Method for manufacturing pumps and seals

Abstract

To provide a pump improved in corrosion protection.SOLUTION: A pump comprises a pump-active component having a coating. The coating comprises: an oxide layer, which is in particular formed by anodic oxidation in an acid-containing electrolyte and which has pores; and a fluorine-free polymer-based and / or sol-gel-based sealing. The pores of the oxide layer are at least partly covered by the sealing and / or impregnated with the sealing and / or filled with the sealing.SELECTED DRAWING: Figure 16

Description

[Technical Field]

[0001] The present invention relates to a pump, in particular a vacuum pump, which comprises at least two pumping elements, for example movable relative to one another, and at least one seal arranged on one of the two pumping elements. According to the invention, a seal is provided at least partially, in particular applied to at least one of the pumping elements. Furthermore, the present invention also relates to the use of a component provided with the seal and at least one seal for manufacturing a pump, in particular a vacuum pump, and a method for manufacturing the seal. [Background technology]

[0002] Fluids such as grease or oil are commonly used to seal the pumping space of pumps, especially vacuum pumps. Piston pumps, for example, essentially have a gap between the pumping space and the piston. In fluid-sealed or fluid-lubricated configurations, this gap is filled with a fluid, usually oil or grease, during pump operation, whereby the fluid acts as a seal between the piston and the pumping space. Furthermore, defects in the surface structure (cracks, holes, pores, etc.) can act as gaps. In particular, some coatings (paint, anodized aluminum layers, etc.) have defects. A disadvantage of this type of pump is that the medium pumped by the pump, such as gas or steam, can react with the fluid used as a seal, which can reduce the sealing effect in particular. Another problem, especially in the case of vacuum pumps, is the contamination of the recipient by the fluid used.

[0003] For this reason, so-called dry means, in which the pumped medium does not come into contact with the fluid, are preferred, particularly for vacuum pumps. In this case, sliding or contact seals made of chemically resistant materials, usually plastic, are typically used. For example, in piston pumps, such seals are typically located on the piston. During operation, the seal rubs against the inner wall of the cylinder to seal the resulting pumping space as tightly as possible. Another example of a pump that is typically also dry, i.e., operates without fluid lubricant, is the scroll pump or spiral pump. Scroll pumps have a crescent-shaped suction chamber formed by a spiral-shaped rotor in cross section, engaged with a similarly spiral-shaped stator, which is driven into orbit by an eccentric drive. To seal the pumping space, a seal is provided on each end face of the scroll, where the seal on the end face of the rotor rubs against the stator, or vice versa.

[0004] The disadvantage of this type of sliding or contact seal is that the seal is usually subjected to very strong wear due to the sliding friction that occurs constantly and often has a limited service life. After a certain operating time, especially in the suction chamber, wear of the seal can occur in the form of dust. With increasing wear, the sealing effect of the contact seal decreases, which has a negative effect on the achievable final pressure.

[0005] To reduce wear, sliding or protective layers may be applied, as described, for example, in EP 3153706. Such seals may have an oxide layer produced by anodization in an electrolyte containing an acid, in particular oxalic acid, sulfuric acid, or a mixture thereof. These seals / protective layers further improve the corrosion and wear resistance of the substrate.

[0006] The crescent-shaped suction chambers have extremely narrow gaps (a few hundredths of a millimeter). The hard sliding and protective layers ensure an extended service life for the substrate when the two components forming the suction chamber come into contact or when solids penetrate. However, due to their porous structure, oxide layers of this type have proven unable to achieve the required final pressure and tightness, or can only achieve this after a longer operating time (the so-called warm-up operating time). Tests have shown that, especially for newly coated components, a heating process for the coated components can shorten the warm-up operating time or improve the final pressure. However, there is still a need for improvement in terms of the achievable final pressure and the shortened warm-up operating time.

[0007] Improved corrosion resistance is required not only for piston pumps and scroll pumps, but also for turbomolecular pumps, which are vacuum pumps with a rotor that rotates around the axis of rotation of a rotor shaft. The pumping components may consist of a lightweight alloy, in particular aluminum, that is provided with an oxide layer to improve corrosion resistance, as described, for example, in EP 3153706 A1, as well as the aforementioned sliding or protective layers.

[0008] During operation, the pumping components come into contact with the pumped medium, which can have a corrosive effect on the pumping components, such as galvanic corrosion that initiates in the pores of components with a porous oxide layer. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] European Patent Application Publication No. 3153706 [Patent Document 2] European Patent Application Publication No. 3940234 Summary of the Invention [Problem to be solved by the invention]

[0010] It is therefore an object of the present invention to provide a pump with improved corrosion protection. [Means for solving the problem]

[0011] This problem is solved by a pump and a method according to the independent claims.

[0012] The pump according to the invention is preferably a vacuum pump, comprising a pumping component having a coating comprising an oxide layer with pores and fluorine-free polymer-based and / or sol-gel-based seals, the pores of which are at least partially covered and / or impregnated and / or filled with the seals.

[0013] It has been found that in the pump according to the invention, the components responsible for the pumping action are protected from corrosion by the seals. In particular, galvanic corrosion, which normally starts in pores, is effectively prevented by the seals according to the invention. Corrosion protection is provided by the seals for various types of pumps, such as scroll pumps, turbomolecular pumps or piston pumps.

[0014] Furthermore, the seals solve another problem: in scroll and piston pumps, the seals also act as sliding layers, thus fulfilling two functions: 1) optimizing the sliding layer / tribological system, and 2) protecting the substrate from damage, wear, and corrosion. Tests have shown that if a hard surface coating is not provided, especially in scroll pumps, the substrate can be damaged in a very short time.

[0015] The oxide layer is preferably produced by anodization, in particular in an acid-containing electrolyte. Preferably, the electrolyte contains oxalic acid and / or sulfuric acid, with sulfuric acid being even more preferred. The oxide layer is preferably anodized aluminum produced by electrolytic oxidation of aluminum. This oxide layer can have the aforementioned multifunctional properties in terms of sliding effect and protective effect when a seal is applied thereon as described herein.

[0016] It has been found that pumps according to the present invention, which include a sliding layer with an oxide layer and seals, for example in the form of a fluorine-free polymer impregnation and / or a sol-gel impregnation, allow for lower final pressures than sliding layers such as those described, for example, in EP-A-3,153,706 or EP-A-3,940,234. The hard oxide layer applied to protect against wear has pores, defects, and thermal cracks. The pores are primarily arranged perpendicular to the layer, with some branches in the layer connecting the vertical pores arranged horizontally to the layer. In addition to the pores, such hard oxide layers have other defects and cracks, for example in the form of inclusions. The defects and pores form minute passages through which gas can flow. Furthermore, outgassing of substances, such as water, can occur from these locations. This reduces the gas-tightness, which has a negative effect on the achievable final pressure. This means that, particularly in scroll pumps, the required final pressure and tightness cannot be achieved or can only be achieved after a longer operating time. During the so-called warm-up operating process, pores and defects are primarily closed at the relevant locations by seal wear. Furthermore, outgassing of mixed media, such as coating residues, occurs. It has been found that seals allow the required final pressure to be reached even more quickly while simultaneously maintaining high protection against wear. This can probably be explained by the fact that in the pump according to the present invention, the pores contained in the oxide layer are closed by the seals, preventing or at least reducing gas flow or outgassing within the sealed layer, e.g., the sliding layer. Compared to the aforementioned prior art seals or sliding layers, in the pump according to the present invention, it is expected that the pores of the oxide layer are at least partially filled with the sol-gel-based material or fluorine-free polymer of the seal. This also seals the lateral connections between vertical pores, i.e., between branches arranged horizontally relative to the layer. This achieves an even shorter warm-up time than known sliding layers.

[0017] Unlike the prior art, such as those described in EP 3153706 or EP 3940234, the polymer-based seal is fluorine-free. "Fluorine-free" is described herein as a material that is substantially free of fluorine. This means that fluorine-containing compounds may be present in the form of impurities or other additives, but the fluorine-containing compounds do not significantly alter the basic properties of the seal, i.e., improving corrosion protection. Preferably, "fluorine-free" in this specification means a fluorine content of 100 ppm (= 100 μg / g) or less. The fluorine content can be determined, for example, by X-ray fluorescence measurement.

[0018] Furthermore, the present invention relates to a method for coating a pumping component of a pump, the method comprising the following steps: step A) providing a pumping component consisting of a lightweight alloy workpiece having a porous oxide layer on its surface; step B) subjecting the pumping component to a negative pressure; and step C) contacting the porous oxide layer with a solution comprising at least one, in particular fluorine-free polymer-based seal precursor and / or at least one sol-gel-based seal precursor, wherein a voltage is applied to the pumping component during at least one of steps A) to C).

[0019] By the method according to the invention, a porous oxide layer is sealed on the surface of the pumping component, thereby providing corrosion protection. The method according to the invention uses negative pressure, which removes inclusions from the pores of the oxide structure, which, on the one hand, allows the seal precursor to penetrate better and deeper into the pores. On the other hand, moisture is removed from the oxide layer, which results in less wear of the sealed oxide layer.

[0020] The light metal workpiece is in particular an aluminum workpiece, for example made of one of the aluminum alloys mentioned herein.

[0021] The application of a voltage drives the seal precursor into the pores of the oxide layer, resulting in very deep penetration of the pores by the seal. Based on this penetration, it is assumed that the method according to the present invention seals both horizontal and vertical pores. This results in very low achievable final pressures and very low required warm-up times.

[0022] The invention further relates to a pump comprising a component for pumping action obtainable by the method according to the invention.

[0023] According to a preferred embodiment of the present invention, the pump according to the present invention is preferably a spiral or scroll pump, in particular a spiral or scroll vacuum pump, having pumping elements configured as scroll elements. Particularly preferably, a sealed oxide layer is provided, at least in the case of tip seals. In this case, the seal is at least partially applied to at least one of the pumping elements configured as scroll elements. In the case of a spiral or scroll pump, the present invention solves the additional problem of shortening the warm-up time while simultaneously achieving a lower achievable final pressure.

[0024] In an alternative embodiment, the pump according to the invention is a piston pump, in particular a piston vacuum pump. The piston pump comprises at least one cylinder having an inner cylinder wall and a piston movable therein. In this embodiment according to the invention, the seal is at least partially attached to the inner cylinder wall and / or the piston. As in the scroll pump embodiment, in the case of a piston pump, the seal acts as a sliding layer for the pumping components. This minimizes leakage and shortens the warm-up time.

[0025] According to another preferred embodiment, the pump according to the present invention is a turbomolecular pump, in which the seal is at least partially applied to the rotor blades and / or the stator vanes. With conventional porous oxide layers on pumping components, galvanic corrosion begins in the pores of the oxide layer. Since the pores of this oxide layer are sealed in the present invention, galvanic oxidation cannot occur. Therefore, the increased corrosion resistance improves the service life of the turbomolecular pump according to this preferred embodiment of the present invention.

[0026] Preferably, the pumping components are made of a light metal material, preferably an aluminum alloy, although the invention is not limited thereto. Aluminum alloys of the 4000, 5000 and 6000 series have proven particularly suitable, with the 6000 series being particularly preferred. Exemplary representatives of the 6000 series aluminum alloys are AlMgSi1 (EN AW-6082) and AlMgSi0.5 (EN AW-6060).

[0027] The surface of the pumping component has an oxide layer. This can be produced in various ways. A known method for this is, for example, anodizing. In the present invention, the pumping component is preferably made of one of the aforementioned aluminum alloys, which is provided with an oxide layer by anodizing in an acid electrolyte. The acid electrolyte can be, for example, a sulfuric acid electrolyte or an oxalic acid electrolyte, which can also contain a mixture of the electrolyte with other acids and other additives.

[0028] In the pump according to the invention, the thickness of the seal is preferably 5 μm or less, more preferably 3 μm or less, and even more preferably 1 μm or less. In the manufacturing method according to the invention, the thickness of the seal can be influenced by varying the concentration and type of precursor compound, e.g., acrylate salts and / or their derivatives, by the current strength, and by the treatment period of the pumping component. The thickness can be determined, for example, by electron microscope imaging.

[0029] In the method according to the invention, the solution in step C) preferably contains ions and / or ionic compounds. By applying a voltage during the method according to the invention, the ions or ionic compounds can penetrate deep into the pores of the oxide layer and thereby provide seals there. Due to the deep penetration into the pores, horizontal branches located deep in the porous oxide layer are also sealed.

[0030] Furthermore, in the method according to the present invention, the solution in step C) preferably contains at least one compound having a functional group from the family of organic anions, such as substituted acrylates and / or substituted acetates and / or substituted styrenes and / or substituted isocyanates and / or carboxyls and / or sulfonic acids, and / or the family of inorganic ions, such as silicates and aluminates, i.e., a precursor compound for generating the sealing portions. Substituted acrylates are particularly preferred. Polymerizable but ionic compounds can be transported deep into the pores of the porous oxide layer via the carboxylic acid of the acrylate functional group by application of a voltage, thereby enabling deep sealing. Therefore, the solution in step C) particularly preferably contains a salt of acrylic acid and / or a salt of an acrylic acid derivative. The acrylic acid and / or the salt of an acrylic acid derivative may be dissolved or dispersed in the solution in step C). However, the present invention is not limited to acrylic acid and its derivatives.

[0031] The concentration of the compound having a functional group is preferably in the range of 1.0 to 25 weight percent, more preferably in the range of 3 to 20 weight percent, and even more preferably in the range of 5 to 15 weight percent.

[0032] The solution of step C) is preferably an aqueous solution, in particular an aqueous acrylate salt solution in the form of an ionic dispersion.

[0033] In the present invention, it has been found to be advantageous to gradually increase the voltage during the treatment of the component that produces the pumping action, preferably between 40V and 300V, in particular between 50V and 150V.

[0034] In the method according to the invention, the current density is preferably 0.25 A / dm 2 from 20A / dm 2 in the range of 0.5A / dm 2 from 15A / dm 2 and more preferably in the range of 1.0 A / dm 2 from 10A / dm 2 in the range of 1.5A / dm 2 from 7.0A / dm 2 is in the range.

[0035] In the method according to the invention, it has been found to be advantageous to apply a voltage to the pumping component using a direct current, which transports the seal precursor deep into the pores of the oxide layer, where the seals are generated. The precursor compounds, such as acrylate salts and / or their derivatives, are deposited or deposited in the pores, where the seals are generated. This results in a deep impregnation that also closes the horizontal branches of the porous structure.

[0036] According to a preferred embodiment of the method according to the invention, the pumping component is heat-treated after the electrochemical treatment. The heat treatment is preferably carried out at a temperature in the range of 80°C to 300°C, in particular in the range of 100°C to 230°C. During the heat treatment, seals are formed from the seal precursors. Furthermore, the heat treatment can reduce the moisture content in the porous layer of the pumping component, which has a beneficial effect on tribological wear.

[0037] In a preferred variant of the method according to the present invention, a seal precursor is deposited in the pores during electrochemical processing. In particular, in the case of sol-gel-based seals, the seal precursor, i.e., the sol, first penetrates into the pores of the oxide layer. In this case, deposition occurs simultaneously with the formation of the gel, i.e., the seal. Since the sol can penetrate very deep into the pores, the seal also occurs deep in the pores. This at least partially fills the pores, and in particular seals the horizontal branches.

[0038] According to another preferred variant of the method according to the invention, the sealant precursor is polymerized in the pores. The sealant precursor is present, for example, as a monomer or prepolymer and can penetrate deep into the pores of the oxide layer in the form of a solution or dispersion. The size of the monomer or prepolymer increases during polymerization, so that it seals and remains in the pores. The solubility of the monomer or prepolymer can also be changed during polymerization, so that the monomer or prepolymer precipitates in the pores, resulting in deep sealing even in the horizontal branches of the porous structure of the oxide layer.

[0039] According to a further preferred variant of the method according to the invention, in step B), the pumping component prepared in step A) is subjected to negative pressure, i.e., negative pressure is used after the formation of the porous oxide layer. In principle, the formation of the porous oxide layer can also be carried out under negative pressure. Preferably, the pumping component is subjected to another method after the formation of the oxide layer without further drying. If drying is carried out after the formation of the oxide layer, for example by anodizing, the pores may be closed by natural oxidation, thereby impairing the quality of the sealing. Therefore, preferably, after the formation of the oxide layer on the surface of the pumping component, the other method is carried out without further drying and / or storage. In other words, the sealing is preferably carried out wet-in-wet, i.e., exclusively with optional flushing between the formation of the oxide layer, for example by anodizing, and the other method.

[0040] The method according to the invention is preferably part of the manufacture of a pump, in particular a vacuum pump, as described herein.

[0041] According to one preferred variant of the invention, a pump according to the invention, having a component whose pumping action is obtained by the method described herein, is a pump having all the details described herein for a pump independently of the method according to the invention.

[0042] The invention will now be described, by way of example only, on the basis of schematic diagrams and examples. [Brief explanation of the drawings]

[0043] [Figure 1] 1 shows a cross-sectional view of a scroll pump. [Figure 2] 1 shows the electronics housing of the scroll pump. [Figure 3] 1 shows a scroll pump in perspective view with selected elements exposed; [Figure 4] 1 shows a pressure sensor integrated into a pump. [Figure 5] 1 shows the movable scroll member of the pump. [Figure 6] 5. The scroll member is shown on another side opposite to the side visible in FIG. [Figure 7] 1 shows a clamping device for a scroll member. [Figure 8] 1 shows an eccentric shaft with a balance weight of a different scroll pump; [Figure 9] 1 shows an eccentric shaft with a balance weight of a different scroll pump; [Figure 10] 1 shows a perspective view of a gas ballast valve having an operating grip. [Figure 11] 11 shows a cross-sectional view of the valve of FIG. [Figure 12] 7 shows a partial region of the scroll member of FIGS. 5 and 6. [Figure 13] 1 shows a cross-sectional view of a scroll member through the scroll wall at its outer end region. [Figure 14] FIG. 2 is a perspective view of an air guide hood of the scroll pump of FIG. 1. [Figure 15] The break-away thread is shown in cross section. [Figure 16] FIG. 2 is a detailed view of the spiral or scroll pump according to FIG. 1. [Figure 17] 1 shows a cross-sectional view of an oxide layer taken by an electron microscope. [Figure 18]17 shows a highly enlarged cross-sectional view of the oxide layer of FIG. 16 by electron microscopy. [Figure 19] 16 and 17 show top views of the oxide layers of FIGS. 16 and 17 taken by an electron microscope. [Figure 20] 1 illustrates the generation of vacuum during use of a scroll pump having various coated and uncoated pumping elements. [Figure 21] 1 shows a perspective view of a turbomolecular pump. [Figure 22] The turbomolecular pump of FIG. 21 is shown in bottom view. [Figure 23] 23 shows a cross-sectional view of the turbomolecular pump taken along the section line AA shown in FIG. 22. [Figure 24] 23 shows a cross-sectional view of the turbomolecular pump taken along the section line BB shown in FIG. 22. [Figure 25] 23 shows a cross-sectional view of the turbomolecular pump taken along the section line CC shown in FIG. 22. DETAILED DESCRIPTION OF THE INVENTION

[0044] It has been found that the invention is very suitable for, even if it is not limited to, a scroll pump 20, as illustrated in Figures 1 to 16. In principle, the pump according to the invention may also be a turbomolecular pump (see the exemplary description based on Figures 21 to 25) or a piston pump (not shown).

[0045] 1 shows a vacuum pump configured as a scroll pump 20. The vacuum pump has a first housing element 22 and a second housing element 24, where the second housing element 24 has a pumping structure, i.e., a scroll wall 26. The second housing element 24 thus forms the stationary scroll member of the scroll pump 20. The scroll wall 26 interacts with a scroll wall 28 of a movable scroll member 30, where the movable scroll member 30 is eccentrically excited via an eccentric shaft 32 to generate the pumping action. In this case, the gas to be pumped is pumped from an inlet 31 located in the first housing element 22 to an outlet 33 located in the second housing element 24.

[0046] The eccentric shaft 32 is driven by a motor 34 and supported by two rolling bearings 36. The eccentric shaft 32 has an eccentric journal 38 arranged eccentrically with respect to the rotation axis of the eccentric shaft 32, and the eccentric journal 38 transmits the eccentric oscillation of the eccentric journal 38 to the movable scroll member 30 via another rolling bearing 40. For sealing purposes, the movable scroll member 30 is further provided with a corrugated bellows 42, the left end of which, in FIG. 1 , is attached, and the right end of which is attached to the first housing element 22. The left end of the corrugated bellows 42 follows the oscillation of the movable scroll member 30.

[0047] The scroll pump 20 has a fan 44 for generating a cooling air flow. An air guide hood 46 is provided for this cooling air flow. The air guide hood 46 also has the fan 44 attached to it. The air guide hood 46 and the housing elements 22, 24 are shaped so that the cooling air flow passes substantially around the entire pump housing, thus achieving good cooling performance.

[0048] The scroll pump 20 further comprises an electronics housing 48 in which a control device and power electronic components for driving the motor 34 are arranged. The electronics housing 48 also forms the stand leg of the pump 20. A passage 50 is visible between the electronics housing 48 and the first housing element 22. Through the passage 50, the airflow generated by the fan 44 is guided along the first housing element 22 and also along the electronics housing 48, so that both are effectively cooled.

[0049] The electronics housing 48 is specifically shown in detail in FIG. 2 . The electronics housing 48 has a plurality of individual chambers 52. Electronic components can be enclosed in these chambers 52, which are therefore advantageously shielded. Preferably, as little encapsulant material as possible is used to encapsulate the electronic components. For example, the encapsulant material can be first introduced into the chambers 52, and then the electronic components are pressed in. Preferably, the chambers 52 can be configured to allow various electronic components, particularly substrates with various mounting configurations, to be placed and / or encapsulated within the electronics housing 48. In this case, in certain configurations, the individual chambers 52 can remain empty, i.e., can be free of electronic components. Thus, so-called modular systems can be easily realized for various pump types. The encapsulant material can be configured to be particularly thermally conductive and / or electrically insulating.

[0050] 2, the electronics housing 48 is formed with a plurality of walls or fins 54 that define a plurality of passages 50 for guiding cooling airflow. The chamber 52 also allows particularly good heat dissipation from electronic components disposed within the chamber 52 to the fins 54, particularly in combination with the thermally conductive encapsulation material. Thus, the electronic components can be cooled particularly effectively, improving their service life.

[0051] FIG. 3 shows the entire scroll pump 20 in perspective view, with the air guide hood 46 omitted, so that the fixed scroll member 24 and the fan 44 are particularly visible. The fixed scroll member 24 is provided with a plurality of radially arranged recesses 56, each defining a fin 58 disposed between the recesses 56. The cooling airflow generated by the fan 44 is guided through the recesses 56 and past the fins 58, thereby cooling the fixed scroll member 24 particularly effectively. The cooling airflow first flows around the fixed scroll member 24 and then around the first housing element 22 or the electronics housing 48. This arrangement is particularly advantageous because the pumping region of the pump 20 generates a high amount of heat due to compression during operation and is therefore preferentially cooled.

[0052] Pump 20 has a pressure sensor 60 integrated into it. This pressure sensor 60 is located within air guide hood 46 and is screwed into stationary scroll member 24. Pressure sensor 60 is connected to electronics housing 48 and a control device located therein via a cable connection, only partially shown. In this case, pressure sensor 60 is integrated into the control of scroll pump 20. For example, motor 34, visible in FIG. 1, can be controlled in response to the pressure measured by pressure sensor 60. For example, if pump 20 is used in a vacuum system as an auxiliary pump for a high-vacuum pump, the high-vacuum pump can be switched on only when pressure sensor 60 measures a sufficiently low pressure. This protects the high-vacuum pump from damage.

[0053] 4 shows a cross-sectional view of a pressure sensor 60 and its placement in the fixed scroll member 24. A passage 62 is provided for the pressure sensor 60, which here opens into the outer, non-pumping region between the scroll wall 26 of the fixed scroll member 24 and the scroll wall 28 of the movable scroll member 30. The pressure sensor thus measures the pump's suction pressure. Alternatively or additionally, the pressure may be measured in the pumping region, for example, between the scroll walls 26 and 28. Therefore, depending on the location of the pressure sensor 60 or the passage 62, intermediate pressures, for example, may also be measured.

[0054] The pressure sensor 60 allows, for example, via the determination of compression, in particular the wear state of the pumping components, in particular the sealing element 64, also known as the tip seal. Furthermore, the measured suction pressure can be used to control the pump (in particular the pump speed). For example, the suction pressure can be preset in software and then adjusted by changing the pump speed. Depending on the measured pressure, it is also conceivable that a pressure increase due to wear can be compensated for by increasing the speed. This makes it possible to postpone the replacement of the tip seal or to achieve longer replacement intervals. In short, the data from the pressure sensor 60 can generally be used, for example, for wear determination, for adaptive control of the pump, for process control, etc.

[0055] The pressure sensor 60 may be provided, for example, as an option. Instead of the pressure sensor 60, for example, a blind plug may be provided that closes the passage 62. In this case, the pressure sensor 60 may be retrofitted, for example, as needed. In particular, but generally advantageously, it may be assumed that the pressure sensor 60 is automatically recognized when connected to the control device of the pump 20.

[0056] The pressure sensor 60 is located in the cooling airflow of the fan 44, which also advantageously cools the pressure sensor 60. Furthermore, as a result, no special measures need to be taken to increase the heat resistance of the pressure sensor 60, and therefore a lower cost sensor can be used.

[0057] Furthermore, the pressure sensor 60 is particularly positioned such that the pressure sensor 60 does not increase the external dimensions of the pump 20, thus keeping the pump 20 compact.

[0058] 5 and 6 show the movable scroll member 30 from various viewing angles. The spiral structure of the scroll wall 28 is particularly visible in FIG. 5. In addition to the scroll wall 28, the scroll member 30 includes a base plate 66 from which the scroll wall 28 extends.

[0059] 6, the side of the base plate 66 opposite the scroll wall 28 is visible. On this side, the base plate has a plurality of mounting cavities for mounting, among other things, the bearings 40 and the corrugated bellows 42 visible in FIG.

[0060] On the outside of the base plate 66, three retaining projections 68 are provided, spaced apart and evenly distributed around the circumference of the base plate 66. In this case, the retaining projections 68 extend radially outward. The retaining projections 68 in particular all have the same radial height.

[0061] A first intermediate portion 70 of the circumference of the base plate 66 extends between the two retention protrusions 68. The first intermediate portion 70 has a greater radial height than the second intermediate portion 72 and the third intermediate portion 74. The first intermediate portion 70 is disposed opposite the outermost 120° portion of the scroll wall 28.

[0062] When manufacturing the movable scroll member 30, the base plate 66 and the scroll wall 28 are preferably machined together from a single piece of material, i.e., the scroll wall 28 and the base plate 66 are integrally formed.

[0063] For example, during finishing, the scroll member 30 can be clamped directly at the retaining projections 68. Within the same clamping area, for example, the side of the base plate 66 shown in FIG. 6 can also be machined, in particular the mounting cavities. In principle, within this clamping area, the scroll wall 28 can also be machined from solid material by cutting.

[0064] For this purpose, the scroll member 30 may be clamped, for example, using a clamping device 76, as shown in Figure 7. The clamping device 76 has a hydraulic three-jaw chuck 78 that directly abuts the three retaining projections 68. Furthermore, the clamping device 76 has a cavity 80 therethrough, which allows tool access to the scroll member 30, particularly to the side of the scroll member 30 shown in Figure 6. Thus, during clamping, multiple machining operations can be performed from both sides, particularly finishing at least one of the scroll wall 28 and machining of the mounting cavity.

[0065] The contour of the retaining protrusions 68 and the clamping pressure of the clamping device 76 are preferably selected so as to avoid critical deformation of the scroll member 30. The three retaining protrusions 68 are preferably selected so as not to increase the outer dimension, i.e., the maximum diameter, of the scroll member 30. This saves material on the one hand and the amount of machining required on the other hand. The retaining protrusions 68 are particularly configured and / or arranged in such an angular position as to provide access to the threaded fastening points of the corrugated bellows 42. The number of threaded fastening points of the corrugated bellows 42 is preferably not equal to the number of retaining protrusions 68 on the movable scroll member 30.

[0066] Two balance weights 82 are attached to the eccentric shaft 32 in Fig. 1 to compensate for the imbalance of the excited system. Fig. 8 shows an enlarged view of the area of ​​the balance weight 82 on the right side of Fig. 1. The balance weight 82 is screwed onto the eccentric shaft 32.

[0067] Figure 9 shows a similar partial view of another scroll pump, preferably belonging to the same series as pump 20 of Figure 1. The pump according to Figure 9 has, among other things, different dimensions and therefore requires a different balance weight 82.

[0068] The eccentric shaft 32, balance weight 82 and housing element 22 are each dimensioned so that only one specific type of the two types of balance weight 82 shown can be assembled to the eccentric shaft 32 at the mounting position shown.

[0069] The balance weight 82 is dimensioned in Figures 8 and 9 with specific dimensions of the construction space provided for the balance weight 82, so that it is clear that the balance weight 82 in Figure 9 cannot be assembled on the eccentric shaft 32 and vice versa. Of course, the dimensions given are given merely as an example.

[0070] Thus, in FIG. 8 , the distance between the mounting hole 84 and the shaft step 86 is 9.7 mm. The balance weight 82 in FIG. 8 is shorter in the corresponding direction, i.e., 9 mm, and therefore can be assembled without any problems. The balance weight 82 in FIG. 9 each extends 11 mm, measured from the mounting hole. Therefore, the balance weight 82 in FIG. 9 cannot be assembled to the eccentric shaft 32 in FIG. 8 because the shaft step 86 would collide with the balance weight 82 during assembly, or because the balance weight 82 in FIG. 9 would not be able to fully abut the eccentric shaft 82 in FIG. 8 . The balance weight 82 in FIG. 9 is also prevented from being assembled backwards, since both of its dimensioned dimensions are greater than the distance between the mounting hole 84 and the shaft step 86 in FIG. 8 . Furthermore, the 21.3 mm dimension of the balance weight 82 in FIG. 8 prevents the normally correct balance weight 82 from being assembled backwards, and therefore incorrectly.

[0071] In Figure 9, the longitudinal distance between the mounting hole 84 and the housing shoulder 88 is 17.5 mm. If the balance weight 82 of Figure 8, which has a 21.3 mm extension, were to be inserted into the eccentric shaft 32 of Figure 9, it would collide with the housing shoulder 88, making perfect assembly impossible. Incorrect assembly is possible at first, but it is certainly recognized. If the balance weight 82 of Figure 8 were to be assembled onto the eccentric shaft 32 of Figure 9 by rotating it about the axis of the mounting hole 84, the 21.3 mm extension would collide with the shaft shoulder 86, which is located 13.7 mm away from the mounting hole 84.

[0072] The balance weights 82, particularly the motor-side balance weights 82, are generally configured to prevent confusion between the balance weights and balance weights of other sizes during assembly and / or maintenance. The balance weights are preferably attached using through-threads. Similar balance weights for various pump sizes are configured to prevent incorrect assembly based, among other things, on the position of adjacent shoulders on the shaft, the position of the threads and through-holes in the balance weight, and the position of the shoulders in the housing.

[0073] 10 and 11 show a gas ballast valve 90 for scroll pump 20. Gas ballast valve 90 is also visible in the overall view of pump 20 in FIG. 3 and is located on stationary scroll member 24.

[0074] The gas ballast valve 90 has an operating grip 92. The operating grip 92 has a plastic body 94 and a base element 96, which is preferably made of special steel. The base element 96 has a through hole 98, which is provided on the one hand for connecting and introducing ballast gas and on the other hand surrounds a check valve 100. The hole 98 is furthermore closed in the drawing by a plug 102. Instead of the plug 102, for example, a filter may be provided, in which case the ballast gas, which may preferably be air, enters the valve 90 via the filter, in particular directly.

[0075] The operating grip 92 is attached to a rotatable element 106 of the valve 90 by three mounting screws 104. The mounting screws 104 are disposed in respective holes 108, only one of which is visible in the selected cross-sectional view of Figure 11. The rotatable element 106 is rotatably attached to the second housing element 24 by a mounting screw extending through a hole 110, not shown.

[0076] To operate the valve 90, a rotational moment manually applied to the operating grip 92 is transmitted to the rotatable element 106, which is then rotated, thereby connecting the bore 98 to the interior of the housing. In this case, the valve 90 has three switching positions, namely, a blocking position, a right-rotated position, and a left-rotated position, as shown in Figure 10, in which the bore 98 communicates with different regions of the interior of the housing.

[0077] The holes 108 and 110 are closed by a cap 112. The sealing action of the gas ballast valve 90 is provided by an axially pressed O-ring. When the valve 90 is operated, relative movement is exerted on the O-ring. If impurities, such as particles, reach the surface of the O-ring, they may cause premature failure. The cap 112 prevents impurities from entering the threads of the grip 92.

[0078] The lid 112 is attached via an interference fit between three centering elements. Specifically, the lid 112 has an insert pin (not shown) for each hole 108, and the insert pins hold the lid 112 in the hole 108. Therefore, the holes 108, 110 and the mounting screws disposed therein are protected from impurities. In particular, the mounting screw (not shown) disposed in the hole 110, which allows for pivoting movement, effectively minimizes the intrusion of impurities into the valve mechanism, thereby improving the service life of the valve.

[0079] The plastic grip, injection molded around the special steel base, offers good corrosion resistance and low manufacturing costs. Furthermore, its low thermal conductivity keeps the grip plastic relatively cool, allowing for better handling.

[0080] The fan 44 is preferably provided with a speed control, as can be seen, for example, in FIGS. 1 and 3. The fan is controlled, for example, by PWM, depending on the power consumption and temperature of the power module housed in the electronics housing 48. The speed is adjusted according to the power consumption. However, control is only possible from a module temperature of 50°C. When the pump enters the temperature range of possible derating (power reduction due to temperature), the fan speed is automatically controlled to maximum. This control achieves minimum noise levels at low pump temperatures, low noise levels (corresponding to pump noise) at end pressure or low load, optimal cooling of the pump at low noise levels, and maximum cooling power before power reduction due to temperature can be ensured.

[0081] The maximum fan speed may be adaptable depending on the particular situation, for example, lowering the maximum fan speed may be beneficial for high water vapor compatibility.

[0082] In Figure 12, the movable scroll member 30 is shown partially and on an enlarged scale compared to Figure 5. A cross-sectional view of the scroll member 30 taken along line AA shown in Figure 12 is shown schematically, although not to scale, in Figure 13.

[0083] On its side facing away from the base plate 66 and at its end facing the base plate of the fixed scroll member 24 (not shown here), the scroll wall 28 has a groove 114 for inserting a sealing element 64, also not shown here, i.e., a so-called tip seal. The arrangement in the operating state can be seen clearly, for example, in Figure 4. In an advantageous embodiment of the pump according to the invention, a tip seal is provided which is in sliding contact with a sliding layer, i.e., a sealed oxide layer.

[0084] The groove 114 is defined by two opposing outer and inner sidewalls, an inner sidewall 116 and an outer sidewall 118. In the first scroll portion 120, the outer sidewall 118 is thicker than the inner sidewall 116 in the first scroll portion 120 and thicker than both sidewalls 116, 118 in the second scroll portion 122.

[0085] 12 to the outer end of scroll wall 28, as also shown in FIG. 5. First scroll portion 120 here extends, for example, over 163°.

[0086] The first scroll portion 120 forms an outer end portion of the scroll wall 28. In this case, the first scroll portion 120 is at least partially, and in particular completely, disposed in the non-pumping region of the scroll wall 28. In particular, the first scroll portion 120 may at least almost completely occupy the non-pumping region of the scroll wall 28.

[0087] 5, the first intermediate portion 70, which preferably has a greater radial height than the other intermediate portions 72, 74, may be positioned opposite the first scroll portion 120, between the two retaining protrusions 68. Thus, any imbalance caused by the thicker sidewall 118 can be compensated for by the greater weight of the first intermediate portion 70.

[0088] To reduce system loads on bearings and other components, the movable scroll element generally should have a low weight. Therefore, the scroll wall is typically constructed very thin. Furthermore, as the wall becomes thinner, the pump size (effective outer diameter) becomes smaller. As a result, the side walls of the tip seal groove are particularly thin. The ratio of the tip seal thickness to the total scroll wall thickness is, for example, at most 0.17. However, due to the tip seal groove, the scroll wall tip is extremely sensitive to collisions during handling, for example, during assembly or tip seal replacement. Even a slight collision, for example, during transportation, can cause the groove side walls to be pressed inward, making the tip seal no longer releasable. To solve this problem, the groove has an asymmetric wall thickness, particularly a localized outward thickening of the scroll wall. This region preferably does not contribute to the pumping action and can therefore be manufactured with greater tolerances. The one-sided thickening, especially in the last half of the turn, significantly reduces damage. In the remainder of the component, preferably no thickening of the scroll wall is required, since the wall is protected by the protruding elements of the component.

[0089] The air guide hood 46 shown in FIG. 1 directs airflow, as indicated by dashed arrows 124. The fan 44 is connected to a control device located within the electronics housing 48 via a cable and plug connection (not shown) that extends through the air guide hood 46. The plug connection has a socket 126 and a plug 128. The socket 126 is supported by the electronics housing 48 and / or is attached to a board located within the electronics housing 48. The socket 126 is also visible, for example, in FIGS. 2 and 3. The plug 128 is connected to the fan 44 via a cable (not shown).

[0090] The plug connections 126, 128 are separated from the air flow 124 by a partition wall 130. The air flow 124 may contain, for example, dust or similar impurities and is therefore isolated from the plug connections 126, 128. On the one hand, the plug connections 126, 128 themselves are thus protected, and on the other hand, impurities are prevented from entering the electronics housing 48 through the opening in the electronics housing 48 provided for the socket 126 and reaching the control device and / or power electronics.

[0091] 14 shows the air guide hood 46 in a separate perspective view. In particular, the partition wall 130 is visible, along with the space provided for the plug 128 behind the partition wall 130. The partition wall 130 has a recess 132, here configured as a V-shaped notch, for conducting the cable from the plug 128 towards the fan 44.

[0092] For example, to reduce costs, low-cost plug connectors without seals (e.g., without IP protection codes) can be used, since the partition wall 130 prevents the sucked-in air from reaching the electronics through the plug connectors 126, 128. The fan cables are guided laterally through the partition wall 130 by V-shaped notches 132. The notches 132 are offset laterally relative to the plug connectors 126, 128, which creates a labyrinth effect and thus further reduces cooling air leakage into the plug connectors 126, 128. The partition wall 130 in the air guide hood 46 further improves air guidance into the passage 50 between the electronics housing 48 and the pump housing 22. Relatively little turbulence and back pressure from the fan 44 are generated.

[0093] 15 shows in a schematic cross-sectional view the contact area between the first housing element 22 and the second housing element or fixed scroll member 24. The second housing element 24 is partially inserted into the first housing element 22 by means of a transition fit 134, in which case a seal is provided by means of an O-ring 136. The transition fit 134 also serves, for example, to center the second housing element 24 relative to the first housing element 22.

[0094] For maintenance purposes, for example, to replace the sealing element 64, the second housing element 24 must be removed. If the second housing element 24 is not pulled out sufficiently straight, the transition fit 134 or the O-ring 136 may become pinched. To solve this problem, a break-away thread 138 is provided. A second break-away thread may also be provided, preferably located at least approximately diametrically opposite. To guide and remove the second housing element 24 as straight as possible, a screw can be threaded into the break-away thread 138 until it projects out of the break-away thread 138 and abuts against the first housing element 22. Further screwing separates the housing elements 22, 24 from each other.

[0095] For pulling apart, it is possible to use, for example, the attachment screws 142 provided for attaching the second housing element 24 to the first housing element 22, as shown for example in Figures 1 and 3. For this purpose, the pulling apart threads 138 preferably have the same thread type as the attachment threads provided for the attachment screws 142.

[0096] The second housing element 22 is provided with a recess 140 associated with the separation thread 138. When wear particles are carried away as the screw is screwed into the separation thread 138, the wear particles collect in the recess 140. This prevents, for example, wear particles from interfering with the complete abutment of the housing elements 22, 24 with each other.

[0097] When assembling the fixed scroll member 24, the screws must be unscrewed again, because otherwise a complete screw connection of the fixed scroll member 24 in the first housing element 22 (correct fit in the housing plane) may be prevented. As a result, leakage, tilting, and reduced pump performance may occur. To avoid this assembly error, the air guide hood 46 has at least one additional dome 144, shown in FIG. 14 , which allows the air guide hood 46 to be assembled only when the screws used for separation, in particular the mounting screw 142, are removed again. The air guide hood 46 with the dome 144 cannot be fully assembled because it is configured so that it may collide with the head of a separation screw threaded into the separation screw thread 138. In particular, the air guide hood 46 can only be assembled when the separation screw is completely removed.

[0098] FIG. 16 shows a schematic detail of the spiral or scroll pump 20 shown in the previous figures, in the area where the seal 150 contacts the support 154 in the form of the base plate 66, i.e., the sliding layer 152, i.e., the base plate 66, which is provided with a sealed oxide layer. In particular, the scroll elements 26, 28 are arranged so that the seal 150 presses against the support 154 in the form of the base plate 66. The seal is pressed against the base plate via a pressure difference between the two sides of the scroll elements 26, 28. The seal 150 is bonded to the scroll elements 26, 28 via an interface 151. The oxide layer and the seal of the sliding layer 152 are not shown separately, since the seal penetrates into and closes the pores and defects in the oxide layer. The construction of additional layers is not necessarily performed. The preferably fluorine-free seal not only promotes the dry lubrication properties of the sliding layer 152 and additionally reduces its wear, but also improves the airtightness of the sliding layer 152, thereby improving the achievable final pressure and reducing warm-up times.

[0099] The support 154 in the form of the base plate 66 and the spiral walls 26, 28 are each constructed in one piece and consist of an aluminum alloy of the AlMgSi series. The oxide layer of the sliding layer 152 is an aluminum oxide layer produced by anodizing in a sulfuric acid electrolyte. The sliding layer 152 is applied, in particular, to all surfaces of the scroll members 24, 30 facing the pumping space. The seal 150 (tip seal) shown in Figure 6 is made of a fluorine-free polymer, for example based on acrylate.

[0100] A pump according to the invention may have one or more of the features described above with reference to Figures 1 to 16, where any combination of these features may be realised in a pump according to the invention.

[0101] FIG. 17 shows an electron microscope image of a cross section of a 39.08 μm-thick oxide layer 156 deposited on the base plate 66. The scale of FIG. 17 represents a length of 10 μm. The oxide layer 156 has cracks 158 and defects 158 that impair its hermeticity. A further enlarged view is shown in FIG. 18, where not only the pore structure but also the defects connecting the pores are visible. The scale of FIG. 18 represents a length of 200 nm. The porous structure of the oxide layer 156 is also evident in FIG. 19. FIG. 19 shows an electron microscope plan view of the oxide layer of FIGS. 17 and 18, where the pores 160 appear as dark, vertically extending streaks, and even tiny defects 158 are visible as dark patterns connecting adjacent pores 160. The scale of FIG. 18 represents a length of 200 nm. Very small pores 160 as well as larger pores 160, cracks 158 and their branches are visible. Only some of the pores and defects are labeled in Figures 17 to 19, respectively.

[0102] The effect of the sliding layer of the pump according to the invention can be seen from the graph shown in Figure 20. The horizontal axis (X-axis) shows time in hours, and the vertical axis shows pressure in hPa. Under the same conditions, a negative pressure was generated using a scroll vacuum pump, and the generated negative pressure was recorded over time.

[0103] In all lines A to D, a HiScroll pump was used. The only difference is that in line A the pumping element has no coating. In line B, the pumping element has a coating as described in EP-A-3153706, where a sulfuric acid electrolyte was used to create the oxide layer, i.e., an anodically generated oxide layer. Line C shows the generation of a vacuum using a sealed sliding layer based on a fluorine-containing polymer as described in EP-A-3940234. Line D shows the generation of a vacuum using a vacuum pump according to the invention, where the oxide layer is additionally provided with a seal based on a fluorine-free polymer based on acrylate. The seal on the oxide layer in line D was produced as explained in the following example.

[0104] As can be seen from line A, a low final pressure is achieved very quickly with the uncoated pumping element, but this final pressure is not stable due to wear of the pumping element. When the pumping element has an anodic coating, a relatively high final pressure is achieved even after a stable but long warm-up operating phase. This is evident from line B. With the pump of line B, the test was interrupted after a short operating time and seals were applied to the oxide layer. As the test continued, it was noted that the pressure dropped very quickly and a significantly lower final pressure was achieved. Line C shows that a lower final pressure can be achieved with fluorine-containing seals known from the prior art, but a subsequent warm-up operating phase is required and there are drawbacks to fluorine-containing components, which may not be ideal for environmental reasons due to their resistance properties. At line D, i.e., the sealed pumping element used in the pump according to the present invention, allows a significantly lower final pressure than at line B (until the test was interrupted), and the resulting vacuum is stable, unlike at line A. For lines B and C, significantly longer warm-up run times are predicted before the lower final pressure is reached. Thus, the seal according to the invention not only tends to achieve significantly better achievable final pressures, but also significantly reduces the warm-up run time. This highlights the significant advantages that can be achieved based on the seal of the oxide layer's pore structure in terms of short warm-up run times, low final pressures, and high impact and wear resistance.

[0105] Moreover, the pump according to the present invention may be a turbomolecular pump, which will be explained collectively in FIGS.

[0106] The turbomolecular pump 111 shown in Figure 21 has a pump inlet 115 surrounded by an inlet flange 113. A recipient (not shown) may be connected to the pump inlet 115 in a manner known per se. Gas coming from the recipient can be drawn in from the recipient via the pump inlet 115 and pumped through the pump to a pump outlet 117. An auxiliary vacuum pump, for example a rotary vane pump, may be connected to the pump outlet 117.

[0107] The inlet flange 113 forms the upper end of a housing 119 of the vacuum pump 111 in the orientation of the vacuum pump according to FIG. 21. The housing 119 has a lower part 121. An electronics housing 123 is arranged laterally on the lower part 121. The electronics housing 123 accommodates the electrical and / or electronic components of the vacuum pump 111, for example for operating an electric motor 125 (see also FIG. 23) arranged in the vacuum pump. The electronics housing 123 is provided with a number of connections 127 for accessories. Furthermore, a data interface 129 (for example according to the RS485 standard) and a current supply connection 131 are arranged on the electronics housing 123.

[0108] There are also turbomolecular pumps that do not have this type of attached electronics housing, but are connected to external drive electronics.

[0109] The housing 119 of the turbomolecular pump 111 is provided with a ventilation inlet 133, particularly in the form of a ventilation valve. The vacuum pump 111 can be vented via the ventilation inlet 133. A seal gas connection 135 (also called a purge gas connection) is also arranged in the region of the lower part 121. A purge gas can be introduced into a motor space 137 via the seal gas connection 135 to protect the electric motor 125 (see, for example, FIG. 23 ) from the gas pumped by the pump. The electric motor 125 is accommodated in the motor space 137 of the vacuum pump 111. Two coolant connections 139 are also arranged in the lower part 121. One coolant connection serves as a coolant inlet and the other as an outlet. A coolant can be introduced into the vacuum pump for cooling purposes. The other turbomolecular vacuum pump present (not shown) is operated exclusively air-cooled.

[0110] The underside 141 of the vacuum pump can be used as a base, so that the vacuum pump 111 can be operated in a vertical position relative to the underside 141. Moreover, the vacuum pump 111 can be fixed to the recipient via the inlet flange 113 and therefore operated in a suspended state, so to speak. Furthermore, the vacuum pump 111 can be configured so that it can be operated even when oriented in a different direction than that shown in FIG. 21. Vacuum pump configurations in which the underside 141 can be arranged not only facing downwards but also facing sideways or upwards are also possible. In this case, any angle is conceivable in principle.

[0111] In particular, other turbomolecular vacuum pumps (not shown) that exist, which are larger than the pump shown, cannot be operated in a vertical position.

[0112] 22 further includes various screws 143. These screws 143 secure components of the vacuum pump, not specifically identified here, to one another. For example, a bearing cover 145 is secured to the lower surface 141.

[0113] Further fastening holes 147 are arranged in the underside 141. Via the fastening holes 147, the pump 111 can be fixed, for example, to a mounting surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), in particular those larger than the pump shown.

[0114] 22 to 25 show a coolant line 148 in which a coolant can be circulated, the coolant being introduced and withdrawn via the coolant connection 139.

[0115] As shown in the cross-sectional views of Figures 23 to 25, the vacuum pump has multiple process gas pumping stages for pumping process gas acting on a pump inlet 115 to a pump outlet 117.

[0116] A rotor 149 is disposed within the housing 119. The rotor 149 has a rotor shaft 153 that is rotatable about a rotation axis 151.

[0117] The turbomolecular pump 111 has multiple turbomolecular pump stages connected in series to provide a pumping action. Each turbomolecular pump stage has multiple radially extending rotor blades 155 fixed to the rotor shaft 153 and multiple stator vanes 157 arranged between the rotor blades 155 and fixed within the housing 119. In this case, each rotor blade 155 and its adjacent stator vane 157 form one turbomolecular pump stage. The stator vanes 157 are held at a desired axial distance from each other by spacer rings 159.

[0118] The vacuum pump further comprises Holweck pump stages arranged radially inside and outside one another and connected in series to provide a pumping action. There are alternative turbomolecular vacuum pumps (not shown) that do not have Holweck pump stages.

[0119] The rotor of the Holweck pump stage includes a rotor hub 161 disposed on the rotor shaft 153 and two cylindrically sided Holweck rotor sleeves 163, 165 fixed to and supported by the rotor hub 161. The Holweck rotor sleeves 163, 165 are oriented coaxially with respect to the rotation axis 151 and engage radially with one another. Two cylindrically sided Holweck stator sleeves 167, 169 are also provided. The Holweck stator sleeves 167, 169 are likewise oriented coaxially with respect to the rotation axis 151 and engage radially with one another.

[0120] The pumping surfaces of the Holweck pump stages are formed by the side surfaces, i.e., the radially inner and / or outer surfaces of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169. The radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171, and together with this outer surface forms the first Holweck pump stage following the turbomolecular pump. The radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169, forming a radial Holweck gap 173, and together with this outer surface forms the second Holweck pump stage. The radially inner surface of the inner Holweck stator sleeve 169 opposes the radially outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175, and together with this outer surface forms the third Holweck pump stage.

[0121] A radially extending channel may be provided at the lower end of the Holweck rotor sleeve 163. The radially outer Holweck gap 171 is connected to the central Holweck gap 173 via the channel. A further radially extending channel may be provided at the upper end of the inner Holweck stator sleeve 169. The central Holweck gap 173 is connected to the radially inner Holweck gap 175 via the channel. This allows multiple Holweck pump stages that engage with each other in series. A connecting channel 179 that leads to the exhaust port 117 may be provided at the lower end of the radially inner Holweck rotor sleeve 165.

[0122] The pumping surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves that extend axially and spirally around the rotation axis 151. On the other hand, the opposing sides of the Holweck rotor sleeves 163, 165 are smoothly formed and pump gas for operating the vacuum pump 111 forward in the Holweck grooves.

[0123] For the rotatable support of the rotor shaft 153, a rolling bearing 181 is provided in the region of the pump outlet 117 and a permanent magnetic bearing 183 is provided in the region of the pump inlet 115.

[0124] In the region of the rolling bearing 181, the rotor shaft 153 is provided with a conical splash nut 185. The splash nut 185 has an outer diameter that increases towards the rolling bearing 181. The splash nut 185 is in sliding contact with at least one scraping element of the working medium reservoir. In other existing turbomolecular vacuum pumps (not shown), a splash screw may be provided instead of a splash nut. This allows for various configurations to be realised, so that the term "splash tip" is also used in this context.

[0125] The working medium reservoir comprises a number of absorbent discs 187 stacked one above the other, which are impregnated with a working medium, e.g., a lubricant, for the rolling bearings 181.

[0126] During operation of the vacuum pump 111, the working medium is transferred by capillary action from the working medium reservoir via the scraping element to the rotating splash nut 185 and is then forced by centrifugal force along the splash nut 185 towards the increasing outer diameter of the splash nut 185 towards the rolling bearing 181, where it performs, for example, a lubrication function. The rolling bearing 181 and the working medium reservoir are enclosed in the vacuum pump by a trough-like insert 189 and a bearing cover 145.

[0127] The permanent magnet magnetic bearing 183 has a rotor-side bearing half 191 and a stator-side bearing half 193. Each half has a ring stack, which consists of multiple rings 195, 197 of permanent magnets stacked axially one above the other. The ring magnets 195, 197 face each other, forming a radial bearing gap 199, with the rotor-side ring magnet 195 positioned radially outward and the stator-side ring magnet 197 positioned radially inward. The magnetic field present in the bearing gap 199 generates a magnetic repulsion force between the ring magnets 195, 197. This repulsion force provides radial support for the rotor shaft 153. The rotor-side ring magnet 195 is supported by a support portion 201 of the rotor shaft 153. The support portion 201 surrounds the ring magnet 195 radially outward. The stator-side ring magnet 197 is supported by a support portion 203 of the stator shaft 153. The support part 203 extends through the ring magnet 197 and is suspended on radial struts 205 of the housing 119. The rotor-side ring magnet 195 is fixed parallel to the rotation axis 151 by a cover element 207 connected to the support part 203. The stator-side ring magnet 197 is fixed in one direction parallel to the rotation axis 151 by a fixing ring 209 connected to the support part 203 and a fixing ring 211 connected to the support part 203. A disc spring 213 may further be provided between the fixing ring 211 and the ring magnet 197.

[0128] An emergency or safety bearing 215 is provided within the magnetic bearing. During normal operation of the vacuum pump, the emergency or safety bearing 215 runs free and only engages if the rotor 149 is displaced excessively radially relative to the stator, thereby forming a radial stop for the rotor 149 so that collisions between rotor-side and stator-side structures are prevented. The safety bearing 215 is configured as a non-lubricated rolling bearing and forms a radial gap with the rotor 149 and / or the stator. This gap prevents the safety bearing 215 from engaging during normal pump operation. The radial displacement that the safety bearing 215 engages is dimensioned to be sufficiently large so that the safety bearing 215 does not engage during normal operation of the vacuum pump, and at the same time is sufficiently small so that collisions between rotor-side and stator-side structures are prevented under all circumstances.

[0129] The vacuum pump 111 includes an electric motor 125 that rotates a rotor 149. The armature of the electric motor 125 is formed by the rotor 149. A rotor shaft 153 of the rotor 149 extends through a motor stator 217. A permanent magnet assembly may be disposed radially outward or embedded on the portion of the rotor shaft 153 that extends through the motor stator 217. An intermediate chamber 219 is disposed between the motor stator 217 and the portion of the rotor 149 that extends through the motor stator 217. The intermediate chamber 219 defines a radial motor gap. Through the motor gap, the motor stator 217 and the permanent magnet assembly may magnetically interact to transmit a driving torque.

[0130] The motor stator 217 is fixed in the housing in a motor space 137 provided for the electric motor 125. A seal gas connection 135 allows a seal gas (also called purge gas, which may be, for example, air or nitrogen) to reach the motor space 137. The seal gas protects the electric motor 125 from process gases, for example corrosive parts of the process gas. The motor space 137 may be evacuated via the pump outlet 117, i.e., a vacuum pressure is applied to the motor space 137 at least approximately, which is achieved by an auxiliary vacuum pump connected to the pump outlet 117.

[0131] A so-called labyrinth seal 223, known per se, may further be provided between the rotor hub 161 and the wall 221 that defines the motor space 137. This achieves better sealing of the motor space 217, in particular against the radially outer Holweck pump stages.

[0132] The sealing portion of the porous oxide layer will be described below by way of example, and it should be understood that the following description is merely illustrative and does not limit the present invention in any way.

[0133] The pumping components of a scroll vacuum pump, made of aluminum alloy (EN AW-6082), are first anodized, which produces an oxide layer on the surface of the component. For anodization, a sulfuric acid electrolyte with a bath temperature of 5°C and a current of 4 A / dm 2 A current density of 1000 kJ / s is used.

[0134] Following this, i.e., without intervening drying, the component is subjected to negative pressure in a vacuum cell, which removes residues and impurities from the pores of the oxide layer. The component is then treated with an aqueous 10 weight percent sodium acrylate solution under vacuum. The vacuum is, of course, selected so that the sodium acrylate solution does not boil. The sodium acrylate exists as a dispersion that generates ions in the aqueous solution. During treatment with the sodium acrylate solution, the component is polarized as an anode, with a direct current voltage of 60 V and a current of 2 A / dm. 2 is applied. In this example, the treatment duration is 5 minutes. The current density (rectified current) causes acrylate (particle) ions to be extracted / precipitated / deposited into the pores, thus closing the pores of the oxide layer created by anodization.

[0135] Following this, the sodium acrylate solution is removed and the component is subjected to a temperature treatment at 100 to 180° C., during which polymerization of the acrylate occurs, which permanently closes the pores.

[0136] An exemplary method for producing a sealed surface results in a film thickness on the surface of <1 μm. Depending on the duration and current strength, significantly thicker films can be achieved, i.e., up to 5 μm. Conversely, very small film thicknesses can also be achieved, i.e., the polymerization of the acrylate occurs primarily within the pores. The film thickness is related to the additional deposition of the seal on the porous surface previously produced by anodization. The present application relates to the invention described in the claims, but also includes the following as other aspects. 1. In pumps, especially vacuum pumps, a pumping component having a coating thereon; The coating comprises, in particular, a porous oxide layer produced by anodization in an acidic electrolyte and a fluorine-free polymer-based and / or sol-gel-based seal, A pump, wherein the pores of the oxide layer are at least partially covered and / or impregnated with and / or filled with the seal. 2. 1. The pump according to claim 1, wherein the pump is a spiral or scroll pump, in particular a spiral or scroll vacuum pump, having a plurality of pumping elements configured as scroll elements, and the seal is at least partially attached to at least one of the pumping elements configured as scroll elements. 3. The pump is a piston pump, particularly a piston vacuum pump, having at least one cylinder having an inner wall and a piston movable within the cylinder, and the sealing portion is at least partially attached to the inner wall of the cylinder and / or the piston. 4. The pump according to claim 1, wherein the pump is a turbomolecular vacuum pump, and the sealing portion is at least partially attached to the rotor blades and / or the stator blades. 5. 1. A method for coating a pumping component of a pump, comprising: Step A) providing a pumping component comprising a lightweight alloy workpiece having a porous oxide layer on its surface; Step B) subjecting the pumping component to a negative pressure; Step C) contacting the porous oxide layer with a solution comprising at least one seal precursor, in particular a fluorine-free polymer-based seal precursor and / or at least one sol-gel-based seal precursor, In this case, a voltage is applied to the part that performs the pumping action during at least one of steps A) to C). 6. 6. The method of claim 5, wherein in step C), the solution contains ions and / or ionic compounds. 7. 7. The method according to claim 5 or 6, wherein the solution in step C) contains at least one compound having a functional group from the family of organic anions, such as, for example, substituted acrylates and / or substituted acetates and / or substituted styrenes and / or substituted isocyanates and / or carboxyls and / or sulfonic acids, and / or from the family of inorganic ions, such as, for example, silicates, aluminates, etc. 8. 8. The method according to claim 5, wherein the voltage is gradually increased during treatment of the component that produces the pumping action. 9. 9. The method according to claim 5, wherein the voltage is between 50V and 300V. 10. 10. The method of claim 5, wherein a voltage is applied to the component that provides the pumping action using direct current. 11. 11. The method according to any one of claims 5 to 10, wherein the pumping component is heat treated after the electrochemical treatment, preferably at a temperature of about 100°C to 300°C. 12. 12. The method of any one of claims 5 to 11, wherein the seal precursor is deposited in the pores during an electrochemical treatment. 13. 13. At least one method according to 5 to 12 above, wherein the plug precursor is polymerized within the pores. 14. 14. A pump comprising a component for performing a pumping action obtained according to any one of the methods 5 to 13 above. 15. 15. The pump of claim 14, which is any one of the pumps of claims 1 to 4. [Explanation of symbols]

[0137] 20 Scroll Pump 22 first housing element 24 Second housing element / stationary scroll member 26 Scroll Wall 28 Scroll Wall 30 Movable scroll member 32 Eccentric shaft 34 Motor 36 Rolling bearings 38 Eccentric journal 40 Rolling bearings 42 Corrugated bellows 44 Fans 46 Air guide hood 48 Electronics Housing 50 aisles 52 Chamber 54 Finn 56 Recess 58 Finn 60 Pressure Sensor 62 Passage 64 sealing elements 66 base plate 68 Retaining protrusion 70 First Middle Section 72 Second Middle Section 74 Third Middle Section 76 Clamping device 78 3-jaw chuck 80 void 82 Balance weight 84 mounting holes 86 Shaft step 88 Housing shoulder 90 Gas ballast valve 92 Operation Grip 94 Plastic Body 96 Base Elements 98 holes 100 check valve 102 Stopper 104 Mounting screw 106 Pivotable Elements 108 holes 110 holes 112 Lid 114 Groove 116 Inner sidewall 118 Outer Sidewall 120 First Scroll Section 122 Second Scroll Section 124 Airflow 126 sockets 128 plug 130 Partition Wall 132 recess 134 Transition fit part 136 O-ring 138 Break-Away Thread 140 dent 142 Mounting screw 144 Dome 150 stickers 152 Slide Layer 154 Support 111 Turbomolecular pump 113 Intake flange 115 Pump intake 117 Pump exhaust port 119 Housing 121 Lower part 123 Electronics Housing 125 electric motor 127 Accessory Connection 129 Data Interface 131 Current supply connection 133 Ventilation intake 135 Seal gas connection 137 Motor Room 139 Coolant Connection 141 Bottom surface 143 Screw 145 Bearing cover 147 Fixed hole 148 Coolant line 149 Rotor 151 Rotation axis 153 rotor shaft 155 Moving blade 157 Stator blade 159 Spacer ring 161 rotor hub 163 Holbeck Rotor Sleeve 165 Holbeck Rotor Sleeve 167 Holbeck Sterling Sleeve 169 Holbeck Sterling Sleeve 171 Holbeck Gap 173 Holbeck Gap 175 Holbeck Gap 179 Connection Channels 181 Rolling bearings 183 Permanent magnet type magnetic bearing 185 Splash Nut 187 discs 189 Insert 191 Rotor side bearing half 193 Stator side bearing half 195 Ring Magnet 197 Ring Magnet 199 Bearing clearance 201 Support part 203 Support part 205 Radial Struts 207 Cover Elements 209 Support Ring 211 Fixing ring 213 Disc spring 215 Emergency bearings or safety bearings 217 Motor Stator 219 Intermediate Room 221 Wall 223 Labyrinth Seal

Claims

1. 1. A method for coating a pumping component of a pump, comprising: Step A) providing a pumping component comprising a lightweight alloy workpiece having a porous oxide layer on its surface; Step B) subjecting the pumping component to a negative pressure; Step C) contacting the porous oxide layer with a solution comprising at least one fluorine-free polymer-based seal precursor and / or at least one sol-gel-based seal precursor; A method in which a voltage is applied to the part that performs the pumping action at least during step C), and in step C) the solution contains ions and / or ionic compounds.

2. 2. The method according to claim 1, wherein the solution of step C) contains at least one compound having a functional group from the family of organic anions, such as, for example, substituted acrylates and / or substituted acetates and / or substituted styrenes and / or substituted isocyanates and / or carboxyls and / or sulfonic acids, and / or from the family of inorganic ions, such as, for example, silicates, aluminates, etc.

3. 10. The method of claim 1, wherein the voltage is gradually increased during treatment of the component that provides the pumping action.

4. The method of claim 1 , wherein the voltage is between 50V and 300V.

5. 10. The method of claim 1, wherein a voltage is applied to the pumping component using direct current.

6. 10. The method of claim 1, wherein the pumping component is heat treated after the electrochemical treatment is completed.

7. The method of claim 1 , wherein the seal precursor is deposited in the pores during electrochemical processing.

8. The method of claim 1 , wherein the seal precursor polymerizes within the pores.

9. A pump comprising a pumping component obtained according to the method of claim 1.

10. The component that performs the pumping action has a coating, the coating comprises a porous oxide layer and a fluorine-free polymer-based and / or sol-gel-based seal; 10. The pump of claim 9, wherein the pores of the oxide layer are at least partially covered and / or impregnated and / or filled with the seal.

11. The pump described in Claim 10 is a spiral pump or scroll pump or spiral vacuum pump or scroll vacuum pump having a plurality of pumping elements configured as scroll elements, and the sealing portion is at least partially attached to at least one of the pumping elements configured as scroll elements.

12. A pump as described in Claim 10, wherein the pump is a piston pump or piston vacuum pump having at least one cylinder having an inner wall and a piston movable within the cylinder, and the sealing portion is at least partially attached to the inner wall of the cylinder and / or the piston.

13. A pump as described in claim 10, wherein the pump is a turbomolecular vacuum pump and the sealing portion is at least partially attached to the moving blades and / or the stationary blades.

14. 11. The pump according to claim 10, wherein the oxide layer is an oxide layer having pores produced by anodization in an electrolyte containing an acid.

15. 7. The method of claim 6, wherein the heat treatment is carried out at a temperature of from 100°C to 300°C.

16. A method for coating a pumping component of a pump, comprising the steps of: Step A) providing a pumping component comprising a lightweight alloy workpiece having a porous oxide layer on its surface; Step C) contacting the porous oxide layer with a solution comprising at least one fluorine-free polymer-based seal precursor and / or at least one sol-gel-based seal precursor; A method in which a voltage is applied to the part that performs the pumping action at least during step C), and in step C) the solution contains ions and / or ionic compounds.

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