Raman microscope

Abstract

To provide a Raman microscope capable of easily acquiring Raman spectra at a plurality of points in a depth direction.SOLUTION: A depth measurement processing part 111 performs depth measurement by acquiring Raman spectra at a plurality of points in a depth direction while changing a focal position of a laser beam along the depth direction which is an irradiation direction of the laser beam on a sample. A display processing part 103 displays an input screen for inputting a parameter when performing depth measurement on the sample in association with a surface image of the sample on a stage. The parameter includes a range in which the focal position of the laser light is changed along the depth direction and an interval between the plurality of points in the range.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a Raman microscope that acquires a Raman spectrum by irradiating a sample on a stage with a focused laser beam and receiving Raman scattered light from the sample with a detector. [Background technology]

[0002] In a Raman microscope, which is an example of a Raman spectroscopic device, a laser beam is focused and irradiated onto a sample on a stage, and Raman scattered light from the sample is received by a detector (see, for example, Patent Document 1 below). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 10-90064 Summary of the Invention [Problem to be solved by the invention]

[0004] In the Raman microscope described above, it is possible to acquire Raman spectra at multiple points in the depth direction, which is the direction in which the laser light is irradiated onto the sample, by changing the focal position of the laser light along the depth direction. In this case, the user needs to perform tasks such as changing the height of the stage, which is a cumbersome process.

[0005] The present invention has been made in view of the above-mentioned circumstances, and has an object to provide a Raman microscope that can easily acquire Raman spectra at multiple points in the depth direction. [Means for solving the problem]

[0006] A first aspect of the present invention is a Raman microscope that irradiates a sample on a stage with a focused laser beam and receives Raman scattered light from the sample with a detector to obtain a Raman spectrum, and includes a depth measurement processor and a display processor. The depth measurement processor performs depth measurement by changing the focal position of the laser beam along a depth direction, which is the direction of irradiation of the laser beam on the sample, and obtaining Raman spectra at multiple points in the depth direction. The display processor displays an input screen for inputting parameters for performing the depth measurement on the sample, in association with a surface image of the sample on the stage. The parameters include a range over which the focal position of the laser beam is changed along the depth direction and the spacing between the multiple points within that range. [Effects of the Invention]

[0007] According to the present invention, Raman spectra can be easily obtained at multiple points in the depth direction. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram illustrating an example of the configuration of a Raman microscope. [Figure 2] FIG. 1 is a schematic diagram illustrating an example of the configuration of a Raman microscope. [Figure 3] FIG. 2 is a block diagram showing an example of the electrical configuration of a Raman microscope. [Figure 4] FIG. 4 is a diagram showing an example of an operation screen displayed on a display unit. [Figure 5] FIG. 4 is a diagram showing an example of an operation screen displayed on a display unit. [Figure 6] FIG. 4 is a diagram showing an example of an operation screen displayed on a display unit. DETAILED DESCRIPTION OF THE INVENTION

[0009] 1. Overall configuration of Raman microscope 1 and 2 are schematic diagrams showing an example of the configuration of a Raman microscope 1. The Raman microscope 1 in this embodiment is capable of performing not only Raman spectroscopic analysis but also infrared spectroscopic analysis. Fig. 1 shows the state when Raman spectroscopic analysis is performed, and Fig. 2 shows the state when infrared spectroscopic analysis is performed.

[0010] The Raman microscope 1 is equipped with a plate 2, a stage 3, a drive unit 4, an objective optical element 5, an objective optical element 6, a Raman light detection system 7, an infrared light detection system 8, and a switching mechanism 9. A sample is placed on the stage 3 while being fixed to the plate 2. The stage 3 can be displaced in the horizontal or vertical direction by driving the drive unit 4. The drive unit 4 includes, for example, a motor and a gear.

[0011] The objective optical element 5 is used for Raman spectroscopy and is configured, for example, by combining a convex lens and a concave lens. When performing Raman spectroscopy, the objective optical element 5 faces the sample on the plate 2, as shown in FIG. 1. In other words, the objective optical element 5 is positioned directly above the sample on the plate 2.

[0012] The objective optical element 6 is used for infrared spectroscopic analysis and is, for example, a Cassegrain mirror that combines a concave mirror and a convex mirror. When infrared spectroscopic analysis is performed, the objective optical element 6 faces the sample on the plate 2, as shown in Figure 2. In other words, the objective optical element 6 is positioned directly above the sample on the plate 2.

[0013] The Raman light detection system 7 is used when performing Raman spectroscopic analysis, and includes a light source A, an optical imaging element 10, and a Raman spectrometer 71. The light emitted from the light source A is, for example, laser light having a wavelength in the visible or near-infrared range, and the wavelength is approximately several μm to several tens of μm. As shown in FIG. 1, when performing Raman spectroscopic analysis, the light emitted from the light source A is guided to an objective optical element 5 by various optical elements (not shown).

[0014] Light incident on the objective optical element 5 is focused on the sample fixed to the plate 2. That is, light from the light source A is collected by passing through the objective optical element 5 and is irradiated onto a focal position on or within the sample. Raman scattered light is generated from the sample irradiated with light from the light source A, and this light is guided to the Raman light detection system 7 by various optical elements (not shown). A portion of the light guided from the objective optical element 5 to the Raman light detection system 7 is incident on the optical imaging element 10, and the remaining light is incident on the Raman spectrometer 71.

[0015] The optical imaging element 10 captures a visible image of the sample surface where Raman scattered light is generated. The optical imaging element 10 includes, for example, a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor, and is configured to be able to capture still or moving images of the sample. The optical imaging element 10 can capture all or at least one of bright-field images, dark-field images, phase-contrast images, fluorescent images, and polarizing microscope images of the sample.

[0016] The Raman spectrometer 71 detects the intensity for each wavelength by dispersing the Raman scattered light from the sample. A Raman spectrum can be obtained based on the detection signal from this Raman spectrometer 71. The Raman spectrum is expressed as intensity on the vertical axis and wavelength on the horizontal axis. In this way, the Raman microscope 1 can obtain a Raman spectrum by receiving Raman scattered light from the sample with a detector (Raman spectrometer 71).

[0017] The infrared light detection system 8 is used when performing infrared spectroscopic analysis, and includes a light source B, an optical imaging element 11, and an infrared spectrometer 81. The light emitted from the light source B is infrared light emitted, for example, from a ceramic heater, and has a wavelength of approximately 405 nm to 1064 nm, and in many cases, light having a combination of wavelengths of 532 nm and 785 nm is used. As shown in Figure 2, when performing infrared spectroscopic analysis, the light emitted from the light source B is guided to the objective optical element 6 by various optical elements (not shown).

[0018] Light incident on the objective optical element 6 is focused on the sample fixed to the plate 2. That is, light from the light source B is collected by passing through the objective optical element 6 and is irradiated onto a focal position on or within the sample. Light reflected from the sample irradiated with light from the light source B is guided to the infrared light detection system 8 by various optical elements (not shown). A portion of the light guided from the objective optical element 6 to the infrared light detection system 8 is incident on the optical imaging element 11, and the remaining light is incident on the infrared spectrometer 81.

[0019] The optical imaging element 11 captures a visible image of the sample surface reflecting infrared light. The optical imaging element 11 may have the same configuration as the optical imaging element 10. Like the optical imaging element 10, the optical imaging element 11 can capture still or moving images of the sample, and can capture all or at least one of bright-field images, dark-field images, phase-contrast images, fluorescent images, and polarizing microscope images of the sample.

[0020] The infrared spectrometer 81 is, for example, a Fourier transform infrared spectrometer. The spectrometer provided in the infrared spectrometer 81 may be a Michelson interference spectrometer. The infrared spectrometer 81 detects the intensity for each wavelength by dispersing the infrared light reflected from the sample. An infrared spectrum can be obtained based on the detection signal from this infrared spectrometer 81. The infrared spectrum is represented by the intensity on the vertical axis and the wavelength on the horizontal axis. In this way, the Raman microscope 1 can obtain an infrared spectrum by receiving the infrared light reflected from the sample with a detector (infrared spectrometer 81).

[0021] The switching mechanism 9 switches between Raman spectroscopy and infrared spectroscopy. Specifically, the switching mechanism 9 drives the stage 3 using the drive unit 4 to adjust the positional relationship between the objective optical element 5 and the plate 2, and the positional relationship between the objective optical element 6 and the plate 2. When switched to Raman spectroscopy, the positional relationship between the objective optical element 5 and the plate 2 is adjusted, so that the focal position of the light collected by the objective optical element 5 is aligned with a predetermined measurement position on the sample. On the other hand, when switched to infrared spectroscopy, the positional relationship between the objective optical element 6 and the plate 2 is adjusted, so that the focal position of the light collected by the objective optical element 6 is aligned with a predetermined measurement position on the sample.

[0022] 2. Electrical configuration of the Raman microscope 3 is a block diagram showing an example of the electrical configuration of the Raman microscope 1. The Raman microscope 1 includes a control unit 100, a storage unit 200, a display unit 300, and an operation unit 400 in addition to the above-mentioned units.

[0023] The control unit 100 includes, for example, a CPU (Central Processing Unit). The control unit 100 functions as a Raman analysis processing unit 101, an infrared analysis processing unit 102, a display processing unit 103, and the like when the CPU executes a program.

[0024] The Raman analysis processor 101, in a state switched to Raman spectroscopic analysis by the switching mechanism 9, executes processing for performing Raman spectroscopic analysis on the sample on the stage 3. That is, it irradiates the sample with focused laser light from the light source A and acquires a Raman spectrum based on a detection signal from the Raman spectrometer 71. The Raman analysis processor 101 can also acquire a surface image of the sample during Raman spectroscopic analysis based on a visible image captured by the optical imaging element 10. During Raman spectroscopic analysis, the analysis may be performed while moving the stage 3 by controlling the drive unit 4.

[0025] The infrared analysis processing unit 102, in a state switched to infrared spectroscopic analysis by the switching mechanism 9, executes processing for performing infrared spectroscopic analysis on the sample on the stage 3. That is, it irradiates the sample with focused infrared light from the light source B, and acquires an infrared spectrum based on a detection signal from the infrared spectrometer 81. The infrared analysis processing unit 102 can also acquire a surface image of the sample during infrared spectroscopic analysis based on a visible image captured by the optical imaging element 11. During infrared spectroscopic analysis, the analysis may be performed while moving the stage 3 by controlling the driving unit 4.

[0026] Data obtained during Raman spectroscopic analysis by processing in the Raman analysis processing unit 101 and data obtained during infrared spectroscopic analysis by processing in the infrared analysis processing unit 102 are stored in the storage unit 200. The storage unit 200 includes a nonvolatile memory such as a hard disk. The storage unit 200 stores, for example, a Raman spectrum obtained by Raman spectroscopic analysis and an infrared spectrum obtained by infrared spectroscopic analysis.

[0027] The display processing unit 103 controls the display on the display unit 300. That is, under the control of the display processing unit 103, various screens such as an operation screen are displayed on the display screen of the display unit 300. The display unit 300 includes, for example, a liquid crystal display, but is not limited to this. Under the control of the display processing unit 103, the display screen of the display unit 300 can display the Raman spectrum or infrared spectrum stored in the storage unit 200.

[0028] The operation unit 400 is used by the user to perform input operations, and includes, for example, a keyboard or a mouse, but is not limited to these. When an operation screen is displayed on the display unit 300, input operations can be performed on the operation screen by operating the operation unit 400. When an input operation is performed using the operation unit 400, the input information (such as numerical values) is reflected and displayed on the operation screen of the display unit 300.

[0029] In this embodiment, the Raman analysis processing unit 101 includes a depth measurement processing unit 111. The depth measurement processing unit 111 performs depth measurement by controlling the driving unit 4 during Raman spectroscopic analysis to acquire Raman spectra at multiple points while moving the stage 3 in the vertical direction. That is, during depth measurement, the distance between the sample and the objective optical element 5 changes as the stage 3 moves in the vertical direction.

[0030] Since the focal position of the laser light directed from the objective optical element 5 to the sample is constant, during depth measurement, the focal position of the laser light relative to the sample changes with the movement of the stage 3. In other words, the focal position of the laser light irradiated onto the sample during depth measurement is not only on the sample but also inside the sample.

[0031] Specifically, in the depth measurement, the focal position of the laser light is changed along the depth direction, which is the direction of irradiation of the laser light onto the sample (optical axis direction), and Raman spectra are acquired at predetermined intervals based on detection signals from the Raman spectrometer 71. As a result, Raman spectra are acquired at a plurality of points separated by the above-mentioned predetermined intervals in the depth direction, based on detection signals from the Raman spectrometer 71. The above-mentioned predetermined intervals can be set in advance by the user.

[0032] The display processing unit 103 can display an input screen for inputting parameters for performing depth measurement on the display unit 300. The parameters include the above-mentioned predetermined interval, the range in the depth direction for performing depth measurement, or the diameter (spot diameter) of the laser light on the surface image of the sample. The depth measurement processing unit 111 performs depth measurement based on the parameters input on the input screen.

[0033] 3.Example of operation screen 4 to 6 are diagrams showing an example of an operation screen 500 displayed on the display unit 300. This operation screen 500 includes a surface image display area 501 and a spectrum display area 502. However, the surface image display area 501 and the spectrum display area 502 are not limited to being displayed in a manner in which both are included in the operation screen 500, and at least one of them may be displayed on a screen different from the operation screen 500.

[0034] The surface image display area 501 displays a surface image of the sample on the stage 3. That is, a visible image captured by the optical imaging element 10 is displayed in the surface image display area 501. The surface image of the sample displayed in the surface image display area 501 may be a real-time image captured by the optical imaging element 10, or a still image captured at a predetermined timing. When the stage 3 is moved in the horizontal direction (the direction intersecting the depth direction), the area of ​​the surface image of the sample displayed in the surface image display area 501 may change.

[0035] The user can select a measurement position on the surface image of the sample displayed in the surface image display area 501. The measurement position is an arbitrary position selected within a horizontal plane, and depth measurement is performed along the depth direction at the selected measurement position.

[0036] Only one measurement position may be selected, or multiple measurement positions may be selected. In the example of FIG. 4, three measurement positions 511 are selected. The multiple measurement positions 511 are selected to be aligned in a straight line. The measurement positions 511 are selected by operating the operation unit 400, but the selection method is arbitrary. For example, if the operation unit 400 includes a pointing device such as a mouse, multiple measurement positions 511 can be easily selected by a drag operation or the like. The distance between the multiple measurement positions 511 in the horizontal direction may or may not be constant.

[0037] The light source A in the Raman light detection system 7 may be capable of emitting laser light at multiple wavelengths. In this case, the measurement position selected on the surface image of the sample displayed in the surface image display area 501 may be selectable for each wavelength.

[0038] After selecting the measurement position 511 as described above, the user selects the sample measurement key 503. The sample measurement key 503 is a selection key for displaying an input screen for inputting parameters for depth measurement. When the sample measurement key 503 is selected, an input screen 504 is displayed on the display unit 300, as shown in FIG.

[0039] In this example, an input screen 504 is displayed as a pop-up on the display unit 300 as a screen different from the operation screen 500. As a result, the surface image display area 501 and the input screen 504 are simultaneously displayed on the display unit 300, so that the input screen 504 can be displayed in association with the surface image of the sample. However, the present invention is not limited to this configuration, and the input screen 504 may be displayed as an input area within the operation screen 500.

[0040] The input screen 504 includes parameters for depth measurement, such as the range (depth range) over which the focal position of the laser light is changed along the depth direction, and the interval (step width) between multiple points at which Raman spectra are acquired within the depth range. The depth range can be defined by the upper and lower ends in the depth direction. The step width may or may not be a constant interval between multiple points.

[0041] The input screen 504 includes a focus operation area 541 that is operated to move the stage 3 in the depth direction. This focus operation area 541 includes, for example, an up movement key 541a that is operated to move the stage 3 upward in the depth direction, and a down movement key 541b that is operated to move the stage 3 downward. The user can change the focal position of the laser light on the sample in the depth direction by operating the focus operation area 541 to move the stage 3 upward or downward in the depth direction.

[0042] Input screen 504 includes upper end setting area 542 that is operated to set the upper end of the depth range. After adjusting the focus position by operating focus operation area 541 as described above, the user can set the focus position at that time to the upper end of the depth range by selecting upper end setting area 542. In other words, by selecting upper end setting area 542, the focus position changed by operating focus operation area 541 is set to the upper end of the depth range.

[0043] The upper end of the depth range may be the surface (top surface) of the sample, or may be a position shifted in the depth direction relative to the surface of the sample. When the surface of the sample is set as the upper end of the depth range, the focus operation area 541 is operated so that the spot diameter is minimized on the surface image of the sample displayed in real time in the surface image display area 501, and then the upper end setting area 542 is selected. However, the user may also operate the focus operation area 541 so that the spot diameter is minimized while directly visually observing the surface of the sample, rather than the surface image of the sample displayed in the surface image display area 501. On the other hand, if the upper end of the depth range is set above the surface of the sample, depth measurement can be started above the surface of the sample.

[0044] Input screen 504 includes depth input area 543 for inputting a depth based on the upper end of the depth range set by selecting upper end setting area 542. A numerical value representing the depth can be input into depth input area 543. By inputting into depth input area 543, a depth relative to the upper end of the depth range set in upper end setting area 542 is input, and therefore the lower end of the depth range is set, thereby completing the setting of the depth range.

[0045] In this embodiment, in addition to the depth range setting method described above, the depth range can also be set by operating bottom end setting area 544 included in input screen 504. In this case, the user sets the top end of the depth range by selecting top end setting area 542, and then adjusts the focal position to a desired position as the bottom end of the depth range by operating focus operation area 541. Thereafter, by selecting bottom end setting area 544, the focal position changed by operating focus operation area 541 is set as the bottom end of the depth range, thereby completing the setting of the depth range.

[0046] The input screen 504 includes a symbol display area 545 that displays symbols that represent the relative positional relationship between the upper and lower ends of the depth range. In the symbol display area 545, a symbol 545a representing the sample is virtually displayed, and a symbol 545b representing the upper end of the depth range and a symbol 545c representing the lower end are displayed based on the symbol 545a.

[0047] The position of symbol 545c representing the lower end of the depth range changes depending on the depth input in depth input area 543. Therefore, the position of the lower end of the depth range can be displayed in a way that is easy for the user to understand. Note that the position of symbol 545b representing the upper end of the depth range may change depending on an operation performed in focus operation area 541 before upper end setting area 542 is selected. Also, the position of symbol 545c representing the lower end of the depth range may change depending on an operation performed in focus operation area 541 before lower end setting area 544 is selected.

[0048] The input screen 504 includes a step width input area 546 for inputting a step width. In the step width input area 546, a numerical value representing the interval between each point in the depth direction at which a Raman spectrum is acquired when performing depth measurement can be input. This completes the setting of the step width.

[0049] After inputting the parameters of the depth range and step width as described above, the user selects measurement start key 547 included in input screen 504. This starts depth measurement using the set parameters. Note that after measurement start key 547 is selected, input screen 504 is hidden until depth measurement is completed.

[0050] Depth measurement can be performed in various ways at a measurement position 511 selected on the surface image of the sample displayed in the surface image display area 501, and the user may be able to arbitrarily select any of these ways. For example, when multiple measurement positions 511 are selected, depth measurement may be performed from the top to the bottom at each measurement position 511, or measurement positions 511 at which depth measurement is performed from the top to the bottom and measurement positions 511 at which depth measurement is performed from the bottom to the top may be alternately repeated.

[0051] Furthermore, when the selected measurement positions 511 are arranged in a straight line, the stage 3 may be moved in a straight line in the horizontal direction to measure the same depth at each measurement position 511, and then the stage 3 may be moved in the vertical direction to measure each measurement position 511 at that depth, and this operation may be repeated. In this case, the start point and end point of the horizontal straight line movement of the stage 3 may be the same position at each depth when viewed in the depth direction, or may alternate at each depth.

[0052] When the depth measurement is completed, the Raman spectrum is displayed in the spectrum display area 502, as shown in Fig. 6. In Fig. 6, the Raman spectrum acquired last in the depth measurement is displayed in the spectrum display area 502.

[0053] By operating the operation unit 400, the user can read out a desired Raman spectrum from the storage unit 200 among the multiple acquired Raman spectra, and display the spectrum on the display unit 300. In this case, an operation key such as a bar for selecting a depth position may be displayed on the display unit 300, and by moving the operation key, the user may be able to continuously switch between the multiple Raman spectra and display them on the display unit 300.

[0054] 4. Aspects It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0055] (Item 1) A Raman microscope according to one aspect includes: A Raman microscope that irradiates a sample on a stage with a focused laser beam and receives Raman scattered light from the sample with a detector to obtain a Raman spectrum, a depth measurement processing unit that performs depth measurement by acquiring Raman spectra at a plurality of points in a depth direction, which is a direction in which the laser light is irradiated onto the sample, while changing a focal position of the laser light along the depth direction; a display processing unit that displays an input screen for inputting parameters for performing the depth measurement on the sample, in association with a surface image of the sample on the stage; The parameters may include a range in which the focal position of the laser light is changed along the depth direction, and an interval between the plurality of points within that range.

[0056] According to the Raman microscope described in paragraph 1, the range in which the focal position of the laser light is changed along the depth direction and the interval between multiple points in the depth direction within that range can be input as parameters on an input screen for inputting parameters for performing depth measurement. By performing depth measurement based on the parameters input in this way, Raman spectra at multiple points in the depth direction can be easily obtained.

[0057] (Item 2) In the Raman microscope according to item 1, The input screen may include a focus operation area that is operated to change the focus position of the laser light along the depth direction, and an upper end setting area for setting the focus position changed by operating the focus operation area to the upper end of the range.

[0058] According to the Raman microscope described in paragraph 2, after the focal position of the laser light is changed along the depth direction by operating the focus operation region, the focal position can be easily set as the upper end of the range in which the focal position of the laser light is changed along the depth direction during depth measurement by using the upper end setting region.

[0059] (Item 3) In the Raman microscope according to item 2, The input screen may include a depth input area for inputting a depth relative to the upper end of the range set in the upper end setting area.

[0060] According to the Raman microscope described in paragraph 3, by inputting a depth in the depth input area, the depth relative to the upper end of the range in which the focal position of the laser light is changed along the depth direction during depth measurement is input, and the lower end of the range is set, so that the range can be easily set.

[0061] (Item 4) In the Raman microscope according to item 3, the input screen includes a symbol display area that displays a symbol representing the relative positional relationship between the upper and lower ends of the range; The display processing unit may change the display of the symbol according to the depth input in the depth input area.

[0062] According to the Raman microscope described in paragraph 4, the upper and lower end positions of the range in which the focal position of the laser light is changed along the depth direction during depth measurement can be displayed in an easy-to-understand manner for the user, making it even easier to set the range.

[0063] (Item 5) In the Raman microscope according to any one of items 2 to 4, The input screen may include a bottom end setting area for setting the focus position changed by operating the focus operation area to the bottom end of the range.

[0064] According to the Raman microscope described in paragraph 5, after the focal position of the laser light is changed along the depth direction by operating the focus operation region, the lower end setting region can easily set that focal position as the lower end of the range in which the focal position of the laser light is changed along the depth direction during depth measurement. [Explanation of symbols]

[0065] 1. Raman Microscope 3 Stages 71 Raman spectrometer 100 control section 101 Raman analysis processing unit 102 Infrared analysis processing section 103 Display processing unit 111 Depth measurement processing unit 504 Input screen 541 Focus operation area 542 Top setting area 543 Input Area 544 Bottom setting area 545 Symbol Display Area 546 Step width input area 547 Measurement start key

Claims

1. A Raman microscope that irradiates a sample on a stage with a focused laser beam and receives Raman scattered light from the sample with a detector to obtain a Raman spectrum, a depth measurement processing unit that performs depth measurement by acquiring Raman spectra at a plurality of points in a depth direction, which is a direction in which the laser light is irradiated onto the sample, while changing a focal position of the laser light along the depth direction; a display processing unit that displays an input screen for inputting parameters for performing the depth measurement on the sample, in association with a surface image of the sample on the stage; the parameters include a range in which the focal position of the laser light is changed along the depth direction and an interval between the plurality of points within the range; The depth measurement processing unit performs depth measurements at the intervals along the depth direction at selected points on the surface image of the sample.

2. 2. The Raman microscope of claim 1, wherein the input screen includes a focus operation area that is operated to change the focus position of the laser light along the depth direction, and an upper end setting area that sets the focus position changed by operating the focus operation area to the upper end of the range.

3. The Raman microscope according to claim 2 , wherein the input screen includes a depth input area for inputting a depth relative to the upper end of the range set in the upper end setting area.

4. the input screen includes a symbol display area that displays a symbol representing the relative positional relationship between the upper and lower ends of the range; The Raman microscope according to claim 3 , wherein the display processing unit changes the display of the symbol depending on the depth input in the depth input area.

5. The Raman microscope according to any one of claims 2 to 4, wherein the input screen includes a lower end setting area for setting the focal position changed by operating the focus operation area to the lower end of the range.

Images