is repelled by the outer peripheral surface 66a of the rotating base portion 66 and splashes toward the spindle 62. In other words, cutting fluid is not easily supplied to the light-projecting portion 104b, which is arranged so as to overlap with the base portion 66. As a result, a sufficient amount of cutting fluid is not supplied to the light-projecting portion 104b, and cutting chips adhering to the light-projecting portion 104b may remain.

[0082] Therefore, in this embodiment, a guide portion (notch) 120 that guides the cutting fluid to the light projector 104b is provided in the base portion 66 of the blade mount 64. The cutting fluid supplied to the guide portion 120 is scattered radially along the rotation direction of the base portion 66. This allows the cutting fluid to be efficiently supplied to the light projector 104b, which is positioned at a position overlapping the base portion 66, and makes it easier to remove cutting chips adhering to the light projector 104b.

[0083] In the following, as a representative example, a case where the light-projecting unit 104b is arranged at a position overlapping the base unit 66 will be described in detail. However, as mentioned above, the positions of the light-projecting unit 104b and the light-receiving unit 104c may be reversed. In this case, the light-receiving unit 104c is arranged at a position overlapping the base unit 66, and the cutting fluid is guided to the light-receiving unit 104c by the guide unit 120.

[0084] The guide portion 120 is provided on the outer peripheral surface 66a side of the base portion 66 along the circumferential direction of the base portion 66, and guides the cutting fluid supplied from the cutting fluid supply unit 76 (nozzles 80, 84, 88, see FIG. 3) to the rotating cutting blade 40 to the light projecting portion 104b. For example, the guide portion 120 is a notch (groove, recess) formed from the outer peripheral surface 66a of the base portion 66 toward the center line side, and is formed concentrically with the base portion 66. Note that the base portion 66 may have an annular guide portion 120 formed continuously along the circumferential direction of the base portion 66, or a plurality of arc-shaped guide portions 120 may be arranged intermittently at predetermined intervals along the circumferential direction of the base portion 66.

[0085] The guiding portion 120 is provided at a position facing the light-projecting portion 104b. Specifically, the guiding portion 120 is formed at a position overlapping the light-projecting portion 104b in the radial direction of the blade mount 64. For example, when the detection unit 100 is installed directly above the blade mount 64 as shown in FIG. 5, the guiding portion 120 is positioned so as to overlap the light-projecting portion 104b in the Z-axis direction. Note that when the positions of the light-projecting portion 104b and the light-receiving portion 104c are reversed, the guiding portion 120 is provided at a position facing the light-receiving portion 104c.

[0086] 6(A) is a front view showing the guide portion 120. For example, the guide portion 120 is formed in the shape of a right triangle in a cross-sectional view, and includes a receiving surface 120a formed along a direction parallel to the Y-axis direction (the direction of the rotational axes of the spindle 62 and the base portion 66, and the direction perpendicular to the radial direction of the base portion 66). For example, the angle between the receiving surface 120a and the Y-axis is 5° or less, preferably 3° or less, and more preferably 1° or less.

[0087] When cutting fluid is supplied to the guide portion 120 while the blade mount 64 is rotating, the centrifugal force of the blade mount 64 causes the cutting fluid to be scattered radially in a direction perpendicular to the receiving surface 120a (see FIG. 5). As a result, the cutting fluid is efficiently supplied to the light projecting portion 104b, which is arranged opposite the guide portion 120, and foreign matter adhering to the light projecting portion 104b is removed.

[0088] There are no limitations on the shape of the guide portion 120 as long as it is possible to prevent cutting fluid from splashing toward the spindle 62. Figures 6(B) and 6(C) show guide portions (notches) 122, 124 that correspond to modified examples of the guide portion 120.

[0089] 6(B) is a front view showing the guide portion 122. Like the guide portion 120, the guide portion 122 includes a receiving surface 122a. However, the receiving surface 122a is formed so as to be inclined toward the flange portion 68. In other words, the receiving surface 122a is inclined so that the end portion on the flange portion 68 side (the left end in FIG. 6(B)) is positioned closer to the center line of the base portion 66 than the other end portion (the right end in FIG. 6(B)). This makes it less likely that cutting fluid supplied to the guide portion 122 will splash toward the spindle 62 (see FIG. 5).

[0090] 6(C) is a front view showing the guide portion 124. The guide portion 124 is an annular groove formed in a rectangular shape in a cross-sectional view, and includes a bottom surface 124a and a pair of side surfaces (inner walls) 124b, 124c connected to the bottom surface 124a.

[0091] For example, the bottom surface 124a is formed along a direction parallel to the Y-axis direction. The inclination angle of the bottom surface 124a is the same as that of the receiving surface 120a of the guide portion 120 (see FIG. 6(A)). The side surfaces 124b and 124c are formed to face each other along the radial direction of the base portion 66. The cutting fluid supplied to the guide portion 124 temporarily remains within the guide portion 124, and then is scattered radially along a direction parallel to the side surfaces 124b and 124c due to the centrifugal force of the blade mount 64.

[0092] Furthermore, instead of the notch, a protrusion (protrusion, convex portion) can be provided as the guide portion. Figures 7(A) to 7(C) show examples of the protrusion that functions as the guide portion.

[0093] 7(A) is a front view showing the guide portion (protrusion) 130. Like the guide portion 120 (see FIG. 5), the guide portion 130 is provided continuously or discontinuously along the circumferential direction of the base portion 66 on the outer circumferential surface 66a side of the base portion 66.

[0094] For example, the guide portion 130 is formed in the shape of a right triangle in a cross-sectional view and includes a receiving surface 130a formed along a direction parallel to the Y-axis direction (the direction of the rotation axis of the spindle 62 and the base portion 66, and a direction perpendicular to the radial direction of the base portion 66). For example, the angle between the receiving surface 130a and the Y-axis is 5° or less, preferably 3° or less, and more preferably 1° or less. When cutting fluid is supplied to the guide portion 130 while the blade mount 64 is rotating, the centrifugal force of the blade mount 64 causes the cutting fluid to splash radially in a direction perpendicular to the receiving surface 130a.

[0095] 7(B) is a front view showing the guide portion (protrusion) 132. Like the guide portion 130, the guide portion 132 includes a receiving surface 132a. However, the receiving surface 132a is formed so as to be inclined toward the flange portion 68. That is, the receiving surface 132a is inclined so that the end portion on the flange portion 68 side (the left end in FIG. 7(B)) is positioned closer to the center line of the base portion 66 than the other end portion (the right end in FIG. 7(B)). This makes it less likely that cutting fluid supplied to the guide portion 132 will splash toward the spindle 62 (see FIG. 5).

[0096] 7(C) is a front view showing the guide portion (protrusion) 134. The guide portion 134 is a protrusion that is rectangular in cross section, and includes a receiving surface 134a that is formed along the radial direction of the base portion 66. The cutting fluid supplied to the guide portion 124 is received by the receiving surface 134a and scattered radially along the radial direction of the base portion 66 by the centrifugal force of the blade mount 64.

[0097] By providing the above-described guide portions (cutouts) 120, 122, 124 or guide portions (protrusions) 130, 132, 134 on the base portion 66, the cutting fluid is more likely to splash toward the light-projecting portion 104b. This allows the cutting fluid to be efficiently supplied to the light-projecting portion 104b, and makes it easier to remove cutting chips adhering to the light-projecting portion 104b.

[0098] 5, the hub base 42 or the fixing nut 74 of the cutting blade 40 is disposed in a position facing the light receiving portion 104c. Specifically, the hub base 42 or the fixing nut 74 is formed in a position overlapping with the light receiving portion 104c in the radial direction of the hub base 42 and the fixing nut 74. Therefore, it is preferable to make a portion of the hub base 42 or the fixing nut 74 function as a guide portion that guides cutting fluid to the light receiving portion 104c.

[0099] Specifically, a guide portion is provided on the outer peripheral surface of the hub base 42 along the circumferential direction of the hub base 42. Furthermore, a guide portion is provided on the outer peripheral surface of the fixing nut 74 along the circumferential direction of the fixing nut 74. The guide portions of the hub base 42 and the fixing nut 74 guide the cutting fluid supplied from the cutting fluid supply unit 76 (nozzles 80, 84, 88, see FIG. 3) to the rotating cutting blade 40 to the light receiving portion 104c.

[0100] For example, the outer peripheral surface of hub base 42 is formed along a direction parallel to the Y-axis direction (the direction of the rotational axis of hub base 42, a direction perpendicular to the radial direction of hub base 42) and constitutes guide portion 42b. Furthermore, the outer peripheral surface of fixing nut 74 is formed along a direction parallel to the Y-axis direction (the direction of the rotational axis of fixing nut 74, a direction perpendicular to the radial direction of fixing nut 74) and constitutes guide portion 74b. Guide portion 42b or guide portion 74b is disposed in a position facing light receiving portion 104c. Note that if the positions of light transmitting portion 104b and light receiving portion 104c are reversed, guide portion 42b or guide portion 74b is disposed in a position facing light transmitting portion 104b.

[0101] When cutting fluid is supplied to the hub base 42 and the fixing nut 74 while the hub base 42 and the fixing nut 74 are rotating, the cutting fluid is scattered from the guide portions 42b, 74b toward the light receiving portion 104c by the centrifugal force of the hub base 42 and the fixing nut 74. This allows the cutting fluid to be efficiently supplied to the light receiving portion 104c, making it easier to remove cutting chips adhering to the light receiving portion 104c.

[0102] The guide portions 42b, 74b may each be formed so as to be inclined toward the cutting blade 44. This makes it less likely that the cutting fluid supplied to the hub base 42 and the fixing nut 74 will splash forward (to the left in FIG. 5).

[0103] Furthermore, notches (see FIGS. 6(A) to 6(C)) or protrusions (see FIGS. 7(A) to 7(C)) that function as guide portions may be provided on the outer peripheral surface of the hub base 42 and the outer peripheral surface of the fixing nut 74. In this case, the guide portion (notch or protrusion) of the hub base 42 has a receiving surface formed in a direction parallel to the Y-axis direction, or a receiving surface formed so as to be inclined toward the cutting blade 44. Furthermore, the guide portion (notch or protrusion) of the fixing nut 74 has a receiving surface formed in a direction parallel to the Y-axis direction, or a receiving surface formed so as to be inclined toward the hub base 42.

[0104] As described above, in the cutting device 2 according to this embodiment, the guide unit 120 that guides cutting fluid to the light-projecting unit 104b or the light-receiving unit 104c of the detection unit 100 is provided on the outer peripheral surface 66a side of the base unit 66 included in the blade mount 64. This allows the cutting fluid supplied to the cutting blade 40 during cutting of the workpiece 11 to be efficiently supplied to the light-projecting unit 104b or the light-receiving unit 104c. As a result, foreign matter adhering to the light-projecting unit 104b or the light-receiving unit 104c can be easily removed, preventing the foreign matter from interfering with detection of the cutting blade 40 by the detection unit 100.

[0105] Furthermore, by providing the guide portion 120 on the base portion 66 of the blade mount 64, cutting fluid can be efficiently supplied to the light-emitting portion 104b or the light-receiving portion 104c without having to mount a new nozzle on the cutting unit 38 for supplying cleaning fluid to the detection unit 100. This avoids an increase in the size of the cutting unit 38 due to the installation of a nozzle, and reduces the effort and cost required for preparing, installing, and operating the nozzle.

[0106] Although the above description has been given of the case where the hub-type cutting blade 40 is used, the cutting device 2 can also use a washer-type cutting blade (washer blade) to cut the workpiece 11. Fig. 8 is an exploded perspective view showing a cutting unit 38A to which a washer-type cutting blade 46 is attached.

[0107] The cutting blade 46 is a washer blade composed only of an annular cutting edge 48 containing abrasive grains made of diamond, cubic boron nitride, etc., and a binder that fixes the abrasive grains, made of metal, ceramics, resin, etc. A circular through-hole 46a that penetrates the cutting blade 46 in the thickness direction is provided in the center of the cutting blade 46.

[0108] Similar to the cutting unit 38 (see FIG. 2), the cutting unit 38A includes a housing 60, a spindle 62, and a blade mount 64. The cutting unit 38A further includes an annular front flange (pressing flange) 90 that supports the cutting blade 46. The front flange 90 includes an annular outer peripheral surface 90a and a circular through-hole 90b that penetrates the front flange 90 in the thickness direction.

[0109] The cutting unit 38A also includes an annular fixing nut 92 that fixes the cutting blade 46 and the front flange 90 to the blade mount 64. The fixing nut 92 has a through hole that penetrates the fixing nut 92 in the thickness direction. A screw groove (internal thread portion) that screws into the screw groove 70a of the boss portion 70 is formed on a side surface (inner peripheral surface) 92a of the fixing nut 92 that is exposed at the through hole.

[0110] When the cutting blade 46 is positioned so that the boss portion 70 is inserted into the through-hole 46a, the cutting blade 46 is supported by the blade mount 64. When the front flange 90 is positioned so that the boss portion 70 is inserted into the through-hole 90b, the front flange 90 is supported by the blade mount 64. In this state, when the fixing nut 92 is screwed into the thread groove 70a of the boss portion 70 and tightened, the front flange 90, together with the support surface 68c of the flange portion 68, sandwiches and supports the cutting blade 46. Furthermore, the fixing nut 92, together with the support surface 68c of the flange portion 68, sandwiches and fixes the cutting blade 46 and the front flange 90. In this manner, the cutting blade 46 is attached to the tip of the spindle 62.

[0111] The cutting blade 46 rotates around a rotation axis that is roughly parallel to the Y-axis direction by power transmitted from a rotation drive source via a spindle 62 and a blade mount 64. Also, a cutting fluid supply unit 76 and a detection unit 100 are attached to the cutting unit 38A, similar to the cutting unit 38 (see FIG. 3).

[0112] 9 is a partial cross-sectional front view showing the cutting unit 38A equipped with a washer-type cutting blade 46 and the detection unit 100. When the cutting blade 46 is attached to the cutting unit 38A, the height position of the detection unit 104 is adjusted, and the tip (upper end) of the cutting blade 46 is inserted into the blade insertion portion 104d. This positions the light-emitting unit 104b and the light-receiving unit 104c so that they sandwich the tip of the cutting blade 46. The detection unit 104 is positioned so that at least a portion of the light irradiated from the light-emitting unit 104b toward the light-receiving unit 104c is blocked by the cutting blade 46.

[0113] The light receiving portion 104c is disposed so as to overlap in the Z-axis direction with the front flange 90. The front flange 90 is provided with a guide portion 140 that guides cutting fluid to the light receiving portion 104c.

[0114] The guide portion 140 is provided on the outer peripheral surface 90a side of the front flange 90 along the circumferential direction of the front flange 90, and guides the cutting fluid supplied from the cutting fluid supply unit 76 (nozzles 80, 84, 88, see FIG. 3) to the rotating cutting blade 46 to the light receiving portion 104c. Note that the guide portion 140 may be a notch formed from the outer peripheral surface 90a of the front flange 90 toward the center line (see FIGS. 6(A) to 6(C)), or may be a protrusion protruding from the outer peripheral surface 90a of the front flange 90 (see FIGS. 7(A) to 7(C)).

[0115] For example, the guide portion 140 has a receiving surface formed along a direction parallel to the Y-axis direction (the direction of the rotation axis of the front flange 90, a direction perpendicular to the radial direction of the front flange 90) (see FIGS. 6(A) and 7(A)). The angle between the receiving surface and the Y-axis can be set to 5° or less, preferably 3° or less, and more preferably 1° or less. The guide portion 140 may also have a receiving surface inclined toward the cutting blade 46 (see FIGS. 6(B) and 7(B)).

[0116] The guide portion 140 is formed concentrically with the front flange 90. Note that the front flange 90 may have an annular guide portion 140 formed continuously along the circumferential direction of the front flange 90, or a plurality of arc-shaped guide portions 140 may be arranged intermittently at predetermined intervals along the circumferential direction of the front flange 90.

[0117] The guiding portion 140 is provided at a position facing the light receiving portion 104c. Specifically, the guiding portion 140 is formed at a position overlapping the light receiving portion 104c in the radial direction of the front flange 90. For example, when the detection unit 100 is installed directly above the front flange 90 as shown in FIG. 9, the guiding portion 140 is positioned so as to overlap the light receiving portion 104c in the Z-axis direction. Note that when the positions of the light projecting portion 104b and the light receiving portion 104c are reversed, the guiding portion 140 is provided at a position facing the light projecting portion 104b.

[0118] When cutting fluid is supplied to the guide portion 140 while the front flange 90 is rotating, the centrifugal force of the front flange 90 causes the cutting fluid to be scattered radially in the direction of rotation of the front flange 90. This allows the cutting fluid to be efficiently supplied to the light receiving portion 104c, which is arranged opposite the guide portion 140, and foreign matter adhering to the light receiving portion 104c is removed.

[0119] Furthermore, when the fixing nut 92 is disposed so as to face the light receiving portion 104c, a part of the fixing nut 92 may function as a guide portion that guides cutting fluid to the light receiving portion 104c. Specifically, a guide portion is provided on the outer peripheral surface of the fixing nut 92 along the circumferential direction of the fixing nut 92. For example, the outer peripheral surface of the fixing nut 92 is formed along a direction parallel to the Y-axis direction (the direction of the rotation axis of the fixing nut 92, a direction perpendicular to the radial direction of the fixing nut 92), and forms the guide portion 92b.

[0120] When cutting fluid is supplied to the fixed nut 92 while the fixed nut 92 is rotating, the cutting fluid is scattered from the guide portion 92b toward the light receiving portion 104c by the centrifugal force of the fixed nut 92. This allows the cutting fluid to be efficiently supplied to the light receiving portion 104c, making it easier to remove cutting chips adhering to the light receiving portion 104c.

[0121] The guide portion 92b may be formed so as to be inclined toward the cutting blade 46. This makes it less likely that cutting fluid supplied to the fixing nut 92 will splash forward (to the left in FIG. 9). The fixing nut 92 may have a notch (see FIGS. 6(A) to 6(C)) or a protrusion (see FIGS. 7(A) to 7(C)) on its outer circumferential surface that functions as a guide portion. In this case, the guide portion (notch or protrusion) of the fixing nut 92 has a receiving surface that is formed in a direction parallel to the Y-axis direction, or a receiving surface that is inclined toward the cutting blade 46.

[0122] In addition, the structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0123] 11 Workpiece 13 Tape (dicing tape) 15 frames 2 Cutting equipment 4 Foundation 4a,4b,4c opening 6 Cassette support stand (cassette elevator) 8 cassettes 10 Chuck table (holding table) 10a Holding surface 12 Mobile Units 14 Table Cover 16 Dustproof and water-resistant cover 18 Clamp 20 Support structure 22 Mobile Unit 24 Y-axis guide rail 26 Y-axis moving plate 28 Y-axis ball screw 30 Z-axis guide rail 32 Z-axis moving plate 34 Z-axis ball screw 36 Z-axis pulse motor 38,38A Cutting Unit 40 cutting blades 42 Hub Base 42a through hole 42b Guidance part 44 cutting blade 46 Cutting Blade 46a Through hole 48 cutting blade 50 Imaging unit 52 Cleaning unit 54 Spinner Table 54a Holding surface 56 nozzles 58 Control unit (control unit, control device) 60 Housing 62 Spindle 64 Blade Mount 64a through hole 66 Base 66a Outer surface (slanted surface) 68 Flange 68a surface 68b Convex part 68c support surface 70 Boss part (support shaft) 70a screw groove (male thread) 72 Fixing bolt 74 Fixing nut 74a Side (inner surface) 74b Guidance part 76 Cutting fluid supply unit (blade cover) 78 First connection part 80 Nozzle (Cooler Nozzle) 82 Second connection part 84 Nozzle (Shower Nozzle) 86 Third connection part 88 Nozzle (Spray Nozzle) 90 Front flange (pressing flange) 90a Outer surface 90b through hole 92 Fixing nut 92a Side (inner surface) 92b Guidance part 100 detection units 102 Frame 102a Storage section 104 Detector 104a base 104b Light projecting unit 104c Light receiving part 104d Blade insertion part (recess) 106 Light source 108 Photoelectric conversion unit 110 Ball screw 112 Pulse motor 120, 122, 124 Guidance part (notch) 120a, 122a Receiving surface 124a Bottom 124b,124c Side (inner wall) 130,132,134 Guide part (protrusion) 130a, 132a, 134a Receiving surface 140 Guidance part

Claims

1. A cutting device for cutting a workpiece, a cutting unit including a spindle and a blade mount attached to a tip of the spindle, the cutting unit cutting the workpiece with a cutting blade attached to the blade mount; a cutting fluid supply unit for supplying cutting fluid to the cutting blade; a detection unit that detects the tip of the cutting blade, the detection unit includes a light-emitting unit, a light-receiving unit that receives light from the light-emitting unit, and a blade insertion unit that is provided between the light-emitting unit and the light-receiving unit and into which the cutting blade is inserted; The blade mount comprises a truncated cone-shaped base portion having one end fixed to the tip of the spindle, a flange portion connected to the other end of the base portion and supporting the cutting blade, and a boss portion protruding from the flange portion and inserted into a through-hole provided in the center of the cutting blade, The base portion is provided on the outer peripheral surface side of the base portion along the circumferential direction of the base portion, and is characterized by having a first guide portion that guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light-emitting portion or the light-receiving portion.

2. 2. The cutting device according to claim 1, wherein the first guide portion is a notch or a protrusion provided at a position facing the light projecting portion or the light receiving portion.

3. The cutting blade includes an annular hub base having the through hole in its center, the cutting unit further includes a fixing nut that is screwed onto the boss portion and clamps and fixes the cutting blade together with the flange portion; the hub base has a second guide portion provided on the outer peripheral surface side of the hub base along the circumferential direction of the hub base, The fixing nut has a third guide portion provided on an outer peripheral surface side of the fixing nut along a circumferential direction of the fixing nut, The cutting device according to claim 1 or 2, characterized in that the second guide section and the third guide section guide the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light emitting section or the light receiving section.

4. 4. The cutting device according to claim 3, wherein the second guide portion or the third guide portion is a notch or a protrusion provided at a position facing the light projecting portion or the light receiving portion.

5. the cutting unit further includes a front flange that supports the cutting blade together with the flange portion, and a fixing nut that is screwed onto the boss portion and that clamps and fixes the cutting blade and the front flange together with the flange portion, the front flange or the fixing nut has a fourth guide portion provided on an outer peripheral surface side of the front flange or the fixing nut along a circumferential direction of the front flange or the fixing nut, 3. The cutting device according to claim 1, wherein the fourth guide portion guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light projecting portion or the light receiving portion.

6. 6. The cutting device according to claim 5, wherein the fourth guide portion is a notch or a protrusion provided at a position facing the light projecting portion or the light receiving portion.

Images