Substrate storage container

Abstract

Provided is a substrate storage container capable of ensuring sealability of a lid body and smoothly moving a locking claw of a locking mechanism by making the locking mechanism metal-free.　Locking claws 40 are held between a pair of locking mechanism guide blocks of a lid body 10 to be linearly movable outward in the lid body, and are each provided with: a locking block 41 that can oscillate in the thickness direction of the lid body; a connection bar 44 connected to an advancing / retreating bar 34 of a locking mechanism 30; and a cam boss 46 to be fitted in a cam groove 17 of a corresponding one of the locking mechanism guide blocks. The locking block 41, the connection bar 44, and the cam boss 46 are integrally formed by a resin-containing molding material. A recess is formed in the locking block 41, and a resin pin 49 is provided so as to be suspended between opposing sides thereof. The resin pin 49 is fitted through a pressing resin roller 50. A pair of flat surfaces 47 are formed in a cam boss circumferential surface. The cam groove 17 is divided into a linear movement straight groove 19 that makes a sliding-contact with the flat surfaces 47 and that restrains oscillation of a corresponding one of the locking claws 40, and an oscillatory movement circular-arc groove that causes the corresponding one of the locking claws 40 to oscillate.

Description

[Technical Field]

[0001] The present invention relates to a substrate storage container used in a mini-environment type semiconductor factory for transporting and storing semiconductor wafers, and more particularly to an improvement in a locking mechanism for locking a lid. [Background technology]

[0002] In semiconductor factories, substrate storage containers called FOUPs (Front Opening Unified Pods) are used to transport and store φ300 mm semiconductor wafers. As partially shown in FIG. 19, this substrate storage container comprises a container body 1 that stores multiple semiconductor wafers, a lid that fits into the open front face 2 of the container body 1, and a pair of locking mechanisms that lock the lid that fits into the front face 2 of the container body 1. The pair of locking mechanisms are built into the lid, and these pair of locking mechanisms are operated by a lid opening / closing device that is standardized by the SEMI standard (see Patent Documents 1, 2, and 3).

[0003] The lid is formed in a roughly box shape that is detachably fitted to the open front 2 of the container body 1, with the required number of openings for a pair of locking mechanisms drilled in its peripheral wall, and an endless seal gasket that deforms by being pressed against the inner periphery of the front of the container body is fitted around the periphery of the back surface. Each locking mechanism is composed of an operating reel that is supported by the lid and rotates by key operation from outside the lid opening / closing device, a pair of advancing and retreating bars 34A that move up and down with the rotation of each operating reel, and a pair of swingable locking claws 40A that protrude from the openings in the lid in conjunction with the advancement of each advancing and retreating bar 34A and engage with locking pockets 4 on the inner periphery of the front of the container body 1.

[0004] Each locking claw 40A is formed with a cross section that is roughly inverted T-shaped, and the back surface of its lower part is pivotally supported by a connecting pin 60 at the tip of the advancing / retreating bar 34A, and the surface of its lower part is pivotally supported by a support pin 61 near the opening in the lid, and a pressing roller 50A that slides into the locking pocket 4 on the inner front periphery of the container body 1 is rotatably supported by a roller pin 62 at its tip. The connecting pin 60, support pin 61, and roller pin 62 are, for example, 1.0 mm φ SUS pins, which have excellent strength.

[0005] In the above, when the lid is fitted to the open front face 2 of the container body 1 and locked, the lid opener fits the lid to the open front face 2 of the container body 1, and the operation key of the lid opener rotates the operation reels of each locking mechanism by a predetermined angle. As the operation reels rotate, each of the advancing and retracting bars 34A advances toward the peripheral wall of the lid, and as the advancing and retracting bars 34A advance, each of the locking claws 40A swings outward from the lid through the inlet / outlet openings, and the swinging and protruding locking claws 40A engage in the locking pockets of the container body 1, and the lid fitted to the front face 2 of the container body 1 is pulled in and locked by the engagement of the locking claws 40A.

[0006] On the other hand, when the lid is unlocked and removed from the front face 2 of the container body 1, the operation key of the lid opening / closing machine rotates the operation reels of each locking mechanism to their original reference positions. Then, as the operation reels return to their original rotation, each of the advancing / retreating bars 34A that had been advanced returns to its original reference position on the lid, and as the advancing / retreating bars 34A return to their original position, each of the protruding locking claws 40A passes through the inlet / outlet openings from the locking pockets 4 of the container body 1 and swings back into the lid. The swinging back of the locking claws 40A makes the lid fitted to the front face 2 of the container body 1 removable, and the lid is pulled out and removed from the front face 2 of the container body 1 by the lid opening / closing machine.

[0007] Recently, there has been a demand for metal-free locking mechanisms for substrate storage containers in order to eliminate various adverse effects on the semiconductor wafers stored in the container body 1. In view of this, it has been considered to use resin pins instead of stainless steel pins for the connecting pin 60, support pin 61, and roller pin 62 of the locking claw 40A. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-058633 [Patent Document 2] Japanese Patent Application Publication No. 2021-028936 [Patent Document 3] Japanese Patent Application Laid-Open No. 2017-130548 Summary of the Invention [Problem to be solved by the invention]

[0009] However, simply replacing the SUS pin with a resin pin of the same diameter does not ensure sufficient strength or durability, and there is a risk that the resin pin may become eccentric and break. One way to eliminate this concern is to form the resin pin with an enlarged diameter to make it thicker, but if this method is adopted, the pressure roller 50A of the locking claw 40A also becomes thicker, which creates a new problem in that it becomes difficult for the protruding locking claw 40A to return to its original position.

[0010] One way to solve this problem is to shift the center of swing of locking claw 40A in the thickness direction of the lid or inward and outward directions (up and down in Figure 19), but if this method is adopted, locking claw 40A will not be able to adequately lock into locking pocket 4 of container body 1, and appropriate deformation of the seal gasket of the lid will no longer be possible. As a result, the sealing performance of the lid will deteriorate, leading to contamination of the semiconductor wafers inside the container body and a major new problem of reduced quality of the semiconductor wafers will arise.

[0011] The present invention has been made in consideration of the above, and aims to provide a substrate storage container that can realize a metal-free locking mechanism, and further, can smoothly operate the locking claws of the locking mechanism and sufficiently ensure the airtightness of the lid body. [Means for solving the problem]

[0012] In order to solve the above problems, the present invention provides a container that includes a lid that is fitted into an opening of a container body that can store a substrate, and a locking mechanism that locks the fitted lid, The lid body includes a lid body that fits into the opening of the container body, and a plurality of guide members for the locking mechanism attached to the lid body, and a plurality of inlet / outlet openings that can face the locking pockets on the inner periphery of the opening of the container body are provided on the peripheral edge of the lid body, and the plurality of guide members for the locking mechanism are opposed to each other, and cam grooves are formed on the opposing surfaces thereof. The locking mechanism includes a plurality of reciprocating members that reciprocate inward and outward directions of the lid body by rotation of an operating member supported on the lid body, and a plurality of locking claws that, when the reciprocating members advance, protrude from the recesses in the lid body and are fitted into the locking pockets in the container body, and, when the reciprocating members retreat, return from the locking pockets in the container body to the recesses in the lid body; The locking claw includes a locking block that is sandwiched between a plurality of locking mechanism guide members of the lid body and is capable of linear movement (moving straight) inward and outward directions of the lid body, and is also capable of swinging (swinging) in the thickness direction of the lid body, a plurality of connecting bars that protrude from the locking block and are connected to the forward and backward moving members of the locking mechanism, and a plurality of cam protrusions that protrude from the locking block and are fitted into the cam grooves of the plurality of locking mechanism guide members, and these locking blocks, the plurality of connecting bars, and the plurality of cam protrusions are integrally molded from a molding material containing a predetermined resin, a recess is formed in the locking block and a resin pin is installed between both sides of the recess, and a resin roller that contacts the inside of the locking pocket of the container body is fitted onto this resin pin, and a plurality of flat surfaces are formed at predetermined intervals on the circumferential surface of the cam protrusion, The cam groove of the guide member for the locking mechanism is divided into a linear groove for direct action that contacts the multiple flat surfaces of the cam protrusion of the locking claw to restrict the swinging of the locking claw, and an arcuate groove for swinging that is formed wide at the end of the linear groove for direct action and allows the locking claw to swing.

[0013] The container body is formed as a front-open box capable of storing multiple semiconductor wafers, and the lid body can be removably fitted to the open front of the box. Multiple locking mechanism guide members are attached near the peripheral edge of the lid body of the lid body, and of these multiple locking mechanism guide members, those that are close to the side of the lid body can be integrated with the door guide. In addition, when the locking mechanism locks the lid body fitted to the front of the container body and pulls it into the container body, the cam protrusion of the locking claw can be positioned near the extension line of the inner surface of the front wall that defines the locking pocket of the container body.

[0014] In addition, an installation area for the locking mechanism can be formed on both sides of the surface of the lid body of the lid, a cover plate covering the locking mechanism can be attached to the lid body, the forward / backward moving member of the locking mechanism can be bent in the thickness direction of the lid body, and a strength-enhancing rib can be formed on at least one of the front and back surfaces of this forward / backward moving member. It is also preferable to form a plurality of connecting claws with a cross section of a semicircular arc on both sides of the tip of the reciprocating member of the locking mechanism, and to fit these connecting claws into the plurality of connecting bars of the locking claw.

[0015] In addition, the locking block is formed in an approximately triangular shape in side view, with a plate piece having a bulging tip and a curved back surface, and a protrusion formed on the back surface of the plate piece, and connecting bars protrude from both sides of the protrusion to form a gap for the connecting claw between the plate piece and the protrusion. In addition, cam protrusions close to the connecting bar can be protruded from both sides of the end of the plate piece of the locking block, and a recess can be formed at the tip of the plate piece, with a resin pin close to the cam protrusions installed between the two sides.

[0016] In addition, the locking block of the locking claw, the plurality of connecting bars, and the plurality of cam protrusions may be integrally molded from a molding material containing at least one of polybutylene terephthalate resin and polyether ether ketone resin. Furthermore, it is preferable that the resin pin and resin roller of the locking claw are molded from a molding material containing at least one of polyether ether ketone resin and polybutylene terephthalate resin.

[0017] Furthermore, it is preferable to form a direct-acting engagement start groove at the end of the direct-acting linear groove of the cam groove, located opposite the swinging arc groove, which is engaged with the cam protrusion of the locking pawl, and to regulate the swinging of the locking pawl by contacting multiple flat surfaces of the cam protrusion with this direct-acting engagement start groove.

[0018] Here, the substrate in the claims includes at least a semiconductor wafer, a glass substrate, a mask substrate, etc. When the substrate is a semiconductor wafer, this semiconductor wafer includes at least a silicon wafer of φ300 mm or φ450 mm. Furthermore, the container body and the lid body and cover plate of the lid body may be transparent, opaque, or translucent. These may be of an existing type or may have a new structure.

[0019] The container body is primarily a front-opening box type, but may also be a top-opening box type. The vicinity of the extension line of the locking pocket of the container body includes both on the extension line and in the vicinity of the extension line. Furthermore, the guide member for the locking mechanism of the lid body and the door guide are preferably integrated, but may also be separate. The term "swing of the locking claw" should be understood substantively and includes rotation and turning. Furthermore, the substrate storage container of the present invention may be a FOUP conforming to the SEMI standard or a FOSB for shipping.

[0020] According to the present invention, the locking claw of the locking mechanism is made of resin, which makes it metal-free, allowing the connecting bar, cam protrusion, resin pin, and resin roller of the locking claw to be thicker. Furthermore, since the locking claw is allowed to swing in the thickness direction of the lid body as well as move linearly in the inward and outward directions of the lid body, the protruding locking claw and resin roller can be smoothly returned to their retraction openings. Furthermore, when the locking mechanism is locked, the locking claw does not simply swing and protrude in the thickness direction of the lid body, but rather moves linearly toward the depth of the locking pocket of the container body before swinging, so the locking claw can be fully fitted into the locking pocket regardless of the depth of the locking pocket. [Effects of the Invention]

[0021] The present invention has the effect of realizing a metal-free locking mechanism, and also has the effect of enabling the locking claws of the locking mechanism to operate smoothly and ensuring sufficient sealing of the lid.

[0022] According to the invention of claim 2, it is possible to realize a metal-free locking mechanism, which prevents contamination of the semiconductor wafers inside the container body and prevents deterioration of the quality of the semiconductor wafers. In addition, since the guide member for the locking mechanism and the door guide are not separate but integrated, it is possible to reduce the number of parts.

[0023] According to the invention of claim 3, when the locking mechanism locks the lid, the cam protrusion of the locking pawl fits into the swinging arc groove of the cam groove, and this cam protrusion is located inward and outward of the lid body at the contact point between the inner surface of the front wall that defines the locking pocket of the container body and the resin roller, making it easier to transmit force in the left and right directions of the locking pocket. Therefore, when the lid fitted to the front of the container body is pulled into the container body, loss of pulling force can be reduced.

[0024] According to the invention as set forth in claim 4, the strength and rigidity of the reciprocating member can be improved by the strength-ensuring rib. According to the invention described in claim 5, the locking claw can be fitted and supported so as to be swingable on the multiple connecting claws of the forward / backward movable member, so there is no need to connect the tip of the forward / backward movable member and the connecting claws with a separate metal pin, which is expected to reduce the number of parts.

[0025] According to the invention described in claim 6, by utilizing the gap between the plate piece of the locking block and the connecting bar, it is possible to easily engage the connecting bar with the connecting claw of the forward / backward moving member and to make the connecting claw less likely to come off. According to the invention described in claim 7, the connecting bar of the locking block and the cam protrusion come closer to each other, and the cam protrusion and the resin pin come closer to each other, so it is possible to make the locking claw smaller and reduce its operating range.

[0026] According to the invention described in claim 8, by utilizing the linear engagement start groove of the cam groove, the cam protrusion of the locking claw can be easily fitted into the cam groove, so that the guide member for the locking mechanism and the locking claw can be easily combined. [Brief explanation of the drawings]

[0027] [Figure 1] 1 is an overall perspective explanatory view schematically showing an embodiment of a substrate storage container according to the present invention. [Figure 2] 10 is a partial cross-sectional explanatory view schematically showing the relationship between a locking pocket of a container body and a locking claw of a locking mechanism in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 3] 10 is an explanatory diagram schematically showing a state in which a locking claw in an embodiment of a substrate storing container according to the present invention moves directly; FIG. [Figure 4] 10 is an explanatory view schematically showing a state immediately before a locking claw in an embodiment of a substrate storing container according to the present invention becomes swingable and swings. FIG. [Figure 5] 10A and 10B are explanatory views schematically showing a state in which a locking claw in an embodiment of a substrate storing container according to the present invention is swung. [Figure 6] 1 is a perspective explanatory view schematically showing a lid in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 7]1 is a front view illustrating a schematic view of a lid body peripheral wall, a door guide cylinder, and a rotation suppressing cylinder of a lid body in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 8] 10 is a perspective explanatory view schematically showing a combined state of an advancing / retreating bar and a locking claw of a locking mechanism in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 9] 10 is a perspective explanatory view schematically showing a guide block for a locking mechanism and a rotation suppressing cylinder in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 10] 1 is a perspective explanatory view schematically showing a guide block for a locking mechanism and a door guide in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 11] 10 is an explanatory view schematically showing a cam groove of a guide block for a locking mechanism in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 12] FIG. 10 is a perspective explanatory view schematically showing an advancing / retreating bar in an embodiment of a substrate storing container according to the present invention. [Figure 13] FIG. 10 is a front view illustrating a schematic view of an advancing / retreating bar in an embodiment of a substrate storing container according to the present invention. [Figure 14] FIG. 10 is an explanatory side view schematically showing an advancing / retreating bar in an embodiment of a substrate storing container according to the present invention. [Figure 15] FIG. 1 is an exploded perspective view schematically showing a locking block, a resin pin, and a pressing resin roller in an embodiment of a substrate storing container according to the present invention. [Figure 16] FIG. 10 is a perspective view schematically showing a locking block in a fallen state in an embodiment of a substrate storing container according to the present invention. [Figure 17] 10 is an explanatory side view schematically showing a locking block in a fallen state in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 18] FIG. 10 is a front view illustrating a locking block in an embodiment of a substrate storing container according to the present invention. [Figure 19] 10 is a partial cross-sectional explanatory view schematically showing the relationship between a container body of a conventional substrate storing container and a locking claw of a locking mechanism. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0028] A preferred embodiment of the present invention will now be described with reference to the drawings. As shown in FIGS. 1 to 18, the substrate storage container in this embodiment is a SEMI-standard FOUP that includes a container body 1 capable of storing multiple semiconductor wafers in an aligned manner, a removable lid 10 that fits into the open front face 2 of the container body 1, and a pair of locking mechanisms 30 that lock the lid 10 that is fitted into the front face 2 of the container body 1. The locking claws 40 of each locking mechanism 30 are metal-free, and the locking claws 40 are operated by linear and swinging motions to lock or unlock, thereby contributing to the achievement of Goal 9 of the SDGs (the United Nations' international goals for sustainable development, consisting of 17 global goals and 169 targets (achievement criteria)) adopted at the United Nations Summit.

[0029] The semiconductor wafers are thin, brittle, high-quality silicon wafers (not shown), for example, 300 mm in diameter. These silicon wafers are formed into disks with circuit patterns formed on their surfaces. They are stored inside the container body 1, and 25 of them are aligned vertically at predetermined intervals.

[0030] The container body 1 and the lid 10 are formed by assembling a plurality of parts that are each injection-molded using a molding material containing a required resin. Examples of resins that may be contained in this molding material include thermoplastic resins such as polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyether ketone (PEK) resin, polyether ether ketone (PEEK) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, and liquid crystal polymer, as well as alloys of these resins.

[0031] To these resins, conductive materials such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers, as well as various antistatic agents such as anionic, cationic, and nonionic, may be added as needed. In addition, ultraviolet absorbers such as benzotriazoles, salicylates, cyanoacrylates, oxalic acid anilides, and hindered amines may be added, and glass fibers or carbon fibers that improve rigidity may also be selectively added.

[0032] 1 and 2, the container body 1 is injection-molded into a front-open box with a horizontally elongated opening at the front face 2. A pair of left and right teeth for supporting a semiconductor wafer horizontally is provided on the inner surface of each side wall, and the pair of left and right teeth are arranged at a predetermined interval in the vertical direction, with each tooth formed as a long, narrow plate extending in the front-to-back direction. The front face 2 of this container body 1 is formed by bending and projecting outward in the width direction from the peripheral wall of the container body 1 via a stepped portion, and the flat shoulder surface of the stepped portion defines a seal-forming surface 3 for the lid 10. Locking pockets 4 for the locking mechanism 30 are recessed and formed on both upper and lower sides of the inner periphery of the front face of the container body 1, and each locking pocket 4 is formed as a roughly rectangular hole.

[0033] As shown in Figures 1, 2, 6 and 7, the lid body 10 is an existing type that includes a lid body 11 that is approximately rectangular at the front and is removably fitted into the open front face 2 of the container body 1, a plurality of guide blocks 16 for the locking mechanism that are arranged on the lid body 11, and a pair of cover plates 21 that cover the surface (front face) of the lid body 11 and are exposed to the outside, and a pair of locking mechanisms 30 are installed between the lid body 11 and the pair of cover plates 21.

[0034] The lid body 11 is formed, for example, in a shallow box-like cross section (or in a tray-like cross section), with openings 12 for the locking mechanisms 30 that face the multiple locking pockets 4 of the container body 1 drilled through both the upper and lower sides of the peripheral wall, and a vertically long front retainer that holds the front peripheral portion of the semiconductor wafer horizontally with an elastic piece is attached to the center of the back surface that faces the rear wall of the container body 1. The lid body 11 has a frame-shaped fitting groove formed around the peripheral portion of its back surface, and an elastically deformable frame-shaped seal gasket that presses against the seal-forming surface 3 of the container body 1 is fitted into this fitting groove.

[0035] The center of the surface of the lid body 11 is high, and both sides of the surface are low. Each side of the surface is defined as an installation area 13 for the locking mechanism 30. Each installation area 13 is formed as a vertically long rectangle, and a door guide tube 14 and a rotation suppression tube 14A are attached to the upper and lower parts of the installation area 13, respectively, near both sides of the access opening 12. As shown in Figures 7, 8, and 10, the door guide tube 14 is formed in a cylindrical shape with a bottom, and a pair of plates 15 that contact the peripheral wall near the corners of the lid body 11 protrude from the outer surface at a 90° interval. In contrast, the rotation suppression tube 14A is formed in a cylindrical shape with a bottom, and a plate 15A that protrudes from the outer surface and faces the upper or lower peripheral wall of the lid body 11, as shown in Figures 7 to 9.

[0036] As shown in Figures 6 to 8, the multiple locking mechanism guide blocks 16 are arranged at the top and bottom of each installation area 13 and are integrated with the door guide tube 14 and the rotation suppression tube 14A, and face each other in the left-right width direction of the lid main body 11. As shown in Figures 9 to 11, each locking mechanism guide block 16 is formed as a vertically long block, and a cam groove 17 for the locking mechanism 30 is cut out vertically on the opposing surface facing the adjacent locking mechanism guide block 16, and being integrated with the outer peripheral surface side of the door guide tube 14 or the rotation suppression tube 14A functions to contribute to reducing the number of parts.

[0037] As shown in Figures 1 and 6, the pair of cover plates 21 cover a pair of installation areas 13 of the lid body 11 and function to protect the locking mechanism 30 from the outside. Each cover plate 21 is formed as a vertically long transparent plate and is screwed to multiple door guide tubes 14 and rotation suppression tubes 14A via fasteners. An operation hole 22 for the locking mechanism 30 is drilled near the center of this cover plate 21, and a T-shaped operation key of a lid body opening / closing device standardized by the SEMI standard passes through this operation hole 22. Rotating this operation key through a predetermined rotation angle operates the locking mechanism 30 to perform a locking or unlocking operation.

[0038] As shown in Figures 1, 2, 6 and 8, each locking mechanism 30 is installed in the installation area 13 of the lid body 11 and comprises an operating reel 31 supported by the lid body 11 of the lid body 10 and rotated by key operation from outside the lid body opening / closing device, a pair of upper and lower advance / retract bars 34 that move back and forth in the up and down directions in and out of the lid body 11 as the operating reel 31 rotates, and a pair of upper and lower locking claws 40 that protrude from the inlet / outlet 12 of the lid body 11 when each advance / retract bar 34 advances and engages with the locking pocket 4 of the container body 1, and return from the locking pocket 4 of the container body 1 to the inlet / outlet 12 of the lid body 11 when each advance / retract bar 34 retracts.

[0039] The operating reel 31 of each locking mechanism 30 and the pair of upper and lower reciprocating bars 34 are injection molded from a molding material containing a required resin. The specified resin for this molding material is not particularly limited, but examples include polyether ether ketone resin, which has excellent heat resistance, flame retardancy, abrasion resistance, and mechanical properties; polybutylene terephthalate resin, which has excellent heat resistance, abrasion resistance, and durability; polycarbonate resin, which has excellent impact resistance, heat resistance, dimensional stability, and abrasion resistance; polyacetal resin, which has excellent impact resistance and abrasion resistance; polyetherimide (PEI) resin, which has excellent chemical resistance, water resistance, electrical properties, and weather resistance; polyethersulfone (PES) resin, which has excellent heat resistance, creep resistance, dimensional stability, and flame retardancy; polyphenylene sulfide (PPS) resin, which has excellent chemical resistance, creep resistance, and weather resistance; polyamideimide (PAI) resin, which has excellent heat resistance and mechanical strength; and alloys of these.

[0040] Among these resins, at least one of polyether ether ketone resin and polybutylene terephthalate resin is preferable. In addition to the predetermined resin, lightweight carbon, which is excellent in strength and rigidity, specifically carbon nanotubes or carbon fibers, may be added to the molding material as needed.

[0041] 1 and 6, the operation reel 31 is formed as a substantially convex disk with the reel lid 10 attached to the center of the disk-shaped reel body via a rotary bearing, and is rotatably supported near the center of the installation area 13 of the lid body 11. A center portion 32 consisting of the reel lid protruding toward the cover plate 21 of this operation reel 31 faces the operation opening 22 of the cover plate 21, and is fitted with an operation key of the lid opening / closing device that penetrates this operation opening 22, so that the operation reel 31 is automatically rotated at a predetermined rotation angle. A pair of curved grooves 33 are drilled near the periphery of the operation reel 31 at intervals of 180°, and each curved groove 33 is curved in a semicircular arc, and the end portion of an advancing / retreating bar 34 is connected to this curved groove 33.

[0042] As shown in Figures 1 and 6, a pair of upper and lower advancing and retracting bars 34 are slidably disposed in the installation area 13 of the lid body 11 via a plurality of guide ribs 35, and are arranged in the vertical direction of the operation reel 31. As shown in Figures 8, 12 to 14, each advancing and retracting bar 34 is formed as a vertically long plate with a plurality of long guide holes 36, and is bent near its center in the thickness direction of the lid body 10 or the lid body 11. A pair of strength-enhancing ribs 37 are formed on the back surface thereof so as to face the installation area 13 of the lid body 11 without contacting it, and a pair of strength-enhancing ribs 37 are formed on the front surface thereof so as to face the cover plate 21. Each strength-enhancing rib 37 is a long, narrow rib extending in the longitudinal direction of the advancing and retracting bar 34, and improves the strength of the advancing and retracting bar 34.

[0043] 14, a cylindrical latch boss 38 that fits loosely and slidably into the curved groove 33 of the operation reel 31 is integrally formed at the rear end of the advancing / retreating bar 34, and the loose fit of this latch boss 38 causes the advancing / retreating bar 34 to move forward and backward in the vertical direction in conjunction with the rotation of the operation reel 31, being guided by the guide rib 35 of the installation area 13. Also, as shown in FIGS. 12 to 14, a pair of connecting claws 39 that fit and support the locking claw 40 so that it can swing are arranged and formed on both sides of the tip of the advancing / retreating bar 34, and each connecting claw 39 is curved and has a thin, approximately semicircular cross section, in other words, a substantially J-shape.

[0044] As shown in Figures 8, 15 to 18, each locking claw 40 is sandwiched between a pair of locking mechanism guide blocks 16 of the lid body 10 and is capable of moving linearly in the up and down directions inside and outside the lid main body 11, and is also equipped with a locking block 41 that can swing in the thickness direction of the lid body 10 and the lid main body 11, a pair of connecting bars 44 that protrude from this locking block 41 and are connected to the forward and backward moving bar 34 of the locking mechanism 30, and a pair of cam bosses 46 that protrude from the locking block 41 and are fitted into the cam grooves 17 of the pair of locking mechanism guide blocks 16, and these locking blocks 41, the pair of connecting bars 44 and the pair of cam bosses 46 are integrally molded from a molding material containing a predetermined resin.

[0045] The molding material for the locking claw 40 is the same as that for the operating reel 31 and the reciprocating bar 34, but from the viewpoint of prioritizing wear resistance, it is preferable that the specified resin is at least one of polybutylene terephthalate resin and polyether ether ketone resin. In addition to the specified resin, lightweight carbon with excellent strength and rigidity, specifically carbon nanotubes or carbon fibers, etc., may be added to the molding material as needed.

[0046] As shown in Figures 16 and 17, the locking block 41 is formed in the shape of an approximately isosceles triangle in side view, and comprises a horizontally elongated plate piece 42 with a bulging tip and a curved back surface, and a protrusion 43 integrated near the center of the back surface of the plate piece 42 and positioned on the lid body 11 side, with cylindrical connecting bars 44 protruding horizontally from both sides of the protrusion 43, and these pair of connecting bars 44 are fitted and supported in a swingable manner by a pair of connecting claws 39 of the advancing / retreating bar 34.

[0047] A gap 45 for attaching the connecting claws is formed between the pair of connecting bars 44 and the plate pieces 42, and this gap 45 is adjusted in size and length so that the connecting claws 39 will not come off, taking into consideration the thickness of the connecting claws 39 of the advancing / retreating bar 34. From the standpoint of realizing a metal-free structure and improving strength and durability, each connecting bar 44 is formed with a diameter of φ1.5 mm to φ5.5 mm, preferably φ2 mm to φ5 mm, and more preferably around φ3 mm, which is thicker than conventional examples.

[0048] Pillar-shaped cam bosses 46 protrude horizontally from both sides of the end of plate piece 42 of locking block 41, closer to connecting bar 44 than in the conventional example, and these pair of protruding cam bosses 46 are slidably fitted into cam groove 17 of locking mechanism guide block 16. Each cam boss 46 is basically formed in a cylindrical shape, and from the viewpoints of realizing a metal-free design and improving strength and durability, it is formed with a diameter of 1.5 mm to 5.5 mm, preferably 2 mm to 5 mm, more preferably around 4 mm, which is thicker than in the conventional example. A pair of flat surfaces 47, which allow locking pawl 40 to move linearly only, is formed on the peripheral surface of cam boss 46, spaced 180° apart and parallel to each other.

[0049] When the locking mechanism 30 locks the lid body 10 fitted to the front surface 2 of the container body 1 and pulls it into the container body 1, such a cam boss 46 is positioned on an extension line EL extending from the inner surface of the front wall 5 that defines the locking pocket 4 of the container body 1, and positions the connecting bar 44 near the extension line extending from the inner surface of the rear wall that defines the locking pocket 4 (see Figure 2).

[0050] A recess 48 is formed in the center of the tip of the plate piece 42 of the locking block 41, and a resin pin 49 is horizontally axially mounted between both sides of the recess 48. A cylindrical pressure resin roller 50 located within the recess 48 is rotatably fitted into and supported by the resin pin 49, and the pressure resin roller 50 functions to slide within the locking pocket 4 of the container body 1. The molding material of the resin pin 49 and the pressure resin roller 50 is the same as that of the locking claw 40, but from the perspective of emphasizing wear resistance, it is preferable that the specified resin be at least one of polyether ether ketone resin and polybutylene terephthalate resin. In addition to the specified resin, lightweight carbon, which has excellent strength and rigidity, specifically carbon nanotubes, carbon fibers, etc., are selectively added to the molding material.

[0051] Resin pin 49 is formed with a diameter of φ1.5 mm to φ5.5 mm, preferably φ2 mm to φ5 mm, and more preferably φ3 mm to φ3.06 mm, which is thicker than conventional examples, in order to achieve a metal-free design and improve strength and durability, and is closer to cam boss 46 than conventional examples. Also, in order to achieve a metal-free design and improve strength and durability, pressing resin roller 50 is formed with an outer diameter of φ6 mm to φ7 mm, preferably around φ6.55 mm, which is larger than conventional examples, and an inner diameter of φ3 mm to φ3.05 mm, which is rotatable and slides against the inner surface of front wall 5 of locking pocket 4, suppressing the generation of particles.

[0052] Now, the locking claws 40 are required to reliably fit into and lock into the locking pockets 4 regardless of the depth of the locking pockets 4 of the container body 1, and from the viewpoint of smooth operation, to perform a linear translational movement followed by a swinging movement when locking the locking mechanism 30, and to perform a swinging movement followed by a linear movement when unlocking the locking mechanism 30. To allow these movements, the cam grooves 17 of each locking mechanism guide block 16 are formed into a shape that combines a straight line and a circle.

[0053] That is, as shown in Figures 9 to 11, the cam groove 17 is divided into a direct-acting engagement start groove 18 that engages with the cam boss 46 of the locking claw 40, a direct-acting linear groove 19 that is formed continuously from the end of this direct-acting engagement start groove 18 and that slides against a pair of flat surfaces 47 of the cam boss 46, and a wide swinging arc groove 20 that is formed at the end of this direct-acting linear groove 19, and the direct-acting engagement start groove 18 is located closer to the operating reel 31 on the opposite side of the swinging arc groove 20, and the swinging arc groove 20 is located closer to the peripheral wall of the lid body 11.

[0054] The linear motion fitting start groove 18 is formed in a rectangular shape extending longitudinally (upward in FIG. 11 ) from the end of the locking mechanism guide block 16, and slides against a pair of flat surfaces 47 of the cam boss 46 to control the attitude of the locking pawl 40, thereby restricting the locking pawl 40 from swinging in the thickness direction of the lid body 11, thereby triggering proper fitting during assembly. The linear motion straight groove 19 is formed in a rectangular shape with the same width as the linear motion fitting start groove 18, and controls the attitude of the locking pawl 40, thereby causing the locking pawl 40 to move linearly and restricting the locking pawl 40 from swinging in the thickness direction of the lid body 11. In contrast, the swing arc groove 20 is formed in a substantially circular shape with a larger diameter than the cam boss 46, and forms a gap between it and the pair of flat surfaces 47 of the cam boss 46, thereby releasing the attitude control of the locking pawl 40 and allowing the locking pawl 40 to swing.

[0055] In the above configuration, when locking the lid body 10 fitted to the front face 2 of the container body 1, after the lid body 10 is fitted, the operation key of the lid body opening / closing device rotates the operation reel 31 of each locking mechanism 30 in one direction at an angle of 90°, and this rotation of the operation reel 31 causes each forward / backward moving bar 34 to advance from the reference position toward the peripheral wall of the lid body 11.

[0056] When the forward / backward movable bar 34 advances from the reference position toward the peripheral wall of the lid body 11, each locking claw 40 moves linearly toward the outside of the lid body, completely exposing the partially exposed pressure resin roller 50, at the stage where the pair of flat surfaces 47 of the cam boss 46 slide against and are guided by the linear movement linear groove 19 of the cam groove 17 (see Figure 3), and when the pair of flat surfaces 47 of the cam boss 46 define a gap between itself and the swinging arc groove 20 of the cam groove 17, it becomes swingable (see Figure 4) and swings from the lid body 11 side toward the cover plate 21 (see Figure 5), fitting and locking the pressure resin roller 50 into the locking pocket 4 of the container body 1 (see Figure 2).

[0057] At this time, the locking claw 40 does not swing and protrude toward the outside of the lid, but moves directly toward the deepest part 6 of the locking pocket 4 of the container body 1 and then swings, so the swinging range of the locking claw 40 can be minimized and the locking claw 40 can be properly fitted and locked into the deepest part 6 of the locking pocket 4.

[0058] Due to this engagement and locking of the locking claws 40, the lid 10 is precisely pulled and pressed into a specified position within the front surface of the container body 1, and is locked with the cover plate 21 aligned with the front surface 2 of the container body 1. During this pulling, the cam boss 46 fits into the swing arc groove 20 of the cam groove 17 and is positioned on an extension line EL of the inner surface of the front wall 5 that defines the locking pocket 4 of the container body 1. In other words, the cam boss 46 is positioned inward and outward from the lid body at the contact point between the inner surface of the front wall 5 that defines the locking pocket 4 and the pressure resin roller 50, so that force in the left-right direction of the locking pocket 4 (toward the back in FIG. 2) is more easily transmitted, and loss of the pulling force can be reduced.

[0059] When locking the lid body 10, and when unlocking the locking mechanism 30 and removing the lid body 10 from the front 2 of the container body 1, the operation key of the lid body opening / closing device rotates the operation reel 31 of each locking mechanism 30 in the other direction at an angle of 90°, and this rotation of the operation reel 31 causes each forward / backward moving bar 34 to retract from the forward position to its original reference position.

[0060] When the reciprocating bar 34 retreats from the advanced position to its original reference position, each locking claw 40 swings back from the cover plate 21 direction to the lid body 11 direction, separating the pressing resin roller 50 from the locking pocket 4 of the container body 1, when a pair of flat surfaces 47 of the cam boss 46 define a gap between it and the swinging arc groove 20 of the cam groove 17, and when the pair of flat surfaces 47 of the cam boss 46 slide against and guide the linear groove 19 of the cam groove 17, the locking claw 40 moves linearly in the direction of the inlet / outlet opening 12 of the lid body 10, retracting part of the pressing resin roller 50 that was completely exposed into the inlet / outlet opening 12.

[0061] At this time, the locking claws 40 do not return into the lid 10 while swinging, but rather swing and then move directly, which minimizes the swing range of the locking claws 40 and facilitates the returning operation of the locking claws 40. By returning the locking claws 40 in this manner, the lid 10 fitted onto the front face 2 of the container body 1 becomes removable, and the lid 10 is pulled out from the front face 2 of the container body 1 and removed by the lid opener / closer.

[0062] According to the above, the locking claw 40 can be made metal-free, thereby eliminating various adverse effects on the semiconductor wafers stored in the container body 1. Furthermore, the connecting bar 44, cam boss 46, resin pin 49, and pressing resin roller 50 of the locking claw 40 can be made thicker, thereby ensuring sufficient strength and durability and eliminating the risk of damage to the connecting bar 44, cam boss 46, and resin pin 49. Furthermore, instead of using a single long connecting bar 44 or cam boss 46, a pair of connecting bars 44 or cam boss 46 is used, which allows them to be molded short and prevents sinks during molding.

[0063] In addition, by reducing the swing range of the locking claw 40, the swing center of the locking claw 40 can be brought closer to the lid body side than in the conventional example, so that the swing center of the locking claw 40 can be positioned near the top and bottom of the contact point between the locking pocket 4 and the pressing resin roller 50, and this position change prevents loss of pulling force when locking.

[0064] Furthermore, because the locking claws 40 move linearly and then swing when locking, even if the locking pocket 4 of the container body 1 is deep, it is possible for the locking claws 40 to fit into and engage with the deepest part 6 of the locking pocket 4. This prevents the locking claws 40 from failing to fully engage with the locking pocket 4 of the container body 1, preventing deterioration of the sealing performance of the lid 10 and resulting in contamination of the semiconductor wafers inside the container body 1, and is expected to significantly prevent deterioration in the quality of the semiconductor wafers. In addition, because there is no need to deliberately form the locking pocket 4 deep, it is possible to improve the degree of freedom in the design of the container body 1.

[0065] Furthermore, because the locking pawl 40 moves linearly after swinging when unlocking, it is possible to prevent difficulty in returning the protruding locking pawl 40 and pressure resin roller 50 to their original position. Also, because the connecting bar 44 of the locking block 41 and the cam boss 46 approach each other, and the connecting bar 44 and the pressure resin roller 50 approach each other, the locking pawl 40 can be made smaller and its range of motion narrowed, facilitating force transmission. Furthermore, because the same cam boss 46 is fitted into the linear groove 19 for linear motion and the arc groove 20 for swing motion of the cam groove 17, rather than separate cam bosses 46, the cam groove 17 can be shortened.

[0066] In the above embodiment, a robotic flange for ceiling transportation may be detachably attached to the center of the ceiling of the container body 1, and gripping operation handles may be detachably attached to the outer surfaces of both side walls of the container body 1. In the above embodiment, the surface of the lid body 11 is covered by a pair of cover plates 21, but it may be covered by a single cover plate 21. In the above embodiment, the cam groove 17 for the locking mechanism 30 is cut out on the opposing surface of the locking mechanism guide block 16, but this is not limiting. For example, a flat, approximately rectangular cylindrical holder may be fitted to the tip end of each advance / retreat bar 34 and the locking claw 40, and both side walls of this holder may serve as guide members for the locking mechanism. Furthermore, the linear motion fitting start groove 18 of the cam groove 17 may be omitted, and instead, it may be divided into a linear motion groove 19 for linear motion and a circular motion groove 20 for swinging.

[0067] Furthermore, a required number of strength-enhancing ribs 37 may be formed on the front or back surface of the advancing / retreating bar 34. If necessary, a required number of strength-enhancing ribs 37 may be slidably brought into contact with the installation area 13 of the lid body 11 or the cover plate 21, thereby enabling the advancing / retreating bar 34 to smoothly advance and retreat without tilting in the thickness direction of the lid body 10. In the above embodiment, the resin pin 49 is fixed between both sides of the recess 48 of the locking block 41, but the resin pin 49 may also be rotatably mounted. Furthermore, the peripheral surface of the resin pin 49 may be cut out to form a pair of stepped portions located near both ends of the pressure resin roller 50, but this is not limitative and the surface may have no stepped portions. [Industrial Applicability]

[0068] The substrate storage container according to the present invention is used in the manufacturing fields of electric, electronic, precision equipment, semiconductors, and the like. [Explanation of symbols]

[0069] 1 Container body 2 Front (opening) 4 Lockable pockets 5 Front wall 6 Deepest Depths 10 Lid 11 Lid body 12 Outlet 13 Installation area 14 Door guide tube (door guide) 14A Rotation suppression tube 16 Guide block for locking mechanism (guide member for locking mechanism) 17 Cam groove 18 Linear motion mating start groove 19 Straight groove for linear motion 20. Oscillating arc groove 21 Cover plate 30 Locking mechanism 31 Operating reel (operating member) 34 Moving bar (moving member) 37 Strengthening rib 39 Connecting Claw 40 Locking claw 41 Locking Block 42 Plate piece 43 Protrusion 44 Connecting bar 45 Gap 46 Cam boss (cam protrusion) 47 Flat surface 48 recess 49 Resin pin 50 Pressing resin roller (resin roller) EL extension line

Claims

1. A substrate storage container comprising a lid body that fits into an opening of a container body capable of storing substrates, and a locking mechanism that locks the fitted lid body, The lid body includes a lid body that fits into the opening of the container body, and a plurality of guide members for the locking mechanism attached to the lid body, and a plurality of inlet / outlet openings that can face the locking pockets on the inner periphery of the opening of the container body are provided on the peripheral edge of the lid body, and the plurality of guide members for the locking mechanism are opposed to each other, and cam grooves are formed on the opposing surfaces thereof. The locking mechanism includes a plurality of reciprocating members that reciprocate inward and outward directions of the lid body by rotation of an operating member supported on the lid body, and a plurality of locking claws that, when the reciprocating members advance, protrude from the recesses in the lid body and are fitted into the locking pockets in the container body, and, when the reciprocating members retreat, return from the locking pockets in the container body to the recesses in the lid body; The locking claw includes a locking block that is sandwiched between a plurality of locking mechanism guide members of the lid body and is movable linearly inward and outward of the lid body, and is also swingable in the thickness direction of the lid body; a plurality of connecting bars that protrude from the locking block and are connected to the forward and backward moving members of the locking mechanism; and a plurality of cam protrusions that protrude from the locking block and are fitted into the cam grooves of the plurality of locking mechanism guide members.The locking block, the plurality of connecting bars, and the plurality of cam protrusions are integrally molded from a molding material containing a predetermined resin.A recess is formed in the locking block and a resin pin is installed between both sides of the recess.A resin roller that contacts the locking pocket of the container body is fitted onto this resin pin, and a plurality of flat surfaces are formed at predetermined intervals on the circumferential surface of the cam protrusion. This substrate storage container is characterized in that the cam groove of the guide member for the locking mechanism is divided into a linear groove for direct movement that contacts multiple flat surfaces of the cam protrusion of the locking claw to restrict the swing of the locking claw, and a circular groove for swing that is formed wide at the end of the linear groove for direct movement and allows the locking claw to swing.

2. 2. A substrate storage container according to claim 1, wherein the container body is formed as a front-open box capable of storing a plurality of semiconductor wafers, the lid body can be detachably fitted to the open front of the container body, a plurality of guide members for the locking mechanism are attached near the peripheral edge of the lid body of the lid body, and among the plurality of guide members for the locking mechanism, the guide member for the locking mechanism that is adjacent to the side of the lid body is integrated with a door guide.

3. 3. A substrate storage container according to claim 2, wherein when the locking mechanism locks the lid fitted to the front of the container body and retracts it into the container body, the cam protrusion of the locking claw is positioned near an extension line of the inner surface of the front wall that defines the locking pocket of the container body.

4. 4. A substrate storage container according to claim 1, 2, or 3, wherein an installation area for a locking mechanism is formed on both sides of the surface of the lid body of the lid, a cover plate covering the locking mechanism is attached to the lid body, the advancing / retreating member of the locking mechanism is bent in the thickness direction of the lid, and a strength-enhancing rib is formed on at least one of the front and back surfaces of this advancing / retreating member.

5. 5. A substrate storage container according to claim 1, wherein a plurality of connecting claws are formed with a cross section of an approximately semicircular arc on both sides of the tip of the advancing / retreating member of the locking mechanism, and the plurality of connecting claws are fitted into a plurality of connecting bars of the locking claw.

6. A substrate storage container as described in claim 5, wherein the locking block is formed in an approximately triangular shape in side view, with a plate piece having a bulging tip and a curved back surface, and a protrusion formed on the back surface of the plate piece, and connecting bars protrude from both sides of the protrusion to form a gap for a connecting claw between the plate piece and the locking block.

7. A substrate storage container as described in claim 6, wherein cam protrusions protrude from both sides of the end of the plate piece of the locking block, close to the connecting bar, and a recess is formed at the tip of the plate piece, and a resin pin close to the cam protrusions is installed between the two sides.

8. A substrate storage container as described in any one of claims 1 to 7, wherein a linear groove for linear motion of the cam groove is formed at the end thereof on the opposite side of the arcuate groove for swinging, and a linear fitting start groove for fitting with the cam protrusion of the locking claw is formed, and the swinging of the locking claw is restricted by contacting a plurality of flat surfaces of the cam protrusion with this linear fitting start groove.

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