Light irradiation device

Abstract

To provide a light irradiation device with which it is possible to appropriately suppress the unevenness in processing the surface of the object to be processed.SOLUTION: A light irradiation device 10 comprises an excimer lamp 12, and a lamp house 11 that accommodates the excimer lamp 12, and in which a light extraction opening 11a is formed. The surface of an object 30 to be processed that is carried in a given conveyance direction is irradiated with the light radiated from the light extraction opening 11. The excimer lamp 12 includes a luminous tube 13, and an external electrode 14 that is provided to the outer surface of the luminous tube 13 that faces the light extraction opening 11, and in which an aperture is formed on a first aperture cycle. An aperture is formed on a second aperture cycle between the excimer lamp 12 and the object 30 to be processed, and a dimming member 15 is disposed that dims the light with which the object 30 to be processed is irradiated. At least one of an element wire 14a that forms the aperture of the external electrode 14 and an element wire 15a that forms the aperture of the dimming member 15 extends in a direction that diagonally crosses the conveyance direction.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a light irradiation device that irradiates a workpiece with light to treat the surface of the workpiece. [Background technology]

[0002] Conventionally, light irradiation devices have been used to irradiate the surface of the substrate or decorative sheet, which is the object to be treated, with ultraviolet light emitted from an excimer lamp, in order to modify the surface of the substrate or decorative sheet. In such light irradiation devices, it is necessary to adjust the amount of ultraviolet light to be irradiated depending on the material of the object to be treated, etc.

[0003] One method for adjusting the amount of ultraviolet radiation is to change the input power to the excimer lamp. For example, Patent Document 1 discloses an excimer lamp in which a pair of mesh-like external electrodes is provided on the outer surface of a discharge vessel. This excimer lamp generates a dielectric barrier discharge within the discharge vessel by applying a high-frequency high voltage to the external electrodes, and emits ultraviolet light. It is possible to reduce the amount of UV light emitted from an excimer lamp by reducing the input power to the lamp. However, if the input power is reduced too much, the excimer lamp will no longer light up, so there is a limit to how much light can be reduced.

[0004] Therefore, there is a technique for reducing the amount of light irradiation by disposing, for example, a mesh-shaped light-reducing member between the light source and the object to be processed. For example, Patent Document 2 discloses a technique in which a correction member is placed between a stage on which the workpiece is placed and a light source to correct the in-plane light intensity distribution of light irradiated onto the surface of the workpiece. Here, the correction member has a through-mesh structure or a structure with many through-holes, and by changing the in-plane distribution (aperture ratio) of the through-holes, the in-plane light intensity distribution of the light on the surface of the workpiece can be made to be a desired in-plane light intensity distribution. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-243435 [Patent Document 2] Japanese Patent Application Laid-Open No. 2012-49305 Summary of the Invention [Problem to be solved by the invention]

[0006] When the light emitted from the excimer lamp is irradiated onto the workpiece through a light-reducing member, two shadows are formed on the surface of the workpiece: one is the pattern of the external electrode of the excimer lamp, and the other is the pattern of the light-reducing member. If these two patterns are parallel but have different aperture cycles, the overlap of the two shadows on the workpiece will cause moiré. If the direction of these moiré fringes coincides with the transport direction of the workpiece, the light processing performed while the workpiece is being transported will be strongly influenced by the brightness and darkness of the moiré fringes, resulting in striped processing unevenness on the surface of the workpiece.

[0007] Therefore, an object of the present invention is to provide a light irradiation device that can appropriately suppress uneven processing on the surface of a processing object. [Means for solving the problem]

[0008] In order to solve the above problems, one aspect of the light irradiation device according to the present invention comprises an excimer lamp and a lamp house that houses the excimer lamp and has a light outlet formed therein, and irradiates ultraviolet light emitted from the light outlet onto the surface of a workpiece being transported in a certain transport direction, wherein the excimer lamp comprises an arc tube and an external electrode that is provided on an outer surface of the arc tube that faces the light outlet and has openings formed therein with a first opening period, and between the excimer lamp and the workpiece, a light-attenuating member is disposed that has openings formed therein with a second opening period and attenuates the ultraviolet light irradiated onto the workpiece, and at least one of the wires that form the openings in the external electrode and the wires that form the openings in the light-attenuating member extends in a direction that intersects obliquely with the transport direction.

[0009] In this way, the light-attenuating member disposed between the excimer lamp and the workpiece attenuates the ultraviolet light irradiated onto the workpiece, allowing light irradiation processing with an amount of ultraviolet light appropriate for the workpiece. Furthermore, since at least one of the wires forming the opening of the external electrode of the excimer lamp and the wires forming the opening of the attenuation member is configured to extend in a direction that obliquely intersects the transport direction of the workpiece, even if the shadow of the wire of the external electrode and the shadow of the wire of the attenuation member overlap on the workpiece, moiré fringes (striped patterns) extending in the transport direction of the workpiece are not generated. If moiré fringes extending in the transport direction of the workpiece are generated on the workpiece, uneven processing will occur on the surface of the workpiece that is subjected to light irradiation processing while being transported in the transport direction. In contrast, the present device can appropriately suppress the occurrence of such uneven processing.

[0010] In addition, in the above-mentioned light irradiation device, one of the external electrode and the dimming member may have the wire extending in the conveying direction, and each of the wires of the other member may extend in a direction that intersects obliquely with the conveying direction. In this way, even if either the wires of the external electrode or the wires of the dimming member extend in the transport direction, by providing an angle between the wires, it is possible to generate moiré at an angle relative to the transport direction of the workpiece, thereby appropriately suppressing uneven processing on the surface of the workpiece that has been subjected to light irradiation processing while being transported in the transport direction.

[0011] Furthermore, in the above-mentioned light irradiation device, when viewed from the normal direction of the surface of the workpiece, each of the wires of the other member may intersect with adjacent wires among the wires extending in the conveying direction. For example, if the wires of the external electrodes extend in the transport direction, the wires of the dimming member may periodically block the openings in the pattern of the external electrodes, which can cause uneven processing. By making each of the wires of the dimming member intersect with the wires of adjacent external electrodes, the wires of the dimming member can evenly block each opening in the pattern of the external electrodes. In this case, moiré fringes oblique to the transport direction can be generated on the surface of the processed object, and uneven processing does not occur on the surface of the processed object that is subjected to light irradiation processing while being transported in the transport direction.

[0012] In addition, in the above-mentioned light irradiation device, the multiple dimming members may be arranged in a stacked manner, and any one of the external electrode and the multiple dimming members may have the element wire extending in the conveying direction, and the element wires of the remaining members may each extend in a direction obliquely intersecting the conveying direction. In this case, the amount of ultraviolet light irradiated onto the workpiece can be adjusted to a desired amount by the plurality of light-reducing members while suppressing uneven processing on the surface of the workpiece.

[0013] Furthermore, in the light irradiation device, the light reducing member may have a mesh structure in which a plurality of the wires cross each other. In this case, even if the arc tube of the excimer lamp breaks, it is possible to prevent fragments from scattering onto the object to be treated.

[0014] Furthermore, one aspect of the light irradiation device according to the present invention is a light irradiation device comprising an excimer lamp and a lamp house that houses the excimer lamp and has a light outlet formed therein, and that irradiates light emitted from the light outlet onto a surface of a workpiece that is being transported in a certain transport direction, the excimer lamp comprising an arc tube and an external electrode that is provided on an outer surface of the arc tube that faces the light outlet and has openings formed therein at a first opening period, and a light-attenuating member that attenuates the light irradiated onto the workpiece and has openings formed at a second opening period is disposed between the excimer lamp and the workpiece, and the openings of the light-attenuating member are formed to have a periodic linear pattern on the surface of the workpiece by the irradiation of ultraviolet light, and the external electrode and the external electrode are connected together so that at least one of wires that form the openings of the external electrode and the linear pattern extends in a direction that obliquely intersects the transport direction. decrease The optical element is located.

[0015] In this way, the attenuation element disposed between the excimer lamp and the workpiece attenuates the ultraviolet light irradiated onto the workpiece, allowing light irradiation treatment to be performed with an amount of ultraviolet light appropriate for the workpiece. Furthermore, because at least one of the wires forming the openings in the external electrodes of the excimer lamps and the linear pattern formed by the attenuation element extends in a direction obliquely intersecting the transport direction of the workpiece, even if the shadows cast by the wires of the external electrodes and the linear pattern formed by the attenuation element overlap on the workpiece, moiré fringes (striped patterns) extending in the transport direction of the workpiece are not generated. Therefore, the occurrence of uneven treatment on the surface of a workpiece subjected to light irradiation treatment while being transported in the transport direction can be appropriately suppressed. For example, the light-reducing member may have a through-hole structure in which through-holes are formed in a plate-like member at the second opening period. [Effects of the Invention]

[0016] The present invention can suppress the occurrence of moire fringes extending in the transport direction of the workpiece, and can appropriately suppress uneven processing on the surface of the workpiece. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a cross-sectional view showing a schematic configuration example of a light irradiation device according to an embodiment of the present invention. [Figure 2] 10A and 10B are diagrams illustrating an example of the arrangement of an excimer lamp and a light-reducing member. [Figure 3] 10A and 10B are diagrams illustrating examples of arrangement of lamp electrodes and a dimming member. [Figure 4] FIG. [Figure 5] FIG. 2 is an image diagram of an electrode wire and a mesh wire. [Figure 6] FIG. 10 is an explanatory diagram of parallel moire. [Figure 7] FIG. 10 is an explanatory diagram of rotational moire. [Figure 8] This is an example of arrangement in which the angle of the mesh wires relative to the electrode wires is small. [Figure 9] This is an example of arrangement in which the angle of the mesh wires relative to the electrode wires is large. [Figure 10] FIG. 2 is a diagram illustrating the configuration of a lamp electrode. [Figure 11] FIG. 10 is an explanatory diagram of the crossing angle between the electrode wires and the mesh wires. [Figure 12] 10A and 10B are diagrams illustrating another example of a light-reducing member. [Figure 13] 10A and 10B are diagrams illustrating another example of a light-reducing member. [Figure 14] 10A and 10B are diagrams illustrating other examples of external electrodes and dimming members. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, a light irradiation device is described that irradiates the surface of a workpiece (workpiece) transported in a fixed transport direction with ultraviolet light emitted from an excimer lamp to modify or deluster the workpiece surface. Here, the workpiece can be a substrate, a decorative sheet, or the like. In this embodiment, a light irradiation device for surface modification and matting is described, but any light irradiation device that processes the work surface by irradiating the surface of a workpiece being transported in a certain transport direction with ultraviolet light emitted from an excimer lamp can be used, and its uses are not limited to those described above.

[0019] FIG. 1 is a cross-sectional view showing a schematic configuration example of a light irradiation device 10 according to this embodiment. 1, the light irradiation device 10 includes a lamp house 11 made of, for example, metal. The lamp house 11 houses an excimer lamp 12. An opening serving as a light outlet 11a is formed on the bottom surface of the lamp house 11 at a position facing the light emitting surface of the excimer lamp 12. In the following description, the width direction of the excimer lamp 12 is defined as the X direction, the longitudinal direction (tube axis direction) of the excimer lamp 12 is defined as the Y direction, and the direction perpendicular to the X direction and the Y direction is defined as the Z direction. The light irradiation device 10 according to this embodiment is disposed with the Z direction as the up-down direction.

[0020] A transport mechanism 20 that transports the workpiece 30 is disposed below the light irradiation device 10. The transport mechanism 20 includes a plurality of rollers and a drive unit (not shown) that rotates and drives each roller. The workpiece 30 is placed on the rollers of the transport mechanism 20, and is transported in the X direction by driving and rotating the rollers. The light irradiation device 10 irradiates ultraviolet rays onto the workpiece 30 that has been transported to directly below the light outlet 11a. The workpiece 30 that has been irradiated with ultraviolet rays is then transported out by the transport mechanism 20. The transport mechanism 20 may be a so-called roll-to-roll type transport mechanism that transports a continuous film using multiple rollers. Note that the transport mechanism 20 is not limited to a roll-to-roll type transport mechanism. For example, the transport mechanism 20 may be configured to include a stage that holds the workpiece 30 and a drive unit that moves the stage in the X direction.

[0021] The excimer lamp 12 includes an arc tube 13. The arc tube 13 is made of a material that is transparent to ultraviolet rays (e.g., quartz glass). Alternatively, the arc tube 13 may be made of a material that is transparent to vacuum ultraviolet rays to ultraviolet rays (e.g., synthetic quartz glass). The arc tube 13 has an upper wall and a lower wall that are arranged opposite each other in the Z direction, and is a rectangular tubular shape with a flat cross section. A discharge gas that forms excimer molecules by discharge is sealed inside the arc tube 13. External electrodes 14 are provided on the outer surfaces of the upper and lower walls of the arc tube 13, respectively. One of the pair of external electrodes 14 is a high-voltage supply electrode, and the other is a ground electrode. The external electrodes 14 are optically transparent electrodes in a mesh shape with openings formed at a predetermined opening period (first opening period), and are configured so that light can pass through the gaps in the mesh. In this case, the opening of the external electrode 14 refers to a light-transmitting portion defined by the wires that form the external electrode 14. The opening of the external electrode 14 refers to, for example, an inner opening surrounded by the wires that form the external electrode 14, and is the portion indicated by reference numeral 14b in Fig. 3, 14b in Fig. 5, and 14b in Fig. 12, which will be described later.

[0022] The pair of external electrodes 14 may have different shapes. For example, the external electrode 14 provided on the outer surface of the upper wall of the arc tube 13 does not need to transmit light and may be a solid electrode. The external electrode 14 provided on the outer surface of the lower wall of the arc tube 13, i.e., the external electrode 14 facing the workpiece 30, may be any electrode that can transmit light and has openings formed at a predetermined opening period, and may be, for example, an electrode with slits provided periodically. The material for forming the external electrodes 14 may be, for example, gold, platinum, or an alloy containing these metals.

[0023] In this embodiment, the light irradiation device 10 is described as having two excimer lamps 12, but the number of excimer lamps 12 may be one or more. In addition, in this embodiment, the excimer lamp 12 is described as being arranged so that its longitudinal direction is perpendicular to the transport direction (X direction) of the workpiece 30, but the arrangement of the excimer lamp 12 is not limited to the above.

[0024] Between the excimer lamp 12 and the workpiece 30, a light-reducing member 15 is arranged to reduce the intensity of the ultraviolet light irradiated onto the workpiece 30. The light-reducing member 15 can be arranged at the light outlet 11a of the lamp house 11. The light-reducing member 15 is a mesh member in which openings are formed at a predetermined opening period (second opening period). in this case, decrease The opening of the optical member 15 is decrease This refers to a light transmitting portion defined by the wires that form the optical member 15, and is the portion indicated by reference numeral 15b in FIG. 3, reference numeral 15b in FIG. 5, and reference numeral 15f in FIG. 13, which will be described later. The ultraviolet light emitted from the excimer lamp 12 is emitted from the light outlet 11a via the light-reducing member 15. At this time, the ultraviolet light emitted from the excimer lamp 12 is reduced in accordance with the aperture ratio of the light-reducing member 15.

[0025] 2, the light-reducing member 15 can be supported by a support member 16 below the excimer lamp 12 so as not to droop. For example, the light-reducing member 15 may be sandwiched between the support members 16 and welded. In this embodiment, the case where the light-reducing member 15 is disposed at the light extraction port 11a of the lamp house 11 will be described, but the present invention is not limited to this and the light-reducing member 15 may be disposed between the excimer lamp 12 and the workpiece 30. For example, the light-reducing member 15 may be disposed inside the lamp house 11 or outside the lamp house 11.

[0026] In this embodiment, the external electrode (hereinafter referred to as the "lamp electrode") 14 facing the workpiece 30 is a mesh electrode in which a large number of openings 14b are periodically formed by wires (hereinafter referred to as the "electrode wires") 14a parallel to the X and Y directions, as shown in FIG. In this embodiment, the dimming member 15 is a mesh member in which a large number of openings 15b are periodically formed by wires (hereinafter referred to as "mesh wires") 15a that form a predetermined angle with respect to the X direction and the Y direction, as shown in FIG. In this embodiment, the aperture period (first aperture period) of the external electrode 14 is different from the aperture period (second aperture period) of the light-reducing member 15. FIG. 4 is a diagram showing an image A of the light-reducing member 15 and an image B of the external electrode 14. As shown in FIG. 4, the aperture period can be defined by the center-to-center distances α and β of adjacent apertures. Alternatively, the aperture period can be defined by the distances a and b obtained by adding the wire width and the aperture width in a direction (the left-right direction in FIG. 4) perpendicular to the direction in which the wire (15a or 14a) extends.

[0027] FIG. 5 is an image diagram of the electrode wires 14a and the mesh wires 15b. Note that, although the lamp electrode 14 of the excimer lamp 12 and the light-reducing member 15 are actually arranged to overlap when viewed from the normal direction (Z direction) of the surface of the workpiece 30, for the sake of explanation, they are shown shifted in position in Fig. 5. Also, in Fig. 5, the opening 14b of the lamp electrode 14 and the opening 15b of the light-reducing member 15 are shown exaggerated, and the dimensional ratio between the opening 14b and the opening 15b is different from the actual dimensional ratio.

[0028] 5, the electrode wires 14a of the lamp electrode 14 are composed of wires extending in the conveying direction (X direction) of the workpiece 30 and wires extending in a direction (Y direction) perpendicular to the conveying direction of the workpiece 30. The mesh wires 15a of the dimming member 15 are composed of wires extending in directions obliquely intersecting the X direction and the Y direction, respectively. In this way, the mesh wires 15a of the light-reducing member 15 extend in a direction that obliquely intersects with the direction in which the workpiece 30 is conveyed.

[0029] When the light emitted from the excimer lamp 12 is irradiated onto the workpiece 30 via the light-reducing member 15, two shadows are created on the surface of the workpiece 30: the pattern of the lamp electrode 14 and the pattern of the light-reducing member 15. If these two patterns are parallel but have different aperture periods, moiré (parallel moiré) will occur when the two shadows overlap on the workpiece 30. If the direction of these moiré fringes coincides with the X direction, which is the transport direction of the workpiece 30, the light irradiation process while transporting the workpiece 30 in the X direction will result in striped processing unevenness extending in the X direction on the surface of the workpiece 30.

[0030] 6 are parallel to the X direction and are equally spaced apart, but the spacing between patterns P11 and P12 is different. When these two patterns P11 and P12 are superimposed, moiré fringes in the X direction are generated, as in pattern P13.

[0031] If the lamp electrode 14 has wires extending in the X direction and the dimming member 15 has wires extending in the X direction at a different period from the wires of the lamp electrode 14, a pattern like pattern P11 will be formed on the workpiece 30 by the wires of the lamp electrode 14 extending in the X direction, and a pattern like pattern P12 will be formed on the workpiece 30 by the wires of the dimming member 15 extending in the X direction. As a result, moiré fringes parallel to the conveyance direction, like pattern P13, will be generated on the workpiece 30. In other words, the light intensity distribution in the Y direction on the workpiece 30 will be a periodic light intensity distribution. The brightness and darkness of these moiré fringes will be accentuated by the light irradiation process while the workpiece 30 is conveyed in the X direction, resulting in processing unevenness.

[0032] If the pattern formed on the workpiece 30 by the lamp electrodes 14 and the dimming member 15 is a grid pattern intersecting the X and Y directions, moiré fringes will also appear in the Y direction on the workpiece 30. However, by performing the light irradiation process while transporting the workpiece 30 in the X direction, the periodic light intensity distribution in the X direction caused by the moiré fringes is uniformized, and no processing unevenness occurs. If moiré fringes appear on the workpiece 30 in the X direction, this can become a problem as processing unevenness.

[0033] That is, when the electrode wires 14a and the mesh wires 15a each extend in the X direction, which is the direction in which the workpiece 30 is transported, and the opening periods of the wires differ, moire patterns will cause uneven processing. Therefore, in this embodiment, as described above, the electrode wires 14a are arranged parallel to the X direction, and the mesh wires 15a are arranged obliquely with respect to the X direction. 7 is a pattern parallel to the X direction and spaced at regular intervals, and pattern P22 is a pattern diagonal to the X direction and spaced at regular intervals. When these two patterns P21 and P22 are superimposed, moiré fringes (rotational moiré) diagonal to the X direction are generated, as in pattern P23.

[0034] In this embodiment, the lamp electrode 14 has wires extending in the X direction, and the dimming member 15 has wires extending in a direction obliquely intersecting the X direction. Therefore, a pattern such as pattern P21 is formed on the workpiece 30 by the wires of the lamp electrode 14 extending in the X direction, and a pattern such as pattern P22 is formed on the workpiece 30 by the wires of the dimming member 15 extending in a direction obliquely intersecting the X direction. As a result, moiré fringes such as pattern P13 are generated on the workpiece 30 obliquely to the conveyance direction. Therefore, no unevenness in the treatment occurs on the surface of the workpiece 30 that has been subjected to light irradiation treatment while being transported in the X direction.

[0035] In this way, by arranging the mesh wires 15a in a direction that diagonally intersects with the X direction, it is possible to prevent moire fringes from occurring in the X direction, and to suppress uneven processing. However, if the angle of the mesh wires 15a with respect to the X direction is relatively small, the mesh wires 15a will periodically block the openings (electrode openings) of the lamp electrodes 14 extending in the X direction, making it impossible to suppress processing unevenness with high precision.

[0036] FIG. 8 shows an example of arrangement in which the angle of the mesh wires 15a relative to the electrode wires 14a is small. 8, if the angle of the mesh wires 15a with respect to the X direction is small, there will be portions a where the entire mesh wires 15a block the electrode opening, and portions b where only part of the mesh wires 15a block the electrode opening. As a result, the mesh wires 15a periodically block the electrode opening, and the illuminance will be lower in the blocked portions, which may result in uneven processing.

[0037] On the other hand, as shown in Fig. 9, when the angle of the mesh wires 15a relative to the electrode wires 14a is large, the mesh wires 15a evenly cover the electrode openings, resulting in a uniform reduction in illuminance overall and reliably preventing uneven processing. In order for the mesh wires 15a to evenly cover the electrode openings, as shown in Figure 9, each mesh wire 15a must straddle the electrode opening, that is, each mesh wire 15a must have an intersection with at least two electrode wires 14a adjacent to it in the Y direction.

[0038] As shown in FIG. 10, if the width of the lamp electrode 14 in the X direction (lamp electrode width) is W and the interval between adjacent electrode wires 14a in the Y direction (electrode opening width) is A, when the angle θ of the mesh wires 15a with respect to the X direction satisfies the condition of the following formula (1), the mesh wires 15a will always close the electrode opening, as shown in FIG. 11. tanθ > A / W ………(1) For example, when W=57.6 mm and A=2.5 mm, if θ>2.48° (θ>3°), the mesh wires 15a will always close the electrode openings, and no uneven processing will occur.

[0039] The lamp electrode width W and electrode opening width A of the lamp electrode 14 are merely examples and are not limited to the above. The line width W1 of the electrode wire 14a shown in Fig. 10 can also be any line width. For example, the line width W1 can be 0.2 mm. Furthermore, the wire diameter, mesh opening width, and opening rate of the mesh wires 15a of the dimming member 15 are not particularly limited and can be designed appropriately according to the desired amount of dimming. For example, the dimming member 15 can be selected from a mesh member having a wire diameter of 0.23 mm, a mesh opening width of 0.278 mm, an opening rate of 29.9%, and an opening period of 0.508 mm, or a mesh member having a wire diameter of 0.1 mm, a mesh opening width of 0.154 mm, an opening rate of 36.5%, and an opening period of 0.254 mm. Here, the opening period refers to the distances a and b shown in FIG. 4.

[0040] As described above, the light irradiation device 10 in this embodiment includes the excimer lamp 12 having the external electrode 14 in which openings are formed at a first opening period, and the light-attenuating member 15, which is disposed between the excimer lamp 12 and the object to be treated (workpiece) 30 and in which openings are formed at a second opening period different from the first opening period, and irradiates the surface of the workpiece 30 with ultraviolet light emitted from the excimer lamp 12 via the light-attenuating member 15. Here, the wires (electrode wires) 14a forming the openings in the external electrode 14 extend in the conveyance direction (X direction) of the workpiece 30, and the wires (mesh wires) 15a forming the openings in the light-attenuating member 15 extend in a direction obliquely intersecting the conveyance direction (X direction) of the workpiece 30.

[0041] In this way, the mesh wires 15a are arranged obliquely with respect to the conveyance direction of the workpiece 30, which makes it possible to suppress the occurrence of moiré fringes along the conveyance direction of the workpiece 30. Therefore, it is possible to suppress the occurrence of processing unevenness due to moiré. Furthermore, when viewed from the normal direction of the surface of the workpiece 30, each of the mesh wires 15a can be configured to intersect with adjacent electrode wires 14a among the electrode wires 14a extending in the conveyance direction. This makes it possible to generate moiré fringes oblique to the conveyance direction on the surface of the workpiece 30. Since light and dark moiré fringes can be made to appear sequentially along the conveyance direction, it is possible to reliably prevent uneven processing on the surface of the workpiece that has been subjected to light irradiation processing while being conveyed in the conveyance direction.

[0042] Here, the light reducing member 15 can have a mesh structure in which a plurality of wires cross each other. By appropriately designing the aperture ratio of the mesh structure, a desired amount of light reduction can be achieved. Furthermore, if the light-emitting tube 13 of the excimer lamp 12 breaks, the light-reducing member 15 can prevent fragments from scattering onto the workpiece 30. Furthermore, by grounding the light-reducing member 15, the light-reducing member 15 can be used as a shielding plate, thereby suppressing the effects of electromagnetic waves from the excimer lamp 12.

[0043] (Variation) In the above embodiment, the case where there is one light-reducing member 15 has been described, but there may be multiple light-reducing members 15. In this case, the multiple light-reducing members 15 are arranged so as to be stacked in the Z direction. In this case, the multiple stacked light-reducing members 15 may be sandwiched between support members 16 and welded. The multiple light-reducing members 15 are arranged so that the mesh wires 15a extend in directions that obliquely intersect with the X direction. In this case, the angles of the mesh wires 15a of the multiple light-reducing members 15 with respect to the X direction may be different from each other or may be the same.

[0044] In the above embodiment, the case where the electrode wires 14a extend in the X direction and the mesh wires 15a extend in a direction that diagonally intersects with the X direction has been described, but the mesh wires 15a may extend in the X direction and the electrode wires 14a may extend in a direction that diagonally intersects with the X direction. If one of the lamp electrode 14 and the dimming member 15 has wires that extend in the X direction and the wires of the other member each extend in a direction that diagonally intersects with the X direction, a rotational moiré pattern can be generated on the workpiece 30 in the X direction. Furthermore, both the electrode wires 14a and the mesh wires 15a may extend in a direction that obliquely intersects with the X direction. That is, the electrode wires 14a and the mesh wires 15a may extend in a direction that generates moiré fringes in a direction different from the X direction on the surface of the workpiece 30, or in a direction that does not generate moiré fringes. This makes it possible to appropriately suppress the occurrence of processing unevenness as in the above embodiment.

[0045] Furthermore, in the above embodiment, the light reducing member 15 is in a mesh shape, but the present invention is not limited to this. The light-reducing member may be configured, for example, as a light-reducing member 15A shown in Fig. 12, in which a large number of through holes 15c are formed in a plate-like member. When the large number of through holes 15c are formed at a constant pitch in each of the first direction and the second direction in the XY plane, a linear pattern extending in each of the first direction and the second direction is formed on the surface of the workpiece 30 as the pattern of the light-reducing member 15A. By setting the first direction and the second direction to be different from the X direction, a linear pattern oblique to the X direction can be formed on the workpiece 30, and the same effect as when a mesh-like light-reducing member 15 is used as the light-reducing member can be obtained. That is, the light-reducing member may be a member having openings formed therein that form a periodic linear pattern on the surface of the workpiece 30 when irradiated with ultraviolet light. In this case, it is sufficient that at least one of the electrode wires 14a and the linear pattern extends in a direction that obliquely intersects with the X direction.

[0046] Furthermore, the light-reducing member may have a configuration in which wires 15d are stretched in only one direction, such as light-reducing member 15B shown in Fig. 13. Light-reducing member 15B has slit-like openings 15f periodically formed by adjacent wires 15d and outer frames 15e of light-reducing member 15B connecting ends of the adjacent wires 15d. In this case, too, the external electrode 14 and the electrode wire 15d are connected so that at least one of the electrode wire 14a and the electrode wire 15d extends in a direction obliquely intersecting the X direction. decrease It is sufficient that the optical member 15B is positioned.

[0047] Furthermore, in the above embodiment, the case has been described where the opening period (first opening period) of the external electrode 14 and the opening period (second opening period) of the dimming member 15 are different, but as shown in Fig. 14, for example, the opening period of the external electrode 14 and the opening period of the dimming member 15 may be the same. In this case as well, it is sufficient that at least one of the wires forming the openings of the external electrode 14 and the wires forming the openings of the dimming member 15 extend in a direction obliquely intersecting the transport direction (X direction). [Explanation of symbols]

[0048] 10...light irradiation device, 11...lamp house, 11a...light outlet, 12...excimer lamp, 13...light emitting tube, 14...external electrode, 14a...electrode wire, 14b...opening, 15...light-reducing member, 15a...mesh wire, 15b...opening, 16...support member, 20...work stage, 30...workpiece (workpiece)

Claims

1. A light irradiation device comprising an excimer lamp and a lamp house that houses the excimer lamp and has a light outlet formed therein, the light irradiation device irradiating ultraviolet light emitted from the light outlet onto a surface of a workpiece being transported in a fixed transport direction, the excimer lamp comprises an arc tube and an external electrode provided on an outer surface of the arc tube facing the light outlet, the external electrode having openings formed at a first opening period; an aperture formed at a second aperture period between the excimer lamp and the workpiece, and a light-reducing member configured to reduce the ultraviolet light irradiated onto the workpiece are disposed; A light irradiation device, characterized in that at least one of the wires forming the openings of the external electrodes and the wires forming the openings of the dimming member extend in a direction obliquely intersecting the conveying direction.

2. The light irradiation device according to claim 1, characterized in that one of the external electrode and the dimming member has the wire extending in the transport direction, and each of the wires of the other member extends in a direction obliquely intersecting the transport direction.

3. The light irradiation device according to claim 2, characterized in that, when viewed from the normal direction of the surface of the workpiece, each of the wires of the other member intersects with adjacent wires among the wires extending in the transport direction.

4. A plurality of the light-reducing members are arranged in a stacked manner, The light irradiation device according to claim 1, characterized in that one of the external electrode and the plurality of dimming members has the wire extending in the transport direction, and each of the wires of the remaining members extends in a direction obliquely intersecting the transport direction.

5. 2. The light irradiation device according to claim 1, wherein the light-reducing member has a mesh structure in which a plurality of the wires cross each other.

6. A light irradiation device comprising an excimer lamp and a lamp house that houses the excimer lamp and has a light outlet formed therein, the light irradiation device irradiating ultraviolet light emitted from the light outlet onto a surface of a workpiece being transported in a fixed transport direction, the excimer lamp comprises an arc tube and an external electrode provided on an outer surface of the arc tube facing the light outlet, the external electrode having openings formed at a first opening period; an aperture formed at a second aperture period between the excimer lamp and the workpiece, and a light-reducing member configured to reduce the ultraviolet light irradiated onto the workpiece are disposed; the openings of the light-reducing member are formed to have a periodic linear pattern on the surface of the object to be treated by irradiation with the ultraviolet light, A light irradiation device characterized in that the external electrode and the dimming member are positioned so that at least one of the wires forming the openings in the external electrode and the linear pattern extends in a direction that intersects obliquely with the conveying direction.

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