Fluorescence Inspection Device

Abstract

To perform an inspection at a high throughput even if many LED elements with different color development are arrayed on one substrate.SOLUTION: A fluorescence inspection device for performing an inspection by making LED elements arranged on a substrate emit fluorescence light, comprises a substrate holding part, an excitation light irradiation part, an imaging part, a relative movement part, an inspection part and a control part. The excitation light irradiation part includes a first light source and a second light source. The imaging part comprises: a first imaging camera which captures an inspection image including light in a fluorescent wavelength emitted from an LED element irradiated with light in a first wavelength; and a second imaging camera which captures an inspection image including light in a fluorescent wavelength emitted from the LED element irradiated with light in a second wavelength. The control part alternately performs imaging by shifting the imaging timing of the first imaging camera from that of the second imaging camera while synthesizing imaging by the first imaging camera and light emission of the first light source, synthesizing imaging by the second imaging camera and light emission of the second light source and making the relative movement part relatively move in one direction.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a fluorescent inspection device that irradiates LED elements with excitation light and performs inspections based on the fluorescent light emitted from the LED elements. For example, the present invention relates to a fluorescent inspection device that inspects the quality of LED elements that emit different colors and are arranged at a predetermined pitch in the vertical and horizontal directions on a circuit board. [Background technology]

[0002] The emission wavelengths of materials with fluorescent (luminescent) properties, such as fluorescent lamps, back panels of plasma displays, and LED chips (i.e., fluorescent emitters), emitters such as LED lighting and organic EL (i.e., emitters in the narrow sense), and color filters for LCDs combined with white backlights (i.e., emitters in the broad sense), are related to the quality and performance of these products, and wavelengths are measured using spectroscopic two-dimensional luminance meters (for example, Patent Document 1).

[0003] Furthermore, as a method for detecting abnormalities in multiple LEDs that emit different colors (e.g., red and green LEDs), two systems of filters and sensors are used, and the ratio of the detected brightness values ​​is first calculated, and then this ratio is compared with a judgment threshold value (e.g., Patent Document 2). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-177812 [Patent Document 2] Japanese Patent Application Laid-Open No. 2002-195882 Summary of the Invention [Problem to be solved by the invention]

[0005] However, the methods described in Patent Documents 1 and 2 require measurement and inspection of each light-emitting element one by one. Therefore, when many light-emitting elements are arranged on a single substrate, the measurement and inspection take a long time, resulting in low throughput.

[0006] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide an apparatus that can inspect LED elements with high throughput even when a large number of LED elements that emit different colors are arranged on a single substrate. [Means for solving the problem]

[0007] In order to solve the above problems, one aspect of the present invention is to provide: A fluorescent inspection device that inspects LED elements arranged on a substrate by making them emit fluorescent light, a substrate holder for holding a substrate; an excitation light irradiating unit that irradiates excitation light toward the LED element; an imaging unit that captures an inspection image including light of a fluorescent wavelength emitted from the LED element irradiated with excitation light; a relative movement unit that moves the substrate holding unit relative to the excitation light irradiation unit and the imaging unit; an inspection unit that inspects the LED elements based on the inspection image; a control unit that controls the excitation light irradiation unit, the imaging unit, and the relative movement unit, The excitation light irradiation unit is a first light source that emits light of a first wavelength as excitation light; a second light source that emits light of a second wavelength that is longer than the first wavelength as excitation light; The imaging unit is a first imaging camera that captures an inspection image including light of a fluorescent wavelength emitted from the LED element irradiated with light of the first wavelength; a second imaging camera that captures an inspection image including light of a fluorescent wavelength emitted from the LED element irradiated with light of the second wavelength, The control unit The imaging by the first imaging camera and the light emission by the first light source are synchronized, While synchronizing the image capture by the second image capture camera and the light emission by the second light source, While the relative moving part is moved relatively in one direction, the first imaging camera and the second imaging camera alternately capture images with different imaging timings.

[0008] According to this embodiment, during the relative movement of one row, excitation light of different wavelengths is alternately irradiated to the LED elements to cause them to emit fluorescent light, and two types of inspection images of different wavelength bands can be alternately captured. [Effects of the Invention]

[0009] Even if a large number of LED elements with different colors are arranged on a single substrate, inspection can be performed with high throughput. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a schematic diagram showing the overall configuration of an example of an embodiment of the present invention. [Figure 2] FIG. 1 is a conceptual diagram showing how an exterior image is captured in an example of an embodiment of the present invention. [Figure 3] FIG. 1 is a conceptual diagram showing image capture timing in an example of an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the three axes of a Cartesian coordinate system are designated as X, Y, and Z, the horizontal direction is designated as the X direction and the Y direction, and the direction perpendicular to the XY plane (i.e., the direction of gravity) is designated as the Z direction. In addition, the direction against gravity in the Z direction is designated as up, and the direction in which gravity acts is designated as down. In addition, the direction of rotation around the Z direction as the central axis is designated as the θ direction.

[0012] Fig. 1 is a schematic diagram showing the overall configuration of an example of an embodiment of the present invention, which diagrammatically shows each component constituting a fluorescence inspection device 1 according to the present invention.

[0013] Fig. 2 is a conceptual diagram showing how an external image is captured in an example of an embodiment of the present invention. Fig. 2 shows how the first and second imaging cameras 3A and 3B of the imaging unit 3 move relative to the substrate W in the direction indicated by the arrow V, sequentially capturing images of light emitted from the LED elements C formed on the substrate W at a predetermined pitch in the X and Y directions.

[0014] In the following explanation, an example is shown in which an imaging area F (also called a field of view) is set to a size that includes a plurality of LED elements C formed at a predetermined pitch in the X and Y directions on a substrate W, and each LED element C is imaged sequentially over the entire surface of the substrate W for inspection. More specifically, an LED element Cb that emits blue light, an LED element Cg that emits green light, and an LED element Cr that emits red light are exemplified as the LED elements C to be inspected.

[0015] The fluorescent inspection device 1 inspects LED elements C arranged on a substrate W by causing them to emit fluorescent light. Specifically, the fluorescent inspection device 1 includes an excitation light irradiation unit 2, an imaging unit 3, an inspection unit 4, and a control unit 9. More specifically, the fluorescent inspection device 1 includes a substrate holding unit H, a relative movement unit M, a computer CP, etc.

[0016] The excitation light irradiating section 2 irradiates the LED element C with excitation light L1 and L2. Specifically, the excitation light irradiation unit 2 irradiates excitation light L1, L2 toward a plurality of LED elements C arranged within a predetermined section on the substrate W. This predetermined section on the substrate W is also called an excitation light irradiation area, and is set to include an imaging region F of the imaging unit 3, the details of which will be described later, but is slightly wider than this. More specifically, the excitation light irradiating section 2 includes a first light source 2A, a second light source 2B, a light guide 21, a light emitting section 22, and the like.

[0017] The first light source 2A emits light of a first wavelength as excitation light L1. Specifically, the first light source 2A emits excitation light L1 that causes the LED elements Cb and Cg that emit light in blue to green to emit fluorescent light. More specifically, the first light source 2A includes a lamp light source, an LED light source, a laser diode, or the like that emits, for example, ultraviolet light or violet light (wavelength 365 to 405 nm) as light of the first wavelength contained in the excitation light L1.

[0018] The second light source 2B emits light of a second wavelength, which is longer than the first wavelength, as the excitation light L2. Specifically, the second light source 2B emits excitation light L2 having a longer wavelength than the excitation light L1, such that the red-emitting LED element Cr emits fluorescence. More specifically, the second light source 2B includes a lamp light source, an LED light source, a laser diode, or the like that emits, for example, green light (wavelength 500 to 560 nm) as the light of the second wavelength contained in the excitation light L2.

[0019] The light guide 21 guides the light emitted from the first light source 2A and the second light source 2B. Specifically, the light guide 21 is, for example, a bundle of many thin, linear pieces of transparent resin or glass material called optical fibers, and guides light by internal reflection. The light emitting section 22 mixes two kinds of light guided by the light guide 21 from the first light source 2A and the second light source 2B and emits the mixed light.

[0020] The imaging unit 3 captures inspection images P1 and P2 containing light of the fluorescent wavelength emitted from the LED elements C irradiated with the excitation light L1 and L2. More specifically, the imaging unit 3 includes a first imaging camera 3A and a second imaging camera 3B. The imaging unit 3 also includes a lens barrel 30, a beam splitter 32, objective lenses 33a and 33b, a revolver mechanism 34, and the like.

[0021] The first imaging camera 3A captures an inspection image P1 including light L3 of the fluorescent wavelength emitted from the LED elements C irradiated with light of the first wavelength. Specifically, the first imaging camera 3A captures an image within an imaging area (also called a field of view) FA set on the substrate W, and outputs the image as an inspection image P1. More specifically, the first imaging camera 3A includes an imaging element 36A that is configured as an area image sensor in which light receiving elements that are sensitive to visible light are arranged two-dimensionally.

[0022] The second imaging camera 3B captures an inspection image P2 including light L4 of the fluorescent wavelength emitted from the LED elements C irradiated with light of the second wavelength. Specifically, the second imaging camera 3B captures an image within an imaging field of view (also referred to as a field of view) FB set on the board W, and outputs the image as an inspection image P2. More specifically, the second imaging camera 3B includes an imaging element 36B that is configured as an area image sensor in which light receiving elements that are sensitive to visible light are arranged two-dimensionally.

[0023] The lens barrel 30 fixes the first imaging camera 3A, the second imaging camera 3B, and the imaging unit 3 in a predetermined positional relationship. Specifically, the lens barrel 30 is a roughly T-shaped cylinder with a hollow interior so as to guide the observation light LA ​​and LB incident from the objective lenses 33a and 33b to the first imaging camera 3A and the second imaging camera 3B while blocking external light. A revolver 34 is attached to one end of the lens barrel 30 (lower in the figure), and the first imaging camera 3A and the second imaging camera 3B are attached to the other end (upper and right in the figure), and a beam splitter 32 is attached inside the lens barrel 30. Furthermore, the lens barrel 30 is attached to the device frame 1f via connecting fittings or the like (not shown).

[0024] The light beam splitter 32 splits and guides light beams L3 and L4, which include light of fluorescent wavelengths emitted from the LED elements C, to the first imaging camera 3A and the second imaging camera 3B. Specifically, the light beam splitter 32 includes a wavelength band splitter that introduces a light beam whose main component is light on the shorter wavelength side than a predetermined wavelength into the first imaging camera 3A, while introducing a light beam whose main component is light on the longer wavelength side than the predetermined wavelength into the second imaging camera 3B. An example of the wavelength band splitting unit is a dichroic mirror. A dichroic mirror is a mirror that is placed at an angle to the optical path and has a thin film coated on its surface. By utilizing the interference of light caused by the thin film, it transmits light in a specific wavelength band while reflecting the remaining wavelength band. More specifically, the dichroic mirror of the beam splitter 32 is set to transmit light having wavelengths shorter than approximately 590 nm (blue and green) and guide it to the first imaging camera 3A, while reflecting light having wavelengths longer than approximately 590 nm (orange and red) and guide it to the second imaging camera 3B.

[0025] The objective lens 33 forms images of the imaging areas FA and FB on the substrate W on the imaging element 36A of the first imaging camera 3A and the imaging element 36B of the second imaging camera 3B. Specifically, the objective lens 33 includes objective lenses 32a and 32b having different magnifications.

[0026] The revolver mechanism 34 switches the magnification of the objective lens 33 to be used. Specifically, objective lenses 33a and 33b with different magnifications are attached to the revolver 34, and the lens magnification can be switched by rotating and stopping the revolver 34 by a predetermined angle, either manually or based on external signal control.

[0027] The inspection unit 4 inspects the LED elements C based on the inspection images PA and PB. Specifically, the inspection unit 4 inspects the LED elements C based on the inspection image PA acquired from the first imaging camera 3A and the inspection image PB acquired from the second imaging camera 3B. More specifically, the inspection unit 4 is configured as part of the computer CP and operates as follows. For example, the inspection unit 4 determines whether each LED element C emits fluorescence at a predetermined brightness based on position information of the relative moving unit M and the like when the inspection images PA and PB were acquired, the brightness values ​​of each pixel included in the inspection images PA and PB, and the layout information of each LED element C on the substrate W, and outputs the determination result. At this time, the determination result is output in association with the layout coordinates and address information of each LED element C being inspected. Therefore, the inspection unit 4 can determine which LED elements C on the substrate W are good and which are defective.

[0028] The substrate holder H holds the substrate W. Specifically, the base holder H supports the base W from the underside while keeping it in a horizontal state. More specifically, the substrate holder H has a mounting table H1 with a horizontal upper surface. The mounting table H1 has grooves and holes formed in the portions that come into contact with the substrate W, and these grooves and holes are connected to a negative pressure generating means such as a vacuum pump via a switching valve or the like. The substrate holder H can hold or release the substrate W by switching the grooves and holes of the mounting table H1 to a negative pressure state or an open-to-atmospheric state.

[0029] The relative movement unit M moves the substrate holding unit H relative to the excitation light irradiation unit 2 and the imaging unit 3. Specifically, the relative moving section M is configured to include an X-axis slider M1, a Y-axis slider M2, and a rotation mechanism M3.

[0030] The X-axis slider M1 is attached to the device frame 1f and moves the Y-axis slider M2 in the X direction at any speed and stops it at any position. Specifically, the X-axis slider is composed of a pair of rails extending in the X direction, a slider unit that moves on the rails, and a slider drive unit that moves and stops the slider unit.

[0031] The Y-axis slider M2 moves the rotation mechanism M3 in the Y direction at a desired speed and stops it at a desired position based on a control signal output from the control unit 9. Specifically, the Y-axis slider is composed of a pair of rails extending in the Y direction, a slider unit that moves on the rails, and a slider drive unit that moves and stops the slider unit.

[0032] The slider drive units for the X-axis slider M1 and the Y-axis slider M2 can be configured as a servo motor that rotates and stops under signal control from the control unit 9, a combination of a pulse motor and a ball screw mechanism, or a linear motor mechanism.

[0033] The rotation mechanism M3 rotates the mounting table H1 in the θ direction at a desired speed and stops it at a desired angle. Specifically, the rotation mechanism M3 may be a direct drive motor or other device that rotates and stops it at a desired angle under signal control from an external device. The mounting table H1 of the substrate holder H is attached to the rotating member of the rotation mechanism M3.

[0034] Because the relative movement unit M is configured in this manner, while holding the substrate W to be inspected, it can move the substrate W relative to the imaging unit 3 in the X, Y, and θ directions independently or in combination at a predetermined speed and angle, or can stop the substrate W at any position and angle.

[0035] The computer CP receives signals and data from the outside, performs predetermined arithmetic processing and image processing, and outputs signals and data to the outside. Specifically, the computer CP has the following functions: -Registering the pixel pitch and imaging magnification of the imaging camera -Registering inspection recipes (imaging positions, imaging order, imaging intervals (pitch, interval), movement speed, etc.), switching inspection recipes to be used, etc. The inspection images PA and PB output from the first imaging camera 3A and the second imaging camera 3B are input. Image processing for the acquired inspection images PA and PB Inspection of the luminous state of LED elements, output of inspection results and position information of LED elements More specifically, the computer CP is composed of an input section and an output section, a storage section (called a register or memory), a control section and a calculation section (called a CPU or MPU), an image processing unit (called a GPU), an auxiliary storage device (such as a HDD or SSD), etc. (i.e., hardware), and their execution programs, etc. (i.e., software).

[0036] The control unit 9 controls the excitation light irradiation unit 2, the image capturing unit 3, and the relative movement unit M. Specifically, the control unit 9 inputs and outputs signals and data to and from external devices (such as the excitation light irradiation unit 2, the imaging unit 3, the substrate holding unit H, the relative movement unit M, and the computer CP), and performs predetermined control processing, for example, executing the following functions: Outputs a trigger signal to the excitation light illumination unit 2 to emit excitation light L1 and L2 - Outputs a signal to the substrate holder H to hold / release the substrate W Control the revolver 34 to switch the objective lens 33 (imaging magnification) to be used. Outputs an imaging trigger to the first imaging camera 3A and the second imaging camera 3B. Drive control of relative moving part M: A function that monitors the current positions of the X-axis slider M1, Y-axis slider M2, and rotation mechanism M3, and outputs and controls the drive signals. That is, the control unit 9 controls the driving of the relative moving unit M, and outputs an imaging trigger to the imaging unit 3 while changing the locations of the imaging regions FA and FB set on the substrate W. Furthermore, the imaging magnification and field of view size can be switched according to the type of inspection, and an imaging trigger can be output while changing the imaging interval, thereby making it possible to acquire the desired inspection images PA and PB. More specifically, the control unit 9 is configured by a part of the computer CP, a dedicated programmable logic controller, etc. (that is, hardware), and its execution program, etc. (that is, software).

[0037] FIG. 3 is a conceptual diagram showing image capture timing in an example of an embodiment of the present invention. FIG. 3 shows, in chronological order, trigger signals output from the control unit 9 to each unit and the processes executed by each unit.

[0038] The control unit 9 synchronizes the imaging by the first imaging camera 3A with the light emission of the first light source 2A, and synchronizes the imaging by the second imaging camera 3B with the light emission of the second light source 2B, while moving the relative moving unit M relatively in one direction (for example, the X direction or the Y direction) to alternately capture images by shifting the imaging timing of the first imaging camera 3A and the second imaging camera 3B. More specifically, while outputting a trigger signal SC1 to the first imaging camera 3A, a light emission trigger signal SL1 is output to the first light source 2A after a light emission delay time td has elapsed. This is repeated every interval time T. On the other hand, after a delay time (also called a shift time) Tp from the trigger signal SC1 for the imaging camera 3A, a trigger signal SC2 is output to the second imaging camera 3B, and after a light emission delay time td, a light emission trigger signal SL2 is output to the second light source 2B.

[0039] Therefore, when the excitation light beams L1 and L2 are irradiated onto the imaging regions FA and FB set on the substrate W, the following occurs. When ultraviolet or violet light is irradiated as excitation light L1, blue or green fluorescent light L3 is emitted from the blue or green LED elements Cb and Cg, and observation light LA ​​including this light L3 is guided to the first imaging camera 3A and imaged. On the other hand, no fluorescence is emitted by the red LED element Cr due to the excitation light L1. Furthermore, when green light is irradiated as the excitation light L2, orange to red fluorescent light L4 is emitted from the red-emitting LED element Cr, and the observation light LB containing this light L4 is guided to and imaged by the second imaging camera 3B. On the other hand, the LED elements Cb and Cg emitting blue to green light do not emit fluorescent light due to the excitation light L2. Note that green light contained in the excitation light L2 is emitted as light reflected and scattered by the surfaces of the substrate W and LED elements C, but this green light is guided to the first imaging camera 3A and is not imaged by the second imaging camera 3B.

[0040] With this configuration, the fluorescence inspection device 1 can alternately capture two types of inspection images PA and PB in different wavelength bands while irradiating the LED elements C with excitation light L1 and L2 of different wavelengths to cause them to emit fluorescence during relative movement in one row. Therefore, even if a large number of LED elements C emitting different colors are arranged on a single substrate W, inspection can be performed with high throughput.

[0041] [Variations] The fluorescent light inspection device 1 according to the present invention is not limited to the above-mentioned configuration, and various modifications can be applied.

[0042] In the above description, the light beam splitter 32 is configured to include a dichroic mirror as a wavelength band splitter. With this configuration, the observation light LA ​​and LB are split into short wavelength and long wavelength sides based on a certain wavelength, resulting in little loss of light intensity in each direction. However, if the amount of light of the observation lights LA and LB is sufficient, a configuration may be used in which a half mirror splits the light evenly across the visible light band (from blue to red) while providing a filter that transmits or attenuates light in a desired wavelength band.

[0043] That is, the imaging unit 3 includes a filter 37A that transmits light having a wavelength longer than that of the fluorescent wavelength light L3 emitted from the LED element C irradiated with the first wavelength light, while attenuating the first wavelength light and light having a wavelength shorter than that of the first wavelength light; The configuration includes a filter 37B that transmits light of a fluorescent wavelength L4 emitted from an LED element irradiated with light of a second wavelength, the light having a wavelength longer than the light of the second wavelength, while attenuating the light of the second wavelength and light having a wavelength shorter than that. Specifically, the imaging unit 3 has a filter 37A disposed in front of the first imaging camera 3A, and a filter 37B disposed in front of the second imaging camera 3B. More specifically, filter 37A passes light with wavelengths longer than 410 nm (e.g., blue and green) and attenuates light with wavelengths shorter than 410 nm (e.g., ultraviolet or violet light).On the other hand, filter 37B passes light with wavelengths longer than 590 nm (e.g., orange and red) and attenuates light with wavelengths shorter than 590 nm (e.g., blue and green).

[0044] With this configuration, when ultraviolet light is irradiated as the excitation light L1, purple to green fluorescent light L3 is emitted from the blue to green LED elements Cb, Cg, and the observation light LA ​​containing this light L3 is guided to the first imaging camera 3A and imaged. Also, when green light is irradiated as the excitation light L2, yellow to orange fluorescent light L4 is emitted from the red LED element Cr, and the observation light LB containing this light L4 is guided to the second imaging camera 3B and imaged.

[0045] In the above example, ultraviolet light is irradiated as excitation light L1 onto the LED elements Cb and Cg that emit blue to green light, and green light is irradiated as excitation light L2 onto the LED element Cr that emits red light. However, the dominant wavelengths of the excitation lights L1 and L2 described above are specific examples, and can be selected appropriately depending on the fluorescent characteristics of each LED element C to be inspected. [Explanation of symbols]

[0046] 1. Fluorescence inspection device 2. Excitation light irradiation unit 2A 1st light source 2B 2nd light source 3. Imaging unit 3A First imaging camera 3B Second imaging camera 4. Inspection Department 9 Control Unit H Board holding part M Relative moving part CP Computer 1f Equipment frame H1 Mounting Table 30 Telescope tube 32 Light beam branching section 33a, 33b Objective lens 34 Revolver mechanism 36A, 36B image sensor 37A, 37B Filter M1 X-axis slider M2 Y-axis slider M3 Rotation Mechanism W substrate C LED element Cb Blue-emitting LED element Cg Green emitting LED element Cr Red emitting LED element FA,FB imaging area (field of view) PA,PB inspection images L1 Excitation light (first wavelength) L2 Excitation light (second wavelength) L3 Fluorescent wavelength light incident from the substrate side L4 Fluorescent wavelength light incident from the substrate side LA,LB Observation light T Time (imaging interval) SC1, SC2 trigger signals SL1, SL2 trigger signal td Light emission delay time tp Delay time (shift time)

Claims

1. A fluorescent inspection device that inspects LED elements arranged on a substrate by making them emit fluorescent light, a substrate holder for holding the substrate; an excitation light irradiating unit that irradiates excitation light toward the LED element; an imaging unit that captures an inspection image including light of a fluorescent wavelength emitted from the LED element irradiated with the excitation light; a relative movement unit that moves a substrate holding unit relative to the excitation light irradiation unit and the imaging unit; an inspection unit that inspects the LED elements based on the inspection image; a control unit that controls the excitation light irradiation unit, the imaging unit, and the relative movement unit, The excitation light irradiation unit a first light source that emits light of a first wavelength as the excitation light; a second light source that emits light of a second wavelength that is longer than the first wavelength as the excitation light, The imaging unit a first imaging camera that captures the inspection image including light of a fluorescent wavelength emitted from the LED element irradiated with light of the first wavelength; a second imaging camera that captures the inspection image including light of a fluorescent wavelength emitted from the LED element irradiated with light of the second wavelength, The control unit The imaging by the first imaging camera and the light emission by the first light source are synchronized, While synchronizing the image capture by the second image capture camera with the light emission of the second light source, While the relative moving unit is relatively moved in one direction, the first imaging camera and the second imaging camera capture images alternately with different image capture timings. A fluorescent inspection device characterized by:

2. The imaging unit a filter that transmits light having a wavelength longer than the light of the first wavelength among the light of the fluorescent wavelength emitted from the LED element irradiated with the light of the first wavelength, while attenuating the light of the first wavelength and light having a wavelength shorter than that; a filter that transmits light having a wavelength longer than the light of the second wavelength among the light of the fluorescent wavelength emitted from the LED element irradiated with the light of the second wavelength, while attenuating the light of the second wavelength and light having a wavelength shorter than that of the light of the second wavelength; 2. The fluorescence inspection device according to claim 1 .

3. The imaging unit a light beam splitter that splits and guides a light beam including light with a fluorescent wavelength emitted from the LED element to the first imaging camera and the second imaging camera, The light beam splitter includes: a wavelength band splitter that introduces a light beam whose main component is light on the wavelength side shorter than a predetermined wavelength into the first imaging camera, and introduces a light beam whose main component is light on the wavelength side longer than the predetermined wavelength into the second imaging camera; 3. The fluorescence inspection device according to claim 1 or 2.

Images