Machining tool mounting mechanism

Abstract

To provide a machining tool mounting mechanism capable of preventing metal chips from being generated by contact between a machining tool and a flange for mounting the machining tool on a spindle.SOLUTION: A processing tool mounting mechanism 1 capable of mounting a processing tool (cutting blade 121) that is fixed to a tip of a rotatably supported spindle 122 and processes a workpiece includes a fixed flange 10 having a cylindrical boss portion 11 in which a male screw 14 is formed on an outer periphery of a tip portion and a flange portion 12 that is formed to protrude in a radial direction from an axial rear end of the boss portion 11 and supports the processing tool, and a female screw 21 that is formed on an inner periphery of the fixed flange 10 and is screwed with the male screw 14 of the boss portion 11. A machining tool mounting mechanism 1 includes at least a flange part 12 of a fixed flange 10 and an annular fixing nut 20 for holding and fixing a machining tool, and the whole of the machining tool mounting mechanism 1 is made of a resin material.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a machining tool mounting mechanism. [Background technology]

[0002] A wafer (workpiece), such as a silicon wafer, having a plurality of devices such as ICs (Integrated Circuits) or LSIs (Large Scale Integration) formed on its surface has its back surface ground by a grinding device or the like to form it to a predetermined thickness, and then is divided into individual devices by a cutting device or the like, which are used in electrical equipment such as mobile phones and personal computers. In the process of dividing into the individual devices, a cutting blade is attached to the cutting device, and the individual devices are divided by cutting.

[0003] To attach a cutting blade to a cutting device, a fixed flange is attached to the tip of a rotatably supported spindle of the cutting device, and the cutting blade is attached to a boss formed in the center of the fixed flange. Then, if necessary, a clamping flange is inserted into the boss of the fixed flange and tightened with a fixing nut to attach the cutting blade. In practice, a clamping portion for clamping the cutting blade is formed on the outer periphery of the fixed flange (and the clamping flange), and the cutting blade is clamped by the clamping portion (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-132701 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the mounting mechanism of the cutting blade (machining tool) in Patent Document 1, there is a risk that the cutting blade will come into contact with the clamping portion of the fixed flange (and clamping flange), generating metal chips, which may scatter onto the workpiece and cause metal contamination.

[0006] The present invention has been made in consideration of these problems, and its object is to provide a machining tool mounting mechanism that can prevent the risk of metal chips being generated due to contact between the machining tool and the flange that mounts the machining tool to the spindle. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the machining tool mounting mechanism of the present invention is a machining tool mounting mechanism that is fixed to the tip of a rotatably supported spindle and is capable of mounting a machining tool for machining a workpiece, and is characterized in that it includes at least a fixing flange having a cylindrical boss portion with a male thread formed on the outer periphery of the tip portion, and a flange portion that supports the machining tool and is formed so as to protrude radially from the axial rear end of the boss portion, and an annular fixing nut that has a female thread formed on its inner periphery to mesh with the male thread of the boss portion and that clamps and fixes the machining tool between the flange portion of the fixing flange, and the machining tool mounting mechanism is characterized in that the entire machining tool mounting mechanism is made of a resin material.

[0008] The machining tool mounting mechanism may contain a filler.

[0009] The machining tool mounting mechanism may contain a conductive material. [Effects of the Invention]

[0010] In the present invention, at least the portion that comes into contact with the cutting blade (machining tool) is made of a resin material, and the entire product is made of a resin material. Therefore, the present invention can prevent the risk of metal chips being generated by contact with the cutting blade (machining tool). As a result, the present invention can prevent the risk of metal chips scattering onto the workpiece and causing metal contamination. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a cutting device that uses a machining tool mounting mechanism according to the first embodiment. [Figure 2] FIG. 2 is an exploded perspective view showing an example of the configuration of the machining tool mounting mechanism according to the first embodiment. [Figure 3] FIG. 3 is an exploded perspective view showing an example of the configuration of a processing tool mounting mechanism according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0013] [Embodiment 1] A processing tool mounting mechanism 1 according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting device 100 that uses the processing tool mounting mechanism 1 according to the first embodiment. Fig. 2 is an exploded perspective view showing the configuration example of the processing tool mounting mechanism 1 according to the first embodiment.

[0014] First, this specification will describe a cutting device 100 that uses a machining tool mounting mechanism 1 according to embodiment 1. As shown in Fig. 1 , the cutting device 100 includes a chuck table 110, a cutting unit 120 that includes the machining tool mounting mechanism 1, a moving unit 130, and a control unit 140. The cutting device 100 is a component of the cutting unit 120, and is an apparatus that cuts a workpiece 200 with a cutting blade 121 that is a machining tool mounted by the machining tool mounting mechanism 1.

[0015] In the first embodiment, the workpiece 200 to be processed by the cutting device 100 is, for example, a disk-shaped semiconductor device wafer or optical device wafer made of a base material such as silicon, sapphire, silicon carbide (SiC), or gallium arsenide. As shown in FIG. 1 , the workpiece 200 has a flat surface 201 on which devices 203 are formed in areas defined by a plurality of planned division lines 202 formed in a grid pattern. In the first embodiment, the workpiece 200 has an adhesive tape 205 attached to a back surface 204 behind the front surface 201, and an annular frame 206 attached to the outer edge of the adhesive tape 205. However, the present invention is not limited to this. Furthermore, in the present invention, the workpiece 200 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0016] The chuck table 110 has a disk-shaped frame body with a recess formed therein and a disk-shaped suction portion fitted into the recess. The suction portion of the chuck table 110 is formed from a porous material such as porous ceramic and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the chuck table 110 is a holding surface 111 on which the workpiece 200 is placed and which suction-holds the placed workpiece 200. In the first embodiment, the workpiece 200 is placed on the holding surface 111 with its front surface 201 facing upward, and the holding surface 111 suction-holds the placed workpiece 200 from its back surface 204 side via adhesive tape 205. The holding surface 111 and the upper surface of the frame body of the chuck table 110 are arranged on the same plane and are formed parallel to the horizontal XY plane. In the first embodiment, the frame body of the chuck table 110 is formed from a conductive metal material such as aluminum or stainless steel (SUS), and is therefore conductive. The chuck table 110 is movable in the X-axis direction parallel to the horizontal direction by the X-axis moving unit of the moving unit 130, and is rotatable around an axis parallel to the Z-axis direction, which is vertical and perpendicular to the holding surface 111, by a rotary drive source (not shown).

[0017] As shown in FIGS. 1 and 2, the cutting unit 120 includes a cutting blade 121, a spindle 122, and a machining tool mounting mechanism 1 according to the first embodiment. The spindle 122 is supported so as to be rotatable about an axis parallel to the horizontal direction and parallel to the Y-axis direction, which is perpendicular to the X-axis direction. The outer periphery of the tip of the spindle 122 is tapered so that the outer diameter gradually decreases toward the tip (-Y direction shown in FIG. 2). The cutting blade 121 is mounted to the tip of the spindle 122 via the machining tool mounting mechanism 1.

[0018] The cutting blade 121 is an example of a machining tool for machining the workpiece 200 of the present invention. In the first embodiment, the cutting blade 121 is a so-called hub blade, and as shown in FIG. 2 , includes a disk-shaped circular base 151 with a mounting hole 153 formed in the center and an annular cutting edge portion 152 formed on the outer edge of the circular base 151 and protruding from the outer edge of the circular base 151. The cutting edge portion 152 is formed on the outer edge of the surface that faces the base end (+Y direction shown in FIG. 2 ) of the circular base 151 when the cutting blade 121 is mounted on the tip of the spindle 122. Hereinafter, the side of the cutting blade 121 on which the cutting edge portion 152 is formed will be referred to as the base end side (axial) of the cutting blade 121. Furthermore, the side opposite to the side on which the cutting edge portion 152 is formed, i.e., the side facing the circular base 151, will be referred to as the tip end side (axial) of the cutting blade 121.

[0019] The cutting blade 121 is attached to the tip of the spindle 122 via the machining tool attachment mechanism 1 through an attachment hole 153, and is rotated by the spindle 122, which serves as the rotation axis, to cut the workpiece 200. The circular base 151 is made of metal such as an aluminum alloy, but the present invention is not limited to this and may be made of a resin material as described below. The cutting blade portion 152 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness.

[0020] The spindle 122 is provided so as to be movable in the Y-axis direction by a Y-axis movement unit of the movement unit 130 relative to the workpiece 200 held on the chuck table 110, and is provided so as to be movable in the Z-axis direction by a Z-axis movement unit of the movement unit 130. The cutting blade 121 attached to the tip of the spindle 122 and the machining tool attachment mechanism 1 that attaches the cutting blade 121 to the tip of the spindle 122 move together with the spindle 122.

[0021] The cutting device 100 sets the cutting blade 121 attached to the tip of the spindle 122 by the moving unit 130 at a predetermined position relative to the workpiece 200 held on the chuck table 110, and moves the cutting blade 121 relative to the workpiece 200 along the planned dividing line 202 while rotating, thereby cutting the workpiece 200 along the planned dividing line 202 with the cutting blade 121.

[0022] The control unit 140 controls the operation of each component of the cutting device 100 and causes the cutting device 100 to perform a cutting process using the cutting unit 120. In the first embodiment, the control unit 140 includes a computer system. The computer system included in the control unit 140 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as a ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 140 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 140 and outputs control signals for controlling the cutting device 100 to each component of the cutting device 100 via the input / output interface device of the cutting device 100.

[0023] Next, this specification will describe a machining tool mounting mechanism 1 according to embodiment 1. As shown in Fig. 2, the machining tool mounting mechanism 1 according to embodiment 1 includes at least a fixing flange 10 and a fixing nut 20. In the example of embodiment 1 shown in Fig. 2, the machining tool mounting mechanism 1 further includes a fixing screw 30.

[0024] As shown in Fig. 2, the fixing flange 10 has a cylindrical boss portion 11 that extends in the axial direction and has a male thread 14 formed on the outer periphery of its tip portion, and a disk-shaped flange portion 12 that is formed to protrude radially outward from the axial rear end of the boss portion 11. Here, the (axial) tip of the fixing flange 10 refers to one of the axial ends of the boss portion 11 that faces the tip side when the fixing flange 10 is fixed to the tip of the rotation shaft of the spindle 122. The (axial) base end of the fixing flange 10 refers to the other of the axial ends of the boss portion 11 that faces the base end when the fixing flange 10 is fixed to the tip of the rotation shaft of the spindle 122. The tip portion of the boss portion 11 refers to a portion that includes the tip of the boss portion 11 and extends a certain length from the tip to the center between the tip and base ends in the axial direction.

[0025] In the first embodiment, the fixing flange 10 may further have a cylindrical portion 13 that protrudes further toward the base end side of the flange portion 12 and is formed integrally with the flange portion 12, as shown in Fig. 2. When the fixing flange 10 is attached to the tip of the spindle 122, the central axes of the boss portion 11, flange portion 12, and cylindrical portion 13 overlap with each other, and this central axis is aligned along the Y-axis direction.

[0026] The fixed flange 10 has an attachment hole formed on the inside, spanning the boss portion 11, the flange portion 12, and the cylindrical portion 13. The attachment hole of the fixed flange 10 is tapered so that the inner diameter gradually decreases from the base end toward the tip, and is fitted tightly onto the outer periphery of the tip of the spindle 122. The fixed flange 10 is fixed to the tip of the rotating shaft of the spindle 122 and attached rotatably together with the spindle 122 by inserting a fixing screw 30 into the attachment hole of the fixed flange 10 and screwing it into a threaded hole formed in the tip of the rotating shaft of the spindle 122 and tightening it.

[0027] The cutting blade 121 is attached from the base end side to the boss portion 11 thus formed in the center of the fixing flange 10. The boss portion 11 is inserted from the base end side into the attachment hole 153 of the circular base 151 of the cutting blade 121, as shown in Fig. 2. The outer peripheral surface of the boss portion 11 on the base end side from the tip end where the male thread 14 is formed faces the inner peripheral surface of the attachment hole 153 of the circular base 151 of the attached cutting blade 121, and this outer peripheral surface on the base end side supports the inner peripheral surface of the attachment hole 153 of the circular base 151 of the cutting blade 121.

[0028] The flange 12 has a convex portion that protrudes in an annular shape toward the tip end on the surface facing the tip end, and a flat annular support surface 15 that is perpendicular to the axial direction is formed on the tip end side of this convex portion. The flange 12 supports, with the support surface 15, the base end surface of the cutting edge portion 152 of the cutting blade 121 when the boss portion 11 is inserted into the mounting hole 153.

[0029] The fixing nut 20 is formed in an annular shape with an attachment hole formed in the center. As shown in Fig. 2, the fixing nut 20 has an internal thread 21 formed on the inner periphery of the central attachment hole, which threadably engages with the external thread 14 of the boss portion 11. The fixing nut 20 has a flat, annular support surface 22 formed on the surface facing the base end side, which is perpendicular to the axial direction. The fixing nut 20 is tightened by having the internal thread 21 threaded onto the external thread 14 formed on the outer periphery of the tip portion of the boss portion 11, which is inserted into the attachment hole 153 of the cutting blade 121 from the base end side.

[0030] When the fixing nut 20 is tightened in this manner, the support surface 22 supports the tip side surface of the circular base 151 of the cutting blade 121, clamping the cutting blade 121 axially between it and the support surface 15 of the flange portion 12 of the fixed flange 10, fixing the cutting blade 121 together with the flange portion 12 of the fixed flange 10 to the tip of the spindle 122, and mounting the cutting blade 121 rotatably together with the spindle 122.

[0031] In the machining tool mounting mechanism 1, at least the support surface 15 of the flange portion 12 that comes into contact with the base end side surface of the cutting edge portion 152 of the cutting blade 121 is made of a resin material. This makes it possible for the machining tool mounting mechanism 1 to prevent the risk of metal chips being generated due to contact between the base end side surface of the cutting edge portion 152 of the cutting blade 121 and the support surface 15 of the flange portion 12.

[0032] In the machining tool mounting mechanism 1, the entire fixed flange 10, which is the member that comes into contact with the cutting blade 121, is preferably made of a resin material. This not only prevents the machining tool mounting mechanism 1 from generating metal chips due to contact between the base end surface of the cutting edge portion 152 of the cutting blade 121 and the support surface 15 of the flange portion 12, but also enables the cutting blade 121 to be mounted more stably so that it can rotate together with the spindle 122.

[0033] Furthermore, the machining tool mounting mechanism 1 may further include a structure in which the entire fixing nut 20 and the entire fixing screw 30 are made of a resin material, in which case the cutting blade 121 can be more stably mounted to the tip of the spindle 122 and rotatably attached to the spindle 122.

[0034] In the first embodiment, the machining tool mounting mechanism 1 is formed and manufactured using a three-dimensional printing machine (3D printer), an injection molding machine, or the like. In the first embodiment, the resin material constituting the machining tool mounting mechanism 1, i.e., the resin material used to form and manufacture the machining tool mounting mechanism 1, is, for example, ABS (acrylonitrile butadiene styrene) resin, ASA (acrylate styrene acrylonitrile) resin, PP (polypropylene) resin, epoxy resin, acrylic resin, or the like. Because the machining tool mounting mechanism 1 is made of such a resin material, it can have sufficient strength to stably mount the cutting blade 121 to the tip of the spindle 122 so as to be rotatable together with the spindle 122.

[0035] The resin material constituting the machining tool mounting mechanism 1 may contain a filler. In the first embodiment, the filler contained in the resin material constituting the machining tool mounting mechanism 1 is, for example, a powder material mainly composed of silicon carbide (SiC) such as green carbonite (GC), a powder material mainly composed of alumina (Al2O3) such as white alundum (WA), or a powder material mainly composed of silica (SiO2). By containing such a filler in the resin material constituting the machining tool mounting mechanism 1, the machining tool mounting mechanism 1 can be provided with more sufficient strength.

[0036] The resin material constituting the machining tool mounting mechanism 1 may contain a conductive material. In the first embodiment, the conductive material contained in the resin material constituting the machining tool mounting mechanism 1 is, for example, a powder material mainly composed of carbon. By including such a conductive material in the resin material constituting the machining tool mounting mechanism 1, the machining tool mounting mechanism 1 acquires electrical conductivity and establishes electrical continuity. This enables the machining tool mounting mechanism 1 to perform a so-called contact setup, in which the tip of the cutting edge portion 152 of the cutting blade 121 attached to the tip of the spindle 122 by the machining tool mounting mechanism 1 is brought into contact with the conductive frame of the chuck table 110, and electrical continuity is detected between the machining tool mounting mechanism 1, the cutting blade 121, and the frame of the chuck table 110, thereby detecting the establishment of electrical continuity.

[0037] The machining tool mounting mechanism 1 according to the first embodiment having the above-described configuration is made entirely of a resin material, with at least the portion that comes into contact with the cutting edge portion 152 of the cutting blade 121 (machining tool), which is a hub blade. Therefore, the machining tool mounting mechanism 1 according to the first embodiment has the effect of preventing the risk of metal chips being generated by contact with the cutting edge portion 152 of the cutting blade 121 (machining tool). As a result, the machining tool mounting mechanism 1 according to the first embodiment has the effect of preventing the risk of metal chips being scattered onto the workpiece 200 and causing metal contamination.

[0038] Furthermore, the machining tool mounting mechanism 1 according to the first embodiment contains a filler in the resin material that constitutes the machining tool mounting mechanism 1. Therefore, the machining tool mounting mechanism 1 according to the first embodiment can have sufficient strength to more fully withstand the cutting blade 121 being attached to the tip of the spindle 122 and rotating together with the spindle 122.

[0039] Furthermore, in the machining tool mounting mechanism 1 according to the first embodiment, a conductive material is contained in the resin material that constitutes the machining tool mounting mechanism 1. Therefore, the machining tool mounting mechanism 1 according to the first embodiment has electrical conductivity and is electrically conductive, which enables detection of the tip position of the cutting edge portion 152 of the cutting blade 121 by implementing a contact-type setup.

[0040] Next, the inventors of the present invention confirmed the effects of the machining tool mounting mechanism 1 according to embodiment 1. As an "Example," a workpiece 200 was cut using a cutting blade 121 attached to the tip of a spindle 122 by the machining tool mounting mechanism 1 according to embodiment 1 in a cutting device 100 at a rotational speed of 30,000 rpm (rotations per minute). The state of the machining tool mounting mechanism 1 according to embodiment 1 after cutting and the quality of the cut groove formed in the workpiece 200 were confirmed. Furthermore, as a "Comparative Example," a conventional machining tool mounting mechanism was used in which the shape and size of the machining tool mounting mechanism 1 according to embodiment 1 was maintained but the constituent material was stainless steel instead of resin. The cutting blade 121 was attached to the tip of the spindle 122 at a rotational speed of 30,000 rpm, the same as in the Example. The state of the conventional machining tool mounting mechanism after cutting and the quality of the cut groove formed in the workpiece 200 were confirmed. The quality of the cut grooves in the "Example" and the "Comparative Example" were compared.

[0041] Specifically, to confirm the quality of the cutting grooves, images were taken of the cutting grooves of the "Example" and the cutting grooves of the "Comparative Example", and the cutting grooves were detected based on each image, and the width of the cutting grooves, chipping associated with the cutting grooves, meandering of the cutting grooves, and deviations between the position of the cutting grooves and the position to be cut were detected.

[0042] As a result, the state of the machining tool mounting mechanism 1 according to embodiment 1 after cutting in the "Example" and the state of the conventional machining tool mounting mechanism after cutting in the "Comparative Example" were both good and problem-free. This confirmed that even when the machining tool mounting mechanism 1 made of a resin material according to embodiment 1 was used instead of the conventional stainless steel machining tool mounting mechanism, the cutting blade 121 had sufficient strength and durability for cutting at a rotational speed of 30,000 rpm, which is significantly faster than when cutting is generally performed using the cutting device 100.

[0043] Furthermore, it was confirmed that there were no differences between the cutting grooves of the "Example" and the "Comparative Example" in terms of the width of the cutting groove, chipping associated with the cutting groove, meandering of the cutting groove, or misalignment between the position of the cutting groove and the position to be cut. This confirmed that the quality of the cutting grooves of the "Example" and the "Comparative Example" was equivalent, even when the cutting blade 121 was rotated at a speed of 30,000 rpm, which is significantly faster than the rotational speed typically used when cutting using the cutting device 100. Therefore, it was found that the quality of the cutting grooves formed (cutting quality, machinability) could be sufficiently maintained even when the resin-made cutting tool mounting mechanism 1 according to embodiment 1 was used instead of a conventional stainless steel-made cutting tool mounting mechanism.

[0044] [Embodiment 2] A processing tool mounting mechanism 1-2 according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 3 is an exploded perspective view showing an example of the configuration of the processing tool mounting mechanism 1-2 according to the second embodiment. In Fig. 3, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0045] 3, the machining tool mounting mechanism 1-2 according to the second embodiment is a modification of the machining tool mounting mechanism 1 according to the first embodiment, in which a cutting blade 121, which is a so-called hub blade, is mounted on the tip of the spindle 122, but instead a cutting blade 121-2, which is a so-called hubless blade, is mounted on the tip of the spindle 122. The cutting blade 121-2 is the cutting blade 121 in which the circular base 151 is omitted, leaving only an annular cutting blade portion 152 and an attachment hole 153 in the center.

[0046] The machining tool mounting mechanism 1-2 according to the second embodiment is thus obtained by modifying the machining tool mounting mechanism 1 according to the first embodiment so as to further include a clamping flange 40. The clamping flange 40 is formed in an annular shape with a mounting hole 41 formed in the center. The clamping flange 40 has a flat annular support surface 42 formed on the surface facing the base end side, the support surface 42 being perpendicular to the axial direction.

[0047] In the machining tool mounting mechanism 1-2 according to the second embodiment, the shapes of the boss portion 11, flange portion 12, and cylindrical portion 13 of the fixing flange 10, and the fixing nut 20 in the machining tool mounting mechanism 1 according to the first embodiment are changed to match the shape of the cutting blade 121-2, etc. Note that in the machining tool mounting mechanism 1-2 according to the second embodiment, the boss portion 11, flange portion 12, and cylindrical portion 13 of the fixing flange 10, the fixing nut 20, and the fixing screw 30 have the same functions as in the first embodiment. Furthermore, in the machining tool mounting mechanism 1-2 according to the second embodiment, the materials constituting the boss portion 11, flange portion 12, and cylindrical portion 13 of the fixing flange 10, the fixing nut 20, and the fixing screw 30 are the same as in the first embodiment.

[0048] In the second embodiment, as shown in FIG. 3 , the boss portion 11 is inserted from the base end side into the mounting hole 153 of the cutting blade 121-2 and attached. The boss portion 11 is further inserted from the base end side into the mounting hole 41 of the clamping flange 40 and attached. The outer peripheral surface of the boss portion 11, which is closer to the base end than the tip end where the male thread 14 is formed, faces the inner peripheral surface of the mounting hole 153 of the attached cutting blade 121-2, and this outer peripheral surface on the base end side supports the inner peripheral surface of the mounting hole 153 of the cutting blade 121-2. The flange portion 12 supports the base end side surface of the cutting blade 121-2 where the boss portion 11 is inserted into the mounting hole 153 with the annular support surface 15. The clamping flange 40 supports the tip side surface of the cutting blade 121-2 where the boss portion 11 is inserted into the mounting hole 153 with the annular support surface 42.

[0049] In the second embodiment, the fixing nut 20 is tightened by having the female thread 21 threadedly engaged with the male thread 14 formed on the outer periphery of the tip of the boss portion 11, which is inserted from the base end side sequentially into the mounting hole 153 of the cutting blade 121-2 and the mounting hole 41 of the clamping flange 40. By tightening the fixing nut 20 in this manner, the cutting blade 121-2 is clamped in the axial direction between the support surface 15 of the flange portion 12 of the fixing flange 10 and the annular support surface 42 of the clamping flange 40, and the cutting blade 121-2 is fixed to the tip of the spindle 122 together with the flange portion 12 of the fixing flange 10 and the clamping flange 40, so that the cutting blade 121-2 is rotatably mounted together with the spindle 122.

[0050] In the machining tool mounting mechanism 1-2 according to the second embodiment, at least the support surface 42 of the clamping flange 40, which comes into contact with the tip end surface of the cutting blade 121-2, is made of a resin material. This prevents the machining tool mounting mechanism 1-2 from generating metal chips due to contact between the tip end surface of the cutting blade 121-2 and the support surface 42 of the clamping flange 40. In the machining tool mounting mechanism 1-2, it is preferable that the entire clamping flange 40, which is the member that comes into contact with the cutting blade 121-2, is made of a resin material. This not only prevents the machining tool mounting mechanism 1-2 from generating metal chips due to contact between the tip end surface of the cutting blade 121-2 and the support surface 42 of the clamping flange 40, but also allows the cutting blade 121-2 to be mounted more stably so that it can rotate together with the spindle 122.

[0051] The processing tool mounting mechanism 1-2 according to the second embodiment is formed and manufactured using a three-dimensional printing machine (3D printer), an injection molding machine, etc., similarly to the processing tool mounting mechanism 1 according to the first embodiment. The resin material constituting the processing tool mounting mechanism 1-2 according to the second embodiment is the same as the resin material constituting the processing tool mounting mechanism 1 according to the first embodiment.

[0052] The machining tool mounting mechanism 1-2 according to the second embodiment having the above-described configuration is the machining tool mounting mechanism 1 according to the first embodiment modified to further include a clamping flange 40, and the clamping flange 40 is also modified so that at least the portion that comes into contact with the cutting blade 121-2 (machining tool), which is a hubless blade, is made of a resin material, and the entirety of the clamping flange 40 is made of a resin material. Therefore, the machining tool mounting mechanism 1-2 according to the second embodiment achieves the same effects as those of the first embodiment, even when the cutting blade 121-2, which is a hubless blade, is mounted on the tip of the spindle 122.

[0053] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0054] 1,1-2 Machining tool mounting mechanism 10 Fixed flange 11 Boss section 12 Flange 14 Male thread 20 Fixing nut 21 Female thread 30 fixing screws 40 Clamping flange 121, 121-2 Cutting blade (an example of a processing tool according to the present invention) 122 Spindle 200 Workpiece

Claims

1. A machining tool mounting mechanism capable of mounting a machining tool for machining a workpiece, the machining tool being fixed to a tip of a rotatably supported spindle, a fixing flange having a cylindrical boss portion having a male thread formed on the outer periphery of a tip portion thereof, and a flange portion formed to support the machining tool and projecting radially from the axial rear end of the boss portion; a female thread that is threadably engaged with the male thread of the boss portion is formed on an inner periphery, and the fixing flange includes at least an annular fixing nut that clamps and fixes the flange portion of the fixing flange and the machining tool, The machining tool mounting mechanism is entirely made of a resin material. A machining tool mounting mechanism characterized by:

2. The machining tool mounting mechanism contains a filler. The machining tool mounting mechanism according to claim 1.

3. The machining tool mounting mechanism contains a conductive material.

3. The machining tool mounting mechanism according to claim 1 or 2.

Images