Wafer processing apparatus, system, and control method applied to wafer processing apparatus

Abstract

To provide a wafer processing device, system and control method improve production efficiency and reduce wafer contamination.SOLUTION: A wafer processing device comprises: a processing mechanism; a boat loading and unloading chamber 16; a boat base located in the chamber; a wafer loading and unloading chamber 11; a wafer transferring mechanism 12 located in the chamber; a plurality of isolation chambers; and a circulation device having a plurality of boats 14 and conveyance robot arms 21, 22. A front opening and closing door 19 is arranged between the isolation chamber and the wafer loading and unloading chamber, and a rear opening and closing door 20 is arranged between the isolation chamber and the boat loading and unloading chamber; the circulation device is used for enabling the boats to circulate in the wafer loading and unloading chamber and the isolation chamber and is also used for enabling the boats to circulate in the boat loading and unloading chamber and the isolation chamber; the plurality of isolation chambers comprise first and second isolation chambers 18a, b, the first isolation chamber is used for accommodating a boat on which the processing target wafer is mounted, and the second isolation chamber is used for accommodating a boat on which the processed wafer that has circulated is mounted.SELECTED DRAWING: Figure 2

Description

Detailed Description of the Invention

[0001] [Technical Field] The present disclosure belongs to the field of semiconductor technology, and specifically relates to a wafer processing apparatus, a wafer processing system, and a control method applied to the wafer processing apparatus.

[0002] [Background technology] In the semiconductor manufacturing process, a large number of wafers are processed at once using wafer processing equipment such as furnace tube machines. However, transporting and loading / unloading the wafers takes a lot of time, reducing production efficiency. In addition, wafer contamination during transportation is likely to occur, reducing product yield.

[0003] Summary of the Invention The embodiments of the present disclosure provide a wafer processing apparatus, a wafer processing system, and a control method applicable to the wafer processing apparatus, which can improve production efficiency while reducing wafer contamination and increasing wafer production yield.

[0004] A first aspect of the present disclosure provides a wafer processing apparatus, The wafer processing apparatus includes a processing area, a wafer loading / unloading area, a boat loading / unloading area, a partition area, at least two boats, and a flow device; the processing area includes at least one processing mechanism; the wafer loading / unloading area includes a wafer loading / unloading chamber and a wafer transfer mechanism located in the wafer loading / unloading chamber, the wafer transfer mechanism being configured to transfer wafers to be processed in a pod onto a boat or to transfer processed wafers on the boat into a pod; the boat loading / unloading area includes a boat loading / unloading chamber and a boat base located in the boat loading / unloading chamber, the boat base being configured to mount a boat and enable loading / unloading of the boat to / from the processing mechanism; the partition area is located between the boat loading / unloading area and the wafer loading / unloading area and includes a plurality of partition chambers independent of one another, a front door is provided between each partition chamber and the wafer loading / unloading chamber, the front door is openable and closable to realize opening and closing between the partition chamber and the wafer loading / unloading chamber, and a rear door is provided between each partition chamber and the boat loading / unloading chamber, the rear door is openable and closable to realize opening and closing between the partition chamber and the boat loading / unloading chamber, the diverting device is configured to diverge the boat within the wafer loading / unloading chamber and the partition chamber, and is further configured to diverge the boat within the boat loading / unloading chamber and the partition chamber; The plurality of partitioned chambers include a first partitioned chamber and a second partitioned chamber, the first partitioned chamber configured to accommodate a boat loaded with wafers to be processed that is transferred therein via the wafer loading / unloading chamber, and the second partitioned chamber configured to accommodate a boat loaded with processed wafers that is transferred therein via the boat loading / unloading chamber.

[0005] In some exemplary embodiments of the present disclosure, the air pressure in the boat loading / unloading chamber is less than atmospheric pressure.

[0006] In some exemplary embodiments of the present disclosure, the pressure in the wafer loading / unloading chamber is greater than the pressure in the boat loading / unloading chamber.

[0007] In some exemplary embodiments of the present disclosure, the pressure in the wafer loading / unloading chamber is atmospheric pressure, or the pressure in the wafer loading / unloading chamber is less than atmospheric pressure.

[0008] In some exemplary embodiments of the present disclosure, the partition area further includes a pressure adjustment mechanism, and the pressure adjustment mechanism includes: adjusting the pressure in the partition chamber to be the same as the pressure in the wafer loading / unloading chamber before controlling the opening of the front door so that the partition chamber and the wafer loading / unloading chamber are in an open state; The pressure in the partition chamber is adjusted to be the same as the pressure in the boat loading / unloading chamber before controlling the opening of the rear door so that the partition chamber and the boat loading / unloading chamber are in an open state.

[0009] In some exemplary embodiments of the present disclosure, the processing mechanism includes a processing furnace tube; The processing furnace tube is provided outside the boat loading / unloading chamber and communicates with the boat loading / unloading chamber, and the processing furnace tube can provide an operating environment for wafer processing.

[0010] In some exemplary embodiments of the present disclosure, the processing furnace tube is a vertical furnace tube, and a tube opening of the processing furnace tube is provided opposite to a top of the boat loading / unloading chamber; The boat base includes a base body and a lifting mechanism, and the orthogonal projection of the pipe mouth of the processing furnace pipe is located within the base body.The lifting mechanism is connected to the base body and drives the base body to lift and lower so as to open and close the processing furnace pipe, thereby enabling the boat placed on the base body to be transported in and out of the processing furnace pipe.

[0011] In some exemplary embodiments of the present disclosure, the processing mechanism further includes a furnace tube cover, the furnace tube cover being provided on a top of the boat loading / unloading chamber and positioned inside the boat loading / unloading chamber, and being movable relative to the processing furnace tube to open and close the processing furnace tube; The furnace tube cover is capable of closing the processing furnace tube when the processing furnace tube is in a standby state.

[0012] In some exemplary embodiments of the present disclosure, the furnace tube cover includes a cover plate, a slide rail, and a connecting rod connecting the cover plate and the slide rail, the connecting rod being further configured to receive the cover plate; The slide rail is fixedly connected to the top of the boat loading / unloading chamber, one end of the connecting rod is fixedly connected to the cover plate, and the other end of the connecting rod is provided with a slider, which is slidably connected to the slide rail. The slider slides horizontally on the slide rail to move the cover plate closer to or away from the processing furnace tube, thereby opening and closing the processing furnace tube.

[0013] In some exemplary embodiments of the present disclosure, a plurality of the processing mechanisms are provided, and a plurality of the boat bases are provided, each of the boat bases corresponding to one of the processing mechanisms.

[0014] In some exemplary embodiments of the present disclosure, the transport device includes a first transport robot arm and a second transport robot arm; the first transfer robot arm is provided in the wafer loading / unloading chamber, and is configured to transfer a boat having wafers to be processed loaded in the wafer loading / unloading chamber into the first partitioned chamber when the communication between the first partitioned chamber and the wafer loading / unloading chamber is in an open state, and is further configured to transfer a boat having processed wafers loaded in the second partitioned chamber into the wafer loading / unloading chamber when the communication between the second partitioned chamber and the wafer loading / unloading chamber is in an open state; The second transport robot arm is provided in the boat loading / unloading chamber, and is configured to transport a boat with wafers to be processed loaded in the first partition chamber into the boat loading / unloading chamber when the connection between the first partition chamber and the boat loading / unloading chamber is in an open state, and is further configured to transport a boat with processed wafers loaded in the boat loading / unloading chamber into the second partition chamber when the connection between the second partition chamber and the boat loading / unloading chamber is in an open state.

[0015] In some exemplary embodiments of the present disclosure, the storage device further includes a temporary storage area for temporarily storing a plurality of pods; the wafer loading / unloading area is closer to the temporary storage area than the boat loading / unloading area; and / or The wafer loading / unloading chamber is provided with a front-opening interface mechanical standard that cooperates with a pod, and the front-opening interface mechanical standard is configured to open and close between the pod and the wafer loading / unloading chamber.

[0016] A second aspect of the present disclosure is a control method applied to any one of the wafer processing apparatuses described above, the control method comprising: controlling a transfer device to transfer the boat loaded with processed wafers in the boat loading / unloading chamber into the second partitioned chamber, and then controlling a rear door corresponding to the first partitioned chamber to open, and then controlling the transfer device to transfer the boat loaded with unprocessed wafers in the first partitioned chamber to the boat base of the boat loading / unloading chamber; The method includes the steps of controlling the flow device to transfer the boat carrying the wafers to be processed in the wafer loading / unloading chamber into the first partitioned chamber, then controlling the front door corresponding to the second partitioned chamber to open, and then controlling the flow device to transfer the boat carrying the processed wafers in the second partitioned chamber into the wafer loading / unloading chamber.

[0017] In some exemplary embodiments of the present disclosure, after controlling the diverter device to diverte the boat loaded with processed wafers in the boat loading / unloading chamber into the second partition chamber, and before controlling the rear door corresponding to the first partition chamber to be opened, controlling the rear door corresponding to the second partition chamber to be in a closed state; After controlling the flow device to flow the boat loaded with wafers to be processed into the wafer loading / unloading chamber into the first partition chamber, and before controlling to open the front door corresponding to the second partition chamber, the front door corresponding to the first partition chamber is controlled to be in a closed state.

[0018] In some exemplary embodiments of the present disclosure, the control method includes, during a process of performing a processing process on a wafer to be processed located in a boat in a processing mechanism, Controlling a wafer transfer mechanism to transfer wafers to be processed in the pod to a partially loaded boat located in the wafer loading / unloading chamber; or The method further includes a step of controlling a wafer transfer mechanism to transfer processed wafers from a boat located in the wafer loading / unloading chamber and loaded with processed wafers into the pod.

[0019] A third aspect of the present disclosure provides a wafer processing system, the wafer processing system comprising: The wafer processing apparatus according to any one of the above, and a master for implementing the control method described in any one of the above.

[0020] The technical solution according to the embodiments of the present disclosure has at least the following advantages:

[0021] In the present disclosure, a first partition chamber and a second partition chamber are provided between the wafer loading / unloading chamber and the boat loading / unloading chamber. The first partition chamber is configured to accommodate a boat carrying wafers to be processed that is transferred therein via the wafer loading / unloading chamber, and the second partition chamber is configured to accommodate a boat carrying processed wafers that is transferred therein via the boat loading / unloading chamber. In this manner, not only can the boat carrying wafers to be processed and the boat carrying processed wafers be located in different chambers, but the chamber through which the boat carrying wafers to be processed passes during its transfer can also be made different from the partition chamber through which the boat carrying processed wafers passes during its transfer. Compared to a technical solution in which the boat carrying wafers to be processed and the boat carrying processed wafers are located in the same chamber and pass through exactly the same chambers, this embodiment can prevent or reduce the diffusion of reaction by-products carried in the boat carrying processed wafers to the wafers to be processed.

[0022] In addition, an opening / closing door is provided between each partition chamber and the boat loading / unloading chamber and the wafer loading / unloading chamber, and when the opening / closing door is in a closed state, the partition chamber can be closed from the wafer loading / unloading chamber and the boat loading / unloading chamber in order to avoid or improve cross-contamination between the chambers.

[0023] Other features and advantages of the present application will become apparent from the following detailed description, or in part may be learned by the practice of the present application.

[0024] It should be noted that the above general and detailed descriptions are merely illustrative or exemplary and are not restrictive.

[0025] BRIEF DESCRIPTION OF THE DRAWINGS The drawings herein are incorporated into the specification and constitute a part of this specification, are adapted to the embodiments of the present application, and are used together with the specification to interpret the principles of the present application. It is apparent that the drawings in the following description are merely some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0026] FIG. 1 shows a schematic front view of a wafer processing apparatus according to an embodiment of the present disclosure.

[0027] FIG. 2 is a schematic plan view of the structure of a wafer processing apparatus according to an embodiment of the present disclosure.

[0028] FIG. 3 is a schematic plan view of the structure of a wafer processing apparatus according to another embodiment of the present disclosure.

[0029] 4 to 9 show schematic structural diagrams of the wafer processing apparatus of the present disclosure after performing different steps, respectively.

[0030] Drawing description: 10, processing mechanism, 101, processing furnace tube, 102, furnace tube cover, 1021, cover plate, 1022, slide rail, 1023, connecting rod, 1024, slider, 11, wafer loading / unloading chamber, 12, wafer transfer mechanism, 13, pod, 14, boat, 14a, first boat, 14b, second boat, 15, front opening interface machine standard, 16, boat loading / unloading chamber, 17, boat base, 171, base body, 172, lifting mechanism, 18, partition chamber, 18a, first partition chamber, 18b, second partition chamber, 19, front opening door, 20, rear opening door, 21, first transport robot arm, 22, second transport robot arm, 23, temporary placement chamber.

[0031] [Mode for Carrying Out the Invention] The exemplary embodiments will be described in more detail below with reference to the drawings. However, the exemplary embodiments can be implemented in various forms and are not limited to the examples set forth herein. By providing these embodiments, the present application will be more complete and thorough, and will comprehensively convey the concept of the exemplary embodiments to those skilled in the art.

[0032] Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, many specific details are provided to thoroughly understand the embodiments of the present application. However, those skilled in the art will understand that the technical solutions of the present application can be implemented without one or more of the specific details, or that other methods, components, devices, steps, etc. can be employed. In other instances, well-known methods, devices, implementations, or operations are not shown or described in detail to avoid obscuring aspects of the present application.

[0033] The present application will be described in more detail below with reference to the drawings and specific examples. The technical features of each embodiment of the present application described below can be combined with each other as long as they are not inconsistent. The embodiments described below with reference to the drawings are merely illustrative and are intended to help interpret the present application, and should not be construed as limiting the present application.

[0034] An embodiment of the present disclosure provides a wafer processing apparatus, which may include multiple processing areas, such as a processing area, a boat loading / unloading area, a wafer loading / unloading area, and a partitioning area. The structural configuration of each processing area will be described in detail later and will not be repeated here. In addition to the multiple processing areas, the wafer processing apparatus according to the embodiment of the present disclosure may further include a boat and a shunting device, which can shunt the boat between the wafer loading / unloading area, the partitioning area, and the boat loading / unloading area.

[0035] Here, the number of boats can be two, three, four, or more depending on the specific situation. By providing multiple boats, at least some of the boats can be operated in different areas of the wafer processing apparatus. For example, when one boat loaded with wafers to be processed is processing in the processing area, another empty boat can load wafers to be processed in the wafer loading / unloading area, or another boat loaded with processed wafers can unload the processed wafers in the wafer loading / unloading area. This allows the wafer processing apparatus to process wafers in batches and reduces the time it takes for the wafer processing apparatus to transport and load / unload wafers, thereby improving the production processing efficiency of the wafer processing apparatus.

[0036] Hereinafter, the structure and operation principle of a wafer processing apparatus according to an embodiment of the present disclosure will be described in detail with reference to the drawings.

[0037] As shown in FIGS. 1 and 2, in the embodiment of the present disclosure, the processing area includes at least one processing mechanism 10, which is capable of processing a wafer located therein.

[0038] As shown in Figures 1 and 2, in an embodiment of the present disclosure, the wafer loading / unloading area may include a wafer loading / unloading chamber 11 and a wafer transfer mechanism 12, and the wafer transfer mechanism 12 may be located within the wafer loading / unloading chamber 11, and the wafer transfer mechanism 12 may be configured to transfer wafers to be processed in the pod 13 to the boat 14, or to transfer processed wafers on the boat 14 into the pod 13.

[0039] As shown in FIGS. 1 and 2 , in some embodiments, the wafer loading / unloading chamber 11 may be provided with a front-opening interface mechanical standard (FIMS) 15 that cooperates with the pod 13. The front-opening interface mechanical standard 15 may be configured to open and close between the pod 13 and the wafer loading / unloading chamber 11. Specifically, during the wafer processing process, the FIMS can be used to fix, purge, and open and close the pod 13, and ensure that the pod 13 is sealed to the outside before and after the door of the pod 13 is opened, allowing the wafers to be cleaned and transported between the wafer loading / unloading chamber 11 and the pod 13.

[0040] It should be understood that if the wafer loading / unloading chamber 11 is equipped with a front-opening interface mechanical standard 15, the pod 13 of this embodiment can be configured as a Front Opening Unified Pod (FOUP) that cooperates with the front-opening interface mechanical standard 15. The FOUP of this embodiment is a sealed container that is primarily used to house semiconductor wafers and protects, transports, and stores the wafers during the manufacturing process. The sealed design can provide higher cleanliness and protection to prevent the wafers from being contaminated or damaged by the external environment.

[0041] In addition, since the number of wafers placed in a pod 13 when it is fully loaded is usually less than the number of wafers placed in a boat 14 when it is fully loaded, when each boat 14 is fully loaded, multiple pods 13 must be matched; in other words, multiple pods 13 form a set, and each set is matched with one boat 14.

[0042] 1 and 2, in this embodiment, one wafer transfer mechanism 12 is provided in the wafer loading / unloading chamber 11, and wafers can be transferred between the boat 14 and the pod 13 by the single wafer transfer mechanism 12. However, this is not limited to this, and if there is sufficient space in the wafer loading / unloading chamber 11, multiple wafer transfer mechanisms 12 may be provided, which can improve the efficiency of wafer loading and unloading.

[0043] 1 and 2 , the boat loading / unloading area includes a boat loading / unloading chamber 16 and a boat base 17 located in the boat loading / unloading chamber 16, and the boat base 17 mounts the boat 14 thereon to enable loading / unloading of the boat 14 into / from the processing mechanism 10. Specifically, the boat base 17 may be configured to mount the boat 14 carrying wafers to be processed thereon and to transport the boat 14 carrying the wafers to be processed into the processing mechanism 10 for processing. After the processing is completed, the boat base 17 mounts the boat 14 carrying processed wafers thereon and transports the boat 14 carrying the processed wafers out of the processing mechanism 10.

[0044] As shown in FIGS. 1 and 2, the partition area is located between the boat loading / unloading area and the wafer loading / unloading area, and the partition area may include a plurality of partitioned chambers 18 that are independent from each other.

[0045] Here, a front door 19 is provided between each partition chamber 18 and the wafer loading / unloading chamber 11, and the front door 19 can be opened and closed to enable the partition chamber 18 and the wafer loading / unloading chamber 11 to be opened and closed. In other words, when the front door 19 is in an open state, the partition chamber 18 and the wafer loading / unloading chamber 11 are open. In this way, the flow diversion device can divert the boat 14 between the partition chamber 18 and the wafer loading / unloading chamber 11. When the front door 19 is in a closed state, the partition chamber 18 and the wafer loading / unloading chamber 11 are closed. In this way, the partition chamber 18 is sealed from the wafer loading / unloading chamber 11, thereby avoiding or improving cross-contamination between the partition chamber 18 and the wafer loading / unloading chamber 11.

[0046] In addition, a rear door 20 is provided between each partition chamber 18 and the boat loading / unloading chamber 16, and the rear door 20 can be opened and closed to enable the partition chamber 18 and the boat loading / unloading chamber 16 to be opened and closed. That is, when the rear door 20 is in an open state, the partition chamber 18 and the boat loading / unloading chamber 16 are separated from each other. In this way, the diverting device can diverte the boat 14 between the partition chamber 18 and the boat loading / unloading chamber 16. When the rear door 20 is in a closed state, the partition chamber 18 and the boat loading / unloading chamber 16 are separated from each other. In this way, the partition chamber 18 is sealed from the boat loading / unloading chamber 16, thereby avoiding or improving cross-contamination between the partition chamber 18 and the boat loading / unloading chamber 16.

[0047] In an embodiment of the present disclosure, as shown in FIG. 2 , the plurality of partitioned chambers 18 may include a first partitioned chamber 18 a and a second partitioned chamber 18 b, where the first partitioned chamber 18 a is for accommodating the boat 14 loaded with wafers to be processed that is transferred therein via the wafer transfer chamber 11, and the second partitioned chamber 18 b is for accommodating the boat 14 loaded with processed wafers that is transferred therein via the boat transfer chamber 16. In this way, not only can the boat 14 loaded with wafers to be processed and the boat 14 loaded with processed wafers be located in different chambers, but also the chambers through which the boat 14 loaded with wafers to be processed passes during transfer can be different from the chambers through which the boat 14 loaded with processed wafers passes during transfer. For example, the boat 14 loaded with wafers to be processed may be transferred to a different chamber. The transfer path is wafer load / unload chamber 11 → first partition chamber 18a → boat load / unload chamber 16 → processing mechanism 10, and the transfer path of boat 14 carrying processed wafers is processing mechanism 10 → boat load / unload chamber 16 → second partition chamber 18b → wafer load / unload chamber 11. In other words, the partition chambers 18 routed in the transfer path of boat 14 carrying wafers to be processed are different from the partition chambers 18 routed in the transfer path of boat 14 carrying processed wafers. In contrast to the case where boat 14 carrying wafers to be processed and boat 14 carrying processed wafers are located in the same chamber and the chambers they pass through are completely the same, in this embodiment, it is possible to avoid or improve the diffusion of reaction by-products carried in boat 14 carrying processed wafers to wafers (i.e., wafers to be processed) just before they are processed.

[0048] Furthermore, in the process of unloading one boat 14 loaded with processed wafers from the processing mechanism 10, the other boat 14 loaded with wafers to be processed can be sealed in the first partition chamber 18a and wait there. In other words, compared to a system in which the other boat 14 loaded with wafers to be processed is positioned within the first partition chamber 18a, and the rear door 20 between the first partition chamber 18a and the boat loading / unloading chamber 16 is closed, and the other boat 14 loaded with unprocessed wafers is rotated and waits in the boat loading / unloading chamber 16, this embodiment can prevent reaction by-products within the processing mechanism 10 from being sprayed onto the wafers to be processed, thereby preventing the wafers from being contaminated.

[0049] In the process of unloading the boat 14 loaded with processed wafers from the processing mechanism 10, the other boat 14 loaded with wafers to be processed is not limited to being sealed in the first partition chamber 18a and waiting, but the other boat 14 loaded with wafers to be processed can also be sealed in the wafer loading / unloading chamber 11 and waiting, and specific adjustments can be made according to the actual situation.

[0050] 1 and 2 , the processing mechanism 10 may include a processing furnace tube 101, which is provided outside the boat loading / unloading chamber 16 and communicates with the boat loading / unloading chamber 16. The processing furnace tube 101 is for accommodating the boat 14 and can provide a required working environment for the wafers on the processing boat 14. Note that the processing mechanism 10 according to the embodiments of the present disclosure may also include an air supply device (not shown) in addition to the processing furnace tube 101 for accommodating the boat 14. By supplying a reactive gas into the processing furnace tube 101 via the air supply device, processing can be performed on the wafers positioned in the processing furnace tube 101.

[0051] For example, the processing furnace tube 101 may be a vertical furnace tube, and the nozzle of the processing furnace tube 101 is installed opposite the top of the boat loading / unloading chamber 16. In other words, the processing furnace tube 101 may be installed at the top of the boat loading / unloading chamber 16, and a passage hole corresponding to the nozzle of the processing furnace tube 101 may be installed at the top of the boat loading / unloading chamber 16, so that the interior of the processing furnace tube 101 can communicate with the interior of the boat loading / unloading chamber 16. As shown in FIG. 1, the boat base 17 may include a base body 171 and a lifting mechanism 172, and the orthogonal projection of the nozzle of the processing furnace tube 101 is located within the base body 171. The lifting mechanism 172 is connected to the base body 171 and drives the base body 171 to move up and down to open and close the processing furnace tube 101, thereby realizing the loading and unloading of the boat 14 placed on the base body 171.

[0052] Here, since the orthogonal projection of the nozzle of the processing furnace tube 101 is located inside the base body 171, the lifting mechanism 172 drives the base body 171 to raise, and after the boat 14 placed on the base body 171 is completely transported into the processing furnace tube 101, the base body 171 seals the nozzle of the processing furnace tube 101, sealing the inside of the processing furnace tube 101, thereby providing a clean working environment for wafer processing and improving the efficiency of wafer heat treatment.

[0053] In this embodiment, the vertical furnace tube is used in conjunction with the vertical lift-up boat base 17, which allows the boat 14 to be loaded and unloaded into the processing furnace tube 101, and also reduces the footprint of the wafer processing equipment so that it can be adapted to a larger number of production factories.

[0054] In an embodiment of the present disclosure, as shown in FIG. 1 , the processing mechanism 10 may further include a furnace tube cover 102, which is provided on the top of the boat loading / unloading chamber 16 and located inside the boat loading / unloading chamber 16, and is movable relative to the processing furnace tube 101 to open and close the processing furnace tube 101. Here, the furnace tube cover 102 closes the processing furnace tube 101 when the processing furnace tube 101 is in a standby state, thereby preventing contaminants in the boat loading / unloading chamber 16 from diffusing into the processing furnace tube 101, thereby preventing the wafers from being contaminated by the processing furnace tube 101 during subsequent processing, and improving product quality.

[0055] When the processing furnace tube 101 is in operation, the furnace tube cover 102 can open the processing furnace tube 101, and at this time, the lifting mechanism 172 can be driven to raise the base body 171, thereby allowing the boat 14 placed on the base body 171 to be completely transported into the processing furnace tube 101 and wafer processing to be performed.

[0056] In some alternative embodiments, the furnace tube cover 102 may include a cover plate 1021, a slide rail 1022, and a connecting rod 1023 for connecting the cover plate 1021 and the slide rail 1022, the connecting rod 1023 being further configured to receive the cover plate 1021, the slide rail 1022 being fixedly connected to the top of the boat loading / unloading chamber 16, one end of the connecting rod 1023 being fixedly connected to the cover plate 1021, and the other end of the connecting rod 1023 being provided with a slider 1024, the slider 1024 being slidably connected to the slide rail 1022, the slider 1024 sliding horizontally on the slide rail 1022 to move the cover plate 1021 closer to or farther away from the processing furnace tube 101, thereby closing or opening the processing furnace tube 101.

[0057] In this embodiment, the furnace tube cover 102 is installed on the top of the boat loading / unloading chamber 16, and the cover plate 1021 is driven using a horizontal drive method, thereby shortening the movement path of the cover plate 1021 when opening and closing the processing furnace tube 101, reducing the difficulty of driving, while also preventing the furnace tube cover 102 and the boat base 17 from interfering with each other during movement.

[0058] In some embodiments, when the processing furnace tube 101 needs to be in operation, the cover plate 1021 of the furnace tube cover 102 can be opened during the process of driving the base body 171 of the boat base 17 to rise. For example, after the boat 14 loaded with unprocessed wafers is transferred to the base body 171, the lifting mechanism 172 drives the base body 171 to move upward, thereby vertically moving the boat 14 on the base body 171 toward the processing furnace tube 101. Before the boat 14 enters the processing furnace tube 101, the slider 1024 can be driven to move horizontally away from the processing furnace tube 101, causing the cover plate 1021 to move away from the processing furnace tube 101, thereby opening the processing furnace tube 101 and facilitating the later loading of the boat 14 into the processing furnace tube 101 by the boat base 17. This design reduces the exposure time of the interior of the processing furnace tube 101 and reduces contamination of the interior of the processing furnace tube 101.

[0059] In addition, in the process of driving the cover plate 1021 to move away from the processing furnace tube 101 and opening the processing furnace tube 101, the lifting mechanism 172 can still be driven synchronously to lift the base body 171, and there is no need to stop and wait to improve the processing efficiency of the wafer processing apparatus.

[0060] However, in some other embodiments, the cover plate 1021 can be driven first to move away from the processing furnace tube 101, and after the processing furnace tube 101 is fully opened, the base body 171 can be driven again to move upward, thereby transporting the boat 14 placed on the base body 171 into the processing furnace tube 101, and the specific embodiment to be adopted can be determined depending on the specific situation.

[0061] In addition, when the processing furnace tube 101 needs to be in a standby state for operation, the base body 171 of the boat base 17 can be driven to descend first, and after the boat 14 placed on the base body 171 is completely removed from the processing furnace tube 101, the cover plate 1021 can be driven to move in a direction approaching the processing furnace tube 101, thereby closing the processing furnace tube 101.

[0062] For example, a plurality of the processing mechanisms 10 and boat bases 17 may be provided, and each boat base 17 may form a set corresponding to one processing mechanism 10. By providing a plurality of sets of processing mechanisms 10 and boat bases 17 that cooperate with each other, processing can be performed on wafers to be processed on a plurality of boats 14, thereby improving the processing efficiency of the wafer processing apparatus. As described with reference to FIGS. 1 and 3, while one boat 14 carrying wafers to be processed is loaded into the corresponding processing mechanism 10 by one boat base 17 and processed, another boat 14 carrying wafers to be processed can be loaded into the corresponding processing mechanism 10 by another boat base 17 and processed, thereby improving the production takt time of the entire wafer processing apparatus.

[0063] The number of processing mechanisms 10 and boat bases 17 in this embodiment is not limited to two as shown in FIG. 3 , but may be three, four, or the like, and may be determined according to actual circumstances. In this embodiment, the number of boats 14 may be at least one more than the number of processing mechanisms 10 and boat bases 17. For example, when a set of processing mechanisms 10 and boat bases 17 is provided as shown in FIGS. 1 and 2 , the number of boats 14 may be two, but is not limited to this, and more may be provided. When two sets of processing mechanisms 10 and boat bases 17 are provided as shown in FIG. 3 , the number of boats 14 may be three, but is not limited to this, and more may be provided. This ensures closer coordination of procedures such as loading / unloading, transport, and processing to reduce idle time of each processing mechanism 10 and each chamber during operation of the wafer processing apparatus, thereby improving the production efficiency of the wafer processing apparatus.

[0064] In an embodiment of the present disclosure, after the wafers on the boat 14 are processed in the processing mechanism 10, the boat base 17 is required to unload the boat 14 loaded with the processed wafers from the processing mechanism 10. In order to reduce the generation and dispersion of by-product particles during the unloading process, the air pressure within the processing mechanism 10 can be made equal to or greater than the air pressure within the boat loading / unloading chamber 16.

[0065] Furthermore, the air pressure within the boat loading / unloading chamber 16 can be made lower than atmospheric pressure. In this way, the boat loading / unloading chamber 16 can be formed as a negative pressure chamber, which reduces the entry of external dust particles and the like into the boat loading / unloading chamber 16, thereby reducing the content of contaminants such as dust particles within the boat loading / unloading chamber 16 and reducing the diffusion of contaminants such as dust particles within the boat loading / unloading chamber 16 to other areas, thereby reducing cross-contamination situations and improving the quality and stability of the entire process.

[0066] In this embodiment, the wafer loading / unloading chamber 11 is located upstream of the boat loading / unloading chamber 16. That is, during the operation of the wafer processing apparatus, unprocessed wafers are first loaded onto the boat 14 via the wafer loading / unloading chamber 11, and then the boat 14 with the unprocessed wafers loaded is transferred into the boat loading / unloading chamber 16. Therefore, since the wafer loading / unloading chamber 11 is more likely to communicate with the atmosphere than the boat loading / unloading chamber 16, in this embodiment, the pressure within the wafer loading / unloading chamber 11 is designed to be greater than the pressure within the boat loading / unloading chamber 16 to avoid damage to the wafers during transfer due to an excessively large pressure difference between the wafer loading / unloading chamber 11 and the external atmosphere.

[0067] For example, the pressure inside the wafer loading / unloading chamber 11 may be normal pressure, that is, the pressure inside the wafer loading / unloading chamber 11 may be equal to the pressure of the external atmospheric atmosphere. In this way, there is no need to provide a pressure adjustment mechanism inside the wafer loading / unloading chamber 11, thereby reducing the cost of the wafer processing apparatus.

[0068] In another embodiment, the pressure in the wafer loading / unloading chamber 11 may be slightly lower than atmospheric pressure, thereby creating a negative pressure in the wafer loading / unloading chamber 11, reducing the amount of external dust particles and other contaminants entering the wafer loading / unloading chamber 11 and reducing the content of dust particles and other contaminants in the wafer loading / unloading chamber 11.

[0069] Here, since the pressure in the wafer loading / unloading chamber 11 on the front side of the partition chamber 18 is different from the pressure in the boat loading / unloading chamber 16 on the rear side of the partition chamber 18, in order to balance the pressures in the partition chamber 18 and the loading / unloading chambers on both the front and rear sides thereof, this embodiment may further provide a pressure adjustment mechanism (not shown) in the partition area, and this pressure adjustment mechanism may be configured to adjust the pressure in the partition chamber 18. Specifically, before controlling the opening of the front opening / closing door 19 so that the partition chamber 18 and the wafer loading / unloading chamber 11 are in an open state, the pressure adjustment mechanism of this embodiment is configured to adjust the pressure in the partition chamber 18 to be the same as the pressure in the wafer loading / unloading chamber 11. The pressure adjustment mechanism may be configured to adjust the pressure in the partition chamber 18 to be the same as the pressure in the boat loading / unloading chamber 16 before controlling the opening of the rear door 20 so that the partition chamber 18 and the boat loading / unloading chamber 16 are in an open state, thereby preventing convection from being formed due to the difference in pressure between the partition chamber 18 and the wafer loading / unloading chamber 11 when the front door 19 is opened, and preventing the wafers on the boat 14 from being damaged by the suction force caused by the convection.

[0070] In this embodiment, the pressure in the first partitioned chamber 18a and the pressure in the second partitioned chamber 18b can be independently controlled by a pressure adjustment mechanism. For example, the pressure adjustment mechanism may include a first pressure adjustment device and a second pressure adjustment device that are independently controlled from each other. The first pressure adjustment device can cooperate with the first partitioned chamber 18a to independently adjust the pressure in the first partitioned chamber 18a, and the second pressure adjustment device can cooperate with the second partitioned chamber 18b to independently adjust the pressure in the second partitioned chamber 18b. This design allows the wafer processing apparatus to adapt to the transfer situation of multiple boats 14, and avoids the pressure in the first partitioned chamber 18a and the pressure in the second partitioned chamber 18b from interfering with the actual operating process during the transfer of the boat 14.

[0071] For example, when the boat 14 loaded with unprocessed wafers is transferred from the wafer loading / unloading chamber 11 to the first partitioned chamber 18a, and the boat 14 loaded with processed wafers is also transferred from the boat loading / unloading chamber 16 to the second partitioned chamber 18b at the same time, the first pressure adjusting device adjusts the pressure in the first partitioned chamber 18a to the same pressure as the pressure in the wafer loading / unloading chamber 11 before the front door 19 of the first partitioned chamber 18a opens, and the second pressure adjusting device adjusts the pressure in the second partitioned chamber 18b to the same pressure as the pressure in the boat loading / unloading chamber 16 before the rear door 20 of the second partitioned chamber 18b opens. However, when the boat 14 loaded with unprocessed wafers is being transferred from the first partition chamber 18a to the boat loading / unloading chamber 16, and the boat 14 loaded with processed wafers is also simultaneously transferred from the second partition chamber 18b into the wafer loading / unloading chamber 11, the pressure in the first partition chamber 18a is adjusted by the first pressure adjusting device to be the same as the pressure in the boat loading / unloading chamber 16 before the rear opening / closing door 20 of the first partition chamber 18a opens, and the pressure in the second partition chamber 18b is adjusted by the second pressure adjusting device to be the same as the pressure in the wafer loading / unloading chamber 11 before the front opening / closing door 19 of the second partition chamber 18b opens.

[0072] The pressure in the first partition chamber 18a and the pressure in the second partition chamber 18b may be controlled synchronously by a pressure adjustment mechanism, i.e., the pressure in the first partition chamber 18a and the pressure in the second partition chamber 18b are always the same. However, adopting a method of synchronously adjusting the pressures prevents the front door 19 of the first partition chamber 18a and the rear door 20 of the second partition chamber 18b from opening simultaneously during transfer, or prevents the rear door 20 of the first partition chamber 18a and the front door 19 of the second partition chamber 18b from opening simultaneously during transfer, thereby preventing convection from occurring due to the difference in pressure between the partition chamber 18 and the corresponding open loading / unloading chamber, and preventing the wafers on the boat 14 from being damaged by the suction force caused by the convection.

[0073] Before adjusting the pressure inside the partitioned chamber 18, it is necessary to close both the front and rear opening / closing doors 20 corresponding to the partitioned chamber 18, thereby closing the partitioned chamber 18 and facilitating the adjustment of the pressure inside the partitioned chamber 18.

[0074] In some embodiments of the present disclosure, as shown in FIGS. 1 to 3 , the transfer device may include a first transfer robot arm 21 and a second transfer robot arm 22, where the first transfer robot arm 21 may be located in the wafer loading / unloading chamber 11 and the second transfer robot arm 22 may be located in the boat loading / unloading chamber 16, with one transfer robot arm located in each loading / unloading chamber, thereby realizing the transfer of the boat 14 and making operation more convenient and flexible.

[0075] In this embodiment, the first transfer robot arm 21 is configured to transfer the boat 14, which has wafers to be processed loaded in the wafer load / unload chamber 11, into the first partition chamber 18a when the connection between the first partition chamber 18a and the wafer load / unload chamber 11 is in an open state, and the first transfer robot arm 21 is further configured to transfer the boat 14, which has processed wafers loaded in the second partition chamber 18b, into the wafer load / unload chamber 11 when the connection between the second partition chamber 18b and the wafer load / unload chamber 11 is in an open state. The second transfer robot arm 22 is provided in the boat load / unload chamber 16 and is configured to transfer the boat 14, which has processed wafers loaded in the second partition chamber 18b, into the wafer load / unload chamber 11 when the connection between the first partition chamber 18a and the boat The second transport robot arm 22 is configured to transport the boat 14 with wafers to be processed loaded in the first partition chamber 18a into the boat load / unload chamber 16 when the connection between the second partition chamber 18b and the boat load / unload chamber 16 is open, specifically, it may be configured to transport it to the boat base 17 in the boat load / unload chamber 16. Note that the second transport robot arm 22 is configured to transport the boat 14 with processed wafers loaded in the boat load / unload chamber 16 into the second partition chamber 18b when the connection between the second partition chamber 18b and the boat load / unload chamber 16 is open, specifically, it may be configured to transport the boat 14 with processed wafers loaded on the boat base 17 into the second partition chamber 18b.

[0076] 1, the wafer processing apparatus may include, in addition to the processing areas such as the wafer loading / unloading area, boat loading / unloading area, processing area, and partition area, a temporary storage area for temporarily storing multiple pods 13. Note that the multiple pods 13 temporarily stored in the temporary storage area in this embodiment may include pods 13 containing unprocessed wafers or pods 13 containing processed wafers.

[0077] Here, as shown in FIG. 1, the temporary storage area in this embodiment may include a temporary storage chamber 23 for accommodating the pod 13, but is not limited to this, and may also include a holder for storing the pod 13, a transfer robot arm for transporting the pod 13 to a specified position, or other mechanical mechanisms, but is not limited to these.

[0078] Furthermore, as shown in FIG. 1, the wafer loading / unloading area in this embodiment is closer to the temporary storage area than the boat loading / unloading area, thereby shortening the transfer path of the pod 13 and improving transfer efficiency.

[0079] An embodiment of the present invention further provides a control method based on the wafer processing apparatus described in any of the above embodiments, which can include at least step S100 and step S102. Hereinafter, the control method according to the embodiment of the present invention will be specifically described with reference to FIGS.

[0080] In step S100, the diverter is controlled to transfer the boat 14 loaded with processed wafers in the boat loading / unloading chamber 16 into the second partition chamber 18b, and then the rear door 20 corresponding to the first partition chamber 18a is controlled to open. Then, the diverter is again controlled to transfer the boat 14 loaded with unprocessed wafers in the first partition chamber 18a to the boat base 17 of the boat loading / unloading chamber 16 to await subsequent processing. This operation prevents the boat 14 loaded with unprocessed wafers and the boat 14 loaded with processed wafers from being located in the same boat loading / unloading chamber 16, thereby preventing by-products carried on the boat 14 loaded with processed wafers from diffusing into the unprocessed wafers.

[0081] In some embodiments, after controlling the flow device to flow the boat 14 loaded with processed wafers in the boat loading / unloading chamber 16 into the second partition chamber 18b, and before controlling the rear door 20 corresponding to the first partition chamber 18a to open, the rear door 20 corresponding to the second partition chamber 18b is controlled to be closed, thereby sealing the first partition chamber 18a and the second partition chamber 18b on the rear door 20 side to prevent by-products carried on the boat 14 loaded with processed wafers in the second partition chamber 18b from diffusing from the rear door 20 side to the unprocessed wafers in the first partition chamber 18a.

[0082] In addition, after controlling the flow device to flow the boat 14 loaded with processed wafers in the boat loading / unloading chamber 16 into the second partition chamber 18b, before controlling the rear door 20 corresponding to the first partition chamber 18a to open, the rear door 20 corresponding to the second partition chamber 18b can be controlled to be closed, and the front doors 19 corresponding to the first partition chamber 18a and the second partition chamber 18b can also be controlled to be closed, thereby preventing by-products carried on the boat 14 loaded with processed wafers in the second partition chamber 18b from diffusing from the front door 19 side to the unprocessed wafers in the first partition chamber 18a or to the unprocessed wafers in the wafer loading / unloading chamber 11.

[0083] In step S102, the flow device is controlled to transfer the boat 14 loaded with wafers to be processed into the first partition chamber 18a within the wafer loading / unloading chamber 11, and then the front door 19 corresponding to the second partition chamber 18b is controlled to open first. Thereafter, the flow device is controlled again to transfer the boat 14 loaded with processed wafers within the second partition chamber 18b to the wafer loading / unloading chamber 11 and wait for the processed wafers to be subsequently unloaded. In this way, it is possible to prevent the boat 14 loaded with unprocessed wafers and the boat 14 loaded with processed wafers from being located in the same wafer loading / unloading chamber 11, and to reduce the diffusion of by-products carried on the boat 14 loaded with processed wafers to the unprocessed wafers.

[0084] In some embodiments, after controlling the flow device to flow the boat 14 loaded with wafers to be processed in the wafer loading / unloading chamber 11 into the first partition chamber 18a, the front door 19 corresponding to the first partition chamber 18a is controlled to be closed before controlling the front door 19 corresponding to the second partition chamber 18b to be opened.In this way, the first partition chamber 18a and the second partition chamber 18b can be closed on the front door 19 side to prevent by-products carried on the boat 14 loaded with processed wafers in the second partition chamber 18b from diffusing from the front door 19 side to the unprocessed wafers in the first partition chamber 18a.

[0085] In addition, after controlling the flow device to flow the boat 14 loaded with wafers to be processed in the wafer loading / unloading chamber 11 into the first partition chamber 18a, and before controlling the front door 19 corresponding to the second partition chamber 18b to open, in addition to controlling the front door 19 corresponding to the first partition chamber 18a to be closed, it is also possible to control the rear door 20 corresponding to the first partition chamber 18a and the second partition chamber 18b to be closed, thereby preventing by-products carried on the boat 14 loaded with processed wafers in the second partition chamber 18b from diffusing from the rear door 20 side to the unprocessed wafers in the first partition chamber 18a.

[0086] Here, since the pressure in the wafer loading / unloading chamber 11 on the front side of the partition chamber 18 in the above technical proposal is different from the pressure in the boat loading / unloading chamber 16 on the rear side of the partition chamber 18, before opening the front and rear opening / closing doors of the partition chamber 18, the pressure adjustment mechanism must adjust the pressure in the partition chamber 18 so that it is the same as the pressure in the corresponding open side loading / unloading chamber.Here, in this embodiment, in order to make it easier to adjust the pressure in the partition chamber 18, it is necessary to control both the front and rear opening / closing doors of the partition chamber 18 to be closed so that the partition chamber 18 is sealed before adjusting the pressure.

[0087] In some embodiments of the present disclosure, the control method may further include, during the process of processing wafers to be processed located in a boat 14 in the processing mechanism 10, controlling the wafer transfer mechanism 12 to transfer wafers to be processed in the pod 13 onto a boat 14 located in the wafer load / unload chamber 11 that is not fully loaded, or controlling the wafer transfer mechanism 12 to transfer processed wafers from a boat 14 located in the wafer load / unload chamber 11 and loaded with processed wafers into the pod 13. In this way, it is possible to ensure that while wafers on one boat 14 are being processed in the processing mechanism 10, the other boat 14 has completed loading and unloading of wafers in the wafer load / unload chamber 11, thereby improving the processing efficiency of the wafer processing apparatus.

[0088] In addition, while wafers on one boat 14 are being processed in the processing mechanism 10, other boats 14 are not limited to being loaded and unloaded in the wafer loading / unloading chamber 11. It is also possible to have a boat 14 loaded with unprocessed wafers wait in the first partition chamber 18a before being loaded into the boat loading / unloading chamber 16, or to have a boat 14 loaded with processed wafers wait in the second partition chamber 18b before being loaded into the wafer loading / unloading chamber 11, and this may be determined depending on the specific situation.

[0089] In one specific embodiment of the present disclosure, as shown in Figures 1, 2, and 4 to 9, the control method will be described using an example in which the wafer processing apparatus includes one processing mechanism 10, one boat base 17, and two boats 14, i.e., a first boat 14a and a second boat 14b. Here, the control method of this embodiment may include the following steps:

[0090] In step S10, as shown in FIG. 4, in the initial stage, both the first boat 14a and the second boat 14b are empty and positioned in the wafer loading / unloading chamber 11 to wait for the wafer loader.

[0091] In step S11, the robot arm is controlled to transfer the pod 13 containing unprocessed wafers in the temporary storage area to the front-opening interface machine standard 15.

[0092] In step S12, the front-opening interface mechanical standard 15 is controlled to open the gap between the pod 13 and the wafer loading / unloading chamber 11, and the wafer transfer mechanism 12 is controlled to transfer the unprocessed wafers in the pod 13 to the first boat 14a first.

[0093] In step S13, after the first boat 14a is fully loaded with unprocessed wafers, the pressure adjustment mechanism is first controlled to adjust the pressure inside the first partition chamber 18a to the pressure inside the wafer loading / unloading chamber 11, then the front door 19 corresponding to the first partition chamber 18a is controlled to open, and the first transport robot arm 21 is again controlled to transfer the first boat 14a loaded with unprocessed wafers into the first partition chamber 18a, and then, as shown in Figure 5, the front door 19 corresponding to the first partition chamber 18a is controlled to close, and then the pressure adjustment mechanism is controlled to reduce the pressure inside the first partition chamber 18a to the pressure inside the boat loading / unloading chamber 16, and then the rear door 20 corresponding to the first partition chamber 18a is controlled to open.

[0094] In step S14, the rear door 20 corresponding to the first partition chamber 18a is controlled to open, and then the second transport robot arm 22 is controlled to move the first boat 14a carrying unprocessed wafers to the boat base 17 in the boat loading / unloading chamber 16, and then the rear door 20 corresponding to the first partition chamber 18a is controlled to close.

[0095] In step S15, as shown in FIG. 6, the furnace tube cover 102 is controlled to open the processing furnace tube 101, and the lifting mechanism 172 of the boat base 17 is controlled to drive the base body 171 to perform an upward movement, thereby lifting the first boat 14a loaded with unprocessed wafers into the processing furnace tube 101.

[0096] In step S16, the first boat 14a loaded with unprocessed wafers is completely loaded into the processing furnace tube 101, and after the base body 171 of the boat base 17 seals the processing furnace tube 101, processing is performed on the wafers on the first boat 14a.

[0097] In step S17, while the first boat 14a, from which no wafers have been removed, is being transferred step by step from the wafer chamber 11 into the processing furnace tube 101 for processing, the wafer transfer mechanism 12 can be controlled to transfer the unprocessed wafers in the pod 13 into the second boat 14b.

[0098] In step S18, after the second boat 14b is fully loaded with unprocessed wafers, the pressure adjustment mechanism is first controlled to adjust the pressure inside the first partition chamber 18a to the pressure inside the wafer loading / unloading chamber 11, and then the front door 19 corresponding to the first partition chamber 18a is controlled to open, and the first transport robot arm 21 is again controlled to transfer the second boat 14b loaded with unprocessed wafers into the first partition chamber 18a, and then the front door 19 corresponding to the first partition chamber 18a is controlled to close, as shown in Figure 7, and then the pressure adjustment mechanism is controlled to reduce the pressure inside the first partition chamber 18a to the pressure inside the boat loading / unloading chamber 16.

[0099] In step S19, after the wafers on the first boat 14a are processed in the processing furnace tube 101, the boat base 17 is controlled to cause the first boat 14a loaded with the processed wafers to withdraw from the processing furnace tube 101. Note that the process of step S19 can be performed in synchronization with the process of "controlling the pressure adjustment mechanism to reduce the pressure in the first partition chamber 18a to the pressure in the boat loading / unloading chamber 16" in step S18, but is not limited to this. The withdrawal of the first boat 14a or the reduction of the pressure in the first partition chamber 18a may be performed first.

[0100] In step S20, after the first boat 14a loaded with the processed wafers has been completely withdrawn from the processing furnace tube 101 by the boat base 17, the rear door 20 corresponding to the second partition chamber 18b is controlled to open, and then the second transfer robot arm 22 is controlled to transfer the first boat 14a loaded with the processed wafers into the second partition chamber 18b. As shown in FIG. 8, the rear door 20 corresponding to the second partition chamber 18b is then controlled to close, and then the pressure adjustment mechanism is controlled to increase the pressure in the second partition chamber 18b to the pressure in the wafer loading / unloading chamber 11. Then the front door 19 corresponding to the second partition chamber 18b is controlled to open, and then the first boat 14a loaded with the processed wafers is transferred into the second partition chamber 18b. The first transfer robot arm 21 is controlled to transfer the first boat 14a from the second partitioned chamber 18b to the wafer loading / unloading chamber 11. As shown in FIG. 9, in step S20, before the rear door 20 corresponding to the second partitioned chamber 18b is controlled to open, the pressure in the second partitioned chamber 18b must be adjusted to the pressure in the boat loading / unloading chamber 16 by the pressure adjustment mechanism. This process can be performed in synchronization with the process in step S18 of "controlling the pressure adjustment mechanism to reduce the pressure in the first partitioned chamber 18a to the pressure in the boat loading / unloading chamber 16." However, this is not limitative, and the pressure in the first partitioned chamber 18a and the pressure in the second partitioned chamber 18b may be adjusted separately.

[0101] In step S21, the second transport robot arm 22 is controlled to transfer the first boat 14a loaded with processed wafers into the second partition chamber 18b, and then the rear door 20 corresponding to the second partition chamber 18b is controlled to close, and then the rear door 20 corresponding to the first partition chamber 18a is controlled to open, and then the second transport robot arm 22 is controlled to transfer the second boat 14b loaded with unprocessed wafers to the boat base 17 in the boat loading / unloading chamber 16, and then the rear door 20 corresponding to the first partition chamber 18a is controlled to close, as shown in Figure 9.

[0102] In step S22, in the process of controlling the wafer transfer mechanism 12 to transfer the processed wafers on the first boat 14a into the pod 13, the lifting mechanism 172 of the boat base 17 can be further controlled to drive the base body 171 to perform an upward movement, and the second boat 14b loaded with unprocessed wafers is raised into the processing furnace tube 101 for processing.

[0103] After the unloading of the processed wafers on the first boat 14a is completed, the second boat 14b is still being processed in the processing furnace tube 101. At this time, the unprocessed wafers in the pod 13 are transferred back to the first boat 14a, and then the above steps are repeated to realize alternate processing of the first boat 14a and the second boat 14b.

[0104] The control method of this embodiment is not limited to the above, but only needs to ensure that a boat 14 loaded with processed wafers and a boat 14 loaded with unprocessed wafers are not positioned in the same chamber at the same time.

[0105] An embodiment of the present disclosure further provides a wafer processing system including a wafer processing apparatus and a master, and the specific configuration of the wafer processing apparatus can refer to the contents described in any of the above embodiments and will not be repeated here, but the master may be configured to realize the control method described in any of the above embodiments and will not be repeated here.

[0106] The terms "first," "second," etc. are for descriptive purposes only and cannot be understood as indicating or implying relative importance or the number of the indicated technical features. Thus, a feature such as "first," "second," etc. can explicitly or implicitly include one or more features. In the description of this application, "plurality" means two or more than two, unless otherwise specified.

[0107] In the description herein, references to terms such as "some examples," "exemplary," and the like mean that the specific features, structures, materials, or characteristics described in combination in the examples or examples are included in at least one example or example of the present application. In the present specification, schematic expressions for the above terms do not necessarily refer to the same example or example. Furthermore, the described specific features, structures, materials, or characteristics may be combined in any appropriate manner in any one or more examples or examples. Furthermore, unless mutually inconsistent, those skilled in the art may combine and combine different embodiments or examples and features of different embodiments or examples described herein.

[0108] Although the embodiments of the present application have been shown and described above, the above embodiments are merely illustrative and should not be understood as limitations on the present application. Those skilled in the art may make changes, modifications, substitutions and variations to the above embodiments within the scope of the present application, and any changes or modifications made in accordance with the claims and specification of the present application fall within the scope of the claims of the present application. [Brief explanation of the drawings]

[0109] [Figure 1] 1 is a schematic front view of a wafer processing apparatus according to an embodiment of the present disclosure; [Figure 2] 1 is a schematic plan view of a wafer processing apparatus according to an embodiment of the present disclosure; [Figure 3] FIG. 10 is a schematic plan view of a wafer processing apparatus according to another embodiment of the present disclosure. [Figure 4] 1A-1C show schematic structural diagrams of the wafer processing apparatus of the present disclosure after performing different steps, respectively. [Figure 5] 1A-1C show schematic structural diagrams of the wafer processing apparatus of the present disclosure after performing different steps, respectively. [Figure 6] 1A-1C show schematic structural diagrams of the wafer processing apparatus of the present disclosure after performing different steps, respectively. [Figure 7] 1A-1C show schematic structural diagrams of the wafer processing apparatus of the present disclosure after performing different steps, respectively. [Figure 8]1A-1C show schematic structural diagrams of the wafer processing apparatus of the present disclosure after performing different steps, respectively. [Figure 9] 1A-1C show schematic structural diagrams of the wafer processing apparatus of the present disclosure after performing different steps, respectively.

Claims

1. A wafer processing apparatus including a processing area, a wafer loading / unloading area, a boat loading / unloading area, a partition area, at least two boats, and a flow device, the processing area includes at least one processing mechanism; the wafer loading / unloading area includes a wafer loading / unloading chamber and a wafer transfer mechanism located in the wafer loading / unloading chamber, the wafer transfer mechanism being configured to transfer wafers to be processed in a pod onto a boat or to transfer processed wafers on the boat into a pod; the boat loading / unloading area includes a boat loading / unloading chamber and a boat base located in the boat loading / unloading chamber, the boat base being configured to mount the boat and enable loading / unloading of the boat to / from the processing mechanism; the partition area is located between the boat loading / unloading area and the wafer loading / unloading area and includes a plurality of partition chambers independent of one another, a front door is provided between each partition chamber and the wafer loading / unloading chamber, the front door is openable and closable to realize opening and closing between the partition chamber and the wafer loading / unloading chamber, and a rear door is provided between each partition chamber and the boat loading / unloading chamber, the rear door is openable and closable to realize opening and closing between the partition chamber and the boat loading / unloading chamber, the diverting device is configured to diverge the boat within the wafer loading / unloading chamber and the partition chamber, and is further configured to diverge the boat within the boat loading / unloading chamber and the partition chamber; the plurality of partitioned chambers include a first partitioned chamber and a second partitioned chamber, the first partitioned chamber being configured to accommodate a boat loaded with wafers to be processed and transferred therein via the wafer transfer chamber, and the second partitioned chamber being configured to accommodate a boat loaded with processed wafers and transferred therein via the boat transfer chamber. A wafer processing apparatus comprising:

2. The air pressure in the boat loading / unloading chamber is lower than atmospheric pressure.

2. The wafer processing apparatus according to claim 1.

3. the pressure in the wafer loading / unloading chamber is greater than the pressure in the boat loading / unloading chamber; 3. The wafer processing apparatus according to claim 2.

4. The pressure in the wafer loading / unloading chamber is atmospheric pressure or is lower than atmospheric pressure; 4. The wafer processing apparatus according to claim 3.

5. The partition area further includes a pressure adjustment mechanism, and the pressure adjustment mechanism includes: adjusting the pressure in the partition chamber to be the same as the pressure in the wafer loading / unloading chamber before controlling the opening of the front door so that the partition chamber and the wafer loading / unloading chamber are in an open state; a pressure adjustment unit configured to adjust the pressure in the partition chamber to be equal to the pressure in the boat loading / unloading chamber before controlling the opening of the rear door so that the partition chamber and the boat loading / unloading chamber are in an open state; 4. The wafer processing apparatus according to claim 3.

6. the processing mechanism includes a processing furnace tube; the processing furnace tube is provided outside the boat loading / unloading chamber and communicates with the boat loading / unloading chamber, and the processing furnace tube can provide an operating environment for wafer processing; 6. The wafer processing apparatus according to claim 1, wherein the wafer processing apparatus is a wafer processing apparatus.

7. the processing furnace tube is a vertical furnace tube, and a tube opening of the processing furnace tube is provided opposite to a top portion of the boat loading / unloading chamber; The boat base includes a base body and an elevating mechanism, and an orthogonal projection of the pipe mouth of the processing furnace pipe is located within the base body. The elevating mechanism is connected to the base body and drives the base body to elevate and lower so as to open and close the processing furnace pipe, thereby realizing the boat placed on the base body to be transported in and out of the processing furnace pipe.

7. The wafer processing apparatus according to claim 6, wherein the wafer processing apparatus is a wafer processing apparatus.

8. the processing mechanism further includes a furnace tube cover, the furnace tube cover being provided on a top of the boat loading / unloading chamber and positioned inside the boat loading / unloading chamber, and being movable relative to the processing furnace tube to open and close the processing furnace tube; The furnace tube cover can close the processing furnace tube when the processing furnace tube is in a standby state.

8. The wafer processing apparatus according to claim 7, wherein the wafer processing apparatus is a wafer processing apparatus.

9. the furnace tube cover includes a cover plate, a slide rail, and a connecting rod connecting the cover plate and the slide rail, the connecting rod being further configured to receive the cover plate; the slide rail is fixedly connected to the top of the boat loading / unloading chamber, one end of the connecting rod is fixedly connected to the cover plate, and the other end of the connecting rod is provided with a slider, which is slidably connected to the slide rail, and the slider slides horizontally on the slide rail to move the cover plate toward or away from the processing furnace tube, thereby opening and closing the processing furnace tube.

9. The wafer processing apparatus according to claim 8.

10. a plurality of the processing mechanisms and a plurality of the boat bases are provided, each of the boat bases corresponding to one of the processing mechanisms; 7. The wafer processing apparatus according to claim 6, wherein the wafer processing apparatus is a wafer processing apparatus.

11. the transport device includes a first transport robot arm and a second transport robot arm; the first transfer robot arm is provided in the wafer loading / unloading chamber, and is configured to transfer a boat having wafers to be processed loaded in the wafer loading / unloading chamber into the first partitioned chamber when the communication between the first partitioned chamber and the wafer loading / unloading chamber is in an open state, and is further configured to transfer a boat having processed wafers loaded in the second partitioned chamber into the wafer loading / unloading chamber when the communication between the second partitioned chamber and the wafer loading / unloading chamber is in an open state; the second transfer robot arm is provided in the boat loading / unloading chamber, and is configured to transport a boat having wafers to be processed loaded in the first partitioned chamber into the boat loading / unloading chamber when the communication between the first partitioned chamber and the boat loading / unloading chamber is in an open state, and is further configured to transport a boat having processed wafers loaded in the boat loading / unloading chamber into the second partitioned chamber when the communication between the second partitioned chamber and the boat loading / unloading chamber is in an open state.

2. The wafer processing apparatus according to claim 1.

12. further including a temporary storage area for temporarily storing a plurality of pods; the wafer loading / unloading area is closer to the temporary storage area than the boat loading / unloading area; and / or the wafer loading / unloading chamber is provided with a front-opening interface mechanical standard cooperating with a pod, and the front-opening interface mechanical standard is configured to open and close between the pod and the wafer loading / unloading chamber; 2. The wafer processing apparatus according to claim 1.

13. 6. A control method applied to the wafer processing apparatus according to claim 1, comprising: controlling a transfer device to transfer the boat loaded with processed wafers in the boat loading / unloading chamber into the second partitioned chamber, and then controlling a rear door corresponding to the first partitioned chamber to open, and then controlling the transfer device to transfer the boat loaded with unprocessed wafers in the first partitioned chamber to the boat base of the boat loading / unloading chamber; controlling a transfer device to transfer the boat carrying wafers to be processed into the wafer transfer chamber into the first partitioned chamber, and then controlling a front door corresponding to the second partitioned chamber to open, and then controlling the transfer device to transfer the boat carrying the processed wafers into the second partitioned chamber into the wafer transfer chamber; A control method comprising:

14. after controlling the transfer device to transfer the boat carrying the processed wafers in the boat loading / unloading chamber into the second partition chamber, and before controlling the rear door corresponding to the first partition chamber to open, controlling the rear door corresponding to the second partition chamber to be in a closed state; After controlling the flow device so as to flow the boat loaded with wafers to be processed in the wafer loading / unloading chamber into the first partition chamber, and before controlling the front door corresponding to the second partition chamber to be opened, controlling the front door corresponding to the first partition chamber to be in a closed state.

14. The control method according to claim 13.

15. In the process of performing processing on a wafer to be processed located in a boat in a processing mechanism, Controlling a wafer transfer mechanism to transfer wafers to be processed in the pod to a partially loaded boat located in the wafer loading / unloading chamber; or and controlling a wafer transfer mechanism to transfer processed wafers from a boat located in the wafer loading / unloading chamber and loaded with processed wafers into the pod.

14. The control method according to claim 13.

16. The wafer processing apparatus according to any one of claims 1 to 5, a master for implementing the control method of claim 13, A wafer processing system comprising:

Images