Defect Inspection Equipment

Abstract

To provide a defect inspection apparatus that can suppress the occurrence of a difference in inspection results depending on users.SOLUTION: A defect inspection apparatus (100) includes an imager (image sensor 35) configured to image an inspection target 7, and a display (6) configured to display an image based on an image captured by the imager. The defect inspection apparatus (100) also includes a controller (4) configured to receive a setting of a marking in a predetermined region of interest on the image (still image) displayed on the display (6). The controller (4) is configured to inspect the inspection target (7) for a defect on the basis of the image captured by the imager, and superimpose an image of the marking on a position corresponding to the predetermined region of interest in an image of an inspection result (overlay image 65) displayed on the display (6).SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a defect inspection device, and more particularly to a defect inspection device equipped with an imaging unit. [Background technology]

[0002] BACKGROUND ART Defect inspection devices equipped with an imaging unit have been known in the past. Such defect inspection devices are disclosed, for example, in Japanese Patent Application Laid-Open No. 2017-219318.

[0003] The defect inspection device described in JP 2017-219318 A includes an excitation unit that excites elastic waves in an object to be inspected, an illumination unit that provides strobe illumination to a measurement area on the surface of the object to be inspected, and an interferometer including an image sensor that detects light that is reflected by the object to be inspected in an excited (vibrated) state and interferes with each other. A control unit included in the defect inspection device performs data processing based on detection signals obtained from each detection element of the image sensor. By performing known image processing on the image obtained as a result of this data processing, defects on the surface of the object to be inspected are detected. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2017-219318 Summary of the Invention [Problem to be solved by the invention]

[0005] In a conventional defect inspection device such as that described in JP 2017-219318 A, a non-defective portion of the object being inspected (e.g., a step) may appear in an image obtained as a result of data processing in a shape similar to a defect. In this case, a user must view the image obtained as a result of data processing and determine whether the displayed image is a defect based on the positional relationship between the displayed image and a region of interest (e.g., a region where a defect is likely to occur). For example, a user may determine that the displayed image is a defect based on whether the displayed image is located within the region of interest. Here, the user must view and interpret the position of the region of interest in the image obtained as a result of data processing, and therefore the position of the region of interest may differ between users. In this case, different users will determine (identify) different images as defects, resulting in different inspection results. Therefore, a defect inspection device capable of suppressing differences in inspection results between users is desired.

[0006] The present invention has been made to solve the above-mentioned problems, and one object of the present invention is to provide a defect inspection device that can suppress differences in inspection results depending on the user. [Means for solving the problem]

[0007] In order to achieve the above object, a defect inspection device according to one aspect of the present invention includes an excitation unit that excites acoustic vibrations in an object to be inspected, a laser illumination unit that irradiates the object to be inspected with laser light, an interference unit that causes reflected light of the laser light arriving from different positions on the object to be inspected excited by the excitation unit to interfere with each other, an imaging unit that images the reflected light interfered by the interference unit, a control unit that acquires, based on the interfered reflected light imaged by the imaging unit, a still image in which a changed portion in the structure of the object to be inspected is visible and an extracted image in which a discontinuous portion of vibration in the object to be inspected is visible, and acquires an overlay image by overlaying the still image and the extracted image, and The overlay image data storage device is provided with a memory unit that stores the still image stored in the memory unit and an overlay image, and a display unit that displays the overlay image stored in the memory unit, wherein the display unit displays the still image stored in the memory unit, and the control unit is configured to receive from the user a marking setting for a predetermined area of ​​interest in the still image displayed on the display unit where the user believes defects are likely to occur, generate a marking image superimposed image by superimposing the marking image at a position corresponding to the predetermined area of ​​interest in the overlay image stored in the memory unit, display the marking image superimposed image on the display unit, and store at least one of the marking data and the marking image superimposed image in the memory unit. [Effects of the Invention]

[0008] In the defect inspection device according to the above aspect, as described above, the control unit is configured to accept a marking setting for a predetermined region of interest on the image displayed on the display unit and to superimpose the image of the marking at a position corresponding to the predetermined region of interest on the image of the inspection result displayed on the display unit. This allows the position at which the marking is displayed on the image of the inspection result to be the same regardless of the user performing the inspection. As a result, by determining defects based on the position of the marking displayed on the image of the inspection result, it is possible to prevent differences in the inspection results depending on the user. [Brief explanation of the drawings]

[0009] [Figure 1]FIG. 1 is a block diagram showing the configuration of a defect inspection device according to a first embodiment. [Figure 2] FIG. 3 is a diagram for explaining the display of defects in the defect inspection apparatus according to the first embodiment. [Figure 3] 4 is a flowchart for explaining a defect display process performed by a control unit of the defect inspection apparatus according to the first embodiment. FIG. [Figure 4] FIG. 2 is a diagram showing a state in which an image of a marking is superimposed on a moving image of the defect inspection apparatus according to the first embodiment. [Figure 5] 5A and 5B are diagrams for explaining control when corrections (additions) are made to marking data in the defect inspection apparatus according to the first embodiment. [Figure 6] FIG. 2 is a diagram showing a ruler used in the defect inspection device according to the first embodiment. [Figure 7] FIG. 10 is a diagram for explaining defect inspection by the defect inspection device according to the second embodiment. [Figure 8] FIG. 10 is a diagram showing an example of an overlay image according to the second embodiment. [Figure 9] 10A and 10B are diagrams showing image projection onto an inspection target by the defect inspection apparatuses according to the modifications of the first and second embodiments. [Figure 10] FIG. 1 is a diagram showing a defect inspection device for performing three-dimensional measurement according to a reference example of the first and second embodiments. [Figure 11] 10A and 10B are diagrams showing images displayed on a defect inspection apparatus that performs three-dimensional measurement according to reference examples of the first and second embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings.

[0011] [First embodiment] The configuration of a defect inspection apparatus 100 according to the first embodiment will be described with reference to FIGS.

[0012] (Configuration of defect inspection device) The configuration of a defect inspection apparatus 100 according to the first embodiment will be described with reference to Fig. 1. The defect inspection apparatus 100 is an apparatus that inspects an inspection object 7 for defects.

[0013] As shown in FIG. 1, the defect inspection apparatus 100 according to the first embodiment includes a vibrator 1, a laser illumination 2, a speckle sharing interferometer 3, a control unit 4, a signal generator 5, a display unit 6, and a storage unit 8. Although FIG. 1 illustrates the control unit 4, the display unit 6, and the storage unit 8 as being provided separately from one another, this is not limiting. The control unit 4, the display unit 6, and the storage unit 8 may also be provided in a common terminal. The vibrator 1 and the speckle sharing interferometer 3 are examples of an "excitation unit" and an "interference unit," respectively, as defined in the claims.

[0014] The oscillator 1 and the laser illuminator 2 are connected to a signal generator 5 via cables.

[0015] The vibrator 1 excites vibrations (sonic vibrations) in the inspection object 7. Specifically, the vibrator 1 is placed so as to be in contact with the inspection object 7, converts an AC electric signal from the signal generator 5 into mechanical vibrations, and excites vibrations (sonic vibrations) in the inspection object 7. The vibrator 1 excites ultrasonic vibrations in the inspection object 7.

[0016] The laser illuminator 2 irradiates the inspection object 7 with laser light. The laser illuminator 2 includes a laser light source and an illumination lens, not shown. The illumination lens spreads the laser light irradiated from the laser light source and irradiates it over the entire measurement area on the surface of the inspection object 7. The laser illuminator 2 also irradiates the laser light at a predetermined timing based on an electrical signal from the signal generator 5. In other words, the laser illuminator 2 irradiates the inspection object 7 with laser light in response to the vibrations caused by the vibrator 1.

[0017] The speckle shearing interferometer 3 is configured to cause interference between reflected light of the laser light arriving from different positions on the inspection target 7 excited by the oscillator 1. The speckle shearing interferometer 3 also includes a beam splitter 31, a phase shifter 32, a first reflecting mirror 331, a second reflecting mirror 332, a condenser lens 34, and an image sensor 35. The image sensor 35 is an example of the "imaging unit" in the claims.

[0018] The beam splitter 31 includes a half mirror. The beam splitter 31 is disposed at a position where the laser light reflected by the surface of the inspection object 7 is incident. The beam splitter 31 reflects the incident laser light toward the phase shifter 32 and transmits it toward the second reflecting mirror 332. The beam splitter 31 also reflects the incident laser light reflected by the second reflecting mirror 332 toward the condenser lens 34 and transmits the incident laser light reflected by the first reflecting mirror 331 toward the condenser lens 34.

[0019] The first reflecting mirror 331 is disposed on the optical path of the laser light reflected by the beam splitter 31, at an angle of 45 degrees with respect to the reflecting surface of the beam splitter 31. The first reflecting mirror 331 reflects the laser light reflected by the beam splitter 31 and incident thereon toward the beam splitter 31.

[0020] The second reflecting mirror 332 is disposed on the optical path of the laser light passing through the beam splitter 31, at an angle slightly inclined from 45 degrees with respect to the reflecting surface of the beam splitter 31. The second reflecting mirror 332 reflects the incident laser light reflected by the beam splitter 31 toward the beam splitter 31.

[0021] The phase shifter 32 is disposed between the beam splitter 31 and the first reflecting mirror 331, and changes (shifts) the phase of the transmitted laser light under the control of the control unit 4. Specifically, the phase shifter 32 is configured to change the optical path length of the transmitted laser light.

[0022] The image sensor 35 has a number of detecting elements and is disposed on the optical path of the laser light (shown as a straight line in FIG. 1 ) that is reflected by the beam splitter 31, then reflected by the first reflecting mirror 331, and then transmitted through the beam splitter 31, and the laser light (shown as a dashed line in FIG. 1 ) that is reflected by the second reflecting mirror 332 and then reflected back by the beam splitter 31. The image sensor 35 includes, for example, a CMOS image sensor or a CCD image sensor. The image sensor 35 is configured to capture an image of the incident laser light. The image sensor 35 is also configured to capture an image of the reflected light that has been interfered with by the speckle shearing interferometer 3. As a result, the inspection object 7 is imaged by the image sensor 35.

[0023] The condenser lens 34 is disposed between the beam splitter 31 and the image sensor 35, and condenses the laser light that has passed through the beam splitter 31 (the straight line in FIG. 1) and the laser light that has been reflected by the beam splitter 31 (the dashed line in FIG. 1).

[0024] The laser light reflected by position 741 on the surface of the inspection object 7 and the first reflecting mirror 331 (the straight line in FIG. 1) and the laser light reflected by position 742 on the surface of the inspection object 7 and the second reflecting mirror 332 (the dashed line in FIG. 1) interfere with each other and enter the same location on the image sensor 35. Positions 741 and 742 are separated from each other by a small distance. Similarly, the reflected light of the laser light arriving from different positions in each region of the inspection object 7 is guided by the speckle shearing interferometer 3 and each enters the image sensor 35.

[0025] The control unit 4 operates the phase shifter 32 arranged in the speckle shearing interferometer 3 with an actuator (not shown) to change the phase of the transmitted laser light. This changes the phase difference between the laser light reflected at position 741 and the laser light reflected at position 742. Each detection element of the image sensor 35 detects the intensity of the interference light resulting from interference between these two laser lights.

[0026] The control unit 4 controls the vibration of the vibrator 1 and the timing of the laser light irradiation from the laser illumination 2 via the signal generator 5, and captures images while changing the amount of phase shift. The phase shift amount is changed in increments of λ / 4, and for each phase shift amount (0, λ / 4, λ / 2, 3λ / 4), a total of 37 images are captured, including 32 images for the timing j (j=0 to 7) of laser irradiation and five images when the light is off before and after each phase shift amount (0, λ / 4, λ / 2, 3λ / 4). Note that λ is the wavelength of the laser light.

[0027] The control unit 4 processes the detection signals from each detection element in the following procedure to obtain a moving image 62 (see FIG. 2) that represents the state of vibration. The control unit 4 measures the spatial distribution of a periodically changing physical quantity that occurs due to the propagation of vibration in the inspection object 7, based on the interfered reflected light captured by the image sensor 35. For example, the control unit 4 generates the moving image 62 (spatial distribution image) regarding the propagation of vibration in the inspection object 7, based on the interfered reflected light captured by the image sensor 35.

[0028] The control unit 4 calculates the luminance values ​​I of the images (four images each) that have the same laser irradiation timing j (j=0 to 7) and phase shift amounts that differ by λ / 4. j0 ~I j3 From this, the optical phase (phase difference between the two optical paths when the phase shift amount is zero) Φj is calculated using the following equation (1). Φ j =-arctan{(I j3 -I j1 ) / (I j2 -I j0 )}···(1) Furthermore, the control unit 4 performs sine wave approximation on the optical phase Φj by the least squares method to obtain approximation coefficients A, θ, and C in the following equation (2). Φ j =Acos(θ+jπ / 4)+C=Bexp(jπ / 4)+C···(2) Here, B is a complex amplitude and is expressed as in the following equation (3). B = Aexp(iθ): complex amplitude (3) Furthermore, the control unit 4 outputs a video 62 (30 to 60 frames) that displays the optical phase change at each vibration phase time ξ (0≦ξ<2π) using an approximation formula obtained by removing the constant term C from equation (2). Note that in the above process, a spatial filter is applied appropriately to the complex amplitude B to remove noise. The phase shift amount and the laser irradiation timing step (λ / 4 and T / 8, respectively, in the above example, where T is the vibration period) are not limited to these. In this case, the calculation formula will be different from the above equations (1) to (3).

[0029] The control unit 4 applies a spatial filter to detect discontinuous areas of the vibration state from the moving image 62 as defective portions 73 of the inspection object 7. That is, the control unit 4 extracts the discontinuous portions of the vibration based on the spatial distribution of the physical quantity. Specifically, the control unit 4 obtains an extracted image 63 from the moving image 62 in which the discontinuous portions of the vibration are extracted.

[0030] 2, the control unit 4 acquires a still image 61 and a moving image 62 based on the interfered reflected light captured by the image sensor 35. The still image 61 is an image that displays the brightness of the light of the inspection object 7. The moving image 62 is an image that displays the brightness of the light and the phase fluctuation caused by the ultrasonic vibration of the inspection object 7. The moving image 62 is an example of an "image that represents the vibration state of the inspection object" in the claims.

[0031] The control unit 4 is configured to acquire one still image 61 based on a plurality of images 60 (still images) captured by the image sensor 35. Specifically, the control unit 4 is configured to acquire one still image 61 by averaging the plurality of captured images 60 in order to generate a moving image 62 relating to the propagation of vibration in the inspection target 7. In this still image 61, it is possible to confirm a changed portion 75 in the structure of the inspection target 7. Note that although the moving image 62 relating to the propagation of vibration in the inspection target 7 makes it possible to confirm vibrations, it is difficult to visually confirm a changed portion in the structure of the inspection target 7.

[0032] In the first embodiment, the control unit 4 is configured to accept setting of markings 64 on the still image 61. The markings 64 include graphics and characters. The control of the control unit 4 regarding the markings 64 will be described in detail later.

[0033] The control unit 4 is also configured to control the display of a single still image 61 acquired by averaging, in such a way that the discontinuous portions of vibration extracted from the moving image 62 are highlighted and overlaid. As a result, the control unit 4 is configured to generate (acquire) an overlay image 65, in which the discontinuous portions of vibration extracted from the moving image 62 are overlaid on the still image 61, as an image of the inspection result. The overlay image 65 is an example of "an image of the inspection result based on an image representing the vibration state of the inspection target" as claimed.

[0034] The display unit 6 displays a still image 61, a moving image 62, and an overlay image 65. The display unit 6 includes a liquid crystal display, an organic EL display, or the like. The still image 61 and the moving image 62 are examples of "images based on images captured by an imaging unit" in the claims.

[0035] The inspection object 7 is a painted steel plate in which a coating film 72 (see FIG. 1) is applied to the surface of a steel plate 71. The defective portion 73 includes cracks, peeling, and lifting under the coating. If the inspection object 7 is a dissimilar material joint component, the defective portion 73 also includes a poorly joined portion.

[0036] (Defect display processing) Next, the defect display process performed by the defect inspection apparatus 100 of the first embodiment will be described based on a flowchart with reference to Fig. 3. The defect display process is performed by the control unit 4.

[0037] 3, the oscillator 1 starts to apply vibration to the inspection object 7. This excites vibration in the inspection object 7. In step 102, the laser illuminator 2 irradiates a measurement region of the inspection object 7 with laser light.

[0038] In step 103, interference data is acquired while changing the shift amount of the phase shifter 32. That is, a plurality of images 60 (see FIG. 2) are captured by causing interference with different phases. Specifically, the phase shifter 32 of the speckle shearing interferometer 3 is operated so that the phase of the laser light is changed by λ / 4, and the intensity of the interference light of the laser light at each phase is detected (captured) by the image sensor 35.

[0039] In step 104, the application of vibration from the vibrator 1 to the inspection object 7 is terminated.

[0040] In step 105, based on the plurality of images 60 acquired in step 103, one still image 61 (see FIG. 2) is acquired (generated).

[0041] In step 106, the control unit 4 accepts the setting of markings 64 in a predetermined region of interest S (for example, a location where defects are likely to occur) on the still image 61 displayed on the display unit 6. Specifically, the user inputs the markings 64 on the still image 61, and the input markings 64 are set (initial settings). That is, the data of the markings 64 input on the still image 61 is saved in the storage unit 8 (see FIG. 1).

[0042] Next, in step 107, the control unit 4 inspects the inspection object 7 for defects based on the images 60 captured by the image sensor 35. Specifically, first, the control unit 4 acquires (generates) a moving image 62 (see FIG. 2) from the multiple images 60. Next, the control unit 4 extracts (see FIG. 2) discontinuous portions of vibration from the moving image 62. Then, the control unit 4 acquires an overlay image 65 (see FIG. 2) in which the discontinuous portions of vibration extracted from the moving image 62 (extracted image 63: see FIG. 2) are superimposed on the still image 61 acquired in step 105.

[0043] Here, in the first embodiment, the control unit 4 is configured to store data of the image of the inspection result before the image of the marking 64 is superimposed (overlay image 65 before the image of the marking 64 is superimposed) in the storage unit 8 separately from the data of the marking 64 set in a later step 108. In addition, data of images other than those described above obtained during the inspection process may also be stored in the storage unit 8. For example, data of the moving image 62, data of the still image 61, data of the extracted image 63, and data of each of the multiple images 60 may be stored in the storage unit 8. In addition, the storage unit 8 also stores an image in which the image of the marking 64 is superimposed on the image of the inspection result (see FIG. 5).

[0044] Next, in step 108, the control unit 4 displays the overlay image 65 acquired in step 107 on the display unit 6. Here, in the first embodiment, the control unit 4 is configured to superimpose an image of the marking 64 at a position corresponding to a predetermined region of interest S (see FIG. 2 ) in the overlay image 65 (image of the inspection result) displayed on the display unit 6. That is, the control unit 4 controls the position (coordinates) on the inspection object 7 where the marking 64 is arranged in the overlay image 65 to be the same as the position (coordinates) on the inspection object 7 where the marking 64 is arranged in the still image 61. Furthermore, the control unit 4 is configured to display the overlay image 65 on which the image of the marking 64 is superimposed on the display unit 6 by using the data of the overlay image 65 and the data of the image of the marking 64 stored in the storage unit 8.

[0045] In the first embodiment, as shown in FIG. 4 , the control unit 4 is configured to superimpose an image of the marking 64 at a position corresponding to a predetermined region of interest S in the moving image 62. That is, the control unit 4 controls the position (coordinates) of the marking 64 on the inspection object 7 in the moving image 62 so that the position (coordinates) of the marking 64 on the inspection object 7 in the moving image 62 is the same as the position (coordinates) of the marking 64 on the inspection object 7 in the still image 61. The control unit 4 is also configured to display the moving image 62 on which the image of the marking 64 is superimposed, by using data of the moving image 62 and data of the marking 64 stored in the storage unit 8. Here, the moving image 62 more easily displays a defect portion 73 (discontinuous portion) clearly than the overlay image 65. Therefore, by being configured to superimpose the marking 64 on the moving image 62 in addition to the overlay image 65, the moving image 62 can be used when it is difficult to identify the defect portion 73 in the overlay image 65, making it possible to easily identify the defect portion 73.

[0046] The control unit 4 is also configured to be able to superimpose a ruler 80 (see FIG. 6) on the overlay image 65. This allows the user to easily grasp (measure) the size of the defect portion 73 on the overlay image 65 by using the ruler 80. Note that while FIG. 6 shows the overlay image 65 as an example, the ruler 80 may also be displayed on the moving image 62 or the extracted image 63.

[0047] Next, in step 109, it is determined whether the user has modified (including added) the data of the marking 64 on the overlay image 65 (moving image 62). For example, as shown in FIG. 5, suppose that the user has modified (added) the data of the marking 64 when the position of the image of the marking 64 and the position of the image of the defective portion 73 are misaligned in the overlay image 65 (moving image 62). In the example shown in FIG. 5, the position of the marking 64 in the upper right corner is misaligned with the position of the defective portion 73. In this example, the modification (addition) is performed so that the marking 64 (dashed line) surrounds the defective portion 73. Note that examples of the modification (addition) of the data of the marking 64 are not limited to this.

[0048] If the control unit 4 accepts the modification (addition) of the data of the marking 64 on the overlay image 65 (moving image 62), the process proceeds to step 110. If the modification (addition) of the data of the marking 64 on the overlay image 65 (moving image 62) is not accepted (i.e., the user did not make the modification (addition)), the process proceeds to step 111.

[0049] In the first embodiment, in step 110, the control unit 4 is configured to reflect the correction (addition) of the data of the marking 64 in the data of the set marking 64. Specifically, the correction (addition) is reflected in the data of the marking 64 stored in the storage unit 8.

[0050] In addition, when the data of the marking 64 is modified (added), the control unit 4 is configured to display the modified (added) marking 64 (the dashed marking 64 shown in Figure 5) in a color different from that of the original marking 64 (the solid marking 64 shown in Figure 5).

[0051] Next, in step 111, the inspection results are output. Specifically, an image in which the image of the marking 64 is superimposed on the overlay image 65 (moving image 62) is output as data (bitmap file or moving image file). At this time, image data in which an image based on the data of the marking 64 reflecting the correction (addition) in step 110 is superimposed on the overlay image 65 (moving image 62) is output. Note that the system may be configured to be able to output image data in which an image based on the data of the marking 64 before the correction (addition) is reflected is superimposed on the overlay image 65 (moving image 62).

[0052] In addition, the moving image 62 (before marking is superimposed) acquired in step 107, the overlay image 65 (before marking is superimposed) acquired in step 108, the still image 61 acquired in step 105, the image of only marking 64, and the multiple images 60 acquired in step 103 are also configured to be output individually.

[0053] Then, in step 112, the control unit 4 ends the test in response to an instruction to end the test input from the user, etc. Alternatively, if the test is to be continued, the process returns to step 101.

[0054] In the first embodiment, the control unit 4 is configured to repeatedly use the data of the markings 64 stored in the storage unit 8 for each different inspection. In other words, the data of the markings 64 set in the first inspection is reused (reused) for subsequent inspections (defect display processing). As a result, the process of initial setting of the markings 64 (step 106) is omitted for the second and subsequent inspections.

[0055] Specifically, when multiple inspection objects 7 of the same type are inspected individually, and when the same inspection object 7 is inspected multiple times, the control unit 4 performs the current inspection with the data of the markings 64 stored in the memory unit 8 during the initial inspection read in. In this case, the control unit 4 is configured to superimpose the image of the current inspection result (overlay image 65, moving image 62) at a position corresponding to a predetermined region of interest S. Note that if the data of the markings 64 has been modified (added) prior to the previous inspection, the user can select whether to superimpose the data of the markings 64 reflecting the modification (addition) or the data of the markings 64 before the modification (addition) was reflected (i.e., the data of the initial markings 64) on the image of the inspection result.

[0056] In step 106, the control unit 4 may determine whether the setting of the markings 64 has been completed. With this configuration, it is determined that the setting of the markings 64 has not been completed in the first inspection, and that the setting of the markings 64 has been completed in the second and subsequent inspections. If the control unit 4 determines that the setting of the markings 64 has not been completed, it may be configured to notify the user of this (for example, by displaying this on the display unit 6). On the other hand, if the control unit 4 determines that the setting of the markings 64 has been completed, it may be configured to automatically (without a user instruction) read the data of the markings 64 stored in the memory unit 8. In addition, the orientation and imaging range of the inspection target 7 set in the defect inspection apparatus 100 need to be adjusted so that they are the same for each of the different inspections.

[0057] (Effects of the first embodiment) In the first embodiment, the following effects can be obtained.

[0058] In the first embodiment, as described above, the control unit 4 is configured to inspect the inspection object 7 for defects based on the image captured by the image sensor 35 (imaging unit), and to superimpose an image of the marking 64 at a position corresponding to a predetermined region of interest S in the overlay image 65 (image of the inspection result) displayed on the display unit 6. This ensures that the position at which the marking 64 is displayed in the overlay image 65 remains the same regardless of the user performing the inspection. As a result, by determining the defect based on the position of the marking 64 displayed in the overlay image 65, it is possible to prevent differences in the inspection results from occurring depending on the user.

[0059] Furthermore, the defect inspection device according to the first embodiment has the following configuration, thereby providing the following additional effects.

[0060] In the first embodiment, as described above, the defect inspection device 100 includes a transducer 1 (excitation unit) that excites acoustic vibrations in the inspection object 7, a laser illuminator 2 that irradiates the inspection object 7 with laser light, and a speckle shearing interferometer 3 (interference unit) that causes interference between reflected light of the laser light arriving from different positions on the inspection object 7 excited by the transducer 1. The image sensor 35 (imaging unit) is configured to capture the interfered reflected light. The control unit 4 is configured to acquire an image representing the vibration state of the inspection object 7 based on the interfered reflected light captured by the image sensor 35, and to superimpose an image of the marking 64 at a position corresponding to a predetermined region of interest S on an overlay image 65 (image of the inspection result) based on the image representing the vibration state of the inspection object 7. Here, when inspecting based on the image representing the vibration state of the inspection object 7, unevenness may occur in the brightness of the light irradiated onto the inspection object 7 by the laser illuminator 2. This may result in an indication resembling a defect appearing in an area with a relatively low light intensity. For this reason, a relatively high level of skill is required to distinguish defects when performing an inspection based on an image showing the vibration state of the inspection object 7. Therefore, superimposing an image of the marking 64 at a position corresponding to a predetermined region of interest S on the overlay image 65 prevents differences in inspection results from occurring depending on the user, which is particularly effective when performing an inspection based on an image showing the vibration state of the inspection object 7.

[0061] Furthermore, in the first embodiment, as described above, the control unit 4 is configured to superimpose an image of the marking 64 at a position corresponding to a predetermined region of interest S on the overlay image 65 (image of the inspection result) acquired using the still image 61 and the moving image 62 based on images captured by the image sensor 35 (imaging unit). This makes it possible to determine defects based on the position of the marking 64 displayed on the overlay image 65 acquired using the still image 61 and the moving image 62. As a result, when a user visually checks the overlay image 65 to determine (identify) defects, it is possible to prevent differences in the inspection results from occurring depending on the user.

[0062] Furthermore, in the first embodiment, as described above, the control unit 4 is configured to acquire a still image 61 that displays the brightness of the inspection object 7 and a moving image 62 that displays the vibration state of the inspection object 7 based on the interfered reflected light captured by the image sensor 35 (imaging unit), and to acquire an overlay image 65 in which discontinuous portions of vibration extracted from the moving image 62 are superimposed on the still image 61 as an image of the inspection result. The control unit 4 is also configured to accept setting of a marking 64 on a predetermined region of interest S on the still image 61 displayed on the display unit 6, and to superimpose the image of the marking 64 at a position on the overlay image 65 that corresponds to the predetermined region of interest S. This makes it possible to prevent differences in inspection results from occurring depending on the user when a user visually recognizes the overlay image 65 in which discontinuous portions extracted from the moving image 62 are superimposed on the still image 61 to determine (identify) defects.

[0063] Furthermore, in the first embodiment, as described above, the control unit 4 is configured to superimpose an image of the marking 64 at a position corresponding to a predetermined region of interest S in the moving image 62. This makes it possible to prevent differences in inspection results from occurring depending on the user when the user visually checks the moving image 62 to determine (identify) defects.

[0064] Furthermore, in the first embodiment, as described above, the defect inspection apparatus 100 includes a memory unit 8 that stores data on the set markings 64. The control unit 4 is configured to repeatedly use the data on the markings 64 stored in the memory unit 8 for each different inspection. This eliminates the need to set the markings 64 for each different inspection. For example, it is possible to eliminate the need to search for a specific region of interest S by referring to a specification or the like for each inspection. As a result, when multiple inspections are performed, the time required for the inspections can be shortened.

[0065] Furthermore, in the first embodiment, as described above, when multiple inspection objects 7 of the same type are inspected individually, and when the same inspection object 7 is inspected multiple times, the control unit 4 is configured to inspect the current inspection object 7 for defects while reading the data of the markings 64 stored in the memory unit 8 during the inspection of the first inspection object 7, and to superimpose the image of the read markings 64 at a position corresponding to a predetermined region of interest S on the current overlay image 65 (image of the inspection result). As a result, if the markings 64 are set only during the first inspection, the step of setting the markings 64 can be omitted during subsequent inspections. As a result, the time required for inspection can be further shortened when inspections are performed multiple times.

[0066] Furthermore, in the first embodiment, as described above, the data of the overlay image 65 (image of the inspection result) before the image of the marking 64 is superimposed is stored in the storage unit 8 separately from the data of the marking 64. This allows the image of the marking 64 and the overlay image 65 before the image of the marking 64 is superimposed to be handled separately (for example, each image is separately included in a report) efficiently.

[0067] Furthermore, in the first embodiment, as described above, when the control unit 4 receives a correction to the data of the markings 64 on the overlay image 65 (image of the inspection result), the control unit 4 is configured to reflect the correction to the data of the markings 64 in the set data of the markings 64. As a result, when the image of the markings 64 is superimposed on the overlay image 65 in another inspection of the inspection object 7 after the data of the markings 64 has been corrected, the image of the markings 64 after the correction can be superimposed on the overlay image 65.

[0068] [Second embodiment] In the second embodiment, unlike the first embodiment in which inspection is performed over the entire imaging range displayed on the display unit 6, the area to be inspected can be limited to a portion of the imaging range displayed on the display unit 6.

[0069] Specifically, as shown in Fig. 7, when an image of a marking 64 surrounding a certain range is superimposed on an inspection image (moving image 62 in the example shown in Fig. 7), the control unit 14 is configured to exclude an area outside the certain range from the inspection target area and detect (extract) defects within the certain range. In other words, only discontinuous parts within the range of the marking 64 are displayed (extracted) in the extracted image 63. In this way, the control unit 14 has a function (inspection range trimming function) of extracting (trimming) only the range to be inspected from the entire imaging range.

[0070] Furthermore, the control unit 14 is configured to detect defects based on the brightness of each pixel in the image 60 captured by the image sensor 35. In the second embodiment, the control unit 14 is configured to detect defects based on the luminance value of each pixel. The control unit 14 has a function (threshold comparison function) of detecting defects based on a comparison between the luminance value of each pixel (the brightness of each pixel) and a threshold value.

[0071] In the second embodiment, as shown in Fig. 7, the control unit 14 is configured to detect, within a certain range (the range of the marking 64), a portion where the brightness value is equal to or greater than a predetermined threshold value as a defect (discontinuous portion). Specifically, the control unit 14 detects the magnitude of the brightness value (for example, six levels from 0 to 5) of each pixel (detection element) within the range of the marking 64. The control unit 14 then detects (extracts) pixels (detection elements) where the brightness value is equal to or greater than a predetermined threshold value (for example, 3 or greater) as pixels (detection elements) where a defect (discontinuous portion) exists. Note that Fig. 7 schematically illustrates the distribution of brightness values.

[0072] The control unit 14 can also detect (extract) defects based on a comparison between the luminance value of each pixel (the degree of brightness of each pixel) and a threshold value for the entire imaging range displayed on the display unit 6. That is, the control unit 14 is configured to be able to switch the range (inspection range) for detecting (extracting) defects based on a comparison between the luminance value of each pixel (the degree of brightness of each pixel) and a threshold value between the entire imaging range and a certain range (the range of the markings 64). The control unit 14 may also detect (extract) defects based on a comparison between the luminance value of each pixel (the degree of brightness of each pixel) and a threshold value for each range of the multiple markings 64.

[0073] The control unit 14 has a function (proportion determination function) of determining the state of the inspection object 7 (pass / fail of the inspection result) based on the proportion of pixels corresponding to defects detected in the image 60 captured by the image sensor 35. The control unit 14 is configured to determine whether or not defects exist in the inspection range of the inspection object 7 beyond a preset standard (predetermined proportion).

[0074] In the second embodiment, the control unit 14 is configured to determine the state of the inspection object 7 (pass / fail of the inspection result) based on the proportion of pixels corresponding to defects detected within a certain range (the range of the marking 64). In the second embodiment, the control unit 14 has a function to determine the state of the inspection object 7 based on the proportion of pixels corresponding to defective locations (locations detected as defects in the inspection range extracted from the entire imaging range) in an inspection range extracted (trimmed) from the entire imaging range by the inspection range trimming function. Specifically, the control unit 14 determines whether the state of the inspection object 7 is good or bad (pass / fail of the inspection result) based on the proportion of the number of pixels of locations detected as defects (defective locations) by the threshold comparison function to the number of pixels in the inspection range extracted (trimmed) by the inspection range trimming function.

[0075] Furthermore, the control unit 14 can determine the state of the inspection object 7 based on the ratio of the number of pixels in defective areas (areas detected as defects by the threshold comparison function) to the total number of pixels in the imaging range. That is, the control unit 14 is configured to be able to switch, in the ratio determination function, the number of pixels to be compared with the number of pixels in defective areas (areas detected as defects by the threshold comparison function) between the total number of pixels in the imaging range and the number of pixels within a certain range (the range of the marking 64).

[0076] The control unit 14 is also configured to superimpose information based on the luminance value, which indicates the degree of brightness of each pixel in the image 60 captured by the image sensor 35, onto the overlay image 65 (image of the inspection result). Specifically, as shown in FIG. 8, defect areas 91 and 92 (areas indicated by dashed lines) based on the degree of brightness (luminance value) of each pixel are superimposed onto the image of the inspection result. Note that the defect areas 91 and 92 are examples of "information based on luminance values" in the claims. For example, the defect area 91 is an area with a luminance value of 4 or more, and the defect area 92 is an area with a luminance value of 3 or more. The control unit 14 may also visualize changes in the degree of brightness (luminance value) of each pixel using colors, such as a heat map, and superimpose the visualization on the overlay image 65 (image of the inspection result). That is, changes in the degree of brightness (luminance value) of each pixel may be displayed as changes in color (changes in hue or shade) and superimposed on the overlay image 65 (image of the inspection result). Furthermore, a value (numerical value) based on the brightness value may be superimposed on the overlay image 65 (image of the inspection result). For example, the brightness value (see FIG. 7) of a pixel whose brightness value is equal to or greater than a predetermined threshold value may be superimposed and displayed on the overlay image 65 (image of the inspection result).

[0077] The other configurations of the second embodiment are the same as those of the first embodiment.

[0078] (Effects of the second embodiment) In the second embodiment, the following effects can be obtained.

[0079] In the second embodiment, similarly to the first embodiment, it is possible to prevent differences in test results from occurring depending on the user.

[0080] Furthermore, the defect inspection device according to the second embodiment has the following configuration, thereby providing the following additional effects.

[0081] In the second embodiment, as described above, the control unit 14 is configured to detect defects based on the brightness (luminance value) of each pixel in an image captured by the image sensor 35 (imaging unit). This allows the control unit 14 to automatically detect defects based on the brightness (luminance value) of each pixel in an image captured by the image sensor 35 (imaging unit). As a result, unlike when a user visually determines (identifies) defects, it is possible to prevent differences in inspection results from occurring depending on the user.

[0082] Furthermore, in the second embodiment, as described above, the control unit 14 is configured to determine the state of the inspection object 7 based on the proportion of pixels corresponding to defects detected in the image captured by the image sensor 35 (imaging unit). This makes it possible to obtain the quality of the state of the inspection object 7 from the proportion of defects in the inspection range. Furthermore, if the proportion of defects in the inspection range is high, the user can take measures for the inspection object 7.

[0083] Furthermore, in the second embodiment, as described above, the control unit 14 is configured to superimpose information based on luminance values, which represent the degree of brightness of each pixel in the image 60 captured by the image sensor 35 (imaging unit), onto the overlay image 65 (image of the inspection result). This allows the user to visually confirm the information based on the luminance values, and therefore makes it possible to easily grasp changes in luminance values ​​within the inspection range.

[0084] Furthermore, in the second embodiment, as described above, when an image of marking 64 surrounding a certain range is superimposed on the inspection image (moving image 62), the area outside the certain range is excluded from the inspection target area, and defects within the certain range are detected (extracted). This omits inspection outside the range of marking 64, thereby reducing the load on control unit 14.

[0085] Furthermore, in the second embodiment, as described above, the control unit 14 is configured to detect, as a defect (discontinuous portion), a portion in which the luminance value, which indicates the degree of brightness of each pixel in the image 60 captured by the image sensor 35 (imaging unit), is equal to or greater than a predetermined threshold value within a certain range (the range of the marking 64). This allows defects within the range of the marking 64 to be detected more reliably than when the user visually checks for defects.

[0086] Furthermore, in the second embodiment, as described above, the control unit 14 is configured to determine the state of the inspection object 7 based on the proportion of pixels corresponding to defects (discontinuous portions) detected within a certain range (the range of the marking 64). This makes it possible to determine the state of the inspection object 7 based on the proportion of pixels corresponding to defects (discontinuous portions) in any range within the imaging range. As a result, even if a changed portion 75 or the like in the structure of the inspection object 7 is detected as a defect, it is possible to exclude portions (non-defective portions) that are not to be included as defects, such as the changed portion 75 in the structure of the inspection object 7, from the range for determining whether the inspection result of the inspection object 7 is pass or fail. This makes it possible to more accurately determine the state of the inspection object 7.

[0087] The other effects of the second embodiment are the same as those of the first embodiment.

[0088] Furthermore, at least a part of the configurations of the first and second embodiments may be combined.

[0089] [Variations] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is defined by the claims rather than the description of the above embodiments, and further includes all modifications (variations) within the meaning and scope of the claims.

[0090] For example, in the above embodiment, an example was shown in which the image of the inspection result (overlay image 65, etc.) was displayed only on the display unit 6, but the present invention is not limited to this. For example, in the present invention, the image of the inspection result may be projected onto the surface of the inspection object 7.

[0091] 9, the defect inspection apparatus 200 includes a projection unit 131 that projects an image of the inspection result (overlay image 65) on which an image of the marking 64 is superimposed, onto the inspection object 7. The projection unit 131 is provided in a speckle sharing interferometer 13 included in the defect inspection apparatus 200. Note that the projection unit 131 may be provided separately from the speckle sharing interferometer 13. The speckle sharing interferometer 13 is an example of an "interference unit" in the claims.

[0092] 9, a projection image 13a of an image of the inspection result (overlay image 65) is projected onto the inspection object 7. This makes it possible to easily grasp the positions of the defect portion 73 (especially defects that cannot be directly seen, such as internal defects) and the marking 64 displayed on the display unit 6 on the actual inspection object 7 based on the projection image 13a. The projection unit 131 is controlled so that the projection image 13a is life-size.

[0093] Furthermore, in the above embodiment, an example was shown in which the ruler 80 was used, but the present invention is not limited to this. For example, the size of a defect may be measured using a three-dimensional measuring device.

[0094] 10 , the defect inspection apparatus 300 includes a three-dimensional measuring instrument 231. The three-dimensional measuring instrument 231 is provided in a speckle shearing interferometer 23 included in the defect inspection apparatus 300. Note that the three-dimensional measuring instrument 231 may be provided separately from the speckle shearing interferometer 23.

[0095] In this case, the three-dimensional data of inspection object 17 measured by three-dimensional measuring device 231 is sent to control unit 44 .

[0096] The control unit 44 extracts defects using the methods described in the above embodiments, etc. Then, the control unit 44 displays on the display unit 6 an image in which an image of the defect is superimposed on a three-dimensional image of the inspection object 17 (see FIG. 11). The control unit 44 is configured to be able to calculate the length L of the defect portion in the three-dimensional image displayed on the display unit 6 based on the acquired three-dimensional data, etc. This makes it possible to easily calculate the size of the defect even when the inspection object has a three-dimensional, complex shape. Furthermore, since there is no need to use a ruler, etc., the task of measuring the size of the defect can be simplified.

[0097] Furthermore, in the above embodiment, an example in which the marking 64 is set on the still image 61 has been shown, but the present invention is not limited to this. For example, the marking 64 may be set on (at least some of) a plurality of images 60. In this case, an overlay image may be generated by superimposing the image 60 on which the marking 64 has been set and the extracted image 63.

[0098] Furthermore, in the above embodiment, an example of inspecting defects (flaw detection) using ultrasonic vibrations has been shown, but the present invention is not limited to this. For example, inspection of defects using magnetism (magnetic flaw detection) may be performed. In addition, inspection of defects using sonic vibrations other than ultrasonic waves may be performed. Furthermore, the technique of the present invention may be applied to any method other than those described above that inspects defects using images.

[0099] In the above embodiment, the overlay image 65 is used as the image of the inspection result, but the present invention is not limited to this. For example, the moving image 62 and the extracted image 63 may be used as the image of the inspection result.

[0100] In the above embodiment, the user determines whether the position of the defect portion 73 and the position of the marking 64 are misaligned with each other, but the present invention is not limited to this. The control unit may determine whether the position of the defect portion 73 and the position of the marking 64 are misaligned with each other using AI or the like.

[0101] Furthermore, in the above embodiment, an example was shown in which a figure (circle, etc.) was displayed (set) as the marking 64, but the present invention is not limited to this. For example, letters may be displayed (set) as the marking.

[0102] In the above embodiment, for convenience of explanation, the processing of the control unit is described using a flow-driven flow in which processing is performed sequentially according to a processing flow, but the present invention is not limited to this. In the present invention, the processing of the control unit may be performed by an event-driven processing in which processing is performed on an event-by-event basis. In this case, the processing may be performed completely event-driven, or may be performed by combining event-driven and flow-driven processing.

[0103] Furthermore, in the second embodiment described above, the control unit 14 is configured to be able to switch the range (inspection range) in which defects are detected (extracted) based on a comparison between the luminance value of each pixel (the degree of brightness of each pixel) and a threshold value between the entire imaging range and a certain range (the range of marking 64), but the present invention is not limited to this. In the present invention, the control unit may be configured to detect (extract) defects based on a comparison between the luminance value of each pixel (the degree of brightness of each pixel) and a threshold value only in either the entire imaging range or the certain range (the range of marking 64).

[0104] Furthermore, in the second embodiment described above, the control unit 14 is configured to be able to switch the number of pixels to be compared with the number of pixels in a portion (defective portion) detected as a defect by the threshold comparison function between the total number of pixels in the imaging range and the number of pixels within a certain range (the range of marking 64) in the ratio determination function, but the present invention is not limited to this. In the present invention, the control unit may use only one of the total number of pixels in the imaging range or the number of pixels within a certain range (the range of marking 64) as the number of pixels to be compared with the number of pixels in a portion (defective portion) detected as a defect by the threshold comparison function in the ratio determination function.

[0105] [Aspect] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0106] (Item 1) an imaging unit that images an object to be inspected; a display unit that displays an image based on the image captured by the imaging unit; a control unit that accepts a setting of marking a predetermined region of interest on the image displayed on the display unit, A defect inspection device wherein the control unit is configured to inspect the defect of the inspection object based on the image captured by the imaging unit, and to superimpose an image of the marking at a position corresponding to the specified region of interest on the image of the inspection results displayed on the display unit.

[0107] (Item 2) an excitation unit that excites acoustic vibrations in the test object; a laser illuminator for irradiating the inspection object with a laser beam; an interference unit that causes reflected light of the laser light arriving from different positions on the inspection object excited by the excitation unit to interfere with each other, the imaging unit is configured to image the interfered reflected light, Item 1. The defect inspection device according to item 1, wherein the control unit is configured to acquire an image representing the vibration state of the inspection object based on the interfered reflected light captured by the imaging unit, and to superimpose an image of the marking at a position corresponding to the predetermined region of interest of the image of the inspection result based on the image representing the vibration state of the inspection object.

[0108] (Item 3) 3. The defect inspection device according to item 1 or 2, wherein the control unit is configured to superimpose an image of the marking at a position corresponding to the predetermined region of interest in an image of the inspection result acquired using still images and moving images based on images captured by the imaging unit.

[0109] (Item 4) an excitation unit that excites acoustic vibrations in the test object; a laser illuminator for irradiating the inspection object with a laser beam; an interference unit that causes reflected light of the laser light arriving from different positions on the inspection object excited by the excitation unit to interfere with each other, the imaging unit is configured to image the interfered reflected light, the control unit is configured to acquire the still image that displays the brightness of the light of the inspection object and the moving image that represents the vibration state of the inspection object based on the interfered reflected light captured by the imaging unit, and to acquire an overlay image in which discontinuous portions of vibration extracted from the moving image are superimposed on the still image as an image of the inspection result, Item 4. The defect inspection device according to item 3, wherein the control unit is configured to accept setting of the marking in the predetermined region of interest on the still image displayed on the display unit, and to superimpose an image of the marking at a position of the overlay image corresponding to the predetermined region of interest.

[0110] (Item 5) 5. The defect inspection device according to item 3 or 4, wherein the control unit is configured to superimpose an image of the marking at a position corresponding to the predetermined region of interest in the moving image.

[0111] (Item 6) Further, a storage unit for storing the set marking data is provided, 6. The defect inspection device according to any one of items 1 to 5, wherein the control unit is configured to repeatedly use the marking data stored in the storage unit for each different inspection.

[0112] (Item 7) Item 7. The defect inspection device according to item 6, wherein the control unit is configured to, in each case where a plurality of inspection objects of the same type are inspected individually and where the same inspection object is inspected a plurality of times, perform the current inspection with the marking data stored in the memory unit in the initial inspection read in, and to superimpose the image of the marking that has been read in at a position corresponding to the predetermined region of interest in the image of the current inspection result.

[0113] (Item 8) 8. The defect inspection device according to item 6 or 7, wherein the control unit is configured to store, in the storage unit, data of the image of the inspection result before the image of the marking is superimposed, and an image in which the image of the marking is superimposed on the data of the image of the inspection result, separately from the data of the marking.

[0114] (Item 9) 9. The defect inspection device according to any one of items 1 to 8, wherein the control unit is configured, when receiving a correction to the marking data on the image of the inspection result, to reflect the correction to the marking data in the set marking data.

[0115] (Item 10) 10. The defect inspection device according to any one of items 1 to 9, wherein the control unit is configured to detect the defect based on the brightness of each pixel in the image captured by the imaging unit.

[0116] (Item 11) Item 11. The defect inspection device according to item 10, wherein the control unit is configured to detect the defect based on a luminance value as a brightness degree of each pixel in the image captured by the imaging unit.

[0117] (Item 12) Item 12. The defect inspection device according to item 11, wherein the control unit is configured to determine the state of the inspection object based on a proportion of pixels corresponding to the defects detected in the image captured by the imaging unit.

[0118] (Item 13) Item 13. The defect inspection device according to item 11 or 12, wherein the control unit is configured to superimpose information based on a luminance value as a degree of brightness of each pixel in the image captured by the imaging unit onto the image of the inspection result.

[0119] (Item 14) 14. The defect inspection device according to any one of items 1 to 13, wherein the control unit is configured to, when an image of the marking surrounding a certain range is superimposed on the inspection image, exclude an area outside the certain range from an inspection target area and detect the defect within the certain range.

[0120] (Item 15) Item 15. The defect inspection device according to item 14, wherein the control unit is configured to detect, within the certain range, a portion where a luminance value as a degree of brightness of each pixel in the image captured by the imaging unit is equal to or greater than a predetermined threshold value as the defect.

[0121] (Item 16) Item 16. The defect inspection apparatus according to item 15, wherein the control unit is configured to determine the state of the inspection object based on a proportion of pixels corresponding to the defects detected within the certain range.

[0122] (Item 17) 17. The defect inspection device according to any one of items 1 to 16, further comprising a projection unit that projects an image of the inspection result on which an image of the marking is superimposed onto the inspection object. [Explanation of symbols]

[0123] 1. Vibrator (excitation part) 2 Laser illumination 3, 13 Speckle shearing interferometer (interferometer section) 4, 14 Control section 6 Display section 7. Inspection subjects 8 Memory section 35 Image sensor (imaging section) 61 still images 62 Videos 64 Marking 65 Overlay image (image of inspection results) 91, 92 Defective area (information based on brightness value) 100, 200 Defect inspection equipment 131 Projection section S Predefined region of interest

Claims

1. an excitation unit that excites an acoustic vibration in the test object; a laser illuminator for irradiating the inspection object with a laser beam; an interference unit that causes reflected light of the laser light arriving from different positions on the inspection object excited by the excitation unit to interfere with each other; an imaging unit that images the reflected light interfered by the interference unit; a control unit that acquires a still image in which a changed portion in the structure of the inspection object is visible and an extracted image in which a discontinuous portion of vibration in the inspection object is visible based on the interfered reflected light captured by the imaging unit, and acquires an overlay image by superimposing the still image and the extracted image; a storage unit that stores the still image, the extracted image, and the overlay image; a display unit that displays the overlay image stored in the storage unit, the display unit displays the still image stored in the storage unit; The control unit receiving, from a user, marking of a predetermined area of ​​interest that the user considers to be prone to defects in the still image displayed on the display unit; generating a marking image superimposed image by superimposing an image of the marking on a position of the overlay image stored in the storage unit corresponding to the predetermined region of interest; displaying the marking image superimposed image on the display unit; The defect inspection device is configured to store at least one of the marking data and the marking image superimposed image in the storage unit.

2. 2. The defect inspection device according to claim 1, wherein the control unit is configured to acquire a moving image representing a vibration state of the object to be inspected based on interfered reflected light captured by the imaging unit, and to acquire the extracted image by extracting discontinuous portions of the moving image.

3. 2. The defect inspection device according to claim 1, wherein the control unit is configured to superimpose an image of the marking at a position corresponding to the predetermined region of interest in a moving image representing the vibration state of the object to be inspected based on the interfered reflected light captured by the imaging unit.

4. the storage unit is configured to store data of the markings that have been set, 2. The defect inspection device according to claim 1, wherein the control unit is configured to repeatedly use the marking data stored in the storage unit for each different inspection.

5. 5. The defect inspection device according to claim 4, wherein the control unit is configured to, in each case where a plurality of inspection objects of the same type are inspected individually and where the same inspection object is inspected multiple times, perform the current inspection while reading in the marking data stored in the memory unit during the initial inspection, and to superimpose the image of the read marking at a position corresponding to the specified region of interest of the current overlay image.

6. 2. The defect inspection device according to claim 1, wherein the control unit is configured, when receiving a correction of the marking data on the marking image superimposed image, to reflect the correction of the marking data in the set marking data.

7. 2. The defect inspection device according to claim 1, wherein the control unit is configured to detect the defect based on a brightness level of each pixel in the image captured by the imaging unit.

8. 8. The defect inspection device according to claim 7, wherein the control unit is configured to detect the defect based on a luminance value as a brightness level of each pixel in the image captured by the imaging unit.

9. 9. The defect inspection device according to claim 8, wherein the control unit is configured to determine the state of the inspection object based on a proportion of pixels corresponding to the defect detected in the image captured by the imaging unit.

10. 2. The defect inspection device according to claim 1, wherein the control unit is configured to superimpose information based on a luminance value representing the degree of brightness of each pixel in the image captured by the imaging unit onto the marking image superimposed image.

11. 2. The defect inspection device according to claim 1, wherein the control unit is configured, when an image of the marking surrounding a certain range is superimposed on the inspection image, to exclude an area outside the certain range from the inspection target area and to detect the defect within the certain range.

12. 12. The defect inspection device according to claim 11, wherein the control unit is configured to detect, within the certain range, a portion where a luminance value representing the degree of brightness of each pixel in the image captured by the imaging unit is equal to or greater than a predetermined threshold value as the defect.

13. 13. The defect inspection device according to claim 12, wherein the control unit is configured to determine the state of the inspection object based on a proportion of pixels corresponding to the defects detected within the certain range.

14. The defect inspection device according to claim 1 , further comprising a projection unit that projects the marking image superimposed image, on which the image of the marking is superimposed, onto the inspection object.

Images