Processing equipment

Abstract

To provide a treatment device which can reliably and neatly peel off a tape stuck on an object to be stuck, without giving any fine scratches to the object to be stuck after the tape is peeled off, and which is improved in terms of the reuse of the object to be stuck. [Solution] The processing device transports a flat workpiece W that is magnetically attracted while supporting it from one side on the conveying surface of a magnetic conveyor belt, and then sequentially sprays a medium (pressurized water) onto the other side.

Description

[Technical Field]

[0001] The present disclosure relates to a processing device. [Background technology]

[0002] 2. Description of the Related Art A tape peeling method is known in which a tape peeling device is used to spray pressurized water onto a tape attached to an object to peel the tape from the object. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-88094 Summary of the Invention [Problem to be solved by the invention]

[0004] According to the tape peeling method described in Patent Document 1, it was possible to reliably and cleanly peel off a tape attached to an object. However, there was a case where fine scratches were left on the object after the tape was peeled off, and there was room for improvement in terms of reusing the object. The present disclosure aims to improve at least one of the problems of the above-mentioned conventional technology. [Means for solving the problem]

[0005] The first processing device of the present disclosure is a processing device that transports a flat workpiece that is magnetically attractive while supporting it from one side on the conveying surface of a magnetic conveyor belt, and sequentially sprays a medium onto the other side. [Effects of the Invention]

[0006] According to the present disclosure, at least one of the problems associated with the above-described conventional techniques can be improved. [Brief explanation of the drawings]

[0007] [Figure 1]FIG. 2 is an explanatory diagram of each module of a processing system incorporating a processing device according to the present disclosure. [Figure 2] FIG. [Figure 3] FIG. 2 is a side view of the supply device and the processing device. [Figure 4] FIG. 2 is a side view of the supply device and the processing device. [Figure 5] FIG. [Figure 6] FIG. 2 is a cross-sectional view taken along line AA in FIG. [Figure 7] FIG. 4 is a partially enlarged side view of the belt tension adjusting mechanism. [Figure 8] FIG. [Figure 9] FIG. [Figure 10] 10 is a view seen from the direction of arrow X in FIG. 9. [Figure 11] FIG. 2 is a perspective view of a chamber unit. [Figure 12] FIG. 2 is an explanatory diagram showing a pressurized water spray gun. [Figure 13] FIG. 2 is an enlarged view of a nozzle head. [Figure 14] FIG. 1 is a flow chart showing the procedure for transporting and cleaning a workpiece using a processing device. DETAILED DESCRIPTION OF THE INVENTION

[0008] The first processing device of the present disclosure is a processing device that transports a flat workpiece that is magnetically attractive while supporting it from one side on the conveying surface of a magnetic conveyor belt, and sequentially sprays a medium onto the other side.

[0009] In the first processing device, the magnetic conveyor belt securely holds the workpieces with magnetic force, preventing unnecessary movement or shaking of the workpieces on the belt during transport. This stable transport minimizes the stress on the workpiece surface during transport compared to conventional methods that rely on mechanical clamps or friction. As a result, the workpieces are less likely to be scratched, making them suitable for reuse after processing.

[0010] The second processing device is the first processing device, wherein the magnetic conveyor belt comprises a conveyor belt body and magnets provided over the entire conveyor belt body in the circulating direction.

[0011] In the second processing device, the magnetic conveyor belt is configured with magnets installed along the entire length of the conveyor belt in the direction of rotation. This configuration allows for uniform magnetic force across the entire belt, making it possible to stably hold workpieces during transport. Furthermore, flexible magnet placement can be adopted depending on the shape and material of the workpieces, allowing for reduced damage to the workpieces during transport and improved transport stability.

[0012] The third processing device is the second processing device, wherein the conveyor belt body has a structure in which thin plates of non-magnetic metal are joined in the longitudinal direction to form a loop, and the joints are oblique to the circulation direction of the conveyor belt body.

[0013] In the third processing device, the conveyor belt body has a loop-shaped structure formed by joining thin non-magnetic metal plates longitudinally, with the joints configured to be oblique to the circulation direction. By having the joints oblique to the circulation direction, impacts and uneven loads at the joints as the conveyor belt circulates are dispersed, thereby suppressing vibrations and impacts on workpieces during transport. Furthermore, the use of thin non-magnetic metal plates makes it possible to achieve both durability and transport stability of the belt body without compromising the magnetic properties of the magnets. Furthermore, the impact of belt warping that occurs when welding the thin plates is suppressed, resulting in transport that maintains high reliability even over long periods of use.

[0014] The fourth processing device is a processing device similar to the second processing device, but including at least two pulleys configured to wind up the ends of the magnetic conveyor belt and hold the magnetic conveyor belt stretched in a loop, and a tension adjustment mechanism that moves the pulleys in the circulation direction to adjust the tension of the conveyor belt.

[0015] In the fourth processing device, the magnetic conveyor belt has its end wound up and held in a tensioned loop by at least two pulleys. Furthermore, the device is equipped with a tension adjustment mechanism that adjusts the tension of the magnetic conveyor belt by moving the pulley in the circulating direction. This tension adjustment mechanism allows workers to easily adjust the tension of the magnetic conveyor belt, making it easy and efficient to remove and replace the magnetic conveyor belt. This structure also allows for quick and appropriate response to aging and stretching of the magnetic conveyor belt during use, improving the maintainability and operational efficiency of the entire conveying device. Furthermore, accurate tension adjustment reduces sagging and slippage of the magnetic conveyor belt during transport, ensuring stable transport.

[0016] The fifth processing device is a processing device that is the fourth processing device and is equipped with a chamber that surrounds a predetermined area on the conveying surface of the magnetic conveyor belt at the spraying position of the medium, and an opening / closing mechanism that tilts and opens / closes the chamber with one end of the magnetic conveyor belt in the width direction as a fulcrum.

[0017] In the fifth processing device, a chamber is provided at the media spraying position, surrounding a predetermined area on the conveying surface of the magnetic conveyor belt. The chamber is equipped with an opening / closing mechanism that can tilt and open around one end of the magnetic conveyor belt in the width direction as a fulcrum. This configuration effectively suppresses the scattering of media generated during media spraying, improving the cleanliness and safety of the work environment. Furthermore, by tilting the chamber to one side, the tension-adjusted conveyor belt can be easily removed, which has the effect of streamlining belt maintenance and replacement work. Furthermore, the use of an opening / closing mechanism improves access to the inside of the device during the media spraying process, contributing to overall improvement in the device's maintainability.

[0018] The sixth processing device is a processing device similar to the fifth processing device, but equipped with an auxiliary fixing mechanism that is positioned midway in the circulation direction at the spraying position of the medium and reinforces the fixation of the workpiece to the conveying surface when the medium is sprayed.

[0019] The sixth processing device is configured with an auxiliary fixing mechanism that reinforcingly fixes the workpiece to the conveying surface when the medium is sprayed at a position midway in the circulation direction. This auxiliary fixing mechanism effectively suppresses the impact of the pressure generated during medium spraying on the workpiece, preventing misalignment and vibration of the workpiece. In particular, anticipating the impact of high pressure during spraying, the mechanism provides additional fixing force in addition to the fixation provided by the magnetic conveyor belt, thereby achieving stable transport of the workpiece. This also reduces the risk of scratches on the backside of the workpiece and has the effect of improving the accuracy and quality of the media spraying process.

[0020] The seventh processing device is a processing device that is the sixth processing device and is equipped with an auxiliary fixing mechanism that is arranged on the back side of the magnetic conveyor belt and that magnetically attracts and holds the workpiece from the back side via the magnetic conveyor belt.

[0021] The seventh processing device has an auxiliary fixing mechanism located on the back side of the magnetic conveyor belt, which magnetically attracts and holds the workpiece from the back side via the magnetic conveyor belt. This configuration achieves non-contact auxiliary fixing, significantly reducing the risk of scratches on the workpiece's surface or back side due to physical contact. Furthermore, because it is non-contact, the surface quality of the workpiece can be maintained while maintaining the fixing force, which is particularly effective for workpieces where scratches are unacceptable. The adoption of such an auxiliary fixing mechanism improves the quality and stability of the transport and media spraying processes.

[0022] The eighth processing device is a processing device according to the sixth or seventh processing device, wherein the chamber is equipped with a shutter that blocks the gap between the chamber and the magnetic conveyor belt, and the blocking of the gap by the shutter and the reinforcement of the fixation of the workpiece by the auxiliary fixing mechanism are performed in an interrelated sequence.

[0023] In the eighth processing device, the chamber is equipped with a shutter that closes the gap between the chamber and the magnetic conveyor belt. The shutter's closing of the gap and the auxiliary fixing mechanism's securing and reinforcing of the workpiece are performed in a mutually interrelated sequence. This sequence unifies the timing of the gap closing and the securing and reinforcing, dramatically improving the accuracy of workpiece holding during the media spraying process. Furthermore, the interlocking operation of the shutter and the auxiliary fixing mechanism prevents problems such as media leakage from the gap and workpiece misalignment, enhancing the reliability of the entire media spraying process. Furthermore, this coordinated operation synchronizes multiple processes with a single control system, optimizing the device's operating efficiency while maximizing the role of each process. As a result, the uniformity and accuracy of the media spraying are improved, contributing to maintaining the quality of the workpiece surface and improving the productivity of the entire process.

[0024] The ninth processing device is a processing device that is the first processing device, and is equipped with a magnetic belt that is placed on the back side of the magnetic conveyor belt and formed in a loop along the circulation direction of the magnetic conveyor belt, and a cleaning unit that is installed in a position opposite the magnetic belt and fixed relative to the circulating conveying surface.

[0025] In the ninth processing device, a magnetic belt looped along the circulating direction is placed on the back of the magnetic conveyor belt, and a cleaning unit is installed opposite the magnetic belt. The magnetic belt is placed on the back of the conveyor belt, and the cleaning unit is located on the opposite side of the conveyor belt to clean the conveying surface. This arrangement allows the cleaning unit to effectively clean the conveying surface in the area affected by the magnetic belt, maintaining and improving the magnetic belt's adhesive force. This configuration also allows the cleaning unit to efficiently remove dirt adhering to the conveying surface and stabilize the adhesive force, ensuring workpiece retention during transport and contributing to maintaining the durability and quality of the conveying surface. The relative placement of the magnetic belt and cleaning unit plays an important role in improving conveying and adhesive performance.

[0026] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. The following examples illustrate devices and methods for embodying the technical ideas of the disclosure, but the technical ideas of the disclosure are not limited to those described below. Various modifications can be made to the technical ideas of the disclosure within the scope of the claims. It should be noted that the drawings are schematic and may differ from the actual product.

[0027] FIG. 1 is an explanatory diagram of each module of a processing system incorporating a processing device 14 of the present disclosure. The processing system 10 is a tape removal system that sprays a medium (pressurized water) onto a plate-shaped workpiece to remove tape attached to the surface of the workpiece, which has magnetic attractiveness. The processing system 10 includes a supplying device 12, a processing device 14, an inspection device 16, a cleaning device 18, a drying device 20, and a storage device 22. The processing system 10 also includes a conveying line 24 that continuously conveys the workpiece W (see FIG. 2) from the supplying device 12 to the storage device 22. Each of these components is controlled by a controller (not shown).

[0028] Figure 2 is a perspective view of the workpiece W to be transported. The workpiece W is a transport frame configured to be transported as a whole with electronic components mounted on it. The workpiece W is a thin plate made of a ferromagnetic metal (e.g., ferritic stainless steel or martensitic stainless steel) and has an opening H in the center for placing the electronic components. Tape T is attached around the periphery of the opening H to secure and protect the mounted electronic components. The workpiece W is the frame portion after the mounted electronic components have been removed. This frame portion is reused after the tape T is peeled off, washed, and dried. The processing system is a group of devices that automatically perform the above-mentioned processing for reuse.

[0029] The supply device 12 supplies the workpieces W to the processing device 14. The processing device 14 sprays pressurized water onto the workpieces W received from the supply device 12 to peel off the tape T from the workpieces W. The inspection device 16 is equipped with an imaging means (such as a CCD camera) to capture an image of the surface of the workpieces W and analyze the image to check whether the tape T has been peeled off from the workpieces W. Workpieces W from which the tape has not been completely peeled are then removed from the conveyor line 24. The cleaning device 18 has a pressurized water cleaning device that cleans the back surface of the workpieces W after the tape has been peeled off. The drying device 20 dries the workpieces W after the back surface has been cleaned. The storage device 22 receives the dried workpieces W one by one and stores them in a rack (not shown). Note that the conveyor line 24 only needs to be able to continuously transport the workpieces W. The conveying method of each device does not need to be the same. Note that the medium sprayed onto the workpieces by the processing device 14 is not limited to pressurized water M. Other examples of the medium include compressed air, cleaning liquid, paint, and cooling medium (gas or liquid). Furthermore, the purpose of the processing equipment is not limited to peeling off the tape, but also includes drying, cleaning, painting, cooling, and the like.

[0030] The supply device 12, inspection device 16, cleaning device 18, drying device 20, and storage device 22 in the processing system 10 can be the same as the supply station, inspection station, cleaning station, drying station, and storage station described in JP 2020-88094 A. A description of these will be omitted. Below, the structure and usage of the processing device 14, which is a characteristic part of the processing system 10, will be described.

[0031] 3 and 4 are side views of the supply device 12 and the processing device 14. FIG. 3 is a diagram showing a state in which pressurized water M is sprayed from the nozzle head 63 onto the workpiece W being transported to perform a cleaning process. FIG. 4 is a diagram showing a state in which the workpiece W has been cleaned and is being transported by the conveyor belt 43 after cleaning has been completed. FIG. 5 is a plan view of the processing device 14. FIG. 6 is a cross-sectional view taken along line AA.

[0032] The workpieces W are supplied one by one from the supply device 12 to the processing device 14. The supply device 12 has a robot arm 12A for supplying the workpieces W. The robot arm 12A has a plurality of suction portions 12B at its tip. The supply device 12 brings the robot arm 12A close to the workpieces W stacked on the main body 12C, bringing the suction portions 12B into contact with the workpieces W. Next, the robot arm 12A is moved to place the workpieces W on the conveying surface of the conveyor belt 43 of the processing device 14.

[0033] The processing device 14 transports the workpiece W placed on the conveyor belt 43 in the Y-axis direction while spraying pressurized water M from the nozzle head 63 at a midpoint to clean the surface of the workpiece W. The processing device 14 is broadly divided into three parts. The first is a housing unit 14A formed by pillars, beams, a table, etc. The housing unit 14A is the framework of the processing device 14, and various components are directly or indirectly fixed to the housing unit 14A. The second is a transport unit 14B that transports the workpiece W by a belt conveyor including the conveyor belt 43, etc. The transport unit 14B is located approximately in the center of the housing unit 14A. Finally, there is a cleaning unit 14C that includes a chamber unit 14D and a cleaning unit 14E and cleans the workpiece W. The chamber unit 14D is located on the transport unit 14B, and the cleaning unit 14E is located at the top of the housing unit 14A.

[0034] Next, each part will be described in detail. First, the structure of the housing part 14A will be described. Each part of the processing device 14 is placed on a base 32. Six short pillars (base pillars 33) extend from the base 32 in the Z-axis direction (vertical direction), and a pool 34 is supported on top of them. The pool 34 has a flat bottom with a rim. The pool 34 functions as a tray for draining the pressurized water M sprayed from the nozzle head 63 and for temporarily collecting the tape T peeled off from the workpiece W.

[0035] Two first lower beams 35A, 35B are spaced apart across the entire width of the pool 34 in the X direction (horizontal direction). Two second lower beams 36A, 36B are also spaced apart across the entire width of the pool 34 in the Y direction (vertical direction) (see FIG. 3). The first lower beams 35A, 35B and the second lower beams 36A, 36B intersect with each other to form a lattice-shaped (well-like) lower beam. The edges of the pool 34 are welded to the ends of the lower beams. Furthermore, support members 39A, 39B, 40A, 40B that support the transport section extend upward along the Z axis from the second lower beams 36A, 36B to a height approximately half the height of the processing device 14.

[0036] Meanwhile, four long vertical support pillars (37A, 37B, 37C, and 37D) are provided around the edge of the pool 34. Support pillars 37A and 37B are located at the two corners on the front side of FIG. 3 and extend in the Z-axis direction. A first upper beam 38 is placed across the upper ends of these pillars. Meanwhile, support pillars 37C and 37D extend in the Z-axis direction from the middle and corners of the rear edge, and a second upper beam 46A is placed across the upper ends. Both the first upper beam 38 and the second upper beam 46A are structured to extend parallel to the Y-axis direction. The cleaning unit 14E is placed on these upper beams. The housing 14A configured in this manner is a framework with a substantially rectangular appearance, including lower and upper beams. The transport unit 14B is placed and fixed on the lower beams.

[0037] Next, the conveying unit 14B will be described. The conveying unit 14B is composed of a looped conveyor belt 43, three drive pulleys 51, 52, 51 that wind up and hold both ends of the conveyor belt 43, three driven pulleys 53, 54, 53, and a frame structure for fixing and holding these pulleys at both ends.

[0038] The frame structure is composed of a first frame member 41A, a second frame member 41B, and a table 45. The first frame member 41A and the second frame member 41B are both plate-shaped and have the same shape. These frame members are supported upright in the Z-axis direction by supports 39A, 39B and supports 40A, 40B, respectively, and are arranged parallel to each other along the YZ plane. Furthermore, a table 45 is placed above the first frame member 41A and the second frame member 41B. The cross section of the entire frame structure in the XZ plane is U-shaped, opening downwards.

[0039] At one end of the frame structure, three drive pulleys 51, 52, 51 are arranged, connected to a motor 70 via a reducer 71. These three drive pulleys 51, 52, 51 are each fixed to a rotating shaft 72 and rotate in synchronization with the rotation of the rotating shaft 72. The rotating shaft 72 is connected to the motor 70 via the reducer 71. The rotating shaft 72 is inserted through two opposing bare cases 59. The bare cases 59 are fixed to mounting plates 58, which are fixed to the first frame member 41A and the second frame member 41B, respectively. With this configuration, the three drive pulleys 51, 52, 51 are rotatably fixed between the first frame member 41A and the second frame member 41B.

[0040] The drive pulleys 51, 51 are flat type (flat pulleys), and the drive pulley 52 is crown type (crown pulley). These are attached to the rotary shaft 72 in the order of drive pulley 51, drive pulley 52, and drive pulley 51 from the motor 70 side. The crown shape of the drive pulley 52 is intended to center the conveyor belt 43, and by combining it with the flat type drive pulleys 51, 51, stable belt drive is possible.

[0041] Meanwhile, driven pulleys 53, 54, 53 are fixed to the other end of the frame structure via belt tension adjustment mechanisms 60 provided at the ends of the first frame member 41A and the second frame member 41B. As with the drive side, there are three pulleys in a series, with a crown-shaped driven pulley 54 in the middle and driven pulleys 53, 53 on either side. The purpose of this configuration is the same as that of the drive side.

[0042] 7 is a partially enlarged side view of the belt tension adjustment mechanism 60. A fixed shaft 60B is inserted through the centers of the driven pulleys 53, 54, 53. The fixed shaft 60B is inserted into a slit 60C provided in the center of a mounting plate 60A fixed to the first frame member 41A. A ball bearing 74 (FIG. 6) is fitted into the center of the driven pulleys 53, 54, 53 as a bearing for the fixed shaft 60B. The fixed shaft 60B is held between the slits 60C of the mounting plate 60A and does not rotate, but the ball bearing 74 allows the driven pulleys 53, 54, 53 to rotate smoothly relative to the fixed shaft 60B.

[0043] A female thread 60H is formed in the center of the fixed shaft 60B, and an adjustment screw 60G with a head 60J and a male thread formed along the entire length is screwed into this female thread. The adjustment screw 60G extends in the Y-axis direction. A stopper 60D is also disposed at the open end of the slit 60C in the mounting plate 60A. A through-hole 60F (without thread) optimized for the diameter of the adjustment screw 60G is provided in the stopper 60D, and the adjustment screw 60G is inserted through this through-hole, with the head 60J disposed at the end. An adjustment nut 60E is screwed between the head 60J and the stopper 60D.

[0044] The belt tension adjustment mechanisms 60 are provided on both sides of the driven pulleys 53, 54, 53 and are fixed to the first frame member 41A and the second frame member 41B. As a result, the driven pulleys 53, 54, 53 are supported between the first frame member 41A and the second frame member 41B and rotate around the fixed shaft 60B. With the belt tension adjustment mechanism 60, the center position 60K of the fixed shaft 60B can be slid in the Y-axis direction by rotating the adjustment nut 60E while keeping the head 60J of the adjustment screw 60G fixed. The driven pulleys 53, 54, 53 follow this, so the tension of the conveyor belt 43 can be easily adjusted.

[0045] Next, the structure of conveyor belt 43 will be described. Fig. 8 is a perspective view of conveyor belt 43. The main body of conveyor belt 43 (conveyor belt main body) is formed into a loop by joining thin plates of non-magnetic metal in the longitudinal direction. The material is not particularly limited, but examples include aluminum, non-magnetic stainless steel, copper, copper alloy, titanium, magnesium alloy, nickel, nickel alloy, zinc, and zinc alloy.

[0046] The joint 43C is disposed obliquely with respect to the circulation direction (Y-axis direction) of the conveyor belt 43. When metal thin plates are welded to form a loop, the finished product is prone to "twisting." By arranging the joint 43C obliquely with respect to the circulation direction, the effect of "twisting" due to welding can be minimized. On the other hand, the closer the oblique direction is to the circulation direction, the longer the joint 43C becomes. From the viewpoint of minimizing "twisting" and improving manufacturing efficiency, the angle formed by the joint 43C and the circulation direction of the conveyor belt 43 (where 0° is parallel and 90° is perpendicular) is preferably greater than 0° and less than 90°, more preferably greater than 20° and less than 70°, and even more preferably greater than 30° and less than 60°. This joint structure makes it less likely for the conveyor belt 43 to twist, contributing to smoother transport.

[0047] The conveyor belt 43 has a flat conveying surface 43A. On the other hand, two loop-shaped magnetic belts 43B, each thinner than the conveyor belt 43, are arranged parallel to each other at a predetermined interval on the back surface. The magnetic belts 43B circulate in the same manner as the conveyor belt 43. The magnetic belts 43B generate a magnetic attraction force, attracting and fixing the workpieces W to the conveying surface 43A. This structure prevents the workpieces W from sliding during transport, reducing damage. The magnetic belts 43B allow the conveyor belt 43 to have built-in magnetic force. The arrangement of the magnets is not limited to the above and can be selected appropriately depending on the shape of the workpieces, etc. For example, magnets may be arranged on the entire back surface or conveying surface of the conveyor belt 43. In this case, the magnetic attraction force exerted by the magnets on the workpieces W is uniform across the entire surface, eliminating unevenness in the attraction force and enabling the workpieces W to be stably held. On the other hand, the magnetic belt 43B is more advantageous in terms of cost due to the increased number of magnets.

[0048] Alternatively, magnets may be placed at regular intervals on the back surface of the conveyor belt 43. In this case, the magnetic force is exerted only partially, which allows for weight reduction and cost reduction. Furthermore, since the magnetic force is used only in the areas where it is needed, the minimum amount of material required can be used. This is particularly effective when the workpiece W is small and only specific areas need to be held.

[0049] It is also possible to adopt a configuration in which the magnetic belt 43B is arranged perpendicular or oblique to the circulation direction. In this case, the attraction force can be exerted uniformly in a certain direction, and a wider range can be covered than in the configuration of the embodiment. This is preferable in that it can be more flexibly adapted to different sizes and shapes of workpieces W.

[0050] It is also possible to arrange magnets in a checkerboard pattern on the back of the conveyor belt 43. In this case, the magnetic force can be distributed over a wide area while reducing the amount of material used. Because the attraction force tends to be uniform, this is advantageous when multiple workpieces are being transported at the same time or when workpieces with irregular shapes need to be held.

[0051] The conveyor belt 43 is configured as a magnetic conveyor belt equipped with the magnet belt 43B, which prevents scratches from being formed on the workpiece W. On the other hand, since the magnet belt 43B is configured to exert a magnetic attraction force on the workpiece W from the back surface of the conveyor belt 43, depending on the usage environment, dirt may adhere to the transport surface 43A, reducing the attraction force. Furthermore, dirt adhering to the transport surface 43A may cause scratches on the surface of the workpiece W.

[0052] The processing device 14 of the present disclosure solves the above problems by employing a brush unit. The brush unit will now be described.

[0053] Fig. 9 is a partially enlarged view of the drive pulley, and Fig. 10 is a view seen from the direction of arrow X in Fig. 9. Two brush units 85 are arranged in the space between the conveyor belt 43 and the pool 34 so as to be in contact with the transfer surface 43A of the conveyor belt 43. Each brush unit 85 is fixed to a brush fixing plate 85B extending in the X-axis direction at a position below the conveyor belt 43 in the Z-axis direction.

[0054] The brush fixing plate 85B supports the two brush units 85 and is arranged in the X-axis direction. Both ends of the brush fixing plate 85B are connected to the height adjuster 85A. The height adjuster 85A extends in the Z-axis direction and is fixed to the first frame member 41A and the second frame member 41B. The height adjuster 85A also has elongated holes for inserting fixing bolts, allowing for fine adjustment of the attachment position relative to the first frame member 41A and the second frame member 41B. This structure makes it possible to adjust the strength of contact between the brush units 85 and the conveyance surface 43A.

[0055] The brush unit 85 is installed in a position facing the magnetic belt 43B arranged on the back surface of the conveyor belt 43. The brush unit 85 cleans the transport surface 43A of the conveyor belt 43, and in particular removes dirt from the transport surface 43A facing the magnetic belt 43B. This ensures that the workpieces W are reliably attracted to the transport surface 43A, enabling stable transport.

[0056] 3 to 6, an auxiliary fixing mechanism 14F is provided at the center of the frame structure of the transport section 14B to reinforce the fixation of the workpiece W to the transport surface 43A. The auxiliary fixing mechanism 14F is composed of two magnets 55, a cylinder 56 that moves the magnets 55 up and down in the Z-axis direction, and a cylinder mounting plate 57 that fixes the cylinder 56 to the first frame member 41A and the second frame member 41B.

[0057] The auxiliary fixing mechanism 14F corresponds to an area (spray position Pos) defined by a chamber 44 described later, and is disposed on the rear surface side of the conveyor belt 43. When the cylinder 56 is fully extended, the magnet 55 is closest to the rear surface of the conveyor belt 43, and is configured to be able to exert a magnetic attraction force on the conveying surface 43A side. On the other hand, when the cylinder 56 is retracted, the magnet 55 is separated from the conveyor belt 43, and the magnetic attraction force hardly reaches the conveying surface 43A side.

[0058] The auxiliary fixing mechanism 14F adheres the workpiece W from its backside when it is transported to the spraying position, assisting in fixing it to the transport surface 43A. At the spraying position Pos, pressurized water M is sprayed onto the workpiece W from the nozzle head 63. At this time, stronger pressure is applied to the workpiece W than during transport. At this time, the auxiliary fixing mechanism 14F reinforces the fixation, preventing the workpiece W from shifting on the transport surface 43A. At the spraying position Pos, the transport of the workpiece W is temporarily stopped and cleaning is performed. While the workpiece W is fixed to the backside of the conveyor belt 43 by the magnet 55, the circulation of the conveyor belt 43 also stops, preventing the workpiece W from rubbing against the conveyor belt 43 and preventing damage to the workpiece W. After cleaning is completed, the cylinder 56 retracts. As a result, the fixation by the auxiliary fixing mechanism 14F is released, and the workpiece W is only adsorbed to the conveyor belt 43. As a result, the conveyor belt 43, which has resumed driving, transports the workpiece W in the Y-axis direction.

[0059] Next, the structure of the cleaning section 14C will be described. The cleaning section 14C is composed of a cleaning unit 14E disposed on the upper beam and a chamber unit 14D disposed on the table 45 of the transfer section 14B. Figure 11 is a perspective view of the chamber unit 14D. The chamber unit 14D includes a chamber 44 and a chamber tilting mechanism 50 that can tilt the chamber 44 to open and close it.

[0060] The cleaning unit 14E includes a spray gun 61 including a nozzle head 63, an X-stage 48 that moves the spray gun 61 in the X direction, and a Y-stage 47 that moves it in the Y direction. The X-stage 48 is disposed on a second upper beam 46A. Furthermore, an X-guide 49 is disposed on the first upper beam 38. A Y-stage base 46B is stretched between these two parallel upper beams. The Y-stage base 46B can be freely moved in the X direction by the X-stage 48. A Y-stage 47 is disposed on the Y-stage base 46B. The spray gun 61 is fixed to the Y-stage 47. With this configuration, the spray gun 61 can move independently in the X and Y directions. Pressurized water M can be sprayed all over the workpiece W at the spraying position Pos by moving the spray gun 61.

[0061] On the other hand, the chamber 44 is formed in a rectangular cylindrical shape and is arranged to surround the workpiece W on all four sides at a spraying position Pos where pressurized water M is sprayed onto the workpiece W. In other words, the chamber 44 is configured to be large enough to completely contain one of the workpieces W within it. The chamber 44 is fixed relative to the circulation direction of the conveyor belt 43. In other words, the area surrounded by the chamber 44 is the spraying position Pos, and the workpiece W that has moved to this position becomes the workpiece W to be processed.

[0062] A plurality of sub-nozzles 83 are arranged on the inner wall 44A of the chamber. All of the sub-nozzles 83 are directed toward the workpiece W that has moved to the spraying position Pos. Various media can be sprayed from the sub-nozzles 83. In addition, pressurized water M is sprayed onto the workpiece W from the nozzle head 63 of the cleaning unit, which will be described later, to peel off the tape T adhering to the workpiece W. The medium sprayed from the sub-nozzles 83 may be the same as or different from the medium (pressurized water M) sprayed from the nozzle head 63.

[0063] Table 45 is configured in a cross shape in a plan view. In other words, its width in the X direction is wider in some areas. This wider area of ​​table 45 in the X direction corresponds to the spraying position Pos of pressurized water M. Chamber 44 is configured to be wider than conveyor belt 43 at spraying position Pos. A waste port 45B is provided in the portion of table 45 surrounded by chamber 44 that extends beyond conveyor belt 43, for discharging wastewater generated in chamber 44 and peeled tape T into pool 34. Wastewater port 45B is formed as a through-hole in table 45 located within the area surrounded by chamber 44 but outside the area of ​​conveyor belt 43. Wastewater and the like that falls into pool 34 from waste port 45B can be collected from drain port 34B provided in bottom 34A of pool 34.

[0064] Two shutters 81 are provided on the outer wall 44B of the chamber 44, which are opened and closed vertically by a drive cylinder 80. The shutters 81 are arranged so as to face each other on the outer wall 44B perpendicular to the circulation direction of the conveyor belt 43. The shutters 81 are formed so as to be able to open and close openings (gaps) of approximately the same size provided on the outer wall 44B. When the workpiece W is transported to the spraying position Pos, the shutters 81 are opened. When pressurized water M is sprayed at the spraying position Pos, the shutters 81 are closed. Then, when the cleaning is completed, the shutters 81 are opened again, and the workpiece W is transported out.

[0065] Next, the chamber tilting mechanism 50 will be described. The chamber tilting mechanism 50 includes a tilting shaft 50C fixed to the chamber 44 and a cylinder 50G for rotating the tilting shaft 50C. The tilting shaft 50C is inserted into and fixed to a shaft holder 50A provided on a bracket 44C extending rearward of the chamber 44. The shaft holders 50A are attached to the two brackets 44C in directions facing each other, with two bare cases 50B disposed between them.

[0066] The tilting shaft 50C is inserted through the shaft holder 50A and the bare case 50B and is rotatable relative to the bare case 50B. The bare case 50B is fixed to the table 45. With this configuration, when the tilting shaft 50C rotates, the chamber 44 tilts and opens relative to the table 45, with the bracket 44C as a fulcrum.

[0067] A T-shaped bracket 50J for fixing a cylinder 50G is disposed on the support member 40B provided on the second frame member 41B. The cylinder 50G is fixed to the T-shaped bracket 50J using a pin 50H in a state in which it can rotate in the Z-axis direction relative to the T-shaped bracket 50J. The other end of the cylinder 50G is connected to the tilt shaft 50C via a fork 50E and a handle 50D.

[0068] The handle 50D is fixed to the tilt shaft 50C and is fixed by a pin 50F so that it can rotate in the Z-axis direction while being sandwiched between the forks 50E. With this configuration, the back and forth movement of the cylinder 50G is converted into rotational movement of the tilt shaft 50C, and the chamber 44 operates to tilt and open relative to the table 45.

[0069] The processing device 14 employs a conveyor belt 43 with built-in magnetism in addition to the chamber tilting mechanism 50 and the belt tension adjusting mechanism 60, thereby making it even easier to remove the conveyor belt 43.

[0070] The conveyor belt 43 incorporates a magnetic belt 43B that generates a magnetic force on its back surface, and this magnetic force reliably attracts the workpiece W to the conveying surface 43A. Therefore, the workpiece W does not shift during transport, and there is no need to provide guides on the edge of the conveyor belt 43. This configuration makes it possible to easily remove the conveyor belt 43 from the side.

[0071] Furthermore, by using the chamber tilting mechanism 50, the chamber 44 can be tilted relative to the table 45, thereby preventing interference with the chamber 44 on the conveyor belt 43. Also, by using the belt tension adjusting mechanism 60 and operating the adjusting screw 60G, the tension of the conveyor belt 43 can be relaxed.

[0072] With the above configuration, by adopting the conveyor belt 43 with built-in magnetic force and by combining the chamber tilting mechanism 50 and the belt tension adjustment mechanism 60, the conveyor belt 43 can be easily removed from the side (X direction, i.e., the side where the chamber 44 is lifted), thereby improving the efficiency of maintenance work and reducing the work time.

[0073] Figure 12 is an explanatory diagram showing the spray gun 61. Figure 13 is an enlarged view of the nozzle head 63. The spray gun 61 mainly comprises the following components: a nozzle head 63 that sprays pressurized water, and a swinging rotation mechanism 61P that swings and rotates the nozzle head 63. Here, "swinging rotation" refers to a composite rotational motion that combines the movement of the nozzle head 63 rotating (spinning) around its axis and the movement of the axis of the nozzle head 63 moving along a circular path (revolution).

[0074] 12, the nozzle head 63 is held by a holder 61A. The holder 61A is formed in a box shape, and inside the holder 61A, a swinging and rotating mechanism 61P and a motor 61B that drives the swinging and rotating mechanism 61P are disposed. Furthermore, an upper surface opening and a lower surface opening are provided on one of the upper and lower surfaces of the holder 61A, respectively.

[0075] The swinging and rotating mechanism 61P is centered around a bearing member 61F provided at the top opening inside the holder 61A. A hollow spindle 61G is supported vertically and rotatably by the bearing member 61F. A pressurized water pipe 61L is connected to the upper end of the spindle 61G via a rotary joint, and a pressurized water hose 62 is also connected to it. With this configuration, even when the spindle 61G rotates, the pressurized water pipe 61L and the pressurized water hose 62 remain fixed.

[0076] The pressurized water hose 62 is connected to a pressurized water supply means such as an ultra-high pressure plunger pump, and supplies high-pressure pressurized water to the nozzle head 63. The appropriate water pressure is preferably 30 to 100 MPa, and most preferably 30 to 50 MPa. The water flow rate is preferably 15 to 25 liters / minute, and the distance between the spray surface of the nozzle head 63 and the workpiece W is preferably 20 to 30 mm.

[0077] A disk-shaped eccentric plate 61J having the same rotation axis 61M is fixed to the lower end of the spindle 61G. The upper surface of this eccentric plate 61J is hollow and communicates with the spindle 61G to form a flow path for pressurized water. The side surface of the eccentric plate 61J serves as a balance weight to ensure rotational balance.

[0078] A nozzle pipe 61K is connected to the underside of the eccentric plate 61J at a position of an eccentric axis 61N that is offset from the rotation axis 61M of the spindle 61G. This nozzle pipe 61K is connected to the nozzle head 63, and serves to oscillate and rotate the nozzle head 63 in an eccentric state.

[0079] A pulley 61D is attached to the lower end of the spindle 61G. A motor 61B is provided inside the holder 61A, and a timing belt 61E is stretched between a pulley 61C attached to the motor 61B and a pulley 61D of the spindle 61G. With this configuration, driving the motor 61B rotates the spindle 61G, and the nozzle head 63 oscillates and rotates via the eccentric plate 61J.

[0080] The nozzle head 63 is cylindrical, and has a plurality of ejection nozzles 63A formed on the ejection surface. In this embodiment, nine ejection nozzles 63A are arranged in a lattice pattern.

[0081] With this configuration, the nozzle head 63 performs a compound oscillating rotation that combines rotational motion (spin) and circular motion (revolution). This causes the spray trajectories of the pressurized water to overlap, increasing the collision density. In addition, by providing multiple spray nozzles 63A, the collision density can be further increased, further improving the force that peels off the tape T from the workpiece W.

[0082] Next, a method of using the processing device 14 will be described. FIG. 14 is a flow chart showing the procedure for transporting and cleaning the workpiece W using the processing device 14. The processing device 14 operates under the control of a controller (not shown). First, in step S10, the workpiece W is placed on the transport surface 43A of the conveyor belt 43. The workpiece W is placed one by one on the transport surface 43A by the supply device 12. At this time, the transport unit 14B (belt conveyor) may be driving or stopped. From the viewpoint of further suppressing damage to the workpiece W, it is preferable that the belt conveyor is stopped.

[0083] Next, in step S11, the workpiece W is transported to the spraying position Pos by the transport unit 14B (belt conveyor). The workpiece W is fixed at a predetermined position on the transport surface 43A by the attraction force of the magnetic belt 43B. Therefore, the workpiece W remains stationary relative to the conveyor belt 43 during transport, thereby suppressing the generation of scratches.

[0084] Next, in step S12, the operation of the belt conveyor is temporarily stopped. At this time, a sequence may be adopted in which a new workpiece W is placed on the conveying surface 43A.

[0085] Next, in step S13, the shutter 81 closes the gap between the chamber 44 and the conveyor belt 43. Subsequently, in step S14, the auxiliary fixing mechanism 14F reinforces the fixation of the workpiece W. Specifically, the cylinder 56 extends, and the magnet 55 approaches the backside of the workpiece W, reinforcing the attraction force of the magnetic belt 43B. Steps S12, S13, and S14 are executed when the workpiece W arrives at the spray position. In this example, steps S12, S13, and S14 are executed in this order, but they do not have to be executed in this order and may be executed in a different order or simultaneously. These steps may be executed as a mutually related sequence as a cleaning preparation process.

[0086] Next, in step S15, pressurized water M (medium) is sprayed from the nozzle head 63 onto the workpiece W at the spraying position Pos. At this time, the X stage and Y stage may be operated to move the position of the nozzle head 63 while spraying.

[0087] Next, in step S16, the fixation of the workpiece W by the auxiliary fixing mechanism 14F is released. Specifically, the cylinder 56 contracts, the magnet 55 moves away from the conveyor belt 43, and the magnetic attraction is released. Meanwhile, the attraction force of the magnetic belt 43B acts on the workpiece W, so the workpiece W remains stationary relative to the conveyor belt 43.

[0088] Next, in step S17, the shutter 81 opens, thereby opening the gap between the chamber 44 and the conveyor belt 43. Then, in step S18, the operation of the belt conveyor is restarted, and the workpiece W is carried out from the spraying position.

[0089] Steps S16, S17, and S18 are executed when the workpiece W arrives at the spraying position. In this example, steps S16, S17, and S18 are executed in this order, but they do not have to be executed in this order and may be executed in a different order or simultaneously. These steps may be executed as a mutually related sequence as a post-cleaning process.

[0090] This flow is a processing flow for one workpiece W. In reality, the processing of this flow is performed for each of the workpieces W that are transported in sequence. After cleaning, the workpiece W is transported to the drying device 20 and subjected to the next processing. [Explanation of symbols]

[0091] 10 Processing system, 14 Processing device, 14A Housing section, 14B Conveying section, 14C Cleaning section, 14D Chamber unit, 14E Cleaning unit, 14F Auxiliary fixing mechanism, 43 Conveyor belt, 43A Conveying surface, 43B Magnet belt, 43C Joint section, 44 Chamber, 60 Belt tension adjustment mechanism, 61 Spray gun, 63 Nozzle head, 85 Brush unit

Claims

1. A processing device in which a flat workpiece having magnetic attractiveness is conveyed while being supported from one side by the conveying surface of a magnetic conveyor belt, and a medium is sprayed sequentially onto the other side, The magnet-embedded conveyor belt comprises a conveyor belt body and magnets provided over the entire conveyor belt body in the circulation direction, The conveyor belt body has a structure in which thin plates of non-magnetic metal are joined in a longitudinal direction to form a loop, and the joints are oblique to the circulation direction of the conveyor belt body, The medium is blown onto the nozzle at a midpoint in the circulation direction. An auxiliary fixing mechanism is provided to reinforce the fixation of the workpiece to the conveying surface when the medium is sprayed thereon; The auxiliary fixing mechanism is disposed on the rear side of the magnet-embedded conveyor belt and magnetically attracts and holds the workpiece from the rear side via the magnet-embedded conveyor belt.

2. At least two pulleys configured to take up the ends of the magnetic conveyor belt and hold the magnetic conveyor belt in a loop; The processing apparatus according to claim 1 , further comprising a tension adjusting mechanism that adjusts the tension of the magnetic conveyor belt by moving the pulley in the circulating direction.

3. a chamber surrounding a predetermined area on the conveying surface of the magnetic conveyor belt at the spraying position of the medium; The processing apparatus according to claim 2 , further comprising an opening / closing mechanism for tilting and opening the chamber around one end of the magnetic conveyor belt in the width direction as a fulcrum.

4. 4. The processing apparatus according to claim 3, wherein the chamber is provided with a shutter that blocks the gap between the chamber and the magnetic conveyor belt, and the blocking of the gap by the shutter and the reinforcement of the fixation of the workpiece by the auxiliary fixing mechanism are performed in an interrelated sequence.

5. a magnetic belt arranged on the back surface of the magnetic conveyor belt and formed in a loop shape along the circulating direction of the magnetic conveyor belt; The processing apparatus according to claim 4 , further comprising: a cleaning unit that is installed at a position facing the magnetic belt and is fixed relatively to the circulating conveying surface.

6. The processing device described in Claim 5, wherein the cleaning unit includes a brush unit fixed relatively to the conveying surface facing the magnetic belt by a brush fixing plate, and the strength of contact of the brush unit with the conveying surface can be adjusted by the fixed position of the brush unit relative to the brush fixing plate.

7. The chamber is configured to have a magnetic conveyor belt when viewed from above at the spraying position. The processing apparatus according to claim 6 , wherein the processing apparatus is configured to be wider than the magnetic conveyor belt, and a disposal port for the media is disposed in a portion surrounded by the chamber that protrudes from the magnetic conveyor belt.

8. A processing device as described in Claim 7, wherein the tension adjustment mechanism reduces the tension of the magnetic conveyor belt, and the opening and closing mechanism tilts and opens and closes the chamber, thereby making it possible to remove the magnetic conveyor belt.

9. The processing device described in Claim 8, wherein the auxiliary fixing mechanism includes an extendable cylinder and a magnet provided at the tip of the cylinder, and is configured so that when the cylinder is fully extended, it comes closest to the back surface of the magnetic conveyor belt at the spraying position.

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