Information processing device, program, and recovery support method

Abstract

To provide an information processing device, a program, and a recovery support method that support recovery of a heat treatment device.SOLUTION: In an information processing system in which a plurality of heat treatment devices and device controllers, information processing devices, and information processing terminals installed in a manufacturing factory are communicably connected via a network such as the Internet and a LAN, the information processing device 14 includes an operating status data collection unit 52, an operating status data storage unit 54 that stores operating status data for each of the heat treatment devices, and an operating status data providing unit 56 that provides list information of operation status data for the heat treatment device stored in the operation status data storage unit 54 as information to support recovery of the plurality of heat treatment devices when the operation of the plurality of heat treatment devices is forcibly stopped.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to an information processing device, a program, and a recovery support method. [Background technology]

[0002] For example, remote backup systems have been known for some time that can update backup data daily in response to the generation of business data, and that enable rapid recovery in the event of data loss due to operational errors or the occurrence of a disaster (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-204036 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique for assisting in the recovery of a heat treatment device. [Means for solving the problem]

[0005] One aspect of the present disclosure is An information processing device that is installed in an environment where it continues to operate even when a manufacturing factory where a plurality of heat treatment devices are installed is forced to stop the operation of the plurality of heat treatment devices, installed in the manufacturing plant The aforementioned an operation status data collection unit configured to collect operation status data of a plurality of heat treatment devices; Multiple an operation status data storage unit configured to store data for each heat treatment device; and the operation status data stored in the operation status data storage unit as information for supporting recovery of the plurality of heat treatment devices when the operation of the plurality of heat treatment devices is forcibly stopped. Multiple Heat Treatment Equipment Place an operational status data providing unit configured to provide list information of the operational status data; and the operation status data providing unit is configured to provide the worker with a list of the operation status data stored in the operation status data storage unit immediately before the operation of the plurality of heat treatment devices is forcibly stopped. It is an information processing device. [Effects of the Invention]

[0006] According to the present disclosure, a technique for supporting the recovery of a heat treatment apparatus can be provided. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a configuration diagram of an example of an information processing system according to an embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating a hardware configuration of an example of a computer. [Figure 3] FIG. 1 is a functional block diagram of an example of an information processing device according to an embodiment of the present invention. [Figure 4] 10 is a flowchart illustrating an example of processing by the information processing device according to the present embodiment. [Figure 5] FIG. 4 is a diagram illustrating an example of operational status data according to the embodiment. [Figure 6] 10 is a flowchart illustrating an example of processing by the information processing device according to the present embodiment. [Figure 7] 10 is a flowchart illustrating an example of processing by the information processing device according to the present embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0009] <System configuration> Fig. 1 is a configuration diagram of an example of an information processing system according to this embodiment. The information processing system 1 shown in Fig. 1 includes a heat treatment device 10 and an equipment controller 12 installed in a manufacturing factory 2. The information processing system 1 also includes an information processing device 14 installed in an environment where operation can continue even if a disaster occurs in the manufacturing factory 2 that forces the heat treatment device 10 to stop (e.g., an earthquake, a power outage, etc.). The environment in which the information processing device 14 is installed is, for example, a remote location that is sufficiently far away from the manufacturing factory 2.

[0010] The information processing system 1 also has an information processing terminal 16 that is operated by a worker who restores the heat treatment device 10 installed in the manufacturing factory 2, or by a manager who gives instructions to the worker to restore the heat treatment device 10.

[0011] The heat treatment device 10, the device controller 12, the information processing device 14, and the information processing terminal 16 are communicably connected via networks 18 and 20 such as the Internet and a LAN (Local Area Network). Furthermore, even if a disaster occurs at the manufacturing factory 2 and the network 18 becomes unusable, the information processing device 14 and the information processing terminal 16 can communicate via the network 20.

[0012] The heat treatment apparatus 10 is a semiconductor manufacturing apparatus, a film forming apparatus, or the like, and receives control commands according to a recipe from the apparatus controller 12 and executes the recipe processing. The progress of the recipe processing is managed in control units called steps. The progress of the recipe processing is represented by, for example, a step number and a step name.

[0013] 1, the heat treatment apparatus 10 may be equipped with an equipment controller 12, but it does not necessarily have to be equipped as long as it is connected to the apparatus for communication. The equipment controller 12 is a controller having a computer configuration that controls the heat treatment apparatus 10. The equipment controller 12 outputs control commands that control the control components of the heat treatment apparatus 10 according to a recipe.

[0014] The equipment controller 12 receives instructions for the heat treatment apparatus 10 from an operator and has a function of a man-machine interface (MMI) that provides information about the heat treatment apparatus 10 to the operator.

[0015] Under normal circumstances when no disaster has occurred, the equipment controller 12 periodically (e.g., every 10 seconds) transmits data (operating status data) indicating the operating status of the heat treatment apparatus 10 to the information processing apparatus 14. The operating status data is information including identification information of a recipe currently being executed by the heat treatment apparatus 10, identification information of a step indicating the progress of processing of the currently being executed recipe, and execution status information of the step.

[0016] If a power outage occurs due to a disaster, the heat treatment device 10 loses power and interrupts the processing of the recipe being executed. Also, the device controller 12 loses power and is unable to transmit the operating status data of the heat treatment device 10 to the information processing device 14.

[0017] During normal operation, the information processing device 14 periodically collects and stores operation status data of the heat processing devices 10 from the equipment controller 12 in the manufacturing factory 2. The operation status data of the heat processing devices 10 stored by the information processing device 14 is the most recent operation status data of each heat processing device 10 received from the equipment controller 12.

[0018] Therefore, even if a disaster occurs and the manufacturing factory 2 suffers a power outage, forcing the operation of the heat treatment device 10 to stop, the information processing device 14 stores the most recent operating status data of the heat treatment device 10 received from the device controller 12.

[0019] The information processing device 14 can provide a list of the most recent operational status data of the heat treatment devices 10 received from the device controller 12 before the disaster occurred to a worker or a manager as information to support the recovery of the plurality of heat treatment devices 10 installed in the manufacturing factory 2. The information to support the recovery of the plurality of heat treatment devices 10 installed in the manufacturing factory 2 may be provided by displaying it on a display or the like of the information processing device 14 or on a display or the like of the information processing terminal 16.

[0020] In this way, by referring to the list information of the most recent operational status data of the heat treatment apparatuses 10 that the information processing device 14 received from the equipment controller 12 before the disaster occurred, the worker or manager can easily check the processing of the recipe that the multiple heat treatment apparatuses 10 in the manufacturing factory 2 were executing when the disaster occurred. Furthermore, by checking the processing of the recipe that the multiple heat treatment apparatuses 10 in the manufacturing factory 2 were executing when the disaster occurred, the worker or manager can easily determine the priority of recovery of the multiple heat treatment apparatuses 10 whose operation was forcibly stopped due to the disaster.

[0021] 1 is just one example, and it goes without saying that there are various system configurations depending on the application and purpose. For example, the information processing system 1 can have various configurations, such as a configuration in which the equipment controller 12 of each heat treatment apparatus 10 is integrated into an equipment controller for multiple heat treatment apparatuses 10, or a configuration in which the equipment controller 12 is further divided.

[0022] <Hardware configuration> The device controller 12, information processing device 14, and information processing terminal 16 of the information processing system 1 shown in Fig. 1 are realized by a computer having a hardware configuration such as that shown in Fig. 2. Fig. 2 is a diagram showing the hardware configuration of an example computer.

[0023] 2 includes an input device 501, an output device 502, an external I / F (interface) 503, a RAM (random access memory) 504, a ROM (read only memory) 505, a CPU (central processing unit) 506, a communication I / F 507, and an HDD (hard disk drive) 508, all of which are interconnected by a bus B. The input device 501 and the output device 502 may be connected and used when necessary.

[0024] The input device 501 is a keyboard, mouse, touch panel, etc., and is used by an operator or the like to input various operation signals. The output device 502 is a display, etc., and displays the results of processing by the computer 500. The communication I / F 507 is an interface that connects the computer 500 to the network 18 or 20. The HDD 508 is an example of a non-volatile storage device that stores programs and data.

[0025] The external I / F 503 is an interface with an external device. The computer 500 can read and / or write data from and to a recording medium 503a such as an SD (Secure Digital) memory card via the external I / F 503. The ROM 505 is an example of a non-volatile semiconductor memory (storage device) that stores programs and data. The RAM 504 is an example of a volatile semiconductor memory (storage device) that temporarily stores programs and data.

[0026] The CPU 506 is a computing device that controls the entire computer 500 and realizes its functions by reading programs and data from storage devices such as the ROM 505 and HDD 508 onto the RAM 504 and executing the processes.

[0027] The device controller 12, information processing device 14, and information processing terminal 16 in FIG. 1 can realize various functions by the hardware configuration of the computer 500 in FIG.

[0028] <Functional configuration> The information processing device 14 of the information processing system 1 according to this embodiment is realized by, for example, functional blocks as shown in Fig. 3. Fig. 3 is a functional block diagram of an example of the information processing device according to this embodiment. Note that the functional block diagram of Fig. 3 omits illustration of components that are not necessary for explaining this embodiment.

[0029] The information processing device 14 in Figure 3 implements a collection setting storage unit 50, an operation status data collection unit 52, an operation status data storage unit 54, an operation status data providing unit 56, an operation reception unit 60, and an output control unit 62 by executing a program for the information processing device 14 (e.g., recovery support software, etc.).

[0030] The collection setting storage unit 50 stores collection settings required for the information processing device 14 to collect operation status data of the multiple heat treatment devices 10 installed in the manufacturing factory 2. The collection settings include information such as communication settings for communicating with the device controller 12 and settings for the timing of collecting operation status data.

[0031] The operation status data collection unit 52 periodically collects operation status data of the plurality of heat treatment devices 10 installed in the manufacturing factory 2 and stores the collected data in the operation status data storage unit 54. The operation status data of the plurality of heat treatment devices 10 installed in the manufacturing factory 2 is periodically stored in the operation status data storage unit 54.

[0032] The operation status data providing unit 56 provides a list of operation status data to the worker or manager who operates the information processing device 14 or the information processing terminal 16 as information to support the recovery of multiple heat treatment devices 10 in the manufacturing factory 2.

[0033] For example, if a disaster occurs and causes a power outage in the manufacturing factory 2, forcing the operation of the heat treatment apparatuses 10 to stop, the worker or manager can display a list of the operating status data of the multiple heat treatment apparatuses 10 in the manufacturing factory 2 on the information processing device 14 or the information processing terminal 16. The worker or manager does not need to approach the multiple heat treatment apparatuses 10 in the manufacturing factory 2 to check the processing of the recipe that was being executed when the disaster occurred.

[0034] By referring to the list of operating status data of multiple heat treatment devices 10 in the manufacturing factory 2 displayed on the information processing device 14 or the information processing terminal 16, the worker or manager can check the processing of the recipe that each heat treatment device 10 was executing when the disaster occurred and determine the priority of recovery for each heat treatment device 10.

[0035] The operation receiving unit 60 receives operations from users such as workers or managers. The output control unit 62 displays and outputs information on a display or the like of the information processing device 14 or the information processing terminal 16 in accordance with the operations received from users such as workers or managers. The output control unit 62 may output the information by email or print it out.

[0036] For example, the output control unit 62 outputs and displays on the display of the information processing device 14 or the information processing terminal 16 a list of the most recent operational status data of the heat treatment device 10 received from the equipment controller 12 before the disaster occurred.

[0037] <Processing> Under normal circumstances when no disaster has occurred, the information processing device 14 executes processing in the procedure shown in Fig. 4. Fig. 4 is a flowchart of an example of processing by the information processing device according to this embodiment. The multiple heat treatment devices 10 in the manufacturing factory 2 receive control commands according to recipes from their respective device controllers 12, and asynchronously execute processes according to the recipes.

[0038] In step S10, the operational status data collection unit 52 of the information processing device 14 reads out the collection setting from the collection setting storage unit 50. In step S12, the operational status data collection unit 52 determines whether it is time to collect operational status data based on the collection timing setting for operational status data included in the read-out collection setting.

[0039] The operation status data collection unit 52 repeats the process of step S12 until it determines that it is time to collect operation status data. If it determines that it is time to collect operation status data, the operation status data collection unit 52 performs the process of step S14.

[0040] In step S14, the operation status data collection unit 52, in accordance with the collection setting, collects operation status data of the plurality of heat treatment devices 10 installed in the manufacturing factory 2. The collected operation status data of the plurality of heat treatment devices 10 is stored in the operation status data storage unit 54 in step S16.

[0041] The operational status data of the multiple heat treatment apparatuses 10 stored in the operational status data storage unit 54 has a configuration, for example, as shown in Fig. 5. Fig. 5 is a configuration diagram of an example of operational status data according to this embodiment. The operational status data in Fig. 5 includes, as items, the apparatus name, process type, execution status, executed recipe name, executed sub-recipe name, executed step name, step elapsed time, and data collection results.

[0042] The apparatus name is an example of identification information for the heat treatment apparatus 10, such as the name of the heat treatment apparatus 10. The process type represents the type of process performed by the heat treatment apparatus 10. The execution state is an example of step execution state information, such as executing, paused, or preparing for processing. The execution recipe name is an example of identification information for the recipe being executed, such as the name of the recipe being executed. The execution sub-recipe name is an example of identification information for the sub-recipe being executed, such as the name of the sub-recipe being executed. The execution step name is an example of identification information for the step being executed, such as the step number and step name of the step being executed. The step elapsed time represents the time elapsed since the step started. The data collection result represents the success or failure of data collection.

[0043] The operational status data may further include items such as data collection date and time, recipe start date and time, step start time, heater temperature, or boat elevator position, but in order to reduce network load, it is desirable that the items included are the minimum necessary to determine the priority of recovery.

[0044] In step S18, the operational status data collection unit 52 determines whether or not to stop collecting operational status data. The operational status data collection unit 52 repeats the processes of steps S12 to S18 until it determines to stop collecting operational status data. When it determines to stop collecting operational status data, the operational status data collection unit 52 ends the process of the flowchart in FIG. 4.

[0045] According to the process of the flowchart in FIG. 4, the information processing device 14 can periodically collect and store operational status data of the plurality of heat treatment devices 10 in the manufacturing factory 2, such as that shown in FIG. 5, during normal times when no disaster has occurred.

[0046] For example, assume that a disaster occurs, causing a power outage at the manufacturing factory 2, forcing the operation of multiple heat treatment devices 10 at the manufacturing factory 2 to be stopped. The information processing device 14 stores the most recent operation status data of the multiple heat treatment devices 10 whose operation has been forcibly stopped, as shown in FIG.

[0047] The environment in which the information processing device 14 is installed is, for example, a remote location that is sufficiently far away from the manufacturing factory 2, so the information processing device 14 and the information processing terminal 16 are not affected by power outages, etc. The information processing device 14 and the information processing terminal 16 can communicate via the network 20 even if a disaster occurs at the manufacturing factory 2 and the network 18 becomes unusable.

[0048] An operator who restores the heat treatment device 10 installed in the manufacturing factory 2, or an administrator who gives instructions to the operator to restore the heat treatment device 10, operates the information processing device 14 or the information processing terminal 16 to request reference to a list of operating status data for the heat treatment device 10 installed in the manufacturing factory 2.

[0049] The information processing device 14 executes processing in accordance with, for example, the procedure shown in Fig. 6. Fig. 6 is a flowchart showing an example of processing by the information processing device according to this embodiment.

[0050] The operation status data providing unit 56 repeats the process of step S30 until it receives a request from an operator or a manager to refer to the list information of operation status data of the heat treatment apparatus 10 installed in the manufacturing factory 2. Furthermore, when it receives the reference request from an operator or a manager, the operation status data providing unit 56 performs the process of step S32.

[0051] In step S32, the operation status data providing unit 56 reads out operation status data of the plurality of heat treatment devices 10 in the manufacturing factory 2 for which the reference request has been made, for example, as shown in Fig. 5 , from the operation status data storage unit 54. In step S34, the operation status data providing unit 56 displays or outputs a list of the operation status data read out in step S32, thereby providing the worker or manager with information to support the recovery of the plurality of heat treatment devices 10 in the manufacturing factory 2 for which the reference request has been made.

[0052] For example, by referring to the list of operational status data shown in Figure 5, an operator or manager can check the recipe that was being executed when the heat treatment device 10 corresponding to each record was forced to stop operation due to a disaster, the progress of processing of that recipe, and the execution status.

[0053] The heat treatment apparatus 10 with the device name "Tool A" in Figure 5 was performing heat treatment when its operation was forcibly stopped, and an operator or manager can determine that there is a high possibility that the processing chamber is filled with gas.

[0054] For example, in order to restore the heat treatment apparatus 10 with the device name "Tool A" in FIG. 5, it is necessary to equip the apparatus with a gas mask to deal with the possibility of gas leakage, etc., and since it is unlikely that the wafers in the processing chamber can be reused, the priority of restoration is low.

[0055] The heat treatment apparatus 10 with the device name "Tool C" in Figure 5 was preparing for heat treatment when its operation was forcibly stopped, and an operator or manager can determine that there is a low possibility that the processing chamber is filled with gas.

[0056] For example, when restoring the heat treatment apparatus 10 with the apparatus name "Tool C" in FIG. 5, the possibility of gas leakage is low, there is no need to equip a gas mask, and there is a high possibility that the wafers in the processing chamber can be reused, so the priority of restoration is high.

[0057] In this way, a worker or manager who refers to the list of operation status data shown in Fig. 5 can easily determine the priority of recovery for the multiple heat treatment devices 10 installed in the manufacturing factory 2 from the list information of the operation status data in Fig. 5. By following the determined priority of recovery, the worker or manager can take prompt action, shorten the time it takes to recover and restart the manufacturing factory 2, and minimize damage.

[0058] The processing of the flowchart in Fig. 6 is performed by an operator or manager determining the priority of recovery of the plurality of heat treatment devices 10 installed in the manufacturing factory 2 from the list of operation status data shown in Fig. 5. The information processing device 14 may determine the priority of recovery of the plurality of heat treatment devices 10 installed in the manufacturing factory 2 from the list of operation status data shown in Fig. 5, for example, and provide the determined priority to the operator or manager.

[0059] Fig. 7 is a flowchart of an example of processing by the information processing device according to this embodiment. The processing in steps S50 to S52 is the same as steps S30 to S32 in Fig. 6. In step S54, the operation status data providing unit 56 determines the recovery priority of the plurality of heat treatment devices 10 in the manufacturing factory 2 for which a reference request has been made, based on the list information of operation status data read in step S52, and on a pre-set rule table or the like.

[0060] The rule base is set to determine, for example, a high priority for a heat treatment apparatus 10 that is highly likely to be able to recover reusable wafers, and a low priority for a heat treatment apparatus 10 that is low likely to be able to recover reusable wafers. Also, the rule base is set to determine, for example, a low priority for a heat treatment apparatus 10 that is highly likely to leak gas, and a high priority for a heat treatment apparatus 10 that is low likely to leak gas.

[0061] In step S56, the information processing device 14 can provide a worker or manager with information to support the recovery of the multiple heat treatment devices 10 in the manufacturing factory 2 by displaying or outputting a list of operating status data and the priority of recovery of the multiple heat treatment devices 10 in the manufacturing factory 2 determined in step S54.

[0062] According to the information processing system 1 of this embodiment, even in the event of a disaster or accident that forces the heat treatment device 10 to shut down at the manufacturing factory 2, a technology can be provided that supports the recovery of the heat treatment device 10 at the manufacturing factory 2.

[0063] Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the present invention. [Explanation of symbols]

[0064] 1. Information Processing Systems 10 Heat treatment device 12 Equipment Controller 14 Information processing equipment 16 Information processing terminal 18, 20 Network 52 Operational Status Data Collection Department 54 Operational status data storage section 56 Operational Status Data Provision Department

Claims

1. An information processing device that is installed in an environment that continues to operate even when a manufacturing factory in which multiple heat treatment devices are installed is forced to stop operation of the multiple heat treatment devices, an operation status data collection unit configured to collect operation status data of the plurality of heat treatment devices installed in the manufacturing plant; an operation status data storage unit configured to store the operation status data for each of the plurality of heat treatment devices; an operation status data providing unit configured to provide a list of the operation status data of the plurality of heat treatment devices stored in the operation status data storage unit as information for supporting recovery of the plurality of heat treatment devices when the operation of the plurality of heat treatment devices is forcibly stopped; and The operation status data providing unit is configured to provide a worker with a list of the operation status data stored in the operation status data storage unit immediately before the operation of the plurality of heat treatment devices is forcibly stopped. An information processing device characterized by:

2. The operation status data collection unit is configured to periodically collect information from the plurality of heat treatment devices necessary for an operator to determine the priority of recovery of the plurality of heat treatment devices.

2. The information processing device according to claim 1,

3. The operational status data includes identification information of a recipe being executed by the heat treatment apparatus, identification information of a step indicating the progress of the process of the recipe, and execution status information of the step.

3. The information processing device according to claim 1, wherein:

4. The operation status data providing unit is configured to provide information indicating the priority of recovery of the plurality of heat treatment devices based on the operation status data of the plurality of heat treatment devices stored in the operation status data storage unit.

4. The information processing device according to claim 1, wherein:

5. A computer installed in an environment where a manufacturing factory in which multiple heat treatment devices are installed continues to operate even when the environment in which the operation of the multiple heat treatment devices is forcibly stopped, an operation status data collection step of collecting operation status data of the plurality of heat treatment devices installed in the manufacturing plant; an operation status data storage step of storing the operation status data for each of the plurality of heat treatment devices; an operation status data providing step of providing a list of the operation status data of the plurality of heat treatment devices stored in the operation status data storing step as information for supporting recovery of the plurality of heat treatment devices when the operation of the plurality of heat treatment devices is forcibly stopped; Execute The operation status data providing step provides a worker with a list of the operation status data stored in the operation status data storing step immediately before the operation of the plurality of heat treatment devices is forcibly stopped. program.

6. A recovery support method executed by an information processing system having a plurality of heat treatment devices installed in a manufacturing factory, an information processing device communicably connected to the plurality of heat treatment devices, and an information processing terminal communicably connected to the information processing device, wherein the information processing device is installed in an environment in which the operation of the plurality of heat treatment devices continues even when the manufacturing factory is in an environment in which the operation of the plurality of heat treatment devices is forcibly stopped, collecting operational status data of the plurality of heat treatment devices; storing the operation status data for each of the plurality of heat treatment devices; When the operation of the plurality of heat treatment devices is forcibly stopped, providing the information processing terminal with a list of the operation status data of the plurality of heat treatment devices stored most recently before the operation of the plurality of heat treatment devices is forcibly stopped as information for supporting recovery of the plurality of heat treatment devices; the information processing terminal displays a list of the operation status data for each of the heat treatment devices; and A recovery support method having the above.

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